U.S. patent number 3,749,964 [Application Number 05/101,613] was granted by the patent office on 1973-07-31 for electron beam device.
This patent grant is currently assigned to Nihon Denshi Kabushiki Kaisha. Invention is credited to Yoshihiro Hirata.
United States Patent |
3,749,964 |
Hirata |
July 31, 1973 |
**Please see images for:
( Certificate of Correction ) ** |
ELECTRON BEAM DEVICE
Abstract
An electron beam deflecting apparatus incorporating two
deflecting stages, each of said deflecting stages being provided
with two pairs of deflecting coils for generating two directional
magnetic fields, the said fields being at right angles to each
other and perpendicular to the optical axis. The electron beam
deflecting apparatus also incorporates a circuit for supplying
current for deflecting the electron beam, the said current supply
circuit being sufficient to supply the total current required for
independently actuating the individual coils constituting the two
deflecting stages.
Inventors: |
Hirata; Yoshihiro (Tokyo,
JA) |
Assignee: |
Nihon Denshi Kabushiki Kaisha
(Akishima, Tokyo, JA)
|
Family
ID: |
14383310 |
Appl.
No.: |
05/101,613 |
Filed: |
December 28, 1970 |
Foreign Application Priority Data
|
|
|
|
|
Dec 25, 1969 [JA] |
|
|
44/104540 |
|
Current U.S.
Class: |
250/398; 850/6;
850/9; 348/E3.033; 313/426; 315/394; 315/395 |
Current CPC
Class: |
H01J
37/1475 (20130101); H01J 29/70 (20130101); H04N
3/16 (20130101); H01J 37/24 (20130101) |
Current International
Class: |
H01J
37/02 (20060101); H01J 37/147 (20060101); H01J
37/24 (20060101); H01J 29/70 (20060101); H04N
3/16 (20060101); H01j 029/76 () |
Field of
Search: |
;315/18,27TD ;313/75,76
;250/49.5A |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Quarforth; Carl D.
Assistant Examiner: Lehmann; E. E.
Claims
I claim:
1. In an electron microscope or the like having an electron optical
axis, an apparatus for deflecting an electron beam to irradiate a
location on a specimen at different easily selectable azimuthal
angles of incidence comprising:
A. a deflection stage being equipped with deflecting coils L.sub.1x
and L.sub.1y for generating magnetic fields substantially at right
angles to each other and perpendicular to the optical axis;
B. a second deflection stage being equipped with deflecting coils
L.sub.2x and L.sub.2y for generating magnetic fields substantially
at right angles to each other and perpendicular to the optical
axis, said magnetic deflecting fields of said second stage being
substantially aligned with the magnetic deflecting fields of the
first stage;
C. a deflecting current supply for supplying individual coil
currents I.sub.1x, I.sub.1y, I.sub.2x and I.sub.2y to each of said
deflecting coils L.sub.1x, L.sub.1y, L.sub.2x and L.sub.2y
respectively, said individual coil currents being the total of a
plurality of individually variable analog currents, such that
I.sub.1x = i.sub.1x1 + i.sub.1x2 + i.sub.1x3
I.sub.1y = i.sub.1y1 + i.sub.1y2 + i.sub.1y3
I.sub.2x = i.sub.2x1 + i.sub.2x2
I.sub.2y = i.sub.2y1 + i.sub.2y2
means for varying simultaneously and proportionally at least some
of the analog currents controlling coil current to both first and
second stages, such that the means for controlling i.sub.1 ,
i.sub.2x1 and i.sub.1y2 are interconnected and means for
controlling i.sub.1y1, i.sub.2y1 and i.sub.1x2 are interconnected,
such that the one deflection stage redirects the electron beam
deflected by the other stage to the location on the specimen thus
changing the azimuth angle of incidence without moving the location
on the specimen on which the beam is incident notwithstanding
slight misalignment of the deflection stages and slight deviation
from right angles between the fields of the separate stages.
2. An apparatus according to claim 1 in which the i.sub.1x3,
i.sub.1y3, i.sub.2x2 and i.sub.2y2 analog currents are used for
aligning the irradiating beam.
3. In an electron microscope or the like having an electron optical
axis an apparatus for deflecting an electron beam to irradiate a
location on the specimen comprising:
A. a deflection stage equipped with deflecting coils L.sub.1x and
L.sub.1y for generating magnetic fields, said fields being
substantially at right angles to each other and perpendicular to
the optical axis;
B. a deflecting current supply for supplying individual coil
currents I.sub.1x and I.sub.1y to coils L.sub.1x and L.sub.1y
respectively, said individual coil currents being the total of a
plurality of individually controlled analog currents, such that
I.sub.1x = i.sub.1x1 + i.sub.1x2 and I.sub.1y + i.sub.1y1 +
i.sub.1y2 and means for varying the analog currents i.sub.1x1 and
i.sub.1y1 to control coil currents and vary the deflection of the
electron beam.
Description
In order to observe a dark field image and an electron diffraction
pattern by means of an electron microscope, it is necessary to
irradiate the specimen with the electron beam at various angles of
inclination or azimuth. To this end, electron beam deflecting
devices incorporating two deflecting stages, each stage being
provided with two pairs of deflecting coils have been used.
Further, in this arrangement, the respective magnetic fields
produced by each pair of coils are perpendicular to the optical
axis and at right angles to each other. Utilizing this electron
beam deflecting apparatus, the electron beam generated by the
electron beam gun is deflected through an angle .alpha. by the
first electron deflecting stage and through an angle .beta., which
is proportional and opposite to .alpha., by the second electron
deflecting stage. The specimen is thus irradiated at an inclination
equal to the difference between angles .alpha. and .beta.. It
should be noted that tan .alpha. is proportional to tan .beta..
However, in a conventional electron microscope, since both angles
.alpha. and .beta. are very small, the angles themselves are
substantially proportional.
A drawback of this arrangement, however, is the difficulty in
producing coils whose magnetic fields are exactly at right angles
to each other and deflecting stages which are accurately parallel
with respect to each other. As a result, it is extremely difficult
during specimen observation to prevent the irradiation spot from
shifting. One attempt to overcome the above defect is described,
for example, in German Pat. specification (Auslegeschrift)
1,299,088 where additional deflecting coils have been incorporated
as compensators in the deflecting stages. Operation of this
apparatus is facilitated by controlling the deflecting current of
the compensation coils in accordance with the deflecting current of
the regular coils. However, in this arrangement, as a result of
resorting to the provision of additional coils in order to surmount
the original defect, secondary defects have ensued. These are
mainly in connection with the increased size of the deflecting
stages, plFs the added difficulty of manufacturing this more
complicated deflecting means with sufficiently precision
orientation. In short, the above embodiment is feasible in theory
but not in practice.
It is an advantage of electron beam deflection devices according to
this invention that they overcome the shortcomings inherent in
conventional apparatus and at the same time are easy to
manufacture. Further, they are easy to operate, whereby the
deflection current is automatically controlled, in accordance with
the variable incident angle, so as to fix the position irradiated
by the electron beam. Still further, the present invention provides
a deflecting device which facilitates comparison of the dark field
image and bright field image in the same area of an elcectron
miscroscope specimen.
The full advantage and novelty of the present invention will be
more readily understood by reading the following detailed
description in connection with the appended drawings wherein:
FIG. 1a and FIG. 1b are diagrammatic views of the deflecting stages
in accordance with the conventional apparatus;
FIGS. 2,3,4 and 5 are block schematics showing the deflecting
current supply according to the present invention;
FIG. 6 is an explanatory diagram of the irradiating electron beam
path in the deflecting apparatus according to the present
invention;
FIG. 7 is a diagram ilustrating alignment of the irradiating
electron beam by the deflecting apparatus; and,
FIG. 8 is a schematic diagram showing a preferred circuit
incorporating the elements shown in FIGS. 2 and 6 for controlling
the beam deflection of an electron microscope.
Referring to FIGS. 1a and 1b (showing different but analogous
embodiments of this invention), four coils 2a, 2b, 3a and 3b are
wound onto a core 1 whose center axis Z aligns with the optical
axis. Coils 2a and 2b generate a magnetic field in the direction of
the x-axis and coils 3a and 3b generate a magnetic field in the
direction of the y-axis.
FIG. 2 is a circuit diagram of the deflecting current supply
according to this invention. Coil L through which current I flows
represents any one of the coils 2a, 2b, 3a and 3b shown in FIG. 1.
Current I is equal to the sum of the current i.sub.s flowing
through resistor Rs and the current i.sub.o flowing through
resistor R.sub.L. However, since i.sub.o is normally quite
negligible, current I is substantially equal to i.sub.s.
Current i.sub.o is equal to the sum of the currents i.sub.1 ,
i.sub.2 , and i.sub.3 , flowing through resistors r.sub.1 , r.sub.2
, and r.sub.3 , respectively. By means of the operational or
differential amplifiers 6 and 7 (power supplies not shown for
simplicity) the following relationships were established:
I .apprxeq. i.sub.s = E's/R.sub.s (1)
E's = - R.sub.L .sup.. i.sub.o (2)
Hence,
I = -(R.sub.L /R.sub.s) .sup.. i.sub.o
= - (R.sub.L /R.sub.s) .sup.. i.sub.1 - R.sub.L /R.sub. s .sup..
i.sub.2 - R.sub.L /R.sub.s .sup.. i .sub.3
= - (R.sub.L .sup.. Ei.sub.1 /R.sub.s) .sup.. (1 /r.sub.2 ) -
(R.sub.L .sup.. Ei.sub.2 /R.sub.s) .sup.. (1/r.sub.2) - (R.sub.L
.sup.. Ei.sub.3 /R.sub.s) .sup.. (1/r.sub.3)
(3)
It is apparent from equation (3) that the deflecting current I is
independently determined by the variable resistors R.sub.1 ,
R.sub.2 , and R.sub.3 .
FIG. 3 shows another embodiment of the deflecting current supply
incorporating two current control transistors 11 and 12. Here, the
input voltage Ei of the operational or differential amplifier 9 is
substantially equal to voltage E's. Accordingly, the following
relationships were established:
I = i.sub.s = E' s/R.sub.s = Es/R.sub.s (4)
Es = - R.sub.L.sup.. i.sub.o (5)
Now, since current i.sub.o , is equal to the sum of the currents
i.sub.1 , i.sub.2 , and i.sub.3 , flowing through resistors r.sub.1
, r.sub.2 , and r.sub.3 , respectively, the following relationship
is established:
I = -(R.sub.L /R.sub.s) .sup.. i.sub.o
= - (R.sub.L /R.sub.s) i.sub.1 .sup.. (R.sub.L /Rs) i.sub. 2 -
(R.sub.L /Rs) i.sub.3
= - (R.sub.L .sup.. Ei.sub.1 /R.sub.S) .sup.. (1/r.sub.1) -
(R.sub.L .sup.. Ei.sub.2 /R.sub. s ) .sup.. (1/r.sub.2) -
(R.sub.L.sup.. Ei.sub.3 /R.sub.s) .sup.. (1/ r.sub.3) ta (6)
It is thus apparent from equation (6) that the circuit described in
FIG. 3 can substitute for that described in FIG. 2.
FIG. 4 shows yet another embodiment of the deflecting current
supply this time incorporating three current control resistors 13,
14 and 15. Here, currents I.sub.1 , I.sub.2 , and I.sub.3 flowing
through transistors 13, 14 and 15 respectively, produce current I
flowing through coil L. Expressed algebraically:
I = I.sub.1 - I.sub.2 -I.sub.3 (7 )
Thus, by controlling input voltages Es.sub.1 , Es.sub.2 and
Es.sub.3 of the operational or differential amplifiers 16, 17 and
18, the deflecting current I can be controlled in the same way as
in FIG. 2.
FIG. 5 shows a further embodiment of the deflecting current supply
incorporating operational or differential amplifiers 19 and 20.
Here current I.sub.1 and I.sub.2 , flowing through resistors
R.sub.1 and R.sub.2 , respectively, produce current I flowing
through coil L, expressed algebraically, equation (7) can be
expressed as:
I = Ei .sup.. ?1/Rs) + (1/R.sub.1) + (1/R.sub.2)! - (e.sub.1
/R.sub.1) - (e.sub.2 /R.sub.2)
(8)
thus, by controlling variable resistors r.sub.1 , r.sub.2 and
r.sub.3 , voltages Ei, e.sub.1 and e.sub.2 are controlled thereby
determining the deflecting current I the same way as in FIG. 2.
In the case of the deflecting current supplies described with
reference to FIGS. 2 to 5, there are three independent currents.
This number, however, can be easily increased or decreased as
required.
The method of deflecting an irradiating electron beam by means of
the deflecting apparatus as described in the aforegoing will be
apparent in the following.
Referring to FIGS. 6 and 8, the deflecting current I.sub.1 x for
generating the magnetic field in the x-axis direction in the first
deflecting stage is expressed as follows:
I.sub.1 x = i.sub.1 x.sub.1 + i.sub.1 x.sub.2 + i.sub.1 x.sub.3
(9)
Similarly, the deflecting current I.sub.1 y for generating the
magnetic field in the y-axis direction in the first deflecting
stage, the deflecting current I.sub.2 x for generating the magnetic
field in the x-axis direction in the second deflecting stage, and
the deflecting current I.sub.2 y for generating the magnetic field
in the y-axis direction in the second deflecting stage are
expressed as follows:
I.sub.1 y = i.sub.1 y.sub.1 + i.sub.1 y.sub.2 + i.sub.1 y.sub.3
(10)
I.sub.2 x = i.sub.2 x.sub.1 + i.sub.2 x.sub.2 (11)
I.sub.2 Y = i.sub.2 Y, + i.sub.2 Y.sub.2 (12)
in the conventional type deflecting apparatus as used with an
electron microscope, the irradiating electron beam is deflected in
the amount .theta.ox1 by the first deflecting stage and is the
amount .theta.ox2 by the second deflecting stage, so as to
irradiate a point 28 where the optical axis intersects the plane of
specimen 27. By so doing, the irradiation angle .theta. is
controlled. However, since the magnetic field generated by the
first deflecting stage in the x-axis direction and the magnetic
field generated by the second deflecting stage in the x-axis
direction are not absolutely parallel, a component of the magnetic
field in the y-axis direction is inadvertently generated, resulting
in the irradiating electron beam being deflected in the amount
.theta..sub.1 x in the said direction. Such being the case, it is
extremely difficult to prevent the irradiation spot from shifting
without the aid of either one or both y-axis magnetic fields to act
as shift compensators.
Since .theta.ox.sub.1, .theta.ox.sub.2, .theta..sub.1 x and .theta.
are proportional to each other, it is possible to determine the
proportional coefficient existing between .theta.ox.sub.1,
.theta.ox.sub.2 and .theta..sub.1 x and that existing between
i.sub.1 x.sub.1, i.sub.2 x.sub.1 and i.sub.1 y.sub.2. The
deflecting current supply circuit is designed to satisfy the
relation between i.sub.1 x.sub.1, i.sub.2 x.sub.1 and i.sub.1
y.sub.2 by, for example, interlocking variable resistors r.sub.1,
r.sub.2 and r.sub.3 in FIG. 2.
By designing the deflecting current supply circuit as described
above, the irradiating electron beam in the x-axis direction is
fully controlled. Similarly, by controlling i.sub.1, y.sub.1,
i.sub.2 y.sub.1 and i.sub.1 x.sub.2, the irradiating electron beam
in the y-axis direction is also fully controlled. As a result, the
irradiating electron beam in any azimuth is fully controlled.
Referring to FIG. 8, in order to control the deflecting current
component i.sub.1 x.sub.1, it is necessary to control variable
resistor r.sub.1 x.sub.1. Similarly, to control i.sub.2 x.sub.1, it
is necessary to control r.sub.2 x.sub.1, and to control i.sub.1
y.sub.2, r.sub.1 y.sub.2 must be controlled.
The deflecting angle .theta.ox.sub.1 as shown in FIG. 6 is
controlled by i.sub.1 x.sub.1 in turn controlled by r.sub.1
x.sub.1. Similarlyy, .theta.ox.sub.2 and .theta..sub.1 x are
controlled by i.sub.2 x.sub.1 and i.sub.1 y.sub.2 respectively, in
turn controlled by r.sub.2 x.sub.1 and r.sub.1 y.sub.2
respectively.
A plurality of individually adjustable potentiometers provides
current to the individual deflection coils because r.sub.1 x.sub.1,
r.sub.2 x.sub.1 and r.sub.1 y.sub.2 (interlocked to form control
Dx) must be controlled proportionally, in order to satisfy the
proportionally of .theta.ox.sub.1, .theta.ox.sub.2, .theta..sub.1 x
and .theta. whose said proportionality is necessary to prevent the
irradiation spot from shifting.
Similarly, r.sub.1 y.sub.1, r.sub.2 y.sub.1, and r.sub.1 x.sub.2
(interlocked to form control Dy) are used to deflect the
irradiation electron beam in the y-axis direction.
Variable resistors r.sub.1 x.sub.3 , r.sub.1 y.sub.3 , r.sub.2
x.sub.2 and r.sub.2 y.sub.2 are utilized to control the alignment
deflecting current. Normally, these four resistors are controlled
individually.
Thus far, it has been assumed that the irradiating electron beam
aligns with the optical axis. If not, the beam must be either
aligned mechanically by shifting the position of the electron beam
generator or deflected electromagnetically. In the case of the
latter, two deflecting stages are necessary.
Referring to FIG. 7, the irradiating electron beam is deflected by
the first deflecting stages 31a so as to intersect the cross point
between the optical axis and the second deflecting stages 31b. It
is then further deflected by 31b so as to align with the optical
axis.
In order to effect the above alignment, the conventional deflecting
apparatus requires additional deflecting coils. This is not so in
the deflecting apparatus according to this invention, the
deflecting currents i.sub.1 x.sub.3, i.sub.1 y.sub.3, i.sub.2
x.sub.2 and i.sub.2 y.sub.2 refer to equations (9), (10), (11) and
(12) being used in lieu.
In order to observe a bright field image with the apparatus
according to this invention, the deflecting current i.sub.1 x.sub.1
, i.sub.1 x.sub.2 , 1 y.sub.2 , i.sub.1 y.sub.1 , i.sub.2 x.sub.1
and i.sub.2 y.sub.1 are set to zero and the deflecting currents
i.sub.1 x.sub.3 , i.sub.1 y.sub.3 , i.sub.2 x.sub.2 and i.sub.2
y.sub.2 are used for alignment purposes. Again, in order to observe
a dark field image, the deflecting currents i.sub.1 x.sub.3 ,
i.sub.1 y.sub.3 , i.sub.2 x.sub.2 and i.sub.2 y.sub.2 are used for
alignment purposes and the deflecting currents i.sub.1 x.sub.1 ,
i.sub.1 x.sub.2 , i.sub.1 y.sub.1 , i.sub.1 y.sub.2 , i.sub.2
x.sub.1 and i.sub.2 y.sub.1 are used for controlling the
inclination of the irradiating electron beam. irradiating electron
beam.
Accordingly, by incorporating deflecting current changeover
switches, comparison of the bright and dark field images with the
same areas of the specimen will be appreciably facilitated.
Sometimes, an electron deflecting apparatus incorporating only one
deflecting stage is used for alignment. In such cases, it is
possible to facilitate alignment by incorporating the deflecting
current supply according to this invention since the two
directional magnetic fields can be accurately orientated at right
angles to each other by supplying compensating curent to one of the
two deflecting coils for generating the said two directional
magnetic fields by the said deflecting current supply.
Having thus described my invention with the detail and
particularity as required by the Patent Laws, what is desired
protected by Letters Patent is set forth in the following
claims.
* * * * *