U.S. patent number 3,605,009 [Application Number 05/035,007] was granted by the patent office on 1971-09-14 for stabilized power supply.
This patent grant is currently assigned to Deltaray Corporation. Invention is credited to Harald A. Enge.
United States Patent |
3,605,009 |
Enge |
September 14, 1971 |
STABILIZED POWER SUPPLY
Abstract
A high voltage power supply for providing highly stabilized
voltages of several hundred kilovolts or more which can be applied
between the filament assembly and the grounded anode of the gun for
an electron microscope, for example, and made as an integral unit
with the microscope structure. A plurality of stacked power deck
units are mounted within an insulative tube which may also enclose
the filament assembly and an accelerator tube if one is used. A
coupling capacitor for feeding the output voltage to a regulator
system is fashioned as an integral part of the overall structure
and arranged so as to couple solely to the output voltage terminal
in order to provide accurate corrections of rapid fluctuations of
the output voltage. Provision is also made for the regulation of
slower fluctuations, such as slow voltage drifts.
Inventors: |
Enge; Harald A. (Winchester,
MA) |
Assignee: |
Deltaray Corporation
(Winchester, MA)
|
Family
ID: |
21880055 |
Appl.
No.: |
05/035,007 |
Filed: |
May 6, 1970 |
Current U.S.
Class: |
323/293; 361/300;
315/230 |
Current CPC
Class: |
H05H
5/02 (20130101); H01J 37/248 (20130101); H01J
37/241 (20130101) |
Current International
Class: |
H01J
37/02 (20060101); H01J 37/24 (20060101); H01J
37/248 (20060101); H05H 5/00 (20060101); H05H
5/02 (20060101); G05f 001/46 (); G05f 003/08 () |
Field of
Search: |
;323/93,66 ;328/227
;315/230,307,311 ;317/246,249D,255 ;340/200 ;321/8,18 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Goldberg; Gerald
Claims
What is claimed is:
1. A voltage regulation system comprising, in combination,
power supply means for producing a DC output voltage;
insulator means within which said power supply means is
mounted;
terminal means supported so as to be connected to said DC output
voltage;
a capacitance means having a first plate formed by at least a
portion of said terminal means;
conducting electrode means mounted adjacent said first plate and
forming a second plate of said capacitance means, said first and
second plates being positioned so that said conducting electrode
means directly senses voltage changes at said terminal means;
circuit means mounted external to said power supply means; and
means for connecting said capacitance means to said external
circuit means, said capacitance means being adapted for use with
said circuit means to regulate the value of said DC output
voltage.
2. A voltage regulation system in accordance with claim 1 and
further including
a case substantially enclosing said insulator means, said terminal
means being supported with said case and said circuit means being
mounted external to said case.
3. A voltage regulation system in accordance with claim 1
wherein
said power supply means includes a plurality of stacked power decks
the outputs of which are serially connected to produce said DC
output voltage;
said insulator means comprises a tubular structure extending from a
region at one end of said stacked power decks to a region beyond
the other end thereof;
said first plate of said capacitance means comprises a first inner
conductive coating portion placed on the inner surface of said
insulator means; and
said second plate of said capacitance means comprises a first outer
conductive coating placed on a corresponding first portion of the
outer surface of said insulator means opposite said first inner
conductive coating portion.
4. A voltage regulation system in accordance with claim 3 and
further including
a second capacitance means comprising
a first plate formed from a second inner conductive coasting
portion placed on said inner surface of said insulator means;
and
a second plate formed by a second outer conductive coating placed
on a corresponding second portion of the outer surface of said
insulator means opposite said second inner conductive coating
portion; and
means for connecting said second capacitance means to said external
circuit means.
5. A voltage regulation system in accordance with claim 4 wherein
said external circuit comprises a feedback amplifier having its
input connected to said first capacitance means whereby
substantially rapid fluctuations of said DC output voltage are
supplied to the input of said feedback amplifier to produce an
output feedback signal representative of said rapid fluctuations
and out of phase therewith; and
means for connecting said output feedback signal to said second
capacitance means whereby said out of phase fluctuations are caused
to cancel said input fluctuations so as to substantially eliminate
said rapid fluctuations of said DC output voltage.
6. A voltage regulation system in accordance with claim 4 and
further including a first grounded conductive coating placed on a
third portion of the outer surface of said insulator means above
said first and second outer conductive coatings; and
a second grounded conductive coating placed on a fourth portion of
the outer surface of said insulator means below said first and
second outer conductive coatings.
7. A voltage regulation system in accordance with claim 1
wherein
said terminal means comprises a terminal plate mounted at the lower
end of said insulator means; and
said metallic means comprises a metal ring electrode insulatively
mounted to said case at a position adjacent said terminal plate.
Description
This invention relates generally to high voltage power supplies
and, more particularly, to structures for providing highly
stabilized DC voltages, particularly having values in the order of
several hundred thousand volts and even up to ranges of 1,000,000
volts or higher.
In many applications using such relatively high voltage power
supplies, fluctuations of the output voltage must be kept to
minimum levels. In supplying the high voltage for an electron gun
which is used, for example, in producing an electron beam for an
electron microscope, undue fluctuations of the supply voltage will
not permit proper operation of the overall device.
Further, high voltage power supplies used in such applications have
normally been fabricated as separate units requiring one or more
interconnecting cables or transmission lines between the supply
itself and the filament assembly of the electron gun system, Power
supplies of the conventional Van de Graaff type or of the
insulating core transformer type have not been found readily
adaptable to the fabrication of an integrally packaged system in
which the desired voltage stabilization is easily achieved.
Some SOme power supplies have been successfully used in integrally
formed packages to provide high voltages in the order of magnitudes
discussed above. Such supplies can be found, for example, in
electron processing operations in which certain materials are
bombarded by high-intensity electron beams. In such applications,
however, stabilization of the voltages involved is relatively
unimportant and little or no effort has been made to reduce the
high voltage output fluctuations which result.
This invention, however, provides a high voltage power supply which
can be integrally fabricated with the device to which the voltage
is to be applied so that separate interconnecting cables, or other
transmission line devices, are not required, the structure of such
power supply also being suitably arranged to provide a high degree
of stabilization of the output voltage. While the power supply of
the invention is described below as used in particular embodiments
for supplying high voltages to an electron gun of an electron
microscope system, it is clear that such power supplies may have
many other uses and can be readily adapted for other
applications.
In accordance with the invention, the rapid fluctuations of output
voltage which may occur in such power supplies are effectively
cancelled by using a capacitor sensing means appropriately arranged
in the power supply package which capacitor senses such
fluctuations and applies them to a suitable amplifier which may be
externally mounted and the output of which is then fed back either
in series with, or by capacitive coupling to the high voltage
terminal, in parallel with the power supply in such a way as to
cancel the original fluctuations. Accordingly, it is necessary that
the sensing capacitor maintain a stable capacitance value in the
face of mechanical vibrations of the system and environmental
temperature changes thereof. Such a rapid stabilization system,
sometimes hereinafter referred to as the "fast feedback" correction
system, formerly has not been possible in previously used
integrally packaged configurations because of the great difficulty
in providing a suitable capacitor sensing means which couples
solely to the high voltage output terminal without simultaneously
being subjected to undesirable coupling to other points in the
power supply which latter coupling produces spurious signals
tending to degrade the fluctuation cancellation process. The
configuration of this invention avoids such difficulties while
providing highly efficient rapid stabilization.
The power supply of the invention can also be provided with means
to eliminate relatively slow fluctuations, such as drifts of the
output voltage. Such means, sometimes hereinafter referred to as a
"slow feedback" correction system, is effectively separate from the
fast feedback correction system discussed above and can be used in
addition thereto to further enhance the overall stability of the
power supply.
The structure and operation of the invention for providing a
compact and highly stabilized power supply package which corrects
for both rapid and less rapid fluctuations of the voltage output is
described more easily with the assistance of the accompanying
drawings wherein:
FIG. 1 shows a longitudinal view in cross section of one particular
embodiment of the power supply of the invention;
FIG. 2 shows a diagrammatic plan view along lines 2--2 of FIG. 1
showing certain capacitor elements formed therein;
FIG. 3 shows a longitudinal view in cross section of an alternative
embodiment of the power supply of the invention;
FIG. 4 shows a circuit diagram showing means for providing
corrections of both rapid and slow output voltage fluctuations,
which circuit can be used with either of the embodiments of the
invention shown in FIGS. 1 or 3; and
FIG. 5 shows an alternative embodiment of the circuit diagram of
FIG. 4 which circuit also can be used with either of the
embodiments of the invention shown in FIGS. 1 or 3.
FIG. 1 depicts a power supply apparatus in accordance with the
invention which apparatus includes an upper portion 10 housing the
power supply and an electron gun assembly for producing a beam of
charged particles and a center portion 11 housing an acceleration
tube for accelerating such beam of charged particles. A lower
portion 12, only the top of which is shown in phantom, houses an
electron microscope device, the structure and operation of which is
known to those in the art and, therefore, is not described in
further detail. In upper portion 10, the power supply comprises a
plurality of stacked power deck units 15 each of which produces a
DC voltage, the voltages from all of such decks being added in
series to produce the overall output voltage at a terminal 16.
Although not limited thereto, one form in which such power deck
units can be constructed is shown in my previously filed
application, Ser. No. 850,051, filed Aug. 14, 1969, which
application depicts a plurality of power decks which are formed as
cascaded units containing secondary and primary coils using
magnetic or nonmagnetic cores which coils are capacitively coupled
under appropriate resonant conditions. Appropriate rectifier
circuitry is connected thereto to produce a rectified voltage from
each such unit, such rectified voltages being suitably added in
series to produce a high DC voltage output. An input primary coil
unit, such as coil unit 17 (shown in FIG. 1), is coupled to the
secondary coil 18 of the uppermost cascaded unit 15a and is in turn
fed from an appropriate external RF oscillator voltage source (not
shown in the figure) via cable 39 through an appropriate gastight
feed through insulator 39a in a cover member 24.
The structure and operation of such power deck units is more
completely described in my previous application, incorporated
herein by reference, and, thus, is not described in further detail
here. The use of the particular units described therein, while
preferred in some applications, is not necessary, however, to the
use of this invention. Any suitable power pack, subdivided as here
or not, which produces a high DC voltage output may be utilized in
the upper portion 10 in accordance with the invention and the type
described in my previously filed application is deemed to be
exemplary only.
In using such a power supply for providing a voltage of 300 kv.,
for example, each power deck can be suitably arranged to produce a
voltage of approximately 37.5 kv. and eight of such decks can be
utilized to produce the overall DC output voltage required.
The power decks, of whatever type may be used, are enclosed in an
appropriate insulator tube 19 which extends along the length of
such decks and further downward to the lower end of accelerator
tube 20. A tubular opening 21 is provided through power deck units
15 to provide access to an electron gun filament assembly, for
example, as explained in more detail below. Opening 21 is formed by
an insulator tube 22 which extends from an access opening 14 in
cover 24 of the apparatus to a lower opening 23 just below the
power deck assembly in upper portion 10. An additional cover member
24a may be used to cover opening 14 when in use. Insulator tubes 19
and 22 are made of suitable nonconducting materials which may be,
for example, acrylic or appropriate epoxy resin materials. An
elastic cushion 25, in which primary coil 17 is insulatively
enclosed, is positioned at the upper end of the power deck units
and provides the pressure to firmly hold the power deck units in
place at their upper end. A plurality of equipotential ring
elements 26 are mounted between each deck unit 15 and between the
first deck unit 15a and the elastic cushion 25, the latter
equipotential ring being at ground potential. The remaining
equipotential rings are at progressively higher potentials as is
conventional in high voltage power supplies of this general type.
The cover member 24 covers the top of the overall apparatus and is
appropriately attached to a metallic case 27 which encloses both
the power supply and accelerator tube portions of the apparatus,
case 27 being suitably attached at its lower end to a lower
metallic cover member 28.
The high voltage output terminal 16 is formed from a lower metal
plate 16a in contact with the output terminal of the lowest power
deck unit and from a band 16b of conductive coating material
positioned around the inner surface 29 of insulator tube 19, such
band extending longitudinally from a point just below power decks
15 in contact with terminal plate 16a to a point just above
accelerator tube 20. An electron gun assembly 30 is mounted between
accelerator tube 20 and power decks 15, below and in line with
tubular opening 23 and with opening 51 of accelerator tube 20. The
electron gun assembly includes a base member 31 mounted at the top
of accelerator tube 20 and a plate 32 on which a filament cup 33 is
mounted, filament cup 33 having an opening 34 through which
electrons from a filament element 35 are directed toward
accelerator tube 20. Filament 35 is connected via leads 36 and 37
extending from the top of filament cup 33 to a rectifier circuit 40
which can be appropriately mounted and is shown diagrammatically in
the figure.
The input leads of rectifier 40 are connected to the secondary coil
41 of a filament transformer 42 mounted at the wall of insulator
tube 19. Secondary coil 41 is wound on a ferrite core 43, such core
being suitably affixed to the inner wall of tube 19. The primary
coil 44 of filament transformer 42 is wound upon a ferrite core 45
suitably affixed to the external wall of insulator tube 19, ferrite
cores 43 and 45 being shielded by aluminum cases 46 and 47,
respectively, each of which is suitably affixed to tube 19. Primary
coil 44 is appropriately connected to a source of RF energy
oscillations (not shown in this figure) via leads 38. A fixed
resistor 48 connected across the output leads of rectifier 40 has
its midpoint connected to one end of a variable resistor 49, the
other end of which is connected to mounting plate 32 and, hence, to
filament cup 33. Filament cup 33 is connected to terminal 16 via an
appropriate lead 50 to connect mounting plate 32 to terminal
16.
The accelerator tube 20 is of conventional construction and is
suitably mounted directly below electron gun assembly 30 so that
the opening 51 therethrough is aligned with the opening 34 of such
assembly. During operation electrons emitted from filament 35 are
directed through the opening 34 of filament cup 33, which cup is
maintained at the output potential of the high voltage power
supply, and, thence, through accelerator tube 20 so that such
accelerated electron beams can then be appropriately utilized in
the electron microscope in a manner well known to those in the art.
In order to provide for correct operation in such an application,
it is necessary that the value of the high voltage at terminal 16
and, hence, at filament cup 33 be maintained constant with
substantially little or no rapid or slow variations thereof.
In order to prevent rapid fluctuations, it is desirable to use an
appropriate circuit of the type shown in FIG. 4, for example. In
such figure a sensing, or pickup, capacitor 65, identified as C-1,
is directly coupled to high voltage terminal 16 and thereby causes
rapid fluctuations of the voltage at such terminal to be coupled to
the input of an externally located amplifier 66. The output of
amplifier 66 is thereupon fed to a feedback, or driver, capacitor
67, identified as C-3, which is in turn coupled directly back to
high voltage terminal 16 so that such rapid variations, which are
phase inverted at amplifier 66, cancel the rapid fluctuations
originating from the high voltage supply at such terminal.
Capacitor elements 65 and 67 are appropriately formed in the
structure of FIG. 1 as follows. One plate of each capacitor
comprises an appropriate portion of the conductive coating band
which forms terminal portion 16b, Such band effectively extending
completely around the inner surface of insulator tube 19, except
for that portion of the tube at which the secondary assembly of
transformer 42 is mounted. The other plate of capacitor 65 is
formed by a first conductive coating segment 55 which extends
partially around the outer surface of insulator tube 19 opposite a
corresponding portion of inner conductive coating 16b, as shown
most clearly with reference to FIG. 2. The other plate of capacitor
67 is similarly formed by a second conductive coating segment 56
which also extends partially around the outer surface of insulator
tube 19 adjacent segment 55, except for that portion of the tube at
which the primary assembly of transformer 42 is mounted, and, thus,
opposite a corresponding portion of inner conductive coating 16b.
In each case the corresponding portions of tube 19 between such
coatings form the dielectric material between the plates of each of
capacitors 65 and 67.
A pair of relatively short conductive coating segments 57 and 58
(shown in FIG. 2) are spaced between adjacent ends of segments 55
and 56, segments 57 and 58 being each in turn connected to ground
potential in order to provide a pair of capacitances formed by
segments 55 and 56 and corresponding oppositely disposed segments
of interior coating 16b effectively to shield conductive exterior
coating segments 55 and 56 and hence capacitors 65 and 67, from
each other. The remaining portions of the outer surface of
insulator tube 19 extending longitudinally above and below
capacitors 65 and 67 are also covered with conductive coatings 59
and 60, respectively, each of which is appropriately connected to
ground potential as shown schematically in FIG. 1. It can further
be seen that in the particular embodiment shown in FIG. 1 insulator
tube 19 provides the only radial insulation for the power supply
deck units, a progressively increasing voltage potential difference
existing across the inner and outer surfaces of tube 19 in the
longitudinal direction from cover member 24 to terminal plate
16a.
The value of resistor 49 in the filament assembly can be
effectively varied by the use of a rod 61 extending through the
lower section 11 of the apparatus, one end of said rod being
thereby accessible externally to the apparatus and the other end
being mechanically linked in a manner well known to those in the
art with the movable wiper arm of resistor 49 in a well-known
manner.
A housing structure 62 is used to house the resistors used in the
regulator circuitry which corrects for "slow" fluctuations in the
voltage at terminal 16, as explained more fully below, which
circuitry is used in addition to the voltage regulation provided by
the fast feedback circuit of FIG. 4. Such voltage regulation
circuit is shown in FIG. 4 and, thus is also included in the
structure of the invention to correct for relatively slow
fluctuations of the output voltage. In such case a plurality of
series resistors identified diagrammatically in FIG. 4 as overall
resistor arrangement 68 is connected from high voltage terminal 16
to ground potential. A portion of the voltage across resistance 68
is monitored as, for example, across a resistor portion 69 of
resistance 68 between the high voltage terminal 16 and a selected
voltage point 70. In the embodiment shown the ratio of the
resistance across resistor portion 69 to the total resistance 68
from the high voltage terminal to ground is set at approximately 1
to 30,000.
The voltage across resistor portion 69 is fed to the input of an
externally located amplifier 71, via a suitable cable 77, which
amplifier is also fed from a DC reference voltage source 72 via the
variable center tap 73 of a variable resistance 74. Reference
voltage source 72 is a conventional source of low DC voltage in the
order of magnitude of 10 volts, for example.
The output of amplifier 71 thereby provides a correction signal
which is fed to a modulator 75 which is used to provide a
modulating voltage for RF oscillator source 76 used to drive the
primary deck coil 17 of the cascade power supply configuration. If
the high voltage output at terminal 16 varies in what may be termed
a long term fashion, such as by a slow drifting or other relatively
slow variation, an appropriate correction in the RF input signal
fed to the input of the power deck units is accordingly made so as
to compensate for such slow fluctuation.
The interior of case 27 is suitably filled with an appropriate
insulating gas, such as Freon or sulfur hexafluoride, and he
external amplifier, reference source, oscillator source, and
modulator, as well as their associated power supplies can be each
externally rack mounted for use with the apparatus.
An alternative embodiment of the invention may also be used for
providing a high voltage in applications which do not require the
use of an accelerator tube. Such voltage may be in the order of
magnitude, for example, of 100 kv. to 200 kv. and may be used for
the same purpose as discussed above, i.e., for supplying voltage to
an electron gun of an electron microscope. In such an alternate
configuration the radial insulation at the power units is arranged
so as to be provided, not by the insulator tube which encloses the
stacked power deck units, but rather by a vacuum system within
which such tube, deck units, and filament assembly are placed, as
discussed more fully below. Such a construction is shown in FIG. 3
wherein a plurality of power deck units 80 are enclosed within an
insulator tube 81 which is essentially cylindrical in shape. Tube
81 houses a first plurality of DC power deck elements 83 for
supplying the high voltage DC output and a second plurality of AC
power deck elements 84 for supplying AC filament power as discussed
in more detail below. The power deck coil elements, and other
resistor and capacitor elements needed to complete the power deck
circuitry can be encased in epoxy or other suitable plastic
material and such deck units, each including such power deck
elements, can be stacked one on the other as shown and discussed in
more detail in my previously mentioned application. The insulator
tube 81 also is used to house a resistor assembly which comprises
the resistance element required for correction of slow variations
in the output voltage, also as discussed in more detail below. Such
resistance element can be separately encased in epoxy in a manner
such as shown by housing structure 62 in FIG. 1, which structure
may be located in a cylindrical cavity formed by holes (not shown
in FIG. 3) suitably placed in deck units 80. The DC power deck
units 83 can be essentially of the same type discussed above with
reference to the configuration of FIG. 1 and their structure,
therefore, is not shown in any further detail herein. In a
preferred embodiment, for example, each deck unit can be arranged
to supply 40 kv., such units being connected in series to produce
an overall output voltage of 200 kv., for example. The AC filament
power unit is formed from appropriately coupled coil elements in a
known manner and are not shown in further detail.
A metallic cover 85 is attached to a first ring member 86 via a
plurality of screw elements 87 inserted through an outer flange
portion 88 of cover 85 into the main body of ring member 86. An
inner flange portion 89 of ring member 86 rests on the upper
surface of insulator tube 81 as shown. A flat split ring member 90
is attached to the bottom portion of ring member 86 via a plurality
of screw elements 91, ring member 90 being adapted to fit into a
matching slot, or notch, 92 at the exterior surface of the upper
portion of tube 81. An outer flange portion 93 of ring member 86
buttresses against the upper portion of a metallic case 94 which
encloses the power deck units 80, the insulator tube 81 and the
filament assembly described in more detail below. A metallic bottom
plate 95 is welded to the lower end of case 94, plate 95 having a
substantially centrally located opening 96 in which an anode
element 97 is mounted, as described in more detail below.
A lower terminal plate 98 which may be fabricated of aluminum, for
example, is attached to the lower end of insulator tube 81 via an
arrangement similar to that utilized with reference to the cover at
the upper end of such tube. Thus, a flat split ring member 99 is
attached to terminal plate 98 via a plurality of screw elements
100, said ring member being adapted to fit into a matching slot, or
notch, 101 at the interior surface of the lower portion of tube 81.
Appropriate O-rings 102, 103, 104, 105 and 106 are used as shown so
as to maintain a vacuum in the interior regions of case 94 and an
insulating gas in the interior region of tube 81, as discussed more
fully below.
The filament assembly for the structural embodiment shown in FIG. 3
comprises an aluminum filament cup 107 which is fixedly attached to
terminal plate 98 and has an appropriate opening 108 at the lower
end thereof in a manner substantially similar to that discussed
with reference to the filament cup assembly shown in the embodiment
of of FIG. 1. The remainder of the filament assembly is also
effectively the same as that previously shown and includes a
suitable filament element, a rectifier, a center-tapped resistor
and a variable resistor together with associated leads to furnish
power to the filament. The appropriate connections needed for that
purpose and for connection to he lowest AC power deck unit can be
made through a terminal board mounted below terminal plate 98 as
shown.
Anode element 97 is appropriately mounted below the filament
assembly by being suitably attached to the upper portion of the
electron microscope section. Anode element 97 has an appropriate
opening 110 through which the electron beam furnished from the
filament passes so that it is accelerated accordingly toward the
electron microscope mounted therebelow for use therein.
The structure of the apparatus of FIG. 3 is in contrast to that
discussed with reference to that shown in FIG. 1 in that no
accelerator tube is required. For the voltage operating levels
desired in this a particular embodiment (i.e., in order of
magnitude of 100 to 200 kilovolts), further acceleration of the
electron beam via an accelerator tube is not necessary and a single
anode element appropriately mounted with reference to the filament
assembly and operating at a suitably selected potential with
reference thereto provides sufficient acceleration capability for
the purpose desired in many applications. The correct voltage
relation may be obtained, for example, by adapting the DC power
deck stack to provide a negative voltage (i.e., -100 kv. to -200
kv.) and adapting the anode for connection to ground potential.
The capacitor sensing means required to couple the DC output
voltage from the power deck supply to an external circuit for
regulating rapid voltage fluctuations (i.e., the capacitance
effectively corresponding to capacitor means 65 of FIG. 1), must be
arranged so as to be effectively coupled solely to the output
voltage at terminal plate 98 so that coupling to other voltage
points is substantially negligible. In the embodiment of FIG. 3,
one plate of such capacitor is formed by the terminal plate 98,
itself, as attached at the lower end of insulator tube 81, and the
other plate thereof is formed by a pickup electrode ring 111
positioned in the region between terminal plate 98 and the lower
cover plate 95 of metallic outer case 94, such ring being mounted
on a plurality of appropriate insulator stand-offs 112 attached to
lower cover plate 95. Pickup electrode 111 has a centrally located
opening 113 appropriately arranged so that aluminum filament cup
107 extends downwardly therethrough, as shown. The interior of
metallic case 94 is appropriately evacuated so that the evacuated
region between terminal plate 98 and pickup electrode ring 111 acts
as an effective dielectric, thereby forming the overall capacitor.
Electrode ring 111 is then appropriately connected via lead 114 to
a conventional output coaxial terminal 115 which is in turn adapted
for connection to appropriate external circuit elements.
Since the interior region of case 94 is appropriately evacuated, a
suitable vacuum insulation is thereby formed for the complete power
supply unit. Thus, unlike the structure of FIG. 1, radial
insulation is achieved in the embodiment of FIG. 3 by such
evacuated space rather than by the use of the insulative
characteristics of tube 81.
Since the voltage at terminal 98 will tend to have both rapid and
relatively slow fluctuations, suitable corrections of the type
discussed above with reference to the embodiment of FIG. 1 are
required for the power supply of FIG. 3. A circuit for this purpose
is shown in FIG. 5 which includes a capacitor, again represented as
C-1, which capacitor in this case is formed by pickup electrode 111
and terminal 98. The rapid fluctuations of the output voltage at
terminal 98, as coupled by such capacitor, are fed to an external
amplifier 116. The phase-inverted output of amplifier 116 is fed
back directly to the positive terminal 120 of the rectifier. For
clarity, such terminal is not specifically shown in FIG. 3 but it
is made available in a manner similar to that shown with reference
to terminals 117 and connected to the positive terminal of the
uppermost deck 80 and makes contact with equipotential ring 121. In
such a configuration the need for a capacitor element C-3, which
was utilized, for example, in the regulator circuitry of FIG. 4 and
shown in FIG. 1, is eliminated and the output of the amplifier 116,
rather than being fed back to the high voltage output terminal to
cancel rapid fluctuations at that point, is instead connected in
series with the power supply to introduce the cancelling
fluctuations in this manner. Correction for slow fluctuations can
be made in the same manner as shown and discussed with reference to
FIG. 4.
In the configurations of FIG. 1 or of FIG. 3, it may be appropriate
to apply the feedback voltage in series with the power supply (as
in FIG. 5) or in parallel (as in FIG. 4) depending on the inherent
effective internal capacitance of the overall DC power deck stack
itself. Thus, in FIG. 4, such internal capacitance is
diagrammatically represented by the dashed line capacitor 118,
identified as C-2 and in FIG. 5 by dashed line capacitor 119, as
shown. If the internal capacitance C-2 is relatively large compared
to the capacitance value of C-1 (sometimes referred to as a "hard"
power supply), it is generally preferable to utilize he
configuration of FIG. 5 wherein the output of the feedback
amplifier is applied in series, rather than in parallel, with
capacitor C-3 being omitted. If, on the other hand, the internal
capacitance C-2 is relatively small compared to that of C-1
(sometimes referred to as a "soft" power supply), it is generally
preferable to utilize the configuration of FIG. 4 in which the
output of the amplifier is applied through capacitor C-3 to the
output terminal of the stacked DC power deck units.
* * * * *