U.S. patent number 3,678,334 [Application Number 04/854,404] was granted by the patent office on 1972-07-18 for non-thermionic glow discharge devices.
This patent grant is currently assigned to United Kingdom Atomic Energy Authority. Invention is credited to Ronald Arthur Dugdale, Stanley Denis Ford, John Thomas Maskrey.
United States Patent |
3,678,334 |
Dugdale , et al. |
July 18, 1972 |
NON-THERMIONIC GLOW DISCHARGE DEVICES
Abstract
A glow discharge device comprising an enclosure and means to
maintain a suitable gas in the enclosure at a predetermined
pressure. An electrode arrangement is either at least partly
disposed within the enclosure or forms part of a wall of the
enclosure. The electrode arrangement includes one or more anodes, a
cathode, and a control electrode. Power supply means are provided
to apply a electrical potentials to the anode or anodes said
cathode and said control electrode to maintain a first potential
difference between an anode and said cathode to generate a first
glow discharge, and to maintain a second potential difference
between an anode and said control electrode to generate a second
glow discharge. The combined first and second glow discharges
produces a beam of charged particles, the power intensity of which
is controlled by varying the potential applied to the control
electrode to vary the glow discharge independently of the potential
applied to the cathode.
Inventors: |
Dugdale; Ronald Arthur
(Blewbury, EN), Ford; Stanley Denis (Newbury,
EN), Maskrey; John Thomas (Abingdon, EN) |
Assignee: |
United Kingdom Atomic Energy
Authority (London, EN)
|
Family
ID: |
10424129 |
Appl.
No.: |
04/854,404 |
Filed: |
September 2, 1969 |
Foreign Application Priority Data
|
|
|
|
|
Sep 5, 1968 [GB] |
|
|
42,371/68 |
|
Current U.S.
Class: |
315/111.81;
219/121.24; 219/121.34; 219/121.21; 219/121.27; 219/121.33;
315/307 |
Current CPC
Class: |
H01J
17/44 (20130101); H01J 37/077 (20130101); H05H
1/48 (20130101); H01J 2893/0068 (20130101) |
Current International
Class: |
H01J
37/06 (20060101); H01J 37/077 (20060101); H01J
17/38 (20060101); H01J 17/44 (20060101); H05H
1/24 (20060101); H01j 037/06 () |
Field of
Search: |
;313/231,210,63
;219/121EB ;315/111 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lake; Roy
Assistant Examiner: Demeo; Palmer C.
Claims
We claim:
1. In a glow discharge device of the type in which an electron beam
is produced by secondary electron emission from a surface of the
cathode as the result of ion bombardment of the cathode, having an
enclosure for containing an ionizable gas at a predetermined
pressure, an anode, a cathode spaced from said anode, means for
applying an electrical potential difference between said anode and
cathode to ionize said gas and maintain a glow discharge, the
improvement comprising a hollow control electrode of substantially
annular shape having an open channel shaped cross-section facing
inwardly, means for applying an electrical potential difference
between the anode and said control electrode to further ionize said
gas in the enclosure to a level at which the electron beam is
produced by secondary emission from the cathode, said hollow
control electrode being positioned where the electron beam emitted
by the cathode passes through the hollow electrode.
2. A device according to claim 1 wherein a sensing means is
provided to obtain a signal indicative of the current flowing in
the said electron beam and means are provided to use said signal to
vary the potential applied to the control electrode in response to
said signal to modulate the power intensity of the beam.
Description
This invention relates to non-thermionic cathode glow discharge
devices, and in particular although not exclusively to glow
discharge devices of the type generally disclosed in British Pat.
No. 1,145,013 and British Pat. application Ser. No. 48,144/66.
According to the invention there is provided a glow discharge
device comprising an enclosure, means to main a suitable gas in the
enclosure at a predetermined pressure, an electrode arrangement at
least partly disposed within or forming part of the enclosure, the
electrode arrangement including one or more anodes, a cathode, and
a control electrode, a power supply means to apply an electrical
potential to said anode or anodes said cathode and said control
electrode to maintain a first potential difference between an anode
and said cathode to generate a first glow discharge, and to
maintain a second potential difference between an anode and said
control electrode to generate a second glow discharge, the combined
first and second glow discharges producing a beam of charged
particles the power intensity of which is controlled by varying the
potential applied to the control electrode to vary the glow
discharge independently of the potential applied to the
cathode.
A sensing means may be provided to obtain a signal indicative of
the current flowing in the said beam of charged particles, and
means may be provided to use the signal to vary the potential
applied to the control electrode in response to the signal to
modulate the power intensity of the beam.
The potential difference between an anode and said control
electrode is preferably less than a value at which a self
sustaining glow discharge accompanied by the emission of a beam of
charged particles is produced. Also the potential difference
between an anode and said control electrode may be less than a
value at which a self sustaining glow discharge accompanied by the
emission of a beam of charged particles is produced. In the latter
instance the combined effect of the potential difference between an
anode and said cathode together with the potential difference
between an anode and said control electrode is arranged to generate
and maintain a self sustaining glow discharge accompanied by the
emission of a beam of charged particles.
According to a feature of the present invention a non-thermionic
cathode glow discharge device comprises an enclosure having gas
inlet and outlet openings, means to maintain a suitable gas at a
predetermined pressure within said enclosure, at least one
electrode means at least partly disposed within said enclosure and
including an anode, a cathode and a control electrode, means to
apply a suitable potential to said anode and said cathode prior to
the application of a suitable potential to said control electrode
such that when suitable operating potentials are applied to said
anode and control electrode a glow discharge is generated and
controlled, and a beam of charged particles is produced, the beam
being directed towards a treatment zone by the electric fields
associated with said anode, cathode, and control electrode.
According to a further feature of the present invention there is
provided a non-thermionic cathode glow discharge device comprising
an enclosure having gas inlet and outlet openings, means to
maintain a suitable gas at a predetermined pressure within said
enclosure, at least one electrode assembly at least partly disposed
within said enclosure said electrode assembly including an anode, a
cathode and a control electrode, means to apply suitable operating
potentials to said anode and control electrode to generate a glow
discharge prior to the application of a suitable operating
potential to said cathode means to apply a suitable operating
potential to said cathode such that the said glow discharge is
augmented and a beam of charged particles is produced, said beam
being directed by the electric fields associated with said anode,
and cathode.
The present invention will now be described with reference to the
accompanying drawings, which are by way of an example only, and in
which:
FIG. 1 shows schematically one form of an electrode assembly of a
device according to the invention, and
FIG. 2 shows a device according to the invention employing a
modified form of the electrode assembly of FIG. 1;
FIG. 3 shows a further form of an electrode assembly according to
the invention.
Referring to FIG. 1 of the drawings there is shown an electrode
assembly 1 which is similar to one of the electrode assemblies
generally disclosed in British Pat. No. 1,145,013 but modified by
the provision of a control electrode 2. The electrode assembly 1
includes a hollow tubular anode 3 formed by two open ended tubes 4
and 5 and a cathode 6 connected to a suitable power supply is
positioned adjacent one open end of the anode 3. A substantially
right circular cylindrical chamber 7 formed by metallic end walls
8, 9 and 10 is arranged co-axially with respect to the anode 3.
Alternatively the wall 10 may be made from an insulating material
such as for example glass, in which case the end walls 8 and 9 are
electrically interconnected to form anodes.
The electrode 2 is of a substantially annular shape having an open
channel shaped cross-section facing inwards. The electrode 2 is
connected to a power supply by way of connector 11 and is supported
in the chamber 7 by the connector 11 which is located in an
insulating bush 12 positioned in a neck portion 13 of the chamber
7.
The cathode 6 is a generally planar disc with a recess formed
therein. The recess shapes the equipotential and electric fields
lines and assists in focusing the electron beam.
The electrode assembly 1 of FIG. 1 is positioned within a chamber
(not shown) which is provided with an inlet opening through which
gas is admitted to the interior of the chamber from a source of
supply via a suitable valve, and an outlet opening through which
the gas within the chamber may be pumped away by a pump to maintain
the gas at a predetermined pressure of a few microns of mercury
within the chamber. Alternatively the electrode assembly may be
constructed such that the cathode chamber 7 and tubes 4 and 5 form
a gas tight enclosure similar to the device of FIG. 2.
In one mode of operation of the device the enclosure is evacuated
to a gas pressure of a few microns of mercury, the tubes 4 and 5
are earthed and form anodes and a negative potential of up to 10 KV
is applied to the control electrode 2 to initiate a glow discharge.
A negative potential, of for example, 5 KV to 100 KV is then
applied to the cathode 6 with the result that the glow discharge
initiated by the potentials applied to the anode and further
electrode is augmented, and the gas becomes more ionized. Positive
ions so created in the gas within the anode 3 bombard the cathode 6
and cause the cathode to emit electrons which are focussed by the
electric fields associated with said anode 3, and cathode 6. By
varying the potential applied to the control electrode 2 from a few
volts up to 10 KV negative, the intensity of the glow discharge and
hence the intensity of the resulting electron beam can be
varied.
In a second mode of operation of the device, the gas pressure
within the enclosure is maintained at a level at which no glow
discharge and no electron beam would be formed when the voltage is
only applied to the cathode 6, but which causes a glow discharge to
occur and an electron beam to be produced where a negative voltage
is applied to the control electrode 2 as well as the cathode. The
pressure level is not critical provided that it is less than a
value which would permit a self-sustaining glow discharge to occur
when a voltage is applied to the cathode 6. A negative potential of
5 KV to 100 KV is then applied to the cathode and the pressure is
maintained substantially the same. A negative potential of, for
example, 10 KV is then applied to the electrode 2, a glow discharge
is thus initiated and the gas in the anode 3 becomes ionized.
Positive ions so created in the gas in the anode 3 bombard the
cathode 6 with the result that electrons are emitted by the
cathode. The electrons are directed and focused into a stream by
the electric fields associated with the anode, and cathode.
It will be seen from the above description that the low voltage
(relative to that supplied to the cathode) supplied to the control
electrode can be varied to control the intensity of the resulting
electron beam or to effectively switch on or off the electron
beam.
Similarly as the intensity of the beam is also dependent upon the
effects of gas pressure, variations of gas pressure in the
enclosure may have undesirable affects on the intensity of the
electron beam. Variations in the gas pressure affects the
ionization of the gas by altering the mean free path between the
molecules of the gas and hence the glow discharge will be affected
by pressure changes. Changes in pressure will result in changes of
the electrical current flowing through the beam. The variations in
the current flowing through the beam may be fed back through a
suitable electrical circuit to adjust the current supplied to the
control electrode 2 to automatically control the glow discharge to
compensate for gas pressure changes within the enclosure.
It is to be understood that further electrodes may be provided
between the cathode 6 and anode 3 if desired. These further
electrodes may be used to focus or deflect the resulting beam of
electrons. The cathode need not be provided with a recess portion,
and if desired the cathode may be apertured, in which case some of
the ions created in the gas within the anode 3 will pass through
the aperture, or apertures, in the cathode to produce a stream of
ions which are focused and directed by the electric fields
associated with the anode 3, cathode 6 and control electrode 2 and
any further electrode provided between the anode 3 and cathode
6.
Furthermore the anode 3 may consist of a single tube having the
electrode 2 positioned coaxially therein. Alternatively the control
electrode 2 may be in the form of an apertured plate positioned
adjacent the end of the anode 3 which is opposite to the end at
which the cathode 6 is located.
Referring to FIG. 2, the cathode 21 comprises an inner core 22 and
an outer flanged sleeve 23, and the cathode 21 is supported and
spaced from the end plate 9 of the chamber 7 by an insulator 24 for
example, a glass sleeve. O ring seals 25 are provided between the
end face of the insulator 24 and the flange 26 of the sleeve 23 and
between the end face of insulator 24 and the end plate 9. The
sleeve 23 has an inturned flange 27 which with the core 22 forms a
well similar to that of the cathode 6 of FIG. 1. The core 22 may
rest on the inturned flange 27 as shown or may be spaced from it,
and is supported in the bore of the sleeve 23 at its end remote
from the chamber 7. The remainder of the core is of a reduced
diameter to provide clearance between the sleeve 23 and the core
22. Holes 28 are provided in the sleeve 23. Internal coolant ducts
(not shown) may be provided in the core to enable the core to be
cooled by a flow of coolant. A cathode having internal cooling and
suitable for use in the apparatus of the present invention is
described in our co-pending U.S. application Ser. No. 824,883,
commonly assigned now abandoned. If desired at least a part of the
cathode may be movable to present a fresh part of the cathode to
ion bombardment.
The top plate 9 of the chamber 7 is provided with a truncated
conical aperture 29 which corresponds to the tube 5 of FIG. 1. An
inturned lip 30 is provided at the end of the aperture 29 so that
in operation of the apparatus positive ions bombard the cathode
over a small area. The plate 9 carries a cylindrical projecting
wall 31 which encircles and is spaced from, the lower end of the
cathode 21. The wall 31 forms a heat shield and prevents spurious
discharges in the space between the cathode and the insulator 24.
Two insulator bushings 32 and 33 are provided in the plate 9 to
enable electrical connections 34 to be made to the control
electrode 2 and to enable the control electrode 2 to be suspended
by supports 35 from plate 9.
The chamber 7 is provided with a gas inlet duct 36 and a gas outlet
duct 37 which is connected to a pump. The control electrode 2 is
provided with a mesh portion 50 in line with the outlet duct 37 to
assist the pumping of gas from the interior of chamber 7. The wall
8 is provided with a small diameter hole 38 which interconnects the
interior of chamber 7 with the interior of the cylindrical flanged
tube 4, to enable the electron beam produced in operation of the
apparatus to emerge and pass axially along the tube 4 into the work
chamber 39. The work chamber 39 is cubical and is formed by the
flange 40 of tube 4 and side walls 41 and 42 and base plate 43.
Located in the work chamber 39 is a work holder 49 which supports
the work 48 to be machined by the resulting electron beam. O ring
seals 44 are provided between the mating faces of walls 41, 42 and
the flange 40 and base plate 43. Access openings (not shown) and
windows (not shown) may be provided in one or more of the walls
defining the work chamber 39.
An electromagnetic lens 45 and two pairs of electromagnetic
deflection coils 47, only one pair of which is shown, are provided
externally of the tube 4 to enable the resulting electron beam to
be focussed and deflected.
The plates 8 and 9, wall 10, tube 4 and the walls defining the work
chamber 39 are metallic and electrically interconnected, and form
an anode in operation of the apparatus.
The chamber 7 together with the work chamber 39, the space defined
by the cathode 21 and insulator 24, and the space defined by the
tube 4, form a substantially gas tight enclosure. If desired the
work chamber 39 may be pumped separately to enable different
pressures to be maintained in the chamber 7 and work chamber 39, in
which case gas inlet and outlet ducts are provided in chamber 39 as
well as in chamber 7.
Referring now to the electrical circuit shown in FIG. 2 the cathode
21 is connected via resistors R1, R2, and R6, to the negative H.T.
terminal of a high voltage power supply, for example a 30 KV 20 ma
power supply. A capacitor C1 is connected between the junction of
resistors R1 and R2 and the positive H.T. terminal. Resistors R1
and R2 together with capacitor C1 form a simple smoothing circuit.
Two resistors R3 and R4 are connected in series between the
junction of resistors R2 and R6 and the positive H.T terminal.
Resistors R3 and R4 constitute a potentiometer. The junction of
resistors R3 and R4 is connected to the electrode 2 by way of the
electrical connection 34, such that in operation of the device a
trigger voltage, of for example, 500 V 5 KV is supplied to the
control electrode 2. The junction between resistors R3 and R4 is
connected to terminal D of a beam control unit, 51 which provides a
low impedance path to the current flowing in to the beam control
unit 51. Terminal B of the beam control unit 51 is connected to the
positive H.T. terminal and a neon light and resistor 25 are
connected in parallel between this terminal and terminal A which is
connected to the plate 8 of the apparatus. neon light 53 connected
in parallel with resistor R5 only conducts if the signal at
terminal B exceeds a predetermined value. Thus the neon light acts
as a short circuit to earth in the even of a current surge.
In operation of the apparatus of FIG. 2 gas, for example helium or
argon is admitted to the chamber 7 by way of inlet duct 36 and is
maintained at a predetermined pressure of a few microns in the
chamber 7. The pressure is controlled or adjusted by controlling
the rate of flow of gas into and out of the chamber. A trigger
voltage is applied to the control electrode 2 by way of the
electrical connection 34 and a negative potential of the order of
30 KV is applied to the cathode 21 to initiate a glow discharge
which is insufficient to produce a useable electron beam. The dial
52 of the beam control unit 51 is turned to a predetermined
position which selects a predetermined reference voltage. The
current flowing in the electron beam is indicated by the current
flowing through the resistor R5. The voltage produced by the
current flowing through resistor R5 is subtracted from the
reference voltage, and the signal representing the difference
between the reference voltage and the voltage through resistor R5
is then amplified and employed to regulate the current to the
control electrode (which flows through the diode gate 54) to
control the degree of ionization in the gas and hence the power of
the electron beam. A switch S1 is provided to enable the beam
control unit to be rendered inoperative causing the beam to be
turned off.
It is to be understood that the power at the trigger voltage is
sufficient to initiate a glow discharge but is insufficient to
produce a useful electron beam, and it is not until an appreciable
current typically in the order of 10-100mA at a voltage of the
order of 500 volts is applied to the control electrode 2 from the
beam control unit 51 that the glow discharge is capable of
producing a useful beam of electrons. The power of control
electrode 2 at which the glow discharge is capable of producing a
useful electron beam is dependent on many factors, for example the
gas used, the pressure of the gas, the voltage applied to the
cathode and the control electrode and geometric arrangement of the
anode cathode 21 and the control electrode 2.
The electrode assembly 1 shown in FIGS. 1 and 2 is only two
examples of arrangements of electrodes. It is to be understood that
the anode, cathode and control electrode individually may be of any
suitable shape and may be arranged in any suitable order such that
when the appropriate voltage is applied to the anode and control
electrode, an auxiliary glow discharge is generated and when a
suitable voltage is applied to the cathode a main glow discharge
results and an electron or ion beam is produced. The intensity of
resulting electron or ion beam can be controlled by varying the
potential applied to the control electrode 2.
An example of a different arrangement of electrodes is illustrated
in FIG. 3. The electrode assembly 14 of FIG. 3 is similar to that
disclosed in our co-pending British Pat. application Ser. No.
48,144/66 except for the provision of the control electrode 15, for
initiating and/or augmenting a main glow discharge. The electrode
assembly 14 consists of a cathode 16 having a portion 17 in the
form of a curved metal plate and an anode 18 which has a mesh
portion 19. By applying a negative potential to the control
electrode 15 and earthing the anode 18 an auxiliary glow discharge
may be generated. The auxiliary discharge may be used to initiate
or augment a main glow discharge such that when a suitable negative
potential is applied to the cathode a main glow discharge occurs
and an electron beam results. By varying the potential applied to
the control electrode 15 the glow discharge is varied and hence the
intensity of the resulting electron beam is varied.
It is to be understood that the potentials applied to the anode and
cathode may be reversed such that the anode 18 becomes a cathode
and the cathode 16 becomes an anode, in which case an ion beam
results instead of an electron beam when suitable potentials are
applied to the anode and cathode. In the latter case the control
electrode is positioned adjacent to the anode such that by applying
a suitable operating potential to the anode and control electrode,
an auxiliary glow discharge may be generated. The auxiliary glow
discharge may be used to initiate, control, or augment a main glow
discharge such that an ion beam results.
It is to be understood that the operation of the devices of FIGS.
1, 2 and 3 are substantially the same. The only significant
difference is in the shape and positioning of the anode, cathode
and control electrodes. The operation of the control electrode 15
is the same as the control electrode 2.
The electrical circuit of the beam control unit 51 may be one of a
number of well known feed back circuits which is capable of (a)
producing a difference signal indicative of a difference between an
input signal and a reference signal and (b) of amplifying the
difference signal to provide an output signal which is
representative of the difference signal.
* * * * *