U.S. patent number 3,572,672 [Application Number 04/778,130] was granted by the patent office on 1971-03-30 for vacuum evaporation apparatus.
This patent grant is currently assigned to RCA Corporation. Invention is credited to Abraham Harel.
United States Patent |
3,572,672 |
Harel |
March 30, 1971 |
VACUUM EVAPORATION APPARATUS
Abstract
A crucible for holding a quantity of material to be evaporated
in a vacuum evaporation system includes an elongated tubular upper
portion and a heat shield to confine heat to the lower portion of
the crucible so that the upper portion remains cooler than the
lower portion. This prevents overflowing and serves to collimate
the evaporant.
Inventors: |
Harel; Abraham (Trenton,
NJ) |
Assignee: |
RCA Corporation (N/A)
|
Family
ID: |
25112391 |
Appl.
No.: |
04/778,130 |
Filed: |
November 22, 1968 |
Current U.S.
Class: |
432/156; 118/726;
427/250; 432/265 |
Current CPC
Class: |
C23C
14/243 (20130101) |
Current International
Class: |
C23C
14/24 (20060101); C23c 013/12 () |
Field of
Search: |
;266/34,34 (V)/
;75/65,68 ;117/107 ;118/48,49,49.1,49.5 ;263/(Inquired) |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Dost; Gerald A.
Claims
I claim:
1. In a vacuum evaporation apparatus:
a crucible for holding a substance to be evaporated, said crucible
having an elongated tubular upper portion with an open end and a
lower portion with a closed end and being of a material which is
wetted by said substance;
means adjacent to said lower portion of said crucible for heating
said substance; and
heat shield means thermally coupled to said crucible for confining
heat to said lower portion of said crucible and for maintaining
said upper portion of said crucible at a substantially lower
temperature than said lower portion of said crucible, whereby
overflow of said substance from said crucible is prevented.
2. Apparatus as defined in claim 1 wherein said crucible is formed
of boron nitride.
3. Apparatus as defined in claim 1 wherein said crucible has an
externally threaded portion thereon and said heat shield means
comprises a disc having a threaded opening therein adapted to be
engaged with said threaded portion of said crucible.
4. Apparatus as defined in claim 1 wherein said heat shield means
comprises a radially extending disc surrounding said crucible and
wherein said tubular upper portion extends a substantial distance
above said heat shield.
Description
BACKGROUND OF THE INVENTION
This invention relates to vacuum evaporation apparatus and, more
particularly, to apparatus including a crucible for holding a
relatively large quantity of a substance to be evaporated so that
prolonged evaporation is made possible.
Vacuum evaporation is widely used in the electronics industry, for
example, for the application of relatively thin coatings of
materials such as aluminum to surfaces of electronic components.
Evaporated aluminum leads and contacts for semiconductor devices
are common. The manufacture of television picture tubes includes
the application of a coating of aluminum to the surface of the
envelope of the tube.
Other materials including semiconductors, insulators, and metals
are also applied by the process of vacuum evaporation. For some of
these materials, it has been common practice to place small bodies
thereof directly on a coiled filament. This method, however, does
not permit prolonged evaporation or relatively large quantities of
material.
The evaporation of aluminum, in particular, over relatively long
periods of time poses several problems. Molten aluminum tends to
attack the usual crucible materials, such as alumina. Molten
aluminum wets many crucible materials and capillary attraction
causes the aluminum to creep up the sides of the crucible and
overflow. Flash evaporation of small aluminum pellets dropped into
a hot crucible requires an elaborate pellet feeding mechanism.
SUMMARY OF THE INVENTION
The present apparatus includes a crucible having an elongated
tubular upper portion with an open end through which the material
to be evaporated may pass and a closed lower end portion for
holding a quantity of material. Means for heating the lower end
portion of the crucible and a heat shield for confining the heat to
the lower end of the crucible cooperate with the elongated upper
end portion to solidify the material on its wall and thus prevent
overflow of the material due to wetting.
IN THE DRAWINGS
The single FIGURE is a vertical cross-sectional view of the present
apparatus.
THE PREFERRED EMBODIMENT
The present novel vacuum evaporation apparatus is illustrated
generally at 10 in the drawing. As shown, the apparatus 10 includes
a tubular housing 12, which is made of a refractory material,
supported on a suitable thermal insulator 13. The housing 12 has a
closed lower end 14 and a top surface 15 defining an open upper end
for receiving the other elements of the apparatus 10.
A crucible 16, made of a material which is electrically and
thermally insulating and chemically inert, such as pyrolytic boron
nitride, is supported in the open upper end of the housing 12. The
crucible 16 has an elongated tubular upper portion 18, a conical
lower portion 20 defining a closed end, and a threaded midportion
21. A heat shield 22 having the shape of an annular disc with a
concentric, internally threaded opening is assembled on the
midportion 21 of the crucible 16. An annular stop 24 on the
crucible 16 serves to define the position of the heat shield 22
thereon. The diameter of the heat shield 22 is such that the shield
may rest on the surface 15 of the housing 12 to support the
crucible 16 thereon and to define, with the housing 12, a chamber
for confining heat to the vicinity of the lower end portion 20 of
the crucible 16.
A resistance heating element 26, in conical coil form, is disposed
tightly around the lower conical end portion 20 of the crucible 16.
Typically, the heating element 26 is made of resilient tungsten or
molybdenum wire. The size of the element 26 should be such that it
is stretched when it is in place on the crucible 16 with its
uppermost turn disposed in the lower thread of the midportion 21 of
the crucible. The resiliency of the heating element 26 then holds
it in tight, thermally efficient contact with the lower end portion
20 of the crucible 16.
Input and output conductors 28 and 30, respectively, extend from
the heating element 26 to the outside of the housing 12 through
suitable slots 32 and 34 in the walls thereof. A power source,
represented by a battery 36, may be connected to the leads 28 and
30 to produce heat in the heating element 26 to melt the material
in the crucible 16.
In the use of the present apparatus, a quantity of material such as
aluminum is placed in the crucible 16 and the apparatus 10 is then
placed in a vacuum system, not shown, with the open end of the
crucible 16 directed upward toward the article to be coated.
Low-pressure conditions are established and current is then passed
through the heating element 26 to melt the material in the crucible
16 and form a bath of molten liquid, 38.
The present apparatus permits the use of crucible materials which
are chemically inert to the material being evaporated even though
they are wetted thereby. The result of wetting is that the material
creeps up the walls of the crucible 16 by capillary action. This is
indicated in the drawing by the quantity of material 40 which
appears as a coating on the wall of the crucible 16.
The heat shield 22 confines heat from the coil 26 to the lower
portion 20 of the crucible 16. Heat may flow by conduction through
the walls of the midportion 21 of the crucible 16 to the upper
portion 18 thereof, but this heat is minimized by the thinness and
relatively low thermal conductivity of the crucible wall. Moreover,
the relatively large surface area of the tubular portion 18 of the
crucible 16 provides a large radiating surface for the dissipation
of any heat which does reach the upper portion 18. Consequently,
the upper portion 18 remains relatively cool.
Molten material 40 rising up the interior wall of the upper portion
18 cools and solidifies upon encountering the relatively cooler
material thereof. A dam, 41, of solidified material is thereby
established which prevents any further flow of material up the wall
of the crucible. Consequently, the material cannot overflow from
the crucible.
The elongation of the tubular upper portion 18 also serves to
collimate the evaporation of the material 38. As is generally known
in the vacuum evaporation art, the mean free path of atoms or
molecules in the vacuum is relatively long so that material
proceeds in straight lines from the molten zone. In the present
apparatus, atoms leaving the crucible 16 will be largely confined
to the conical region bounded by the arrows 42 and 44 in the
drawing. Material is thus directed toward the article to be coated
and does not condense on the walls of the evaporation chamber or
elsewhere in the apparatus. Moreover, material is not reflected
from the walls of the chamber.
* * * * *