U.S. patent application number 17/146864 was filed with the patent office on 2022-07-14 for optical components in the back-end-of-line stack of a photonics chip using plural cores vertically stacked.
The applicant listed for this patent is GLOBALFOUNDRIES U.S. Inc.. Invention is credited to Roderick A. Augur, Yusheng Bian, Kenneth J. Giewont, Edward Kiewra, Karen Nummy, Steven M. Shank.
Application Number | 20220221650 17/146864 |
Document ID | / |
Family ID | |
Filed Date | 2022-07-14 |
United States Patent
Application |
20220221650 |
Kind Code |
A1 |
Bian; Yusheng ; et
al. |
July 14, 2022 |
OPTICAL COMPONENTS IN THE BACK-END-OF-LINE STACK OF A PHOTONICS
CHIP USING PLURAL CORES VERTICALLY STACKED
Abstract
Structures including a grating coupler and methods of
fabricating a structure including a grating coupler. The structure
includes structure includes a dielectric layer on a substrate, a
first waveguide core positioned in a first level over the
dielectric layer, and a second waveguide core positioned in a
second level over the dielectric layer. The second level differs in
elevation above the dielectric layer from the first level. The
first waveguide core includes a tapered section. The structure
further includes a grating coupler having a plurality of segments
positioned in the second level adjacent to the second waveguide
core. The segments of the grating coupler and the tapered section
of the first waveguide core are positioned in an overlapping
arrangement.
Inventors: |
Bian; Yusheng; (Ballston
Lake, NY) ; Augur; Roderick A.; (Saratoga Springs,
NY) ; Giewont; Kenneth J.; (Hopewell Junction,
NY) ; Nummy; Karen; (Newburgh, NY) ; Kiewra;
Edward; (South Burlington, VT) ; Shank; Steven
M.; (Jericho, VT) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
GLOBALFOUNDRIES U.S. Inc. |
Santa Clara |
CA |
US |
|
|
Appl. No.: |
17/146864 |
Filed: |
January 12, 2021 |
International
Class: |
G02B 6/122 20060101
G02B006/122; G02B 6/136 20060101 G02B006/136; G02B 6/34 20060101
G02B006/34 |
Claims
1. A structure comprising: a substrate; a dielectric layer on the
substrate; a first waveguide core including a tapered section, the
first waveguide core positioned in a first level over the
dielectric layer; a second waveguide core positioned in a second
level over the dielectric layer, the second level differing in
elevation above the dielectric layer from the first level; and a
first grating coupler including a plurality of segments positioned
in the second level adjacent to the second waveguide core, wherein
the segments of the first grating coupler and the tapered section
of the first waveguide core are positioned in a first overlapping
arrangement.
2. The structure of claim 1 wherein the second waveguide core and
the segments of the first grating coupler comprise nitrogen-doped
silicon carbide or nitrogen-doped hydrogenated silicon carbide.
3. The structure of claim 2 further comprising: a back-end-of-line
stack over the dielectric layer, wherein the back-end-of-line stack
includes the second waveguide core and the first grating coupler,
and the segments of the first grating coupler are positioned over
the tapered section of the first waveguide core.
4. The structure of claim 3 wherein each segment of the first
grating coupler includes a first layer comprised of nitrogen-doped
silicon carbide or nitrogen-doped hydrogenated silicon carbide and
a second layer comprised of silicon nitride.
5. The structure of claim 3 wherein the segments of the first
grating coupler are centered over the tapered section of the first
waveguide core.
6. The structure of claim 2 wherein the tapered section of the
first waveguide core is tapered in a first direction, and the
segments of the first grating coupler are inversely tapered in a
second direction opposite to the first direction.
7. The structure of claim 1 wherein the first waveguide core
comprises nitrogen-doped silicon carbide or nitrogen-doped
hydrogenated silicon carbide.
8. The structure of claim 7 further comprising: a back-end-of-line
stack over the dielectric layer, wherein the back-end-of-line stack
includes the first waveguide core, and the tapered section of the
first waveguide core is positioned over the segments of the first
grating coupler.
9. The structure of claim 8 wherein the back-end-of-line stack
includes a second grating coupler having a plurality of segments
comprised of nitrogen-doped silicon carbide or nitrogen-doped
hydrogenated silicon carbide, the second grating coupler is
positioned in a third level over the dielectric layer, the third
level differs in elevation above the dielectric layer from the
first level and the second level, and the segments of the second
grating coupler are positioned over the tapered section of the
first waveguide core in a second overlapping arrangement.
10. The structure of claim 9 wherein the tapered section of the
first waveguide core is positioned in a vertical direction between
the segments of the first grating coupler and the segments of the
second grating coupler.
11. The structure of claim 7 wherein the tapered section of the
first waveguide core is centered over the segments of the first
grating coupler.
12. A structure comprising: a substrate; a dielectric layer on the
substrate; a first waveguide core positioned in a first level over
the dielectric layer; a first grating coupler positioned in the
first level adjacent to the first waveguide core; a second
waveguide core positioned in a second level over the dielectric
layer; and a second grating coupler including a plurality of
segments positioned in the second level adjacent to the second
waveguide core, wherein the segments of the second grating coupler
and the segments of the first grating coupler are positioned in an
overlapping arrangement.
13. The structure of claim 12 wherein the first grating coupler,
the first waveguide core, the second waveguide core, and the second
grating coupler comprise nitrogen-doped silicon carbide or
nitrogen-doped hydrogenated silicon carbide.
14. The structure of claim 13 further comprising: a
back-end-of-line stack over the dielectric layer, wherein the
back-end-of-line stack includes the first waveguide core, the first
grating coupler, the second waveguide core, and the second grating
coupler, and the segments of the second grating coupler are
positioned over the segments of the first grating coupler.
15. The structure of claim 14 wherein each segment of the second
grating coupler includes a first layer comprised of nitrogen-doped
silicon carbide or nitrogen-doped hydrogenated silicon carbide and
a second layer comprised of silicon nitride.
16. A method comprising: forming a first waveguide core positioned
within a first level over a dielectric layer on a substrate,
wherein the first waveguide core includes a tapered section; and
forming a second waveguide core and a grating coupler adjacent to
the second waveguide core, wherein the second waveguide core and
the grating coupler are positioned in a second level over the
dielectric layer, the second level differs in elevation above the
dielectric layer from the first level, and the grating coupler
includes a plurality of segments positioned in an overlapping
arrangement with the tapered section of the first waveguide
core.
17. The method of claim 16 wherein the second waveguide core and
the segments of the grating coupler comprise nitrogen-doped silicon
carbide or nitrogen-doped hydrogenated silicon carbide.
18. The method of claim 17 further comprising: forming a
back-end-of-line stack over the dielectric layer, wherein the
back-end-of-line stack includes the second waveguide core and the
grating coupler, and the segments of the grating coupler are
positioned over the tapered section of the first waveguide
core.
19. The method of claim 16 wherein the first waveguide core
comprises nitrogen-doped silicon carbide or nitrogen-doped
hydrogenated silicon carbide.
20. The method of claim 19 further comprising: forming a
back-end-of-line stack over the dielectric layer, wherein the
back-end-of-line stack includes the first waveguide core, and the
tapered section of the first waveguide core is positioned over the
segments of the grating coupler.
Description
BACKGROUND
[0001] The present invention relates to photonics chips and, more
specifically, to structures including a grating coupler and methods
of fabricating a structure including a grating coupler.
[0002] Photonics chips are used in numerous applications, such as
data communication systems and data computation systems. A
photonics chip monolithically integrates optical components, such
as waveguides, optical switches, couplers, and modulators, and
electronic components, such as field-effect transistors, into a
unified platform. Among other factors, layout area, cost, and
operational overhead may be reduced by the chip-level integration
of both types of components on the same chip.
[0003] A photonics chip includes a multilayer stack formed by
back-end-of-line processing over the optical components. The
multilayer stack include interlayer dielectric layers arranged in
different levels and metal lines placed in the interlayer
dielectric layers in the different levels. The interlayer
dielectric layers provide electrical isolation, and the metal lines
are vertically interconnected by vias. Conventional photonics chips
do not place optical components, such as grating couplers or
waveguides, in the multilevel stack. Instead, optical components
are formed during middle-of-line and front-end-of-line processing,
which are followed by back-end-of-line processing to form the
multilayer stack.
[0004] Improved structures including a grating coupler and methods
of fabricating a structure including a grating coupler are
needed.
SUMMARY
[0005] In an embodiment of the invention, a structure includes a
substrate, a dielectric layer on the substrate, a first waveguide
core positioned in a first level over the dielectric layer, and a
second waveguide core positioned in a second level over the
dielectric layer. The second level differs in elevation above the
dielectric layer from the first level. The first waveguide core
includes a tapered section. The structure further includes a
grating coupler having a plurality of segments positioned in the
second level adjacent to the second waveguide core. The segments of
the grating coupler and the tapered section of the first waveguide
core are positioned in an overlapping arrangement.
[0006] In an embodiment of the invention, a structure includes a
substrate, a dielectric layer on the substrate, a first waveguide
core positioned in a first level over the dielectric layer, a first
grating coupler positioned in the first level adjacent to the first
waveguide core, a second waveguide core positioned in a second
level over the dielectric layer, and a second grating coupler
including a plurality of segments positioned in the second level
adjacent to the second waveguide core. The segments of the second
grating coupler and the segments of the first grating coupler are
positioned in an overlapping arrangement.
[0007] In an embodiment of the invention, a method includes forming
a first waveguide core positioned within a first level over a
dielectric layer on a substrate, and forming a second waveguide
core and a grating coupler adjacent to the second waveguide core.
The first waveguide core includes a tapered section. The second
waveguide core and the grating coupler are positioned in a second
level over the dielectric layer. The second level differs in
elevation above the dielectric layer from the first level. The
grating coupler includes a plurality of segments positioned in an
overlapping arrangement with the tapered section of the first
waveguide core.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] The accompanying drawings, which are incorporated in and
constitute a part of this specification, illustrate various
embodiments of the invention and, together with a general
description of the invention given above and the detailed
description of the embodiments given below, serve to explain the
embodiments of the invention. In the drawings, like reference
numerals refer to like features in the various views.
[0009] FIG. 1 is a top view of a structure at an initial
fabrication stage of a processing method in accordance with
embodiments of the invention.
[0010] FIG. 2 is a cross-sectional view of the structure taken
generally along line 2-2 in FIG. 1.
[0011] FIG. 3 is a top view of the structure at a fabrication stage
subsequent to FIG. 1.
[0012] FIG. 4 is a cross-sectional view of the structure taken
generally along line 4-4 in FIG. 3.
[0013] FIG. 5 is a cross-sectional view of the structure at a
fabrication stage subsequent to FIG. 4.
[0014] FIG. 6 is a top view of a structure in accordance with
alternative embodiments of the invention.
[0015] FIG. 7 is a cross-sectional view of the structure taken
generally along line 7-7 in FIG. 6.
[0016] FIG. 7A is a cross-sectional view of the structure taken
generally along line 7A-7A in FIG. 6.
[0017] FIG. 8 is a cross-sectional view of a structure in
accordance with alternative embodiments of the invention.
[0018] FIG. 9 is a cross-sectional view of the structure taken
generally along line 9-9 in FIG. 8.
[0019] FIG. 10 is a cross-sectional view of a structure in
accordance with alternative embodiments of the invention.
[0020] FIG. 11 is a top view of a structure in accordance with
alternative embodiments of the invention.
[0021] FIG. 12 is a cross-sectional view of the structure taken
generally along line 12-12 in FIG. 11.
[0022] FIG. 12A is a cross-sectional view of the structure taken
generally along line 12A-12A in FIG. 11.
DETAILED DESCRIPTION
[0023] With reference to FIGS. 1, 2 and in accordance with
embodiments of the invention, a structure 10 for a multilayer
coupler includes a waveguide core 12 having a tapered section 14 of
a given length that terminates at an end surface 16. The tapered
section 14 of the waveguide core 12 may extend lengthwise along a
longitudinal axis 18. The tapered section 14 gradually becomes
narrower in a direction along the longitudinal axis 18 with
decreasing distance from the end surface 16. The tapered section 14
of the waveguide core 12 has a width dimension that varies with
position along the longitudinal axis 18 and that has a minimum
width occurring at the end surface 16. In an embodiment, the width
dimension of the tapered section 14 may be narrowest at the end
surface 16 and vary over its length based on a linear function to
provide a trapezoidal shape. In an alternative embodiment, the
width dimension of the tapered section 14 may be narrowest at the
end surface 16 and vary over its length based on a non-linear
function, such as a quadratic, parabolic, or exponential
function.
[0024] The waveguide core 12 may be comprised of a single-crystal
semiconductor material, such as single-crystal silicon. In an
embodiment, the single-crystal semiconductor material may originate
from a device layer of a silicon-on-insulator (SOI) substrate that
further includes a dielectric layer 20 provided by a buried oxide
layer and a substrate 22 comprised of a single-crystal
semiconductor material, such as single-crystal silicon. The
waveguide core 12 may be patterned from the device layer by
lithography and etching processes during front-end-of-line
processing. The waveguide core 12 and its tapered section 14 are
positioned in a given layer or level over the dielectric layer 20
and the substrate 22.
[0025] With reference to FIGS. 3, 4 in which like reference
numerals refer to like features in FIGS. 1, 2 and at a subsequent
fabrication stage, a dielectric layer 24, a patterned dielectric
layer 26, and dielectric layers 25, 27, 29, 31 are formed over the
waveguide core 12 and dielectric layer 20. The dielectric layers
25, 29, 31 may be comprised of silicon dioxide, and the dielectric
layer 27 may be comprised of silicon nitride. The silicon dioxide
comprising the dielectric layers 25, 29, 31 may be formed by
plasma-enhanced chemical vapor deposition using ozone and
tetraethylorthosilicate (TEOS) as reactants. Alternatively, the
silicon dioxide comprising one or more of the dielectric layers 25,
29, 31 may be fluorinated by adding fluorine as an additional
reactant during plasma-enhanced chemical vapor deposition.
Alternatively, the silicon dioxide comprising the dielectric layers
25, 29, 31 may comprise stacked sublayers containing
tetraethylorthosilicate silicon dioxide and
fluorinated-tetraethylorthosilicate silicon dioxide.
[0026] The dielectric layer 24 and the dielectric layers 25, 27,
29, 31 may be solid and non-patterned (i.e., unbroken) above the
waveguide core 12. The dielectric layer 24, the dielectric layers
25, 27, 29, 31, and the patterned dielectric layer 26 may have a
refractive index that is less than the refractive index of the
waveguide core 12. The dielectric layer 24 and patterned dielectric
layer 26 may have a refractive index that is greater than the
refractive index of dielectric layers 25, 29, 31. The dielectric
layer 27 may also have a refractive index that is greater than the
refractive index of dielectric layers 25, 29, 31. The dielectric
layer 27 is positioned in a vertical direction between the
dielectric layers 25, 29, the dielectric layer 24 is positioned in
a vertical direction between the dielectric layers 29, 31, and the
dielectric layer 31 is positioned in a vertical direction between
the dielectric layer 24 and the patterned dielectric layer 26. The
dielectric layer 24 is positioned in a vertical direction between
the waveguide core 12 and the patterned dielectric layer 26.
[0027] The dielectric layer 24 and the patterned dielectric layer
26 are comprised of a material having a different composition than
the materials of the dielectric layers 25, 27, 29, 31. In an
embodiment, the dielectric layer 24 and the patterned dielectric
layer 26 may be comprised of silicon-carbon nitride (e.g.,
nitrogen-doped silicon carbide (SiCN)) deposited by chemical vapor
deposition or plasma-enhanced chemical vapor deposition using
reactants that supply silicon, carbon, and nitrogen. In an
embodiment, the dielectric layer 24 and the patterned dielectric
layer 26 may be comprised of hydrogenated silicon-carbon nitride
(e.g., nitrogen-doped hydrogenated silicon carbide (SiCNH))
deposited by chemical vapor deposition or plasma-enhanced chemical
vapor deposition using reactants that supply silicon, carbon,
nitrogen, and hydrogen.
[0028] The dielectric layers 25, 27, 29, which may be formed by
middle-of-line processing, may include contacts that are coupled to
electronic components, such as field-effect transistors, and active
optical components, such as a Mach-Zehnder modulator. The
dielectric layer 24, the patterned dielectric layer 26, and the
intervening dielectric layer 31 may be formed by back-end-of-line
processing as levels in a back-end-of-line stack 48.
[0029] The patterned dielectric layer 26 includes a waveguide core
28 having a tapered section 30 and a grating coupler 32 with
tapered segments 34 that provide the grating structures of the
grating coupler 32. The tapered section 30 of the waveguide core 28
is positioned adjacent to the tapered segments 34 of the grating
coupler 32, and the tapered section 30 and tapered segments 34 are
arranged lengthwise along a longitudinal axis 38.
[0030] Each tapered segment 34 may gradually become narrower in a
direction along the longitudinal axis 38 with increasing distance
from an end surface 35 of the segment 34 furthest from the tapered
section 30 of the waveguide core 28. In the representative
embodiment, each tapered segment 34 is a ridge or strip that has a
width dimension that decreases with decreasing distance from the
tapered section 30 of the waveguide core 28. In an embodiment, the
width dimension of the tapered segments 34 may be narrowest at the
end surface 35 and vary over the length of the grating coupler
based on a linear function. In the representative embodiment, the
width dimensions of the tapered segments 34 are selected such that
the grating coupler 32 is inversely tapered. In an embodiment, the
tapered segments 34 and the tapered section 30 each define an
inverse taper that is tapered in the opposite direction with
respect to the tapering of the tapered section 14 of the waveguide
core 12. As used herein, an inverse taper is a tapered section of
waveguide core with a gradual increase in width along the
propagation direction of the light guided by the inverse taper. In
an embodiment, the width dimension of the tapered segments 34 may
vary based on a linear function to provide a trapezoidal shape. In
an alternative embodiment, the width dimension of the tapered
segments 34 may vary based on a non-linear function, such as a
quadratic, parabolic, or exponential function.
[0031] The patterned dielectric layer 26 may be formed by
lithography and etching processes. The patterned dielectric layer
26 may be fully etched or, alternatively, only partially etched to
define a thin slab layer coupled to a lower portion of the tapered
segments 34 and at least the tapered section 30 of the waveguide
core 28. The tapered segments 34 have an alternating arrangement
with grooves 36 that separate adjacent pairs of the tapered
segments 34 and that separate the tapered segment 34 at one end of
the grating coupler 32 from the tapered section 30 of the waveguide
core 28. If the patterned dielectric layer 26 is fully etched, the
grooves 36 may extend to the dielectric layer 31 such that strips
of the dielectric layer 31 are revealed between the tapered
segments 34. In an embodiment, the pitch and duty cycle of the
tapered segments 34 may be uniform to define a periodic
arrangement. In alternative embodiments, the pitch and/or the duty
cycle of the tapered segments 34 may be apodized (i.e.,
non-uniform) to define a non-periodic arrangement. The duty cycle
and pitch of the tapered segments 34, as well as the dimensions of
the tapered segments 34, may be selected to optimize phase matching
with the tapered section 14 of the waveguide core 12.
[0032] The waveguide core 28 and the grating coupler 32 are
positioned in a given layer or level in the back-end-of-line stack
48 over the dielectric layer 20 on the substrate 22. The level of
the waveguide core 28 and the grating coupler 32 differs in
elevation above the dielectric layer 20 from the level of the
waveguide core 12 and its tapered section 14. The dielectric layer
24 is also positioned in a given layer or level in the
back-end-of-line stack 48 over the dielectric layer 20 on the
substrate 22, and the level of the dielectric layer 24 differs in
elevation above the dielectric layer 20 from the level of the
waveguide core 28 and grating coupler 32 and differs in elevation
above the dielectric layer 20 from the level of the waveguide core
12 and its tapered section 14.
[0033] The tapered segments 34 of the grating coupler 32 are
positioned over the tapered section 14 of the waveguide core 12 and
have an overlapping relationship with the tapered section 14 of the
waveguide core 12. In an embodiment, the tapered segments 34 of the
grating coupler 32 may be centered over the tapered section 14 of
the waveguide core 12. In an embodiment, the tapered segments 34 of
the grating coupler 32 may be wider than the tapered section 14 of
the waveguide core 12 at any position along the longitudinal axes
18, 38. In an embodiment, the longitudinal axis 18 may be aligned
parallel to the longitudinal axis 38. The overlapped positioning
may promote the efficient interlayer transmission of optical
signals from the waveguide core 12 upward to the waveguide core
28.
[0034] In the representative embodiment, the dielectric layer 24 is
positioned between the grating coupler 32 and the waveguide core 12
such that a single solid and non-patterned layer comprised of the
same material as the waveguide core 28 and the grating coupler 32
is positioned in a vertical direction between the tapered section
14 of the waveguide core 12 and the grating coupler 32. In an
alternative embodiment, the dielectric layer 24 may be patterned to
form the waveguide core 28 and the grating coupler 32, and the
dielectric layer 26 may be solid and non-patterned such that a
solid and non-patterned layer comprised of the same material as the
waveguide core 28 and the grating coupler 32 is not positioned in a
vertical direction between the tapered section 14 of the waveguide
core 12 and the grating coupler 32.
[0035] With reference to FIG. 5 in which like reference numerals
refer to like features in FIG. 4 and at a subsequent fabrication
stage, additional dielectric layers 39, 40, 41, 42, 43, 44, 45 of
the back-end-of-line stack 48 are formed by back-end-of-line
processing over the patterned dielectric layer 26 and the
dielectric layer 31. The dielectric layers 39, 41, 44 may be
comprised of silicon dioxide (e.g., tetraethylorthosilicate silicon
dioxide and/or fluorinated-tetraethylorthosilicate silicon
dioxide), the dielectric layers 43, 45 may be comprised of silicon
nitride, and the dielectric layers 40, 42 may be comprised of
either silicon-carbon nitride or hydrogenated silicon-carbon
nitride. Portions of the dielectric layer 39 may fill the grooves
36 between the tapered segments 34 of the grating coupler 32.
[0036] The dielectric layer 40 is arranged in a vertical direction
between the dielectric layers 39, 41, the dielectric layer 42 is
arranged in a vertical direction between the dielectric layers 41,
43, and the dielectric layer 44 is arranged in a vertical direction
between the dielectric layers 43, 45. The dielectric layer 43 may
directly the dielectric layer 42. The dielectric layers 40, 42 are
positioned in given layers or levels over the dielectric layer 20
on the substrate 22, and the levels of the dielectric layers 40, 42
differ in elevation above the dielectric layer 20 from the level of
the grating coupler 32 and also differ in elevation above the
dielectric layer 20 from the level of the waveguide core 12 and its
tapered section 14.
[0037] In an alternative embodiment, the dielectric layer 40 may be
patterned to form the waveguide core 28 and the grating coupler 32,
and the dielectric layers 24, 26 may be solid and non-patterned. In
this embodiments, multiple dielectric layers 24, 26 that are solid
and non-patterned, and that are comprised of the same material as
the waveguide core 28 and the grating coupler 32, may be positioned
in a vertical direction between the tapered section 14 of the
waveguide core 12 and the grating coupler 32.
[0038] In use, optical signals are guided by the waveguide core 12
to the structure 10. The arriving optical signals are transmitted
upwardly from the tapered section 14 of the waveguide core 12 to
the grating coupler 32 located in the back-end-of-line stack 48.
The waveguide core 28, which is also located in the
back-end-of-line stack 48, guides the optical signals away from the
grating coupler 32.
[0039] The structure 10 includes layers of different materials
arranged in different levels of a multiple-level coupler. The
structure 10, in any of its embodiments described herein, may be
integrated into a photonics chip that may include electronic
components and additional optical components in addition to the
structure 10. The electronic components may include, for example,
field-effect transistors that are fabricated by CMOS processing
using the device layer of the silicon-on-insulator substrate. The
back-end-of-line stack 48 may include metal lines that are stacked
into the different levels and that are vertically interconnected
through vias with the electronic components and active optical
components. The metal lines of the back-end-of-line stack 48 may be
absent in the vicinity of the structure 10 so as to not interfere
with the multilevel transfer of optical signals by the structure
10.
[0040] With reference to FIGS. 6, 7, 7A and in accordance with
alternative embodiments of the invention, the structure 10 may be
modified to introduce a grating coupler 50 that is optically
coupled to the waveguide core 12, to provide the waveguide core 28
with a tapered section 54 that is not segmented, and to eliminate
the grating coupler 32 from the patterned dielectric layer 26. The
grating coupler 50 includes segments 52 that supply grating
structures. The segments 52 have an alternating arrangement with
grooves that separate adjacent pairs of segments 52. In an
embodiment, the pitch and duty cycle of the segments 52 may be
uniform to define a periodic arrangement. In alternative
embodiments, the pitch and/or the duty cycle of the segments 52 may
be apodized (i.e., non-uniform) to define a non-periodic
arrangement.
[0041] The segments 52 of the grating coupler 50 may be comprised
of, for example, polycrystalline silicon (i.e., polysilicon). The
segments 52 of the grating coupler 50 may be formed, for example,
by depositing a layer of polysilicon and patterning the deposited
polysilicon layer with lithography and etching processes. The
dielectric layer 27 may conformally extend across the segments 52
and portions of the waveguide core 12 not covered by the segments
52. The waveguide core 12 may be a straight waveguide core that is
non-tapered. The segments 52 may be surrounded by a layer (not
shown) comprised of a material (e.g., silicon dioxide) having a
different composition than the material of the dielectric layer
27.
[0042] The waveguide core 28 and its tapered section 54 are
positioned in a given layer or level over the dielectric layer 20
on the substrate 22. The level of the tapered section 54 differs in
elevation above the dielectric layer 20 from the level of the
grating coupler 50. The tapered section 54 of the waveguide core 28
is positioned over the segments 52 of the grating coupler 50 and
overlaps with the segments 52 of the grating coupler 50. In
particular, the tapered section 54 is terminated by an end surface
56 that is located over the segments 52 of the grating coupler 50.
In an embodiment, the tapered section 54 of the waveguide core 28
may be centered over the segments 52 of the grating coupler 50. The
overlapped positioning of the tapered section 54 over the grating
coupler 50 may promote the efficient transfer of optical signals
from the waveguide core 12 upward to the waveguide core 28. In an
embodiment, the segments 52 and the waveguide core 12 may have
substantially equal width dimensions, and the width dimension of
the tapered section 54 may be greater than the width dimension of
the segments 52 where overlapped.
[0043] Processing of the structure 10 continues as described in
connection with FIG. 5.
[0044] With reference to FIGS. 8, 9 and in accordance with
alternative embodiments of the invention, the dielectric layers 42,
43 may be patterned to form a waveguide core 68 similar to the
waveguide core 28 and a grating coupler 72 similar to the grating
coupler 32, and the dielectric layers 24, 26, 40 may be solid and
non-patterned. The dielectric layers 24, 26, 40, which are solid
and non-patterned, are comprised of the same dielectric material as
lower portions of the waveguide core 68 and the grating coupler 72,
and the dielectric layers 24, 26, 40 are positioned in a vertical
direction between the tapered section 14 of the waveguide core 12
and the grating coupler 72. The grating coupler 72 includes tapered
segments 64 similar to tapered segments 34, grooves 66 similar to
grooves 36 between adjacent tapered segments 64, and a tapered
section 70 similar to tapered section 30. The tapered segments 64
of the grating coupler 72 are comprised of multiple dielectric
materials, in this instance the material of the dielectric layer 42
as a lower portion and the material of the dielectric layer 43 as
an upper portion. The tapered segments 64 and the tapered section
70 are positioned along a longitudinal axis 78. In an embodiment,
the tapered segments 64 of the grating coupler 72 may be centered
over the tapered segments 34 of the grating coupler 32 and the
tapered section 14 of the waveguide core 12.
[0045] Processing of the structure 10 continues as described in
connection with FIG. 5 to form the dielectric layers 44, 45 over
the waveguide core 68 and grating coupler 72.
[0046] With reference to FIG. 10 and in accordance with alternative
embodiments of the invention, the structure 10 may include a
waveguide core 82 and a grating coupler 84 that replace the
waveguide core 12, and both of the grating couplers 32, 72. Optical
signals from the grating coupler 84 to both of the grating couplers
32, 72 and distributed to the waveguide cores 28, 68 within
multiple levels in the back-end-of-line stack 48. The grating
coupler 84 may include tapered segments 86 similar to tapered
segments 34 and grooves similar to grooves 36 between adjacent
tapered segments 86. In an embodiment, the tapered segments 64 of
the grating coupler 72 may be centered over the tapered segments 34
of the grating coupler 32.
[0047] The waveguide core 82 and grating coupler 84 may be formed
by depositing a layer of a material (e.g., silicon nitride) on the
dielectric layer 25 and patterning the deposited layer by
lithography and etching processes during middle-of-line processing.
In an alternative embodiment, the waveguide core 82 and grating
coupler 84 may be comprised of a different material, such as
single-crystal silicon, that is formed by processing similar to
that described in connection with the formation of the waveguide
core 12.
[0048] With reference to FIGS. 11, 12, 12A and in accordance with
alternative embodiments of the invention, the structure 10 may
include a grating coupler 94 that is positioned over the tapered
section 54. The grating coupler 94 includes segments 96 and grooves
95 that are positioned between adjacent segments 96. In an
embodiment, the segments 96 of the grating coupler 94 may be wider
than the tapered section 54 where overlapped. The grating coupler
94 may be formed by patterning the dielectric layer 40 by
lithography and etching processes. The grating coupler 94 may
function as a reflector to reflect optical signals that are not
captured by the tapered section 54 of the waveguide core 28
downwardly toward the tapered section 54, which may provide for
improved light confinement and reduced light leakage.
[0049] Processing of the structure 10 continues as described in
connection with FIG. 5 to form dielectric layers 41, 42 43, 44,
45.
[0050] The methods as described above are used in the fabrication
of integrated circuit chips. The resulting integrated circuit chips
can be distributed by the fabricator in raw wafer form (e.g., as a
single wafer that has multiple unpackaged chips), as a bare die, or
in a packaged form. The chip may be integrated with other chips,
discrete circuit elements, and/or other signal processing devices
as part of either an intermediate product or an end product. The
end product can be any product that includes integrated circuit
chips, such as computer products having a central processor or
smartphones.
[0051] References herein to terms modified by language of
approximation, such as "about", "approximately", and
"substantially", are not to be limited to the precise value
specified. The language of approximation may correspond to the
precision of an instrument used to measure the value and, unless
otherwise dependent on the precision of the instrument, may
indicate +/-10% of the stated value(s).
[0052] References herein to terms such as "vertical", "horizontal",
etc. are made by way of example, and not by way of limitation, to
establish a frame of reference. The term "horizontal" as used
herein is defined as a plane parallel to a conventional plane of a
semiconductor substrate, regardless of its actual three-dimensional
spatial orientation. The terms "vertical" and "normal" refer to a
direction perpendicular to the horizontal, as just defined. The
term "lateral" refers to a direction within the horizontal
plane.
[0053] A feature "connected" or "coupled" to or with another
feature may be directly connected or coupled to or with the other
feature or, instead, one or more intervening features may be
present. A feature may be "directly connected" or "directly
coupled" to or with another feature if intervening features are
absent. A feature may be "indirectly connected" or "indirectly
coupled" to or with another feature if at least one intervening
feature is present. A feature "on" or "contacting" another feature
may be directly on or in direct contact with the other feature or,
instead, one or more intervening features may be present. A feature
may be "directly on" or in "direct contact" with another feature if
intervening features are absent. A feature may be "indirectly on"
or in "indirect contact" with another feature if at least one
intervening feature is present. Different features overlap if a
feature extends over, and covers a part of, another feature.
[0054] The descriptions of the various embodiments of the present
invention have been presented for purposes of illustration but are
not intended to be exhaustive or limited to the embodiments
disclosed. Many modifications and variations will be apparent to
those of ordinary skill in the art without departing from the scope
and spirit of the described embodiments. The terminology used
herein was chosen to best explain the principles of the
embodiments, the practical application or technical improvement
over technologies found in the marketplace, or to enable others of
ordinary skill in the art to understand the embodiments disclosed
herein.
* * * * *