U.S. patent number 3,598,082 [Application Number 04/850,015] was granted by the patent office on 1971-08-10 for continuous epitaxial deposition system.
This patent grant is currently assigned to Texas Instruments Incorporated. Invention is credited to Warren Rice.
United States Patent |
3,598,082 |
Rice |
August 10, 1971 |
CONTINUOUS EPITAXIAL DEPOSITION SYSTEM
Abstract
An epitaxial deposition system includes slice transporting boats
which index individual slices between work stations. At the work
stations, the temperature of the slices is controlled and the boats
are sequentially filled with various gases, including an etching
gas and a deposition gas. The work stations are surrounded by a
sealed enclosure which receives gases discharged from the
boats.
Inventors: |
Rice; Warren (Tempe, AZ) |
Assignee: |
Texas Instruments Incorporated
(Dallas, TX)
|
Family
ID: |
25307056 |
Appl.
No.: |
04/850,015 |
Filed: |
August 14, 1969 |
Current U.S.
Class: |
118/719; 118/725;
118/729 |
Current CPC
Class: |
C23C
16/54 (20130101) |
Current International
Class: |
C23C
16/54 (20060101); C23c 011/00 () |
Field of
Search: |
;118/48--49.5
;117/106--107.2 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Kaplan; Morris
Claims
I claim:
1. A deposition system comprising:
a. means for discharging a plurality of selected gases into a
plurality of work stations;
b. a plurality of boats and means for sequentially moving said
boats into said work stations, each boat having at least first and
second compartments, such that said selected gases sequentially
flow through said first and second compartments; and
c. means for maintaining said boats and work stations at
predetermined temperatures.
2. A deposition system in accordance with claim 1 in which each of
said boats has a substantially flat bottom portion, a curved top
portion joining said bottom portion along two edges, one
substantially flat end portion joining said bottom and curved top
portion thereby closing one end of said boat and a partition having
an opening therein joining said bottom and top portions thereby
dividing said boat into two compartments.
3. A deposition system in accordance with claim 1 which includes at
least one work station having tubes through which a coolant may be
circulated to reduce the temperature by said work station and a
boat positioned therein.
4. A deposition system in accordance with claim 1 which includes at
least one work station having heaters which may be used to increase
the temperature of said work station and a boat positioned
therein.
5. A deposition system in accordance with claim 1 in which each of
said boats includes a susceptor on which a semiconductor slice may
be placed and heated by induction heating.
6. A deposition system in accordance with claim 1 wherein said
boats move in trainlike fashion into and through said work
stations, such that the closed end of each of said boats is
positioned adjacent to the open end by a following boat thereby
closing said open end by said following boat.
Description
In the electronic component manufacturing industry, certain
products are produced by processes in which epitaxial layers are
deposited on substrate slices. Heretofore, most epitaxial
deposition processes have been designed to form layers on a large
number of slices at the same time. This practice is known as batch
processing.
Batch processing has several inherent disadvantages. First, in
order to reduce the cost of each layer, batch processing is usually
carried out in relatively large chambers. Deposition chambers must
be purged and heated before the start of each deposition process.
When large chambers are employed, the purging and heating procedure
requires a relatively long time.
Second, it is very difficult to heat all portions of a large
chamber uniformly. Also, it is difficult to supply deposition gas
to a large number of slices on a uniform basis. Irregularities in
slice heating and exposure to deposition gas result in differences
between the epitaxial layers that are formed on various slices.
This invention relates to an epitaxial deposition system that
operates on a continuous basis. The system operates on each slice
in exactly the same way. Use of the system results in the
fabrication of extremely uniform epitaxial layers.
In the preferred embodiment of the invention, epitaxial layers are
formed on substrate slices by discharging a plurality of gases, at
least one of which is a deposition gas, and by sequentially moving
each slice into engagement with each gas. Preferably, the slices
are positioned in boats and are engaged with the gases by
sequentially filling the boats with each of the gases.
A more complete understanding of the invention may be had by
referring to the following detailed description when taken in
conjunction with the drawing, wherein:
FIG. 1 is a side view of a deposition system employing the
invention in which certain parts have been broken away and certain
parts have been shown schematically more clearly to illustrate
certain features of the invention, and
FIG. 2 is an illustration of a slice transporting boat useful in
the practice of the invention.
Referring now to the drawing and particularly to FIG. 1 thereof,
there is shown a deposition system 10 employing the invention. The
system 10 includes a plurality of work stations A, B, C, D, and E
and a plurality of boats 12 which are employed to transport
substrate slices between the work stations. As the slices are
transported between the work stations, the system 10 operates to
form epitaxial layers on the substrates. The system 10 operates on
a continuous basis in that an epitaxial layer is formed on each
substrate slice automatically as the slice is transported between
the work stations by one of the boats 12.
Referring now to FIG. 2, the structural details of the boats 12 are
shown. Each boat 12 is formed from quartz and includes a flat floor
14 and an upper portion 16 which may be of any convenient shape.
One end of the upper portion 16 is closed. The other end is open to
permit slices to be positioned within and removed from the boat. An
induction susceptor 18 comprised of a silicon carbide coated
graphite cylinder is positioned on the floor 14. In use, a slice is
positioned on the susceptor 18 of each boat 12 for transportation
through the system 10.
The boats 12 each include a gas inlet hole 20. The hole 20 is
formed in the floor 14 and extends to a mixing chamber which is
separated from the remainder of the boat 12 by a wall 22. The wall
22 has a slot 24 formed through it which directs gas from the
mixing chamber over the susceptor 18. A gas outlet hole 26 is
formed through the upper portion 16 of each boat 12.
Referring now to FIG. 1, the boats 12 are moved between the
stations A, B, C, D, and E in trainlike fashion. The boats 12 are
positioned in direct contact with each other in the train so that
the closed end of one boat 12 operates to seal the open end of the
next adjacent boat. The train of boats is preferably moved through
the system 10 by an indexing mechanism (not shown) which advances
the train one boat length each time it is actuated. By this means,
each boat 12 is sequentially indexed into engagement with each work
station of the system 10.
The deposition system 10 includes an enclosure 28 which extends
over all of the work stations of the system. The enclosure 28 is
formed from quartz and includes a flat floor 30 over which the
boats 12 travel as they are indexed between the work stations. The
enclosure 28 also includes an upper member 32 comprising an
enlarged central portion 34 having a vent 36 formed in it and
reduced end portions 38.
The end portions 38 of the enclosure 28 have interior dimensions
substantially identical to the exterior dimensions of the upper
portions 16 of the boats 12. Nitrogen (N.sub.2) is continually
forced out of the ends of the enclosure 28 between the end portions
38 and the boats. The flow of nitrogen between the end portions 38
and the boats 12 seals the interior of the enclosure 28 against the
entry of air.
Work station A includes a plurality of passageways 40 and a
delivery tube 42. A coolant such as water is continually circulated
through the passageways 40 to maintain station A at a relatively
low temperature. The delivery tube 42 extends through the floor 30
of the enclosure 28 and is connected to a source of nitrogen
(N.sub.2).
As each boat 12 is indexed to station A, the gas inlet hole 20
formed in the floor 14 of the boat is brought into alignment with
the upper end of the delivery tube 42. Nitrogen flows into the boat
12 from the delivery tube 42 to purge the interior of the boat of
air. Air from the boat, and subsequently nitrogen from the tube 42
flows out of the gas outlet hole 26 formed in the upper portion 16
of the boat 12 into the central portion 34 of the enclosure 28.
From the enclosure 28 the air and nitrogen flow out of the system
10 through the vent 36. While the boat 12 is at work station A it
is maintained at a reduced temperature by the flow of coolant
through the passageways 40.
Work station B includes a heating device 44 and a delivery tube 46.
The heating device 44 comprises a pancake type induction heating
coil that is connected to a suitable source of induction heating
power. The delivery tube 46 extends through the floor 30 of the
enclosure 28 and is connected to a source of hydrogen (H.sub.2) and
to a source of hydrogen chloride (HCl).
As each boat is indexed to work station B, the heating device 44
immediately begins to increase the temperature of the interior of
the boat. As the temperature of the boat is raised, hydrogen is fed
into the interior of the boat 12 through the delivery tube 46 to
further purge the boat of air. Subsequently, either pure hydrogen
chloride, hydrogen, or a mixture of the two is fed into the
interior of the boat 12. The slot 24 formed in the wall 22 of the
boat 12 directs the hydrogen chloride over the upper surface of a
slice positioned on the induction susceptor 18. The hydrogen
chloride etches the surface of the slice to render the surface
absolutely clean.
Work station C is the epitaxial deposition station of the system
10. Station C includes a heating device 48 comprised of a pancake
type induction heating coil and a suitable source of induction
heating power. Station C also includes a delivery tube 50 which
extends through the floor 30 of the enclosure 28 and which is
connected to a source of deposition gas.
Before a boat 12 is indexed to Station C, the temperature of the
slice positioned on the susceptor 18 of the boat is raised to a
temperature suitable for epitaxial deposition by the heating device
44 of the Station B. At station C, the slice is maintained at the
deposition temperature by the heating device 48. The delivery tube
50 directs a deposition gas into the interior of the boat 12
through the gas inlet hole 20. In the boat 12, the slot 24 directs
the deposition gas over the slice positioned on the susceptor 18.
As the gas engages the heated slice, an epitaxial layer is formed
on the slice.
The nature of the deposition gas that is supplied to the boats 12
through the tube 50 depends upon the nature of the epitaxial layer
to be formed. Ordinarily, the deposition gas will be comprised of a
mixture of various gases. For example, if a silicon epitaxial layer
is to be formed, the deposition gas may include silicon
tetrachloride (SiCl.sub.4), hydrogen (H.sub.2), and an appropriate
donor gas such as dibrane, arsine, phosphine, etc. depending upon
the type of doping desired.
When the deposition of an epitaxial layer on the slice contained in
a boat 12 has been completed, the boat is indexed to work station
D. Station D includes a plurality of coolant passageways 52 and a
delivery tube 54. The tube 54 extends through the floor 30 of the
enclosure 28 and is connected to a source of hydrogen
(H.sub.2).
At work station D, each boat 12 is cooled by the flow of a coolant
such as water through the passageways 52. Simultaneously, hydrogen
is fed into the interior of the boat through the tube 54 and the
hole 20. The hydrogen forces the deposition gas out of the boat 12
and thereby stops the deposition process.
Work station E includes a delivery tube 56 which is connected to a
source of nitrogen (N.sub.2). At work station E, nitrogen is
introduced into the interior of the boat 12 through the tube 56.
The nitrogen purges the boat 12 of the hydrogen that was introduced
into the boat at the station D. The nitrogen also further reduces
the temperature of the interior of the boat.
It should be understood that while the boats 12 are positioned at
each of the work stations A, B, C, D, and E, the delivery tubes at
the work station cause the various gases employed in the system 10
to flow through the boats 12 on a continuous basis. That is, while
a boat is at each work station, a gas continuously flows through
the inlet hole 20, through the slot 24, and through the outlet hole
26 of the boat. The gases flowing from the outlet holes 26 of the
boats 12 merge together in the enlarged central portion 34 of the
enclosure 28 and flow through the vent 36 of the enclosure 28
combined state. Thus, the boats 12 not only transport slices
between the various work stations of the system 10, but also
prevent unintentional contact between the slices and the various
gases employed in the system.
It should be understood that the deposition system illustrated in
the drawing is a basic system and that many modifications to the
system are possible. For example, in many systems, additional
stations identical to the work station B will be provided to assure
proper slice preheating before the beginning of epitaxial
deposition. In such a case, hydrogen chloride will ordinarily only
be supplied to the boats at the last type B work station.
Similarly, in many systems more than one type C work station will
be provided. In such systems, a portion of the epitaxial deposition
process is carried on at each such work station.
Finally, in many systems it will be desirable to provide additional
work stations similar to the station C at which different
deposition gases are directed over the heated slices. In such
systems multiple epitaxial layers of different types are formed on
each slice as it passes through the system.
Of course, the structural details of the work stations comprising
the system 10 are illustrated by way of example only and may be
freely substituted. For example, heat pipes can be employed in the
work stations B and C instead of induction heating coils. In such a
case, either induction type or resistance type heating elements can
be utilized in heating the heat pipes. Similarly, the work stations
A and B can be cooled by heat pipes connected between the work
stations and suitable heat sink.
Like the structural details of the work stations, the structural
details of the boat 12 of the system 10 can be varied to provide
specific performance characteristics in the system. For example, it
has been found that many deposition gases do not react properly
with slice surfaces when the surfaces are positioned exactly
horizontally. Accordingly, in many systems it is desirable to
position the work stations along an upwardly-extending plane so
that the boats 12 travel angularly upwardly through the system 10.
In such a case, the boats 12 may advantageously be equipped with
suitable baffles and outlet holes to guide the various gases
employed in system 10 with respect to the slices contained in the
boats.
In some systems, induction susceptors will not provide adequate
heat transfer to the slices. In such a case, heat pipes can be
substituted for the susceptors in the boats. When heat pipes are
employed they can often be formed integrally with the boat
structure.
In many systems, radiation losses through the upper portions of the
boats will be considerable. To this end, it will often be desirable
to provide a radiation shield in each boat. This can be
accomplished by forming the upper portion of each boat from two
layers of quartz and positioning a layer of metal between the
quartz layers. When such a layer of metal is enclosed in an inert
gas atmosphere, it assumes a high and stable temperature and
thereby minimizes radiation losses from the slice contained in the
boat.
The epitaxial deposition system illustrated in the drawing differs
from prior systems principally in that it is a continuous process.
Thus, each work station of the system operates on a steady state
basis. And, the boats are indexed at the end of equal time
intervals to transport slices between the stations.
The continuous nature of the system results in distinct advantages
over prior systems. For example, because the heating devices of the
system are operated continuously and because the boats locate each
slice on exactly the same position with respect to the heating
devices, the system provides extremely uniform slice heating. That
is, every slice is heated at the same rate and to the same
temperature as every other slice.
The continuous nature of the system also results in more uniform
gas flow than has been possible heretofore. The various gases
employed in the system are continuously supplied to their
respective delivery tubes at the same temperature and pressure.
Insofar as possible, the boats of the system are constructed
exactly alike. Therefore, the gas supplied at each work station of
the system flows through each boat in exactly the same manner.
The advantages of the continuous nature of the system may be
summarized simply; every slice is treated alike. That is, because
of the uniform slice heating and gas flow characteristics of the
system, the epitaxial layer that is deposited on one slice is the
same as the layer deposited on any other slice. Thus, the use of
the system results in an extremely uniform product.
In addition to being continuous, the epitaxial deposition system
illustrated in the drawings is superior to prior systems because it
is sequential. That is, slices emerge from the system in exactly
the same order in which they are introduced. Sequential operation
permits the results of changes in the operational parameters of the
systems to be more easily traced. Also, in the event that the
system fails to produce a satisfactory product, the cause of the
failure is more easily determined.
Although only one embodiment of the invention is illustrated in the
drawing and described herein, it will be understood that the
invention is not limited to the embodiment disclosed but is capable
of modification, rearrangement and substitution of parts and
elements without departing from the spirit of the invention.
* * * * *