U.S. patent number 3,616,450 [Application Number 04/774,126] was granted by the patent office on 1971-10-26 for sputtering apparatus.
Invention is credited to Peter J. Clark.
United States Patent |
3,616,450 |
Clark |
October 26, 1971 |
**Please see images for:
( Certificate of Correction ) ** |
SPUTTERING APPARATUS
Abstract
Sputtering apparatus of the glow discharge type operable at
relatively low gas pressures and utilizing a combination of
magnetic and electric fields and at least one cathode disposed
within the magnetic field and constituting a source of atoms which
are emitted through a path defined by the cathode for deposition of
thin films on a suitable supporting surface.
Inventors: |
Clark; Peter J. (Stony Brook,
NY) |
Family
ID: |
25100311 |
Appl.
No.: |
04/774,126 |
Filed: |
November 7, 1968 |
Current U.S.
Class: |
204/298.17;
204/192.12 |
Current CPC
Class: |
H01J
37/3402 (20130101) |
Current International
Class: |
H01J
37/34 (20060101); H01J 37/32 (20060101); C23c
015/00 () |
Field of
Search: |
;204/298,192 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
|
|
|
|
|
|
|
702,672 |
|
Jan 1965 |
|
CA |
|
939,275 |
|
Oct 1963 |
|
GB |
|
Other References
LI. Maissel, "The Deposition of Thin Films by Cathode Sputtering,"
Physics of Thin Films, Vol. 3, pp. 61-129, Academic Press, Inc.,
N.Y. 1966.
|
Primary Examiner: Mack; John H.
Assistant Examiner: Kaplan; Neil A.
Claims
I claim
1. Sputtering apparatus for coating a workpiece comprising an anode
shell of conductive material having an opening on one end and a
conductive closure hermetically sealing the other end, an
open-ended tubular cathode at said one end of said anode shell and
having at least a portion disposed within an in close proximity to
said anode shell to provide uninterrupted access into said anode
shell, means for supporting work to be coated at said one end of
said anode shell to intercept atoms emerging from the cathode,
means hermetically enclosing said one end of said anode shell, said
cathode and said work-supporting means and means producing magnetic
and electric fields in said anode shell with the direction of said
magnetic field being disposed centrally of said anode shell and
substantially axially aligned therewith, said magnetic field having
a nonlinear portion intercepted by said tubular cathode.
2. Sputtering apparatus according to claim 1 wherein said magnetic
field- generating means surrounds said anode shell.
3. Sputtering apparatus according to claim 1 wherein said cathode
extends from a point spaced outwardly from the other end of said
anode shell into said anode shell and intercepts said nonlinear
portion of said magnetic field.
4. Sputtering apparatus according to claim 1 wherein said magnetic
field-generating means comprises a magnet surrounding said shell
and wherein said cathode extends inwardly from the other end of
said shell to a point beyond the plane defined by the adjoining
edge of said magnet.
5. Sputtering apparatus according to claim 4 wherein said cathode,
has an average internal diameter of about 2 inches and extends into
said anode a distance at least one fourth inch beyond the plane
defined by said adjoining edge of said magnet.
6. Sputtering apparatus according to claim 1 including a second
cathode within and insulated from said anode shell, said second
cathode being positioned in spaced relationship to the first said
cathode and electrically interconnected therewith.
7. Sputtering apparatus comprising an open-ended tubular anode of
nonmagnetic conductive material, nonmagnetic conductive means
closing one end of said anode and electrically connected to said
anode, magnetic field means producing magnetic flux within and in a
direction generally in line with the central portion of the axis of
the anode and having nonlinear end portions, an open-ended tubular
cathode projecting into the other end of said anode and
intercepting at least a part of a nonlinear portion of said
magnetic field, a work support facing the opening in said tubular
cathode, means enclosing and sealing the other end of said anode,
said cathode and work support whereby said anode can be at least
partially evacuated and means for applying a voltage between said
anode and cathode to produce a glow discharge causing gas ions to
strike said cathode and liberate atoms from said cathode for
deposition on said work surface.
8. Sputtering apparatus according to claim 7 wherein said
magnetic-field-producing means includes a permanent magnet
surrounding said tubular anode and said tubular cathode extends
into said anode to a point beyond the adjoining end of said
magnet.
9. Sputtering apparatus according to claim 8 wherein said cathode
and magnet overlap at least one fourth inch.
10. Sputtering apparatus according to claim 7 including a second
cathode disposed within and insulated from said anode.
11. Sputtering apparatus comprising an anode shell of conductive
material and having an opening on one end and a conductive closure
hermetically sealing the other end, an open-ended tubular cathode
adjoining said open end and at least partially disposed within said
anode shell, means supporting a substrate to be plated in proximity
to said cathode, means hermetically enclosing said one end of said
anode shell, cathode and work-supporting means to permit evacuation
of said anode shell and produce a gaseous atmosphere therein, and
means producing electric and magnetic fields within said anode and
cathode shell with at least a portion of the magnetic field being
nonlinear and intercepted by said cathode, said fields producing a
glow discharge therein and causing atoms released from said cathode
to be deposited on said substrate and form a film thereon, said
electric and magnetic fields producing a relatively high negative
bias on said substrate to effect cleaning of said substrate by ion
bombardment and minimize contamination of the film deposited
thereon.
12. Sputtering apparatus according to claim 11 including a second
cathode disposed within said anode and in spaced relationship to
the first said cathode.
13. Sputtering apparatus for coating a workpiece comprising a
single open ended hollow shell, magnetic means surrounding said
shell to produce a magnetic field within said shell having a
substantially linear central portion and nonlinear end portions, a
cathode having an opening therein adjoining the open end of said
shell, the surface of said opening carrying material to be
sputtered, said cathode opening intercepting at least a portion of
the nonlinear magnetic field, means including said cathode and an
anode for producing an electric field within said shell and
work-supporting means spaced from said cathode opening and on the
side of said cathode opposite said shell.
Description
This invention relates to sputtering apparatus for production of
thin films of metal and dielectric material and more specifically
to a novel and improved sputtering device wherein cathode
disintegration is effected by an electric glow discharge and
cooperating magnetic field in an improved manner that permits
operation at very low gas pressures and provides films having
adherence adherence and improved uniformity in mechanical and
electrical properties.
The production of thin films utilizing cathode disintegration is
well known and is effected by gas ions impinging upon the cathode
and physically ejecting atoms from the cathode surface. This
phenomenon is generally known as sputtering and is particularly
useful for coating bodies with thin films. In coating a body, it is
generally positioned in the path of the atoms ejected from the
cathode surface so that the atoms will be deposited on the surface
of the body. In addition to the utilization of an electric field to
produce the glow discharge, magnetic fields have been employed in
an effort to obtain some improved operation. However, known devices
whether using an electric field alone or in combination with a
magnetic field have not been found to be entirely satisfactory for
a number of reasons. For instance, known sputtering devices
including those using magnetic fields require relatively high gas
pressures with the result that the gas atoms within the device tend
to deflect many of the sputtered atoms away from the body to be
coated causing relatively low deposition efficiency. Furthermore,
the relatively high number of gas atoms present in the apparatus
causes many of them to become entrapped in the metal film being
deposited producing nonuniform films wherein the density varies
throughout the area of the film. Known devices also require that
the surface to be plated either form part of the anode or cathode
or be positioned in the apparatus in such a manner that operation
of the apparatus must be terminated upon completion of the coating
operation in order to insert a new workpiece or pieces to be
coated, and substantial difficulty has been experienced in
attaining satisfactory adherence of the film to the substrate or
workpiece.
With this invention which embodies a novel and improved arrangement
of elements including electric and magnetic fields, many
difficulties heretofore encountered with known devices have been
overcome and an improved device is provided having a relatively
high deposition or disintegration efficiency, producing a film of
substantially uniform density throughout its area, and greatly
improved adherence of the film to the work surface whether the work
surface is conductive or nonconductive. By the improved
coordination of the electric and magnetic fields, the magnetic
field in accordance with the invention functions to deflect
electrons from the paths they would normally follow in the absence
of such magnetic field, and furthermore directs the electrons in
such a manner that the lengths of the paths are greatly increased.
This action greatly increases the number of ionizing collisions
between the electrons and the gas molecules. As a result, the gas
pressure in apparatus in accordance with this invention can be
materially reduced while at the same time maintaining a relatively
high discharge current. Furthermore, since the invention
facilitates the use of relatively low gas pressures the deposition
efficiency is greatly improved and a greatly increased quantity of
the liberated atoms will be deposited on the surface to be coated.
In addition, the material reduction in the number of gas atoms
present within the device results in a corresponding reduction in
contamination of the film by the inclusion of gas atoms therein.
Through an improved arrangement and organization of elements the
substrate or workpiece being coated assumes an automatic high-bias
voltage which provides a vastly improved film having excellent
adherence. This is particularly important in the case of
nonconductive substrates.
Another object of the invention is to produce a novel and improved
relatively high-efficiency sputtering device for coating surfaces
with thin films wherein the surfaces to be coated need not form
part of either the anode or the cathode.
Still another object of the invention resides in the provision of a
novel and improved sputtering apparatus utilizing a relatively low
gas pressure and at the same time producing a highly stable and
intense glow discharge between the cathode and the anode which
greatly facilitates operation of the apparatus and produces high
quality, high-density films.
A still further object of the invention resides in the provision of
a highly efficient and stable sputtering device that is adaptable
for use in normal production operations in that a plurality of
individual surfaces may be successively coated without interrupting
the operation of the device.
The above and other objects of the invention will become more
apparent from the following description and accompanying drawings
forming part of this application.
In the drawings:
FIG. 1 is a cross-sectional view of one embodiment of the apparatus
in accordance with the invention and which embodies a glow
discharge device;
FIG. 2 is an enlarged cross-sectional view of the glow discharge
device illustrated in FIG. 1; and
FIG. 3 is a modified form of glow discharge device in accordance
with the invention.
Referring now to FIG. 1, the sputtering apparatus in accordance
with the invention includes a baseplate 10 disposed in a
substantially horizontal position and having a bell jar 11
removably sealed to the top surface of the plate 10 by suitable
sealing means 12. The sputtering apparatus is generally denoted by
the numeral 13, and as will be described, is sealed to the bottom
side of the baseplate 10 and opens into the interior of the bell
jar 11. A circular work-supporting plate 14 is disposed within the
bell jar and is pivotally mounted at 15 to the upper surface of the
plate 10. The plate 14 can be rotated by any suitable means as for
instance a motor 16 carrying a drive wheel 17 of resilient material
which contacts the periphery of the plate 14. It is evident that
other forms of work or substrate supporting surfaces may also be
used.
A conduit 18 extends through the baseplate and is connected on its
outer end to a two-way valve 19. A second conduit 20 connects the
valve to a vacuum source for exhausting air from within the bell
jar 11 and the sputtering device 13. A third conduit 21 has one end
connected to the valve and the other end connected to a source of
inert gas such as argon or the like so that the gas pressure can be
adjusted to the desired magnitude. Reactive gases such as oxygen
and nitrogen can also be used when metal and dielectric films such
as tantalum nitride or aluminum oxide are to be formed. To remove
the bell jar 11 when the plating process has been completed, air
can be admitted by disconnecting the vacuum source and opening
conduit 20 to the atmosphere.
In the instant embodiment of the invention the circular plate 14
has a plurality of openings 22 spaced uniformly from the center of
the plate and the work pieces or substrates on which thin films are
to be deposited overlie these openings. During the operation one of
the pieces 23 is aligned with the sputtering device 13 and is
maintained in that position until the desired thickness of film is
deposited on the underside thereof. Then without interrupting the
operation of the sputtering device 13, the plate 14 is rotated to
bring the next successive work piece into alighment with the
sputtering device, and it remains in that position until the
desired film is deposited thereon. The operation is then continued
in this manner until all of the work pieces have been coated. If
desired, the plate 14 can be continuously rotated so that each
workpiece or substrate will receive some sputtered material during
each revolution. Operation of the sputtering device 13 is then
terminated and air is admitted into the bell jar 11 by the valve 19
which permits the bell jar to be raised for removal of the coated
workpieces 23 and placement of the next set of work pieces to be
coated. The glow discharge for operating the sputtering device 13
is obtained by applying substantially zero voltage through lead 24
to the housing or outer casing thereof and a high negative voltage
to leads 25 and 26 which connect with the cathodes as will be
described. A fourth lead 27 may be connected with the plate 14 to
apply an additional bias voltage to the plate and thus to the
workpieces when the latter are of a conductive material.
The sputtering device 13 is shown in detail in FIG. 2 and
corresponding elements of FIGS. 1 and 2 have been denoted by like
numerals. In the instant embodiment of the invention, the anode 28
is an essentially cylindrical tube and has an annular flange 29
which is secured to the underside of the base 10 by screws or other
fastening means 30. The anode 28 is aligned with an opening 31 in
the baseplate 10 and the flange 29 includes an annular seal 32 to
insure an airtight attachment of the anode to the baseplate.
A first cathode 33 preferably of a hollow cylindrical configuration
extends downwardly through the baseplate and into a portion of the
anode 28. The top edge of the cathode 33 includes an annular flange
34 having a recess 35 in the underside thereof for receiving a ring
36 of insulating material. The ring 36 may be cemented in the
recess 35 and to the top surface of the base plate 10 to maintain
the cathode in concentric relationship with the anode. With this
arrangement, the cathode 33 is insulated from the anode to permit
the application of a high negative voltage thereto by the lead 25.
While it is desirable to have the configuration of the cathode 33
conform with the internal configuration of the anode 28, the
spacing between the anode and the cathode should be as small as
possible in order to prevent a glow discharge from occuring
therebetween. Furthermore, the cathode 33 though illustrated as
being of tubular configuration may of course take other suitable
forms. It is generally desirable however that the cathode have a
substantially uniform cross-sectional configuration in order to
produce more uniform films, but such a configuration may be
modified depending on the particular film requirements. In any
event, ion scrubbing can be achieved which enables the attainment
of improved adherence of the film to the substrate and film
contamination is materially reduced.
The bottom of the anode 28 is closed by an annular member 37 which
is hermetically sealed in position on the anode by an annular weld
38 or other suitable sealing means. The member 37 carries a second
cylindrical cathode 39 which is centrally disposed within the anode
28. The supporting means for the cathode 39 consists of a metallic
sleeve 40 which extends through the member 37 and has an annular
flange 41 which engages the top side of the member 37 and is sealed
thereto by a gasket 42. The lower end of the metallic sleeve 40 has
threads 43 for engaging a nut 44 to firmly hold the sleeve 40 in
position within the opening 37' of the member 37. An insulating
sleeve 45 extends through a central opening in the metallic sleeve
40 and a rod 46 of conductive material extends through the sleeve
45. A spacer 47 of insulating material surrounds the upper portion
of the insulating sleeve 45 and the cathode 39 threadably engages
the upper end of the rod 46. The insulating sleeve 45 is
hermetically sealed to the rod 46 and to the metallic sleeve 40 and
the lower end of the rod 46 terminates in a contact 48 to which the
lead 26 is attached. An annular magnet 49 preferably of permanently
magnetized material surrounds the anode 28 and the upper end of the
magnet preferably extends beyond the lower edge of the upper
cathode 33.
With the invention as described above, the anode 28 is connected to
ground or substantially zero potential by the lead 24 while a
voltage of the order of 1,000 volts negative is applied to both the
leads 25 and 26. Under these conditions the glow discharge can be
produced with an internal pressure of the order of
2.times.10.sup..sup.-3 torr. The magnet 49 produces a magnetic
field in the direction of the arrow A at a point centrally of the
magnet and the cathode 33 is either formed of or carries one or
more materials to be sputtered. Under these conditions atoms will
be liberated from the cathode and move upwardly striking the
underside of the workpiece 23 and forming a film thereon. In actual
practice it has been found that when the cathode 33 is about 2
inches in diameter, it is preferable to maintain a distance between
the underside of the workpiece 23 and the lower edge of the cathode
33 of about 6 centimeters. If this distance is exceeded, it has
been found that the coating rate may be reduced and the film
deposited tends to be nonuniform. Furthermore, it is also
preferable that the lower edge of the cathode extends below the
plane of the upper edge of the permanent magnet 49 a distance of
approximately one-quarter of an inch for maximum sputtering
efficiency.
In the operation of the device in accordance with the invention,
the substrate or workpiece whether of a conductive or nonconductive
material attains almost immediately a bias voltage of about 50
volts negative when floating electrically. This self-biasing
feature is most advantageous since the surface of the workpiece is
automatically "scrubbed" by ions attracted by the surface, and this
increases the adherence of the film to the workpiece. Ion-scrubbing
effects removal of many contaminants such as water vapor and
hydrocarbons which not only interfere with adhesion but also
contaminate the film. In prior known devices self-biasing voltages
of the order of 6 to 8 volts are generally attained but such
voltages are below the threshold for ion- bombardment cleaning and
thus have no effect. Moreover, the use of probes for biasing is not
helpful since a conductive base film of at least 50 angstroms in
thickness is required for affixing the probe and there is no affect
on either the base film or its adhesion to the workpiece. If
desired, a bias can be applied to the workpiece 23 by means of lead
27 which of course would fix the bias to any desired value. It is
of course evident that the anode of the sputtering device is formed
of a nonmagnetic material so that the desired magnetic field will
be produced within the device.
The form of the invention described in connection with FIG. 2 is
particularly useful when a DC voltage is applied between the anode
and the cathodes and the reentrant cathode 33 extends below the top
surface of the magnet 49. In this way a high-intensity glow
discharge is obtained with a high degree of stability
notwithstanding the relatively low gas pressure within the device.
It is believed that the high-intensity glow discharge results from
the fact that the specific relationship of the magnetic field to
the cathodes deflects electrons from the paths which they would
normally follow in the absence of such a field with the result that
the lengths of such paths are increased. This action increases the
number of ionizing collisions between the electrons and the gas
molecules and such collisions are necessary in order to obtain a
high deposition rate of atoms from the cathode 33 onto the work
piece 23.
A modified embodiment of the invention is illustrated in FIG. 3 and
differs from the structure shown in FIG. 2 in that the cathode 39
is omitted. Since both forms of the invention are identical with
the exception of the cathode 39 corresponding elements are denoted
by like numerals. With the elimination of the cathode 39, the
bottom of the anode 28 is merely closed by a plate 28' hermetically
sealed thereto. This form of the invention operates in the same
manner as the form of the invention described in connection with
FIG. 2 and produces an automatic bias on the substrate being
plated.
With both forms of the invention described above, operation can be
effected with exceedingly low gas pressures as low as 2.times.
10.sup..sup.-3 torr., which results not only in purer films but
also in increased adherence of the film to the substrate or work
piece. Furthermore, since the workpiece need not be secured to the
cathode or anode, the sputtering apparatus is particularly
adaptable for use in continuous production processes as there are
well-known means for moving the substrates in position for plating
and removing finished workpieces without interruption of operation.
While the forms of the invention have been illustrated with the
axis of the anode in a vertical position, it is of course possible
to operate the sputtering device in any desired position.
While only certain embodiments of the invention have been
illustrated and described, it is apparent that alterations,
modifications and changes may be made without departing from the
true scope and spirit thereof as defined by the appended
claims.
* * * * *