U.S. patent number 3,600,798 [Application Number 04/801,971] was granted by the patent office on 1971-08-24 for process for fabricating a panel array of electromechanical light valves.
This patent grant is currently assigned to Texas Instruments Incorporated. Invention is credited to Ray H. Lee.
United States Patent |
3,600,798 |
Lee |
August 24, 1971 |
PROCESS FOR FABRICATING A PANEL ARRAY OF ELECTROMECHANICAL LIGHT
VALVES
Abstract
Electromechanical light valves in a panel array are fabricated
by a process including several metal patterning steps. Each light
valve consists of a housing having grounded conducting walls for
shielding the interior thereof from external electrostatic forces
produced by surrounding valves in the array or from other external
electrostatic forces. These walls are formed in a series of
processing steps on a light transparent substrate coated with a
conductive coating. Light from a source enters one end of the
housing through a light transparent substrate to which is mounted
an electrostatically controlled leaf shutter for each valve also
formed in a series of processing steps. Upon completion of the
processing for forming the individual leaf shutters on the one
transparent substrate and the valve housings on the other
transparent substrate, the two transparent panels are aligned to
form an array of electromechanical light valves. The display state
of the individual light valves may be modulated by a video signal
in a system that makes use of the capacitance of the individual
valve as a storage device for transforming the video signal, which
is available only during a writing time of short duration to a
display signal. Necessary components for each of the light valves
required in a display duration modulation system are fabricated in
the process for producing the light valve array.
Inventors: |
Lee; Ray H. (N/A, TX) |
Assignee: |
Incorporated; Texas Instruments
(TX)
|
Family
ID: |
25182486 |
Appl.
No.: |
04/801,971 |
Filed: |
February 25, 1969 |
Current U.S.
Class: |
29/592.1;
348/771; 348/740 |
Current CPC
Class: |
G09F
9/372 (20130101); Y10T 29/49002 (20150115) |
Current International
Class: |
G09F
9/37 (20060101); H01S 004/00 () |
Field of
Search: |
;29/592 ;178/7.3 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Campbell; John F.
Assistant Examiner: Heist; D. M.
Claims
I claim:
1. A process for the fabrication of an array of light valves
comprising:
forming an array of shutter supports of a conductive opaque
material on one side of a first transparent substrate,
covering the first substrate with a separating material in areas
defining the configuration of the light valve array,
depositing a shutter plate for each light valve in the array with
one edge thereof supported by a shutter support over the separated
material,
forming an array of valve walls of a conductive opaque material on
a conductive coating covering a second transparent substrate,
removing the separating material from the first substrate to form
an array of cantelevered shutter plates, and
aligning the supports on the first substrate with the valve walls
on the second substrate and joining the two substrates to form an
array of light valves.
2. A process for fabricating an array of light valves as set forth
in claim 1, wherein the step of depositing the shutter plates
includes evaporating a metal over a supporting material covering
the first substrate, and plating the evaporated metal to the
desired thickness.
3. A process for fabricating an array of light valves as set forth
in claim 2, wherein the step of forming the array of valve walls
includes selectively etching a metal film laminated to the
conductive coating covering the second transparent substrate.
4. A process for fabricating a column and row array of light valves
comprising:
producing an array of support bars in columns of a conductive
opaque material on the rough side of an optically ground glass
substrate,
covering the glass substrate with a separating material in areas
defining the row and column configuration of the light valve
array,
depositing a metallic shutter plate for each light valve in the
array with one edge thereof supported by a support bar over the
separating material,
forming an array of valve walls in a row configuration of a
conductive opaque material on a conductive coating covering a
second glass substrate,
removing the separating material from the first glass substrate to
form a cantilever shutter plate, and
aligning the supports on the first glass substrate with the valve
walls on the second substrate and joining the two substrates to
form an array of light valves in a row and column.
5. A process for fabricating a column and row array of light valves
as set forth in claim 4, including the step of forming isolation
elements for isolating one valve from others in the array on each
support bar intermediate the step of producing the support bars and
covering the glass substrate with a separating material.
6. A process for fabricating a column and row array of light valves
as set forth in claim 5, including the step of depositing a
resistor between the supported edge of the shutter plate and the
valve walls intermediate the steps of forming the array of valve
walls and removing the separating material.
7. A process for fabricating a column and row array of light valves
as set forth in claim 6, including the step of producing color
filters of the three basic colors in a pattern over the entire
light valve array after the step of forming the array of valve
walls.
8. A process for fabricating a column and row array of light valves
as set forth in claim 7 wherein the step of producing the array of
support bars includes evaporating a metal over the rough side of
the optically ground glass substrate, and selectively etching the
metal to form an array of columns.
9. A process for fabricating a column and row array of light valves
as set forth in claim 8 wherein the step of depositing the shutter
plates includes evaporating a metal over the separating material,
and plating the evaporated metal to the desired thickness.
10. A process for fabricating a column and row array of light
valves as set forth in claim 9, wherein the step of forming the
array of valve walls includes selectively etching a metal film
laminated to the conductive coating covering the second glass
substrate.
11. A process for fabricating a column and row array of light
valves comprising:
evaporating a metal to the rough side of an optically ground glass
substrate,
selectively etching the evaporated metal to form conductive column
bars on said glass substrate,
forming an isolation element for isolating one light valve from the
others in the array on each conductive column bar,
evaporating a separating material in the space next to the formed
isolated element on each column in the area to be covered by a
shutter plate,
evaporating shutter plates extending over the isolating elements
and the separating material,
plating the shutter plates to a desired thickness to form a
metallic shutter plate for each light valve in the array with one
edge thereof supported by a column bar,
forming resistors on the shutter plates in the area of the
supported edge,
differentially etching the separating material from the first glass
substrate to form a cantilever light valve shutter,
patterning a metal film laminated over a conductive coating
covering a second glass substrate in a configuration to outline
sidewalls for each light valve in the array,
selectively etching the metal film laminate from the second glass
substrate to form an array of valve walls,
differentially etching the laminated film and the conductive
coating to the glass substrate in a pattern of parallel lines
perpendicular to the column bars to separate the light valves into
rows, and
aligning the column pattern and shutter plates on the first
substrate with the valve walls on the second substrate and joining
the two substrates to form an array of light valves in a row and
column configuration.
12. A process for fabricating a column and row array of light
valves as set forth in claim 11 including:
coating the conductive coating of the second substrate with a
negative resist colorized with one of the three primary display
colors,
exposing and developing the negative resist to obtain one of the
desired color filters, and
repeating the above two steps for the other two primary colors to
obtain colored filters of the three primary colors in a pattern
over the light valve array.
Description
This invention relates to a light valve display panel, and more
particularly to a process for fabricating a panel array of
electromechanical light valves.
During the early development of television in the latter part of
the last century, a picture was generated on the retina of the eye
of an observer by the rapid movement and intensity fluctuation of a
narrow light beam. Because of persistence of vision of the human
eye, a picture was in fact generated although of a very low
quality. A method in vogue in panel displays, such as television,
during the first part of the present century built up a picture by
controlling the transmission of a high-intensity light source by
means of light valves. Two patents which issued about this time on
light valves are U.S. Pat. No. 1,848,888 and U.S. Pat. No.
1,964,062.
Basically, such displays require two matching integral parts:
addressing and a light valve. Addressing must be able to perform XY
scanning as well as intensity modulation for a particular light
element located at any XY location at the proper writing time. The
light element, located in any XY position, must be able to respond
to the writing and to effect a display.
As a result of inferior picture quality due to an inadequate
addressing scheme and an operable light element, earlier efforts
for producing a picture by means of light valves were abandoned in
favor of its electron counterparts, the cathode ray tube. However,
it is now realized that the cathode ray tube displays have their
limitations especially when producing color pictures. Screen sizes
larger than 25 inch diagonal measurement produce a picture that
lacks brightness as well as being difficult to handle (too bulky)
and smaller than a 21 inch diagonal measurement suffers in
resolution on account of tolerance requirements.
In order to fully utilize the NTSC (National Television System
Committee) color information, a display of an array of light valves
should have 700 color triads per horizontal line and 525 interlaced
horizontal lines per frame. Heretofore, it has been difficult to
fabricate a display consisting of such a large number of light
valves. An object of this invention is to provide a process for
fabricating a large array of light valves for a display panel.
Another object of this invention is to provide a process for
fabricating a large array of light valves simultaneously. A further
object of this invention is to provide a process for simultaneously
fabricating a large array of light valves and addressing circuitry
for display duration modulation. Yet another object of this
invention is to provide a process for producing color triads in a
display of a large array of light valves. Still another object of
this invention is to provide a process for producing an array of
light valves by joining an upper section and a lower section.
In accordance with the present invention, a process for fabricating
an array of light valves includes producing an array of shutter
supports of a conductive opaque material on one side of a
transparent substrate. Next, a shutter plate for each light valve
in the array is deposited over the transparent substrate which has
previously been covered with a separating material. The individual
shutter plates have one edge thereof supported by a shutter support
in a cantilever configuration. Next, an array of housing walls of
an opaque conductive material are formed on a conductive coating
covering a second transparent substrate. After the processing of
both substrates has been completed, they are aligned and joined
together to form a display panel of an array of light valves.
In accordance with a more specific embodiment of this invention,
the individual shutter plates are deposited by evaporating a metal
over the separating material and plating the evaporated metal to
the desired thickness. For display duration modulation, an
isolating element, such as a diode, is formed on the shutter
supports prior to evaporation of the metal shutter plates. After
the shutter plates have been developed to the desired thickness, a
resistor is deposited on each at the supported edge that functions
as a holding circuit with the capacitance of the shutter plate.
A more complete understanding of the invention and its advantages
will be apparent from the specification and claims and from the
accompanying drawings illustrative of the invention.
Referring to the drawings:
FIG. 1 is a perspective view of a light panel, partially cut away,
of a large array of parallel light valves;
FIG. 2 is an equivalent circuit of one light valve in the array of
FIG. 1;
FIG. 3 is a schematic of an addressing scheme for a matrix of light
valves arranged in rows and columns;
FIG. 4 is a cross section of one light valve in the array of FIG.
1; and
FIGS. 5-13, and FIGS. 5a-13a illustrate the various processing
steps for producing a display panel of an array of parallel-shutter
light valves.
Basically, the system illustrated in FIG. 1 consists of a light
panel 10 and an address scanner 12. The address scanner 12 performs
XY scanning of the panel 10 as well as intensity modulation (Z axis
control) for each light valve of the panel array. A video receiver
14, coupled to an antenna 16, provides a video signal for the
operation of the address scanner 12 in the usual manner of present
day video-receiving systems. To generate the visual display for an
observer on the panel 10, a light source (not shown) is located on
one side thereof. By selectively opening and closing each light
valve in the panel 10 in accordance with a video signal received by
the antenna 16, an observer sees a picture display. Light valves
that are used to make up the panel 10 may be parallel-shutter
valves of the type described in the copending application of Ray H.
Lee, Ser. No. 713,503, filed Mar. 15, 1968, and assigned to the
assignee of the present invention.
In a typical television system in accordance with present day NTSC
regulations, the panel 10 includes 525 scanning lines, a bandwidth
chosen for equal area resolution with an aspect ratio of 4:3, and
there would be two interlaced fields in one frame having a frame
rate of 30 frames per second. Accordingly, in order to fully
utilize the NTSC information, the panel 10 has
525.times.(4/3.times.525)=367,500 light units (one light valve per
unit for a monochrome display, two light valves per unit for a
bicolor display, and three light valves per unit for a tricolor
display). In terms of light units, the video information received
at the antenna 16 comes in at a rate of 0.0906 microseconds per
unit (roughly 0.1 microsecond). Thus, for sequential addressing
each valve in the panel 10 must be able to be addressed within a
writing time of 0.1 microsecond and updated once per frame time.
Each frame time has a duration of 1/30 second.
Referring specifically to the light valve 18, with the
understanding that the other valves in the panel 10 are similar, a
shutter plate 20 of an electrically conductive and opaque material
is spaced from a conductive coating 22 of an electrically
conductive and light transmissive material. The shutter plate 20 is
connected to one output of the address scanner 12 by a line 24, and
the conductive coating 22 is connected to ground. The shutter plate
20 is supported on one edge by a column bar 26 extending along one
dimension of the panel 10. Between the shutter plate 20 and the
column bar 26 there is formed an isolating element 28 (which may be
either a diode or a nonlinear impedance element) that has a
threshold change of impedance, being high at low voltages and low
at high voltages. The isolation element 28 provides a means for
unintentionally effecting other valves in the array when being
addressed from the scanner 12. The shutter plate 20, the column bar
26 and the isolating element 28 are formed on a substrate 30 of an
electrically insulating and light transmissive material.
Each of the light valves of the panel 10 shares a common wall with
adjoining valves. These sidewalls 32 are of an opaque material
either electrically conductive or covered with a conductive
coating. The walls 32 are formed over the conductive coating 22 on
a substrate 34 of an optically transparent and electrically
insulating material. Between the top of the sidewalls 32 and the
shutter plate 20, there is formed a resistor 36 as part of a
holding circuit, as will be explained.
Operationally, the light valve 18 uses the well known electroscope
principle with the shutter plate 20 as one plate of a capacitor and
the conductive coating 22 forming the second capacitor plate. A
charge will be uniformly distributed, neglecting edge effects, over
the facing surfaces resulting in a uniformly distributed load on
the shutter and setting it in motion against the inertia and
elastic properties of the shutter material. The voltage connected
to the valve to deflect the shutter plate 20 is identified as the
"pull-in" voltage, V.sub.p. To return the shutter plate 30 to the
discharged condition, as shown, the voltage to the valve must be
reduced to the release voltage, V.sub.r.
A video modulated voltage from the address scanner 12 charges the
shutter plate 20 and the conductive surface 22 thereby generating
the force on the shutter. This force causes the shutter 20 to be
deflected to any "half-tone" position including in contact with the
conductive coating 22. Halftone positioning is the ability to
control the shading of the image display. A charge placed on the
shutter 20 and the conductive surface 22 will remain until the next
frame time when the scanner 12 again addresses the light valve
18.
Because the shutter plate 20 cannot be made close fitting with the
housing walls 32, a mask 38 extends along one dimension of the
substrate 30 for each of the valves. This mask prevents light from
being transmitted around the edge of the shutter plate 20 when in a
noncharged condition.
Although the basic valve shown in FIG. 1, without the isolating
element 28 and the resistor 36, has a measure of storage
capability, to produce a halftone display with a plurality of such
valves requires additional storage capability. This additional
storage capability is provided for by means of an addressing scheme
and the address scanner 12. The addressing scheme includes a
writing circuit and a holding circuit which control the display
duration of each valve in an array. Referring to FIG. 2, there is
shown schematically an equivalent circuit for the light valve 18
including the isolating element 28, illustrated as a diode, and the
resistor 36. A capacitor 38 is used to illustrate the shutter plate
20 and the conductive coating 22. This capacitor stores a drive
signal from the address scanner 12 during a writing time to
maintain the light valve 18 in one of two light states. To hold the
shutter plate 20 in a deflected position for the remainder of one
frame time, that is, until the valve 18 is again addressed, the
resistor 36 and the capacitor 38 form a holding circuit. This
circuit has a time constant long in comparison to one frame time.
For a complete description of the operation of the addressing
system for a light panel, reference is made to the copending U.S.
application of Ray H. Hee, Ser. No. 742,365, filed July 3, 1968,
and assigned to the assignee of the present invention.
Referring to FIG. 3, there is shown an addressing scheme for a
matrix of light valves arranged in rows b.sub.1, b.sub.2...b.sub.m
and columns a.sub.1, a.sub.2...a.sub.n to be subsequently coupled
to a video signal source 40 through a writing resistor 42 by means
of single pole single throw switches. Each valve branch includes a
light valve 44 having a capacitor 46, an isolating element 48, and
a resistor 50. Assume the switch in column a.sub.1 and the switch
in row b.sub.1 are coupled to one side or the other of the source.
The diode 48, however, in all the light valves 44, except the one
coupled to both terminals of the source 40, will be reversed biased
thereby isolating these valves.
In operation, during the writing time for each valve the switches
in the appropriate row and column are closed, thereby charging the
capacitor 46 to the value of the video signal from the source 40.
At the completion of the writing time for a particular valve, the
column switch for that valve will be opened and the next column
switch closed. At the completion of one row, both the column and
row switch will be opened and the next row switch closed. The first
column switch is then closed and all the valves in the second row
are subsequently connected to the video signal source 40. Between
subsequent couplings of a particular valve to the video signal
source 40, that valve is considered to be in a holding state and
the display condition will be determined by the magnitude of the
video signal connected thereto during the writing time, and the
component values for the resistor 50 and capacitor 46.
Referring to FIG. 4, there is shown a cross section of a light
valve fabricated in accordance with the process of the present
invention. The valve is fabricated by joining an upper section 52
to a lower section 54, each of which are processed independently.
The substrate 56 for the upper section of the light valve is glass
with the outside surface optically ground.
The processing steps for the upper section 52 are sequentially
illustrated in FIGS. 5--10a. Initially, a metal is vacuum
evaporated as a thick film on the rough side of the substrate 56.
Vacuum evaporation techniques have been developed over the years
and are considered to be sufficiently well understood such that a
detailed description will not be necessary. Basically, the
substrate to be coated is mounted in a highly evacuated glass (or
metal) bell jar in which a filament is brought to a high
temperature by passing an electric current through it. The material
to be evaporated, which may be in contact with the filament, is
heated sufficiently to cause quick vaporization. The evaporated
molecules from the source strike the substrate and adhere thereto.
This process continues until the desired film thickness has been
attained.
By photomasking and etching techniques, the film of metal on the
substrate 56 is patterned into column bars 58 as illustrated in
FIGS. 5 and 5a. These column bars provide a support for one edge of
the shutter plate as to be described. If the isolating element 28
is a nonlinear impedance it may be constructed by a layer of
appropriate polycrystalline powder in a binder. Using either a silk
screening or a photoprocessing technique, the mixture of
polycrystalline powder and the binder are deposited on top of the
column bars 58. The results of this step are illustrated in FIGS. 6
and 6a wherein the powder and binder material forms areas 60 over
the column bars 58 as mounted to the substrate 56.
After forming the isolating elements, a second vacuum evaporation
step covers the area between the column bars 58 with a material
that may be differentially etched for removal in a later step. This
second metal evaporation is patterned, such as by photomasking and
etching techniques, to form islands 62 precisely in the area to be
covered by the shutter plates. These islands are shown in FIGS. 7
and 7a. The thickness of the islands 62 will be such that the upper
surface thereof is flush with the upper surface of the isolating
element areas 60. Next, a thick film of metal is vacuum evaporated
over the islands 62 and the isolating element areas 60. Although
thick film techniques are used in the processes herein described,
additional thickness than can be obtained by such techniques is
required for the shutter plates. Thus, after evaporating the
initial layer for the shutter plates 64, additional metal is added
by controlled plating to the desired thickness.
There are a number of plating techniques that may be employed to
develop the initial evaporative film to the desired thickness. Gas
plating (including hydrogen reduction and thermal decomposition),
electroplating and electroless plating are three methods of adding
additional metal for building up the shutter plates 64.
After the shutter plates 64 have been plated to a desired
thickness, as illustrated in FIGS. 8 and 8a, the islands 62 are
selectively etched and a mask 66 formed in the area between the
column bars 58 and the cantilever end of the shutter plates. The
mask 66 may be formed by depositing an insulating material to the
rough surface of the plate 56 as illustrated in FIG. 9. Next,
resistor areas 68 are formed over the mask 66 and the supported
section of the shutter plate 64, as illustrated in FIG. 10. These
resistor areas may be formed by silk screening or by
photoprocessing. The silk-screening process used is an adaptation
of that used for years by printers and artists. Resistive elements
known as cermets (a combination of the words ceramic and metal) may
be deposited by the silk screen method. Photoprocessing techniques
for forming the resistors 68 are also well known in the art.
Next, the islands 62 are completely removed from under the shutter
plates 64 by an etching operation. The upper half of the light
panel is now complete with a row and column array of shutter plates
formed on the substrate 56 together with isolation elements and
resistors for each light valve.
For the lower section 54 of the panel, the substrate 70 is a
lamination of metal (a few mils thick), a conductive and
transparent coating, and glass. The steps for processing the lower
section 54 are illustrated in FIGS. 7--13a. Initially, the metal
side of the laminated substrate 70 is coated with a negative
resist. A pattern outlining the side walls 72 of the individual
light valves is placed over the negative resist. Using contact
printing techniques, the negative resist is exposed and developed
through the pattern. The metal layer in the areas other than the
walls 72 is removed by a chemical etch. This etching proceeds to
the conductive coating 73, but does not remove this coating. After
the etch has been completed, the negative resist is removed from
the upper side of the walls 72.
Another coating of negative resist is applied to the metal side of
the substrate 70. This resist layer is exposed and developed by
contact printing using a photomaster of opaque parallel lines
designed to separate the light valves into rows. Another etching
step removes the metal and the conductive coating in the parallel
line areas down to the glass. This step produces channels 74, as
illustrated in FIGS. 12 and 12a, for separating the light valves in
one row from those in adjoining rows.
At this point, the upper section 52 and the lower section 54, as
processed through the step illustrated in FIG. 12, could be joined
to form a monochromatic display. To form triads for a color
display, additional processing is required. A negative resist
colorized by mixing with a dye or pigment is applied to the
sections 76a, 76b and 76c. This colorized negative resist is
exposed through the glass side and developed to produce one of the
desired color filters of the three primary colors, red, blue, or
green. This same process is repeated for each of the other two
primary colors. Next, sections 78a, 79b and 78c are coated with a
colorized negative resist that is exposed through the glass side
and developed. Finally, the sections 80a, 80b and 80c are coated
with a colorized negative resist. This resist is again exposed
through the glass side and developed to form the third color filter
for a tricolor display.
The final step in the fabrication of the light panel 10 of an array
of light valves is the alignment of the lower section 54 with the
upper section 52 as illustrated in FIG. 4. When properly aligned,
the sidewalls 72 are positioned to permit deflection of the shutter
plate 64 toward the conductive coating 73 over the substrate 70.
Each light valve in the array is electrically isolated from others
in the array by means of the isolating elements defined by the area
60 and the channel 74. Light striking the panel 10 from the
substrate 56 side will be blocked when the shutter plates 64 are
parallel to the conductive coating of the substrate 70. Upon a
charge being placed on any one of the shutter plates, that
particular plate will be deflected toward the substrate 70, thereby
permitting light to be transmitted through that area as enclosed by
the sidewalls 72. Other shutter plates which have not been
deflected, however, will continue to block light from passing
through the panel. After the upper section 52 and the lower section
54 have been properly aligned, they are held in place by
application of an environmental seal to assure an air-drag free
operation. The light element panel is now complete.
While the invention was described with reference to preferred
embodiments, together with modifications thereof, it will be
evident that various further modifications are possible without
departing from the scope of the invention.
* * * * *