U.S. patent application number 17/248074 was filed with the patent office on 2022-07-07 for lens adjustment for an edge exposure tool.
The applicant listed for this patent is Taiwan Semiconductor Manufacturing Company Limited. Invention is credited to Yu Kai CHEN, Yong-Ting WU.
Application Number | 20220214621 17/248074 |
Document ID | / |
Family ID | 1000006418169 |
Filed Date | 2022-07-07 |
United States Patent
Application |
20220214621 |
Kind Code |
A1 |
WU; Yong-Ting ; et
al. |
July 7, 2022 |
LENS ADJUSTMENT FOR AN EDGE EXPOSURE TOOL
Abstract
An edge exposure tool may include a lens adjustment device that
is capable of automatically adjusting various parameters of an edge
exposure lens to account for changes in operating parameters of the
edge exposure tool. In some implementations, the edge exposure tool
may also include a controller that is capable of determining edge
adjustment parameters for the edge exposure lens and exposure
control parameters for the edge exposure tool using techniques such
as big data mining, machine learning, and neural network
processing. The lens adjustment device and the controller are
capable of reducing and/or preventing the performance of the edge
exposure tool from drifting out of tolerance, which may maintain
the operation performance of the edge exposure tool and reduce the
likelihood of wafer scratching, and may reduce the down-time of the
edge exposure tool that would otherwise be caused by cleaning and
calibration of the edge exposure lens.
Inventors: |
WU; Yong-Ting; (Tainan City,
TW) ; CHEN; Yu Kai; (Tainan City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Taiwan Semiconductor Manufacturing Company Limited |
Hsinchu |
|
TW |
|
|
Family ID: |
1000006418169 |
Appl. No.: |
17/248074 |
Filed: |
January 7, 2021 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G03F 7/70141 20130101;
G03F 7/203 20130101 |
International
Class: |
G03F 7/20 20060101
G03F007/20 |
Claims
1. An edge exposure tool, comprising: an edge exposure lens; and a
lens adjustment device comprising a lens adjustment element that
comprises: a housing, a support arm attached to the housing, and a
position sensor mounted to the support arm, wherein the lens
adjustment device is configured to automatically adjust one or more
parameters of the edge exposure lens based on one or more edge
exposure lens adjustment parameters.
2. The edge exposure tool of claim 1, wherein the one or more edge
exposure lens adjustment parameters comprise at least one of: a
distance between the edge exposure lens and a top surface of a
wafer, a vertical position of a first section of the edge exposure
lens, a vertical position of a second section of the edge exposure
lens, or a horizontal position of the edge exposure lens.
3. The edge exposure tool of claim 1, further comprising: a
controller configured to determine the one or more edge exposure
lens adjustment parameters.
4. The edge exposure tool of claim 3, wherein the one or more edge
exposure lens adjustment parameters includes a distance between a
lens section of the edge exposure lens and a top surface of a
photoresist layer on a wafer; and wherein the controller, when
determining the one or more edge exposure lens adjustment
parameters, is configured to: determine the distance based on at
least one of: a thickness of the wafer, a thickness of the
photoresist layer, or an exposure field for the wafer.
5. The edge exposure tool of claim 3, further comprising: a vacuum
chuck configured to support and rotate a wafer, wherein the
controller is further configured to: determine a vacuum intensity
for the vacuum chuck.
6. The edge exposure tool of claim 3, wherein the controller is
further configured to: determine one or more exposure control
parameters, for a wafer to be processed by the edge exposure tool,
based on at least one of: a thickness of a photoresist layer on the
wafer, or an amount of fogging of a lens section of the edge
exposure lens.
7. The edge exposure tool of claim 6, wherein the one or more
exposure control parameters comprise at least one of: a reference
exposure intensity for radiation that is to be directed toward the
wafer by the edge exposure lens, a lower exposure intensity for the
radiation that is to be directed toward the wafer by the edge
exposure lens, a shutter opening delay for the edge exposure lens,
a shutter closing delay for the edge exposure lens, or an exposure
rotation time for the wafer.
8. A method, comprising: determining, by a controller of an edge
exposure tool, one or more edge exposure lens adjustment parameters
for an edge exposure lens of the edge exposure tool causing, by the
controller, a lens adjustment device of the edge exposure tool to
adjust one or more parameters of the edge exposure lens based on
the one or more edge exposure lens adjustment parameters, wherein
the lens adjustment device comprises a lens adjustment element that
comprises: a housing, a support arm attached to the housing, and a
position sensor mounted to the support arm; and causing, by the
controller, the edge exposure lens to direct radiation toward a
wafer at or approximately near an edge of the wafer after the one
or more parameters of the edge exposure lens are adjusted.
9. The method of claim 8, wherein causing the lens adjustment
device of the edge exposure tool to adjust the one or more
parameters of the edge exposure lens comprises: causing the lens
adjustment device of the edge exposure tool to adjust a distance
between the edge exposure lens and the wafer based on the one or
more edge exposure lens adjustment parameters.
10. The method of claim 8, wherein causing the lens adjustment
device of the edge exposure tool to adjust the one or more
parameters of the edge exposure lens comprises: causing the lens
adjustment device of the edge exposure tool to adjust a horizontal
position of the edge exposure lens by moving the support arm inward
or outward based on the one or more edge exposure lens adjustment
parameters.
11. The method of claim 8, wherein determining the one or more edge
exposure lens adjustment parameters comprises: determining the one
or more edge exposure lens adjustment parameters based on one or
more cycle-to-cycle tuning parameters for the edge exposure
tool.
12. The method of claim 11, wherein determining the one or more
edge exposure lens adjustment parameters based on the one or more
cycle-to-cycle tuning parameters comprises: determining one or more
target edge exposure lens parameters for the edge exposure lens
based on the one or more cycle-to-cycle tuning parameters; and
determining the one or more edge exposure lens adjustment
parameters based on: the one or more target edge exposure lens
parameters; and one or more initial edge exposure lens
parameters.
13. The method of claim 11, wherein the one or more cycle-to-cycle
tuning parameters comprise at least one of: a lens life of a lens
section included in the edge exposure lens, a lens shutter life of
one or more lens shutters included in the edge exposure lens, an
exposure mode of the edge exposure tool, or a chuck vacuum filter
life of a chuck vacuum filter included in the edge exposure
tool.
14. The method of claim 11, wherein the one or more cycle-to-cycle
tuning parameters comprise at least one of: a lens optical fiber
life of an optical fiber cable included in the edge exposure tool,
a lens lamp life of a radiation source included in the edge
exposure tool, an exposure distance between an exposure field of
the edge exposure lens and an edge of the wafer, or a leveling
status of a vacuum chuck, included in the edge exposure tool, on
which the wafer is positioned.
15. An edge exposure tool, comprising: a vacuum chuck configured to
support a wafer; an edge exposure lens configured to direct
radiation toward an edge of the wafer when the vacuum chuck rotates
the wafer, comprising: a first section, and a second section
interfaced with the first section; and a lens adjustment device
comprising: a first lens adjustment element comprising: a housing,
a support arm attached to the housing and configured to support the
first section, and a position sensor mounted to the support arm,
wherein the first lens adjustment element is configured to
automatically adjust one or more first parameters of the first
section, and a second lens adjustment element configured to
automatically adjust one or more second parameters of the second
section, wherein at least one of the one or more first parameters
or the one or more second parameters are associated with a
horizontal position of the edge exposure lens.
16. The edge exposure tool of claim 15, wherein the edge exposure
lens further comprises: a vertical adjustment section connected to
a mounting plate and interfaced with the first section; and a lens
section interfaced with the second section.
17. The edge exposure tool of claim 15, wherein the lens adjustment
device further comprises: an elongated support member configured to
support the first lens adjustment element and the second lens
adjustment element.
18. The edge exposure tool of claim 15, wherein the first lens
adjustment element further comprises: an adjustment motor mounted
to the housing.
19. The edge exposure tool of claim 18, further comprising: a
controller configured to: receive, from the position sensor,
position information associated with the first lens adjustment
element; determine an initial vertical position of the first
section based on the position information associated with the first
lens adjustment element; determine an adjusted vertical position
for the first section based on the initial vertical position; and
provide, to the adjustment motor, a signal to cause the adjustment
motor to move the first lens adjustment element along an elongated
support member such that the first section is moved to the adjusted
vertical position.
20. The edge exposure tool of claim 15, further comprising: a
controller configured to: determine at least one of the one or more
first parameters or the one or more second parameters using at
least one of a machine learning model or an artificial neural
network.
Description
BACKGROUND
[0001] A wafer edge exposure (WEE) tool is a semiconductor
processing tool that is capable of processing an edge of a wafer
along an outer perimeter of the wafer. As an example, a WEE tool
may be used to expose a photoresist layer on the edge to seal the
edge of the wafer while leaving the remaining portions of the
photoresist layer unexposed, which may protect the edge of the
wafer contaminants. As another example, a WEE tool may be used to
expose a photoresist layer on the edge of the wafer to expose
alignment marks covered by the photoresist layer, which permits the
wafer to be aligned during subsequent semiconductor processes.
BRIEF DESCRIPTION OF THE DRAWINGS
[0002] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It is noted that, in accordance with the standard practice
in the industry, various features are not drawn to scale. In fact,
the dimensions of the various features may be arbitrarily increased
or reduced for clarity of discussion.
[0003] FIGS. 1 and 2 are diagrams of an example edge exposure tool
described herein.
[0004] FIGS. 3A-3C are diagrams of an example implementation
described herein.
[0005] FIG. 4 is a diagram of example components of one or more
devices of FIGS. 1 and 2.
[0006] FIGS. 5 and 6 are flowcharts of example processes relating
to adjusting an edge exposure lens.
DETAILED DESCRIPTION
[0007] The following disclosure provides many different
embodiments, or examples, for implementing different features of
the provided subject matter. Specific examples of components and
arrangements are described below to simplify the present
disclosure. These are, of course, merely examples and are not
intended to be limiting. For example, the formation of a first
feature over or on a second feature in the description that follows
may include embodiments in which the first and second features are
formed in direct contact, and may also include embodiments in which
additional features may be formed between the first and second
features, such that the first and second features may not be in
direct contact. In addition, the present disclosure may repeat
reference numerals and/or letters in the various examples. This
repetition is for the purpose of simplicity and clarity and does
not in itself dictate a relationship between the various
embodiments and/or configurations discussed.
[0008] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper" and the like, may be used herein
for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly.
[0009] A wafer edge exposure (WEE) tool may include a vacuum chuck
on which a wafer is mounted. A WEE tool may also include a lens
that is connected to an electromagnetic radiation source. The lens
may be used to focus electromagnetic radiation from the
electromagnetic radiation source toward the edge of a wafer.
Operation of the WEE tool may cause some operating parameters of
the WEE tool to shift or change over time and from cycle to cycle.
For example, the vertical and/or horizontal position of the lens
may change over time, the lens may become fogged due to repeated
exposure cycles, the WEE tool may be used on wafers having
different edge thicknesses, and/or the condition of the
electromagnetic radiation source may degrade over time and over an
accumulation of exposure cycles. As a result, the position of the
lens, the focus of the lens, the illuminance of the lens, and/or
other parameters may change over repeated cycles of the WEE tool,
which can result in the performance of the WEE tool drifting out of
tolerance. This may result in reduced operation performance of the
WEE tool, and may result in scratches on the surface of a wafer due
to improper lens positioning.
[0010] Some implementations described herein provide an edge
exposure tool (e.g., a WEE tool) that includes a lens adjustment
device. The lens adjustment device is capable of automatically
adjusting various parameters of an edge exposure lens of the edge
exposure tool to account for changes in operating parameters of the
edge exposure tool over time and from cycle to cycle. The edge
exposure tool may include a controller that is capable of
determining one or more edge adjustment parameters for the edge
exposure lens and one or more exposure control parameters for the
edge exposure tool using techniques such as big data mining,
machine learning, and neural network processing. In this way, the
lens adjustment device and the controller are capable of reducing
and/or preventing the performance of the edge exposure tool from
drifting out of tolerance, which can maintain the operation
performance of the edge exposure tool and reduce the likelihood of
wafer scratching. Moreover, in this way, the lens adjustment device
and the controller may reduce the downtime of the edge exposure
tool that would otherwise be caused by cleaning and calibration of
the edge exposure lens, which increases the productivity and
throughput of the edge exposure tool.
[0011] FIG. 1 is a diagram of an example edge exposure tool 100
described herein. In some implementations, the edge exposure tool
100 includes a WEE tool. In some implementations, the edge exposure
tool 100 is included in another tool such as a photoresist coating
tool, a coater/developer tool, or in another type of semiconductor
processing tool.
[0012] As shown in FIG. 1, the edge exposure tool 100 may include a
vacuum chuck 102 configured to support and secure a wafer 104. For
example, the vacuum chuck 102 may include a platform on which the
wafer 104 may be placed and supported, and one or more openings
through the platform. A negative pressure may be generated through
the openings, which causes a suction force on the bottom surface of
the wafer 104. This suction force pulls the wafer toward the
platform and secures the wafer 104 in place. The platform may be
sized to accommodate a particular size of wafer (e.g., a 300
millimeter (mm) wafer) or may be sized to accommodate multiple
sizes of wafers (e.g., 200 mm wafers and 300 mm wafers).
[0013] The vacuum chuck 102 may be attached to a spindle 106. The
spindle 106 may be configured to spin or rotate the platform of the
vacuum chuck 102. The rotation of the platform of the vacuum chuck
102 may also spin or rotate the wafer 104 on the platform of the
vacuum chuck 102. The spindle 106, the vacuum chuck 102, and the
wafer 104 may all spin or rotate about a central axis 108 to
provide an approximately symmetrical and uniform rotation of the
wafer 104.
[0014] The edge exposure tool 100 may include an edge exposure lens
110 configured to direct and/or focus radiation 112 toward a
photoresist layer 114 on the wafer 104. The edge exposure lens 110
may be configured to direct the radiation 112 (e.g.,
electromagnetic radiation) toward the photoresist layer 114 in an
exposure field 116 at or approximately near (e.g., a distance 118
from) an edge of the wafer 104. In particular, the edge exposure
lens 110 may direct and/or focus the radiation 112 toward the wafer
104 when or while the wafer 104 is spun or rotated about the axis
108. In this way, the radiation 112 may be directed toward the
photoresist layer 114 in the exposure field 116 along the
circumference of the wafer 104 as the wafer spins or rotates.
[0015] The edge exposure tool 100 may include a controller 120,
which may include a microcontroller, a processor, or a device that
includes a microcontroller or processor. The controller 120 may be
communicatively connected to the vacuum chuck 102, the spindle 106,
and the edge exposure lens 110. The controller 120 may receive
signals from the vacuum chuck 102, the spindle 106, and/or the edge
exposure lens 110 (or from sensors associated with the vacuum chuck
102, the spindle 106, and/or the edge exposure lens 110). The
received signals may include position information (e.g., position
information associated with the edge exposure lens 110), actuation
information (e.g., rotational speed associated with the vacuum
chuck 102 and/or the spindle 106), and/or one or more other types
of information. The controller 120 may provide signals to the
vacuum chuck 102, the spindle 106, and/or the edge exposure lens
110 (or to actuators associated with the vacuum chuck 102, the
spindle 106, and/or the edge exposure lens 110). The signals may
include digital signals (e.g., communications, instructions,
commands, requests, and/or other types of digital signals) and/or
analog signals (e.g., voltages, currents, and/or other types of
analog signals). The signals may cause the vacuum chuck 102, the
spindle 106, and/or the edge exposure lens 110 to actuate in a
particular manner, such as to spin at a particular rotational
velocity or revolutions per minute (RPM), to direct the radiation
112 toward the wafer 104 in a particular exposure field 116 and/or
at a particular exposure intensity, or the like.
[0016] As indicated above, FIG. 1 is provided as an example. Other
examples may differ from what is described with regard to FIG.
1.
[0017] FIG. 2 is a diagram of the example edge exposure tool 100
described herein. FIG. 2 illustrates a detailed view of the edge
exposure lens 110. As shown in FIG. 2, the edge exposure lens 110
may be mounted to and/or supported by a mounting plate 202 inside
of a processing chamber of the edge exposure tool 100. The mounting
plate 202 may include a track, a rail, a guide, or another
structure that permits the horizontal position of the edge exposure
lens 110 to be adjusted. The horizontal position of the edge
exposure lens 110 may be adjusted such that the edge exposure lens
110 (and the resulting exposure field 116) is moved inward closer
toward the center of the wafer 104 or outward closer toward the
edge of the wafer 104. The edge exposure lens 110 may also include
a vertical adjustment section 204, which includes one or more
subsections configured to permit the height or vertical position of
the edge exposure lens 110 to be adjusted.
[0018] The edge exposure lens 110 may include a first section 206
and a second section 208. The first section 206 and the second
section 208 may be adjustable sections of the edge exposure lens
110 in that the height or vertical position of the first section
206 and the second section 208 is permitted to be adjusted. The
first section 206 may be interfaced with the vertical adjustment
section 204 in a manner that permits the height or vertical
position of the first section 206 to be adjusted relative to the
height or vertical position of the vertical adjustment section 204.
For example, the first section 206 may be inserted into the
vertical adjustment section 204 (or one or more of the subsections
included in the vertical adjustment section 204) such that the
first section 206 is permitted to slide internally in the vertical
adjustment section 204. As another example, the first section 206
may be positioned around the vertical adjustment section 204 (or
one or more of the subsections included in the vertical adjustment
section 204) such that the vertical adjustment section 204 is
inserted into the first section 206. The vertical adjustment
section 204 may be permitted to slide internally in the first
section 206 to adjust the height or vertical position of the first
section 206.
[0019] The second section 208 may be interfaced with the first
section 206 in a manner that permits the height or vertical
position of the second section 208 to be adjusted. Moreover, the
second section 208 may be interfaced with the first section 206 in
a manner that permits the height or vertical position of the second
section 208 and the height or vertical position of the first
section 206 to be adjusted separately of and/or independently. For
example, the second section 208 may be inserted into the first
section 206 such that the second section 208 is permitted to slide
internally in the first section 206. As another example, the second
section 208 may be positioned around the first section 206 such
that the first section 206 is inserted into the second section 208.
The first section 206 may be permitted to slide internally in the
second section 208 to adjust the height or vertical position of the
second section 208.
[0020] The edge exposure lens 110 may include a lens section 210
attached to and/or supported by the second section 208. The lens
section 210 may include one or more lens elements or lenses. The
radiation 112 may travel through the vertical adjustment section
204, the first section 206, the second section 208, and through the
lens section 210. The lens(es) of the lens section 210 may focus or
direct the radiation 112 toward the photoresist layer 114 on the
wafer 104.
[0021] The height or vertical position of the lens section 210 may
be adjusted by adjusting the height or vertical position adjustment
of the first section 206 and/or the height or vertical position
adjustment of the second section 208. Adjustments to the height or
vertical position of the lens section 210 may change the distance
between the lens section 210 and the top surface of the photoresist
layer 114. Adjusting the distance between the lens section 210 and
the top surface of the photoresist layer 114 may be one technique
for increasing or decreasing the size of the exposure field 116 on
the photoresist layer 114. Additionally or alternatively, the size
of the exposure field 116 may be adjusted by increasing or
decreasing the size of the aperture through which the radiation 112
travels through the lens section 210 and toward the photoresist
layer 114.
[0022] As further shown in FIG. 2, the edge exposure tool 100
includes a lens adjustment device 212 configured to adjust one or
more parameters of the edge exposure lens 110 or one or more
components thereof. For example, the lens adjustment device 212 may
be configured to adjust the horizontal position of the edge
exposure lens 110, may be configured to adjust the distance between
the lens section 210 and the top surface of the wafer 104 (e.g.,
the top surface of the photoresist layer 114 on the wafer 104), may
be configured to adjust the height or vertical position of the
first section 206 and/or the second section 208, and/or may be
configured to adjust one or more other parameters of the edge
exposure lens 110.
[0023] The lens adjustment device 212 may include an elongated
support member 214 that may be mounted to and/or supported by the
mounting plate 202. In some implementations, the elongated support
member 214 is mounted to and/or supported by another structure of
the edge exposure tool 100, such as a table or a wall. The lens
adjustment device 212 may include a plurality of lens adjustment
elements, including a first lens adjustment element 216 configured
to adjust the first section 206, and a second lens adjustment
element 218 configured to adjust the second section 208.
[0024] The first lens adjustment element 216 may include a housing
220a, a first support arm 222a attached to the housing 220a and
configured to support the first section 206. The first support arm
222a may be inserted in the housing 220a and configured to slide in
the housing 220a to adjust the horizontal position of the first
section 206. The first lens adjustment element 216 may also include
an adjustment motor 224a mounted to the housing 220a. The
adjustment motor 224a may be connected to one or more gears,
sprockets, and/or other internal components that, together, are
configured to adjust the height or vertical position of the first
lens adjustment element 216 (and thus, the height or vertical
position of the first section 206). The adjustment motor 224a may
include a stepper motor, a direct current (DC) motor, or another
type of motor. The adjustment motor 224a may move the first lens
adjustment element 216 along the elongated support member 214. In
particular, the adjustment motor 224a may move the first lens
adjustment element 216 along a track 226a on the elongated support
member 214. The gears and/or sprockets in the housing 220a may
interface with the track 226a to move the first lens adjustment
element 216 up and down along the elongated member 214 in a precise
and controlled manner.
[0025] The controller 120 may provide signals to the adjustment
motor 224a to cause the adjustment motor 224a to operate to adjust
the height or vertical position of the first section 206 and/or to
adjust the horizontal position of the first section 206 (e.g., by
causing the adjustment motor 224a to move the first support arm
222a inward toward and/or outward from the housing 220a). In some
implementations, the controller 120 receives signals carrying
position information from a position sensor 228a mounted to the
first support arm 222a. The position sensor 228a may include a
proximity sensor, a Hall effect sensor, a linear variable
displacement transducer (LVDT), or another type of sensor that is
capable of generating position information. The position
information may include information identifying a horizontal
position of the first lens adjustment element 216, which the
controller 120 may use to determine the horizontal position of the
first section 206. Moreover, the position information may include
information identifying a height or vertical position of the first
lens adjustment element 216, which the controller 120 may use to
determine the height or vertical position of the first section
206.
[0026] The second lens adjustment element 218 may include a housing
220b, a second support arm 222b attached to the housing 220b and
configured to support the second section 208. The second support
arm 222b may be inserted in the housing 220b and configured to
slide in the housing 220b to adjust the horizontal position of the
second section 208. The second lens adjustment element 218 may also
include an adjustment motor 224b mounted to the housing 220b. The
adjustment motor 224b may be connected to one or more gears,
sprockets, and/or other internal components that, together, are
configured to adjust the height or vertical position of the second
lens adjustment element 218 (and thus, the height or vertical
position of the second section 208). The adjustment motor 224b may
include a stepper motor, a DC motor, or another type of motor. The
adjustment motor 224b may move the second lens adjustment element
218 along the elongated support member 214. In particular, the
adjustment motor 224b may move the second lens adjustment element
218 along a track 226b on the elongated support member 214. The
gears and/or sprockets in the housing 220b may interface with the
track 226b to move the second lens adjustment element 218 up and
down along the elongated member 214 in a precise and controlled
manner.
[0027] The controller 120 may provide signals to the adjustment
motor 224b to cause the adjustment motor 224b to operate to adjust
the height or vertical position of the second section 208 and/or to
adjust the horizontal position of the second section 208 (e.g., by
causing the adjustment motor 224b to move the second support arm
222b inward toward and/or outward from the housing 220b). In some
implementations, the controller 120 receives signals carrying
position information from a position sensor 228b mounted to the
second support arm 222b. The position sensor 228b may include a
proximity sensor, a Hall effect sensor, an LVDT, or another type of
sensor that is capable of generating position information. The
position information may include information identifying a
horizontal position of the second lens adjustment element 218,
which the controller 120 may use to determine the horizontal
position of the second section 208. Moreover, the position
information may include information identifying a height or
vertical position of the second lens adjustment element 218, which
the controller 120 may use to determine the height or vertical
position of the second section 208.
[0028] As further shown in FIG. 2, the edge exposure tool 100 may
further include a radiation source 230. The radiation source 230
may include a deep ultraviolet (UV) radiation source, an extreme UV
radiation source, a x-ray radiation source, an electron beam
(e-beam) radiation source, or another type of radiation source that
is configured to generate and provide a type of radiation that may
be used in semiconductor lithography. The radiation source 230 may
be connected to the edge exposure lens 110 by a fiber optic cable,
and may supply the radiation 112 to the edge exposure lens 110
through the fiber optic cable.
[0029] The controller 120 may be communicatively connected with the
radiation source 230 to control the radiation source 230. For
example, the controller 120 may initiate operation of the radiation
source 230, may deactivate the radiation source 230, may control
various exposure control parameters of the radiation source 230
described in connection with FIG. 5 herein, and/or may control
other operating parameters of the radiation source 230. The
controller 120 may also be communicatively connected with the
vacuum chuck 102 to control various parameters of the vacuum chuck
102 described in connection with FIG. 5 herein.
[0030] As indicated above, FIG. 2 is provided as an example. Other
examples may differ from what is described with regard to FIG.
2.
[0031] FIGS. 3A-3C are diagrams of an example implementation 300
described herein. In some implementations, the example
implementation 300 includes one or more examples of adjusting the
edge exposure lens 110 using the lens adjustment device 212. In
some implementations, the lens adjustment device 212 adjusts the
edge exposure lens 110 between exposure cycles of the edge exposure
tool 100 to account for cycle-to-cycle changes and variation in the
edge exposure tool. In some implementations, the lens adjustment
device 212 may adjust the edge exposure lens 110 based on
maintenance or repairs being performed on the edge exposure lens
110. For example, the lens adjustment device 212 may adjust the
edge exposure lens 110 based on the edge exposure lens 110 being
disassembled to replace the lens section 210. As an example, the
lens adjustment device 212 may adjust the edge exposure lens 110
after the first section 206 and the second section 208 are removed
from the edge exposure lens 110 and separated such that a lens
element of the lens section 210 may be removed and cleaned or
replaced. The lens element (or a new lens element) may be installed
in the lens section 210, and the first section 206 and the second
section 208 may be joined after cleaning or replacement of the lens
element. The first section 206 and the second section 208 may be
installed back into the edge exposure lens 110, and the techniques
described in connection with FIGS. 3A-3C (and in connection with
FIG. 5 herein) may be performed to adjust the edge exposure lens
110 (or one or more components thereof) using the lens adjustment
device 212.
[0032] As shown in FIG. 3A, and by reference number 302, the
controller 120 may determine one or more edge exposure lens
adjustment parameters for adjusting the position of the edge
exposure lens 110 or positions of one or more components of the
edge exposure lens 110. The one or more edge exposure lens
adjustment parameters for adjusting the position of the edge
exposure lens 110 or positions of one or more components of the
edge exposure lens 110 from an initial position (or initial
positions) to a target position (or target positions). The
controller 120 may determine the target position (or target
positions), as described in connection with FIG. 5 herein, to
achieve a particular performance of the edge exposure lens 110
and/or the edge exposure tool 100, such as an exposure uniformity
parameter, an exposure field size, an overlay alignment parameter
(e.g., an interlayer alignment between various layers formed on the
wafer 104), and/or one or more other performance parameters.
Additionally or alternatively, the controller 120 may determine the
target position (or target positions) based on a size of the wafer
104 to be exposed, based on a pattern to be transferred to the
wafer 104, based on a thickness of the wafer 104, based on a
thickness of the photoresist layer 114, and/or based on one or more
other parameters.
[0033] As shown in FIG. 3B, and by reference number 304, the
controller 120 may automatically cause one or more parameters of
the edge exposure lens 110 to be adjusted based on the one or more
edge exposure lens adjustment parameters. For example, the
controller 120 may provide a signal to the lens adjustment device
212 to cause the lens adjustment device 212 to adjust a height or
vertical position 306 of the first section 206 based on determining
the one or more edge exposure lens adjustment parameters. The
controller 120 may receive position information from the position
sensor 228a indicating the initial height or vertical position of
the first section 206, may provide the signal to the lens
adjustment device 212 to activate the adjustment motor 224a to
cause the adjustment motor 224a to move the first lens adjustment
element 216 (which causes the first section 206 to move from the
initial height or vertical position) based on the one or more edge
exposure lens adjustment parameters. The controller 120 may
continue to receive the position information from the position
sensor 228a, and may determine that the first section 206 has
reached a target height or vertical position based on the position
information. The controller 120 may provide a signal to the lens
adjustment device 212 (or may cease providing the signal to the
lens adjustment device 212) to deactivate the adjustment motor 224a
based on determining that the first section 206 is at the target
height or vertical position.
[0034] As another example, the controller 120 may provide a signal
to the lens adjustment device 212 to cause the lens adjustment
device 212 to adjust a height or vertical position 308 of the
second section 208. The controller 120 may receive position
information from the position sensor 228b indicating the initial
height or vertical position of the second section 208, may provide
the signal to the lens adjustment device 212 to activate the
adjustment motor 224b to cause the adjustment motor 224b to move
the second lens adjustment element 218 (which causes the second
section 208 to move from the initial height or vertical position)
based on the one or more edge exposure lens adjustment parameters.
The controller 120 may continue to receive the position information
from the position sensor 228b, and may determine that the second
section 208 has reached a target height or vertical position based
on the position information. The controller 120 may provide a
signal to the lens adjustment device 212 (or may cease providing
the signal to the lens adjustment device 212) to deactivate the
adjustment motor 224b based on determining that the second section
208 is at the target height or vertical position.
[0035] As another example, the controller 120 may provide one or
more signals to the lens adjustment device 212 to cause the lens
adjustment device 212 to adjust a distance 310 between the lens
section 210 of the edge exposure lens 110 and a top surface of the
photoresist layer 114 on the wafer 104. In some implementations,
the controller 120 may cause the first lens adjustment element 216
to adjust the height or vertical position 306 of the first section
206 in order to adjust the distance 310. In some implementations,
the controller 120 may cause the second lens adjustment element 218
to adjust the height or vertical position 308 of the second section
208 in order to adjust the distance 310. In some implementations,
the controller 120 may cause the first lens adjustment element 216
to adjust the height or vertical position 306 of the first section
206 and the second lens adjustment element 218 to adjust the height
or vertical position 308 of the second section 208 in order to
adjust the distance 310.
[0036] As another example, the controller 120 may provide one or
more signals to the lens adjustment device 212 to cause the lens
adjustment device 212 to adjust a horizontal position 312 of the
edge exposure lens 110. The controller 120 may receive position
information from the position sensor 228a and/or the position
sensor 228b indicating the initial horizontal position of the first
section 206 and the second section 208, respectively. The
controller 120 may provide the one or more signals to the lens
adjustment device 212 to activate the adjustment motor 224a and/or
the adjustment motor 224b to move the first support arm 222a and
the second support arm 222b inward or outward based on the one or
more edge exposure lens adjustment parameters to adjust the
horizontal position 312. The controller 120 may continue to receive
the position information from the position sensor 228a and/or the
position sensor 228b, and may determine that the first section 206
and the second section 208 have reached a target horizontal
position based on the position information. The controller 120 may
provide a signal to the lens adjustment device 212 (or may cease
providing the signal to the lens adjustment device 212) to
deactivate the adjustment motor 224a and the adjustment motor 224b
based on determining that the first section 206 and the second
section 208 are at the target horizontal position.
[0037] Additionally or alternatively to causing the one or more
parameters of the edge exposure lens to be adjusted, the controller
120 may cause one or more exposure control parameters of the edge
exposure tool 100 to be adjusted. For example, the controller 120
may communicate with and/or provide signals to the vacuum chuck
102, the edge exposure lens 110, and/or the radiation source 230 to
cause one or more exposure control parameters of the edge exposure
tool 100 to be adjusted as described in connection with FIG. 5
herein.
[0038] As shown in FIG. 3C, and by reference number 314, the
controller 120 may cause the edge exposure lens 110 to direct the
radiation 112 at or approximately near the edge of the wafer 104
after the one or more parameters of the edge exposure lens 110 are
adjusted (and/or after other parameters of the edge exposure tool
100 are adjusted). For example, the controller 120 may provide a
signal to the radiation source 230 to activate the radiation source
230 and to cause the radiation source to provide the radiation 112
to the edge exposure lens 110 through the fiber optic cable. The
radiation 112 may travel along the fiber optic cable to the edge
exposure lens 110, and may travel through the lens section 210 of
the edge exposure lens 110, which directs the radiation 112 toward
the photoresist layer 114 on the wafer 104 in an exposure field 116
a distance 118 from the edge of the wafer 104.
[0039] As indicated above, FIGS. 3A-3C are provided as one or more
examples. Other examples may differ from what is described with
regard to FIGS. 3A-3C.
[0040] FIG. 4 is a diagram of example components of a device 400,
which may correspond to the controller 120, the adjustment motor
224a, the adjustment motor 224b, the position sensor 228a, the
position sensor 228b, and/or the radiation source 230. In some
implementations, the controller 120, the adjustment motor 224a, the
adjustment motor 224b, the position sensor 228a, the position
sensor 228b, and/or the radiation source 230 may include one or
more devices 400 and/or one or more components of device 400. As
shown in FIG. 4, device 400 may include a bus 410, a processor 420,
a memory 430, a storage component 440, an input component 450, an
output component 460, and a communication component 470.
[0041] Bus 410 includes a component that enables wired and/or
wireless communication among the components of device 400.
Processor 420 includes a central processing unit, a graphics
processing unit, a microprocessor, a controller, a microcontroller,
a digital signal processor, a field-programmable gate array, an
application-specific integrated circuit, and/or another type of
processing component. Processor 420 is implemented in hardware,
firmware, or a combination of hardware and software. In some
implementations, processor 420 includes one or more processors
capable of being programmed to perform a function. Memory 430
includes a random access memory, a read only memory, and/or another
type of memory (e.g., a flash memory, a magnetic memory, and/or an
optical memory).
[0042] Storage component 440 stores information and/or software
related to the operation of device 400. For example, storage
component 440 may include a hard disk drive, a magnetic disk drive,
an optical disk drive, a solid state disk drive, a compact disc, a
digital versatile disc, and/or another type of non-transitory
computer-readable medium. Input component 450 enables device 400 to
receive input, such as user input and/or sensed inputs. For
example, input component 450 may include a touch screen, a
keyboard, a keypad, a mouse, a button, a microphone, a switch, a
sensor, a global positioning system component, an accelerometer, a
gyroscope, and/or an actuator. Output component 460 enables device
400 to provide output, such as via a display, a speaker, and/or one
or more light-emitting diodes. Communication component 470 enables
device 400 to communicate with other devices, such as via a wired
connection and/or a wireless connection. For example, communication
component 470 may include a receiver, a transmitter, a transceiver,
a modem, a network interface card, and/or an antenna.
[0043] Device 400 may perform one or more processes described
herein. For example, a non-transitory computer-readable medium
(e.g., memory 430 and/or storage component 440) may store a set of
instructions (e.g., one or more instructions, code, software code,
and/or program code) for execution by processor 420. Processor 420
may execute the set of instructions to perform one or more
processes described herein. In some implementations, execution of
the set of instructions, by one or more processors 420, causes the
one or more processors 420 and/or the device 400 to perform one or
more processes described herein. In some implementations, hardwired
circuitry may be used instead of or in combination with the
instructions to perform one or more processes described herein.
Thus, implementations described herein are not limited to any
specific combination of hardware circuitry and software.
[0044] The number and arrangement of components shown in FIG. 4 are
provided as an example. Device 400 may include additional
components, fewer components, different components, or differently
arranged components than those shown in FIG. 4. Additionally, or
alternatively, a set of components (e.g., one or more components)
of device 400 may perform one or more functions described as being
performed by another set of components of device 400.
[0045] FIG. 5 is a flowchart of an example process 500 associated
with adjusting an edge exposure lens. In some implementations, one
or more process blocks of FIG. 5 may be performed by a controller
(e.g., the controller 120, the device 400). In some
implementations, one or more process blocks of FIG. 5 may be
performed by another device or a group of devices separate from or
including the controller, such as lens adjustment device (e.g.,
lens adjustment device 212), a radiation source (e.g., the
radiation source 230), and/or another device. Additionally, or
alternatively, one or more process blocks of FIG. 5 may be
performed by one or more components of device 400, such as
processor 420, memory 430, storage component 440, input component
450, output component 460, and/or communication component 470.
[0046] As shown in FIG. 5, process 500 may include adjusting a
position of the edge exposure lens 110 included in the edge
exposure tool 100 and adjusting an exposure control for the edge
exposure tool 100 (block 510). For example, the controller 120 may
determine one or more edge exposure lens adjustment parameters for
adjusting the position of the edge exposure lens 110, and may
determine one or more exposure adjustment parameters for adjusting
the exposure control for the edge exposure tool 100.
[0047] Process 500 may include a plurality of operations for
determining the adjustment parameters (e.g., the one or more edge
exposure lens adjustment parameters and the one or more exposure
adjustment parameters). As shown in FIG. 5, process 500 may include
determining one or more cycle-to-cycle tuning parameters for the
edge exposure tool 100 (block 520). For example, the controller 120
may determine the one or more cycle-to-cycle tuning parameters. The
cycle-to-cycle tuning parameters may include parameters of the edge
exposure tool 100 that may change from exposure cycle to exposure
cycle. An exposure cycle may include one exposure operation on a
wafer 104 performed by the edge exposure tool 100. For example, an
exposure cycle may include placing the wafer 104 on the vacuum
chuck 102, spinning or rotating the vacuum chuck 102 to spin/rotate
the wafer 104, and exposing the photoresist layer 114 on the wafer
104 to the radiation 112 for one or more revolutions or complete
rotations of the wafer 104.
[0048] As further shown in FIG. 5, in some implementations, the one
or more cycle-to-cycle tuning parameters include a lens life of the
edge exposure lens 110 (e.g., a quantity of hours or exposure
cycles of use of the lens section 210 installed in the edge
exposure lens 110). In some implementations, the one or more
cycle-to-cycle tuning parameters include a photoresist life. The
photoresist life may refer to how long the raw material of the
photoresist layer 114 was stored in a storage tank prior to being
deposited on the wafer 104. In some implementations, the one or
more cycle-to-cycle tuning parameters include a lens shutter life.
The edge exposure lens 110 may include one or more shutters that
open and close at various times and/or at various periodicities.
The shutter may be used to expose portions of the photoresist layer
114 to the radiation source 230 when the shutter is open, and to
prevent exposure to other portions of the photoresist layer 114
when the shutter is closed. The shutter may also be used to control
the total exposure time of a particular portion of the photoresist
layer 114. In some implementations, the one or more cycle-to-cycle
tuning parameters include an exposure mode, which may include a
round exposure mode (e.g., an exposure mode in which round areas of
the wafer 104 are exposed), a linear exposure mode (e.g., an
exposure mode in which straight or rectangular areas of the wafer
104 are exposed, such as wafer notch areas), and/or another
exposure mode.
[0049] In some implementations, the one or more cycle-to-cycle
tuning parameters include a vacuum chuck filter life (e.g., a
quantity of hours or exposure cycles of use accumulated for the
filter installed in the vacuum chuck 102). In some implementations,
the one or more cycle-to-cycle tuning parameters include a lens
optical fiber life (e.g., a quantity of hours or exposure cycles of
use accumulated for the optical fiber cable through which the
radiation 112 is supplied to the edge exposure lens 110 from the
radiation source 230. In some implementations, the one or more
cycle-to-cycle tuning parameters include a lens lamp life (e.g., a
quantity of hours or exposure cycles of use accumulated for the
radiation lamp installed in the radiation source 230). In some
implementations, the one or more cycle-to-cycle tuning parameters
include a leveling status of the vacuum chuck 102 (e.g., whether
the vacuum chuck 102 is level, out of level, and/or an amount and
direction in which the vacuum chuck 102 is out of level).
[0050] In some implementations, the one or more cycle-to-cycle
tuning parameters include a position shift status of the vacuum
chuck 102 (e.g., an amount and direction of a horizontal shift of
the vacuum chuck 102 and/or an amount and direction of a vertical
shift of the vacuum chuck 102). In some implementations, the one or
more cycle-to-cycle tuning parameters include an exposure distance
to the edge of the wafer 104, which may indicate a distance 118
between the edge of the wafer 104 and the exposure field 116. In
some implementations, the one or more cycle-to-cycle tuning
parameters include an exposure rotation life of the edge exposure
tool 100 (e.g., a quantity of hours or exposure cycles for the
overall edge exposure tool 100).
[0051] In some implementations, the one or more cycle-to-cycle
tuning parameters include other parameters. In some
implementations, the one or more cycle-to-cycle tuning parameters
include a combination of the parameters described above and/or one
or more other parameters.
[0052] As further shown in FIG. 5, process 500 may include
determining one or more target edge exposure lens parameters and
one or more exposure control parameters based on the one or more
cycle-to-cycle tuning parameters (block 530). For example, the
controller 120 may determine the one or more target edge exposure
lens parameters and the one or more exposure control parameters
based on the one or more cycle-to-cycle tuning parameters. The one
or more target edge exposure lens parameters and the one or more
exposure parameters may include parameters that are determined to
achieve a particular performance of the edge exposure lens 110
and/or the edge exposure tool 100, such as an exposure uniformity
parameter, an exposure field size, an overlay alignment parameter
(e.g., an interlayer alignment between various layers formed on the
wafer 104), and/or one or more other performance parameters.
Additionally or alternatively, the controller 120 may determine the
one or more target edge exposure lens parameters and/or the one or
more exposure control parameters based on a size of the wafer 104
to be exposed, based on a pattern to be transferred to the wafer
104, based on a thickness of the wafer 104, based on a thickness of
the photoresist layer 114, and/or based on one or more other
parameters.
[0053] In some implementations, the one or more target edge
exposure lens parameters include a target horizontal position for
the edge exposure lens 110. For example, the controller 120 may
determine target horizontal position based on the horizontal shift
of the vacuum chuck 102, based on a leveling status of the vacuum
chuck 102, and/or one or more other parameters. In some
implementations, the controller 120 may determine a target angle of
the edge exposure lens 110 (e.g., an angle of the edge exposure
lens 110 relative to the planar surface of the platform of the
vacuum chuck 102) based on the leveling status of the vacuum chuck
102. In these examples, the controller 120 may determine the target
horizontal position and the target angle to account for and/or
accommodate horizontal shifting of the vacuum chuck 102 over time
and/or over a plurality of exposure cycles.
[0054] In some implementations, the one or more target edge
exposure lens parameters include a target distance parameter for
the edge exposure lens 110. For example, the controller 120 may
determine the target distance parameter between lens section 210
and the top surface of the photoresist layer 114 on the wafer 104.
The controller 120 may determine the target distance parameter
based on the exposure field of the edge exposure lens 110, based on
a thickness of the wafer 104, based on a thickness of the
photoresist layer 114, and/or based on one or more other
parameters. For example, the controller 120 may determine the
target distance parameter such that the exposure field is achieved
for the thickness of the wafer 104 and the thickness of the
photoresist layer 114.
[0055] In some implementations, the one or more target edge
exposure lens parameters include a target vertical position for the
first section 206 and/or a target vertical position for the second
section 208 of the edge exposure lens 110. The controller 120 may
determine target vertical position for the first section 206 and/or
a target vertical position for the second section 208 based on the
vertical shift of the vacuum chuck 102, based on a leveling status
of the vacuum chuck 102, and/or other parameters. In some
implementations, the controller 120 determines the target vertical
position for the first section 206 and/or the target vertical
position for the second section 208 further based on the target
distance parameter between lens section 210 and the top surface of
the photoresist layer 114 on the wafer 104. In these examples, the
controller 120 may determine the target vertical position for the
first section 206 and/or the target vertical position for the
second section 208 to account for vertical shifting of the vacuum
chuck 102 over time and/or over a plurality of exposure cycles to
achieve the target distance parameter.
[0056] In some implementations, the one or more target exposure
control parameters a target exposure field size for the exposure
field 116 of the edge exposure lens. As an example, the controller
120 may determine the target exposure field size based on the size
of the pattern to be transferred to the wafer 104, based on the
size of the wafer 104, and/or based on one or more other
parameters.
[0057] In some implementations, the one or more target exposure
control parameters may include a target exposure intensity for the
radiation 112 that is to be directed toward the photoresist layer
114. For example, the controller 120 may increase the target
exposure intensity as the lifetime of the lens section 210
increases (e.g., as indicated by the lens life included in the one
or more cycle-to-cycle tuning parameters) and/or may decrease the
target exposure intensity based on the lens section 210 being
replaced, cleaned, or serviced. In this way, the controller 120 may
adjust the target exposure intensity of the edge exposure lens 110
to stabilize the illuminance of the lens section 210 and to account
for fogging of the lens section 210 over time, which may otherwise
cause a drop in exposure intensity. Additionally or alternatively,
the controller 120 may increase the target radiation based on an
increased lens optical fiber life and/or an increased lamp life
(e.g., as indicated by the lens life included in the one or more
cycle-to-cycle tuning parameters).
[0058] In some implementations, the one or more target exposure
control parameters may include a target rotation duration. The
target rotation duration may include, for example, a time duration
(e.g., seconds, minutes) or a quantity of rotations of the wafer
104. For example, the controller 120 may increase the exposure
rotation time of the wafer 104 for a relatively thicker photoresist
layer 114, may decrease the exposure rotation time of the wafer 104
for a relatively thinner photoresist layer 114, and/or may increase
or decrease the exposure rotation time of the wafer 104 to account
for photoresist life of the photoresist layer 114 (e.g., as
indicated by the lens life included in the one or more
cycle-to-cycle tuning parameters). As another example, the
controller 120 may increase the exposure rotation time to provide a
longer exposure time based on an estimated decrease in exposure
intensity resulting from an increased lens life, an increased lens
optical fiber life, and/or an increased lamp life (e.g., as
indicated by the lens life included in the one or more
cycle-to-cycle tuning parameters).
[0059] In some implementations, the one or more target exposure
control parameters may include a target shutter opening delay for
the shutter of the edge exposure lens 110 and/or the one or more
target exposure control parameters may include shutter closing
delay for the shutter of the edge exposure lens 110. For example,
the controller 120 may determine to increase or decrease the
shutter opening delay based on an estimated signal propagation
delay between the controller 120 and the edge exposure lens 110 to
synchronize the exposure of the wafer 104 to an exposure plan. For
example, the controller 120 may increase the target shutter opening
delay and/or may increase the target shutter closing delay for
higher estimated propagation delay. As another example, the
controller 120 may decrease the target shutter opening delay and/or
may decrease the target shutter closing delay for lower estimated
propagation delay. Additionally or alternatively, the controller
120 may determine the target shutter opening delay and/or the
target shutter closing delay based on an exposure mode for the
wafer 104 to be exposed.
[0060] In some implementations, the controller 120 determines the
one or more target edge exposure lens parameters and/or the one or
more target exposure control parameters using various data
processing techniques, such as big data mining, machine learning,
and/or neural network processing. In some implementations, the
controller 120 uses big data mining to collect and store
cycle-to-cycle tuning parameter data from thousands (or more) of
exposure cycles of the edge exposure tool 100 or an edge exposure
tool similar to the edge exposure tool 100 (e.g., an edge exposure
tool that is a same make and model as the edge exposure tool 100,
an edge exposure tool that has common characteristics as the edge
exposure tool 100, or the like). In these examples, the controller
120 may obtain the cycle-to-cycle tuning parameter data from
various sensors and/or actuators of the edge exposure tool 100, may
receive the cycle-to-cycle tuning parameter data as input from an
operator, and/or may receive the cycle-to-cycle tuning parameter
data from one or more other sources. The controller 120 may store
the cycle-to-cycle tuning parameter data in a database or data
store, and may structure the cycle-to-cycle tuning parameter data
(e.g., if received as unstructured data) using various data
structuring techniques (e.g., tagging, generating metadata,
categorizing, and/or one or more other techniques). Moreover, the
controller 120 may use big data mining to collect and store
exposure control parameters and/or edge exposure lens parameters
that were used for the multiple thousands of exposure cycles of the
edge exposure tool 100, and may collect and store performance data
from the multiple thousands of exposure cycles of the edge exposure
tool 100 in a similar manner. The database or data store may be
continuously and/or periodically updated as data from subsequent
exposures becomes available.
[0061] In some implementations, the controller 120 uses machine
learning and/or neural network processing for decision making when
determining the one or more target edge exposure lens parameters
and/or the one or more target exposure control parameters. Machine
learning involves computers learning from data to perform tasks
and/or to make decisions. Machine learning algorithms are used to
train machine learning models based on sample data, known as
"training data." Once trained, machine learning models may be used
to make predictions, decisions, or classifications relating to new
observations. Here, the controller 120 may train a machine learning
model on the cycle-to-cycle tuning parameter data, the exposure
control parameters, the edge exposure lens parameters, and/or the
performance data from thousands (or more) of exposure cycles of the
edge exposure tool 100. Alternatively, a separate device (e.g., a
server device) may train the machine learning model and may provide
the trained machine learning model for use by the controller
120.
[0062] The machine learning model may be trained on the data from
thousands (or more) of exposure cycles using a supervised learning
technique and/or an unsupervised learning technique. In some
implementations, the controller 120 trains a regression model, a
decision tree model, a Naive Bayes classifier, a k nearest neighbor
(KNN) model, or another type of supervised machine learning model
by specifying a target or outcome variable that is to be predicted
from an independent set of variables. In some implementations, the
controller 120 uses a neural network (e.g., an artificial neural
network that includes thousands or millions (or more) of artificial
neurons or processing nodes) to train the machine learning model
using a deep learning technique. The nodes in the neural network
may be layered and weighted. A node in a layer of the neural
network may be connected to a plurality of nodes in a lower layer
of the neural network, and may receive a weight from each of the
nodes in the lower layer. The node may update the weights and feed
forward a weight to one or more nodes in a higher layer in the
neural network if the weight satisfies a threshold (which may be
referred to as a "firing" of the node). The weights in the neural
network may be adjusted and/or updated as the neural network
continues to process the training data provided to the machine
learning model until similar training data parameters yield similar
weights through the neural network.
[0063] The machine learning model may generate a function that maps
inputs to the machine learning model (e.g., the cycle-to-cycle
tuning parameter data, the exposure control parameters, the edge
exposure lens parameters, the performance data, and/or one or more
initial parameters for the edge exposure tool 100) to specified
outputs from the machine learning model (e.g., one or more
specified performance parameters of the edge exposure tool 100). In
this way, the controller 120 uses the function (e.g., determined by
the machine learning model) to determine the one or more target
edge exposure lens parameters and/or the one or more target
exposure control parameters that may be used to achieve a specified
performance of the edge exposure lens 110 and/or the edge exposure
tool 100, such as a specified exposure uniformity, a specified
exposure field size, a specified overlay alignment, and/or one or
more other specified performance parameters.
[0064] As further shown in FIG. 5, process 500 may include
determining one or more edge exposure lens adjustment parameters
(block 540). For example, the controller 120 may determine the one
or more edge exposure lens adjustment parameters based on the one
or more target edge exposure lens parameters and one or more
initial edge exposure lens parameters for the edge exposure lens
110. The one or more initial edge exposure lens parameters may
include an initial position (e.g., horizontal position, vertical
position, exposure angle, distance from the wafer 104, or the
like), may include a starting position (e.g., after powering on the
edge exposure tool 100), or another type of initial position. The
controller 120 may receive position information from the position
sensors 228a and 22b, which may indicate the initial position of
the edge exposure lens 110, the initial position of the first
section 206, the initial position of the second section 208, the
initial position of the lens section 210, and/or one or more other
initial positions of the edge exposure lens 110.
[0065] The one or more edge exposure lens adjustment parameters may
include parameters to adjust the edge exposure lens 110 from the
initial position to the target position determined by the
controller 120. For example, a vertical position parameter for the
first section 206 may include a parameter that identifies an amount
of displacement for moving the first section 206 from the initial
position of the first section 206 to the target vertical position
of the first section 206.
[0066] In some implementations, the controller 120 determines other
adjustment parameters for the edge exposure tool 100. For example,
the controller 120 may determine a vacuum intensity adjustment
parameter for the vacuum chuck 102. In these examples, the vacuum
performance for a particular vacuum intensity setting for the
vacuum chuck 102 may decrease over time and over a plurality of
exposure cycles as the vacuum filter of the vacuum chuck 102
filters dust and debris from the vacuum lines of the vacuum chuck
102. The increased amount of dust and debris captured by the vacuum
filter may decrease the airflow through the vacuum filter, thereby
decreasing the vacuum performance of the vacuum chuck 102.
Accordingly, the controller 120 may determine the vacuum intensity
adjustment parameter to increase the vacuum intensity of the vacuum
chuck 102 as the vacuum filter life of the vacuum filter increases
to maintain a particular vacuum performance. Additionally or
alternatively, the controller 120 may determine the vacuum
intensity adjustment parameter to account for difference sized
wafers. For example, the controller 120 may increase the vacuum
intensity for larger wafers (e.g., 300 mm wafers) and may decrease
the vacuum intensity for smaller wafers (e.g., 150 mm wafers, 200
mm wafers).
[0067] Referring back to block 510, the controller 120 may adjust
the position (e.g., the initial position) of the edge exposure lens
110 based on the one or more edge exposure adjustment parameters.
In some implementations, the controller 120 causes the lens
adjustment device 212 to adjust the vertical position 306 of the
first section 206 of the edge exposure lens 110. For example, the
controller 120 may provide a signal to the adjustment motor 224a to
cause the adjustment motor 224a to move the first section 206 up or
down based on a vertical position adjustment parameter for the
first section 206 to a target vertical position. In some
implementations, the controller 120 causes the lens adjustment
device 212 to adjust the vertical position 308 of the second
section 208 of the edge exposure lens 110 by providing a signal to
the adjustment motor 224b to cause the adjustment motor 224b to
move the second section 208 up or down based on a vertical position
adjustment parameter for the first section 206 to a target vertical
position.
[0068] In some implementations, the controller 120 causes the lens
adjustment device 212 to adjust the distance 310 between the top
surface of the wafer 104 (e.g., the top surface of the photoresist
layer 114 on the wafer 104) and the edge exposure lens 110 (e.g.,
the lens section 210 of the edge exposure lens 110) based on a
distance adjustment parameter to a target distance. Adjusting the
distance 310 may include adjusting the vertical position 306 of the
first section 206 of the edge exposure lens 110, adjusting the
vertical position 308 of the second section 208 of the edge
exposure lens 110, or a combination thereof.
[0069] In some implementations, the controller 120 causes the lens
adjustment device 212 to adjust a horizontal position of the edge
exposure lens 110 in one or more directions based on a horizontal
position adjustment parameter. For example, the controller 120 may
provide a signal to the adjustment motor 224a and the adjustment
motor 224b to respectively cause the first support arm 222a and the
second support arm 222b to move inward toward the elongated support
member 214, outward from the elongated support member 214, and/or
to rotate about the elongated support member 214 to adjust the
horizontal position of the edge exposure lens 110 to a target
horizontal position. The adjustment of the horizontal position of
the edge exposure lens 110 may change the distance 118 between the
exposure field 116 and the edge of the wafer 104.
[0070] In some implementations, the controller 120 causes the lens
adjustment device 212 to adjust an angle of the edge exposure lens
110 (e.g., an angle of the edge exposure lens 110 relative to the
planar surface of the wafer 104). For example, the controller 120
may provide a signal to the adjustment motor 224a and/or the
adjustment motor 224b to respectively cause the first support arm
222a and/or the second support arm 222b to move inward toward the
elongated support member 214, outward from the elongated support
member 214, and/or to rotate about the elongated support member 214
to adjust the angle of the edge exposure lens 110.
[0071] The controller 120 may adjust the exposure control for the
edge exposure tool 100 based on the one or more exposure control
parameters. In some implementations, the controller 120 causes the
edge exposure lens 110 to adjust the exposure field 116 of the edge
exposure lens 110 based on an exposure field exposure control
parameter to a target exposure field size. As an example, the
controller 120 may provide a signal to the edge exposure lens 110
to increase or decrease an aperture through which the radiation 112
is permitted to travel through the lens section 210. Increasing the
aperture may increase the size of the exposure field 116, whereas
decreasing the aperture may decrease the size of the exposure field
116.
[0072] In some implementations, the controller 120 causes the
radiation source 230 to increase and/or decrease the exposure
intensity of the radiation 112 based on the exposure intensity. For
example, the controller 120 may provide a signal to the edge
exposure lens 110 to increase and/or decrease the exposure
intensity of the radiation 112. In some implementations, the
controller 120 causes the radiation source 230 to adjust a lower
exposure intensity or a minimum exposure control of the radiation
112 and a reference exposure intensity or reference exposure
control. In some implementations, the controller 120 causes the
radiation source 230 to adjust the lower exposure intensity and/or
the reference exposure intensity to achieve a particular reference
exposure intensity range, such as approximately 260 milliwatts per
centimeters squared (mW/cm.sup.2) to approximately 280 mW/cm.sup.2,
approximately 260 mW/cm.sup.2 to approximately 300 mW/cm.sup.2, or
another example range.
[0073] In some implementations, the controller 120 adjusts the
exposure rotation time for the wafer 104 based on an exposure
duration exposure control parameter to achieve a target rotation
duration. The target rotation duration may include, for example, a
time duration (e.g., seconds, minutes) or a quantity of rotations
of the wafer 104. For example, the controller 120 may adjust the
exposure rotation time of the wafer 104 to 6 rotations, 20
rotations, 22 rotations, 40 rotations, or another quantity of
rotations.
[0074] In some implementations, the controller 120 causes the edge
exposure lens to increase or decrease a shutter opening delay for
the shutter of the edge exposure lens 110 and/or a shutter closing
delay for the shutter of the edge exposure lens 110. For example,
the controller 120 may provide a signal to the edge exposure lens
110 to increase or decrease the shutter opening delay based on a
shutter opening delay exposure control parameter to a target
shutter opening delay (e.g., 0.1 seconds, 0.2 seconds, or another
shutter opening delay). As another example, the controller 120 may
provide a signal to the edge exposure lens 110 to increase or
decrease the shutter closing delay based on a shutter closing delay
exposure control parameter to a target shutter closing delay (e.g.,
0.1 seconds, 0.2 seconds, or another shutter closing delay). The
exposure opening delay may be a time duration between the edge
exposure lens 110 receiving a signal (e.g., from the controller
120) to open the shutter of the edge exposure lens 110 and the time
that the edge exposure lens 110 actually opens the shutter. The
exposure closing delay may be a time duration between the edge
exposure lens 110 receiving a signal (e.g., from the controller
120) to close the shutter of the edge exposure lens 110 and the
time that the edge exposure lens 110 actually closes the shutter.
The shutter opening delay and the shutter closing delay can be used
to compensate for signal propagation delays between the controller
120 and the edge exposure lens 110 to synchronize the exposure of
the wafer 104 to an exposure plan.
[0075] In some implementations, the controller 120 adjusts one or
more other parameters of the edge exposure tool 100. For example,
the controller 120 may cause the vacuum chuck 102 to increase or
decrease a vacuum intensity of the vacuum chuck 102 based on the
vacuum intensity adjustment parameter.
[0076] While a plurality of different parameters of the edge
exposure tool 100 has been described above, these parameters are
simply examples of parameters that might be used. In practice, any
single parameter described above or any combination of the
parameters described above may be used.
[0077] As shown in FIG. 5, process 500 may include exposing the
wafer 104 at or approximately near the edge of the wafer 104 to
radiation for an exposure cycle before, during, and/or after
adjusting the edge exposure lens 110 and before, during, and/or
after adjusting the one or more edge exposure adjustment parameters
(block 550). The controller 120 may cause the edge exposure tool
100 to expose the wafer 104 by providing a signal to the radiation
source 230 to cause the radiation source 230 to emit the radiation
112.
[0078] The controller 120 may further cause the edge exposure tool
100 to expose the wafer 104 by providing a signal to the edge
exposure lens 110 to open and close a shutter of the edge exposure
lens 110 (e.g., to control which portions of the photoresist layer
114 are exposed and a duration of exposure for the portions). The
controller 120 may further provide a signal to the spindle 106 of
the vacuum chuck 102 to cause the spindle 106 to spin or rotate the
wafer 104 when the wafer 104 is exposed to the radiation 112. The
controller 120 may further provide a signal to the vacuum chuck 102
to cause the vacuum chuck 102 to generate a vacuum or suction force
on the wafer 104 to hold the wafer against the vacuum chuck 102
when the wafer is rotated by the spindle 106.
[0079] After completion of the exposure cycle, results of the
exposure cycle may be incorporated into the big data database, the
machine learning model, and/or the neural network to further refine
adjustment parameter determination and exposure control parameter
determination for subsequent exposure cycles. In particular, the
results (e.g., exposure uniformity information, overlay alignment
information, and/or one or more other performance information) and
the associated parameters (e.g., edge exposure lens adjustment
parameters and/or exposure control parameters) may be used as
further training data on which the machine learning model and/or
the neural network may be trained to further refine the machine
learning model and/or the neural network.
[0080] Process 500 may include additional implementations, such as
any single implementation or any combination of implementations
described above, below, and/or in connection with one or more other
processes described elsewhere herein.
[0081] Although FIG. 5 shows example blocks of process 500, in some
implementations, process 500 may include additional blocks, fewer
blocks, different blocks, or differently arranged blocks than those
depicted in FIG. 5. Additionally, or alternatively, two or more of
the blocks of process 500 may be performed in parallel.
[0082] FIG. 6 is a flowchart of an example process 600 associated
with adjusting an edge exposure lens. In some implementations, one
or more process blocks of FIG. 6 may be performed by a controller
(e.g., the controller 120, the device 400). In some
implementations, one or more process blocks of FIG. 6 may be
performed by another device or a group of devices separate from or
including the controller, such as lens adjustment device (e.g.,
lens adjustment device 212), a radiation source (e.g., the
radiation source 230), and/or another device. Additionally, or
alternatively, one or more process blocks of FIG. 6 may be
performed by one or more components of device 400, such as
processor 420, memory 430, storage component 440, input component
450, output component 460, and/or communication component 470.
[0083] As shown in FIG. 6, process 600 may include determining one
or more edge exposure lens adjustment parameters for an edge
exposure lens of an edge exposure tool (block 610). For example,
the controller may determine one or more edge exposure lens
adjustment parameters for an edge exposure lens 110 of the edge
exposure tool 100, as described above.
[0084] As further shown in FIG. 6, process 600 may include causing
a lens adjustment device of the edge exposure tool to adjust one or
more parameters of the edge exposure lens based on the one or more
edge exposure lens adjustment parameters (block 620). For example,
the controller may cause a lens adjustment device 212 of the edge
exposure tool 100 to adjust one or more parameters of the edge
exposure lens 110 based on the one or more edge exposure lens
adjustment parameters, as described above.
[0085] As further shown in FIG. 6, process 600 may include causing
the edge exposure lens to direct radiation toward a wafer at or
approximately near an edge of the wafer after the one or more
parameters of the edge exposure lens are adjusted (block 630). For
example, the controller may cause the edge exposure lens to direct
the radiation 112 toward the wafer 104 at or approximately near an
edge of the wafer 104 after the one or more parameters of the edge
exposure lens 110 are adjusted, as described above.
[0086] Process 600 may include additional implementations, such as
any single implementation or any combination of implementations
described below and/or in connection with one or more other
processes described elsewhere herein.
[0087] In a first implementation, causing the lens adjustment
device 212 of the edge exposure tool 100 to adjust the one or more
parameters of the edge exposure lens 110 includes causing the lens
adjustment device 212 of the edge exposure tool 100 to adjust a
distance 310 between the edge exposure lens 110 and the wafer 104
based on the one or more edge exposure lens adjustment parameters.
In a second implementation, alone or in combination with the first
implementation, causing the lens adjustment device 212 of the edge
exposure tool 100 to adjust the one or more parameters of the edge
exposure lens 110 includes causing the lens adjustment device 212
of the edge exposure tool 100 to adjust a horizontal position 312
of the edge exposure lens 110 based on the one or more edge
exposure lens adjustment parameters.
[0088] In a third implementation, alone or in combination with one
or more of the first and second implementations, determining the
one or more edge exposure lens adjustment parameters includes
determining the one or more edge exposure lens adjustment
parameters based on one or more cycle-to-cycle tuning parameters
for the edge exposure tool 100 (e.g., as described above in
connection with FIG. 5). In a fourth implementation, alone or in
combination with one or more of the first through third
implementations, determining the one or more edge exposure lens
adjustment parameters based on the one or more cycle-to-cycle
tuning parameters includes determining one or more target edge
exposure lens parameters for the edge exposure lens 110 based on
the one or more cycle-to-cycle tuning parameters (e.g., as
described above in connection with FIG. 5), and determining the one
or more edge exposure lens adjustment parameters based on the one
or more target edge exposure lens parameters and one or more
initial edge exposure lens parameters (e.g., as described above in
connection with FIG. 5).
[0089] In a fifth implementation, alone or in combination with one
or more of the first through fourth implementations, the one or
more cycle-to-cycle tuning parameters include at least one of a
lens life of a lens section 210 included in the edge exposure lens
110, a lens shutter life of one or more lens shutters included in
the edge exposure lens 110, an exposure mode of the edge exposure
tool 100, or a chuck vacuum filter life of a chuck vacuum filter
included in the edge exposure tool 100. In a sixth implementation,
alone or in combination with one or more of the first through fifth
implementations, the one or more cycle-to-cycle tuning parameters
include at least one of a lens optical fiber life of an optical
fiber cable included in the edge exposure tool 100, a lens lamp
life of the radiation source 230 included in the edge exposure tool
100, an exposure distance 118 between an exposure field 116 of the
edge exposure lens 110 and the edge of the wafer 104, or a leveling
status of a vacuum chuck 102, included in the edge exposure tool
100, on which the wafer 104 is positioned.
[0090] In a seventh implementation, alone or in combination with
one or more of the first through sixth implementations, the one or
more edge exposure lens adjustment parameters include at least one
of the distance 310 between the edge exposure lens and a top
surface of the wafer 104, a vertical position 308 of a first
section 208 of the edge exposure lens 110, a vertical position 306
of a second section 208 of the edge exposure lens 110, or the
horizontal position 312 of the edge exposure lens 110. In an eighth
implementation, alone or in combination with one or more of the
first through seventh implementations, the one or more edge
exposure lens adjustment parameters include the distance 310
between the lens section 210 of the edge exposure lens 110 and a
top surface of a photoresist layer 114 on the wafer 104, and
determining the one or more edge exposure lens adjustment
parameters includes determining the distance 310 based on at least
one of a thickness of the wafer 104, a thickness of the photoresist
layer 114, or the exposure field 116 for the wafer 104.
[0091] In a ninth implementation, alone or in combination with one
or more of the first through eighth implementations, process 600
includes determining (e.g., by the controller) a vacuum intensity
for the vacuum chuck 102 configured to support and rotate the wafer
104. In a tenth implementation, alone or in combination with one or
more of the first through ninth implementations, process 600
includes determining (e.g., by the controller) one or more exposure
control parameters, for the wafer 104 to be processed by the edge
exposure tool 100, based on at least one of a thickness of the
photoresist layer 114 on the wafer 104 or an amount of fogging of
the lens section 210 of the edge exposure lens 110.
[0092] In an eleventh implementation, alone or in combination with
one or more of the first through tenth implementations, the one or
more exposure control parameters include at least one of a
reference exposure intensity for the radiation 112 that is to be
directed toward the wafer 104 by the edge exposure lens 110, a
lower exposure intensity for the radiation 112 that is to be
directed toward the wafer 104 by the edge exposure lens 110, a
shutter opening delay for the edge exposure lens 110, a shutter
closing delay for the edge exposure lens 110, or an exposure
rotation time for the wafer 104.
[0093] In a twelfth implementation, alone or in combination with
one or more of the first through eleventh implementations, process
600 includes receiving (e.g., by the controller 120), from a
position sensor 228a, position information associated with the
first lens adjustment element 216, determining (e.g., by the
controller 120) an initial vertical position of the first section
206 based on the position information associated with the first
lens adjustment element 216, determining (e.g., by the controller
120) an adjusted vertical position for the first section 206 based
on the initial vertical position, and providing (e.g., by the
controller 120), to the adjustment motor 224a, a signal to cause
the adjustment motor 224a to move the first lens adjustment element
216 along the elongated support member 214 such that the first
section 206 is moved to the adjusted vertical position. In a
thirteenth implementation, alone or in combination with one or more
of the first through twelfth implementations, process 600 includes
determining (e.g., by the controller) at least one of the one or
more first adjustment parameters or the one or more second
adjustment parameters using at least one of a machine learning
model or an artificial neural network.
[0094] Although FIG. 6 shows example blocks of process 600, in some
implementations, process 600 may include additional blocks, fewer
blocks, different blocks, or differently arranged blocks than those
depicted in FIG. 6. Additionally, or alternatively, two or more of
the blocks of process 600 may be performed in parallel.
[0095] In this way, an edge exposure tool includes a lens
adjustment device. The lens adjustment device is capable of
automatically adjusting various parameters of an edge exposure lens
of the edge exposure tool to account for changes in operating
parameters of the edge exposure tool over time and from cycle to
cycle. The edge exposure tool may include a controller that is
capable of determining one or more edge adjustment parameters for
the edge exposure lens and one or more exposure control parameters
for the edge exposure tool using techniques such as big data
mining, machine learning, and neural network processing. The lens
adjustment device and the controller are capable of reducing and/or
preventing the performance of the edge exposure tool from drifting
out of tolerance, which can maintain the operation performance of
the edge exposure tool and reduce the likelihood of wafer
scratching. Moreover, the lens adjustment device and the controller
may reduce the downtime of the edge exposure tool that would
otherwise be caused by cleaning and calibration of the edge
exposure lens, which increases the productivity and throughput of
the edge exposure tool.
[0096] As described in greater detail above, some implementations
described herein provide an edge exposure tool. The edge exposure
tool includes an edge exposure lens. The edge exposure tool
includes a lens adjustment device configured to automatically
adjust one or more parameters of the edge exposure lens based on
one or more edge exposure lens adjustment parameters.
[0097] As described in greater detail above, some implementations
described herein provide a method. The method includes determining,
by a controller of an edge exposure tool, one or more edge exposure
lens adjustment parameters for an edge exposure lens of the edge
exposure tool. The method includes causing, by the controller, a
lens adjustment device of the edge exposure tool to adjust one or
more parameters of the edge exposure lens based on the one or more
edge exposure lens adjustment parameters. The method includes
causing, by the controller, the edge exposure lens to direct
radiation toward a wafer at or approximately near an edge of the
wafer after the one or more parameters of the edge exposure lens
are adjusted.
[0098] As described in greater detail above, some implementations
described herein provide an edge exposure tool. The edge exposure
tool includes a vacuum chuck configured to support a wafer. The
edge exposure tool includes an edge exposure lens configured to
direct radiation toward an edge of the wafer when the vacuum chuck
rotates the wafer, including a first section, and a second section
interfaced with the first section; and The edge exposure tool
includes a lens adjustment device including a first lens adjustment
element configured to automatically adjust one or more first
parameters of the first section, and a second lens adjustment
element configured to automatically adjust one or more second
parameters of the second section.
[0099] The foregoing outlines features of several embodiments so
that those skilled in the art may better understand the aspects of
the present disclosure. Those skilled in the art should appreciate
that they may readily use the present disclosure as a basis for
designing or modifying other processes and structures for carrying
out the same purposes and/or achieving the same advantages of the
embodiments introduced herein. Those skilled in the art should also
realize that such equivalent constructions do not depart from the
spirit and scope of the present disclosure, and that they may make
various changes, substitutions, and alterations herein without
departing from the spirit and scope of the present disclosure.
* * * * *