U.S. patent application number 17/580772 was filed with the patent office on 2022-05-05 for wireless sensor device.
The applicant listed for this patent is Semiconductor Energy Laboratory Co., Ltd.. Invention is credited to Jun KOYAMA.
Application Number | 20220133150 17/580772 |
Document ID | / |
Family ID | |
Filed Date | 2022-05-05 |
United States Patent
Application |
20220133150 |
Kind Code |
A1 |
KOYAMA; Jun |
May 5, 2022 |
WIRELESS SENSOR DEVICE
Abstract
A wireless sensor device capable of constant operation without
replacement of batteries. The wireless sensor device is equipped
with a rechargeable battery and the battery is recharged
wirelessly. Radio waves received at an antenna circuit are
converted into electrical energy and stored in the battery. A
sensor circuit operates with the electrical energy stored in the
battery, and acquires information. Then, a signal containing the
information acquired is converted into radio waves at the antenna
circuit, whereby the information can be read out wirelessly.
Inventors: |
KOYAMA; Jun; (Sagamihara,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Semiconductor Energy Laboratory Co., Ltd. |
Atsugi-shi |
|
JP |
|
|
Appl. No.: |
17/580772 |
Filed: |
January 21, 2022 |
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Application
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17177240 |
Feb 17, 2021 |
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17580772 |
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16796077 |
Feb 20, 2020 |
11006832 |
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16207785 |
Dec 3, 2018 |
10587297 |
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15251356 |
Aug 30, 2016 |
10148301 |
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16207785 |
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13962307 |
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9485883 |
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15251356 |
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Jul 26, 2012 |
8508360 |
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13962307 |
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May 31, 2011 |
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Sep 25, 2007 |
7965180 |
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13118872 |
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International
Class: |
A61B 5/00 20060101
A61B005/00; H05K 1/11 20060101 H05K001/11; A61B 5/07 20060101
A61B005/07; G16H 40/67 20060101 G16H040/67; H05K 7/00 20060101
H05K007/00; H01L 23/60 20060101 H01L023/60; H01L 23/66 20060101
H01L023/66; H01L 27/13 20060101 H01L027/13; H04B 1/16 20060101
H04B001/16; H04B 13/00 20060101 H04B013/00; G16H 40/63 20060101
G16H040/63 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 28, 2006 |
JP |
2006-263752 |
Claims
1. (canceled)
2. A device comprising: a positive electrode; and a negative
electrode, wherein activated carbon is provided on a surface of the
positive electrode and the negative electrode.
3. A device comprising: a positive electrode; and a negative
electrode, wherein each of the positive electrode and the negative
electrode comprises carbon.
4. A device comprising: a positive electrode; and a negative
electrode, wherein activated carbon is provided on a surface of the
positive electrode and the negative electrode, and wherein
polarized ions are provided on a surface of the activated
carbon.
5. The device according to claim 2, wherein the positive electrode
and the negative electrode function as capacitors.
6. The device according to claim 3, wherein the positive electrode
and the negative electrode function as capacitors.
7. The device according to claim 4, wherein the polarized ions of
one of the positive electrode and the negative electrode function
as a capacitor.
8. The device according to claim 4, wherein the polarized ions of
one of the positive electrode and the negative electrode function
as an electric double layer.
9. The device according to claim 5, wherein a capacitance of the
capacitors are 0.1 F or more.
10. The device according to claim 6, wherein a capacitance of the
capacitors are 0.1 F or more.
11. The device according to claim 7, wherein a capacitance of the
capacitor is 0.1 F or more.
12. The device according to claim 9, wherein a size of the
capacitors is about a coin.
13. The device according to claim 10, wherein a size of the
capacitors is about a coin.
14. The device according to claim 11, wherein a size of the
capacitor is about a coin.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
[0001] The present invention relates to a wireless sensor device
having a so-called sensing function, which is capable of reading
out information without contact, e.g., by radio communication. In
particular, the invention relates to a wireless sensor device which
is used while being implanted in, swallowed by, or attached to the
living body.
2. Description of the Related Art
[0002] Nowadays, an increasing number of information is being
processed with the development of IT technology. Among them is the
information management for human health. For example, health
checkups are regularly conducted at companies, schools, and the
like; individuals are informed of their heath conditions at least
once or twice a year. When the condition of one's health is not
good, he/she will be noticed of the fact and receives treatment at
a hospital.
[0003] Also, simple health measurement instruments for domestic use
have been developed for easy checkups of one's health conditions.
In recent years, portable measurement instruments have also become
widespread, contributing to early detection of diseases.
[0004] Reference 1 (Japanese Published Patent Application No.
2004-121632) is one of the examples of the heath measurement
instrument.
[0005] Reference 1 discloses a portable blood-pressure measurement
instrument. Using such a measurement instrument, one can easily
know his/her health condition.
[0006] However, the conventional health measurement instrument
disclosed in Reference 1 has the following problems: even though
the size of the health measurement instrument is reduced to some
extent, it is still large for being carried around. Moreover, even
when a user acquires information with the measurement instrument,
he/she may be unconscious of a change in physical condition because
the information cannot be immediately seen by a medical specialist.
This could result in a progression of disease,
[0007] In view of the foregoing, a semiconductor device having a
function of wirelessly acquiring physical information has been
devised, for example by attaching a sensor device having a radio
function to a human body. A specific example thereof is disclosed
in Reference 2 (Japanese Published Patent Application No.
2006-99757). In this example, physical information in particular
can be acquired with a dedicated wireless reader device without the
help of medical institutions and the like.
SUMMARY OF THE INVENTION
[0008] However, the wireless sensor device disclosed in Reference 2
is a passive type and operates only when there is a wireless signal
supply from outside. Thus, the wireless sensor device cannot
operate when there is no wireless signal supply from outside.
Therefore, this device is not effective in constantly acquiring
physical information.
[0009] Meanwhile, the above-described problems can be solved by
forming the wireless sensor device to be an active device and
building a battery into the device. However, when the wireless
sensor device is implanted in or swallowed by the body, the battery
cannot be replaced easily. Furthermore, there is another problem in
that the wireless sensor device becomes inactive when the battery
runs out of charge.
[0010] In view of the foregoing problems, it is an object of the
invention to provide a wireless sensor device capable of constant
operation without replacement of batteries.
[0011] According to the invention, a wireless sensor device is
equipped with a rechargeable battery and the battery is recharged
wirelessly. Specifically, the wireless sensor device of the
invention includes an antenna circuit for transmission and
reception of radio waves, a battery for storing electrical energy
obtained from the radio waves, and a sensor circuit for acquiring
(sensing) information.
[0012] Radio waves received at the antenna circuit are converted
into electrical energy, and the electrical energy is stored in the
battery. The sensor circuit operates with the electrical energy
stored in the battery, and acquires information. Then, a signal
containing the information acquired is converted into radio waves
at the antenna circuit, whereby the information can be read out
wirelessly.
[0013] Note that a memory circuit may be used to temporarily store
the information acquired. In that case, by converting the
information stored in the memory circuit into radio waves at the
antenna circuit, the information can be read out wirelessly.
[0014] In the case of using the wireless sensor device of the
invention in the living body, radio waves transmitted from outside
of the body are converted into electrical energy at the antenna
circuit so that the electrical energy is stored in the battery. The
sensor circuit operates with the electrical energy stored in the
battery, and acquires physical information. Physical information
means information that can serve as an indicator of the health
condition of the living body. Typical examples of physical
information include blood pressure, heart rate, body temperature,
respiration rate, the amount of gas in the blood, the value of
action current such as an electrocardiogram or an
electroencephalogram, blood glucose level, an internal image of the
body, and the like.
[0015] It is acceptable as long as a sensor used for the sensor
circuit is selected in accordance with the physical information to
be acquired. Further, by providing a plurality of sensor circuits
in a wireless sensor device, a plurality of kinds of physical
information can be acquired.
[0016] The physical information acquired is stored in the memory
circuit. Then, by converting the physical information stored in the
memory circuit into radio waves at the antenna circuit, the
physical information can be read out wirelessly.
[0017] The wireless sensor device of the invention can be used not
only for acquisition of physical information of the living body,
but also for constant acquisition of information in areas where it
is difficult to acquire information by contact.
[0018] As described above, according to the invention, a wireless
sensor device can be supplied with electrical energy without
contact. Therefore, replacement of batteries is not necessary.
[0019] In the case of using the wireless sensor device in the
living body, the battery can be recharged without contact, without
hurting the living body, while the wireless sensor device is being
placed in the living body. By using electricity stored in the
battery, the wireless sensor device of the invention can constantly
acquire physical information.
[0020] Physical information acquired by the wireless sensor device
can be transmitted wirelessly. Therefore, the physical information
can be managed with IT technology to be utilized for early
detection or treatment of diseases and the like.
[0021] The wireless sensor device of the invention can be widely
used as a device that can constantly acquire information not only
in the living body but also in areas where it is difficult to
acquire information by contact. For example, the wireless sensor
device can be utilized for sensing in areas where access of humans
is limited such as a radiation controlled area.
BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In the accompanying drawings:
[0023] FIG. 1 is a block diagram illustrating the configuration of
a wireless sensor device of the invention;
[0024] FIG. 2 illustrates application of the invention to a human
body;
[0025] FIGS. 3A and 3B are block diagrams illustrating the
configurations of an antenna circuit and a rectifier circuit,
respectively, of a wireless sensor device of the invention;
[0026] FIG. 4 is a block diagram illustrating the configuration of
a wireless sensor device of the invention;
[0027] FIG. 5 is a block diagram illustrating the configuration of
a wireless sensor device of the invention;
[0028] FIG. 6 is a cross-sectional view of a wireless sensor device
of the invention;
[0029] FIG. 7 is a cross-sectional view of a wireless sensor device
of the invention;
[0030] FIG. 8 is a cross-sectional view of a wireless sensor device
of the invention;
[0031] FIG. 9 is a top view of a substrate of a wireless sensor
device of the invention;
[0032] FIGS. 10A and 10B illustrate an electric double layer
capacitor;
[0033] FIGS. 11A and 11B illustrate an electric double layer
capacitor;
[0034] FIG. 12 is a cross-sectional view of a thin-film secondary
battery;
[0035] FIGS. 13A and 13B illustrate an embodiment of a
photosensor;
[0036] FIG. 14 illustrates an embodiment of a pressure sensor;
[0037] FIGS. 15A to 15D illustrate a method of fabricating a
wireless sensor device of the invention;
[0038] FIGS. 16A to 16C illustrate a method of fabricating a
wireless sensor device of the invention;
[0039] FIGS. 17A and 17B illustrate a method of fabricating a
wireless sensor device of the invention;
[0040] FIGS. 18A and 18B illustrate a method of fabricating a
wireless sensor device of the invention;
[0041] FIG. 19 illustrates a method of fabricating a wireless
sensor device of the invention;
[0042] FIGS. 20A to 20C illustrate a method of fabricating a
wireless sensor device of the invention;
[0043] FIGS. 21A to 21C illustrate a method of fabricating a
wireless sensor device of the invention;
[0044] FIGS. 22A and 22B illustrate a method of fabricating a
wireless sensor device of the invention; and
[0045] FIG. 23 illustrates the configuration of a wireless sensor
device of the invention.
DETAILED DESCRIPTION OF THE INVENTION
[0046] Embodiment modes and embodiments of the invention will be
hereinafter described with reference to the accompanying drawings.
Note that the invention can be implemented in various different
ways and it will be easily understood by those skilled in the art
that various changes and modifications can be made in the invention
without departing from the spirit and scope thereof. Therefore, the
invention should not be construed as being limited to the
description in the following embodiment modes and embodiments. In
the accompanying drawings, like portions or portions having like
functions are denoted by like reference numerals, and repetitive
description thereof will be omitted.
(Embodiment Mode 1)
[0047] Embodiment Mode 1 of the invention is shown in FIG. 1. FIG.
1 illustrates a block diagram of the invention. A wireless sensor
device 100 includes an antenna circuit 101, an oscillation circuit
102, a modulation circuit 103, a demodulation circuit 104, a logic
circuit 105, an AD converter circuit 106, a sensor circuit 107, a
memory circuit 108, a rectifier circuit 109, a charging circuit
110, a battery 111, and a stabilizing power supply circuit 112.
[0048] In the case of performing communication with a magnetic
field, the antenna circuit 101 includes, as shown in FIG. 3A, a
coiled antenna 301 and a tuning capacitor 302. The rectifier
circuit 109 includes, as shown in FIG. 3B, a diode 303, a diode
304, and a smoothing capacitor 305. However, the configurations of
the antenna circuit 101 and the rectifier circuit 109 are not
limited to them. hi the case of performing communication with not a
magnetic field but an electric field, the antenna does not need to
be in a coiled form.
[0049] The operation of the wireless sensor device 100 in this
embodiment mode will now be described. An AC signal received at the
antenna circuit 101 is half-wave rectified by the diodes 303 and
304, and then smoothed by the smoothing capacitor 305. By this
smoothed voltage, the charging circuit 110 is activated to charge
the battery 111. As the battery 111, for example, a secondary
battery, a high-capacity capacitor, or the like can be used.
[0050] An output voltage of the battery 111 is stabilized by the
stabilizing power supply circuit 112, and the stabilized voltage is
supplied to the oscillation circuit 102, the modulation circuit
103, the demodulation circuit 104, the logic circuit 105, the AD
converter circuit 106, the sensor circuit 107, and the memory
circuit 108.
[0051] Signals communicated with an external device are transmitted
through carrier modulation. Therefore, the wireless sensor device
of the invention should demodulate the modulated signals. Examples
of the carrier frequency include, but not limited to, 125 kHz,
13.56 MHz, 950 MHz, and the like. In addition, examples of a
modulation method include, but not limited to, amplitude
modulation, frequency modulation, phase modulation, and the
like.
[0052] Upon input of an external radio wave, which is a signal
requesting to activate the sensor circuit 107, to the antenna
circuit 101, the signal is demodulated by the demodulation circuit
104. The demodulated signal is processed by the logic circuit 105.
When the input signal is an encoded signal, it is decoded in the
logic circuit 105. For example, when the signal from the external
transmitter has been encoded with modified Miller codes, NRZ-L
codes, or the like, the encoded signal is decoded in the logic
circuit 105. The decoded data is transmitted to the AD converter
circuit 106 and the sensor circuit 107, whereby the AD converter
circuit 106 and the sensor circuit 107 are activated.
[0053] With the activated sensor circuit 107, the wireless sensor
device 100 can detect external information. External information
herein includes, but not limited to, pressure, light, odor, sound,
and the like. The sensor circuit 107 has a function of converting
such external information into an electrical signal. The output of
the sensor circuit 107 is converted into a digital signal by the AD
converter circuit 106. The output signal of the AD converter
circuit 106 is processed by the logic circuit 105. For example, the
signal is encoded by the logic circuit 105 when necessary. The
output of the logic circuit 105 is modulated by the modulation
circuit 103 and then input to the antenna circuit 101. The
modulation circuit 103 performs modulation by mixing the output of
the oscillation circuit 102 and the output of the logic circuit
105. The signal input to the antenna circuit 101 is radiated as
radio waves.
[0054] As the sensor circuit 107, for example, a pressure sensor, a
photosensor, an odor sensor, a sound sensor, and the like can be
used, but the invention is not limited to these. The memory circuit
108 is used for storing information that has been sensed, and is
preferably nonvolatile memory, but the invention is not limited to
this. Even when the memory circuit 108 is volatile memory, it can
function in the same way as nonvolatile memory as long it can
secure a power supply. The memory circuit 108 can be, for example,
SRAM, DRAM, flash memory, EEPROM, FeRAM, or the like.
[0055] A physical information acquisition system that uses the
wireless sensor device of the invention will be briefly described
with reference to FIG. 2. FIG. 2 is a schematic view of a physical
information acquisition system that obtains physical information of
humans without contact. The wireless sensor device 100 is placed
inside the living body. Specifically, the wireless sensor device
100 may be either implanted in the living body or swallowed by the
living body so as to be placed in a digestive organ. The battery
included in the wireless sensor device of the invention can, even
when placed inside the living body, store electrical energy without
contact with the use of radio waves.
[0056] Note that the wireless sensor device of the invention may be
configured such that the battery is charged not only in sensing
operation but constantly, i.e., even when sensing operation is not
conducted. With such a configuration, power that will be consumed
for one sensing operation can be surely secured by the battery even
under the condition of weak radio waves.
[0057] The use of the wireless sensor device of the invention is
not limited to the use inside the living body. That is, the
wireless sensor device of the invention can also be used while
being attached to the surface of the living body.
[0058] Radio waves are transmitted from an interrogator 200 to the
wireless sensor device 100. Upon reception of the radio waves, the
wireless sensor device 100 sends physical information, which has
been acquired by the sensor circuit 107 included in the wireless
sensor device 100, back to the interrogator 200. The interrogator
200 is connected to an information system (not shown) which
analyzes the physical information acquired. In this manner,
physical information of humans can be acquired without carrying a
bulky measurement instrument. Further, since information can be
analyzed automatically, it is possible to prevent progression of
disease, which would otherwise be caused by delay of
notification.
(Embodiment Mode 2)
[0059] Embodiment Mode 2 of the invention is shown in FIG. 4. FIG.
4 illustrates a block diagram of the invention. A wireless sensor
device 400 includes antenna circuits 401 and 402, the oscillation
circuit 102, the modulation circuit 103, the demodulation circuit
104, the logic circuit 105, the AD converter circuit 106, the
sensor circuit 107, the memory circuit 108, the rectifier circuit
109, the charging circuit 110, the battery 111, and the stabilizing
power supply circuit 112.
[0060] In this embodiment mode, the antenna circuit 401 for
reception of power and the antenna circuit 402 for reception of
signals are provided, unlike Embodiment Mode 1. When a plurality of
antenna circuits having different functions are selectively used in
this manner, power transmission and signal transmission can be
conducted by using different radio frequencies. For example, power
transmission can be conducted with radio waves having a frequency
of 13.56 MHz by utilizing a magnetic field, while signal
transmission can be conducted with radio waves having a frequency
of 950 MHz by utilizing an electric field. By selectively using a
magnetic field and an electric field in accordance with the
frequency, power can be transmitted only a short distance, while
signal can be transmitted both short and long distances. If power
transmission is conducted with a radio frequency of 950 MHz, there
is a possibility that high power is transmitted to a far place,
which could cause interference with signal reception of other
wireless devices. Therefore, when the distance of power
transmission can be short, it is preferable to lower the frequency
and use a magnetic field.
[0061] The operation of the wireless sensor device 400 in this
embodiment mode will now be described. An AC signal received at the
antenna circuit 401 is half-wave rectified by the diodes 303 and
304 shown in FIG. 3B, and then smoothed by the smoothing capacitor
305. By this smoothed voltage, the charging circuit 110 is
activated to charge the battery 111. As the battery 111, for
example, a secondary battery, a high-capacity capacitor, or the
like can be used.
[0062] An output voltage of the battery 111 is stabilized by the
stabilizing power supply circuit 112, and the stabilized voltage is
supplied to the oscillation circuit 102, the modulation circuit
103, the demodulation circuit 104, the logic circuit 105, the AD
converter circuit 106, the sensor circuit 107, and the memory
circuit 108.
[0063] Signals communicated with an external device are transmitted
through carrier modulation. Therefore, the wireless sensor device
of the invention should demodulate the modulated signal. Examples
of the carrier frequency include, but not limited to, 125 kHz,
13.56 MHz, 950 MHz, and the like. In addition, examples of a
modulation method include, but not limited to, amplitude
modulation, frequency modulation, phase modulation, and the
like.
[0064] A signal input to the antenna circuit 402 is demodulated in
the demodulation circuit 104. The demodulated signal is processed
in the logic circuit 105. When the input signal is an encoded
signal, it is decoded in the logic circuit 105. For example, when
the signal from the external transmitter has been encoded with
modified Miller codes, NRZ-L codes, or the like, the encoded signal
is decoded in the logic circuit 105. The decoded data is
transmitted to the AD converter circuit 106 and the sensor circuit
107, whereby the AD converter circuit 106 and the sensor circuit
107 are activated.
[0065] With the activated sensor circuit 107, the wireless sensor
device 400 can detect external information. External information
herein includes, but not limited to, pressure, light, odor, sound,
and the like. The sensor circuit 107 has a function of converting
such external information into an electrical signal. The output of
the sensor circuit 107 is converted into a digital signal by the AD
converter circuit 106. The output signal of the AD converter
circuit 106 is processed by the logic circuit 105. For example, the
signal is encoded by the logic circuit 105 when necessary. The
output of the logic circuit 105 is modulated by the modulation
circuit 103 and then radiated as radio waves from the antenna
circuit 402. The modulation circuit 103 performs modulation by
mixing the output of the oscillation circuit 102 and the output of
the logic circuit 105.
[0066] As the sensor circuit 107, for example, a pressure sensor, a
photosensor, an odor sensor, a sound sensor, and the like can be
used, but the invention is not limited to these. The memory circuit
108 is used for storing information that has been sensed, and is
preferably nonvolatile memory, but the invention is not limited to
this. Even when the memory circuit 108 is volatile memory, it can
function in the same way as nonvolatile memory as long it can
secure a power supply. The memory circuit 108 can be, for example,
SRAM, DRAM, flash memory, EEPROM, FeRAM, or the like.
Embodiment Mode 3)
[0067] Embodiment Mode 3 of the invention is shown in FIG. 5. FIG.
5 illustrates a block diagram of the invention. A wireless sensor
device 500 includes the antenna circuit 101, the oscillation
circuit 102, the modulation circuit 103, the demodulation circuit
104, the logic circuit 105, the AD converter circuit 106, the
memory circuit 108, the rectifier circuit 109, the charging circuit
110, the battery 111, the stabilizing power supply circuit 112, a
CCD 501, and an LED 502.
[0068] In this embodiment mode, the wireless sensor device 500
includes the LED 502 and the CCD 501, so that light emitted from
the LED 502 illuminates inside of the body and the CCD 501 shoots
an image of the illuminated object. A light-emission source is not
limited to the LED and other types of light emitter such as an EL
element can also be used. In addition, the image pickup device is
not limited to the CCD, and a CMOS sensor or the like can also be
used, for example.
[0069] In the case of performing communication with a magnetic
field, the antenna circuit 101 includes, as shown in FIG. 3A, the
coiled antenna 301 and the tuning capacitor 302. The rectifier
circuit 109 includes, as shown in FIG. 3B, the diode 303, the diode
304, and the smoothing capacitor 305. However, the configurations
of the antenna circuit 101 and the rectifier circuit 109 are not
limited to them. In the case of performing communication with not a
magnetic field but an electric field, the antenna does not need to
be in a coiled form.
[0070] The operation of the wireless sensor device 500 in this
embodiment mode will now be described. An AC signal received at the
antenna circuit 101 is half-wave rectified by the diodes 303 and
304, and then smoothed by the smoothing capacitor 305. By this
smoothed voltage, the charging circuit 110 is activated to charge
the battery 111. As the battery 111, for example, a secondary
battery, a high-capacity capacitor, or the like can be used.
[0071] An output voltage of the battery 111 is stabilized by the
stabilizing power supply circuit 112, and the stabilized voltage is
supplied to the oscillation circuit 102, the modulation circuit
103, the demodulation circuit 104, the logic circuit 105, the AD
converter circuit 106, the memory circuit 108, the CCD 501, and the
LED 502.
[0072] Signals communicated with an external device are transmitted
through carrier modulation. Therefore, the wireless sensor device
of the invention should demodulate the modulated signal. Examples
of the carrier frequency include, but not limited to, 125 kHz,
13.56 MHz, 950 MHz, and the like. In addition, examples of a
modulation method include, but not limited to, amplitude
modulation, frequency modulation, phase modulation, and the
like.
[0073] A signal input to the antenna circuit 101 is demodulated in
the demodulation circuit 104. The demodulated signal is processed
in the logic circuit 105. When the input signal is an encoded
signal, it is decoded in the logic circuit 105. For example, when
the signal from the external transmitter has been encoded with
modified Miller codes, NRZ-L codes, or the like, the encoded signal
is decoded in the logic circuit 105. The decoded data is
transmitted to the AD converter circuit 106 and the CCD 501,
whereby the AD converter circuit 106 and the CCD 501 are
activated.
[0074] With the activated CCD 501, the wireless sensor device 500
can shoot an external image. While the CCD 501 is shooting an
image, the LED 502 is lighting. The output of the CCD 501 is
converted into a digital signal by the AD converter circuit 106.
The output signal of the AD converter circuit 106 is processed by
the logic circuit 105. For example, the signal is encoded by the
logic circuit 105 when necessary. The output of the logic circuit
105 is modulated by the modulation circuit 103 and output from the
antenna circuit 101. The modulation circuit 103 performs modulation
by mixing the output of the oscillation circuit 102 and the output
of the logic circuit 105. The memory circuit 108 is used for
storing information that has been sensed, and is preferably
nonvolatile memory, but the invention is not limited to this. Even
when the memory circuit 108 is volatile memory, it can function in
the same way as nonvolatile memory as long it can secure a power
supply. The memory circuit 108 can be, for example, SRAM, DRAM,
flash memory, EEPROM, FeRAM, or the like.
[0075] As described above, using the image pickup device such as a
CCD, the wireless sensor device of this embodiment mode can shoot
an internal image of the body. Thus, abnormality of inside of the
body can be detected at an early stage, which greatly contributes
to maintaining one's health.
[Embodiment 1]
[0076] Embodiment 1 of the invention is shown in FIG. 6. FIG. 6
illustrates a cross section of the wireless sensor device of the
invention. The wireless sensor device shown in FIG. 6 includes a
substrate 601, an antenna 602, a ferrite 603, a secondary battery
604, a flexible printed board 605, and a package 606. The substrate
601 has the above-described rectifier circuit, demodulation
circuit, logic circuit, modulation circuit, oscillator circuit, and
the like. The substrate is preferably a single-crystalline silicon
substrate, a glass substrate, a plastic substrate, or the like, but
the invention is not limited to this.
[0077] Although the antenna 602 is formed on the substrate 601, the
position of the antenna 602 is not limited to this; it is also
possible to provide another substrate for forming the antenna 602.
In addition, the ferrite 603 is not necessarily required. However,
in performing communication with a magnetic flux, using the ferrite
603 can improve the distribution of a magnetic flux and thus can
enhance sensitivity. Although a lithium-ion secondary button
battery or the like is suitable for the secondary battery 604, the
battery is not limited to the lithium-ion battery. Further, the
shape of the battery is not limited to the button, and it is also
possible to use a high-capacity capacitor such as an electric
double layer capacitor. The flexible printed board 605 electrically
connects the substrate 601 and the secondary battery 604.
[0078] The package 606 should be highly airtight on the assumption
that that the package 606 is to be implanted in the body. In
addition, the package 606 should be formed from a material having
no adverse effects on the living body. In the case of using a
secondary button battery, the package can be formed to a thickness
of about 1 cm; thus, it can be even swallowed by humans.
[0079] Such a highly airtight package cannot be opened frequently.
Therefore, when a primary battery which is non-rechargeable is
used, the sensor device becomes inactive once the battery has run
out. However, when a secondary battery which is wirelessly
rechargeable is used as in the invention, the sensor device can be
used without concern for the charged level of the battery. Further,
even when the sensor device is located inside the body, the battery
can be recharged from outside of the body.
[0080] Thus, using the wireless sensor device of the invention can
acquire physical information by radio communication.
[Embodiment 2]
[0081] Embodiment 2 of the invention is shown in FIG. 7. FIG. 7
illustrates a cross section of the wireless sensor device of the
invention. The wireless sensor device shown in FIG. 7 includes the
substrate 601, the antenna 602, the ferrite 603, the secondary
battery 604, the flexible printed board 605, the package 606, an
LED 607, a CCD 608, and a lens 609. The substrate 601 has the
above-described rectifier circuit, demodulation circuit, logic
circuit, modulation circuit, oscillator circuit, and the like. The
substrate is preferably a single-crystalline silicon substrate, a
glass substrate, a plastic substrate, or the like, but the
invention is not limited to this.
[0082] Although the antenna 602 is formed on the substrate 601, the
position of the antenna 602 is not limited to this; it is also
possible to provide another substrate for forming the antenna 602.
In addition, the ferrite 603 is not necessarily required. However,
in performing communication with a magnetic flux, using the ferrite
603 can improve the distribution of a magnetic flux and thus can
enhance sensitivity. Although a lithium-ion secondary button
battery is suitable for the secondary battery 604, the battery is
not limited to the lithium-ion battery. Further, the shape of the
battery is not limited to the button, and it is also possible to
use a high-capacity capacitor such as an electric double layer
capacitor. The flexible printed board 605 electrically connects the
substrate 601 to the secondary battery 604, the CCD 608, and the
LED 607.
[0083] In the wireless sensor device of this embodiment, the LED
607 is lit to illuminate inside of the body. Then, the CCD 608
shoots an image of the illuminated object through the lens 609. The
data shot is transmitted to the substrate 601 through the flexible
printed board 605, so that the data is processed and wirelessly
transmitted to outside of the body.
[0084] The package 606 should be highly airtight on the assumption
that the package 606 is to be implanted in the body. In addition, a
portion of the package 606 on the periphery of the LED 607 and the
lens 609 should be transparent to enable shooting. Further, the
package 606 should be formed from a material having no adverse
effects on the living body. In the case of using a secondary button
battery, the package can be formed to a thickness of about 1 cm;
thus, it can be even swallowed by humans.
[0085] Such a highly airtight package cannot be opened frequently.
Therefore, when a primary battery which is non-rechargeable is
used, the sensor device becomes inactive once the battery has run
out. However, when a secondary battery which is wirelessly
rechargeable is used as in the invention, the sensor device can be
used without concern for the charged level of the battery. Further,
even when the sensor device is located inside the body, the battery
can be recharged from outside of the body. This advantageous effect
can be multiplied particularly in the case of mounting a
high-power-consumption element such as an LED.
[0086] Thus, using the wireless sensor device of the invention can
read out physical information by radio communication.
[0087] This embodiment can be implemented in combination with any
of Embodiment Modes 1 to 3 and Embodiment 1.
[0088] [Embodiment 3]
[0089] Embodiment 3 of the invention is shown in FIG. 8. FIG. 8
illustrates a cross section of the wireless sensor device of the
invention. The wireless sensor device shown in FIG. 8 includes the
substrate 601, the antenna 602, the ferrite 603, a thin-film
secondary battery 801, the flexible printed board 605, and the
package 606. The substrate 601 has the above-described rectifier
circuit, demodulation circuit, logic circuit, modulation circuit,
oscillator circuit, and the like. The substrate is preferably a
single-crystalline silicon substrate, a glass substrate, a plastic
substrate, or the like, but the invention is not limited to
this.
[0090] Although the antenna 602 is formed on the substrate 601, the
position of the antenna 602 is not limited to this; it is also
possible to provide another substrate for forming the antenna 602.
In addition, the ferrite 603 is not necessarily required.
[0091] However, in performing communication with a magnetic flux,
using the ferrite 603 can improve the distribution of a magnetic
flux and thus can enhance sensitivity. A thin-film lithium-ion
secondary battery is used for the thin-film secondary battery 801.
When such a thin-film lithium-ion battery is used, the thickness of
the secondary battery can be made 1 mm or less. The flexible
printed board 605 electrically connects the substrate 601 and the
thin-film secondary battery 801. The wireless sensor device of this
embodiment can be formed to have a total thickness of 2 mm or less,
whereby it can be implanted even under the skin of a human
body.
[0092] The package 606 should be highly airtight on the assumption
that that the package 606 is to be implanted in the body. However,
such a highly airtight package cannot be opened frequently.
Therefore, when a primary battery which is non-rechargeable is
used, the sensor device becomes inactive once the battery has run
out. However, when a secondary battery which is wirelessly
rechargeable is used as in the invention, the sensor device can be
used without concern for the charged level of the battery. Further,
even when the sensor device is located inside the body, the battery
can be recharged from outside of the body.
[0093] Thus, using the wireless sensor device of the invention can
acquire physical information by radio communication.
[0094] This embodiment can be implemented in combination with any
of Embodiment Modes 1 to 3 and Embodiments 1 and 2.
[Embodiment 4]
[0095] Embodiment 4 of the invention is shown in FIG. 9. FIG. 9 is
a top view of a substrate provided with circuits. For the substrate
601, a single-crystalline silicon substrate, a glass substrate, a
plastic substrate, or the like can be used, but the invention is
not limited to this.
[0096] Circuits 901 to 906 represent circuits formed over the
substrate 601. The circuits 901 to 906 include, for example, the
oscillation circuit, the modulation circuit, the demodulation
circuit, the logic circuit, the AD converter circuit, the sensor
circuit, the memory circuit, the rectifier circuit, the charging
circuit or the stabilizing power supply circuit, and the like that
are shown in FIG. 1. The antenna 602 is formed over the circuits
901 to 906. The flexible printed board 605 for connection with a
battery such as a secondary battery or an electric double layer
capacitor is electrically connected to the circuits 901 to 906 over
the substrate 601.
[0097] This embodiment can be implemented in combination with any
of Embodiment Modes 1 to 3 and Embodiments 1 to 3.
[Embodiment 5]
[0098] Embodiment 5 of the invention is shown in FIG. 12. FIG. 12
illustrates a cross-sectional view of a thin-film secondary
battery. Hereinafter, description will be given of the thin-film
secondary battery used in Embodiment 3. Secondary batteries include
nickel-cadmium batteries, lithium-ion batteries, lead batteries,
and the like. Among them, lithium-ion batteries, which have no
memory effects and can discharge a large amount of current, have
been widely used.
[0099] In recent years, research has been conducted on fabrication
of thinner lithium-ion batteries. Among them, there has emerged a
lithium-ion battery having a thickness of one to several pm. Such a
thin-film secondary battery can be used as a flexible secondary
battery.
[0100] First, a current-collecting thin film 7102 to serve as an
electrode is formed over a substrate 7101. The current-collecting
thin film 7102 should have high adhesion to an upper negative
electrode active material layer 7103 and have low resistance.
Specifically, aluminum, copper, nickel, vanadium, or the like can
be used for the current-collecting thin film 7102.
[0101] Next, the negative electrode active material layer 7103 is
formed over the current-collecting thin film 7102. Generally,
vanadium oxide or the like is used for the negative electrode
active material layer 7103. Next, a solid electrolyte layer 7104 is
formed over the negative electrode active material layer 7103.
Generally, lithium phosphate or the like is used for the solid
electrolyte layer 7104. Next, a positive electrode active material
layer 7105 is formed over the solid electrolyte layer 7104.
Generally, lithium manganate or the like is used for the positive
electrode active material layer 7105. Lithium cobaltate or lithium
nickel oxide may also be used. Next, a current-collecting thin film
7106 to serve as an electrode is formed over the positive electrode
active material layer 7105. The current-collecting thin film 7106
should have high adhesion to the positive electrode active material
layer 7105 and have low resistance. For example, aluminum, copper,
nickel, vanadium, or the like can be used. Each layer may be formed
by using either a sputtering technique or an evaporation technique.
In addition, the thickness of each layer is preferably 0.1 to 3
.mu.m.
[0102] Next, charging and discharging operations will be described.
In charging the battery, lithium ions are desorbed from the
positive electrode active material layer 7105. Then, the lithium
ions are absorbed into the negative electrode active material layer
7103 through the solid electrolyte layer 7104. At this time,
electrons are released to outside from the positive electrode
active material layer 7105. In discharging the battery, on the
other hand, lithium ions are desorbed from the negative electrode
active material layer 7103. Then, the lithium ions are absorbed
into the positive electrode active material layer 7105 through the
solid electrolyte layer 7104. At this time, electrons are released
to outside from the negative electrode active material layer 7103.
The thin-film secondary battery operates in this manner. With such
a thin-film secondary battery, a compact and lightweight battery
can be constructed.
[0103] This embodiment can be implemented in combination with any
of Embodiment Modes 1 to 3 and Embodiments 1 to 4.
[Embodiment 6]
[0104] Embodiment 6 of the invention is shown in FIGS. 10A to 11B.
This embodiment will describe an electric double layer capacitor.
The structure of the electric double layer capacitor is shown in
FIG. 10A.
[0105] Two electrodes (a positive electrode 1001 and a negative
electrode 1002) are put in an electrolyte 1004, and a voltage is
applied across the two electrodes. A separator 1003 is disposed
between the positive electrode 1001 and the negative electrode 1002
so that these electrodes are not shorted in the electrolyte.
Generally, the electrolyte 1004 starts to be electrolyzed at a
voltage of about 1 V so that a current flows between the
electrodes, although the voltage level differs depending on the
kind of the electrolyte 1004. However, when the voltage across the
two electrodes is low, electrolysis reaction does not occur. At
this time, a layer of polarized ions 1005 is formed around the
electrodes as shown in FIG. 10A. Such layer of the polarized ions
1005 is referred to as an electric double layer, and can be used as
a capacitor 1006 as shown in FIG. 10B. A capacitor using an
electric double layer has the following features.
[0106] The layer of the polarized ions is very thin. Therefore,
when an electrode with a large surface area is prepared, a
capacitor with a high capacitance value can be formed. The thinnest
electric double layer is as thin as one molecule.
[0107] In order to prepare an electrode with a large surface area,
activated carbon 1101 is attached to the surfaces of the positive
electrode 1001 and the negative electrode 1002 as shown in FIG.
11A, so that the surface of the activated carbon is also used as
the electrode. Having a large surface area, the activated carbon
1101 is effective for forming an electric double layer with a large
area. A magnified view of the activated carbon 1101 is shown in
FIG. 11B. The polarized ions 1005 are formed on the surface of the
activated carbon 1101, thereby functioning as the capacitor 1006.
Such a capacitor 1006 can function as a capacitor only at a voltage
lower than the voltage level at which electrolysis reaction occurs,
and has a disadvantage in low withstand voltage. However, when such
an electric double layer capacitor is used, it is possible to
obtain a capacitor with a small volume and a high capacitance
value. Specifically, a capacitor of 0.1 F or more, which has a size
of about a coin, can be obtained.
[0108] This embodiment can be implemented in combination with any
of Embodiment Modes 1 to 3 and Embodiments 1 to 5.
[Embodiment 7]
[0109] Embodiment 7 of the invention is shown in FIGS. 13A and 13B.
FIGS. 13A and 13B illustrate specific examples of a
photosensor.
[0110] FIG. 13A is a cross-sectional view of a photosensor. The
photosensor of this embodiment uses a PIN diode. First, a
transparent conductive film 1302 is formed over a substrate 1301.
Then, p-type amorphous silicon 1303, i-type amorphous silicon 1304,
n-type amorphous silicon 1305, and an electrode 1306 are
sequentially formed and patterned into predetermined shapes. Then,
an interlayer film 1309 is formed and contact holes are formed in
the interlayer film 1309 so as to partially expose the transparent
conductive film 1302 and the electrode 1306. Then, an electrode
1308 connected to the transparent conductive film 1302 at the
contact hole as well as an electrode 1307 connected to the
electrode 1306 at the contact hole are formed.
[0111] FIG. 13B shows a connection relation between the photosensor
and other elements in a sensor circuit. A resistor 1311 is
connected to a PIN diode 1310 and a reverse-bias voltage is applied
to the PIN diode 1310 by a power supply 1312. When the PIN diode
1310 receives light, a photocurrent flows through the PIN diode
1310, and a voltage Vr is generated across opposite terminals of
the resistor 1311. By reading out this voltage Vr, the amount of
light can be detected.
[0112] This embodiment can be implemented in combination with any
of Embodiment Modes 1 to 3 and Embodiments 1 to 6.
[Embodiment 8]
[0113] Embodiment 8 of the invention is shown in FIG. 14. FIG. 14
illustrates an example of a pressure sensor. The pressure sensor of
this embodiment includes resistors formed from semiconductors
(semiconductor resistors) 1401 to 1404, a differential amplifier
1405, power supply terminals 1406 and 1407, and an output terminal
1408.
[0114] The resistors 1401 and 1402 are connected in series between
the power supply terminals 1406 and 1407. Similarly, the resistors
1403 and 1404 are connected in series between the power supply
terminals 1406 and 1407. The resistors 1401 and 1402 are connected
in parallel with the resistors 1403 and 1404. The resistors 1401
and 1402 are connected to the differential amplifier 1405 such that
a potential between the resistors 1401 and 1402 is input to a
non-inverting input terminal (+) of the differential amplifier
1405. Similarly, the resistors 1403 and 1404 are connected to the
differential amplifier 1405 such that a potential between the
resistors 1403 and 1404 is input to an inverting input terminal (-)
of the differential amplifier 1405.
[0115] The resistance value of a normal semiconductor resistor
changes in response to pressure applied, due to a piezoelectric
effect. When pressure is applied to the pressure sensor of this
embodiment, pressures with different levels are applied to the
resistors 1401 and 1404. Upon application of pressure, potentials
input to the inverting input terminal (-) and the non-inverting
input terminal (+) of the differential amplifier change. By
amplifying the potential difference, the presence of pressure can
be detected. When this pressure sensor is used for the
above-described wireless sensor device, information acquired by the
sensor circuit can be transmitted as radio waves.
[0116] Note that a pressure sensor used in the invention is not
limited to the configuration shown in this embodiment, and a
circuit with a different structure may be used.
[0117] As described above, the applicable range of the invention is
so wide that it can be applied to any wireless sensor device which
transmits information that is sensed. In addition, this embodiment
can be implemented in combination with any of Embodiment Modes 1 to
3 and Embodiments 1 to 7.
[Embodiment 9]
[0118] Next, a method of fabricating the wireless sensor device of
the invention will be described in detail. Although this embodiment
illustrates a thin film transistor (TFT) as an exemplary
semiconductor element, a semiconductor element used in the wireless
sensor device of the invention is not limited to this. For example,
not only a TFT but also a memory element, a diode, a resistor, a
coil, a capacitor, an inductor, or the like can be used.
[0119] This embodiment will describe an example where the thin-film
secondary battery shown in Embodiment 5 is used as a battery, and
an antenna, the battery, and a semiconductor element are all formed
over the same substrate. When the antenna, the battery, and the
semiconductor element are all formed over the same substrate, a
compact wireless sensor device can be provided. Note that the
invention is not limited to this structure, and it is also possible
to separately form an antenna or a battery and a semiconductor
element, and electrically connect them afterwards.
[0120] First, as shown in FIG. 15A, an insulating film 701, a
release layer 702, an insulating film 703 functioning as a base
film, and a semiconductor film 704 are sequentially formed over a
heat-resistant substrate 700. The insulating film 701, the release
layer 702, the insulating film 703, and the semiconductor film 704
can be formed in succession.
[0121] For the substrate 700, it is possible to use, for example, a
glass substrate made of barium borosilicate glass,
aluminoborosilicate glass, or the like; a quartz substrate; a
ceramic substrate; or the like. It is also possible to use a metal
substrate such as a stainless steel substrate or a semiconductor
substrate such as a silicon substrate. A substrate made of a
flexible synthetic resin, e.g., plastic generally has a lower
allowable temperature limit than the above-described substrates;
however, such substrate can be used as long as it can withstand the
processing temperature in the fabrication process.
[0122] Examples of a plastic substrate include polyester typified
by polyethylene terephthalate (PET), polyethersulfone (PES),
polyethylene naphthalate (PEN), polycarbonate (PC), nylon,
polyetheretherketone (PEEK), polysulfone (PSF), polyetherimide
(PEI), polyarylate (PAR), polybutylene terephthalate (PBT),
polyimide, acrylonitrile-butadiene-styrene resin, polyvinyl
chloride, polypropylene, polyvinyl acetate, acrylic resin, and the
like.
[0123] Although the release layer 702 is provided over the entire
surface of the substrate 700 in this embodiment, the invention is
not limited to this structure. For example, the release layer 702
may be formed partially over the substrate 700 by a
photolithography method or the like.
[0124] The insulating films 701 and 703 are formed by depositing an
insulating material such as silicon oxide, silicon nitride (e.g.,
SiN.sub.x or Si.sub.3N.sub.4), silicon oxynitride (SiO.sub.xN.sub.y
where x>y>0), or silicon nitride oxide (SiN.sub.xO.sub.y
where x>y>0) by a CVD method, a sputtering method, or the
like.
[0125] The insulating films 701 and 703 are provided to prevent an
alkali metal such as Na or an alkaline earth metal contained in the
substrate 700 from being diffused into the semiconductor film 704,
which would otherwise adversely affect the characteristics of
semiconductor elements such as TFTs. In addition, the insulating
film 703 functions to prevent an impurity element contained in the
release layer 702 from being diffused into the semiconductor film
704, and also functions to protect the semiconductor elements in
the later step of peeling the semiconductor elements.
[0126] Each of the insulating films 701 and 703 can be either a
single insulating film or stacked layers of a plurality of
insulating films. In this embodiment, the insulating film 703 is
formed by sequentially depositing a silicon oxynitride film to a
thickness of 100 nm, a silicon nitride oxide film to a thickness of
50 nm, and a silicon oxynitride film to a thickness of 100 nm.
However, the material and thickness of each film as well as the
number of stacked layers are not limited to this example. For
example, the bottom silicon oxynitride film may be replaced with a
siloxane resin having a thickness of 0.5 to 3 .mu.m that is formed
by a spin coating method, a slit coating method, a droplet
discharge method, a printing method, or the like. In addition, the
middle silicon nitride oxide film may be replaced with a silicon
nitride (e.g., SiN.sub.x or Si.sub.3N.sub.4) film. Further, the top
silicon oxynitride film may be replaced with a silicon oxide film.
The thickness of each film is preferably 0.05 to 3 .mu.m, and can
be freely selected within this range.
[0127] Alternatively, it is also possible to form the bottom layer
of the insulating film 703, which is closest to the release layer
702, using a silicon oxynitride film or a silicon oxide film, form
the middle layer using a siloxane resin, and form the top layer
using a silicon oxide film.
[0128] Note that a siloxane resin is a resin formed from a siloxane
material as a starting material and having the bond of Si--O--Si. A
siloxane resin may contain as a substituent at least one of
fluorine, an alkyl group, and aromatic hydrocarbon, in addition to
hydrogen.
[0129] The silicon oxide film can be formed by thermal CVD, plasma
CVD, atmospheric pressure CVD, bias ECRCVD, or the like, using a
mixed gas of SiH.sub.4/O.sub.2, TE0S(tetraethoxysilane)/O.sub.2, or
the like. The silicon nitride film can be typically formed by
plasma CVD using a mixed gas of SiH.sub.4/NH.sub.3. The silicon
oxynitride film and the silicon nitride oxide film can be typically
formed by plasma CVD using a mixed gas of SiH.sub.4/N.sub.2O.
[0130] For the release layer 702, it is possible to use a metal
film, a metal oxide film, or a stacked film of a metal film and a
metal oxide film. The metal film and the metal oxide film can be
either a single layer or a stacked structure of a plurality of
layers. In addition to a metal film or a metal oxide film, metal
nitride or metal oxynitride can also be used. The release layer 702
can be formed by a sputtering method or various CVD methods such as
a plasma CVD method.
[0131] Examples of metals used for the release layer 702 include
tungsten (W), molybdenum (Mo), titanium (Ti), tantalum (Ta),
niobium (Nb), nickel (Ni), cobalt (Co), zirconium (Zr), zinc (Zn),
ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium,
and the like. In addition to such metal films, the release layer
702 can also be formed using a film made of an alloy containing the
above-described metal as a main component or a compound containing
the above-described metal.
[0132] Alternatively, the release layer 702 can also be formed
using a single silicon (Si) film or a film made of a compound
containing silicon (Si) as a main component. As a further
alternative, the release layer 702 can also be formed using a film
made of an alloy of silicon (Si) and the above-described metal. A
film containing silicon can have any of amorphous,
microcrystalline, and polycrystalline structures.
[0133] The release layer 702 can be either a single layer of the
above-described film or stacked layers thereof. The release layer
702 having a stack of a metal film and a metal oxide film can be
formed by sequentially forming a base metal film and oxidizing or
nitriding the surface of the metal film. Specifically, plasma
treatment may be applied to the base metal film in an oxygen
atmosphere or an N.sub.2O atmosphere, or thermal treatment may be
applied to the metal film in an oxygen atmosphere or an N.sub.2O
atmosphere. Alternatively, oxidation can be accomplished by forming
a silicon oxide film or a silicon oxynitride film on the base metal
film. Similarly, nitridation can be accomplished by forming a
silicon oxynitride film or a silicon nitride film on the base metal
film.
[0134] As the plasma treatment for oxidation or nitridation of the
metal film, it is possible to perform high-density plasma treatment
with a plasma density of 1.times.10.sup.11 cm.sup.-3 or higher,
preferably in the range of 1.times.10.sup.11 to 9.times.10.sup.15
cm .sup.-3 and with high frequency such as microwaves (e.g., a
frequency of 2.45 GHz).
[0135] Although the release layer 702 having a stack of a metal
film and a metal oxide film can be formed by oxidizing the surface
of the base metal film, it is also possible to sequentially form a
metal film and form a metal oxide film thereon.
[0136] For example, in the case of using tungsten as a metal, a
tungsten film is formed as a base metal film by a sputtering
method, a CVD method, or the like, and then plasma treatment is
applied to the tungsten film Accordingly, a tungsten film that is a
metal film and a metal oxide film that is in contact with the metal
film and is formed from oxide of tungsten can be formed.
[0137] Note that oxide of tungsten is given by WO.sub.x where x is
in the range of 2 to 3. There are cases where x is 2 (WO.sub.2), x
is 2.5 (W.sub.2O.sub.5), x is 2.75 (W.sub.4O.sub.11), and x is 3
(WO.sub.3). In formation of oxide of tungsten, there is no
limitation on the value of x, and the value of x may be determined
based on the etching rate or the like.
[0138] It is preferable that the semiconductor film 704 be
consecutively formed after the formation of the insulating film 703
without exposure to air. The thickness of the semiconductor film
704 is 20 to 200 nm (preferably 40 to 170 nm, or more preferably 50
to 150 nm). Note that the semiconductor film 704 may be either an
amorphous semiconductor or a polycrystalline semiconductor.
Further, not only silicon but also silicon germanium can be used
for the semiconductor. In the case of using silicon germanium, the
concentration of germanium is preferably about 0.01 to 4.5 atomic
%.
[0139] Note that the semiconductor film 704 can be crystallized by
a known technique. As a known crystallization method, there are a
laser crystallization method with laser light and a crystallization
method with a catalytic element. Alternatively, it is also possible
to combine a crystallization method with a catalytic element and a
laser crystallization method. In the case of using a thermally
stable substrate such as quartz for the substrate 700, it is
possible to combine any of the following crystallization methods: a
thermal crystallization method with an electrically heated oven, a
lamp anneal crystallization method with infrared light, a
crystallization method with a catalytic element, and high
temperature annealing at about 950.degree. C.
[0140] For example, in the case of using laser crystallization,
thermal treatment at 550.degree. C. is applied to the semiconductor
film 704 for four hours before the laser crystallization, in order
to enhance the resistance of the semiconductor film 704 to laser.
When a continuous-wave solid-state laser is used and irradiation is
conducted with the second to fourth harmonics of the fundamental
wave, crystals with a large grain size can be obtained. Typically,
the second harmonic (532 nm) or the third harmonic (355 nm) of an
Nd:YVO.sub.4 laser (the fundamental wave of 1064 nm) is preferably
used. Specifically, laser light emitted from a continuous-wave
YVO.sub.4 is converted into a harmonic with a nonlinear optical
element, so that laser light having an output of 10 W is obtained.
Then, the laser light is preferably shaped into a rectangular shape
or an elliptical shape with optics on the irradiation surface. In
this case, a laser power density of about 0.01 to 100 MW/cm.sup.2
(preferably, 0.1 to 10 MW/cm.sup.2) is required, and irradiation is
conducted with a scanning rate of about 10 to 2000 cm/sec.
[0141] As a continuous-wave gas laser, an Ar laser, a Kr laser, or
the like can be used.
[0142] As a continuous-wave solid-state laser, the following can be
used: a YAG laser, a YVO.sub.4 laser, a YLF laser, a YAlO.sub.3
laser, a forsterite (Mg.sub.2SiO.sub.4) laser, a GdVO.sub.4 laser,
a Y.sub.2O.sub.3 laser, a glass laser, a ruby laser, an alexandrite
laser, a Ti:sapphire laser, and the like.
[0143] Alternatively, the following pulsed lasers can be used: an
Ar laser, a Kr laser, an excimer laser, a CO.sub.2 laser, a YAG
laser, a Y.sub.2O.sub.3 laser, a YVO.sub.4 laser, a YLF laser, a
YAlO.sub.3 laser, a glass laser, a ruby laser, an alexandrite
laser, a Ti:sapphire laser, a copper vapor laser, and a gold vapor
laser.
[0144] The repetition rate of pulsed laser light may be set at 10
MHz or higher, so that laser crystallization can be performed with
a considerably higher repetition rate than the normally used
repetition rates in the range of several ten to several hundred Hz.
It is said that it takes several ten to several hundred nsec for
the semiconductor film 704 to become completely solidified after
being irradiated with pulsed laser light. Therefore, by using laser
light with the above-described repetition rate, the semiconductor
film 704 can be irradiated with the next laser pulse after it is
melted by the previous laser light but before it becomes
solidified. Accordingly, the solid-liquid interface of the
semiconductor film 704 can be moved continuously and, thus, the
semiconductor film 704 having crystal grains that have grown in the
scanning direction can be formed.
[0145] Specifically, it is possible to form an aggregation of
crystal grains having a width of about 10 to 30 .mu.m in the
scanning direction and a width of about 1 to 5 .mu.m in the a
direction perpendicular to the scanning direction. By forming
single crystals with crystal grains that have continuously grown in
the scanning direction, it is possible to form the semiconductor
film 704 having few crystal grains at least in the channel
direction of a TFT.
[0146] Note that laser crystallization can be performed by
irradiation with a fundamental wave of continuous-wave laser light
and a harmonic of continuous-wave laser light in parallel.
Alternatively, laser crystallization can also be performed by
irradiation with a fundamental wave of continuous-wave laser light
and a harmonic of pulsed laser light in parallel.
[0147] Note that laser irradiation can be performed in an inert gas
atmosphere such as a rare gas or a nitrogen gas. Accordingly,
roughness of the semiconductor surface by laser irradiation can be
suppressed, and variations in threshold voltage of TFTs resulting
from variations in interface state density can be suppressed.
[0148] By the above-described laser irradiation, the semiconductor
film 704 with enhanced crystallinity can be formed. Note that it is
also possible to use a polycrystalline semiconductor, which is
formed by a sputtering method, a plasma CVD method, a thermal CVD
method, or the like, for the semiconductor film 704.
[0149] Although the semiconductor film 704 is crystallized in this
embodiment, it is not necessarily required to be crystallized and
can remain as an amorphous silicon film or a microcrystalline
semiconductor film to proceed to the following process. A TFT
formed using an amorphous semiconductor or a microcrystalline
semiconductor involves less fabrication steps than TFTs formed
using a polycrystalline semiconductor. Therefore, it has an
advantage of low cot and high yield.
[0150] Further, it is also possible to use a single-crystalline
semiconductor film formed on an insulating film (SOI: Silicon on
Insulator), which is formed by a bonding method or a SIMOX
(Separation by IMplanted OXygen) method, for an active layer of a
TFT.
[0151] An amorphous semiconductor can be obtained by decomposing a
gas containing silicon by glow discharge. Examples of a gas
containing silicon include SiH.sub.4, Si.sub.2H.sub.6, and the
like. The gas containing silicon may be diluted with hydrogen or
with hydrogen and helium.
[0152] Next, as shown in FIG. 15B, the semiconductor film 704 is
patterned into predetermined shapes, so that island-shaped
semiconductor films 705 to 709 are formed. Then, a gate insulating
film 710 is formed so as to cover the island-shaped semiconductor
films 705 to 709. The gate insulating film 710 can be formed by
depositing a film containing silicon nitride, silicon oxide,
silicon nitride oxide, or silicon oxynitride, either in a single
layer or stacked layers by a plasma CVD method, a sputtering
method, or the like. When the gate insulating film 710 is formed to
have stacked layers, it is preferable to form a three-layer
structure in which a silicon oxide film, a silicon nitride film,
and a silicon oxide film are sequentially stacked over the
substrate 700.
[0153] The gate insulating film 710 can also be formed by oxidizing
or nitriding the surfaces of the island-shaped semiconductor films
705 to 709 by high-density plasma treatment. High-density plasma
treatment is performed by using, for example, a mixed gas of a rare
gas such as He, Ar, Kr, or Xe; and oxygen, nitrogen oxide, ammonia,
nitrogen, or hydrogen. When plasma is excited by introduction of
microwaves, plasma with a low electron temperature and high density
can be generated. When the surfaces of the semiconductor films are
oxidized or nitrided by oxygen radicals (there may also be OH
radicals) or nitrogen radicals (there may also be NH radicals)
generated by such high-density plasma, an insulating film with a
thickness of 1 to 20 nm, typically 5 to 10 nm is formed to be in
contact with the semiconductor films. Such an insulating film
having a thickness of 5 to 10 nm is used as the gate insulating
film 710.
[0154] Oxidation or nitridation of the semiconductor films by the
above-described high-density plasma treatment proceeds by
solid-phase reaction. Therefore, interface state density between
the gate insulating film and the semiconductor films can be
suppressed quite low. Further, by directly oxidizing or nitriding
the semiconductor films by high-density plasma treatment,
variations in thickness of the insulating film to be formed can be
suppressed. Furthermore, in the case where the semiconductor films
have crystallinity and the surfaces of the semiconductor films are
oxidized by solid-phase reaction by high-density plasma treatment,
crystal grain boundaries can be prevented from being locally
oxidized at a fast speed. Thus, a uniform gate insulating film with
low interface state density can be formed. A transistor whose gate
insulating film partially or wholly includes an insulating film
formed by high-density plasma treatment can have suppressed
variations in characteristics.
[0155] Next, as shown in FIG. 15C, a conductive film is formed over
the gate insulating film 710, and the conductive film is patterned
into predetermined shapes, so that gate electrodes 711 are formed
above the island-shaped semiconductor films 705 to 709. In this
embodiment, the gate electrodes 711 are each formed by patterning
two stacked conductive films. For the conductive films, metals such
as tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo),
aluminum (Al), copper (Cu), chromium (Cr), and niobium (Nb) can be
used. Alternatively, an alloy containing the above-described metal
as a main component or a compound containing the above-described
metal can also be used. Further, it is also possible to use a
semiconductor, e.g., polycrystalline silicon doped with an impurity
element such as phosphorus which imparts one conductivity type to
the semiconductor film.
[0156] In this embodiment, a tantalum nitride film or a tantalum
(Ta) film is used as a first conductive film, and a tungsten (W)
film is used as a second conductive film. Besides the example shown
in this embodiment, the following combinations of two conductive
films can be given as alternative examples: a tungsten nitride film
and a tungsten film, a molybdenum nitride film and a molybdenum
film, an aluminum film and a tantalum film, an aluminum film and a
titanium film, and the like. Tungsten and tantalum nitride have
high heat resistance. Therefore, after the formation of the two
conductive films, they may be heated for the purpose of thermal
activation. Further, as other exemplary combinations of two
conductive films, it is also possible to use silicon doped with an
n-type impurity and nickel silicide, silicon doped with an n-type
impurity and tungsten silicide, and the like.
[0157] Although this embodiment illustrates the gate electrode 711
having two stacked conductive films, the invention is not limited
to this structure. The gate electrode 711 may also be formed from a
single conductive film or more than two stacked conductive films.
In the case of using a three-layer structure in which more than two
conductive films are stacked, it is preferable to form a stacked
structure of a molybdenum film, an aluminum film, and a molybdenum
film.
[0158] The conductive films can be formed by a CVD method, a
sputtering method, or the like. In this embodiment, a first
conductive film is formed to a thickness of 20 to 100 nm and a
second conductive film is formed to a thickness of 100 to 400
nm.
[0159] Note that a resist mask used for the formation of the gate
electrode 711 may be replaced with a mask made of silicon oxide,
silicon oxynitride, or the like. In that case, it is necessary to
perform an additional patterning step for formation of a mask of
silicon oxide, silicon oxynitride, or the like. However, since
reduction in thickness of the mask in etching is less than the case
of using a resist, the gate electrode 711 with a desired width can
be formed. Alternatively, the gate electrode 711 can be selectively
formed by a droplet discharge method without using a mask.
[0160] Note that a droplet discharge method means a method of
forming a predetermined pattern by discharging or ejecting a
droplet containing a predetermined composition from an orifice. An
inkjet method is given as one example.
[0161] Next, the island-shaped semiconductor films 705 to 709 are
doped with an element which imparts n-type conductivity (typically,
P (Phosphorus) or As (Arsenic)) with the gate electrodes 711 as
masks, so that the island-shaped semiconductor films 705 to 709
contain the impurity element at a low concentration (a first doping
step). The conditions of the first doping step are as follows: a
dosage of 1.times.10.sup.15 to 1.times.10.sup.19/cm.sup.3 and an
acceleration voltage of 50 to 70 keV. However, the invention is not
limited to such conditions. By this first doping step, doping is
performed through the gate insulating film 710, so that a pair of
n-type low concentration impurity regions 712 are formed in each of
the island-shaped semiconductor films 705 to 709. Note that the
first doping step may be performed with the island-shaped
semiconductor film 708, which is to be a p-channel TFT, covered
with a mask.
[0162] Next, as shown in FIG. 15D, a mask 770 is formed so as to
cover the island-shaped semiconductor films 705 to 707 and 709 that
are to be n-channel TFTs. Then, the island-shaped semiconductor
film 708 is doped with an impurity element which imparts p-type
conductivity (typically, B (boron)) with the mask 770 and the gate
electrode 711 as masks, so that the island-shaped semiconductor
film 708 contains the impurity element at a high concentration (a
second doping step). The conditions of the second doping step are
as follows: a dosage of 1.times.10.sup.19 to
1.times.10.sup.20/cm.sup.3 and an acceleration voltage of 20 to 40
keV. By this second doping step, doping is performed through the
gate insulating film 710, so that a pair of p-type high
concentration impurity regions 713 are formed in the island-shaped
semiconductor film 708.
[0163] Next, as shown in FIG. 16A, the mask 770 is removed by
ashing or the like, and an insulating film is formed so as to cover
the gate insulating film 710 and the gate electrodes 711. The
insulating film is formed by depositing a silicon film, a silicon
oxide film, a silicon oxynitride film, a silicon nitride oxide
film, or a film containing an organic material such as an organic
resin, either in a single layer or stacked layers by a plasma CVD
method, a sputtering method, or the like. In this embodiment, a
silicon oxide film is formed to a thickness of 100 nm by a plasma
CVD method.
[0164] Next, the gate insulating film 710 and the insulating film
are partially etched by anisotropic etching (mainly in the
perpendicular direction). By this anisotropic etching, the gate
insulating film 710 is partially etched to leave gate insulating
films 714 that are partially formed over the island-shaped
semiconductor films 705 to 709. In addition, the insulating film is
also etched partially by the anisotropic etching, so that sidewalls
715 having a contact with the side faces of the gate electrodes 711
are formed. The sidewalls 715 are used as doping masks for
formation of LDD (Lightly Doped Drain) regions. In this embodiment,
a mixed gas of CHF.sub.3 and He is used as an etching gas. Note
that the step of forming the sidewalls 715 is not limited to this
example.
[0165] Next, a mask is formed so as to cover the island-shaped
semiconductor film 708 that is to be a p-channel TFT. Then, the
island-shaped semiconductor films 705 to 707 and 709 are doped with
an impurity element which imparts n-type conductivity (typically, P
or As) by using the mask, the gate electrodes 711, and the
sidewalls 715 as masks, so that the island-shaped semiconductor
films 705 to 707 and 709 contain the impurity element at a high
concentration (a third doping step). The conditions of the third
doping step are as follows: a dosage of 1.times.10.sup.19 to
1.times.10.sup.20/cm.sup.3 and an acceleration voltage of 60 to 100
keV. By this third doping step, a pair of n-type high concentration
impurity regions 716 are formed in each of the island-shaped
semiconductor films 705 to 707 and 709.
[0166] Note that the sidewalls 715 function as masks later at the
time of forming low concentration impurity regions or non-doped
offset regions below the sidewalls 715 by doping the semiconductor
film with an impurity which imparts n-type conductivity so that the
semiconductor film contains the impurity element at a high
concentration. Therefore, in order to control the width of the low
concentration impurity regions or the non-doped offset regions, the
size of the sidewalls 715 may be controlled by appropriately
changing the anisotropic etching conditions for the formation of
the sidewalls 715 or the thickness of the insulating film.
[0167] Next, the mask is removed by ashing or the like, and then
the impurity regions may be activated by thermal treatment. For
example, a silicon oxynitride film with a thickness of 50 nm may be
formed first, followed by thermal treatment at 550.degree. C. in a
nitrogen atmosphere for four hours.
[0168] Alternatively, a silicon nitride film containing hydrogen
may be formed first to a thickness of 100 nm, followed by thermal
treatment at 410.degree. C. in a nitrogen atmosphere for one hour
so that the island-shaped semiconductor films 705 to 709 are
hydrogenated. As a further alternative, the island-shaped
semiconductor films 705 to 709 may be subjected to thermal
treatment at 300 to 450.degree. C. in an atmosphere containing
hydrogen for one to 12 hours so as to be hydrogenated. The thermal
treatment can be performed by a thermal annealing method, a laser
annealing method, an RTA method, or the like. By the thermal
treatment, not only hydrogenation but also activation of the
impurity element that has been added into the semiconductor films
can be accomplished. As an alternative method of hydrogenation, it
is also possible to perform plasma hydrogenation (which uses
hydrogen excited by plasma). By such hydrogenation step, dangling
bonds can be terminated with thermally excited hydrogen.
[0169] By the series of the above-described steps, n-channel TFTs
717 to 720 and a p-channel TFT 721 are formed.
[0170] Next, as shown in FIG. 16B, an insulating film 722
functioning as a passivation film is formed for protection of the
TFTs 717 to 721. Although the insulating film 722 is not
necessarily required, the provision of the insulating film 722 can
prevent intrusion of an impurity such as an alkali metal or an
alkaline earth metal into the TFTs 717 to 721. Specifically, it is
preferable to use silicon nitride, silicon nitride oxide, aluminum
nitride, aluminum oxide, silicon oxide, silicon oxynitride or the
like for the insulating film 722. In this embodiment, a silicon
oxynitride film with a thickness of about 600 nm is used for the
insulating film 722. In this case, the above-described
hydrogenation step may be performed after the formation of this
silicon oxynitride film.
[0171] Next, an insulating film 723 is formed over the insulating
film 722 so as to cover the TFTs 717 to 721. For the insulating
film 723, thermally stable organic materials such as polyimide,
acrylic, benzocyclobutene, polyamide, or epoxy can be used. In
addition to such organic materials, it is also possible to use a
low-dielectric constant material (a low-k material), a siloxane
resin, silicon oxide, silicon nitride, silicon oxynitride, silicon
nitride oxide, PSG (phosphosilicate glass), BPSG
(borophosphosilicate), alumina, and the like. A siloxane resin may
contain as a substituent at least one of fluorine, an alkyl group,
and aromatic hydrocarbon, in addition to hydrogen. Note that the
insulating film 723 can also be formed by stacking a plurality of
insulating films made of such materials.
[0172] A method for forming the insulating film 723 can be selected
as appropriate according to a material used, e.g., a CVD method, a
sputtering method, a SOG method, spin coating, dipping, spray
coating, a droplet discharge method (e.g., an inkjet method, screen
printing, offset printing, or the like), a doctor knife, a roll
coater, a curtain coater, a knife coater, or the like.
[0173] Next, contact holes are formed in the insulating films 722
and 723 so as to partially expose the island-shaped semiconductor
films 705 to 709. Then, conductive films 724 to 733 are formed so
as to be in contact with the island-shaped semiconductor films 705
to 709 through the contact holes. Although a mixed gas of CHF.sub.3
and He is used as an etching gas for formation of the contact
holes, the invention is not limited to this.
[0174] The conductive films 724 to 733 can be formed by a CVD
method, a sputtering method, or the like. Specifically, the
conductive films 724 to 733 can be formed using aluminum (Al),
tungsten (W), titanium (Ti), tantalum (Ta), molybdenum (Mo), nickel
(Ni), platinum (Pt), copper (Cu), gold (Au), silver (Ag), manganese
(Mn), neodymium (Nd), carbon (C), silicon (Si), or the like.
Alternatively, an alloy containing the above-described metal as a
main component or a compound containing the above-described metal
can also be used. The conductive films 724 to 733 can be either a
single layer of the above-described metal film or a plurality of
stacked layers thereof.
[0175] As an example of an alloy containing aluminum as a main
component, an alloy which contains aluminum as a main component and
contains nickel can be given. Further, an alloy which contains
aluminum as a main component and contains nickel and one or both of
carbon and silicon can also be given. Aluminum and aluminum
silicon, which have a low resistance value and are inexpensive, are
the most suitable materials for formation of the conductive films
724 to 733. In particular, when an aluminum silicon (Al--Si) film
is used, generation of hillocks in resist baking can be suppressed
more than the case of using an aluminum film, in patterning the
conductive films 724 to 733. Further, instead of silicon (Si),
about 0.5% Cu may be mixed into the aluminum film.
[0176] Each of the conductive films 724 to 733 is preferably formed
to have a stacked structure of, for example, a barrier film, an
aluminum silicon (Al--Si) film, and a barrier film, or a stacked
structure of a barrier film, an aluminum silicon (Al--Si) film, a
titanium nitride film, and a barrier film. Note that a barrier film
is, for example, a film formed from titanium, titanium nitride,
molybdenum, molybdenum nitride, or the like. When barrier films are
formed to sandwich an aluminum silicon (Al--Si) film therebetween,
generation of hillocks of aluminum or aluminum silicon can be
prevented more effectively. In addition, when a barrier film made
of titanium which is a high reducible element is formed, even when
there are thin oxide films on the island-shaped semiconductor films
705 to 709, the oxide films can be reduced by titanium contained in
the barrier film, whereby a favorable contact between the
conductive films 724 to 733 and the island-shaped semiconductor
films 705 to 709 can be obtained. Further, it is also possible to
stack a plurality of barrier films In that case, the conductive
films 724 to 733 can each have a five-layer structure in which
titanium, titanium nitride, aluminum silicon, titanium, and
titanium nitride are sequentially stacked.
[0177] Note that the conductive films 724 and 725 are connected to
the high concentration impurity regions 716 of the n-channel TFT
717. The conductive films 726 and 727 are connected to the high
concentration impurity regions 716 of the n-channel TFT 718. The
conductive films 728 and 729 are connected to the high
concentration impurity regions 716 of the n-channel TFT 719. The
conductive films 730 and 731 are connected to the high
concentration impurity regions 713 of the p-channel TFT 721. The
conductive films 732 and 733 are connected to the high
concentration impurity regions 716 of the n-channel TFI 720.
[0178] Next, as shown in FIG. 16C, an insulating film 734 is formed
so as to cover the conductive films 724 to 733. Then, contact holes
are formed in the insulating film 734 so as to partially expose the
conductive films 724, 726, 728, and 733. Then, conductive films 735
to 738 are formed so as to be in contact with the conductive films
724, 726, 728, and 733, respectively at the contact holes. Any
material that can be used for the conductive films 724 to 733 can
be used as the material of the conductive films 735 to 738.
[0179] The insulating film 734 can be formed using an organic resin
film, an inorganic insulating film, or a siloxane insulating film.
Examples of an organic resin film include acrylic, epoxy,
polyimide, polyamide, polyvinyl phenol, benzocyclobutene, and the
like. Examples of an inorganic insulating film include silicon
oxide, silicon oxynitride, silicon nitride oxide, a film containing
carbon typified by DLC (diamond-like carbon), and the like. Note
that a mask used for formation of an opening through a
photolithography method can be formed by a droplet discharge method
or a printing method. A method of forming the insulating film 734
can be selected as appropriate according to a material used, e.g.,
a CVD method, a sputtering method, a droplet discharge method, a
printing method, or the like.
[0180] Next, a conductive film 739 functioning as an antenna and
conductive films 740 to 742 functioning as wires are formed so as
to be in contact with the conductive films 735 to 738. In this
embodiment, the conductive films 737 and 739 are in contact.
Similarly, the conductive films 735 and 740 are in contact, the
conductive films 736 and 741 are in contract, and the conductive
films 738 and 742 are in contact.
[0181] The conductive films 739 to 742 can be formed using a metal
such as silver (Ag), gold (Au), copper (Cu), palladium (Pd),
chromium (Cr), platinum (Pt), molybdenum (Mo), titanium (Ti),
tantalum (Ta), tungsten (W), aluminum (Al), iron (Fe), cobalt (Co),
zinc (Zn), tin (Sn), or nickel (Ni). In addition to such metal
films, the conductive films 739 to 742 can also be formed using a
film made of an alloy containing the above-described metal as a
main component or a compound containing the above-described metal.
The conductive films 739 to 742 can be either a single layer of the
above-described film or a plurality of stacked layers thereof.
[0182] The conductive films 739 to 742 can be formed by a CVD
method, a sputtering method, a printing method such as screen
printing or gravure printing, a droplet discharge method, a
dispensing method, a plating method, a photolithography method, an
evaporation method, or the like.
[0183] In the case of using a screen printing method, for example,
the conductive films 739 to 742 can be formed by selectively
printing a conductive paste, in which conductive particles with a
particle size of several nm to several ten .mu.m are dispersed in
an organic resin, onto the insulating film 734. The conductive
particles can be formed using silver (Ag), gold (Au), copper (Cu),
nickel (Ni), platinum (Pt), palladium (Pd), tantalum (Ta),
molybdenum (Mo), tin (Sn), lead (Pb), zinc (Zn), chromium (Cr),
titanium (Ti), or the like. In addition to such metals, the
conductive particles can also be formed using an alloy containing
the above-described metal as a main component or a compound
containing the above-described metal. Further, it is also possible
to use fine particles of silver halide or dispersible
nanoparticles. In addition, as an organic resin contained in the
conductive paste, polyimide, a siloxane resin, an epoxy resin, a
silicone resin, or the like can be used.
[0184] As exemplary alloys of the above-described metals, the
following combinations can be given: silver (Ag) and palladium
(Pd), silver (Ag) and platinum (Pt), gold (Au) and platinum (Pt),
gold (Au) and palladium (Pd), and silver (Ag) and copper (Cu).
Further, conductive particles of copper (Cu) coated with silver
(Ag) can also be used, for example.
[0185] Note that the conductive films 739 to 742 are preferably
formed by the steps of extruding a conductive paste by a printing
method or a droplet discharge method, and baking the paste. For
example, in the case of using conductive particles (e.g., a
particle size of 1 to 100 nm) containing silver as a main component
for the conductive paste, the conductive films 739 to 742 can be
formed by baking the conductive paste at a temperature in the range
of 150 to 300.degree. C. Baking may be performed either by lamp
annealing with an infrared lamp, a xenon lamp, a halogen lamp, or
the like, or by furnace annealing with an electric furnace.
Further, laser annealing with an excimer laser or an Nd:YAG laser
may also be used. In addition, fine particles containing solder or
lead-free solder as a main component can also be used. In that
case, it is preferable to use fine particles with a particle size
not greater than 20 .mu.m. Solder and lead-free solder have the
advantage of low cost.
[0186] When a printing method or a droplet discharge method is
used, the conductive films 739 to 742 can be formed without using
an exposure mask. Further, when a droplet discharge method or a
printing method is used, waste of materials due to etching can be
prevented unlike a photolithography method. Further, since an
expensive exposure mask is not required, the fabrication cost of
the wireless sensor device can be suppressed.
[0187] Next, as shown in FIG. 17A, an insulating film 743 is formed
over the insulating film 734 so as to cover the conductive films
739 to 742. Then, contact holes are formed in the insulating film
743 so as to partially expose the conductive films 740 to 742
functioning as the wires. The insulating film 743 can be formed
using an organic resin film, an inorganic insulating film, or a
siloxane insulating film. Examples of an organic resin film include
acrylic, epoxy, polyimide, polyamide, polyvinyl phenol,
benzocyclobutene, and the like. Examples of an inorganic insulating
film include silicon oxide, silicon oxynitride, silicon nitride
oxide, a film containing carbon typified by DLC (diamond-like
carbon), and the like. Note that a mask used for formation of an
opening through a photolithography method can be formed by a
droplet discharge method or a printing method. A method of forming
the insulating film 743 can be selected as appropriate according to
a material used, e.g., a CVD method, a sputtering method, a droplet
discharge method, a printing method, or the like.
[0188] Next, as shown in FIG. 17B, layers of from the insulating
film 703 up to the insulating film 743, which include semiconductor
elements typified by TFTs and various conductive films,
(hereinafter collectively referred to as an "element formation
layer 744") are peeled off the substrate 700. In this embodiment, a
first seat material 745 is bounded to a surface of the insulating
film 743 of the element formation layer 744, and the element
formation layer 744 is peeled off the substrate 700 by using a
physical force. The release layer 702 may partially remain without
being entirely removed.
[0189] The above-described peeling step may be performed by a
method of etching the release layer 702. In this case, a protective
layer is formed so as to cover the conductive films 740 to 742 in
order to protect part of the conductive films 740 to 742 that has
been exposed by etching. Then, a trench is formed so as to
partially expose the release layer 702. The trench is formed by
dicing, scribing, laser (including UV light) processing, a
photolithography method, or the like. The trench may be deep enough
to expose the release layer 702.
[0190] The protective layer can be formed with an epoxy resin,
acrylate resin, a silicone resin, or the like that is soluble in
water or alcohols. For example, the protective layer can be formed
by the steps of applying a water-soluble resin (VL-WSHL10, product
of Toagosei Co., Ltd.) to a thickness of 30 .mu.m by a spin coating
method, pre-curing the resin by light exposure for two minutes, and
completely curing the resin by light exposure again for 12.5
minutes in total (2.5 minutes from the rear surface and 10 minutes
from the front surface). In the case of stacking a plurality of
organic resins, there is a possibility that part of the organic
resins might be melted or adhesion thereof might become extremely
high during a coating step or a baking step depending on a solvent
used. Therefore, in the case of using organic resins that are
soluble in the same solvent for the insulating film 743 and the
protective layer, it is preferable to form an inorganic insulating
film (e.g., a silicon nitride film, a silicon nitride oxide film,
an aluminum nitride film, or an aluminum nitride oxide film) so as
to cover the insulating film 743 in order that the protective layer
can be smoothly removed in a subsequent step. After the formation
of the protective layer, the release layer 702 is removed by
etching. In this case, halogen fluoride is used as an etching gas,
and the gas is introduced through the trench. In this embodiment,
etching is performed under the conditions of, for example, using
ClF.sub.3 (chlorine trifluoride), a temperature of 350.degree. C.,
a flow rate of 300 sccm, an atmospheric pressure of 6 Ton, and a
period of three hours.
[0191] In addition, nitrogen may be mixed into the ClF.sub.3 gas.
Using halogen fluoride such as ClF.sub.3 enables the release layer
702 to be selectively etched, so that the substrate 700 can be
peeled off the TFTs 717 to 721. Note that halogen fluoride may be
either gas or liquid.
[0192] Next, as shown in FIG. 18A, a second seat material 746 is
attached to a surface of the element formation layer 744 that is
exposed by the above-described peeling step, and then the element
formation layer 744 is peeled off the first seat material 745.
Then, conductive films 747 to 749, which are connected to the
conductive films 740 to 742, respectively through contact holes,
are formed. In this embodiment, the conductive films 740 and 747
are in contact, the conductive films 741 and 748 are in contact,
and the conductive films 742 and 749 are in contact.
[0193] The conductive films 747 to 749 can be formed using metals
such as silver (Ag), gold (Au), copper (Cu), palladium (Pd),
chromium (Cr), platinum (Pt), molybdenum (Mo), titanium (Ti),
tantalum (Ta), tungsten (W), aluminum (Al), iron (Fe), cobalt (Co),
zinc (Zn), tin (Sn), and nickel (Ni). In addition to such metal
films, the conductive films 747 to 749 can also be formed using a
film made of an alloy containing the above-described metal as a
main component or a compound containing the above-described metal.
The conductive films 747 to 749 can be either a single layer of the
above-described film or a plurality of stacked layers thereof.
[0194] The conductive films 747 to 749 can be formed by a CVD
method, a sputtering method, a printing method such as screen
printing or gravure printing, a droplet discharge method, a
dispensing method, a plating method, a photolithography method, an
evaporation method, or the like.
[0195] Although this embodiment illustrates an example where the
conductive films 747 to 749 are formed after peeling the element
formation layer 744 off the substrate 733, the formation of the
conductive films 747 to 749 may precede the peeling of the element
formation layer 744 off the substrate 700.
[0196] Note that in the case where semiconductor elements
corresponding to a plurality of wireless sensor devices are formed
over the substrate 700, the element formation layer 744 is cut into
individual wireless sensor devices. Cutting can be performed with a
laser irradiation apparatus, a dicing apparatus, a scribing
apparatus, or the like. In this embodiment, a plurality of
semiconductor elements formed over one substrate 700 are cut into
corresponding wireless sensor devices by laser irradiation.
[0197] Next, a substrate 751 having a battery and a terminal for
connecting a sensor to a semiconductor element is prepared. This
embodiment illustrates an example where a thin-film secondary
battery 750 shown in Embodiment 5 is used as a battery as shown in
FIG. 18B.
[0198] Next, the structures of the thin-film secondary battery 750
and the terminal shown in FIG. 18B will be described. First,
conductive films 752 and 753 are formed over the substrate 751. The
conductive film 752 functions as a terminal for connecting a sensor
to a semiconductor element. The thin-film secondary battery 750 is
formed over the substrate 751. Specifically, the thin-film
secondary battery 750 has a structure in which a current-collecting
thin film 754 connected to the conductive film 753, a negative
electrode active material layer 755, a solid electrolyte layer 756,
a positive electrode active material layer 757, and a
current-collecting thin film 758 are sequentially stacked over the
substrate 751.
[0199] The current-collecting thin film 754 should have high
adhesion to the negative electrode active material layer 755 and
have low resistance. For example, aluminum, copper, nickel,
vanadium, gold, or the like is preferably used for the
current-collecting thin film 754. For the negative electrode active
material layer 755, vanadium oxide or the like is generally used.
For the solid electrolyte layer 756, lithium phosphate, lithium
phosphate doped with nitrogen, or the like is generally used. For
the positive electrode active material layer 757, lithium manganate
or the like is generally used. It is also possible to use lithium
cobaltate or lithium nickel oxide for the positive electrode active
material layer 757. The current-collecting thin film 758 should
have high adhesion to the positive electrode active material layer
757 and have low resistance. For example, aluminum, copper, nickel,
vanadium, gold, or the like can be used. Alternatively, the
current-collecting thin film 754 or 758 may also be formed using a
light-transmissive conductive material such as ITO (Indium Tin
Oxide).
[0200] Each of the above-described thin layers of the negative
electrode active material layer 755, the solid electrolyte layer
756, the positive electrode active material layer 757, and the
current-collecting thin film 758 may be formed by using either a
sputtering method or an evaporation method. In addition, the
thickness of each layer is preferably 0.1 to 3 .mu.m.
[0201] Next, an interlayer film 759 is formed using a resin. Then,
the interlayer film 759 is etched to form contact holes. The
material of the interlayer film 759 is not limited to a resin, and
another film such as a CVD oxide film may also be used.
[0202] However, using a resin is preferable in terms of flatness.
Further, a photosensitive resin may also be used so that contact
holes can be formed in the interlayer film 759 without etching.
Next, conductive films 760 to 762 are formed over the interlayer
film 759. The conductive film 760 is in contact with the conductive
film 752 through the contact hole. The conductive film 761 is in
contact with the current-collecting thin film 758 through the
contact hole. By electrically connecting the conductive film 762 to
the conductive film 753, electrical connection of the thin-film
secondary battery 750 can be secured.
[0203] The conductive film 752 is connected to a conductive film
763 that is formed on an opposite surface (a second surface) to a
surface (a first surface) of the substrate 751 having the
conductive film 752, through a contact hole formed in the substrate
751. The contact hole in the substrate 751 may be formed by etching
or laser ablation. In order to facilitate the formation of the
contact hole, the substrate 751 may be polished and thinned by a
CMP (Chemical-Mechanical Polishing) method after the formation of
the conductive films 760 to 762. In this embodiment, the conductive
film 763 and the wire 764 connected to the sensor are electrically
connected.
[0204] Next, as shown in FIG. 19, the conductive films 747 to 749
provided on the element formation layer 744 and the conductive
films 760 to 762 are electrically connected. Specifically, the
conductive film 747 and the conductive film 760 are electrically
connected. In addition, the conductive film 748 and the conductive
film 761 are electrically connected, and also the conductive film
749 and the conductive film 762 are electrically connected.
[0205] This embodiment illustrates the case where the conductive
films 747 to 749 and the conductive films 760 to 762 are
electrically connected by pressure bonding with an anisotropic
conductive film (ACF), an anisotropic conductive paste (ACP), or
the like. In this embodiment, an example is shown in which
connection is carried out with conductive particles 766 in an
adhesive resin 765. Alternatively, connection may also be carried
out with a conductive adhesive such as a silver paste, a copper
paste, or a carbon paste, soldering, or the like.
[0206] Note that it is also possible to attach a third sheet
material over the substrate 751 having the thin-film secondary
battery 750 and the sensor electrically connected to the conductive
film 752, so that the second seat material 746 and the third sheet
material are bonded through one or both of thermal treatment and
pressure treatment. As the second sheet material 746 and the third
sheet material, hot-melt films and the like can be used.
[0207] For the second sheet material 746 and the third sheet
material, it is possible to use a film on which antistatic
treatment for preventing static electricity or the like has been
applied (hereinafter referred to as an antistatic film). By sealing
the device with antistatic films, semiconductor elements can be
prevented from adverse effects such as external static electricity
when dealt with as a commercial product.
[0208] Examples of an antistatic film include a film in which a
material that can prevent electrostatic charge (an antistatic
material) is mixed, a film having an antistatic effect, a film
coated with an antistatic agent, and the like. As an antistatic
agent, the following can be used: nonionic polymers, anionic
polymers, cationic polymers, a nonionic surfactant, an anionic
surfactant, a cationic surfactant, or an amphoteric surfactant.
Alternatively, metals, indium tin oxide (ITO), or the like can also
be used as the antistatic agent. Exemplary materials of a film
having an antistatic effect include an olefin resin, an ABS resin,
a styrene resin, a PMMA resin, a polycarbonate resin, a PVC
polyester resin, a polyamide resin, a modified PPO resin, and the
like.
[0209] Although this embodiment has illustrated the example where a
sensor which is separately prepared is electrically connected to
the semiconductor elements included in the element formation layer
744, the invention is not limited to this structure. For example,
the sensor may be formed over the same substrate 700 as the
semiconductor elements.
[0210] FIG. 23 illustrates the structure of the wireless sensor
device of the invention in which a photoelectric conversion element
767 is formed over the substrate 700. Note that a sensor is not
limited to the photoelectric conversion element, and any of a
resistor, an element which uses capacitive coupling, an element
which uses induced electromotive force, a photovoltaic element, a
thermoelectric conversion element, a transistor, a thermistor, a
diode, and the like can be used.
[0211] Note that this embodiment can be implemented in combination
with any of Embodiment Modes 1 to 3 and Embodiments 1 to 8.
[Embodiment 10]
[0212] This embodiment will describe an example where the wireless
sensor device of the invention is fabricated with transistors
formed on a single-crystalline substrate. Since transistors formed
on a single-crystalline substrate have small variations in
characteristics, the number of transistors used for the wireless
sensor device can be suppressed. In addition, this embodiment
illustrates an example where a thin-film secondary battery
described in Embodiment 5 is used as a battery.
[0213] First, as shown in FIG. 20A, element-isolation insulating
films 2301 for electrically insulating semiconductor elements are
formed using insulating films, over a semiconductor substrate 2300.
The formation of the element-isolation insulating films 2301 allows
a region 2302 for formation of transistors (an element formation
region) and an element formation region 2303 to be electrically
insulated from each other.
[0214] The semiconductor substrate 2300 can be, for example, a
single-crystalline silicon substrate having n-type or p-type
conductivity, a compound semiconductor substrate (e.g., a GaAs
substrate, an InP substrate, a GaN substrate, a SiC substrate, a
sapphire substrate, or a ZnSe substrate), or the like.
[0215] The element-isolation insulating film 2301 can be formed by
a LOCOS (LOCal Oxidation of Silicon) method, a trench isolation
method, or the like.
[0216] In this embodiment, an example is shown in which a
single-crystalline silicon substrate having n-type conductivity is
used as the semiconductor substrate 2300, and a p-well 2304 is
formed in the element formation region 2303. The p-well 2304 formed
in the element formation region 2303 of the semiconductor substrate
2300 can be formed by selectively doping the element formation
region 2303 with an impurity element which imparts p-type
conductivity. As the impurity element which imparts p-type
conductivity, boron (B), aluminum (Al), gallium (Ga), or the like
can be used. In the case of using a semiconductor substrate having
p-type conductivity as the substrate 2300, an n-well region may be
formed by selectively doping the element formation region 2302 with
an impurity element which imparts n-type conductivity.
[0217] Note that in this embodiment, the element formation region
2302 is not doped with an impurity element because a semiconductor
substrate having n-type conductivity is used as the semiconductor
substrate 2300. However, an n-well region may be formed in the
element formation region 2302 by doping the element formation
region 2302 with an impurity element which imparts n-type
conductivity. As the impurity element which imparts n-type
conductivity, phosphorus (P), arsenic (As), or the like can be
used.
[0218] Next, as shown in FIG. 20B, insulating films 2305 and 2306
are formed so as to cover the element formation regions 2302 and
2303, respectively. In this embodiment, silicon oxide films formed
in the element formation regions 2302 and 2303 by thermally
oxidizing the semiconductor substrate 2300 are used as the
insulating films 2305 and 2306. Alternatively, it is also possible
to use stacked layers of a silicon oxide film and a silicon
oxynitride film, which are obtained by sequentially forming a
silicon oxide film by thermal oxidation and forming a silicon
oxynitride film thereon by nitriding the surface of the silicon
oxide film by nitridation treatment, for the insulating films 2305
and 2306.
[0219] Further, as has been previously described, the insulating
films 2305 and 2306 may also be formed by plasma treatment. For
example, by oxidizing or nitriding the surface of the semiconductor
substrate 2300 by high-density plasma treatment, silicon oxide
films or silicon nitride films to be used as the insulating films
2305 and 2306 can be formed in the element formation regions 2302
and 2303, respectively.
[0220] Next, as shown in FIG. 20C, a conductive film is formed so
as to cover the insulating films 2305 and 2306. In this embodiment,
an example is shown in which conductive films 2307 and 2308 that
are sequentially stacked are used. The conductive film may be
either a single layer or a stacked structure of more than two
conductive films.
[0221] For the conductive films 2307 and 2308, metals such as
tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo),
aluminum (Al), copper (Cu), chromium (Cr), and niobium (Nb) can be
used. In addition to such metal films, the conductive films 2307
and 2308 can also be formed using a film made of an alloy
containing the above-described metal as a main component or a
compound containing the above-described metal. Further, it is also
possible to use a semiconductor, e.g., polycrystalline silicon
doped with an impurity element such as phosphorus which imparts one
conductivity type to the semiconductor film. In this embodiment,
the conductive film 2307 is formed using tantalum nitride and the
conductive film 2308 is formed using tungsten.
[0222] Next, as shown in FIG. 21A, the stacked conductive films
2307 and 2308 are patterned into predetermined shapes, whereby gate
electrodes 2309 and 2310 are formed over the insulating films 2305
and 2306, respectively.
[0223] Next, as shown in FIG. 21B, a resist mask 2311 is
selectively formed so as to cover the element formation region
2302. Then, the element formation region 2303 is doped with an
impurity element. In doping the element formation region 2303 with
the impurity element, the gate electrode 2310 as well as the mask
2311 functions as a mask. Therefore, impurity regions 2312
functioning as source and drain regions and a channel formation
region 2313 are formed in the p-well 2304. As the impurity element,
an impurity element which imparts n-type conductivity or p-type
conductivity is used. As the impurity element which imparts n-type
conductivity, phosphorus (P), arsenic (As), or the like can be
used. As the impurity element which imparts p-type conductivity,
boron (B), aluminum (Al), gallium (Ga), or the like can be used. In
this embodiment, phosphorus (P) is used as the impurity
element.
[0224] Next, the mask 2311 is removed, and a resist mask 2314 is
selectively formed so as to cover the element formation region
2303, as shown in FIG. 21C. Then, the element formation region 2302
is doped with an impurity element. In doping the element formation
region 2302 with the impurity element, the gate electrode 2309 as
well as the mask 2314 functions as a mask. Therefore, impurity
regions 2315 functioning as source and drain regions and a channel
formation region 2316 are formed in the element formation region
2302 of the semiconductor substrate 2300. As the impurity element,
an impurity element which imparts n-type conductivity or p-type
conductivity is used. As the impurity element which imparts n-type
conductivity, phosphorus (P), arsenic (As), or the like can be
used. As the impurity element which imparts p-type conductivity,
boron (B), aluminum (Al), gallium (Ga), or the like can be used. In
this embodiment, an impurity element (e.g., boron (B)) having a
different conductivity type than the impurity element that has been
added into the element formation region 2303 in FIG. 21B is
used.
[0225] Next, as shown in FIG. 22A, an insulating film 2317 is
formed so as to cover the insulating films 2305 and 2306 and the
gate electrodes 2309 and 2310. Then, contact holes are formed in
the insulating film 2317 to partially expose the impurity regions
2312 and 2315. Next, conductive films 2318 which are connected to
the impurity regions 2312 and 2315 through the contact holes are
formed. The conductive films 2318 can be formed by a CVD method, a
sputtering method, or the like.
[0226] The insulating film 2317 can be formed using an inorganic
insulating film, an organic resin film, or a siloxane insulating
film. Examples of an inorganic insulating film include silicon
oxide, silicon oxynitride, silicon nitride oxide, a film containing
carbon typified by DLC (diamond-like carbon), and the like.
Examples of an organic resin film include acrylic, epoxy,
polyimide, polyamide, polyvinyl phenol, benzocyclobutene, and the
like. A method of forming the insulating film 2317 can be selected
as appropriate according to a material used, e.g., a CVD method, a
sputtering method, a droplet discharge method, a printing method,
or the like.
[0227] Note that the structure of the transistors used in the
wireless sensor device of the invention is not limited to that
shown in this embodiment. For example, an inversely staggered
structure may be used.
[0228] Next, as shown in FIG. 22B, a thin-film secondary battery
2319 is formed. The thin-film secondary battery 2319 in this
embodiment has a structure in which the conductive film 2318
serving as a current-collecting thin film, a negative electrode
active material layer 2320, a solid electrolyte layer 2321, a
positive electrode active material layer 2322, and a
current-collecting thin film 2323 are sequentially stacked. Note
that the conductive film 2318 should have high adhesion to the
negative electrode active material layer 2320 and have low
resistance, because part of the conductive film 2318 is used as the
current-collecting thin film in this embodiment. The conductive
film 2318 is preferably formed using aluminum, copper, nickel,
vanadium, gold, or the like.
[0229] The structure of the thin-film secondary battery 2319 will
now be described in detail. In the thin-film secondary battery
2319, the negative electrode active material layer 2320 is formed
over the conductive film 2318. Generally, vanadium oxide or the
like is used for the negative electrode active material layer 2320.
Next, a solid electrolyte layer 2321 is formed over the negative
electrode active material layer 2320. Generally, lithium phosphate,
lithium phosphate doped with nitrogen, or the like is used. Next,
the positive electrode active material layer 2322 is formed over
the solid electrolyte layer 2321. Generally, lithium manganate or
the like is used. Lithium cobaltate or lithium nickel oxide may
also be used. Then, the current-collecting thin film 2323 to serve
as an electrode is formed over the positive electrode active
material layer 2322. The current-collecting thin film 2323 should
have high adhesion to the positive electrode active material layer
2322 and have low resistance. For example, aluminum, copper,
nickel, vanadium, gold, or the like can be used.
[0230] Alternatively, the conductive film 2318 or the
current-collecting thin film 2323 may also be formed using a
light-transmissive conductive material such as ITO (Indium Tin
Oxide).
[0231] Each of the above-described thin layers of the negative
electrode active material layer 2320, the solid electrolyte layer
2321, the positive electrode active material layer 2322, and the
current-collecting thin film 2323 may be formed by using either a
sputtering method or an evaporation method. In addition, the
thickness of each layer is preferably 0.1 to 3 .mu.m.
[0232] Next, an interlayer film 2324 is formed using a resin. Then,
the interlayer film 2324 is etched to form contact holes. The
material of the interlayer film is not limited to a resin, and
another film such as a CVD oxide film may also be used. However,
using a resin is preferable in terms of flatness. Further, a
photosensitive resin may also be used so that contact holes can be
formed without etching. Next, wire layers 2325 and 2326 are formed
over the interlayer film. By connecting the wire layer 2325 and the
conductive film 2318, electrical connection of the thin-film
secondary battery 2319 is secured. Further, by connecting the wire
layer 2326 and the conductive film 2318, a sensor can be
electrically connected to the wire layer 2326.
[0233] Although this embodiment has illustrated the example where a
sensor which is separately prepared is electrically connected to
the wire layer 2326, the invention is not limited to this
structure. For example, the sensor may be formed over the
semiconductor substrate 2300. In this case, the sensor can be
formed using any of a resistor, an element which uses capacitive
coupling, an element which uses induced electromotive force, a
photovoltaic element, a thermoelectric conversion element, a
photoelectric conversion element, a transistor, a thermistor, a
diode, and the like.
[0234] By using the above-described fabrication method, the
wireless sensor device of the invention can have a structure in
which a transistor is formed on a semiconductor substrate and a
thin-film secondary battery is formed thereon. With such a
structure, a wireless sensor device that is reduced in thickness
and size can be provided.
[0235] Note that this embodiment can be implemented in combination
with any of Embodiment Modes 1 to 3 and Embodiments 1 to 9.
[0236] The present application is based on Japanese Priority
application No. 2006-263752 filed on Sep. 28, 2006 with the
Japanese Patent Office, the entire contents of which are hereby
incorporated by reference.
* * * * *