U.S. patent number 3,599,031 [Application Number 05/039,463] was granted by the patent office on 1971-08-10 for bonded heater, cathode, control electrode structure.
This patent grant is currently assigned to General Electric Company. Invention is credited to James E. Beggs.
United States Patent |
3,599,031 |
Beggs |
August 10, 1971 |
BONDED HEATER, CATHODE, CONTROL ELECTRODE STRUCTURE
Abstract
A unitary heater, cathode, and control electrode structure for
an electron discharge device is formed by coating a disk of a
porous refractory metal with an inorganic insulating layer,
overcoating the insulating layer with a film of refractory metal,
forming a grid pattern in the film on one side of the disk, forming
openings in the film and insulating layer corresponding to the
pattern, and impregnating the disk with thermionic emissive
material.
Inventors: |
Beggs; James E. (Schenectady,
NY) |
Assignee: |
General Electric Company
(N/A)
|
Family
ID: |
21905595 |
Appl.
No.: |
05/039,463 |
Filed: |
May 21, 1970 |
Current U.S.
Class: |
313/268;
313/346R; 313/270 |
Current CPC
Class: |
H01J
21/36 (20130101); H01J 1/28 (20130101) |
Current International
Class: |
H01J
1/28 (20060101); H01J 21/00 (20060101); H01J
21/36 (20060101); H01J 1/20 (20060101); H01j
001/90 (); H01j 019/44 () |
Field of
Search: |
;313/268,270,346 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Schonberg; David
Assistant Examiner: Sacher; Paul A.
Claims
What I claim as new and desire to secure by Letters Patent of the
United States is:
1. A unitary heater, cathode, and control grid structure for an
electron discharge device which comprises a circular disk of porous
refractory metal having two spaced parallel outer surfaces and a
peripheral edge, an inorganic insulating layer covering the
surfaces of said disk, and a film of refractory metal overlying
substantially all of said insulating layer, the film on one surface
having a gridlike configuration, the film on the other surface
having a configuration of a heating coil, said disk containing
thermionic emissive material, and the insulating layer on said one
surface having openings extending into the porous disk
corresponding to the openings in the gridlike configuration of said
film, whereby when the film on the other surface is heated,
electrons are directed through said openings in the insulating
layer and the film on said one surface.
2. The structure of claim 1 in which the disk of refractory metal
comprises tungsten and the inorganic insulating layer comprises a
material selected from the group consisting of boron nitride and
alumina.
3. The structure of claim 1 in which the refractory metal comprises
tungsten and the inorganic insulating layer comprises boron
nitride.
4. The structure of claim 1 in which the film of overcoating
refractory metal comprises a material selected from the group
consisting of tungsten, tungsten carbide, molybdenum, molybdenum
carbide, and zirconium.
5. The structure of claim 2 in which the film of overcoating
refractory metal comprises tungsten.
Description
This invention relates to electrodes for electron discharge
devices, and particularly, to a method of manufacturing a unitary
heater, cathode, and control grid structure for an electron
discharge device which can be mounted in a tube envelope for
completion of the construction of the device. The invention herein
described was made in the course of or under a contract or
subcontract thereunder with the Department of the Army.
The three-electrode electron discharge device, or triode, basically
consists of a heater, a cathode, a control grid, and an anode
operating in a vacuum environment. Of these electrodes, the anode
is a relatively rugged structure while the cathode and its
associated heater and control electrode are the chief components
determining the degree of performance of the device. The life of
the device is determined by successful operation of these
components. Because the control grid is usually closely spaced to
the cathode, and must be maintained in a fixed position relative to
the cathode during operation of the device, a major portion of the
cost of constructing the device consists in manufacturing and
assembling the heater, cathode, and control grid in the evacuated
envelope. If these elements can be preassembled into a rugged and
reliable structure, construction of the electron tube, or electron
discharge device, can be simplified, manufacturing costs reduced,
and operation made more dependable.
It is a principal object of my invention to provide a new and
improved unitary heater, cathode, and control grid structure for an
electron discharge device.
It is another object of my invention to provide a thermionic
cathode with a finely detailed grid bonded to one side and an
efficient heater bonded to the other side.
Another object of my invention is to provide new and improved
methods of forming a unitary heater, cathode, control grid
structure for an electron discharge device.
In accordance with the present invention, a unitary heater,
cathode, control grid structure for an electron discharge device is
formed by coating a disk of a porous refractory metal with an
inorganic insulating layer, coating the insulating layer with a
film of refractory metal and forming a grid pattern in the film on
one side of the disk. Thereafter, openings are formed in the film
and the insulating layer corresponding to the grid pattern and the
disk is impregnated with thermionic emissive material. When a
heater is attached to the other side of the disk, a rugged unitary
structure is available which can easily be assembled in a tube
envelope in opposition to the anode structure to form a completed
electron discharge device.
While the specification concludes with claims particularly pointing
out and distinctly claiming that which is regarded as the present
invention, the details of the preferred process and embodiment of
the invention may be more readily ascertained from the following
detailed description when read in conjunction with the accompanying
drawings in which:
FIG. 1 illustrates schematically the assembly stages of a unitary
control electrode, cathode structure;
FIG. 2 illustrates the successive assembly stages of a unitary
heater, cathode, control electrode structure;
FIG. 3 illustrates the successive assembly stages of a modification
of the unitary heater, cathode, control electrode structure of FIG.
2; and
FIG. 4 is a vertical cross section of an electron discharge device
employing the unitary heater, cathode, control electrode structure
of FIG. 2.
In the group of sketches which form FIG. 1 and show from left to
right the successive stages used to manufacture a bonded control
electrode, cathode structure, a porous refractory metal disk 1 is
provided with two outer parallel surfaces 2, 3 and a groove 4 which
extends around the periphery of the disk. Porous disk 1 is coated
on its upper surface with an inorganic insulating layer 5 upon
which is deposited a thin film 6 of a refractory metal. Porous disk
1 may be formed of any suitable refractory metal such as tungsten
or molybdenum. The material of the inorganic insulating layer 5
preferably is a material having a low dielectric constant and a
high dielectric strength such as boron nitride or alumina and may
be deposited on the upper surface of the disk from a chemical
vapor. The film 6 of a refractory metal which overcoats the
insulating layer 5 may be deposited on the layer 5 by sputtering or
chemical vapor deposition and may comprise either tungsten or a
tungsten alloy such as tungsten carbide, molybdenum or molybdenum
carbide, or zirconium.
After the composite structure comprising disk 1 with layers 5 and 6
has been formed, an etched grid is placed in contact with the upper
surface of layer 6 and a blast of abrasive particles such as
aluminum oxide powder is employed to erode openings 7 in the layers
5 and 6. Preferably, openings 7 are sufficiently deep that a
portion of the porous disk 1, such as portions 8, are removed to
form a concave surface that can aid in focusing electron current
through the openings 7 in the control grid.
To obtain thermionic emission from the cathode, it is necessary to
fill the pores of the porous disk 1 with a suitable mixture of
oxides. For this purpose, a mixture of barium, calcium, and
aluminum oxides is coated on the surface 3, the composite structure
is inverted, and inductively heated to a temperature of
approximately 1,650.degree. C. whence the oxides form a liquid and
penetrate the pores of the disk 1. After this assembly operation
has been completed, a metal clad heater 9 is brazed to the bottom
surface 3 of the assembly.
In the form of the invention illustrated in FIG. 2, the porous
refractory metal disk 1 is provided with a concave rim 10 which
corresponds to the groove 4 of the disk of FIG. 1 and which is
used, as is explained later, for positioning and supporting the
assembly. Two or more lateral holes 11 are formed in the rim of the
disk and extend from one edge almost to the opposite edge. Plugs 12
are used to close the openings of these holes. The entire disk is
then coated with a thin layer (0.0001 inch to 0.001 inch thick) of
an insulating layer 5 of an inorganic material having a low
dielectric constant. Thereafter, the top and bottom surfaces of the
insulating layer are covered with an overcoating film of refractory
metal having a thickness of the order of 0.5 to 10 microns. Layer 6
of this film of refractory material on the upper surface of the
composite structure as seen in FIG. 2 extends over the edges to
provide a portion 13 to function as a contact region for the
control electrode to be formed in the upper layer. Thereafter, both
upper layer 6 of the film of refractory metal and the lower layer
14 are coated with a photoresist. A control electrode or grid
pattern is developed on layer 6 and a heater pattern on layer 14.
The exposed metal is then removed by etching to form a grid in
upper layer 6 and a heater in lower layer 14.
In constructing the unitary heater, cathode, control grid assembly,
I prefer to form porous disk 1 of tungsten, insulating layer 5 of
boron nitride, and films 6 of tungsten although the other materials
of the previously mentioned groups of material may be used. After a
grid has been formed in layer 6 by the photoetching process, the
grid pattern is carburized to provide a surface capable of
operating hot with a low level of grid emission. After the
carburizing step, a mask (not shown) is placed over the heater side
of the disk. This mask is provided with an annular opening 15.
Thereafter, the two surfaces are subjected to a blast of aluminum
particles to erode the boron nitride layer 5 from the openings in
the grid pattern and also opening 15 in the heater mask.
After the eroding step, plugs 12 are removed from openings 11 and
the assembly is fired in a vacuum at a high temperature of the
order of 1,200.degree. C.--1,800.degree. C. to thoroughly free it
from gases. A mixture of cathode oxides is then inserted in holes
11 and the assembly is heated to a temperature where the oxides
form a liquid that impregnates the pores of the tungsten disk.
Contact to the cathode is made through opening 15 in the insulating
film 5.
In the modification of my unitary heater, cathode, control grid
assembly illustrated in FIG. 3, a plurality of conductive tubes 20
are inserted in disk 1 prior to the step of coating the disk with
inorganic insulating layer 5. In all other respects, the assembly
of FIG. 3 is formed as explained in connection with the description
of FIG. 2. After the step of eroding the areas in films 6 and 5 to
form openings 7, a mixture of cathode oxides such as barium,
calcium and aluminum oxides is introduced into the porous disk 1
through tubes 20. Tubes 20 likewise form terminals for the cathode
obviating the need for opening 15.
FIG. 4 illustrates my unitary heater, cathode, and control grid
structure as embodied in an electron discharge device of a type
described and claimed in my concurrently filed application Ser. No.
39,284 (RD-3478) and assigned to the assignee of this present
invention. This device 30 comprises three concentric cylinders 31,
32, and 33. Cylinders 31 and 32 are formed of a suitable metal,
such as titanium, while cylinder 33 is formed of an insulating
material such as a spinel. The cylinders are supported on an
insulating base 34 of a suitable material such as forsterite,
cylinders 31 and 32 having at their lower ends outwardly extending
flanges which are insulated from each other by a layer 35 of
forsterite. Cylinder 33 provides a support for an anode structure
36 while cylinder 32 provides a support for a unitary heater,
cathode, control grid structure 37 of my invention. A garter spring
38, comprising a resilient conductive helix, snaps into the concave
rim of structure 37 and rests upon a shoulder 39 at the upper end
of cylinder 32. In this manner, garter spring 38 contacts both the
grid contact region 13 of assembly 37 and shoulder 39 so that the
outwardly extending flange of cylinder 32 forms an externally
accessible contact for the control grid. Contact to cathode disk 1
is made by means of a plurality of conductors 40 which extend from
cylinder 31 and are inclined to cathode disk to make a resilient
contact with the disk. Contact to heater 14 is made through a pair
of leads 41, 42 which pass through openings provided in base
34.
One of the advantages of my invention is that it permits
preassembling the unitary heater, cathode, grid structure as a
rugged and reliable structure and facilitates positioning of that
composite structure in an electron discharge device. By etching
film 6, very fine and exact control grid details can be formed.
Furthermore, by carburizing the control grid, it is maintained at a
low level of grid emission. The continuous film of insulation
beneath the entire heater permits it to be operated at a large
potential difference with respect to the cathode. By providing a
layer 5 which is not only an insulating layer but also a good
thermal conductor, heat is transferred directly from the control
grid to the cathode so that the grid runs at the same temperature
as the cathode.
While I have shown and described several embodiments of my
invention, it will be apparent to those skilled in the art that
many changes and modifications may be made without departing from
my invention in its broader aspects and I, therefore, intend the
appended claims to cover all such changes and modifications as fall
within the true spirit and scope of my invention.
* * * * *