U.S. patent number 3,702,416 [Application Number 05/023,184] was granted by the patent office on 1972-11-07 for ion source having a uniform radial density.
Invention is credited to Lucien Bex, Jean Faure, Roger Vienet.
United States Patent |
3,702,416 |
Bex , et al. |
November 7, 1972 |
ION SOURCE HAVING A UNIFORM RADIAL DENSITY
Abstract
The source comprises an ionization chamber into which the gas to
be ionized is introduced, a cathode placed at the center of an
intermediate electrode provided within an orifice for the passage
of electrons, an anode provided with a hole for the passage of
ions, a plasma-expansion control electrode which is electrically
insulated from the anode and brought to a negative potential with
respect to the anode potential, and an ion extraction
electrode.
Inventors: |
Bex; Lucien (78 Les
Clayes-sour-Bois, FR), Faure; Jean (78 Les
Essarts-le-Roi, FR), Vienet; Roger (91
Gif-Sur-Yvette, FR) |
Family
ID: |
9031993 |
Appl.
No.: |
05/023,184 |
Filed: |
March 27, 1970 |
Foreign Application Priority Data
Current U.S.
Class: |
315/111.51;
313/231.31; 315/111.81; 313/230; 313/359.1 |
Current CPC
Class: |
H01J
27/12 (20130101) |
Current International
Class: |
H01J
27/02 (20060101); H01J 27/12 (20060101); H01j
007/24 () |
Field of
Search: |
;313/63,230 ;250/41.9SB
;315/111 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lake; Roy
Assistant Examiner: Demeo; Palmer C.
Claims
What we claim is:
1. An ion source having a practically uniform radial density
comprising an ionization chamber into which a gas to be ionized is
introduced, an intermediate electrode, an anode spaced therefrom
and forming with said electrode said ionization chamber, said
intermediate electrode having an orifice for the passage of
electrons into said chamber, a cathode upstream of said
intermediate electrode facing said orifice in said intermediate
electrode, said anode being downstream from said intermediate
electrode, said anode having an orifice for the passage of ions
therethrough, a plasma-expansion control electrode downstream of
and electrically insulated from said anode and at a negative
potential with respect to said anode and an ion extraction
electrode downstream from said control electrode.
2. An ion source according to claim 1, said expansion control
electrode having an internal surface of a material preventing
undesirable polarization of the internal surface.
3. An ion source according to claim 1, said expansion control
electrode having an internal surface coated with a gold film.
4. An ion source according to claim 1, said control electrode
having an internal surface at a negative electric potential equal
to that of said intermediate electrode.
Description
This invention relates to an ion source having a uniform radial
density.
One of the important parameters to be taken into consideration when
constructing an ion source is the number of ions available at the
outlet of the source, a desirable objective being to obtain as
large a number of ions as possible. These ions are usually
accelerated and, in order to reduce the losses of ionized
particles, it is accordingly essential to ensure that the beam of
ions derived from the source should correspond to predetermined
characteristics which have been established as a result of
theoretical and experimental studies. In fact, the ion beam must
have on the one hand a substantial diameter and on the other hand a
uniform radial density at the outlet of the source. A large beam
diameter can be obtained by allowing the ion plasma to spread as
soon as it has been formed in the ion source. The ions must then be
extracted so that they form at the outlet of the source a parallel
beam which has a uniform radial density.
Parallel beams of large diameter have been obtained by making use
of ion sources of the "duoplasmatron" type in which a high-density
plasma of ions and electrons is formed between an electrode and an
anode pierced by a hole through which the ions formed are extracted
by means of an extraction electrode which is brought to a very high
negative electric potential of several tens of kilovolts. At the
outlet of the anode hole, a unipotential cylindrical electrode
known as a plasma expansion control electrode which is brought to
the same potential as the anode permits the expansion of said
plasma. However, sources of this type cannot operate satisfactorily
if there is no oxidation of the internal surface of the expansion
control electrode which results in a certain degree of surface
polarization of this latter. Tests carried out with a source of
this type, the internal surface of which was coated with a gold
film in order to prevent oxidation, have shown that the source was
only capable of emitting a beam having a small diameter. Although
it has proved feasible to operate sources of this type by means of
surface polarization, the operating conditions are erratic and
uncertain since this polarization cannot be controlled.
The invention provides a device which meets practical requirements
more effectively than comparable devices of the prior art,
particularly by virtue of the fact that it is not attended by the
disadvantage referred-to above, namely inhomogeneity of radial
density of the ion beam.
More specifically, this invention is directed to an ion source
having a practically uniform radial density, characterized in that
said source comprises an ionization chamber into which the gas to
be ionized is introduced, a cathode placed at the center of an
intermediate electrode provided with an orifice for the passage of
electrons, an anode provided with a hole for the passage of ions, a
plasma-expansion control electrode which is electrically insulated
from the anode and brought to a negative potential with respect to
the anode potential, an ion extraction electrode .
A better understanding of the invention will be gained from the
following description of one embodiment of the invention which is
given by way of non-limitative example, reference being made to the
accompanying drawings, wherein :
FIG. 1 is a sectional view of the ion source ;
FIG. 2 is an enlarged view showing a portion of the ion source
;
FIGS. 3 and 4 are curves representing the radial density of the
ions as a function of the distance from the beam axis as obtained
respectively by means of the ion source in accordance with the
present invention and by means of a source of the prior art, the
extraction electrode being maintained at the same potential in both
cases.
The source which is illustrated in FIGS. 1 and 2 corresponds more
especially to the production of a proton beam. Hydrogen is
accordingly introduced in the chambers 1 and 15 through an orifice
which is not shown in FIGS. 1 and 2. The chamber 1 comprises a
cathode 2 and its means 3 for supplying electric current. The
chamber 1 is delimited by the envelope of a hollow cylinder 4 which
terminates at one end in a cone frustum having the same axis as
said cylinder and at the other end in a disc provided with two
insulated lead-in bushings for the supply of electric current. A
large quantity of electrons is discharged from the chamber 1
through an outlet 5 and produces intense ionization within the
chamber 15. A magnetic coil 6 confines the plasma within the zone
of the hole 8 of the anode 7 ; said anode is placed at right angles
to the axis of the member 4. A seal 9 of either the toric or
cylindrical type and formed of electric insulating material serves
to insulate the anode 7 from the chamber 1. A cylinder 10 which
constitutes the expansion control electrode is insulated
electrically from said anode 7 by means of an insulator 11. An
electric conductor 12 serves to polarize said cylinder 10 at an
electric potential which is different from that of the anode 7
which is usually at zero potential. An extraction electrode 13,
which is polarized at a very high negative voltage, accelerates the
ions which are formed. That portion of the ion source which is
located downstream of the anode 7 is maintained under a vacuum by
means of a vacuum pump which is not shown in FIGS. 1 and 2. The
member 14 is an electrode which is connected electrically to the
cylinder 10.
In the case of the proton source which is illustrated in FIGS. 1
and 2, the potentials applied to the different electrodes can be as
follows :
-- cathode 2 : - 120 V
-- anode 7 : 0 V
-- expansion control electrode 10 : - 60 V
-- electrode 4 : - 60 V
-- extraction electrode : - 45 kV.
The means employed for polarizing the portions 4, 7 and 13 are not
illustrated in FIGS. 1 and 2.
The principle of operation of the ion source in accordance with the
invention can be understood from the following reasoning. If the
expansion control electrode 10 is at the same potential as the
anode 7 which is usually zero, as is the case with ion sources of
the prior art, all the electrons of the plasma, which is formed in
the ionization chamber 15, are collected by the anode 7 and the
electrode 10. These electrons are directed towards the walls of the
expansion electrode 10 and carry along the ions which recombine in
contact with said electrode. This results in a reduction in the ion
density which is available for the extraction of the beam
throughout the chamber and this reduction is particularly
substantial away from the axis. The radial density of the ion beam
thus obtained is then non-uniform.
On the other hand, when the expansion control electrode 10 is
polarized at a negative value as in the ion source according to the
present invention, the electrons which were initially directed
towards the internal wall of the expansion control electrode at a
high velocity together with the entrained ions now have a much
lower scattering velocity ; this results in an increase in electron
density and consequently in ion density as well as uniformity of
plasma density.
In FIGS. 3 and 4, the radial density of the ion beam as expressed
in ma.mm.sup..sup.-2 is represented as a function of the distance
to the center of the beam as obtained by means of an ion source
respectively in accordance with the invention (as shown in FIG. 3)
and of a known type (as shown in FIG. 4). These curves are obtained
by providing the extraction electrode with an interception plate
which is pierced along a diameter with holes having a spacing of 1
mm and a diameter of 0.2 mm. Each pencil beam of ions thus obtained
is scanned by means of a slot which is displaced at right angles to
the optical axis of the beam. A comparison of the curves of FIGS. 3
and 4 clearly shows the improvements which are provided by the
invention : on the one hand, the radial density of the beam is
uniform and, on the other hand, the total number of ions is
greater, which means that the ion losses have been reduced to a
considerable extent.
It is to be understood that this invention is not limited solely to
the embodiment which has been described by way of explanation with
reference to the accompanying drawings but that this patent also
extends to alternative forms of all or part of the arrangements
hereinabove described which remain within the scope of equivalent
means as well as to all applications of such arrangements. For
example, the expansion control electrode has been represented by a
cylinder but it remains apparent that the shape of the electrode
may be adapted to the desired results.
* * * * *