U.S. patent number 3,648,587 [Application Number 04/776,300] was granted by the patent office on 1972-03-14 for focus control for optical instruments.
This patent grant is currently assigned to Eastman Kodak Company. Invention is credited to Guy William W. Stevens.
United States Patent |
3,648,587 |
Stevens |
March 14, 1972 |
FOCUS CONTROL FOR OPTICAL INSTRUMENTS
Abstract
A method and apparatus particularly for making minute and very
accurate images such as the negatives which are printed on
photoresists in the production of microelectronic circuits. The
method and apparatus employ an objective lens assembly adapted to
be positioned in close proximity to a photographic emulsion layer,
for focusing thereon an image of an object to be copied. In
combination with the objective lens assembly there is provided a
source of liquid, the liquid being of approximately the same
refractive index as that of the emulsion and of a type that will
not cause the emulsion to swell, and a liquid supply nozzle mounted
for movement with the assembly and adapted to discharge the liquid
so that a liquid stream fills the space between the assembly and
the emulsion layer with a continuously renewed pool of liquid.
There is further provided in combination with the assembly a device
for sensing the pressure of the liquid in the nozzle so that the
distance between the assembly and the emulsion layer may be
monitored by noting variations in the liquid pressure in the nozzle
from that obtained when the emulsion is correctly spaced.
Inventors: |
Stevens; Guy William W.
(Berkhamstead, EN) |
Assignee: |
Eastman Kodak Company
(Rochester, NY)
|
Family
ID: |
10446525 |
Appl.
No.: |
04/776,300 |
Filed: |
October 10, 1968 |
Foreign Application Priority Data
|
|
|
|
|
Oct 20, 1967 [GB] |
|
|
47,867/67 |
|
Current U.S.
Class: |
355/44; 73/37.7;
359/737; 359/794; 396/89 |
Current CPC
Class: |
G03B
3/02 (20130101); G03F 7/70341 (20130101) |
Current International
Class: |
G03B
3/02 (20060101); G03B 3/00 (20060101); G03b
003/00 () |
Field of
Search: |
;331/94.5
;73/37.5,37.6,37.7 ;95/44 ;350/204 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Matthews; Samuel S.
Assistant Examiner: Hutchison; Kenneth C.
Claims
I claim:
1. An optical instrument for use in producing a greatly reduced
high-resolution photographic copy of an object comprising:
an objective lens assembly of the liquid immersion type that
includes at least one lens having a planar lens surface, said
assembly being adapted to be positioned in proximity to a
photographic emulsion layer to focus thereon an image of the object
to be copied;
liquid supply nozzle means mounted to move with the objective lens
assembly relative to the photographic emulsion layer, and adapted
to direct a stream of liquid into contact with the proximately
positioned photographic emulsion layer so as to fill the space
between the layer and the planar lens surface with a continuously
renewed pool of the liquid; and
a connection adapted to be connected to means for sensing
variations in the venting of liquid from the nozzle from that
obtaining when the objective lens assembly is correctly spaced from
the photographic emulsion layer.
2. An optical instrument as claimed in claim 1 wherein the nozzle
surrounds the objective lens assembly coaxially and has a single
outlet opening arranged to face the photographic emulsion layer
during operation.
3. An optical instrument as claimed in claim 1 wherein the nozzle
surrounds the objective lens assembly coaxially and has several
outlet openings equally spaced about its axis and arranged to face
the photographic emulsion layer during operation.
4. An optical instrument as claimed in claim 1 in combination with
means for supplying liquid to the nozzle at a constant head.
5. An optical instrument as claimed in claim 1 in combination with
means for sensing variations in the venting of liquid from the
nozzle, the said means comprising a pressure sensing instrument in
communication with the liquid in the nozzle upstream of a
restricted outlet from the nozzle.
6. An optical instrument for use in producing a greatly reduced
high-resolution photographic copy of an object comprising:
an objective lens assembly, said assembly including at least one
lens and a transparent cover element airspaced from said lens, said
assembly being adapted to be positioned in proximity to a
photographic emulsion layer to focus thereon an image of the object
to be copied;
liquid supply nozzle means mounted to move with the objective lens
assembly relative to the photographic emulsion layer, and adapted
to direct a stream of liquid into contact with the proximately
positioned photographic emulsion layer so as to fill the space
between the layer and the cover element with a continuously renewed
pool of said liquid;
means for supplying liquid to the nozzle at a constant head;
and
a connection adapted to be connected to means for sensing
variations in the venting of liquid from the nozzle from that
obtaining when the objective lens assembly is correctly spaced from
the photographic emulsion layer.
7. An optical instrument as claimed in claim 6 wherein the nozzle
surrounds the objective lens assembly coaxially and has a single
outlet opening arranged to face the photographic emulsion layer
during operation.
8. An optical instrument as claimed in claim 6 wherein the nozzle
surrounds the objective lens assembly coaxially and has several
outlet openings equally spaced about its axis and arranged to face
the photographic emulsion layer during operation.
9. An optical instrument as claimed in claim 6 in combination with
means for sensing variations in the venting of liquid from the
nozzle, the said means comprising a pressure sensing instrument in
communication with the liquid in the nozzle upstream of a
restricted outlet from the nozzle.
10. An apparatus which comprises:
an objective lens assembly adapted to focus on a photographic
emulsion surface spaced therefrom;
a chamber mounted for movement with said objective lens assembly
relative to said photographic emulsion, said chamber being adapted
to contain a liquid and having at least one restricted outlet for
directing a stream of liquid to fill the space between said
objective and said surface;
liquid supply means in communication with said chamber for
providing a constant flow of liquid into said chamber;
means for collecting said liquid after it has been discharged from
said restricted outlet;
means connecting said collecting means to said liquid supply means
to recirculate said liquid; and
means for sensing pressure variations introduced in said liquid
stream by variations in the spacing between said objective and said
surface.
11. A method of monitoring the spacing between a microscope
objective lens assembly and a photographic emulsion surface on
which said objective lens assembly is adapted to focus, said method
comprising:
flowing a stream of liquid, the liquid being of approximately the
same refractive index as the photographic emulsion and of a type
that will not cause the emulsion to swell, between said objective
lens assembly and said surface at a substantially constant flow
rate to fill the space therebetween; and
sensing the pressure variations introduced into said liquid stream
by variations in the spacing between said objective lens assembly
and said surface.
12. In the production of a greatly reduced high-resolution
photographic copy of an object using an objective lens assembly to
focus an image of the object on a photographic emulsion layer, the
improved method of monitoring the spacing of the objective lens
assembly and the said layer and maintaining a dust-free zone
therebetween which comprises directing a stream of liquid, the
liquid being of approximately the same refractive index as the
photographic emulsion and of a type that will not cause the
emulsion to swell, into contact with the photographic emulsion
layer from a liquid supply nozzle mounted to move with the
objective lens assembly relative to the layer, such that the liquid
fills the space between the layer and the objective lens assembly
when they are proximately spaced with a continuously renewed pool
of the liquid, and sensing variations in the venting of liquid from
the nozzle from that obtaining when the objective lens assembly is
correctly spaced from the layer.
13. The method as claimed in claim 12 wherein the liquid is
delivered to the nozzle at a constant head.
14. A method as claimed in claim 12 wherein the liquid is delivered
to the nozzle at a constant head, and a manometer connected to the
nozzle indicates variations in venting of the liquid from the
nozzle.
15. The method as claimed in claim 12 wherein the liquid issues
from said nozzle at a substantially constant flow rate.
Description
This invention relates to optical instruments and to methods for
microphotography, for producing greatly reduced high-resolution
photographic copies.
In the production of microelectronic circuits using photoresists it
is necessary to produce master negatives containing minute and very
accurate images. High power microscope objectives may be used for
this purpose, the objective being spaced a centimeter or less from
the point of image formation on the photographic emulsion surface.
When accurate focusing is required serious errors are produced if
the focusing is not varied to take account of departures from
flatness of the emulsion surfaces on a support of glass or film
which are successively positioned in front of the objective.
It is an object of the present invention to provide an optical
instrument and method for producing such photographic copies, in
which the spacing of the objective lens assembly and photographic
emulsion surface may be monitored.
According to one aspect of the present invention there is provided
an optical instrument for use in producing a greatly reduced
high-resolution photographic copy of an object which includes an
objective lens assembly adapted to be positioned in proximity to a
photographic emulsion layer to focus an image thereon of the object
to be copied, in combination with a liquid supply nozzle mounted to
move with the objective lens assembly in relation to the
photographic emulsion layer and adapted to direct a stream of
liquid into contact with the correctly positioned photographic
emulsion layer and to fill the space between this layer and the
objective lens assembly with the liquid, and a connection adapted
to be connected to means for indicating variations in the venting
of liquid from the nozzle from that obtaining when the objective
lens assembly is correctly spaced from the photographic emulsion
layer.
The nozzle may surround the objective lens assembly coaxially and
have a single outlet opening arranged to face the photographic
emulsion layer during operation. Alternatively the nozzle may have
several outlet openings equally spaced about the nozzle axis and
arranged to face the photographic emulsion layer during
operation.
The objective lens assembly may comprise at least one lens from and
a transparent cover element airspaced therefrom wherein the element
can be contacted by the liquid during operation, or the objective
lens assembly may be of the liquid immersion type having a lens
surface adapted to be contacted by the liquid during operation. The
objective lens assembly will be sealed to prevent the liquid from
entering between the optical elements thereof.
According to another aspect of the invention, in the production of
a greatly reduced high-resolution photographic copy of an object
using an objective lens assembly to focus an image of the object on
a photographic emulsion layer there is provided the improved method
of monitoring the spacing of the objective lens assembly and the
said layer and maintaining a dust-free zone therebetween which
comprises directing a stream of liquid into contact with the
photographic emulsion layer from a liquid supply nozzle mounted to
move with the objective lens relative to the layer, such that the
liquid fills the space between the layer and the objective lens
assembly when they are correctly spaced, and sensing variations in
the venting of liquid from the nozzle from that obtaining when the
objective lens assembly is correctly spaced from the layer.
Preferably the liquid has approximately the same refractive index
as the photographic emulsion.
Two embodiments of optical instrument for microphotography in
accordance with the present invention will now be described by way
of example with reference to the diagrammatic figures of the
accompanying drawing in which:
FIG. 1 shows a mainly sectional view, taken on the axis of the
objective lens assembly, of part of the first instrument;
FIG. 2 shows a similar view of part of the second instrument, which
includes an objective lens assembly of the liquid immersion type;
and
FIG. 3 shows the general arrangement of apparatus used with either
instrument.
Referring to the drawings, both instruments are intended to be used
in the production of a minute and accurate image on the
photographic emulsion surface of a plate to be used for the
fabrication of components for microelectronic circuits. The first
instrument includes an objective lens assembly 1 of the general
type used in compound microscopes but which has a tubular casing 2
extending beyond the front surface of the front lens 3. An airspace
4 is thus provided in front of this front lens 3, and the forward
end of the casing 2 is sealed in liquidtight manner by a plane
cover glass 5. The casing 2 may have a frustoconical rather than
cylindrical shape between the front lens 3 and the cover glass 5 so
that the objective lens assembly and nozzle described in greater
detail below may be positioned close to the point of image
formation.
An outer casing 6 is secured coaxially to the objective lens
assembly 1 and its casing 2 and defines a chamber 7 surrounding
these parts and extending flush with or just forward of the cover
glass 5. The outer casing 6 is formed with an inlet passage 8 and
with a connection 9 for a pressure sensing instrument in the form
of a manometer 10. The outer casing 6 forms a nozzle around the
objective lens assembly 1 and is formed with three nozzle outlets
11, these nozzle outlets being equally spaced around the cover
glass 5 at the front of the outer casing 6 and providing a
restricted outlet for liquid from the chamber 7. A liquid reservoir
12 is associated with the instrument, and liquid is arranged to be
delivered to the chamber 7 at a constant head from the reservoir 12
during operation. For this purpose a precision pump (not shown) may
be used associated with the instrument if desired. Pump means 13
are provided for returning liquid to the reservoir 12 after it has
flowed over the emulsion surface and been collected in a tray
14.
In operation the objective lens assembly 1 is brought close to the
upper surface of the photographic emulsion layer 15 on its support
film 16 to focus an image thereon of an object (not shown) to be
copied, and with this close spacing the emulsion surface coacts
with the nozzle outlets and casing 6 to control venting of the
liquid streaming from the chamber 7, in accordance with the
spacing. With a constant flow of liquid from the reservoir 12 the
pressure in the chamber 7, upstream of the restricted nozzle
outlets, is dependent upon this spacing, and variation in the
manometer reading from a predetermined value is therefore an
indication of a variation from this spacing. An operator may thus
be warned to refocus when necessary. The liquid streaming from the
chamber 7 maintains a continuously renewed pool of liquid that
provides a dust-free zone between the objective lens 1 and the
emulsion surface 13, and is returned to the liquid reservoir 12
where it can be reused. The pool of liquid may be considered to be
continuously renewed since during operation new liquid issuing from
the nozzle outlet continuously displaces "older" liquid already in
the pool, the "older" liquid being collected in the tray 14 for
recirculation. It may be filtered before being pumped back to the
chamber.
It will be appreciated that the photographic emulsion will only be
exposed to light during a predetermined exposure, and that
conventional techniques will be used for producing a visible image
in the emulsion. The manometer will be positioned where it may be
seen by the operator but the photographic emulsion will be shielded
from undesired light.
Various liquids may be used in carrying out the invention although
it is clear that they should not adversely affect the emulsion, for
example by causing it to swell. It is preferred, however, that use
is made of a liquid such as xylene having approximately the same
refractive index, 1.5 to 1.55, as the emulsion which will normally
be mainly gelatin. The light rays then enter the emulsion through a
medium which is optically homogeneous with the emulsion, so
reducing the recording of artifacts due to dust or minute blemishes
in the surface of the emulsion. Possible spoiling of the image by
refraction is thereby eliminated.
In the second embodiment the objective lens 20 of the optical
instrument is of the liquid-immersed type. A cover glass is not
then needed and the tubular casing 21 of the objective lens is
sealed in liquidtight manner at its forward end by the immersion
lens 22 whose forward surface is intended to be contacted by the
streaming liquid during use of the instrument. In other respects
the instrument and its operation is similar to that described
above, and no further description is therefore necessary.
It will be appreciated that the instruments described may be
modified in various ways. For example, the instrument may be
provided with a single nozzle outlet or with several nozzle outlets
through which liquid can flow towards the emulsion surface,
providing that these define a restricted outlet from the
chamber.
The invention has been described in detail with particular
reference to preferred embodiments thereof, but it will be
understood that variations and modifications can be effected within
the spirit and scope of the invention as described hereinabove and
as defined in the appended claims.
* * * * *