U.S. patent application number 17/311630 was filed with the patent office on 2022-01-20 for substrate transferring device and method of operating the same.
This patent application is currently assigned to KAWASAKI JUKOGYO KABUSHIKI KAISHA. The applicant listed for this patent is KAWASAKI JUKOGYO KABUSHIKI KAISHA. Invention is credited to Takayuki FUKUSHIMA, Masayuki SAITO.
Application Number | 20220020623 17/311630 |
Document ID | / |
Family ID | 1000005930123 |
Filed Date | 2022-01-20 |
United States Patent
Application |
20220020623 |
Kind Code |
A1 |
SAITO; Masayuki ; et
al. |
January 20, 2022 |
SUBSTRATE TRANSFERRING DEVICE AND METHOD OF OPERATING THE SAME
Abstract
A substrate transferring device is configured to transfer a
substrate while holding it. The substrate transferring device
includes a hand configured to hold the substrate, a manipulator to
which the hand is attached, and a substrate detector provided to
the hand and configured to detect a distance to a principal surface
of the substrate. Preferably, the substrate detector is provided to
a tip-end part of the hand. Preferably, the substrate detector is a
capacitive sensor.
Inventors: |
SAITO; Masayuki;
(Akashi-shi, JP) ; FUKUSHIMA; Takayuki;
(Takarazuka-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
KAWASAKI JUKOGYO KABUSHIKI KAISHA |
Kobe-shi, Hyogo |
|
JP |
|
|
Assignee: |
KAWASAKI JUKOGYO KABUSHIKI
KAISHA
Kobe-shi, Hyogo
JP
|
Family ID: |
1000005930123 |
Appl. No.: |
17/311630 |
Filed: |
December 4, 2019 |
PCT Filed: |
December 4, 2019 |
PCT NO: |
PCT/JP2019/047417 |
371 Date: |
June 7, 2021 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
B25J 11/0095 20130101;
H01L 21/68707 20130101; B25J 13/089 20130101; H01L 21/67778
20130101; H01L 21/67259 20130101 |
International
Class: |
H01L 21/677 20060101
H01L021/677; H01L 21/687 20060101 H01L021/687; H01L 21/67 20060101
H01L021/67; B25J 13/08 20060101 B25J013/08; B25J 11/00 20060101
B25J011/00 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 7, 2018 |
JP |
2018-229711 |
May 24, 2019 |
JP |
2019-097731 |
Claims
1. A substrate transferring device configured to transfer a
substrate from a placing stand on which the substrate is placed,
while holding the substrate, comprising: a hand configured to hold
the substrate; a manipulator to which the hand is attached; and a
first substrate detector provided to the hand and configured to
detect a distance to a principal surface of the substrate placed on
the placing stand.
2. The substrate transferring device of claim 1, wherein the first
substrate detector is a capacitive sensor.
3. The substrate transferring device of claim 1, wherein the first
substrate detector is provided to a tip-end part of the hand.
4. The substrate transferring device of claim 1, further comprising
a second substrate detector provided to the hand at a position
different from the first substrate detector in a front-and-rear
direction, and configured to detect a distance to the principal
surface of the substrate.
5. A substrate transferring device configured to transfer a
substrate from a container in which a plurality of substrates are
accommodated, while holding the substrate, comprising: a hand
configured to hold the substrate; a manipulator; and a controlling
device, wherein the hand is provided at a tip-end part with a
substrate detector having a first light-emitting part configured to
emit light toward a principal surface of the substrate, and a first
light-receiving part configured to receive the light reflected on
the principal surface of the substrate, and wherein the controlling
device causes the first light-emitting part of the substrate
detector to emit the light toward the principal surface of the
substrate while the controlling device operates the manipulator to
enter the hand into the container, and determines an occurrence of
a positional deviation of the substrate based on whether the first
light-receiving part of the substrate detector receives the light
reflected on the principal surface of the substrate.
6. The substrate transferring device of claim 5, wherein the hand
is provided at the tip-end part with a mapping device having a
second light-emitting part configured to horizontally emit light,
and a second light-receiving part configured to receive the light
emitted from the second light-emitting part, and wherein the
controlling device acquires, from the mapping device, positional
information indicating that the second light-receiving part does
not detect light emitted from the second light-emitting part as
positional information on the substrate, and operates the
manipulator based on the positional information on the substrate
acquired from the mapping device so as to position the hand at a
first distance set in advance below a lower surface of the
substrate.
7. The substrate transferring device of claim 5, wherein the
substrate detector receives the light reflected on the principal
surface of the substrate by the first light-receiving part, when
the first light-emitting part emits the light toward the principal
surface of the substrate while the substrate is accommodated
correctly, and wherein the controlling device causes the first
light-emitting part of the substrate detector to emit the light
toward the principal surface of the substrate while the controlling
device operates the manipulator to enter the hand into the
container, and determines that the positional deviation of the
substrate occurs when the first light-receiving part of the
substrate detector does not receive the light reflected on the
principal surface of the substrate.
8. The substrate transferring device of claim 7, wherein the
controlling device causes the first light-emitting part of the
substrate detector to emit the light toward the principal surface
of the substrate while the controlling device operates the
manipulator to enter the hand into the container, and determines
that the positional deviation of the substrate does not occur when
the first light-receiving part of the substrate detector receives
the light reflected on the principal surface of the substrate.
9. The substrate transferring device of claim 5, wherein the
substrate detector does not receive the light reflected on the
principal surface of the substrate by the first light-receiving
part, when the first light-emitting part emits the light toward the
principal surface of the substrate while the substrate is
accommodated correctly, and wherein the controlling device causes
the first light-emitting part of the substrate detector to emit the
light toward the principal surface of the substrate while the
controlling device operates the manipulator to enter the hand into
the container, and determines that the positional deviation of the
substrate occurs when the first light-receiving part of the
substrate detector receives the light reflected on the principal
surface of the substrate.
10. The substrate transferring device of claim 9, wherein the
controlling device causes the first light-emitting part of the
substrate detector to emit the light toward the principal surface
of the substrate while the controlling device operates the
manipulator to enter the hand into the container, and determines
that the positional deviation of the substrate does not occur when
the first light-receiving part of the substrate detector does not
receive the light reflected on the principal surface of the
substrate.
11. The substrate transferring device of claim 6, wherein the
substrate detector receives the light reflected on the principal
surface of the substrate by the first light-receiving part, when
the principal surface of the substrate is located at a second
distance smaller than the first distance, and wherein the
controlling device causes the first light-emitting part of the
substrate detector to emit the light toward the principal surface
of the substrate while the controlling device operates the
manipulator to enter the hand into the container, and determines
that the positional deviation of the substrate occurs when the
first light-receiving part of the substrate detector receives the
light reflected on the principal surface of the substrate.
12. The substrate transferring device of claim 11, wherein the
controlling device causes the first light-emitting part of the
substrate detector to emit the light toward the principal surface
of the substrate while the controlling device operates the
manipulator to enter the hand into the container, and determines
that the positional deviation of the substrate does not occur when
the first light-receiving part of the substrate detector does not
receive the light reflected on the principal surface of the
substrate.
13. The substrate transferring device of claim 5, wherein the
substrate detector upwardly emits the light by the first
light-emitting part.
14. The substrate transferring device of claim 5, wherein the
substrate detector downwardly emits the light by the first
light-emitting part.
15. The substrate transferring device of claim 5, wherein the
controlling device suspends the operation of the manipulator when
the controlling device determines that the positional deviation of
the substrate occurs.
16. The substrate transferring device of claim 5, wherein the
controlling device operates the manipulator to cause the hand to
evacuate from the container when the controlling device determines
that the positional deviation of the substrate occurs.
17. A method of operating a substrate transferring device
including: a hand configured to hold a substrate; a manipulator to
which the hand is attached; and a first substrate detector provided
to the hand and configured to detect a distance to a principal
surface of the substrate, the method comprising the steps of: (A)
preparing the substrate placed on a placing stand; (B) detecting
the distance to the principal surface of the substrate placed on
the placing stand; and (C) holding the substrate by the hand.
18. The operating method of claim 17, wherein the (B) includes
detecting the distance to the principal surface of the substrate at
three or more locations, the operating method further comprising
(D) determining whether to hold the substrate by the hand based on
the distance to the principal surface of the substrate detected at
the three or more locations.
19. The operating method of claim 17, wherein the (B) includes
detecting the distance to the principal surface of the substrate at
three or more locations, the operating method further comprising
(E) determining a position at which the substrate is held based on
the distance to the principal surface of the substrate detected at
the three or more locations.
20. The operating method of claim 17, wherein the (B) includes
changing a moving path of the hand when the distance detected by
the first substrate detector is below a given lower limit, so that
the distance to the principal surface of the substrate becomes
larger than the given lower limit.
21. The operating method of claim 17, wherein the first substrate
detector is a capacitive sensor, and wherein the (B) includes
determining whether a capacitance of the substrate is within a
given range.
22. A method of operating a substrate transferring device
configured to transfer a substrate from a container in which a
plurality of substrates are accommodated, while holding the
substrate, wherein the substrate transferring device includes: a
hand configured to hold the substrate; a manipulator; and a
controlling device, the method comprising the steps of: providing,
at a tip-end part of the hand, a substrate detector having a first
light-emitting part configured to emit light toward a principal
surface of the substrate, and a first light-receiving part
configured to receive the light reflected on the principal surface
of the substrate; and configuring the controlling device to cause
the first light-emitting part of the substrate detector to emit the
light toward the principal surface of the substrate while the
manipulator being operated to enter the hand into the container,
and determine an occurrence of a positional deviation of the
substrate based on whether the first light-receiving part of the
substrate detector receives the light reflected on the principal
surface of the substrate.
23. The operating method of claim 22, wherein the hand is provided
at the tip-end part with a mapping device having a second
light-emitting part configured to horizontally emit light, and a
second light-receiving part configured to receive the light emitted
from the second light-emitting part, and wherein the controlling
device acquires, from the mapping device, positional information
indicating that the second light-receiving part does not detect
light emitted from the second light-emitting part as positional
information on the substrate, and operates the manipulator based on
the positional information on the substrate acquired from the
mapping device so as to position the hand at a first distance set
in advance below a lower surface of the substrate.
24. The operating method of claim 22, wherein the substrate
detector receives the light reflected on the principal surface of
the substrate by the first light-receiving part, when the first
light-emitting part emits the light toward the principal surface of
the substrate while the substrate is accommodated correctly, and
wherein the controlling device causes the first light-emitting part
of the substrate detector to emit the light toward the principal
surface of the substrate while the controlling device operates the
manipulator to enter the hand into the container, and determines
that the positional deviation of the substrate occurs when the
first light-receiving part of the substrate detector does not
receive the light reflected on the principal surface of the
substrate.
25. The operating method of claim 24, wherein the controlling
device causes the first light-emitting part of the substrate
detector to emit the light toward the principal surface of the
substrate while the controlling device operates the manipulator to
enter the hand into the container, and determines that the
positional deviation of the substrate does not occur when the first
light-receiving part of the substrate detector receives the light
reflected on the principal surface of the substrate.
26. The operating method of claim 22, wherein the substrate
detector does not receive the light reflected on the principal
surface of the substrate by the first light-receiving part, when
the first light-emitting part emits the light toward the principal
surface of the substrate while the substrate is accommodated
correctly, and wherein the controlling device causes the first
light-emitting part of the substrate detector to emit the light
toward the principal surface of the substrate while the controlling
device operates the manipulator to enter the hand into the
container, and determines that the positional deviation of the
substrate occurs when the first light-receiving part of the
substrate detector receives the light reflected on the principal
surface of the substrate.
27. The operating method of claim 26, wherein the controlling
device causes the first light-emitting part of the substrate
detector to emit the light toward the principal surface of the
substrate while the controlling device operates the manipulator to
enter the hand into the container, and determines that the
positional deviation of the substrate does not occur when the first
light-receiving part of the substrate detector does not receive the
light reflected on the principal surface of the substrate.
28. The operating method of claim 23, wherein the substrate
detector receives the light reflected on the principal surface of
the substrate by the first light-receiving part, when the principal
surface of the substrate is located at a second distance smaller
than the first distance, and wherein the controlling device causes
the first light-emitting part of the substrate detector to emit the
light toward the principal surface of the substrate while the
controlling device operates the manipulator to enter the hand into
the container, and determines that the positional deviation of the
substrate occurs when the first light-receiving part of the
substrate detector receives the light reflected on the principal
surface of the substrate.
29. The operating method of claim 28, wherein the controlling
device causes the first light-emitting part of the substrate
detector to emit the light toward the principal surface of the
substrate while the controlling device operates the manipulator to
enter the hand into the container, and determines that the
positional deviation of the substrate does not occur when the first
light-receiving part of the substrate detector does not receive the
light reflected on the principal surface of the substrate.
30. The operating method of claim 22, wherein the substrate
detector upwardly emits the light by the first light-emitting
part.
31. The operating method of claim 22, wherein the substrate
detector downwardly emits the light by the first light-emitting
part.
32. The operating method of claim 22, wherein the controlling
device suspends the operation of the manipulator when the
controlling device determines that the positional deviation of the
substrate occurs.
33. The operating method of claim 22, wherein the controlling
device operates the manipulator to cause the hand to evacuate from
the container when the controlling device determines that the
positional deviation of the substrate occurs.
Description
TECHNICAL FIELD
[0001] The present disclosure relates to a substrate transferring
device and a method of operating the same.
BACKGROUND ART
[0002] Semiconductor wafers are manufactured through a plurality of
processings inside a clean room. In the manufacturing of the
semiconductor wafers, they are transferred while being accommodated
in a carrier (a pod).
[0003] Meanwhile, substrate processing devices which detect a
positional deviation of the wafer inside the pod are known. Patent
Document 1 discloses one example of such substrate processing
devices.
[0004] A substrate processing device disclosed in Patent Document 1
is provided with a mapping device and a wafer-positional-deviation
detecting device. The mapping device and the
wafer-positional-deviation detecting device are provided at a wafer
loading/unloading port of a pod opener which opens and closes a
door of the pod.
[0005] The mapping device is provided with a plurality of pairs of
a light-emitting part and a light-receiving part opposing to each
other. The plurality of pairs of the light-emitting part and the
light-receiving part are vertically aligned in a comb-teeth like
shape. Then, when light emitted from the light-emitting part is
detected by the light-receiving part, it is determined that the
wafer is not placed.
[0006] The wafer-positional-deviation detecting device is provided
with a plurality of limited-reflective sensors. Each
limited-reflective sensor has a light-emitting part and a
light-receiving part. The limited-reflective sensor has a
detectable range only within a given distance and a given range
from the light-emitting part and the light-receiving part to an
outer circumferential surface of the wafer which is a target object
of the detection. The limited-reflective sensor receives reflected
light, which is emitted from the light-emitting part and reflected
at the outer circumferential surface of the wafer, by the
light-receiving part within this detectable range.
REFERENCE DOCUMENT OF CONVENTIONAL ART
[Patent Document]
[Patent Document 1] JP2012-015530A
DESCRIPTION OF THE DISCLOSURE
Problem to be Solved by the Disclosure
[0007] In the substrate processing device disclosed in Patent
Document 1, both of the mapping device and a
wafer-positional-deviation device are provided near the wafer
loading/unloading port. Therefore, the positional deviation of the
wafer may be difficult to be detected at a holding groove of the
pod on a farther side from the wafer loading/unloading port (at a
holding groove at an inner side in the pod).
[0008] When the wafer increases in the size and a gap between the
plurality of wafers is smaller, an inclining angle of the wafer is
small even when the wafer is not placed on the farther-side holding
groove of the pod. For example, when a diameter of the wafer is 30
cm or above, and the gap between the plurality of wafers is 5 to 20
mm, the inclining angle of the wafer is small. The positional
deviation of the wafer by such a little inclining angle may be
difficult to be detected by the mapping device and the
wafer-positional-deviation device provided near the wafer
loading/unloading port. Therefore, the mapping device and the
wafer-positional-deviation device still have room for
improvement.
[0009] One purpose of the present disclosure is to provide a
substrate transferring device and a method of operating the
substrate transferring device, capable of accurately detecting a
positional deviation of a substrate.
SUMMARY OF THE DISCLOSURE
[0010] A substrate transferring device according to the present
disclosure transfers a substrate from a placing stand on which the
substrate is placed, while holding the substrate. The substrate
transferring device includes a hand configured to hold the
substrate, a manipulator to which the hand is attached, and a first
substrate detector provided to the hand and configured to detect a
distance to a principal surface of the substrate placed on the
placing stand.
[0011] Preferably, the first substrate detector is a capacitive
sensor.
[0012] Preferably, the first substrate detector is provided to a
tip-end part of the hand.
[0013] Preferably, the substrate transferring device further
includes a second substrate detector provided to the hand at a
position different from the first substrate detector in a
front-and-rear direction, and configured to detect a distance to
the principal surface of the substrate.
[0014] In order to solve the conventional problem, another
substrate transferring device according to the present disclosure
transfers a substrate from a container in which a plurality of
substrates are accommodated, while holding the substrate. The
substrate transferring device includes a hand configured to hold
the substrate, a manipulator, and a controlling device. The hand is
provided at a tip-end part with a substrate detector having a first
light-emitting part configured to emit light toward a principal
surface of the substrate, and a first light-receiving part
configured to receive the light reflected on the principal surface
of the substrate. The controlling device causes the first
light-emitting part of the substrate detector to emit the light
toward the principal surface of the substrate while the controlling
device operates the manipulator to enter the hand into the
container, and determines an occurrence of a positional deviation
of the substrate based on whether the first light-receiving part of
the substrate detector receives the light reflected on the
principal surface of the substrate.
[0015] Thus, even when the position of the substrate deviates on
the farther side in the container in which the substrates are
accommodated, the positional deviation can be detected.
[0016] A method of operating a substrate transferring device
according to the present disclosure is provided, the substrate
transferring device including a hand configured to hold a
substrate, a manipulator to which the hand is attached, and a first
substrate detector provided to the hand and configured to detect a
distance to a principal surface of the substrate. The operating
method includes the steps of (A) preparing the substrate placed on
a placing stand, (B) detecting the distance to the principal
surface of the substrate placed on the placing stand, and (C)
holding the substrate by the hand.
[0017] Preferably, the (B) in the operating method includes
detecting the distance to the principal surface of the substrate at
three or more locations. The operating method further includes (D)
determining whether to hold the substrate by the hand based on the
distance to the principal surface of the substrate detected at the
three or more locations.
[0018] Preferably, the (B) in the operating method includes
detecting the distance to the principal surface of the substrate at
three or more locations. The operating method further includes (E)
determining a position at which the substrate is held based on the
distance to the principal surface of the substrate detected at the
three or more locations.
[0019] Preferably, the (B) in the operating method includes
changing a moving path of the hand when the distance detected by
the first substrate detector is below a given lower limit, so that
the distance to the principal surface of the substrate becomes
larger than the given lower limit.
[0020] Preferably, in the operating method, the first substrate
detector is a capacitive sensor. The (B) in the operating method
includes determining whether a capacitance of the substrate is
within a given range.
[0021] Moreover, another method of operating a substrate
transferring device according to the present disclosure is to
transfer a substrate from a container in which a plurality of
substrates are accommodated, while holding the substrate. The
substrate transferring device includes a hand configured to hold
the substrate, a manipulator, and a controlling device. The method
includes the steps of providing, at a tip-end part of the hand, a
substrate detector having a first light-emitting part configured to
emit light toward a principal surface of the substrate, and a first
light-receiving part configured to receive the light reflected on
the principal surface of the substrate, and configuring the
controlling device to cause the first light-emitting part of the
substrate detector to emit the light toward the principal surface
of the substrate while the manipulator being operated to enter the
hand into the container, and determine an occurrence of a
positional deviation of the substrate based on whether the first
light-receiving part of the substrate detector receives the light
reflected on the principal surface of the substrate.
[0022] Thus, even when the position of the substrate deviates on
the farther side in the container in which the substrates are
accommodated, the positional deviation can be detected.
[0023] The above purpose, other purposes, features, and advantages
of the present disclosure will be made clear from the following
detailed description of suitable embodiments with reference to the
accompanying drawings.
[Effect of the Disclosure]
[0024] According to the substrate transferring device and the
method of operating the same of the present disclosure, the
positional deviation of the substrate can be detected more
accurately than the conventional substrate processing device.
BRIEF DESCRIPTION OF DRAWINGS
[0025] FIG. 1 is a side view schematically illustrating an outline
configuration of a substrate transferring device and a robot system
having the substrate transferring device according to Embodiment
1.
[0026] FIG. 2 is a top view schematically illustrating the outline
configuration of the robot system illustrated in FIG. 1.
[0027] FIG. 3 is an enlarged schematic view of a substantial part
of the robot system illustrated in FIG. 1.
[0028] FIG. 4 is an enlarged schematic view of the substantial part
of the robot system illustrated in FIG. 1.
[0029] FIG. 5 is a flowchart illustrating one example of operation
of the substrate transferring device according to Embodiment 1.
[0030] FIG. 6 is a flowchart illustrating another example of the
operation of the substrate transferring device according to
Embodiment 1.
[0031] FIG. 7 is a schematic view illustrating an outline
configuration of a substantial part of a substrate transferring
device of Modification 1 of Embodiment 1.
[0032] FIG. 8 is a schematic view illustrating an outline
configuration of a substantial part of the substrate transferring
device of Modification 1 of Embodiment 1.
[0033] FIG. 9 is a top view schematically illustrating the outline
configuration of the substrate transferring device and a robot
system having the substrate transferring device according to
Embodiment 2.
[0034] FIG. 10 is a side view schematically illustrating an outline
configuration of a substrate transferring device and a robot system
having the substrate transferring device according to Embodiment
3.
[0035] FIG. 11 is a top view schematically illustrating the outline
configuration of the robot system illustrated in FIG. 10.
[0036] FIG. 12(A) is a cross-sectional view of a container of the
robot system taken along a line XIIA-XIIA in FIG. 12(B), and FIG.
12(B) is a cross-sectional view of the container taken along a line
XIIB-XIIB in FIG. 12(A).
[0037] FIG. 13 is an explanatory view illustrating a state where
the robot system of FIG. 10 is used.
[0038] FIG. 14(A) is an explanatory view illustrating another state
where the robot system of FIG. 10 is used, FIG. 14(B) is an
explanatory view illustrating still another state where the robot
system of FIG. 10 is used, and FIG. 14(C) is an explanatory view
illustrating still another state where the robot system of FIG. 10
is used.
[0039] FIG. 15(A) is an explanatory view illustrating still another
state where the robot system of FIG. 10 is used, FIG. 15(B) is an
explanatory view illustrating still another state where the robot
system of FIG. 10 is used, and FIG. 15(C) is an explanatory view
illustrating still another state where the robot system of FIG. 10
is used.
[0040] FIG. 16(A) is an explanatory view illustrating still another
state where the robot system of FIG. 10 is used, FIG. 16(B) is an
explanatory view illustrating still another state where the robot
system of FIG. 10 is used, and FIG. 16(C) is an explanatory view
illustrating still another state where the robot system of FIG. 10
is used.
[0041] FIG. 17(A) is a top view of a hand of a substrate
transferring device of another embodiment according to the present
disclosure, and FIG. 17(B) is a cross-sectional view taken along a
line XVIIB-XVIIB in FIG. 17(A).
[0042] FIG. 18 is an explanatory view illustrating a hand of a
substrate transferring device according to Embodiment 4, and a
substrate.
MODES FOR CARRYING OUT THE DISCLOSURE
[0043] Hereinafter, preferred embodiments of the present disclosure
are described with reference to the accompanying drawings. Note
that the same reference characters are given to a similar
configuration throughout the drawings to omit redundant
description. Moreover, throughout the drawings, a configuration
necessary to illustrate the present disclosure is extracted, and
the other configuration may be omitted to be illustrated.
Furthermore, this configuration is an example of the embodiments of
the present disclosure, and the present disclosure is not limited
to this.
[0044] A substrate transferring device according to Embodiment 1 is
a substrate transferring device which transfers a substrate from a
container in which a plurality of substrates are accommodated,
while holding the substrate. The substrate transferring device
includes a hand which holds the substrate, a manipulator, and a
controlling device. The hand is provided at its tip-end part with a
substrate detector having a first light-emitting part which emits
light toward a principal surface of the substrate, and a first
light-receiving part which receives the light reflected on the
principal surface of the substrate. The controlling device causes
the first light-emitting part of the substrate detector to emit the
light toward the principal surface of the substrate while the
controlling device operates the manipulator to enter the hand into
the container, and determines an occurrence of a positional
deviation of the substrate based on whether the first
light-receiving part of the substrate detector receives the light
reflected on the principal surface of the substrate.
[0045] Moreover, in the substrate transferring device according to
Embodiment 1, the substrate detector may receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the first light-emitting part emits the
light toward the principal surface of the substrate while the
substrate is accommodated correctly. The controlling device may
cause the first light-emitting part of the substrate detector to
emit the light toward the principal surface of the substrate while
the controlling device operates the manipulator to enter the hand
into the container. The controlling device may determine that the
positional deviation of the substrate occurs when the first
light-receiving part of the substrate detector does not receive the
light reflected on the principal surface of the substrate.
[0046] Moreover, in the substrate transferring device according to
Embodiment 1, the substrate detector may receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the first light-emitting part emits the
light toward the principal surface of the substrate while the
substrate is accommodated correctly. The controlling device may
cause the first light-emitting part of the substrate detector to
emit the light toward the principal surface of the substrate while
the controlling device operates the manipulator to enter the hand
into the container. The controlling device may determine that the
positional deviation of the substrate does not occur when the first
light-receiving part of the substrate detector receives the light
reflected on the principal surface of the substrate.
[0047] Moreover, in the substrate transferring device according to
Embodiment 1, the substrate detector may not receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the first light-emitting part emits the
light toward the principal surface of the substrate while the
substrate is accommodated correctly. The controlling device may
cause the first light-emitting part of the substrate detector to
emit the light toward the principal surface of the substrate while
the controlling device operates the manipulator to enter the hand
into the container. The controlling device may determine that the
positional deviation of the substrate occurs when the first
light-receiving part of the substrate detector receives the light
reflected on the principal surface of the substrate.
[0048] Moreover, in the substrate transferring device according to
Embodiment 1, the substrate detector may receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the first light-emitting part emits the
light toward the principal surface of the substrate while the
substrate is accommodated correctly. The substrate transferring
device may cause the first light-emitting part of the substrate
detector to emit the light toward the principal surface of the
substrate while the controlling device operates the manipulator to
enter the hand into the container. The substrate transferring
device may determine that the positional deviation of the substrate
does not occur when the first light-receiving part of the substrate
detector does not receive the light reflected on the principal
surface of the substrate.
[0049] Moreover, in the substrate transferring device according to
Embodiment 1, the substrate detector may receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the principal surface of the substrate
is located at a second distance smaller than the first distance.
The controlling device may cause the first light-emitting part of
the substrate detector to emit the light toward the principal
surface of the substrate while the controlling device operates the
manipulator to enter the hand into the container. The controlling
device may determine that the positional deviation of the substrate
occurs when the first light-receiving part of the substrate
detector receives the light reflected on the principal surface of
the substrate.
[0050] Moreover, in the substrate transferring device according to
Embodiment 1, the substrate detector may receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the principal surface of the substrate
is located at a second distance smaller than the first distance.
The controlling device may cause the first light-emitting part of
the substrate detector to emit the light toward the principal
surface of the substrate while the controlling device operates the
manipulator to enter the hand into the container. The controlling
device may determine that the positional deviation of the substrate
does not occur when the first light-receiving part of the substrate
detector does not receive the light reflected on the principal
surface of the substrate.
[0051] Moreover, in the substrate transferring device according to
Embodiment 1, the substrate detector may upwardly emit the light by
the first light-emitting part.
[0052] Moreover, in the substrate transferring device according to
Embodiment 1, the controlling device may suspend the operation of
the manipulator when the controlling device determines that the
positional deviation of the substrate occurs.
[0053] Moreover, in the substrate transferring device according to
Embodiment 1, the controlling device may operate the manipulator to
cause the hand to evacuate from the container when the controlling
device determines that the positional deviation of the substrate
occurs.
[0054] Below, one example of the substrate transferring device
according to Embodiment 1 is described with reference to FIGS.
1-?.
Configuration of Substrate Transferring Device
[0055] FIG. 1 is a side view schematically illustrating an outline
configuration of a substrate transferring device and a robot system
having it according to Embodiment 1. FIG. 2 is a top view
schematically illustrating the outline configuration of the robot
system illustrated in FIG. 1.
[0056] Note that, in FIG. 1, a front-and-rear direction and an
up-and-down direction of the substrate transferring device are
indicated as a front-and-rear direction and an up-and-down
direction of the drawing. Moreover, in FIG. 2, the front-and-rear
direction of the substrate transferring device is indicated as a
front-and-rear direction of the drawing.
[0057] As illustrated in FIGS. 1 and 2, a robot system 100
according to Embodiment 1 is provided with a substrate transferring
device 101, and a container 102 in which substrates 1 are
accommodated. The container 102 is, for example, a FOUP (Front
Opening Unified Pod), or a quartz boat.
[0058] Moreover, the substrate 1 is, for example, a circular thin
plate which is material for a substrate for a semiconductor device,
such as a semiconductor substrate and a glass substrate. The
semiconductor substrate is, for example, a silicon substrate, a
sapphire (single-crystalline aluminum) substrate, or other types of
substrate. The glass substrate is, for example, a glass substrate
for an FPD (Flat Panel Display), or a glass substrate for a MEMS
(Micro Electro Mechanical Systems).
[0059] The substrate transferring device 101 is provided with a
hand 20, a manipulator 30, and a controlling device 70, and
transfers the substrate 1 accommodated in the container 102, while
holding it by the hand 20.
[0060] Note that, below, although a configuration of a horizontally
articulated robot is described as the manipulator 30, the
manipulator 30 is not limited to the horizontally articulated
robot, but may be one based on a vertically articulated robot.
[0061] The manipulator 30 has a casing 50, a plurality of arms
(here, a first arm 32 and a second arm 34), an ascendable member
40, a first connecting part 31, a second connecting part 33, and a
third connecting part 35.
[0062] The ascendable member 40 is provided to an upper part of the
casing 50. Moreover, a linear-motion actuator 41 and the
controlling device 70 are disposed inside the casing 50. Note that
the controlling device 70 may be provided outside the casing 50.
The controlling device 70 will be described later.
[0063] The linear-motion actuator 41 can cause the ascendable
member 40 to ascend and descend (to move vertically). The
linear-motion actuator 41 is, for example, an electric motor (a
servomotor) together with a ball screw, a linear guide, or a rack
and pinion, or may be an air cylinder.
[0064] Note that, inside the casing 50, for example, a rotary
sensor which detects a rotational position of the electric motor
and outputs it to the controlling device 70, and a current sensor
which detects current for controlling a rotation of a drive motor
may be provided.
[0065] A base-end part of the first arm 32 is connected to the
ascendable member 40 via the first connecting part 31 so as to be
rotatable about a rotary axis L1 passing through an axial center of
the ascendable member 40. In detail, the ascendable member 40 is
provided with, for example, a drive motor which rotates the first
arm 32, and a rotary sensor which detects a rotational position of
the drive motor. Note that the drive motor etc. may be provided to
the first arm 32.
[0066] A base-end part of the second arm 34 is connected to a
tip-end part of the first arm 32 via the second connecting part 33
so as to be rotatable about a rotary axis L2. In detail, the first
arm 32 is provided with, for example, a drive motor which rotates
the second arm 34, and a rotary sensor which detects a rotational
position of the drive motor. Note that the drive motor etc. may be
provided to the second arm 34.
[0067] Moreover, the hand 20 is connected to a tip-end part of the
second arm 34 via the third connecting part 35 so as to be
rotatable about a rotary axis L3. The second arm 34 is provided
with, for example, a drive motor which rotates the hand 20, and a
rotary sensor which detects a rotational position of the drive
motor.
[0068] The hand 20 has a body part 21 and claw parts 22. The body
part 21 is formed in a substantially Y-shape when seen from above,
and includes a pair of finger parts 21A and 21B. The finger parts
21A and 21B are provided, at their tip-end parts and base-end
parts, with the claw parts 22, respectively. Each claw part 22 is
formed in an L-shape when seen horizontally (formed to have an
L-shaped cross section in a vertical direction), and the substrate
1 is placed on a bottom part of the claw part 22. Note that the
hand 20 may be configured so that the hand 20 and the substrate 1
do not relatively displace, like an edge-gripping hand or a sucking
hand.
[0069] Moreover, each of the finger parts 21A and 21B of the body
part 21 is provided with a substrate detector 60 at its tip-end
part. Each substrate detector 60 has a first light-emitting part 61
and a first light-receiving part 62. The substrate detector 60
receives light, which is emitted from the first light-emitting part
61 and reflected on a principal surface of the substrate 1, by the
first light-receiving part 62, and outputs information whether the
light is received, to the controlling device 70.
[0070] Note that in Embodiment 1 the first light-emitting part 61
upwardly emits light (toward a lower surface of the substrate
1).
[0071] Here, whether or not the light is received by the substrate
detector 60 is described in more detail with reference to FIGS. 3
and 4.
[0072] FIGS. 3 and 4 are enlarged schematic views of a substantial
part of the robot system illustrated in FIG. 1. FIG. 3 illustrates
the substrate detector 60 which receives, by the first
light-receiving part 62, the light reflected on the principal
surface of the substrate 1 when the substrate 1 is correctly
accommodated in the container 102. FIG. 4 illustrates the substrate
detector 60 which does not receive, by the first light-receiving
part 62, the light reflected on the principal surface of the
substrate 1 when the substrate 1 is correctly accommodated in the
container 102.
[0073] Note that the controlling device 70 is assumed to have been
taught operation of the substrate transferring device 101 through a
teaching by a worker and/or an automatic teaching by the
controlling device 70, so that an upper surface of the body part 21
is located at a given first distance h1 (set in advance) below the
lower surface of the substrate 1. The first distance h1 can be set
arbitrary as long as it is smaller than a distance between the
substrates 1 adjacent to each other.
[0074] As illustrated in FIG. 3, the substrate detector 60
receives, by the first light-receiving part 62, the light reflected
on the principal surface of the substrate 1 when the substrate 1 is
correctly accommodated in the container 102. In other words, the
substrate detector 60 receives, by the first light-receiving part
62, the light reflected on the principal surface of the substrate 1
when the principal surface of the substrate 1 is located at the
first distance h1.
[0075] Then, as indicated by a one-dot chain line in FIG. 3, when a
position of the substrate 1 deviates on a farther side inside the
container 102 (frontward of the substrate transferring device 101),
the first light-receiving part 62 cannot receive the light
reflected on the principal surface of the substrate 1.
[0076] On the other hand, the substrate detector 60 illustrated in
FIG. 4 receives, by the first light-receiving part 62, the light
reflected on the principal surface of the substrate 1 when the
substrate 1 is not correctly accommodated in the container 102
(i.e., when the positional deviation occurs). In other words, the
substrate detector 60 receives, by the first light-receiving part
62, the light reflected on the principal surface of the substrate 1
when the principal surface of the substrate 1 is located at a
second distance h2, which is smaller than the first distance
h1.
[0077] Then, as indicated by a one-dot chain line in FIG. 4, when
the substrate 1 is correctly accommodated in the container 102, the
substrate detector 60 cannot receive the light reflected on the
principal surface of the substrate 1.
[0078] Therefore, the controlling device 70 can determine the
positional deviation of the substrate 1 based on whether the first
light-receiving part 62 of the substrate detector 60 receives the
reflected light.
[0079] Note that although in Embodiment 1 the substrate detector 60
is provided to each of the finger parts 21A and 21B, it is not
limited to this, and may be provided to one of the finger parts 21A
and 21B.
[0080] Moreover, one of the finger parts 21A and 21B may be
provided with the substrate detector 60 having the first
light-receiving part 62 receivable of the reflected light when the
substrate 1 is correctly accommodated, and the other finger part
may be provided with the substrate detector 60 having the first
light-receiving part 62 unreceivable of the reflected light when
the substrate 1 is correctly accommodated.
[0081] The controlling device 70 is provided with a processor, such
as a microprocessor or a CPU, and a memory, such as a ROM and a RAM
(none of them are illustrated). The memory stores information on a
basic program, various fixed data, etc. The processor reads
software, such as the basic program stored in the memory, and
executes it to control various operations of the robot system
100.
[0082] Note that the controlling device 70 may be comprised of a
sole controlling device 70 which executes a centralized control, or
a plurality of controlling devices 70 which cooperatively execute a
distributed control. Moreover, the controlling device 70 may be
comprised of a microcomputer, or comprised of an MPU, a PLC
(Programmable Logic Controller), a logic circuit, etc.
[Operation and Effects of Substrate Transferring Device]
[0083] Next, operation of the substrate transferring device 101
according to Embodiment 1 and its effects are described with
reference to FIGS. 1 to 6.
[0084] FIG. 5 is a flowchart illustrating one example of the
operation of the substrate transferring device according to
Embodiment 1. FIG. 5 illustrates a flowchart when the substrate
transferring device 101 is provided with the substrate detector 60
having the first light-receiving part 62 receivable of the
reflected light when the substrate 1 is correctly accommodated.
[0085] First, the controlling device 70 is assumed to have received
an input of command information from an operator via an input
device (not illustrated), for gripping the substrate 1 placed
inside the container 102 and transferring it.
[0086] Then, as illustrated in FIG. 5, the controlling device 70
operates the manipulator 30 to move the hand 20 to a position in
front of the container 102 (Step S101). Then, the controlling
device 70 operates the manipulator 30 to enter the hand 20 into the
container 102 (Step S102). At this time, the controlling device 70
determines whether light-receiving information, indicative of the
reception of the light reflected on the substrate 1 by the first
light-receiving part 62, is acquired from the substrate detector 60
(Step S103).
[0087] If the controlling device 70 determines that the
light-receiving information is acquired from the substrate detector
60 (YES at Step S103), the substrate 1 is determined to be
correctly accommodated (Step S104). Then, the controlling device 70
operates the manipulator 30 to hold the substrate 1 by the hand 20
(Step S105).
[0088] Next, the controlling device 70 operates the manipulator 30
to transfer the substrate 1 to a given position set in advance, and
place the substrate 1 at the given position (Step S106), and ends
this program.
[0089] On the other hand, at Step S103, if the controlling device
70 determines that the light-receiving information is not acquired
from the substrate detector 60 (NO at Step S103), it determines
that the substrate 1 is not correctly accommodated (Step S107).
Then, the controlling device 70 suspends the entering of the hand
20 into the container 102 (Step S108). In detail, the controlling
device 70 suspends the operation of the manipulator 30.
[0090] Next, the controlling device 70 operates the manipulator 30
to move the hand 20 outside the container 102 (Step S109), and ends
this program. Note that the controlling device 70 may notify the
worker etc., that the substrate 1 is not correctly accommodated by
a notifying device (not illustrated). The notifying device is, for
example, a display unit such as a display, a speaker, or a
siren.
[0091] FIG. 6 is a flowchart illustrating another example of the
operation of the substrate transferring device according to
Embodiment 1. FIG. 6 illustrates a flowchart when the substrate
transferring device 101 is provided with the substrate detector 60
having the first light-receiving part 62 unreceivable of the
reflected light when the substrate 1 is correctly accommodated.
[0092] First, the controlling device 70 is assumed to have received
the input of the command information from the operator via the
input device (not illustrated), for gripping the substrate 1 placed
inside the container 102 and transferring it.
[0093] Then, as illustrated in FIG. 6, the controlling device 70
operates the manipulator 30 to move the hand 20 to the position in
front of the container 102 (Step S201). Then, the controlling
device 70 operates the manipulator 30 to enter the hand 20 into the
container 102 (Step S202). At this time, the controlling device 70
determines whether the light-receiving information, indicative of
the reception of the light reflected on the substrate 1 by the
first light-receiving part 62, is acquired from the substrate
detector 60 (Step S203).
[0094] If the controlling device 70 determines that the
light-receiving information is acquired from the substrate detector
60 (YES at Step S203), it determines that the substrate 1 is not
correctly accommodated (Step S204). Then, the controlling device 70
suspends the entering of the hand 20 into the container 102 (Step
S205). In detail, the controlling device 70 suspends the operation
of the manipulator 30.
[0095] Next, the controlling device 70 operates the manipulator 30
to move (evacuate) the hand 20 outside the container 102 (Step
S206), and ends this program. Note that the controlling device 70
may notify the worker etc., that the substrate 1 is not correctly
accommodated by the notifying device (not illustrated). The
notifying device is, for example, a display unit such as a display,
a speaker, or a siren.
[0096] On the other hand, if the controlling device 70 determines
that the light-receiving information is not acquired from the
substrate detector 60 (NO at Step S203), it determines that the
substrate 1 is correctly accommodated (Step S207). Then, the
controlling device 70 operates the manipulator 30 to hold the
substrate 1 by the hand 20 (Step S208).
[0097] Next, the controlling device 70 operates the manipulator 30
to transfer the substrate 1 to the given position set in advance,
and place the substrate 1 at the given position (Step S209), and
ends this program.
[0098] In the substrate transferring device 101 according to
Embodiment 1 configured as described above, the controlling device
70 causes the first light-emitting part 61 of the substrate
detector 60 to emit the light toward the principal surface of the
substrate 1 while the controlling device 70 operates the
manipulator 30 to enter the hand 20 into the container 102. Then,
the controlling device 70 determines the occurrence of the
positional deviation of the substrate 1 based on whether the first
light-receiving part 62 of the substrate detector 60 receives the
light reflected on the principal surface of the substrate 1.
[0099] Therefore, even when the position of the substrate 1
deviates on the farther side in the container 102, the positional
deviation can be detected.
[0100] Particularly, when the substrates 1 increases in the size
(e.g., with a diameter of 30 cm), and the distance between the
adjacent substrates 1 is smaller (e.g., the distance between the
substrates 1 is 6 to 20 mm), an inclining angle of the substrate 1
due to its positional deviation is smaller. Therefore, on a near
side of the container 102 (on a side closer to the substrate
transferring device 101), a position of an outer circumferential
surface (a side surface) of the substrate 1 hardly changes,
compared to when the substrate 1 is correctly accommodated (see
FIGS. 3 and 4).
[0101] Thus, the positional deviation is difficult to be detected
even when, similarly to the substrate processing device disclosed
in Patent Document 1, the position of the substrate 1 is detected
at the near-side part of the container 102.
[0102] On the other hand, in the substrate transferring device 101
according to Embodiment 1, the controlling device 70 determines
whether the positional deviation of the substrate 1 occurs based on
whether the first light-receiving part 62 of the substrate detector
60 detects the light reflected on the principal surface of the
substrate 1, while the hand 20 is being entered into the container
102.
[0103] Therefore, compared to the substrate processing device
disclosed in Patent Document 1, the positional deviation can be
detected even when the position of the substrate 1 deviates on the
farther side in the container 102.
[0104] [Modification 1]
[0105] Next, a modification of the substrate transferring device
101 according to Embodiment 1 is described with reference to FIGS.
7 and 8.
[0106] A substrate transferring device according to Modification 1
of Embodiment 1 is configured so that a first light-emitting part
of a substrate detector downwardly emits the light.
[0107] FIGS. 7 and 8 are schematic views illustrating an outline
configuration of a substantial part of the substrate transferring
device of Modification 1 of Embodiment 1. FIG. 7 illustrates the
substrate detector 60 which receives, by the first light-receiving
part 62, the light reflected on the principal surface of the
substrate 1 when the substrate 1 is correctly accommodated in the
container 102. FIG. 8 illustrates the substrate detector 60 which
does not receive, by the first light-receiving part 62, the light
reflected on the principal surface of the substrate 1 when the
substrate 1 is correctly accommodated in the container 102.
[0108] Note that, similar to Embodiment 1, the controlling device
70 is assumed to have been taught the operation of the substrate
transferring device 101 through the teaching by the worker and/or
the automatic teaching by the controlling device 70, so that the
upper surface of the body part 21 is located at the given first
distance h1 (set in advance) below the lower surface of the
substrate 1. Moreover, when the upper surface of the body part 21
is located at the first distance h1 below the lower surface of the
substrate 1, a distance between a lower surface of the body part 21
and an upper surface of a substrate 1 located below the body part
21, is defined as a third distance h3.
[0109] As illustrated in FIGS. 7 and 8, although a basic
configuration of the substrate transferring device 101 of
Modification 1 is the same as that of the substrate transferring
device 101 of Embodiment 1, it is different in that the first
light-emitting part 61 of the substrate detector 60 emits the light
downwardly (toward the upper surface of the substrate 1).
[0110] In FIG. 7, the substrate detector 60 receives, by the first
light-receiving part 62, the light reflected on the principal
surface of the substrate 1 when the substrate 1 is correctly
accommodated in the container 102. The substrate detector 60
receives, by the first light-receiving part 62, the light reflected
on the principal surface of the substrate 1 when the principal
surface of the substrate 1 is located at the third distance h3.
[0111] Then, as indicated by a one-dot chain line in FIG. 7, the
first light-receiving part 62 cannot receive the light reflected on
the principal surface of the substrate 1 when the positional
deviation of the substrate 1 occurs on the farther side in the
container 102 (frontward of the substrate transferring device
101).
[0112] On the other hand, the substrate detector 60 illustrated in
FIG. 8 receives, by the first light-receiving part 62, the light
reflected on the principal surface of the substrate 1 when the
substrate 1 is not correctly accommodated in the container 102
(i.e., when the positional deviation occurs). In other words, the
substrate detector 60 receives, by the first light-receiving part
62, the light reflected on the principal surface of the substrate 1
when the principal surface of the substrate 1 is located at a
fourth distance h4, which is smaller than the third distance
h3.
[0113] Then, as indicated by a one-dot chain line in FIG. 8, the
substrate detector 60 cannot receive, by the first light-receiving
part 62, the light reflected on the principal surface of the
substrate 1 when the substrate 1 is correctly accommodated in the
container 102.
[0114] The substrate transferring device 101 of Modification 1
configured as described above also can achieve similar operation
and effects to the substrate transferring device 101 of Embodiment
1.
Embodiment 2
[0115] A substrate transferring device according to Embodiment 2 is
configured such that, in the substrate transferring device of
Embodiment 1, a mapping device having a second light-emitting part
which horizontally emits light, and a second light-receiving part
which receives the light emitted from the second light-emitting
part, is provided to the tip-end part of the hand. The controlling
device acquires, from the mapping device, positional information
indicating that the second light-receiving part does not detect
light emitted from the second light-emitting part as positional
information on the substrate. The controlling device operates the
manipulator based on the positional information on the substrate
acquired from the mapping device so as to position the hand at the
first distance (set in advance) below a lower surface of the
substrate.
[0116] Moreover, in the substrate transferring device according to
Embodiment 2, the substrate detector may receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the principal surface of the substrate
is located at the second distance smaller than the first distance.
The controlling device may cause the first light-emitting part of
the substrate detector to emit the light toward the principal
surface of the substrate while the controlling device operates the
manipulator to enter the hand into the container, and determine
that the positional deviation of the substrate occurs when the
first light-receiving part of the substrate detector receives the
light reflected on the principal surface of the substrate.
[0117] Moreover, in the substrate transferring device according to
Embodiment 2, the substrate detector may receive the light
reflected on the principal surface of the substrate by the first
light-receiving part, when the principal surface of the substrate
is located at the second distance smaller than the first distance.
The controlling device may cause the first light-emitting part of
the substrate detector to emit the light toward the principal
surface of the substrate while the controlling device operates the
manipulator to enter the hand into the container, and determine
that the positional deviation of the substrate does not occur when
the first light-receiving part of the substrate detector does not
receive the light reflected on the principal surface of the
substrate.
[0118] Below, one example of the substrate transferring device
according to Embodiment 2 is described with reference to FIG.
9.
[Configuration of Substrate Transferring Device]
[0119] FIG. 9 is a top view schematically illustrating an outline
configuration of the substrate transferring device and a robot
system having it according to Embodiment 2. Note that, in FIG. 9, a
front-and-rear direction of the substrate transferring device is
indicated as a front-and-rear direction in the drawing.
[0120] As illustrated in FIG. 9, although a basic configuration of
the substrate transferring device 101 according to Embodiment 2 is
the same as that of the substrate transferring device 101 of
Embodiment 1, it is different in that a mapping device 80 is
provided to the tip-end part of the base body 21.
[0121] The mapping device 80 has a second light-emitting part 81
which horizontally emits light, and a second light-receiving part
82 which receives the light emitted from the second light-emitting
part 81. The second light-emitting part 81 is provided to the
finger part 21A of the body part 21, and the second light-receiving
part 82 is provided to the finger part 21B of the base body 21. In
other words, the second light-emitting part 81 and the second
light-receiving part 82 are provided so as to face to each
other.
[0122] Moreover, the mapping device 80 outputs to the controlling
device 70 positional information indicating that the second
light-receiving part 82 does not detect the light emitted from the
second light-emitting part 81, as positional information on the
substrate 1. Therefore, the controlling device 70 can more
accurately acquire the positional information on the substrate
1.
[0123] The controlling device 70 operates the manipulator 30 so
that the hand 20 is located at the first distance h1 below the
lower surface of the substrate 1, based on the positional
information on the substrate 1 acquired from the mapping device 80.
Accordingly, the controlling device 70 can position the hand 20 at
the first distance h1 below the lower surface of the substrate 1
more accurately compared to the substrate transferring device 101
according to Embodiment 1.
[0124] Note that since operation of the substrate transferring
device 101 according to Embodiment 2 is the same as that of the
substrate transferring device 101 according to Embodiment 1,
detailed description thereof is omitted.
[0125] The substrate transferring device 101 according to
Embodiment 2 configured as described above also can achieve similar
operation and effects to the substrate transferring device 101
according to Embodiment 1.
Embodiment 3
[0126] As illustrated in FIGS. 10 and 11, a robot system 200
includes a substrate transferring device 201 and a container 112 as
a placing stand. In this robot system 200, the substrate 1 is
placed on the placing stand by being accommodated in the container
112. The container 112 is, for example, a FOUP (Front Opening
Unified Pod), or a quartz boat.
[0127] A left-and-right direction and an up-and-down direction in
FIG. 10 indicate a front-and-rear direction and an up-and-down
direction of the substrate transferring device 201. Moreover, a
left-and-right direction in FIG. 11 indicates the front-and-rear
direction of the substrate transferring device 201. Downward in an
up-and-down direction in FIG. 11 indicates leftward in the
left-and-right direction of the substrate transferring device
201.
[0128] The substrate 1 is, for example, a substrate for a
semiconductor device, such as a semiconductor substrate and a glass
substrate. This substrate 1 is, for example, a circular thin plate.
The substrate 1 has a pair of circular principal surfaces 1A and
1B, and an outer circumferential surface 1C between the principal
surface 1A and the principal surface 1B. The substrate 1 is, for
example, a thin plate in a polygonal shape, and may have any shape
as long as it has a thin-plate shape. The semiconductor substrate
is, for example, a silicon substrate, a sapphire
(single-crystalline aluminum) substrate, or another type of
substrate. The glass substrate is, for example, a glass substrate
for an FPD (Flat Panel Display), or a glass substrate for a MEMS
(Micro Electro Mechanical Systems).
[0129] The substrate transferring device 201 is provided with a
hand 120, the manipulator 30, and the controlling device 70. The
substrate transferring device 201 holds the substrate 1
accommodated in the container 112 by the hand 120. The hand 120 is
attached to the manipulator 30. This manipulator 30 moves the hand
120 to transfer the substrate 1. In FIG. 10, the substrate 1 is
held by the hand 120.
[0130] Note that, below, although a configuration of a horizontally
articulated robot is described as the manipulator 30, the
manipulator 30 according to the present disclosure is not limited
to the horizontally articulated robot, but may be one based on a
vertically articulated robot.
[0131] The manipulator 30 has the plurality of arms (here, the
first arm 32 and the second arm 34), the first connecting part 31,
the second connecting part 33, the third connecting part 35, the
ascendable member 40, and the casing 50.
[0132] The ascendable member 40 is provided to the upper part of
the casing 50. The ascendable member 40 is vertically movable with
respect to the casing 50. Moreover, the linear-motion actuator 41
and the controlling device 70 are disposed inside the casing 50.
Note that the controlling device 70 may be provided outside the
casing 50.
[0133] The linear-motion actuator 41 can cause the ascendable
member 40 to ascend and descend (to move vertically). The
linear-motion actuator 41 is, for example, a drive motor (a
servomotor) together with a ball screw, a linear guide, or a rack
and pinion, or may be an air cylinder.
[0134] Note that, inside the casing 50, for example, the rotary
sensor which detects the rotational position of the drive motor and
outputs it to the controlling device 70, and the current sensor
which detects current for controlling the rotation of the drive
motor may be provided.
[0135] The base-end part of the first arm 32 is connected to the
ascendable member 40 via the first connecting part 31. The first
arm 32 is rotatable about the rotary axis L1 vertically extending
and passing through the axial center of the ascendable member 40.
The ascendable member 40 is provided with, for example, the drive
motor which rotates the first arm 32, and the rotary sensor which
detects the rotational position of the drive motor. Note that the
drive motor etc. may be provided to the first arm 32.
[0136] The base-end part of the second arm 34 is connected to the
tip-end part of the first arm 32 via the second connecting part 33.
The second arm 34 is rotatable about the rotary axis L2 extending
vertically. The first arm 32 is provided with, for example, the
drive motor which rotates the second arm 34, and the rotary sensor
which detects the rotational position of the drive motor. Note that
the drive motor etc. may be provided to the second arm 34.
[0137] The hand 120 is connected to the tip-end part of the second
arm 34 via the third connecting part 35. The hand 120 is rotatable
about the rotary axis L3 extending vertically. The second arm 34 is
provided with, for example, the drive motor which rotates the hand
120, and the rotary sensor which detects the rotational position of
the drive motor. Note that the drive motor etc. may be provided to
the hand 120.
[0138] As illustrated in FIG. 11, the hand 120 has a body part 121
and the plurality of claw parts 22. The body part 121 is formed in
a substantially Y-shape when seen from above, and includes a pair
of finger parts 121A and 121B. The body part 121 is provided, at
its tip-end parts (the tip-end parts of the finger parts 121A and
121B) and base-end part, with the claw parts 22, respectively. Each
claw part 22 is formed in an L-shape when seen horizontally (formed
to have an L-shaped cross section in the vertical direction), and
the substrate 1 is placed on the bottom part of the claw part 22.
Note that the hand 120 may be configured so that the hand 120 and
the substrate 1 do not relatively displace, like as an
edge-gripping hand or a sucking hand.
[0139] Each of the finger parts 121A and 121B is provided with a
substrate detector 160A as a first substrate detector, at its
tip-end part. The substrate detectors 160A are provided at the same
positions in the front-and-rear direction. Each substrate detector
160A detects a distance to the principal surface 1A of the
substrate 1, which is facing thereto. The substrate transferring
device 201 uses, for example, a capacitive sensor as the substrate
detector 160A. The substrate detector 160A detects a capacitance
generated between the substrate detector 160A and the principal
surface 1A of the substrate 1 facing to the hand 120. This
substrate detector 160A can detect a change in the distance to the
principal surface 1A based on a change in the generated
capacitance. Note that although here the substrate detectors 160A
are provided at the tip-end parts of the body part 121, they may be
provided at an intermediate part or the base-end part of the body
part 121, as long as they can be faced to the principal surface 1A
of the substrate 1.
[0140] The controlling device 70 is provided with the processor,
such as a microprocessor or a CPU, and the memory, such as a ROM
and a RAM (none of them are illustrated). The memory stores
information on the basic program, various fixed data, etc. The
processor reads the software, such as the basic program, stored in
the memory, and executes it to control various operations of the
robot system 200.
[0141] The controlling device 70 may be comprised of a sole
controlling device 70 which executes a centralized control.
Alternatively, the controlling device 70 may be comprised of a
plurality of controlling devices 70 which cooperatively execute a
distributed control. Moreover, the controlling device 70 may be
comprised of a microcomputer, or comprised of an MPU, a PLC
(Programmable Logic Controller), a logic circuit, etc.
[0142] FIGS. 12(A) and 12(B) illustrate the container 112 together
with the substrate 1. The container 112 has a shell 113 in a
box-shape. The shell 13 is formed with an opening 114 and a
plurality of grooves 115 vertically aligned. Each groove 115
extends horizontally along an inner wall of the shell 113. The
groove 115 is supportable of an edge of the principal surface 1A of
the substrate 1.
[0143] In FIGS. 12(A) and 12(B), the grooves 115 support the
principal surfaces 1A of the substrates 1. The plurality of
substrates 1 are supported by the grooves 115 while the principal
surfaces 1A of the substrates 1 are horizontally parallel with each
other. As illustrated in FIG. 12(B), the plurality of substrates 1
are vertically aligned. A double-direction arrow Dp illustrated in
FIG. 12(B) indicates a gap between the grooves 115, and the
plurality of substrates 1 are vertically aligned in this container
112 having the given gap Dp therebetween. Although the gap Dp is
not particularly limited, it is, for example, at 5 mm or above and
at 20 mm or below.
[0144] FIG. 13 illustrates the substrate 1 and the hand 120.
Although not being illustrated, the substrate 1 is held at the
groove 115 of the container 112. The substrate 1 is held while its
principal surface 1A is parallel with the horizontal direction. The
substrate detector 160A detects upwardly in the up-and-down
direction. The substrate detector 160A is facing to the principal
surface 1A. The substrate detector 160A is electrically connected
to a capacitance measuring part (not illustrated), and this
capacitance measuring part is electrically connected to the
controlling device 70. The substrate detector 160A is connected to
the capacitance measuring part via an electrical conductor 161
extending along a lower surface 121C of the body part 121 of the
hand 120.
[0145] A double-direction arrow ha in FIG. 13 indicates a vertical
distance between the substrate detector 160A and the principal
surface 1A. The capacitance detected by the substrate detector 160A
changes according to the change in the distance ha. The substrate
detector 160A outputs the detected capacitance to the capacitance
measuring part. The capacitance measuring part outputs to the
controlling device 70 a voltage signal which varies according to
the magnitude of the inputted capacitance.
[0146] FIGS. 14(A) to 14(C) illustrate the substrate 1 accommodated
in the container 112. The principal surface 1A of the substrate 1
extends in parallel with the horizontal direction. The substrate 1
is the one located above and closest to the hand 21. FIG. 14(A)
illustrates a state where the tip-end part of the hand 21 is
inserted into the container 112 through the opening 114. In FIG.
14(A), the substrate detector 160A is facing to the principal
surface 1A of the substrate 1. FIG. 14(B) illustrates a state where
the hand 21 is further inserted into the container 112. FIG. 14(C)
illustrates a state where the hand 21 is still further inserted
into the container 112.
[0147] In FIGS. 14(A) to 14(C), the substrate detector 160A is
facing to the principal surface 1A of the substrate 1. A
double-direction arrow ha1 in FIG. 14(A) indicates the vertical
distance between the substrate detector 160A and the principal
surface 1A of the substrate 1. From FIG. 14(A) to FIG. 14(C), the
hand 120 moves horizontally. Also in FIGS. 14(B) and 14(C), the
distance between the substrate detector 160A and the principal
surface 1A of the substrate 1 is the distance ha1 same as in FIG.
14(A).
[0148] FIGS. 15(A) to 15(C) illustrate another substrate 1
accommodated in the container 112. The principal surface 1A of this
substrate 1 extends from the opening 114 toward the farther side
while inclining downwardly. In FIGS. 15(A) to 15(C), the other
configurations are similar to those in FIGS. 14(A) and 14(B). A
double-direction arrow ha2 in FIG. 15(A) indicates the vertical
distance between the substrate detector 160A and the principal
surface 1A of the substrate 1. A double-direction arrow ha3 in FIG.
15(B) indicates the vertical distance between the substrate
detector 160A and the principal surface 1A of the substrate 1. A
double-direction arrow ha4 in FIG. 15(C) indicates the vertical
distance between the substrate detector 160A and the principal
surface 1A of the substrate 1. The distance ha2 is larger than the
distance ha3, and the distance ha3 is larger than the distance
ha4.
[0149] FIGS. 16(A) to 16(C) illustrate still another substrate 1
accommodated in the container 112. This substrate 1 is warped. The
principal surface 1A of this substrate 1 is curved in an arc-shape
to be bulged downwardly. In FIGS. 16(A) to 16(C), the other
configurations are similar to those in FIGS. 14(A) to 14(C). A
double-direction arrow ha5 in FIG. 16(A) indicates the vertical
distance between the substrate detector 160A and the principal
surface 1A of the substrate 1. A double-direction arrow ha6 in FIG.
16(B) indicates the vertical distance between the substrate
detector 160A and the principal surface 1A of the substrate 1. A
double-direction arrow ha7 in FIG. 16(C) indicates the vertical
distance between the substrate detector 160A and the principal
surface 1A of the substrate 1. The distance ha5 is larger than the
distance ha6, and the distance ha7 is smaller than the distance ha5
and larger than the distance ha6.
[0150] Here, a method of operating the substrate transferring
device 201 according to the present disclosure is described.
[0151] As illustrated in FIGS. 12(A) and 12(B), the container 112
in which the substrates 1 are accommodated is prepared (STEP
1).
[0152] The substrate detector 160A detects the distance ha to the
principal surface 1A of the substrate 1 (STEP 2). At STEP 2, the
hand 120 is internally inserted into the shell 113 of the container
112 through the opening 114. As illustrated in FIG. 14(A), the
substrate detector 160A is facing to the principal surface 1A of
the substrate 1. The substrate detector 160A detects the distance
ha1 to the principal surface 1A as the capacitance.
[0153] At STEP 2, the hand 120 is moved from the state in FIG.
14(A) to the state in FIG. 14(B), and then, to the state in FIG.
14(C). The substrate detector 160A detects the distance ha1 as the
capacitance while the hand 120 is moved from the state in FIG.
14(A) to the state in FIG. 14(C). The detected capacitance is
converted into the voltage signal and outputted to the controlling
device 70. The controlling device 70 calculates the distance ha1
based on this voltage signal.
[0154] The controlling device 70 determines whether to hold the
substrate 1 by the hand 120 (STEP 3). Here, at STEP 3, the distance
ha1 falls within a given distance range set in advance. The
controlling device 70 determines to hold the substrate 1 by the
hand 120.
[0155] The controlling device 70 causes the hand 120 to hold the
substrate 1 (STEP 4). The substrate 1 is held by the claw parts 22
of the hand 120. At this time, the claw parts 22 contact the edge
part of the principal surface 1A.
[0156] The substrate 1 held by the hand 120 is transferred to the
next processing by the manipulator 30 (STEP 5).
[0157] Next, the operating method is described using the substrate
1 in the state illustrated in FIGS. 15(A) to 15(C). At STEP 2 in
this operating method, the substrate detector 160A detects the
distance ha as the capacitance while the hand 120 is moved from the
state in FIG. 15(A) to the state in FIG. 15(C). The generated
capacitance increases from the distance ha2 to the distance ha4.
The detected capacitance is converted into the voltage signal and
outputted to the controlling device 70. The controlling device 70
calculates the distance ha2, the distance ha3, and the distance
ha4, based on the voltage signal.
[0158] At STEP 3, the distance ha4 is small and does not fall
within the given distance range. The controlling device 70
determines not to hold the substrate 1 by the hand 120. The hand
120 is moved back to a given standby position. The controlling
device 70 notifies to the worker etc., by a notifying device (not
illustrated). The notifying device is, for example, a display unit
such as a display, a speaker, or a siren.
[0159] Furthermore, the operating method is described using the
substrate 1 in the state illustrated in FIGS. 16(A) to 16(C). At
STEP 2 in this operating method, the substrate detector 160A
detects the distance ha as the capacitance while the hand 120 is
moved from the state in FIG. 16(A) to the state in FIG. 16(C). The
generated capacitance increases from the distance ha5 to the
distance ha6. The capacitance reaches the maximum while the
distance ha changes from the distance ha6 to the distance ha7, and
then, the capacitance decreases toward the distance ha7. The
detected capacitance is converted into the voltage signal and
outputted to the controlling device 70. The controlling device 70
calculates the distance ha5, the distance ha6, and the distance
ha7, based on this voltage signal.
[0160] At STEP 3, the distance ha6 is small and does not fall
within the given distance range. The controlling device 70
determines not to hold the substrate 1 by the hand 120. The hand
120 is moved back to the given standby position. The controlling
device 70 notifies to the worker etc., by the notifying device (not
illustrated). The notifying device is, for example, a display unit
such as a display, a speaker, or a siren.
[0161] The substrate transferring device 201 is provided with the
substrate detector 160A which detects the distance ha to the
principal surface 1A of the substrate 1. The substrate detector
160A can accurately detect the distance ha to the principal surface
1A, compared to a detector which detects whether the distance ha to
the principal surface 1A falls within a given range.
[0162] At STEP 2 in the method of operating the substrate
transferring device 201, the substrate transferring device 201 can
calculate the change in the distance ha while moving the hand 120.
The substrate transferring device 201 can suspend the movement of
the hand 12 when the distance ha becomes below a lower limit. This
substrate transferring device 201 can avoid interference between
the hand 120 and the substrate 1 beforehand. Moreover, when the
distance ha becomes below the given lower limit, it can be notified
to the worker etc. by the notifying device (not illustrated). This
substrate transferring device 201 can easily confirm the substrate
1 interfering with the hand 120.
[0163] The substrate detector 160A is provided to the hand 120. The
hand 120 is inserted into the small gap Dp between the substrates
1. Therefore, the substrate detector 160A is preferably small in
the size and weight. The substrate detector 160 is preferably thin.
Moreover, the substrate detector 160 is preferably formable in a
desired shape corresponding to a shape of a surface of the hand
120. Also in these respects, the capacitive sensor is suitable as
the substrate detector 160A.
[0164] At STEP 2 in this operating method, when the distance ha
calculated by the substrate detector 160A is below the given lower
limit, a moving path of the hand 120 may be changed so that the
distance ha becomes larger than the given lower limit. Accordingly,
the interference between the hand 120 and the substrate 1 can be
prevented beforehand.
[0165] At STEP 2 in this operating method, the substrate detector
160A is provided at the tip-end part of the hand 120, and
detectable of the distance ha before the hand 120 is entirely
inserted into the container 112. Therefore, the interference
between the hand 120 and the substrate 1 may be reduced. In this
respect, the substrate detector 160A is preferably provided at the
tip-end part of the hand 120. The term "tip-end part" as used
herein indicates the foremost range part of the body part 121 of
the hand 120, when a range of the body part 121 from its front end
to its rear end is equally divided into three in the front-and-rear
direction.
[0166] At STEP 2 in this operating method, the substrate detector
160A preferably determines whether the capacitance detected by the
substrate detector 160A falls within the given range set in
advance. Accordingly, a charging abnormality of the substrate 1 can
be detected. The substrate transferring device 201 can reduce a
false detection by the substrate detector 160A due to the charging
abnormality of the substrate 1.
[0167] As illustrated in FIGS. 15(A) to 15(C), the substrate
transferring device 201 measures the distance ha in the
front-and-rear direction. Therefore, the inclination of the
principal surface 1A of the substrate 1 in the front-and-rear
direction can be measured. In terms of measuring this inclination,
the substrate detector 160A measures the distance ha preferably at
two or more positions, and further preferably at three or more
positions, in the front-and-rear direction. Particularly, the
substrate detector 160A measures the distance ha preferably at
positions linearly continuing in the front-and-rear direction.
[0168] At STEP 2 in this method of operating the substrate
transferring device 201, the inclination of the principal surface
1A in the front-and-rear direction may be determined whether to
fall within a given range. Accordingly, a postural abnormality of
the substrate 1 can be detected.
[0169] As illustrated in FIGS. 16(A) to 16(C), the substrate
transferring device 201 measures the distance ha in the
front-and-rear direction. Therefore, the warp of the substrate 1 in
the front-and-rear direction can be measured. In terms of measuring
the warp, the substrate detector 160A measures the distance ha
preferably at three or more positions, and further preferably at
four or more positions in the front-and-rear direction.
Particularly, the substrate detector 160A measures the distance ha
preferably at positions linearly continuing in the front-and-rear
direction.
[0170] At STEP 2 in this method of operating the substrate
transferring device 201, the warp of the principal surface 1A in
the front-and-rear direction may be determined to fall within a
given range. Accordingly, abnormalities in the posture and shape of
the substrate 1 can be detected.
[0171] At STEP 2 in this operating method, by the inclination and
warp of the substrate 1 being measured, the interference between
the substrate 1 and the hand 120 may be reduced, and the substrate
1 may be held in a stable posture by the hand 120. In these
respects, at STEP 2 in this operating method, the controlling
device 70 preferably determines the inclination and warp of the
substrate 1.
[0172] This substrate detector 160A is not limited to the
capacitive sensor, as long as it can detect the change in the
distance ha. The substrate detector 160A may be provided to the
hand 120 so as to detect the substrate 1 downwardly. The substrate
detector 160A may detect a distance to a principal surface 1B of
the substrate 1 facing upwardly, instead of to the principal
surface 1A. This substrate detector 160A may be used to detect the
existence of the substrate 1. Moreover, the substrate detector 160A
may detect the distance ha to the principal surface 1A of the
substrate 1 held by the hand 120. This can contribute to the
improvement in the stability of transferring the substrate 1.
[0173] By the substrate transferring device 201 being provided with
the substrate detector 160A, it can more accurately detect the
abnormality in the posture and shape of the substrate 1 before the
hand 120 holds the substrate 1, compared to the conventional one.
By the substrate transferring device 201 being provided with the
substrate detector 160A, it can prevent the interference between
the substrate 1 and the hand 120 moving toward the substrate 1,
beforehand. Accordingly, the substrate transferring device 201 can
omit the mapping operation of the substrate 1, or can be
simplified.
[0174] Although the substrate detector 160A is provided to the body
part 121, all or a part of the body part 121 may constitute the
substrate detector 160. For example, a part or all of the body part
121 made of aluminum alloy may be the substrate detector 160.
[0175] FIGS. 17(A) and 17(B) illustrate a hand 212 of another
substrate transferring device 211 according to the present
disclosure. This substrate transferring device 211 has a
configuration similar to that of the substrate transferring device
201, except for that the hand 212 is provided instead of the hand
120. Here, the configuration different from the substrate
transferring device 201 is mainly described, and the similar
configuration is omitted to be described. Moreover, the same
reference characters are given to the configuration similar to that
of the substrate transferring device 201 for description.
[0176] The hand 212 has a body part 213 and the plurality of claw
parts 22. As illustrated in FIGS. 17(A) and 17(B), the body part
213 is formed in a substantially Y-shape when seen from above, and
has a pair of finger parts 213A and 213B. The body part 213 is
provided, at its tip-end parts (at tip-end parts of the finger
parts 213A and 213B) and base-end part, with the claw parts 22,
respectively.
[0177] The substrate transferring device 211 is provided with a
substrate detector 160F as a second substrate detector, in addition
to the substrate detectors 160A. The substrate transferring device
211 is further provided with a plurality of substrate detectors
160B to 160E. The plurality of substrate detectors 160A to 160F are
provided to the body part 213 so as to be located at different
positions in the front-and-rear direction. The substrate detectors
160A to 160E are aligned in the front-and-rear direction on each of
the finger parts 213A and 213B. The substrate detectors 160A to
160E provided to the finger part 213A are located at the same
positions as those provided to the finger part 213B, in the
front-and-rear direction. Moreover, the substrate detector 160F is
provided between the pair of substrate detectors 160A in the
left-and-right direction. Although here the substrate detector 160F
is the second substrate detector, any of the substrate detectors
160B to 160E may be the second substrate detector instead of the
substrate detector 160F.
[0178] The substrate transferring device 211 can simultaneously
detect the distance ha using the substrate detectors 160A to 160F.
Therefore, the shape of the principal surface 1A of the substrate 1
can be grasped more accurately, and the substrate transferring
device 211 can easily grasp the inclination and the warp of the
surface. In this respect, the substrate detectors 160 preferably
perform the detection at three or more positions. The substrate
detectors 160 are preferably located at two or more different
positions in the front-and-rear direction. Similarly, the substrate
detectors 160 are preferably located at three or more different
positions in the left-and-right direction.
Embodiment 4
[0179] FIG. 18 illustrates a hand 222 of still another substrate
transferring device 221 according to the present disclosure. This
substrate transferring device 221 has a configuration similar to
that of the substrate transferring device 201, except for that it
is provided with the hand 222 instead of the hand 120. Here, the
configuration different from the substrate transferring device 201
is mainly described, and the similar configuration is omitted to be
described. Moreover, the same reference characters are given to the
configuration similar to that of the substrate transferring device
201 for description.
[0180] The hand 222 has a body part 223 and suction pads 224, and
is a type of a suction hand Although not being illustrated, similar
to the body part 121, the body part 223 is formed in a
substantially Y-shape when seen from above, and has a pair of
finger parts 223A and 223B. This hand 222 is provided with four
suction pads 224 corresponding to the claw parts 22 of the hand
120. As the suction pad 224, a vacuum suction pad and a Bernoulli
suction pad may be illustrated.
[0181] This suction pad 224 can demonstrate a larger suction force
when a distance between the entire area of a sucking surface of the
suction pad 224 and the principal surface 1A of the substrate 1 is
unified. The larger suction force contributes to the improvement in
the positioning accuracy and the transferring stability of the
substrate 1.
[0182] In this substrate transferring device 221, the substrate
detector 160A detects the distance ha to the principal surface 1A
of the substrate 1. By the distance ha being detected at a
plurality of locations, the inclination and warp of the principal
surface 1A can be obtained. Based on the inclination and warp, the
hand 222 can be located at a position where the suction pads 224
can demonstrate the larger sucking force, and thus, the suction
pads 224 can suck the substrate 1. Moreover, by the distance ha to
the principal surface 1A of the substrate 1 being detected while
the suction pads 224 suck the substrate 1, it can be confirmed that
the substrate 1 is sucked at and in the given position and posture.
Accordingly, the substrate 1 can be stably transferred.
[0183] Also in the substrate transferring device 211, the
inclination and warp of the principal surface 1A can be more
accurately grasped by the plurality of substrate detectors 160
detecting the substrate 1. Moreover, the position of the substrate
1 held by the hand 222 can be grasped accurately. In these
respects, the hand 222 is preferably provided with the plurality of
substrate detectors 160, similarly to the hand 212.
[0184] It is apparent for a person skilled in the art from the
above description that many improvements and other embodiments of
the present disclosure are possible. Therefore, the above
description is to be interpreted only as illustration, and it is
provided in order to teach a person skilled in the art the best
mode for implementing the present disclosure. The details of the
structures and/or the functions may be substantially changed,
without departing from the spirit of the present disclosure.
Moreover, various inventions can be made by suitably combining the
plurality of components disclosed in the above embodiments.
INDUSTRIAL APPLICABILITY
[0185] The substrate transferring device and the method of
operating the same according to the present disclosure are useful
since they can detect the positional deviation of the substrate
more accurately than the conventional substrate processing
device.
DESCRIPTION OF REFERENCE CHARACTERS
[0186] 1 . . . Substrate [0187] 1a . . . Principal Surface [0188]
20, 120, 212, 222 . . . Hand [0189] 21 . . . Body Part [0190] 21A .
. . Finger Part [0191] 21B . . . Finger Part [0192] 22 . . . Claw
Part [0193] 30 . . . Manipulator [0194] 31 . . . First Connecting
Part [0195] 32 . . . First Arm [0196] 33 . . . Second Connecting
Part [0197] 34 . . . Second Arm [0198] 35 . . . Third Connecting
Part [0199] 40 . . . Ascendable Member [0200] 41 . . .
Linear-motion Actuator [0201] 50 . . . Casing [0202] 60, 160 (160A
to 160F) . . . Substrate Detector [0203] 61 . . . First
Light-emitting Part [0204] 62 . . . First Light-receiving Part
[0205] 70 . . . Controlling Device [0206] 80 . . . Mapping Device
[0207] 81 . . . Second Light-emitting Part [0208] 82 . . . Second
Light-receiving Part [0209] 100, 200 . . . Robot System [0210] 101,
201, 211, 221 . . . Substrate Transferring Device [0211] 102, 112 .
. . Container
* * * * *