U.S. patent number 3,710,001 [Application Number 05/172,136] was granted by the patent office on 1973-01-09 for vacuum tight high-frequency coaxial lead-through capable of handling high power.
This patent grant is currently assigned to Societe de Traitements Electrolytiques et Electrothermiques. Invention is credited to Andre Besson.
United States Patent |
3,710,001 |
Besson |
January 9, 1973 |
VACUUM TIGHT HIGH-FREQUENCY COAXIAL LEAD-THROUGH CAPABLE OF
HANDLING HIGH POWER
Abstract
A vacuum-tight, coaxial, high-frequency lead-through with high
power handling capability, cooled by circulation of a liquid,
including: an outer and a central copper conductor vacuum-tightly
connected together by means of a ceramic cylindrical component,
whose one end is brazed to a sleeve integral with a disk-shaped
copper component vacuum-tightly attached to the central conductor,
and whose other end is brazed to a sleeve integral with another
disk-shaped copper component attached to the external
conductor.
Inventors: |
Besson; Andre (Massy,
FR) |
Assignee: |
Societe de Traitements
Electrolytiques et Electrothermiques (N/A)
|
Family
ID: |
22626519 |
Appl.
No.: |
05/172,136 |
Filed: |
August 16, 1971 |
Current U.S.
Class: |
174/15.3;
174/50.55; 174/152GM; 174/31R; 174/50.61 |
Current CPC
Class: |
H01B
17/30 (20130101) |
Current International
Class: |
H01B
17/26 (20060101); H01B 17/30 (20060101); H01b
017/26 () |
Field of
Search: |
;174/15BH,16BH,17.05,18,31R,50.55,50.56,50.59,50.6,50.61,50.63,151,152R |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Askin; Laramie E.
Claims
What is claimed as new and desired to be secured by Letters Patent
of the United States is:
1. A coaxial, high-frequency, high power and vacuum-tight
lead-through including:
a cylindrical central conductor of a high-conductivity metal;
a cylindrical shielding coaxial with said conductor and made of
said metal;
an insulating hollow ceramic cylinder having the outer surfaces of
its two extremities metallized for allowing the making of metal to
ceramic junctions and an inner diameter greater than that of the
central conductor and an outer diameter smaller that that of said
shielding;
a first component, referred to as lead-through base, made of said
metal and comprising:
a disk shaped portion having a central aperture vacuum-tightly
joined to said central conductor,
a peripheral cylindrical first sleeve portion of predetermined
thickness integral with and extending perpendicularly to said disk
portion and having an inner diameter substantially equal to the
outer one of said cylinder, said first sleeve portion being vacuum
tightly joined to one of said metallized surfaces of said latter,
and
an annular groove of predetermined depth formed in said disk
portion at its junction with said first sleeve portion for
providing said latter with an elastic portion; and
a second component made of said metal comprising:
an annular solid disk-shaped portion vacuum tightly joined to said
shielding and having a central opening whose diameter is
approximately equal to the inner one of said cylinder,
a cylindrical second sleeve portion, having the same shape as said
first sleeve, integral with and extending perpendicularly to said
annular disk portion and having an inner diameter substantially
equal to the outer one of said cylinder, said second sleeve portion
being vacuum-tightly joined to said latter, and
two annular grooves of predetermined depths formed in said annular
disk portion at both sides of its junction with said second sleeve
portion for providing said latter with an elastic portion;
whereby said first and said second sleevesensure a vacuum-tight
metal to ceramic seal and their elastic portions ensure
compensation for the difference in thermal dilatation of said metal
and said ceramic.
2. Lead-through as claimed in claim 1, wherein said central
conductor is hollow and wherein said lead-through further comprises
a second hollow cylindrical conductor of said metal, parallel to
said central conductor, traversing said annular disk portion and
electrically and mechanically connnected to the outer surface of
said shielding, whereby providing said lead-through and elements
eventually connected thereto with means for cooling by circulation
of a liquid through said hollow central and second conductors.
3. Lead-through as claimed in claim 1, wherein said central
conductor is hollow and therein said shielding forms the inner wall
of a closed hollow cylindrical vessel whose outer wall is coaxial
therewith, said vessel being provided with inlet and outlet tubes
for cooling said lead-through by circulation of a liquid through
said hollow central conductor and said vessel.
4. Lead-through as claimed in claim 1, wherein the thickness of
said sleeve portions is equal to or less that one-third of the
depth of said grooves
5. Lead-through as claimed in claim 1, further comprising a flange
for vacuum-tight mounting to a vacuum-tight chamber, said flange
being vacuum-tightly joined to said second component.
6. Lead-through as claimed in claim 5, wherein said flange is made
of stainless steel.
7. Lead-through as claimed in claim 5, wherein said metal is
copper.
8. Lead-through as claimed in claim 1, of the type in which said
shielding is insulated from ground, said lead-through further
comprising:
a second ceramic insulating cylinder having the outer surfaces of
its two extremities metalized for allowing the making of metal to
ceramic junction and an inner diameter greater than the outer one
of said shielding;
a third cylindrical sleeve portion of said metal and of
predetermined thickness formed integrally with and extending
perpendicularly to said annular disk portion, at the periphery of
said latter and opposite to said second sleeve portion, said third
sleeve portion having an inner diameter approximately equal to the
outer one of said second cylinder and being vacuum-tightly joined
to one of said metalized surfaces;
a first annular component of predetermined height, referred to as
wedge, made of said metal and having an inner diameter
approximately equal to and an outer diameter smaller than that of
said second cylinder, said first wedge, having at least one radical
opening being inserted between said annular disk portion and the
adjoining extremity of said second cylinder;
a flange for connecting said lead-through to a vacuum chamber;
a fourth cylindrical sleeve portion of said metal and of said
thickness forming part of a second annular component integral with
said flange, said fourth sleeve, having the same shape as said
third one, being vacuum-tightly joined to the other metallized
surface of said second cylinder; and
a second wedge identical to said first one inserted between said
flange and the adjoining extremity of said second cylinder.
9. Lead-through as claimed in claim 8, wherein said metal is
copper.
10. Lead-through as claimed in claim 8, wherein said flange is of
stainless steel.
Description
BACKGROUND OF THE INVENTION
The present invention relates to coaxial high-frequency feed-or
lead-throughs capable of handling high power which provide an
effective seal for high and ultra-high vacuum devices, and relates,
more particularly, to lead-throughs of this kind which are colled
by the circulation of a liquid such as water.
In devices of this kind, the conductors are generally made of a
metal or alloy having a coefficient of thermal expansion at least
approximately equal to or very close to that of the insulator being
used. The vacuum-tight connection of the insulator, generally a
ceramic or glass, to a conductor of this kind is obtained by
brazing the surfaces of the ceramic insulator to the conductors,
said surfaces having been previously metallized.
However, alloys of this kind, which generally comprise iron (Fe),
nickel (Ni) and cobalt (Co), are ferromagnetic and have a very high
electrical resistivity. For these reasons it is impossible to use
metals and alloys of this kind for the production of conductor
elements for a high-power, high frequency lead-through.
It has equally been proposed that the conductor element of this
kind of lead-through should be made of a metal presenting good
electrical conductivity, such as copper (Cu), although this metal
has a coefficient of thermal expansion (180.times. 10.sup.-.sup.7
.degree.C.sup.-.sup.1) which is very much higher than that of
ceramic (60.times. 10.sup.-.sup.7 .degree.C.sup.-.sup.1), and this
metal is generally connected to the ceramic by means of
intermediate components of a different alloy of metals having a
coefficient of thermal expansion close to that of the ceramic, such
as Kovar as was shown in U.S. Pat. No. 2,895,110 filed Aug. 16,
1956. However, this method has the drawback that it requires two
separate brazing operations which have to be carried out at
radically different temperatures; in particular, a first brazing
operation to connect the conductor elements of copper to the
intermediate components of said alloy, and a second brazing
operation to connect the intermediate components of said alloy to
the metallized surfaces of the ceramic insulator.
SUMMARY OF THE INVENTION
The device in accordance with the invention does not present the
abovedescribed drawbacks. In this device a vacuum-tight bond is
achieved between the copper and the ceramic with the help of copper
components of a particular shape.
In accordance with the invention, there is provided a coaxial,
high-frequency, high-power and vacuum-tight lead-through
including:
A cylindrical central conductor of a high-conductivity metal;
A cylindrical shielding coaxial with said conductor and made of
said metal;
An insulating hollow ceramic cylinder having the outer surfaces of
its two extremities metallized for allowing the making of metal to
ceramic junctions and an inner diameter greater than that of the
central conductor and an outer diameter smaller than that of said
shielding;
a first component, referred to as lead-through base, made of said
metal and comprising:
a disk shaped portion having a central aperture vacuum-tightly
joined to said central conductor,
a peripheral cylindrical first sleeve portion of predetermined
thickness, integral with and extending perpendicularly to said disk
portion and having an inner diameter substantially equal to the
outer one of said cylinder, said first sleeve portion being vacuum
tightly joined to one of said metallized surfaces of said latter,
and
an annular groove of predetermined depth formed in said disk
portion at its junction with said first sleeve portion for
providing said latter with an elastic portion; and
a second component made of said metal comprising:
an annular solid disk-shaped portion vacuum tightly joined to said
shielding an having a central opening whose diameter is
approximately equal to the inner one of said cylinder,
a cylindrical second sleeve portion, having the same shape as said
first sleeve, integral with and extending perpendicularly to said
annular disk portion and having an inner diameter substantially
equal to the outer one of said cylinder, said second sleeve portion
being vacuum-tightly joined to said latter, and
two annular grooves of predetermined depths formed in said annular
disk portion at both sides of its junction with said second sleeve
portion for providing said latter with an elastic portion;
whereby said first and said second sleeves ensure a vacuum-tight
metal to ceramic seal and their elastic portions ensure
compensation for the difference in thermal dilatation of said metal
and said ceramic.
BRIEF DESCRIPTION OF THE DRAWINGS.
The foregoing and other objects, features and advantages of the
invention will be more fully understood by reference to the
appended claims and to the following detailed description when read
in conjunction with the accompanying drawings, wherein:
FIG. 1 is a partially sectioned view of an embodiment of a
lead-through in accordance with the invention;
FIG. 2 is a plan view of the device of FIG. 1;
FIG. 3 is a partially sectioned view of another embodiment of a
lead-through in accordance with the invention; and
FIG. 4 is an enlarged view of a fragment of FIG. 1.
DESCRIPTION OF THE PREFERRED EMBODIMENTS.
In FIG. 1, the reference numeral 1 indicates a hollow copper tube
forming the external or outer conductor together with a cylindrical
copper shielding 2 and 11 electrically connected and integrally
secured thereto. A central conductor 10 disposed coaxially in
relation to the shielding 2 and 11. is likewise made in the form of
a hollow tube. The two tubes 1 and 10 form part of a cooling
circuit through which a liquid such as water, for example, flows.
The central conductor 10 is connected integrally to a solid
component 3 referred to as the lead-through base and shown in a
more detailed manner by FIG. 4. Component 3 comprises a portion 12
of disk shape and a relatively thin outer cylindrical sleeve 13
(thickness e) integral with 12 for connection by brazing to a
cylindrical ceramic insulator 4 so that the sleeve 13 surrounds its
metallized surface and lower face of disk 12 is in contact with it.
The lead-through base 3 furthermore comprises, at the base of the
sleeve 13, an annular groove 14 (see FIG. 4) formed in the
disk-shaped portion 12 providing a certain degree of elasticity to
the sleeve 13 at the part thereof which neighbors the groove 14.
The depth (D) of the groove 14 and the thickness (e) of the sleeve
13 are chosen us a function of the diameter (.phi.) of the latter
in order to allow compensation of the differences in thermal
expansion between the lead-through base 3 of copper and the ceramic
insulator 4 by deforming the portion of sleeve 13 facing the groove
14. By way of example, for a given diameter .phi. excellent results
have been obtained with a depth of groove D equal to or greater
than 0.06 .phi. and a thickness equal to or less than 0.02 .phi.
and generally not over 4 mm.
The copper skirt 13 is brazed to the external metallized surface of
a ceramic insulator 4 in the form of a hollow cylinder. This
brazing will be carried out with the help of a hoop element
surrounding the skirt externally and having a coefficient of
thermal expansion slightly smaller than that of the ceramic. The
brazing or flux metals used here will preferably be a metal alloy
having a low vapor pressure (gold, copper and silver); this will
allow the lead-through to operate under molecular vacuum
conditions. Advantageously, the brazing metal used will be
decarbonized eutectic copper-silver (Cu-Ag) alloy.
The insulating ceramic cylinder 4 is attached at its other end to a
sleeve 15 forming part of a solid annular disk-shaped copper
component 5 having a central circular opening whose diameter is
substantially equal to the inner diameter of ceramic cylinder 4 and
which is vacuum-tightly joined to the external conductor, that is
to say to the shielding 2 and 11, and to the tube 1, for example by
brazing. The disk 5 likewise contains grooves 16 formed therein at
both sides of the base of sleeve 15 and having the same profile and
function as the groove 14 described earlier. The component 5 can be
attached directly in a vacuum tight fashion to a flange which
enables the lead-through to be vacuum-tightly assembled with the
enveloppe of the vacuum-chamber, if the latter and the external
conductor 1, 2 and 11 have been earthed (single-pole lead-through).
If this is not the case, it is possible to use another cylindrical
insulator element 7 between the external conductor and the
flange.
In FIG. 1, the component 5, here referred to as the lead-through
center, likewise comprises a thin skirt 17 integral therewith
designed for attachment to one end of the ceramic cylindrical
insulating component 7. The cylindrical component 7 is, at its
other end, attached by brazing to a sleeve 8 which forms an
integral part of an annular component 18, of copper, which is
referred to as the brazing lip. This intermediate component 18
between flange 9 and insulator 7 is used to make all junctions with
the insulator of the same kind, i.e. ceramic to copper, as this
allows simultaneous brazing of all of them.
The annular component 18 is separately brazed to a flange 9
(preferably of stainless steel) with a flux metal having a higher
fusion temperature than that of the ceramic to copper junction.
This flange 9 allows the aforedescribed lead-through to be
assembled upon the vacuum-chamber in a vacuumtight manner.
The brazing of sleeve 17 of the disk 5 to the ceramic component 7
on the one hand, and the brazing of the ceramic component 7 to the
sleeve of annular component 18, on the other, are carried out in
the same way as the brazing of the lead-through base 3 to component
4 hereinbefore described. However, because of the large diameter
.phi. of the sleeves 17 and 18, the distance D between the disk 5
and the component 7, on the one hand, and on the other hand between
the flange 9 and the component 7, are substantial and it is
necessary to interpose annular metal components 6 called wedges,
between these elements in order to withstand the thrust, due to
atmospheric pressure, exerted by the component 5 upon the ceramic
component 7, since the thin sleeves do only ensure a vacuumtight
seal and not mechanical rigidity. These wedges 6 allow the
reduction of the thickness of the disk-shaped portion of component
5 and of the flange 9, as this thickness, which has to be greater
than the depth of the groove D if the latter is formed within the
component itself would make its weight excessive. These wedges 6
are integral neither with the components 5 and 18 or 9, nor with
the ceramic insulator 7, and are designed in fact in such a fashion
that they have no contact with the metallized surfaces of the
ceramic components and that they permit relative displacements
stemming from the differential expansion between components 5 and
7. They comprises one or more openings 19 in order to enable the
interior of the sleeves 8 and 17 and the space between these latter
and the wedges 6, to be degassed and pumped.
It should be borne in mind that a lead-through of this kind has a
preferred direction of operation, that is to say that the bottom
part (considered in the figures) should have a lower pressure than
the top part, because in this direction it will withstand pressure
difference of several tens of bars whilst in the opposite direction
it will only withstand about 5 bars.
FIG. 2 illustrates a plan view of the lead-through of FIG. 1.
FIG. 3 illustrates another embodiment of the lead-through in
accordance with the invention, in which the external conductor is
made up from a single hollow cylindrical element 20, closed and
traversed by a cooling liquid, this element replacing the tube 1
and the screen 2 and 11, of FIG. 1. The walls of this element 20
are brazed to the component 5 in the same manner as the shielding 2
and 11 was in FIG. 1, however this time the component 5 contains
holes 21 facing parts 20, which allow the water to circulate
between the interior and exterior of the enclosure.
Lead-throughs of this kind have a very rigid solid basis which will
nevertheless withstand temperature difference and gradients of an
extremely high order, such as are encoutered in high-frequency
furnaces or ovens, with cooled conductors.
Moreover, this rigidity provides excellent mechanical attachment of
the central and outer conductors, on the one hand, in relation to
one another and, on the other, in relation to their respective
ceramic locations. This excellent fixing ensures high accuracy in
the axial positioning of the two elements, this making it possible
to reduce the radial interval between them and also to achieve a
low inherent impedance and maximum length in the conductors and
shielding arrangements at either side of the lead-through.
The lead-through can be operated in all cases where high powers
have to be transmitted at high frequency (up to 2000 Amp. at 10 KV
between environments which are sealed off from one another and have
different prevailing pressures; and, particularly, towards the
interior of a chamber which may even be at a vacuum of molecular
order).
While in this description of the invention only certain presently
preferred embodiments have been illustrated and described by way of
example, many modifications will occur to those skilled in the art
and it therefore should be understood that the appended claims are
intented to cover all such modifications as fall within the true
spirit and scope of the invention.
* * * * *