U.S. patent number 3,616,451 [Application Number 04/670,853] was granted by the patent office on 1971-10-26 for multiple-layer coating.
This patent grant is currently assigned to Glaverbel. Invention is credited to Pierre Gallez.
United States Patent |
3,616,451 |
Gallez |
October 26, 1971 |
MULTIPLE-LAYER COATING
Abstract
A method and apparatus for coating at least part of a surface of
an article in vacuo, in a deposition chamber in which the vacuum is
maintained during and between coating operations, the surface to be
coated being maintained in a coating position during each coating
operation and different coating materials being provided by
different sources disposed on a carrier in the chamber, the carrier
being displaceable for moving each source in succession into an
operative position where emission of material from the source will
produce a coating layer on the surface at the coating position.
Inventors: |
Gallez; Pierre
(Sorinnes-Les-Dinant, BE) |
Assignee: |
Glaverbel (Watermael-Boitsfort,
BE)
|
Family
ID: |
19724990 |
Appl.
No.: |
04/670,853 |
Filed: |
September 27, 1967 |
Foreign Application Priority Data
Current U.S.
Class: |
204/298.26;
204/298.28; 118/727; 204/298.25 |
Current CPC
Class: |
C23C
14/568 (20130101); C03C 17/00 (20130101); C23C
14/3464 (20130101); C23C 14/24 (20130101) |
Current International
Class: |
C23C
14/56 (20060101); C23C 14/34 (20060101); C03C
17/00 (20060101); C23C 14/24 (20060101); C23c
015/00 () |
Field of
Search: |
;204/298 ;117/106
;118/48,49,49.1,49.5 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Mack; John H.
Assistant Examiner: Kanter; Sidney S.
Claims
I claim:
1. Apparatus for forming at least two different coating layers on
at least part of the surface of an article by deposition of
different coating substances in vacuo, comprising, in
combination:
means defining a deposition chamber in which a partial vacuum can
be maintained and one area of which constitutes a coating position
which is fixed relative to said chamber;
means associated with said chamber for supporting therein an
article whose surface is to be coated so that at least one surface
part to be coated is in such coating position;
a rotary carrier disposed in said chamber and supporting a
plurality of emission sources, each for emitting atoms or molecules
of a different coating substance when suitably activated, said
sources being elongate in the direction of the axis of rotation of
said carrier and having in that direction a dimension comparable to
that of the surface to be coated, said carrier being rotatable
relative to such coating position about an axis substantially
parallel to the surface part in the coating position for bringing
in each source in succession to at least one operative position and
for holding it at that position for an interval wherein emission of
its respective substance will produce a coating layer on at least
one respective part of an article surface in a coating position,
said carrier being displaceable without interrupting the vacuum in
said chamber; and
means operatively connected for activating the emission
sources.
2. An arrangement as defined in claim 1 wherein there is provided a
single carrier which carries separate emission sources and which is
displaceable by means located outside the vacuum chamber.
3. An arrangement as defined in claim 2 further comprising
stationary electrical power supply contacts positioned for
delivering electrical emission-activating energy to at least one of
said sources only when it is at one said operative position.
4. An arrangement as defined in claim 3 wherein there are provided
a plurality of sets of stationary contacts, each said set supplying
a different type of electrical energy and being positioned for
contacting each emission source of one type when that emission
source is at said one operative position.
5. An arrangement as defined in claim 1 wherein said carrier
carries said plurality of emission sources for different coating
substances at positions which are angularly spaced about the axis
of rotation of said carrier, said carrier being rotatable for
bringing each said emission source in succession to the at least
one operative position.
6. An arrangement as defined in claim 5 wherein said carrier is
driven by a stepping motor.
7. An arrangement as defined in claim 5 wherein said carrier
comprises spaced end pieces to which the ends of said emission
source are connected.
8. An arrangement as defined in claim 5 further comprising bearings
disposed in opposed walls of said vacuum chamber and rotatably
supporting said carrier.
9. An arrangement as defined in claim 5 wherein said carrier
comprises hollow shafts rotatably mounted in stationary bearings,
and conduit means communicating with the interiors of said shafts
and connected to said emission sources for supplying liquid coolant
via said shafts to the interiors of said emission sources.
10. An arrangement as defined in claim 5 wherein said carrier means
comprise hollow shafts which open to the outside of said vacuum
chamber, and electrical power supply contacts extending into the
interior of at least one said shaft and arranged for supplying
activating power to said emission sources.
11. An arrangement as defined in claim 5 wherein at least one of
said emission sources is constituted by a container for a coating
substance to be evaporated, and wherein said carrier comprises
hollow shafts rotatably mounted on stationary supports and
supporting said emission sources, and delivery means communicating
with the interior of at least one said shaft and with said
container for supplying the coating substance to said
container.
12. An arrangement as defined in claim 1 wherein said carrier
supports at least one emission source for emitting a coating
substance by thermal evaporation and said means for activating the
emission sources for emitting a coating substance by thermal
evaporation comprise electrical heating means associated with at
least one emission source for heating the substances to its
evaporation temperature.
13. An arrangement as defined in claim 1 for forming at least three
different coating layers, wherein said carrier supports at least
three emission sources.
14. An arrangement as defined in claim 1 wherein at least one of
said emission sources is constituted by a container for a coating
substance to be evaporated, and wherein said means for activating
comprise electrical heating means associated with said
container.
15. An arrangement as defined in claim 1 wherein at least one of
said emission sources is constituted by a cathode for forming a
coating by cathodic sputtering.
16. An arrangement as defined in claim 1 wherein said carrier also
carries at least one cleaning electrode.
17. An arrangement as defined in claim 1 wherein said carrier is
arranged for permitting the distance between any one emission
source and the surface part to be coated when it is in a coating
position to be varied.
18. An arrangement as defined in claim 1 further comprising
partition means associated with said carrier for preventing a
substance emitted from one said emission source from contaminating
any other emission source.
Description
BACKGROUND OF THE INVENTION
The invention relates to a method and apparatus for surface coating
articles, and particularly glass sheets, by deposition of coating
materials in vacuo.
It is known to surface-coat articles by placing them in an
evacuated enclosure opposite a source from which atoms or molecules
of the substance to be deposited are emitted, either by thermal
evaporation or by cathode sputtering.
The present invention is primarily concerned with the deposition in
vacuo of successive coating layers, either on top of one another or
adjacent one another.
SUMMARY OF THE INVENTION
It is a primary object of the present invention to simplify such
coating operations.
Another object of the present invention is to permit multiple-layer
operations to be carried out automatically, and with a high degree
of accuracy.
Still another object of the present invention is to apply
successive layers of different coating materials without
interrupting the vacuum in the chamber in which such coating
operations are carried out.
These and other objects according to the present invention are
achieved by a method of forming at least two different coating
layers on at least part of a surface of an article, by deposition
of different coating materials in vacuo in a single chamber, each
different layer being formed by the emission of atoms or molecules
from a respective one of a plurality of different sources, emission
from each source occurring when that source is at at least one
given operative position having a predetermined oppositional
relationship to the surface to be coated. The method according to
the present invention includes the steps of displacing the emission
sources periodically for bringing each source in succession to a
given operative position and maintaining it at such position for
the time required to effect the desired deposition, emitting
material from each source in succession during the period when it
is at the operative position for coating such article surface with
successively applied layers, and maintaining an uninterrupted
vacuum in each chamber during and between the successive coating
operations. According to a preferred employment of the present
invention, the article is constituted by a glass sheet.
The present invention also involves apparatus for forming at least
two different coating layers on at least part of the surface of the
article by deposition of different coating materials in vacuo. This
apparatus essentially includes means defining a deposition chamber
in which the partial vacuum can be maintained, means associated
with the chamber for supporting therein an article whose surface is
to be coated so that the surface part to be coated is in coating
position, and at least one carrier means disposed in the chamber
and carrying a plurality of emission sources, each for emitting
atoms or molecules of a different coating substance when suitably
activated. The carrier is displaceable relative to such article for
bringing each source in succession to at least one operative
position where an emission of its respective substance will produce
a coating layer of the article surface in the coating position, the
carrier means being displaceable without interrupting the vacuum in
the chamber.
The expression "oppositional relationship" refers to a spatial
relationship which is independent of the distance of the emission
source from the space area on which the coating substance is to be
deposited. A change in oppositional relationship constitutes a
movement of the point on this deposition area where this area is
intersected by the axis of an imaginary "beam" of atoms or
molecules from the emission source. For example, if the centers of
the emission source and a fixed surface part being coated are on a
common axis normal to such surface, then a change in the spacing of
the emission source and surface, along that axis, does not involve
a change in the oppositional relationship.
Apparatus according to the invention can be designed so that it is
suitable for carrying out the coating method hereinfore defined and
for performing other coating techniques. For example, the apparatus
can be designed so that a continuous ribbon of material to be
coated can be conveyed through the vacuum chamber while the partial
vacuum is maintained, and in that case successive portions of the
ribbon can be surface-coated with materials emitted from different
sources, these being brought successively into a standard operating
position in the chamber.
The advantages afforded by the invention can be appreciated by
considering a specific example of its use, namely, in the formation
of a plural layer coating on a sheet of glass to form an
interference filter. If such filters are formed by deposition of
the coating layers in vacuo in existing vacuum-coating apparatus,
time is lost in replacing one source of coating substance by
another and the delay is appreciable because this exchange of
sources necessitates interrupting the partial vacuum and
reestablishing it before coating can recommence. Proposals hitherto
made to prelocate different sources of coating substance at
different operative positions in the chamber have not proved to be
satisfactory in practice because the thin layers of the
interference filter did not have the necessary high-degree of
uniformity. By depositing the different coatings from sources
occupying the same oppositional relationship to the surface to be
coated, this problem is solved, and apparatus according to the
invention permits this solution to be adopted without interruption
of the partial vacuum and the consequential delays.
The invention is primarily intended for surface-coating flat
surfaces, e.g., sheets of glass, each coating layer being formed by
emission of atoms or molecules from a source located symmetrically
with respect to a central axis intersecting the surface to be
coated and normal to such surface.
The carrier or carriers for coating substances can be constructed
to hold a quantity or quantities of metal or other material, e.g.,
a dielectric, for evaporation, and/or to hold a quantity or
quantities of metal in the form of an electrode or as part of an
electrode (e.g., as an electrode coating) for coating articles by
cathode sputtering, and the carrier(s) can be associated with means
for supplying electrical energy for the thermal evaporation or
cathodic sputtering as the case may be. Superposed layers on one
and the same surface can be applied in vacuo by different
techniques; e.g., one layer may be applied by thermal evaporation
and another by cathode sputtering, and a given apparatus may
accordingly be provided with coating material sources of different
types. The carrier or carriers can also carry "cleaning
electrodes," i.e., electrodes for exerting a cleaning action on a
surface to be coated, e.g., by glow discharge.
There is preferably a common carrier for the different emission
sources, the carrier being displaceable to move the sources in
unison. The carrier may be in the form of a carriage displaceable
along a guideway or guideways which may be straight or curved. As
an alternative, the carrier may be a rotary carrier. A particularly
suitable form of rotary carrier is one constructed for holding
separate quantities of coating substances at positions angularly
spaced about its axis of rotation. The carrier may be driven by a
stepping motor. The different operative positions of the carrier
can be positively determined, e.g., by stop or locking means.
It is particularly convenient to provide a rotary carrier
comprising spaced rotary end pieces between which one or more
sputtering electrodes or one or more containers for coating
substance to be thermally evaporated extend, parallel with the axis
of rotation of the carrier. The types of emission sources at given
positions on the carrier can be varied by making different types of
emission sources interchangeable. The rotary carrier may be
supported in bearings in opposed walls of the vacuum chamber. The
carrier may have hollow stub shafts or trunnions and these may be
connected into a cooling liquid circuit for supplying coolant
through sputtering electrodes. Alternatively, hollow stub shafts or
trunnions closed at their inner ends may serve to house electrical
contacts and components of a coolant-circulating system so that
these contacts and components are accessible from the outside of
the vacuum chamber. If deposition by thermal evaporation of
substance from a container is to take place, the substance to be
thermally evaporated can also be fed into the container through
hollow trunnions or stub shafts; quantities of the appropriate
substance to be evaporated can then be fed into the container at
any time without interruption of the vacuum.
The emission sources, i.e., the separate quantities of coating
substance, are preferably held by the carrier in such a way that
the position of each source can be independently adjusted according
to the required spacing of the source from the article to be coated
when the source is in operative position. This spacing influences
the thickness of the deposit formed by the emission. Different
emission sources may accordingly have to be set at different
distances from the work when forming a coating comprising
superposed coating layers of different thicknesses.
Electrical current can be supplied to the emission sources via
fixed terminals by providing cooperating contacts on the carrier(s)
for the emission sources or, in the case of an electrode emission
source, on the electrode itself. If different sources require
currents with different voltage or other characteristics, there may
be different pairs of fixed terminals connectable to different
current sources and at each emission source position on the carrier
there may be a pair of cooperating contacts which are formed or
located so that they will make contact only with the appropriate
pair of fixed contacts.
A masking screen may be provided to prevent substance emitted at
the coating station from depositing on the source, or sources, of
coating material which are for the time being not in use. It is
therefore not necessary for the emission sources to be carried at
widely spaced positions.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1A is a cross-sectional elevational view of an arrangement
according to the present invention composed of a vacuum chamber
with an article support and three sources of coating
substances.
FIG. 1B is a view similar to that of FIG. 1A of another embodiment
of the present invention.
FIG. 2 is a cross-sectional elevational view, along the line 2--2
of FIG. 3, a part of an apparatus according to the invention.
FIG. 3 is a plan view of the arrangement of FIG. 2.
FIG. 4 is a plan view of an assembly of holders for coating
substances according to the present invention.
FIG. 5 is a layout of the relationship between FIGS. 5A and 5B.
FIG. 5A is a partly cross-sectional view of part of the left-hand
side of an apparatus according to the invention.
FIG. 5B shows part of the right-hand side of this apparatus after
modification, the upper portions of FIGS. 5A and 5B(above line
A--a) being shown in cross section.
FIG. 6 is an elevational view of another apparatus according to the
invention.
FIG. 7 is an elevational view of a further embodiment of the
invention.
FIG. 8 is a layout showing the relationship between FIGS. 8A and
8B. FIG. 8A is a partly cross-sectional, elevation view of part of
the left-hand side of another apparatus according to the
invention.
FIG. 8B is a view similar to FIG. 8A of part of the left-hand side
of the apparatus.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
The apparatus according to FIG. 1A comprises a chamber 1 in which
thin layers of coating material are to be deposited on articles in
vacuo. The chamber has an inlet air lock 2 and an outlet air lock
2' via which articles to be coated are introduced and removed,
respectively. A batch of articles to be coated is suspended from,
or fixed to, a frame 3 which travels along guide rails 4. A screen
5 is disposed in the chamber 1 and forms the top of a compartment 6
in which emission sources 7, 7' and 7" are accommodated.
The sources are mounted on a carriage 8 which is displaceable along
the compartment 6 under control from outside the chamber by any
well-known means (not shown). The screen 5 is formed with a central
aperture 9. By movement of the carriage, the sources 7, 7' and 7"
can be brought successively into working position, i.e., directly
beneath the aperture 9.
In operation, the frame 3 carrying the articles to be coated is
advanced into the chamber 1 through the air lock 2 and into a
control position as illustrated. It will be assumed that a
triple-layer coating is to be formed on each of the articles, the
layers being composed of substances originating from the sources 7,
7' and 7", respectively. For depositing the first layer, the
carriage 8 is brought into position with source 7 opposite the
aperture 9 and emission of material from this source is effectuated
in any well known manner.
When the first layer has attained the required thickness, the
source 7 is rendered inoperative so as to terminate emission
therefrom and the carriage 8 is moved to bring source 7' opposite
the aperture 9 whereupon the second layer is deposited.
Subsequently, the third layer is deposited from the source 7".
The vacuum in the chamber is maintained, without interruption,
during the entire period of forming the three layers. When the
three layers have been deposited, the frame 3 is removed from the
chamber 1 through the outlet air lock 2', and another frame 3 can
be introduced into the evacuated chamber 1 through the air lock 2.
The vacuum in the chamber can also be maintained during these
further operations so that the introduction of the batch of
articles carried on the further frame can proceed immediately.
Apparatus as diagrammatically represented in FIG. 1A can also be
arranged, as shown in FIG. 1B, for example, for depositing a thin
layer on a continuous ribbon, or strip, or material advancing
through the chamber 1, with the possibility of changing the nature
of the layer at any time merely by moving the carriage 8 to bring
different emission source into operative position.
The apparatus according to FIG. 1B comprises a vacuum chamber 1 in
which thin layers can be deposited on a long glass ribbon, or
strip, S. The glass ribbon enters and leaves the chamber via air
locks 2 and 2', respectively, in which there are rollers 4' for
supporting the glass.
Within the chamber there is a rotary carrier 8' comprising end
pieces with four radial arms on which there are four sources of
coating substances of different types, these sources being
designated C.sup.1, C.sup.2, C.sup.3 and C.sup.4. The drawing is
intended merely to illustrate a general form of apparatus
exemplifying the principle of apparatus according to the invention.
Therefore, the coating substance sources are shown merely by
rectangles and each of these can be taken as representing an
electrode or a group of electrodes, or a trough or group of troughs
for containing substance for thermal evaporation, or a cleaning
electrode. The source C.sup.1 is in the operative position and the
substance emitted from this source forms a layer on the facing
surface of the glass ribbon 5 while the latter is being displaced
through the chamber, or, if so desired, while the ribbon is
stationary. The other sources, C.sup.2, C.sup.3 and C.sup.4 are
inoperative during this period.
A screen 5' helps to prevent the sources C.sup.2, C.sup.3 and
C.sup.4 from being coated with the substance being emitted from
source C.sup.1. When it is desired to apply a different substance,
either on top of the coating formed by means of source C.sup.1, or
on a succeeding part of the glass ribbon, the carrier 8' is indexed
to bring the selected one of the other three sources into the
operative position, but the vacuum in the chamber is maintained
without interruption. As source C.sup.1 moves out of the operative
position, the emission of atoms or molecules therefrom ceases. The
manner in which the carrier can be supported for rotation and the
manner in which the coating substance can be fed with current from
outside the chamber will be understood from the more detailed
description of the embodiments of the invention shown in the
subsequent figures of the drawings. Such apparatus can be used for
coating successive lengths of the ribbon with different coating
substances while the ribbon is in continuous movement. Only a
narrow uncoated zone will be present between the successive
coatings, corresponding with the time interval required to move the
carrier stepwise. By way of example, a ribbon of glass coming from
a flat-glass-manufacturing plant can be passed through the chamber
for deposition of different coating substances, e.g., gold and
titanium dioxide, to successive portions of the ribbon length.
Alternatively, such apparatus can be used for depositing single or
plural-layer coatings on any given area of a strip or ribbon, or on
each of successive areas thereof, while the strip or ribbon is
stationary.
The apparatus may alternatively or in addition be constructed to
support an article, e.g., a sheet of glass, wholly within the
chamber, for deposition of two or more superposed coating layers of
different composition on a surface thereof.
It is to be understood that it is not essential for there to be a
common working position for all of the coating substance sources.
For example, two different coating substance sources may at any
given time be within a given operative range of and opposite to the
surface to be coated, and in that case different coatings may be
applied from these particular sources without any rotary motion of
the carrier.
A particular construction of a carriage 8 for the apparatus of FIG.
1A, with three emission sources, is shown in detail in FIGS. 2 and
3. The carriage comprises a rectangular frame 10 formed by welding
together four angle irons 10a, 10b, 10c and 10d. Attached to, and
supporting, the frame 10 are freely rotatable rollers 11a and 11b
enabling the frame 10 to move over a guide path formed by further
angle irons 12 and 12' which extend parallel to one another along
the bottom 12a of the vacuum chamber 1. The carriage can be located
in any selected one of its three operative positions by a
ball-and-socket-indexing arrangement or any other type of catch or
lock. The carriage is moved into each of its working positions by
any known type of linear motor (not shown).
At positions 14 and 15 on the frame 10 there are arranged
electrodes constituting cathode-sputtering sources. At another
position along the frame there is a container 16 for a substance to
be emitted by thermal evaporation. These specific units being
mentioned only for exemplary purposes. By way of example, the
emission sources may be selected for forming an interference filter
or semireflecting coating comprising successively deposited layers
of copper, gold and silicon monoxide, such as may be required on
various optical components. By maintaining the article surface
stationary and moving each source into an accurately determined
operative position, the present invention permits the attainment of
the high degree of uniformity in the deposition, from one coating
layer to the next, required for such optical components.
At the position 14, there are two electrodes 17, 18 of solid copper
which when in the operative position below aperture 9 are connected
to an alternating high-voltage source producing 3,000 volts. Each
electrode has a longitudinal bore 19 (as shown in the case of
electrode 18 in FIG. 2) through which a cooling liquid, for
example, transformer oil, is circulated. The coolant is supplied to
the electrodes through a conduit 20 and returns through a conduit
21. These conduits are made of an electrical insulating material to
prevent short circuits from appearing between the various
electrodes. The conduits 20 and 21 are common to the several sets
of electrodes mounted on the frame 10 and at locations 22 removable
plugs are fitted to provide for the connection of further branch
conduits at these places if at any time it should be required to
fit further electrodes in place of the container 16.
The electrodes 17 and 18 are fixed to the frame 10 by nuts and
capscrews countersunk in the ends of the electrodes and shown at
25, 25'. Insulating plates 26, 27, 26'and 27'are provided to
electrically insulate the electrodes from the frame 10. By varying
the thickness of the insulating plates, the vertical position of
the electrodes can be regulated to some extent.
The electrodes at the position 15 are connected to the frame 10 and
cooled in the same way. These further electrodes, however, are
formed of tungsten which has been covered with gold, e.g., by
electrolysis.
The container 16 is made of any suitable metal and comprises a
trough portion 28 which can hold a substance to be thermally
evaporated, e.g., silicon monoxide. The ends of the container, when
the latter is in its operative position, are connected to a source
of e.m.f. of about 100 volts which heats the container by Joule
effect.
In the drawing, the carriage 8 is located so that the electrodes 17
and 18 are in the working position opposite aperture 9 (shown in
broken line in FIG. 3). At this position, and adjacent the frame
10, there are mounted stationary contacts 29, 30 and 29', 30'.
These are high-voltage contacts and they are spaced about the two
longitudinal sides of the frame 10 by a distance which is
substantially greater than the thickness of the ends of the
container 16. For cooperating with the container 16, low-voltage
fixed contacts 31, 31' are disposed at the working position,
laterally abreast of the frame 10, at positions such that they can
not be contacted by the ends of the cathode-sputtering electrodes.
The different emission sources become automatically connected to
the appropriate voltage sources as the former move into working
position.
Beneath the emission sources is provided a screen 32, which is
fixed to the frame 10, to avoid contamination of underlying
parts.
FIG. 4 shows a modified form of container for coating substances to
be thermally evaporated. In this case the container, which can be
connected to the frame 10 (FIG. 3) in the same way as container 16,
comprises parallel strips, 40, 41 of electrically conductive
material, between which there is a series of metal wells 42 for
containing the material to be evaporated. This provides a more
powerful evaporation source than that shown in FIG. 3. When using
the evaporation source shown in FIG. 4, the contacts 31 and 31'
shown in FIGS. 2 and 3 must be slightly offset in relation to one
another in the direction of movement of the support 8, so that each
can contact a different one of the strips 40 and 41 when the
container is in the operative position.
The apparatus shown in FIGS. 5A and 5B comprises a drum-type
carrier for the emission sources of the coating substances. The
drum is composed of two hollow stub shafts 50 and 50' extending
through the walls 51a and 51b, respectively, of a vacuum chamber.
Between each stub shaft and its associated chamber wall there is a
bearing 51c of a suitable construction known per se, for
maintaining an airtight seal. Discs 52 and 52', with respective
peripheral flanges 53 and 53' are each welded to a respective
shaft. These discs can support electrodes 54, 55, 56 and 57 or, as
shown at 58 in FIG. 5B, a container for coating substances to be
thermally evaporated. The emission sources are connected to the
disc flanges by capscrews and nuts 59 and 59', electrical
insulating plates 60, 61 and 60' being interposed between the disc
flanges and the emission sources. The electrodes and container
(when used) form bracing struts between the two flanged discs.
The supply of high and low-voltages is performed in a manner
similar to that shown in FIG. 3, by means of fixed contacts 62 and
62' (high voltage) and 63 and 63' (low voltage). The ends of the
electrodes 54 to 57 and of the container 58 are so shaped and
dimensioned, and the fixed contacts 62, 62', 63 and 63' are so
disposed that the connection of the different coating substances
sources to their suitable voltage sources is performed
automatically on movement of the sources into working position by
rotation of the drum. The fixed contacts 62,62', 63 and 63' are
adjacent an aperture 64 in a generally cylindrical screen which
encloses the drum, this screen being shown by broken lines 65a and
65b.
The cathode-sputtering electrodes are cooled by the circulation of
oil through a longitudinal bore, such as 66, provided in each
electrode. The cooling liquid is fed through the hollow stub shaft
50, and is distributed to the various electrodes via conduits 67
which are made of electrical insulating material and which are
connected to apertures, such as 68, in the electrodes, the liquid
being discharged via similar conduits 67' and through the opposite
stub shaft 50'.
It is advantageous to have the coolant circulate through all the
electrodes mounted on the drum, with a view to extracting the
maximum amount of heat from the vacuum chamber.
When a thermal evaporation source, such as that shown at 58 in FIG.
5B is used, the outer ends of the corresponding conduits 67 and 67'
are closed by plugs.
In the apparatus shown in FIGS. 5A and 5B each electrode on the
drum is a cathode and the electrodes cooperate with a common anode
(not shown) suitably disposed elsewhere in the vacuum chamber. The
electrodes on the drum are fed with direct current. A container,
such as container 58, for a substance to be evaporated can be
heated by either direct or alternating current. As the container is
only heated when it is in the working position, the contents of the
container will be in a solidified condition when the container is
at other positions, thus there is no danger of the substance
spilling out as the drum is rotated.
The drum can be turned by an electric stepping motor 50a, which may
be of any known type. A pin 71 on the inside of the chamber wall
51a pivotally supports a roller 70 through the intermediary of an
arm which is biassed so that during rotation of the drum the roller
sequentially engages in locating notches in a disc 69 secured to
stub shaft 50, thereby to accurately locate the drum in each of its
successive working positions.
A second screen 72 is provided which is disposed radially inwardly
of the path of the cathodes to prevent contamination of one
emission source by material falling towards the interior of the
drum from another source.
FIG. 6 shows a drum-type carrier with polygonal-shaped ends
supporting the emission sources. Each drum end is formed by a
plurality of bars 80 welded together to form a hexagon. The hexagon
can be regular, as shown in FIG. 6, or irregular. If drums ends of
irregular hexagonal shape are used, the distances of different
emission sources from the axis of rotation will be different and
these distances can be individually selected according to the
nature of the sources of emission and the thicknesses of the
coating layers to be formed. The hexagonal ends of the drum shown
in FIG. 6 are secured to hollow shafts or trunnions, such as 81, by
spokes 82.
Sputtering electrodes 83 are held in position by fasteners 85 which
extend through open-ended slots in the bars 80. The positions of
the fasteners along these slots determine to some extent the
spacing of the appertaining electrodes from the drum axis. The bars
60 can be made of electrical insulating material, or other means
can be employed for insulating the electrodes 83.
The drum is surrounded by a screen 84, 84' formed with two
apertures corresponding to two working positions so that two
articles can be coated simultaneously if they are appropriately
held opposite the respective screen apertures.
FIG. 7 shows one end of a simple rotary carrier comprising rotary
end pieces with four radical arms mounted directly on stub shafts,
the shaft at the end shown being denoted 91. The outer ends of the
radial arms are bent inwards, as indicated by 90a, 90b, 90c and
90d, to form flanges to which electrodes 92, 93, 94 and 95,
respectively, are secured by bolts (not shown) passing through the
electrodes and through the said flanges. The electrodes are in the
form of bars extending normally to the plane of the drawing. The
side edge faces of the bars are chamfered as shown at 92a and 93a
and the aforesaid bolts clamp these chamfered side edge faces of
the bars against insulating members 96, 97, 98 and 99. The
outwardly projecting margins of these insulating members serve as
partitioning walls to prevent the contamination of the nonoperative
electrodes by substances emitted from the electrode or electrodes
which are in operation. Containers for substances to be thermally
evaporated could equally well be connected to a simple rotary
carrier of this type.
FIG. 8 shows an apparatus in which all of the electrical
connections, and the connections and conduits for cooling fluid,
are disposed outside the vacuum chamber, the sidewalls of which are
shown at 101a and 101b.
The emission source carrier is in the form of a drum which
comprises two cylindrical end pieces 102 and 102' rotatably mounted
in bearings 103 and 103', respectively, in the walls 101a and 101b,
respectively. The inner ends of the cylindrical pieces are closed
by round plates 104 and 104', respectively. To these plates cooling
fluid-distributing boxes 105 and 105', respectively, are secured.
These boxes are made of an insulating material. A supply conduit
106 leads into box 105 and an evacuation conduit 106' leads away
from box 105'.
Sputtering electrodes and/or containers for substances to be
thermally evaporated can be connected, as shown, to the end pieces
102 and 102'.
The drawings show a troughlike container 107, which is made of
refractory material and is capable of holding the material for
evaporation, in place on the rotary carrier. Inside the container
is an electrical resistance heating element in the form of a ribbon
108 immersed in the material to be evaporated. One of the ends of
the trough is secured to the end piece 102 by a connector 109 which
is screwed through the end piece 102 into a nut 110 embedded in the
refractory material of the trough. An electrically conductive rod
111 extends through this connection and one end of the rod is
connected to the electrical resistance 108 while its other end
carries an electrical contact 112. Insulating plates 113, 114 serve
both as insulators and to form airtight seals. The portion of end
piece 102 surrounding connector 109 is also of insulating
material.
The other end of the troughlike container 107 is held to the end
piece 102' by a component 115 which is screwed into a nut 110'
embedded in the refractory material of the trough. This component
115 comprises connected tubes 116 and 120 through which material
for evaporation can be supplied to the trough without having to
interrupt the vacuum. The tube 116 has a stop collar 117, and
insulating plates 113' and 114' are interposed at the joint. The
lower end of the tube 116 opens into a supply conduit 118 through
which the material to be evaporated is supplied so that it feeds
into the trough along path 119.
The lower parts of FIGS. 8A and 8B show a cathode bar 121 connected
by its ends to the end pieces 102 and 102' by straight tubes 122
and 122', respectively, which are screwed into sockets in the ends
of the electrode. These tubes are made of electrically conductive
material and are fitted with stop collars 123 and 123',
respectively. The tubes 122 and 122' are connected to the
coolant-distributing boxes 105 and 105', respectively, by
releasable connections 125 and 125', respectively, and conduct the
coolant to and from, respectively, a longitudinal bore 124 in the
electrode. Insulating plates 113", 114", 113'" and 114'" are
interposed at the joints between the tubes 122 and 122' and the
electrodes. The tube 122 carries an electrical contact 126.
The contacts 112 and 126 cooperate with fixed contacts 127 and 128,
respectively, disposed adjacent the working position of the
metallization sources.
The contact 112 can touch only the fixed contact 127, whereas the
contact 126 can touch only the contact 128. The material in
container 107 is heated by a low-voltage current and the
cathode-sputtering electrode 121 is fed with high voltage, when in
the working position. This working position is opposite an aperture
129 in a screen 130, 131 enclosing the rotary carrier.
The carrier can be formed to take several electrodes or containers
for material to be thermally evaporated.
If it is not desired to employ a tubular component such as 115 for
feeding material into the troughlike container, then the
corresponding end of the container can be secured to the
appertaining end piece of the carrier by a simple connecting
pin.
In any embodiment of the invention, one or more of the illustrated
electrodes can constitute a cleaning electrode. For example, a
cleaning electrode or electrodes may be substituted for one or more
of the emission sources in any of the apparatus described with
reference to the accompanying drawings.
In the drawings, the actual position of an article in relation to
an emission source during deposition of a coating layer has not
been shown but it will be understood that it is intended that the
article will be placed so that the surface being coated faces the
emission source in use. The invention is primarily intended to be
employed in the coating of sheet material, e.g., sheets of glass.
In such cases the sheet to be coated can be supported horizontally
in the vacuum chamber, with the surface to be coated facing
downwardly and the emission sources may operate from a position
below the sheet. Also in such cases, the area of the surface to be
coated will generally be substantially larger than the area from
which atoms or molecules are emitted from the emission source.
It will be understood that the above description of the present
invention is susceptible to various modifications, changes and
adaptations, and the same are intended to be comprehended within
the meaning and range of equivalents of the appended claims.
* * * * *