U.S. patent number 3,582,691 [Application Number 04/846,021] was granted by the patent office on 1971-06-01 for force transducer units with multiple sensing elements.
This patent grant is currently assigned to Kistler Instrumente AG. Invention is credited to Karlheinz Martini, Hans Conrad Sonderegger, Gelli Spescha.
United States Patent |
3,582,691 |
Sonderegger , et
al. |
June 1, 1971 |
FORCE TRANSDUCER UNITS WITH MULTIPLE SENSING ELEMENTS
Abstract
A transducer unit in which the force or forces to be measured,
are divided at a predetermined ratio by the use of at least one
piezoelement and at least one idle element, of substantially
similar thicknesses and characteristics, which are disposed between
the force-transmitting supports.
Inventors: |
Sonderegger; Hans Conrad
(Neftenbach, CH), Spescha; Gelli (Winterthur,
CH), Martini; Karlheinz (Winterthur, CH) |
Assignee: |
Kistler Instrumente AG
(Winterthur, CH)
|
Family
ID: |
4373581 |
Appl.
No.: |
04/846,021 |
Filed: |
July 30, 1969 |
Foreign Application Priority Data
|
|
|
|
|
Jul 30, 1968 [CH] |
|
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11447/68 |
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Current U.S.
Class: |
310/328;
73/DIG.4; 310/346; 338/5 |
Current CPC
Class: |
G01L
1/16 (20130101); G01L 5/167 (20130101); Y10S
73/04 (20130101) |
Current International
Class: |
G01L
5/16 (20060101); G01L 1/16 (20060101); H01v
007/00 () |
Field of
Search: |
;310/8.7,8.6,8.5,8.4,8.3,8.7,8.1,9.7 ;338/5 ;340/10 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Eldon Eller, "Squeeze Electricity," INTERNATIONAL SCIENCE AND
TECHNOLOGY, July 1965, pp. 32-38. .
P. J. Ottowitz, "A Guide To Crystal Selections," ELECTRONIC DESIGN,
5/10/66, pp. 48--51..
|
Primary Examiner: Hirshfield; Milton O.
Assistant Examiner: Reynolds; B. A.
Claims
We claim:
1. A force transducer unit comprising:
a pair of force transmitting members;
a plurality of piezoelements arranged mechanically in parallel and
having their respective axes of sensitivity disposed in different
directions; and
means for receiving a predetermined portion of the total force
applied to said transducer including a plurality of idle elements
having dimensions equivalent to the dimensions of said
piezoelements and being loaded mechanically in parallel; and
wherein
said plurality of piezoelements and said plurality of idle elements
are arranged between said force-transmitting members.
2. A force transducer unit according to claim 1, further including
an insulator having metallized conductor paths disposed adjacent
thereto for transmitting signals from said piezoelements to
connection terminals arranged on the outer periphery of said
transducer, and wherein said insulator is located next to said
elements and between said force-transmitting members.
3. A force transducer unit according to claim 1, wherein said idle
elements consist of the same crystal material as said
piezoelements.
4. A force transducer unit according to claim 1, wherein said idle
elements consist of a material which has approximately the same
resilience properties and coefficient of expansion as said
piezoelement.
5. A force transducer unit according to claim 1, wherein said
piezoelements and said idle elements are disposed within a spacer
plate having the same stiffness as said elements and wherein the
adjacent surfaces of said spacer plate and said elements are
located in the same plane.
6. A force transducer unit according to claim 5, further including
an insulator having metallized conductor strips printed thereon,
upon which said spacer plate rests, and wherein said spacer plate
further includes grooves therein for receiving said conductor
strips while avoiding contact therewith.
7. A force transducer unit according to claim 6, wherein said
piezoelements consist of piezoelectric crystals.
8. A force transducer unit according to claim 6, wherein said
piezoelements consist of piezoresistant material.
9. A force transducer unit according to claim 1, wherein said axes
of sensitivity are orthogonal to one another.
10. A force transducer unit according to claim 1, wherein said
different axes of sensitivity correspond to orthogonally directed
shear and compressional forces.
Description
The present invention relates to transducer units, and is
particularly concerned with a transducer unit suitable for
measuring the magnitude of a force and comprising at least one
force-responsive member, such as a piezoelectrical element, mounted
tightly between two force-transmitting supports.
The measurement of dynamic forces plays an important role in the
field of measurements. For example, in the case of large forces
when only a fraction of the effective forces can be applied to the
measuring element, or when it is necessary to measure individual
component parts of such forces, measuring problems of particular
difficulties arise. Complicated measuring problems of this kind
cannot be solved by known measuring methods involving the strain
gauge strip technique. Also, any other measuring techniques in
which a deformation or a change of path is necessary for measuring
a force cannot be considered for such complex systems. For solving
such problems, only such measuring elements are suitable which
measure a force directly, that is to say, which can produce a
signal without prior involvement of an elongation or other stress.
It is known that piezoelements are suitable for such purposes;
these elements exist in the form of piezoelectric crystals and have
been available recently also in the form of piezoresistive
crystals, In the case of piezoelectric crystals, preferably quartz
crystals, but also tourmaline crystals are used because of their
high mechanical strength. However, piezoceramic materials can also
be used for the measurement of dynamic forces.
In measurement problems of the kind referred to above, the problem
may occur to divide the total force into a plurality of exactly
definable individual forces and then perhaps to measure only
individual components which have different force directions and
which are selected from a plurality of differently directed
individual forces. The invention provides means for solving this
problem in a satisfactory manner.
The invention consists in a transducer unit with at least one
piezoelement clamped between two force-transmitting supports and is
characterized in that in addition to the piezoelement, at least one
idle element is clamped between the force-transmitting supports,
and that the surface parts of the idle element which are in contact
with the support plates have the same spacing from each other as
the corresponding parts of the piezoelement.
Some embodiments of the invention are described below by way of
example with reference to the accompanying drawings, in which:
FIG. 1 is a cross section through a transducer unit in which the
path of the applied force is divided into three parts;
FIG. 2 is a cross section through a transducer unit in which the
applied forces are divided into components of different force
directions;
FIG. 3 is a cross section through a transducer unit in which the
force flow is directed to a plurality of piezoelements and idle
elements, and wherein the signals delivered by the individual
piezoelements are guided away in groups by means of metallic layers
which are deposited on an insulating plate;
FIG. 4 is a plan view of an insulating plate illustrated in FIG. 3,
with conductive metallic layers deposited thereon;
FIG. 5 is a modification of FIG. 4;
FIG. 6 is a cross section through a transducer unit with an idle
element which consists of a perforated metal plate;
FIG. 7 illustrates the idle element of FIG. 6 with piezomeasuring
elements inserted therein;
FIG. 8 illustrates partly in section the upper part of a transducer
unit shortly prior to assembly on a lower part; and
FIG. 9 illustrates partly in section the lower part of a transducer
unit with parallel-connected piezoelements.
According to FIG. 1, a transducer unit or force-absorbing member
consists of an upper force-transmitting support 1 and of a lower
force-transmitting support 2 having faces 3 and 4, respectively,
which are optically flat. A piezoelement 5 and two idle elements 6
and 7 are clamped between the faces 3 and 4 in rigid contact
therewith. These parallel-connected elements 6 and 7 have been made
optically flat simultaneously with the piezoactive element 5 in
order that they all have exactly the same thickness; additionally,
these idle elements may have similar properties in respect of
resilience and coefficient of expansion. In this manner, a defined
force division is obtained whereby the use of the transducer unit
can be easily adjusted to various requirements. Thus, a large range
of forces can be measured with the same piezoelement, depending
upon the magnitude of the force division ratio. This is a procedure
similar to the generally known procedure in electrical engineering;
thus, in the measurement of electrical current, only part of the
current is measured in a certain arrangement. The definable
division of mechanical forces presumes very high precision in the
construction of the absorbing members.
The piezoelement 5 of FIG. 1 may consist of two crystal plates or
of one crystal plate and an isolating plate. An electrode 11 is
clamped between these two plates and consists e.g. of a thin metal
foil. This is connected to a connector terminal 9 by means of a
conductor 8. The conductor 8 is embedded in a highly insulating
material 10. In the present arrangement, the piezoelement 5
measures one-third of the sum of the individual forces P.
Preferably the two force-transmitting supports 1 and 2 are
subjected to resilient mechanical bias or prestressing by means of
stressing screws. The gap between the idle elements and the
piezomeasuring element is filled in a conventional manner with a
highly insulating casting material which provides a perfect seal
against external effects.
FIG. 2 illustrates a similar transducer unit, however, with the
difference that the forces P have different magnitudes and engage
in different directions. The transducer unit consists in this case
also of an upper force-transmitting support 18 and of a lower
force-transmitting support 12. Their mutually facing surfaces 13
and 14 are again optically flat. In place of the idle elements 6
and 7 of FIG. 1, piezoelements 16 and 17 are inserted, the
directions of sensitivity of which have different axes. The element
15 which corresponds to the element 5 in FIG. 1 is force-sensitive
along the Z axis, the element 16 is sensitive to a shearing force
and is sensitive only along the Y axis, the element 17 is also
sensitive to a shearing force and is sensitive along the X axis.
The two elements 16 and 17 may alternatively be inserted in such
manner that they are orientated in accordance with any other axis.
It is important that they have exactly the same resilience and
coefficient of expansion along the Z axis, but do not deliver a
measuring signal in the Z direction, i.e., they behave like idle
elements in the Z direction. Preferably the various elements 15, 16
and 17 are made optically flat simultaneously and thus have exactly
the same thickness. The signals delivered by the individual
elements are applied to terminals X, Y and Z in accordance with
known methods. In this transducer unit also, each of the
piezoelements may comprise two individual crystal plates, or one
crystal plate and one insulating plate of the same dimension, which
latter may consist of e.g. aluminum oxide. Again it is advantageous
to subject the two force-transmitting supports 18 and 12 to
relative mechanical bias or prestressing by means of stressing
screws or other conventional means.
It lies, however, within the scope of the invention to dispose
parallel-connected piezoelements and idle elements in such manner
that piezoelements with differently directed sensitivity axes are
disposed in the transducer unit at different locations and the
signals are taken off individual elements or groups thereof, so
that a locally effective force in the transducer unit can be
detected and measured, only fractions of these force components
being measured owing to the presence and the effect of the idle
elements. It lies within the scope of the invention that the
transducer unit may be shaped in any desirable manner. Depending
upon the intended use thereof the transducer unit may be limited by
flat or rounded faces. Alternatively it may be constructed in the
general shape of a disc and the piezoelements may be disposed
therein along a mean diameter; in this case the sensitivity axis of
the individual piezoelements may be disposed in such manner that
axial forces, in particular their distribution in relation to the
axis of symmetry, as also torque moments, shearing forces along any
desired axis and moments can be measured by means of the disclike
transducer unit. The disclike configuration of a transducer unit
according to the invention, moreover, leads to practical
possibilities for inserting such units into machines as component
parts thereof.
FIG. 3 illustrates in section a transducer unit of rectangular
shape having an upper force-transmitting support 41 and a lower
force-transmitting support 42, opposing faces 43 and 44 of which
are optically flat. Between these faces, there is located an
insulating plate 45 which projects from the transducer unit e.g. on
one side thereof, forming a lug 46, from which a signal can be
taken off. Conductive paths 47 are provided on the lug 46 by metal
layers deposited thereon. Piezoelements 48 and idle elements 49 are
disposed at locations determined by the conditions which prevail
owing to the effect of the force intended to be applied to the
unit.
An example for an arrangement of a plurality of elements is
illustrated in FIG. 4 which shows an insulating plate 51 with a
connecting lug 56. The insulating plate consists preferably of a
ceramic material, e.g. aluminum oxide, and is ground optically flat
on both sides. In accordance with the dimensions of the
piezoelements, circular metallic layers 58 and 59 are deposited on
the surface by any known method in such manner that they adhere
securely to the insulating plate. The circular areas 58 are
connected to a conductive path 60 and a connector 61 in accordance
with a desired distribution. In contrast the circular idle elements
59 remain insulated. The metallic layers are provided at these
locations only in order that the slightest difference in effective
height between the piezoelements and the idle elements is avoided.
Therefore, the signal is taken off in a manner similar to the
manner used with printed circuits. In place of a highly insulating
ceramic plate 51, alternatively an insulating foil may be used in
certain cases on which the conductive layers shown can be
deposited.
FIG. 5 illustrates a modification of FIGS. 3 and 4, wherein
piezoelements with different sensitivity directions are used by way
of example. Again circular disclike metallic layers 68, 69 and 70
are deposited on an insulating plate 51 in accordance with a
desired distribution. The disc 68 is in engagement with a shearing
force sensitive piezoelement which is orientated in the X
direction; the disc 69 is engaged by a shearing force sensitive
piezoelement which is orientated in the Y direction, and the disc
70 is engaged by a piezoelement, pressure sensitive in the Z
direction which is parallel to the axis of the disc. The individual
elements are connected in a distribution in accordance with the
measuring problem to be solved and the forces occurring thereby.
Depending upon their orientation, the individual piezoelements for
a certain force direction operate as measuring elements or as idle
elements. The connecting points for the X, Y and Z components are
connected by means of conductive paths 62, 63 and 64. Obviously,
additional idle elements may also be provided in such an
arrangement for force splitting, such idle elements producing no
signal at all. In place of circular elements, alternatively
elements of different geometrical shapes, e.g. rings, rectangles
and other configurations may be used.
FIG. 6 illustrates a further embodiment in which the idle element
is a perforated plate 75, the transducer unit further having an
upper force-transmitting support 71 and a lower force-transmitting
support 72, facing surfaces 73 and 74 of which again are optically
flat, and individual piezoelements 76 are inserted in the idle
plate 75. The measuring signal is taken off capacitatively through
an insulating foil 78 by an electrode plate 77 having a connecting
lug 79. The electrode plate 77 is isolated from the lower force
transmitting support 72 by an insulating plate 80.
FIG. 7 illustrates once more in section the electrode plate and the
idle plate of FIG. 6. The idle plate 75 is provided with recesses
into which piezoelements 76 are inserted. It is preferable to join
the plate and the piezoelements adhesively together and to grind
both optically flat simultaneously. In this manner a force division
ratio can be obtained which is equal to the area ratio. In this
case also, care must be taken that a material is selected for the
idle plate which is similar to the material of the piezoelements in
respect of resilience and coefficient of expansion.
FIG. 8 illustrates the upper part of a transducer unit similar to
the unit shown in FIG. 6, the part comprising an upper
force-transmitting support 91, with an optically flat contact face
92. Circular disclike metallic layers 94 and conductive paths 95
are deposited, e.g. by vapor deposition of precious metals, on an
insulating plate 93. They match elements 106 inserted in an idle
plate 105 of the lower part of the transducer unit illustrated in
FIG. 9. The piezoelements again are preferably adhesively fixed in
the idle plate 105, and the two flat faces of this plate are ground
optically flat simultaneously with the piezoelements. In order that
the conductive paths 95 have no possibility to come into contact
with metallic parts of the idle plate 105, the corresponding
connections 107 and 108 are produced with sufficient width in the
idle plate. Thereby short circuiting is prevented in a simple
manner.
Thus the invention provides means for dividing forces which act
from the outside on a unit receiving a measuring value, into
exactly defined partial forces and under certain circumstances in
the same receiving unit for dividing forces of any directions into
components, as well as for determining the location, force
direction and magnitude of complex forces which engage the
measuring unit. The transducer units according to the invention can
be produced with a completely rigid structure; the objects to be
measured can therefore also be rigidly connected to the transducer
units, leading to high natural frequencies of the whole measuring
system.
In the examples illustrated, piezomeasuring elements are shown
which are based on piezocrystals such as quartz or tourmaline.
However, for purely dynamic force measuring problems, alternatively
piezoelements comprising piezoeceramic materials may be used.
The invention may be performed also with the piezoresistive
elements which are still being developed and which utilize
crystals, the resistance values of which alters under the effect of
a force. For such applications, the problems of applying and taking
off the charges are somewhat more difficult. The elements, however,
may be treated as equivalent because the crystals thereof like
germanium and silicon show resilience properties and heat expansion
properties similar to piezocrystals. Thus, the invention enables
new measuring problems to be solved which heretofore had to be
investigated one after the other in a completely unreliable and
inaccurate manner with individual receiving units for measuring
values. The possibility to solve complex phenomena in one
experiment and with one transducer unit opens completely new
aspects for the measuring technique.
* * * * *