U.S. patent application number 17/645124 was filed with the patent office on 2022-04-14 for liquid droplet discharging apparatus.
The applicant listed for this patent is Tokyo Electron Limited. Invention is credited to Yousuke Mine.
Application Number | 20220111667 17/645124 |
Document ID | / |
Family ID | |
Filed Date | 2022-04-14 |
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United States Patent
Application |
20220111667 |
Kind Code |
A1 |
Mine; Yousuke |
April 14, 2022 |
LIQUID DROPLET DISCHARGING APPARATUS
Abstract
A liquid droplet discharging apparatus includes a transfer
device, a discharging head, a first medium supply, a second medium
supply and an imaging device. The transfer device is configured to
transfer a work along a transfer direction. The discharging head is
configured to discharge a liquid droplet of a functional liquid to
the work. The first medium supply is configured to supply a first
inspection medium, which receives the liquid droplet, in a
direction orthogonal to the transfer direction. The second medium
supply is configured to supply a second inspection medium, which
receives the liquid droplet and is arranged side by side with
respect to the first inspection medium in the transfer direction,
in the direction orthogonal to the transfer direction. The imaging
device is configured to image the liquid droplet discharged to the
first inspection medium and the liquid droplet discharged to the
second inspection medium.
Inventors: |
Mine; Yousuke; (Koshi City,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Tokyo Electron Limited |
Tokyo |
|
JP |
|
|
Appl. No.: |
17/645124 |
Filed: |
December 20, 2021 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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16912920 |
Jun 26, 2020 |
11235599 |
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17645124 |
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International
Class: |
B41J 13/00 20060101
B41J013/00; B41J 29/393 20060101 B41J029/393 |
Foreign Application Data
Date |
Code |
Application Number |
Jun 28, 2019 |
JP |
2019-122059 |
Claims
1. A liquid droplet discharging apparatus, comprising: a chamber
room in which a nitrogen gas atmosphere is formed; a floating-type
transfer device configured to transfer a substrate while floating
the substrate; a discharging head configured to discharge a liquid
droplet of a functional liquid to the substrate in the nitrogen gas
atmosphere; and an inspection device configured to inspect the
liquid droplet discharged from the discharging head.
2. The liquid droplet discharging apparatus of claim 1, wherein the
floating-type transfer device is configured to maintain the
substrate by jetting compressed air toward the substrate from
below.
3. The liquid droplet discharging apparatus of claim 2, wherein the
floating-type transfer device is further configured to support a
periphery of the substrate while maintaining the substrate
horizontally.
4. The liquid droplet discharging apparatus of claim 1, wherein the
floating-type transfer device is configured to transfer the
substrate in a forward-backward direction.
5. The liquid droplet discharging apparatus of claim 1, wherein the
discharging head is configured to perform a drawing operation on
the substrate by an ink-jet method.
6. The liquid droplet discharging apparatus of claim 1, wherein the
discharging head is plural in number arranged in a left-right
direction orthogonal to a transfer direction of the substrate.
7. The liquid droplet discharging apparatus of claim 6, wherein
each of the discharging heads is connected to different functional
liquid bottles, and each of the discharging heads discharges
different kinds of functional liquids supplied from the different
functional liquid bottles.
8. The liquid droplet discharging apparatus of claim 7, wherein the
different kinds of functional liquids includes an ink, a liquid for
forming a hole injection layer (HIL), or a liquid for forming a
hole transport layer (HTL).
9. The liquid droplet discharging apparatus of claim 1, further
comprising, a maintenance unit configured to perform a maintenance
of the discharging head.
10. The liquid droplet discharging apparatus of claim 9, further
comprising, a guide rail, extending in a left-right direction
orthogonal to a transfer direction of the substrate, configured to
allow the discharging head to be movable between a drawing position
where the discharging head performs a drawing operation on the
substrate and a maintenance position where the maintenance of the
discharging head is performed by the maintenance unit.
11. The liquid droplet discharging apparatus of claim 1, wherein
the inspection device comprises an imaging device configured to
image the liquid droplet discharged from the discharging head.
12. The liquid droplet discharging apparatus of claim 11, further
comprising, a control unit configured to adjust a discharge state
of the discharging head based on an imaging result of the liquid
droplet obtained by the imaging device.
13. The liquid droplet discharging apparatus of claim 11, further
comprising, a guide rail extending in a left-right direction
orthogonal to a transfer direction of the substrate, wherein the
imaging device is mounted on the guide rail.
14. The liquid droplet discharging apparatus of claim 13, wherein
the inspection device further comprises a moving device configured
to move the imaging device in the left-right direction.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This is a continuation application of U.S. patent
application Ser. No. 16/912,920, filed on Jun. 26, 2020, which
claims the benefit of Japanese Patent Application No. 2019-122059
filed on Jun. 28, 2019, the entire disclosures of which are
incorporated herein by reference.
TECHNICAL FIELD
[0002] The various aspects and embodiments described herein pertain
generally to a liquid droplet discharging apparatus.
BACKGROUND
[0003] Patent Document 1 describes a technique in which a liquid
droplet of a functional liquid is discharged to an inspection film,
and a discharge state of the liquid droplet is inspected by imaging
the liquid droplet discharged to the inspection film by an
inspection camera.
[0004] Patent Document 1: Japanese Patent Laid-open Publication No.
2018-008231
SUMMARY
[0005] In one exemplary embodiment, a liquid droplet discharging
apparatus includes a transfer device, a discharging head, a first
medium supply, a second medium supply and an imaging device. The
transfer device is configured to transfer a work along a transfer
direction. The discharging head is configured to discharge a liquid
droplet of a functional liquid to the work. The first medium supply
is configured to supply a first inspection medium, which receives
the liquid droplet discharged from the discharging head, in a
direction orthogonal to the transfer direction. The second medium
supply is configured to supply a second inspection medium, which
receives the liquid droplet discharged from the discharging head
and is arranged side by side with respect to the first inspection
medium in the transfer direction, in the direction orthogonal to
the transfer direction. The imaging device is configured to image
the liquid droplet discharged to the first inspection medium and
the liquid droplet discharged to the second inspection medium.
[0006] The foregoing summary is illustrative only and is not
intended to be any way limiting. In addition to the illustrative
aspects, embodiments, and features described above, further
aspects, embodiments, and features will become apparent by
reference to the drawings and the following detailed
description.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] In the detailed description that follows, embodiments are
described as illustrations only since various changes and
modifications will become apparent to those skilled in the art from
the following detailed description. The use of the same reference
numbers in different figures indicates similar or identical
items.
[0008] FIG. 1 is a left side view illustrating a schematic
configuration of a liquid droplet discharging apparatus according
to an exemplary embodiment;
[0009] FIG. 2 is a plan view illustrating a schematic configuration
of the liquid droplet discharging apparatus according to the
exemplary embodiment;
[0010] FIG. 3A is a plan view illustrating a schematic
configuration of a manipulation area according to the exemplary
embodiment;
[0011] FIG. 3B is a side view illustrating a schematic
configuration of a sidewall according to the exemplary
embodiment;
[0012] FIG. 3C is a diagram illustrating an example of a
replacement work for a functional liquid bottle according to the
exemplary embodiment;
[0013] FIG. 4 is a diagram illustrating a schematic configuration
of a part of an inspection device according to the exemplary
embodiment, seen from a positive X-axis direction;
[0014] FIG. 5 is a schematic diagram illustrating a state in which
a slider according to the exemplary embodiment is moved from a
standby position to a first discharge position;
[0015] FIG. 6 is a schematic diagram illustrating a state in which
the slider according to the exemplary embodiment is moved from the
first discharge position to a first imaging position; and
[0016] FIG. 7 is a schematic diagram illustrating a state in which
the slider according to the exemplary embodiment is moved from the
first imaging position to the standby position.
DETAILED DESCRIPTION
[0017] In the following detailed description, reference is made to
the accompanying drawings, which form a part of the description. In
the drawings, similar symbols typically identify similar
components, unless context dictates otherwise. Furthermore, unless
otherwise noted, the description of each successive drawing may
reference features from one or more of the previous drawings to
provide clearer context and a more substantive explanation of the
current exemplary embodiment. Still, the exemplary embodiments
described in the detailed description, drawings, and claims are not
meant to be limiting. Other embodiments may be utilized, and other
changes may be made, without departing from the spirit or scope of
the subject matter presented herein. It will be readily understood
that the aspects of the present disclosure, as generally described
herein and illustrated in the drawings, may be arranged,
substituted, combined, separated, and designed in a wide variety of
different configurations, all of which are explicitly contemplated
herein.
[0018] Hereinafter, an exemplary embodiment of a liquid droplet
discharging apparatus according to the present disclosure will be
described in detail with reference to the accompanying drawings.
Here, however, it should be noted that the liquid droplet
discharging apparatus of the present disclosure is not limited by
the following exemplary embodiment.
[0019] In the various drawings that are referred to in the
following description, for the convenience of explanation, the
X-axis, Y-axis and Z-axis which are orthogonal to each other will
be defined, and an orthogonal coordinates system where the positive
Z-axis direction is set as a vertically upward direction may be
used.
[0020] The X-axis direction is a transfer direction in which a
substrate W as a work is transferred. The Y-axis direction is a
direction orthogonal to the transfer direction. The Z-axis
direction is a direction parallel to the vertical direction.
[0021] Here, a forward-backward direction with the positive X-axis
direction as the front side and the negative X-axis direction as
the rear side is defined, and a left-right direction with the
positive Y-axis direction as the right side and the negative Y-axis
direction as the left side is defined. Further, an up-and-down
direction with the positive Z-axis direction as the upper side and
the negative Z-axis direction as the lower side is defined. The
negative Z-axis direction is the vertical direction.
[0022] A liquid droplet discharging apparatus 1 according to an
exemplary embodiment will be described with reference to FIG. 1 and
FIG. 2. FIG. 1 is a left side view illustrating a schematic
configuration of the liquid droplet discharging apparatus 1
according to the exemplary embodiment. FIG. 2 is a plan view
illustrating a schematic configuration of the liquid droplet
discharging apparatus 1 according to the exemplary embodiment.
[0023] The liquid droplet discharging apparatus 1 is a drawing
apparatus configured to draw on a substrate W by an ink-jet method
while transferring the substrate W in the transfer direction. The
substrate W is one for use in, for example, a flat panel
display.
[0024] The liquid droplet discharging apparatus 1 is accommodated
in a chamber room 100. An inert gas (for example, a nitrogen gas)
is supplied into the chamber room 100. The liquid droplet
discharging apparatus 1 discharges a functional liquid onto the
substrate W in the inert gas atmosphere and performs a drawing
operation on the substrate W. Alternatively, the liquid droplet
discharging apparatus 1 may be an apparatus which is not
accommodated in the chamber room 100.
[0025] The functional liquid includes, besides an ink, a liquid for
forming a hole injection layer (HIL), a hole transport layer (HTL),
or the like.
[0026] An electric chamber 101 in which a control device 8 and the
like are accommodated is provided adjacent to the chamber room 100.
Further, a manipulation area 102 in which a functional liquid
bottle BT (see FIG. 3A) storing the function liquid therein can be
replaced is provided within the chamber room 100. Except a manual
manipulation by an operator, an operation regarding the
manipulation area 102 to be described later is controlled by the
control device 8.
[0027] The manipulation area 102 includes a replacement chamber
1021 into/from which the functional liquid bottle BT is carried in
or out, as shown in FIG. 3A. FIG. 3A is a plan view illustrating a
schematic configuration of the manipulation area 102 according to
the exemplary embodiment.
[0028] The replacement chamber 1021 is provided with a first
partition door 1022 and a second partition door 1023. The first
partition door 1022 is a door configured to partition the
replacement chamber 1021 and the outside. The first partition door
1022 is provided at a sidewall 1024 of the chamber room 100. The
first partition door 1022 is configured to be rotated around an
axis in the Z-axis direction. The second partition door 1023 is a
door configured to separate the replacement chamber 1021 and an
area in which the liquid droplet discharging apparatus 1 (see FIG.
2) is disposed. The second partition door 1023 is configured to be
moved in, for example, the X-axis direction.
[0029] Further, a rail 1025 extending in the left-right direction
is provided in the manipulation area 102. The rail 1025 is
elongated into the replacement chamber 1021. The rail 1025 is
provided with a bottle table 1026 configured to be moved while
carrying the functional liquid bottle BT thereon.
[0030] An opening 1024a and a replacement window 1024b are provided
at the sidewall 1024, as depicted in FIG. 3B. FIG. 3B is a side
view illustrating a schematic configuration of the sidewall 1024
according to the exemplary embodiment. The opening 1024a is opened
or closed as the first partition door 1022 is opened or closed.
Provided at the replacement window 1024b are multiple manipulation
gloves 1027 for receiving hands of the operator inserted therein to
replace the functional liquid bottle BT.
[0031] When replacing the functional liquid bottle BT, a drawing
device 6 (see FIG. 2) is transferred into the manipulation area
102. For example, the drawing device 6 is transferred into the
manipulation area 102 when a maintenance mode is selected and a
bottle replacement button is operated. Further, if a remaining
amount within the functional liquid bottle BT falls below a preset
amount, the drawing device 6 may be automatically transferred into
the manipulation area 102.
[0032] By way of example, the first partition door 1022 and the
second partition door 1023 can be opened after the drawing device 6
is transferred into the manipulation area 102. A non-illustrated
gas intake/exhaust device is connected to the replacement chamber
1021. By enabling the first partition door 1022 to be open or
closed after the inside of the replacement chamber 1021 is replaced
by CDA (Clean Dry Air) or an external atmosphere at an outside of
the apparatus through the gas intake/exhaust device, it is possible
to suppress the inert gas within the replacement chamber 1021 to be
exhausted to the outside at one time. The first partition door 1022
is opened, and a new functional liquid bottle BT is placed on the
bottle table 1026 by the operator. Further, the second partition
door 1023 is kept closed. If the first partition door 1022 is
closed by the operator, the inside of the replacement chamber 1021
is replaced by the inert gas by using the gas intake/exhaust
device. Further, a non-illustrated oxygen concentration meter may
be provided within the replacement chamber 1021. An end point of
the replacement from the inert gas into the CDA or the external
atmosphere of the apparatus and an end point of the replacement
from the CDA or the external atmosphere of the apparatus into the
inert gas may be decided based on whether an oxygen concentration
measured by the oxygen concentration meter has reached a preset
value.
[0033] After the inside of the replacement chamber 1021 is replaced
by the inert gas, the second partition door 1023 is opened, and the
bottle table 1026 is transferred from the replacement chamber 1021
into the area in which the liquid droplet discharging apparatus 1
is disposed. If the bottle table 1026 is sent into the area in
which the liquid droplet discharging apparatus 1 is placed, the
operator inserts his/her hands into the manipulation gloves 1027,
as shown in FIG. 3C, and replaces a functional liquid bottle BT1
after being used by the drawing device 6 with a new functional
liquid bottle BT2 placed on the bottle table 1026. FIG. 3C is a
diagram illustrating an example of a replacement work for the
functional liquid bottle BT.
[0034] Upon the completion of the replacement of the functional
liquid bottle BT, the bottle table 1026 on which the used
functional liquid bottle BT1 is placed is transferred into the
replacement chamber 1021, and the second partition door 1023 is
closed. Thereafter, the inside of the replacement chamber 1021 is
replaced by the external atmosphere of the apparatus or the CDA.
Then, the first partition door 1022 is opened, and the operator is
capable of take out the used functional liquid bottle BT.
[0035] Referring back to FIG. 1 and FIG. 2, the liquid droplet
discharging apparatus 1 is equipped with a mounting table 2, first
guide rails 3, a substrate transfer device 4 (an example of a
transfer device), second guide rails 5, the drawing device 6, an
inspection device 7, and the control device 8.
[0036] The mounting table 2 is elongated in the transfer direction
of the substrate W. That is, the mounting table 2 is elongated in
the forward-backward direction.
[0037] The first guide rails 3 are placed on a top surface of the
mounting table 2. The first guide rails 3 are provided in a pair to
be arranged side by side in the left-right direction. Each of the
first guide rails 3 is elongated in the forward-backward
direction.
[0038] The substrate transfer device 4 is equipped with a work
stage 40, a stage rotator 41, and a slider 42. The substrate
transfer device 4 is configured to transfer the substrate W (work)
in the transfer direction (forward-backward direction).
[0039] The work stage 40 is, for example, a vacuum-attracting stage
and configured to attract the substrate W. The stage rotator 41 is
disposed under the work stage 40 and configured to rotate the work
stage 40 around an axis parallel to the up-and-down direction. That
is, the work stage 40 is supported by the stage rotator 41 such
that it is rotatable around the axis parallel to the up-and-down
direction.
[0040] Further, a work alignment camera (not shown) configured to
image an alignment mark of the substrate W on the work stage 40 is
disposed above the work stage 40. The stage rotator 41 is rotated
around the axis parallel to the up-and-down direction based on an
image obtained by the work alignment camera, and corrects a
position of the substrate W.
[0041] The slider 42 is provided under the stage rotator 41 and
supports the stage rotator 41 and the work stage 40. The slider 42
is fastened to the pair of first guide rails 3 and configured to be
moved along the pair of first guide rails 3 by a driving unit (not
shown), for example, a linear motor provided at at least one of the
pair of first guide rails 3.
[0042] That is, the work stage 40 and the stage rotator 41 are
moved in the forward-backward direction along with the slider 42 as
the slider 42 is moved in the forward-backward direction along the
pair of first guide rails 3. Accordingly, the substrate W is
transferred in the forward-backward direction.
[0043] Further, the substrate transfer device 4 may be a
floating-type transfer device. The floating-type transfer device
supports a periphery of the substrate W from below and moves the
substrate W while maintaining the substrate W horizontally by
jetting compressed air toward the substrate W from below.
[0044] The second guide rails 5 are provided in a pair to be
arranged side by side in the forward-backward direction. Each of
the second guide rails 5 extends in the left-right direction. Each
of the second guide rails 5 is fixed on a top surface of a
supporting member 5a which is formed to have, for example, a door
shape.
[0045] The pair of second guide rails 5 extend more to the left
than, for example, the mounting table 2. A maintenance unit 90 is
provided between the pair of second guide rails 5 which extend more
to the left than the mounting table 2. The second guide rails 5 are
configured to allow the drawing device 6 to be movable in the
left-right direction between a drawing position where the drawing
device 6 performs the drawing operation on the substrate W and a
maintenance position where the maintenance is performed by the
maintenance unit 90.
[0046] The maintenance unit 90 is configured to perform maintenance
of a nozzle head 63 to be described later, and resolves or
suppresses a discharge defect of the nozzle head 63 or the
like.
[0047] The drawing device 6 is plural in number, and the drawing
devices 6 are arranged in the left-right direction. By way of
example, three drawing devices 6 are arranged in the left-right
direction. Further, the number of the drawing devices 6 is not
limited thereto. Each drawing device 6 is equipped with a carriage
plate 60, a carriage rotator 61, a carriage 62, and the nozzle head
63 (an example of a discharging head).
[0048] The carriage plate 60 is fastened to the pair of second
guide rails 5, and configured to be moved in the left-right
direction along the pair of second guide rails 5 by a driving unit
(not shown), for example, a linear motor provided at at least one
of the pair of second guide rails 5. Further, a plurality of
carriage plates 60 may be configured to be movable in the
left-right direction as a single body.
[0049] The carriage rotator 61 is disposed under the carriage plate
60. The carriage rotator 61 is fastened to a center of the carriage
plate 60 in the forward-backward direction. The carriage 62 is
mounted to a lower end of the carriage rotator 61. The carriage
rotator 61 is configured to support the carriage 62 such that the
carriage 62 is rotatable around an axis parallel to the up-and-down
direction.
[0050] Further, the carriage rotator 61 is also configured to
rotate the carriage around the axis parallel to the up-and-down
direction based on an image obtained by a carriage alignment camera
(not shown) provided at the work stage 40. Accordingly, a position
of the carriage 62 is corrected.
[0051] The carriage 62 is provided with a plurality of nozzle heads
63. By way of example, the nozzle heads 63 are arranged in two rows
in the left-right direction. Further, the nozzle heads 63 are
arranged in six rows in the forward-backward direction. The nozzle
heads 63 adjacent in the forward-backward direction are deviated
from each other in their positions in the left-right direction.
Further, the nozzle heads 63 may be arranged in one row or more
than two rows in the left-right direction.
[0052] The functional liquid is supplied to each nozzle head 63
from the functional liquid bottle (not shown), and the nozzle head
63 discharges the liquid droplet of the functional liquid onto the
substrate W (work). The nozzle heads 63 are capable of discharging
multiple kinds of functional liquids.
[0053] Now, the inspection device 7 will be discussed with
reference to FIG. 4. FIG. 4 is a diagram illustrating a schematic
configuration of a part of the inspection device 7 according to the
exemplary embodiment, seen from the positive X-axis direction.
Further, in FIG. 4, a first inspection film 77 is indicated by a
dashed line.
[0054] The inspection device 7 is configured to receive the liquid
droplet of the functional liquid by the first inspection film 77
(an example of a first inspection medium) and a second inspection
film 78 (an example of a second inspection medium) which is
arranged side by side with respect to the first inspection film 77
in the forward-backward direction, and configured to image a
discharge state of the liquid droplet.
[0055] One of the first inspection film 77 and the second
inspection film 78 is an inspection film having permeability, and
the other is an inspection film having water repellency. To be
specific, a front surface (a surface onto which the liquid droplet
is discharged) of the one of the inspection films 77 and 78 has the
permeability. A front surface (a surface onto which the liquid
droplet is discharged) of the other of the inspection films 77 and
78 has the water repellency.
[0056] The inspection device 7 is equipped with a slider 70, an
inspection table 71, a first film supply 72 (an example of a first
medium supply), a second film supply 73 (an example of a second
medium supply), and an imaging device 74 (see FIG. 1).
[0057] The slider 70 is fastened to the pair of first guide rails 3
and extends in the left-right direction. The slider 70 is
configured to be movable along the pair of first guide rails 3 by a
driving unit (not shown), for example, a linear motor provided at
at least one of the pair of first guide rails 3. That is, the
slider 70 is configured to be moved in the forward-backward
direction.
[0058] The slider 70 is moved between a discharge position, an
imaging position and a standby position which are set along the
forward-backward direction.
[0059] The discharge position is a position under the nozzle head
63. The discharge position includes a first discharge position
where the liquid droplet of the functional liquid for inspection
discharged by the nozzle head 63 is received by the first
inspection film 77 and a second discharge position where the liquid
droplet of the functional liquid for inspection discharged by the
nozzle head 63 is received by the second inspection film 78.
[0060] The imaging position is a position located at the front side
than the discharge position and is located under the imaging device
74. The imaging position includes a first imaging position where
the first inspection film 77 is imaged and a second imaging
position where the second inspection film 78 is imaged. The standby
position is a position located at the front side than the imaging
position.
[0061] The inspection table 71 is fastened to a center of a top
surface of the slider 70 in the left-right direction. The
inspection table 71 is configured to be moved in the
forward-backward direction along with the slider 70.
[0062] A length of the inspection table 71 in the left-right
direction is longer than a length of a discharge area A (see FIG.
4) in which the liquid droplets of the functional liquid are
discharged to the respective inspection films 77 and 78 by the
drawing device 6.
[0063] An attraction plate 71a is provided on a top surface of the
inspection table 71. The attraction plate 71a is made of, by way of
example, a porous member. Further, a suction device (not shown) is
accommodated in the inspection table 71. Through suctioning by the
suction device, the first inspection film 77 and the second
inspection film 78 are attracted to the attraction plate 71a.
[0064] Further, two sets of the inspection table 71 and the
attraction plate 71a may be provided in the forward-backward
direction. Specifically, the inspection table 71 and the attraction
plate 71a for attracting the first inspection film 77 and the
inspection table 71 and the attraction plate 71a for attracting the
second inspection film 78 may be provided.
[0065] The first film supply 72 is disposed above the slider 70.
The first film supply 72 is configured to supply the first
inspection film 77 (first inspection medium), which receives the
liquid droplet for inspection discharged from the nozzle head 63,
in the left-right direction (the direction orthogonal to the
transfer direction).
[0066] The first film supply 72 includes a first unwinding shaft
support 72a, a first unwinding shaft 72b, a first winding shaft
support 72c, and a first winding shaft 72d.
[0067] The first unwinding shaft support 72a is fixed on the top
surface of the slider 70. The first unwinding shaft support 72a is
disposed at the right of the inspection table 71. The first
unwinding shaft support 72a is configured to support the first
unwinding shaft 72b rotatably.
[0068] The first unwinding shaft 72b is protruded from the first
unwinding shaft support 72a toward the front side. The first
unwinding shaft 72b is disposed at the right of the inspection
table 71. The first inspection film 77 having a roll shape is
fastened to the first unwinding shaft 72b. The first unwinding
shaft 72b unwinds the first inspection film 77.
[0069] The first winding shaft support 72c is fixed to the top
surface of the slider 70. The first winding shaft support 72c is
disposed at the left of the inspection table 71. The first winding
shaft support 72c is configured to support the first winding shaft
72d rotatably. The first winding shaft support 72c is provided with
a motor (not shown) configured to rotate the first winding shaft
72d. Also, the first unwinding shaft support 72a may be provided
with a motor configured to rotate the first unwinding shaft
72b.
[0070] The first winding shaft 72d is protruded from the first
winding shaft support 72c toward the front side. The first winding
shaft 72d is disposed at the left of the inspection table 71. One
end of the first inspection film 77 is fastened to the first
winding shaft 72d, and the first winding shaft 72d winds the first
inspection film 77 on which the liquid droplet of the functional
liquid is discharged. To elaborate, the first winding shaft 72d is
rotated as the motor provided at the first winding shaft support
72c is rotated, and winds the first inspection film 77 on which the
liquid droplet of the functional liquid is discharged.
[0071] The first unwinding shaft 72b and the first winding shaft
72d are disposed with the inspection table 71 therebetween in the
left-right direction. The first film supply 72 is configured to
supply the first inspection film 77 from the right side toward the
left side. In the following description, the supply direction of
the first inspection film 77 may be referred to as "first
direction."
[0072] That is, the first film supply 72 supplies the first
inspection film 77 along the first direction which is orthogonal to
the transfer direction of the substrate W.
[0073] The second film supply 73 is disposed above the slider 70.
The second film supply 73 is configured to supply, in the
left-right direction, the second inspection film 78 which receives
the liquid droplet of the functional liquid for inspection
discharged from the nozzle head 63, and is arranged side by side
with respect to the first inspection film 77 in the
forward-backward direction. The second inspection film 78 is
disposed at the front side than the first inspection film 77.
[0074] The second film supply 73 includes a second unwinding shaft
support 73a, a second unwinding shaft 73b, a second winding shaft
support 73c, and a second winding shaft 73d.
[0075] The second unwinding shaft support 73a is fixed on the top
surface of the slider 70. The second unwinding shaft support 73a is
disposed at the left of the inspection table 71. The second
unwinding shaft support 73a is configured to support the second
unwinding shaft 73b rotatably.
[0076] The second unwinding shaft 73b is protruded from the second
unwinding shaft support 73a toward the front side. The second
unwinding shaft 73b is disposed at the left of the inspection table
71. The second inspection film 78 having a roll shape is fastened
to the second unwinding shaft 73b. The second unwinding shaft 73b
unwinds the second inspection film 78.
[0077] The second winding shaft support 73c is fixed to the top
surface of the slider 70. The second winding shaft support 73c is
disposed at the right of the inspection table 71. The second
winding shaft support 73c is configured to support the second
winding shaft 73d rotatably. The second winding shaft support 73c
is provided with a motor (not shown) configured to rotate the
second winding shaft 73d. Also, the second unwinding shaft support
73a may be provided with a motor configured to rotate the second
unwinding shaft 73b.
[0078] The second winding shaft 73d is protruded from the second
winding shaft support 73c toward the front side. The second winding
shaft 73d is disposed at the right of the inspection table 71. One
end of the second inspection film 78 is fastened to the second
winding shaft 73d, and the second winding shaft 73d winds the
second inspection film 78 on which the liquid droplet of the
functional liquid is discharged. To elaborate, the second winding
shaft 73d is rotated as the motor provided at the second winding
shaft support 73c is rotated, and winds the second inspection film
78 on which the liquid droplet of the functional liquid is
discharged.
[0079] The second unwinding shaft 73b and the second winding shaft
73d are disposed with the inspection table 71 therebetween in the
left-right direction. The second film supply 73 is configured to
supply the second inspection film 78 from the left side toward the
right side. In the following description, the supply direction of
the second inspection film 78 may be referred to as "second
direction."
[0080] That is, the second film supply 73 supplies the second
inspection film 78 along the second direction which is opposite to
the first direction.
[0081] In the first film supply 72 and the second film supply 73,
the unwinding shafts 72b and 73b and the winding shafts 72d and 73d
are disposed at different positions in the left-right direction
which is orthogonal to the transfer direction.
[0082] Further, in the first film supply 72 and the second film
supply 73, the first winding shaft 72d of the first film supply 72
and the second unwinding shaft 73b of the second film supply 73 are
disposed at the left of the inspection table 71. The second
unwinding shaft 73b is positioned closer to the inspection table 71
than the first winding shaft 72d is, that is, near the discharge
area A in which the liquid droplet of the functional liquid is
discharged by the nozzle head 63 (see FIG. 1).
[0083] Further, the first unwinding shaft 72b of the first film
supply 72 and the second winding shaft 73d of the second film
supply 73 are disposed at the right of the inspection table 71. The
first unwinding shaft 72b is positioned closer to the inspection
table 71 than the second winding shaft 73d is, that is, near the
discharge area A in which the liquid droplet of the functional
liquid is discharged by the nozzle head 63 (see FIG. 1).
[0084] Since the unwinding shafts 72b and 73b and the winding
shafts 72d and 73d are arranged as stated above, a distance by
which the first inspection film 77 unwound from the first unwinding
shaft 72b is supplied to the discharge area A can be shortened.
Further, a distance by which the second inspection film 78 unwound
from the second unwinding shaft 73b is supplied to the discharge
area A can be shortened.
[0085] Moreover, the first film supply 72 and the second film
supply 73 are capable of supplying the first inspection film 77 and
the second inspection film 78 independently.
[0086] In the above-described exemplary embodiment, the first
winding shaft 72d and the second unwinding shaft 73b are disposed
at the left of the inspection table 71, whereas the first unwinding
shaft 72b and the second winding shaft 73d are disposed at the
right of the inspection table 71. However, the exemplary embodiment
is not limited thereto. The first winding shaft 72d and the second
unwinding shaft 73b may be provided at the right of the inspection
table 71, and the first unwinding shaft 72b and the second winding
shaft 73d may be arranged at the left of the inspection table 71.
That is, the first direction and the second direction may be
reverse to the above-stated directions, respectively.
[0087] The imaging device 74 is fastened to the second guide rail 5
with a base 74a therebetween, as illustrated in FIG. 1. The base
74a is equipped with a moving device (not shown) configured to move
the imaging device 74 in the left-right direction. The imaging
device 74 is mounted to, between the pair of second guide rails 5,
one second guide rail 5 disposed at the front side. That is, the
imaging device 74 is disposed at the front side than the carriage
62.
[0088] The imaging device 74 is configured to image the liquid
droplet of the functional liquid discharged on the first inspection
film 77 and the liquid droplet of the functional liquid discharged
on the second inspection film 78.
[0089] Further, the imaging device 74 may be plural in number, and
the liquid droplets of the functional liquid discharged to the
first inspection film 77 and the second inspection film 78 may be
imaged by the imaging devices 74. In this case, the imaging devices
74 may not be configured to be movable in the left-right direction
but may be fixed to the second guide rails 5.
[0090] The control device 8 shown in FIG. 2 is, for example, a
computer, and includes a controller (not shown) and a storage (not
shown). The storage is implemented by a semiconductor memory device
such as, but not limited to, a RAM (Random Access Memory) or a
flash memory, or a storage device such as, but not limited to, a
hard disk or an optical disk.
[0091] The controller includes a microcomputer having a CPU
(Central Processing Unit), a ROM (Read Only Memory), a RAM, an
input/output port, and so forth and various kinds of circuits. The
CPU of the microcomputer implements controls over the substrate
transfer device 4, the drawing device 6, the inspection device 7,
and so forth by reading out a program stored in the ROM and
executing the program.
[0092] Further, the program may be recorded on a computer-readable
recording medium and installed from the recording medium to the
storage of the control device 8. The computer-readable recording
medium may be, by way of non-limiting example, a hard disk HD, a
flexible disk FD, a compact disk CD, a magnetic optical disk MO, a
memory card, or the like.
[0093] In the liquid droplet discharging apparatus 1, the discharge
state of the nozzle head 63 is adjusted based on an imaging result
of the liquid droplet of the functional liquid obtained by the
imaging device 74. Depending on the kind of the functional liquid,
the liquid droplet discharging apparatus 1 is capable of switching
the inspection film for receiving the liquid droplet of the
functional liquid between the first inspection film 77 and the
second inspection film 78.
[0094] Now, a liquid droplet inspection in the inspection device 7
will be explained. Here, an example where the liquid droplet of the
functional liquid is discharged to the first inspection film 77
will be described.
[0095] The slider 70 of the inspection device 7 is maintained at
the standby position as shown in FIG. 1 when the liquid droplet
inspection is not performed, for example, when the functional
liquid is being discharged onto the substrate W by the drawing
device 6 or when the liquid droplet discharging apparatus 1 is not
operated.
[0096] To receive the liquid droplet of the functional liquid
discharged from the nozzle head 63 by the first inspection film 77,
the slider 70 is moved backwards from the standby position. To
elaborate, the slider 70 is moved from the standby position to the
first discharge position where the first inspection film 77 is
located under the nozzle head 63, as shown in FIG. 5. FIG. 5 is a
schematic diagram illustrating a state in which the slider 70
according to the exemplary embodiment is moved from the standby
position to the first discharge position.
[0097] While the slider 70 is being moved from the standby position
to the first discharge position or after the slider 70 is moved to
the first discharge position, the first film supply 72 performs
winding of the first inspection film 77 on which the liquid droplet
of the functional liquid is discharged in a previous liquid droplet
inspection. Accordingly, the first inspection film 77 on which the
liquid droplet of the functional liquid is discharged is wound by
the first winding shaft 72d, so that a new first inspection film 77
is placed on the attraction plate 71a of the inspection table
71.
[0098] After the slider 70 is moved to the first discharge
position, the nozzle head 63 discharges the liquid droplet of the
functional liquid onto the first inspection film 77. The liquid
droplet of the functional liquid is discharged onto the first
inspection film 77 in the state that the first inspection film 77
is attracted to the top surface of the attraction plate 71a.
[0099] After the liquid droplet of the functional liquid is
discharged onto the first inspection film 77 from the nozzle head
63, the slider 70 is moved from the first discharge position to the
first imaging position where the first inspection film 77 is
located under the imaging device 74, as shown in FIG. 6. FIG. 6 is
a schematic diagram illustrating a state in which the slider 70
according to the exemplary embodiment is moved from the first
discharge position to the first imaging position.
[0100] After the slider 70 is moved to the first imaging position,
the liquid droplet of the functional liquid discharged onto the
first inspection film 77 is imaged by the imaging device 74.
[0101] If the imaging of the liquid droplet of the functional
liquid discharged to the first inspection film 77 is completed, the
slider 70 is moved from the first imaging position to the standby
position, as depicted in FIG. 7. FIG. 7 is a schematic diagram
illustrating a state in which the slider 70 according to the
exemplary embodiment is moved from the first imaging position to
the standby position.
[0102] When the liquid droplet of the functional liquid is
discharged onto the second inspection film 78, the slider 70 is
moved from the standby position to the second discharge position
where the second inspection film 78 is located under the nozzle
head 63. Further, after the liquid droplet of the functional liquid
is discharged onto the second inspection film 78, the slider 70 is
moved from the second discharge position to the second imaging
position where the second inspection film 78 is located under the
imaging device 74. The other processes are the same as those
performed when the liquid droplet of the functional liquid is
discharged to the first inspection film 77.
[0103] Now, effects of the exemplary embodiment will be
described.
[0104] The liquid droplet discharging apparatus 1 includes the
transfer device 4 configured to transfer the substrate W in the
forward-backward direction (transfer direction); and the nozzle
head 63 configured to discharge the liquid droplet of the
functional liquid onto the substrate W. Further, the liquid droplet
discharging apparatus 1 is equipped with the first film supply 72
configured to supply the first inspection film 77, which receives
the liquid droplet of the functional liquid for inspection
discharged from the nozzle head 63, in the left-right direction
(the direction orthogonal to the transfer direction). Further, the
liquid droplet discharging apparatus 1 is further equipped with the
second film supply 73 configured to supply, in the left-right
direction, the second inspection film 78 which is configured to
receive the liquid droplet of the functional liquid for inspection
discharged from the nozzle head 63 and is arranged side by side
with respect to the first inspection film 77 in the transfer
direction. Furthermore, the liquid droplet discharging apparatus 1
is further equipped with the imaging device 74 configured to image
the liquid droplet discharged onto the first inspection film 77 and
the liquid droplet discharged onto the second inspection film
78.
[0105] With this configuration, the liquid droplet discharging
apparatus 1 is capable of imaging the liquid droplet of the
functional liquid discharged from the nozzle head 63 by using the
first inspection film 77 and the second inspection film 78, and is
capable of adjusting the discharge state of the functional liquid
in the nozzle head 63 based on the imaging result. Therefore, the
liquid droplet discharging apparatus 1 is capable of adjusting the
discharge state of the liquid droplet of the functional liquid
efficiently.
[0106] Further, the first film supply 72 is equipped with the first
unwinding shaft 72b configured to unwind the first inspection film
77 and the first winding shaft 72d configured to wind the first
inspection film 77. Furthermore, the second film supply 73 is
equipped with the second unwinding shaft 73b configured to unwind
the second inspection film 78 and the second winding shaft 73d
configured to wind the second inspection film 78. The unwinding
shafts 72b and 73b are disposed at the different positions in the
left-right direction, and the winding shafts 72d and 73d are
disposed at the different positions in the left-right
direction.
[0107] With this configuration, the liquid droplet discharging
apparatus 1 is capable of supplying the first inspection film 77
and the second inspection film 78 independently, and the
configurations of the first film supply 72 and the second film
supply 73 can be simplified. Furthermore, when replacing the first
inspection film 77 or the second inspection film 78, the liquid
droplet discharging apparatus 1 is capable of replacing the
inspection film as the replacement target while allowing the
inspection film which is not the replacement target to be left.
Therefore, the replacement can be carried out easily.
[0108] The first film supply 72 supplies the first inspection film
77 along the first direction which is the left-right direction, and
the second film supply 73 supplies the second inspection film 78
along the second direction which is opposite to the first
direction. As compared to the second winding shaft 73d, the first
unwinding shaft 72b is placed closer to the discharge area A in
which the liquid droplet is discharged by the nozzle head 63. The
second unwinding shaft 73b is disposed closer to the discharge area
A than the first winding shaft 72d is.
[0109] Accordingly, the liquid droplet discharging apparatus 1 is
capable of shortening the distance by which the first inspection
film 77 is supplied to the discharge area A from the first
unwinding shaft 72b. Further, the liquid droplet discharging
apparatus 1 is capable of shortening the distance by which the
second inspection film 78 is supplied to the discharge area A from
the second unwinding shaft 73b. Thus, the liquid droplet
discharging apparatus 1 is capable of shortening a time during
which the first inspection film 77 supplied to the discharge area A
from the first unwinding shaft 72b and the second inspection film
78 supplied to the discharge area A from the second unwinding shaft
73b is exposed to the atmosphere within the chamber room 100.
[0110] That is, the liquid droplet discharging apparatus 1 is
capable of shortening a time taken until the first inspection film
77 is imaged by the imaging device 74 after the unwinding of the
first inspection film 77 from the first unwinding shaft 72b is
begun. Further, the liquid droplet discharging apparatus 1 is
capable of shortening a time taken until the second inspection film
78 is imaged by the imaging device 74 after the unwinding of the
second inspection film 78 from the second unwinding shaft 73b is
begun. Therefore, the liquid droplet discharging apparatus 1 is
capable of imaging the state of the liquid droplet of the
functional liquid accurately, and capable of adjusting the
discharge state of the liquid droplet of the functional liquid with
high precision.
[0111] Further, one of the first inspection film 77 and the second
inspection film 78 is the inspection film having the permeability,
and the other is the inspection film having the water
repellency.
[0112] Accordingly, the liquid droplet discharging apparatus 1 is
capable of receiving the liquid droplet of the functional liquid by
using the different kinds of inspection films 77 and 78. Therefore,
the liquid droplet discharging apparatus 1 is capable of switching
the inspection film for receiving the liquid droplet of the
functional liquid between the first inspection film 77 and the
second inspection film 78 depending on the kinds of the functional
liquids having different properties. Further, the liquid droplet
discharging apparatus 1 is capable of imaging the discharge state
of the liquid droplet of the functional liquid accurately based on
the property of the functional liquid, and thus capable of
adjusting the discharge state of the liquid droplet of the
functional liquid with high precision. Besides, since the discharge
state of the liquid droplets of the functional liquids having the
different properties can be adjusted by the single liquid droplet
discharging apparatus 1, the system including the liquid droplet
discharging apparatus 1 can be scaled down.
[0113] Now, a modification example of the present exemplary
embodiment will be discussed.
[0114] In the liquid droplet discharging apparatus 1 according to
the modification example, the supply direction of the first
inspection film 77 in the first film supply 72 and the supply
direction of the second inspection film 78 in the second film
supply 73 may be set to be identical. By way of example, the second
film supply 73 may supply the second inspection film 78 along the
first direction.
[0115] In the liquid droplet discharging apparatus 1 according to
the modification example, the first unwinding shaft 72b and the
second unwinding shaft 73b are disposed at the left of the
inspection table 71, whereas the first winding shaft 72d and the
second winding shaft 73d are provided at the right of the
inspection table 71, for example.
[0116] With this configuration, the liquid droplet discharging
apparatus 1 according to the modification example is capable of
suppressing the functional liquid scattered from the first
inspection film 77 wound by the first winding shaft 72d from
adhering to the roll-shaped second inspection film 78 fastened to
the second unwinding shaft 73b. Furthermore, the liquid droplet
discharging apparatus 1 according to the modification example is
also capable of suppressing the functional liquid scattered from
the second inspection film 78 wound by the second winding shaft 73d
from adhering to the roll-shaped first inspection film 77 fastened
to the first unwinding shaft 72b.
[0117] In addition, in the liquid droplet discharging apparatus 1
according to the modification example, the nozzle head 63 may
discharge the liquid droplets of the same functional liquid to the
first inspection film 77 and the second inspection film 78. The
liquid droplet discharging apparatus 1 according to the
modification example may discharge the liquid droplets of the same
functional liquid to the first inspection film 77 having the
permeability and the second inspection film 78 having the water
repellency.
[0118] Besides, in the liquid droplet discharging apparatus 1
according to the modification example, the first inspection film 77
and the second inspection film 78 to which the liquid droplets of
the same functional liquid are discharged are imaged by the imaging
device 74.
[0119] Accordingly, the liquid droplet discharging apparatus 1
according to the modification example is capable of adjusting the
discharge state of the liquid droplets based on the imaging results
of the liquid droplets of the functional liquid discharged to the
different kinds of inspection films 77 and 78, and thus capable of
adjusting the discharge state of the liquid droplets of the
functional liquid with high precision.
[0120] Moreover, in the liquid droplet discharging apparatus 1
according to the modification example, the first inspection film 77
and the second inspection film 78 may be a same inspection film (an
example of a same medium).
[0121] Accordingly, the liquid droplet discharging apparatus 1
according to the modification example is capable of reducing the
frequency of the replacement of the inspection films 77 and 78, and
thus capable of improving working efficiency.
[0122] According to the exemplary embodiment, it is possible to
adjust the discharge state of the liquid droplet efficiently.
[0123] From the foregoing, it will be appreciated that various
embodiments of the present disclosure have been described herein
for purposes of illustration, and that various modifications may be
made without departing from the scope and spirit of the present
disclosure. Accordingly, the various embodiments disclosed herein
are not intended to be limiting. The scope of the inventive concept
is defined by the following claims and their equivalents rather
than by the detailed description of the exemplary embodiments. It
shall be understood that all modifications and embodiments
conceived from the meaning and scope of the claims and their
equivalents are included in the scope of the inventive concept.
[0124] The claims of the present application are different and
possibly, at least in some aspects, broader in scope than the
claims pursued in the parent application. To the extent any prior
amendments or characterizations of the scope of any claim or cited
document made during prosecution of the parent could be construed
as a disclaimer of any subject matter supported by the present
disclosure, Applicants hereby rescind and retract such disclaimer.
Accordingly, the references previously presented in the parent
applications may need to be revisited.
* * * * *