U.S. patent number 3,577,207 [Application Number 04/822,450] was granted by the patent office on 1971-05-04 for microwave plasmatron.
Invention is credited to Vladimir Pavlovich Kirjushin.
United States Patent |
3,577,207 |
Kirjushin |
May 4, 1971 |
MICROWAVE PLASMATRON
Abstract
A device for producing low-temperature plasma of microwave
discharge at atmospheric pressure of a plasma-forming gas suitable
for conducting chemical reactions of extreme purity, depositing
thin films, growing crystals, producing powders and other
technological purposes. The device includes a spherical or radial
waveguide wherein there is excited a converging symmetrical
electromagnetic wave, and a discharge tube disposed on the axis of
symmetry of the waveguide.
Inventors: |
Kirjushin; Vladimir Pavlovich
(Fryazino, SU) |
Family
ID: |
25236065 |
Appl.
No.: |
04/822,450 |
Filed: |
May 7, 1969 |
Current U.S.
Class: |
315/39; 313/607;
315/111.21; 330/41; 331/126; 422/186.29; 219/686 |
Current CPC
Class: |
H01J
37/32192 (20130101); H05H 1/46 (20130101); H01J
37/32247 (20130101) |
Current International
Class: |
H01J
37/32 (20060101); H05H 1/46 (20060101); H01j
007/46 (); H01j 019/80 () |
Field of
Search: |
;315/39,111 ;313/231
;331/126 ;330/41 ;333/(Plasma) |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Saalbach; Herman Karl
Assistant Examiner: Chatmon, Jr.; Saxfield
Claims
I claim:
1. A microwave plasmatron comprising: a cavity resonator of
symmetrical configuration and having an axis of symmetry; a
gas-discharge tube through which a plasma-forming gas is passed and
which is supported inside said cavity resonator and along said axis
of symmetry; a feeding waveguide for transmitting microwave energy
into said cavity resonator, said waveguide being mounted on said
cavity resonator at right angles to the longitudinal axis of said
gas-discharge tube externally of said cavity resonator and sharing
a common wall with the latter; a plurality of slots provided in
said common wall of said waveguide and resonator and intended for
reirradiating microwave energy from said waveguide into said cavity
resonator, said slots being equidistantly spaced from the
longitudinal axis of said gas-discharge tube and separated from one
another by a distance providing for the occurrence of oscillations
in phase with one another.
2. A plasmatron, as claimed in claim 1, in which the slots are
arranged along the entire length of the waveguide and separated
from center to center by a distance equal to a half-wavelength of
the input microwave energy, adjacent slots being located on
opposite sides from the longitudinal axis of the waveguide.
3. A plasmatron, as claimed in claim 1, in which the slots are
arranged along the entire length of the waveguide and separated
from center to center by a distance equal to the wavelength of the
input microwave energy, all said slots being located on one side
from the long axis of the waveguide.
4. A plasmatron, as claimed in claim 1, in which the waveguide is a
hollow torus in which microwave energy propagates in equal amounts
both ways from the place of entry.
Description
The present invention relates to devices for generating
low-temperature plasma in a microwave-frequency discharge at
atmospheric or a nearly-atmospheric pressure, and more specifically
to plasmatrons which are used, for example, to carry out chemical
reactions of extreme purity, to deposit thin films, and to clean
powders and gases.
There exist microwave-discharge plasmatrons comprising a tube which
encloses the region of the gas discharge and is placed in a
waveguide or a cavity resonator coupled to a feeding waveguide by a
coupling transformer intended to provide optimum conditions for
energy transfer from the waveguide into the resonator.
A disadvantage of this type of plasmatron is in that microwave
energy is transferred to the plasma from one side only, namely,
from that of the waveguide. Because of this, the parameters
(temperature, ionization level, etc.) of the plasma column vary
across its section.
It is known that a gas-discharge plasma in microwave field tends to
shift in the direction of the energy source, which fact handicaps
confinement of the plasma on the axis of the gas-discharge
tube.
Another disadvantage of existing plasmatrons is that the coupling
transformer, usually having the form of a radiating slot, probe, or
loop, has finite dimensions determined by the frequency of the
microwave source. As the power of a plasmatron increases, the
strength of the electric field also increases such that the field
intensity at the transformer often rises to a value sufficient to
cause a spontaneous breakdown and a discharge. This parasitic
discharge may lead to the dissipation of the input energy at the
coupling transformer, resulting in its destruction and failure of
the entire plasmatron.
An object of the present invention is to provide a microwave
plasmatron in which the parameters of the gas-discharge plasma are
the same across the entire section of the plasma column and in
which the probability of breakdowns occurring at the coupling
transformer is very remote.
This object is accomplished by the fact that in a microwave
plasmatron whose gas-discharge tube is arranged along the axis of
symmetry of a cavity resonator electromagnetically coupled to a
microwave-feed waveguide, the waveguide is, according to the
invention, located at right angles to the longitudinal axis of the
gas-discharge tube and outside the cavity resonator entirely
surrounding its perimeter and shares with it a wall which carries
electromagnetic-coupling elements equidistantly separated from the
axis of the gas-discharge tube and separated from one another by a
distance providing for oscillations in phase produced therein.
Such an arrangement of the plasmatron materially simplifies
confinement of the plasma at the center of the gas-discharge tube,
because energy is fed into the plasma uniformly from all sides, and
the tendency of the plasma to shift in the direction of the energy
source is nonexistent. Another advantage is that the power of the
plasmatron can be markedly increased, since each of the
electromagnetic-coupling elements has to accommodate only part of
the total energy input.
It is preferable to arrange electromagnetic-coupling elements along
the entire length of the waveguide, separated (from center to
center) of a distance equal to a half-wavelength of the input
energy, adjacent elements being located on opposite sides of the
long axis of the waveguide.
As an alternative, electromagnetic-coupling elements may be
separated by a distance equal to the wavelength of the input
microwave energy, in which case they should be all located on one
side of the long axis of the waveguide.
In each case, the waveguide may be a hollow torus.
The invention will be best understood from the following
description of preferred embodiments when read in connection with
the accompanying drawings in which:
FIG. 1 is a cross section through the spherical cavity resonator,
gas-discharge tube, and part of the feeding waveguide of a
plasmatron according to the invention:
FIG. 2 is section taken along line II-- II of FIG. 1;
FIG. 3 shows the cylindrical cavity resonator, gas-discharge tube
and part of the feeding waveguide of a plasmatron according to the
invention, and
FIG. 4 shows a toroidal waveguide.
Referring to FIG. 1, there is a tube 1 enclosing the gas-discharge
region, which is fabricated from a heat-resistant glass of low RF
loss and placed inside a cavity resonator 2. For practical reasons,
preference should be given to cavity resonators having axial
symmetry, such as spherical, cylindrical, etc. When such a
resonator is excited in the dominant (symmetrical) mode of
oscillation, the maximum of the electric field intensity is
coincident with the axis of symmetry along which the tube 1 is also
located.
Holes 3 through which the tube 1 passes inside the cavity resonator
2 are fitted with stubs 4 whose diameter is less than the critical
dimension. The function of these stubs 4 is to prevent the emission
of microwave energy outside the plasmatron. Instead of stubs, use
may be made of chokes or any other elements having the property of
microwave filters.
Placed outside the cavity resonator 2 surrounding its perimeter and
at right angles to the longitudinally axis of the gas-discharge
tube 1 is a ring-shaped, rectangular waveguide 5 which shares one
wall 6 (FIG. 2) with the cavity resonator 2.
The wall 6 has slots 7 which serve as electromagnetic coupling
elements to transfer microwave energy from the waveguide into the
cavity resonator 2.
The slots 7 are equidistantly spaced from the longitudinally axis
of the gas-discharge tube 1 and are separated (from center to
center) by a distance equal to a half-wavelength of the input
microwave energy, adjacent slots being located on opposite sides of
the longitudinally axis of the waveguide 5. This arrangement of the
coupling slots provides for the occurrence of the oscillations
in-phase produced therein. The slot farthest in the direction of
propagation of microwave energy in the waveguide is within a
quarter-wavelength of the wall 8 of the waveguide. The function of
the wall 8 is to split the input microwave energy equally between
all the slots.
As an alternative, the coupling elements may be loops or probes, in
which case the waveguide with probes or loops is arranged in the
way identical to the one described above.
The amount of coupling between the waveguide 5 and the coupling
elements is selected such that each will transfer an equal share of
the total input energy into the cavity resonator. In the preferred
embodiment just described, the amount of coupling is governed by
the offset of slots relative to the longitudinal axis of the
waveguide.
FIG. 3 shows a plasmatron with a cylindrical resonator 2. The
waveguide 5 is arranged to surround the perimeter of the
cylindrical resonator 2 and at right angles to the longitudinal
axis of the gas-discharge tube 1. The coupling elements, which are
likewise slots 7 separated (center to center) by a distance equal
to the wavelength of the input microwave energy, are arranged along
the entire length thereof, and all on one side of the longitudinal
axis of the waveguide. This arrangement of coupling elements
provides for the occurrence of the oscillations in-phase produced
therein.
It should be borne in mind that in a plasmatron using a cylindrical
resonator, the coupling elements may likewise be spaced at a
half-wavelength of the input microwave energy apart.
Instead of a waveguide with the wall 8, use may be made of a
toroidal waveguide. In this case, one utilized the property of two
electromagnetic waves travelling towards each other to form an
electrical wall.
The microwave energy fed into the waveguide 5 (FIG. 4) is split
into two equal parts which propagate towards each other. In the
area located across the diameter from the entry into the waveguide,
the two waves produce an electrical wall which acts exactly as the
wall 8 in the above-described preferred embodiments of the
plasmatron. The layout of such a waveguide relative to the cavity
resonator and the gas-discharge tube and the arrangement of
coupling elements, notably slots 7, are analogous to what has been
already described. In this case, too, the slots nearest to the
electrical wall are separated from it by a quarter-wavelength of
the microwave energy propagating in the waveguide.
The plasmatron disclosed herein operates as follows.
A plasma-forming gas is passed through the gas-discharge tube. The
microwave energy propagating through the waveguide 5 passes through
the slots 7 into the resonator 2 where it is concentrated on the
axis along which is arranged the gas-discharge tube 4 where the
plasma absorbing microwave energy is produced.
If the dimensions of the resonator are such that the operating
frequency is equal to its resonant frequency, then at the instant
of ignition the electric field intensity will be a maximum at the
axis of the resonator and a minimum at the slots 7. This
field-intensity distribution facilitates the ignition and reduces
electrical stresses that occur in the resonator due to its
resonance properties, especially when there is no absorption of
radiation energy.
To keep the plasma from touching the walls of the tube 4, the
latter is subjected to a turbulent jet of plasma-forming gas. The
turbulence produces a low-pressure region along the axis of the
tube 1, which prevents the plasma from contacting the walls.
The present invention has been embodied in several prototypes which
have passed tests successfully. Using a microwave power input of
about 3 kW. in CW operation and a quartz discharge-tube with a
diameter of 500 mm., the resultant plasma column was 300 mm. long
and 40 mm. in diameter, having a temperature of
3000.degree.--5000.degree. K.
* * * * *