U.S. patent number 3,635,811 [Application Number 04/680,794] was granted by the patent office on 1972-01-18 for method of applying a coating.
This patent grant is currently assigned to Warner-Lambert Company. Invention is credited to George C. Lane.
United States Patent |
3,635,811 |
Lane |
January 18, 1972 |
METHOD OF APPLYING A COATING
Abstract
An apparatus for applying a coating material to a substrate such
as a razor blade, comprising a drum unit having a plurality of
driven hub assemblies, each of which supports carrier means for
carrying a large number of razor blades, and in which the hubs are
driven, for example, by an epicyclic gear or chain mechanism, so as
to expose the desired portions of the carriers, in a desired timed
relation, to a coating material which is caused to emanate from a
fixed source. The source comprises a so-called sputtering module
including housing having, at the top part thereof, a pair of angled
target plates from which the coating material is taken, and, at the
bottom thereof, an opening past which the carriers are moved by the
drum. By "sputtering" as used herein, is meant the slow
disintegration of a target under the bombardment of ionized gas
molecules, and, more particularly, the disintegration of a coating
material which is placed on the target and transferred to a
substrate after being "sputtered" from the target. The coating
material is moved from the target plates to the substrate by a
so-called "RF induced plasma sputtering," process. In this process,
with the apparatus and materials in a very high vacuum, a high
radio frequency, ("R.F.") is impressed across two electrode plates,
each of which is disposed immediately behind the target plates, and
each of which attains a high negative space charge. Thereafter, a
normally inert gas, such as argon is introduced to the area between
the plates, ionized, by bombardment with high velocity electrons,
and theresulting plasma particles strike the target plates
containing the coating material, freeing or "sputtering" it
therefrom, in atomic or molecular sized particles, which are then
attracted to the grounded potential substrate and are received and
firmly bound thereon to form a coating of extreme smoothness and
adhesion. In one embodiment, a metal coating is sputtered onto the
edge portions of razor blades, and in other embodiments, organic
polymers or other high-molecular weight coatings are transferred to
a substrate, in some cases with simultaneous partial chemical
breakdown, rearrangement, or other chemical or physical reaction
during the sputtering process, and in still further embodiments,
metal oxides, alloys, or other metal compounds are transferred, or
simultaneously formed and transferred.
Inventors: |
Lane; George C. (Milford,
CT) |
Assignee: |
Warner-Lambert Company (Morris
Plains, NJ)
|
Family
ID: |
27102516 |
Appl.
No.: |
04/680,794 |
Filed: |
November 6, 1967 |
Current U.S.
Class: |
204/192.15;
30/346.53; 204/192.11; 204/192.16 |
Current CPC
Class: |
B26B
21/54 (20130101); B05D 1/62 (20130101); C23C
14/12 (20130101); C23C 14/505 (20130101); H01J
37/34 (20130101); C23C 14/34 (20130101); B05D
5/083 (20130101) |
Current International
Class: |
C23C
14/12 (20060101); B26B 21/54 (20060101); C23C
14/34 (20060101); H01J 37/34 (20060101); B05D
1/00 (20060101); H01J 37/32 (20060101); B26B
21/00 (20060101); C23C 14/50 (20060101); C23c
015/00 () |
Field of
Search: |
;204/192,298
;117/132CF |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
|
|
|
|
|
|
|
1,428,243 |
|
Jan 1966 |
|
FR |
|
457,378 |
|
Jun 1949 |
|
CA |
|
Other References
Davidse, "Theory & Practise of RF Sputtering" Vacuum Vol. 17,
No. 3, 1966. .
Chem. Abstracts, Vol. 64, 1966, 11334 h. .
Cheney et al., J. of App. Phys. Vol. 36, No. 11, Nov. 1965. .
E. M. Michalak, Pergamon Press Ltd./Gt. Britain, Vol. 17, No. 6,
Mar. 1967, pp. 317-324. .
A. I. Akishin et al., Russian Journal of Physical Chemistry, Vol.
39, No. 12, Dec. 1965, pp. 1637-1638, (Original Russian in Zh. Fiz.
Khim, ibid., pp. 3067-3069..
|
Primary Examiner: Mack; John H.
Assistant Examiner: Kanter; Sidney S.
Claims
I claim:
1. A method of successively applying a coating of a first, metallic
material and a coating of a second, organic plastic material to the
faces and cutting edge portions of a plurality of individual
cutting instruments, each of which include two honed relatively
hard metal face portions with a narrow included angle therebetween,
said faces meeting to define said cutting edge portion, said method
comprising the steps of supporting said plurality of instruments on
carrier means with said instruments having their sides abutting one
another, and having said edges arranged in a common plane,
disposing at least one electrode in the region of said instruments,
positioning at least one target having said first material thereon
in closely overlying relation to said at least one electrode,
positioning said carrier means such that said edges are in an at
least partially facing relation to said target, substantially
evacuating the region surrounding said instruments, including the
region surrounding said at least one electrode, impressing a
radiofrequency alternating voltage gradient between said electrode
and a reference point sufficient to cause significant electron flow
in said evacuated region adjacent said electrode, introducing a
minute amount of an inert gas into said evacuated area, whereby
said flowing electrons ionize some of the molecules of said inert
gas to form a plasma, and whereby the ions from said plasma strike
said first material and sputter said first metallic material from
said target onto said plurality of instruments, discontinuing
deposition of said first material prior to deposition of about 500
angstroms of coating thickness thereof on said edge portions,
thereafter positioning at least one target containing said second
coating material in a closely overlying relation to said at least
one electrode, positioning said carrier means such that said edges
are in an at least partially facing relation to said target,
impressing a radiofrequency alternating voltage gradient between
said electrode and a reference point sufficient to cause
significant electron flow in said evacuated region adjacent said
electrode, introducing a minute amount of an inert gas into said
evacuated area, whereby said flowing electrons ionize some of the
molecules of said inert gas to form a plasma, and whereby the ions
from said plasma strike said second, organic plastic material and
sputter said material from said target onto said plurality of
instruments, and discontinuing said process prior to deposition of
about 2,000 angstroms of coating thickness of said second material
on said edge portions.
2. A method as defined in claim 1 wherein said organic plastic
material comprises a halogen-containing polymer.
3. A method as defined in claim 1 wherein said organic plastic
material comprises a fluorocarbon polymer.
4. A method as defined in claim 1 wherein said organic plastic
material comprises a polymer of tetrafluoroethylene.
5. A method as defined in claim 1 wherein said organic plastic
material comprises a hydrocarbon polymer.
6. A method as defined in claim 1 wherein said organic plastic
material comprises polyethylene.
7. A method as defined in claim 1 in which said second organic
plastic coating material undergoes at least partial change of
molecular weight in being removed by said sputtering from said
target and being deposited on said edges on said instruments.
8. A method as defined in claim 1 wherein said at least one
electrode comprises a pair of electrodes in the form of generally
flat plates, adapted to receive similarly shaped targets over the
surfaces thereof, said electrodes being positioned with their upper
edges parallel and closely spaced apart to form a peak and their
lower edges farther spaced apart so as to form a downwardly
directed opening, and wherein positioning said plurality of
instruments comprises moving said instruments into the area
generally immediately beneath the opening formed in said peak.
Description
BACKGROUND OF THE INVENTION
1. Field of The Invention
Generally, the present invention relates to a novel method and
apparatus for surface coating of articles. More particularly, the
field of the invention is that of metal substrate coating by a
process analogous to metal transfer by so-called cathodic
sputtering. In this process, the principal elements are an article
or substrate to be coated, a coating material, a target plate for
holding the coating material, electrode plates for causing gas
plasma particles to strike the target to release the coating
material, and means to control the deposition of the coating and
means for carrying the article to be coated and for exposing the
desired portions thereof to the sputtered coating.
The principal differences between the instant method and true
cathodic sputtering are that the sputtered material need not be
metallic, it is not a part of the cathode, and the process is of
greatly improved efficiency in regard to rate and accuracy of
deposition, operating temperature and in many other respects which
are referred to further herein.
The method of the invention is desirably carried out by placing the
electrode plates in a very high vacuum to form a "peak" or apex,
with the upper edges thereof adjacent each other, and the lower
edges more widely spaced apart and with an opening therebetween at
the lower edges, placing the target plates immediately adjacent the
inner surface of the electrode plates, impressing a very
high-frequency alternating current on the plates, causing electron
flow therebetween and development of a high charge thereon, and
"leaking" argon or like gas into the interelectrode space.
Thereupon, the electrons bombard the argon, ionizing it, and the
plasma particles thus produced are attracted to the target plates
by the space charge on the electrode plate. The plasma particles
strike the target with such momentum that atoms or molecules from
the target are "sputtered" from the target, whence, they are
attracted to the article or substrate, which is suitably biased
with regard to the electrode and target plates. Another aspect of
the invention relates to the provisions of a mechanism for holding
the desired articles or substrate, in this case, a plurality of
razor blades, so that they may be passed in a controlled manner
beneath the target plates containing the coating material. This
mechanism may be generally described as a drum which is adapted to
support a plurality of hubs which in turn support carrier means on
which razor blades are removably mounted for coating. The drum and
hubs are arranged, by means of an epicyclic gear or chain
mechanism, so that they rotate in a desired time relation about two
axes so as to expose the desired surfaces thereof to the opening
beneath the target plates at particular angles to present those
portions of the blade it is desired to coat to the target
plates.
2. Description of The Prior Art
In general, the prior art methods of coating particular substrates
with various materials, particularly covering substrates with thin
metallic films has been accomplished by vacuum deposition of a thin
film, generally by methods classified as evaporation, according to
the following generally known methods.
A first method was an ordinary evaporation of a metal coating from
a hot filament, wherein the filament was heated and the metal
attached thereto was merely evaporated in the vacuum away from the
filament along relatively straight lines in all directions, coating
whatever object lay in their path. For example, in the art of
electron microscopy, it is known to "shadow" a substrate by
evaporating gold or other low boiling point metal, onto a specimen
in order to create solid phase or permanent "shadows" which would
be easily visible under a microscope.
An improvement in the ordinary evaporation method was the so-called
electron beam deposition whereby the coating material was held in
one location and an electron beam was directed at the coating
material, the beam being formed and maintained by the application
of a magnetic field to an electron source. A heated filament was
used in this method.
Another known method is so-called diode sputtering, wherein
high-energy electrons strike and ionize atoms of an inert gas as
argon, and the ionized particles or plasma thus formed strike a
target containing the coating. The target surface sputters off
atoms which are attracted to an anode which contains the substrate.
A method such as this is considerable improvement over several
known methods, but the relatively large amount of ionized gas
creates an arc effect and gives off considerable heat, even though
this method has the advantages somewhat greater uniformity and good
adhesion of the material to the substrate. Another, more modern
method, is so-called triode sputtering, wherein the substrate is
rendered positive, and electrons from a hot cathode are directed at
the target, following which coating atoms are sputtered to the
substrate which was desired to be coated. Although this method of
coating possesses a number of advantages, it is in some cases not
commercially desirable for coating many types of substrates,
especially such as razor blades; since although this method uses
less argon than other methods, and a longer mean free path is made
possible for improved efficiency, this method is best suited for
transferring only metals and alloys thereof, and still relies for
its source of energy on a hot wire cathode, which may introduce
ionic contaminants of tungsten, for example. In addition, the
coated surface requires finish grinding after plating.
All of the foregoing known methods of deposition of thin films have
been considered and although useful, they are not considered
perfected for coating products having extremely fine cutting edges.
Some of the purposes for which such coating is desired will now be
discussed.
It has always been desired, in the razor blade art, to form a very
sharp blade edge suitable for shaving, and to have that edge
combine the advantages of corrosion resistance and longevity, as
well as presenting a smooth and lubricous surface to the face of a
shaver. Thus, it is desired to have a relatively
corrosion-resistant blade having an extremely sharp surface and
having the blade made from an extremely hard or tough material
which would resist dulling. Thus, an ideal razor blade would
combine the advantages of a long life in use as well as long shelf
life, combined with an extremely sharp cutting edge and maximum
smoothness for purposes of shaving comfort.
In the razor blade art, it is well known in the interest of shaving
comfort, to coat a portion of the blade adjacent the cutting edge
with a lubricous plastic, such as a fluorocarbon polymer, for
example, polytetrafluoroethylene ("Teflon") or a polymer such as
polyethylene, or the like. Likewise, in the last several years,
razor blades made from more corrosion-resistant and tougher
materials than those previously used have come into common use and
have been accepted on a large scale commercially. Thus, the use of
stainless steel for making razor blades is now quite common.
However, it is likewise known that stainless steel is not the
perfect material for making an ideal razor blade, but one which at
present, best combines the advantages of acceptable competitive
cost easy processability, corrosion resistance and durability of
the shaving edge imparted thereto. However, even in spite of the
great success of the stainless steel blade, there has been a demand
in the razor blade art for a razor blade which would harmonize, at
reasonable cost, the seemingly contradictory requirements of using
a very hard, tough metal substrate for securing a long wearing
blade edge, and using metals, which although sufficiently hard and
tough to last for a long time, may nonetheless be readily ground to
an extremely fine sharp edge, free from brittleness and
microscopically jagged edges or voids in the sharpened surface.
Thus, a greatly improved razor blade would be one in which the
blade could be manufactured from conventional materials, such as
ordinary steel or stainless steel, and could then be given a very
fine smooth metal surface coating, which would not require further
finishing of the coating metal to impart these characteristics to
the edge. However, since no known materials combine these
advantages, a great deal of effort has been placed on developing
methods and apparatus for coating blade edges of existing type
razor blades. However, metal coating already sharpened blade edges
by conventional methods has always resulted in an edge which
requires further finishing, and the application of a hard coating,
such as chromium, has resulted in a blade which was very brittle
near the edge portions, and which was very difficult to grind down
or polish to the desired degree of smoothness, especially at a
reasonable cost.
Thus, there has been a great demand for a simple and economical
method of placing a fine, hard, extremely smooth coating on a
finished razor blade edge portion which would not require further
treatment, but which would impart to such a blade edge the
desirable characteristics of smoothness and hardness as well as
corrosion resistance.
The invention of the applicant, namely the method of coating the
blade edge by means of radiofrequency-induced plasma sputtering,
and the development of an apparatus for carrying out this method,
accomplished its objects, namely the provision of a method and
apparatus for improved surface coating of razor blades and like
substrates.
SUMMARY OF THE INVENTION
In view of the shortcomings of prior art methods and apparatus for
coating razor blades, it is an object of the invention to provide
an improved method and apparatus for placing a very thin, very fine
coating, either organic or inorganic, on a sharpened metal surface
after sharpening such a surface, to provide an improved blade or
the like.
A further object of the present invention is to provide a method of
coating a desired substrate with a desired coating material at low
temperatures and at a reasonable cost, and to attain an extremely
uniform coating which needs no further treatment to present a sharp
cutting edge to the user.
Another object is to provide an apparatus for carrying out
radiofrequency-induced plasma sputtering of a metal, metal oxide or
other metal compounds or nonmetal coating material onto a razor
blade.
Still another object of the invention is to provide a coating
apparatus which is simple and compact to facilitate ready inclusion
and use thereof in a high-vacuum chamber.
Another object is to produce a razor blade or like article with a
sharp cutting edge which is suitable, after being treated as
described herein, to be further processed as by coating with a
polymer, without the need for additional intermediate preparation
steps.
The present invention achieves its objects and overcomes the
disadvantages of the prior art, by providing a method which
includes the steps of providing a sputtering module which includes
two flat electrode plates arranged to form a peak at one end
thereof and an opening opposite the peak, placing target plates
containing the coating material in front of the electrode plates,
providing carrier means for supporting a plurality of articles to
be coated, drawing a very high vacuum in the area surrounding the
sputtering module and the carrier means, impressing a
radiofrequency current across the electrode plates and
electronically biasing the carrier means with respect to the
electrode plates, "leaking" an inert gas into the region between
the plates and passing the articles to be coated across the opening
between the peaked plates so that electron bombardment of the gas
ionizes the gas, the ions strike the target plates, sputtering the
surface material therefrom, and the articles are uniformly coated
by the sputtered material.
The method is advantageously performed by an apparatus which
includes a drum or like means for carrying a plurality of articles
holders past the sputtering module, and exposing a desired portion
of the blades or other articles held on the carrier to the opening
in the sputtering module in a timed relation so as to obtain a
coating of desired uniformity, thickness and adhesion to the
article. A preferred embodiment includes a drum holding a plurality
of rotating hubs, and an epicyclic drive mechanism for rotating
each of the articles carriers into a desired location as each hub
unit passes the sputtering module, by utilizing relative rotation
of the drum and hub assemblies.
Other and further objects and advantages of the present invention,
including the manner of attainment thereof, will become more
apparent when considered in conjunction with a description of the
preferred embodiments of the invention described further herein and
shown in the drawings, in which corresponding reference characters
denote like parts throughout.
BRIEF DESCRIPTION OF THE DRAWINGS
In the drawings:
FIG. 1 is a front view, partly in elevation and partly in section,
showing the coating apparatus of the present invention;
FIG. 2 is a side view, partly in section and partly in elevation,
and with portions broken away, showing the coating apparatus of the
present invention;
FIG. 3 is a rear view, partly schematic, showing a portion of the
coating apparatus of the present invention;
FIG. 4 is a top view, partly in plan and partly in section, showing
the coating unit of the present invention;
FIG. 5 is an enlarged sectional view of the blade carrier unit
shown in FIG. 4.
FIG. 6 is a schematic view of a combination radiofrequency
generator and impedance-matching network unit which may be used
with the present invention;
FIG. 7 is a schematic drawing of a power supply unit for powering
certain components of the combination unit shown in FIG. 6;
FIG. 8 is a schematic drawing of a power supply unit for energizing
other portions of the unit shown in FIG. 6.
Referring now to the drawings in greater detail, FIG. 1 shows an
outer vacuum chamber 20 including a top wall portion 22, sidewall
portions 24 and a base portion 26, all of said portions cooperating
for to form a chamber 20 which is capable of maintaining an
extremely high vacuum therein, such as will be discussed in greater
detail presently. The chamber 20 is shown as being made from metal,
but it is understood that it may be made of glass or other light
material known in the high vacuum art as being suitable for making
such chambers. In the event glass were used, the shape of the
chamber so would be that of a bell jar. If a frangible material,
such as glass is used, an implosion shield (not shown) may be
fitted, as is well known in the high vacuum art.
Contained inside the vacuum chamber 20 are the two principal
components of the coating apparatus of the present invention,
namely the carrying means 28 for supporting a number of razor
blades or like articles to be coated, and a sputtering module 30,
in which is disposed the coating material which is to be placed
onto the blades or other articles carried by the carrying means
28.
Referring now to the carrying means, FIGS. 1 and 2 show that the
means 28 includes a stand assembly 32 which contains a front leg
member 34 and a rear leg member 36, each of which includes feet 38
which are adapted to be fastened to a portion of the base 26 of the
vacuum chamber by fastening means in the form of cap screws 40 or
the like. Mounted on the stand 32 is a drum assembly 42 which
comprises a front plates 44, a rear plate 46, a central axle shaft
48, and drive means in the form of a crank unit 50 or the like.
In this embodiment, O-ring or like airtight seal means 52 are
provided for attaching an inner end portion of the bellows 54 to
the sidewall 24 of the housing chamber 20. The bellows 54 includes
a cylindrical extension portion 56 thereon, so that, as is shown in
FIG. 2, rotation of the shaft 48 and the drum 42 mounted thereon
maybe accomplished without the need for a seal which contacts
rotary parts, as long as the bellows 54 is sufficiently flexible to
allow the knob 58 or other means mounted on the end of the shaft 48
to rotate and describe a circle about the axis of the shaft 48.
Referring again to the carrier 28, it may be seen that a
cylindrical shell 60 connects the front and rear plates 44, 46 of
the drum 42, and that a plurality openings 62 are provided so that
the interior of the drum assembly 42 will be rapidly and completely
evacuated when a vacuum is drawn on the vacuum chamber 20.
Referring now to FIGS. 4 and 5, it can be seen that the razor wall
46 of the drum 42 is adapted to carry a series of relatively
rotatable hubs 64, and that these hubs 64 are carried by inner
bearing races 66 on which balls 68 rotate, inside outer races 70.
FIGS. 4 and 5 also show that the hubs 64 contain drive means in the
form of chain sprockets 72 disposed on the outer portions thereof,
and that the sprockets 72 are fastened as by keys 74 to the body of
the hub 64. In addition each hub contains locking means in form of
a ball 76 driven by a spring 78 exerting an inwardly directed force
thereon, as well as a plurality of notches 80 in the inwardly
directed faces 82 of the hub 64.
Referring again particularly to FIGS. 4 and 5, it will be seen that
each hub 64 is adapted to receive blade carrying means in the form
of a bayonet unit 84, which will be now described.
The blade carrying means or bayonet unit 84 comprises a front
locking bar 86, a rear locking body 88, joined together by a center
guide member 90, and on either side by left-hand and right-hand
guide members 92, 94. Each of the guide members 92, 94 has a stub
extension 96 adapted to be received in the recesses 80 in the front
face 82 of the hubs 64, as previously set forth.
The front locking bar 86 is removably attached to the guide members
90, 92, 94, and in use, a plurality of blades B or other articles
to be coated are placed on the guide members 90, 92, 94 and the
front locking member 86 is then placed on the end of the members,
and pushed finger tight to compress the blades B against each other
into a relatively tightly abutting relationship. Locking springs
clips 98 are provided for holding the bar 86 in place. An extension
100 of the center guide member 90 is provided for receiving handle
means in the form of a knob 102 thereover so that munipulation of
the bayonet 84 is facilitated. Extending outwardly from the rear
locking bar 88, is a central support means in the form of a nose
unit 104 having an annular circumferential groove 106 therein,
whereby the locking ball 76, under the influence of the spring 78
may be urged into the groove 106, holding the nose 104 and the
blade carrying means 84 associated therewith in the desired locked
relation with the hub unit 64. The locking ball 76 and spring
tension are desirably adjusted so that a moderate hand pull will
remove the blade carrying means 84, but also so that the bayonets
84 will remain locked in position as shown in FIG. 5 unless pulled
outwardly therefrom.
The diameter of the nose 104 is such that it will fit relatively
snugly into the hub assembly 64 so that the entire bayonet 84 may
be cantilevered outwardly of the hub 64. It is preferred that the
knob 102 is integrally formed with, and fastened to, the front
locking bar 86 so that the two may be removed and replaced or
munipulated as a unit. It is also to be noted that the provision of
the key 74 insures that the sprocket or the like drive means 72
will rotate with the hub 64, for reasons which will appear more
fully herein.
Referring now to FIG. 3, it may be seen that, whereas each hub 64
carries an associated individual drive means 72 therewith, that a
chain unit 108 is provided which engages the radially outermost
edges of each of the plurality of sprockets 72, and, in between one
pair of gears 72, the chain 108 extends inwardly toward the center
of the drum member where it is trained around a stationary sprocket
110, which is held fixed in relation to the stand 32. A tension
control means 112 is provided in the form of an idler gear 114
which is mounted on a pivoted plate 116 which pivots about a point
in the form of a cap screw 118, through the arc permitted by the
cutout 120. When the desired position of the idler gear 114 is
reached, the locking screw 122 is tightened and the idler is held
in a position placing the desired amount of tension on the chain
108.
In a preferred embodiment, it is desired to align the blade
carrying means or bayonet units 84 so that a blade thereon will
present a cutting edge thereof parallel with the top surface of the
drum and directly under the sputtering module 30, and, upon
rotation of the drum member through one cycle, will present the
opposite face thereof to the opening beneath the sputtering module
30. Therefore, it is preferred that the stationary sprocket 110
contains a fixed number of teeth, say for example, 24, and that
each outer or planetary gear 72 will contain just twice the number
of teeth possessed by the stationary gear or sprocket 110, that is,
48 teeth in the example just referred to. In this manner, when each
individual carrying means or bayonet 84 is presented to the opening
in the sputtering module 30, alternate tope and bottom faces of
blades carried thereon are presented in succession. Although it is
not strictly necessary, in accordance with the present invention,
to use a chain driving means, the use of a chain is simpler and
less expensive, and provides for a generally more desirable layout
than other driving means, such as gears or the like, and is more
economical.
Thus it will be seen that the carrying means for the blades or the
other articles to receive the desired coating generally comprises a
drum means held on a suitable stand and constructed and arranged so
that rotation of the drum itself serves to rotate the bayonet
members held on the hubs so that alternate tops and bottoms, for
example, of the articles held are presented to the sputtering
module as described above.
Referring now to a second principal component of the invention,
sputtering module 30 is supported in place by a ground shield
cylinder 124 which is held by support means in the form of an arm
126 fixedly fastened to a rigid vertically disposed conduit column
128, which in turn is fastened to a frame assembly 130 in the base
26 of the housing chamber 20. Immediately beneath the ground shield
cylinder 124 is a holder unit 132 which supports left-hand and
right-hand ground shield members 134, 136, to which are attached
end walls 138, 140, the front end wall having a viewing window 142
disposed therein. The inside of the sputtering module 30 contains
identical left- and right-hand electrode plates 144, which are
supported by fasteners 146 holding insulators 148 to insulate the
electrode plates 144 from contact with the ground shields 134, 136.
Current is supplied to the electrode plates 144 by means of lead
means 150. In the preferred construction, the lead means 150 are in
the form of a hollow copper tubes which are brazed, soldered, or
otherwise securely electrically and mechanically fastened to the
electrode plates 144. The copper tubes 150 serve as combination
electric lead and coolant conduits, inasmuch as each hollow copper
tube is adapted to circulate water on the inside thereof, and to
carry the radiofrequency charges to the plates 144, around the
exterior of the tubes or leads 150. Target plates 152 are disposed
on the inner edges respectively of the electrode plates 144, and
may be fastened thereto by any suitable means, preferably means
which facilitate removal and replacement of the target plates 152,
such as spring clips or the like, illustration of which is omitted
for the purpose of clarity.
Referring now particularly to FIG. 1, it will be understood that
only the right-hand electrode plate 144 and carrying means
therefor, as well as the right-hand target plate 152 are shown, but
it will be further understood that an identical left-hand plate is
provided in an exactly corresponding location on the other side of
the module 30, that is, supported in place by the left-hand ground
shield 134. Together, the two plates 144, when disposed within the
ground shields 134, 136, as shown, form what is referred to herein
as a "peak," or a "plasma peak" which has such geometry in order to
facilitate the flow of electrons between the two plates, as well
for purposes of leaving an opening therebeneath for the passage of
the articles to be coated. It is not strictly necessary, in
accordance with the present invention that the "peak" be of the
exact configuration shown, or that the opening disposed at the
bottom thereof, but such construction has proved most efficient,
and accordingly is preferred in keeping with the present
invention.
Referring again to the FIG. 1, it will be noted that a large
sheated cable means 154 or the like is shown surmounting the ground
shield cylinder 124, and this sheath 154 carries a coaxial cable
means inside thereof, ("C." Fig. 4), from which the leads 150
extend to the electrode plates 144. The sheated or armored cable
154 then extends downwardly through the column 128 and thence
outwardly of the vacuum chamber 20 to the impedance matching
network and radiofrequency unit which will be described further
herein.
Referred now to FIG. 2, it will be seen that the locations of an
oil diffusion pump and a cold trap are schematically represented.
Inasmuch as the present invention is essentially concerned with the
deposition of materials in a very high vacuum environment, the
diffusion pump and cold trap are shown to be present. However, it
is well known to those skilled in the art that the conventional
method of evacuating a bell jar or like vacuum chamber 20 is by
means of an ordinary mechanical or so-called "roughing" pump,
following which an oil diffusion pump or the like is used, which
takes the advantage of adsorption of nitrogen, oxygen and like
molecules by oil vapors, which may then be easily trapped and
excluded by the diffusion pump, backed by a suitable "backing type"
mechanical pump, also well known in the art.
The cold trap which is schematically shown normally consists of a
ring surrounding the neck or junction between the diffusion pump
and to the bell jar to prevent backflow of oil into the bell jar.
The cold trap is maintained at an extremely low temperature by
circulation therethrough of liquid nitrogen or other coolant. The
operation of such "roughing" pumps, oil diffusion pumps and cold
trap units are well known and conventional in the art of vacuum
deposition and do not form any essential novel part of the present
invention. All that is required is a diffusion pump system or other
like means which are capable of attaining vacuums of the desired
order inside the chambers which are referred to in greater detail
below.
Likewise, referring to FIGS. 1 and 4, there are shown a plurality
of outlets 156 or the like, having covers or plugs 158 therein
which are adapted to be vacuum sealed, but which are placed in the
base 26 or the like of the vacuum chamber 20 for purposes of access
to the interior of the chamber 20. In this manner, it is easy to
introduce members such as the conduit 128 shown in FIG. 2, or to
provided valve means for introducing the gases referred to in
detail below.
Thus, FIG. 4 schematically shows a connector 160 leading to an
inert gas source 162, and shows that regulator and needle valve
means 164 may be provided to control the flow of gas from the
source 162 to the interior of the vacuum chamber 20. These features
are used with the present invention, but their particular structure
forms no essential part of the invention, and thus no details of
these units are shown.
Referring now to FIG. 6, there is shown a combination oscillator,
amplifier, and impedance matching network unit 166.
FIG. 7 shows a power supply unit for some of the components of the
combination unit 166, and FIG. 8 shows a power supply unit for some
of the other components thereof.
Referring now to FIG. 6, and to the combination unit 166, there is
shown a "matching box" or impedance matching network 170 which
includes leads 172 and 174, each of which terminates in plates 144.
These are the plates across the radiofrequency voltage referred to
elsewhere herein is impressed, that is, the electrode plates in the
vacuum chamber. Tuning of the plates 144 is accomplished by
adjusting the variable capacitors 176, 178 which extend across the
leads 172, 174. A voltmeter unit 180 is center tapped at 182 to the
secondary 184 of the matching box transformer 186. The primary 188
of the transformer 186 is connected to the secondary 190 of the
output transformer 192. The primary of this transformer, in
combination with a variable capacitor 196, forms an output tuned
circuit which is connected through a coil 198 and a capacitor 200
to the output circuit of the amplifier portion 202 of the
combination unit 166. A grounded capacitor 204 is connected between
the coil 198 and the capacitor 200.
A high-voltage connector 206 carries high voltage to a junction 208
between the output line 210 and a lead line 212, through two coils
214, 216, between which is disposed a filter capacitor 218. From
the junction 220, the lead line 212 is connected to the plates 222,
224, respectively of the power tubes 226, 228. The plate current
flowing to the junction 220 and in line 212 passes through a coil
230 before being fed to the output transformer 192. Since power
tubes 226, 228 are connected in parallel, it will be noted that
screen grids 232, 234, are connected to a common screen grid input
line 236.
From this drawing it also may be seen that the control grids 242,
244 of the power tubes are connected in parallel at the junction
240. The voltage at line 238 consists of DC bias and RF drive. The
bias is supplied at pf. connection 254 and is fed through an
assembly 252 including a milliammeter 258, the 3 K 10 W. resistor,
the 1 Mh. choke and the secondary 246 of the transformer 248 (L2).
The RF grid drive is developed across the secondary 246 of
transformer 248, tuned to resonance by the capacitor 250. The 10
pf. variable capacitor is tuned to neutralize the plate to grid
capacitance of the tubes 226, 228. It accomplished this by
providing a negative feedback path from the plate to grid circuit,
thus eliminating self-oscillation of the output tubes. The 270 pf.
capacitor and 1 Mh. choke are part of the neutralization circuit.
The 3 K resistor is a grid leak resistor, providing a minimum bias
level. The capacitors 256 are RF bypass capacitors.
Referring now to the oscillator portion 260 of the unit 166, it is
shown that the circuit is a so-called Colpitts-type oscillator. The
coil 262 and capacitor 264 are the major frequency determining
components. The capacitor network 274 attached to the grid control
266 of the tube 268 for oscillation, the level of which is
determined by their ratio. The choke coil connected to the cathode
272 provides the feedback voltage for the capacitive voltage
divider 274. The resistor 270 is a grid leak bias resistor. The
capacitor in parallel with it stabilizes the bias. The oscillator
output is developed across the plate choke 282, capacitively
coupled by capacitor 284 to the tuned primary 288 of the
transformer 248 (L2). The primary is tuned to resonance by
capacitor 286. The plate lead 276 is joined at 278 to the line 280,
which connects to the B+ voltage source.
Thus, the output of the oscillator tube 268 is inductively coupled
to the amplifier unit 202, and from the amplifier, the signal is
fed to the matching box and supplied to the plates 144. As stated
above, a preferred frequency of operation is about 13 megacycles
per second, at a net power rating of about 600 watts or more.
Referring now to FIG. 7, there is shown a combination voltage
control and rectifier unit for supplying regular power to the
radiofrequency amplifier just described. This voltage control and
rectifier unit 290 comprises leads 292 for attachment to a 220
-volt, 60 -cycle single-phase alternating-current source. One lead
292 is directly connected to a primary winding 294 of a transformer
296, and the other lead is split at junction 298 between
connections to one terminal of a semiconductor controlled rectifier
(SCR) 300 biased in one direction, and the other connection is
joined to an oppositely biased SCR 302, the two SCR's being reverse
parallel wired. A variable resistor voltage control unit 304 is
connected in series between the terminal of the second SCR 302 and
a junction 306, to which are connected a
resistance-capacitance-resistance circuit 308 and a capacitor 310
in parallel. Take off lines 312 and 314 are fed respectively from
the resistance-capacitance-resistance circuit 308 to the gates 316,
318 of the SCR's 300, 302. At junction 320, the output from the
cathode of SCR 302 and from the anode of SCR 300 are joined, and
lead 322 connects this junction 320 to the primary 294 of the
transformer 296.
The secondary 324 of transformer 296 has the ends thereof
respectively connected to a conventional diode-rectifying bridge
326, of which one lead is grounded and the other fed to a
high-voltage source 328 through a choking coil 330. A fixed
capacitor 332 cooperates with the choke 330 to stabilize or smooth
the output of the rectifying bridge 326. Direct current dropping
resistors 334 are provided so that a lower voltage may be fed from
terminal 336 to the screen grids of amplifier tubes 226, 228.
Referring now to FIG. 8, there is shown a power supply adapted to
furnish B+ voltage to certain elements of the amplifier, oscillator
and matching box unit 166, and to furnish heater current for tube
filaments. This power supply 338 includes leads 340 for connection
to a 110 -volt, 60 -cycle, single-phase alternating-current source,
and these leads have a radiofrequency filter system 342 disposed
across them. A resistor 344 and neon tube 346 are also wired
parallel to the leads 340, which connect to either end of a
transformer primary 348, which is coupled through a core 350 to
three separate secondaries, a B+ secondary 352, another secondary
354 having outlet leads marked "A" and "B," and a third secondary
356 having outlet leads marked "C" and "D."
The B+ secondary 352 has rectifier diodes 358, 360 attached to
either end thereof, and a bias connector 362 as well as a center
tapped and grounded parallel resistance-capacitance circuit 364
connected thereto. The output from the rectifying diodes 358, 360
is fed through choking coil 366, and is further stabilized or
evened out by reason of the capacitor 368. The direct current from
the B+ source is then fed through resistor 370 to a grounded
resistance connector 372 and from there to a B+ outlet 374, which
is also grounded through a capacitor 376.
In the above schematic, and in FIGS. 6, 7 and 8 of the drawings,
the abbreviations used have the following meanings. Where "K" used,
is meant 1,000 of the unit concerned, i.e., 50 K applied to a
resistor is 50,000 ohms, H is the henry and the henry, and the "mu"
legend, when used with the "H" microhenries, as does the M when
used with the "H." Unless otherwise indicated, capacitances are
indicated in microfarads, i.e., 0.001 indicates 0.001 microfarads,
whereas pf. is the abbreviation for picofarads, i.e.,
10.sup..sup.-12 farads. The "A," "B" and like letters indicate the
connections between the outputs and inputs between circuits shown
in the various figures.
The "A" and "B" secondary 354 is center tapped and grounded, and
the low-voltage output therefrom is used to heat the filaments of
the tubes 226, 228. Similarly, secondary 356 contains a center
tapped connection 378 which is grounded and connected to two
capacitors 380 disposed across the output lines 382 leading to the
heating element for the oscillator tube 268.
In keeping with the teachings of the present invention, a number of
different products were made according to the processes set forth
in detail below.
EXAMPLE 1
The apparatus shown in FIGS. 1 to 4 was used with a bell jar 20
comprising the outer vacuum chamber. A plurality of razor blades
were carefully cleaned, as by immersing them in, and evaporating
therefrom, a solvent, such as trichloroethylene or other suitable
solvent. The blades were placed on holding means, such as the
bayonet unit shown at 84 in FIG. 5.
A pair of target plates were prepared by taking two mild steel
plates, placing a heavy chromium plating on one surface of each
plate by a conventional electrolytic deposition method. The plating
may be of any desired thickness. Thereafter, these plates were
secured to the inside surfaces, respectively, of the electrode
plates 144 in the position shown at 152 in FIG. 1, for example.
Thereafter, a mechanical "roughing" pump was turned on, evacuating
most of the air from the vacuum chamber 20 to a pressure of 100
microns approximately. By means of an oil diffusion pump and cold
trap, the pressure inside the air chamber 20 was further evacuated
until a pressure of 1.times. 10.sup..sup.-5 millimeters of mercury
was attained.
Thereafter, by means of a needle valve or like so-called leak
valve, such as that schematically indicated at 164 in FIG. 4, argon
gas was allowed to be introduced into the chamber 20 until pressure
was raised to 3.times.10.sup..sup.-3 millimeters of mercury
(Torr).
Thereupon, the radiofrequency generating unit such as that shown in
FIG. 6 was actuated, and a radiofrequency of 13.56 megacycles per
second was impressed on the plates 144, the matching network
associated with the RF unit being adjusted or tuned so as to
minimize the impedance mismatch caused by the lead of target plates
152. Charging of the plates with the RF current immediately causes
a plasma to produced between the plates. Thus, the electrons
emitted by the plates 144 rush back and forth therebetween at a
frequency of about 13,000,000 complete back and forth cycles per
second and many of these electrons strike the atoms of argon gas
disposed between the plates. Because of the argon atoms or other
inert gas atoms, are very massive in relation to the mass of
electrons, the argon atoms or molecules themselves are not
substantially moved by the movement of the electrons or attracted
by the charge which builds up on or closely surrounding the plates
144. However, the high-frequency electrons bombarding the argon gas
cause ionization thereof, and upon ionization each positive ion or
argon is strongly attracted, by reason of the high negative charge,
to one or the other of the plates 144. This high space charge
accelerates the argon atoms toward the electrode 144 with great
energy. However, the ionized atoms strike the target material which
is placed on the target plate 152 placed immediately in front of
the electrode 144. The momentum with which the ionized argon atom
strikes the target plate may be sufficient to sputter one or more
atoms or molecules off the target plate 152.
When initial ionization takes place, the pressure is reduced by
reducing the rate of addition of argon, to approximately
1.5.times.10.sup..sup.-3 mm. of mercury. Thereupon, the RF energy
input is raised to a value of 600 watts forward power.
A DC bias of 1,800 volts is built up between the RF system and the
blade or article carrying means, this bias resulting from the
negative space charge on the plates 144 in relation to the
potential of the carriers 84, which are fully insulated from the
plates 144. The bias occurs because of the intrinsic
characteristics of the circuit, that is, the plates 144 take on, or
appear to take on, a strong negative charge. While the particles
which are sputtered from the target plate are in a neutral state,
that is, they are not ionized, and therefore are not attracted to
the substrate or article to be coated by reason of the bias between
the plates 144 and the article carrier, a certain degree of bias is
desirable to prevent positively charged argon or like ions from
striking the articles, since this would result in "re-sputtering"
either the substrate or the coating sought to be applied.
Thus, the bias between the plates and the carrier is desirable, but
its value is not of critical importance to the invention.
Thereafter, the amount of forward power in the system is then
adjusted by altering the amount of argon introduced into the system
by a very minute adjustment. It is preferred that after arriving at
a pressure of between 1 and 2.times.10.sup..sup.-3 millimeters, and
adjusting the impedance matching network, there will be about 500
to 600 watts forward power and about 100 watts or less of reflected
power, leaving a net power input into the "plasma peak" or to the
two plates and the area therebetween of about 500 to 600 watts, and
preferably about 510 to 550 watts. Power levels of greater or
lesser quantity will directly affect sputtering rate. Under these
conditions, sputtering will proceed for a period of approximately 4
minutes, and a coating having a thickness of about 625 angstroms
(A.) will be deposited upon a flat surface, and half that
thickness, namely 264 angstroms, will be deposited on the edge
portions of a razor blade, disposed with the razor edge portion
thereof directed generally to the area between the plasma peak.
The razor blades coated by the process just set forth were shown to
process an extremely fine, pore-free and uniform coating of
chromium, rendering them resistant to rust and corrosion. Such
blades, which possessed a very sharp or keen edge, also required no
further honing or other treatment, and were ready for next process
stage when removed from the vacuum chamber.
Although the exact reasons for the success of the sputtering
apparatus and method of the present invention, are not entirely
understood, it is believed that, because the coating material is
liberated from the target plate in substantially atomic or
molecular size particles, the adhesion thereof to the substrate or
articles to be coated is not only very strong but, since the
charges possessed by the coating material particles are the same
and such charges tend to repel each other, the individual atoms
each tend to seek out one particular location in the substrate and
repel other atoms from that immediate area until the entire
substrate is uniformly covered and thus attains a fine, even
coating surface.
By "charges," as used in the preceding paragraph, referring to the
charges on the particles of the coating material, it will be
understood that these particles are not ionized, but merely have a
slight electrostatic or like surface charge of an extremely small
magnitude.
In fact, if a physical analogy might be made, the sputtered atoms
or molecules act, upon contacting the substrate or article to be
coated, somewhat as droplets of water when placed or spilled on hot
frying pan or the like. Thus, in this analogy, the droplets of
water would be compared to atoms having a surface charge, and the
fine subdivision and rapid movement thereof is characteristic of
the atoms striking the substrate. Thus, the atoms being surrounded
by their own charge, much as the heated droplets of water are
surrounded by a vapor phase of their own, tend not to coalesce in
one location but to spread themselves about in a random manner.
Thus, a razor blade like article coated according to the present
invention is characterized by an extremely thin but very smooth
coating, since the method apparently creates a coating in which the
deposited or coating material is placed upon the substrate
substantially literally one molecule at a time.
EXAMPLE 2
It is also well known, in the razor blade art to coat a portion of
a razor blade in an area which is very close to the cutting edge
with a polymer having lubricous characteristics, such as a
polytetrafluoroethylene or like fluorine- or chlorine-containing
polymers, or polyethylene, or other lubricous plastic material.
However, prior methods have involved suspending the polymer in a
solvent or the like and, after placing a liquid phase coating on
the blade, evaporating the solvent and curing the polymer. However,
as set forth below, the present method may be used for direct
polymer coating of blades or the like. Initially, steel plates or
blades 152 approximately 6 inches by 9 inches in size and about
one-fourth of an inch in thickness where sprayed with a film of
polytetrafluoroethylene and the coating thus sprayed was baked out
or cured in a reducing atmosphere for 20 minutes at 700.degree.
degrees F.
It is preferred to perform this operation in a very high vacuum to
avoid entrapping gases in the coating which could create a reaction
with the polymer or other materials present in the chamber or
interfere with the generation of the plasma.
These plates were clipped into position just inside and adjacent
the plates 144 into the position shown at 152 in FIG. 1.
Next, razor blades were cleaned as set forth above, in example 1,
by immersing in a solvent or the like.
Next, the bell jar was evacuated by means of mechanical and
diffusion pumps to a pressure of 1.times.10.sup..sup.-5 millimeters
of mercury. Thereupon, argon was introduced until the pressure
attained a level of 3.times.10.sup..sup.-3 millimeters of mercury,
and a plasma was achieved at this pressure by impressing
approximately 100 watts of RF energy across or into the peak
defined by the plates 144. Once ionization took place, that is,
once the plasma was established, the argon pressure was reduced to
an operating level of 1.5.times.10.sup..sup.-3 millimeters of
mercury.
Thereupon, the RF energy was increased to a net power of about 275
watts, that is, about 300 watts forward power and 25 watts
reflected power. In this example, the bias between the grounded
carrier unit 84 and the plates 144 was approximately 800 volts of
self-biased DC. In this example, the process was continued for a
period of approximately 5 minutes. Under these conditions,
approximately 1,200 A. of a plastic material were deposited on an
optical flat which was placed in the chamber 20 near the articles
to be coated, and the coated articles contained a corresponding
amount of plastic material, depending on their configuration that
is, on the amount of surface and angle thereof presented to the
plates 144. A coating such as this may be deposited in any desired
thickness, preferably, in this case about 200 to 2,000 A. in
thickness.
Analysis of the films deposited by this method, by both infrared
spectroscopy and nuclear magnetic C-F (NMR), showed that the
deposited plastic was of different composition than that of the
plastic which was placed on the plates 152, differing in that some
of the characteristic C-F (Carbon-fluorine) bands had disappeared,
and in that the molecular weight of the coating material had been
reduced by an order of some of two to five times. The resulting
polymer deposited on the substrate or coated article was
nevertheless a somewhat similar polymer, containing the same
elements even though the exact crystal structure of the initial
polymer has been considerably altered. Thus, this example
demonstrates the use of the novel method for simultaneously
depositing and altering or rearranging in a polymer in one
step.
EXAMPLE 3
In this example, all the conditions were the same as those set
forth in example 1; the coated material was chromium, a plurality
of blades were placed on the bayonet or carrying unit 84, and a
plurality of these carrier units 84 were inserted into the hubs 64.
Thereafter, the sputtering process was carried out in accordance
with the conditions of example 1, except that it was continued for
a longer time, and the entire carrier unit 28 was revolved through
two complete cycles, thus exposing the top and bottom edges of the
plurality of razor blades held in each bayonet unit 84 to the
plasma peak or sputtering module 30 for the same length of time and
at the same angle as all the other blades. The process was timed so
that a coating of approximately 100 up to about 200 to 300 A. of
chromium was deposited on the edge portion of each razor blade. In
this example, the argon was continually admitted during the
process, maintaining the operating pressure set forth in the first
example and the sputtering took place continuously until each
bayonet unit had made two passes beneath the sputtering module 30.
The drum unit was revolved at a rate of one quarter of a revolution
per minute and two complete cycles of rotation thus coated both
edges of all blades in 8 minutes of operation. The coating
thickness referred to herein and in example 1 are merely
illustrative, since these coatings may be of any desired
thickness.
EXAMPLE 4
In this case, a process similar to that set forth in example 1 was
carried out, except that the deposited material, instead of being
metallic chromium, was an alloy iron, nickel and chromium, one
brand of which is known as "Nichrome." After carrying out the
process according to the conditions set forth in example 1, it was
discovered that the article contained a coating of the alloy which
was placed on the target plates 152 in the same exact composition
as the composition of the alloy on the plate. Thus, the method
demonstrated its ability to transfer alloy from the target to the
substrate without altering the composition of the alloy.
EXAMPLE 5
In this example, the condition were the same as those set forth in
example 3, except that the coating material was the alloy of
example 4.
EXAMPLE 6
In this example, conditions were the same as those in example 1 or
4, except an iron carbide material, having a very hard surface, was
coated onto a razor blade by the same process.
EXAMPLE 7
A method such as that referred to in example 1 was carried out,
with all conditions thereof remaining the same, except that during
the time the argon was leaked into the bell jar, a small amount of
oxygen was allowed to enter the jar. By allowing sufficient oxygen
to enter the jar to react with the chromium, but not enough oxygen
so as to substantially diminish the vacuum in the system or to
interfere with the creation of the plasma, it was discovered that a
coating of chromium oxide was able to be placed on the blades.
Thus, this method demonstrates the ability of the method of the
present invention simultaneously to carry out coating deposition
and to allow a chemical reaction between the coating material and
another product introduced into the vacuum chamber.
It is believed that, since the sputtered coating material is
generally in a monoatomic or monomolecular form, the availability
of individual atoms or molecules for reaction is great, and the
probabilities of the desired reaction taking place are excellent.
Thus, a principal advantage of this method is that it makes
possible what is essentially a gas phase reaction at temperatures
greatly below the vaporizing or sublimation temperatures of
refractory materials, such as, for example, the types of metals
referred to herein.
Those blades referred to in the preceding examples in which a metal
or metal-containing compound was applied to the edge were suited to
receive an additional coating of plastic, over the newly coated
edge, either by a subsequent sputtering operation or by
conventional methods.
As pointed out above, a principal advantage of this method is that
no treatment subsequent to sputtering is required to prepare the
coated article for use or for a subsequent coating operation.
Particularly in the case of razor blades, this is a great
advantage, since, in the past, two honing operations were required
for a blade with a coated edge, and honing is an operation which
adds considerably to the cost of a blade.
In all the embodiments described herein, the target plate means 152
was shown as being different from, or separate or separable from
the electrode means 144, but will be understood that the reason for
this construction is not that such plates need be separate, but
that constructing them separately is the preferred method of being
able to coat them with the desired coating material, place them in
position, and then remove them for recoating when indicated.
In the case of the metal coating material, once the target plate is
attached to the electrode plate, the two plates 152, 144,
electrically speaking, are the same as only one plate, that is, the
charge on the target plate is of the same order and type as the
charge on the electrode plate. In the case of the nonmetallic
coating material, however, the plates tend to behave somewhat
differently, since current will not flow through dielectric
material in the same manner as it flows through metal. Still, the
behavior of the system is the same as through the electrode plates
144 were coated with a dielectric material.
Thus, the target plates and the electrode plates are illustrated
herein, and defined in the appended claims, as being separate
entities, but it will be understood that the two could be
integrally constructed, if this were desired.
Furthermore, the above-described method makes possible the
application of films, whether metallic, inorganic, or organic, of
thickness which are thinner than those previously achieved in the
cutting edge and the razor blade art, for example.
As set forth in example 1, a razor blade prepared according to the
present invention will have a coating, for example, of a thickness
of 100 to 600 Angstroms, that is, between one and six
one-hundredths of a micron. Thus, although it has been known to
apply metal coatings, for example, by evaporation, in thickness of
somewhat less than a micron, it is believed that it is not
heretofore known to coat a blade with a thickness of metal of one
to six one-hundredths of a micron.
It is believed that one reason that such a thin coating is
satisfactory is that the sputtered molecules have such momentum,
when sputtered from the target, that they are firmly held by the
substrate, and, in addition, since no subsequent honing or
stropping is required it is not necessary to add additional
thicknesses of material, which would then merely be grounded away
in a resharpening operations.
Likewise, coating the fluorocarbon, hydrocarbon, or other polymer
over an ordinary carbon steel blade edge, over a stainless steel
blade edge, or even over an edge coated with chromium according to
the method of the present invention, or otherwise, is believed
novel in that such coating may be applied with a thickness of as
little as 200 Angstroms or less, or as large as 1,200 to 2,000
Angstroms or more. Such coating thicknesses are much smaller than
those presently able to be achieved by other methods. In addition,
blades having such thin coatings have not been heretofore known,
since it has not been possible to apply such a thin coating in a
reproducible manner.
Although the reason therefor is not clearly understood, it is known
that coatings such as those described herein may be applied to the
cutting edges of blades, as described, without joining the edges
together. It is possible that, since the electrode plates are
disposed at an angle relative to the faces which define the cutting
edges of the blades or other instruments, that sputtered molecules
do not ordinarily have a vertical trajectory, and thus do not tend
to fly vertically into the "valleys" between blade edges, at least
in substantial numbers compared to the number striking the faces
near the cutting edges. At any rate, there has somewhat
unexpectedly been no problem with blades sticking together; this is
another advantage of the invention which facilitates treatment of
large numbers of blades at low cost.
It will thus be seen that the present invention provides a novel
apparatus, method and articles having novel advantages and
characteristics, including those hereinbefore pointed out and
others which are inherent in the invention.
Having completed a disclosure of my invention, in keeping with the
patent statutes, so that one skilled in the art may practice the
invention, I contemplate that certain variations may be made herein
without departing from the spirit of the invention or the scope of
the appended claims.
* * * * *