U.S. patent application number 17/583860 was filed with the patent office on 2022-05-12 for electrode layer partitioning.
The applicant listed for this patent is InvenSense, Inc.. Invention is credited to Leonardo Baldasarre, Alexander Castro, Houri Johari-Galle, Sarah Nitzan, Matthew Thompson.
Application Number | 20220144624 17/583860 |
Document ID | / |
Family ID | 1000006097842 |
Filed Date | 2022-05-12 |
United States Patent
Application |
20220144624 |
Kind Code |
A1 |
Castro; Alexander ; et
al. |
May 12, 2022 |
ELECTRODE LAYER PARTITIONING
Abstract
A MEMS sensor includes a proof mass that is suspended over a
substrate. A sense electrode is located on a top surface of the
substrate parallel to the proof mass, and forms a capacitor with
the proof mass. The sense electrodes have a plurality of slots that
provide improved performance for the MEMS sensor. A measured value
sensed by the MEMS sensor is determined based on the movement of
the proof mass relative to the slotted sense electrode.
Inventors: |
Castro; Alexander; (San
Francisco, CA) ; Thompson; Matthew; (Beaverton,
OR) ; Baldasarre; Leonardo; (Varese, IT) ;
Nitzan; Sarah; (Palo Alto, CA) ; Johari-Galle;
Houri; (San Jose, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
InvenSense, Inc. |
San Jose |
CA |
US |
|
|
Family ID: |
1000006097842 |
Appl. No.: |
17/583860 |
Filed: |
January 25, 2022 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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15586497 |
May 4, 2017 |
11268976 |
|
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17583860 |
|
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62462519 |
Feb 23, 2017 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G01P 15/125 20130101;
B81B 2203/04 20130101; B81B 2201/0242 20130101; B81B 3/0072
20130101; B81B 2201/0235 20130101; B81B 2203/019 20130101; B81B
3/0078 20130101; G01P 15/0802 20130101; B81B 2203/0136
20130101 |
International
Class: |
B81B 3/00 20060101
B81B003/00; G01P 15/125 20060101 G01P015/125 |
Claims
1.-19. (canceled)
20. A system for performing capacitive sensing, the system
comprising: a substrate located in a first plane; an electrode
shield located on the first plane, wherein the electrode shield is
formed of a first conductive material; and a plurality of sense
electrodes disposed on the substrate in the first plane, wherein
each of the plurality of sense electrodes is located adjacent to at
least a portion of the electrode shield in the first plane, wherein
each of the sense electrodes comprises a folded strip electrode,
and wherein the length of the folded strip electrode is longer than
the length of the perimeter of the sense electrode.
21. The system of claim 20, wherein the electrode shield comprises
a plurality of slots that substantially extend between two
non-adjacent sides of the electrode shield.
22. (canceled)
23. The system of claim 21, wherein the plurality of slots
substantially extends between two parallel sides of the sense
electrode.
24. The system of claim 23, wherein the two parallel sides comprise
two long sides of the sense electrode.
25. The system of claim 23, wherein the two parallel sides comprise
two short sides of the sense electrode.
26. The system of claim 21, wherein the plurality of slots
comprises a comb pattern.
27. The system of claim 21, wherein the plurality of slots
comprises a partial hexagonal pattern.
28. The system of claim 21, wherein the plurality of slots
comprises multiple angled slots.
29. The system of claim 28, wherein three of the angled slots
intersect at 120-degree angles.
30. The system of claim 20, wherein a plurality of slots formed by
the folded strip electrode comprises at least 8% of the surface
area of the sense electrode.
31. The system of claim 30, wherein the plurality of slots
comprises less than 20% of the surface area of the sense
electrode.
32. The system of claim 20, wherein a plurality of slots is formed
by the folded strip electrode, and wherein at least a portion of
each of the plurality of slots is located parallel to another of
the plurality of slots.
33. The system of claim 20, further comprising a movable component
of a MEMS device layer, wherein the MEMS device layer is coupled to
the substrate, and wherein the movable component moves along a
first axis in response to an external force.
34. The system of claim 33, wherein the first axis is perpendicular
to the first plane.
35. The system of claim 20, further comprising a center point
located in the first plane between at least two of the plurality of
sense electrodes, wherein the electrode shield and the plurality of
sense electrodes are symmetrical about a line that passes through
the center point in the first plane.
36. The system of claim 20, further comprising a processing unit
coupled to the plurality of sense electrodes to determine a value
of an external force based on a combined measurement of a first
capacitive sensing element and a second capacitive sensing
element.
37. The system of claim 20, wherein the folded strip electrode
substantially forms a square wave pattern, a spiral pattern, a
T-slot pattern, a Y-slot pattern, or a recessed slot pattern.
Description
CROSS REFERENCE TO OTHER APPLICATIONS
[0001] This application claims priority to U.S. Provisional Patent
Application No. 62/462,519 entitled "Electrode Layer Partitioning,"
filed Feb. 23, 2017, which is incorporated herein by reference for
all purposes.
BACKGROUND
[0002] Numerous items such as smart phones, smart watches, tablets,
automobiles, aerial drones, appliances, aircraft, exercise aids,
and game controllers may utilize motion sensors during their
operation. In many applications, various types of motion sensors
such as accelerometers and gyroscopes may be analyzed independently
or together in order to determine varied information for particular
applications. For example, gyroscopes and accelerometers may be
used in gaming applications (e.g., smart phones or game
controllers) to capture complex movements by a user, drones and
other aircraft may determine orientation based on gyroscope
measurements (e.g., roll, pitch, and yaw), and vehicles may utilize
measurements for determining direction (e.g., for dead reckoning)
and safety (e.g., to recognizing skid or roll-over conditions).
[0003] Motion sensors such as accelerometers and gyroscopes may be
manufactured as microelectromechanical (MEMS) sensors that are
fabricated using semiconductor manufacturing techniques. A MEMS
sensor may include movable proof masses that can respond to forces
such as linear acceleration (e.g., for MEMS accelerometers),
angular velocity (e.g., for MEMS gyroscopes), and magnetic field.
The operation of these forces on the movable proof masses may be
measured based on the movement of the proof masses in response to
the forces. In some implementations, this movement is measured
based on distance between the movable proof masses and sense
electrodes, which form capacitors for sensing the movement.
[0004] The operational components of the MEMS sensor such as the
movable MEMS layer and sense electrodes are typically encapsulated
within a sealed cavity having a suitable pressure based on the
sensor type, desired Q-factor, and other related design and
operational factors. Because the cavity is sealed, these components
may be protected from certain environmental factors such as
pressure changes, humidity, and moisture. However, other
environmental factors such as temperature, assembly, impact will be
experienced by the operational components of the MEMS sensor. The
sensors may be located in extreme (e.g., industrial, manufacturing,
resource extraction, etc.) environments, or may otherwise be
subjected to significant changes in environmental conditions.
Repeated exposure to extreme conditions or to changed environmental
conditions, or sudden changes in environmental conditions, may
cause changes to the physical components within the cavity such as
the proof masses or sense electrodes.
SUMMARY OF THE INVENTION
[0005] In an embodiment, an exemplary system for providing for
capacitive sensing of an external force on a microelectromechanical
system (MEMS) device comprises a substrate located in a first plane
and a movable component of a MEMS device layer, the MEMS device
layer coupled to the substrate, wherein the movable component moves
along a first axis in response to the external force. The system
further comprises a sense electrode disposed on the substrate in
the first plane, wherein a first capacitive sensing element is
formed between the movable component and the first sense electrode,
wherein the first capacitive sensing element is configured to be
responsive to the motion of the movable component along the first
axis, and wherein the sense electrode comprises a plurality of
slots that substantially extend between two non-adjacent sides of
the sense electrode.
[0006] A system for performing capacitive sensing comprises a
substrate located in a first plane, an electrode shield located on
a the first plane, wherein the electrode shield is formed of a
first conductive material, and a plurality of sense electrodes
disposed on the substrate in the first plane, wherein each of the
plurality of sense electrodes is located adjacent to at least a
portion of the electrode shield in the first plane, wherein each of
the sense electrodes comprises a folded strip electrode, and
wherein the length of the folded strip electrode is longer than the
length of the perimeter of the sense electrode.
[0007] A system for performing capacitive sensing comprises a
substrate located in a first plane, an electrode shield located on
the first plane, wherein the electrode shield is formed of a first
conductive material, and a plurality of sense electrodes disposed
on the substrate in the first plane, wherein each of the plurality
of sense electrodes is located adjacent to at least a portion of
the electrode shield in the first plane, wherein each of the sense
electrodes comprises a plurality of slots that substantially extend
between two non-adjacent sides of the sense electrode, and wherein
the plurality of slots reduce an exposed area of a top surface of
each of the sense electrodes by at least 8%.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] The above and other features of the present disclosure, its
nature and various advantages will be more apparent upon
consideration of the following detailed description, taken in
conjunction with the accompanying drawings in which:
[0009] FIG. 1 shows an illustrative motion sensing system in
accordance with an embodiment of the present disclosure;
[0010] FIG. 2A shows a section view of an illustrative portion of a
microelectromechanical (MEMS) inertial sensor having out-of-plane
sensing in accordance with some embodiments of the present
disclosure;
[0011] FIG. 2B shows a section view of an illustrative portion of a
MEMS inertial sensor having in-plane sensing in accordance with
some embodiments of the present disclosure;
[0012] FIG. 3A shows a top view of an illustrative MEMS system for
sensing linear acceleration in accordance with some embodiments of
the present disclosure;
[0013] FIG. 3B shows a side section view of an illustrative MEMS
system for sensing linear acceleration in accordance with some
embodiments of the present disclosure;
[0014] FIG. 4 shows an illustrative system for sensing angular
velocity in accordance with some embodiments of the present
disclosure;
[0015] FIG. 5A shows an exemplary configuration of sense electrodes
located on a plane of a substrate in accordance with some
embodiments of the present disclosure;
[0016] FIG. 5B shows an exemplary one of the sense electrodes of
FIG. 5A in accordance with some embodiments of the present
disclosure;
[0017] FIG. 5C shows the sense electrode configuration of FIG. 5A
after extended exposure to an operating environment in accordance
with some embodiments of the present disclosure;
[0018] FIG. 5D shows an exemplary one of the sense electrodes of
FIG. 5C in accordance with some embodiments of the present
disclosure;
[0019] FIG. 5E shows an exemplary detail view of a portion of the
sense electrode of FIG. 5D in accordance with some embodiments of
the present disclosure;
[0020] FIG. 6A shows an exemplary configuration of parallel-slotted
sense electrodes located on a plane of a substrate in accordance
with some embodiments of the present disclosure;
[0021] FIG. 6B shows an exemplary one of the parallel-slotted sense
electrodes of FIG. 5A in accordance with some embodiments of the
present disclosure;
[0022] FIG. 6C shows the parallel-slotted sense electrode
configuration of FIG. 5A after extended exposure to an operating
environment in accordance with some embodiments of the present
disclosure;
[0023] FIG. 6D shows an exemplary one of the parallel-slotted sense
electrodes of FIG. 5C in accordance with some embodiments of the
present disclosure;
[0024] FIG. 6E shows an exemplary detail view of a portion of the
parallel-slotted sense electrode of FIG. 5D in accordance with some
embodiments of the present disclosure;
[0025] FIG. 7A depicts an exemplary "T-slot" sense electrode
slotting pattern in accordance with some embodiments of the present
disclosure;
[0026] FIG. 7B depicts an exemplary "Y-slot" sense electrode
slotting pattern in accordance with some embodiments of the present
disclosure;
[0027] FIG. 7C depicts an exemplary "spiral-slot" sense electrode
slotting pattern in accordance with some embodiments of the present
disclosure;
[0028] FIG. 7D depicts an exemplary "recessed-slot" sense electrode
slotting pattern in accordance with some embodiments of the present
disclosure;
[0029] FIG. 7E depicts an exemplary "connected-slot" sense
electrode slotting pattern in accordance with some embodiments of
the present disclosure;
[0030] FIG. 8 depicts an exemplary layer of slotted sense
electrodes of an exemplary accelerometer in accordance with some
embodiments of the present disclosure;
[0031] FIG. 9 depicts exemplary steps for a method of designing a
slotted electrode pattern in accordance with some embodiments of
the present disclosure; and
[0032] FIG. 10 depicts exemplary steps for a method of providing
compensation to a MEMS sensor over a lifetime of exposure to an
operating environment in accordance with some embodiments of the
present disclosure.
DETAILED DESCRIPTION
[0033] A MEMS device is constructed of a number of layers such as a
CMOS layer, a MEMS device layer, and a cap layer. The MEMS device
layer includes a movable proof mass and at least one sense
electrode for use in sensing a position or orientation of the proof
mass. At least a portion of the proof mass is conductive such that
the proof mass and a sense electrode opposing a planar surface of
the proof mass form a capacitor. During operation, an operating
signal having a voltage, referred to herein as "operating voltage,"
is applied to the conductive portion of the proof mass or the sense
electrode. Motion of the MEMS device causes the proof mass to move
with respect to the sense electrode thereby changing the distance
between the proof mass and the sense electrode and, hence, changing
the capacitance of the capacitor formed by the proof mass and the
sense electrode. Processing circuitry measures the capacitance
based on signals received from the sense electrode or proof mass,
to determine a value indicative of the movement between the proof
mass relative and the sense electrode. Based on a change in the
capacitance, the processing circuitry determines a motion parameter
indicative of motion (e.g., linear acceleration, angular velocity,
or magnetic field) of the MEMS device. As an example, the MEMS
device may form an accelerometer, gyroscope, pressure sensor, or
other type of motion sensor.
[0034] The motion parameter may be determined by performing a
number of processing operations on the sensed capacitance or
capacitances, such as filtering, amplification, scaling, and other
analog and/or digital processing operations to generate a signal
that is representative of the motion parameter that is desired to
be measured. The relationship between any measured capacitance and
the sensed motion parameter is based at least in part on known or
assumed information about the location and orientation of the proof
mass relative to the sense electrode. If one of these components is
damaged or the relative location distance and/or orientation
between the proof mass and sense electrode otherwise changes, a
given capacitance may no longer correspond to a given value for the
measured parameter. In many instances it may be difficult to
identify such changes based on the measured capacitance or other
measurements that can be made with the MEMS sensor, for example,
because it may be difficult to determine whether changes in values
of a measured capacitance over time are the result of changes in
the capacitance system or simply different forces (e.g., inertial
forces) applied to the MEMS sensor.
[0035] MEMS sensors may be utilized in a variety of applications in
which they may be subjected to challenging environmental
conditions, such as frequent changes in temperature, exposure to
temperature extremes, and sudden changes in temperature. Components
of the MEMS sensor may be manufactured of materials that may
experience physical stress to such environmental conditions over
time, for example, by expanding and contracting as a result of
differences in temperature.
[0036] For example, sense electrodes that are deposited on a planar
substrate layer of a MEMS sensor may define a portion of a
capacitor with a proof mass or other movable MEMS component that is
located on a plane parallel to the sense electrode. The sense
capacitor has a flat planar surface, and the distance between the
parallel sense electrode and the proof mass may be designed such
that a given capacitance and change in capacitance correspond to a
measured motion parameter such as linear acceleration, angular
velocity, or magnetic field. The sense electrode may be constructed
of materials that may experiences stresses resulting from different
environmental conditions. For example, a sense electrode may be
manufactured by depositing or sputtering a layer including
materials such as aluminum, silicon, copper, gold, tungsten,
titanium, titanium nitride, or silicon dioxide. The stresses on the
sense electrode may result in a crystallization or cracking of the
component materials over time. This cracking changes the behavior
of the sense electrode, for example, by changing the electrical
characteristics of the sense electrode and creating discontinuities
on the previously flat surface facing the sense electrodes. Among
other things, these discontinuities may modify the designed
distance between the sense electrode and the proof mass, for
example, by cause the surface of the sense electrode to extend
further in the direction of the sense electrode.
[0037] An exemplary sense electrode may include a plurality of
slots in the planar surface. The slots may be through slots such
that all of the sense electrode is removed along the location of
the slot, or may be partial slots that extend a part of the way
into the depth of the sense electrode. As cracking occurs within
the sense electrode over time, the cracks may couple to the slots
of the sense electrode, which may prevent the formation of
structures and deformities on the surface of the sense electrode.
In this manner, the slots may guide the formation of any cracking
in a manner that limits the impact of the cracking on the sensed
capacitance.
[0038] Sense electrode slotting may reduce a portion of the surface
of the electrode that is available for forming a capacitor with the
proof mass, or in embodiments of partial slotting, may partially
reduce the slotting based on the increased distance between the
slotted portions and the proof mass. Accordingly, the slots of the
sense electrode may have a variety of patterns and parameters that
may be modified or adjusted to select an appropriate electrode
design for a particular application. Exemplary patterns may include
snaking slots at a variety of orientations, a "T-slot" pattern
(e.g., comb pattern), a "Y-slot" pattern (e.g., partial hexagonal
pattern), spiral patterns, other suitable patterns, and
combinations thereof. Patterns, slot depth, slot width, electrode
materials, electrode crystallization patterns, and other similar
parameters may be adjusted and selected to create particular
desired sensing characteristics and environmental resilience.
[0039] In some embodiments, it may be known how a particular
slotted electrode design responds to environmental conditions.
Parameters for the MEMS sensor (e.g., scaling factors, etc.) may be
modified over time based on expected or calculated modifications to
the sense electrode over time. Modifications may be made based on
factors such as time in service, time in operation, changes in
measured parameters over time, and external measured
characteristics such as temperature.
[0040] FIG. 1 depicts an exemplary motion sensing system 10 in
accordance with some embodiments of the present disclosure.
Although particular components are depicted in FIG. 1, it will be
understood that other suitable combinations of sensors, processing
components, memory, and other circuitry may be utilized as
necessary for different applications and systems. In an embodiment
as described herein, the motion sensing system may include at least
a MEMS inertial sensor 12 (e.g., a single or multi-axis
accelerometer, a single or multi-axis gyroscope, or combination
thereof) and supporting circuitry, such as processing circuitry 14
and memory 16. In some embodiments, one or more additional sensors
18 (e.g., additional MEMS gyroscopes, MEMS accelerometers, MEMS
microphones, MEMS pressure sensors, and a compass) may be included
within the motion processing system 10 to provide an integrated
motion processing unit ("MPU") (e.g., including 3 axes of MEMS
gyroscope sensing, 3 axes of MEMS accelerometer sensing,
microphone, pressure sensor, and compass).
[0041] Processing circuitry 14 may include one or more components
providing necessary processing based on the requirements of the
motion processing system 10. In some embodiments, processing
circuitry 14 may include hardware control logic that may be
integrated within a chip of a sensor (e.g., on a substrate or cap
of a MEMS inertial sensor 12 or other sensor 18, or on an adjacent
portion of a chip to the MEMS inertial sensor 12 or other sensor 18
to control the operation of the MEMS inertial sensor 12 or other
sensor 18 and perform aspects of processing for the MEMS inertial
sensor 12 or other sensor 18. In some embodiments, the MEMS
inertial sensor 12 and other sensors 18 may include one or more
registers that allow aspects of the operation of hardware control
logic to be modified (e.g., by modifying a value of a register). In
some embodiments, processing circuitry 14 may also include a
processor such as a microprocessor that executes software
instructions, e.g., that are stored in memory 16. The
microprocessor may control the operation of the MEMS inertial
sensor 12 by interacting with the hardware control logic, and
process signals received from MEMS inertial sensor 12. The
microprocessor may interact with other sensors in a similar
manner.
[0042] Although in some embodiments (not depicted in FIG. 1), the
MEMS inertial sensor 12 or other sensors 18 may communicate
directly with external circuitry (e.g., via a serial bus or direct
connection to sensor outputs and control inputs), in an embodiment
the processing circuitry 14 may process data received from the MEMS
inertial sensor 12 and other sensors 18 and communicate with
external components via a communication interface 20 (e.g., a SPI
or I2C bus, or in automotive applications, a controller area
network (CAN) or Local Interconnect Network (LIN) bus). The
processing circuitry 14 may convert signals received from the MEMS
inertial sensor 12 and other sensors 18 into appropriate
measurement units (e.g., based on settings provided by other
computing units communicating over the communication bus 20) and
perform more complex processing to determine measurements such as
orientation or Euler angles, and in some embodiments, to determine
from sensor data whether a particular activity (e.g., walking,
running, braking, skidding, rolling, etc.) is taking place.
[0043] In some embodiments, certain types of information may be
determined based on data from multiple MEMS inertial sensors 12 and
other sensors 18, in a process that may be referred to as sensor
fusion. By combining information from a variety of sensors it may
be possible to accurately determine information that is useful in a
variety of applications, such as image stabilization, navigation
systems, automotive controls and safety, dead reckoning, remote
control and gaming devices, activity sensors, 3-dimensional
cameras, industrial automation, and numerous other
applications.
[0044] An exemplary MEMS inertial sensor (e.g., MEMS inertial
sensor 12) may include one or more movable proof masses that are
configured in a manner that permits the MEMS inertial sensor (e.g.,
a MEMS accelerometer or MEMS gyroscope) to measure a desired force
(e.g., linear acceleration, angular velocity, magnetic field, etc.)
along an axis. In some embodiments, the one or more movable proof
masses may be suspended from anchoring points, which may refer to
any portion of the MEMS sensor which is fixed, such as an anchor
that extends from a layer (e.g., a CMOS layer) that is parallel to
the MEMS layer of the device, a frame of the MEMS layer of the
device, or any other suitable portion of the MEMS device that is
fixed relative to the movable proof masses. The proof masses may be
arranged in a manner such that they move in response to measured
force. The movement of the proof masses relative to a fixed surface
(e.g., a fixed sense electrode extending into the MEMS layer or
located parallel to the movable mass on the substrate) in response
to the measured force is measured and scaled to determine the
desired inertial parameter.
[0045] FIG. 2A depicts a section view of a portion of an
illustrative inertial sensor 200 that is configured to sense an
external force (e.g., a linear acceleration along an axis, an
angular velocity about an axis, or a magnetic field) based on
out-of-plane movement of a proof mass in accordance with some
embodiments of the present disclosure. Although particular
components are depicted and configured in a particular manner in
FIG. 2A, it will be understood that a motion sensing inertial
sensor 200 may include other suitable components and
configurations. The section view of FIG. 2A depicts a limited
subset of components of a MEMS inertial sensor, which generally
include a spring-mass system within a MEMS layer including various
components such as springs, proof masses, coupling masses, drive
masses, drive electrodes and combs, sense electrodes and combs,
lever arms, couplings, and other suitable electromechanical
components that are manufactured using semiconductor manufacturing
techniques. The set of components depicted in FIG. 2A provide a
configuration for out-of-plane capacitive sensing by an inertial
sensor. An exemplary MEMS accelerometer may experience a force
along the z-axis (i.e., out of the MEMS device plane) in response
to a linear acceleration in a direction along that axis. An
exemplary gyroscope may experience a force along the z-axis (i.e.,
out of the MEMS device plane) in response to a Coriolis force along
the z-axis as a result of an angular velocity about an axis that is
perpendicular to the z-axis and a drive axis of the MEMS
gyroscope.
[0046] In the embodiment of FIG. 2A, the inertial sensor 200 is
constructed of a plurality of bonded semiconductor layers. Although
a MEMS device may be constructed in a variety of manners, in an
embodiment, the MEMS device may include a substrate 220, a MEMS
layer 210, and a cap layer 230 that are bonded together at certain
points to form a hermetically sealed package. The substrate 220 may
include CMOS circuitry and form a CMOS layer of the MEMS device,
though the CMOS circuitry may reside in other portions of the
device, such as cap layer 230, or in some embodiments, external to
the MEMS die. An exemplary MEMS layer may be produced using
semiconductor manufacturing techniques to construct micromechanical
components for use in applications such as MEMS sensors (e.g.,
accelerometers, gyroscopes, pressure sensors, microphones, etc.).
An exemplary CMOS layer may provide for the integration of
electrical components and devices within the CMOS layer, and may
also provide for interconnections between those components. In some
embodiments, the components of the MEMS layer 210 may be
conductive, and interconnections between components of the MEMS
layer 210 and the CMOS layer 220 may be provided. As an example,
circuitry within the CMOS layer 220 may electrically couple
electrical components (e.g., electrodes or movable proof masses) of
the MEMS layer 210 to processing circuitry 14 or other electrical
components.
[0047] In an exemplary embodiment, the MEMS layer 210 may include
at least one anchoring point 208 and at least one movable proof
mass 206 that is coupled to the anchoring point 208 and suspended
above the substrate 220. The anchoring point 208 may be fixedly
attached (e.g., bonded) to and extend from a planar surface of the
substrate 220. The anchoring point 208 and the movable proof mass
206 may be composed of conductive material, and the movable proof
mass 206 may be arranged to pivot about the anchoring point 208
such that one end of the proof mass 206 tilts up while the other
end tilts down in response to an inertial force. Thus, when one
side of the proof mass surface moves away from the substrate 220
the other side of the proof mass surface on the opposite end moves
toward the substrate 220. Although not depicted in FIG. 2A, springs
and couplings may be connected to the proof mass, in-plane anchors,
and other components within the MEMS layer in a manner that
restricts movement of the proof mass to desired movements in
response to measured inertial forces, such as along an axis of a
sensed linear acceleration in the case of a MEMS accelerometer or
along a Coriolis axis (and in some embodiments, a drive axis) for a
MEMS gyroscope.
[0048] The proof mass 206 may define a plurality of planar
surfaces, including an upper planar surface (top of proof mass 206,
in the x/y plane) and a lower planar surface (bottom of proof mass
206, in the x/y plane). Although in different embodiments a proof
mass may have a plurality of different shapes within the MEMS
device plane, in the exemplary embodiment of FIG. 2A, the proof
mass 206 includes at least a left-side planar surface (left side of
proof mass 206, in the y/z plane) and a right-side planar surface
(right side of proof mass 206, in the y/z plane).
[0049] The inertial sensor 200 may also comprise at least one sense
electrode that, in conjunction with the proof mass 206, forms a
capacitor. The exemplary embodiment of FIG. 2A shows two sense
electrodes 201 and 202 positioned on a planar surface of the
substrate 220 on opposite sides of the anchoring point 208, but
other numbers and arrangements of sense electrodes are possible in
other embodiments. Although not depicted in FIG. 2A, in an
embodiment an electrode shield may also be formed on the substrate
(e.g., surrounding the sense electrodes), and in some embodiments
may be of a same or similar material as the sense electrode. Each
sense electrode 201 and 202 faces an opposite portion of the lower
planar surface of the proof mass 206 that is suspended above the
substrate 220. Using these sense electrodes 201 and 202, the
position of the proof mass 206 is capacitively sensed. In this
regard, the value of the capacitance between sense electrode 201
and the proof mass 206 changes based upon the distance between the
upper planar surface of sense electrode 201 and the lower planar
surface of proof mass 206. The capacitance between sense electrode
202 and the proof mass 206 changes based upon the distance between
the upper planar surface of sense electrode 202 and the lower
planar surface of proof mass 206. The capacitance formed by each
capacitor may be sensed, and the capacitance signals may be
processed (e.g., by filtering, amplification, scaling, etc.) to
determine information about the sensed inertial force. In an
exemplary embodiment, the memory 16 (FIG. 1) stores data that is
used by the processing circuitry 14 in order to convert the sensed
voltage into measurements of motion, e.g., linear acceleration,
angular velocity, or magnetic field. This data may be calibrated
during manufacturing or at other times such that a certain movement
by the proof mass 206 corresponds to a certain change in the
measured motion parameter.
[0050] FIG. 2B depicts a cross section view of a portion of an
illustrative inertial sensor 200 that is configured to sense an
external force (e.g., a linear acceleration along an axis, an
angular velocity about an axis, or a magnetic field) based on
in-plane movement of a proof mass in accordance with some
embodiments of the present disclosure. The exemplary inertial
sensor 200 includes a substrate 220, a MEMS layer 210, and a cap
layer 230, as described above with respect to FIG. 2A. Although
particular components are depicted and configured in a particular
manner in FIG. 2B, it will be understood that a motion sensing
inertial sensor 200 may include other suitable components and
configurations. The cross section view of FIG. 2B depicts a limited
subset of components of a MEMS inertial sensor, which generally
include a spring-mass system within a MEMS layer including various
components such as springs, proof masses, coupling masses, drive
masses, drive electrodes and combs, sense electrodes and combs,
lever arms, couplings, and other suitable electromechanical
components that are manufactured using semiconductor manufacturing
techniques. The set of components depicted in FIG. 2B provide a
configuration for in-plane capacitive sensing by an inertial
sensor. An exemplary MEMS accelerometer may experience a force
along the x-axis (i.e., within of the MEMS device plane) in
response to a linear acceleration in a direction along that axis.
An exemplary gyroscope may experience a force along the x-axis
(i.e., within of the MEMS device plane) in response to a Coriolis
force along the x-axis as a result of an angular velocity about an
axis (e.g., the z-axis) that is perpendicular to the x-axis and a
drive axis (e.g., the y-axis) of the MEMS gyroscope.
[0051] In an exemplary embodiment, the MEMS layer 210 may include
at least one movable proof mass 206 that is coupled to a plurality
of springs 207 and 209. In an embodiment, the springs 207 and 209
are coupled to the proof mass 206 and other components within the
MEMS layer 210 such as coupling masses, drive masses, Coriolis
masses, lever arms, anchors, or other suitable components. The
springs 207 and 209 are configured in a manner such that they
facilitate movement of the proof mass 206 along the sense axis
(e.g., x-axis) in response to an inertial force along the sense
axis. For example, the springs 207 and 209 may have an aspect ratio
and shape such that they are compliant to motion along the x-axis,
and in some embodiments, rigid with respect to motion along other
axes (e.g., along the y-axis and z-axis). The proof mass 206 may
define a plurality of planar surfaces, including an upper planar
surface (top of proof mass 206, in the x/y plane) and a lower
planar surface (bottom of proof mass 206, in the x/y plane).
Although in different embodiments a proof mass may have a plurality
of different shapes within the MEMS device plane, in the exemplary
embodiment of FIG. 2B, the proof mass 206 includes at least a
left-side planar surface (left side of proof mass 206, in the y/z
plane) and a right-side planar surface (right side of proof mass
206, in the y/z plane).
[0052] The inertial sensor 200 may also comprise at least one sense
electrode that, in conjunction with the proof mass 206, forms a
capacitor. The exemplary embodiment of FIG. 2B shows two sense
electrodes 203 and 204 but other numbers and arrangements of sense
electrodes are possible in other embodiments. The sense electrodes
203 and 204 are anchored to the substrate 220 and extend into the
MEMS device plane. Sense electrode 203 may include a right-side
planar surface, a portion of which is located in the MEMS device
plane opposing and parallel to the left-side planar surface of
proof mass 206. Sense electrode 204 may include a left-side planar
surface, a portion of which is located in the MEMS device plane
opposing and parallel to the right-side planar surface of proof
mass 206. Using these sense electrodes 203 and 204, the position of
the proof mass within the MEMS plane along the x-axis 206 is
capacitively sensed. In this regard, the value of the capacitance
between sense electrode 203 and the proof mass 206 changes based
upon the distance between the right-side planar surface of sense
electrode 203 and the left-side planar surface of proof mass 206.
The value of the capacitance between sense electrode 203 and the
proof mass 206 changes based upon the distance between the
left-side planar surface of sense electrode 204 and the left-side
planar surface of proof mass 206. The capacitance formed by each
capacitor may be sensed, and the capacitance signals may be
processed (e.g., by filtering, amplification, scaling, etc.) to
determine information about the sensed inertial force. In an
exemplary embodiment, the memory 16 (FIG. 1) stores data that is
used by the processing circuitry 14 in order to convert the sensed
voltage into measurements of motion, e.g., linear acceleration,
angular velocity, or magnetic field. This data may be calibrated
during manufacturing or at other times such that a certain movement
by the proof mass 206 corresponds to a certain change in the
measured motion parameter.
[0053] FIG. 3A depicts a top view of an exemplary MEMS
accelerometer 300 for that responds to a linear acceleration along
a z-axis in accordance with some embodiments of the present
disclosure. The accelerometer 300 comprises two proof masses PM1
302B and PM2 302A that respond to a linear acceleration along the
z-axis by moving in anti-phase direction normal to an upper planar
surface of sense electrodes 320A-320D, which are located on a
surface of a substrate 306. Although not depicted in FIG. 3A, in an
embodiment an electrode shield may also be formed on the substrate
(e.g., surrounding the sense electrodes), and in some embodiments
may be of a same or similar material as the sense electrode. The
anti-phase movement is constrained by a flexible coupling between
the two proof masses PM1 302B and PM2 302A and the substrate 306.
The flexible coupling comprises two separated anchoring points A1
310A and A2 310B, two central torsional springs B1 314A and B2
314B, two rotational levers L1 316A and L2 316B and four external
torsional springs B11 318A, B21 318B, B12 318C and B22 318D. The
motion of the accelerometer 300 is measured based on the
out-of-plane movement of the proof masses relative to capacitive
sense electrodes 320A-320D.
[0054] The springs B1 314A and B2 314B connect the anchoring points
A1 310A and A2 310B to the levers L1 316A and L2 316B. The four
external torsional springs B11 318A, B21 318B, B12 318C and B22
318D connect the end of one lever to the end of the other lever on
the opposite side trough the two proof masses PM1 302B and PM2
302A. In particular spring B11 318A connects the top of the left
lever L1 316A to internal proof mass PM1 302B that connects the
bottom of the right lever L2 316B through the spring B22 318D. In
the same way the bottom of the left lever L1 316A is coupled to the
top of the right lever L2 316B with the springs B12 318C and B22
318D.
[0055] For simplicity, suppose that the proof masses have the
center of gravity on the axis of the central springs (B1 314A and
B2 314B) and that the external springs (B12 318C, B21 318B, B11
318A and B22 318D) are coupled to the proof masses with the same
distance from the center of gravity orthogonal to this axis. A more
general case is described in the following.
[0056] A linear acceleration a in the Z direction will create a
force in Z for each proof mass:
F P .times. M 1 = m 1 .times. a ( 9 ) F P .times. M 2 = m 2 .times.
a ( 10 ) ##EQU00001##
where m.sub.1 and m.sub.2 are the masses of PM1 302B and PM2 302A
respectively. On each proof mass half of this force acts on each
one of the external springs, B11 318A and B22 318D for PM1 302B,
and B12 318C and B21 318B for PM2 302A. This force is transferred
on the extreme of the lever so in the center of the lever there is
a torque that is the difference of this force times the lever of
PM1 302B and PM2 302A:
M = m 1 .times. a 2 .times. 1 P .times. M .times. 1 - m 2 .times. a
2 .times. 1 PM .times. .times. 2 ( 11 ) ##EQU00002##
where the lever length of PM1 1.sub.PM1 is the distance from the
springs B11 318A to B1 314A and B22 318D to B2 314B and 1.sub.PM2
is the distance from the springs B12 318C to B1 314A and B21 318B
to B2 314B. The torque M causes the central springs and the two
levers to rotate in anti-phase and so one proof mass moves towards
the substrate and the other moves in the opposite direction.
[0057] In order to cause the anti-phase movement there must be an
unbalancing torque M. This unbalanced torque M can be given by a
difference in the mass (m.sub.1.noteq.m.sub.2), by difference in
the lever (1.sub.PM1.noteq.1.sub.PM2), or by a difference in the
mass lever product (m.sub.11.sub.PM1.noteq.m.sub.21.sub.PM2).
[0058] In a more general example, where the center of gravity of
the mass is not lying on the spring axis or the external springs
are not coupled to proof masses with the same distance orthogonal
to this axis, the acceleration causes a torque in addition to the
force in the Z direction. In this case the structure of the sensor
also rotates. The sensor also includes a sense electrode to measure
the motion of the sensor.
[0059] As is depicted in FIG. 3A, proof mass PM2 302A may move in a
"DOWN" direction along the z-axis relative to and towards the
underlying substrate, while proof mass PM1 302B may move in an "UP"
direction along the z-axis relative to and away from the underlying
substrate. A plurality of sense electrodes 320A-320D may be located
on the substrate have an upper planar surface located in parallel
and opposite a lower surface of each of the proof masses PM2 302A
and PM1 302B. That is, sense electrode 320A may be located opposite
a first portion of proof mass PM1 302B, sense electrode 320A may be
located opposite a first portion of PM2 302A, sense electrode 320C
may be located opposite a second portion of PM2 302A, and sense
electrode 320D may be located opposite a second portion of PM1
302B.
[0060] Capacitive sensing can be performed based on the capacitance
formed by each of the respective electrodes with a portion of the
proof mass, such that in the embodiment of FIG. 3A, capacitors
associated with sense electrodes 320A/320D and proof mass PM1 302B
will have a lower capacitive than capacitors associated with sense
electrodes 320B/320C and proof mass PM2 302A, based on the
respective distances between the proof masses and sense
electrodes.
[0061] FIG. 3B shows a side section view of an illustrative MEMS
system for sensing linear acceleration in accordance with some
embodiments of the present disclosure, viewed from section line 330
of FIG. 3A. FIGS. 3A and 3B depict proof mass PM1 302B as moving
away from the underlying substrate in the "UP" direction and proof
mass PM2 302A moving towards the underlying substrate in the "DOWN"
direction. Sense electrodes 320A (not depicted in FIG. 3B), 320B
(not depicted in FIG. 3B), 320C, and 320D are located on the
substrate, with 320A and 320B located behind anchors A1 and A2 and
sense electrode 320C and 320D located in front of anchors A1 and
A2. Each of the sense electrodes is connected to a sense path
(e.g., within CMOS circuitry of the substrate) that includes analog
and digital circuitry such as a C-to-V converters, amplifiers,
comparators, filters, and scaling to determine acceleration based
on the capacitances sensed by the sense electrodes.
[0062] A first portion of poof mass PM2 302A is located in front of
anchor A1 and directly above sense electrode 320C to form a
capacitor therewith, the capacitance of which increases based on
the movement of the first portion of proof mass PM2 302A towards
sense electrode 320C. A second portion of poof mass PM2 302A is
located behind anchor A2 and directly above sense electrode 320B
(behind sense electrode 320D, not depicted) to form a capacitor
therewith, the capacitance of which increases based on the movement
of the second portion of proof mass PM2 302A towards sense
electrode 320B. A first portion of poof mass PM1 302B is located in
front of anchor A2 and directly above sense electrode 320D to form
a capacitor therewith, the capacitance of which decreases based on
the movement of the first portion of proof mass PM1 302B away from
sense electrode 320D. A second portion of poof mass PM1 302B is
located behind anchor A1 and directly above sense electrode 320A
(behind sense electrode 320C, not depicted) to form a capacitor
therewith, the capacitance of which decreases based on the movement
of the second portion of proof mass PM1 302B away from sense
electrode 320A.
[0063] FIG. 4 depicts an illustrative MEMS gyroscope with voltage
sensing of multiple movable masses relative to sense electrodes in
accordance with some embodiments of the present disclosure. The
gyroscope design of FIG. 4 is provided for purposes of illustration
and not limitation. It will be understood that the principles of
the present disclosure may apply to any suitable MEMS device (e.g.,
MEMS accelerometers, gyroscopes, pressure sensors, microphones,
etc.) and to any suitable configuration of such devices. The
exemplary embodiment of FIG. 4 illustrates an embodiment of a
dual-axis gyroscope comprising a balanced guided mass system 400.
The guided mass system 400 comprises two guided mass systems 400a
and 400b coupled together by coupling spring 405.
[0064] The guided mass systems 400a and 400b are connected to
anchoring points 406a-d via springs 408a-d. Additional anchoring
points 440a and 440b are located within the interior of the pitch
proof masses 450a and 450b. Located below the MEMS layer of the
suspended spring-mass system depicted in FIG. 4 is substrate CMOS
layer 401. Each of the anchoring points 406a-d and 440a-b may be
bonded to the CMOS layer 401 (e.g., via respective connecting
points) and may extended upwards into the plane of the suspended
spring-mass system.
[0065] The symmetric guided mass system 400a rotates out-of-plane
about a first roll-sense axis. The symmetric guided mass system
400b rotates out-of-plane about a second roll-sense axis in-plane
and parallel to the first roll-sense axis. The coupling spring 405
is connected to roll proof-masses 402b and 402c. The coupling
spring 405 is torsionally compliant about an axis in the
X-direction so that the symmetric guided mass systems 400a and 400b
can rotate anti-phase out-of-plane about the first and second
roll-sense axes. The coupling spring 405 is stiff in the
Z-direction which prevents the symmetric guided mass systems 400a
and 400b from rotating in-phase out-of-plane.
[0066] In an embodiment, pitch proof-masses 450a and 450b are each
flexibly connected to their respective four roll proof-masses
402a-402d via springs 4201a-d. Springs 4201a and 4201b are
torsionally compliant such that pitch proof-mass 450a can rotate
out-of-plane about a first pitch sense axis in the y-direction, and
springs 4201c and 4201d are torsionally compliant such that pitch
proof-mass 450b can rotate out-of-plane about a second pitch sense
axis in the Y-direction.
[0067] In this embodiment, proof masses 450a and 450b are also
coupled to the CMOS layer 401 via spring systems 431 and 432, and
anchoring points 440a and 440b, respectively. Pitch proof-masses
450a and 450b follow the motion of the CMOS layer 401 substrate and
the vertical gap between the substrate and the proof masses remain
same even under the external effects like temperature variations
and externally applied forces.
[0068] The two symmetric guided mass systems 400a and 400b are
arranged so that the roll proof-masses 402a-d move along the x-axis
in anti-phase. The coupling spring 405 is stiff in the X-direction
such that roll proof-masses 402b and 402c move together in the
X-direction. The roll proof-masses 402a and 402d move in opposite
of roll proof-masses 402b and 402c.
[0069] Springs 4201a-d are compliant in-plane such that when the
roll proof-masses 402a-d are driven, the pitch proof-masses 450a
and 450b rotate anti-phase in-plane about separate axes in the
z-direction. Electrostatic actuators 409a-h such as comb drives are
connected to the roll proof-masses 402a-d to drive the balanced
guided mass system 400. The two guided mass systems 400a and 400b
comprising roll proof-masses 402a-d and pitch proof-masses 450a and
450b are driven together at a frequency by a drive circuit coupled
to the actuators 409a-h. In some embodiments, drive sense
electrodes (not depicted) may be connected to any of the components
of the gyroscope to detect the drive response to a particular
actuation/drive that is provided to the system. The measurements
from the drive sense electrodes may be used as feedback to adjust
the actuation that is provided to the system.
[0070] Angular velocity about the pitch-input axis in the
x-direction will cause Coriolis forces to act on the pitch
proof-masses 450a and 450b about the first and second pitch-sense
axes respectively. The Coriolis forces cause the pitch proof masses
450a and 450b to rotate anti-phase out-of-plane about the first and
the second pitch-sense axes. The amplitudes of the rotations of the
pitch proof-masses 450a and 450b about the first and the second
pitch-sense axes are proportional to the angular velocity about the
pitch-input axis.
[0071] In an embodiment, sense electrodes 460a-460d located on the
substrate and under the pitch proof masses 450a and 450b are used
to detect the anti-phase rotations about the first and the second
pitch-sense axes. Although not depicted in FIG. 4, in an embodiment
an electrode shield may also be formed on the substrate (e.g.,
surrounding the sense electrodes), and in some embodiments may be
of a same or similar material as the sense electrode. Externally
applied angular acceleration about the roll-input axis will
generate inertial torques in-phase on the pitch proof masses 450a
and 450b causing them to rotate in-phase about the first and the
second pitch-sense axes. Sense electrodes 460a and 460d can be
coupled and sense electrodes 460b and 460c can be coupled so that
in-phase rotations of the pitch proof-masses 450a and 450b are not
detected, but anti-phase rotations are detected.
[0072] Angular velocity about the roll-input axis will cause
Coriolis forces to act on the roll proof-masses 402a-d in the
Z-direction. The Coriolis forces cause the symmetric guided mass
systems 400a and 400b to rotate anti-phase out-of-plane about the
first and second roll-sense axes. Sense electrodes 412a-c under the
roll proof masses 402a-d are used to detect the rotations of the
symmetric guided mass systems 400a and 400b. Externally applied
angular acceleration about the pitch-input axis will generate
in-phase inertial torques on the symmetric guided mass systems 400a
and 400b.
[0073] However, the symmetric guided mass systems 400a and 400b do
not rotate because coupling spring 405 prevents in-phase rotation
about the first and second roll-sense axes. Sense electrodes 412a
and 412c can be coupled so that in-phase rotations of the symmetric
guided mass systems 400a and 400b are not detected but anti-phase
rotations are detected.
[0074] FIG. 5A shows an exemplary configuration of sense electrodes
located on a plane of a substrate in accordance with some
embodiments of the present disclosure. Although a variety of sense
electrode configurations may be provided for different suitable
applications, in an embodiment four rectangular sense electrodes
502A-502D may be provided on a substrate to perform capacitive
sensing for an inertial sensor. Substrate 500 may be a suitable
substrate, such as a CMOS substrate as described herein. An
electrode shield 501 may be formed on the substrate 500. The
electrode shield 501 may shield the sense electrodes from other
components system (e.g., other than the measured proof mass), which
may improve the accuracy of the capacitive measurements performed
by the sense electrodes 502A-502D. Non-conductive gaps may be
provided between the electrode shield 501 and the sense electrodes
502A-502D, such that each sense electrode 502A-502D provides an
isolated and continuous conductive pad for capacitive interaction
with its associated proof mass or proof mass portion.
[0075] FIG. 5B shows an exemplary one of the sense electrodes of
FIG. 5A in accordance with some embodiments of the present
disclosure. Sense electrode 502A is a continuous rectangular sense
electrode, and is surrounded by electrode shield 501 with an
intervening non-conductive gap. In the embodiments of FIGS. 5A-5B,
the components of the MEMS sensor (e.g., electrode shield 501 and
sense electrodes 502A-502D) may not have been exposed to
environmental conditions that result in changes to the materials of
those components. Thus, the components may be substantially in a
form that is similar to the manner in which they were deposited,
with generally smooth exposed surfaces (e.g., of the sense
electrode 502A-502D facing the proof masses).
[0076] FIG. 5C depicts the exemplary sense electrodes and electrode
shield of FIG. 5A after extended exposure to environmental
conditions. Over time, exposure to environmental conditions such as
temperature extremes or sudden changes in temperature may impact
the physical structure of the constituent materials of the
electrode shield 501 and sense electrodes 502A-D, resulting in
formation of cracking patterns, including at the surface of the
electrode shield 501 and sense electrodes 502A-502D. In the
exemplary embodiment of FIGS. 5A-5E, the electrode shield 501 and
sense electrodes 502A-502D may be impacted in a similar manner,
such that the cracking pattern is relatively uniform throughout the
electrode shield 501 and sense electrodes 502A-502D. This pattern
is depicted in more detail for an exemplary sense electrode 502A in
FIG. 5D, and with additional detail of the sense electrode 502A
depicted in FIG. 5E.
[0077] The cracking pattern that forms on the sense electrodes
502A-502D may result in surface effects that modify the electrical
characteristics, and thus, the resulting capacitive signals, that
are sensed based on the capacitors of the sense electrodes
502A-502D and their respective proof masses. In addition, the
cracking may also result in variations of the height of the sense
electrodes or portions thereof relative to the proof masses, which
may result in a change in the capacitive response of the MEMS
inertial sensor. This may result in inaccurate readings of the
sensed parameter, since a given sensed parameter may be based on an
assumed correspondence with a particular capacitance (e.g., based
on filtering, amplification, scaling, and other processing as
described herein).
[0078] FIG. 6A shows an exemplary configuration of parallel-slotted
sense electrodes located on a plane of a substrate in accordance
with some embodiments of the present disclosure. Although a variety
of sense electrode configurations may be provided for different
suitable applications, in an embodiment four slotted rectangular
sense electrodes 602A-602D may be provided on a substrate to
perform capacitive sensing for an inertial sensor. Substrate 600
may be a suitable substrate, such as a CMOS substrate as described
herein. An electrode shield 601 may be formed on the substrate 600.
The electrode shield 601 may shield the slotted sense electrodes
from other components system (e.g., other than the measured proof
mass), which may improve the accuracy of the capacitive
measurements performed by the slotted sense electrodes 602A-602D.
Non-conductive gaps may be provided between the electrode shield
601 and the slotted sense electrodes 602A-602D, such that each
slotted sense electrode 602A-602D provides an isolated and
continuous conductive pad for capacitive interaction with its
associated proof mass or proof mass portion.
[0079] Although slotted sense electrodes may be configured in a
variety of manners, in an embodiment of FIG. 6A, the slotted sense
electrodes may have a plurality of parallel slots that form a
continuous "snaking" pattern that maintains a continuous conductive
path for the slotted sense electrodes 602A-602D. A variety of
parameters for the slotted sense electrodes may be modified based
on desired design factors, such as to optimize the operational
surface area of the sense electrode while limiting the impact of
environmental conditions on the operation of the sense electrode.
Exemplary factors that may be modified include number of slots,
slot width, slot depth (e.g., with recessed slots as described
herein), slot shapes, etc. In some embodiments, these design
factors may be optimized for particular electrode materials and/or
different expected environment conditions, for example, based on
different expected material structures and expected cracking
patterns. In some embodiments, it may be desirable to configure a
slotted structure so that it provides relief for the material to
expand in-plane which limits the undesirable out-of-plane change
caused from cracking. In some embodiments, different sense
electrodes within a single device may have different patterns based
on different electrode shapes, sizes, and materials for a
particular application.
[0080] FIG. 6B shows an exemplary one of the slotted sense
electrodes of FIG. 6A in accordance with some embodiments of the
present disclosure. Sense electrode 602A is a slotted rectangular
sense electrode, and is surrounded by electrode shield 601 with an
intervening non-conductive gap. In the embodiments of FIGS. 6A-6B,
the components of the MEMS sensor (e.g., electrode shield 601 and
slotted sense electrodes 602A-602D) may not have been exposed to
environmental conditions that result in changes to the materials of
those components. Thus, the components may be substantially in a
form that is similar to the manner in which they were deposited,
with generally smooth exposed surfaces (e.g., of the sense
electrode 602A-602D facing the proof masses).
[0081] FIG. 6C depicts the exemplary slotted sense electrodes and
electrode shield of FIG. 6A after extended exposure to
environmental conditions. Over time, exposure to environmental
conditions such as temperature extremes or sudden changes in
temperature may impact the physical structure of the constituent
materials of the electrode shield 601 and slotted sense electrodes
602A-D, resulting in formation of cracking patterns, including at
the surface of the electrode shield 601 and sense electrodes
602A-602D. In the exemplary embodiment of FIGS. 6A-6E, the
electrode shield 601 and sense electrodes 602A-602D may not crack
uniformly, such that the cracking pattern of the electrode shield
601 is significantly denser than the cracking pattern experienced
by the sense electrodes 602A-602D. As described herein, the slots
may be designed such that the cracking pattern is less likely to
form complete structures (e.g., based on crystalline structures
formed by the electrode materials), preventing additional cracking
and lessening the impact of the cracking on the sensitivity of the
capacitor that is formed by the respective slotted sense
electrodes. This pattern of reduced cracking in the slotted regions
is depicted in more detail for an exemplary sense electrode 602A in
FIG. 6D, and with additional detail of the sense electrode 602A
depicted in FIG. 6E.
[0082] The cracking pattern that forms on the sense electrodes
602A-602D may result in surface effects that modify the electrical
characteristics, and thus, the resulting capacitive signals, that
are sensed based on the capacitors of the sense electrodes
602A-602D and their respective proof masses. However, because the
slotting reduces the degree of cracking within the sense electrode
regions, changes to the sensitivity of the capacitor are also
reduced. The changes to the sensitivity may be less than a
threshold sensitivity difference, or a useful life of the sensor
may thus be extended. In some embodiments, parameters of the MEMS
sensor may be measured such that predicted changes in sensor
sensitivity may be estimated and compensation may be performed.
[0083] FIGS. 7A-7E depict a variety of slotted sense electrode
patterns in accordance with the present disclosure. The patterns
depicted herein are exemplary only, and it will be understood that
any of the electrode patterns depicted herein may be combined or
modified in an appropriate manner, and that additional patterns may
be utilized in accordance with the present disclosure. In
embodiments, parameters for patterns such as slot width, slot
density, slot depth, and slot orientation may be modified in order
to meet desired characteristics related to electrical function
(e.g., capacitive sensing) and resistance to cracking or other
environmental effects. In some embodiments, factors such as typical
crack shape and size (e.g., for particular constituent materials of
the sense electrode) and electrode coverage (e.g., to maintain a
desired amount of electrode materials or surface area, such as
between at least 20% or less of non-slotted material and/or surface
area) may be utilized to set the parameters.
[0084] FIG. 7A depicts an exemplary "T-slot" sense electrode
slotting pattern 700 in accordance with some embodiments of the
present disclosure. The exemplary T-slot pattern may include a
plurality of slots running in a direction (e.g., length-wise,
width-wise, angled, or in other directions) in a pattern (e.g.,
parallel, as depicted in FIG. 7A). A plurality of slot stubs may
extend from each of the slots, forming a T-slot pattern that may
provide additional slotted for interfacing with a cracking pattern,
and thus, reducing the overall density of the cracking pattern and
formation of crystalline deformations within the sense
electrode.
[0085] FIG. 7B depicts an exemplary "Y-slot" sense electrode
slotting pattern 701 in accordance with some embodiments of the
present disclosure. For some material combinations of a sense
electrode, likely crystalline patterns and sizes may be known. In
some embodiments, it may be desirable to design slot structures
that accommodate a known cracking pattern, and thus, reduce the
overall density of the cracking pattern and formation of
crystalline deformations within the sense electrode. A Y-slot
slotting pattern may provide a series of interconnected 120.degree.
angles that approximate a likely cracking pattern, thus limiting
the degree of material cracking that is included within the
electrode material of the sense electrode.
[0086] As described herein, a variety of slotting shapes may be
implemented in accordance with the present disclosure, and multiple
slotting shapes may be combined as desired. FIG. 7C depicts an
exemplary "spiral-slot" sense electrode slotting pattern 702 in
accordance with some embodiments of the present disclosure. A
spiral slot 704 begins from the center of the sense electrode, and
in an embodiment, extends therefrom with a uniform distance between
slots while maintaining electrical conductivity. In an exemplary
rectangular electrode as depicted in FIG. 7C, an additional set of
linear peripheral slots 705 may extend from the outer surface of
the electrode to provide additional electrode slotting. However, it
will be understood that additional electrode slot may not be
utilized in other spiral-slotting embodiments.
[0087] FIG. 7D depicts an exemplary top and side view of a
"recessed-slot" sense electrode slotting pattern 706 in accordance
with some embodiments of the present disclosure. Rather than
providing through-slots in which all of the sense electrode
material is removed through to the surface of the substrate, a set
of slots 708 may be recessed such that they still include electrode
material but are below the upper surface of the sense electrode
707. In this manner, electrical conductivity may be maintained
throughout the sense electrode, which may permit a variety of
suitable patterns to be implemented on the surface of the sense
electrode (e.g., parallel, Y-slot, T-slot, spiral, combinations
thereof, other complex patterns, etc.). Recessed slotting may also
facilitate additional surface slotting while maintaining a desired
amount of electrode material. Slot recessing may be provided at a
variety of suitable depths, such as 5%, 20%, 50%, or 80% of overall
sense electrode depth.
[0088] FIG. 7E depicts an exemplary top and side view of a
"connected-slot" sense electrode slotting pattern 709 in accordance
with some embodiments of the present disclosure. A connected slot
pattern may provide connecting portions 712 between spanning
through-slots 711 between portions of the sense electrode 710. In
this manner, electrical conductivity may be maintained throughout
the sense electrode, which may permit a variety of suitable
through-slot patterns to be implemented on the surface of the sense
electrode (e.g., parallel, Y-slot, T-slot, spiral, combinations
thereof, other complex patterns, etc.). In the exemplary embodiment
of FIG. 7E, the connecting portions 712 may be recessed with
respect to the top surface 711 of the sense electrode 709, although
other patterns (e.g., full thickness) may be employed in other
embodiments.
[0089] FIG. 8 depicts an exemplary layer of slotted sense
electrodes of an exemplary accelerometer 800 in accordance with
some embodiments of the present disclosure. In an embodiment, an
electrode shield 801 have similar or the same thickness and
material as each of electrodes 802A-802F. In the exemplary
embodiment of FIG. 8, each of the sense electrodes 802A-802F of the
accelerometer 800 may be associated with a respective proof mass
that moves out-of-plane towards or away from its associated sense
electrode 802A-802F to change a capacitance in response to rotation
about a sensed axis. Although in some embodiments, one or more of
the sense electrodes may have a different shape or pattern based on
the MEMS sensor design, in an embodiment each of the sense
electrodes of the MEMS sensor of FIG. 8 may have a similar shape
and may include a similar slotting pattern (e.g., a snaking
slotting pattern). In an embodiment, the design may be partially or
entirely symmetric, such that the electrode pattern is symmetric
about one or more lines that cross a center point of the sense
electrodes. In an exemplary embodiment of an entirely symmetric
design, the slotting pattern may be identical about any line that
crosses the center point of the sense electrodes.
[0090] FIGS. 9-10 depict exemplary steps for designing and
implementing a slotted sense electrode structure in accordance with
some embodiments of the present disclosure. Although FIGS. 9-10 are
described in the context of the slotted sense electrodes present
disclosure, it will be understood that the designs, components,
configurations, methods, and steps described herein and in FIGS.
9-10 may be applied to any suitable components of a MEMS sensors,
including other electrode types (e.g., drive electrodes) or
non-electrode components of the MEMS sensors. Although a particular
order and flow of steps is depicted in FIGS. 9-10, it will be
understood that in some embodiments one or more of the steps may be
modified, moved, removed, or added, and that the flow depicted in
FIGS. 9-10 may be modified.
[0091] FIG. 9 depicts exemplary steps for a method of designing a
slotted electrode pattern in accordance with some embodiments of
the present disclosure. Processing may begin with an exemplary
sensor design, such as for an inertial design. The design may
include components such as a spring-mass system in a MEMS device
plane having one or more proof masses that move relative to an
underlying substrate (e.g., out-of-plane sensing) or within the
MEMS device plane (e.g., in-plane sensing) in response to a
particular inertial force to be measured by the sensor (e.g.,
linear acceleration, angular velocity, or magnetic field).
[0092] At step 902, the available capacitive area for the sense
electrode may be determined. This available capacitive area may be
based on a portion of the sense electrode that is located relative
(e.g., parallel) to an adjacent section of the proof mass that
responds to the measured sensor movement, as well as the manner in
which the proof mass moves relative to the sense electrode (e.g.,
normal to a surface of the sense electrode, at an angle due to
levered movement, etc.). In some embodiments (e.g., in response to
levered motion in which proof mass becomes situated at an angle
relative to the surface of the sense electrode) an effective
capacitive area may be determined, e.g., based on certain portions
of the sense electrode having more capacitive interaction with the
poof mass. Once the available capacitive area is determined,
processing may continue to step 904.
[0093] At step 904, the available sense electrode materials, analog
circuitry, and/or digital circuitry may be analyzed to determine
the types of processing, amplification, filtering, and scaling that
may be performed on a capacitive signal that is output from a sense
electrode and/or proof mass. For example, particular processing
circuitry may accommodate a particular range of capacitances that
can be processed with an acceptable accuracy for a particular
application, which may impact a portion of the sense electrode that
may be used for slotting while maintaining appropriate capacitive
resolution. Different sense electrode materials may also provide
for different sense electrode sensitivity. For example, in an
embodiment a range of acceptable material removal may be
determined, which in some embodiments may be in the single or low
double digits, such as at least 4% to provide adequate slotting,
less than 33% to provide adequate capacitive sensing, and in one
embodiment, a range of 8%-20%.
[0094] At step 906, a slot pattern may be selected based on the
information determined from steps 902 and 904, and in some
embodiments, different information such as available slot designs.
For example, selection of a slot pattern may be dependent on
factors such as the shape of the available capacitive area from
step 902, constituent materials and cracking patterns from step
904, processing resolution from step 904, and available slotting
area from step 904. Once an appropriate slot pattern is selected,
processing may continue to step 908.
[0095] At step 908, slot parameters may be selected. Slot
parameters may include parameters such as slot density, slot width,
and slot depth. In an embodiment, these parameters may be optimized
to limit the formation of complete crystalline cracking pattern
while providing a suitable capacitive sensing area for the
particular application, sensor configuration and circuitry. Once
the slot parameters are selected, processing may continue to step
908.
[0096] At step 910, an initial slotting design may be analyzed to
determine an initial sensitivity. Such analysis may be performed in
whole or in part based on simulations, or in some embodiments,
prototype components may be fabricated for analysis. The sensor
response may be analyzed over an expected range of sensed motion
such as inertial motion, e.g., to verify that the sense electrode
design accommodates a full range of measured signals with
sufficient precision, and to store scaling and trimming factors for
use during operation. Processing may then continue to step 912.
[0097] At step 912, an environmental response may be determined.
Such analysis may be performed in whole or in part based on
simulations, or in some embodiments, prototype components may be
fabricated and lifetime testing may be performed to measure impacts
of environmental conditions on the sensor. In embodiments,
performance may be measured for known inertial forces at different
stages in lifetime testing, in order to determine how the response
of particular sense electrode designs changes over time in
different environmental conditions. In some embodiments, this
information may be used to adjust the operation of the sensor over
time, or in response to particular measured environmental
conditions for the sensor. In other embodiments, it may be
determined that a particular sense electrode design does not
provide acceptable performance in particular environmental
conditions or over a required length of life cycle. After the
environmental response is determined, processing may continue to
step 914.
[0098] At step 914, it may be determined whether to modify the
sense electrode design, for example, because the measured lifecycle
testing did not provide acceptable results or in order to further
improve a design. If the sense electrode design is to be modified,
processing may continue to step 906. If the sense electrode design
is not to be modified, values such as scaling values and
compensation values may be saved for use during sensor operation.
The processing of FIG. 9 may then end.
[0099] FIG. 10 depicts exemplary steps for a method of providing
compensation to a MEMS sensor over a lifetime of exposure to an
operating environment in accordance with some embodiments of the
present disclosure. As described herein, a sense electrode design
may improve the response of the sense to environmental conditions.
In some embodiments, a design may also provide predictability as to
how the sense characteristics will change over time (e.g., based on
testing performed in FIG. 9, and as described herein).
[0100] At step 1002, an environmental response may be determined.
In an embodiment, an environmental response may be determined
during design and/or manufacturing (e.g., as described with respect
to FIG. 9). In other embodiments, an environmental response may be
determined in the field during operation. For example, in an
embodiment one or more drive test electrodes may apply a known
force to cause a proof mass or other mass (e.g., a test mass) to
move in a known manner relative to a sense electrode or a sense
test electrode (e.g., an electrode portion having the same pattern
as the sense electrode, for example, located opposite test mass).
Based on changes in the response to the known motion, an
operational environmental response may be determined. Processing
may then continue to step 1004.
[0101] At step 1004, the environmental response may be stored in
memory, or in some embodiments, provided as modifications to
register values or other circuitry. In some embodiments, data
representing the environmental response may be stored along with
information relating to the sensor circuitry, such as modifications
to the operation of the sensor (e.g., drive forces, scaling
factors, amplification, filtering, etc.) that may be used to
compensate for changes in the environmental response. Processing
may then continue to step 1004.
[0102] At step 1006, a response pattern for the sensor may be
identified, such that an update to the operation of the sensor may
be provided. A response pattern may be based on suitable
operational data such as time in service, actual sensor run time,
measured responses (e.g., based on test masses and/or electrodes),
or other measurements of actual environmental conditions (e.g.,
temperature, rate of change of temperature, etc.), and a variety of
combinations thereof In some embodiments, the response pattern data
may be used to directly determine a condition of a sense electrode,
or in other embodiments, a likely condition may be determined based
on a look-up of relevant information or calculations based on
expected responses to measured response pattern data. Processing
may then continue to step 1008.
[0103] At step 1008, the operation of the sensor may be modified to
compensate for the environmental conditions. In an embodiment,
calculations of a sensed value (e.g., for linear acceleration,
angular velocity, or magnetic field) may be modified by changing
the manner in which the value is calculated from a sensed
capacitance, e.g., by modifying amplifier gains, filter parameters,
scaling factors, or other analog or digital operating parameters.
In this manner, the operation of the sensor may be compensated to
allow for accurate calculations in spite of environmental
conditions, based at least in part in the improved response to due
to the improved environmental response as a result of the slotted
sense electrode design. Once compensation has been performed, the
processing of FIG. 10 may end.
[0104] The foregoing description includes exemplary embodiments in
accordance with the present disclosure. These examples are provided
for purposes of illustration only, and not for purposes of
limitation. It will be understood that the present disclosure may
be implemented in forms different from those explicitly described
and depicted herein and that various modifications, optimizations,
and variations may be implemented by a person of ordinary skill in
the present art, consistent with the following claims.
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