U.S. patent number 3,603,042 [Application Number 04/669,177] was granted by the patent office on 1971-09-07 for polishing machine.
This patent grant is currently assigned to Speedfam Corporation. Invention is credited to Stephen A. Boettcher.
United States Patent |
3,603,042 |
Boettcher |
September 7, 1971 |
POLISHING MACHINE
Abstract
A polishing machine load plate unit to which workpieces are
affixed for polishing, and through which fluid is directed for
effecting cooling of the unit.
Inventors: |
Boettcher; Stephen A.
(Deerfield, IL) |
Assignee: |
Speedfam Corporation (Skokie,
IL)
|
Family
ID: |
24685381 |
Appl.
No.: |
04/669,177 |
Filed: |
September 20, 1967 |
Current U.S.
Class: |
451/288;
451/449 |
Current CPC
Class: |
B24B
37/102 (20130101); B24B 55/02 (20130101) |
Current International
Class: |
B24B
37/04 (20060101); B24B 55/00 (20060101); B24B
55/02 (20060101); B24b 005/00 (); B24b
055/02 () |
Field of
Search: |
;51/129,131,133,216,266 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Whitehead; Harold D.
Claims
I claim:
1. In a polishing machine having framework, a polishing wheel
assembly mounted on the framework on a vertical axis, means for
rotating the polishing wheel assembly, at least one vertical
spindle assembly supported from the framework above the polishing
wheel assembly, a generally horizontal circular load plate unit
having a continuous uninterrupted lower planar surface and adapted
to have workpieces affixed to the lower surface thereof for
engagement with the polishing wheel assembly, and means for
selectively establishing interengagement between the spindle
assembly and the load plate unit, the improvement which comprises
said load plate unit having an inlet spaced from said lower surface
for receiving fluid, said load plate unit having passageway means
entirely spaced from said lower surface in nonintersecting relation
thereto and communicating with said inlet and opening outwardly of
said unit to accommodate discharge of fluid from said inlet through
said unit for effecting cooling thereof, and said spindle assembly
having fluid transmission means for receiving fluid and
transmitting the same to said inlet.
2. The improvement of claim 1 wherein said load plate unit is
comprised of two plate sections secured together in spaced relation
to define said passageway means.
3. The improvement of claim 1 wherein said spindle assembly
includes a lower section that projects into said inlet, and said
fluid transmission means is defined by a central axial opening in
said spindle assembly which communicates with said inlet and a
radial opening in said spindle assembly which communicates with
said axial opening and is adapted to be connected to a source of
fluid under pressure.
4. The improvement of claim 3 wherein said load plate unit is
comprised of upper and lower plate sections secured together in
spaced relation to define said passageway means, said inlet is
defined by a central axial opening in said upper plate section, and
said lower section of said spindle assembly is received in said
axial opening in said upper plate section.
5. The improvement of claim 4 wherein the fluid under pressure is a
gas, and said upper and lower plate sections are spaced apart a
predetermined distance to permit expansion of the gas as the latter
is discharged through said passageway means.
6. The improvement of claim 1 wherein said interengagement means is
comprised of swivel connection means, said spindle assembly
includes a spindle and a tube secured axially therein and defining
in part said fluid transmission means, said tube is arranged with
the lower end thereof communicating with said inlet, and said
spindle is formed with an annular clearance surrounding a portion
of said tube to permit the latter to flex during swivel movement of
said load plate unit.
7. For use in a polishing machine, a circular load plate unit
having a continuous uninterrupted planar surface at one side
thereof to which workpieces may be affixed, having an inlet which
opens axially at the other side of said unit for receiving fluid,
and having passageway means entirely spaced from said planar
surface in nonintersecting relation thereto and communicating with
said inlet and opening outwardly of said unit to accommodate
discharge of fluid from said inlet through said unit for effecting
cooling thereof.
8. A load plate unit as set forth in claim 7 which is comprised of
two plate sections secured together in spaced relation to define
said passageway means.
9. A load plate unit as set forth in claim 8 which is adapted for
use with a gas under pressure, and wherein said plate sections are
spaced apart a predetermined distance to permit expansion of the
gas as the latter is discharged through said passageway means.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to a polishing machine
comprised of a rotatable polishing wheel assembly, and means for
urging work pieces to be polished into engagement with the upper
surface of the polishing wheel assembly.
2. Description of the Prior Art
One type of polishing machine, as disclosed in the copending
application of Stephen A. Boettcher, Ser. No. 659,780, filed Aug.
10, 1967, comprises a horizontal rotatable backing wheel, a
polishing cloth extending across the upper surface of the backing
wheel, a load plate unit adapted to have work pieces affixed to the
lower surface thereof and to be positioned over the backing wheel
with the workpieces engaging the polishing cloth, and means,
including a vertical spindle assembly, for centering and applying
pressure to the load plate unit In this machine, the load plate
unit is a unitary plate, and heat generated therein during the
polishing operation is dissipated solely into the ambient air.
SUMMARY OF THE INVENTION
In accordance with the present invention, the load plate unit is
provided with an inlet for receiving fluid, and with passageway
means communicating with the inlet and opening outwardly of the
unit to accommodate discharge of fluid from the inlet through the
unit for effecting cooling thereof. Additionally, the spindle
assembly is provided with fluid transmission means for receiving
fluid and transmitting the same to the inlet. In this manner, the
load plate unit is refrigerated to compensate for heat developed
therein during the polishing operation.
DESCRIPTION OF THE DRAWINGS
FIG. 1 is an elevational view, with portions being broken away and
shown in section, of a polishing machine incorporating the
principles of the present invention;
FIG. 2 is a horizontal view, taken substantially along the line
2--2 in FIG. 1, looking in the direction indicated by the arrows;
and
FIG. 3 is a vertical median sectional view, on an enlarged scale,
of the load plate unit and spindle assembly of the present
invention, and of other machine components associated
therewith.
DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring now to FIG. 1, there is indicated generally by the
reference numeral 10 a polishing machine incorporating the
principles of the present invention. The polishing machine 10
comprises framework including a substantially cylindrical housing
12 supported by a base ring 14. Suitably secured to the opposite
sides of the housing 12 are the lower ends of vertical columns 16.
Extending between the upper ends of the columns 16 is a horizontal
bridge member 18 provided with opposed pairs of lateral arms 20.
Mounted at the outer end of each of the four arms 20 is a vertical
pneumatic piston and cylinder assembly 22 which includes a cylinder
24, a stabilizer sleeve 25 and a piston rod 26.
A cylindrical collar 28 is mounted at the upper end of the housing
12 by means of an annular inclined wall 30. Also mounted in the
housing 12 is a main drive motor 32 operatively connected to a
conventional speed reducer unit 34 supported in the collar 28. The
output shaft of the speed reducer 34, in a known manner, is
connected to, and serves to effect rotation of, a generally
horizontal polishing wheel assembly 36 shown in FIGS. 2 and 3.
The polishing wheel assembly 36 is comprised of an annular backing
wheel 38 and a polishing cloth 40 extending across the upper face
thereof. The backing wheel 38 is preferably formed of a metal, such
as brass, having a high heat conductivity. The polishing cloth 40,
which may for example be either sail cloth or a synthetic nonwoven
cloth, is retained in position by means of a ring or hoop member 42
suitably clamped about the outer periphery of the backing wheel 38.
In place of cloth, a felt material may be either clamped to the
backing wheel 38 or glued thereon.
A freely flowing polishing slurry is adapted to be fed to the
polishing wheel assembly 36 by a tube or spout 44 extending
downwardly from the bridge member 18 as shown in FIG. 1. The slurry
is delivered to the spout 44 through tubing 46 connected to a sump
pump unit 48 located in the lower portion of the housing 12. The
polishing slurry flowing from the polishing wheel assembly 36 is
collected by the inclined wall 30, which serves as a drip pan, and
is directed to a drain. The polishing slurry may, by way of
example, comprise a polishing compound--such as one having an
abrasive base of iron oxide, cerium oxide or zirconium
oxide--suspended or mixed in water.
Secured in the lower end of each of the piston rods 26 is a
vertical spindle assembly 50. Each spindle assembly 50, as shown in
FIG. 3, comprises a spindle 52 and a central axial tube 54 secured
therein, with an annular clearance 55 surrounding a substantial
portion of the tube. The spindle 52 is formed with an opening 56
which is aligned with the interior opening 58 of the tube 54 and
therewith defines a central axial opening in the spindle assembly
50. The spindle 52 is also formed with a radial opening 60 which
communicates with the spindle opening 56 and with the annular
groove 62 of a revolvable collar member 64. An aperture 66, which
is formed in the collar member 64 and communicates with the annular
groove 62, is adapted to be connected to a source of fluid under
pressure. The spindle openings 56 and 60 and the tube opening 58
define fluid transmission means for a purpose to be presently
described.
Connected to the lower end of each of the spindles 52, as shown in
FIG. 3, is a generally horizontal circular pressure disc 68 having
engagement means in the form of an annular ridge 70 at the lower
surface thereof. Provided between the spindle 52 and the pressure
disc 68 is a floating connection in the form of a universal ball
bearing assembly 72 which is maintained in position by a retaining
plate 74 secured to the pressure disc 68. Suitably secured to the
spindle 52 immediately above the retaining plate 74 is a collar 76
which serves to shield the bearing assembly 72 from polishing
mixture and other foreign material.
Associated with each pressure disc 68 is a generally horizontal
circular load plate unit 78 which, as shown in FIG. 3, is comprised
of upper and lower plate sections 80 and 82. The plate sections 80
and 82 are secured together by means of a plurality of bolts 84,
and are maintained in spaced apart relating by means of washers 86
interposed between the plates about the bolts 84. The space
maintained between the plate sections 80 and 82 serves to define
radial passageway means for a purpose to be described hereinafter.
In addition, the lower plate section 82 is formed with a central
pocket 88, and the upper plate section 80 is formed with a central
axial inlet opening 90 in which is mounted an O-ring 91. The pocket
88 and the opening 90 together define a cavity for receiving fluid
under pressure. The upper surface of the upper plate section 80 is
provided with engagement means in the form of an annular recess 92
which is adapted to receive the annular ridge 70 of the pressure
disc 68, while the lower surface of the lower plate section 82 is
adapted to have affixed thereto workpieces 94. Finally, the
polishing wheel assembly 36 is surrounded by an annular thin-walled
shroud 96 in a manner and for a purpose described in the aforesaid
copending application of Stephen A. Boettcher.
In preparation for polishing, the pneumatic assemblies 22 are
suitable actuated to retract the piston rods 26 and the spindle
assemblies 50 upwardly. At a location remote from the machine 10,
workpieces 94 to be polished are affixed, for example by paraffin,
in a known manner to the lower surface of the load plate units 78.
The load plate units 78 and work pieces 94 affixed thereto are then
moved onto the polishing wheel assembly 36 and positioned beneath
the respective pressure discs 68, The pneumatic assemblies 22 are
actuated to distend the piston rods 26 and the spindle assemblies
50 downwardly until the ridges 70 of the pressure discs 68 are
engaged under the desired pressure in the recesses 92 of the load
plate units 78. At the same time, the lower tube section of each
spindle assembly is received in the axial inlet opening 90 in the
associated upper plate section 80, with the O-ring 91 serving as a
rotary pressure seal.
Next, the polishing wheel assembly 36 is rotated and polishing
material is delivered from the spout 44 to the surface thereof.
Also, fluid--preferably a gas such as air--is admitted under
pressure into the annular groove 62 of the collar member 64, and is
transmitted by the spindle openings 60 and 56 and the tube opening
58 to the inlet 90 in the load plate unit 78. From the inlet, the
gas is discharged radially between the plate sections 80 and 82. As
the gas is thus discharged, a gradual pressure drop, and an
expansion, of the gas occur, with a corresponding reduction in
temperature, which effects cooling of the load plate unit 78 to
offset the heat developed therein during the polishing operation.
The cooling effect can result from convection as well as pressure
drop. However, to obtain maximum cooling effect, the system should
be designed such that a pressure drop occurs within the load plate
unit 78 or as close thereto as possible. The spindles 52 and
pressure discs 68 serve to center the work plate units 78, and the
universal connections between the spindles 52 and pressure discs 68
accommodate floating of the load plate units 78, as work pieces are
being polished. Also, the annular clearance 55 surrounding each
tube 54 permits the latter to flex during swivel movement of the
associated pressure disc and load plate unit.
Because of the occurrence of moisture in the described cooling
system, the tube 54 and the upper and lower plate sections 80 and
82 are preferably fabricated of stainless steel. Also, to avoid
clogging in the gap between the plate sections 80 and 82, a filter
or other entrapment means (not shown) may be mounted in the central
cavity of the load plate unit 78. Additionally, since the lower
plate section 82 alone requires cooling, it is preferable that the
upper plate section 80 be insulated in any conventional manner (not
shown). Further, to obtain temperature modulation, the compressed
gas is preferably introduced to the cooling system through a
manually variable pressure regulator (not shown). Finally, the
diameter of each load plate unit 78 may be substantially the same
as, less than, or greater than, the radial width of the annular
surface of the backing wheel 38.
Upon completion of the polishing operation, drive of the polishing
wheel assembly 36, and delivery of polishing material thereto, are
interrupted; the introduction of fluid under pressure into the
collar 64 is interrupted; the spindle assemblies 50 are retracted
and the pressure discs 68 withdrawn from engagement with the load
plate units 78; and the load plate units 78 and work pieces affixed
thereto are removed from the polishing wheel assembly 36.
While there has been shown and described a preferred embodiment of
the present invention, it will be understood by those skilled in
the art that various rearrangements and modifications may be made
therein without departing from the spirit and scope of the
invention. Also, it will be appreciated that in the drawings
certain elements--for example, the cloth 40 and the workpieces
94--, have been exaggerated from the true scale for sake of clarity
of illustration.
* * * * *