U.S. patent number 3,644,731 [Application Number 04/820,078] was granted by the patent office on 1972-02-22 for apparatus for producing an ion beam by removing electrons from a plasma.
This patent grant is currently assigned to Commissariat A. L'Energie Atomique. Invention is credited to Jean-Francois Eloy.
United States Patent |
3,644,731 |
Eloy |
February 22, 1972 |
APPARATUS FOR PRODUCING AN ION BEAM BY REMOVING ELECTRONS FROM A
PLASMA
Abstract
The present invention relates to a method of production of ions
wherein a plasma is generated from a target and then subjected to a
number of successive electric fields to sort the particles which
form the plasma by providing the successive electric fields with
increasing amplitudes to slow down the electrons, collecting said
electrons on electrodes and then causing the ion-enriched beam to
converge towards the exit aperture by means of a final electric
field.
Inventors: |
Eloy; Jean-Francois (Grenoble,
FR) |
Assignee: |
Commissariat A. L'Energie
Atomique (Paris, FR)
|
Family
ID: |
8650281 |
Appl.
No.: |
04/820,078 |
Filed: |
April 29, 1969 |
Foreign Application Priority Data
Current U.S.
Class: |
250/288; 250/289;
313/361.1; 250/425 |
Current CPC
Class: |
H01J
49/161 (20130101) |
Current International
Class: |
H01J
49/16 (20060101); H01J 49/10 (20060101); H01j
039/34 () |
Field of
Search: |
;250/41.9SA,41.9SB,41.9SE,49.5TE ;313/63,230 ;315/111 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lindquist; William F.
Claims
What we claim is:
1. Device for generating an ion beam, comprising, in an evacuated
enclosure:
a target for emission of a plasma of ions and electrons and carried
in a tubular member to provide an equipotential cage for said
target,
an extraction plate formed with a circular opening aligned with
said tubular member and in spaced relation thereto,
an electrically conductive grid disposed transversely of said
opening and carried by said extraction plate,
a preacceleration plate in spaced relation with said extraction
plate and formed with a wide slot aligned with said opening,
an electrically conductive grid disposed transversely of said slot
and carried by said preacceleration plate,
an annular concentration electrode aligned with said
preacceleration plate and in spaced relation thereto,
an acceleration and beam definition plate located in spaced
relation to said electrode and formed with a slit narrower than
said slot and aligned therewith,
electrical voltage means connected to said target, to said plates
and to said electrode for bringing said preacceleration plate, said
extraction plate and target to increasing positive potentials,
respectively, with respect to said acceleration plate and bringing
said concentration electrode to a potential slightly higher than
that of the preacceleration plate, whereby electrons will be
removed from said plasma by said extraction and preacceleration
plates and the resulting ion beam will be focused by said
concentration electrode at said slit in said acceleration and beam
definition plate,
and means for exciting said target to produce the plasma.
2. A device as described in claim 1, the potential of said target,
of said extraction plate, of said preacceleration plate, and of
said concentration electrode with respect to said acceleration
plate being respectively about 8.5 kv., from 8.5 to 8.3 kv., from
8.3 to 7.5 kv. and from 8.5 to 7.5 kv.
3. An ion source in accordance with claim 1, said tubular member
having an internal rectangular cross section.
4. An ion source in accordance with claim 1, said tubular member
having a circular cross section.
5. An ion source in accordance with claim 1, including a window in
said tubular member and a grid in said window.
6. An ion source in accordance with claim 1, including a diaphragm
in said extraction plate.
7. An ion source in accordance with claim 1, said means for
exciting said target including a laser and means for directing the
beam produced by said laser into said target.
8. An ion source in accordance with claim 7, said means for
directing the laser beam onto said target includes a port in said
enclosure, a lens secured in said port and a plane mirror
reflecting the laser beam onto said target.
9. A mass spectrograph including the ion source of claim 1, wherein
said exciting means comprises a laser, a vacuum pumping system
connected to the enclosure of said source, means for the magnetic
deflection of the ion beam derived from said source and means for
recording the deflected ion beam on a photographic plate.
Description
The invention relates also an ion source for carrying out this
method. This source comprises an assembly constituted by a casing,
a metallic cylinder and a metallic target placed at the bottom of
said cylinder and in coaxial relation with said assembly a
perforated extraction plate having preferably a circular opening
fitted with a grid, a preacceleration plate having an opening
fitted with a grid, a concentration electrode formed of an annular
sleeve and a definition plate provided with a slit, means being
provided for exciting the target in order to produce a plasma.
This invention relates to a novel method of production of ions, an
ion source for carrying out said method as well as a mass
spectrograph for the utilization of said source, the ions of which
are produced by the impact of a laser beam.
It is known to extract a beam of charged particles from a plasma
burst or plasmoid derived from a suitably excited target, the
initial distribution of ionization rates of the chemical elements
which form the target being well defined. However, no attempts to
extract the ions from the plasma while retaining the initial
distribution of ionization rates have ever proved successful. Up to
the present time, there has not existed any known method for
removing the causes of differential ionization of the different
elements such as some unwanted electric discharge phenomena.
The method of production of ions according to the present invention
provides a remedy for the above-noted deficiencies of methods
employed in the prior art.
According to said method which entails the use of a target, a
plasma is generated from said target and then subjected to a number
of successive electric fields. The method is distinguished by the
fact that it consists in sorting the particles which form the
plasma by providing the successive electric fields with increasing
amplitudes in order to slow down the electrons and collecting said
electrons by means of electrodes, then in causing the ion-enriched
beam to converge towards the exit aperture by means of a final
electric field.
The beam convergence electric field is produced by means of an
annular electrode which is coaxial with the ion-enriched beam.
The plasma is generated by a beam which is produced by a laser and
directed onto the target.
The invention is also concerned with the construction of a source
for carrying out the method aforesaid. Said source essentially
comprises an assembly constituted by a casing, a metallic cylinder
and a metallic target placed at the bottom of said cylinder, and in
coaxial relation with said assembly a perforated or so-called
extraction plate having a preferably circular opening fitted with a
grid, a so-called preacceleration plate having an opening fitted
with a grid, a concentration electrode formed of an annular sleeve
and a definition plate provided with a slit, means being provided
for exciting the target in order to produce a plasma.
A number of known techniques are available for the purpose of
producing a plasma from the target. Said target can be subjected to
ion bombardment or "sputtering;" a high-frequency discharge can be
produced between two electrodes; and finally, the target can be
excited by means of a laser beam.
In the case last referred to, the plasma is generated by the impact
of the laser beam on the target. The means for causing excitation
of the target comprise a port sealed in the casing of the source
and a lens which is also secured to said casing for concentrating
said beam on said target by means of a plane mirror through a
gridded window of the metallic cylinder at the bottom of which said
target is disposed.
One of the main applications of a source of this type is the
development of a mass spectrograph which permits accurate
superficial isotopic analyses.
The apparatus under consideration comprises a laser, an ion source
of the type hereinabove described, a pumping system connected to
the casing of the ion source, a system for the magnetic deflection
of the ion beam derived from the source and a device for recording
on photographic plates.
Apart from the main arrangements mentioned above, the invention is
also concerned with a number of different secondary arrangements
which will be mentioned hereinafter, especially in connection with
the source employed for carrying out the method according to the
invention.
In order that the properties of the present invention may be more
readily understood, there will now be described an ion source for
the application of the method according to the invention as well as
a spectrograph which makes use of said source, it being understood
that neither the source nor the spectrograph are intended to set
any restriction on the modes of execution or on the potential
applications of the invention.
Reference is made to the accompanying drawings, in which:
FIG. 1 is a sectional view taken along an axial plane of symmetry
and showing an ion source according to the invention, the target of
which is excited by a laser beam;
FIG. 2 is a sectional view of the same source taken along a plane
which is perpendicular to the first section plane;
FIG. 3 is a diagrammatic presentation of a spectrograph in which
the ion source of FIGS. 1 and 2 is employed;
FIG. 4 is an isometric representation of the target, extraction
plate and preacceleration plate of a modified embodiment of the
present invention.
The source 2 is contained within an enclosure 4 which consists
essentially of a cylinder 6. A plurality of tubes 8-10 (FIG. 1) and
9-11 (FIG. 2) having their axes at right angles to that of the
first tube terminate in said cylinder and the top portion of the
cylinder is closed by an insulating plate 16 having insulated
passageways 18 through which are passed high-voltage conductors 20
for supplying the source electrodes.
The tube 8 serves to connect the source enclosure 4 to the pumping
device 74 (which is not shown in the drawings). The tube 10 is
closed by a detachable end plate 22 through which the target to be
studied can be introduced.
It will be noted that in the example described, the target 15 is
excited by a laser beam and that, as a result of the impact of said
beam, neutral atoms are ejected in the form of vapor as well as
positive and negative charges which form a plasma. The device for
producing the excitation of the target will be described
hereinafter.
The target 15 constitutes the base of a metal cylinder 24. All the
electrodes of the source are associated coaxially with the assembly
15-24. A circular extraction plate 26 is provided with an opening
which is also circular and fitted with a grid 28. An adjustable
diaphragm 30 is associated with said opening. Diaphragm 30 has an
opening for passage of the plasma and the size of this opening may
be varied as required. The intended function of the grid is to make
the electric field as uniform as possible in the vicinity of the
axis of the source, especially when the positive and negative
charges are of high density, and the grid consequently serves to
separate the ions from the electrons.
The source further comprises a preacceleration plate 32 in which is
pierced a wide slot fitted with a grid. This second electrode
enhances the action of the extraction plate and has the effect of
reducing the danger of breakdown and discharge by preventing the
application of the entire acceleration voltage to electrodes
located in the region reached by the vapor which is ejected from
the target as a result of the laser impact.
The concentration electrode 34 consists of a coaxial sleeve and a
ring which is fitted on the external surface of said sleeve.
A final electrode consists of an acceleration plate 36 in which is
formed a slit for the definition of the beam, or object slit.
The electrodes of the source are brought to stabilized potentials
whilst the definition plate 36 is connected to ground, the target
is brought to the most positive potential by means of a series of
cells associated with stabilizing capacitors. Connections on said
series of cells serve to supply the extraction electrode 26,
preacceleration electrode 32 and acceleration or definition
electrode 36.
The concentration electrode 34 is maintained by means of a second
series of cells at a positive potential with respect to the
potential of the preacceleration electrode 32. Stabilization is
also obtained in this case by means of a capacitor.
The operation of the source can be explained as follows.
Ejection of positive ions and electrons resulting from the impact
of the laser beam on the target is accompanied by the appearance of
an instantaneous target-electron current of very high intensity.
The plasma which is generated and the expansion of which is
facilitated by the equipotential cage constituted by the metal
cylinder 24 is therefore of positive polarity but also contains a
high proportion of electrons whose presence is even more
troublesome than that of a vaporized mass. These phenomena have
made it necessary to devote particularly close attention to the
development of high-voltage supply arrangements.
The potential of the extraction plate is so determined that the
majority of the electrons are subjected to a resultant force which
tends to move them away from the axis and are therefore collected
by said plate but do not pass through this latter. This potential
must be determined with care in order to prevent any displacement
of electrons and ions in opposite directions under the influence of
the electric field and therefore any discharge into the vapor. It
would consequently not be feasible to incorporate said source in a
spectrograph since the initial distribution of ionization rates
between the ions is disturbed.
The utilization of a preacceleration plate is not essential
although an electrode of this type can perform a function which is
complementary to the role of the extraction plate. In this case,
said preacceleration plate collects the majority of electrons which
have passed through the plate 26.
The present Applicant has given consideration to the shape of the
concentration electrode 34 and has found that an annular shape was
highly conducive to the results which it is sought to achieve. This
shape of electrode is intended to reduce the solid angle of
divergence of the incident ion beam and to permit of final
acceleration with minimum divergence. It has already been explained
that this electrode is brought to a potential which is more
positive than the preacceleration plate 32 and therefore exerts a
repulsive force on the ions. In short, the resultant of the
slightly divergent force to which the ions are subjected at the
level of the preacceleration plate and of the repulsive force
produced by said electrode 34 causes the ions to converge towards
the axis.
Finally, the definition plate 36 which is connected to ground and
therefore has the highest potential difference with respect to the
target defines the shape of the beam and selects that portion of
said beam which passes through the slit formed in said plate. By
reason of the fact that only the portion referred to is useful, the
opening of the preacceleration plate has been given a rectangular
shape which eliminates any nonuseful regions of the beam at the
level of said opening and thus reduces space charge effects. On the
other hand, openings of revolution have been maintained in the case
of the extraction plate and the concentration electrode in order
that focusing along one axis should not result in defocusing along
the perpendicular axis.
Referring to FIG. 4, there is shown an embodiment of the invention
in which the opening of the preacceleration plate 32' is
rectangular and the target carries a tubular member 24' of
rectangular cross section. The extraction plate 26' has diaphragm
30' removably secured thereto for selection of an appropriately
sized opening in the diaphragm to provide an adjustable
diaphragm.
Referring to FIG. 2, there will now be described the sectional view
which is taken along a plane at right angles to the first section
plane. It will be noted that the majority of the elements shown in
FIG. 1 are also illustrated in this figure and are designated by
the same reference numerals. There can be seen in this figure two
new portions of the casing 6, namely the tubes 9 and 11 having axes
at right angles to that of the tube 6 and to the axes of the tubes
8 and 10.
Said tubes contain respectively the optical system 38 for the
introduction of a laser beam and the system 40 for the displacement
of the target 15.
The first system comprises a port 42 which is secured to the end of
the tube 9, a device 44 for fixing the lens 46 which serves to
focus a laser beam 48 on the target 15. Said beam is directed
towards the target by means of a silvered mirror 50 and a grated
window 54 of the metal cylinder 24.
The target 15 is attached to a sample holder 56 provided with a
toothed rack 58. The member 56 is held in a support 60. The target
can be displaced either backwards or forwards with respect to the
plane of FIG. 2 by virtue of the movement of rotation of a
gearwheel 62 which drives the toothed rack 68 when the target
position control arm 64 is caused to rotate.
One of the main uses of the ion source of FIGS. 1 and 2 consists in
incorporating said source in a mass spectrograph of the type shown
in FIG. 3.
This apparatus comprises a ruby laser 66, an ion source 68 having a
target which is excited by a laser beam, said source being of the
type illustrated in FIGS. 1 and 2, a device 70 for the magnetic
deflection of ions, a device 72 for collection and photographic
recording as well as a pumping device 74 connected to the casing of
the ion source.
The ruby laser 66 which is cooled by evaporation of liquid nitrogen
operates in the Q-switched state and is of the rotating mirror
type.
The source 68 has already been described in the foregoing. The
device 70 for magnetic deflection of the ion paths constitutes a
magnetic prism having an angle equal to 60.degree.. Said device
comprises an electromagnet 78 fitted with pole pieces 80 and
between these latter a tube section 76 traversed by the ion beam
which is derived from the source. A diaphragm is placed at the
entrance of the prism and limits the angle of divergence of the ion
beam. Another diaphragm which is narrower collects a lateral
fraction of the ion beam which emerges from the magnetic prism.
The quantities of charges received by the definition plate and by
the diaphragm last mentioned are measured at the same time by means
of a dual-beam oscillograph.
The ions transmitted by the final diaphragm are received by a
photographic plate 82 of the collecting and recording device 72.
Said plate is tangent to the focal surface of the spectrograph. The
impact of the ions on the sensitive film of the photographic plate
results after development of said film in blackening which is
proportional to the quantities of ions which strike the target. The
shape of the blackened lines obtained reproduces the shape of the
object slit. Each line corresponds to a ratio of m/e.
The present Applicant has constructed an actual spectrograph of the
type described above. The laser employed delivers within a time
interval of 4 microseconds a number of light pulses having a total
energy which can attain 0.2 joule. The lens 46 which serves to
concentrate the beam of the laser on the surface of the source
target has a focal distance of 43 mm.
The dimensions of the principal elements of the source are as
follows:
The extraction plate 26 has a circular opening fitted with a grid
28 having a transparency of 85 percent and with a diaphragm 30
having an internal diameter between 2 and 10 mm.
The preacceleration plate 32 has a wide slit measuring 8.times.15
mm. whilst the internal diameter and the length of the
concentration electrode can vary between 5 and 15 mm. The
definition slit of the acceleration plate has dimensions in the
vicinity of 1.times.10 mm.
The voltages to which the different electrodes of the gun are
brought have approximately the following values:
target: 8.5 kv.
extraction plate: 8.5 to 8.3 kv.
preacceleration plate: 8.3 to 7.5 kv.
concentration electrode: 8.5 to 7.5 kv.
definition plate: 0
This ion source has made it possible to obtain a focused
accelerated ion beam having a mean intensity of 200 microamperes.
Said source has been employed with a single-focus mass spectrograph
with photographic plate detection.
The performances of the mass spectrograph as a whole were such that
the recorded range of mass defined by the ratio of masses received
at both ends of the plate was 1.6 and the resolving power was
200.
* * * * *