U.S. patent application number 17/565070 was filed with the patent office on 2022-04-21 for oscillation device with counter balancer.
This patent application is currently assigned to KOKUSAI KEISOKUKI KABUSHIKI KAISHA. The applicant listed for this patent is KOKUSAI KEISOKUKI KABUSHIKI KAISHA. Invention is credited to Sigeru MATSUMOTO, Hiroshi MIYASHITA, Kazuhiro MURAUCHI.
Application Number | 20220120634 17/565070 |
Document ID | / |
Family ID | |
Filed Date | 2022-04-21 |
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United States Patent
Application |
20220120634 |
Kind Code |
A1 |
MATSUMOTO; Sigeru ; et
al. |
April 21, 2022 |
OSCILLATION DEVICE WITH COUNTER BALANCER
Abstract
An oscillating device includes a vibrating table to which an
oscillated object is to be attached, and an oscillating unit that
oscillates the vibrating table in a predetermined direction. The
vibrating table includes a hollow part in which the oscillated
object is accommodated, a bottom plate, a frame part that protrudes
perpendicularly from an edge portion of the bottom plate, and an
intermediate plate arranged inside the frame part. The intermediate
plate has a shape of a lattice protruding perpendicularly from the
bottom plate.
Inventors: |
MATSUMOTO; Sigeru; (Tokyo,
JP) ; MIYASHITA; Hiroshi; (Tokyo, JP) ;
MURAUCHI; Kazuhiro; (Tokyo, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
KOKUSAI KEISOKUKI KABUSHIKI KAISHA |
Tokyo |
|
JP |
|
|
Assignee: |
KOKUSAI KEISOKUKI KABUSHIKI
KAISHA
Tokyo
JP
|
Appl. No.: |
17/565070 |
Filed: |
December 29, 2021 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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17159447 |
Jan 27, 2021 |
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17565070 |
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16034777 |
Jul 13, 2018 |
10942085 |
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17159447 |
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PCT/JP2017/000978 |
Jan 13, 2017 |
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16034777 |
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International
Class: |
G01M 7/06 20060101
G01M007/06; G01M 7/02 20060101 G01M007/02; B06B 1/04 20060101
B06B001/04 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 15, 2016 |
JP |
2016-006691 |
Jan 15, 2016 |
JP |
2016-006692 |
Jun 30, 2016 |
JP |
2016-131170 |
Oct 19, 2016 |
JP |
2016-205586 |
Claims
1. An oscillating device comprising: a vibrating table to which an
oscillated object is to be attached; and an oscillating unit
configured to oscillate the vibrating table in a predetermined
direction, wherein: the vibrating table includes: a hollow part in
which the oscillated object is configured to be accommodated; a
bottom plate; a frame part that protrudes perpendicularly from an
edge portion of the bottom plate; and an intermediate plate
arranged inside the frame part, the intermediate plate having a
shape of a lattice protruding perpendicularly from the bottom
plate.
2. The oscillating device according to claim 1, wherein the
vibrating table includes: a box part to which a first opening for
inserting and removing the oscillated object in and out of the
hollow part is formed on one face; and a lid part that closes the
first opening.
3. The oscillating device according to claim 2, wherein the
vibrating table has a second opening through which an elongated
object that connects the oscillated object with an external device
is to be inserted.
4. The oscillating device according to claim 1, wherein an
attaching mechanism configured to attach the oscillated object is
provided to a wall part of the vibrating table.
5. The oscillating device according to claim 1, wherein a center of
gravity of the vibrating table is positioned at a center of an
outer shape of the vibrating table.
6. The oscillating device according to claim 1, wherein the hollow
part is formed at a central portion of the vibrating table.
7. The oscillating device according to claim 1, wherein the
oscillating unit includes an X-axis oscillating unit configured to
oscillate the vibrating table in an X-axis direction, which is a
horizontal direction.
8. The oscillating device according to claim 7, wherein the
oscillating unit includes a Y-axis oscillating unit configured to
oscillate the vibrating table in a Y-axis direction, which is a
horizontal direction perpendicular to the X-axis direction.
9. The oscillating device according to claim 1, wherein the
oscillating unit includes a Z-axis oscillating unit configured to
oscillate the vibrating table in a Z-axis direction, which is a
vertical direction.
10. The oscillating device according to claim 1, wherein an
attaching mechanism configured to attach the oscillated object is
provided to the bottom plate.
11. The oscillating device according to claim 1, wherein a
projection of a center of gravity of the vibrating table to a
projection plane perpendicular to the predetermined direction is
included in the projection of a movable part of the oscillating
unit to the projection plane.
12. A vibrating table for an oscillating device, the vibrating
table comprising: a hollow part in which an oscillated object is
configured to be accommodated; a bottom plate; a frame part that
protrudes perpendicularly from an edge portion of the bottom plate;
and an intermediate plate arranged inside the frame part, the
intermediate plate having a shape of a lattice protruding
perpendicularly from the bottom plate.
13. The vibrating table according to claim 12, further comprising:
a box part to which a first opening for inserting and removing the
oscillated object in and out of the hollow part is formed on one
face; and a lid part that closes the first opening.
14. The vibrating table according to claim 13, wherein the
vibrating table has a second opening through which an elongated
object configured to connect the oscillated object with an external
device is to be inserted.
15. The vibrating table according to claim 12, wherein an attaching
mechanism configured to attach the oscillated object is provided to
a wall part of the vibrating table.
16. A method for oscillating a vibrating table to which an
oscillated object is attached with an oscillating unit in a
predetermined direction, the method comprising: using the
oscillating device according to claim 1; attaching the oscillated
object to the vibrating table such that a projection of a center of
gravity of the oscillated object to a projection plane
perpendicular to the predetermined direction is included in the
projection of a movable part of the oscillating unit to the
projection plane; and oscillating the vibrating table.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This is a Continuation of U.S. patent application Ser. No.
17/159,447 filed on Jan. 27, 2021, which is a Continuation of U.S.
patent application Ser. No. 16/034,777 filed on Jul. 13, 2018,
which is a Continuation-in-Part of International Application No.
PCT/JP2017/000978 filed on Jan. 13, 2017, which claims priority
from Japanese Patent Application No. 2016-006691 filed on Jan. 15,
2016, Japanese Patent Application No. 2016-006692 filed on Jan. 15,
2016, Japanese Patent Application No. 2016-131170 filed on Jun. 30,
2016, and Japanese Patent Application No. 2016-205586 filed on Oct.
19, 2016. The entire disclosures of the prior applications are
incorporated herein by reference.
TECHNICAL FIELD
[0002] The present disclosure relates to oscillating devices and
electrodynamic actuators for vibration tests and the like.
BACKGROUND
[0003] A triaxial simultaneous oscillating device (triaxial
simultaneous vibration test device) that oscillates a vibrating
table, on which an oscillated object (e.g., a specimen for a
vibration test) is fixed, simultaneously in three orthogonal axis
directions (X-axis direction, Y-axis direction and Z-axis
direction) is known. To oscillate the vibrating table
simultaneously in three orthogonal axis directions, for example,
the vibrating table and a Z-axis actuator for oscillating the
vibrating table in the Z-axis direction need to be coupled slidably
in the X-axis direction and the Y-axis direction with a biaxial
slider (XY slider).
[0004] An oscillating device that enables triaxial simultaneous
oscillation at a frequency range ranging up to several hundreds Hz
by such as the use of a rolling guide type linear guideway
(Hereinafter simply referred to as "linear guide.") as the biaxial
slider is conventionally known.
[0005] Also, an oscillating device that enables triaxial
simultaneous oscillation at a frequency range exceeding 1 kHz by
such as the use of rollers as rolling bodies to improve a rigidity
of the linear guide is conventionally known.
SUMMARY
[0006] In onboard devices or the like, the triaxial simultaneous
vibration test at a high frequency range of equal to or more than 2
kHz is desired, but no oscillating device that enables the triaxial
simultaneous vibration test at frequencies of equal to or more than
2 kHz had been realized until now. As a result of the inventor's
analysis, it has been proved that a rigidity and a motion accuracy
(rectilinearity) of the linear guide need to be further improved to
further reduce vibration noises in order to realize the triaxial
simultaneous vibration test at frequencies of equal to or more than
2 kHz.
[0007] Aspects of the present disclosure are advantageous to
provide one or more improved techniques, for an oscillating device
and an electrodynamic actuator, which make it possible to reduce
vibration noises.
[0008] According to aspects of the present disclosure, there is
provided an oscillating device including a vibrating table, an
actuator configured to oscillate the vibrating table in a first
direction, a coupling mechanism configured to couple the vibrating
table with the actuator in such a manner that the vibrating table
is movable relative to the actuator in a second direction
orthogonal to the first direction, and a counter balancer attached
to the vibrating table and configured to compensate an imbalance of
an oscillated portion including at least the vibrating table, the
imbalance being caused by attaching the coupling mechanism to the
vibrating table.
[0009] According to aspects of the present disclosure, further
provided is an oscillating device including a vibrating table, an
X-axis actuator configured to oscillate the vibrating table in an
X-axis direction, a Y-axis actuator configured to oscillate the
vibrating table in a Y-axis direction, a Z-axis actuator configured
to oscillate the vibrating table in a Z-axis direction, the X-axis
direction, the Y-axis direction and the Z-axis direction being
orthogonal to each other, a YZ coupling mechanism configured to
couple the vibrating table with the X-axis actuator in such a
manner that the vibrating table is movable relative to the X-axis
actuator in the Y-axis direction and the Z-axis direction, a ZX
coupling mechanism configured to couple the vibrating table with
the Y-axis actuator in such a manner that the vibrating table is
movable relative to the Y-axis actuator in the Z-axis direction and
the X-axis direction, an XY coupling mechanism configured to couple
the vibrating table with the Z-axis actuator in such a manner that
the vibrating table is movable relative to the Z-axis actuator in
the X-axis direction and the Y-axis direction, a first counter
balancer attached to the vibrating table and configured to
compensate a first imbalance of an oscillated portion including at
least the vibrating table, the first imbalance being caused by
attaching the YZ coupling mechanism to the vibrating table, a
second counter balancer attached to the vibrating table and
configured to compensate a second imbalance of the oscillated
portion, the second imbalance being caused by attaching the ZX
coupling mechanism to the vibrating table, and a third counter
balancer attached to the vibrating table and configured to
compensate a third imbalance of the oscillated portion, the third
imbalance being caused by attaching the XY coupling mechanism to
the vibrating table.
[0010] According to aspects of the present disclosure, further
provided is an oscillating device including a vibrating table, an
actuator configured to oscillate the vibrating table in a first
direction, and a coupling mechanism configured to couple the
vibrating table with the actuator in such a manner that the
vibrating table is movable relative to the actuator in a second
direction orthogonal to the first direction. The vibrating table
includes a predetermined imbalance previously provided thereto, the
predetermined imbalance being set to make a center of gravity of an
oscillated portion to be oscillated by the actuator positionally
coincide with a center of an outer shape of the vibrating table,
the oscillated portion including the vibrating table and a part of
the coupling mechanism.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] FIG. 1 is a front view of an oscillating device according to
the first embodiment of the present disclosure.
[0012] FIG. 2 is a side view of the oscillating device according to
the first embodiment of the present disclosure.
[0013] FIG. 3 is a plan view of the oscillating device according to
the first embodiment of the present disclosure.
[0014] FIG. 4 is a block diagram of a drive control system of the
oscillating device according to embodiments of the present
disclosure.
[0015] FIG. 5 is a front view of a Z-axis oscillating unit
according to the first embodiment of the present disclosure.
[0016] FIG. 6 is a side view of the Z-axis oscillating unit
according to the first embodiment of the present disclosure.
[0017] FIG. 7 is a plan view of the Z-axis oscillating unit
according to the first embodiment of the present disclosure.
[0018] FIG. 8 is a longitudinal section view of a vertical drive
electrodynamic actuator according to the first embodiment of the
present disclosure.
[0019] FIG. 9 is an external view of a movable part of the vertical
actuator.
[0020] FIG. 10 is an external view of an expansion frame.
[0021] FIG. 11 is an enlarged longitudinal section view around a
neutral spring mechanism of a horizontal drive electrodynamic
actuator according to the first embodiment of the present
disclosure.
[0022] FIG. 12 is a plan view of an XY slider according to the
first embodiment of the present disclosure.
[0023] FIG. 13 is a side view of a cross guide according to
embodiments of the present disclosure.
[0024] FIG. 14 is a plan view of an A-type linear guide according
to embodiments of the present disclosure.
[0025] FIG. 15 is a side view of the A-type linear guide according
to embodiments of the present disclosure.
[0026] FIG. 16 is a front view of the A-type linear guide according
to embodiments of the present disclosure.
[0027] FIG. 17 is a cross sectional view of the A-type linear guide
according to embodiments of the present disclosure.
[0028] FIG. 18 is a diagram showing a section I-I of FIG. 17.
[0029] FIG. 19 is an illustration diagram of a retainer.
[0030] FIG. 20 is a side view of an X-axis oscillating unit
according to the first embodiment of the present disclosure.
[0031] FIG. 21 is a front view of the X-axis oscillating unit
according to the first embodiment of the present disclosure.
[0032] FIG. 22 is an enlarged view of the YZ slider shown in FIG.
21.
[0033] FIG. 23 is a plan view around a vibrating table of the
oscillating device according to the first embodiment of the present
disclosure.
[0034] FIG. 24 is an enlarged side view around a spring mechanism
of a horizontal drive electrodynamic actuator according to the
first embodiment of a supporting unit.
[0035] FIG. 25 is a sectional view of an X-axis counter
balancer.
[0036] FIG. 26 is a sectional view of a Z-axis counter
balancer.
[0037] FIG. 27 is an enlarged plan view showing bolt fixing
positions of the Z-axis counter balancer.
[0038] FIG. 28 shows relative acceleration spectra in the X-axis
direction measured at four corners of an upper surface of the
vibrating table.
[0039] FIG. 29 shows relative acceleration spectra in the Y-axis
direction measured at four corners of an upper surface of the
vibrating table.
[0040] FIG. 30 shows relative acceleration spectra in the Z-axis
direction measured at four corners of an upper surface of the
vibrating table.
[0041] FIG. 31 is a diagram showing acceleration monitoring points
on the Z-axis counter balancer.
[0042] FIG. 32 is a sectional view of a variation of the X-axis
counter balancer.
[0043] FIG. 33 is an external view of the X-axis counter
balancer.
[0044] FIG. 34 is a plan view of a variation of the XY slider.
[0045] FIG. 35 is a diagram illustrating behaviors of the cross
guide.
[0046] FIG. 36 is a plan view of the vibrating table according to
the first embodiment of the present disclosure.
[0047] FIG. 37 is a front view of the vibrating table according to
the first embodiment of the present disclosure.
[0048] FIG. 38 is a left side view of the vibrating table according
to the first embodiment of the present disclosure.
[0049] FIG. 39 is a left side view of the vibrating table according
to the first embodiment of the present disclosure.
[0050] FIG. 40 is an enlarged perspective view around the vibrating
table of the oscillating device according to the second embodiment
of the present disclosure.
[0051] FIG. 41 is an enlarged perspective view around the vibrating
table of the oscillating device according to the third embodiment
of the present disclosure.
[0052] FIG. 42 is an enlarged front view around the vibrating table
of the oscillating device according to the fourth embodiment of the
present disclosure.
[0053] FIG. 43 is an enlarged side view around the vibrating table
of the oscillating device according to the fourth embodiment of the
present disclosure.
[0054] FIG. 44 is an enlarged plan view around the vibrating table
of the oscillating device according to the fourth embodiment of the
present disclosure.
[0055] FIG. 45 is a perspective view of the oscillating device
according to the fifth embodiment of the present disclosure.
[0056] FIG. 46 is a diagram showing a distal end of a Y-axis
oscillating unit to which a ZX slider according to the fifth
embodiment is attached.
[0057] FIG. 47 is a side view around the XY slider according to the
fifth embodiment.
[0058] FIG. 48 is a cross sectional view of the linear guide
according to the fifth embodiment.
[0059] FIG. 49 is a diagram showing of a section I-I of FIG.
48.
[0060] FIG. 50 is a diagram illustrating arrangements of rails
attached to a top plate of a movable part of the Z-axis oscillating
unit according to the fifth embodiment.
[0061] FIG. 51 is a front view of an electrodynamic triaxial
oscillating device according to the sixth embodiment of the present
disclosure.
[0062] FIG. 52 is a perspective view of a frame 6322 according to
the sixth embodiment of the present disclosure.
[0063] FIG. 53 is a perspective view of the frame 6322 according to
the sixth embodiment of the present disclosure.
[0064] FIG. 54 is a plan view of the vibrating table to which an
initial imbalance is provided.
[0065] FIG. 55 is a front view of the vibrating table to which an
initial imbalance is provided.
DETAILED DESCRIPTION OF EMBODIMENTS
[0066] Hereinafter, embodiments according to the present disclosure
will be described with reference to the accompanying drawings. In
the following description, the same or corresponding numerals are
assigned to the same or corresponding components, and redundant
descriptions will be herein omitted.
First Embodiment
[0067] FIG. 1 is a front view of a mechanism part 10 of an
electrodynamic triaxial oscillating device 1 (Hereinafter
abbreviated to "oscillating device 1.") according to the first
embodiment of the present disclosure. In the following description,
a left right direction in FIG. 1 is referred to as X-axis direction
(with the left direction as X-axis positive direction), an up-down
direction in FIG. 1 is referred to as Z-axis direction (with the
upward direction as Z-axis positive direction), and a direction
perpendicular to the paper in FIG. 1 is referred to as Y-axis
direction (with a direction going from the backside to the front
side of the paper as Y-axis positive direction). It is noted that,
in the present embodiment, the Z-axis direction is a vertical
direction, and the X-axis direction and the Y-axis direction are
horizontal directions. FIG. 2 and FIG. 3 are a left side view and a
plan view of the mechanism part 10 of the oscillating device 1,
respectively.
[0068] As shown in FIG. 1, the mechanism part 10 of the oscillating
device 1 includes a substantially box-like vibrating table 400 to
which a specimen (not shown) is to be fixed in a state where the
specimen is housed inside the vibrating table 400, three
oscillating units (X-axis oscillating unit 100, Y-axis oscillating
unit 200 and Z-axis oscillating unit 300) which oscillate the
vibrating table 400 in the X-axis direction, the Y-axis direction
and the Z-axis direction, respectively, and a device base 500 to
which the oscillating units 100, 200 and 300 are attached.
[0069] The oscillating units 100, 200 and 300 are linear motion
oscillating units each including an electrodynamic actuator (voice
coil motor).
[0070] The X-axis oscillating unit 100 is coupled to the vibrating
table 400 via a biaxial slider (YZ slider 160) being a slide
coupling mechanism. The YZ slider 160 is configured to be able to
accurately transmit vibration of the X-axis oscillating unit 100 to
the vibrating table 400 while permitting relative movement
(sliding) between the X-axis oscillating unit 100 and the vibrating
table 400 in two directions (Y-axis direction and Z-axis direction)
orthogonal to an oscillating direction (X-axis direction) of the
X-axis oscillating unit 100. Similarly, the Y-axis oscillating unit
200 and the Z-axis oscillating unit 300 are coupled to the
vibrating table 400 via a ZX slider 260 and an XY slider 360 being
biaxial sliders, respectively. With this configuration, the
oscillating device 1 is capable of oscillating the vibrating table
400 and the specimen fixed to the vibrating table 400 in the three
orthogonal axis directions simultaneously and independently using
the oscillating units 100, 200 and 300.
[0071] FIG. 4 is a block diagram showing a brief configuration of a
drive control system 1a of the oscillating device 1. The drive
control system la includes a control part 20 configured to control
operations of the whole device, a measuring part 30 configured to
measure vibration of the vibrating table 400, a power source 40
configured to supply electrical power to each part of the
oscillating device 1, and an interface part 50 configured to
perform input from and output to the outside.
[0072] The interface part 50 includes, for example, one or more of
a user interface for performing input from and output to a user, a
network interface for connecting with every kind of networks such
as a LAN (Local Area Network), and every kind of communication
interfaces such as a USB (Universal Serial Bus) or a GPIB (General
Purpose Interface Bus) for connecting with outside devices. Also,
the user interface includes, for example, one or more of every kind
of manipulation switches, indicators, every kind of display devices
such as an LCD (Liquid Crystal Display), every kinds of pointing
devices such as a mouse or a touch-pad, and every kind of input and
output devices such as touch screens, video cameras, printers,
scanners, buzzers, speakers, microphones and memory card readers
and writers.
[0073] The measuring part 30 includes a triaxial vibration sensor
(triaxial vibration pickup) 32 attached to the vibrating table 400,
and performs amplification and digital conversion to signals
outputted by the triaxial vibration sensor 32 (e.g., acceleration
signals or velocity signals) and sends them to the control part 20.
It is noted that the triaxial vibration sensor 32 detects
vibrations in the X-axis direction, the Y-axis direction and the Z
axis direction independently. Also, the measuring part 30
calculates every kind of parameters indicating a vibrating state of
the vibrating table 400 (e.g., including one or more of velocity,
acceleration, jerk, acceleration level (vibration level),
amplitude, power spectral density and the like) on the basis of the
signals from the triaxial vibration sensor 32 and sends them to the
control part 20. The control part 20 can oscillate the vibrating
table 400 in desired amplitudes and frequencies by controlling
magnitudes and frequencies of alternating currents to be inputted
to a drive coil of each of the oscillating units 100, 200 and 300
(which will be described later) on the basis of oscillation
waveforms input via the interface part 50 and/or data input from
the measuring part 30.
[0074] Next, structures of each of the oscillating units 100, 200
and 300 will be described. As will be described later, the X-axis
oscillating unit 100 and the Y-axis oscillating unit 200 includes
horizontal drive electrodynamic actuators (Hereinafter simply
referred to as "horizontal actuator.") 100A and 200A, respectively.
Also, the Z-axis oscillating unit 300 includes a vertical drive
electrodynamic actuator (Hereinafter simply referred to as
"vertical actuator.") 300A.
[0075] FIGS. 5, 6 and 7 are a front view, left side view and plan
view of the Z-axis oscillating unit 300 (and the vibrating table
400), respectively.
[0076] The vertical actuator 300A includes an air spring 330 (FIG.
8) for supporting weights (static loads) of the specimen and the
vibration table. On the other hand, the horizontal actuators 100A
and 200A include neutral spring mechanisms 130 (FIG. 11) and 230
(not shown), respectively, that apply restoring forces for bringing
the vibrating table back to a neutral position (origin, reference
position). Since the configurations of the horizontal actuators
100A and 200A are identical to the vertical actuator 300A apart
from the neutral spring mechanisms 130 and 230 being provided
instead of the air spring 330 and specific structures of a
supporting unit 350 and supporting units 150, 250, which will be
described later, differing from each other, the detailed
configuration of the vertical actuator 300A will be described on
behalf of each of the actuators.
[0077] As shown in FIG. 8, the vertical actuator 300A includes a
fixing part 310 having a tubular body 312 and a movable part 320 of
which a lower portion thereof is accommodated inside the tube of
the fixing part 310. The movable part 320 can move in the vertical
direction (Z-axis direction) with respect to the fixing part
310.
[0078] FIG. 9 is an external view showing a brief configuration of
the movable part 320. The movable part 320 includes a main frame
322 having a substantially cylindrical shape, a drive coil 321
coaxially attached to a lower end portion of the main frame 322,
and a rod 326 (FIG. 8) extending downward from the center of a
lower surface of the main frame. Also, an expansion frame 324
having a diameter substantially equal to a diameter of the main
frame 322 is coaxially attached to an upper end portion of the main
frame 322.
[0079] The main frame 322 includes a substantially disk-shaped top
plate 322a arranged perpendicularly to the drive direction (Z-axis
direction), a tubular main column 322c extending perpendicularly
(in the drive direction) from the center of a lower surface of the
top plate 322a, and eight ribs 322b, each having a substantially
rectangular flat plate shape, radially attached to an outer
periphery of the main column 322c. By the main column 322c and the
eight ribs 322b, a substantially tubular torso portion of the main
frame 322 is formed. The eight ribs 322b are arranged around the
main column 322c at regular intervals in a circumferential
direction. By coupling the top plate 322a and the main column 322c
with the eight ribs 322b arranged as described above, sufficient
rigidity is given to the main frame 322. The top plate 322a, the
ribs 322b and the main column 322c are integrally coupled to each
other by welding or the like.
[0080] An outer periphery side of a lower end portion of each of
the ribs 322b protrudes downwardly and forms a coil attaching part
322d. The coil attaching parts 322d of the eight ribs 322b are
inserted into an upper end portion of the drive coil 321, and the
drive coil 321 is attached to the main frame 322.
[0081] As shown in FIG. 8, to the main column 322c, the rod 326 is
fitted from below. A lower portion of the rod 326 protrudes
downwardly from the main column 322c. Also, to the top plate 322b,
the expansion frame 324 is attached.
[0082] FIG. 10 is an external view of the expansion frame 324. As
shown in FIG. 10, the expansion frame 324 includes a torso portion
324a having a diameter substantially equal to the diameter of the
main frame 322, and a top plate 324b attached horizontally on an
upper end of the torso portion 324a. The top plate 324b is a member
having a substantially rectangular flat plate shape with a width
(dimension in the X-axis direction) and a depth (dimension in the
Y-axis direction) equal to or larger than the outer diameter of the
torso portion 324a.
[0083] On an upper surface of the top plate 324b of the expansion
frame 324, six streaks of grooves (pairs of perpendicular level
differences 324b1) extending in a lattice in the X-axis direction
and the Y-axis direction are formed. Along the level differences
324b1 on one side of respective grooves, rails 364a of as many as
one half the number of the XY sliders 360 (in the present
embodiment, nine rails), which will be described later, are
arranged. That is, the level differences 324b1 are positioning
structures for attaching the rails 364a at accurate positions on
the top plate 324b. By providing the level differences 324b1, it
becomes possible to place the nine rails 364a on the top plate 324b
with high parallelism/perpendicularity only by simply attaching the
rails 364a along the level differences 324b1. It is noted that a
plurality of screw holes 324b2 for fixing the rails 364a with bolts
are formed on the bottom of each groove.
[0084] On each of both side surfaces of the torso portion 324a in
the X-axis direction and the Y-axis direction, a level difference
324a1 and a plurality of screw holes 324a2 for positioning and
fixing a Z-axis rail 344a of a movable part support mechanism 340,
which will be described later, are formed. Also, on a lower surface
of the torso portion 324a, a recess 324a3 is formed. The expansion
frame 324 is fixed to the main frame 322 with bolts in a state
where the top plate 322a of the main frame 322 is fitted in this
recess 324a3.
[0085] Inside the tubular body 312 of the fixing part 310, a
substantially tubular shaped inner magnetic pole 316 arranged
coaxially with the tubular body 312 is fixed. The tubular body 312
and the inner magnetic pole 316 are both formed of magnetic
substances. An outer diameter of the inner magnetic pole 316 is
smaller than an inner diameter of the drive coil 321, and the drive
coil 321 is arranged in a gap between an outer peripheral surface
of the inner magnetic pole 316 and an inner peripheral surface of
the tubular body 312. Also, inside the tube of the inner magnetic
pole 316, a bearing 318 configured to support the rod 326 movably
only in the Z-axis direction is fixed.
[0086] A plurality of recesses 312b are formed on the inner
peripheral surface 312a of the tubular body 312, and an excitation
coil 314 is accommodated in each of the recesses 312b. When direct
current (exciting current) is supplied to the exciting coils 314,
magnetic fields in radial directions of the tubular body 312 such
as shown in arrows A are generated at positions where the inner
peripheral surface 312a of the tubular body 312 and the outer
peripheral surface of the inner magnetic pole 316 are closely
opposing to each other. If a drive current is supplied to the drive
coil 321 in this state, Lorentz force acting in the axial direction
of the drive coil 321, that is, in the Z-axis direction, is
generated and the movable part 320 is driven in the Z-axis
direction.
[0087] Also, the air spring 330 is accommodated in the tube of the
inner magnetic pole 316. A lower end of the air spring 330 is fixed
to the tubular body 312. Also, a flange portion formed on the rod
326 is placed on and upper surface of the air spring 330. That is,
the air spring 330 supports the main frame 322 from below via the
rod 326. More specifically, weights (static loads) of the movable
part 320 and the XY slider 360, the vibrating table 400, an X-axis
counter balancer 610, a Y-axis counter balance part 620 and a
Z-axis counter balancer 630 which will be described later, and the
specimen supported by the movable part 320 are supported by the air
spring 330. Therefore, the need to support the weights (static
loads) of the movable parts 320, the vibrating table 400 and the
like by the drive force (Lorentz force) of the Z-axis oscillating
unit 300 is eliminated by providing the air spring 330 to the
Z-axis oscillating unit 300 and only dynamic load for oscillating
the movable part 320 and the like needs to be supplied, and thus
drive current to be supplied to the Z-axis oscillating unit 300
(i.e., power consumption) is reduced. Also, since the drive coil
321 can be downsized due to the reduction of the necessary drive
force, the weight of the movable part 320 can be reduced and thus
the Z-axis oscillating unit 300 can be driven in a higher
frequency. Furthermore, since the need to supply a large direct
current component for supporting the weights of the movable part
320, the vibrating table 400 and the like to the drive coil 321 is
eliminated, a power source having a smaller and simpler
configuration can be adopted as the power source 40.
[0088] Also, when the movable part 320 of the Z-axis oscillating
unit 300 is driven, the fixing part 310 also receives a strong
reaction force (oscillating force) in the drive axis (Z-axis)
direction. The oscillating force transmitted from the movable part
320 to the fixing part 310 is alleviated by providing the air
spring 330 between the movable part 320 and the fixing part 310.
Therefore, for instance, vibration of the movable part 320 is
prevented from being transmitted to the vibrating table 400 via the
fixing part 310, the device base 500 and the oscillating units 100
and 200 as noise components.
[0089] Now, a configuration of the horizontal actuator 100A will be
described. As described above, the horizontal actuator 100A differs
from the vertical actuator 300A in that the horizontal actuator
100A includes the neutral spring mechanism 130 (FIG. 11) instead of
the air spring 330 (FIG. 8) and in the specific structures of the
supporting unit 150, but other basic configurations are in common.
It is noted that, similarly to the air spring 330, the neutral
spring mechanism 130 is a cushioning device that elastically
couples a fixing part 110 and a movable part 120 of the horizontal
actuator 100A. Also, the horizontal actuator 200A has the same
configuration as the horizontal actuator 100A described below.
[0090] FIG. 11 is an enlarged longitudinal section view around the
neutral spring mechanism 130 of the horizontal actuator 100A.
Inside a broken line frame is a back view of the neutral spring
mechanism 130 viewed toward the X-axis positive direction.
[0091] The neutral spring mechanism 130 includes an U-shaped stay
131, a rod 132, a nut 133 and a pair of compression coil springs
134 and 135 (elastic component). The U-shaped stay 131 is fixed to
the bottom portion of the fixing part 110 (right end portion in
FIG. 11) at flange portions 131a formed at both ends of the
U-shape. Also, at the center of a bottom portion 131b of the
U-shaped stay 131 (left end portion in FIG. 11), a through hole
131b1 through which the rod 132 extending in the X-axis direction
is inserted is provided.
[0092] A flange portion 132b is provided at an end (left end in
FIG. 11) of the rod 132, and the rod 132 is coupled to a tip (right
end in FIG. 11) of a rod 122a of the movable part 120 via the
flange portion 132b. Also, a male screw portion 132a that engages
with the nut 133 is formed on the other end portion (right end
portion in FIG. 11) of the rod 132.
[0093] The pair of the coil springs 134 and 135 are put on the rod
132. One coil spring 134 is retained by being nipped between a
flange portion of the nut 133 and the bottom portion 131b (elastic
component supporting plate) of the U-shaped stay 131. The other
coil spring 135 is retained by being nipped between the bottom
portion 131b of the U-shaped stay 131 and the flange portion 132b
of the rod 132. A preload is applied to the pair of the coil
springs 134 and 135 by the tightening of the nut 133. A position
where restoring forces of the pair of the coil springs 134 and 135
balance is a neutral position (or origin or reference position) of
the movable part 120 of the horizontal actuator 100A in the movable
direction (X-axis direction). When the movable part 120 moves away
from the neutral position, a restoring force that moves the movable
part 120 back to the neutral position acts on the movable part 120
by the neutral spring mechanism 130 (directly by the pair of the
coil springs 134 and 135). Accordingly, it becomes possible to
reciprocally drive the movable part 120 in the X-axis direction
with the neutral position always as the reference position of the
reciprocation, and thus a problem that a position of the movable
part 120 sways while driving is overcome.
[0094] Next, returning back to the description of the vertical
actuator 300A, a configuration of a movable part support mechanism
340 supporting an upper portion of the movable part 320 from a side
thereof slidably in the axial direction will be described.
[0095] As shown in FIG. 6 and FIG. 8, the movable part 320 of the
vertical actuator 300A is supported from the sides thereof movably
only in the drive direction (Z-axis direction) by four movable part
support mechanisms 340 arranged at regular intervals around the
movable part 320.
[0096] The movable part support mechanism 340 of the present
embodiment includes an angle plate 342 and a Z-axis linear guide
344. Also, the Z-axis linear guide 344 includes the Z-axis rail
344a and a Z-axis carriage 344b. It is noted that, in the present
embodiment, as the Z-axis linear guide 344, a linear guide having a
configuration identical to an A-type linear guide 364A (FIGS.
14-19) which will be described later is used. It is noted that a
linear guide is a mechanism that guides a linear motion, and the
Z-axis linear guide 344 guides a linear motion in the Z-axis
direction.
[0097] On a side face of the torso portion 324a of the expansion
frame 324 of the movable part 320, four Z-axis rails 344a of the
movable part support mechanisms 340 extending in the Z-axis
direction are attached at regular intervals in a circumferential
direction. It is noted that, in the present embodiment, as shown in
FIG. 3 and FIG. 7, two pairs of the movable part support mechanisms
340 are arranged to respectively oppose to each other in horizontal
directions forming an angle of 45 degrees with respect to the
X-axis direction and the Y-axis direction, but for convenience of
explanation, in other drawings, the two pairs of the movable part
support mechanisms 340 are shown to oppose in the X-axis direction
and the Y-axis direction, respectively. Also, the number and
arrangement of the movable part support mechanisms 340 are not
limited to those of the configuration of the present embodiment,
but, for example, configurations in which the movable part 320 is
supported by three or more sets of the movable part support
mechanisms 340 arranged substantially at regular intervals around
the movable part 320 are preferable.
[0098] On a top face of the fixing part 310 (tubular body 312),
four angle plates 342 are fixed at regular intervals (90 degree
intervals) along the inner peripheral surface of the tubular member
312. The angle plate 342 is a fixing member having an U-shaped (or
L-shaped) cross-section and reinforced with a rib. To a vertical
portion 342u of each of the angle plates 342, the Z-axis carriage
344b that engages with the Z-axis rail 344a is fixed.
[0099] The Z-axis carriage 344b has a plurality of balls RE (which
will be described later) as rolling bodies and configures the
Z-axis linear guide 344, being a rolling guide, together with the
Z-axis rail 344a. That is, the movable part 320 is supported
slidably only in the Z-axis direction, at the upper portion of the
expansion frame 324, from its sides by four sets of supporting
structures (movable part support mechanisms 340) each constituted
of the angle plate 342 and the Z-axis linear guide 344 and is
configured not to move in the X-axis direction and the Y-axis
direction. Therefore, cross talks that occur due to vibrations of
the movable part 320 in the X-axis direction and the Y-axis
direction are prevented. Also, the movable part 320 can move
smoothly in the Z-axis direction by the use of the Z-axis linear
guide 344 (rolling guide). Furthermore, since, as described above,
the movable part 320 is also supported, at its lower portion, by
the bearing 318 movably only in the Z-axis direction, rotations
about the X axis, the Y axis and the Z axis are also restricted,
and thus unnecessary vibrations (vibrations other than the
controlled translation in the Z-axis direction) hardly occur.
[0100] Also, in general use modes of the linear guides, the rail is
attached to the fixed side, and the carriage is attached to the
movable side. However, in the present embodiment, contrary to the
general use modes, the Z-axis rail 344a is attached to the movable
part 320 and the Z-axis carriage 344b is attached to the angle
plate 342. Unnecessary vibrations are suppressed by adopting such
an anomalous attachment structure. This is because, since the
Z-axis rail 344a is lighter than the Z-axis carriage 344b, longer
in length in the driving direction (Z-axis direction) (and
therefore smaller in mass per unit length), and mass distribution
is uniform in the driving direction, mass distribution change when
the Z-axis oscillating unit 300 is driven is smaller if the Z-axis
rail 344a is fixed to the movable part 320, and vibrations that
occur due to the mass distribution change can be suppressed. Also,
since the center of gravity of the Z-axis rail 344a is lower than
that of the Z-axis carriage 344b (i.e., a distance between an
installation surface and the center of gravity is shorter), an
inertia moment becomes smaller if the Z-axis rail 344a is fixed to
the movable side. Therefore, due to this configuration, it becomes
possible to make a resonance frequency of the fixing part 310
sufficiently higher than oscillating frequency bands (e.g., equal
to or more than 0-2000 Hz), and thus a decrease in an oscillating
accuracy due to resonance is suppressed.
[0101] Next, a configuration of the XY slider 360 that couples the
Z-axis oscillating unit 300 and the vibrating table 400 will be
described.
[0102] FIG. 12 is a plan view illustrating the configuration of the
XY slider 360. As shown in FIG. 5, FIG. 6 and FIG. 12, the XY
slider 360 according to the present embodiment consists of nine
cross guides 364 (364L1-L3, 364M1-M3, 364R1-R3) arranged at regular
intervals in the X-axis direction and the Y-axis direction. Each of
these nine cross guides 364 couples the Z-axis oscillating unit 300
(specifically, the movable part 320 of the vertical actuator 300A)
and the vibrating table 400 slidably in the X-axis direction and
the Y-axis direction with low resistance.
[0103] FIG. 13 is a side view of the cross guide 364. The cross
guide 364 is a cross guide in which top faces of carriages of an
A-type linear guide 364A and a B-type linear guide 364B are
superimposed and fixed together such that their movable directions
bisect at right angles. As will be described later, since the
carriages of the A-type linear guide 364A and the B-type linear
guide 364B are formed to be slightly longer in their moving
directions, a mass distribution in a length (L) direction and a
mass distribution in a width (W) direction differ from each other,
and this may become a factor that causes a directionality in
oscillating performance of the oscillating device 1. In the present
embodiment, the carriages of the A-type linear guide 364A and the
B-type linear guide 364B are directly fixed together while
orienting the length direction of one of the two in the width
direction of the other to form a cross carriage (a carriage of the
cross guide 364). Due to this configuration, the mass distribution
directionalities of the A-type linear guide 364A and the B-type
linear guide 364B are offset to respectable degrees and thereby a
cross carriage with small mass distribution directionality can be
obtained. The directionality in the oscillating performance of the
oscillating device 1 is alleviated by using such cross carriages.
Details of the A-type linear guide 364A and the B-type linear guide
364B will be described later.
[0104] In FIG. 12, among a pair of linear guides (an X-axis linear
guide 364X slidable in the X-axis direction and a Y-axis linear
guide 364Y slidable in the Y-axis direction) configuring each cross
guide 364, the one arranged on the vibrating table 400 side is
indicated with solid lines, and the one arranged on the Z-axis
oscillating unit 300 side is indicated with broken lines. Focusing
on the linear guides on the vibrating table 400 side indicated with
solid lines, first orientation cross guides 364P (cross guides
364M1, 364L2, 364R2, 364M3) of which the X-axis linear guides 364X
are attached to the vibrating table 400 and second orientation
cross guides 364 (cross guides 364L1, 364R1, 364M2, 364L3, 364R3)
of which the Y-axis linear guides 364Y are attached to the
vibrating table 400 are mixed. Furthermore, in each of the X-axis
direction and the Y-axis direction, orientations of adjacent cross
guides 364 are made to alternate. That is, the first orientation
cross guides 364P and the second orientation cross guides 364 are
alternately arranged in each of the X-axis direction and the Y-axis
direction. By arranging the cross guides 364 while alternating
their orientation as described above, the mass distribution
directionalities of the cross guides 364 are averaged and thereby
the oscillating performance with smaller directionality is
realized.
[0105] Next, details of the A-type linear guide 364A and the B-type
linear guide 364B configuring the cross guide 364 will be
described.
[0106] FIG. 14, FIG. 15 and FIG. 16 are a plan view, a side view
and a front view of the A-type linear guide 364A (B-type linear
guide 364B), respectively. The A-type linear guide 364A (B-type
linear guide 364B) includes a rail 364a and an A-type carriage
364b/A (B-type carriage 364b/B).
[0107] The A-type carriage 364b/A (B-type carriage 364b/B) is
provided with four attachment holes HA (attachment holes HB), being
tapped holes (drilled holes) for fixing bolts, at four corners of a
top face of the carriage. Structures of the A-type carriage 364b/A
and the B-type carriage 364b/B are identical except for types of
the attachment holes HA, HB.
[0108] The four attachment holes HA, HB are formed such that their
center lines touch respective corners of a square Sq (shown in a
chain line in FIG. 14) on the top face of the carriage. That is,
intervals (lengths of sides of the square Sq) at which the
attachment holes HA of the A-type carriage 364b/A are formed
coincide with intervals at which the attachment holes HB of the
B-type carriage 364b/B are formed, and the arrangements of the
attachment holes HA, HB each have four times rotation symmetry.
[0109] Therefore, the A-type linear guide 364b/A and the B-type
linear guide 364b/B are configured such that, even if the A-type
linear guide 364b/A and the B-type linear guide 364b/B are
superimposed while shifting their moving directions to each other
by 90 degrees, the four attachment holes HA and the four attachment
holes HB respectively communicate, thereby making it possible to
couple the A-type carriage 364b/A and the B-type carriage 364b/B by
4 bolts.
[0110] Also, since the attachment holes HA of the A-type carriage
364b/A are formed as tapped holes and the attachment holes HB of
the B-type carriage 364b/B are formed as drilled holes, the A-type
carriage 364b/A and the B-type carriage 364b/B can be coupled
directly with each other without using a coupling plate. This makes
it possible to downsize and reduce weight of the cross guide 364.
By downsizing and reducing weight of the cross guide 364 by
eliminating a coupling plate as described above, a rigidity of the
cross guide 364 increases (i.e., eigenfrequency of the cross guide
364 increases) and thereby the oscillating performance of the
oscillating device 1 improves. Specifically, it becomes possible to
oscillate up to a higher frequency with less vibration noises.
Also, due to the reduced weight, electrical power needed to
oscillate the cross guide 364 (i.e., to drive the mechanism part
10) is reduced.
[0111] An L-shaped notch C1 is formed at each of the four corners
of the top face of the carriage of the A-type carriage 364b/A
(B-type carriage 364b/B). Furthermore, a pair of L-shaped notches
C2 extending in the moving direction are formed at lower portions
of both sides in a width direction (up-down direction in FIG. 14)
of the A-type carriage 364b/A (B-type carriage 364b/B). That is,
apart from flange portions F overhanging from both sides in the
width direction where the attachment holes HA (attachment holes HB)
are formed, both side edges of the A-type carriage 364b/A (B-type
carriage 364b/B) in the width direction are cut off. By these
configurations, weight reduction of the A-type carriage 364b/A
(B-type carriage 364b/B) is realized.
[0112] Since, as described above, the cross guide 364 consists only
of the A-type linear guide 364A and B-type linear guide 364B for
cross guides and four bolts for coupling the A-type linear guide
364A and B-type linear guide 364B, the cross guide 364 is small,
lightweight and have a high rigidity. Therefore, a resonance
frequency of the cross guide 364 is high, making it possible to
realize an XY slider (slide coupling mechanism) with less vibration
noises.
[0113] Also, as described above, apart from the attachment holes
HA, HB, the A-type carriage 364b/A and the B-type carriage 364b/B
have the same structure. Therefore, by coupling the A-type linear
guide 364A and the B-type linear guide 364B while shifting their
moving directions to each other by 90 degrees, the mass
distribution directionalities of each of the linear guides in the
length (L) direction and in the width (W) direction are offset, and
thereby a cross guide 364 with small mass distribution
directionality is realized.
[0114] Also, each of the carriage 364b/A and 364b/B has
substantially two times rotation symmetry around an axis in an
up-down direction (direction perpendicular to the paper in FIG. 14)
but does not have four times rotation symmetry. Therefore, response
characteristics of each of the carriages 364b/A, 364b/B to external
forces in the movable direction (left-right direction in FIG. 14)
and in a lateral direction (up-down direction in FIG. 14) are
different.
[0115] The carriage (cross carriage) of the cross guide 364 in
which the A-type linear guide 364b/A and the B-type linear guide
364b/B, each having substantially two times rotation symmetry and
their mass distributions being substantially equal, are rotated by
90 degrees about an up-down direction axis (rotation symmetry axis)
and coupled with each other obtains substantially four times
rotation symmetry and thus has response characteristics to external
forces in two moving directions (X-axis direction and Y-axis
direction) being more homogenous.
[0116] By coupling the movable part 320 of the Z-axis oscillating
unit 300 and the vibrating table 400 via the cross guide 364, the
vibrating table 400 is coupled to the movable part 320 of the
Z-axis oscillating unit 300 slidably in the X-axis direction and
the Y-axis direction.
[0117] Next, an internal structure of each linear guide configuring
the cross guide 364 will be described by exemplifying the A-type
linear guide 364A.
[0118] FIG. 17 is a cross sectional view of the A-type linear guide
364A. Also, FIG. 18 is a diagram showing of a section I-I of FIG.
17. The A-type linear guide 364A of the present embodiment is a
linear guide of which the number of balls RE (the number of
effective balls) being rolling bodies interposed between the rail
and the carriage is increased to equal to or more than twice the
ordinary number of balls by decreasing an outer diameter of the
ball RE to about a half the ordinary outer diameter and by setting
the number of load paths for the rolling bodies to eight streaks
which is twice the ordinary number of load paths. Due to this
configuration, since the load is distributed to equal to or more
than twice the ordinary number of balls RE, a load for one ball RE
is reduced by half, and thereby the rigidity of the linear guide
improves significantly. Also, due to the increase in the number of
effective balls, a more homogenous roll guiding becomes possible,
and, as a result, a motion accuracy of the carriage improves
(specifically, posture fluctuations and vibrations of the carriage
that occur during traveling decreases).
[0119] The A-type carriage 364b/A includes a main block 364b1/A, a
pair of end blocks 364b2 attached on both sides of the main block
364b1/A in the moving direction, and four rod members R1, R2, R3,
R4 respectively inserted in four cylindrical through holes h1, h2,
h3, h4 penetrating through the main block 364b1/A in the moving
direction. The rod members R1, R2, R3, R4 of the present embodiment
are members having the same configuration. It is noted that a main
block 364b1/B of the B-type carriage 364b/B has the same
configuration as the main block 364b1/A. Accordingly, the
description of the main block 364b1/B is herein omitted.
[0120] In the present embodiment, the main block 364b1/A is a metal
member (e.g., stainless steel), and the end blocks 364b2 and the
rod members R1, R2, R3, R4 are resin members. It is noted that
materials of each of the members configuring the A-type carriage
364b/A is not limited to those of the present embodiment, and can
be properly selected from metals, resins, ceramics or every types
of composite materials (e.g., fiber reinforced plastic).
[0121] As shown in FIG. 17, on each of both side faces of the rail
364a (right side face SR, left side face SL), two streaks of
grooves Ga extending in the length direction are formed close to
each other. Also, on each of the left and right portions of the top
face of the rail 364a (right top face TR, left top face TL), two
streaks of grooves Ga extending in the length direction are formed
close to each other.
[0122] On the other hand, on the main block 364b1/A of the A-type
carriage 364b/A, eight streaks (two streaks.times.four sets) of
grooves Gb are formed at positions opposing each of the grooves Ga.
By the pairs of the grooves Ga and the grooves Gb opposing to each
other, load paths Pa (P1a, P2a, P3a, P4a) and load paths Pb (P1b,
P2b, P3b, P4b) are formed. It is noted that a load path refers to a
portion among a path of the rolling bodies where a load acts on the
rolling bodies.
[0123] The load paths P1a and P1b (load path pair P1) are formed
close to each other between the right side face SR of the rail 364a
and the main block 364b1/A. The load paths P2a and P2b (load path
pair P2) are formed close to each other between the right top face
TR of the rail 364a and the main block 364b1/A. The load paths P3a
and P3b (load path pair P3) are formed close to each other between
the left top face TL of the rail 364a and the main block 364b1/A.
The load paths P4a and P4b (load path pair P4) are formed close to
each other between the left side face SL of the rail 364a and the
main block 364b1/A. The pair of paths for the rolling bodies that
are formed in parallel and close to each other as described above
will be hereinafter referred to as a "path pair."
[0124] Also, between the right side face SR, right top face TR,
left top face TL and left side face SL of the rail 364a and the
main block 364b1/A, gaps P1c, P2c, P3c, P4c are respectively
formed. The load path pairs P1, P2, P3, P4 are respectively formed
in the gaps P1c, P2c, P3c, P4c.
[0125] The four through holes h1, h2, h3, h4 are formed in parallel
with and at positions opposing the respective four load path pairs
P1, P2, P3, P4.
[0126] Through holes Qc (Q1c, Q2c, Q3c, Q4c) having substantially
rectangular cross sectional shapes pass through the rod members R1,
R2, R3, R4 in the length directions, respectively. On an inner
peripheral surface of each through hole Qc (specifically, two
surfaces opposing with a narrow interval), no-load paths Qa (Q1a,
Q2a, Q3a, Q4a) and Qb (Q1b, Q2b, Q3b, Q4b) consisting of two
opposing pairs of grooves Gc, Gd (Reference signs are indicated
only to the through hole Q2c.) extending in the extending direction
of the through hole Qc are formed.
[0127] As shown in FIG. 18, on each of both ends of the rod member
R3, an U-shaped protruding part R3p protruding from a through hole
h3 of the main block 364b1/A is provided. On an outer peripheral
surface of each protruding part R3p, the above mentioned pair of
parallel grooves Gc is formed. On the other rod members R1, R2, R4,
protruding parts R1p, R2p, R4p (not shown), each formed with a pair
of the U-shaped grooves Gc, are respectively provided as well.
[0128] On the end block 364b2, four recessed parts D1, D2, D3, D4
(Only the recessed part D3 is shown in the drawings.) configured to
accommodate respective protruding parts Rp (R1p, R2p, R3p, R4p) are
formed. On the recessed part D3, a pair of grooves Gd respectively
opposing the pair of grooves Gc formed on the protruding part R3p
is formed. By the two pairs of grooves Gc, Gd opposing to each
other, Two U-shaped turning paths U3a, U3b (Only the path U3a is
shown in the drawings.) are formed. Similarly, a pair of the
grooves Gd is formed on each of the other three recessed parts D1,
D2, D4 as well, and a pair of turning paths U1a and U1b, a pair of
turning paths U2a and U2b, and a pair of turning paths U4a and U4b
are formed between respective pairs of grooves Gc formed on the
protruding parts R1p, R2p, R4p.
[0129] Also, between the protruding parts R1p, R2p, R3p, R4p and
the recessed parts D1, D2, D3, D4, gaps Gu1, Gu2, Gu3, Gu4 (not
shown) are respectively formed. The turning paths U1a and U1b, the
turning paths U2a and U2b, the turning paths U3a and U3b, and the
turning paths U4a and U4b are respectively formed in the gaps Gu1,
Gu2, Gu3, Gu4.
[0130] One end of each of the turning paths Ua, Ub is connected to
the load path Pa, Pb, and the other end is connected to the no-load
path Qa, Qb, respectively. That is, eight streaks of the load paths
P1a, P1b, P2a, P2b, P3a, P3b, P4a, P4b and eight streaks of the
no-load paths Q1a, Q1b, Q2a, Q2b, Q3a, Q3b, Q4a, Q4b are connected
to form loops by the eight turning paths U1a, U1b, U2a, U2b, U3a,
U3b, U4a, U4b, thereby forming eight circulating passages.
[0131] Also, the gaps Pc (P1c, P2c, P3c, P4c) and the through holes
Qc (Q1c, Q2c, Q3c, Q4c) are connected to form loops by the pairs of
U-shaped gaps Gu (Gu1, Gu2, Gu3, Gu4), thereby forming four annular
gaps CG. To these four annular gaps CG, the above described four
pairs (eight streaks) of circulating passages CP are respectively
formed.
[0132] To each of the eight streaks of circulating passages CP, a
plurality of balls RE (rolling bodies) made of stainless steel are
accommodated while aligned in a line. Also, a retainer RT in the
form of one endless belt is inserted in each of the four annular
gaps CG.
[0133] FIG. 19 is a perspective view showing a portion of the
retainer RT. The retainer RT is a flexible resin member, and a
plurality of through holes RTh are formed at regular intervals in
two rows in the length direction. An interval between the two rows
of the through holes RTh is the same as an interval between the two
streaks of circulating passages CP (passage pair) provided in each
annular gap CG. In the two rows of the through holes RTh of the
retainer RT, each of a plurality of the balls RE arranged in the
passage pair within the same annular gap CG is rotatably fitted.
Then, the retainer RT circulates within the annular gap CG together
with a plurality of the balls RE. The retainer RT prevents the
balls RE from contacting with each other and thereby reduces
vibration noises caused by frictions between the balls RE and
abrasion of the balls RE.
[0134] As shown in FIG. 14, a length L of the A-type carriage
364b/A (and B-type carriage 364b/B) of the present embodiment is
set to be equal to or less than 125 mm (about 120 mm) and thereby
an aspect ratio (a ratio L/W of the length L and a width W) is
suppressed to be equal to or less than 1.35 (about 1.32).
[0135] If the carriage is long, a motion accuracy (waving
characteristic and the like) and a rigidity improve, but there is
an disadvantage that the mass increases and the oscillating
(accelerating) performance degrades. Preferably, the length L of
the eight-streak type carriage to be used in the oscillating device
is within the range of 70-160 mm (more preferably, within the range
of 90-140 mm, and further preferably, within the range of 110-130
mm).
[0136] Also, the aspect ratio L/W is better to be near 1 so that
the oscillating performances becomes uniform in every axis
directions. Preferably, the aspect ratio L/W of the eight-streak
type carriage such as the one in the present embodiment is within
the range of 0.65-1.5 (more preferably, within the range of
0.7-1.4, and further preferably, within the range of
0.75-1.35).
[0137] By coupling the Z-axis oscillating unit 300 and the
vibrating table 400 via the XY slider 360 capable of sliding in the
X-axis direction and the Y-axis direction with small resistance as
described above, vibration components of the vibrating table 400 in
the X-axis direction and the Y-axis direction will not be
transmitted to the Z-axis oscillating unit 300 even if the
vibrating table 400 is vibrated in the X-axis direction and the
Y-axis direction by the X-axis oscillating unit 100 and the Y-axis
oscillating unit 200, respectively.
[0138] Also, forces in the X-axis direction and the Y-axis
direction hardly act on the vibrating table 400 by the driving of
the Z-axis oscillating unit 300. Therefore, oscillation with less
crosstalk becomes possible.
[0139] Also, as described above, in the A-type linear guide 364A of
the present embodiment, the number of streaks of the circulating
passages CP is set to eight which is twice the ordinary number of
streaks by decreasing the outer diameter of the ball RE to about a
half the ordinary outer diameter. Furthermore, the number of balls
RE arranged in the load paths is also increased to nearly twice the
ordinary number of balls RE. As a result, the A-type carriage
364b/A is more dispersedly supported by equal to or more than twice
(nearly four times) the conventional number of balls RE. As a
result, improvement in the rigidity and improvement in the motion
accuracy (lowering of wavings) are realized.
[0140] Since the use of eight-streak type linear guides such as the
A-type linear guide 364A had been limited to the use for the
purpose of improving positional accuracies in machine tools or the
like, conventional eight-streak type linear guides have large
carriage lengths L of equal to or more than 180 mm, and their
aspect ratios are equal to or more than 2.3 indicating that they
have bad weight balances. As a result, the conventional
eight-streak type linear guides had not been suitable for
mechanisms such as oscillating devices which are driven at high
speeds. The A-type linear guide 364A (B-type linear guide 364B) of
the present embodiment is made such that the eight-streak type
linear guide becomes applicable to oscillating devices by making
the carriage length L and the aspect ratio smaller. Also,
oscillations with frequencies over 2 kHz, which were conventionally
difficult, have become possible by the use of the A-type linear
guide 364A.
[0141] Next, a configuration of the YZ slider 160 which couples the
X-axis oscillating unit 100 and the vibrating table 400 will be
described.
[0142] FIG. 20 is a side view of the X-axis oscillating unit 100
and the vibrating table 400.
[0143] FIG. 21 is a front view of the X-axis oscillating unit
100.
[0144] FIG. 22 is a front view of the YZ slider 160.
[0145] FIG. 23 is a plan view around the vibrating table 400.
[0146] As shown in FIG. 20, the YZ slider 160 includes a coupling
arm 162 fixed to a tip face of the movable part 120 (expansion
frame 124) of the X-axis oscillating unit 100, and a cross guide
part 164 coupling the coupling arm 162 and the vibrating table 400
slidably in the y-axis direction and the Z-axis direction.
[0147] As shown in FIG. 22, the cross guide part 164 includes two
Y-axis rails 164a/Y (164a/Y1, 164a/Y4), six Z-axis rails 164a/Z
(164a/Z1, 164a/Z2, 164a/Z3, 164a/Z4, 164a/Z5, 164a/Z6), and six
cross carriages 164b (164b/1, 164b/2, 164b/3, 164b/4, 164b/5,
164b/6) which couple the Y-axis rails 164a/Y and the Z-axis rails
164a/Z slidably in the Y-axis direction and the Z-axis direction.
The six cross carriages 164b are arranged in a lattice (Y-axis
direction: three rows, Z-axis direction: two rows). It is noted
that the cross carriages 164b/2, 164b/3, 164b/4, 164b/5, 164b/6
have the same configuration as the cross carriage 164b/1.
Accordingly, the descriptions of the cross carriages 164b/2,
164b/3, 164b/4, 164b/5, 164b/6 and their Y-axis carriages 164b/Y2,
164b/Y3, 164b/Y4, 164b/Y5, 164b/Y6 and Z-axis carriages 164b/Z2,
164b/Z3, 164b/Z4, 164b/Z5, 164b/Z6 are herein omitted. Also, a
cross carriage 264b/1 has the same configuration as the cross
carriage 164b/1. Accordingly, the descriptions of the cross
carriage 264b/1 and its X axis rail 264a/X1, Z-axis rail 264a/Z1,
X-axis carriage 264b/X1 and Z-axis carriage 264b/Z1 are herein
omitted. Furthermore, a coupling arm 262 fixed to a tip face of a
movable part 220 of the horizontal actuator 200A has the same
configuration as the coupling arm 162.
[0148] Three Z-axis rails 164a/Z1, 164a/Z2, 164a/Z3 on the upper
row and one Y-axis rail 164a/Y4 on the lower row are fixed to the
tip face of the coupling arm 162. Also, the remaining three Z-axis
rails 164a/Z4, /Z5, /Z6 on the lower row and one Y-axis rail
164a/Y1 on the upper row are fixed to a side face of the vibrating
table 400.
[0149] The cross carriage 164b/1 is a cross carriage in which the
Y-axis carriage 164b/Y1 which engages with the Y-axis rail 164a/Y1
and a Z-axis carriage 164b/Z1 which engages with the Z-axis rail
164a/Z1 are superimposed back to back (i.e., the top faces of the
carriages are superimposed with each other) and fixed. One of the
Y-axis carriage 164b/Y1 and the Z-axis carriage 164b/Z1 has the
same configuration as the above-described A-type carriage 364b/A,
and the other has the same configuration as the above-described
B-type carriage 364b/B. Similarly to the cross carriage of the
crossguide 364, the Y-axis carriage 164b/Y1 and the Z-axis carriage
164b/Z1 are directly fixed together only with four bolts without
using an attaching plate.
[0150] All the three cross carriages 164b/1, 164b/2, 164b/3 on the
upper row engage with one Y-axis rail 164a/Y1 on the upper row, and
engage with three Z-axis rails 164a/Z1, 164a/Z2, 164a/Z3 on the
upper row, respectively.
[0151] Similarly, all the three cross carriages 164b/4, 164b/5,
164b/6 on the lower row engage with one Y-axis rail 164a/Y4 on the
lower row, and engage with three Z-axis rails 164a/Z4, 164a/Z5,
164a/Z6 on the lower row, respectively.
[0152] The vibrating table 400 is coupled to the movable part 120
of the X-axis oscillating unit 100 slidably in the Y-axis direction
and the Z-axis direction by the configuration of the YZ slider 160
described above.
[0153] By coupling the X-axis oscillating unit 100 and the
vibrating table 400 via the YZ slider 160 capable of sliding in the
Y-axis direction and the Z-axis direction with small resistance as
described above, vibration components of the vibrating table 400 in
the Y-axis direction and the Z-axis direction will not be
transmitted to the X-axis oscillating unit 100 even if the
vibrating table 400 is vibrated in the Y-axis direction and the
Z-axis direction by the Y-axis oscillating unit 200 and the Z-axis
oscillating unit 300, respectively.
[0154] Also, forces in the Y-axis direction and the Z-axis
direction hardly act on the vibrating table 400 by the driving of
the X-axis oscillating unit 100. Therefore, oscillation with less
crosstalk becomes possible.
[0155] Furthermore, the ZX slider 260 which couples the Y-axis
oscillating unit 200 and the vibrating table 400 also has the same
configuration as the YZ slider 160, and the vibrating table 400 is
coupled to the movable part 220 of the Y-axis oscillating unit 200
slidably in the Z-axis direction and the X-axis direction.
Therefore, vibration components of the vibrating table 400 in the
Z-axis direction and the X-axis direction will not be transmitted
to the Y-axis oscillating unit 200 even if the vibrating table 400
is vibrated in the Z-axis direction and the X-axis direction by the
Z-axis oscillating unit 300 and the X-axis oscillating unit 100,
respectively.
[0156] Also, forces in the Z-axis direction and the X-axis
direction hardly act on the vibrating table 400 by the driving of
the Y-axis oscillating unit 200. Therefore, oscillation with less
crosstalk becomes possible.
[0157] As described above, the oscillating units 100, 200, 300 can
accurately oscillate the vibrating table 400 in respective driving
directions without interfering with each other. Also, since the
movable parts of the oscillating units 100, 200, 300 are supported
movably only in their driving directions by the movable part
support mechanisms 140, 240, 340, respectively, the oscillating
units 100, 200, 300 hardly vibrate in the non-driving directions.
Therefore, uncontrolled vibrations in the non-driving directions do
not act on the vibrating table 400 from the oscillating units 100,
200, 300. Accordingly, vibration of the vibrating table 400 in each
axis direction is accurately controlled by the driving of the
corresponding one of the oscillating units 100, 200, 300.
[0158] The vibrating table 400 is configured such that its center
of gravity substantially coincides with the center of its outer
dimension so as to suppress occurrence of unnecessary rotational
motion (rotational vibration). However, if the biaxial sliders (YZ
slider 160, ZX slider 260, XY slider 360) are attached to one side
of the vibrating table 400 in each axis direction, since portions
of the biaxial sliders are fixed to the vibrating table 400 (more
precisely, portions of the biaxial sliders are restrained by the
vibrating table 400 and move along with the vibrating table 400),
the center of gravity of the oscillated portion (the vibrating
table 400 and the portions of the biaxial sliders) shifts from the
center of the vibrating table 400. This bias in the center of
gravity of the oscillated portion causes rotational vibration of
the vibrating table 400 and, as a result, causes variations in
vibrating states (e.g., acceleration) according to positions on the
vibrating table 400.
[0159] In consideration of the above, in the present embodiment,
counter balancers which compensate the ambalance caused by the
biaxial sliders are provided to the vibrating table 400 on the
opposite sides of the biaxial sliders such that the center of
gravity of the oscillated portion (the vibrating table 400, the
counter balancers and the portions of the biaxial sliders)
substantially coincides with the center of the vibrating table
400.
[0160] As shown in FIGS. 1-3 and FIGS. 5-7, on a side face of the
vibrating table 400 opposite to the side face on which the YZ
slider 160 is attached (i.e., the side face on the X-axis positive
direction side), an X-axis counter balancer 610 (first counter
balancer) is provided.
[0161] Also, on a side face of the vibrating table 400 opposite to
the side face on which the ZX slider 260 is attached (i.e., the
side face on the Y-axis positive direction side), a Y-axis counter
balancer 620 (second counter balancer) is provided. It is noted
that the Y-axis counter balancer 620 of the present embodiment has
the same configuration as the X-axis counter balancer 610.
[0162] Furthermore, on a top face of the vibrating table 400
opposite to the lower face on which the XY slider 360 is attached
(i.e., the side face on the Z-axis positive direction side), a
Z-axis counter balancer 630 (third counter balancer) is
provided.
[0163] FIG. 25 is a sectional view of the X-axis counter balancer
610 (and the Y-axis counter balancer 620). It is noted that the
X-axis counter balancer 610 includes a cushioning layer 611
(cushioning part) and a weight plate 612 (weight part). The
cushioning layer 611 is pinched between the weight plate 612 and
the side face of the vibrating table 400 and fastened.
[0164] The weight plate 612 is a member for providing a mass for
compensating an imbalance of the oscillated portion caused by the
attachment of the biaxial slider to the vibrating table 400. It is
noted that the imbalance of the oscillated portion may represent an
uneven distribution of weight in the oscillated portion. A
thickness t of the weight plate 612 of the present embodiment is 20
mm.
[0165] The cushioning layer 611 blocks transmission of vibration
noises with frequencies higher than an oscillating frequency
between the weight plate 612 and the vibrating table 400. Also, the
cushioning layer 611 prevents occurrence of chattering between the
vibrating table 400 and the weight plate 612.
[0166] The weight plate 612 and the cushioning layer 611 are
attached to the side face of the vibrating table 400 with a
plurality of bolts 613. Tapped holes 400h are formed on the side
face of the vibrating table 400, and through holes 612c are formed
on the weight plate 612. The weight plate 612 and the cushioning
layer 611 are fastened to the side face of the vibrating table 400
by inserting the bolts 613 in the through holes 612c and screwing
them in the tapped holes 400h. It is noted that through holes
communicating with the through holes 612c and the screw holes 400h
are formed on the cushioning layer 611 as well.
[0167] As shown in FIG. 33(a), on the X-axis counter balancer 610,
a plurality of through holes 612c are formed in a lattice point in
two orthogonal directions (Y-axis direction and Z-axis direction)
at regular intervals P. In the present embodiment, the intervals P
between the through holes 612c are 50 mm. The occurrence of the
chattering can be effectively suppressed by shortening the
intervals P between the through holes 612c (by setting the
intervals P preferably to equal to or less than 100 mm, and more
preferably to equal to or less than 50 mm).
[0168] Next, a configuration of the Z-axis counter balancer 630
will be described. FIG. 26 is a sectional view of the Z-axis
counter balancer 630. Also, FIG. 27 is an enlarged plan view
showing bolt fixing positions of the Z-axis counter balancer 630.
It is noted that FIG. 26 a sectional view in J-J of FIG. 27.
[0169] The Z-axis counter balancer 630 includes a first cushioning
layer 631 (first cushioning part), a first weight plate 632 (first
weight part), a second cushioning layer 634 (second cushioning
part), a second weight plate 635 (second weight part), a third
cushioning layer 637 (third cushioning part), and a third weight
plate 638 (third weight part). The first cushioning layer 631, the
first weight plate 632, the second cushioning layer 634, the second
weight plate 635, the third cushioning layer 637 and the third
weight plate 638 are stacked on the top face of the vibrating table
400 in this order.
[0170] The first weight plate 632, the second weight plate 635 and
the third weight plate 638 are members for providing masses for
compensating the imbalance of the oscillated portion caused by the
attachment of the biaxial slider to the vibrating table 400 and, in
the present embodiment, they are plate members made of aluminium
alloy. In the present embodiment, thicknesses t.sub.1, t.sub.2,
t.sub.3 of the first weight plate 632, the second weight plate 635
and the third weight plate 638 are 30 mm, 20 mm and 10 mm,
respectively. It is noted that a width (X-axis direction) and a
depth (Y-axis direction) of the vibrating table 400 of the present
embodiment are 500 mm, and a width and a depth of the Z-axis
counter balancer 630 are 400 mm.
[0171] The first cushioning layer 631, the second cushioning layer
634 and the third cushioning layer 637 lower transmission of
vibration noises with frequencies higher than an oscillating
frequency between the first weight plate 632 and the vibrating
table 400 or between adjacent weight plates 632, 635, 638,
respectively. Also, the first cushioning layer 631, the second
cushioning layer 634 and the third cushioning layer 637 prevent
occurrence of chatterings between the vibrating table 400 and the
first weight plate 632 or between adjacent weight plates 632, 635,
638.
[0172] On the first weight plate 632, a plurality of through holes
632c and a plurality of tapped holes 632t are respectively formed
in lattice points in two orthogonal directions (X-axis direction
and Y-axis direction) at regular intervals (in the present
embodiment, at intervals P which are the same as those for the
through holes 612c of the X-axis counter balancer 610). It is noted
that, as shown in FIG. 27, positions of the through holes 632c and
the tapped holes 632t are shifted by P/2 in each arranging
direction. That is, in the plan view, the tapped hole 632t is
formed at an intermediate position of four through holes 632c. The
first weight plate 632 and the first cushioning layer 631 are
fastened to the top face of the vibrating table 400 by inserting
bolts 633 in the through holes 632c and screwing them in tapped
holes 400h formed on the top face of the vibrating table 400.
[0173] On the second weight plate 635, a plurality of through holes
635c and a plurality of tapped holes 635t are respectively formed
in lattice points in two orthogonal directions (X-axis direction
and Y-axis direction) at regular intervals P as well. Positions of
the through holes 635c and the tapped holes 635t are shifted by P/2
in each arranging direction. The second weight plate 635 and the
second cushioning layer 634 are fastened to a top face of the first
weight plate 632 by inserting bolts 636 in the through holes 635c
and screwing them in the tapped holes 632t formed on the top face
of the first weight plate 632.
[0174] On the third weight plate 638, only through holes 638c are
formed. The third weight plate 638 and the third cushioning layer
637 are fastened to a top face of the second weight plate 635 by
inserting bolts 639 in the through holes 638c and screwing them in
the tapped holes 635t formed on the top face of the second weight
plate 635.
[0175] As described above, by stacking three layers of the weight
plates and the cushioning layers, the Z-axis counter balancer 630
is made capable of effectively suppressing vibration noises even if
a specimen, being a heavy load, are put on the Z-axis counter
balancer 630.
[0176] Also, by adopting the configuration in which adjacent weight
plates (the first weight plate 632 and the second weight plate 635,
the second weight plate 635 and the third weight plate 638) are
sequentially individually fixed with the bolts instead of fixing
the three layers of the weight plates and the cushioning layers to
the vibrating table 400 directly with one bolt (co-fastening),
transmission of vibration noises from the vibrating table 400 to
the third weight plate 638 is effectively suppressed.
[0177] The shape of each of the weight plates 612, 632, 635, 638 is
not limited to the rectangular flat plate shape, but can be formed
in various shapes. For example, by making the shape to correspond
to the shape (mass distribution) of the biaxial sliders, it becomes
possible to compensate the imbalance with high accuracy.
[0178] Also, the thickness of each of the weight plates 632, 635,
638 may be changed in accordance with a mass of the specimen,
oscillating conditions or the like. For example, the thicknesses of
all the weight plates 632, 635, 638 may be made the same. Also, the
thicknesses of the weight plates may be made thicker as the layer
goes up, or the intermediate weight plate 635 may be made the
thickest.
[0179] Also, as materials for each of the weight plates 612, 632,
635, 638, besides typical structure materials such as aluminium
alloys or steel, lead, copper, metal foams, resins (including
plastics and rubbers), fiber reinforced plastics or the like having
vibration absorbing property may be used.
[0180] The thickness of each of the cushioning layers 611, 631,
634, 637 is decided within the range of 0.5 mm to 2 mm in
accordance with masses of the weight plates, materials and
characteristics of the cushioning layers, a size of the oscillating
device 1, test conditions or the like. If the cushioning layers are
made too thick, the weight plates become prone to resonate and
oscillating performances at low frequency ranges degrade.
Furthermore, if the cushioning layers are made too thin, enough
vibration noise suppressing effect cannot be obtained.
[0181] For the cushioning layers 611, 631, 634, 637, sheets of
various materials such as various synthetic resins (e.g., plastics
such as polyolefin, polyvinyl chloride, polyamide, PEEK (polyether
ether ketone), polycarbonate and polytetrafluoroethylene), various
elastomers (vulcanized rubbers such as natural rubbers and various
synthetic rubbers, thermosetting elastomers such as urethane
rubbers and silicone rubbers, and thermoplastic elastomers),
silicone gel (low crosslinking density silicone resins), various
polymer alloys, fiber reinforced plastics, resin foams, soft metals
such as lead, and metal foams or felt (nonwoven fabrics) may be
used.
[0182] Also, the cushioning layers may be formed by providing gaps
between the vibrating table 400 and the weight plates 612, 632 (or
between adjacent weight plates 632, 635, 638) and filling the gaps
with adhesives or calking materials and curing them.
[0183] Also, the Z-axis counter balancer 630 of the present
embodiment has the configuration in which three layers of the
cushioning layers and the weight plates are alternately laminated,
but may have a configuration in which two layers or four or more
layers are laminated. Furthermore, the materials and/or the
thicknesses of the cushioning layers and/or the weight plates may
be changed for each layer.
[0184] Next, oscillation uniformity of the oscillating device 1 of
the present embodiment will be described. FIGS. 28-30 are graphs
showing relative acceleration spectrum characteristics measured at
four points on the vibrating table 400 (more precisely, on the
Z-axis counter balancer 630). Also, FIG. 31 is a diagram showing
monitoring points (acceleration measurement points) on the Z-axis
counter balancer 630.
[0185] The oscillating device 1 is designed such that a reference
point MP0, which is at the center of the top face of the Z-axis
counter balancer 630, vibrates in the same acceleration as the
indicated value (i.e., a single-point control is executed on the
basis of a measured acceleration value at the reference point MP0).
It is noted that an oscillating device may be configured to execute
a multi-point control in which vibration is controlled on the basis
of measurement results of parameters indicating vibration states,
such as acceleration, at two or more points among five monitoring
points including the reference point MP0 (e.g., on the basis of an
average of measured values at a plurality of monitoring points).
The oscillation uniformity of the oscillating device 1 was
evaluated by measuring relative acceleration levels La in areas at
four corners of the Z-axis counter balancer 630 (monitoring points
MP1, MP2, MP3, MP4) where it is thought that differences in
accelerations from an acceleration at the reference point MP0 are
the largest. It is noted that the relative acceleration level La is
a relative acceleration level at each of the monitoring points
MP1-MP4 relative to the acceleration at the reference point MP0,
and is defined by the following Equation 1.
La = 20 .times. log .times. a a 0 .function. [ dB ] [ Expression
.times. .times. 1 ] ##EQU00001##
where
[0186] La represents relative acceleration level at each monitoring
point,
[0187] a represents acceleration at each monitoring point
(MP1-MP4), and
[0188] a.sub.0 represents acceleration at reference point MP0.
[0189] Also, As shown in FIG. 31, the monitoring points MP1, MP2,
MP3, MP4 are set at the centers of four areas at four corners among
16 areas obtained by dividing the top face of the Z-axis counter
balancer 630 in a lattice of 4.times.4.
[0190] Also, the evaluation of the oscillation uniformity was
carried out in every oscillating directions (X-axis direction,
Y-axis direction, Z-axis direction) for each of the case where
oscillation is performed using a sine wave and a case where
oscillation is performed using a random wave.
[0191] FIG. 28, FIG. 29 and FIG. 30 are graphs showing measurement
results of X-axis direction, Y-axis direction and Z-axis direction,
respectively. In each drawing, an upper graph (a) is a measurement
result for the case where oscillation was performed using the sine
wave, and a lower graph (b) is a measurement result for the case
where oscillation was performed using the random wave. It is noted
that the measurement with the sine wave was carried out within the
frequency range of 200-2000 Hz, and the measurement with the random
wave was carried out within the frequency range of 5-2000 Hz.
[0192] As shown in FIGS. 28-30, in all conditions, in a frequency
range equal to or less than 1 kHz, the relative acceleration levels
were suppressed to less than .+-.3 dB. Also, in a frequency range
equal to or less than 2 kHz, the relative acceleration levels were
suppressed to less than .+-.6 dB apart from those for some
measurement conditions, and the relative acceleration levels were
suppressed to less than .+-.10 dB for all measurement conditions.
In a state where the counter balancers are not attached, in a
frequency range equal to or less than 2 kHz, the relative
acceleration levels exceeded .+-.10 dB for all measurement
conditions, and thus a remarkable improvement in the oscillation
uniformity by the attachment of the counter balancers was
confirmed.
[0193] FIG. 32 is a sectional view of the first variation 610A of
the X-axis counter balancer 610. In this variation 610A, spacers
611a (e.g., flat washers) are used in place of the cushioning layer
611. Apart from fixing points where the spacers 611a intervene, a
gap is provided between the weight plate 612 and the vibrating
table 400 and thereby the weight plate 612 is held on the vibrating
table 400 in a contactless manner. Therefore, it is made difficult
for the vibration to be transmitted between the vibrating table 400
and the weight plate 612. Furthermore, the occurrence of chattering
between the vibrating table 400 and the weight plate 612 is also
prevented.
[0194] For the spacer 611a, in addition to various steels such as
stainless steel and various nonferrous metals such as aluminium
alloys, copper alloys such as brass, and titanium alloys, the
above-mentioned materials that can be used for the cushioning layer
611 can be used.
[0195] Also, the spacers 611a may be formed integrally with the
vibrating table 400 or the weight plate 612 as protruding portions
in the form of bosses. Furthermore, a filler (e.g., silicone resin)
may be filled in the gap between the vibrating table 400 and the
weight plate 612.
[0196] Also, one or more of the cushioning layers 631, 634, 637 of
the Z-axis counter balancer 630 may be changed to the spacers
611a.
[0197] FIG. 33 is an external view of the X-axis counter balancer.
(a) shows the X-axis counter balancer 610 of the first embodiment,
and (b) and (c) show the second variation 610B and the third
variation 610C, respectively. The X-axis counter balancer 610 of
the first embodiment is integrally formed from one weight plate 612
(and one cushioning layer 611). In contrast, in the second
variation 610B shown in (b), the weight plate 612 and the
cushioning layer 611 are divided into four pieces in the length
direction (right-left direction in the drawing). Furthermore, in
the third variation 610C shown in (c), the weight plate 612 and the
cushioning layer 611 are further dived into two pieces in the width
direction (up-down direction in the drawing) and thus are divided
into 8 pieces in total. By dividing the X-axis counter balancer 610
into small elements, the resonance frequency increases and thereby
the occurrence of vibration noises in the test frequency range is
reduced. It is noted that the configuration of the first variation
610A may be applied to the second variation 610B and the third
variation 610C.
[0198] Also, in the present embodiment, the X-axis counter balancer
610, the Y-axis counter balancer 620 and the Z-axis counter
balancer 630 are all attached to the outer surface of the vibrating
table 400, but one or more of them may be attached to the inside of
the vibrating table 400.
[0199] Also, in the present embodiment, the vibrating table 400
itself does not have imbalance, but an initial imbalance may be
provided to the vibrating table 400 in advance such that the
vibrating table 400 is balanced in the state where the biaxial
sliders are attached (i.e., the center of gravity of the oscillated
portion coincides with the center of the outer shape of the
vibrating table). The initial imbalance can be provided by, for
example, making thicknesses of the box-shaped vibrating table
and/or arrangements of reinforcing ribs inside the vibrating table
uneven (See FIGS. 54 and 55. In the vibrating table 400 shown in
FIGS. 54 and 55, additional ribs 430' are added to make the
arrangements of reinforcing ribs uneven.).
[0200] Next, configurations for attaching the fixing parts of the
oscillating units to the device base 500 will be described.
[0201] As shown in FIGS. 1-3 and FIGS. 5-7, the fixing part 310 of
the Z-axis oscillating unit 300 is attached to a top face of the
device base 500 via a pair of supporting units 350 (also referred
to as fixing part support mechanisms, floating mechanisms or
elastic support mechanisms) arranged on both sides of the Z-axis
oscillating unit 300 in the Y-axis direction.
[0202] As shown in FIG. 5 and FIG. 7, each supporting unit 350
includes a movable block 358, a pair of angle plates (fixing
blocks) 352 and a pair of linear guides 354. The movable block 358
is a supporting member fixed on a side face of the fixing part 310
of the Z-axis oscillating unit 300, and has portions 358a, 358b and
358c. The angle plates 352 of the pair are arranged to respectively
oppose both end faces of the movable block 358 in the X-axis
direction, and are fixed on the top face of the device base 500.
Both ends of the movable block 358 in the X-axis direction and the
respective angle plates 352 are respectively coupled slidably in
the Z-axis direction by the linear guides 354.
[0203] The linear guide 354 includes a rail 354a and a carriage
354b which engages with the rail 354a. On each of both end faces of
the movable block 358 in the X-axis direction, the rail 354a is
attached. Also, to the angle plate 352, the carriage 354b which
engages with the opposing rail 354a is attached. Furthermore,
between the movable block 358 and the device base 500, a pair of
air springs 356 is placed while being arranged in the X-axis
direction, and the movable block 358 is supported by the device
base 500 via the pair of air springs 356.
[0204] Since, as described above, the fixing part 310 of the Z-axis
oscillating unit 300 is elastically supported with respect to the
device base 500 in the driving direction (Z-axis direction) by the
supporting unit 350 including the linear guides 354 and the air
springs 356, strong reaction forces (oscillating forces) acting on
the fixing part 310 in the Z-axis direction during the driving of
the Z-axis oscillating unit 300 are not directly transmitted to the
device base 500, but high frequency components are especially
largely attenuated by the air springs 356. Therefore, vibration
noises transmitted to the vibrating table 400 from the Z-axis
oscillating unit 300 via the device base 500 and the other
oscillating units 100, 200 are largely reduced.
[0205] As shown in FIGS. 20-21, the fixing part 110 of the
horizontal actuator 100A is attached on the top face of the device
base 500 via a pair of supporting units 150 arranged at both sides
of the X-axis oscillating unit 100 in the Y-axis direction. Each of
the supporting units 150 includes an inverse T-shaped fixing block
152 fixed on the top face of the device base 500, a substantially
rectangular movable block 158 attached to a side face of the fixing
part 110 of the X-axis oscillating unit 100, a linear guide 154
that couples the fixing block 152 and the movable block 158
slidably in the X-axis direction, and a spring mechanism 156 that
elastically couples the movable block 158 and the fixing block
152.
[0206] The linear guide 154 includes a rail 154a extending in the
X-axis direction and attached on a top face of the fixing block
152, and a pair of carriages 154b attached on a lower face of the
movable block 158 and that engage with the rail 154a. Also, on a
side face of the fixing block 152 in the X-axis negative direction
side, an L-shaped arm 155 extending upwardly is fixed. The movable
block 158 and the arm 155 are coupled by the spring mechanism
156.
[0207] FIG. 24 is an enlarged side view around the spring mechanism
156 of the supporting unit 150. The spring mechanism 156 includes a
bolt 156a, a fixing plate 156b, a ring 156c, a nut 156d, a
anti-vibration spring 156e, a cushion plate 156f, a washer 156g and
nuts 156h. On a top portion of the arm 155, a through hole 155h
extending in the X-axis direction is provided, and the bolt 156a is
inserted in this through hole 155h. A tip of the bolt 156a is fixed
to the movable block 158 via the fixing plate 156b. Also, a tip
portion of the bolt 156a runs through the tubular ring 156c.
[0208] The ring 156c is fixed by nipping between the nut 156d,
screwed to the bolt 156a, and the fixing plate 156b. Also, a tip
side of the bolt 156a is inserted in a hollow part of the tubular
anti-vibration spring 156e. The anti-vibration spring 156e is
retained by being nipped between the fixing plate 156b and the arm
155. Also, the ring 156c is fitted at an end side of the hollow
part of the anti-vibration spring 156e.
[0209] It is noted that the anti-vibration spring 156e is a tubular
member in which a compression coil spring made of steel is embedded
in a viscoelastic body (damper) such as acrylic resins. A simple
coil spring may be used in place of the anti-vibration spring 156e.
Also, a separate damper (e.g., anti-vibration rubber or oil damper)
may be provided serially or parallely with the coil spring.
[0210] At a head side of the bolt 156a, two nuts 156h are attached.
Also, the bolt 156a is inserted in through holes respectively
provided to the cushion plate 156f and the washer 156g. The cushion
plate 156f is retained by being nipped between the washer 156g and
the arm 155 supported by the two nuts 156h. The cushion plate 156f
is, for example, formed of anti-vibration rubbers or resins such as
polyurethane (i.e., rubbery elastic bodies and/or viscoelastic
bodies).
[0211] A preload (a compressing load in the X-axis direction) is
applied to the anti-vibration spring 156e and the cushion plate
156f by the tightening of the bolt 156a, and the horizontal
actuator 100A fixed to the movable block 158 is retained at a
neutral position where restoring forces of the anti-vibration
spring 156e and the cushion plate 156f balance. That is, the spring
mechanism 156 functions as a neutral spring mechanism as well.
[0212] When the X-axis oscillating unit 100 oscillates the
vibrating table 400 in the X-axis direction, a reaction force is
transmitted to the movable blocks 158 of the supporting units 150,
and is further transmitted to the fixing blocks 152 via the spring
mechanisms 156 (anti-vibration springs 156e, cushion plates 156f)
and the arms 155. Since the anti-vibration springs 156e and the
cushion plates 156f attenuate vibrations with frequencies higher
than their low resonance frequencies, transmission of vibration
noises from the X-axis oscillating unit 100 to the device base 500
is suppressed by the supporting units 150.
[0213] It is noted that a reaction force acting on the supporting
unit 150 in the X-axis positive direction is smaller than a
reaction force in the X-axis negative direction. Therefore, in the
present embodiment, a small and inexpensive cushion plate 156f is
used as an elastic component that receives the reaction force in
the X-axis positive direction. If the reaction force in the X-axis
positive direction becomes large, an anti-vibration spring or a
coil spring may be used in place of the cushion plate 156f. Also,
if the reaction forces in both directions are small, a cushion
plate may be used in place of the anti-vibration spring 156e.
[0214] Due to the above configuration, the fixing part 110 of the
X-axis oscillating unit is supported softly and elastically with
respect to the device base 500 in the driving direction (X-axis
direction) by the supporting units 150 each including the linear
guide 154 and the spring mechanism 156, and thus strong reaction
forces (oscillating forces) in the X-axis direction that acts on
the fixing part 110 during the driving of the X-axis oscillating
unit 100 are not transmitted directly to the device base 500 but
especially high frequency components of the reaction forces are
attenuated by the spring mechanisms 156, and the reaction forces
are then transmitted to the device base 500. Therefore, vibration
noises that are transmitted from the X-axis oscillating unit 100 to
the vibrating table 400 are reduced.
[0215] The Y-axis oscillating unit 200 also includes the horizontal
actuator 200A that has the same configuration as the horizontal
actuator 100A. The fixing part 210 of the horizontal actuator 200A
is also supported elastically on the device base 500 in the Y-axis
direction by a pair of supporting units 250 (FIG. 2). Since the
supporting unit 250 has the same configuration as the supporting
unit 150 of the X-axis oscillating unit 100, redundant detailed
descriptions thereof are herein omitted.
[0216] As described above, by adopting a configuration for
elastically supporting each of the oscillating units 100, 200, 300
with the supporting units 150, 250, 350 including elastic
components (air springs or spring mechanisms), transmissions of
especially high frequency components of vibrations (noises) between
the oscillating units via the device base 500 are suppressed,
thereby making it possible to oscillate with higher accuracy.
[0217] It is noted that, on the supporting unit 350 that supports
the Z-axis oscillating unit 300, in addition to the dynamic load
for oscillating the specimen and the vibrating table 400, weights
(static loads) of the Z-axis oscillating unit 300, the vibrating
table 400 and the specimen act. Therefore, the air spring 356 that
is relatively small and capable of supporting a large load is
adopted. On the other hand, since the large static load does not
act on the supporting unit 150 that supports the X-axis oscillating
unit 100 and the supporting unit 250 that supports the Y-axis
oscillating unit 200, a coil spring that is relatively small and
has a simple configuration is used.
[0218] In the present embodiment, the rotational vibration of the
vibrating table 400 is suppressed by the use of the low waving
eight-streak linear guide as the biaxial sliders (YZ slider 160, ZX
slider 260, XY slider 360) which greatly affect the oscillating
performance, and, as a result, uniformity of the vibrating state
(acceleration) on the vibrating table 400 is remarkably improved.
Conventionally, oscillating performance specifications could only
be prescribed at the reference point (the center of the top face of
the vibrating table). For example, in a conventionally known
oscillating device, oscillation with sufficiently high accuracy is
possible at a reference point on the vibrating table (e.g., at the
center of the top face of the vibrating table), but since there are
variations in vibrating states depending on locations on the
vibrating table, oscillating accuracies at positions other than the
reference point are not sufficient. However, due to this
improvement in the uniformity, it is made possible to prescribe the
oscillating performance specifications within a wide area on the
vibrating table.
[0219] Furthermore, by positioning the center of gravity of the
oscillated portion (including the vibrating table and portions of
the biaxial sliders) at the center of the vibrating table by
providing the counter balancers (or by creating a predetermined
imbalance on the vibrating table in advance), it is made possible
to lower the variations in vibrations (accelerations) on the
vibrating table to equal to or less than 3 dB within the frequency
range of up to 1 kHz, and equal to or less than about 6 dB within
the frequency range of up to 2 kHz.
[0220] <Variation of XY Slider>
[0221] FIG. 34 is a plan view illustrating a configuration of a
variation 360A of the XY slider. The present variation is an XY
slider in which the second orientation cross guide 364M2 arranged
at the center is removed from the XY slider 360 of the
above-described first embodiment (FIG. 12). In the XY slider 360A
of the present variation, the number of the first orientation cross
guides 364P (cross guides 364M1, 364L2, 364R2, 364M3) of which the
X-axis linear guides 364X are attached to the vibrating table 400
and the number of the second orientation cross guides 364S (cross
guides 364L1, 364R1, 364L3, 364R3) of which the Y-axis linear
guides 364Y are attached to the vibrating table 400 are the
same.
[0222] Now, differences in behaviors of the cross guide 364
depending on oscillating directions will be described. FIG. 35(a)
is a front view of the first orientation cross guide 364P, and (b)
is a left side view thereof.
[0223] As shown in FIG. 35(a), regarding the first orientation
cross guide 364P of which the X-axis linear guide 364X (X-axis rail
364a/X) is attached to the vibrating table 400, when the vibrating
table 400 is oscillated in the X-axis direction, only the X-axis
rail 364a/X (solid lines) fixed to the vibrating table 400 is
oscillated in the X-axis direction along with the vibrating table
400, and the cross carriage 364c and the Y-axis rail 364a/Y (broken
lines) are not oscillated in the X-axis direction.
[0224] On the other hand, as shown in FIG. 35(b), regarding the
first orientation cross guide 364P, when the vibrating table 400 is
oscillated in the Y-axis direction, the X-axis rail 364a/X and the
cross carriage 364c (solid lines) are oscillated in the Y-axis
direction along with the vibrating table 400, and only the Y-axis
rail 364a/Y (broken lines) is not oscillated in the Y-axis
direction.
[0225] Also, regarding the second orientation cross guide 364S of
which the Y-axis linear guide 364Y (Y-axis rail 364a/Y) is attached
to the vibrating table 400, contrary to the first orientation cross
guide 364P described above, when the vibrating table 400 is
oscillated in the X-axis direction, the Y-axis rail 364a/Y and the
cross carriage 364c (solid lines) are oscillated in the X-axis
direction along with the vibrating table 400, and only the X-axis
rail 364a/X (broken lines) is not oscillated in the X-axis
direction. Also, when the vibrating table 400 is oscillated in the
Y-axis direction, only the Y-axis rail 364a/Y (solid lines) is
oscillated in the Y-axis direction along with the vibrating table
400, and the cross carriage 364c and the X-axis rail 364a/X (broken
lines) are not oscillated in the Y-axis direction.
[0226] Table 1 is a table in which relationships between the
attaching orientations of the cross guide 364, the oscillating
directions of the vibrating table, and oscillated parts of the
cross guide 364 (components of the cross guide 364 which are
oscillated along with the vibrating table 400) described above are
organized.
TABLE-US-00001 TABLE 1 cross guide oscillated parts of cross guide
attaching X-axis direction Y-axis direction orientation oscillation
oscillation first orientation X-axis rail X-axis rail cross guide
Cross carriage second orientation Y-axis rail Y-axis rail cross
guide cross carriage
[0227] As described above, portions of the cross guide 364 which
are oscillated along with the vibrating table 400 differ depending
on the oscillating direction and the attaching orientation. For
example, when the vibrating table 400 is oscillated in the X-axis
direction, as described above, regarding the first orientation
cross guide 364P, only the X-axis rail 364a/X is oscillated in the
X-axis direction, but regarding the second orientation cross guide
364S, the Y-axis rail 364a/Y and the cross carriage 364c are
oscillated in the X-axis direction. Furthermore, the relationships
between the oscillating direction and the number of components of
the oscillated parts of the cross guide 364 (i.e., masses of the
oscillated parts) for the first orientation cross guide 364P and
for the second orientation cross guide 364S are opposite.
[0228] As shown in Table 1, if the XY slider is configured only
with the cross guide 364 of one of the attaching orientations
(e.g., the first orientation cross guide 364P), the masses of the
oscillated parts of the cross guide 364 change depending on whether
the vibrating table 400 is oscillated in the X-axis direction or in
the Y-axis direction. Due to this configuration, directionality
occurs in the oscillating performance of the oscillating device 1.
However, by providing the same number (a plurality of pairs) of the
first orientation cross guides 364P and the second orientation
cross guides 364S, the sum of the masses of the oscillated parts of
the cross guide 364 becomes constant regardless of whether the
vibrating table 400 is oscillated in the X-axis direction or the
Y-axis direction, and therefore the directionality in the
oscillating performance can be reduced.
[0229] Therefore, the XY slider 360A of the present variation which
is configured with four pairs of the first orientation cross guide
364P and the second orientation cross guide 364S has less
directionality as compared to the XY slider 360 of the first
embodiment in which the number of the second orientation cross
guide 364S is greater than the number of the first orientation
cross guide 364P by one, and thereby enables uniform
oscillation.
[0230] Also, since the total number of the cross guides 364
included in the XY slider 360A is fewer than that in the XY slider
360 of the first embodiment, the oscillated portion is reduced in
weight, thereby making it possible to oscillate with higher
frequencies.
[0231] Also, since the directionalities in the behaviors and the
biases in the mass distributions of the crossguides 364P, 364S are
effectively canceled by arranging the crossguides 364P, 364S in two
attaching orientations alternately (uniformly) in each direction,
it becomes possible to oscillate every portion of the vibrating
table 400 more uniformly.
[0232] Next, the vibration table 400 will be described.
[0233] As shown in FIGS. 1-3, substantially the entire surface of
the side face of the vibrating table 400 on the X-axis negative
direction side (right side face in FIG. 1) is substantially evenly
supported by the slide coupling mechanism 160 (specifically, a
plurality of the linear guideways in which the slide coupling
mechanism 160 includes) and the movable part 120 of the X-axis
oscillating unit 100. By this configuration, it is configured such
that the entire side face of the vibrating table 400 on the X-axis
negative direction side can receive substantially even oscillating
force from the X-axis oscillating unit 100.
[0234] Similarly, substantially the entire surface of the side face
of the vibrating table 400 on the Y-axis negative direction side
(left side face in FIG. 2) is substantially evenly supported by the
slide coupling mechanism 260 and the movable part 220 of the Y-axis
oscillating unit 200. By this configuration, it is configured such
that the entire side face of the vibrating table 400 on the Y-axis
negative direction side can receive substantially even oscillating
force from the Y-axis oscillating unit 200.
[0235] Also, as shown in FIG. 5 and FIG. 6, substantially the
entire surface of the lower face of the vibrating table 400 is
substantially evenly supported by the slide coupling mechanism 360
(specifically, a plurality of the linear guideways which the slide
coupling mechanism 360 include) and the movable part 320 of the
Z-axis oscillating unit 300. By this configuration, it is
configured such that the entire lower face of the vibrating table
400 can receive substantially even oscillating force from the
Z-axis oscillating unit 300.
[0236] Therefore, if the center of gravity of the entire oscillated
portion (the oscillated object and portions of the oscillating
device 1, such as the vibrating table 400, which are oscillated
along with the oscillated object) is inside the vibrating table
400, the entire oscillated portion can be oscillated without
applying moments of forces of high magnitudes to the entire
oscillated portion. Due to this configuration, occurrence of
unnecessary vibration components (vibration noises) caused by
moments of forces applied to the entire oscillated portion are
reduced, thereby making it possible to oscillate with higher
accuracy.
[0237] FIG. 36, FIG. 37 and FIG. 38 are a plan view, a front view
and a left side view, respectively, of the vibrating table 400
according to an embodiment of the present disclosure in a state
where an oscillated object T1 is attached. The vibrating table 400
of the present embodiment is configured such that an oscillation of
an oscillated object can be performed in a state where the
oscillated object is accommodated inside the vibrating table
400.
[0238] As shown in FIG. 37 and FIG. 38, the vibrating table 400
includes a box part 400a having an opening on its top face, and a
lid part 400b which closes the opening of the box part 400a. It is
noted that FIG. 36 shows a state where the lid part 400b is
removed. The lid part 400b is detachably attached to the box part
400a by bolts (not shown) which fit female screws 421 provided on a
top face of the box part 400a (more specifically, a frame part 420
which will be described later). The vibrating table 400 is
configured such that its center of gravity is positioned
substantially at the center of its outer shape.
[0239] The box part 400a has a bottom plate 450, and a frame part
(wall part) 420 which vertically protrudes upward from a peripheral
edge of the bottom plate 450. As shown in FIG. 36, the bottom plate
450 is formed in a shape in which four corners of a square are cut
off.
[0240] Inside the frame part 420, a plurality of intermediate
plates 430, 440 parallel to respective wall surfaces of the frame
part 420 (apart from the cut off portions) are provided in a
lattice. The intermediate plates 430 extend in the Y-axis direction
(right-left direction in FIG. 36), and the intermediate plates 440
extend in the X-axis direction (up-down direction in FIG. 36). The
intermediate plates 430, 440 are joint to the bottom plate 450 and
the frame part 420 at one end (or both ends) thereof.
[0241] At the central portion of the vibrating table 400, an
accommodating space S, which is a hollow part in which no
intermediate plate (wall part) 430, 440 is formed, is provided. An
oscillated object is accommodated in this accommodating space
S.
[0242] At the central portions in the extending directions
(horizontal directions) of the intermediate plates 430a, 440a which
separate the accommodating space S, thick plate parts 431, 441,
which are thicker than the other portions, are respectively formed.
To the thick plate parts 431, 441, through holes 432, 442, in which
bolts B for fixing the oscillated object are inserted, are
respectively formed. In FIGS. 36-38, attachment parts 460 for
attaching the oscillated object T1 to the vibrating table 400 are
fixed to the intermediate plates 440a on both sides in the
right-left direction by the bolts B inserted in the through holes
432.
[0243] Also, the oscillated object T1 is placed substantially at
the center of the accommodating space S. Therefore, the center of
gravity of the oscillated object T1 is positioned near the center
of the vibrating table 400.
[0244] The vibrating table 400 of the present embodiment is
configured to be able to oscillate an oscillated object having a
rotating shaft (e.g., power transmission devices such as engines,
motors and differential gears) in a state where the rotating shaft
is rotated. The oscillated object T1 (and an oscillated object T2
which will be described later) of the present embodiment is a
generator for hybrid cars.
[0245] As shown in FIG. 37 and FIG. 38, on the left side face of
the frame part 420, an opening 422 for inserting a drive belt DB
for transmitting power is formed. Also, on the intermediate plate
440 at the left side, an opening 443 for inserting the drive belt
DB is formed at a position opposing the opening 422. In the present
embodiment, the drive belt DB is wound around a drive pulley (not
shown) of an external driving device and a driven pulley FP
attached to the oscillated object T1, and thus it is made possible
to oscillate the oscillated object T1 while rotating the oscillated
object T1 by applying a driving force to the oscillated object T1
inside the vibrating table 400 from outside during oscillation.
[0246] It is noted that, in place of the drive belt DB (or in
addition to the drive belt DB), one or more long objects of other
types for connecting the oscillated object T1 with one or more
external devices, such as pipes for supplying hydraulic pressure or
air pressure to the oscillated object T1, electrical power cables
for supplying electrical power, and communication cables for
communicably connecting an external information processing device
and the oscillated object (or sensors or measuring devices attached
to the oscillated object), can be inserted in the openings 422,
443. Also, one or more openings for inserting these pipes and/or
cables may be provided to the vibrating table 400 in addition to
the openings 422, 443.
[0247] Also, if, for example, the oscillated object is an engine,
the oscillated object and an external measuring device can be
coupled by the drive belt DB, and power that the oscillated object
generates can be measured while oscillating the oscillated
object.
[0248] Also, to the bottom plate 450 of the vibrating table 400, a
plurality of female screws 451 for fixing the oscillated object are
provided.
[0249] FIG. 39 is a left side view of the vibrating table 400 in a
state where an oscillated object T2, having through holes for
fixing at the bottom portion, is attached. The oscillated object T2
is fixed to the bottom plate 450 of the vibrating table 400 by
screwing bolts B, inserted in the through holes for fixing of the
oscillated object T2, in the female screws 451.
[0250] The oscillated object T2 is attached substantially at the
center of the accommodating space S, too. Therefore, the center of
gravity of the oscillated object T2 is positioned near the center
of the vibrating table 400. It is noted that, although, in FIG. 39,
the oscillated object T2 is directly fixed to the bottom plate 450
of the vibrating table 400, if the center of gravity of the
oscillated object T2 is low, the oscillated object T2 may be fixed
to the bottom plate 450 via a spacer or the like so as to position
the center of gravity of the oscillated object T2 at the center of
the vibrating table 400. Also, if the center of gravity of the
oscillated object T2 is high, the oscillated object T2 may be, for
example, fixed to the lid part 400b and attached to the vibrating
table 400 upside down.
[0251] As described above, in the present embodiment, an oscillated
object and the vibrating table 400 are oscillated in a state where
the oscillated object is accommodated inside the vibrating table
400. Since the center of gravity of the entire oscillated portion
is surely positioned within the vibrating table 400 by
accommodating the oscillated object inside the vibrating table 400,
it becomes possible to surely reduce the occurrence of moments of
forces on the entire oscillated portion.
[0252] It is noted that, although the vibrating table 400 of the
above-described embodiment is configured to have a box shape with a
lid, the vibrating table 400 only needs to be configured such that,
when an oscillated object is attached, the center of gravity of the
entire oscillated portion is positioned within the vibrating table
400 (more precisely, within an area where a space formed by
extending the movable part 320 (slide coupling mechanism 360) of
the Z-axis oscillating unit 300 in the Z-axis direction and a space
formed by extending the movable part 120 (slide coupling mechanism
160) of the X-axis oscillating unit 100 in the X-axis direction
intersect). In other words, the vibrating table 400 only needs to
be configured such that a projection of the center of gravity of
the entire oscillated portion to the XY plane perpendicular to the
Z-axis is included in a projection of the movable part 320 (slide
coupling mechanism 360) of the Z-axis oscillating unit 300 to the
XY plane, and a projection of the center of gravity of the entire
oscillated portion to the YZ plane perpendicular to the X-axis is
included in a projection of the movable part 120 (slide coupling
mechanism 160) of the X-axis oscillating unit 100 to the YZ plane.
For example, the vibrating table 400 may have a configuration that
only has a face of the frame part 420 to which the slide coupling
mechanism 160 is attached and a bottom plate 450 to which the
Z-axis oscillating unit 300 is attached.
[0253] Also, in the present embodiment, it is made possible to more
surely approach the center of gravity the oscillated object toward
the center of the vibrating table 400 by providing the
accommodating space S (the intermediate plates 430a, 440a which
separate the accommodating space S) at the center of the vibrating
table 400.
Second Embodiment
[0254] Next, the second embodiment of the present disclosure will
be described. The second embodiment differs from the first
embodiment only in the configurations of the biaxial sliders (slide
coupling mechanisms). In the following description of the second
embodiment, differences from the first embodiment will mainly be
described, and descriptions of configurations that are common to
those of the first embodiment are herein omitted.
[0255] FIG. 40 is an enlarged perspective view (partially
transparent view) around a vibrating table 2400 of an oscillating
device 2000 according to the second embodiment of the present
disclosure. The oscillating device 2000 includes horizontal
actuators 2100A and 2200A, and a vertical actuator 2300A. It is
noted that, in FIG. 40, only an outline of the vibrating table 2400
is shown by two-dot lines. Also, illustrations of the counter
balancers are omitted.
[0256] Similarly to the XY slider 360 of the first embodiment, each
of biaxial sliders (YZ slider 2160, ZX slider 2260, XY slider 2360)
of the present embodiment is configured with nine cross guides
2164, 2264, 2364 arranged at regular intervals in a lattice (three
rows.times.three columns). The cross guides 2164, 2264, 2364 have
the same configuration as the cross guide 364 of the XY slider 360
of the first embodiment.
[0257] The XY slider 2360 of the present embodiment has the same
configuration as the XY slider 360 (FIG. 12) of the first
embodiment. That is, two arbitrary cross guides 2364 adjacent to
each other in the X-axis direction or in the Y-axis direction are
arranged mutually reversely in the up-down direction (in the Z-axis
direction). That is, an X-axis rail 2364a/X (Y-axis rail 2364a/Y)
of one of the two arbitrary cross guides 2364 adjacent to each
other in the X-axis direction or in the Y-axis direction is fixed
to a tip face (top plate 2324b) of a movable part 2320, and the
X-axis rail 2364a/X (Y-axis rail 2364a/Y) of the other one is fixed
to a lower face of the vibrating table 2400. By this arrangement,
directionalities in mass distribution and/or motion characteristic
that each of the cross guides 2364 has are averaged, and thereby
the oscillating performance with small directionality (or
unevenness in directionalities) is obtained.
[0258] Also, since substantially the entire surface of the lower
face of the vibrating table 2400 is uniformly oscillated via the
nine cross guides 2364 evenly and closely arranged, uniform
oscillation with less unevenness in vibrating states inside the
vibrating table 2400 becomes possible.
[0259] In the present embodiment, the same arrangement
configuration of the cross guides 364 (first orientation cross
guides 364P, second orientation cross guides 364S) as the first
embodiment is adopted to the arrangement of the cross guides 2164
for the YZ slider 2160 and the arrangement of the cross guides 2264
for the ZX slider 2260.
[0260] Specifically, regarding the YZ slider 2160, a Y-axis rail
2164a/Y (Z-axis rail 2164a/Z) of one of two arbitrary cross guides
2164 adjacent to each other in the Y-axis direction or in the
Z-axis direction is fixed to a tip face (top plate 2124b) of a
movable part 2120, and the Y-axis rail 2164a/Y (Z-axis rail
2164a/Z) of the other one is fixed to a side face of the vibrating
table 2400.
[0261] Also, regarding the ZX slider 2260, an X-axis rail 2264a/X
(Z-axis rail 2264a/Z) of one of two arbitrary cross guides 2264
adjacent to each other in the Z-axis direction or in the X-axis
direction is fixed to a tip face (top plate 2224b) of a movable
part 2220, and the X-axis rail 2264a/X (Z-axis rail 2264a/Z) of the
other one is fixed to a side face of the vibrating table 2400.
[0262] As described above, each face of the vibrating table 2400 is
uniformly oscillated in three orthogonal directions by the same
configuration as the above-described XY slider 2360. Therefore,
uniform oscillation with less unevenness in vibrating states
throughout the entire vibrating table 2400 becomes possible.
Furthermore, since the vibrating table 2400 is oscillated in three
orthogonal directions via the biaxial sliders (YZ slider 2160, ZX
slider 2260, XY slider 2360) that have the same configuration,
oscillation with lesser directionalities becomes possible.
[0263] It is noted that, if a height of the vibrating table 2400 is
short, the YZ slider 2160 and the ZX slider 2260 may be configured
with six cross guides 2164, 2264 arranged in two rows x three
columns, obtained by removing three cross guides on the upper row
or the lower row, among the nine cross guides 2164, 2264 arranged
in three rows x three columns in the second embodiment. In this
case, since, similarly to the variation 360A (FIG. 34), the same
number of the first orientation cross guides and the second
orientation cross guides are alternately arranged in two orthogonal
directions, directionalities in the oscillating performance are
reduced and it becomes possible to further uniformly oscillate each
part of the vibrating table 2400.
Third Embodiment
[0264] FIG. 41 is an enlarged perspective view (partially
transparent view) around a vibrating table 3400 of an oscillating
device 3000 according to the third embodiment of the present
disclosure. It is noted that, in FIG. 41, only an outline of the
vibrating table 3400 is shown by two-dot lines. Also, illustrations
of the counter balancers are omitted.
[0265] The present embodiment is an embodiment in which the
arrangement configuration of the cross guides 364 (first
orientation cross guides 364P, second orientation cross guides
364S) of the above-described variation 360A (FIG. 34) of the XY
slider is applied to each biaxial slider (YZ slider 3160, ZX slider
3260, XY slider 3360). It is noted that a horizontal actuator 3100A
(including a movable part 3120 and a top plate 3124b), a horizontal
actuator 3200A (including a movable part 3220 and a top plate
3224b), a vertical actuator 3300A (including a movable part 3320
and a top plate 3324b), a cross guide 3164 (including a Y-axis rail
3164a/Y and a Z-axis rail 3164a/Z), a cross guide 3264 (including
an X-axis rail 3264a/X and a Z-axis rail 3264a/Z) and a cross guide
3364 (including an X-axis rail 3364a/X and a Y-axis rail 3364a/Y)
have the same configurations as the horizontal actuator 2100A, the
horizontal actuator 2200A, the vertical actuator 2300A, a cross
guide 2164, a cross guide 2264 and a cross guide 2364,
respectively.
[0266] Since the YZ slider 3160 and the ZX slider 3260 of the
present embodiment couple the vibrating table 3400 to respective
horizontal actuators 3100A and 3200A by a larger number of the
cross guides 3164 and the cross guides 3264 than the YZ slider 160
and the ZX slider 260 of the first embodiment, it is possible to
further uniformly oscillate the vibrating table 3400. Furthermore,
since, similarly to the variation 360A (FIG. 34), the YZ slider
3160 and the ZX slider 3260 of the present embodiment have
configurations in which the same number of the first orientation
cross guides and the second orientation cross guides are
alternately arranged, directionalities in the oscillating
performance are reduced and it becomes possible to further
uniformly oscillate each part of the vibrating table 3400.
Fourth Embodiment
[0267] Next, the fourth embodiment of the present disclosure will
be described. The fourth embodiment differs from the
above-described first embodiment only in the configurations of the
biaxial sliders (slide coupling mechanisms). In the following
description of the fourth embodiment, differences from the first
embodiment will mainly be described, and descriptions of
configurations that are common to those of the first embodiment are
herein omitted.
[0268] FIG. 42, FIG. 43 and FIG. 44 are an enlarged front view, an
enlarged side view and an enlarged plan view around a vibrating
table 4400 of an oscillating device 4000 according to the fourth
embodiment of the present disclosure, respectively.
[0269] The present embodiment differs from the configuration of the
first embodiment in that, in cross guide parts 4164, 4264, 4364 of
biaxial sliders (YZ slider 4160, ZX slider 4260, XY slider 4360),
coupling plates 4164c, 4264c, 4364c are used to couple the linear
guides to improve rigidities of the cross carriage parts.
[0270] As shown in FIGS. 43-44, the YZ slider 4160 of the present
embodiment includes three Y-axis linear guides 4164/Y (Y-axis rails
4164a/Y and Y-axis carriages 4164b/Y), five Z-axis linear guides
4164/Z (Z-axis rails 4164a/Z and Z-axis carriages 4164b/Z), and a
coupling plate 4164c that couples all the Y-axis linear guides
4164/Y and the Z-axis linear guides 4164/Z. Similarly to the A-type
carriage 364b/A of the first embodiment, the Y-axis carriage
4164b/Y and the Z-axis carriage 4164b/Z are eight-streak type
carriages, but unlike the A-type carriage 364b/A, lowering of
aspect ratios (shortening) and weight reductions by forming the
notches C1, C2 are not made. It is noted that the A-type carriage
364b/A may be used as the Y-axis carriage 4164b/Y and the Z-axis
carriage 4164b/Z. Also, the same carriage as the Y-axis carriage
4164b/Y (Z-axis carriage 4164b/Z) may be used in place of the
A-type carriage 364b/A of other embodiments.
[0271] As shown in FIG. 44, the Y-axis linear guide 4164/Y is
configured with one Y-axis rail 4164a/Y and two Y-axis carriages
4164b/Y.
[0272] As shown in FIG. 43, the Y-axis carriages 4164b/Y of three
Y-axis linear guides 4164/Y are arranged in the Z-axis direction
with substantially no gap therebetween, and are fixed to a tip face
of a coupling arm 4162. Also, the Y-axis rails 4164a/Y are fixed to
one face of the coupling plate 4164c. It is noted that the three
Y-axis linear guides 4164/Y may be arranged in the Z-axis direction
with intervals therebetween. In this case, to give sufficient
rigidity to the YZ slider 4160, it is preferable that the intervals
between the Y-axis linear guides 4164/Y are made narrower than a
width (a size in the Z-axis direction) of the Y-axis carriage
4164b/Y.
[0273] The oscillating performance is improved by attaching the
Y-axis carriage 4164b/Y, having large mass, not to the coupling
plate 4164c which is oscillated in two axial directions (X-axis
direction, Y-axis direction) but to the coupling arm 4162 which is
oscillated only in the X-axis direction.
[0274] Also, since the Y-axis rail 4164a/Y has uniform mass
distribution in the Y-axis direction, occurrence of vibration due
to weight distribution changes when oscillated in the Y-axis
direction is low. Therefore, occurrence of vibration noises is
reduced by attaching the Y-axis rails 4164a/Y to the coupling plate
4164c which is oscillated in the Y-axis direction.
[0275] On the other hand, the Z-axis linear guide 4164/Z is
configured with one Z-axis rail 4164a/Z and one Z-axis carriage
4164b/Z.
[0276] As shown in FIG. 44, the Z-axis carriages 4164b/Z of five
Z-axis linear guides 4164/Z are arranged in the Y-axis direction
with substantially no gap therebetween, and are fixed to the other
face of the coupling plate 4164c. Also, the Z-axis rails 4164a/Z
are fixed to a side face of the vibrating table 4400. It is noted
that the five Z-axis linear guides 4164/Z may be arranged in the
Y-axis direction with intervals therebetween. In this case, to give
sufficient rigidity to the YZ slider 4160, it is preferable that
the intervals between the Z-axis linear guides 4164/Z are made
narrower than a width (a size in the Y-axis direction) of the
Z-axis carriage 4164b/Z.
[0277] In the present embodiment, the three Y-axis linear guides
4164/Y are arranged in the Z-axis direction with no gap
therebetween. Similarly, the five Z-axis linear guides 4164/Z are
arranged in the Y-axis direction with no gap therebetween.
Furthermore, all the Y-axis rails 4164a/Y and the Z-axis carriages
4164b/Z are directly fixed to the coupling plate 4164c which has
sufficiently high rigidity. By this configuration, a rigidity of
the YZ slider 4160 (especially a rigidity of the coupling part in
which the coupling plate 4164c, the Y-axis rails 4164a/Y and the
Z-axis carriages 4164b/Z are integrally fixed) improves, and
thereby makes the resonance frequency higher.
[0278] The oscillating performance is improved by attaching the
Z-axis carriage 4164b/Z, having large mass, not to the vibrating
table 4400 which is oscillated in three axial directions (X-axis
direction, Y-axis direction, Z-axis direction) but to the coupling
plate 4164c which is oscillated only in two axial directions
(X-axis direction, Y-axis direction).
[0279] Also, occurrence of vibration noises is reduced by attaching
the Z-axis rails 4164a/Z to the vibrating table 4400 which is
oscillated in the Z-axis direction.
[0280] Also, on one face of the coupling plate 4164c, a plurality
of the Y-axis rails 4164a/Y are spread substantially all over the
surface, and the coupling plate 4164c is oscillated in the X-axis
direction via a plurality of the Y-axis rails 4164a/Y that evenly
cover one face of the coupling plate 4164c. Therefore, the entire
coupling plate 4164c is uniformly oscillated in the X-axis
direction. Furthermore, oscillating forces transmitted from the
Y-axis linear guides 4164/Y are averaged by the coupling plate
4164c having a high rigidity, and are transmitted to the vibrating
table 4400 via the Z-axis linear guides 4164/Z as a more uniform
oscillating force.
[0281] Similarly, on a side face of the vibrating table 4400
opposing the movable part 120 of the X-axis oscillating unit, a
plurality of the Z-axis rails 4164a/Z are spread substantially all
over the surface, and the vibrating table 4400 is oscillated in the
X-axis direction via a plurality of the Z-axis rails 4164a/Z that
evenly cover this side face. Therefore, the entire vibrating table
4400 is uniformly oscillated in the X-axis direction, and uniform
oscillation with less unevenness in accelerations and jerk inside
the vibrating table 4400 becomes possible.
[0282] Since the ZX slider 4260 has the same configuration as the
above-described YZ slider 4160, detailed descriptions of a coupling
arm 4262, X-axis linear guides 4264/X (X-axis rails 4264a/X and
X-axis carriages 4264b/X) and Z-axis linear guides 4264/Z (Z-axis
rails 4264a/Z and Z-axis carriages 4264b/Z) of the ZX slider 4260
are herein omitted.
[0283] As shown in FIGS. 42-43, the XY slider 4360 of the present
embodiment includes three X-axis linear guides 4364/X (X-axis rails
4364a/X and X-axis carriages 4364b/X), three Y-axis linear guides
4364/Y (Y-axis rails 4364a/Y and Y-axis carriages 4364b/Y), and a
coupling plate 4364c that couples all the X-axis linear guides
4364/X and the Y-axis linear guides 4364/Y. The X-axis carriage
4364b/X and the Y-axis carriage 4364b/Y have the same
configurations as the Y-axis carriage 4164b/Y and the Z-axis
carriage 4164b/Z.
[0284] As shown in FIG. 43, the X-axis linear guide 4364/X is
configured with one X-axis rail 4364a/X and two X-axis carriages
4364b/X.
[0285] Also, as shown in FIG. 42, the X-axis rails 4364a/X of the
three X-axis linear guides 4364/X are arranged in the Y-axis
direction at regular intervals, and are fixed to a tip face of the
movable part 320 of the Z-axis oscillating unit 300. The X-axis
carriages 4364b/X are fixed to a lower face of the coupling plate
4364c.
[0286] The Y-axis linear guide 4364/Y is also configured with one
Y-axis rail 4364a/Y and two Y-axis carriages 4364b/Y.
[0287] Also, as shown in FIG. 43, the Y-axis rails 4364a/Y of the
three Y-axis linear guides 4364/Y are arranged in the X-axis
direction at regular intervals, and are fixed to a top face of the
coupling plate 4364c. The Y-axis carriages 4364a/Y are fixed to a
lower face of the vibrating table 4400.
[0288] In the present embodiment, the three X-axis linear guides
4364/X are arranged at intervals narrower than a width (a size in
the Y-axis direction) of the X-axis carriage 4364b/X. Similarly,
the three Y-axis linear guides 4364/Y are arranged at intervals
narrower than a width (a size in the X-axis direction) of the
Y-axis carriage 4364b/Y. Furthermore, all the X-axis carriages
4364b/X and the Y-axis rails 4364a/Y are directly fixed to the
coupling plate 4364c which has sufficiently high rigidity. By this
configuration, a rigidity of the XY slider 4360 (especially a
rigidity of the coupling part in which the coupling plate 4364c,
the X-axis carriages 4364b/X and the Y-axis rails 4364a/Y are
integrally fixed) improves, and thereby makes the resonance
frequency higher.
[0289] It is noted that, although, in the present embodiment, the
X-axis linear guides 4364/X and the Y-axis linear guides 4364/Y of
the XY slider 4360 are arranged with intervals therebetween,
similarly to the Y-axis linear guides 4164/Y and the Z-axis linear
guides 4164/Z of the YZ slider 4160, the X-axis linear guides
4364/X and the Y-axis linear guides 4364/Y may be arranged with
substantially no gap therebetween.
[0290] Furthermore, although the coupling plates 4164c, 4264c,
4364c of the present embodiment are formed of stainless steel, if
the oscillating performance of higher frequency is required,
lighter structure materials such as aluminium alloys such as
duralumin, magnesium alloys, carbon fiber composite materials or
the like may be used to reduce inertia of the biaxial sliders.
Fifth Embodiment
[0291] Next, the fifth embodiment of the present disclosure will be
described. FIG. 45 is an external view of an oscillating device
5000 according to the fifth embodiment of the present disclosure.
The fifth embodiment differs from the first embodiment in the
configurations of the linear guides which are used in the biaxial
sliders (slide coupling mechanisms), the movable part support
mechanisms and the fixing part support mechanisms, and in the
configurations of the biaxial sliders. In the following description
of the fifth embodiment, differences from the first embodiment will
mainly be described, and descriptions of configurations that are
common to those of the first embodiment are herein omitted.
[0292] Firstly, configurations of ZX slider 5260 which couples a
Y-axis oscillating unit 5200 and a vibrating table 5400 will be
described.
[0293] FIG. 46 is a diagram showing a distal end of the Y-axis
oscillating unit 5200 to which the ZX slider 5260 is attached. The
ZX slider 5260 includes two Z-axis rails 5264a/Z, four Z-axis
carriages 5264b/Z, four X-axis carriages 5264b/X, two X-axis rails
5264a/X and a coupling arm 5262. The coupling arm 5262 is a
supporting member which is fixed to a top plate 5224b of an
extension frame 5224.
[0294] The two Z-axis rails 5264a/Z extending in the Z-axis
direction are arranged in the X-axis direction with a predetermined
interval therebetween, and are fixed to the coupling arm 5262. To
each Z-axis rail 5264a/Z, two Z-axis carriages 5264b/Z which
slidably engage with the Z-axis rail 5264a/Z are mounted.
[0295] Also, the two X-axis rails 5264a/X extending in the X-axis
direction are arranged in the Z-axis direction with a predetermined
interval therebetween, and are attached to a side face of the
vibrating table 5400 (FIG. 45) opposing the Y-axis oscillating unit
5200. To each X-axis rail 5264a/X, two X-axis carriages 5264b/X
which slidably engage with the X-axis rail 5264a/X are mounted.
[0296] Each Z-axis carriage 5264b/Z is integrally fixed to one of
the X-axis carriages 5264b/X by bolts in a state where top faces of
their carriages are superimposed with each other, thereby forming a
cross carriage 5264.
[0297] A pair of the Z-axis rails 5264a/Z and a pair of the X-axis
rails 5264a/X are arranged in a curb shape, and are coupled by the
cross carriages 5264 at positions where they intersect each other.
As a result, a movable part 5220 of the Y-axis oscillating unit
5200 (the movable part 5220 being movably supported only in its
driving direction by a movable part support mechanism 5240) and the
vibrating table 5400 are coupled slidably in both the X-axis
direction and the Z-axis direction.
[0298] As described above, the ZX slider 5260 of the present
embodiment includes a pair of the Z-axis rails 5264a/Z and a pair
of the X-axis rails 5264a/X each arranged in their width directions
(regarding the Z-axis rails 5264a/Z, in the X-axis direction, and
regarding the X-axis rails 5264a/X, in the Z-axis direction) with
intervals therebetween. By this configuration, rigidities of the ZX
slider 5260 against moments of forces about longitudinal axes of
respective rails improve, thereby making it possible to oscillate
with higher frequencies.
[0299] It is more advantageous to make the arrangement interval for
each pair of the rails as wide as possible. In the present
embodiment, the interval for the X-axis rails 5264a/X is limited by
a height of the vibrating table 5400. Therefore, one X-axis rail
5264a/X is attached at an upper end part of the side face of the
vibrating table 5400, and the other X-axis rail 5264a/X is attached
to a lower end part of the side face of the vibrating table 5400.
Also, the arrangement interval for the Z-axis rails 5264a/Z is
limited by a diameter of the movable part 5220 (top plate 5224b) of
the Y-axis oscillating unit 5200. Therefore, as shown in FIG. 46,
the interval for a pair of the Z-axis rail 5264a/Z is a maximum
interval within a range in which each Z-axis rail 5264a/Z does not
protrude outside a cylindrical surface formed by extending an outer
peripheral surface of the movable part 5220 in the Y-axis
direction.
[0300] It is also noted that, since the X-axis rail 5264a/X is
longer than the X-axis carriage 5264b/X, and the width (X-axis
direction) of the vibrating table 5400 is greater than the width of
the coupling arm 5262, it becomes possible to widen a sliding width
of the ZX slider 5260 in the X-axis direction. Also, since the
width of the vibrating table 5400 is greater than the height
(Z-axis direction) of the vibrating table 5400, it becomes possible
to further widen the sliding width of the ZX slider 5260 in the
X-axis direction by attaching the X-axis rail 5264a/X to the
vibrating table.
[0301] Next, internal structures of a Z-axis linear guide 5264/Z
configured with the Z-axis rails 5264a/Z and the Z-axis carriages
5264b/Z will be described. It is noted that other linear guides
which are used in the oscillating device 5000 have the same
structures as the Z-axis linear guide 5264/Z.
[0302] FIG. 48 is a longitudinal section view of the Z-axis rail
5264a/Z and the Z-axis carriage 5264b/Z of the ZX slider 5260 cut
along a plane perpendicular to a longitudinal axis of the Z-axis
rail 5264a/Z (i.e., XY plane). Also, FIG. 49 is a figure viewing
from the arrow direction of I-I line of FIG. 48. The Z-axis linear
guide 5264/Z of the present embodiment is a linear guide in which
rollers are used as the rolling bodies. By using rollers as the
rolling bodies, high positional accuracies and rigidities can be
obtained. It is noted that balls or linear guides can be used as
the rolling bodies.
[0303] On each of both side faces in the Y-axis direction of the
Z-axis rail 5264a/Z shown in FIG. 48, a groove GR having a
trapezoidal sectional shape and extending in the Z-axis direction
is formed. Also, as shown in FIG. 48 and FIG. 49, to the Z-axis
carriage 5264b/Z, the groove GR extending in the Z-axis direction
is formed such that the groove GR surrounds the Z-axis rail
5264a/Z. To each side wall of the groove GR, a protruding part PR
extending along the groove GR of the Z-axis rail 5264a/Z is formed.
To the protruding part PR, a pair of inclined faces, the inclined
faces of the pair being parallel to respective inclined faces of
the trapezoidal groove GR of the Z-axis rail 5264a/Z, is formed.
Between the four inclined faces of a pair of the grooves GR and the
opposing inclined faces of the protruding part PR, respective gaps
are formed. In each of these four gaps, a plurality of rollers RE'
(RE'h, RE'i, RE'j, RE'k) made of stainless steel and a retainer RT'
made of resin and configured to rotatably retain and couple the
rollers are accommodated. Each of the rollers RE' is retained by
being nipped between the inclined face of the groove GR and the
inclined face of the protruding part PR. [0308]Also, inside the
Z-axis carriage 5264b/Z, four no-load paths (roller escape
passages) Q' (Q'a, Q'b, Q'c, Q'd), being parallel to four
respective gaps described above, are formed. As shown in FIG. 49,
the no-load paths Q'a, Q'b, Q'c, Q'd communicate with respective
gaps at both ends thereof. Thereby, circulating passages for
allowing the rollers RE' (RE'h, RE'i, RE'j, RE'k) and the retainer
RT' to circulate are formed.
[0304] As the Z-axis carriage 5264b/Z moves with respect to the
Z-axis rail 5264a/Z in the Z-axis direction, a plurality of rollers
RE'h, RE'i, RE'j, RE'k circulate in respective circulating passages
CP'a, CP'b, CP'c, CP'd along with the retainer RT'. Therefore, even
if large loads are applied in directions different from the Z-axis
direction, the carriage can be supported by a plurality of rollers
and a resistance in the Z-axis direction is maintained low by the
rolling of the rollers RE' (RE'h, RE'i, RE'j, RE'k), and thus the
Z-axis carriage 5264b/Z can be moved smoothly with respect to the
Z-axis rail 5264a/Z.
[0305] As shown in FIG. 49, the retainer RT' that couples a
plurality of rollers (e.g., rollers RE'k) has a plurality of spacer
parts RT's positioned between the rollers RE'k and a pair of bands
RT'b that couples a plurality of the spacer parts RT's. Both ends
of each spacer part RT's are fixed to respective bands RT'b of the
pair to form the ladder-like retainer RT'. Each roller RE'k is
retained in a space surrounded by a pair of adjacent spacer parts
RT's and the pair of bands RT'b.
[0306] Also, by interposing the spacer parts RT's of the retainer
RT' having low hardness between the rollers RE'k, oil film shortage
and/or abrasion due to direct contacts between the rollers RE'k
with very narrow contact surface area are prevented, friction
resistance decreases, and the product life drastically extends.
[0307] By coupling the Y-axis oscillating unit 5200 and the
vibrating table 5400 via the ZX slider 5260 capable of sliding in
the X-axis direction and the Z-axis direction with very small
friction resistance as described above, vibration components of the
vibrating table 5400 in the X-axis direction and the Z-axis
direction will not be transmitted to the Y-axis oscillating unit
5200 even if the vibrating table 5400 is vibrated in the X-axis
direction and the Z-axis direction by the X-axis oscillating unit
5100 and a Z-axis oscillating unit 5300, respectively. Also, since
the vibrating table 5400 hardly receives forces in the Z-axis
direction and the X-axis direction by the driving of the Y-axis
oscillating unit 5200, oscillation with less crosstalk becomes
possible.
[0308] Furthermore, the YZ slider 5160 which couples the X-axis
oscillating unit 5100 and the vibrating table 5400 also has the
same configuration as the ZX slider 5260, and the vibrating table
5400 is coupled to the movable part of the X-axis oscillating unit
5100 slidably in the Y-axis direction and the Z-axis direction.
Therefore, vibration components of the vibrating table 5400 in the
Y-axis direction and the Z-axis direction will not be transmitted
to the X-axis oscillating unit 5100 even if the vibrating table
5400 is vibrated in the Y-axis direction and the Z-axis direction
by the Y-axis oscillating unit 5200 and the Z-axis oscillating unit
5300, respectively. Also, since the vibrating table 5400 hardly
receives forces in the Y-axis direction and the Z-axis direction by
the driving of the X-axis oscillating unit 5100, oscillation with
less crosstalk becomes possible.
[0309] Next, a configuration of an XY slider 5360 that couples the
Z-axis oscillating unit 5300 and the vibrating table 5400 will be
described.
[0310] FIG. 47 is a side view around the XY slider 5360. FIG. 50 is
a diagram illustrating arrangements of rails of the XY slider 5360
to be attached to a top plate 5362 of a movable part 5320 of the
Z-axis oscillating unit 5300 (the movable part 5320 being movably
supported only in its driving direction by a movable part support
mechanism 5340).
[0311] The XY slider 5360 includes four cross guides 5364. The
cross guide 5364 (5364P, 5364S) includes one X-axis linear guide
5364/X (5364/XL, 5364/XH) and one Y-axis linear guide 5364/Y
(5364/YH, 5364/YL). The X-axis linear guide 5364/X is configured
with one X-axis rail 5364a/X (5364a/XL, 5364a/XH) and one X-axis
carriage 5364b/X (5364b/XL, 5364b/XH), and the Y-axis linear guide
5364/Y is configured with one Y-axis rail 5364a/Y (5364a/YH,
5364a/YL) and one Y-axis carriage 5364b/Y (5364b/YH, 5364b/YL).
[0312] The X-axis carriage 5364b/X and the Y-axis carriage 5364b/Y
are integrally fixed by bolts in a state where top faces of the
carriages are superimposed with each other, thereby forming a cross
carriage. This cross carriage has the same configuration as the
cross carriage 5264 of the ZX slider 5260 described above.
[0313] The cross guide 5364 includes the first orientation cross
guide 5364P of which the X-axis linear guide 5364/X is attached to
the vibrating table 5400, and the second orientation cross guide
5364S of which the Y-axis linear guide 5364/Y is attached to the
vibrating table 5400. The X-axis rail 5364a/XL of the cross guide
5364P is attached to the top face of the top plate 5362, and the
Y-axis rail 5364a/YH is attached to a lower face of the vibrating
table 5400. Also, the Y-axis rail 5364a/YL of the cross guide 5364S
is attached to the top face of the top plate 5362, and the X-axis
rail 5364a/XH is attached to the lower face of the vibrating table
5400. That is, each cross guide 5364 couples the movable part 5320
of the Z-axis oscillating unit 5300 and the vibrating table 5400
slidably in the X-axis direction and in the Y-axis direction.
[0314] It is noted that the X-axis linear guide 5364/X and the
Y-axis linear guide 5364/Y attached to the top plate 5362 will be
referred to as a lower X-axis linear guide 5364/XL (lower X-axis
rail 5364a/XL, lower X-axis carriage 5364b/XL) and a lower Y-axis
linear guide 5364/YL (lower Y-axis rail 5364a/YL, lower Y-axis
carriage 5364b/YL), respectively. Also, the X-axis linear guide
5364/X and the Y-axis linear guide 5364/Y attached to the vibrating
table 5400 will be referred to as an upper X-axis linear guide
5364/XH (upper X-axis rail 5364a/XH, upper X-axis carriage
5364b/XH) and an upper Y-axis linear guide 5364/YH (upper Y-axis
rail 5364a/YH, upper Y-axis carriage 5364b/YH), respectively.
[0315] As shown in FIG. 50, the four cross guides 5364 are attached
at four corners of the top face of the substantially square shaped
top plate 5362. Also, the cross guides 5364P and 5364S are
alternately arranged around a central axis Ax of the Z-axis
oscillating unit 5300. That is, the arrangement of the cross guides
5364P and 5364S have four times rotation symmetry about the central
axis Ax. By this arrangement of the cross guides 5364, the mass
distribution of the XY slider 5360 about the central axis Ax is
levelized. As a result, response characteristics of the XY slider
5360 to vibrations in the X-axis direction and the Y-axis direction
are made more homogenous.
[0316] Also, the X-axis carriage 5364b/X and the Y-axis carriage
5364b/Y have the same structures apart from the types of the
attachment holes (Four through holes are formed on the X-axis
carriage 5364b/X, and four screw holes are formed on the Y-axis
carriage 5364b/Y). Furthermore, the X-axis rail 5364a/X and the
Y-axis rail 5364a/Y are the same. Each linear guide (X-axis linear
guide 5364/X, Y-axis linear guide 5364/Y) has different mass
distributions in the X-axis direction and in the Y-axis direction.
However, the mass distributions in the X-axis direction and in the
Y-axis direction are levelized by coupling the two linear guides to
form the cross guide 5364. The response characteristics of the XY
slider 5360 to vibrations in the X-axis direction and the Y-axis
direction are made more homogenous by this configuration as
well.
[0317] Also, each oscillating unit (X-axis oscillating unit 5100,
Y-axis oscillating unit 5200, Z-axis oscillating unit 5300) is
attached to a device base 5500 via a pair of supporting units 5150,
5250, 5350 (fixing part support support mechanism). The supporting
unit 5150, 5250, 5350 is a cushioning device including elastic
components (coil springs or air springs) that elastically support
each oscillating unit 5100, 5200, 5300, and suppress transmission
of vibration (especially the high frequency components) of each
oscillating unit in the oscillating direction to the device base
5500. By attaching each oscillating unit 5100, 5200, 5300 to the
device base 5500 via the supporting unit 5150, 5250, 5350,
transmission of vibrations between the oscillating units 5100,
5200, 5300 are suppressed, and triaxial oscillation with less
crosstalk and higher accuracy becomes possible.
Sixth Embodiment
[0318] Next, the sixth embodiment of the present disclosure will be
described. The sixth embodiment differs from the first embodiment
in the frame structures of the movable parts of respective
electrodynamic actuators (horizontal actuators in the X-axis
direction and the Y-axis direction, and a vertical actuator 6300A).
In the following description of the sixth embodiment, differences
from the first embodiment will mainly be described, and
descriptions of configurations that are common to those of the
first embodiment are herein omitted.
[0319] FIG. 51 is a front view of an electrodynamic triaxial
oscillating device 6000 (only a Z-axis oscillating unit 6300, the
vibrating table 400, the X-axis counter balancer 610, the Y-axis
counter balancer 620 and the Z-axis counter balancer 630 are shown)
according to the sixth embodiment of the present disclosure. The
movable part 6320 of the vertical actuator 6300A of the sixth
embodiment includes a frame 6322.
[0320] FIG. 52 and FIG. 53 are perspective views showing an outer
appearance of the frame 6322. FIG. 52 is a diagram showing the
frame 6322 viewed from the front side (vibrating table 400 side),
and FIG. 53 a diagram showing the frame 6322 viewed from the back
side. The frame 6322 as a whole is formed to have a substantially
cylindrical shape of which the central axis extends in the driving
direction (Z-axis direction).
[0321] The frame 6322 of the present embodiment is formed by the
casting and cutting of aluminium alloys, but materials and
processing methods for the frame 6322 are not limited to the above.
For example, the frame 6322 may be made of other metallic materials
such as stainless steels, titanium alloys or magnesium alloys, or
resin materials such as glass fiber reinforced plastics (GFRP) or
carbon fiber reinforced plastics (CFRP). Also, the frame 6322 may
be integrally formed by welding, adhesion, bonding, injection
molding, three-dimensional modeling (3D printer) or the like.
[0322] The frame 6322 includes a substantially tubular main column
6322a extending in the drive direction, eight plate-like ribs 6322b
(6322b1, 6322b2) radially extending from an outer peripheral
surface of the main column 6322a, a substantially circular front
side peripheral edge part 6322c which couples distal ends of the
eight ribs 6322b at the front side, a substantially circular back
side peripheral edge part 6322d which couples distal ends of the
eight ribs 6322b at the back side, and a tubular intermediate
coupling part 6322e which couples intermediate portions in the
radial direction (radiation direction) of the eight ribs 6322b at
the front side. It is noted that, in the main column 6322a, the rod
326 (see FIG. 8) fits from below.
[0323] By adopting the configuration in which the eight ribs 6322b
are circularly coupled by the front side peripheral edge part
6322c, the back side peripheral edge part 6322d and the
intermediate coupling part 6322e, it is made possible to satisfy
both high rigidity and weight saving of the frame 6322. Also, by
providing the intermediate coupling part 6322e, it is made possible
to more evenly support a base plate 6362 (to support the base plate
6362 with a face).
[0324] On a front side of the frame 6322 (specifically, the ribs
6322b, the front side peripheral edge part 6322c and the
intermediate coupling part 6322e), a plurality of tapped holes
6322ft for attaching the base plate 6362 are formed. Also, on a
back side of the frame 6322 (specifically, the back side peripheral
edge part 6322d), a plurality of screw holes 6322rt for attaching
the drive coil 321 are formed.
[0325] On each of end faces (outer peripheral surfaces) of four
ribs 6322b1 out of the eight ribs 6322b, a row of screw holes
6322bt for attaching the Z-axis rails 344a of the movable part
support mechanism 340 is formed. Also, on end faces of the
remaining four ribs 6322b2, fitting grooves 6322bg which fit with
the coil attaching parts 322d are formed. The ribs 6322b1 and the
ribs 6322b2 are alternately arranged in a circumferential
direction.
[0326] On a front side of an outer periphery of the front side
peripheral edge part 6322c, recessed parts 6322ca are formed near
the ribs 6322b so as not to interfere with the Z-axis carriages
344b of the movable part support mechanism 340. On the bottom of
the recessed part 6322ca, a level difference 6322cb for positioning
the Z-axis rail 344a in the horizontal direction is formed along
the row of the holes 6322bt. An end face of the rib 6322b1 on a
front side on which the Z-axis rail 344a is to be attached is also
offset toward the main column 6322a up to the same depth as the
bottom of the recessed part 6322ca, thereby forming a rail
attaching surface 6322br. Also, on the end face of the rib 6322b1,
a level difference 6322bs for positioning the Z-axis rail 344a in
the vertical direction is formed at a boundary of the rail
attaching surface 6322br.
[0327] The movable part 320 of the first embodiment described above
includes a split type (two-piece) frame in which an extension frame
324 is coupled to the main frame 322 with bolts. By adopting the
split type frame structure, it is made possible to additionally
equip a standard electrodynamic actuator, having the main frame 322
only, with the movable part support mechanism 340.
[0328] However, since the split type frame structure requires a
structure for coupling the two parts (the main frame 322 and the
extension frame 324), and furthermore, the structure of the entire
frame cannot be optimized (i.e., there is no choice but to design
for the existing main frame 322), the split type frame structure
causes the weight of the frame to increase, and thereby causes
weight imbalance. Therefore, the split type frame structure is one
of the causes that restrict the oscillating performance of the
electrodynamic actuator. Furthermore, since the split type frame
requires a process for coupling the two parts, more man-hour is
necessary to assemble.
[0329] In the present embodiment, the integrated (one-piece) frame
6322 is used in place of the main frame 322 and the expansion frame
324 of the first embodiment. With this configuration, since there
is no need to provide a structure for coupling a plurality of parts
of the frame and the flexibility in design can be improved, the
frame 6322 that is lighter, that has higher rigidity, that has
better weight balance, and that can be assembled with less man-hour
can be realized.
[0330] It is noted that, in the first embodiment, the top plate
322b (corresponding to the base plate 6362 of the present
embodiment) for attaching the XY slider 360 is formed integrally
with the expansion frame 324, but in the present embodiment, the
frame 6322 and the base plate 6362 are separate members. By this
configuration, it becomes unnecessary to change the design of the
frame 6322 in accordance with the design of the XY slider 360, and
thus designing and production management of the frame 6322 becomes
easier. Furthermore, as with the first embodiment, the frame 6322
and the base plate 6362 may be integrated.
[0331] It is noted that the frame 6322 of the present embodiment
can also be applied to the first to fifth embodiments.
[0332] The foregoings are descriptions of exemplary embodiments of
the present disclosure. Embodiments of the present disclosure are
not limited to the above-described embodiments, and various
modifications are possible within a range of the technical ideas
expressed by the descriptions in the scope of claims. For example,
configurations of embodiments and the like explicitly illustrated
in this specification and/or configurations in which configurations
of embodiments and the like that are obvious, to a person with
ordinary skills in the art, from this specification are combined
accordingly are also included in the embodiments of this
application.
[0333] Each of the above described embodiments is an example in
which the present disclosure is applied to an electrodynamic
oscillating device, but the present disclosure is not limited to
this configuration and can be applied to oscillating devices which
use other types of oscillating units (e.g., a linear motion
oscillating unit in which a rotary electric motor or a hydraulic
rotary motor and a rotation/linear motion conversion mechanism such
as a feed screw mechanism are combined, a linear motor and the
like) as well. For example, the present disclosure can be applied
to a conventionally known oscillating unit in which a servo motor
and a ball screw mechanism are used.
[0334] Also, each of the above described embodiments is an example
in which the present disclosure is applied to an electrodynamic
triaxial simultaneous oscillating device, but the present
disclosure can of course be applied to uniaxial and biaxial
oscillating devices as well.
[0335] Also, in the first embodiment, an air spring is used as a
cushioning means for attenuating vibration of the supporting unit
350 (fixing part support mechanism), but configurations that use
other types of springs that have vibration prevention effects
(e.g., a coil spring made of steel) or elastic bodies (such as a
vibration prevention rubber) are also possible.
[0336] The number of linear guides (one, two, three, four, or five
or more) for each axis and their arrangements in the slide coupling
mechanism may be selected accordingly in accordance with a size of
a vibrating table, a size and weight distribution of a specimen,
test conditions (frequency and amplitude) and the like. Also, the
number of cross guides the XY slider 360 of the first embodiment
and the YZ slider 2160, the ZX slider 2260 and the XY slider 2360
of the third embodiment include is not limited to nine, but may be
set to an arbitrary number of equal to or more than three in
accordance with a size of a vibrating table, a weight of a
specimen, test conditions and the like.
[0337] In each of the above described embodiments (except for the
fifth embodiment), the balls RE (balls) are used as rolling bodies
of the linear guide, but rollers (skids) may be used as the rolling
bodies.
[0338] In each of the above described embodiments (except for the
fifth embodiment), eight streaks of load paths are formed to the
linear guide, but a plurality of load paths of five streaks, six
streaks, seven streaks, or nine or more streaks may be provided.
Also, in the linear guide of each of the above described
embodiments (except for the fifth embodiment), a plurality of
adjacently formed path pairs are provided, but the load paths need
not be provided with the path pair as a fundamental unit. A
plurality of load paths may be provided at uniform intervals, or
may be provided at completely non-uniform intervals. It is noted
that it is also possible to use the conventional four-streak type
linear guide having four streaks of load paths.
[0339] In each of the above described embodiments, the vertical
direction is referred to as the Z-axis direction, but the vertical
direction may be referred to as the Y-axis direction or the X-axis
direction. Also, it is preferable that each oscillating direction
is in the horizontal direction or the vertical direction, but the
oscillating device may be arranged such that two or more axes of
the three oscillating directions are in the non-vertical and
non-horizontal directions.
[0340] In each of the above described embodiments, the cross guides
are arranged in a square lattice in two orthogonal directions at
regular intervals, but the cross guides may be arranged in a
hexagonal lattice (equilateral triangle pattern). For example, the
XY slider can be made to have a configuration in which the first
orientation cross guide is arranged at the center of gravity of a
equilateral triangle shaped periodic structure (unit lattice) on
the XY plane, and the second orientation cross guide is arranged at
each apex of the equilateral triangle.
[0341] In the first embodiment described above, the opening for
putting the oscillated object in and out of the vibrating table 400
is formed on the top face of the box part 400a, but this opening
may be provided on a side face of the box part.
[0342] In the first embodiment described above, the female screws
421 and the through holes 432, 442 for attaching the oscillated
object are provided on the vibrating table 400, but other types of
attaching mechanisms (e.g., fixing bands, clamps, electromagnets or
the like) for attaching the oscillated object may be provided on
the vibrating table 400.
[0343] The first embodiment described above is an example in which
the present disclosure is applied to an electrodynamic oscillating
device, but the present disclosure is not limited to this
configuration and can be applied to oscillating devices which use
other types of oscillating units (e.g., a linear motion oscillating
unit in which a rotary electric motor or a hydraulic rotary motor
and a rotation/linear motion conversion mechanism such as a feed
screw mechanism are combined, a linear motor, a hydraulic cylinder
and the like) as well.
[0344] Also, the oscillating device 1 of the first embodiment
described above is an example in which the present disclosure is
applied to a biaxial oscillating device, but the present disclosure
can be applied to uniaxial and triaxial oscillating devices as
well.
[0345] Each of the above described embodiments is an example in
which the present disclosure is applied to an electrodynamic
oscillating device, but the present disclosure is not limited to
this configuration and can be applied to oscillating devices which
use other types of oscillating units (e.g., a linear motion
oscillating unit in which a rotary electric motor or a hydraulic
rotary motor and a rotation/linear motion conversion mechanism such
as a feed screw mechanism are combined, a linear motor and the
like) as well. For example, the present disclosure can be applied
to a conventionally known oscillating unit in which a servo motor
and a ball screw mechanism are used.
[0346] Also, each of the above described embodiments is an example
in which the present disclosure is applied to an electrodynamic
triaxial simultaneous oscillating device, but the present
disclosure can of course be applied to uniaxial and biaxial
oscillating devices as well.
[0347] Also, in the first embodiment, an air spring is used as a
cushioning means for attenuating vibration of the supporting unit
350 (fixing part support mechanism), but configurations that use
other types of springs that have vibration prevention effects
(e.g., a coil spring made of steel) or elastic bodies (such as a
vibration prevention rubber) are also possible.
[0348] The number of linear guides (one, two, three, four, or five
or more) for each axis and their arrangements in the slide coupling
mechanism may be selected accordingly in accordance with a size of
a vibrating table, a size and weight distribution of a specimen,
test conditions (frequency and amplitude) and the like. Also, the
number of cross guides the XY slider 360 of the first embodiment
and the YZ slider 2160, the ZX slider 2260 and the XY slider 2360
of the third embodiment include is not limited to nine, but may be
set to an arbitrary number of equal to or more than three in
accordance with a size of a vibrating table, a weight of a
specimen, test conditions and the like.
[0349] In the above described embodiments, the balls RE (balls) are
used as rolling bodies of the linear guide, but rollers (skids) may
be used as the rolling bodies.
[0350] In the above described embodiments, eight streaks of load
paths are formed to the linear guide, but a plurality of load paths
of five streaks, six streaks, seven streaks, or nine or more
streaks may be provided. Also, in the linear guides of the above
described embodiments (except for the fifth embodiment), a
plurality of adjacently formed path pairs are provided, but the
load paths need not be provided with the path pair as a fundamental
unit. A plurality of load paths may be provided at uniform
intervals, or may be provided at completely non-uniform
intervals.
[0351] Furthermore, configurations in which parts of the components
of each of the above described embodiments are removed,
configurations in which a plurality of the above described
embodiments are combined, and configurations in which parts or all
of the components of two or more of the above described embodiments
are combined are also included in the scope of the present
disclosure.
[0352] <Supplement>
[0353] A triaxial oscillating device that oscillates a sample fixed
to a vibrating table in three orthogonal axis directions is known.
To oscillate the sample in three orthogonal axis directions, for
example, the vibrating table and an X-axis actuator for oscillating
the vibrating table in the X-axis direction need to be coupled
slidably in two directions orthogonal to the X-axis (Y-axis
direction and Z-axis direction) with a biaxial slider. An
oscillating device that enables triaxial oscillation at a high
frequency range by adopting biaxial sliders which use roller
bearing type linear guideways (Hereinafter simply referred to as
"linear guide.") that includes rolling bodies is conventionally
known.
[0354] In the conventionally known oscillating device, slide
coupling mechanisms for horizontal driving (YZ slider, ZX slider)
that couple the vibrating table to actuators which drive in
horizontal directions (X-axis actuator, Y-axis actuator) are
connected to the vibrating table via one Y-axis or X-axis rail.
[0355] That is, since the conventionally known oscillating device
is configured to receive moments of forces about the Y-axis (or
X-axis) that act on the slide coupling mechanism for horizontal
driving only with one thin Y-axis rail (or X-axis rail), a rigidity
against the moments of forces about the Y-axis (or X-axis) is lower
than a rigidity against moments of forces about the Z-axis. This
was one of the causes that block improvement in an accuracy of the
oscillating device (especially the improvement in the oscillating
performance at high frequency ranges).
[0356] An aspect of the present disclosure is made in view of the
above situation, and the object of the present disclosure is to
improve the oscillating performance by improving the rigidity of
the slide coupling mechanism.
* * * * *