U.S. patent number 10,510,970 [Application Number 15/994,197] was granted by the patent office on 2019-12-17 for opposite substrate and manufacturing method thereof, organic light-emitting display panel and display device.
This patent grant is currently assigned to BOE TECHNOLOGY GROUP CO., LTD.. The grantee listed for this patent is BOE TECHNOLOGY GROUP CO., LTD.. Invention is credited to Jiangnan Lu, Shi Shu, Chuanxiang Xu.
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United States Patent |
10,510,970 |
Lu , et al. |
December 17, 2019 |
Opposite substrate and manufacturing method thereof, organic
light-emitting display panel and display device
Abstract
An opposite substrate, a method for manufacturing the opposite
substrate, an organic light-emitting display panel and a display
device are provided by the embodiments of the present disclosure.
The opposite substrate includes a base substrate, an auxiliary
electrode on the base substrate, a planarization layer on a side of
the auxiliary electrode facing away from the base substrate, a
spacer on a side of the planarization layer facing away from the
base substrate, and a conductive layer on a side of the spacer
facing away from the base substrate. The conductive layer at least
covers a surface of the spacer facing away from the base substrate,
and the conductive layer is electrically connected with the
auxiliary electrode through a via hole structure passing through
the planarization layer.
Inventors: |
Lu; Jiangnan (Beijing,
CN), Shu; Shi (Beijing, CN), Xu;
Chuanxiang (Beijing, CN) |
Applicant: |
Name |
City |
State |
Country |
Type |
BOE TECHNOLOGY GROUP CO., LTD. |
Beijing |
N/A |
CN |
|
|
Assignee: |
BOE TECHNOLOGY GROUP CO., LTD.
(Beijing, CN)
|
Family
ID: |
61182626 |
Appl.
No.: |
15/994,197 |
Filed: |
May 31, 2018 |
Prior Publication Data
|
|
|
|
Document
Identifier |
Publication Date |
|
US 20190115546 A1 |
Apr 18, 2019 |
|
Foreign Application Priority Data
|
|
|
|
|
Oct 18, 2017 [CN] |
|
|
2017 1 0970131 |
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L
51/5215 (20130101); H01L 27/3253 (20130101); H01L
51/56 (20130101); H01L 51/0096 (20130101); H01L
27/3246 (20130101); H01L 51/5228 (20130101); H01L
2251/5315 (20130101); H01L 27/322 (20130101); H01L
51/5284 (20130101) |
Current International
Class: |
G06F
3/041 (20060101); G09G 3/20 (20060101); H01L
51/00 (20060101); H01L 51/56 (20060101); H01L
51/52 (20060101); H01L 27/32 (20060101) |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Smith; Bradley
Assistant Examiner: Goodwin; David J
Attorney, Agent or Firm: Collard & Roe, P.C.
Claims
What is claimed is:
1. An opposite substrate, comprising: a base substrate, an
auxiliary electrode on the base substrate, a planarization layer on
a side of the auxiliary electrode facing away from the base
substrate, a spacer on a side of the planarization layer facing
away from the base substrate, a conductive layer on a side of the
spacer facing away from the base substrate, and black matrices
located between the base substrate and the auxiliary electrode;
wherein the conductive layer at least covers a surface of the
spacer facing away from the base substrate, and the conductive
layer is electrically connected with the auxiliary electrode
through a via hole structure passing through the planarization
layer.
2. The opposite substrate according to claim 1, wherein the
planarization layer is integrated with the spacer.
3. The opposite substrate according to claim 1, wherein the
planarization layer and the spacer are independently arranged.
4. The opposite substrate according to claim 1, wherein
orthographic projections of the black matrices on the base
substrate cover an orthographic projection of the auxiliary
electrode on the base substrate.
5. The opposite substrate according to claim 1, wherein the
conductive layer is electrically connected with the auxiliary
electrode through a plurality of the via hole structures passing
through the planarization layer.
6. The opposite substrate according to claim 5, wherein an
orthographic projection of the auxiliary electrode on the base
substrate covers orthographic projections of the plurality of the
via hole structures.
7. The opposite substrate according to claim 1, further comprising:
a color filter layer disposed between two adjacent black matrices
among the black matrices.
8. An organic light-emitting display panel, comprising an array
substrate and the opposite substrate according claim 1.
9. The organic light-emitting display panel according to claim 8,
wherein the array substrate comprises a driving backboard and an
organic light-emitting element disposed on the driving backboard,
the organic light-emitting element comprises a first electrode, a
light-emitting layer and a second electrode arranged in sequence on
the driving backboard, and the second electrode is electrically
connected with the conductive layer of the opposite substrate.
10. A display device, comprising the organic light-emitting display
panel according to claim 8.
11. A method for manufacturing an opposite substrate, comprising:
providing a base substrate; forming black matrices on the base
substrate; forming an auxiliary electrode on the base substrate;
forming a planarization layer and a spacer on the base substrate
provided with the auxiliary electrode; forming a conductive layer
on the base substrate provided with the planarization layer and the
spacer; wherein the conductive layer at least covers a surface of
the spacer facing away from the base substrate, and the conductive
layer is electrically connected with the auxiliary electrode
through a via hole structure passing through the planarization
layer; wherein the black matrices is located between the base
substrate and the auxiliary electrode.
12. The method for manufacturing the opposite substrate according
to claim 11, wherein the forming the planarization layer and the
spacer on the base substrate provided with the auxiliary electrode
comprises: forming the planarization layer and the spacer through
one patterning process.
13. The method for manufacturing the opposite substrate according
to claim 11, wherein the forming the planarization layer and the
spacer on the base substrate provided with the auxiliary electrode
comprises: forming the planarization layer covering the base
substrate on the base substrate provided with the auxiliary
electrode by a first patterning process; and forming the spacer on
the base substrate provided with the planarization layer by a
second patterning process.
14. The method for manufacturing the opposite substrate according
to claim 11, wherein the via hole structure is formed in a process
of forming the planarization layer.
15. The method for manufacturing the opposite substrate according
to claim 11, wherein orthographic projections of the black matrices
on the base substrate cover an orthographic projection of the
auxiliary electrode on the base substrate.
16. The method for manufacturing the opposite substrate according
to claim 15, wherein before forming the auxiliary electrode, the
method further comprises: forming a color filter layer on the base
substrate, wherein the color filter layer disposed between two
adjacent black matrices among the black matrices.
17. The method for manufacturing the opposite substrate according
to claim 11, wherein a film for forming the auxiliary electrode and
a film for forming the conductive layer are formed by a magnetron
sputtering process.
Description
The present application claims the priority of the Chinese Patent
Application No. 201710970131.6 filed on Oct. 18, 2017, which is
incorporated herein by reference as part of the disclosure of the
present application.
TECHNICAL FIELD
Embodiments of the present disclosure relate to an opposite
substrate, a method for manufacturing the opposite substrate, an
organic light-emitting display panel and a display device.
BACKGROUND
In flat panel displays, organic light-emitting diode (OLED) display
panels have many advantages, such as self luminescence, fast
response, wide angle of view, high brightness, bright coloring and
light weight and so on, and the OLED display panels have attracted
extensive attentions.
According to a difference of light-emitting surface, the OLED
display panels are divided into top light-emitting type OLED
display panels and bottom light-emitting type OLED display panels.
At present, the proportion of the OLED display panels in large size
products is becoming larger and larger, it is foreseeable that OLED
display panels will continue to develop rapidly in the future. In a
case that bottom light-emitting technology is applied to large size
OLED display products, a problem of low aperture ratio of the OLED
display products is occurred, which is unable to meet the
requirements of OLED display products for display effect,
therefore, top light-emitting technology is required to be
developed. In the top light-emitting technology, in order to
increase transmittance of light, a cathode of the OLED display
panel is required to be made of a thin transparent conductive film,
but impedance of the thin transparent conductive film is very
large, a large voltage drop is occurred in a case that a current
flows through the cathode, which affects the uniformity of the
brightness of the OLED display panel.
SUMMARY
At least one embodiment of the present disclosure provides an
opposite substrate, a method for manufacturing an opposite
substrate, an organic light-emitting display panel and a display
device, to solve the problem that the spacer is easily to fall
off.
At least one embodiment of the present disclosure provides an
opposite substrate, and the opposite substrate comprises: a base
substrate, an auxiliary electrode on the base substrate, a
planarization layer on a side of the auxiliary electrode facing
away from the base substrate, a spacer on a side of the
planarization layer facing away from the base substrate, and a
conductive layer on a side of the spacer facing away from the base
substrate; wherein the conductive layer at least covers a surface
of the spacer facing away from the base substrate, and the
conductive layer is electrically connected with the auxiliary
electrode through a via hole structure passing through the
planarization layer.
For example, in the opposite substrate provided by at least one
embodiment of the present disclosure, the planarization layer is
integrated with the spacer.
For example, in the opposite substrate provided by at least one
embodiment of the present disclosure, the planarization layer and
the spacer are independently arranged.
For example, the opposite substrate provided by at least one
embodiment of the present disclosure further comprises: black
matrices located between the base substrate and the auxiliary
electrode, wherein orthographic projections of the black matrices
on the base substrate cover an orthographic projection of the
auxiliary electrode on the base substrate.
For example, in the opposite substrate provided by at least one
embodiment of the present disclosure, the conductive layer is
electrically connected with the auxiliary electrode through a
plurality of the via hole structures passing through the
planarization layer.
For example, in the opposite substrate provided by at least one
embodiment of the present disclosure, an orthographic projection of
the auxiliary electrode on the base substrate covers orthographic
projections of the plurality of the via hole structures.
For example, the opposite substrate provided by at least one
embodiment of the present disclosure further comprises: a color
filter layer disposed between two adjacent black matrices among the
black matrices.
At least one embodiment of the present disclosure further provides
an organic light-emitting display panel, and the organic
light-emitting display panel comprises an array substrate and any
one of the opposite substrate described above.
For example, in the organic light-emitting display panel provided
by at least one embodiment of the present disclosure, the array
substrate comprises a driving backboard and an organic
light-emitting element disposed on the driving backboard, the
organic light-emitting element comprises a first electrode, a
light-emitting layer and a second electrode arranged in sequence on
the driving backboard, and the second electrode is electrically
connected with the conductive layer of the opposite substrate.
At least one embodiment of the present disclosure further provides
a display device, and the display device comprises any one of the
organic light-emitting display panel described above.
At least one embodiment of the present disclosure further provides
a method for manufacturing an opposite substrate, and the
manufacturing method comprises: providing a base substrate; forming
an auxiliary electrode on the base substrate; forming a
planarization layer and a spacer on the base substrate provided
with the auxiliary electrode; forming a conductive layer on the
base substrate provided with the planarization layer and the
spacer; wherein the conductive layer at least covers a surface of
the spacer facing away from the base substrate, and the conductive
layer is electrically connected with the auxiliary electrode
through a via hole structure passing through the planarization
layer.
For example, in the method for manufacturing the opposite substrate
provided by at least one embodiment of the present disclosure, the
forming the planarization layer and the spacer on the base
substrate provided with the auxiliary electrode comprises: forming
the planarization layer and the spacer through one patterning
process.
For example, in the method for manufacturing the opposite substrate
provided by at least one embodiment of the present disclosure, the
forming the planarization layer and the spacer on the base
substrate provided with the auxiliary electrode comprises: forming
the planarization layer covering the base substrate on the base
substrate provided with the auxiliary electrode by a first
patterning process; and forming the spacer on the base substrate
provided with the planarization layer by a second patterning
process.
For example, in the method for manufacturing the opposite substrate
provided by at least one embodiment of the present disclosure, the
via hole structure is formed in a process of forming the
planarization layer.
For example, in the method for manufacturing the opposite substrate
provided by at least one embodiment of the present disclosure,
before forming the auxiliary electrode, the method further
comprises: forming black matrices on the base substrate, and
orthographic projections of the black matrices on the base
substrate cover an orthographic projection of the auxiliary
electrode on the base substrate.
For example, in the method for manufacturing the opposite substrate
provided by at least one embodiment of the present disclosure,
before forming the auxiliary electrode, the method further
comprises: forming a color filter layer on the base substrate,
wherein the color filter layer disposed between two adjacent black
matrices among the black matrices.
For example, in the method for manufacturing the opposite substrate
provided by at least one embodiment of the present disclosure, a
film for forming the auxiliary electrode and a film for forming the
conductive layer are formed by a magnetron sputtering process.
The planarization layer is disposed on the auxiliary electrode, the
spacer is disposed on the planarization layer in at least one
embodiment of the present disclosure, and an adhesion of the
spacers on the planarization layer is larger than an adhesion of
the spacers on the auxiliary electrode, in this way, the problem
that the spacers are easy to fall off due to a smooth surface of
the auxiliary electrode is avoided, so that a good product rate of
OLED display products formed subsequently is improved.
BRIEF DESCRIPTION OF THE DRAWINGS
In order to clearly illustrate the technical solution of the
embodiments of the disclosure, the drawings of the embodiments will
be briefly described. It is apparent that the described drawings
are only related to some embodiments of the disclosure and thus are
not limitative of the disclosure.
FIG. 1 is a schematic diagram of a sectional structure of an
opposite substrate;
FIG. 2 is a schematic diagram of a sectional structure of an
opposite substrate provided by at least one embodiment of the
present disclosure;
FIG. 3 is another schematic diagram of the sectional structure of
the opposite substrate provided by at least one embodiment of the
present disclosure;
FIG. 4a is still another schematic diagram of the sectional
structure of the opposite substrate provided by at least one
embodiment of the present disclosure;
FIG. 4b is still another schematic diagram of the sectional
structure of the opposite substrate provided by at least one
embodiment of the present disclosure;
FIG. 5 is a schematic diagram of a sectional structure of an
organic light-emitting display panel provided by at least one
embodiment of the present disclosure;
FIG. 6 is a flow diagram of a method for manufacturing an opposite
substrate provided by at least one embodiment of the present
disclosure;
FIG. 7 is another flow diagram of the method for manufacturing the
opposite substrate provided by at least one embodiment of the
present disclosure;
FIGS. 8a to 8c are schematic diagrams of sectional structures
respectively after each step in the method for manufacturing the
opposite substrate provided by at least one embodiment of the
present disclosure; and
FIGS. 8a, 8b, 8d, 8e are schematic diagrams of sectional structures
respectively after each step in the method for manufacturing the
opposite substrate provided by at least one embodiment of the
present disclosure.
REFERENCE NUMERALS
100--opposite substrate; 101,01--base substrate; 102--electrode;
103--planarization layer; 104--auxiliary electrode; 105,
04--spacers; 02--auxiliary electrode; 03--planarization layer;
05--conductive layer; 06--via hole structure; 07--black matrix;
08--color filter layer; 09--driving substrate; 10--buffer layer;
11--active layer; 12--gate insulating layer; 13--gate electrode;
14--interlayer insulation layer; 15--source electrode; 16--drain
electrode; 17--planarization layer; 18--pixel definition layer;
19--first electrode; 20--light-emitting layer; 21--second
electrode.
DETAILED DESCRIPTION
In order to make objects, technical details and advantages of
embodiments of the disclosure clear, the technical solutions of the
embodiments will be described in a clearly and fully understandable
way in connection with the related drawings. It is apparent that
the described embodiments are just a part but not all of the
embodiments of the disclosure. Based on the described embodiments
herein, those skilled in the art can obtain, without any inventive
work, other embodiment(s) which should be within the scope of the
disclosure.
Unless otherwise defined, all the technical and scientific terms
used herein have the same meanings as commonly understood by one of
ordinary skill in the art to which the present invention belongs.
The terms "first," "second," etc., which are used in the
description and claims of the present application, are not intended
to indicate any sequence, amount or importance, but distinguish
various components. The terms "comprises," "comprising,"
"includes," "including," etc., are intended to specify that the
elements or the objects stated before these terms encompass the
elements or the objects listed after these terms as well as
equivalents thereof, but do not exclude other elements or objects.
The phrases "connect", "connected", etc., are not intended to
define a physical connection or mechanical connection, but may
include an electrical connection which is direct or indirect. The
terms "on," "under," "right," "left" and the like are only used to
indicate relative position relationship, and when the position of
an object is described as being changed, the relative position
relationship may be changed accordingly.
For example, FIG. 1 is a schematic diagram of a sectional structure
of an opposite substrate. As illustrated in FIG. 1, an opposite
substrate 100 comprises a base substrate 101; an electrode 102 is
disposed on the base substrate 101; a planarization layer 103 is
disposed on the electrode 102; in order to reduce a resistance of
the electrode 102, an auxiliary electrode 104 connected in parallel
with the electrode 102 is disposed on the planarization layer 103,
and a resistivity of a material for forming the auxiliary electrode
104 is less than a resistivity of a material for forming the
electrode 102; and spacers 105 are formed on the auxiliary
electrode 104 to avoid a problem of damaging to surfaces of the
opposite substrate 100 and an array substrate (not illustrated in
FIG. 1) in a case that the opposite substrate 100 is bonded and
directly contacted with the array substrate.
However, in the process of manufacturing the opposite substrate,
because the material of the auxiliary electrode 104 is a conductive
metal, and an adhesion of the spacers 105 on the conductive metal
is poor, in this way, there is a problem that the spacers 105 are
easy to fall off from the conductive metal, which affects a good
product rate of the finally-formed OLED display products.
At least one embodiment of the present disclosure provides an
opposite substrate, for example, FIG. 2 is a schematic diagram of a
sectional structure of the opposite substrate provided by at least
one embodiment of the present disclosure. As illustrated in FIG. 2,
the opposite substrate 100 comprises: a base substrate 01, an
auxiliary electrode 02 disposed on the base substrate 01, a
planarization layer 03 on a side of the auxiliary electrode 02
facing away from the base substrate 01, a spacer 04 on a side of
the planarization layer 03 facing away from the base substrate 01,
and a conductive layer 05 on a side of the spacer 04 facing away
from the base substrate 01; the conductive layer 05 at least covers
a surface of the spacer 04 facing away from the base substrate 01,
and the conductive layer 05 is electrically connected with the
auxiliary electrode 02 through a via hole structure 06 passing
through the planarization layer 03.
In at least one embodiment of the present disclosure, the
planarization layer 03 is disposed on the auxiliary electrode 02,
and the spacer 04 is disposed on the planarization layer 03;
because an adhesion of the spacers 04 on the planarization layer 03
is larger than an adhesion of the spacers 04 on the auxiliary
electrode 02, in this way, the problem that the spacers are easy to
fall off due to the smooth surface of the auxiliary electrode 104
in FIG. 1 is avoided, so that the good product rate of the
finally-formed OLED display products is improved.
For example, in the opposite substrate provided by at least one
embodiment of the present disclosure, as illustrated in FIG. 2, the
conductive layer 05 covers an entirety of the base substrate 01, in
this case, in order not to affect a transmittance of light, the
conductive layer 05 covering the entirety of the base substrate 01
is a transparent conductive layer. For example, the conductive
layer 05 partially covers the base substrate 01. In a case that the
conductive layer 05 partially covers the base substrate 01, the
material of the conductive layer 05 is a transparent conductive
material or a thin metal material, which is not limited herein.
As illustrated in FIG. 2, a number of the via hole structure 06 is
set in accordance with a number of the auxiliary electrode 02. For
example, one auxiliary electrode 02 corresponds to one via hole
structure 06, so that the auxiliary electrode 02 is electrically
connected with the conductive layer 05 through the corresponding
via hole structure 06.
It is to be noted that, the opposite substrate provided by at least
one embodiment of the present disclosure for example is mainly used
in large size OLED display panels, and the auxiliary electrode 02
is mainly connected in parallel with a cathode of the OLED display
panel to reduce an impedance of the cathode, in this way, the
uniformity of the brightness of the OLED display panel is
improved.
For example, in the opposite substrate provided by at least one
embodiment of the present disclosure, as illustrated in FIG. 2, the
planarization layer 03 is integrated with the spacer 04. It is to
be noted that, the planarization layer 03 integrated with the
spacer 04 means that a material of the planarization layer 03 is
the same as a material of the spacer 04 and the planarization layer
03 and the spacer 04 are formed in a same process, that is, the
planarization layer 03 is connected with the spacer 04 without an
contact interface therebetween, which is equivalent to increasing a
contact area between the spacer 04 and the base substrate 01, and
the adhesive of the spacer 04 on the base substrate 01 is enhanced,
which further avoids the problem that the spacer 04 falls off from
the base substrate 01.
In addition, the planarization layer 03 and the spacer 04 are
formed by a single patterning process, in this way, the spacer 04
is formed during the patterning process of the planarization layer
03, which simplifies the preparation process and saves the cost of
production.
For example, FIG. 3 is another schematic diagram of the sectional
structure of the opposite substrate provided by at least one
embodiment of the present disclosure. The structure in FIG. 3 and
the structure in FIG. 2 are basically the same. The difference is
only that one auxiliary electrode corresponds to a plurality of via
hole structures 06 in FIG. 3. As illustrated in FIG. 3, the number
of the via hole structure 06 is 3; but the number of the via hole
structure 06 is not limited to this, and it can also be 2, 4, 5,
etc.
For example, the conductive layer 05 is electrically connected with
the auxiliary electrode 02 by the plurality of via hole structures
06 respectively, so that the conductive layer 05 is connected in
parallel with the auxiliary electrode 02 at a plurality of
positions. In addition, a thickness of the conductive layer 05 is
increased by parallel connection between the conductive layer 05
and the auxiliary electrode 02 through the plurality of via hole
structures 06, which is equivalent to increasing a cross section
area of the conductive layer 05, thus the resistance of the
conductive layer 05 is further reduced.
For example, as illustrated in FIG. 3, an orthographic projection
of the auxiliary electrode 02 on the base substrate 01 covers
orthographic projections of the plurality of the via hole
structures 06 on the base substrate 01.
For example, as illustrated in FIG. 3, the auxiliary electrode 02
is arranged at the position corresponds to the spacer 04, in this
way, as illustrated in FIG. 3, at least one via hole structure 06
is arranged corresponding to the spacer 04, that is, the at least
one via hole structure 06 penetrates the spacer 04 and the
planarization layer 03 simultaneously.
For example, FIG. 4a is still another schematic diagram of the
sectional structure of the opposite substrate provided by at least
one embodiment of the present disclosure. As illustrated in FIG.
4a, the planarization layer 03 and the spacer 04 are independently
arranged, that is, the planarization layer 03 covering the base
substrate 01 is formed on the base substrate 01 firstly, and then
the spacer 04 is formed on the base substrate 01 formed with the
planarization layer 03. Because the adhesion of the spacer 04 on
the planarization layer 03 is larger than the adhesion of the
spacer 04 on the auxiliary electrode 02, so that the problem that
the spacer is easy to fall off from the base substrate 01 is
avoided.
For example, FIG. 4b is still another schematic diagram of the
sectional structure of the opposite substrate provided by at least
one embodiment of the present disclosure. The structure in FIG. 4b
and the structure in FIG. 4a are basically the same. The difference
is only that one auxiliary electrode corresponds to a plurality of
via hole structures 06, and at least one via hole structure 06
penetrates the spacer 04 and the planarization layer 03 which are
independently arranged at the same time in FIG. 4b. As illustrated
in FIG. 4b, the conductive layer 05 is electrically connected with
the auxiliary electrode 02 through the plurality of the via hole
structures 06 passing through the planarization layer 03, that is,
each auxiliary electrode 02 corresponds to the plurality of via
hole structures 06. The orthographic projection of the auxiliary
electrode 02 on the base substrate 01 covers the orthographic
projections of the plurality of the via hole structures 06 on the
base substrate 01, and the auxiliary electrode 02 is arranged at
the position corresponding to the spacer 04. In this way, at least
one via hole structure 06 is arranged corresponding to the spacer
04, that is, the at least one via hole structure 06 penetrates the
spacer 04 and the planarization layer 03 which are independently
arranged at the same time.
For example, in the opposite substrate provided by at least one
embodiment of the present disclosure, as illustrated in FIG. 2,
FIG. 3, FIG. 4a and FIG. 4b, the opposite substrate further
comprises black matrices 07 located between the base substrate 01
and the auxiliary electrode 02, and orthographic projections of the
black matrices 07 on the base substrate 01 cover the orthographic
projection of the auxiliary electrode 02 on the base substrate
01.
During testing the opposite substrate, electrostatic charges are
existed in the black matrix 07. In at least one embodiment of the
present disclosure, the auxiliary electrode 02 is directly arranged
on the black matrix 07 to release the electrostatic charges in the
black matrix 07, so that the display effect of the display product
is not affected. In order not to influence the aperture ratio of
the display product, in the process of manufacturing the auxiliary
electrode 02, the orthographic projection of the auxiliary
electrode 02 on the base substrate 01 is in the orthographic
projections of the black matrices 07 on the base substrate 01.
As illustrated in FIG. 2, FIG. 3, FIG. 4a and FIG. 4b, the opposite
substrate further comprises a color filter layer 08, and the color
filter layer 08 is disposed between two adjacent black matrices 07
among the black matrices 07.
For example, the auxiliary electrode 02 is made of a transparent
conductive material, and the transparent conductive material
includes indium tin oxide (ITO), indium zinc oxide (IZO), indium
gallium oxide (IGO), zinc gallium oxide (GZO)), Indium oxide
(In.sub.2O.sub.3), aluminum zinc oxide (AZO) and carbon
nanotubes.
For example, the auxiliary electrode 02 is made of a metal
conductive material, and the metal conductive material includes a
single metal such as such as copper (Cu), chromium (Cr), molybdenum
(Mo), gold (Au), silver (Ag) and platinum (Pt), or an alloy formed
of the above metals, for example, a copper chromium alloy (CuCr) or
a chromium molybdenum alloy (CrMo).
For example, the auxiliary electrode 02 is a laminated structure
formed by any combination of the transparent conductive material
and the metal conductive material as described above.
For example, a thickness of the auxiliary electrode 02 is from 0.5
.mu.m to 1 .mu.m, such as 0.5 .mu.m, 0.6 .mu.m, 0.7 .mu.m, 0.8
.mu.m, 0.9 .mu.m, or 1 .mu.m, etc.
For example, a thickness of the planarization layer 03 is from 1
.mu.m to 3 .mu.m, and a thickness of the conductive layer 05 is
from 2 .mu.m to 5.7 .mu.m.
For example, the opposite substrate includes a display region and a
peripheral region outside the display region. The display region is
also referred to as an AA (Active Area), and the display region is
used for displaying. The peripheral region is used for arranging a
driving circuit, packaging a display panel, and the like. For
example, in the peripheral region, the conductive layer 05 is
electrically connected with the auxiliary electrode 02, and in the
display region, the conductive layer 05 is electrically connected
with the auxiliary electrode again 02, in this way, the conductive
layer 05 and the auxiliary electrode 02 are connected at both ends
respectively to form a parallel circuit. Alternatively, both ends
that the conductive layer 05 and the auxiliary electrode 02
connected to each other are located in the display region. In a
case that the conductive layer 05 receives a voltage signal and
transmits the voltage signal, and the voltage signal reaches the
auxiliary electrode 02 that electrically connected to the
conductive layer 05, the auxiliary electrode 02 transmits the
voltage signal simultaneously with the conductive layer 05 as a
branch of the conductive layer 05, which is equivalent to the
conductive layer 05 and the auxiliary electrode 02 forming the
parallel circuit, in this way, the resistance in the process of
electrical signal transmission is reduced. For example, the
auxiliary electrode 02 receives the voltage signal firstly, in a
case that the voltage signal reaches the conductive layer 05
electrically connected to the auxiliary electrode 02, the
conductive layer 05 as a branch for transmitting the voltage signal
simultaneously with the auxiliary electrode 02. For example, the
conductive layer 05 and the auxiliary electrode 02 receive the
voltage signal simultaneously, the conductive layer 05 and the
auxiliary electrode 02 transmit the voltage signal simultaneously
as two branches.
The conductive layer 05 and the auxiliary electrode 02 are
electrically connected in parallel in the embodiments of the
present disclosure, which equivalents to increasing the equivalent
thickness of the conductive layer 05, thus the resistance of the
conductive layer 05 is reduced and the problem of the large voltage
drop due to the large resistance of the conductive layer 05 in a
case that the conductive layer 05 is made of a thin metal is
avoided, and further the problem of damaging to organic
light-emitting display panel due to the large voltage drop is
avoided.
For example, in a case of bonding the opposite substrate and an
array substrate in the following steps, the conductive layer 05 of
the opposite substrate is connected in parallel with a second
electrode of the array substrate, so that the resistance of the
second electrode is reduced by the parallel connection of three
layers of conductive material, and further the problem of damaging
to organic light-emitting display panel due to the large voltage
drop is avoided.
At least one embodiment of the present disclosure further provides
an organic light-emitting display panel, for example, FIG. 5 is a
schematic diagram of a sectional structure of the organic
light-emitting display panel provided by at least one embodiment of
the present disclosure. As illustrated in FIG. 5, the organic
light-emitting display panel comprises an array substrate and an
opposite substrate, and the opposite substrate is any one of the
opposite substrate described above.
For example, the array substrate comprises a driving backboard and
an organic light-emitting element disposed on the driving
backboard, the organic light-emitting element comprises a first
electrode, a light-emitting layer and the second electrode arranged
in sequence on the driving backboard, and the second electrode is
electrically connected with the conductive layer 05 of the opposite
substrate. For example, the conductive layer 05 of the opposite
substrate is connected with the second electrode 21 of the array
substrate by directly contacting.
For example, as illustrated in FIG. 5, the driving backboard
includes a driving substrate 09, a buffer layer 10 on the driving
substrate 09, an active layer 11 on the buffer layer 10, a gate
insulating layer 12 on the active layer 11, a gate electrode 13 on
the gate insulating layer 12, an interlayer insulating layer 14 on
the gate electrode 13, and a source electrode 15 and a drain
electrode 16 on the interlayer insulation layer 14, a planarization
layer 17 on the source electrode 15 and the drain electrode 16, a
pixel definition layer 18 on the planarization layer 17, and the
organic light-emitting element includes the first electrode 19, the
light-emitting layer 20 and the second electrode 21, the first
electrode 19 and the drain electrode 16 are electrically connected,
and the second electrode 21 is electrically connected with the
conductive layer 05 of the opposite substrate provided by any one
of the embodiments of the present disclosure.
For example, the first electrode 19 is an anode of the organic
light-emitting element, and the second electrode 21 is the cathode
of the organic light-emitting element.
For example, the material of the cathode is a single metal such as
silver, magnesium, aluminum and lithium; or the material of the
cathode is an alloy such as a magnesium aluminum alloy (MgAl) or a
lithium aluminum alloy (LiAl), etc.
For example, the material of the anode is a transparent conductive
material, such as indium tin oxide (ITO), indium zinc oxide (IZO)
or Zinc Oxide (Zn2O3), etc.
For example, the anode is a stacked structure formed by any
combination of the transparent conductive material and the metal
conductive material. For example, the anode is a structure that the
metal conductive material is sandwiched between two transparent
conductive materials, such as ITO-Ag-ITO, ITO-Mo--IZO,
ITO-Cr--In2O3, ITO-Cu--ZnO and ITO-Pt-IGO; or the anode is a
stacked double-layer structure made of the thin metal conductive
material and the transparent conductive material, such as IZO--Mo,
ITO-Cr, ZnO--Mg and ITO-Au.
It should be noted that, the materials and the structures of the
anode and the cathode as described above are merely examples in the
embodiments of the present disclosure, the anode and the cathode
may also be made of other materials; according to the difference of
the materials of the anode and the cathode, the organic
light-emitting display panel is divided into a single-side
light-emitting display panel and a double-side light-emitting
display panel. In a case that the material of one of the anode and
the cathode is opaque or semitransparent material, the organic
light-emitting display panel is the single-side light-emitting
display panel. In a case that the material of both the anode
electrode and the cathode electrode is light-transmitting material
and/or semitransparent material, the organic light-emitting display
panel is double-side light-emitting display panel.
For example, as illustrated in FIG. 5, the pixel definition layer
18 on the array substrate corresponds to the black matrix 07 on the
opposite substrate, and the spacer 04 is arranged on the top of the
pixel definition layer 18.
For example, the organic light-emitting element further comprises:
a hole transport layer and an electron transport layer, in order to
improve the efficiency of injecting the electrons and holes into
the light-emitting layer; the organic light-emitting element for
example further includes an electron injection layer disposed
between the cathode and the electron transport layer and a hole
injection layer disposed between the anode and the hole transport
layer and other organic functional layer.
For example, in a case of bonding the opposite substrate and the
array substrate, the conductive layer 05 of the opposite substrate
is connected in parallel with the second electrode 21 of the array
substrate, so that the resistance of the second electrode 21 is
reduced by the parallel connection of three layers of conductive
material, and further the problem of damaging to organic
light-emitting display panel due to the large voltage drop is
avoided.
The organic light-emitting display panel is formed after the array
substrate being bonded with the opposite substrate provided by any
one of the above-mentioned embodiments. A principle of the organic
light-emitting display panel to solve the problem is similar to a
principle of the opposite substrate to solve the problem.
Therefore, the embodiments of the organic light-emitting display
panel can refer to the embodiments of the above mentioned opposite
substrate, which is omitted herein.
At least one embodiment of the present disclosure further provides
a display device, and the display device includes any one of the
organic light-emitting display panels described above. The display
device for example is: a mobile phone, a tablet computer, a
television, a display, a notebook computer, a digital picture
frame, a navigation system and any other product or component
having a display function. Other essential components of the
display device which should be understood by those skilled in the
art are included, which is omitted herein and should not be a
restriction to the present disclosure. The implementation of the
display device refers to the embodiments of the above-mentioned
opposite substrate, and detailed descriptions will be omitted
herein.
Based on a same idea, at least one embodiment of the present
disclosure further provides a method for manufacturing an opposite
substrate. For example, FIG. 6 is a flow diagram of the method for
manufacturing the opposite substrate provided by at least one
embodiment of the present disclosure. As illustrated in FIG. 6, the
manufacturing method includes the following operations:
S301: providing a base substrate;
S302: forming an auxiliary electrode on the base substrate;
S303: forming a planarization layer and a spacer on the base
substrate provided with the auxiliary electrode;
S304: forming a conductive layer on the base substrate provided
with the planarization layer and the spacer; in which the
conductive layer at least covers a surface of the spacer facing
away from the base substrate, and the conductive layer is
electrically connected with the auxiliary electrode through a via
hole structure passing through the planarization layer.
For example, in the manufacturing method illustrated in FIG. 6, the
planarization layer is disposed on the auxiliary electrode, and the
spacer is disposed on the planarization layer, and the adhesion of
the spacer on the planarization layer is larger than the adhesion
of the spacer on the auxiliary electrode, and the problem that the
spacer is easy to fall off due to the smooth surface of the
auxiliary electrode is avoided, so that the good product rate of
the finally-formed OLED display products is improved.
Further, in the manufacturing method illustrated in FIG. 6, the
planarization layer is integrated with the spacer. It is to be
noted that, the planarization layer integrated with the spacer
means that the material of the planarization layer is the same as
the material of the spacer and the planarization layer and the
spacer are formed in a same process, that is, the planarization
layer and the spacer are connected with each other without a
contacting interface therebetween, which is equivalent to
increasing a contact area between the spacer and the base
substrate, and the adhesive of the spacer on the base substrate is
enhanced, which further avoids the problem that the spacer falls
off from the base substrate.
In addition, the planarization layer, the spacer and the via hole
structure are formed by a single patterning process, in this way,
the spacer and the via hole structure are formed during the
planarization layer is formed, which simplifies the preparation
process and saves the cost of production.
For example, the planarization layer, the spacer and the via hole
structure are formed on the base substrate provided with the
auxiliary electrode by a single patterning process, and the single
patterning process includes the following steps:
S401: forming a planarization film covering the base substrate on
the base substrate provided with the auxiliary electrode;
S402: coating a photoresist film on the planarization film, then
patterning the photoresist film by a half tone mask to form a first
photoresist pattern;
For example, the photoresist film is a negative photoresist. The
photoresist film is exposed under ultraviolet light by using a half
tone mask and then is developed to form a first photoresist
pattern. For the negative photoresist, a portion of the photoresist
irradiated by the ultraviolet light is remained; and for example,
the first photoresist pattern includes a photoresist fully-reserved
region, a photoresist half-reserved region and a photoresist
removal region, the photoresist fully-reserved region, the
photoresist half-reserved region and the photoresist removal region
respectively correspond to a region for forming the spacer, a
region for forming the planarization layer, and a region for
forming the via hole structure.
For example, the photoresist film used in step S402 is a positive
photoresist. The photoresist film is exposed under ultraviolet
light by using a half tone mask and then is developed to form the
first photoresist pattern. For the positive photoresist, a portion
of the photoresist irradiated by the ultraviolet light is removed;
and for example, the first photoresist pattern includes the
photoresist fully-reserved region, the photoresist half-reserved
region and the photoresist removal region, the photoresist
fully-reserved region, the photoresist half-reserved region and the
photoresist removal region respectively correspond to a region for
forming the spacer, a region for forming the planarization layer,
and a region for forming the via hole structure.
S403: etching the planarization film by using the first photoresist
pattern formed in S402 as a mask to form the via hole structure in
the region corresponding to the photoresist removal region. Then
the photoresist in the photoresist half-reserved region is ashed to
remove the photoresist in the photoresist half-reserved region and
form a second photoresist pattern, then thinning the planarization
film provided with the via hole structure by using the second
photoresist pattern as a mask to form the planarization layer, and
the retained photoresist is stripped to form the spacer in the
region corresponding to the photoresist fully-reserved region.
It is to be noted that, in the above S403, the region for forming
the spacer corresponds to the photoresist fully-reserved region,
the region for forming the planarization layer corresponds to the
photoresist half-reserved region. The planarization layer is also
formed between the spacer and the base substrate, the portion of
the planarization layer overlapped with the spacer belongs to the
photoresist fully-reserved region, rather than the photoresist
half-reserved region.
For example, a number of the via hole structure is set in
accordance with the number of the auxiliary electrode. One
auxiliary electrode corresponds to one via hole structure, so that
the auxiliary electrode is electrically connected with the
conductive layer through the corresponding via hole structure.
For example, there are a plurality of via hole structures, that is,
one auxiliary electrode corresponds to the plurality of via hole
structures.
For example, the conductive layer is electrically connected with
the auxiliary electrode by the plurality of via hole structures
respectively, so that the conductive layer is connected in parallel
with the auxiliary electrode at a plurality of positions. In
addition, the thickness of the conductive layer is increased by
parallel connection between the conductive layer and the auxiliary
electrode through the plurality of via hole structures, which is
equivalent to increasing a cross section area of the conductive
layer, thus the resistance of the conductive layer is further
reduced.
For example, the orthographic projection of the auxiliary electrode
on the base substrate covers orthographic projections of the
plurality of the via hole structures.
For example, the auxiliary electrode is arranged at the position
corresponds to the spacer, in this case, the via hole structure is
arranged corresponding to the spacer, that is, the via hole
structure penetrates the spacer and the planarization layer
simultaneously.
For example, forming the planarization layer and the spacer on the
base substrate provided with the auxiliary electrode in sequence
comprises:
S501: forming a planarization film on the base substrate provided
with the auxiliary electrode;
S502: coating a first photoresist film on the planarization film,
then the first photoresist film is exposed under ultraviolet light
by using a first single-tone mask and developed to form a first
photoresist pattern; etching the planarization film by using the
first photoresist pattern as a mask and then stripping the first
photoresist pattern to form the planarization layer and the via
hole structure;
For example, the first photoresist film is a negative photoresist
film or a positive photoresist film, a region that the photoresist
is reserved in the first photoresist pattern corresponds to the
region for forming the planarization layer, and a region that the
photoresist is removed in the first photoresist pattern corresponds
to the region for forming the via hole structure.
S503: forming (for example, coating) a spacer film on the base
substrate provided with the planarization layer and the via hole
structure;
S504: coating a second photoresist film on the spacer film, then
the second photoresist film is exposed under ultraviolet light by
using a second single-tone mask and then is developed to form a
second photoresist pattern; etching the spacer film by using the
second photoresist pattern as a mask and then stripping the second
photoresist pattern to form the spacer.
For example, the second photoresist film is a negative photoresist
film or a positive photoresist film, a region that the photoresist
is reserved in the second photoresist pattern corresponds to the
region for forming the spacer, a region that the photoresist is
removed in the second photoresist pattern corresponds to the region
without forming the spacer.
It needs to be noted that, in a case that the planarization layer
and the spacer are formed in sequence and the via hole structure is
formed in the spacer and the planarization layer, the via hole
structure is formed in S504.
For example, in a case that the planarization layer and the spacer
are formed in sequence on the base substrate provided with the
auxiliary electrode, the material of the planarization layer and
the material of the spacer are the same or different.
For example, in a case that the planarization layer and the spacer
are formed in sequence, one or more via hole structure are formed.
The corresponding relationships between the via hole structure and
the other structures may refer to the relevant descriptions
mentioned above, and detailed descriptions will be omitted
herein.
For example, FIG. 7 is another flow diagram of the method for
manufacturing the opposite substrate provided by at least one
embodiment of the present disclosure. As illustrated in FIG. 7, the
manufacturing method comprises the following operations:
S301: providing a base substrate;
S302': forming black matrices on the base substrate;
S302: forming an auxiliary electrode on the base substrate;
S303: forming a planarization layer and a spacer on the base
substrate provided with the auxiliary electrode;
S304: forming a conductive layer on the base substrate provided
with the planarization layer and the spacer; in which the
conductive layer at least covers a surface of the spacer facing
away from the base substrate, and the conductive layer is
electrically connected with the auxiliary electrode through a via
hole structure passing through the planarization layer.
For example, S301, S302, S303 and S304 can refer to the relevant
descriptions of FIG. 6 mentioned above, and detailed descriptions
will be omitted herein.
For example, in S302', orthographic projections of the black
matrices on the base substrate cover an orthographic projection of
the auxiliary electrode on the base substrate. During testing the
opposite substrate, electrostatic charges are existed in the black
matrices. In the embodiments of the present disclosure, the
auxiliary electrode is directly arranged on the black matrices to
release the electrostatic charges in the black matrices, so that
the display effect of the display product is not affected. In order
not to influence the aperture ratio, in the process of
manufacturing the auxiliary electrode, the orthographic projection
of the auxiliary electrode on the base substrate is in the
orthographic projections of the black matrices on the base
substrate.
The manufacturing method of the opposite substrate illustrated in
FIG. 2 and FIG. 4a will be described in detail by two examples. For
example, FIGS. 8a to 8c are schematic diagrams of sectional
structures respectively after each steps in first example of the
present disclosure has finished; and FIGS. 8a, 8b, 8d, 8e are
schematic diagrams of sectional structures respectively after each
steps in second example of the present disclosure has finished.
The first example: for example, the manufacturing method of the
opposite substrate illustrated in FIG. 2 includes the following
steps:
(1) the black matrices 07 and the color filter layer 08 are formed
on the base substrate 01, and the color filter layer 08 is formed
between two adjacent black matrices 07, after the step is finished,
a section structure is as shown in FIG. 8a.
(2) the auxiliary electrode 02 is formed on the base substrate 01
provided with the black matrices 07, in which the orthographic
projections of the black matrices 07 on the base substrate 01 cover
the orthographic projection of the auxiliary electrode 02 on the
base substrate 01, after the step is finished, a section structure
is as shown in FIG. 8b.
(3) the planarization layer 03 and the spacer 04 are formed on the
base substrate 01 provided with the auxiliary electrode 02 through
one patterning process, and the spacer 04 and the via hole
structure 06 are formed in a process of forming the planarization
layer 03, in this way, the preparation process is simplified and
the cost is reduced, after the step is finished, a section
structure is as shown in FIG. 8c.
(4) the conductive layer 05 is formed on the base substrate 01
provided with the planarization layer 03, the via hole structures
06 and the spacer 04, in which the conductive layer 05 at least
covers the surface of the spacer 04 facing away from the base
substrate 01, and the conductive layer 05 is electrically connected
with the auxiliary electrode 02 through the via hole structures 06
passing through the planarization layer 03, after the step is
finished, a section structure is as shown in FIG. 2.
The opposite substrate shown in FIG. 2 and provided by at least one
embodiment of the present disclosure is obtained by the step 1 to
step 4 in the first example.
The second example: the manufacturing method of the opposite
substrate illustrated in FIG. 4a includes the following
operations:
(1') the black matrices 07 and the color filter layer 08 are formed
on the base substrate 01, and the color filter layer 08 is formed
between two adjacent black matrices 07, after the step is finished,
a section structure is as shown in FIG. 8a.
(2') the auxiliary electrode 02 is formed on the base substrate 01
provided with the black matrices 07, and the orthographic
projections of the black matrices 07 on the base substrate 01 cover
the orthographic projection of the auxiliary electrode 02 on the
base substrate 01, after the step is finished, a section structure
is as shown in FIG. 8b.
(3') the planarization layer 03 for covering the base substrate 01
is formed on the base substrate 01 provided with the auxiliary
electrode 02, the via hole structure 06 penetrating the
planarization layer 03 is formed in the process of forming the
planarization layer 03, the orthographic projection of the
auxiliary electrode 02 on the base substrate 01 covers the
orthographic projection of the via hole structure 06 on the base
substrate 01, and after the step is finished, a section structure
is as shown in FIG. 8d.
(4') the spacer 04 is formed on the base substrate 01 provided with
planarization layer 03, and after the step is finished, a section
structure is as shown in FIG. 8e.
(5') the conductive layer 05 is formed on the side of the spacer 04
facing away from the base substrate 01, in which the conductive
layer 05 at least covers the surface of the spacer 04 facing away
from the base substrate 01, and the conductive layer 05 is
electrically connected with the auxiliary electrode 02 through the
via hole structures 06 passing through the planarization layer 03,
after the step is finished, a section structure is as shown in FIG.
4a.
The opposite substrate shown in FIG. 4a and provided by the
embodiment of the present disclosure is obtained by the step 1 to
step 5' in the second example.
The opposite substrate, the method for manufacturing the opposite
substrate, the organic light-emitting display panel and the display
device provided by the embodiments of the present disclosure have
at least one of the following beneficial effects:
(1) in the opposite substrate provided by at least one embodiment
of the present disclosure, the planarization layer is disposed on
the auxiliary electrode, the spacer is disposed on the
planarization layer, the adhesion of the spacer on the
planarization layer is larger than the adhesion of the spacer on
the auxiliary electrode, and the problem that the spacer is easy to
fall off due to the smooth surface of the auxiliary electrode is
avoided, so that the good product rate of the finally-formed OLED
display products is improved.
(2) in the opposite substrate provided by at least one embodiment
of the present disclosure, the planarization layer and the spacer
are formed by a single patterning process, in this way, the spacer
is formed during the process of forming the planarization layer,
which simplifies the preparation process and saves the cost of
production.
(3) in the opposite substrate provided by at least one embodiment
of the present disclosure, the conductive layer and the auxiliary
electrode are electrically connected in parallel, which equivalents
to increasing the equivalent thickness of the conductive layer,
thus reducing the resistance of the conductive layer and avoiding
the problem of the large voltage drop due to the large resistance
of the conductive layer in a case that the conductive layer is made
of the thin metal, and further the problem of damaging to organic
light-emitting display panel due to the large voltage drop is
avoid.
(4) in the opposite substrate provided by at least one embodiment
of the present disclosure, there are a plurality of via hole
structures, and the conductive layer is electrically connected with
the auxiliary electrode by the plurality of via hole structures
respectively, the thickness of the conductive layer is increased by
parallel connection between the conductive layer and the auxiliary
electrode through the plurality of via hole structures, which is
equivalent to increasing the cross section area of the conductive
layer, thus the resistance of the conductive layer is further
reduced.
Please note that:
(1) the drawings of the embodiments of the present disclosure are
only related to the structures mentioned in the embodiments of the
present disclosure, and other structures can be obtained by general
designs;
(2) for the sake of clarity, sizes of layers or regions in the
drawings for describing the embodiments of the present disclosure
are not drawn according to an actual scale but are exaggerated or
diminished; and
(3) the embodiments of the present disclosure and the features
therein can be combined with each other in the absence of
conflict.
What are described above is related to only the illustrative
embodiments of the disclosure and not limitative to the scope of
the disclosure. The scopes of the disclosure are defined by the
accompanying claims.
* * * * *