U.S. patent number 3,810,025 [Application Number 05/245,232] was granted by the patent office on 1974-05-07 for field emission type electron gun.
This patent grant is currently assigned to Nihon Denshi Kabushiki Kaisha. Invention is credited to Ryuzo Aihara, Nobuyuki Kobayashi, Susumu Ota.
United States Patent |
3,810,025 |
Aihara , et al. |
May 7, 1974 |
**Please see images for:
( Certificate of Correction ) ** |
FIELD EMISSION TYPE ELECTRON GUN
Abstract
This invention relates to a field emission type electron gun
capable of protecting the emitter tip from damage when electrical
breakdown occurs in the gun chamber. The preferred embodiments
incorporate circuitry for decreasing the impedance between the
emitter and its associated electrode when electrical breakdown
occurs.
Inventors: |
Aihara; Ryuzo (Tokyo,
JA), Ota; Susumu (Tokyo, JA), Kobayashi;
Nobuyuki (Tokyo, JA) |
Assignee: |
Nihon Denshi Kabushiki Kaisha
(Tokyo, JA)
|
Family
ID: |
27287125 |
Appl.
No.: |
05/245,232 |
Filed: |
April 18, 1972 |
Foreign Application Priority Data
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|
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Apr 20, 1971 [JA] |
|
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46-30876 |
May 11, 1971 [JA] |
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46-31405 |
Sep 7, 1971 [JA] |
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46-69070 |
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Current U.S.
Class: |
315/307; 313/336;
315/310 |
Current CPC
Class: |
H01J
3/021 (20130101); H02H 7/20 (20130101); H01J
37/073 (20130101); H01J 37/241 (20130101) |
Current International
Class: |
H01J
3/02 (20060101); H01J 3/00 (20060101); H01J
37/02 (20060101); H01J 37/073 (20060101); H01J
37/24 (20060101); H01J 37/06 (20060101); H02H
7/20 (20060101); H02h 007/20 () |
Field of
Search: |
;315/106,107,175,176,307,310,311 ;328/8-10 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
smith, "CRT Arcing," Electro-Optical Systems Design, Nov. 1971,
cover and pp. 14-18..
|
Primary Examiner: Rolinec; Rudolph V.
Assistant Examiner: Larkins; William D.
Attorney, Agent or Firm: Webb, Burden, Robinson &
Webb
Claims
1. A field emission type electron gun device comprising:
i. an emitter for emitting an electron beam,
ii. an anode for accelerating the electron beam,
iii. a high voltage source for supplying negative high potential to
said emitter in order to accelerate said electron beam,
iv. an electrode located between said emitter and said anode.
v. a voltage source for generating a potential difference between
said electrode and said emitter in order to generate a strong
electric field in the vicinity of said emitter tip, and
vi. a protection means for preventing the generation of an
unusually high potential difference between said emitter and said
electrode comprising a switching circuit for rapidly decreasing the
impedance of said protection means in the event that the voltage
between said emitter and said electrode increases beyond the firing
voltage of the switching circuit, and
vii. means for heating the emitter comprising a first and second
isolation transformer, the secondary of the first transformer being
in series with the primary of the second transformer, the primary
of the first transformer being connected to an AC voltage supply,
the secondary of the second transformer being in series with the
emitter of the electron gun, the high voltage supply being
connected to the circuit between the said first and second
transformers and the emitter being connected through a high value
resistor to the circuit between said first and second
2. A field emission type electron gun device comprising:
i. an emitter for emitting electron beam,
ii. an anode for accelerating the electron beam,
iii. a high voltage source for supplying negative high potential to
said emitter in order to accelerate said electron beam,
iv. a first electrode located between said emitter and said
anode,
v. a voltage source for generating a potential difference between
said first electrode and said emitter in order to generate a strong
electric field in the vicinity of said emitter tip,
vi. a second electrode located between said first electrode and
said anode,
vii. a D.C. voltage source for supplying a potential to said
secondary electrode, and
viii. a protection means for preventing the generation of an
unusually high potential difference between said second electrode
and said emitter comprising a switching circuit for rapidly
decreasing the impedance of said protection means in the event that
the voltage between said emitter and said second electrode
increases beyond the firing voltage of the switching circuit,
and
ix. means for heating the emitter comprising a first and second
isolation transformer, the secondary of the first transformer being
in series with the primary of the second transformer, the primary
of the first transformer being connected to an A.C. voltage supply,
the secondary of the second transformer being in series with the
emitter of the electron gun, the high voltage supply being
connected to the circuit between the said first and second
transformers and the emitter being connected through a high value
resistor to the circuit between said first and second transformers.
Description
This invention relates to a field emission type electron gun
capable of protecting the emitter tip from damage when electrical
breakdown occurs in the gun chamber. The advantage of a field
emission type electron gun in electron microscopes and the like as
compared with the ordinary thermionic emission type electron gun,
is that it is possible to obtain a high current electron beam
forming a microspot. Unfortunately, however, in the case of the
field emission type gun, the emitter is very easily damaged due to
electrical breakdown caused by a deterioration in the gun chamber
vacuum or other phenomena, resulting in the generation of an
unusually strong electric field in the vicinity of the emitter tip.
As a result the tip is overheated due to large current during
vacuum arc discharge. This inevitably results in a change in shape
in the emitter tip which then becomes useless.
It is a principal object of this invention to prevent electrical
breakdown from damaging the emitter tip.
Briefly, according to this invention, a field emission electron gun
comprises a circuit for preventing an unusually high potential
difference between the emitter and an electrode spaced near the
emitter resulting from an electrical breakdown between that
electrode and the grounded anode. The preferred means of preventing
the unusually high potential difference is to provide a circuit
between the emitter and electrode which has a reduced impedance at
the time of breakdown and preferably a circuit to increase
impedance between the high voltage source and the emitter when
breakdown occurs.
Further features of this invention will become apparent by reading
the following detailed description in conjunction with the
accompanying drawings, in which:
FIGS. 1(a) and (b) are schematic diagrams of a conventional field
emission type electron gun.
FIG. 2 is a diagrammatic circuit of one embodiment according to the
invention.
FIGS. 3 to 10 show other embodiments according to this
invention.
Referring to FIG. 1(a), a gun chamber 1 contains a filament 2
heated by an A.C. current source 3 through an insulating
transformer 4, an emitter 5 attached to the filament 2, first
electrode 6 for producing a strong electric field (for example,
about 10.sup.7 volt/cm) in the vicinity of the emitter tip and an
anode 7 maintained at ground potential. A voltage source 8 supplies
a voltage so as to create a constant or pulsed potential difference
between the emitter 5 and the first electrode 6, in order to draw
electrons from said emitter tip. Another voltage source 9 maintains
the emitter at a high negative D.C. potential in order to
accelerate the emitted electrons.
In this electron gun, electrical breakdown occurs mostly between
the first electrode 6 and the anode 7, due to the high potential
difference existing there compared with that existing between the
first electrode 6 and the emitter 5.
In FIG. 1(b), Z10 and Z11 represent the impedances of sources 8 and
9 (FIG. 1(a)) respectively, and Z12 the impedance between the two
sources.
When electrical breakdown occurs between the first electrode 6 and
the anode 7, the potential of the first electrode 6 becomes zero
(ground) and discharge current flows through impedances Z10, Z12
and Z11. Accordingly, if the impedance Z10 is not sufficiently
small as compared with the sum total of impedance Z11 and Z12, the
potential difference between the emitter 5 and the first electrode
6 will be large, resulting in damage to the emitter tip.
FIG. 2 illustrates one embodiment of this invention in which the
above possibility, viz., damage to the emitter tip, is eliminated
by providing a protection circuit.
Referring to FIG. 2, the protection circuit 13 is arranged in
parallel with voltage supply source 8, said circuit comprising a
thyratron 14, a variable D.C. voltage source 15 for adjusting the
firing voltage of the thyratron 14, and a coupling condenser
16.
When surge voltage, resulting from electrical breakdown, is applied
to circuit 13; that is to say, across source 8, the impedance of
the circuit decreases, thereby protecting the emitter tip from
damage due to said surge voltage.
FIG. 3 illustrates another embodiment according to this invention
in which an "on-off" switch 17 is provided in place of protection
circuit 13.
This particular embodiment is very effective when electrical
breakdown is predetermined as, for example, when applying the
so-called "conditioning" technique whereby electrical breakdown
between the first electrode and the anode is caused by setting the
output voltage of voltage source 9 slightly higher than the regular
working output voltage, in order to improve the withstand voltage
in the gun chamber. In this case, switch 17 is switched on during
the "conditioning" operation, and switched off during regular
operation.
FIG. 4 illustrates yet another embodiment of the invention in which
an additional electrode 18, hereinafter referred to as "the second
electrode," is provided between the first electrode 6 and the anode
7. The potential applied to the second electrode 18 is determined
by a D.C. voltage source 19 and the voltage source 9. In this case,
the output voltage of the voltage source 19 is almost the same as
that of source 8 if the output of source 8 is D.C., and is almost
the same as the pulse height of the output of source 8 if the
output of source 8 is pulse. Moreover, the output voltage of source
19 is much smaller than the output voltage of source 9.
Accordingly, electrical breakdown between the second electrode 18
and the anode 7 almost always occurs before the occurrence of
breakdown between the second electrode 18 and the first electrode
6.
The moment breakdown occurs between the second electrode 18 and the
anode 7, the potential of the second electrode 18 changes from
negative high potential to ground potential. As a result, the
potential difference between the second electrode 18 and the first
electrode 6 increases drastically due to the sudden outflow of
discharge current through the impedance of D.C. voltage source 19.
This, in turn, activates protection circuit 13, comprising a
silicon symmetric switch (S.S.S.) 20, thereby decreasing the
impedance between the two electrodes and, in so doing, prevents the
reoccurrence of electrical breakdown since the potential
fluctuation of said electrodes and the emitter 5 are about the
same.
An additional advantage of this embodiment is the fact that the
range of the protection circuit firing voltage is much wider than
that of the protection circuit described in the embodiment shown in
FIG. 2. This is because, in the case of the embodiment shown in
FIG. 2, it is necessary to adjust the firing voltage in accordance
with the output voltage of voltage source 8 which has to be varied
every time the emitter is exchanged. In the case of this
embodiment, however, the relevant voltage source is source 19 which
is seldom varied. Hence, in the case of this embodiment, there is
almost no necessity to adjust the firing voltage of protection
circuit 13. For this reason, it is possible to utilize a simple
S.S.S. 20 switching device in place of the more complicated
thyratron and its associated circuit.
The embodiment illustrated in FIG. 5 is substantially the same as
that illustrated in FIG. 4. In this embodiment, however, an
insulation column 21 containing an insulating transformer 4, a high
voltage source 22 and a filter circuit consisting of a resistor 23
and capacitors 24 is connected to gun chamber circuit 25 by high
voltage cable 26. Further, the potential at the junction of
balancing resistors 27 and 28 is used instead of the potential of
the emitter 5, and protection circuit 13 which, in this case,
incorporates a surge voltage protection tube 29 is connected
between said junction and the second electrode 18.
In an "on-off" switch is provided in place of the protection
circuit 13, this particular embodiment is very effective when
electrical breakdown is predetermined as mentioned in the
explanation of the embodiment shown in FIG. 3.
In the embodiment shown in FIG. 5, theoretically speaking, when
electrical breakdown occurs between the second electrode 18 and the
anode 7, vacuum arc discharge between the emitter and the first
electrode 6 does not occur. In practice, however, if the residual
impedance in the protection circuit is fairly large, the potential
difference between electrode 6 and electrode 18 will be
correspondingly large due to the outflow of discharge current.
The peak voltage E.sub.D of the potential difference is given by
the following equation:
E.sub.D .apprxeq. (Z30/Z30 + Z31) .times. (C.sub.A /C.sub.A +
C.sub.B) .times. V.sub.H
where, Z30 represents the impedance between the second electrode 18
and the emitter 5, Z31 represents the impedance of the difference
between the impedance Z30 and the total impedance existing in the
discharge path of the discharge current due to electrical
breakdown, C.sub.A represents the stray capacity between electrode
6 and the emitter, C.sub.B represents the stray capacity between
electrode 6 and electrode 18, and VH represents the output voltage
of the voltage source 22.
The embodiments shown in FIGS. 4 and 5 are designed to decrease
impedance Z30 during discharge so as to keep E.sub.D as low as
possible, that is to say, minimize the potential difference between
electrode 6 and electrode 18.
FIG. 6 illustrates an embodiment designed to further reduce E.sub.D
by increasing the impedance Z31 during discharge in addition to
decreasing the impedance Z30.
This is made possible by incorporating a circuit 32 consisting of a
transformer 33, balancing resistors 34, 35, 36 and 37 and a high
order resistor 38 capable of withstanding the high voltage output
of source 22. The two ends of the resistor 38 are connected to the
junction of resistors 36 and 37 and the junction of resistors 34
and 35, respectively. When there is no discharge, the embodiment
functions the same way as the embodiment shown in FIG. 5. If
electrical breakdown occurs between the second electrode 18 and the
anode 7, the amount of discharge current flowing through high order
resistor 38 is very much reduced, and the potential difference
between the emitter 5 and the first electrode 6 is not so
large.
Voltage source 8 consisting of an A.C. voltage source 40,
insulating transformer 41, a pulse generator 39, a transformer 42
and a high order resistor 43 generates a pulse voltage which is
applied to electrode 6 through transformer 42. When electrical
breakdown occurs in the gun chamber, the discharge current due to
the stray capacity of transformer 41 flows through resistor 43.
FIG. 7 illustrates a practical embodiment of the present invention
in which function and operation is substantially the same as the
embodiments shown in FIGS. 5 and 6. In this embodiment, pulse
generator 39, insulating transformer 41, and D.C. voltage source 19
etc. are all housed in insulation column 21. Also, the potential at
the center tap of the output winding of transformer 4 is used
instead of the potential at center tap of the input winding of
transformer 33. The function of resistor 44 is the same as that of
resistor 43 in FIG. 6.
FIG. 8 illustrates an embodiment for D.C. field emission operation
corresponding to the embodiment shown in FIG. 7. In this
embodiment, the function of resistor 45 is the same as that of
resistors 44 and 38.
FIG. 9 illustrates an embodiment designed to increase the impedance
231 inductively instead of resistively as in the case of the
embodiments shown in FIGS. 5, 6, 7 and 8. For this purpose, the
embodiment incorporates a circuit 32 consisting of coils L11, L12,
. . . . L4N and capacitors C1, C2, . . . . CN. Coils L11, . . . .
L1N, L21, . . . . L2N, and L31, . . . . L3N forming part of said
coils are required to have the same inductance and be
unidirectionally wound, whereas coils L41, . . . . L4N may have a
different or the same inductance and may be wound in the opposite
or the same direction to the above coils.
FIG. 10 illustrates the physical equivalent of the circuit 32 shown
in FIG. 9 in which conducting wires 46, 47, 48 and 49 leading from
the high voltage cable 26 are wound on a core 50. By so doing, it
is possible to eliminate capacitors C1, C2, etc., so long as the
stray capacity between the conducting wires is adequate.
Accordingly, in the embodiment shown in FIG. 9, discharge current
flows through circuit 32 which has a fairly high inductance;
whereas, under normal operating conditions, the inductance of
circuit 32 is cancelled out by the coils and is, therefore, zero.
For example, the pulse signals generated by pulse generator 39 are
transmitted to the input winding of the transformer 42 and
capacitor CN+1 via the transmission line consisting of coils L21 .
. . . L2N, L31 . . . . L3N and capacitors C1 . . . . CN without
loss. Moreover, resistor 51 connected across the output winding of
transformer 42 compensates for the sag in the pulse voltage applied
between the emitter 5 and the first electrode 6. The filament
heating current is D.C. rectified by rectification circuit 52. Even
if A.C. current is used for heating the filament, there is
practically no loss in circuit 32, because coils L11, . . . . L1N
and coils L31, . . . . L3N have the same inductance and are
unidirectionally wound.
It is possible, of course, to incorporate coils of circuit 32
between the high voltage source 9 and the junction of the emitter
and voltage source 8 in the embodiment shown in FIG. 2.
* * * * *