U.S. patent number 3,652,442 [Application Number 05/025,708] was granted by the patent office on 1972-03-28 for electroplating cell including means to agitate the electrolyte in laminar flow.
This patent grant is currently assigned to International Business Machines Corporation. Invention is credited to John V. Powers, Lubomyr T. Romankiw.
United States Patent |
3,652,442 |
Powers , et al. |
March 28, 1972 |
ELECTROPLATING CELL INCLUDING MEANS TO AGITATE THE ELECTROLYTE IN
LAMINAR FLOW
Abstract
An electroplating cell is constructed to prevent current
spreading in the electrolyte during the plating of a metal or metal
alloy onto a substrate. The cell is constructed such that the
cross-sectional area of current path is substantially the same as
the cross-sectional area of a pair of electrodes spaced apart in
the cell. This is accomplished by placing the electrodes in the
cell such that their edges are substantially in contact with the
dielectric or insulating walls of the cell. The cell also contains
electrolyte agitating means to provide uniform laminar flow of the
electrolyte across the surface of one of the electrode. Metal alloy
films deposited with the use of this cell exhibit uniform
thicknesses on rather large surface areas. Where magnetic metal
alloys are plated, the films not only exhibit uniform thicknesses
laterally on the whole cathode but uniform composition and magnetic
properties throughout as well.
Inventors: |
Powers; John V. (Shenorock,
NY), Romankiw; Lubomyr T. (Millwood, NY) |
Assignee: |
International Business Machines
Corporation (Armonk, NY)
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Family
ID: |
27362610 |
Appl.
No.: |
05/025,708 |
Filed: |
April 6, 1970 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
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693375 |
Dec 26, 1967 |
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Current U.S.
Class: |
204/273;
204/261 |
Current CPC
Class: |
B22D
17/00 (20130101); H01F 17/06 (20130101); C25D
21/10 (20130101); H01F 17/0033 (20130101); Y10T
29/49073 (20150115); C25D 17/12 (20130101) |
Current International
Class: |
C25D
5/00 (20060101); C25D 17/00 (20060101); H01F
17/06 (20060101); H01F 17/00 (20060101); B01k
003/00 () |
Field of
Search: |
;204/43,242,273,DIG.7,222,261 |
References Cited
[Referenced By]
U.S. Patent Documents
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3427231 |
February 1969 |
Schneider et al. |
3271275 |
September 1966 |
Di Guilio et al. |
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Other References
Kronsbein, John; "Current and Metal Distribution in
Electrodeposition," Plating, Vol. 39, No. 2 (Feb. 1952), pp.
165-170.
|
Primary Examiner: Mack; John H.
Assistant Examiner: Soloman; W. I.
Parent Case Text
This application is a continuation-in-part of copending U.S. Pat.
application Ser. No. 693,375, filed Dec. 26, 1967, now abandoned.
Claims
What is claimed is:
1. An improved apparatus for electrodepositing metal films having
substantially uniformity of thickness and composition having in
combination a plating bath container to contain a plating bath
disposed therein, having all four of its sides and base, fashioned
from a dielectric material;
A pair of electrode means spaced apart in said bath container and
in substantial contact with the walls thereof, being mounted within
said container and said plating bath, one of said electrode means
being a conductive block supported on the dielectric base of said
container and being adaptable to receive a conductive substrate
member for completing a current path across said electrode
means;
non-conductive agitating means disposed in said container for
providing uniform laminar flow of said bath across the surface of
one of said electrode means;
said non-conductive agitating means being constructed so as to
provide minimal resistance to the flow of said bath, thereby
preventing turbulence therein; and
means for applying a current across said electrode means whereby a
current path having a cross-sectional area which is substantially
the same as the cross-sectional area along the length of said
electrode means is provided.
2. An apparatus according to claim 1 wherein there is added support
means for maintaining said electrodes in spaced apart relation.
3. An apparatus for electroplating metal films according to claim 1
wherein the sides of said non-conductive agitation means have sharp
edges and the base portion thereof is triangular in shape so as to
provide minimal resistance to the flow of said bath during
agitation thereof.
4. An apparatus for electroplating metal films according to claim 1
wherein opposite walls of said container are recessed so as to
support one of said electrodes.
5. An apparatus for electroplating metal films according to claim 1
including magnetic field generating means disposed outside of said
container to provide a magnetic field of about 40 oe to thereby
establish plane orientation in an electrodeposited magnetic film.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to an improved electroplating cell, from
which metal films having uniform thicknesses and uniform
compositions can be deposited.
2. Description of the Prior Art
Electroplating, because of its inherent simplicity, is used as a
manufacturing technique for the fabrication of metal and metal
alloy films. One of the severe problems in plating metal films
arises from the fact that when a plating current is applied, the
current tends to spread in the electrolyte on its path from the
anode to the cathode. This current spreading leads to nonuniform
local current density distribution on the cathode. Thus, the film
is deposited in a nonuniform fashion, i.e., the thickness of the
film varies in direct proportionality with the current density
variation at the cathode. Additionally, where metal alloy films are
deposited, for example, magnetic film compositions of nickel and
iron or nickel, iron and copper, this nonuniform current density
distribution causes a variation in the compositional makeup of the
alloy film. In those cases where plating is done for decorating
purposes, or even in cases of plating for corrosion protection
purposes, the thickness uniformity and compositional uniformity are
not of extreme importance.
When plating is used for the purpose of making thin film electronic
components such as resistors, capacitors, conductors, magnetic
devices or other, where both thickness and alloy composition
determine the operation of the device, the uniformity of thickness
and alloy composition are very important and critical. In
connection with this, one distinguishes between the variation in
composition of the alloy through the thickness of the film and
between the variation of composition and/or thickness from spot to
spot laterally over the entire plated area (cathode).
When the films are to be used in computer memories, which demand
constant magnetic characteristics across the entire film
compositional makeup variation results in deviations of
magnetostriction (.lambda.). This deviation becomes a severe
problem in magnetic films. This is especially so in terms of the
magnetostriction of the deposited film, since zero magnetostriction
is achieved with alloys including approximately 80 percent nickel
and 20 percent iron. When the alloy varies by any considerable
degree from these proportions, it does not exhibit a zero
magnetostriction. Thus, local composition and thickness of a film
are key factors in determining local magnetic properties of the
film. The film properties may vary through the thickness of the
film and may also vary along the lateral profile of the film from
point to point over a large area of the plated film. From the point
of view of magnetic memories, it is very important to have the
least amount of variation in magnetic properties, both through the
thickness and from place to place on rather large surface
areas.
Considerable progress has been accomplished in the area of
obtaining compositional uniformity through the thickness of the
films by the controlling of bath makeup and operating conditions.
For example, in copending U.S. Pat. application Ser. No. 573,417,
filed Aug. 18, 1966, now U.S. Pat. No. 3,480,522, to James M.
Brownlow and assigned to the same assignee as is this application,
there is disclosed a method of controlling plating conditions by
pulse plating in combination with a dilute plating bath.
In contrast to the above solution for obtaining uniformity through
the film's thickness, very little progress has been made in
obtaining lateral uniformity in the plated film. In this area, use
of aids to improve current distribution has been the main approach
to solving the problem. Normally, current balancing has been
accomplished by the use of auxiliary cathodes or auxiliary anodes,
conducting shells, bipolar conductors, and shields. A detailed
discussion of the above various current balancing aids is provided
in a publication of Robert H. Rousselot in Metal Finishing Journal
at pages 57-63, Mar. 1961. Although these various aids are helpful
in current controlling, they have several drawbacks. For example,
when these aids are used, only an average current density can be
calculated at the cathode. The true current density varies from
point to point. The true current density at each point on a cathode
is therefore unknown. Further, the cathode area plated represents
only a small portion of the useful area of the cathode, i.e., only
the central area of the plated cathode will exhibit uniformity of
thickness, the remaining areas will be discarded. Thus, inefficient
plating is obtained. The current used to plate on the various aids
is wasted. Chemicals necessary to plate on various plating aids are
also wasted. Additionally, in the anode position, its size and
shape has to be optimized for each configuration of the cell and
for each configuration of the specific aid used to obtain the best
possible film thickness and compositional uniformity in the small
cathode area of interest. Further, every time the ionic strength of
the plating solution is changed, the geometry of the electrodes has
to be optimized in order to maintain uniformity of thickness in the
deposited film. All of the above problems are further compounded
when it is desired to scale up the plating apparatus from
laboratory to production scale. The geometry of the cell of all the
electrodes and aids, as far as the shape and size of the electrodes
and of the auxiliary equipment are concerned, has to be optimized
again. The scale up cannot be accomplished by simple dimensional
scale up of the cells and electrodes. Thus, a great deal of
experimentation, of the trial and error variety, must be done every
time the geometry or size of the electroplating cell is changed or
when the size, shape, and spacing of the electrodes are
changed.
In an article entitled, "Current and Metal Distribution in
Electrodeposition," in the publication Plating, Vol. 39, No. 2,
ages 165-170 (1952), there is presented a theoretical discourse on
idealized plating bath containers from which metals can be plated
having uniformity of thickness. The theory disclosed is based
primarily upon Ohm's law, neglecting pertinent parameters such as
polarization. The article admits that while desired results can be
obtained theoretically the ideal case, at that time, had not been
realized. The article further infers that in order to obtain the
ideal case, one may choose either of two arrangements for a
rectangular container, viz. a viz., "A rectangular tank infinitely
long in one direction with an anode infinitely far from the
cathode," or "Two very large flat plates immersed in a very large
tank so as to be parallel to another." It is readily seen that
neither of the two above arrangements are practical. Further, it
should be noted that the article attempts to control primary
current distribution only, based on its idealization of Ohm's law;
consequently the article neglects secondary current distribution
problems, which are critical in alloy plating as in the present
invention. Thus, while it is indicated that the unobtainable ideal
case of the article may provide uniformity of metal thickness, it
nowhere suggests that at the same time uniformity of composition
can equally be obtained when plating an alloy such as in the case
of the present invention.
Further, an article entitled, "Engineering Design of
Electrochemical Systems," J. Newman, Industrial & Engineering
Chemistry, Vol. 60, No. 4, pages 12-27 (April 1968) discusses the
unimportance of Ohm's Law, contrary to above article, and clearly
demonstrates the importance of the secondary current distribution
due to proper uniform agitation conditions.
SUMMARY OF THE INVENTION
According to one aspect of the invention, an improved
electroplating cell is provides. This cell, as is illustrated by
the embodiments disclosed herein, includes spaced apart electrodes
having their edges substantially in contact with a suitable
dielectric material, which may constitute the walls of the cell.
The cell so provided requires that the cross-sectional area of the
current path across the electrodes is substantially the same as the
cross-sectional area along the length of the electrodes. This
results in substantially equipotential lines which are parallel to
both electrodes, and a constant current density throughout the
whole cathode area. Current density is uniform, well defined, and
well known for each point on the cathode. Where constant current
plating is used, the anode can be placed at any reasonable distance
from the cathode and the plating results are completely
reproducible from one plating to the other and show excellent
lateral uniformity in composition, thickness and magnetic
properties.
In scaling up the cell from laboratory to production scale, a
simple dimensional scale up of the cell dimensions results in
reproducible plating conditions. Whereas in conventional
electrochemical apparatus, dimensional scale up normally cannot be
used. Further changes in ionic strength of the bath in no way
affect the plating operation or uniformity of thickness,
composition or magnetic properties.
The electroplating cell of this invention can be used for the
electrodeposition of any metal and from any plating bath
composition where uniformity of thickness and composition is
desired.
Again, in accordance with the principles of the present invention,
an improved electroplating method of fabricating magnetic thin film
devices is realized. In the practice of this method, a relatively
dilute aqueous bath including nickel-iron-copper is used. The film
is plated on a smooth planar copper substrate cathode in the bath.
Plating is accomplished in the cells of this invention.
Therefore, it is an object of the present invention to provide an
improved electroplating cell.
It is a more specific object to provide an improved electroplating
cell in which the cross-sectional area of the current path is
substantially the same as the cross-sectional area along the length
of the electrodes.
A further and equally important object is to provide an improved
electroplating cell in which metal films having uniformity of
thickness, composition and magnetic properties can be
deposited.
Still another object of this invention is to provide an improved
electroplating apparatus in which metal films may be plated with
uniformity of thickness and composition without the use of current
balancing aids.
It is still another object of this invention to provide an improved
electroplating apparatus which may be scaled up from laboratory to
production size without the need for undue experimentation to
optimize the parameters of the apparatus.
And yet another object of this invention is to provide a method of
electroplating magnetic films having uniformity of thickness,
composition and magnetic properties.
The foregoing and other objects, features and advantages of the
invention will be apparent from the following more particular
description of preferred embodiments of the invention, as
illustrated in the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a perspective view showing the electroplating bath cell
of this invention.
FIG. 2 is a side sectional view of the structure of FIG. 1 showing
the path of current.
FIG. 3 is a side sectional view of a prior art electroplating bath
cell showing the current path generated therein.
FIG. 4 is a plot comparing uniformity of the thickness of a plated
film in the apparatus of this invention with a like film prepared
in a prior art apparatus.
FIG. 5 is a plot comparing the uniformity of composition of a film
containing Ni, Fe and Cu prepared in the apparatus of this
invention with a like film prepared in a prior art apparatus.
FIG. 6 is a plot comparing the magnetic properties, coercive force
and anisotropy field of the films used in the plot of FIG. 5.
FIG. 7 is a plot comparing anisotropy dispersion and magnetic skew
in the films used in the plot of FIG. 5.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
In the perspective views of FIGS. 1 and 2 which show the structure
used in one mode of practicing the present invention, the bath
container is designated 10. The walls of the container 10 are made
from any suitable dielectric material such as glass or a plastic
material, e.g., polymethacrylate. On either side of container 10
there is mounted Helmholtz coils 12 which can be energized during
the plating of a magnetic film so that the fabricated film
structure exhibits uniaxial anisotropy. The coils provide a
magnetic field of about 40 oe or more. A cathode 14 is in the form
of an insulating board on which there is affixed a conductive sheet
or coating. The upper surface of the conductive sheet is very
smooth. Cathode substrate materials which have been found to be
satisfactory are rolled copper sheets, evaporated copper,
evaporated silver, silver, sputtered gold, said electrolessly
deposited silver, copper, nickel or cobalt. Cathode 14 is mounted
on support block 16 and is in intimate contact therewith. Support
block 16 is supported on a dielectric material base 18 on the
bottom of container 10. Support block 16 is a conductive material
which is adapted to receive cathode 14 and which extends to and is
in contact with the walls of container 10. This arrangement of
cathode 14 and support block 16 effectively extends the edges of
cathode 14 to the walls of container 10. Cathode 14 is placed in
support block 16 and is substantially flush or level therewith.
Alternately, cathode 14 can be made to extend the full width and
length of container 10 without the aid of support block 16 by
simply making the cathode the size of the perimeter of container
10. Contact is made to the cathode 14 through support post 20, the
outside surface of which is insulated since it is immersed in the
electroplating bath. This post 20 is connected at a terminal 22 to
an electrical current source, not shown. Mounted on a shoulder of
post 20 is anode 24. Anode 24 extends substantially the full width
and length of container 10, so that like cathode 14, its edges are
substantially in contact with the insulating walls of container 10.
Anode 24 is supported in a recess 11 fashioned in the walls of
container 10. The anode 24 can be prepared from a conductive
material such as, molybdenum, nickel, platinum and the like. Wound
around anode 24 is a wire winding 26 of the same material from
which the anode 24 is prepared. Winding 26 is provided to increase
the surface area of anode 24 to at least twice that of the cathode.
This increased surface area on anode 24 lowers the current density
at the anode thus preventing anodic oxidation deposits which may
from time to time fall onto the cathode and interfere with metal
plating thereon. Alternately, the surface area of anode 24 can be
increased by corrugating or by grooving the solid anode metal. The
electrical connection to the anode is supplied by a wire connection
28 which leads to current supply source, not shown.
The bath level during plating is indicated by line 30 with anode 24
being in contact or immersed in the bath during the plating
operation. The bath is agitated during the plating operation by a
motor 32 which is connected to carrier 36 by linkage designated 34,
or any other suitable linkage. The linkage 34 is designed to
conform to the recess 13 of opposing walls of container 10. Anode
24 is substantially the same size as cathode 14. Similarly, linkage
34 is thinly made so that anode 24 remains substantially in contact
with the walls thereat. When motor 32 is energized, the carrier 36
moves the base portion 35 continuously at a substantially uniform
rate in a path back and forth along the length of the cathode 14
and just above the surface of cathode 14. As a result, a
homogenization of the bath solution occurs on the surface of
cathode 14. The agitating means comprising linkages 36, 34 and the
base portion 35 is adapted to cause a uniform laminar flow of the
bath across surface of cathode 14 without causing any measurable
turbulence thereat. The agitating means can be fashioned from any
nonconductive material such as plastics and the like Turbulence
must be avoided since such turbulence cause local non-uniform
polarization, thus negates compositional homogeneity. To avoid such
local turbulence, i.e., below recess 13, agitating means is
provided with sharp edges (the lower portion of linkage 34) so as
to provide minimal resistance to the flow of the bath. The base
portion 35 is similarly designed to provide minimal resistance to
flow. It is triangular in form with its blunted apex at an angle
which permits flow thereover with minimal turbulence, while its
base is flat. In operation, the agitating causes the bath to flow
over the base, and to effect mixing with bulk of the bath at the
apex of said base 35 by convection. As the mixture passes the apex,
the laminar flow is restored.
Referring again to FIG. 2, the current path, indicated by dash
lines 46, is seen to have a cross-sectional area substantially
equal to the cross-sectional area of cathode 14 and anode 24, i.e.,
the current across the electrodes 14 and 24 is confined to the
boundaries thereof and is not allowed to diverge or spread in its
path between said electrodes 14 and 24. As a result, the current
density is relatively constant throughout the whole cathode 14
area. The current density is found to be relatively uniform and
well defined; and the current density value can be predicted at any
point on the cathode 14, since they are the same at any given point
thereon. Consequently, films produced in the electroplating cell of
this invention are uniformly thick throughout, and where metal
alloys are being plated the metal compositions will also be uniform
throughout the film's thickness.
In contrast, FIG. 3 depicts a prior art electroplating cell,
generally designated as numeral 110, in which current balance aids
(guard rings) 480 are used to improve current distribution across
the cathode 140 and anode 240. It is seen that current (lines)
across the electrodes 14 and 24 travels in an arcuate path at the
edges of the electrodes and gradually begins to travel in parallel
lines 460 toward the central portion of the cathode 140. Thus, only
at the central portions of cathode 140 is there a uniformity of
current density. Films prepared in this cell will have uniformity
of thickness at the central portions thereof; consequently,
efficient use of the film cannot be had because the outer portions
are nonuniform in thickness and must be discarded. This is
especially true where magnetic films are plated, since
nonuniformity in the films' thickness and/or film composition also
results in nonuniformity of magnetic properties in the film.
To better illustrate the invention, several magnetic films were
plated onto the cathode in the apparatus of this invention and
compared with magnetic films similarly plated in the prior art
apparatus shown in FIG. 3. The
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films were plated from baths having the following compositions:
Bath Number 1 2 3 4 g./1 g./1 g./1 g./1
__________________________________________________________________________
Triton x- 100 0.8 0.6 -- 0.9 1.0 1.0 Sulfamic Acid -- -- Saccharin
1.0 -- 0.4 -- KNaC.sub.4 H.sub.4 O.sub.6.sup.. 4 H.sub.2 O 7.5 7.5
-- -- NiSO.sub.4.sup.. 6 H.sub.2 O 15.0 15.0 -- -- FeSO.sub. . 7
H.sub.2 O 2.0 2.5 -- -- CuSO.sub.4.sup.. 5 H.sub.2 O 1.25 -- -- --
NiCl.sub.2.sup.. 6 H.sub.2 O -- -- 109 -- FeCl.sub. 2.sup.. 4
H.sub.2 O -- -- 3.88 -- H.sub.3 BO.sub.3 -- -- 12.5 -- Na Lauryl
Sulfate -- -- 0.2 -- Cu(NO.sub.3).sub.2 -- -- -- 100 Sulfuric acid
(conc.) -- -- -- 30 ml./1 Formic acid (conc.) -- -- -- 40 ml./1
Acetic acid (anhydrous) -- -- -- 20 ml./ 1
__________________________________________________________________________
Platings from baths 1 and 2 were made using the "pulse plating"
technique described in U.S. Pat. application Ser. No. 573,417, now
U.S. Pat. No. 3,480,522 to James M. Brownlow, and having the same
assignee as this application. The description of the pulse plating
technique described in the above stated application is incorporated
herein.
The films are plated at constant current without agitation for 10
to 15 second intervals. They can also be plated with shaped current
pulses. After the plating intervals are completed, the bath is
agitated and is allowed to come to rest for about 15 to 60 seconds.
This sequence of steps is repeated until the desired film thickness
is attained. All platings were performed in a magnetic field of 40
oersteds and a bath temperature of 20.degree. C. The films were
plated on cathodes having an area of 3 .times. 3 inches. Films
having thicknesses of from 1,000 A to 1,800 A were plated.
Plating from baths 3 and 4 were made using well-known continuous
plating techniques, as opposed to the above described pulse plating
technique. The solution was agitated continuously during the
plating process.
At the completion of the plating operation, the magnetic films were
tested for uniformity of composition, thickness and magnetic
properties. Films from baths 1 and 2 were plated on 800 A of silver
evaporated on 15 mil thick 3 .times. 3 inch glass substrates.
Measurements of thickness, composition and of magnetic properties
coercive force, anisotropy field, anisotropy dispersion, and
magnetic skew were made on the 3 inches by 3 inches plates along
the diagonal from corner to corner at convenient intervals. Exactly
the same spot was used to take all the measurements. At least 10
spots were examined along the diagonal.
The composition and thickness were evaluated using 1 mm. .times. 3
mm. spot in connection with the X-ray fluorescence technique.
Characteristic K radiation of Ni, Fe and Cu was monitored from
which composition and thickness were determined.
Magnetic properties, H.sub.o, H.sub.k, .alpha..sub.90 and .beta.,
were measured using the Kerr magneto-optic technique which is well
known in the art. A spot 3 mm. .times. 3 mm. in size was examined
in each case. The spot selected was always the same spot which was
previously examined using the x-ray fluorescence technique for film
thickness and alloy composition.
Illustrative of uniformity of film thickness obtained from this
invention is the plot of film thickness as measured along the
diagonal of the film shown in FIG. 4. It is seen that the profile
of the thickness along the diagonal of the film plated in the cell
of this invention (represented by the heavily drawn line) is
relatively uniform throughout the film, while the thickness of
films obtained from the prior art cell (shown by the curve labeled
prior art cell) is nonuniform in character.
Referring to FIG. 5, there is shown a comparison plot of the Ni, Fe
and Cu composition measurements taken along the diagonals the
plated films prepared by this invention and by the prior art. The
plot is representative of measurements made on a large number of
films. The heavily drawn lines are indicative of the relatively
uniform compositions obtainable only in this invention. The more
finely drawn lines are indicative of the nonuniform compositions
obtained by the prior art.
Magnetic properties of the films prepared by this invention and by
the prior art are shown in FIGS. 6 and 7. The heavily drawn lines
are again representative of the uniformity of magnetic properties
of films plated by this invention, and the finely drawn lines show
the nonuniformity exhibited by films prepared by the prior art.
In summary, an apparatus for plating metal films having highly
uniform thickness, composition and magnetic properties throughout
the film has been devised. The apparatus is characterized by having
an anode and a cathode arranged in a bath container such that the
edges of the anode and cathode are substantially in contact with a
dielectric material. The electrodes so arranged prohibit spreading
of the current in the electrolyte along its path across the plates.
Therefore, equipotential lines are formed parallel to both
electrodes, current density is uniform and constant throughout the
whole cathode area.
While the invention has been particularly shown and described with
reference to the preferred embodiments thereof, it will be under
understood by those skilled in the art that various changes in form
and details may be made therein without departing from the spirit
and scope of the invention.
* * * * *