U.S. patent number 3,700,950 [Application Number 05/140,481] was granted by the patent office on 1972-10-24 for x-ray tube.
This patent grant is currently assigned to Tokyo- Shibaura Electric Co., Ltd.. Invention is credited to Terasawa Michitaka.
United States Patent |
3,700,950 |
Michitaka |
October 24, 1972 |
X-RAY TUBE
Abstract
An X-ray tube whose vacuum vessel contains a target made of
electrical insulation material, a source of charged particles and
an electrode for accelerating charged particles emitted from said
source wherein the target is impacted by a beam of charged
particles thus accelerated so as to produce soft X-rays of
particularly great intensity.
Inventors: |
Michitaka; Terasawa (Yokohama,
JA) |
Assignee: |
Tokyo- Shibaura Electric Co.,
Ltd. (Kawasaki-shi, JA)
|
Family
ID: |
12538284 |
Appl.
No.: |
05/140,481 |
Filed: |
May 5, 1971 |
Foreign Application Priority Data
|
|
|
|
|
May 8, 1970 [JA] |
|
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45/38908 |
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Current U.S.
Class: |
378/140;
378/143 |
Current CPC
Class: |
H01J
35/112 (20190501); H01J 35/04 (20130101) |
Current International
Class: |
H01J
35/04 (20060101); H01J 35/00 (20060101); H01J
35/08 (20060101); H01j 035/08 () |
Field of
Search: |
;313/55,330 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lake; Roy
Assistant Examiner: Hostetter; Darwin R.
Claims
What is claimed is:
1. An X-ray tube comprising a vacuum vessel; a source of charged
particles received in said vacuum vessel; an acceleration electrode
disposed opposite to said source of charged particles so as to
accelerate charged particles emitted therefrom; a target made of
alumina to generate characteristic X-rays of said material upon
impingement of said accelerated charged particles; and an outlet
port through which to draw out said X-rays.
2. The X-ray tube according to claim 1 wherein the source of
charged particles is an ion generator including means for adjusting
gas pressure prevailing therein.
3. The X-ray tube according to claim 1 wherein there is provided an
X-ray outlet port for directly projecting the characteristic X-rays
of the material of a target on an X-ray-receiving apparatus without
using an X-ray permeable film.
4. The X-ray tube according to claim 1 wherein there is provided
means for equalizing gas pressure acting on the opposite surfaces
of an X-ray permeable film through which to draw out said
characteristic X-rays and there is also provided an X-ray outlet
port assembly for projecting said characteristic X-rays through
said film on an X-ray receiving apparatus.
5. The X-ray tube according to claim 2 wherein there is provided
means for equalizing gas pressure acting on the opposite surfaces
of an X-ray permeable film through which to draw out said
characteristic X-rays and there is also provided an X-ray outlet
port assembly for protecting said characteristic X-rays through
said film on an X-ray receiving apparatus.
Description
BACKGROUND OF THE INVENTION
This invention relates to an X-ray tube capable of generating
strong X-rays and more specifically to an X-ray tube capable of
easily producing soft X-rays of particularly great intensity.
Generally, an X-ray tube is formed by receiving in a vacuum vessel
an electronic gun, an electrode for accelerating emitted electrons
and a target impacted by a beam of accelerated electrons. With the
conventional X-ray tube, the target consists in all cases of
metals, for example, tungsten, chromium and aluminum. The X-rays
thus obtained generally have a low intensity, and moreover there
are encountered difficulties in generating soft X-rays. It is,
therefore, difficult for the conventional X-ray tube to meet
requirements for special applications, for example, analytical
work. Particularly where there is to be analyzed the content of
light elements by the fluorescent X-ray analytical method, it is
necessary to apply soft X-rays. Further where a sample of analysis
is of minute quantity, it is required to employ soft X-rays of
particularly great intensity in order to elevate the analytical
sensitivity.
Heretofore, however, there has not been developed any X-ray tube
adapted for generation of soft X-rays, particularly of great
intensity.
SUMMARY OF THE INVENTION
It is accordingly the object of this invention to provide an X-ray
tube capable of generating soft X-rays of particularly great
intensity.
According to this invention, there is provided an X-ray tube whose
vacuum vessel contains a source of charged particles; an electrode
for accelerating charged particles emitted from said source; and a
target of electrical insulation material adapted upon impingement
of charged particles thus accelerated so as to generate soft X-rays
of prominent intensity, said soft X-rays being drawn out from a
proper outlet port provided in the vacuum vessel.
The source of charged particles may consist of an ordinary
electronic gun or a source of positive or negative ions. The
acceleration electrode is impressed with voltage having a proper
polarity for acceleration of emitted charged particles. The
electrical insulation material constituting a target is, for
example, alumina (A1.sub.2 O.sub.3). This target produces
characteristic K-X ray having an energy of 1.49 KeV of aluminum and
characteristic K-X ray having an energy of 0.52 KeV of oxygen.
Other target materials used in this invention include, for example,
quartz, tungsten calcium oxide (CaWO.sub.4 mica (KAL.sub.2
(ALSi.sub.3 O.sub.10)(OH).sub.2), and lithium niobate
(LiNbO.sub.3). Where there is used an electronic gun as a source of
charged particles, the vacuum vessel in which said gun is received
may be permanently sealed. And where there is used an ion generator
as a source of charged particles, the vacuum vessel is not
completely sealed, but may receive means for adjusting gas pressure
prevailing therein. It is generally preferred that an outlet port
through which to draw out soft X-rays be formed of, for example, a
thin film of aluminum or beryllium which least tends to absorb said
X-rays. However, where the X-ray tube of this invention is used
particularly with a fluorescent X-ray analyzer requiring soft
X-rays, the outlet port member may be connected to the vacuum area
of said analyzer without using an X-ray permeable film. Even in
this case it is also possible to constract said outlet port of a
particularly thin film least liable to absorb soft X-rays.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a sectional view of an X-ray tube according to an
embodiment of this invention;
FIG. 2 is a sectional view of an X-ray tube according to another
embodiment of the invention;
FIG. 3 is a sectional view of an X-ray tube according to still
another embodiment of the invention; and
FIG. 4 compares the intensity of characteristic X-rays of aluminum
obtained with the X-ray tube of FIG. 1 with that of the prior art
X-ray tube using a target made of aluminum.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring to FIG. 1, numeral 1 represents a glass vacuum vessel. At
one end of said vessel 1 is disposed an ion generator 2 (generally
referred to as an "ion gun"), and at the other end is sealed in
airtightness an acceleration electrode at a seal point 4. In the
embodiment of FIG. 1, the ion generator 2 is of Penning ionization
gauge (PIG) type, which generates positive ions, for example,
protons. The acceleration electrode 3 is in a blind cylindrical
form. To the inner wall of the bottom of said cylinder is fixed a
target 5 made of electrical insulation material, for example,
alumina (A1.sub.2 0.sub.3). The ion generator 2 comprises a
negative electrode 6, positive electrode 7, and a magnet device 8
for generating a magnetic field acting in the axial direction of
the X-ray tube, both electrodes 6 and 7 being impressed with proper
voltage through lead lines 9. Voltage across said electrodes 6 and
7 and the magnetic field deionize gas present in the ion generator
2 and a beam of the resultant charged particles 10, for example,
protons is drawn out from the aperture 11 of the negative electrode
6. The acceleration electrode 3 is impressed with sufficient
negative voltage to accelerate the beam 10 of protons to the energy
of, for example, scores from tens to hundreds of KeV. Said voltage
allows the proton beam 10 to proceed straight through a beam hole
12 and impinge on the target 5, thereby generating characteristic
X-rays 13 of the material of said target 5. In that portion of the
acceleration electrode 3 which faces the X-ray-generating surface
of the target 5 is formed an X-ray outlet port 14, which is sealed
with an X-ray permeable film 15 least liable to absorb X-rays
produced and fully withstanding the magnitude of vacuum applied.
The characteristic X-rays 13 are drawn outside through said film
15.
The acceleration electrode 3 is fitted with a device 16 for
adjusting gas pressure prevailing in the ion generator 2. Said gas
pressure adjustment device 16 may consist of, for example, an ion
pump. The X-ray tube can be so designed, when operated to generate
X-rays, as to introduce gas thereinto and, when out of operation,
to cause the gas therein to be absorbed to an adsorbent placed in
the ion pump 16.
FIG. 4 presents a comparison between the relative intensity of
X-rays obtained with the X-ray tube according to the embodiment of
FIG. 1 and that of the prior art X-ray tube. Referring to FIG. 4,
the abscissa represents the energy of protons expressed in KeV. The
left ordinate or the curve 17 shows the relative count rate of
characteristic K-X rays of aluminum obtained with the X-ray tube of
this invention and the right ordinate or the curve 18 indicates the
relative count rate of similar X-rays obtained with the
conventional X-ray tube using a target of aluminum. The fact that
the graduation numerals on the left ordinate have a value equal to
10.sup.3 times those on the right ordinate proves that the
characteristic X-rays of the material of a target included in the
X-ray tube of this invention are of prominent intensity. Where the
target consisted of other electrical insulation materials than
alumina (A1.sub.2 0.sub.3), there was obtained a comparative
diagram closely resembling that of FIG. 4. The energy of soft
X-rays characteristic of aluminum represented by the curve 17 is of
the order of 1.49 KeV as previously described.
This invention also includes the case where there is used an
electronic gun as a source of charged particles. When electrons
emitted by known means (not shown) are accelerated to a prescribed
magnitude of energy by the voltage impressed on the acceleration
electrode 3, and a beam of accelerated electrons is made to impinge
on a target, then there is also obtained a desired type of X-rays.
In this case, the gas pressure adjustment device may be omitted,
thus enabling the entire X-ray tube to be permanently sealed.
FIG. 2 denotes an X-ray tube wherein the X-ray outlet port is not
provided with an X-ray permeable film for preservation of vacuum in
order effectively to utilize soft X-rays having a particularly low
degree of energy. Such X-ray permeable film has a nature of
absorbing more or less amounts of X-rays, however thin it may be
formed. Consequently the X-ray outlet port member 14 of FIG. 2 may
be formed without any additional X-ray permeable member and
directly connected to the vacuum area of an apparatus subjected to
X-ray impingement. In the case of FIG. 2 the gas pressure
adjustment device 16 may be made to communicate directly with the
ion generator 2.
FIG. 3 is a sectional view of an X-ray tube according to still
another embodiment of this invention wherein the X-ray permeable
film 15 fitted to the outlet port assembly 14 of X-rays can be
allowed to be extremely thin. Said outlet port assembly 14 consists
of a flanged cylindrical member 19; a first vacuum valve 20 which,
when opened, permits the passage of X-rays 13; a thin X-ray
permeable film 15; a gas pressure adjustment space 21 provided
between the first vacuum valve 20 and X-ray permeable film 15; and
a second vacuum valve for causing said gas pressure adjustment
space 21 to communicate with or be shut off from the space in the
acceleration electrode 3. A flange formed at the outer end of the
flanged cylindrical member 19 is connected in airtightness to an
apparatus 24 subjected to X-ray impingement, for example, a
fluorescent X-ray analyzer, the interior of which is evacuated
through an exhaust port 23.
When the X-ray tube of FIG. 3 is not in operation, the first valve
20 is left closed and the second valve 22 is kept open. Under such
arrangement, there is applied an equal pressure on the opposite
surfaces of the X-ray permeable film 15, enabling said film to be
made extremely thin. When the X-ray tube is put into operation, the
X-ray-receiving apparatus 24 is evacuated until gas pressure
therein is made equal to that of the X-ray tube. Thereafter the
first and second valves 20 and 22 are opened in turn. The
embodiment of FIG. 3 enables not only soft X-rays of great
intensity to impinge on an X-ray-receiving apparatus with the
absorption of X-ray energy in the X-ray permeable film 15
prominently minimized, but also backward gas diffusion into the
X-ray tube to be prevented during the evacuation of the
X-ray-receiving apparatus 24.
* * * * *