U.S. patent number 3,631,634 [Application Number 05/005,570] was granted by the patent office on 1972-01-04 for polishing machine.
Invention is credited to John L. Weber.
United States Patent |
3,631,634 |
Weber |
January 4, 1972 |
POLISHING MACHINE
Abstract
A polishing machine or similar abrading apparatus having a
horizontal platen rotatable about a vertical axis with workpieces
held against the platen by at least one vertically movable support
head. Pneumatic means are provided to raise and lower the support
head with the pneumatic means operatively disengaged from the
support head in the operating position, and with adjustable dead
weight means and position aligning idlers controlling the pressure
and position of the support head during operation.
Inventors: |
Weber; John L. (Spencerport,
NY) |
Family
ID: |
21716535 |
Appl.
No.: |
05/005,570 |
Filed: |
January 26, 1970 |
Current U.S.
Class: |
451/24;
451/288 |
Current CPC
Class: |
B24B
37/102 (20130101) |
Current International
Class: |
B24B
37/04 (20060101); B24b 005/00 () |
Field of
Search: |
;51/129,131 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Whitehead; Harold D.
Claims
I claim:
1. Abrading apparatus comprising a horizontal platen assembly for
supporting workpieces to be abraded and rotatable about a vertical
axis, at least one workpiece retaining support head for
constraining movement of workpieces relative to the platen
assembly, the support head defining a central bore and having a
predetermined body weight for applying an operating pressure
between the workpieces and the platen assembly, and control means
comprising a lifting tube in the bore with a flange engageable with
the head for selectively raising and lowering the support head, the
control means being operatively disengaged from the support head by
being spaced from and out of engagement with the head when the head
is lowered for operation such that the control means does not
affect the support head weight during operation.
2. Abrading apparatus according to claim 1 wherein the control
means comprises a pneumatic piston and cylinder assembly and the
lifting tube comprises an extension of the piston and cylinder
assembly.
3. Abrading apparatus according to claim 1 and further comprising
means to add predetermined body weight and thereby increase the
operating pressure.
4. Abrading apparatus according to claim 3 wherein the weight
adding means comprises a liftable cap over the support head to
receive within the cap a plurality of removable weights to be
positioned on the support head.
5. Abrading apparatus according to claim 1 wherein the support head
comprises a body portion defining the central bore and a mounting
tube within the bore the lifting tube positioned within the
mounting tube with the lifting tube flange below and engageable
with the mounting tube, the lifting tube and lifting tube flange
being spaced from the mounting tube when the head is lowered to
permit motion of the support head relative to the lifting tube.
6. Abrading apparatus according to claim 5 wherein the support head
further comprises a collar portion below the body portion to engage
a workpiece mounting block when the head is lowered, and flange
means for fixing the mounting tube to the collar portion.
7. Abrading apparatus according to claim 6 and further comprising a
pair of idlers frictionally engaging the support head collar
portion when lowered to align the position and rotation of the head
with respect to the platen assembly.
8. Abrading apparatus according to claim 7 and comprising a
plurality of support heads with one idler common to and
frictionally engaging the collar portions of all of the support
heads to provide uniform rotation of the support heads.
9. Abrading apparatus according to claim 8 wherein the common idler
is mounted on the platen assembly on its axis of rotation and the
support heads are disposed over the platen assembly around the
common idler with one other idler for each head at the periphery of
the platen assembly.
Description
Cross-reference is made to copending applications Ser. No. 862,219,
entitled "Polishing Machine or Similar Abrading Apparatus," filed
on Sept. 30, 1969, in the names of John L. Weber and Carl J. Vella;
and Ser. No. 862,423, entitled "Polishing Machine or the Like with
a Removable Platen," filed On Sept. 30, 1969, in the names of John
L. Weber and George C. Klimas.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to abrading apparatus such as
polishing machines, and in particular to workpiece support heads in
the machines to provide the desired pressure between the workpieces
and the abrading surface during operation.
2. Description of the Prior Art
When polishing workpieces such as silicon or germanium
semiconductor wafers, it is important that the workpiece support
heads maintain a preselected constant pressure between the
workpieces and the abrading surface. At the same time, it is highly
desirable to have automatic means for raising and lowering the
support heads between polishing operations. Heretofore, certain
kinds of lapping machines with pneumatic lifting means and designed
for other purposes have been modified to perform such polishing
operations, but operation has not been at the uniform pressures for
extended periods of time because the pneumatic means also are used
to apply the pressure.
SUMMARY OF THE INVENTION
According to the present invention, adjustable dead weight means
are provided to apply the uniform, desired pressure to the
workpieces and abrading surface through the support heads, and
lifting means such as a pneumatic cylinder is provided to raise and
lower the support head. The lifting means for each supporting head
specifically is designed to be disengaged from the head during
operation, and aligning idlers are provided to maintain position of
the support head and workpieces during operation.
BRIEF DESCRIPTION OF THE DRAWING
The invention as well as objects and advantages thereof will become
more apparent from the course of the following description of a
preferred embodiment, the accompanying drawing forming a part
thereof and wherein:
FIG. 1 is a partial perspective view of a polishing machine
embodying the present invention;
FIG. 2 is a partial elevational view showing a workpiece support
head and lifting means according to the invention in cross
section;
FIG. 3 is an enlarged cross sectional view of the portion of the
support head where the lifting mechanism is operatively
engaged;
FIG. 4 is a partial top view showing the center idler and an end
idler aligned with a support head during operation; and
FIG. 5 is a partial view showing the adjustable weight means.
DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring to FIG. 1, a polishing machine incorporating the present
invention suitably includes a support frame 10 on top of which is
mounted a worktable 11 about waist high to an operator. The
worktable 11 defines a central circular opening 12 within which is
located a horizontally disposed circular platen assembly 13
rotatable about a central vertical axis. Workpieces are positioned
on the top surface of the platen assembly 13, or a polishing pad
covering the platen, and are held against the platen by a plurality
(three) of work-supporting heads 14 which are vertically movable by
a pneumatic system located in a control head unit 15 supported by a
hollow column 16 forming part of the frame 10. In the operating
position as shown in FIG. 1, a plurality (also three) of peripheral
or end idlers 17 frictionally engage collars 20 on support heads 14
to transmit uniform working rotational motion to all of the
workpieces.
The control unit 15 contains suitable control device means to
operate the polishing machine, such as a pneumatic control knob 22
for each support head 14 to raise and lower the head, fluid valves
23 to control the flow of cooling fluid such as water through the
support heads, a slurry feed button 24 which provides a polishing
compound in the form of a slurry to be pumped from a reservoir and
metered onto the work surface of the platen through flexible tubes
33, machine start and stop buttons 25, 26, a timer 27 and timer
reset button 28 and an emergency stop 29. The side of the control
head not shown includes two pneumatic control knobs 22, a water
valve 23 and an emergency stop 29. Additional control buttons may
include a refrigerating unit start button 31 and a circulating
water pump or aspirator control button 32.
According to the present invention, each support head 14 is
designed to provide a uniform operating pressure and remove heat
generated during a polishing operation. As shown in FIG. 2, the
head 14 comprises a main body portion 35 having a central bore
within which is located a hollow tube 36. The tube 36 extends above
body portion 35 to define a reference post for attaching a
plurality of semicylindrical weights 37, which are added or removed
to adjust the level of working pressure desired. A lightweight
cylindrical cap 38 overlies the weights 37 to keep them on portion
35 while the head rotates. The cap 38 is lifted to add or remove
the weights as desired and includes a central retaining washer 39
engaging the top of tube 36 to limit its lowering to the position
shown.
The lower end of tube 36 defines a flange 40 which is fixed by
bolts or the like to a collar portion 41. Fixed to the center of
collar 41 is an aligning stud 42, around which are located a
plurality of ports 43 which provide fluid communication to the
lower surface 44. The lower surface 44 is recessed as shown, and at
the periphery of the recess are a plurality of fluid ports 45 to
direct fluid from the lower surface to an annular space 46 defined
by body portion 35 and the outer wall 47 of collar 41.
Within tube 36 is a hollow lifting tube 49 connected at its upper
end to a hollow pneumatic piston rod 50 by a joint coupling 51. The
lower end of tube 49 defines a flange 52 which engages flange 40 on
tube 36 to raise the head 14 when tube 49 is lifted. In the down
position as shown, flange 52 is spaced from flange 40 and body
portion 35 such that the pneumatic control system does not affect
the head pressure determined by weights 37. In this manner, the
support head is permitted to "float" with variations in the platen
level and in workpiece thicknesses to assure uniform polishing
without excessive or uneven wear at "high spots."
The pneumatic system includes a cylinder 54 and suitable air
pressure lines 55, 56 connected to a known air pressure source (not
shown) by a valve controlled by knob 22 to selectively raise or
lower the piston 50. As described more fully in U.S. application
Ser. No. 862,219, filed Sept. 30, 1969, a flexible water line 58
connects the top portion of piston 50 to supply coolant water to
the head through tube 49, with the water being removed from space
46 by a nozzle 59 connected to an aspirator pump.
To operate the machine, workpieces 60 (e.g. silicon wafers) are
attached to the lower surface of a disc-shaped mounting block 61 by
a known adhesive such as wax. The block 61 is then placed on platen
assembly 13 below a head 14 with the workpieces 60 against the
platen surface. The upper surface of block 61 defines a centering
hole 62 which is engaged by stud 42 when the head 14 is lowered to
align the block 61 with the head 14.
As is described in copending application Ser. No. 862,219, and U.S.
application Ser. No. 862,423, also filed Sept. 30, 1969, the platen
assembly 13 is rotatable on a horizontal plane about a vertical
axis coincident with a center idler assembly 64. A polishing pad
may be adhesively mounted on the top surface of the platen assembly
13, and the top portion of platen 13 is removable to replace the
pad. The blocks 61 are placed on the platen assembly 13 while it is
stopped, and each support head 14 is lowered until its collar
portion 41 engages the appropriate mounting block to apply pressure
between the workpieces 60 and the platen assembly 13. In the
lowered position as shown in FIG. 3, collar portion 47 frictionally
engages center idler 64 and an end idler 17.
When the lower platen assembly 13 is started, the differential
linear motion against the workpieces is transferred to the support
heads 14. The support heads 14 align themselves against their
respective idlers, and center idler 64 by engaging all three
collars 41 ensures that the workpieces under all three support
heads describe a uniform planetary motion.
During operation the spacing between the piston tube 49 and support
head tube 36, and their respective flanges 52, 40, enables the
support head to adjust to the workpieces and to account for
irregularities in motion. Frictional engagement with the idlers
also permit changes in vertical and angular alignment of the
support heads during rotation. Each work support head has a
predetermined dead weight which is applied to the workpieces
uniformly through mounting block 61. Since the lifting means is
mechanically disengaged from the support head during operation,
this weight, which should be kept constant, therefore is not
affected by changes in, for example, air line pressure or workpiece
thickness. If more or less weight is required for a given polishing
run, the cap 38 is raised and the weights 37 of predetermined value
are added or removed, preferably in pairs to maintain weight
uniformity.
Thus, it can be seen that uniform and efficient work support means
have been provided to polishing machines or similar abrading
apparatus of the class described.
While the invention has been described by reference to a preferred
embodiment, it is evident that changes or modifications, for
example with respect to size, shape or arrangement of parts, may be
resorted to without departing from the spirit of the invention.
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