U.S. patent number 3,645,292 [Application Number 05/057,482] was granted by the patent office on 1972-02-29 for gas supply system.
This patent grant is currently assigned to H. L. Schoger & Associates, Inc.. Invention is credited to Henry L. Schoger.
United States Patent |
3,645,292 |
Schoger |
February 29, 1972 |
GAS SUPPLY SYSTEM
Abstract
An improved gas supply system for supplying nitrogen and/or
oxygen or other gases to semiconductor doping systems via liquid,
such as water, boiling in a flask in a manner whereby the supply of
gas remains consistent as to its characteristics, for example,
moisture content, purity, etc. A double check valve arrangement,
with one check valve weighted to a closed position, permits a gas,
such as oxygen, to be supplied selectively wet or dry to a doping
furnace as employed in semiconductor manufacture. The dual check
valve arrangement further serves to permit a second source of gas
to be employed. Liquid is maintained at a constant level in the
boiling water flask by means of a magnetic element carried in the
elongated stem of a float riding in the water. The magnetic element
serves to activate a reed switch for electrically controlling a
solenoid operated water supply valve.
Inventors: |
Schoger; Henry L. (Sunnyvale,
CA) |
Assignee: |
H. L. Schoger & Associates,
Inc. (Santa Clara, CA)
|
Family
ID: |
22010833 |
Appl.
No.: |
05/057,482 |
Filed: |
July 23, 1970 |
Current U.S.
Class: |
137/599.11;
137/205.5; 137/601.14 |
Current CPC
Class: |
C30B
31/165 (20130101); Y10T 137/3112 (20150401); Y10T
137/87507 (20150401); Y10T 137/87338 (20150401) |
Current International
Class: |
C30B
31/00 (20060101); C30B 31/16 (20060101); F16k
011/00 () |
Field of
Search: |
;137/205.15,599.1,599 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Cohan; Alan
Claims
I claim:
1. A gas supply system for doping semiconductor materials
comprising a source of gas, a supply line leading from said source,
a closed container adapted to receive water therein, means to
supply and heat the water in the container, an output line forming
a fluid discharge path from said container, a furnace input line
adapted to carry gas into a semiconductor doping furnace, first and
second check valves each oriented to pass fluid into said furnace
input line and disposed whereby the discharge side of each check
valve is coupled to supply gas under pressure to tend to close the
discharge side of the other valve, means forming a first and second
fluid path to said furnace input line from said source, said first
path including said second check valve means and said second path
including said container and said first check valve means,
selectively operable gas supply valve means coupled to said gas
supply line to selectively direct gas from said source to said
furnace input line via said first or second path, a steam relief
valve coupled to said second fluid path intermediate said first
check valve means and said container and selectively operable to
vent or contain steam pressure in said second path, and control
means operably coupled to means for operating both said steam
relief valve and said gas supply valve means and serving in one
state to operate the steam relief valve to prevent pressure buildup
in said second path when the gas supply valve means has been
operated to couple said source to said first path and in a second
state to reverse the conditions of the two last-named valve
means.
2. A gas supply system according to claim 1 in which there is
further included a second source of gas and means serving to
selectively couple same to said first path to be delivered to said
furnace input line while said second gas urges said first check
valve to a closed state.
3. A gas supply system according to claim 1 wherein each of said
check valves includes a movable closure element, said closure
element for said first check valve being characterized by means for
urging same to a position impeding the flow passage of said first
check valve in favor of that of said second check valve.
4. A gas supply system according to claim 3 wherein the last-named
means comprises additional weight carried by said closure element
of said first check valve as compared to that of the closure
element of said second check valve, said valves being oriented to
dispose their closure elements for movement between lowered and
raised positions to respectively close and open a flow passage in
their respective check valves.
5. In a system for supplying gas to an input line of a
semiconductor furnace from a source of gas, first and second check
valves, each of said check valves including a movable closure
element, each check valve being oriented to pass gas to said input
line and disposed whereby the discharge side of each check valve is
coupled to supply gas to the discharge side of the other for
closing the flow passage thereof, the closure element for said
first check valve being provided with means for urging same to a
position closing the flow passage of said first check valve in
favor of that of said second check valve whereby the pressure of
gas fed to said input line via said second check valve plus the
action of said means serves to protect said gas from being mixed
with gas fed via said first check valve.
6. In a system for supplying gas according to claim 5 wherein said
means consists of a heavier closure element in said first check
valve than in said second check valve, the closure elements of both
of said check valves being oriented to require upward movement in
order to pass gas through their respective valves.
7. In a system for supplying gas according to claim 1 further
including a source of liquid for said container, float means riding
in said liquid in said container, electrically operated valve means
serving to selectively supply said liquid to said container, and
switch means operably responsive to the position of said float
means for operating said valve means in response to the liquid
level within said container.
8. In a system according to claim 1 further including an elongated
float element for riding deeply in liquid maintained in said
container, electrically operated valve means serving to selectively
supply liquid to said container, and switch means operably
responsive to the position of said float element for operating said
valve means in response to the liquid level within said container,
said switch means including a pair of conductive movable leave
including a portion of each disposed in closely spaced relation to
the other, one of said leaves being nonmagnetic and the other being
magnetically responsive, a magnet carried by said float element for
movement into and out of proximity with said portions to attract
said magnetically responsive leaf into engagement with the other
leaf to close the switch, said valve means being operably
responsive to closure of the switch to control the flow of liquid
into said container.
Description
BACKGROUND OF THE INVENTION
This invention pertains to a gas supply system particularly useful
in closely controlling the characteristics of gas supplied to a
doping furnace in the manufacture of semiconductor materials.
As is known, various gases such as nitrogen and oxygen are employed
in the so-called "doping" of semiconductor materials in the course
of manufacture of semiconductor materials. With oxygen it is
desirable under some circumstances to supply the oxygen to the
doping furnace in a so-called "dry" state whereas in other
circumstances, it has been found desirable, if not a requirement,
to supply the oxygen in a so-called "wet" state as by passing the
oxygen first through a water environment.
Heretofore, most systems which have been developed for meeting the
foregoing criteria have had difficulty in providing consistent gas
characteristics.
SUMMARY OF THE INVENTION AND OBJECTS
In general, a gas supply system has been provided for delivering
gas to a doping furnace. The system comprises a closed container
adapted to receive liquid, such as water, therein and means to
supply and heat water in the container while an output line forms a
fluid discharge path from the container. First and second check
valves are each oriented to pass fluid into a doping furnace input
line, one from the flask and the other from a source of gas, such
as oxygen, for example. The discharge side of each check valve is
coupled to supply gas under pressure to tend to close the discharge
side of the other. A first gas delivery path from the source of gas
supply includes one of the check valves and a second gas delivery
path includes the container and the other check valve. In addition,
there is provided a selector valve coupled to the gas supply line
to direct gas from the source to the furnace input line via either
the first or second path, depending upon whether or not wet or dry
gas is desired. A steam relief valve coupled to the second fluid
path is located between the container and that check valve located
in the discharge path from the container to the furnace input line.
The steam relief valve is selectively operable to vent or contain
steam pressure and a control operates both the steam relief valve
and the gas supply valve whereby, in one state, it operates the
steam relief valve to vent pressure from its path when the gas
supply selector valve has been operated to couple the gas source to
the furnace via only the first-named check valve. In its other
state, the control means reverses the condition of the last-named
two valves.
In general, it is an object of the invention to provide an improved
gas supply system.
It is another object of the invention to overcome the foregoing and
other problems existing in present day gas supply systems.
The foregoing and other objects of the invention will be more
clearly understood from the following detailed description of a
preferred embodiment.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a diagrammatic illustration of a gas supply system
according to the invention;
FIG. 2 is an elevation view, partly in section, in enlarged detail
showing a float and stopper assembly represented in FIG. 1;
FIG. 3 is an enlarged elevation section view of a reed switch shown
in association with the stem of the float;
FIG. 4 is an enlarged elevation view, partly in section, of the
system portion labeled "FIG. 4" in FIG. 1.
DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT
A gas supply system 10 includes a source 11 of gas, such as oxygen,
for example. Source 11 preferably can include a conventional toggle
valve 12, regulator 13, appropriate meter 14, and submicron filter
16 connected in series and feeding into a conventional flow meter
17 whereby oxygen is brought to a normally closed solenoid operated
flow valve 18 which, when opened, provides oxygen to the system on
the gas supply line 19.
Thus, a pushbutton 21 or other type control serves to energize the
solenoid 22 for opening valve 18 from its normally closed
state.
A closed container such as the glass flask 23 is adapted to receive
liquid, such as water, from the waterline 24 as controlled by the
electrically operated valve means 26. The manner of controlling the
input supply of water is described further below whereby the volume
of water or other liquid is continuously maintained in a given
level, notwithstanding losses through vaporization.
Means are provided for heating the water in the container, as by
means of the electric heating mantle 27, to boil the water in flask
23.
An output line 28 forms a fluid discharge path from flask 23. Line
28 includes a "Y" junction 29, one branch of which leads to a check
valve 31 while the other branch leads to a steam relief valve
32.
Valve 32 is normally open under the action of the spring 33 whereby
the spool 34 will be located at the left end of the valve housing
as shown in FIG. 1. Energizing solenoid 36 will, however, move
spool 34 to a position blocking the output passage of that branch
of line 28 leading through valve 32 thereby causing steam pressure
to build up within flask 23 or to pass out of check valve 31 and
into input line 37 of a diffusion furnace 38.
A selectively operable gas supply valve 39 normally serves to
interconnect supply line 19 with a "dry" oxygen line 41 which forms
a fluid path via the connection 42 and a second check valve 43 to
supply oxygen directly to input line 37. The discharge side of
check valve 43 is directly interconnected to the discharge side of
check valve 31 whereby the gas pressure of oxygen being delivered
to furnace 38 is utilized to prevent steam from being added to the
input line 37 at such times. In this manner the oxygen remains
dry.
In order to further insure against entry of steam into input line
37, check valve 31 includes means for urging its closure element to
a position impeding (or closing entirely) the flow passage of valve
31 in favor of valve 43. The pressure of the oxygen supplied via
check valve 43 against the discharge side of check valve 31 is
supplemented by the inclusion of a load or weight of small lead
balls or "shot" or other relatively heavy material 50 carried
within the movable closure element 44 which is formed as a hollow
glass blown piece.
Thus, it is evident that the pressure of gas fed from valve 43 plus
the action of the weight of the lead shot in the closure element in
valve 31 serves to protect the gas from being mixed with gas (or
e.g., steam) fed via valve 31 to input line 37.
Closure element 44 rides between a normally lowered position and a
raised position within a hollow housing 46, preferably of glass,
formed on its interior surface with a ground glass finish in the
region 47 so as to provide a relatively tight fit with the lower
end of element 44. Pressure or gas directed downwardly against
closure element 44, in addition to its weight, keeps a tight seal
to the flow passage via housing 46.
On the other hand, when gas enters from below via the tube 51, the
closure element is moved longitudinally within housing 46 until
arrested short of its upper end by means of a trio of radially
inwardly directed stops 52 which keep closure element 44 from
seating into the upper opening 53.
Check valve 43 is similarly arranged but its closure element 48
does not carry the weight carried by closure element 44. The upper
ends of both housings or valve bodies 46, 49 have been
interconnected by means of the tubing 54, such as glass tubing,
whereby the output from each of the two check valves 31, 43 can be
connected by means of the glass connection fitting 56 to the input
line 37 of furnace 38. It will be further evident that the two
check valves are each oriented to pass fluid into the furnace input
line and are further disposed whereby the discharge side of each of
the two check valves is coupled to supply gas under pressure to the
discharge side of the other to tend to close the flow passage
thereof.
The furnace input line 37 is selectively supplied with gas from
source 11 by means forming a first or second fluid path.
A selectively operable gas supply valve 39 is coupled to the gas
supply line 19 so as to selectively direct gas from source 11 to
furnace 38 via a first or a second path dependent upon the
condition of solenoid 58. Thus, when solenoid 58 is deenergized,
the spool 59 will be urged upwardly by the spring 61 so as to
interconnect gas supply line 19 to line 41.
By energizing solenoid 58, spool 59 will be drawn downwardly
against spring pressure so as to connect line 19 to feed oxygen
along the connection 57 into flask 23.
Briefly, to this point, it will be readily evident that either one
of two paths may be defined for supplying oxygen to the furnace 38.
One path runs from source 11 through valve 39 and then along line
41 and connection 42 into check valve 43. From check valve 43 the
gas serves to aid in closing the weighted check valve 31 and
travels into input line 37. This oxygen is referred to as "dry"
oxygen since it does not pick up any steam from flask 23.
However, upon energizing solenoid 58, spool 59 will be shifted so
as to preclude the passage of oxygen along line 41 and to redirect
the oxygen supply via connection 57 and flask 23 (where the water
will be boiling). Oxygen and steam escaping from flask 23 is
discharged along output line 28 and thence via the weighted check
valve 31 into input line 37.
In this condition of operation, it will be readily evident from the
electrical circuit traced from the battery 62 that both solenoids
36 and 58 are energized upon closure of switch 63 whereby the
normally open steam relief valve 32 will be closed by movement of
spool 34 into a position blocking the output passage of line 28.
Pressure in line 28 will be required to overcome the weight of the
closure element 44 of valve 31 in order to escape. Simultaneously,
of course, oxygen will be fed into flask 23 so that it can become
moistened and discharged. Pressure on the discharge side of check
valve 31 serves, as above described, to aid in closing the check
valve element 48.
In addition to the above, a second source 64 of gas, such as supply
of nitrogen, entering from a toggle valve 66 via a regulator 67,
meter 68 and submicron filter 69 feeds through flow meter 71 and
through the normally open solenoid operated valve 72.
Accordingly, in standby operation, conventionally the nitrogen
supply will be discharging along line 41 and connection 42 through
check valve 43 whereby the pressure of the nitrogen supply serves
to cause check valve 31, in addition to its weight, to insure
closure of check valve 31 as the nitrogen enters input line 37.
This serves to protect against steam entering and mixing with the
flow of nitrogen into furnace 38.
It has been observed that in order to maintain the characteristics
of the gas supplied by the system substantially constant at all
times, the water level in flask 23 must be maintained relatively
constant within a relatively narrow range.
Accordingly, means have been provided for the automatic control of
the feeding of water into flask 23 as it is discharged in the form
of steam or vapor via line 28.
In general, there has been provided a source of water such as
supplied via line 73 into flask 23. Float means for riding in the
water in flask 23 operate the solenoid 74 for electrically
controlling the operation of valve 26 thereby selectively and
variously supplying water to flask 23.
Switch means operably responsive to the position of the float means
serves to operate valve 26 in response to the water level within
the container as now to be described.
Flask 23 is sealed shut by means of a glass stopper 76 formed at
its upper end with a pair of outwardly projecting ears 77 located
diametrically opposite each other and adapted to engage the end of
a helical spring 78 attached at its other end to similarly
projecting ears 79 formed to protrude from the glass flask 23. In
this way, stopper 76 is retained firmly seated in the neck of flask
23. Stopper 76 is also formed to include a downwardly extending
tubular float guide 81. The float guide 81 is further formed with
inwardly protruding nibs 82 variously disposed radially around the
inner bore of guide 81. The nibs 82 are located at both the upper
ends and lower ends of element 81.
An elongated hollow glass float 83, formed with a relatively small
elongated hollow stem 84, is disposed within flask 23 to ride
deeply in the volume of water within the flask whereby surface
disturbances on the water will not affect its generally stable
state. Stem 84 is guided by nibs 82 within guide 81, and in order
to minimize any drag which might occur between the moving and
stationary surfaces, a Teflon or other smooth plastic sleeve 86 is
coated about the length of stem 84.
For purposes which will be described further below, a permanent
elongated magnet 87 is positioned in the upper end of the hollow
stem 84 and fastened in place by suitable means, such as by an
epoxy cement.
Stopper 76 further includes a switch receptacle tube 88 closed at
its lower end but open at its upper end to receive an elongated
reed switch 89 whereby the proximity of magnet 87 serves to effect
closure of the movable tips of pair of elongated relatively thin,
flat, resilient leaves 91, 92. Leaves 91, 92 are housed in a
separate cylindrical glass tubular capsule 93 and further encased
in a cylindrical envelope 94 of protective material. The two
terminals 96, 97 extend outwardly from the ends of capsule 93, the
lower terminal 96 extending directly longitudinally outwardly,
while the upper terminal 97 is bent at a right angle. When terminal
97 is seated properly in a keyway 98, the leaves 91, 92 in the
switch receptacle tube 88 will be properly oriented for proper
operation.
Thus, it is to be understood that, for example, leaf 92 may be
constructed of a nonmagnetic material such as aluminum and the leaf
91 formed of a magnetic material such as iron so that, upon
movement into proximity of magnet 87, the iron leaf 91 will be
caused to move toward the magnet striking the nonmagnetizable leaf
92 thereby completing a circuit between terminals 96, 97.
Having in mind the foregoing, magnet 87 normally rides above and
out of the range of the tips of leaves 91, 92 whereby to indicate
that float 83 is riding at a proper level since switch 89 will then
be open. Switch 89 controls valve 26.
Accordingly, the solenoid operated valve 26 is opened when solenoid
74 is energized and will be conditioned so as to cause its
associated spool 26a to be moved into position to supply water
through valve 26 so long as solenoid 74 remains energized by the
presence of magnet 87 in the vicinity of the tips of leaves 91, 92
of switch 89.
Ultimately, the water level in flask 23 rises upwardly beyond its
effective range and the tips of leaves 91, 92 spring apart due to
their generally resilient nature thereby opening the circuit
including solenoid 74 so as to permit the spring 99 to urge valve
spool 26a to a position closing valve 26 and thereby to cut off
delivery of additional water to flask 23.
It has been observed that maintenance of the water level at a
constant position serves to aid in providing gas of constant doping
characteristics thereby proving more reliable doping of
materials.
From the foregoing it will be readily evident that there has been
provided an improved gas supply system particular useful for
supplying gas with constant characteristics to a diffusion furnace
as employed in doping semiconductor materials.
* * * * *