U.S. patent number 3,641,389 [Application Number 04/874,175] was granted by the patent office on 1972-02-08 for high-power microwave excited plasma discharge lamp.
This patent grant is currently assigned to Varian Associates. Invention is credited to William J. Leidigh.
United States Patent |
3,641,389 |
Leidigh |
February 8, 1972 |
HIGH-POWER MICROWAVE EXCITED PLASMA DISCHARGE LAMP
Abstract
A high-power microwave plasma discharge lamp is disclosed. The
lamp includes a ceramic tube filled with gas and closed at one end
by a window transparent to the optical radiation output of the
lamp. The ceramic tube extends through a cavity resonator excited
with microwave energy for exciting a plasma discharge within the
lamp.
Inventors: |
Leidigh; William J. (Belmont,
CA) |
Assignee: |
Varian Associates (Palo Alto,
CA)
|
Family
ID: |
25363154 |
Appl.
No.: |
04/874,175 |
Filed: |
November 5, 1969 |
Current U.S.
Class: |
315/39; 313/36;
313/44; 313/231.01 |
Current CPC
Class: |
H01J
65/044 (20130101) |
Current International
Class: |
H01J
65/04 (20060101); H01j 007/46 (); H01j
019/80 () |
Field of
Search: |
;313/231
;315/39,111 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Saalbach; Herman Karl
Assistant Examiner: Chatmon, Jr.; Saxfield
Claims
I claim:
1. In a high-power microwave excited plasma discharge lamp, means
forming a cavity resonator structure having a pair of aligned bores
in opposite sides of said cavity structure, means forming an
elongated gastight tubular plasma discharge lamp envelope structure
extending through said cavity resonator and into said aligned
bores, said lamp envelope being filled with a gas capable of
emitting optical radiation within a certain range of desired
wavelengths upon excitation by microwave energy, means for exciting
said cavity resonator with microwave energy to produce a microwave
plasma discharge within the gas filled lamp, means forming a
gastight window structure sealed over one end of said tubular lamp
envelope for passing output optical radiation at the desired
wavelength therethrough, and said tubular lamp envelope including a
central portion made of ceramic, and a pair of coolant apertures in
opposite sidewalls of said cavity, and means for directing a stream
of coolant onto said tubular lamp envelope for cooling same in
use.
2. The apparatus of claim 1 including means forming a metallic
window frame structure for sealing said window over the end of said
tubular ceramic lamp envelope.
3. The apparatus of claim 2 wherein said ceramic lamp envelope is
made of a material selected from the class of alumina and
beryllia.
4. The apparatus of claim 2 wherein said cavity resonator is
rectangular having a pair of opposed broad walls closed about their
periphery by narrow sidewalls, and wherein said pair of aligned
apertures for receiving said lamp envelope are centrally disposed
in said pair of broad walls.
5. The apparatus of claim 1 including a pair of fluid coolant
passageways disposed in a pair of opposed ones of said narrow
sidewalls of said cavity for directing a stream of fluid coolant
upon said tubular lamp envelope and through said cavity resonator
for cooling said lamp in use.
6. The apparatus of claim 4 wherein one of said narrow sidewalls is
movable in a direction generally parallel to the plane of said
broad walls for tuning said rectangular cavity resonator.
7. The apparatus of claim 5 wherein said means for exciting said
cavity resonator with microwave energy includes a coaxial line
communicating with said cavity via an aperture in said narrow
sidewall thereof which is opposed to said movable sidewall, and a
coupling loop extending from the center conductor of said coaxial
line into said cavity resonator.
8. The apparatus of claim 2 wherein said metallic window frame
structure includes a demountable gastight flange assembly having a
pair of demountable mating flange portions, one of said flange
portions being attached to said window, and the other one of said
flange portions being attached to said tubular ceramic lamp
envelope.
9. The apparatus of claim 2 wherein said window frame structure is
disposed externally of said cavity resonator, said window frame
structure having enlarged transverse cross-sectional dimensions
relative to the transverse cross-sectional dimensions of said
tubular lamp envelope portion which is disposed within said cavity
resonator, said enlarged window frame structure having an internal
surface reflective to the output optical radiation for reflecting
same outwardly of the lamp through said window.
Description
DESCRIPTION OF THE PRIOR ART
Heretofore, microwave plasma discharge lamps have been employed as
sources of ultraviolet light. These lamps have employed quartz
envelopes and quartz windows and their power input has been limited
to approximately 100 watts. It is desired to substantially increase
the power output of such lamps.
SUMMARY OF THE PRESENT INVENTION
The principal object of the present invention is the provision of
an improved high-power microwave plasma discharge lamp.
One feature of the present invention is the provision of a ceramic
tubular lamp envelope having the output window sealed across one
end of the tubular envelope, whereby the power handling capability
of the lamp structure is substantially increased.
Another feature of the present invention is the same as the
preceding wherein the envelope is disposed within a cavity and the
cavity resonator is provided with fluid coolant passageways for
directing a stream of fluid coolant onto the envelope of the lamp
for cooling same in use.
Another feature of the present invention is the same as any one or
more of the preceding features wherein the lamp envelope structure
passes through aligned bores in the opposite walls of the cavity
resonator, the inside walls of such bores being in good heat
exchanging relation relative to the envelope of the lamp via the
intermediary of a pair of compressible metallic sleeves to
facilitate removal of heat from the lamp in use.
Another feature of the present invention is the same as any one or
more of the preceding wherein the output window is connected to the
remaining portion of the envelope of the lamp via the intermediary
of a metallic demountable gastight flange assembly to facilitate
replacement of window members.
Another feature of the present invention is the same as any one or
more of the preceding features wherein the output window has
enlarged transverse dimensions relative to the transverse
dimensions of the central ceramic tubular portion and wherein a
reflector is provided internally of the envelope for reflecting
optical radiation through the window.
Another feature and advantage of the present invention will become
apparent upon a perusal of the following specification taken in
connection with the accompanying drawings wherein:
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a perspective view, partly broken away of a microwave
plasma lamp incorporating features of the present invention,
FIG. 2 is a longitudinal sectional view of a lamp envelope
incorporating features of the present invention, and
FIG. 3 is an enlarged view of an alternative embodiment of a
portion of the structure of FIG. 2 delineated by line 3--3.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring now to FIG. 1, there is shown microwave plasma lamp 1
incorporating features of the present invention. The lamp 1
includes a rectangular microwave cavity resonator 2 having a pair
of mutually opposed broad walls 3 and 4 closed about their
periphery by narrow sidewalls 5, 6, 7 and 8. The cavity 2 is
conveniently formed by bolting together two flanged sections of
rectangular waveguide 9 and 11.
A pair of axially aligned bores 12 and 13 pass through the mated
flanges 14 and 15, such bores being centrally disposed of the broad
walls 3 and 4 of the cavity 2 and directed generally at right
angles to the plane of the broad walls 3 and 4. An elongated
tubular envelope portion 16 of the lamp 1 extends through the
cavity 2 and axially through the aligned bores 12 and 13. The
envelope portion 16 of the lamp is more fully described below with
regard to FIGS. 2 and 3. A pair of axially adjustable metallic
sleeves 17 and 18 are disposed in the bores 12 and 13 intermediate
the tubular envelope 16 and the inside wall of the bores 12 and 13.
The sleeves are axially adjusted to define an optimum gap length 1
between their inner mutually opposed ends. The sleeves are
preferably split into two semicylindrical portions which are
pressed into intimate physical contact between the inside wall of
bores 12 and 13 and against the outer surface of the tubular
envelope to provide a good thermally conductive path between the
envelope 16 and the flanges 14 and 15, such flanges being cooled by
coolant ducts 19 and 21 passing therethrough.
A second pair of axially aligned bores 22 and 23 pass through the
narrow sidewalls 5 and 6 and through the flanges 14 and 15 to
provide a fluid coolant passageway for directing a stream of
coolant, such as air, onto the tubular envelope portion 16 disposed
within the cavity 2 for cooling the lamp envelope in use.
The opposite ends of the rectangular waveguide sections are closed
off by narrow end walls 7 and 8. End wall 7 is centrally apertured
to accommodate a section of coaxial transmission line 24 having a
coupling loop 25 extending into the cavity 2 from the center
conductor 26 of the coaxial line 24 for exciting the cavity 2 with
microwave energy at a convenient frequency such as 2,450 MHz
derived from a microwave source 27, such as a 2.5 kw. C.W.
magnetron.
The other narrow end wall 8 is defined by the inner end of an
axially slidable nonelectrically contacting double-choke shorting
plunger 28 which is axially translatable via a worm shaft 29 and
crank 31 for tuning the resonant frequency of the cavity 2 to
impedance match the cavity 2 to the microwave source 27.
The microwave energy within the cavity 2 excites a plasma discharge
within the envelope 16. Optical radiation emanating from the plasma
discharge is passed through a window 32 to a utilization device,
not shown. The window 32, as of sapphire or calcium fluoride is
sealed over one end of the tubular envelope 16 via a metallic frame
structure 33 which includes a demountable gastight flange assembly
34, such as a conventional Conflat flange assembly marketed by
Varian Associates of Palo Alto, Calif. In an alternative
embodiment, not shown, the window 32 is merely glazed over the end
of the ceramic tubular envelope 16 without providing any metallic
parts to the envelope 16.
Referring now to FIG. 2, the gastight envelope 16 of the lamp 1 is
shown in greater detail. The envelope 16 includes a tubular ceramic
central portion 35, as of alumina or beryllia, 0.5 inch diameter, 4
inches long, and having a wall thickness of 0.125 inch. Window
frame structure 33 is sealed over one end of the central section 35
via a metallized ceramic-to-metal seal 36. The other end of the
central ceramic section 35 is similarly sealed off by a metal cap
37 having a length of tubulation 38 sealed thereto for exhausting
and filling the envelope 16 with suitable gas fills. Suitable gas
fills includes 20 percent nitrogen, 80 percent argon by volume, at
1.5 mm. Hg at room temperature, introduced after bakeout and
evacuation at 500.degree. C. to produce a relatively narrow band of
optical radiation in the ultraviolet band of 1,700 A to 1,900 A
wavelength. Other suitable gases include krypton, xenon, helium,
hydrogen.
Sapphire is a suitable window 33 for optical radiation having a
wavelength of 1,600 A and longer, whereas calcium fluoride is
suitable as a window material for optical wavelengths falling
within the range of 1,600 A to 1,200 A.
Referring now to FIG. 3, there is shown an alternative embodiment
of the present invention. In this embodiment, the envelope 16 is
essentially the same as that of FIG. 2 except that the output end
of the envelope 16 is formed by an outwardly flared metallic window
frame structure 41 which is sealed in a gastight manner, as before,
over the output end of the central ceramic section 16. The
outwardly flared portion 41 is shaped like the reflector of a
flashlight and coated on its interior with a reflective coating 42
to reflect optical radiation emanating on the axis of the envelope
16 out through an enlarged window 33' which is sealed in a gastight
manner over the open end of the flared reflector 41. The plasma
discharge extends axially out of the cavity resonator 2. Optical
radiation emanating from this end portion which would otherwise be
lost is reflected by reflector 42 out through window 33'.
Since many changes could be made in the above construction and many
apparently widely different embodiments of this invention could be
made without departing from the scope thereof, it is intended that
all matter contained in the above description or shown in the
accompanying drawings shall be interpreted as illustrative and not
in a limiting sense.
* * * * *