U.S. patent number 11,105,681 [Application Number 16/203,536] was granted by the patent office on 2021-08-31 for spectroscopy cavity with digital activation of millimeter wave molecular headspace.
This patent grant is currently assigned to TEXAS INSTRUMENTS INCORPORATED. The grantee listed for this patent is Texas Instruments Incorporated. Invention is credited to Benjamin Stassen Cook, Adam Joseph Fruehling, Juan Alejandro Herbsommer, Simon Joshua Jacobs.
United States Patent |
11,105,681 |
Fruehling , et al. |
August 31, 2021 |
Spectroscopy cavity with digital activation of millimeter wave
molecular headspace
Abstract
Millimeter wave energy is provided to a spectroscopy cavity of a
spectroscopy device that contains interrogation molecules. The
microwave energy is received after it traverses the spectroscopy
cavity. The amount of interrogation molecules in the spectroscopy
cavity is adjusted by activating a precursor material in one or
more sub-cavities coupled to the spectroscopy cavity by a diffusion
path to increase the amount of interrogation molecules or by
activating the getter material in one or more sub-cavities coupled
to the spectroscopy cavity by a diffusion path to decrease the
amount of interrogation molecules.
Inventors: |
Fruehling; Adam Joseph
(Garland, TX), Cook; Benjamin Stassen (Addison, TX),
Jacobs; Simon Joshua (Lucas, TX), Herbsommer; Juan
Alejandro (Allen, TX) |
Applicant: |
Name |
City |
State |
Country |
Type |
Texas Instruments Incorporated |
Dallas |
TX |
US |
|
|
Assignee: |
TEXAS INSTRUMENTS INCORPORATED
(Dallas, TX)
|
Family
ID: |
1000005776002 |
Appl.
No.: |
16/203,536 |
Filed: |
November 28, 2018 |
Prior Publication Data
|
|
|
|
Document
Identifier |
Publication Date |
|
US 20200166404 A1 |
May 28, 2020 |
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G04F
5/14 (20130101); G01J 3/0289 (20130101); G01J
3/42 (20130101); G01J 3/0205 (20130101); H04B
1/38 (20130101); G01N 22/00 (20130101) |
Current International
Class: |
G01J
3/02 (20060101); G04F 5/14 (20060101); G01J
3/42 (20060101); H04B 1/38 (20150101); G01N
22/00 (20060101) |
Field of
Search: |
;331/3,94.1
;250/251,432R |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
"Hermetically Sealed Molecular Spectroscopy Cell with Buried Ground
Plane", U.S. Appl. No. 15/697,505, filed Sep. 7, 2017, pp. 1-28.
cited by applicant .
"Launch Structures for a Hermetically Sealed Cavity", U.S. Appl.
No. 15/681,541, filed Aug. 21, 2017, pp. 1-27. cited by applicant
.
"Hermetically Sealed Molecular Spectroscopy Cell", U.S. Appl. No.
15/697,525, filed Sep. 1, 2017, pp. 1-21. cited by applicant .
"Methods for Depositing a Measured Amount of a Species in a Sealed
Cavity", U.S. Appl. No. 15/698,706, pp. 1-20. cited by applicant
.
"Hermetically Sealed Molecular Spectroscopy Cell with Dual Wafer
Bonding", U.S. Appl. No. 15/698,346, pp. 1-21. cited by
applicant.
|
Primary Examiner: Kinkead; Arnold M
Attorney, Agent or Firm: Davis, Jr.; Michael A. Brill;
Charles A. Cimino; Frank D.
Claims
What is claimed is:
1. A device comprising: a substrate having a spectroscopy cavity
and first, second, third and fourth sub-cavities, the spectroscopy
cavity coupled to the first sub-cavity by a first diffusion path
and to the second sub-cavity by a second diffusion path to form a
shared headspace; gaseous interrogation molecules within the shared
headspace; first trimming material within the first and third
sub-cavities; and second trimming material within the second and
fourth sub-cavities.
2. The device of claim 1, further comprising a resistive heater
adjacent the first trimming material and configured to activate the
first trimming material.
3. The device of claim 1, further comprising an inductive heater
adjacent the first trimming material and configured to activate the
first trimming material.
4. The device of claim 1, wherein the first trimming material is a
precursor material for the gaseous interrogation molecules.
5. The device of claim 1, wherein the first trimming material is a
getter material for the gaseous interrogation molecules.
6. The device of claim 1, wherein the first trimming material is a
precursor material for the gaseous interrogation molecules, and the
second trimming material is a getter material for the gaseous
interrogation molecules.
7. The device of claim 1, wherein the first sub-cavity and the
second sub-cavity are located on opposite sides of the spectroscopy
cavity.
8. The device of claim 1, wherein the first sub-cavity is larger
than the second sub-cavity.
9. A device comprising: a substrate having a spectroscopy cavity
and a sub-cavity, the spectroscopy cavity coupled to the sub-cavity
by a diffusion path to form a shared headspace; gaseous
interrogation molecules within the shared headspace; trimming
material within the sub-cavity; transceiver circuitry coupled to
the spectroscopy cavity and configured to provide millimeter wave
(mmW) energy to the spectroscopy cavity and to receive a mmW signal
from the spectroscopy cavity; and control logic coupled between the
transceiver circuitry and the trimming material, the control logic
configured to activate the trimming material responsive to the
received mmW signal; wherein the substrate, the gaseous
interrogation molecules, the trimming material, the transceiver
circuitry, and the control logic are packaged together in a single
integrated circuit package.
10. A method for fabricating a spectroscopy device, the method
comprising: forming substrate having a spectroscopy cavity and
sub-cavities; forming at least one diffusion path between the
spectroscopy cavity and the sub-cavities to form a shared
headspace; placing a precursor material in a portion of the
sub-cavities and a getter material in another portion of the
sub-cavities; placing gaseous interrogation molecules within the
shared headspace; and adjusting an amount of the gaseous
interrogation molecules by projecting a laser beam into at least
one of the sub-cavities.
11. The method of claim 10, further comprising: providing
millimeter wave (mmW) energy to the spectroscopy cavity; and
receiving the mmW energy after it traverses the spectroscopy
cavity; wherein adjusting the amount of the gaseous interrogation
molecules includes activating the precursor material in at least
one of the sub-cavities to increase the amount of the gaseous
interrogation molecules or activating the getter material in at
least one of the sub-cavities to decrease the amount of the gaseous
interrogation molecules, while using a feedback loop to lock onto
an absorption dip in the mmW energy received from the spectroscopy
cavity.
12. The method of claim 10, wherein adjusting the amount of the
gaseous interrogation molecules includes adjusting the amount of
the gaseous interrogation molecules in the spectroscopy cavity
while the spectroscopy device is deployed in a system.
13. The method of claim 10, wherein adjusting the amount of the
gaseous interrogation molecules includes energizing a heater
element adjacent the precursor material or adjacent the getter
material.
14. A method for operating a spectroscopy device, the method
comprising: providing millimeter wave (mmW) energy to a
spectroscopy cavity of the spectroscopy device, wherein the
spectroscopy cavity is coupled to sub-cavities with a shared
headspace that contains interrogation molecules; receiving the mmW
energy after it traverses the spectroscopy cavity; and adjusting an
amount of the interrogation molecules by projecting a laser beam
into at least one of the sub-cavities to activate: a precursor
material in at least one of the sub-cavities to increase the amount
of the interrogation molecules; or a getter material in at least
one of the sub-cavities to decrease the amount of the interrogation
molecules.
15. The method of claim 14, wherein adjusting the amount of the
interrogation molecules includes using a feedback loop to lock onto
an absorption dip in the mmW energy received from the spectroscopy
cavity.
16. The method of claim 14, wherein adjusting the amount of the
interrogation molecules includes energizing a heater element
adjacent the precursor material or adjacent the getter
material.
17. The device of claim 9, wherein the trimming material is a
precursor material for the gaseous interrogation molecules.
18. The device of claim 9, wherein the trimming material is a
getter material for the gaseous interrogation molecules.
Description
TECHNICAL FIELD
This relates to digital control and tuning of the molecular
headspace within a spectroscopy cavity.
BACKGROUND
Spectroscopy is the study of the interaction between matter and
electromagnetic radiation. Spectroscopy originated through the
study of visible light dispersal according to its wavelength by a
prism. Spectroscopy includes the study of any interaction with
radiative energy as a function of its wavelength or frequency.
Spectroscopic data are often represented by an emission spectrum,
which is a plot of the response of interest as a function of
wavelength or frequency. Spectra of atoms and molecules often are
represented by a series of spectral lines, each one representing a
resonance between two different quantum states.
An atomic clock is a clock device that uses a quantum transition
frequency in the microwave, optical, or ultraviolet region of the
electromagnetic spectrum of atoms as a frequency standard for its
timekeeping element. Atomic clocks are the most accurate time and
frequency standards known and are used as primary standards for
international time distribution services, to control the wave
frequency of television broadcasts, and in global navigation
satellite systems such as GPS.
The band of radio frequencies in the electromagnetic spectrum from
30 to 300 gigahertz (GHz) is designated as "extremely high
frequency" (EHF) by the International Telecommunication Union
(ITU). It lies between the super high frequency band (3-30 GHz) and
the far infrared band (0.1-10 THz). Radio waves in this band have
wavelengths from ten to one millimeter, giving it the name
millimeter band or millimeter wave, sometimes abbreviated "MMW" or
"mmW."
SUMMARY
Millimeter wave energy is provided to a spectroscopy cavity of a
spectroscopy device that contains interrogation molecules. The
microwave energy is received after it traverses the spectroscopy
cavity. The amount of interrogation molecules in the spectroscopy
cavity is adjusted by activating a precursor material in one or
more sub-cavities coupled to the spectroscopy cavity by a diffusion
path to increase the amount of interrogation molecules or by
activating the getter material in one or more sub-cavities coupled
to the spectroscopy cavity by a diffusion path to decrease the
amount of interrogation molecules.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is an isometric cross-sectional view of an example
hermetically sealed cavity and sub-cavity that may be used as a
spectroscopy cavity.
FIGS. 2A-2H illustrates fabrication of the example spectroscopy
cavity and sub-cavity.
FIG. 3 is a cross-sectional view of an example spectroscopy cavity
with multiple sub-cavities illustrating movement of interrogation
molecules between the cavities.
FIGS. 4A-4B are a cross-sectional view and a top view of an example
device using laser activation of trimming material in
sub-cavities.
FIGS. 5A-5B are a cross-sectional view and a top view of an example
device using resistive heater activation of trimming material in
sub-cavities.
FIGS. 6A-6B are a cross-sectional view and a top view of an example
device using inductive heater activation of trimming material in
sub-cavities.
FIG. 7 is an isometric cross-sectional view of another example
hermetically sealed cavity and sub-cavity that may be used as a
spectroscopy cavity.
FIG. 8 is a block diagram of an example clock generator system that
includes a spectroscopy cavity.
FIG. 9 is a flow diagram of operation of an example spectroscopy
cavity.
DETAILED DESCRIPTION
In the drawings, like elements are denoted by like reference
numerals for consistency.
Various applications may include a sealed spectroscopy chamber
formed in a semiconductor structure. Although there are numerous
applications of a sealed chamber, in one example a chip-scale
atomic clock may include a selected vapor at a low pressure in a
sealed spectroscopy chamber.
For an integrated mmW (millimeter wave) atomic clock, extreme
control of the gaseous environment is critical for clock stability
and accuracy. During fabrication of an integrated circuit mmW
spectroscopy, an interrogation gas is enclosed in a chamber by
bonding together two substrates that contain a microfabricated
cavity using a bonding chamber. However, production scale bonding
chambers seldom have the environmental control precision to achieve
the requisite pressure levels and gas concentrations in the
microfabricated cavity. Furthermore, several of the species of
interrogation gas that are most desirable for atomic clock vapor
cells are toxic or hazardous and require special handling that
would not be compatible with a production bonding chamber used for
multiple processes.
An example fabrication process to address the formation of such
chemicals within a hermetically sealed headspace is described in
U.S. patent application Ser. No. 15/698,706 entitled "Methods for
Depositing a Measured Amount of a Species in a Sealed Cavity",
filed Sep. 8, 2017 and is incorporated by reference herein. Even if
an appropriate bonding pressure, gas density, and precursor
deposition is achieved in a dedicated chamber, the lot-to-lot
variability may exceed the precision requirements for an atomic
frequency reference. Furthermore, across the lifetime and operating
conditions of a device, drift may occur and therefore post
fabrication trimming of the gas density and/or pressure is
useful.
As will be described in more detail hereinbelow, by providing
co-fabricated sub-cavities with shared headspace to the mmW
spectroscopy cavity that each contain pre-deposited precursor
and/or active gettering material, the spectroscopy cavity headspace
can be precisely tuned post-fabrication. By appropriate placement
and construction, such sub-cavities can be fabricated without
interfering with the RF performance of the spectroscopy cell.
Post-fabrication trim can be achieved by several wafer scale
activation methods including: laser heating, inductive/resistive
heating, fuse blow on test, etc. The specific method for trim will
depend upon whether system level requirements require open or
closed loop pressure control.
As will be described in more detail herein below, an onboard
locking method may be coupled to the sub-cavities and used to
actively control active pressure and molecular release in order to
extend part lifetime and improve clocking stability.
Post-assembly trim, active monitoring, and control of pressure
alongside selective release of the interrogated molecule
dramatically improves device performance and manufacturing
tolerance.
FIG. 1 is an isometric cross-sectional view of an example device
100 that includes a hermetically sealed cavity 121 that may be used
as a spectroscopy cavity and sub-cavity 122. In this example, a
single sub-cavity 122 is illustrated, however, as described in more
detail hereinbelow, multiple sub-cavities may be included within a
single device. Each sub-cavity 122 is coupled to cavity 121 by a
diffusion path 124 to form a shared headspace that allows
interrogation molecules to be sourced or gettered by the sub-cavity
122 to thereby trim the gas pressure and density within the
headspace of cavity 121.
In this example, cavity 121 and sub-cavity 122 are microfabricated
in a first substrate 120, such as a semiconductor wafer. A second
substrate 150, such as a semiconductor wafer, is then bonded to
substrate 120 to thereby enclose cavity 121 and sub-cavity 122 to
encapsulate an interrogation gas within cavity 121. In this
example, an insulating layer 102, such as glass, is bonded to the
exposed surface of substrate 120. In some examples, an electronic
bandgap pattern 112 is patterned from a conductive layer above
insulating layer 102.
A launch structure 108 is patterned from a second conductive layer
and is coupled to transmitter circuity (not shown) by radio
frequency (RF) path 109. Launch structure 108 is also referred to
as an "antenna" herein. A matching receiver structure (not shown)
is also patterned from the second conductive layer and coupled to a
receiver circuit. The receiver structure is also referred to herein
as an antenna. An RF signal 160 can be launched from launch
structure 108 and travel through cavity 121 and the interrogation
gas contained therein and be received by the receiver structure. An
iris 131 (not specifically shown in FIG. 1) permits electromagnetic
energy 160 to pass through the non-conductive structure 102 from
the antenna 108 to the cavity 121.
The hermetically sealed cavity 121 contains selected dipolar
molecules of an interrogation gas at a pressure chosen to optimize
the amplitude of a signal absorption peak of RF signal 160 detected
at the receiver structure of the cavity. In this example, cavity
121 contains a plurality of dipolar molecules (e.g., water
molecules) at a relatively low pressure. For some examples, the
pressure may be approximately 0.1 mbarr for water molecules.
Nonlimiting examples of suitable electrical dipolar material gases
include water, carbonyl sulfide (OCS), acetonitrile (CH3CN) and
hydrogen cyanide (HCN). In another example, argon molecules may be
used at a pressure of several atmospheres. Other examples may use
other types of known or later developed interrogation molecules and
pressures. Through closed-loop control, the frequency of RF signal
160 is dynamically adjusted to match the frequency corresponding to
the absorption peak of the molecules in cavity 121.
The dimensions of the waveguide, antenna, EBG, and size and
positioning of the iris are all design considerations based on
frequency of the quantum transition selected from the molecular
species inside the cavity. The required bandwidth of the structure
depends upon the fabrication tolerances achievable in
manufacturing.
FIGS. 2A-2I illustrate a sequence of process steps to fabricate the
hermetically sealed cavity 121 and sub-cavity 122 of example device
100 (FIG. 1). In this example, a single sub-cavity 122 is
illustrated. However, other examples may include additional
sub-cavities that are fabricated in the same manner as described
hereinbelow.
At FIG. 2A, a layer 101 of conductive material is deposited on a
surface of substrate 120. A non-conductive structure 102 is then
bonded to conductive layer 104 on substrate 120 to form a
non-conductive aperture for the substrate 120. In this example, the
non-conductive structure 102 is glass, but the nonconductive
structure 102 can be other than glass in other examples such as
ceramic or silicon. The substrate 120 is a semiconductor substrate
(e.g., silicon) in this example, but can be other than a
semiconductor substrate in other examples, such as a ceramic
material or a metallic cavity. In this example, a glass sheet 102
that is approximately 130-300 micrometers (dependent on
interrogation wavelength) thick is bonded to a surface of
semiconductor wafer 120. The process to bond the non-conductive
structure 102 to conductive layer 104 on substrate 120 may comprise
an anodic, fusion, eutectic solder, transition liquid phase (TLP),
cofiring, or other suitable bonding processes.
FIG. 2B illustrates a second metal layer that has been deposited on
a surface of the non-conductive structure 102 opposite the
substrate 120 and patterned to form antenna 108. The metal layer
104 is a suitable metal material such as aluminum, copper, gold,
etc. The conductive layer 104 is a ground plane for the antenna 108
patterned on the upper surface of the non-conductive structure 102.
Antenna 108 has been patterned on a surface of the first dielectric
layer 102 opposite the metal layer 104. The antenna 108 is
patterned by removing a portion of a metal layer of a conductive
material such as copper or gold. RF path 109 (FIG. 1) is also
patterned from the same layer of conductive material and is
connected to antenna 108 so that an electrical signal can be
provided to the antenna or received from the antenna.
In some examples, one antenna is used to both transmit and receive
signals. In other examples, a pair of antennas is patterned on the
dielectric layer, and one antenna is used to launch a signal into
the cavity and another antenna is used to receive a signal from the
cavity 121. In such examples, the antennas are located at or near
opposite ends of the cavity 121.
In FIG. 2C, a cavity 121 and sub-cavity 122 have been created in
the substrate 120. In this example, cavity 121 and sub-cavity 122
are wet etched into the substrate 120 using a suitable wet etchant
such as potassium hydroxide (KOH) or tetramethylammonium hydroxide
(TMAH). Alternatively, the cavity 121 may be formed using other
known or later developed etching techniques such as: reactive-ion
etching (RIE), deep reactive-ion etching (DRIE), or isotropic
etching. Cavity 121 and sub-cavity 122 are etched from the surface
126 of the substrate 120 opposite the non-conductive structure 102
to the nonconductive structure 102 thereby exposing a portion of
the non-conductive structure 102.
FIG. 2D illustrates another metal layer 130 that has been deposited
on a surface of the substrate 120 opposite the non-conductive
structure 102. The metal layer 130 also is deposited in the cavity
121 and sub-cavity 122 as shown.
FIG. 2E illustrates irises 131, 132 that are created in the first
conductive layer 104 and the second metal layer 130 within the
respective cavities 121, 122
FIG. 2F shows another substrate 150 on which a metal layer 152 has
been deposited. The substrate 150 may be the same or different
material as substrate 120. In this example, the substrate 150
comprises a semiconductor substrate such as a silicon wafer but can
be other than a semiconductor material in other examples.
FIG. 2G illustrates hermetic bonding structures 145 and porous
bonding structures 146 that are deposited and patterned on either
or both substrates 120 and 150. In this example, the bonding
structures comprise a gold, aluminum, silicon or other type of
material that form an alloy when heated to a suitable temperature.
In this example, porous bonding structures 146 have channels etched
to allow the interrogation gas to diffuse between cavity 121 and
sub-cavity 122. In another example, porous bonding structure 146
may be fabricated using a porous material. In another example, a
powdered material may be sintered to form porous bonding structures
146. In each example, a shared headspace is formed between cavity
121 and sub-cavity 122.
Trimming material 252 is placed on a region of substrate 150 that
will be enclosed within sub-cavity 122. The use of trimming
material 251 will be described in more detail hereinbelow. Prior to
bonding substrate 150 to substrate 120, a gas containing selected
interrogation molecules 251 is introduced into cavity 121. In this
example, interrogation molecules 251 are also introduced into
sub-cavity 122. In this example, the gas containing interrogation
molecules 251 is placed in a bonding chamber at a selected pressure
and density prior to bonding substrate 150 to substrate 120. Other
known or later developed techniques may be used to introduce an
initial density/pressure of interrogation molecules into chamber
121. As mentioned hereinabove, U.S. patent application Ser. No.
15/698,706 describes several techniques for depositing a measured
amount of a selected interrogation species in a sealed cavity.
FIG. 2H illustrates the resulting device that includes a
hermetically sealed region that includes cavity 121 and sub-cavity
122 formed by hermetic seal structure 145. A diffusion path 124
through porous sealing structure 146 allow molecules 251 to diffuse
between cavity 121 and sub-cavity 122. In this manner,
interrogation molecules 251 are enclosed within the cavity 121, but
may be increased or decreased by diffusion to/from sub-cavity 122.
In this example, hermetically sealed cavity 121 contains dipolar
molecules (e.g., water molecules) at an internal pressure of less
than, in one example, 0.15 mbars.
FIG. 3 is a cross-sectional view of a portion of an example device
300 that includes a spectroscopy cell 321 with multiple sub-cells
322, 323 illustrating movement of interrogation molecules 351
between the shared headspace of the spectroscopy cell and the
sub-cells. Device 300 is similar to device 100 (FIG. 1) and is
fabricated in a similar manner.
In this example, cell 321 and sub-cells 322, 323 include cavities
121, 122, 123 respectively that are microfabricated in a first
substrate 320, such as a semiconductor wafer. A second substrate
350, such as a semiconductor wafer, is then bonded to substrate 320
to thereby enclose cavity 121 and sub-cavities 122, 123 to
encapsulate an interrogation gas 351 within cavity 121. A metal
layer 304 is deposited on a surface of the substrate 320. The metal
layer 304 is a suitable metal material such as copper, gold, etc.
and acts as a ground plane. In this example, an insulating layer
302, such as glass, is bonded to the exposed surface metal layer
304. A first iris 331, a second iris 332 and a third iris 333 have
been patterned in the metal layer 304. A launch structure 308 is
patterned from a second conductive layer formed on a surface of
insulating layer 302 and is coupled to transmitter circuity (not
shown) by radio frequency (RF) path (not shown).
As described in more detail hereinabove, hermetic bonding
structures 345 and porous bonding structures 346 are deposited and
patterned on either or both substrates 320 and 350. In this
example, the bonding structures comprise a gold, aluminum, silicon
or other type of material that form an alloy when heated to a
suitable temperature. In this example, porous bonding structures
346 have channels etched to allow the interrogation gas to diffuse
between cell 321 and sub-cells 322, 323 in a shared headspace.
In this example, a precursor material 352 for interrogation
molecules 351 is deposited on a region of substrate 350 that will
be encapsulated within sub-cell 322. Similarly, a getter material
353 for interrogation molecules 351 is deposited on a region of
substrate 350 that will be encapsulated within sub-cell 323. In
another example, the location of precursor material 352 and getter
material 342 may be reversed.
After fabrication of device 300 is complete, the density/pressure
of interrogation molecules 351 within cell 321 may be increased by
activation of precursor material 352 or may be decreased by
activation of getter material 353. Interrogation molecules 351 can
diffuse between cell 321 and sub-cells 322, 323 via diffusion paths
324, 325 that traverse through porous bonding structures 346, as
will be described in more detail hereinbelow.
In this figure, two sub-cells are illustrated. However, in various
examples many sub-cells may be provided, as will be described in
more detail hereinbelow. Sub-cells may be positioned on all sides
of cell 321. Cell 321 may be in a serpentine or split structure to
increase mmW absorption path length or SNR (signal to noise ratio).
Sub-cells may be interspersed throughout the design.
FIG. 4A is a cross-sectional view and FIG. 4B is a top view of a
portion of the example device 300 (FIG. 3) using laser activation
of trimming material 352, 353 in sub-cells 322, 323 respectively.
FIG. 4B illustrates columns of sub-cells 322, 323 on one side of
cell 321 and columns of sub-cells 326, 327 on an opposite side of
cell 321. Sub-cells 326 are similar to sub-cells 323 and include
getter material 353. Sub-cells 327 are similar to sub-cells 322 and
include precursor material 352.
FIG. 4B illustrates how hermetic seal structure 345 surrounds cell
321 and all the sub-cells 322, 323, 326, 327. Porous bond
structures 346 allow interrogation molecules 351 to diffuse between
cell 321 and the sub-cells in a shared headspace in response to
activation of the trimming material 352, 353 included within the
sub-cells.
In this example, a laser beam, such as laser beam 371, 372, 373,
may be projected into any of the sub-cells 322, 323, 326, 327
through an iris, such as iris 332, 333, that is fabricated in each
sub-cell as described in more detail hereinabove. For example,
laser beam 371 may be projected into sub-cell 322 to thereby heat
precursor material 352 and cause precursor material 352 to release
additional interrogation molecules 351 that diffuse through porous
seal structure 346 and thereby increase the density/pressure of
interrogation molecules within cell 321. Similarly, laser beam 372
may be projected into sub-cell 323 to thereby heat getter material
353 and cause getter material 353 to combine with a portion of the
interrogation molecules 351 that diffuse through porous seal
structure 346 and thereby decrease the density/pressure of
interrogation molecules within cell 321.
In this example, each of the sub-cells in each of the columns of
sub-cells is approximately the same size and contain approximately
the same amount of trimmer material 352 or 353. In another example,
some sub-cells may be larger than other sub-cells and contain
different amounts of trimmer material 352 or 353. Despite
illustration as equal sized cells for simplicity, practical
implementation may size some cells with a 2.sup.n or other
exponential relationship.
FIG. 5A is a cross-sectional view and FIG. 5B is a top view of a
portion of another example device 500 that uses a resistive heater
to activate trimming material 352, 353 in sub-cells 522, 523
respectively. FIG. 5B illustrates columns of sub-cells 522, 523 on
one side of cell 321 and columns of sub-cells 526, 527 on an
opposite side of cell 321. Sub-cells 526 are similar to sub-cells
523 and include getter material 353. Sub-cells 527 are similar to
sub-cells 522 and include precursor material 352.
Device 500 is similar to device 300 (FIG. 3) and may be fabricated
in a similar manner. However, device 500 includes a resistive
heater element positioned beneath each portion of trimming
material, such as resistive heating elements 571, 572. In this
example, irises 332, 333 (FIG. 3) are not needed since the
resistive heaters provide activation heat of the trimming material
included within each sub-cell. Separate connections, such as heater
leads 574, 575 are provided to each heater element in all the
sub-cells. A return path to ground or to another voltage source is
provided for each heater element.
FIG. 5B illustrates how hermetic seal structure 345 surrounds cell
321 and all the sub-cells 522, 523, 526, 527. Porous bond
structures 346 allow interrogation molecules 351 to diffuse between
cell 321 and the sub-cells in a shared headspace in response to
activation of the trimming material 352, 353 included within the
sub-cells.
In this example, each heater element may be separately energized
during post fabrication testing or during operation of device 500
in the field. For example, heater element 522 in sub-cell 522 may
be energized by providing a current via heater lead 574 to thereby
heat precursor material 352 and cause precursor material 352 to
release additional interrogation molecules 351 that diffuse through
porous seal structure 346 and thereby increase the density/pressure
of interrogation molecules within cell 321. Similarly, heater
element 573 in sub-cell 523 may be energized by providing a current
via heater lead 575 to thereby heat getter material 353 and cause
getter material 353 to combine with a portion of the interrogation
molecules 351 that diffuse through porous seal structure 346 and
thereby decrease the density/pressure of interrogation molecules
within cell 321.
Each heater lead may be controlled by a fuse or may be dynamically
activated by control logic. Each heater element may be energized in
response to test equipment during testing of device 500 at the
completion of fabrication. During the operating life of device 500,
additional trimming may be performed under control of logic that is
included with device 500 or logic that is coupled to device 500, as
will be described in more detail hereinbelow.
In this example, each of the sub-cells in each of the columns of
sub-cells is approximately the same size and contain approximately
the same amount of trimmer material 352 or 353. In another example,
some sub-cells may be larger than other sub-cells and contain
different amounts of trimmer material 352 or 353.
FIGS. 6A-6B are a cross-sectional view and a top view of an example
device using inductive heater activation of trimming material in
sub-cells.
FIG. 6A is a cross-sectional view and FIG. 6B is a top view of a
portion of another example device 600 that uses an inductive heater
to activate trimming material 352, 353 in sub-cells 622, 623
respectively. FIG. 5B illustrates columns of sub-cells 622, 623 on
one side of cell 321 and columns of sub-cells 626, 627 on an
opposite side of cell 321. Sub-cells 626 are similar to sub-cells
623 and include getter material 353. Sub-cells 627 are similar to
sub-cells 622 and include precursor material 352.
Device 600 is similar to device 300 (FIG. 3) and may be fabricated
in a similar manner. However, device 600 includes an inductive
heater element positioned above each portion of trimming material,
such as inductive heater elements 671, 672. Separate connections,
such as heater leads 574, 575 are provided to each inductive
element in all the sub-cells. A return path to ground or to another
voltage source is provided for each heater element. Each inductive
element is a coil formed by etching a pattern in a conductive layer
on the surface of insulating layer 302. A high frequency signal is
selectively applied to each inductive heating element to create an
oscillating magnetic field that couples into the patch of trimming
material located adjacent each inductive heating element. Eddy
currents induced in the trimming material then create heat that
activates the trimming material. In this example, the conductivity
of the trimming material is low, so a conductive material, such as
electrically conductive material 675, 676, is placed in proximity
to each respective patch of trimming material. In this manner, the
electrically conductive material is heated by induced eddy
currents.
FIG. 6B illustrates how hermetic seal structure 345 surrounds cell
321 and all the sub-cells 622, 623, 626, 627. Porous bond
structures 346 allow interrogation molecules 351 to diffuse between
cell 321 and the sub-cells in a shared headspace in response to
activation of the trimming material 352, 353 included within the
sub-cells.
In this example, each inductive heater element may be separately
energized during post fabrication testing or during operation of
device 600 in the field. For example, inductive heating element 672
may be energized by a high frequency current via heater lead 623 to
induce a current in conductive material 675 and thereby heat
conductive material 675 and precursor material 352 located
proximate conductive material 675. and cause precursor material 352
to release additional interrogation molecules 351 that diffuse
through porous seal structure 346 and thereby increase the
density/pressure of interrogation molecules within cell 321.
Similarly, inductive heating element 673 in sub-cell 623 may be
energized by providing a high frequency current via heater lead 675
to thereby heat conductive material 676 and getter material 352
located proximate conductive material 675 and cause getter material
353 to combine with a portion of the interrogation molecules 351
that diffuse through porous seal structure 346 and thereby decrease
the density/pressure of interrogation molecules within cell
321.
Each heater lead may be controlled by a fuse or may be dynamically
activated by control logic. Each inductive heater element may be
energized in response to test equipment during testing of device
600 at the completion of fabrication. During the operating life of
device 600, additional trimming may be performed under control of
logic that is included with device 600 or logic that is coupled to
device 600, as will be described in more detail hereinbelow.
In this example, each of the sub-cells in each of the columns of
sub-cells is approximately the same size and contain approximately
the same amount of trimmer material 352 or 353. In another example,
some sub-cells may be larger than other sub-cells and contain
different amounts of trimmer material 352 or 353.
FIG. 7 is an isometric cross-sectional view of another example
device 700 that includes hermetically sealed cell 721 that may be
used as a spectroscopy cell and sub-cell 722. While only a single
sub-cell 722 is illustrated in the figure, multiple sub-cells may
be implemented as described hereinabove in more detail. Substrate
720 is shown with a conductive layer 704 bonded to non-conductive
structure 702, such as glass, with a hermetically sealed cell 721
and sub-cell 722 formed in the substrate 720. Conductive layer 704
on substrate 720 is patterned to form an iris 731, as described
hereinabove in more detail. The iris 731 permits electromagnetic
energy to pass through the non-conductive structure 702 and
conductive layer 704 from the antenna 708 into the cell 721. A
transmission line 709 also is formed on the exterior surface of the
non-conductive structure 702 and is used to convey a radio
frequency (RF) signal to/from the cell. Layer 704 provides a common
ground plane for all RF structures external to the cell 121. In
addition, it limits propagation of waves travelling in layer 720.
The dimensions of the waveguide, antenna, and size and positioning
of the iris 731 are all design considerations based on the chosen
molecular species inside the cell and the wavelength of the
interrogation waveform within the cell. The required bandwidth of
the structure depends upon the fabrication tolerances achievable in
manufacturing.
In this example, iris 731 is a chevron shape formed in conductive
layer 704. antenna 708 is illustrated as a microstrip with an end
that overlies iris 731. In other examples, various launch
structures may be used in place of antenna 704, such as an
inductive loop formed in an iris and fed by a waveguide, a
microstrip over a bowtie shaped iris, an array of vias formed in
place of an iris and fed by a waveguide, a coplanar waveguide that
is transitioned into a coaxial waveguide, etc. These and other
launch structures are described in more detail in U.S. patent
application Ser. No. 15/681,541 entitled "LAUNCH STRUCTURES FOR A
HERMETICALLY SEALED CAVITY," filed on 21 Aug. 2017, which is
incorporated by reference herein.
The various configurations of sealed chambers and trimming
techniques described hereinabove may be used for various
applications, such as laser spectroscopy, high accuracy clocks, and
other molecular transitions.
System Example
FIG. 8 is a block diagram of an example atomic clock generator 800
that includes a spectroscopy device 500. In this example, only two
sub-cells 522, 523 are illustrated for simplicity, but as described
hereinabove in more detail with regard to FIGS. 5A, 5B, device 500
may include many sub-cells similar to sub-cells 522, 523 that each
contain trimming material.
Clock generator 800 is a millimeter wave atomic clock that
generates a reference frequency signal 889 based on the frequency
of quantum rotation of selected dipolar molecules 351 contained in
hermetically sealed cell 321 formed in semiconductor material. The
reference frequency produced by quantum rotation of the selected
dipolar molecules is unaffected by circuit aging and does not vary
with temperature or other environmental factors.
Clock generator 800 includes a transceiver 880 with a transmit
output 881 for providing a millimeter wave electrical transmit
signal (TX) to cell 321, as well as a receiver input 882 for
receiving an electrical input signal (RX) from the cell 321.
Spectroscopy device 500 does not require optical interrogation, and
instead operates through electromagnetic interrogation via the
transmit and receive signals (TX, RX) provided by the transceiver
880.
Sealed cell 321 includes a conductive interior cavity surface, as
well as first and second non-conductive irises 331 and 835 formed
in the interior cavity surface for providing an electromagnetic
field entrance and an electromagnetic field exit, respectively. In
one example, irises 331, 835 magnetically couple into the TE10 mode
of the cell 321. In other examples, irises 331, 835 excite higher
order modes. First and second conductive coupling structure 308,
807 are formed on an outer surface of cell 321 proximate the first
and second non-conductive irises 331 and 835, respectively. The
coupling structures 308, 807 are antenna(s) as described
hereinabove and may include a conductive strip formed on a surface
of one of the substrates forming the cell 321. Coupling structure
308 overlies the non-conductive iris 331 for providing an
electromagnetic interface to couple a magnetic field into cell 321
from the transmit signal TX from the transceiver output 881.
Similarly, coupling structure 807 overlies the non-conductive iris
835 for providing an electromagnetic interface to couple a magnetic
field from cell 321 to the transceiver RX input 882. The proximate
location of the conductive coupling structures 308, 807 and the
corresponding non-conductive irises 331, 835 provides
electromagnetic transmissive paths through the second or upper
substrate 302 (FIG. 3), which can be any electromagnetic
transmissive material.
In this example, representative sub-cells 522, 523 have individual
heater leads 574, 575 coupled to control logic 886 on transceiver
880. In addition, heater leads from other sub-cells that are
omitted from the figure for simplicity are also included in heater
lead bundle 887 and coupled to control logic 886
In this example, transceiver circuit 880 is implemented in an
integrated circuit (IC) die, to which the cell device 500 is
electrically coupled for transmission of the TX signal via the
output 881 and for receipt of the RX signal via the input 882.
Transceiver 880 is operable when powered for providing an mmW
electrical output signal TX to the first conductive coupling
structure 308 for coupling an electromagnetic field to the interior
of the cell 321, as well as for receiving the alternating
electrical input signal RX from the second conductive coupling
structure 807 representing the electromagnetic field received from
the cell 321. The transceiver circuit 880 is operable for
selectively adjusting the frequency of the mmW output signal TX to
reduce the mmW input signal RX by interrogation to operate the
clock generator 883 at a frequency that substantially maximizes the
molecular absorption through rotational state transitions.
A reference clock signal REF_CLK 889 is provided as an output for
use by another device or system. In this example, the frequency of
reference clock 889 is reduced by a frequency divider circuit with
a divisor N from the frequency of the TX output signal 881. In
another example, the reference clock frequency may be the same as
TX output signal 881. The REF_CLK signal from the signal generator
883 can be provided to other circuitry such as frequency dividers
and other control circuits requiring use of a clock.
In this example, the transceiver 880 includes a signal generator
883 with an output 881 electrically coupled with the first
conductive coupling structure 308 for providing the mmW output
signal TX, and an output for providing the reference clock signal
REF_CLK 889 at the corresponding transmit output frequency. The
transceiver 880 also includes a lock-in amplifier circuit 885 with
an input 882 coupled from the second conductive coupling structure
807 for receiving the RX signal. The lock-in amplifier operates to
provide an error signal ERR representing a difference between the
RX signal and the electrical output signal TX. In one example, the
lock-in amplifier 606 provides the error signal ERR as an in-phase
output, and the error signal ERR is used as an input by a loop
filter 884 to provide a control output signal (CO) to the signal
generator 883 for selectively adjusting the TX output signal
frequency to maintain this frequency at a peak absorption frequency
of the dipolar molecular gas inside the sealed interior of the cell
321. In some examples, the RF power of the TX and RX loop is
controlled to avoid or mitigate stark shift affects.
The electromagnetic coupling via the non-conductive apertures 331,
835 and corresponding conductive coupling structures 308, 807
facilitates electromagnetic interrogation of the dipolar gas 351
within the cavity of cell 321. In one non-limiting form of
operation, the clock generator 800 operates with the signal
generator 883 transmitting mmW TX signals at full transmission
power at various frequencies within a defined band around a known
quantum absorption frequency at which the transmission efficiency
of the vapor cell 321 is maximum. For example, the quantum
absorption frequency associated with the dipolar water molecule is
183.31 GHz. The molecular absorption can be quite small, on the
order of less than 1%, in many cases. The signal generator 883
hunts for this dip and locks onto it. When the system operates at
the quantum frequency, a null or minima is detected at the receiver
via the lock-in amplifier 885, which provides the error signal ERR
to the loop filter 884 for regulation of the TX output signal
frequency via the control output CO signal provided to the signal
generator 883. The rotational quantum frequency of the dipolar
molecule gas in the vapor cell 321 is generally stable with respect
to time (does not degrade or drift over time) and is largely
independent of temperature and several other variables.
In one example, the signal generator 883 initially sweeps the
transmission output frequency through a band known to include the
quantum frequency of the cell 321. For example, transitioning
upward from an initial frequency below the suspected quantum
frequency, or initially transitioning downward from an initial
frequency above the suspected quantum frequency, or other suitable
sweeping technique or approach. The transceiver 880 monitors the
received energy via the input 882 coupled with (e.g., electrically
connected to) the second conductive coupling structure 807 to
identify the transmission frequency associated with peak absorption
by the gas in the cell 321. Peak absorption results in minimal
reception at the receiver, which is referred to as an "absorption
dip." Once the quantum absorption frequency is identified, the loop
filter 884 moves the source signal generator transmission frequency
close to that absorption frequency (e.g., 183.31 GHz), and
modulates the signal at a very low frequency to regulate operation
around the null or minima in the transmission efficiency
representing the ratio of the received energy to the transmitted
energy. The loop filter 884 provides negative feedback in a closed
loop operation to maintain the signal generator 883 operating at a
TX frequency corresponding to the quantum frequency of the cavity
dipolar molecule gas.
In steady state operation, the lock-in amplifier 885 and the loop
filter 884 maintain the transmitter frequency at the peak
absorption frequency of the cell gas 351. In one non-limiting
example, the loop filter 884 provides
proportional-integral-derivative (PID) control using a derivative
of the frequency error as a control factor for lock-in detection
and closed loop regulation. At the bottom of the null in a
transmission coefficient curve caused by the absorption dip, the
derivative is zero and the loop filter 884 provides the derivative
back as a direct current (DC) control output signal CO to the
signal generator 883. This closed loop operates to keep the signal
generator transmission output frequency at the peak absorption
frequency of the cell gas using lock-in differentiation based on
the RX signal received from the cell 321.
Trim control circuit 886 can be operated to increase or decrease
the density/pressure of the interrogation molecules 351 within the
cavity of cell 321 by energizing the heaters via individual heater
leads 887 in one or more of the sub-cells to thereby activate the
getter material or the precursor material, as described hereinabove
in more detail. The RX 882 signal amplitude of the absorption dip
can be determined by lock-in amplifier 885 and cause trim control
circuitry to activate either a sub-cell with getter material to
reduce interrogation molecule 351 density/pressure or a sub-cell
with precursor material to increase interrogation molecule 351
density/pressure. This may be done to improve the absorption of the
interrogation molecules 351 such that the minimum signal received
on TX 882 for the absorption dip falls below a selected threshold
value or within a selected band of values.
Trim control circuit 886 may be operated on an occasional manner
while clock generator system 800 is in use in the field in a final
product to maintain sensitivity and accuracy over the life of the
device. In this example, trim control circuit 886 is designed to
monitor the amplitude of RX signal 882 and take corrective action
when the amplitude of the absorption dip drifts past a selected
threshold value.
While this example makes use of a device with resistive heaters,
other examples may make use of a device with inductive heaters,
such as device 600 (FIG. 6A), a system that uses lasers to create
laser beams, such as device 300 (FIG. 4A), or other known or later
developed techniques for activating the precursor and getter
materials.
In this example, atomic clock generator 800 is packaged in a single
integrated circuit (IC) package. Various types of known or later
developed IC packaging techniques may be used to package atomic
clock generator 800, such as QFN (quad flat no lead), DFN (dual
flat no lead), MLF (micro lead frame), SON (small outline no lead),
flip chips, dual inline packages (DIP), etc. In this example,
transceiver 880 is fabricated on a separate semiconductor substrate
using known or later developed semiconductor processing techniques
and connected to spectroscopy device 500 using wire bonds. Other
examples may use other known or later developed techniques to
interconnect the device 500 and transceiver 880, such as stacked
dies, etc.
FIG. 9 is a flow diagram of operation of an example spectroscopy
cell. Several example spectroscopy cells have been described
hereinabove and each may be operated as described hereinbelow.
At 902, an RF signal is generated and launched into a cavity of a
spectroscopy cell included within a device, such as device 300
(FIG. 3), device 500 (FIGS. 5A, 5B), device 600 (FIGS. 6A, 6B), or
device 700 (FIG. 7). The cavity of the spectroscopy cell encloses a
gas that includes interrogation molecules at a particular density
or pressure.
At 904, the RF signal passes through the gas having the
interrogation molecules and is received by a control circuit, such
as transceiver 880 (FIG. 8). A portion of the energy of the RF
signal may be absorbed by the interrogation molecules when the
frequency of the RF signal matches or is close to the quantum
absorption frequency of the interrogation molecules.
At 906, the frequency of the RF signal is varied across a range to
determine a frequency that matches the quantum absorption frequency
of the interrogation molecules and thereby creates an absorption
dip in the magnitude of the RF signal received by the control
circuit from the spectroscopy cell. In one example, the frequency
at which the absorption dip is maximum is determined when a
derivative of an error signal between the received RF signal and
the transmitted RF signal is zero, as described hereinabove in more
detail.
At 908, the magnitude of the RF signal absorption dip is compared
to a selected threshold or range of magnitude values. When the
magnitude of the absorption dip is within the selected range, then
operation of the spectroscopy cell continues at 902. In some
examples, a single threshold value may be used.
At 910, when the magnitude of the RF signal absorption dip is
outside of the selected range or past a selected threshold, then
the amount of interrogation molecules within the spectroscopy
cavity is adjusted. Control circuitry, such as trim control circuit
886 (FIG. 8), can be operated to increase or decrease the
density/pressure of the interrogation molecules within the
spectroscopy cavity by activating trimming material that is
contained within sub-cavities that are coupled to the spectroscopy
cavity by diffusion paths to form a shared headspace. The amount of
interrogation molecules in the spectroscopy cavity is increased by
activating a precursor material in one or more sub-cavities having
a diffusion path to the spectroscopy cavity. The amount of
interrogation molecules in the spectroscopy cavity is reduced by
activating a getter material in one or more of the sub-cavities
having a diffusion path to the spectroscopy cavity.
As described hereinabove in more detail, various techniques may be
used to activate the trimming material, such as by energizing a
resistive heating element proximate to the trimming material in
each sub-cavity, energizing an inductive heater element proximate
to the trimming material in each sub-cavity, by projecting a laser
beam onto the trimming material in each sub-cavity, etc.
This sequence is repeated at 902 to form a feedback loop to lock
onto the absorption dip in the RF signal received from the
spectroscopy cell.
This process may be performed after fabrication of a device to
adjust an initial density/pressure of interrogation molecules
within a spectroscopy cavity.
This process may be performed in a continuous manner or in an
occasional manner after a spectroscopy device is installed in a
system and deployed in the field to compensate for any drift that
may occur over the operating lifetime of the spectroscopy
device.
In this manner, the amount of interrogation molecules in a sealed
cavity may be adjusted by activating a precursor material in one or
more sub-cavities coupled to the sealed cavity by a diffusion path
to increase the amount of interrogation molecules or by activating
the getter material in one or more sub-cavities coupled to the
sealed cavity by a diffusion path to decrease the amount of
interrogation molecules.
In some examples, multiple types of getter material and/or
precursor materials may be included within various ones of the
sealed cavities for specific versus generic trimming of the
interrogation molecules.
In this description, the term "couple" and derivatives thereof mean
an indirect, direct, optical, and/or wireless electrical
connection. Thus, if a first device couples to a second device,
that connection may be through a direct electrical connection,
through an indirect electrical connection via other devices and
connections, through an optical electrical connection, and/or
through a wireless electrical connection.
Modifications are possible in the described examples, and other
examples are possible, within the scope of the claims.
* * * * *