U.S. patent application number 17/628515 was filed with the patent office on 2022-09-08 for plasma etching apparatus component for manufacturing semiconductor comprising composite sintered body and manufacturing method therefor.
The applicant listed for this patent is KOREA INSTITUTE OF MATERIALS SCIENCE. Invention is credited to Ha Neul KIM, Mi Ju KIM, Jae Woong KO, Hyeon Myeong OH, Young Jo PARK.
Application Number | 20220285164 17/628515 |
Document ID | / |
Family ID | 1000006419080 |
Filed Date | 2022-09-08 |
United States Patent
Application |
20220285164 |
Kind Code |
A1 |
PARK; Young Jo ; et
al. |
September 8, 2022 |
Plasma Etching Apparatus Component for Manufacturing Semiconductor
Comprising Composite Sintered Body and Manufacturing Method
Therefor
Abstract
Provided is a plasma etching apparatus component for
manufacturing a semiconductor characterized by including a
composite sintered body which contains 30 vol % to 70 vol % of
yttria (Y.sub.2O.sub.3) and 30 vol % to 70 vol % of magnesia (MgO)
and having plasma resistance. The plasma etching apparatus
component for manufacturing a semiconductor provided in one aspect
of the present invention has excellent corrosion resistance to
plasma, and may have good corrosion resistance to plasma even when
the composite sintered body is sintered at a relatively low
relative density. In addition, the composite sintered body has a
small crystal grain size and a small increase in surface roughness
after etching, so that there is an effect that contaminant
particles may be reduced. Furthermore, the plasma etching apparatus
component for manufacturing a semiconductor has excellent strength
compared to a typical plasma-resistant material, is inexpensive,
and is excellent in terms of economic feasibility and
utilization.
Inventors: |
PARK; Young Jo;
(Changwon-si, KR) ; KIM; Ha Neul; (Changwon-si,
KR) ; KO; Jae Woong; (Changwon-si, KR) ; KIM;
Mi Ju; (Gimhae-si, KR) ; OH; Hyeon Myeong;
(Changwon-si, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
KOREA INSTITUTE OF MATERIALS SCIENCE |
Changwon-si |
|
KR |
|
|
Family ID: |
1000006419080 |
Appl. No.: |
17/628515 |
Filed: |
July 13, 2020 |
PCT Filed: |
July 13, 2020 |
PCT NO: |
PCT/KR2020/009193 |
371 Date: |
January 19, 2022 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01J 2237/334 20130101;
H01L 21/3065 20130101; H01J 37/32009 20130101 |
International
Class: |
H01L 21/3065 20060101
H01L021/3065; H01J 37/32 20060101 H01J037/32 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 22, 2019 |
KR |
10-2019-0088164 |
May 25, 2020 |
KR |
10-2020-0062190 |
Claims
1. A plasma etching apparatus component for manufacturing a
semiconductor, the component comprising: a composite sintered body
including 30 vol % to 70 vol % of yttria (Y.sub.2O.sub.3); and 30
vol % to 70 vol % of magnesia (MgO), and the component having
plasma resistance.
2. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein the composite sintered body has a
crystal grain size of 100 nm to 1 .mu.m.
3. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein the composite sintered body has a
crystal grain size of 100 nm to 500 nm.
4. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein the composite sintered body has a
relative density of 90% or higher.
5. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein when the composite sintered body
is exposed to CF.sub.4/0.sub.2 plasma of 500 W output and 100 W
bias for 3 hours, the surface roughness (R.sub.a) of the composite
sintered body increases by 5 times or less.
6. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein the composite sintered body has a
surface roughness (R.sub.a) of 2 nm or less.
7. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein when the composite sintered body
is exposed to CF.sub.4/0.sub.2 plasma of 500 W output and 100 W
bias for 3 hours, the etching depth of the composite sintered body
is 200 nm or less.
8. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein the composite sintered body has a
biaxial strength of 200 MPa or greater.
9. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein the plasma etching apparatus
component for manufacturing a semiconductor is formed of a bulk
material of the composite sintered body.
10. The plasma etching apparatus component for manufacturing a
semiconductor of claim 1, wherein the plasma etching apparatus
component for manufacturing a semiconductor is formed by coating
the composite sintered body on another material.
11. A method for manufacturing a plasma etching apparatus component
for manufacturing a semiconductor, the method comprising: mixing 30
vol % to 70 vol % of yttria (Y.sub.2O.sub.3) and 30 vol % to 70 vol
% of magnesia (MgO); and sintering the mixed yttria
(Y.sub.2O.sub.3) and magnesia (MgO).
12. The method of claim 11, wherein the sintering of the mixed
yttria (Y.sub.2O.sub.3) and magnesia (MgO) is performed at
1000.degree. C. to 1500.degree. C.
13. A plasma etching apparatus for manufacturing a semiconductor
including the plasma etching apparatus component of claim 1.
Description
TECHNICAL FIELD
[0001] The present disclosure relates to a plasma etching apparatus
component for manufacturing a semiconductor including a composite
sintered body and a manufacturing method therefor.
BACKGROUND ART
[0002] Electronic components such as semiconductor devices and
liquid crystal displays are made by repeating processes such as
lamination, patterning, etching, and cleaning of various metals and
non-metal materials. Among the processes, the etching process is a
process of forming an etching target material in a desired shape,
which is one of the most frequently performed processes. The
etching process is performed by various equipment and methods, and
may be broadly divided into isotropic etching and anisotropic
etching. The isotropic etching is a method in which etching is
performed along a specific direction, and usually includes chemical
etching such as wet etching or barrel plasma etching.
[0003] The anisotropic etching may include most dry etching such as
reactive ion etching. In the reactive ion etching, a reaction gas
is ionized and electrically accelerated in a process chamber and,
so that the etching is performed mainly along an electric field
direction. Mostly, in the dry etching, plasma is formed to activate
a reaction gas, and in order to form the plasma, a method of
applying a high frequency (RF) electric field to the reaction gas
is mainly used. However, in recent years, as electronic components
have become increasingly fine, RF power has continued to increase,
so that the corrosion resistance of process equipment components to
plasma has become important. For example, RF power of about 1,000 W
was used in general in the past, but in recent years, power of
about 2,500 W has been also required.
[0004] Here, a number of core components (ceramic components) are
inside a plasma etching apparatus, and these components should have
corrosion resistance, chemical resistance, and mechanical physical
properties against plasma atmosphere formed at a temperature of
150.degree. C. to 200.degree. C.
[0005] Typically, alumina (Al.sub.2O.sub.3) has been mainly used as
a member used in the plasma etching apparatus for manufacturing a
semiconductor, but alumina (Al.sub.2O.sub.3) has weak corrosion
resistance to plasma, and thus, is not suitable as a member in an
environment in which RF power increases. In order to overcome the
limitations, an yttria (Y.sub.2O.sub.3) layer has been applied on
alumina and employed, but yttria has a bending strength of about
160 MPa, which is significantly less than the bending strength of
alumina, which is about 430 MPa, and thus, has low thermal
stability is prone to damage such as cracking. Here, a component of
the plasma etching apparatus component for manufacturing a
semiconductor includes nozzles, injectors, rings, or the like.
[0006] For example, Korean Patent Registration No. 10-0851833
discloses a quartz glass component including quartz glass and a
ceramic thermal sprayed film formed on the surface of the quartz
glass, wherein the ceramic thermal sprayed film has a surface
roughness Ra of 5 to 20 .mu.m and a relative density of 70% to
97%.
[0007] In addition, Korean Patent Registration No. 10-0917292
discloses a ceramic product resistant to corrosion by
halogen-containing-plasma used in semiconductor processing, and the
ceramic product includes a ceramic having at least two phases, and
is formed of yttrium oxide in a molar concentration range of about
50 mole % to about 75 mole %, zirconium oxide in a molar
concentration range of about 10 mole % to about 30 mole %, and at
least one other component selected from the group consisting of
aluminum oxide, hafnium oxide, scandium oxide, neodymium oxide,
niobium oxide, samarium oxide, ytterbium oxide, erbium oxide,
cerium oxide, and a combination thereof, wherein the concentration
range of the at least one other component is about 10 mole % to
about 30 mole %.
[0008] However, as described above, there is a problem in that such
typical techniques have weak corrosion resistance to plasma, have
low thermal stability, and are prone to damage such as
cracking.
[0009] Therefore, since the above number of components (ceramic
parts) are consumable and should be replaced due to other factors
such as corrosion after being used for a certain period of time,
parts with improved mechanical physical properties and improved
plasma resistance are in demand. In addition, in recent years, in
the midst of keen competition for line width miniaturization of
semiconductors, the reduction of contaminant particles is strongly
required to improve production yields. That is, it is important to
develop a material which satisfies the necessary condition of
lowering an etching rate, the condition which is typically pursued,
as well as the sufficient condition of controlling a microstructure
or composition to reduce the generation of contaminant
particles.
PRIOR ART DOCUMENT
[0010] Korean Patent Registration No. 10-0851833
[0011] Korean Patent Registration No. 10-0917292
DISCLOSURE OF THE INVENTION
Technical Problem
[0012] One object of the present invention is to provide a plasma
etching apparatus component for manufacturing a semiconductor, the
component including a composite sintered body containing yttria and
magnesia and having excellent corrosion resistance to plasma.
Technical Solution
[0013] In order to achieve the objects, the present invention
provides a plasma etching apparatus component for manufacturing a
semiconductor characterized by including a composite sintered body
which contains 30 vol % to 70 vol % of yttria (Y.sub.2O.sub.3) and
30 vol % to 70 vol % of magnesia (MgO) and having plasma
resistance.
[0014] The present invention also provides a method for
manufacturing a plasma etching apparatus component for
manufacturing a semiconductor, the method including mixing 30 vol %
to 70 vol % of yttria (Y.sub.2O.sub.3) and 30 vol % to 70 vol % of
magnesia (MgO), and sintering the mixed yttria (Y.sub.2O.sub.3) and
magnesia (MgO).
[0015] Furthermore, the present invention provides a plasma etching
apparatus for manufacturing a semiconductor including the plasma
etching apparatus component.
[0016] A plasma etching apparatus component for manufacturing a
semiconductor has excellent corrosion resistance to plasma, and may
have good corrosion resistance to plasma even when a composite
sintered body is sintered at a relatively low relative density.
Advantageous Effects
[0017] In addition, a composite sintered body included in the
plasma etching apparatus component for manufacturing a
semiconductor has a small crystal grain size and a small increase
in surface roughness after etching, so that there is an effect that
contaminant particles may be reduced.
[0018] Furthermore, the plasma etching apparatus component for
manufacturing a semiconductor has excellent strength compared to a
typical plasma-resistant material, is inexpensive, and is excellent
in terms of economic feasibility and utilization.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] FIG. 1 is a graph showing the measurement of weight
reduction by etching using plasma according to one experimental
example of the present invention;
[0020] FIG. 2 is a schematic view of a method for manufacturing a
composite sintered body according to one example of the present
invention;
[0021] FIG. 3 is a graph showing the measurement of etching depth
by etching using plasma according to one experimental example of
the present invention;
[0022] FIG. 4a to FIG. 4c are SEM images for examples and
comparative examples of the present invention; and
[0023] FIG. 5a to FIG. 5d are AFM images showing surface roughness
after etching using plasma according to one experimental example of
the present invention.
BEST MODE FOR CARRYING OUT THE INVENTION
[0024] Unless otherwise defined, all technical and scientific terms
used herein have the same meaning as commonly understood by those
skilled in the art to which the present invention pertains.
[0025] In one aspect of the present invention, there is provided a
plasma etching apparatus component for manufacturing a
semiconductor characterized by including a composite sintered body
which contains 30 vol % to 70 vol % of yttria (Y.sub.2O.sub.3) and
30 vol % to 70 vol % of magnesia (MgO) and has plasma
resistance.
[0026] Hereinafter, the plasma etching apparatus component for
manufacturing a semiconductor provided in one aspect of the present
invention will be described in detail.
[0027] First, the plasma etching apparatus component provided in
one aspect of the present invention includes a composite sintered
body containing yttria (Y.sub.2O.sub.3) and magnesia (MgO).
[0028] The yttria and magnesia may be mixed in a powder form.
[0029] It is preferable that the yttria has a purity of 99% or
higher.
[0030] In addition, the particle size of the yttria may be 10 nm to
1000 nm. Preferably, the particle size of the yttria may be 20 nm
to 500 nm, more preferably 30 nm to 300 nm. When the particle size
of the yttria is less than 10 nm, there is a problem in that mixing
and molding are difficult, and when greater than 1000 nm, there is
a problem in that strength and sinterability are degraded.
[0031] It is preferable that the magnesia has a purity of 99% or
higher.
[0032] In addition, the particle size of the magnesia may be 10 nm
to 1000 nm. Preferably, the particle size of the magnesia may be 20
nm to 500 nm, more preferably 30 nm to 300 nm. When the particle
size of the magnesia is less than 10 nm, there is a problem in that
mixing and molding are difficult, and when greater than 1000 nm,
there is a problem in that strength and sinterability are
degraded.
[0033] The composite sintered body may include 20 vol % to 80 vol %
of yttria and 20 vol % to 80 vol % of magnesia. The composite
sintered body may include 30 vol % to 70 vol % of yttria and 30 vol
% to 70 vol % of magnesia, 40 vol % to 60 vol % of yttria and 40
vol % to 60 vol % of magnesia, 25 vol % to 45 vol % of yttria and
55 vol % to 75 vol % of magnesia, 55 vol % to 75 vol % of yttria
and 25 vol % to 45 vol % of magnesia, 20 vol % to 35 vol % of
yttria and 65 vol % to 80 vol % of magnesia, or 65 vol % to 80 vol
% of yttria and 20 vol % to 35 vol % of magnesia.
[0034] When the composite sintered body contains less than 20 vol %
of yttria, there are problems in that sintering may be difficult,
particles may be easily formed by plasma irradiation, and strength
may become relatively weak. When the composite sintered body
contains less than 20 vol % of magnesia, there is a problem in that
plasma resistance may be low.
[0035] The yttria and the magnesia may be mixed by milling, but the
mixing method thereof is not limited thereto. The mixing may be
performed by any method commonly used in the art.
[0036] The composite sintered body may have a relative density of
90% or higher, preferably 92% or higher, more preferably 95% or
higher, and even more preferably 98% or higher.
[0037] Even when the composite sintered body has a relative density
of less than 100%, the composite sintered body has good plasma
resistance.
[0038] The composite sintered body may have a surface roughness
(R.sub.a) of 2 nm or less.
[0039] When the composite sintered body is exposed to
CF.sub.4/0.sub.2 plasma of 500 W output and 100 W bias for 3 hours,
the surface roughness (R.sub.a) of the composite sintered body may
increase by 5 times or less, preferably 4 times or less, more
preferably 3.5 times or less, even more preferably 3 times or less,
and most preferably 1.5 times or less.
[0040] Even when exposed to plasma, the composite sintered body has
a small increase in surface roughness compared to typical
plasma-resistant materials, and even after the exposure to plasma,
the composite sintered body has a relatively low surface roughness,
so that contamination particles may be reduced since generated
particles generated by etching may be easily discharged out of a
chamber.
[0041] When the composite sintered body is exposed to
CF.sub.4/0.sub.2 plasma of 500 W output and 100 W bias for 3 hours,
the etching depth of the composite sintered body may be 200 nm or
less, preferably 180 nm or less, and more preferably 150 nm or
less.
[0042] The composite sintered body may have a crystal grain size of
100 nm to 1 .mu.m, preferably 100 nm to 500 nm, and most preferably
150 nm to 350 nm.
[0043] Here, the crystal grain size of a composite sintered body
means an average particle diameter of crystal grains.
[0044] The crystal grain size of the composite sintered body is
very small compared to that of typical plasma resistance materials,
and as a result, contaminant particles may be reduced since the
size of generated particles generated by etching after the exposure
to plasma becomes relatively small, allowing the generated
particles to easily discharged out of a chamber.
[0045] The composite sintered body may further include a sintering
additive. The sintering additive may be, for example, ZrO.sub.2,
ThO.sub.2, or La.sub.2O.sub.3, but is not limited thereto, and may
be a common additive commonly used in the art.
[0046] The composite sintered body may include a sintering additive
in 8 mol % or less, preferably 0.1 mol % to 4 mol %, and more
preferably 0.5 mol % to 3 mol %.
[0047] The composite sintered body may have a biaxial strength of
100 MPa, preferably a biaxial strength of 200 MPa or greater, more
preferably a biaxial strength of 300 MPa or greater, and most
preferably a biaxial strength of 350 MPa or greater.
[0048] The plasma etching apparatus component for manufacturing a
semiconductor may be formed of a bulk material of the composite
sintered body.
[0049] In addition, the plasma etching apparatus component for
manufacturing a semiconductor may be formed by coating the
composite sintered body on another material. The another material
may be, for example, a metal, a ceramic, a polymer, and the like,
but is not limited to a specific material.
[0050] The plasma etching apparatus component for manufacturing a
semiconductor provided in one aspect of the present invention may
be nozzles, injectors, or rings, but is not limited thereto, and
may be any component required to have plasma resistance in a plasma
etching apparatus for manufacturing a semiconductor.
[0051] In another aspect of the present invention, there is
provided a method for manufacturing a plasma etching apparatus
component for manufacturing a semiconductor, the method including
mixing 30 vol % to 70 vol % of yttria (Y.sub.2O.sub.3) and 30 vol %
to 70 vol % of magnesia (MgO), and sintering the mixed yttria
(Y.sub.2O.sub.3) and magnesia (MgO).
[0052] Hereinafter, each step of the method for manufacturing a
plasma etching apparatus component for manufacturing a
semiconductor provided in another aspect of the present invention
will be described in detail.
[0053] First, the method for manufacturing a plasma etching
apparatus component for manufacturing a semiconductor provided in
another aspect of the present invention includes a step of mixing
yttria (Y.sub.2O.sub.3) and magnesia (MgO).
[0054] The yttria and magnesia may be mixed in a powder form.
[0055] It is preferable that the yttria powder has a purity of 99%
or higher.
[0056] In addition, the particle size of the yttria may be 10 nm to
1000 nm. Preferably, the particle size of the yttria may be 20 nm
to 500 nm, more preferably 30 nm to 300 nm. When the particle size
of the yttria is less than 10 nm, there is a problem in that mixing
and molding are difficult, and when greater than 1000 nm, there is
a problem in that strength and sinterability are degraded.
[0057] It is preferable that the magnesia has a purity of 99% or
higher.
[0058] In addition, the particle size of the magnesia may be 10 nm
to 1000 nm. Preferably, the particle size of the magnesia may be 20
nm to 500 nm, more preferably 30 nm to 300 nm. When the particle
size of the magnesia is less than 10 nm, there is a problem in that
mixing and molding are difficult, and when greater than 1000 nm,
there is a problem in that strength and sinterability are
degraded.
[0059] The above step may further include a step of calcining the
yttria and the magnesia. Nanoparticles in a uniform form without
agglomeration may be obtained through the calcination step. After
the calcination step, the particle size of the nanoparticles may be
increased by local sintering among the nanoparticles.
[0060] The calcination step may be performed at a temperature of
1000.degree. C. to 1500.degree. C.
[0061] In the mixing step, 20 vol % to 80 vol % of yttria and 20
vol % to 80 vol % of magnesia may be mixed. 30 vol % to 70 vol % of
yttria and 30 vol % to 70 vol % of magnesia, 40 vol % to 60 vol %
of yttria and 40 vol % to 60 vol % of magnesia, 25 vol % to 45 vol
% of yttria and 55 vol % to 75 vol % of magnesia, 55 vol % to 75
vol % of yttria and 25 vol % to 45 vol % of magnesia, 20 vol % to
35 vol % of yttria and 65 vol % to 80 vol % of magnesia, or 65 vol
% to 80 vol % of yttria and 20 vol % to 35 vol % of magnesia may be
mixed.
[0062] In the mixing step, when less than 20 vol % of yttria is
mixed, there are problems in that sintering may be difficult,
particles may be easily formed by plasma irradiation, and strength
may become relatively weak. When less than 20 vol % of magnesia is
contained, there is a problem in that plasma resistance may be
low.
[0063] The mixing step may be performed by mixing yttria and the
magnesia by milling, but the mixing method thereof is not limited
thereto. The mixing may be performed by any method commonly used in
the art.
[0064] Next, the method for manufacturing a plasma etching
apparatus component for manufacturing a semiconductor provided in
another aspect of the present invention includes a step of
sintering yttria (Y.sub.2O.sub.3) and magnesia (MgO).
[0065] The sintering may be performed by hot pressing (HP) or hot
isostatic pressing (HIP), but is not limited thereto.
[0066] The above step may be performed at a temperature of
1000.degree. C. to 1500.degree. C. and a pressure of 10 MPa to 70
MPa. Specifically, the above step may be performed at a temperature
of 1100.degree. C. to 1400.degree. C.
[0067] When sintering is performed at a temperature lower than
1100.degree. C., there is a problem in that sintering is not
sufficiently achieved. When sintering is performed at a temperature
higher than 1500.degree. C., there is a problem in that excessive
energy is unnecessarily consumed, particles grow excessively, and
strength may be degraded.
[0068] In the above step, sintering may be performed by further
including a sintering additive. The sintering additive may be, for
example, ZrO.sub.2, ThO.sub.2, or La.sub.2O.sub.3, but is not
limited thereto, and may be a common additive commonly used in the
art.
[0069] In the above step, a sintering additive may be included in 8
mol % or less, preferably 0.1 mol % to 4 mol %, and more preferably
0.5 mol % to 3 mol %.
[0070] The sintered composite sintered body may have a relative
density of 90% or higher, preferably 92% or higher, more preferably
95% or higher, and even more preferably 98% or higher.
[0071] Even when the sintered composite sintered body has a
relative density of less than 100%, the sintered composite sintered
body has improved plasma resistance compared to a typical
plasma-resistant ceramic.
[0072] That is, as described above, even when a composite sintered
body having a relatively low relative density is obtained by
performing sintering at a relatively low temperature, it is
possible to obtain a composite sintered body having sufficiently
excellent plasma resistance, so that a process advantage may be
obtained.
[0073] The composite sintered body may have a surface roughness
(R.sub.a) of 2 nm or less.
[0074] When the composite sintered body is exposed to
CF.sub.4/0.sub.2 plasma of 500 W output and 100 W bias for 3 hours,
the surface roughness (R.sub.a) of the composite sintered body may
increase by 5 times or less, preferably 4 times or less, more
preferably 3.5 times or less, even more preferably 3 times or less,
and most preferably 1.5 times or less.
[0075] Even when exposed to plasma, the composite sintered body has
a small increase in surface roughness compared to typical
plasma-resistant materials, and even after the exposure to plasma,
the composite sintered body has a relatively low surface roughness,
so that contamination particles may be reduced since generated
particles generated by etching may be easily discharged out of a
chamber.
[0076] When the composite sintered body is exposed to
CF.sub.4/0.sub.2 plasma of 500 W output and 100 W bias for 3 hours,
the etching depth of the composite sintered body may be 200 nm or
less, preferably 180 nm or less, and more preferably 150 nm or
less.
[0077] The composite sintered body may have a crystal grain size of
100 nm to 1 .mu.m, preferably 100 nm to 500 nm, and most preferably
150 nm to 350 nm.
[0078] Here, the crystal grain size of a composite sintered body
means an average particle diameter of crystal grains.
[0079] The crystal grain size of the composite sintered body is
very small compared to that of typical plasma resistance materials,
and as a result, contaminant particles may be reduced since the
size of generated particles generated by etching after the exposure
to plasma becomes relatively small, allowing the generated
particles to easily discharged out of a chamber.
[0080] The composite sintered body may have a biaxial strength of
100 MPa, preferably a biaxial strength of 200 MPa or greater, more
preferably a biaxial strength of 300 MPa or greater, and most
preferably a biaxial strength of 350 MPa or greater.
[0081] Before the above step, a step of molding the mixed yttria
and the magnesia may be further included. The molding may be
performed by cold isostatic pressing, but is not limited
thereto.
[0082] In addition, before the above step, a step of performing
pre-sintering may be further included. The above step may be
performed at a temperature of 900.degree. C. to 1200.degree. C.
[0083] A plasma etching apparatus component for manufacturing a
semiconductor manufactured by the method for manufacturing a plasma
etching apparatus component for manufacturing a semiconductor
provided in another aspect of the present invention may be formed
of a bulk material of the composite sintered body.
[0084] In addition, the plasma etching apparatus component for
manufacturing a semiconductor manufactured by the method for
manufacturing a plasma etching apparatus component for
manufacturing a semiconductor provided in another aspect of the
present invention may be formed by coating the composite sintered
body on another material. The another material may be, for example,
a metal, a ceramic, a polymer, and the like, but is not limited to
a specific material.
[0085] The plasma etching apparatus component for manufacturing a
semiconductor manufactured by the method for manufacturing a plasma
etching apparatus component for manufacturing a semiconductor
provided in another aspect of the present invention may be nozzles,
injectors, or rings, but is not limited thereto, and may be any
component required to have plasma resistance in a plasma etching
apparatus for manufacturing a semiconductor.
[0086] In yet another aspect of the present invention, there is
provided a plasma etching apparatus for manufacturing a
semiconductor including the plasma etching apparatus component.
MODE FOR CARRYING OUT THE INVENTION
[0087] Hereinafter, the present invention will be described in more
in detail with reference to Examples, Comparative Examples, and
Experimental Examples. The scope of the present invention is not
limited to a particular embodiment and should be construed by the
appended claims. In addition, it should be understood by those
skilled in the art that many modifications and variations may be
made without departing from the scope of the present invention.
Example 1
[0088] 50 vol % of Y.sub.2O.sub.3 and 50 vol % of MgO were
subjected to planetary milling under the condition of 300 rpm for
12 hours using a jar and ball made of YSZ, and then dried to
prepare mixed powder.
[0089] The prepared mixed powder was subjected to cold isostatic
pressing at 200 MPa for 5 minutes, and then pre-sintered in air at
a temperature of 1000.degree. C. for 1 hour. Thereafter, hot
pressing was performed at 1200.degree. C. and 30 MPa for 1 hour to
obtain a composite sintered body. The relative density of the
composite sintered body was measured at 98%.
[0090] A schematic diagram of the above-described manufacturing
process of a composite sintered body is shown in FIG. 2.
Example 2
[0091] A composite sintered body was manufactured in the same
manner as in Example 1, except that hot pressing was performed at
1300.degree. C. and 30 MPa for 1 hour to obtain a composite
sintered body having a relative density of 100%.
Comparative Example 1
[0092] Y.sub.2O.sub.3 having a relative density of 98% was
prepared.
Comparative Example 2
[0093] Y.sub.2O.sub.3 having a relative density of 100% was
prepared.
Comparative Example 3
[0094] Spinel (MgAl.sub.2O.sub.4) having a relative density of 98%
was prepared.
Comparative Example 4
[0095] Spinel (MgAl.sub.2O.sub.4) having a relative density of 100%
was prepared.
<Experimental Example 1> Measurement of Weight Reduction Per
Unit Area
[0096] A dry etcher was used as an inductively coupled plasma
etcher (Manufacturer: DMS, Silicon/metal hybrid etcher). A plasma
of 500 W and a bias of 100 W were applied to the ceramic of each of
Examples 1 and 2 and Comparative Examples 1 to 4 under a vacuum
condition of 5 mTorr with a gas of CF.sub.4 40 sccm+O.sub.2 10
sccm. For the ceramics, the weight reduction per unit area
according to the plasma exposure time was measured.
[0097] The results are as shown in FIG. 1.
[0098] Example 1 has a relative density of 98%, but has an etching
amount of 0.6 g/m.sup.2 per hour, and thus, exhibits a
significantly less etching amount with respect to plasma than the
yttria of each of Comparative Example 1 and Comparative Example 2,
and exhibits no significantly different etching amount when
compared to the spinel of each of Comparative Example 3 and
Comparative Example 4.
[0099] Example 2 with a relative density of 100% has an etching
amount of 0.3 g/m.sup.2 per hour, and thus, has a significantly
reduced etching amount from the etching amount of the yttria of
each of Comparative Example 1 and Comparative Example 2 as well as
the etching amount of the spinel of each of Comparative Example 3
and Comparative Example 4.
[0100] That is, the composite sintered body of Y.sub.2O.sub.3--MgO
exhibits significantly improved plasma corrosion resistance
compared to yttria and spinel which are used as a typical
plasma-resistant ceramic, and even when manufactured to have a
relatively low relative density, exhibits plasma corrosion
resistance equal to or significantly improved from that of a
typical plasma-resistant ceramic.
<Experimental Example 2> Measurement of Etching Depth
[0101] The ceramic of each of Examples 1 and 2 and Comparative
Examples 1 to 4 was exposed to plasma in the same manner as in
Experimental Example 1, except that etching depth was measured
unlike in Experimental Example 1.
[0102] Since the weight reduction as shown in Experimental Example
1 may be affected by the specific gravity of the ceramic, measuring
the etching depth as shown in Experimental Example 2 may be more
suitable for evaluating plasma corrosion resistance.
[0103] The results are shown in FIG. 3.
[0104] Example 1 and Example 2 exhibited etching depths similar to
those of Comparative Example 1 and Comparative Example 2.
[0105] However, the strengths of Example 1 and Example 2 are two
times greater than or equal to those of Comparative Example 1 and
Comparative Example 2, and the prices thereof are less than or
equal to half the prices of Comparative Example 1 and Comparative
Example 2, and thus, it is expected that the utilization of Example
1 and Example 2 will be much higher.
<Experimental Example 3> Comparison of Crystal Grain
Sizes
[0106] SEM images for Example 2, Comparative Example 2, and
Comparative Example 4 are shown in FIG. 4a to FIG. 4c.
[0107] Referring to FIG. 4a to FIG. 4a, Example 2 has a crystal
grain size of about 300 nm, whereas Comparative Example 2 and
Comparative Example 4 have a crystal grain size of about several
.mu.m and more, so that it can be confirmed that the crystal grain
size of Example 2 is much smaller.
[0108] It is possible to relatively easily sinter the ceramic of
Example 2 to have a small crystal grain size, and when the crystal
grain size is small as described above, the size of generated
particles generated by plasma etching is reduced, and as a result,
the generated particles are easily discharged out of a chamber by
pumping out, so that it is possible to reduce the generation of
contaminant particles.
<Experimental Example 4> Measurement of Surface Roughness
[0109] Example 1 and Example 2, and Comparative Example 2 and
Comparative Example 4 were polished to have a surface roughness
(R.sub.a) of about 2 nm, and then the ceramics were exposed to a
plasma of 500 W and a bias of 100 W under a vacuum condition of 5
mTorr with a gas of CF.sub.4 40 sccm+O.sub.2 10 sccm.
[0110] For the ceramics, the surface roughness (R.sub.a) after the
exposure to plasma was measured and shown in FIG. 5a to FIG.
5d.
[0111] Comparative Example 1 and Comparative Example 3 respectively
have a surface roughness of about 9.0 nm and about 10.3 nm after
the exposure to plasma, whereas Example 1 and Example 2
respectively have a surface roughness of about 2.28 nm and 6.05 nm,
and thus, are confirmed to have a much lower surface roughness than
Comparative Example 1 and Comparative Example 3.
[0112] When there is no big difference in surface roughness between
before and after etching as in the case of Example 1 and Example 2,
generated particles generated by plasma etching are easily
discharged out of a chamber by pumping out, so that it is possible
to reduce the generation of contaminant particles.
* * * * *