U.S. patent application number 17/485144 was filed with the patent office on 2022-01-20 for quartz glass crucible.
The applicant listed for this patent is SUMCO CORPORATION. Invention is credited to Takahiro ABE, Hideki FUJIWARA, Kouta HASEBE, Hiroshi KISHI.
Application Number | 20220018037 17/485144 |
Document ID | / |
Family ID | 1000005871872 |
Filed Date | 2022-01-20 |
United States Patent
Application |
20220018037 |
Kind Code |
A1 |
KISHI; Hiroshi ; et
al. |
January 20, 2022 |
QUARTZ GLASS CRUCIBLE
Abstract
A quartz glass crucible (1) includes: a cylindrical crucible
body (10) which has a bottom and is made of quartz glass; and a
first crystallization-accelerator-containing coating film (13A)
which is formed on an inner surface (10a) so as to cause an inner
crystal layer composed of an aggregate of dome-shaped or columnar
crystal grains to be formed on a surface-layer portion of the inner
surface (10a) of the crucible body (10) by heating during a step of
pulling up the silicon single crystal by a Czochralski method. The
quartz glass crucible is intended to withstand a single crystal
pull-up step undertaken for a very long period of time.
Inventors: |
KISHI; Hiroshi; (Akita-shi,
JP) ; HASEBE; Kouta; (Akita-shi, JP) ; ABE;
Takahiro; (Tokyo, JP) ; FUJIWARA; Hideki;
(Tokyo, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SUMCO CORPORATION |
Tokyo |
|
JP |
|
|
Family ID: |
1000005871872 |
Appl. No.: |
17/485144 |
Filed: |
September 24, 2021 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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16308797 |
Dec 10, 2018 |
11162186 |
|
|
PCT/JP2017/030266 |
Aug 24, 2017 |
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17485144 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
C30B 15/10 20130101;
C30B 15/002 20130101; C30B 29/06 20130101; C03B 20/00 20130101 |
International
Class: |
C30B 15/10 20060101
C30B015/10; C03B 20/00 20060101 C03B020/00; C30B 29/06 20060101
C30B029/06 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 23, 2016 |
JP |
2016-185293 |
Claims
1. A quartz glass crucible used for pulling up a silicon single
crystal by a Czochralski method, comprising: a cylindrical crucible
body which has a bottom and is made of quartz glass; and a first
crystallization-accelerator-containing coating film which is formed
on an inner surface of the crucible body so as to cause an inner
crystal layer composed of an aggregate of dome-shaped or columnar
crystal grains to be formed on a surface-layer portion of the inner
surface of the crucible body by heating during a step of pulling up
the silicon single crystal.
2. The quartz glass crucible according to claim 1, wherein a ratio
A/B between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the inner surface of the crucible
body, on which the inner crystal layer is formed, by an X-ray
diffraction method is 7 or less.
3. The quartz glass crucible according to claim 1, wherein the
inner crystal layer has a dome-shaped crystal layer composed of the
aggregate of dome-shaped crystal grains formed on the surface-layer
portion of the inner surface of the crucible body, and a columnar
crystal layer composed of the aggregate of columnar crystal grains
immediately under the dome-shaped crystal layer.
4. The quartz glass crucible according to claim 3, wherein a ratio
A/B between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the inner surface of the crucible
body, on which the inner crystal layer is formed, by an X-ray
diffraction method is less than 0.4.
5. The quartz glass crucible according to claim 3, wherein a
crystallization accelerator contained in the first
crystallization-accelerator-containing coating film is barium, and
a concentration of the barium in the inner surface of the crucible
body is 3.9.times.10.sup.16 atoms/cm.sup.2 or more.
6. The quartz glass crucible according to claim 1, wherein a region
having a predetermined width extending downward from a rim of an
upper end of an inner surface of the crucible body is a
crystallization-accelerator uncoated region in which the first
crystallization-accelerator-containing coating film is not
formed.
7. The quartz glass crucible according to claim 1, further
comprising: a second crystallization-accelerator-containing coating
film which is formed on an outer surface of the crucible body so as
to cause an outer crystal layer composed of an aggregate of
dome-shaped or columnar crystal grains to be formed on a
surface-layer portion of the outer surface of the crucible body by
heating during the step of pulling up.
8. The quartz glass crucible according to claim 7, wherein a ratio
AB between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the outer surface of the crucible
body, on which the outer crystal layer is formed, by an X-ray
diffraction method is 0.4 or more and 7 or less.
9. The quartz glass crucible according to claim 7, wherein a
crystallization accelerator contained in the second
crystallization-accelerator-containing coating film is barium, and
a concentration of the barium in the outer surface of the crucible
body is equal to or more than 4.9.times.10.sup.15 atoms/cm.sup.2
and less than 3.9.times.10.sup.16 atoms/cm.sup.2.
10. The quartz glass crucible according to claim 7, wherein a
region having a predetermined width extending downward from a rim
of the upper end of the outer surface of the crucible body is a
crystallization-accelerator uncoated region in which the first
crystallization-accelerator-containing coating film is not
formed.
11. (canceled)
12. (canceled)
13. (canceled)
14. (canceled)
15. (canceled)
16. (canceled)
17. (canceled)
18. (canceled)
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20. (canceled)
21. (canceled)
22. (canceled)
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24. (canceled)
25. (canceled)
26. (canceled)
27. (canceled)
28. (canceled)
29. (canceled)
30. (canceled)
31. A quartz glass crucible used for pulling up a silicon single
crystal by a Czochralski method, comprising: a cylindrical crucible
body which has a bottom and is made of quartz glass; and a
crystallization-accelerator-containing coating film which is formed
on an inner surface of the crucible body so as to cause an inner
crystal layer composed of an aggregate of dome-shaped or columnar
crystal grains to be formed on a surface-layer portion of the inner
surface of the crucible body by heating during a step of pulling up
the silicon single crystal, wherein the
crystallization-accelerator-containing coating film is a non-heated
polymer film formed of: (i) a barium compound which is insoluble in
water, and (ii) a thickener composed of a polymer in which the
barium compound diffuses.
32. The quartz glass crucible according to claim 31, wherein a
ratio AB between a maximum value A of a peak intensity at a
diffraction angle 2.theta. of 20.degree. to 25.degree. and a
maximum value B of a peak intensity at a diffraction angle 2.theta.
of 33.degree. to 40.degree. obtained by analyzing the inner surface
of the crucible body, on which the inner crystal layer is formed,
by an X-ray diffraction method is 7 or less.
33. The quartz glass crucible according to claim 32, wherein the
ratio AB between the maximum value A of the peak intensity at the
diffraction angle 2.theta. of 20.degree. to 25.degree. and the
maximum value B of the peak intensity at the diffraction angle
2.theta. of 33.degree. to 40.degree. obtained by analyzing the
inner surface of the crucible body, on which the inner crystal
layer is formed, by the X-ray diffraction method is 0.4 or more and
7 or less.
34. The quartz glass crucible according to claim 31, wherein a
region having a predetermined width extending downward from a rim
of the upper end of the inner surface of the crucible body is a
crystallization-accelerator uncoated region in which the
crystallization-accelerator-containing coating film is not formed.
Description
TECHNICAL FIELD
[0001] The present invention relates to a quartz glass crucible and
a manufacturing method thereof and, particularly to a quartz glass
crucible used for manufacturing a silicon single crystal by the
Czochralski method (CZ method) and a manufacturing method thereof.
In addition, the present invention relates to a manufacturing
method of a silicon single crystal using a quartz glass
crucible.
BACKGROUND ART
[0002] A quartz glass crucible is used for manufacturing a silicon
single crystal by the CZ method. In the CZ method, a silicon raw
material is heated in the quartz glass crucible for melting, a seed
crystal is dipped into the silicon melt, and then the seed crystal
is gradually pulled up while rotating the crucible to grow a single
crystal. In order to manufacture a high quality silicon single
crystal for a semiconductor device at low costs, it is necessary to
perform so-called multi-pulling in which not only can the yield of
single crystals be increased by a single pull-up step, a plurality
of silicon single crystal ingots can be pulled up from a single
crucible. For this, a crucible having a stable shape capable of
withstanding long-term use is necessary.
[0003] In a quartz glass crucible of the related art, the viscosity
is reduced in a thermal environment at 1400.degree. C. or higher
during pulling up a silicon single crystal, so that the shape
thereof cannot be maintained and deformation of the crucible such
as buckling or collapse to the inside occurs. Accordingly,
variations in the liquid surface level of a silicon melt, breakage
of the crucible, contact with components in a furnace, and the like
become problems. Furthermore, the inner surface of the crucible is
crystallized by coming into contact with the silicon melt during
pulling up a single crystal and cristobalite called a brown ring is
formed. In a case where the cristobalite is delaminated and
incorporated into the silicon single crystal during growth, this
causes dislocation.
[0004] In order to solve such problems, a method of increasing the
strength of a crucible by positively crystallizing the wall surface
of the crucible is proposed. For example, Patent Document 1
describes a quartz glass crucible in which a coating film of a
crystallization accelerator of elements in group 2a is present in
the inner surface of the quartz glass crucible within a depth of 1
mm. When a silicon single crystal is pulled up by using the quartz
glass crucible, a crystal layer is formed on the inner surface of
the crucible, so that heat resistance property is improved.
Therefore, for example, even when a silicon single crystal is
pulled up at a reduced pressure, the inner surface does not become
rough and is maintained smooth, with the result that pulling up is
possible for a long period of time with good crystallization
ratio.
[0005] In addition, Patent Document 2 describes that a
devitrification accelerator such as a barium hydroxide aqueous
solution is applied to the inner surface of a crucible, and the
crystallization rate is adjusted by changing the concentration of
the devitrification accelerator depending on the portion of the
crucible, thereby preventing delamination of crystals. The
crystallization rates of a corner portion, a wall portion, and a
bottom portion are set in descending order, and the devitrification
growth rate is set to be in a range of 0.1 to 0.6 .mu.m/h for
uniform devitrification.
[0006] Patent Document 3 describes a surface treatment method of a
quartz glass product such as a quartz glass crucible, in which the
inner surface of a crucible is coated with a reducing coating agent
(amines, organosilane halogens, or the like) containing a methyl
group to accelerate cristobalite formation during pulling, thereby
preventing delamination of a devitrification point.
[0007] Patent Document 4 describes a quartz glass crucible in which
the strength is increased by semi-crystallizing the inner surface.
The quartz glass crucible contains a crystallization accelerator in
the inner surface of the crucible having a thickness of 1 to 10
.mu.m and a semi-crystal layer having a crystallinity of 80% to
95%. The semi-crystal layer is formed by applying a voltage to a
mold during arc melting to move the crystallization accelerator to
the inner surface of the quartz glass crucible in a rotating mold
method.
[0008] Patent Document 5 describes that the outer layer of a side
wall of a crucible is formed as a doped region which contains a
first components such as Ti acting as a reticulating agent in
quartz glass and a second component such as Ba acting as a
separation point forming agent in the quartz glass and has a
thickness of 0.2 mm or more, and when a quartz glass crucible is
heated in a specific usage method for crystal pulling, cristobalite
is formed in the doped region to accelerate the crystallization of
the quartz glass, thereby increasing the strength of the
crucible.
BACKGROUND ART LITERATURE
Patent Document
[0009] Patent Document 1 Japanese Patent Application Laid-Open No.
H8-2932
[0010] Patent Document 2 Japanese Patent Application Laid-Open No.
2003-160393
[0011] Patent Document 3 Japanese Patent Application Laid-Open No.
2010-537945
[0012] Patent Document 4 Japanese Patent Application Laid-Open No.
2006-206342
[0013] Patent Document 5 Japanese Patent Application Laid-Open No.
2005-523229
SUMMARY OF THE INVENTION
Problems to be Solved by the Invention
[0014] However, in the method of strengthening a crucible in the
related art described in Patent Documents 1 and 2, there may be
cases where the thickness of the crystal layer is insufficient, and
delamination of crystal grains occur depending on the
crystallization state. That is, when crystals grow in all
directions (hereinafter, "random growth") with no regularity in the
crystal growth direction in the crystal layer, the crystallization
accelerator is trapped in the crystal grain boundary, so that the
crystallization rate decreases with time, with the result that the
crystal growth in the thickness direction of the crucible is
stopped in a relatively early stage in a pull-up step. Therefore,
in the pull-up step taken for a very long period of time under
high-temperature heat load, such as multi-pulling, there is a
problem that a thin crystal layer in the inner surface of the
crucible is eroded in the silicon melt and disappears
completely.
[0015] The method of strengthening a crucible in the related art
described in Patent Document 3 focuses only on the density of the
brown ring on the surface and does not consider the crystal growth
in the thickness direction of the crucible. When the thickness of
the crystal layer is not sufficiently secured, there is a problem
that the strength of the crucible cannot be maintained and
deformation occurs, or delamination of the brown ring generated on
the surface of the quartz glass occurs. Furthermore, since the
brown ring does not cover the entire inner surface of the crucible,
the brown ring does not contribute to an increase in the strength
of the crucible.
[0016] In the method of strengthening a crucible in the related art
described in Patent Documents 4 and 5, since the crystallization
accelerator is present in a glass matrix, the crystallization
accelerator simultaneously generates crystal nuclei, so that the
crystal layer grows randomly. Therefore, there is a problem that
the thickness of the crystal layer is insufficient due to a
decrease in the crystallization rate. Since there is a possibility
that the inner surface of the crucible may be eroded by 1 mm or
more during pull up a single crystal, in a case where the crystal
layer is thin, there is concern that the crystal layer may
disappear in the latter half of the single crystal pull-up
step.
[0017] Accordingly, an object of the present invention is to
provide a quartz glass crucible capable of withstanding a single
crystal pull-up step taken for a very long period of time, such as
multi-pulling, and a manufacturing method thereof. In addition, the
present invention provides a manufacturing method of a silicon
single crystal using a quartz glass crucible.
Means for Solving the Problems
[0018] The inventors had conducted intensive studies on the
mechanism of crystallization of the surface of a crucible at a high
temperature in a crystal pull-up step and as a result, found the
structure of a crystal layer and particularly the orientation state
of crystal grains in the thickness direction of a crucible wall,
which enable continuous crystal growth and can prevent
disappearance of the crystal layer due to delamination of the
crystal layer and erosion into a silicon melt.
[0019] The present invention is based on such technical knowledge,
and a quartz glass crucible according to a first aspect of the
present invention is used for pulling up a silicon single crystal
by a Czochralski method, and includes: a cylindrical crucible body
which has a bottom and is made of quartz glass; and a first
crystallization-accelerator-containing coating film which is formed
on an inner surface of the crucible body so as to cause an inner
crystal layer composed of an aggregate of dome-shaped or columnar
crystal grains to be formed on a surface-layer portion of the inner
surface of the crucible body by heating during a step of pulling up
the silicon single crystal.
[0020] According to the present invention, by causing the crystal
structure of the inner crystal layer to have orientation,
crystallization is accelerated, so that the crystal layer having a
thickness that does not cause deformation in the crucible wall can
be formed. Therefore, it is possible to prevent deformation of the
crucible caused during the pull-up step taken for a very long
period of time, such as multi-pulling. In addition, it is possible
to prevent dislocation of the silicon single crystal caused by
delamination of crystal grains (cristobalite) from the inner wall
surface of the crucible.
[0021] In the present invention, it is preferable that a ratio A/B
between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the inner surface of the crucible
body, on which the inner crystal layer is formed, by an X-ray
diffraction method is 7 or less. In a case where the analysis
result of the X-ray diffraction method satisfies the above
conditions, it can be determined that the inner crystal layer has
the crystal structure in a dome-like orientation or columnar
orientation. It should be noted that "orientation" refers to an
aggregate of crystal grains grown with crystal axes aligned with a
certain direction, and "dome-like orientation" refers to a crystal
structure in which, when an aggregate of dome-shaped crystal grains
is evaluated by XRD (X-ray diffraction), crystal grains with random
crystal axis directions and crystal grains grown in an orientation
coexist with each other, and orientation is confirmed in a portion
of the aggregate of crystal grains.
[0022] In the present invention, it is preferable that the inner
crystal layer has a dome-shaped crystal layer composed of the
aggregate of dome-shaped crystal grains formed on the surface-layer
portion of the inner surface of the crucible body, and a columnar
crystal layer composed of the aggregate of columnar crystal grains
immediately under the dome-shaped crystal layer. When the inner
surface of the crucible undergoes crystal growth in a plane, there
is concern that crystal grains which have grown largely may be
delaminated, which may cause dislocation of the silicon single
crystal. However, since the crystal growth of the inner crystal
layer is changed from the dome-like orientation to the columnar
orientation and the columnar crystal grains grow in the thickness
direction, a structure in which the crystal grains are less likely
to be delaminated even when the crystal grains grow largely can be
achieved, thereby preventing dislocation of the silicon single
crystal. In addition, the strength of the crucible can be always
increased by allowing crystal growth to continue.
[0023] In the present invention, it is preferable that a ratio A/B
between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the inner surface of the crucible
body, on which the inner crystal layer is formed, by an X-ray
diffraction method is less than 0.4. In a case where the analysis
result of the X-ray diffraction method satisfies the above
conditions, it can be determined that the inner crystal layer
primarily has the crystal structure in a columnar orientation.
[0024] In the present invention, it is preferable that a
crystallization accelerator contained in the first
crystallization-accelerator-containing coating film is an element
that can become divalent cations to form glass with quartz glass,
and is particularly preferably barium which growth in an
orientation most strongly compared to other elements. In a case
where the crystallization accelerator is barium, and a
concentration of the barium in the inner surface of the crucible
body is preferably 3.9.times.10.sup.16 atoms/cm.sup.2 or more.
Accordingly, a countless number of crystal nuclei are generated on
the surface of the crucible within a short period of time, so that
crystal growth in a columnar orientation can be accelerated from
the earliest possible stage.
[0025] It is preferable that the quartz glass crucible according to
the present invention further includes: a second
crystallization-accelerator-containing coating film which is formed
on an outer surface of the crucible body so as to cause an outer
crystal layer composed of an aggregate of dome-shaped or columnar
crystal grains to be formed on a surface-layer portion of the outer
surface of the crucible body by heating during the step of pulling
up. With this configuration, by causing the crystal structure of
the outer crystal layer to have orientation, crystallization is
accelerated, so that the crystal layer having a thickness that does
not cause deformation in the crucible wall can be formed.
Therefore, it is possible to prevent deformation of the crucible
caused during the pull-up step taken for a very long period of
time, such as multi-pulling. In addition, since the outer crystal
layer can have an appropriate thickness according to the pull-up
time, it is possible to prevent foaming and delamination from the
quartz glass interface of the outer crystal layer.
[0026] In the present invention, it is preferable that a region
having a predetermined width extending downward from a rim upper
end of the inner surface of the crucible body is a crystallization
accelerator uncoated region in which the first
crystallization-accelerator-containing coating film is not formed.
Accordingly, the generation of particles of small crystal pieces at
the rim upper end can be suppressed, and a reduction in the yield
of the silicon single crystal can be prevented.
[0027] In the present invention, it is preferable that a ratio A/B
between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the outer surface of the crucible
body, on which the outer crystal layer is formed, by an X-ray
diffraction method is 0.4 or more and 7 or less. In a case where
the analysis result of the X-ray diffraction method satisfies the
above conditions, it can be determined that the outer crystal layer
has the crystal structure in a dome-like orientation.
[0028] In the present invention, it is preferable that a
crystallization accelerator contained in the second
crystallization-accelerator-containing coating film is barium, and
a concentration of the barium in the outer surface of the crucible
body is equal to or more than 4.9.times.10.sup.15 atoms/cm.sup.2
and less than 3.9.times.10.sup.16 atoms/cm.sup.2. Accordingly,
crystal growth in a dome-like orientation can be accelerated.
[0029] In the present invention, it is preferable that a region
having a predetermined width extending downward from a rim upper
end of the outer surface of the crucible body is a crystallization
accelerator uncoated region in which the second
crystallization-accelerator-containing coating film is not formed.
Accordingly, the generation of particles of small crystal pieces at
the rim upper end can be suppressed, and a reduction in the yield
of the silicon single crystal can be prevented.
[0030] A quartz glass crucible according to a second aspect of the
present invention is used for pulling up a silicon single crystal
by a Czochralski method, and includes: a cylindrical crucible body
which has a bottom and is made of quartz glass; and a second
crystallization-accelerator-containing coating film which is formed
on an outer surface of the crucible body so as to cause an outer
crystal layer composed of an aggregate of dome-shaped or columnar
crystal grains to be formed on a surface-layer portion of the outer
surface of the crucible body by heating during a step of pulling up
the silicon single crystal.
[0031] According to the present invention, by causing the crystal
structure of the outer crystal layer to have orientation,
crystallization is accelerated, so that the crystal layer having a
thickness that does not cause deformation in the crucible wall can
be formed. Therefore, it is possible to prevent deformation of the
crucible caused during the pull-up step taken for a very long
period of time, such as multi-pulling. In addition, since the outer
crystal layer can have an appropriate thickness according to the
pull-up time, it is possible to prevent foaming and delamination
from the quartz glass interface of the outer crystal layer.
[0032] A ratio A/B between a maximum value A of a peak intensity at
a diffraction angle 2.theta. of 20.degree. to 25.degree. and a
maximum value B of a peak intensity at a diffraction angle 2.theta.
of 33.degree. to 40.degree. obtained by analyzing the outer surface
of the crucible body, on which the outer crystal layer is formed,
by an X-ray diffraction method is preferably 7 or less, and
particularly preferably 0.4 or more and 7 or less. In a case where
A/B from the analysis result of the X-ray diffraction method is 7
or less, the outer crystal layer can be determined to have the
crystal structure in a dome-like orientation or columnar
orientation, and can be determined to have a dome-like orientation
in a case where A/B is 0.4 or more and 7 or less.
[0033] In the present invention, it is preferable that a region
having a predetermined width extending downward from a rim upper
end of the outer surface of the crucible body is a crystallization
accelerator uncoated region in which the second
crystallization-accelerator-containing coating film is not formed.
Accordingly, the generation of particles of small crystal pieces at
the rim upper end can be suppressed, and a reduction in the yield
of the silicon single crystal can be prevented.
[0034] A manufacturing method of a quartz glass crucible according
to a third aspect of the present invention includes: applying a
first crystallization accelerator coating solution containing a
thickener to an inner surface of the quartz glass crucible so as to
cause a concentration of a crystallization accelerator in the inner
surface to be 3.9.times.10.sup.16 atoms/cm.sup.2 or more. In this
case, it is preferable that the first crystallization accelerator
coating solution is applied by a spraying method in a state in
which a region having a predetermined width extending downward from
a rim upper end in the inner surface of the quartz glass crucible
is masked. Furthermore, it is preferable that the manufacturing
method of a quartz glass crucible according to the present
invention further includes: applying a second crystallization
accelerator coating solution containing the thickener to an outer
surface of the quartz glass crucible so as to cause the
concentration of the crystallization accelerator in the outer
surface to be equal to or more than 4.9.times.10.sup.15
atoms/cm.sup.2 and less than 3.9.times.10.sup.16 atoms/cm.sup.2. In
this case, it is preferable that the second crystallization
accelerator coating solution is applied by the spraying method in a
state in which an opening of the quartz glass crucible is sealed
and a region having a predetermined width extending downward from
the rim upper end in the outer surface of the quartz glass crucible
is masked. As described above, the inner crystal layer in the
columnar orientation can be formed on the inner surface of the
crucible, and the outer crystal layer in the dome-like orientation
can be formed on the outer surface of the crucible.
[0035] A manufacturing method of a quartz glass crucible according
to a fourth aspect of the present invention includes: applying a
crystallization accelerator coating solution to a surface of a
quartz glass base material; forming a crystal layer on a
surface-layer portion of the surface of the quartz glass base
material by an evaluation heat treatment at 1400.degree. C. or
higher; analyzing a crystallized state of the surface of the quartz
glass base material by an X-ray diffraction method, and adjusting a
concentration of a crystallization accelerator in the
crystallization accelerator coating solution based on an analysis
result; and applying the adjusted crystallization accelerator
coating solution to a surface of the quartz glass crucible.
[0036] Crystal grains in a dome-like orientation or a columnar
orientation can be grown by causing the crystallization accelerator
to be present at a high density at the interface between quartz
glass and the crystal grains. However, the degree of density at
which the crystallization accelerator is present by applying the
crystallization accelerator coating solution to the surface of the
quartz glass crucible is unclear. However, by checking in advance
the action of the crystallization accelerator coating solution
using the quartz glass base material, problems such as deformation
of the quartz glass crucible in an actual pull-up step can be
prevented in advance.
[0037] According to a fifth aspect of the present invention, a
manufacturing method of a silicon single crystal by a Czochralski
method in which a silicon single crystal is pulled up from a
silicon melt in a quartz glass crucible, includes: applying a first
crystallization accelerator coating solution to an inner surface of
the quartz glass crucible; forming, on a surface-layer portion of
the inner surface of the quartz glass crucible, an inner crystal
layer having a laminated structure of a dome-shaped crystal layer
composed of an aggregate of dome-shaped crystal grains and a
columnar crystal layer composed of an aggregate of columnar crystal
grains immediately under the dome-shaped crystal layer, by heating
in a step of pulling up the silicon single crystal; and pulling up
the silicon single crystal while allowing growth of the inner
crystal layer to continue.
[0038] According to the present invention, by causing the crystal
structure of the inner crystal layer to have orientation,
crystallization is accelerated, so that the crystal layer having a
thickness that does not cause deformation in the crucible wall can
be formed. Therefore, it is possible to prevent deformation of the
crucible caused during the pull-up step taken for a very long
period of time, such as multi-pulling. In addition, it is possible
to prevent dislocation of the silicon single crystal caused by
delamination of crystal grains (cristobalite) from the inner wall
surface of the crucible.
[0039] In the present invention, it is preferable that a ratio A/B
between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the inner surface of the quartz
glass crucible, on which the inner crystal layer is formed, by an
X-ray diffraction method is less than 0.4. In a case where the
analysis result of the X-ray diffraction method satisfies the above
conditions, it can be determined that the inner crystal layer
primarily has the crystal structure in a columnar orientation.
[0040] In the present invention, it is preferable that a
crystallization accelerator contained in the first crystallization
accelerator coating solution is barium, and a concentration of the
barium applied to the inner surface is 3.9.times.10.sup.16
atoms/cm.sup.2 or more. Accordingly, a countless number of crystal
nuclei are generated on the surface of the crucible within a short
period of time, so that crystal growth in a columnar orientation
can be accelerated from the earliest possible stage.
[0041] In the present invention, it is preferable that the first
crystallization accelerator coating solution is applied to a region
excluding a region having a predetermined width extending downward
from a rim upper end in the inner surface of the quartz glass
crucible. Accordingly, the generation of particles of small crystal
pieces at the rim upper end can be suppressed, and a reduction in
the yield of the silicon single crystal can be prevented.
[0042] It is preferable that the manufacturing method of a silicon
single crystal according to the present invention further includes:
applying a second crystallization accelerator coating solution is
applied to an outer surface of the quartz glass crucible; forming
an outer crystal layer composed of an aggregate of dome-shaped
crystal grains on a surface-layer portion of the outer surface of
the quartz glass crucible by heating in the step of pulling up the
silicon single crystal; and pulling up the silicon single crystal
without allowing growth of the outer crystal layer to continue.
[0043] Accordingly, by causing the crystal structure of the outer
crystal layer to have orientation, crystallization is accelerated,
so that the crystal layer having a thickness that does not cause
deformation in the crucible wall can be formed. Therefore, it is
possible to prevent deformation of the crucible caused during the
pull-up step taken for a very long period of time, such as
multi-pulling. In addition, since the outer crystal layer can have
an appropriate thickness according to the pull-up time, it is
possible to prevent foaming and delamination from the quartz glass
interface of the outer crystal layer.
[0044] In the present invention, it is preferable that a ratio A/B
between a maximum value A of a peak intensity at a diffraction
angle 2.theta. of 20.degree. to 25.degree. and a maximum value B of
a peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. obtained by analyzing the outer surface of the quartz
glass crucible, on which the outer crystal layer is formed, by an
X-ray diffraction method is 0.4 or more and 7 or less. In a case
where the analysis result of the X-ray diffraction method satisfies
the above conditions, it can be determined that the outer crystal
layer has the crystal structure in a dome-like orientation.
[0045] In the present invention, it is preferable that a
crystallization accelerator contained in the second
crystallization-accelerator-containing coating solution is barium,
and a concentration of the barium applied to the outer surface is
equal to or more than 4.9.times.10.sup.15 atoms/cm.sup.2 and less
than 3.9.times.10.sup.16 atoms/cm.sup.2. Accordingly, crystal
growth in a dome-like orientation can be accelerated.
[0046] In the present invention, it is preferable that the second
crystallization accelerator coating solution is applied to a region
excluding a region having a predetermined width extending downward
from the rim upper end in the outer surface of the quartz glass
crucible. Accordingly, the generation of particles of small crystal
pieces at the rim upper end can be suppressed, and a reduction in
the yield of the silicon single crystal can be prevented.
[0047] In the present invention, it is preferable that the first
and second crystallization accelerator coating solutions further
contain a thickener. Accordingly, the viscosity of the coating
solution can be increased, so that it is possible to prevent the
coating solution from flowing with gravity, and the like when
applied to the crucible and becoming uneven. In addition, since the
crystallization accelerator does not cohere in the coating solution
but diffuses, so that it is possible to uniformly apply the
crystallization accelerator to the surface of the crucible.
Therefore, the crystallization accelerator at a high concentration
can be uniformly and densely fixed to the wall surface of the
crucible, thereby accelerating the growth of crystal grains in a
columnar orientation or a dome-like orientation.
[0048] In the manufacturing method of a silicon single crystal
according to the present invention, it is preferable that a
crystallized state of the inner crystal layer formed by heating in
the step of pulling up is analyzed, and based on an analysis
result, a concentration of the crystallization accelerator in the
first crystallization accelerator coating solution applied to an
inner surface of a new quartz glass crucible used in a subsequent
step of pulling up a silicon single crystal is adjusted.
Accordingly, the crystallized state of the inner surface of the
crucible used can be evaluated and fed back to the quality of a
subsequent quartz glass crucible, thereby improving the durability
and reliability of the crucible.
[0049] In the manufacturing method of a silicon single crystal
according to the present invention, it is preferable that a
crystallized state of the outer crystal layer formed by heating in
the step of pulling up is analyzed, and based on an analysis
result, a concentration of the crystallization accelerator in the
second crystallization accelerator coating solution applied to an
outer surface of a new quartz glass crucible used in a subsequent
step of pulling up a silicon single crystal is adjusted.
Accordingly, the crystallized state of the inner surface of the
crucible used can be evaluated and fed back to the quality of a
subsequent quartz glass crucible, thereby improving the durability
and reliability of the crucible.
Effects of the Invention
[0050] According to the present invention, it is possible to
provide a quartz glass crucible capable of withstanding a single
crystal pull-up step taken for a very long period of time, such as
multi-pulling, and a manufacturing method thereof. According to the
present invention, it is possible to provide a manufacturing method
of a silicon single crystal using the quartz glass crucible.
BRIEF DESCRIPTION OF DRAWINGS
[0051] FIG. 1 is a schematic cross-sectional view illustrating the
structure of a quartz glass crucible according to a first
embodiment of the present invention.
[0052] FIG. 2 is a schematic cross-sectional view illustrating the
structure of the quartz glass crucible in a state in which the
surface is crystallized by heating.
[0053] FIGS. 3A to 3C are schematic views for explaining a
mechanism of crystallization of the surface-layer portion of the
crucible by a crystallization accelerator.
[0054] FIG. 4 shows graphs showing measurement results of the
surface-layer portion of the crucible by a surface X-ray
diffraction method, in which FIGS. 4(a), 4(b), and 4(c) show
crystal layers in a random orientation, in a dome-like orientation,
and in a columnar orientation, respectively.
[0055] FIG. 5 is a table showing suitable crystal structures of an
inner crystal layer 14A and an outer crystal layer 14B for each
part.
[0056] FIG. 6 is a flowchart for explaining a manufacturing method
of a silicon single crystal using the quartz glass crucible 1
according to the embodiment.
[0057] FIG. 7A is an image showing SEM observation results, and
FIG. 7B is a graph showing the relationship between the heating
time of a quartz glass plate and the thickness of a crystal layer
formed on the surface-layer portion of the quartz glass plate.
[0058] FIG. 8 shows evaluation results of crystallized states and
deformation when a quartz glass crucible to which a coating
solution containing barium is applied is used in an actual crystal
pull-up step, and shows an SEM images and an X-ray diffraction
spectrum graph of the crystal layer of each of crucible samples #1
to #3.
[0059] FIG. 9 is a schematic view for explaining a step of pulling
up a silicon single crystal by the CZ method.
[0060] FIG. 10 is a schematic cross-sectional view illustrating the
structure of a quartz glass crucible according to a second
embodiment of the present invention.
[0061] FIG. 11 is a schematic view for explaining a method of
forming a crystallization-accelerator-containing coating film 13B
on the outer surface of the quartz glass crucible 2 illustrated in
FIG. 10.
DETAILED DESCRIPTION OF THE EMBODIMENTS
[0062] Preferred embodiments of the present invention will be
described in detail below with reference to the accompanying
drawings.
[0063] FIG. 1 is a schematic cross-sectional view illustrating the
structure of a quartz glass crucible 1 according to a first
embodiment of the present invention.
[0064] As illustrated in FIG. 1, a quartz glass crucible 1 is a
cylindrical container having a bottom for supporting a silicon
melt, and includes a straight body portion 1a having a cylindrical
shape, a bottom portion 1b which is gently curved, and a corner
portion 1c which has a larger curvature than the bottom portion 1b
and connects the straight body portion 1a to the bottom portion
1b.
[0065] The diameter D (aperture) of the quartz glass crucible 1 is
24 inches (about 600 mm) or more and is preferably 32 inches (about
800 mm) or more. This is because such a crucible having a large
aperture is used for pulling up a large-size silicon single crystal
ingot having a diameter of 300 mm or more and is required to be
less likely to be deformed even when used for a long period of
time. In recent years, with an increase in the size of a crucible
due to an increase in the size of a silicon single crystal and an
increase in the time for a pull-up step, the thermal environment of
the crucible has become more severe, and the improvement in the
durability of a large crucible is an extremely important issue.
Although the thickness of the crucible slightly varies depending on
its part, the thickness of the straight body portion 1a of a
crucible of 24 inches or more is preferably 8 mm or more, the
thickness of the straight body portion 1a of a large crucible of 32
inches or more is preferably 10 mm or more, and the thickness of
the straight body portion 1a of a large crucible of 40 inches
(about 1000 mm) or more is more preferably 13 mm or more.
[0066] The quartz glass crucible 1 has a two-layer structure, and
includes an opaque layer 11 (bubble layer) made of quartz glass
containing a large number of minute bubbles, and a transparent
layer 12 (bubble-free layer) made of quartz glass with
substantially no bubbles contained therein.
[0067] The opaque layer 11 is provided in order to heat the silicon
melt in the crucible as uniformly as possible without radiant heat
from a heater of a single crystal pull-up apparatus being
transmitted through the crucible wall. Therefore, the opaque layer
11 is provided in the entire crucible ranging from the straight
body portion 1a to the bottom portion 1b of the crucible. The
thickness of the opaque layer 11 is a value obtained by subtracting
the thickness of the transparent layer 12 from the thickness of the
crucible wall, and varies depending on the part of the
crucible.
[0068] The bubble content rate in the quartz glass forming the
opaque layer 11 is 0.8% or more, and preferably 1% to 5%. The
bubble content rate of the opaque layer 11 can be obtained by
specific gravity measurement (Archimedes' method). When an opaque
quartz glass piece of unit volume (1 cm.sup.3) is cut out from a
crucible and the mass thereof is referred to as A, and the specific
gravity of the quartz glass with no bubbles contained therein (true
density of quartz glass) is referred to as B=2.2 g/cm.sup.3, the
bubble content rate P (%) is P=(B-A)/B.times.100.
[0069] The transparent layer 12 is a layer forming the inner
surface of the crucible wall which is in contact with the silicon
melt, is required to be highly pure in order to prevent
contamination of the silicon melt, and is provided in order to, if
bubbles are contained, prevent dislocation of a single crystal due
to crucible fragments and the like when the bubbles burst. The
thickness of the transparent layer 12 is preferably 0.5 to 10 mm,
and is set to an appropriately thickness for each part of the
crucible so as not to cause the opaque layer 11 to be exposed due
to the transparent layer 12 being completely removed by erosion
during a single crystal pull-up step. Similar to the opaque layer
11, it is preferable that the transparent layer 12 is provided over
the entire crucible from the straight body portion 1a to the bottom
portion 1b of the crucible. However, in the upper end portion (rim
portion) of the crucible which is not in contact with the silicon
melt, it is also possible to omit formation of the transparent
layer 12.
[0070] "With substantially no bubbles contained" in the transparent
layer 12 means a bubble content rate at which the single
crystallinity is not decreased by crucible fragments when bubbles
burst, and means that the bubble content rate is 0.8% or less and
the average diameter of the bubbles is 100 .mu.m or less. A change
in the bubble content rate at the boundary between the opaque layer
11 and the transparent layer 12 is steep, and the boundary between
the two is apparent with the naked eye.
[0071] The bubble content rate of the transparent layer 12 can be
measured nondestructively using optical detecting means. The
optical detecting means includes a light receiving device which
receives the reflected light of the light irradiating the inner
surface of a crucible to be inspected. Irradiation light emitting
means may be built in or external light emitting means may also be
used. In addition, as the optical detecting means, one that can be
turned along the inner surface of the quartz glass crucible is
preferably used. As the irradiation light, X-rays, laser light, and
the like as well as visible light, ultraviolet light, and infrared
light can be used, and any light can be applied as long as the
light can be reflected for bubble detection. The light receiving
device is selected according to the type of the irradiation light,
and for example, an optical camera including a light receiving lens
and an imaging unit can be used.
[0072] Measurement results by the optical detecting means are
received by an image processing device to calculate the bubble
content rate. Specifically, an image of the inner surface of the
crucible is taken using the optical camera, the inner surface of
the crucible is divided into predetermined areas as reference areas
S1, an area S2 occupied by bubbles is obtained for each reference
area S1, and the bubble content rate P (%) is calculated by
P=(S2/S1).times.100. In order to detect bubbles present at a
constant depth from the surface of quartz glass, the focal point of
a light receiving lens may be scanned in a depth direction from the
surface. A plurality of images is taken in this manner, and the
bubble content rate in a space may be obtained on the basis of the
bubble content rate of each of the images.
[0073] The quartz glass crucible 1 according to the embodiment
includes a crucible body 10 made of quartz glass, and first and
second crystallization-accelerator-containing coating films 13A and
13B respectively formed on an inner surface 10a and an outer
surface 10b of the crucible body 10. Such coating films play a role
in accelerating crystallization of the surface-layer portion of the
crucible body 10 by heating in a step of pulling up a silicon
single crystal. Typically, the inner surface 10a of the crucible
body 10 serves as the surface of the transparent layer 12, the
outer surface 10b serves as the surface of the opaque layer 11, and
the first crystallization-accelerator-containing coating film 13A
and the second crystallization-accelerator-containing coating film
13B are respectively formed on the transparent layer 12 and the
opaque layer 11. The crystallization-accelerator-containing coating
films 13A and 13B contain a water-soluble polymer acting as a
thickener, whereby a hard film is formed on the surface of the
crucible body 10.
[0074] The thickness of the crystallization-accelerator-containing
coating films 13A and 13B is preferably 0.3 to 100 .mu.m.
Accordingly, the concentration of barium applied thereto is
controlled by changing the thickness of the
crystallization-accelerator-containing coating films 13A and 13B.
It should be noted that elements that can act as a crystallization
accelerator are not intentionally added to the crucible body 10
made of quartz glass, and for example, in a case where the crucible
body 10 is formed of natural quartz powder, it is preferable that
the concentration of barium is less than 0.10 ppm, the
concentration of magnesium is less than 0.10 ppm, and the
concentration of calcium is less than 2.0 ppm. In a case of using
synthetic quartz powder as the constituent raw material of the
inner surface the crucible body 10, it is preferable that the
concentrations of both magnesium and calcium contained in the
crucible body 10 are less than 0.02 ppm.
[0075] The crystallization accelerator contained in the
crystallization-accelerator-containing coating films 13A and 13B is
an element in group 2a, and examples thereof include magnesium,
calcium, strontium, and barium. However, barium is particularly
preferable because it has a small segregation coefficient on
silicon, does not attenuate in crystallization rate with
crystallization, and causes orientation growth most strongly
compared with other elements. The
crystallization-accelerator-containing coating films 13A and 13B
can be formed by applying a coating solution containing barium to
the wall surface of the crucible.
[0076] The coating solution containing barium may be a coating
solution containing a barium compound and water, or may be a
coating solution which does not contain water but contains
anhydrous ethanol and a barium compound.
[0077] Examples of the barium compound include barium carbonate,
barium chloride, barium acetate, barium nitrate, barium hydroxide,
barium oxalate, and barium sulfate. It should be noted that if the
surface concentration (atoms/cm.sup.2) of the barium element is the
same, the crystallization acceleration effect is also the same
regardless of being insoluble or being water-soluble. However,
since barium which is insoluble in water is less likely to be taken
into the human body, it is highly safe and is advantageous in terms
of handling.
[0078] It is preferable that the coating solution containing barium
further contains a highly viscous water-soluble polymer (thickener)
such as carboxyvinyl polymer. In a case of using a coating solution
without a thickener contained therein, fixing of barium to the wall
surface of the crucible is instable, so that a heat treatment for
fixing barium is necessary. When such a heat treatment is
performed, barium diffuses and penetrates into the quartz glass,
and becomes the cause of acceleration of random growth of crystal,
which will be described later. However, in a case of using a
coating solution containing a thickener together with barium, the
viscosity of the coating solution increases, so that it is possible
to prevent the coating solution from flowing with gravity when
applied to the crucible and thus becoming uneven. Furthermore,
regarding the barium compound such as barium carbonate, in a case
where the coating solution contains the water-soluble polymer, the
barium compound does not cohere in the coating solution but
diffuses, so that it is possible to uniformly apply the barium
compound to the surface of the crucible. Therefore, barium at a
high concentration can be uniformly and densely fixed to the wall
surface of the crucible, thereby accelerating the growth of crystal
grains in a columnar orientation or a dome-like orientation.
[0079] Examples of the thickener include water-soluble polymers
containing a small amount of metallic impurities such as polyvinyl
alcohol, a cellulosic thickener, high purity glucomannan, an
acrylic polymer, a carboxyvinyl polymer, and a polyethylene glycol
fatty acid ester. In addition, an acrylic acid-alkyl methacrylate
copolymer, polyacrylate, polyvinyl carboxylic acid amide,
vinylcarboxylic acid amide, or the like may also be used as the
thickener. The viscosity of the coating solution containing barium
is preferably in a range of 100 to 10000 mPas, and the boiling
point of the solvent is preferably 50 to 100.degree. C.
[0080] For example, a crystallization accelerator coating solution
for coating the outer surface of a 32-inch crucible contains 0.0012
g/mL of barium carbonate and 0.0008 g/mL of a carboxyvinyl polymer,
and can be produced by adjusting the ratio between ethanol and pure
water and mixing and stirring the mixture therein.
[0081] Application of the crystallization accelerator coating
solution to the surface of the crucible can be performed by a brush
or a spray. After the application, water and the like evaporate
such that a hard film is formed by the thickener. It should be
noted that in a method of the related art, after applying water or
alcohols containing barium carbonate, the crucible is heated to 200
to 300.degree. C. for the purpose of suppressing delamination. Due
to the heating, barium on the surface diffuses to the inside,
crystal nuclei are simultaneously generated, so that random growth
is necessarily incurred. Therefore, the coating film should not be
heated before pulling after the application.
[0082] FIG. 2 is a schematic cross-sectional view illustrating the
structure of the quartz glass crucible 1 in a state in which the
surface is crystallized by heating.
[0083] As illustrated in FIG. 2, the surface of the quartz glass
crucible to which the crystallization accelerator is applied is
heated during the step of pulling up a silicon single crystal such
that the crystallization of the quartz glass is accelerated, with
the result that an inner crystal layer 14A and an outer crystal
layer 14B are respectively formed on the inner surface 10a and an
outer surface 10b of the crucible body 10. Heating during the step
of pulling up a silicon single crystal is performed even for
several tens of hours or longer at a temperature of the melting
point of silicon (about 1400.degree. C.) or higher. However, how
the crystal layer is formed on the surface-layer portion of the
crucible body 10 can be evaluated, as well as by actually
performing the step of pulling up a silicon single crystal, by
performing a heat treatment at a temperature equal to or higher
than 1400.degree. C. and equal to or lower than the softening point
of silica glass for 1.5 hours or longer.
[0084] It is preferable that the crystallized state of the inner
crystal layer 14A has a single layer of a dome-shaped crystal layer
or a two-layer structure of a dome-shaped crystal layer and a
columnar crystal layer (hereinafter, referred to as
dome-shaped/columnar crystal layer). In particular, in a case where
the use time of the crucible is very long, the inner crystal layer
14A is preferably a dome-shaped/columnar crystal layer, and in a
case where the use time of the crucible is relatively short, the
inner crystal layer 14A may have a single-layer structure
consisting solely of a dome-shaped crystal layer. Here, the
dome-shaped crystal layer refers to a crystal layer composed of an
aggregate of dome-shaped crystal grains, and the columnar crystal
layer refers to a crystal layer composed of an aggregate of
columnar crystal grains.
[0085] The thickness of the inner crystal layer 14A capable of
suppressing the deformation of the crucible is 200 .mu.m or more,
and particularly 400 .mu.m or more. The inner crystal layer 14A
which is in contact with the silicon melt during pulling up a
single crystal is gradually eroded. However, since the columnar
crystal layer gradually grows, it is also possible to maintain the
thickness of the inner crystal layer 14A at 400 .mu.m or more. In
addition, the degree of the thickness of the inner crystal layer
14A at which the deformation of the crucible can be suppressed can
be easily evaluated by a so-called beam bending method using a
quartz glass crucible piece having a crystal layer formed
therein.
[0086] The crystallized state of the outer crystal layer 14B is
preferably has a single-layer structure of the dome-shaped crystal
layer. Although described later in detail, this is because crystal
growth continues in the dome-shaped/columnar crystal layer such
that the thickness the outer crystal layer 14B increases and
forming and delamination is likely to occur at the interface
between the crystal layer and the quartz glass layer. However, in a
case where the use time of the crucible is relatively short and the
outer crystal layer does not become excessively thick, the outer
crystal layer 14B may have a structure consisting of the
dome-shaped/columnar crystal layer.
[0087] As described above, since the inner surface of the crucible
is covered with the crystal layer, erosion of the crucible can be
suppressed, and dislocation of the silicon single crystal due to
delamination of crystal grains can be prevented. Furthermore, since
the outer surface of the crucible is crystallized, the strength of
the crucible can be increased, and deformation of the crucible such
as buckling or collapse to the inside can be suppressed.
[0088] FIGS. 3A to 3C are schematic views for explaining a
mechanism of crystallization of the surface-layer portion of the
crucible by the crystallization accelerator.
[0089] As illustrated in FIG. 3A, in a case where barium (Ba) as
the crystallization accelerator is present on the surface of the
crucible (quartz glass interface) and the concentration of Ba ions
(Ba.sup.2+) from ionized barium is lower than the concentration of
Si ions (Si.sup.4+), the amount of crystal nuclei initially
generated on the surface of the crucible is small, so that random
crystal growth on the crystal nuclei occurs. Here, the Ba ions are
trapped in the crystal grain boundaries, so that the amount of Ba
ions which are present at the interface between the quartz glass
and the crystal grains and thus contribute to the crystal growth in
the thickness direction of the crucible decreases. Accordingly, the
crystal growth gradually weakens and stops soon.
[0090] However, as illustrated in FIG. 3B, in a case where the
concentration of the Ba ions is higher than the concentration of
the Si ions, a large amount of crystal nuclei are generated on the
surface of the crucible, and crystals competitively grow on the
crystal nuclei as the origins, so that crystal grains in a
dome-like orientation are formed. When the crystallization further
proceeds, only crystals in a vertical orientation survive in the
competing process. However, the Ba ions are trapped in the crystal
grain boundaries, so that the amount of Ba ions which are present
at the interface between the quartz glass and the crystal grains
decreases. Accordingly, the crystal growth gradually weakens and
stops soon. However, with the crystal layer in the dome-like
orientation, it is possible to form a crystal layer sufficiently
thicker than a crystal layer in a random orientation.
[0091] In addition, in a structure in which Ba ions are present in
a glass matrix in the related art, Ba ions simultaneously generate
crystal nuclei. However, the crystals grow randomly, and the amount
of Ba ions contributing to crystal growth in the thickness
direction decreases. Therefore, the crystal layer cannot be made
thick. Contrary to this, as illustrated in FIG. 3B, in a model in
which crystal nuclei start growing uniformly in the depth direction
from the glass surface, crystals in a vertical orientation do not
cancel out, so that it is possible to form a thick crystal
layer.
[0092] Furthermore, as illustrated in FIG. 3C, in a case where the
concentration of Ba ions is very high and particularly 50 times or
more the concentration of Si ions on the surface of quartz glass, a
countless number of crystal nuclei are generated on the surface of
the crucible within a short period of time, and selective crystal
growth in a vertical direction occurs fast, so that crystal grains
in a columnar orientation are formed. As the crystal grains grow,
Ba ions are less likely to be trapped in the crystal grain
boundaries, and a decrease in the amount of Ba ions is suppressed,
so that a decrease in the crystallization rate is suppressed. As
described above, by allowing Ba ions to be present at a high
concentration on the extreme surface of the quartz glass to advance
crystallization at once in the direction toward the inside of the
glass, it is possible to turn the crystal structure from the
dome-like orientation into the columnar orientation. With the
crystal layer in the columnar orientation, crystal growth of the
surface-layer portion of the crucible can be allowed to continue,
so that it is possible to form a crystal layer which is thickener
than the crystal layer in the dome-like orientation.
[0093] Since the crystal layer of the inner surface of the crucible
is melted by the reaction with the silicon melt, during random
growth in which crystallization of quartz glass stops in an initial
stage of heating, the crystal layer of the inner surface of the
crucible disappears, which is not suitable for long-term use. In
addition, since the crystal layer of the outer surface of the
crucible also decreases in thickness due to the reaction with a
carbon susceptor, there is concern that the crystal layer of the
outer surface may disappear during random growth in which
crystallization stops in an initial stage of heating. However, the
crystal growth period can be increased in the case of dome-like
growth, and the thickness of the crystal layer can be sufficiently
secured. In addition, the crystal growth period can be further
increased in the case of columnar growth, and continuous crystal
growth can be realized.
[0094] The crystallized state of the surface-layer portion of the
crucible can be observed using a SEM (Scanning Electron
Microscope)), but can also be evaluated by a surface X-ray
diffraction method.
[0095] FIG. 4 shows graphs showing measurement results of the
surface-layer portion of the crucible by the surface X-ray
diffraction method, in which FIGS. 4(a), 4(a), and 4(c)show crystal
layers in a random orientation, in a dome-like orientation, and in
a columnar orientation, respectively.
[0096] In a case where the crystal layer is in a random
orientation, as illustrated in FIG. 4(a), the maximum value A of
the peak intensity (counts) at a diffraction angle 2.theta. of
20.degree. to 25.degree. caused by a (100) crystal orientation is
very high, and the maximum value B of the peak intensity at a
diffraction angle 2.theta. of 33.degree. to 40.degree. caused by a
(200) crystal orientation is very low, and the peak intensity ratio
A/B becomes larger than 7.
[0097] Contrary to this, in a case where the crystal layer is in
the dome-like orientation, as illustrated in FIG. 4(b), the
difference between the maximum value A of the peak intensity at a
diffraction angle 2.theta. of 20.degree. to 25.degree. and the
maximum value of the peak intensity at a diffraction angle 2.theta.
of 33.degree. to 40.degree. decreases, and the peak intensity ratio
A/B becomes 0.4 or more and 7 or less.
[0098] Furthermore, in a case where the crystal layer is in the
columnar orientation, as illustrated in FIG. 4(c), the maximum
value A of the peak intensity at a diffraction angle 2.theta. of
20.degree. to 25.degree. is very low, and the maximum value B of
the peak intensity at a diffraction angle 2.theta. of 33.degree. to
40.degree. is very high, and the peak intensity ratio A/B becomes
less than 0.4.
[0099] FIG. 5 is a table showing suitable crystal structures of the
inner crystal layer 14A and the outer crystal layer 14B for each
part, in which a preferable crystal structure for each part is
indicated by "B", and a more preferable crystal structure is
indicated by "A".
[0100] As shown in FIG. 5, regarding the inner surface 10a of the
crucible body 10, the entire inner surface from the straight body
portion (W portion) 1a to the bottom portion (B portion) 1b may be
caused to have a dome-shaped/columnar crystal layer (A/B is less
than 0.4). In addition, only the corner portion (R portion) 1c and
the bottom portion 1b can be caused to have a dome-shaped/columnar
crystal layer while the inner surface of the straight body portion
1a is caused to have a dome-shaped crystal layer (A/B is equal to
or more than 0.4 and less than 7). This is because the inner
surface of the straight body portion 1a has a shorter contact time
with the silicon melt than that of the corner portion 1c or the
bottom portion 1b and it is sufficient to form a dome-shaped
crystal layer thereon. In a case where a crystal pull-up time is
relatively short, it is also preferable to adopt the condition that
the inner surface of the straight body portion 1a of the crucible
body 10 becomes a dome-shaped crystal layer. The thickness of the
crystallization-accelerator-containing coating film 13A in the
straight body portion 1a can be reduced, so that the incorporation
of impurities contained in the coating film into the silicon melt
can be reduced.
[0101] Regarding the outer surface 10b of the crucible body 10, the
entire outer surface from the straight body portion 1a to the
bottom portion 1b may have a dome-shaped/columnar crystal layer or
a dome-shaped crystal layer regardless of the part of the crucible,
but particularly preferably has a dome-shaped crystal layer. This
is because, although the strength of the crucible can be increased
by allowing the outer crystal layer 14B to have a certain
thickness, when the thickness of the outer crystal layer 14B
increases, bubbles in a bubble layer of the crystallized quartz
glass cohere and expand, with the result that deformation of the
crucible or delamination of the crystal layer easily occurs. When
the thickness of the outer crystal layer 14B becomes 1.5 mm or
more, delamination of the outer crystal layer 14B particularly
easily occurs. Therefore, it is preferable that the crystal growth
rate of the outer crystal layer 14B flows down as the crystal
growth thereof proceeds, and it is preferable that the thickness of
the outer crystal layer 14B is suppressed to be less than 1.5
mm.
[0102] It is preferable that the coating solution used for forming
the crystallization-accelerator-containing coating films 13A and
13B is used in an actual quartz glass crucible after a test for a
crystallized state is conducted in advance on a base material such
as a quartz glass plate. In the test for a crystallized state,
after a crystallization accelerator coating solution at a
predetermined concentration is applied to the surface of the quartz
glass base material, an evaluation heat treatment is performed at
1400.degree. C. or higher to form a crystal layer on a
surface-layer portion of the surface of the quartz glass base
material. Next, the crystallized state of the surface of the quartz
glass base material is analyzed by the X-ray diffraction method,
and the concentration of the crystallization accelerator in the
crystallization accelerator coating solution is adjusted based on
the analysis result. Then, the crystallization accelerator coating
solution after the adjustment of the concentration is applied to
the surface of the quartz glass crucible (the crucible body 10),
thereby completing the quartz glass crucible 1. As described above,
a desired crystallized state can be reliably reproduced regardless
of slight differences in conditions such as the concentration,
composition, coating conditions, and the like of the
crystallization accelerator coating solution, thereby realizing a
quartz glass crucible having high reliability.
[0103] FIG. 6 is a flowchart for explaining a manufacturing method
of a silicon single crystal using the quartz glass crucible 1
according to the embodiment.
[0104] As illustrated in FIG. 6, in the manufacturing of a silicon
single crystal according to the embodiment, a quartz glass crucible
having the first and second crystallization-accelerator-containing
coating films 13A and 13B formed therein is used. Therefore, a
quartz glass crucible (crucible body 10) to which the
crystallization accelerator is not applied (uncoated) is prepared,
and barium compound coating solutions having appropriate
concentrations are respectively applied to the inner surface and
the outer surface thereof (step S11).
[0105] Next, a step of pulling up a silicon single crystal is
performed using the quartz glass crucible 1 having the first and
second crystallization-accelerator-containing coating films 13A and
13B formed therein (step S12). The pull-up step may be
multi-pulling in which a plurality of silicon single crystals are
pulled up from the same crucible, or may be single-pulling in which
only a single silicon single crystal is pulled up.
[0106] FIG. 9 is a schematic view for explaining the step of
pulling up a silicon single crystal by the CZ method.
[0107] As illustrated in FIG. 9, a single crystal pull-up apparatus
20 is used in the step of pulling up a silicon single crystal by
the CZ method. The single crystal pull-up apparatus 20 includes a
water cooling type chamber 21, the quartz glass crucible 1 which
holds a silicon melt 4 in the chamber 21, a carbon susceptor 22
which holds the quartz glass crucible 1, a rotary shaft 23 which
supports the carbon susceptor 22, a shaft driving mechanism 24
which rotates and lifts/lowers the rotary shaft 23, a heater 25
disposed in the periphery of the carbon susceptor 22, a heat
insulation material 26 disposed outside the heater 25 along the
inner surface of the chamber 21, a heat-shield body 27 disposed
above the quartz glass crucible 1, a crystal pull-up wire 28
disposed above the quartz glass crucible 1 coaxially with the
rotary shaft 23, and a wire winding mechanism 29 disposed at the
upper portion the chamber 21.
[0108] The chamber 21 is constituted of a main chamber 21a and an
elongated cylindrical pull chamber 21b connected to an upper
opening of the main chamber 21a. The quartz glass crucible 1, the
carbon susceptor 22, the heater 25, and the heat-shield body 27 are
provided in the main chamber 21a. A gas inlet port 21c for
introducing inert gas (purge gas) such as argon gas or dopant gas
into the chamber 21 is provided in the upper portion of the pull
chamber 21b, and a gas exhaust port 21d for exhausting the
atmosphere gas in the chamber 21 is provided at the lower portion
of the main chamber 21a. In addition, a sight window 21e is
provided at the upper portion of the main chamber 21a so as to
allow a growing state of a silicon single crystal 3 to be observed
through the sight window 21e.
[0109] The carbon susceptor 22 is used for maintaining the shape of
the quartz glass crucible 1 which is softened by heating, and holds
and surrounds the quartz glass crucible 1 by coming in close
contact with the outer surface of the quartz glass crucible 1. The
quartz glass crucible 1 and the carbon susceptor 22 constitute a
double-structure quartz glass crucible that supports the silicon
melt 4 in the chamber 21.
[0110] The carbon susceptor 22 is fixed to the upper end portion of
the rotary shaft 23, and the lower end portion of the rotary shaft
23 passes through the bottom portion of the chamber 21 and is
connected to the shaft driving mechanism 24 provided outside the
chamber 21. The rotary shaft 23 and the shaft driving mechanism 24
constitute a rotary mechanism and a lifting/lowering mechanism of
the quartz glass crucible 1 and the carbon susceptor 22.
[0111] The heater 25 is used for generating the silicon melt 4 by
melting a silicon raw material filling the quartz glass crucible 1,
and for maintaining the molten state of the silicon melt 4. The
heater 25 is a carbon heater of a resistance heating type and is
provided so as to surround the quartz glass crucible 1 in the
carbon susceptor 22. Furthermore, the heat insulation material 26
is provided outside the heater 25 to surround the heater 25,
whereby the heat retention in the chamber 21 can be enhanced.
[0112] The heat-shield body 27 is provided to form an appropriate
hot zone in the vicinity of the crystal growth interface by
suppressing temperature variations of the silicon melt 4 and to
prevent the silicon single crystal 3 from being heated by radiant
heat from the heater 25 and the quartz glass crucible 1. The
heat-shield body 27 is a graphite member which covers the region
above the silicon melt 4 excluding the pull-up path of the silicon
single crystal 3, and for example, has an inverse truncated cone
shape with an opening size increasing from the lower end to the
upper end.
[0113] The diameter of an opening 27a of the lower end of the
heat-shield body 27 is larger than the diameter of the silicon
single crystal 3, whereby the pull-up path of the silicon single
crystal 3 is secured. The diameter of the opening 27a of the
heat-shield body 27 is smaller than the aperture of the quartz
glass crucible 1, and the lower end portion of the heat-shield body
27 is positioned inside the quartz glass crucible 1. Therefore, the
heat-shield body 27 does not interfere with the quartz glass
crucible 1 even when the rim upper end of the quartz glass crucible
1 is lifted above the lower end of the heat-shield body 27.
[0114] While the amount of the melt in the quartz glass crucible 1
decreases as the silicon single crystal 3 grows, temperature
variations in the silicon melt 4 are suppressed by lifting the
quartz glass crucible 1 so as to cause the gap between the melt
surface and the lower end of the heat-shield body 27, and the
amount of dopants vaporized from the silicon melt 4 can be
controlled by causing the flow rate of gas flowing in the vicinity
of the melt surface to be constant. Therefore, it is possible to
improve the stability of a crystal defect distribution, an oxygen
concentration distribution, a resistivity distribution, and the
like in a pull-up axis direction of the silicon single crystal
3.
[0115] Above the quartz glass crucible 1, the wire 28 as a pull-up
axis of the silicon single crystal 3, and the wire winding
mechanism 29 for winding the wire 28 are provided. The wire winding
mechanism 29 has a function of rotating the silicon single crystal
3 together with the wire 28. The wire winding mechanism 29 is
disposed at the upper portion of the pull chamber 21b, the wire 28
extends downward from the wire winding mechanism 29 through the
pull chamber 21b, and the tip end portion of the wire 28 reaches
the internal space of the main chamber 21a. FIG. 9 illustrates a
state where the silicon single crystal 3 during growing is
suspended by the wire 28. During pulling up the silicon single
crystal 3, the silicon single crystal 3 is grown by gradually
pulling up the wire 28 while rotating each of the quartz glass
crucible 1 and the silicon single crystal 3.
[0116] A CCD camera 30 is provided outside the sight window 21e.
During the process of pulling up a single crystal, the CCD camera
30 photographs the boundary between the silicon single crystal 3
and the silicon melt 4 viewed obliquely from above through the
opening 27a of the heat-shield body 27 from the sight window 21e.
The image taken by the CCD camera 30 is processed by an image
processing unit 31, and the processing result is used by a
controller 32 to control pull-up conditions.
[0117] Although the inner surface of the quartz glass crucible 1 is
eroded by the reaction with the silicon melt 4 during the step of
pulling up a silicon single crystal, since crystallization of the
inner surface and the outer surface proceeds due to the action of
the crystallization accelerator applied to the inner surface and
the outer surface of the crucible, the crystal layer of the inner
surface does not disappear, and the thickness of the crystal layer
can be secured to some extent, thereby maintaining the strength of
the crucible and suppressing deformation thereof. Therefore, it is
possible to prevent the crucible from being deformed and coming
into contact with the members in the furnace such as the
heat-shield body 27 and to prevent variations in the liquid surface
position of the silicon melt 4 due to a change in the internal
volume of the crucible.
[0118] When a crystal piece delaminated from the inner surface of
the quartz glass crucible 1 rides on the convection of the silicon
melt 4 and reaches a solid/liquid interface, the crystal piece is
incorporated into the silicon single crystal 3, so that there is
concern that dislocation may occur. However, according to the
embodiment, delamination of the crystal piece from the inner
surface of the crucible can be prevented, whereby dislocation of a
single crystal can be prevented.
[0119] Next, the surface of the used crucible after the end of the
pull-up step is analyzed by the X-ray diffraction method, and the
crystallized state of the crystal layer is evaluated (step S13). As
described above, a peak intensity ratio A/B of more than 7 can be
evaluated as a crystal layer in a random orientation, a peak
intensity ratio A/B of 0.4 or more and 7 or less can be evaluated
as a crystal layer in a dome-like orientation, and a peak intensity
ratio A/B of less than 0.4 can be evaluated as a crystal layer in a
columnar orientation.
[0120] Next, the analysis and evaluation results are fed back to
adjust the concentration of the barium compound coating solution
(step S14). For example, in a case where the crystallized state of
the outer crystal layer 14B is in a columnar orientation and the
crystal layer becomes excessively thick, the barium concentration
in the barium compound coating solution to be used may be adjusted
to be decreased. In addition, in a case where the crystallized
state of the inner crystal layer 14A is in a dome-like orientation
but a columnar orientation is desired, the barium concentration in
the barium compound coating solution to be used may be adjusted to
be increased.
[0121] The analysis and evaluation results may include the degree
of orientation of crystals (evaluation results by X-ray
diffraction: peak ratio), the thickness of a crystal layer, the
thickness gradient, the thickness distribution, the grain size of
crystals, the presence or absence of foaming and delamination of
the crystal layer, and the like. In addition, adjustment items may
include the concentration (of each part), the thickness of the
coating film (of each part), formulation of the thickener, the
particle size of barium carbonate, and the like. As a method of
adjusting the items, since the thermal load varies with the part of
the crucible depending on the crystal pull-up conditions, pulling
up is performed by applying barium at a uniform barium
concentration regardless of the part of the crucible initially, the
thickness distribution and the like of the crystal layer of the
used crucible are analyzed, and the above-mentioned items may be
adjusted for each part so that the crystal layer becomes
uniform.
[0122] Thereafter, a new uncoated quartz glass crucible is
prepared, the barium compound coating solution of which the
concentration is adjusted is applied to the surface thereof (step
S15), and the step of pulling up a silicon single crystal is newly
performed using the quartz glass crucible (step S16). In the
pull-up step performed as described above, the crystal layer of the
surface of the quartz glass crucible 1 is in the optimal
crystallized state for each part, so that a crystal layer which is
uniform in a plane can be formed without delamination of crystal
grains at the inner surface 10a of the crucible body 10 and
columnar crystals can be continuously grown, which in turn always
maintains the strength. In addition, on the outer surface 10b of
the crucible body 10, inconveniences such as forming and
delamination can be prevented while maintaining a certain
strength.
[0123] As described above, in the quartz glass crucible 1 according
to the embodiment, since the inner crystal layer 14A formed of the
dome-shaped/columnar crystal layer or the dome-shaped crystal layer
is formed on the inner surface 10a of the crucible body 10 by
heating in the pull-up step, the inner crystal layer 14A can have a
sufficient thickness. Therefore, the deformation thereof can be
prevented by increasing the strength of the crucible. In addition,
it is possible to prevent the inner crystal layer 14A from
completely disappearing due to the erosion of the inner surface of
the crucible.
[0124] In a case where the inner crystal layer 14A is the
dome-shaped/columnar crystal layer, even if the dome-shaped crystal
layer is eroded, since the orientation direction of the columnar
crystal layer is the thickness direction of the crucible wall,
delamination of columnar crystal grains can be prevented. In
addition, by causing the inner crystal layer 14A to undergo the
columnar orientation, the crystal growth can be concentrated in the
thickness direction of the crucible wall, so that the crystal
growth rate can be increased.
[0125] In addition, in the quartz glass crucible 1 according to the
embodiment, since the outer crystal layer 14B formed of the
dome-shaped crystal layer is formed on the outer surface 10b of the
crucible body 10 by heating in the pull-up step, the outer crystal
layer 14B can have a sufficient thickness. Therefore, the
deformation thereof can be prevented by increasing the strength of
the crucible. In addition, by forming the dome-shaped crystal layer
in the outer surface 10b of the crucible body 10, the crystal grain
boundaries can be densified, thereby preventing cracks from
reaching the inside of the crucible due to impacts and the like
from the outer surface of the crucible.
[0126] In addition, by causing the outer crystal layer 14B to have
the dome-shaped crystal layer instead of the columnar crystal
layer, crystal growth is not sustained, so that the outer crystal
layer 14B does not become excessively thick. Therefore, it is
possible to prevent delamination of the crystal layer due to
expansion of bubbles at the interface between a thick crystal layer
and quartz glass, and furthermore, it is possible to prevent the
generation of cracks propagating from the bubbles along the
columnar crystal grain boundaries.
[0127] Also, according to the embodiment, the crystallized states
of the crystal layers of the surfaces (the inner surface and the
outer surface) of the crucible can be easily evaluated by the X-ray
diffraction method. Therefore, the coating conditions of the
crystallization accelerator can be selected based on the evaluation
results, and the quartz glass crucible 1 having a crystallized
state matching the pull-up conditions of the silicon single crystal
and the part of the crucible can be manufactured.
[0128] FIG. 10 is a schematic cross-sectional view illustrating the
structure of a quartz glass crucible according to a second
embodiment of the present invention.
[0129] As illustrated in FIG. 10, a quartz glass crucible 2
according to the embodiment is featured in that the
crystallization-accelerator-containing coating films 13A and 13B
respectively formed on the inner surface 10a and the outer surface
10b of the crucible body 10 are not formed to reach the rim upper
end of the crucible body 10. That is, a band-like region having a
predetermined width extending downward from the rim upper end of
the inner surface 10a of the crucible body 10 is a crystallization
accelerator uncoated region 15A (hereinafter, simply referred to as
"uncoated region 15A") in which the
crystallization-accelerator-containing coating film 13B is not
formed, and a band-like region having a predetermined width
extending downward from the rim upper end of the outer surface 10b
is a crystallization accelerator uncoated region 15B (hereinafter,
simply referred to as "uncoated region 15B") in which the
crystallization-accelerator-containing coating film 13A is not
formed.
[0130] In the case where the crystallization-accelerator-containing
coating films 13A and 13B are respectively formed to reach the rim
upper end of the inner surface 10a or the outer surface 10b of the
crucible body 10, the rim upper end portion (the inner surface 10a
and the outer surface 10b in the vicinity of the rim upper end and
the rim upper end surface) is crystallized, and there is concern
that particles of small crystal pieces generated from the
crystallized region may be incorporated into the silicon melt,
resulting in a reduction in the yield of the silicon single
crystal. However, in a case where the uncoated regions 15A and 15B
are provided, crystallization of the rim upper end portion can be
suppressed, and a reduction in the yield of the silicon single
crystal due to the generation of particles of small crystal pieces
at the rim upper end portion can be prevented.
[0131] It is preferable that the uncoated regions 15A and 15B
extend downward from the rim upper end in a range of 2 mm or more
and 40 mm or less. This is because, in a case where the width of
the uncoated regions 15A and 15B is smaller than 2 mm, the effect
of providing the uncoated regions 15A and 15B is insufficient. In
addition, in a case where the width of the uncoated regions 15A and
15B is greater than 40 mm, there is a possibility that the boundary
position between the crystallization-accelerator-containing coating
film and the uncoated region may be present in the silicon melt,
and when the boundary between the crystal layer and the glass layer
is immersed in the silicon melt, there is a higher possibility that
cracks may be generated by stress concentration on the boundary
region and particles of small crystal pieces may be generated.
[0132] As illustrated in FIG. 9, although the quartz glass crucible
1 during the crystal pull-up step is accommodated in the carbon
susceptor 22, the rim upper end portion of the quartz glass
crucible 1 protrudes upward from the upper end of the carbon
susceptor 22 and thus is always in a self-sustaining state without
being supported by the carbon susceptor 22. It is preferable that
the uncoated regions 15A and 15B are provided in a region
protruding upward from the upper end of the carbon susceptor 22. As
described above, by causing the rim upper end portion of the quartz
glass crucible 1 which is not in contact with the carbon susceptor
22 to be the uncoated region, the yield of the silicon single
crystal can be improved, and deformation of the crucible due to
foaming and delamination of the crystal layer can be prevented.
[0133] It is preferable that the range of the width of the uncoated
regions 15A and 15B is 0.02 times to 0.1 times the length of the
straight body portion 1a of the crucible. This is because, in a
case where the width of the uncoated regions 15A and 15B is smaller
than 0.02 times the length of the straight body portion 1a of the
crucible, the effect of providing the uncoated regions 15A and 15B
is insufficient. In addition, in a case where the width of the
uncoated regions 15A and 15B is larger than 0.1 times the length of
the straight body portion 1a of the crucible, the uncoated region
is formed to reach the region supported by the carbon susceptor 22
and there is concern of deformation of the crucible due to foaming
and delamination of the crystal layer or deterioration of the yield
of the silicon single crystal.
[0134] FIG. 11 is a schematic view for explaining an example of a
method of forming the uncoated region 15B together with the
crystallization-accelerator-containing coating film 13B on the
outer surface of the quartz glass crucible 2 illustrated in FIG.
10.
[0135] As illustrated in FIG. 11, in a case of forming the
crystallization-accelerator-containing coating film 13B on the
outer surface 10b of the crucible body 10, the
crystallization-accelerator-containing coating film 13B can be
formed by a spraying method. Here, in a case where the uncoated
region 15B is provided at the rim upper end portion, first, a
polyethylene sheet (PE sheet) 41 is put on an opening 10d of the
crucible body 10 to cover the opening 10d, the PE sheet 41 at the
mouth of the opening 10d is fixed by a polypropylene band (PP band)
42 to seal the opening 10d.
[0136] Thereafter, as illustrated, the opening 10d of the crucible
body 10 is placed on a rotary stage 40 in a state of facing
downward, and in a state in which an end portion 41e of the PE
sheet 41 which extends outward from the fixing position of the PP
band 42, the end portion 41e of the PE sheet 41 is fixed to the
outer circumferential surface of the rotary stage 40 by a rubber
band 43.
[0137] After masking the region having a predetermined width (2 to
40 mm) extending downward from the rim upper end of the outer
surface 10b of the crucible body 10 with the PE sheet 41 and the PP
band 42, a crystallization-accelerator-containing coating solution
is applied to the entire outer surface 10b of the crucible body 10
using a spray 45, whereby the
crystallization-accelerator-containing coating film 13B can be
formed and the uncoated region 15B can be formed in the vicinity of
the rim upper end of the outer surface 10b of the crucible body
10.
[0138] The above description is an example of the method of forming
the uncoated region 15B together with the
crystallization-accelerator-containing coating film 13B on the
outer surface of the quartz glass crucible 2, and the same can also
be applied to a case of forming the uncoated region 15A together
with the crystallization-accelerator-containing coating film 13A on
the inner surface of the quartz glass crucible 2. That is, the
crystallization accelerator coating solution may be applied by the
spraying method in a state in which a region having a predetermined
width extending downward from the rim upper end in the inner
surface 10a of the crucible body 10 is masked.
[0139] As described above, since the quartz glass crucible 2
according to the embodiment is provided with the crystallization
accelerator uncoated regions 15A and 15B on the inner surface 10a
and the outer surface 10b of the rim upper end portion of the
crucible body 10, in addition to the effect of the invention by the
first embodiment, it is possible to prevent a decrease in the yield
of the silicon single crystal due to the generation of particles of
small crystal pieces at the rim upper end portion.
[0140] While the preferred embodiments of the present invention
have been explained above, the present invention is not limited to
the embodiments and may be variously modified without departing
from the scope of the present invention. Accordingly, all such
modifications are included in the present invention.
[0141] For example, the crystallization-accelerator-containing
coating films 13A and 13B do not necessarily have to be formed on
both the inner surface 10a and the outer surface 10b of the
crucible body 10, but may be formed only on the inner surface 10a
of the crucible body 10 or only on the outer surface 10b. However,
since the inner surface 10a of the crucible is in contact with the
silicon melt and has a large erosion amount, the effect of
crystallization thereof is larger than that of the outer surface
10b of the crucible, and it is more important to form a crystal
layer on the inner surface than on the outer surface of the
crucible.
[0142] In addition, in the embodiment, the inner crystal layer 14A
may have a single-layer structure of a dome-shaped crystal layer,
and the outer crystal layer 14B may have a random crystal layer or
a dome-shaped crystal layer.
[0143] In addition, in the embodiment, the case where the
crystallized state of the crucible used in the proceeding crystal
pull-up step is fed back to the crucible used in the subsequent
crystal pull-up step is exemplified. However, the present invention
is not limited to such a case. Therefore, for example, the
conditions of a simulation test with a quartz piece may be
determined based on predetermined crystal pull-up conditions, and
evaluation of the quartz piece may be performed under these
conditions and coating conditions may be determined based on the
evaluation results. That is, the crystallized state of the crystal
layer formed on the surface layer of the quartz piece by heating
during the simulation test modeled on the crystal pull-up step may
be analyzed, and based on the analysis results, the concentration
of the crystallization accelerator in the crystallization
accelerator coating solution applied to the inner surface of the
quartz glass crucible used in an actual silicon single crystal
pull-up step may be adjusted.
[0144] In addition, as a method of applying the crystallization
accelerator coating solution to the surface of the crucible, in
addition to a method using a brush, a spray type, a dipping type,
curtain coating, or the like may also be adopted.
EXAMPLE
[0145] The effect of the concentration of the barium compound
coating solution on the crystallized state of the crystal layer was
evaluated. In this evaluation test, an aqueous solution having a
reference concentration in which 50 g/L of polyvinyl alcohol
(thickener) was dissolved in barium acetate (0.02 M of metal ions)
was first prepared, and six types of coating solutions in which the
concentration of barium acetate in the aqueous solution was
adjusted to 0.01 times, 0.031 times, 0.063 times, 0.125 times, 0.5
times, and 2 times were prepared. Next, quartz glass plates were
prepared, and a set of two plates was immersed into each of the six
types of coating solutions after adjusting the concentration so as
to be coated.
[0146] Next, the barium concentration on the surface of the quartz
glass plate was obtained. In order to calculate the barium
concentration, the number of moles of barium was obtained from the
weight of the barium acetate aqueous solution which was reduced by
immersing the quartz glass plate, the number of atoms of barium was
calculated from the number of moles of barium and the Avogadro
constant, and the barium concentration was obtained from the number
of atoms thereof and the surface area of the quartz glass plate to
which the barium acetate aqueous solution was adhered.
[0147] Next, the 12 quartz glass plates were heated in a test
furnace at 1450.degree. C. The heating time was set to 30 minutes
for one of the two quartz glass plates to which the same aqueous
solution was applied, and was set to 90 minutes for the other.
[0148] Next, the crystallized state of the surface-layer portion of
the 12 quartz glass plates after the heat treatment was observed by
a SEM(Scanning Electron Microscope). Furthermore, among the 12
quartz glass plates, the surfaces of the quartz glass plates
subjected to the heat treatment with the coating solutions at a
concentration ratio of 0.031 times, 0.125 times, 0.5 times, and 2
times for 90 minutes was analyzed by the X-ray diffraction method,
and the peak intensity ratio A/B was obtained. The evaluation of
the quartz glass plates by the X-ray diffraction method was
performed using an X-ray diffractometer RINT 2500 manufactured by
Rigaku Corporation with target: Cu (.lamda.=1.5418 nm), scanning
axis: 2.theta., measurement method: continuous, 2.theta. angle
scanning range: 10.degree. to 70.degree., light-receiving slit:
0.15 mm, divergence slit: 1.degree., scattering slit: 1.degree.,
sampling width: 0.02.degree., and scanning speed: 10.degree./min.
The depth (detection depth) from the surface being evaluated by
X-rays varied depending on the incident angle of X-rays, and was
set to several nanometers to several tens micrometers.
[0149] Table 1 is a list of evaluation test results of the quartz
glass plates.
TABLE-US-00001 TABLE 1 Crystal X-ray Quartz Coating growth
diffraction glass solution Surface rate peak plate concentration
concentration Crystal 30 .fwdarw. intensity sample ratio
(atoms/cm.sup.3) orientation 90 min ratio A1 .times.0.01 7.8E14
Random A2 .times.0.031 2.4E15 Random 0 .mu.m/h 8 A3 .times.0.063
4.9E15 Dome-like A4 .times.0.125 9.7E15 Dome-like 150 .mu.m/h 0.64
A5 .times.0.5 3.9E16 Columnar 450 .mu.m/h 0.16 A6 .times.2 1.6E17
Columnar 450 .mu.m/h
[0150] As shown in Table 1, the barium concentration on the surface
(surface barium concentration) of a quartz glass plate sample Al to
which the barium acetate aqueous solution at a concentration ratio
of 0.01 times to the reference concentration was applied was
7.8.times.10.sup.14 atoms/cm.sup.2, and the barium concentration on
the surface of a quartz glass plate sample A2 to which the barium
acetate aqueous solution at a concentration ratio of 0.031 times
was applied was 2.4.times.10.sup.15 atoms/cm.sup.2, so that both
were crystal growths of cristobalite in a random orientation.
[0151] The barium concentration on the surface of a quartz glass
plate sample A3 to which the barium acetate aqueous solution at a
concentration ratio of 0.063 times was applied was
4.9.times.10.sup.15 atoms/cm.sup.2, and the barium concentration on
the surface of a quartz glass plate sample A4 to which the barium
acetate aqueous solution at a concentration ratio of 0.125 times
was applied was 9.7.times.10.sup.15 atoms/cm.sup.2, so that both
were crystal growths of cristobalite in a dome-like
orientation.
[0152] In addition, the barium concentration on the surface of a
quartz glass plate sample A5 to which the barium acetate aqueous
solution at a concentration ratio of 0.5 times was applied was
3.9.times.10.sup.16 atoms/cm.sup.2, and the barium concentration on
the surface of a quartz glass plate sample A6 to which the barium
acetate aqueous solution at a concentration ratio of 2 times was
applied was 1.6.times.10.sup.17 atoms/cm.sup.2, so that both were
crystal growths of cristobalite in a columnar orientation.
[0153] FIG. 7A is an image showing the observation results of the
crystal layers by SEM. In addition, FIG. 7B is a graph showing the
relationship between the heating time of the quartz glass plate and
the thickness of the crystal layer formed on the surface-layer
portion of the quartz glass plate, in which the horizontal axis
represents the heating time and the vertical axis represents the
thickness of the crystal layer.
[0154] As shown in FIG. 7B, in a case where the barium acetate
aqueous solution diluted to 0.031 times the reference concentration
was applied to the quartz glass plate, the thickness of the crystal
layer after 30 minutes from the start of the heating was about 200
.mu.m, and was about 200 .mu.m even after 90 minutes, which means
that crystal layer hardly grew after 30 minutes from the start of
the heating. That is, the crystal growth rate after 30 minutes from
the start of the heating was approximately 0 .mu.m/h. In addition,
as shown in FIG. 7A, the crystal layer from the SEM image was
crystal growth of cristobalite in a random orientation.
Furthermore, the crystal structure of the crystal layer was
analyzed by the X-ray diffraction method and had a peak pattern as
shown in FIG. 4(a), and the peak intensity ratio A/B mentioned
above was 8.
[0155] In a case where the barium acetate aqueous solution diluted
to 0.125 times the reference concentration was applied to the
quartz glass plate, the thickness of the crystal layer after 30
minutes was about 250 .mu.m, and was about 400 .mu.m after 90
minutes, which means that the crystal growth rate after 30 minutes
from the start of the heating was approximately 150 .mu.m/h. In
addition, as shown in FIG. 7A, the crystal layer from the SEM image
was crystal growth of cristobalite in a dome-like orientation. Both
the width and the length of dome-shaped crystal grains were about 5
to 30 .mu.m. Furthermore, the crystal structure of the crystal
layer was analyzed by the X-ray diffraction method and had a peak
pattern as shown in FIG. 4(b), and the peak intensity ratio A/B
mentioned above was 0.64.
[0156] In a case where the barium acetate aqueous solution diluted
to 0.5 times the reference concentration was applied to the quartz
glass plate, the thickness of the crystal layer after 30 minutes
was about 190 .mu.m, but was about 600 .mu.m after 90 minutes,
which means that the crystal growth rate after 30 minutes from the
start of the heating was approximately 450 .mu.m/h. In addition, as
shown in FIG. 7A, the crystal layer from the SEM image was changed
to crystal growth in a columnar orientation from a dome-like
orientation. The width of columnar crystal grains was about 10 to
50 .mu.m, and the length thereof was 50 .mu.m or more, and mostly
about 50 to 100 .mu.m. Furthermore, the crystal structure of the
crystal layer was analyzed by the X-ray diffraction method and had
a peak pattern as shown in FIG. 4(c), and the peak intensity ratio
A/B mentioned above was 0.16.
[0157] In a case where the barium acetate aqueous solution adjusted
to twice the reference concentration was applied to the quartz
glass plate, the same results were obtained as when the barium
acetate aqueous solution adjusted to 0.5 times the reference
concentration was used. In addition, as shown in FIG. 7A, it was
found that although the crystal layer from the SEM image was
changed to the crystal growth in the columnar orientation from the
dome-like orientation, the crystal growth period of the dome-like
orientation was very short, and the crystal layer was changed from
the dome-like orientation to the columnar orientation in an early
stage.
[0158] From the above results, it was found that the crystallized
state of the crystal layer was changed in order of the random
orientation, the dome-like orientation, and the columnar
orientation by increasing the concentration of the barium acetate
aqueous solution, and the crystal layer was reliably changed to
growth in the dome-like orientation to growth in the columnar
orientation if the concentration is four times or more the
concentration during the growth in the dome orientation. Therefore,
it can be seen that when the crystal layer is in the columnar
orientation, the barium concentration on the surface is
3.9.times.10.sup.16 atoms/cm.sup.2 or more. It should be noted that
the barium concentration on the surface can also be obtained by
analysis with fluorescent X-rays or the like.
[0159] Next, an evaluation test was conducted on the crystallized
state and deformation of the surface of the crucible when the
quartz glass crucible to which the coating solution containing
barium was applied was used in an actual crystal pull-up step. In
the crystal pull-up step, a silicon single crystal ingot having a
diameter of about 300 mm was grown using a 32-inch quartz glass
crucible. As the coating solution applied to the quartz glass
crucible, a barium carbonate coating solution was used. As the
barium carbonate coating solution, a solution containing 0.0012
g/mL of barium carbonate and 0.0008 g/mL of a carboxyvinyl polymer,
in which the ratio between ethanol and pure water was adjusted, was
used. Application to the surface of the crucible was performed with
a brush.
[0160] In this evaluation test, three types of crucible samples
were prepared. Sample #1 was obtained by applying the coating
solution once to the outer surface of the crucible, sample #2 was
obtained by applying the coating solution six times to the inner
surface of the crucible, and sample #3 was obtained by applying the
coating solution five times to the inner surface of the crucible.
After the application, water evaporated in about 10 minutes, and
ethanol evaporated in about 30 minutes, so that a hard film was
formed by a thickener. After the application, the barium
concentration on the surface of the crucible was obtained from the
amount of the coating solution used.
[0161] Thereafter, silicon single crystal ingots were pulled up
using the samples #1 to #3 of the quartz glass crucible by the CZ
method. After the pull-up step ends, the shapes of the used
crucible samples #1 to #3 were visually checked, and no deformation
was observed. The crystallized state of the crucible was evaluated
from SEM images of the sections of the used crucible samples #1 to
#3, and the crystal structure of the crystal layer was further
analyzed by the X-ray diffraction method.
[0162] Table 2 is a table showing the evaluation test results of
the quartz glass crucibles.
TABLE-US-00002 TABLE 2 Surface X-ray concen- Crystal diffraction
Cru- Coating tration layer peak Crucible cible condi- (atoms/
Crystal thick- intensity deform- sample tions cm.sup.2) orientation
ness ratio ation #1 Outer 1.1E16 Dome-like 360 .mu.m 1.7 Absent
surface: once #2 Inner 6.6E16 Columnar 380 .mu.m 0.14 Absent
surface: six times #3 Inner 5.5E16 Columnar 380 .mu.m 0.23 Absent
surface: five times
[0163] FIG. 8 is an SEM image and an X-ray diffraction spectrum
graph of the crystal layer of each of the crucible samples #1 to
#3.
[0164] The barium concentration on the outer surface of the sample
#1 of the quartz glass crucible in which the coating solution was
applied once to the outer surface of the crucible was
1.1.times.10.sup.16 atoms/cm.sup.2, and crystal growth of
cristobalite in a dome-like orientation was confirmed from the SEM
image shown in (a). In addition, the thickness of the outer crystal
layer was about 360 .mu.m. Furthermore, the X-ray diffraction
spectrum of the outer crystal layer had a peak pattern in which the
peak intensity B (the right peak at 2.theta. of 33.degree.
to)40.degree. was lower than the peak intensity A (the left peak at
2.theta. of 20.degree. to)25.degree. as shown in (b), and the peak
intensity ratio A/B mentioned above was 1.7.
[0165] In addition, the barium concentration on the inner surface
of the crucible sample #2 in which the coating solution was applied
six times to the inner surface of the crucible was
6.6.times.10.sup.16 atoms/cm.sup.2, and crystal growth of
cristobalite in a columnar orientation was confirmed from the SEM
image shown in (c). In addition, the thickness of the inner crystal
layer was about 380 .mu.m. Furthermore, the X-ray diffraction
spectrum of the inner crystal layer had a peak pattern in which the
peak intensity B was higher than the peak intensity A as shown in
(d), and the peak intensity ratio A/B mentioned above was 0.14.
[0166] In addition, the barium concentration on the inner surface
of the crucible sample #3 in which the coating solution was applied
five times to the inner surface of the crucible was
5.5.times.10.sup.16 atoms/cm.sup.2, and crystal growth of
cristobalite in a columnar orientation was confirmed from the SEM
image shown in (e). In addition, the thickness of the inner crystal
layer was about 350 .mu.m. Furthermore, the X-ray diffraction
spectrum of the inner crystal layer had a peak pattern in which the
peak intensity B was higher than the peak intensity A as shown in
(f), and the peak intensity ratio A/B mentioned above was 0.23.
DESCRIPTION OF THE SYMBOLS
[0167] 1, 2 quartz glass crucible [0168] 1a straight body portion
of quartz glass crucible [0169] 1b bottom portion of quartz glass
crucible [0170] 1c corner portion of quartz glass crucible [0171] 3
silicon single crystal [0172] 4 silicon melt [0173] 10 crucible
body [0174] 10a inner surface of crucible body [0175] 10b outer
surface of crucible body [0176] 10d opening of crucible body [0177]
11 opaque layer [0178] 12 transparent layer [0179] 13A first
crystallization-accelerator-containing coating film [0180] 13B
second crystallization-accelerator-containing coating film [0181]
14A inner crystal layer [0182] 14B outer crystal layer [0183] 15A
crystallization accelerator uncoated region [0184] 15B
crystallization accelerator uncoated region [0185] 20 single
crystal pull-up apparatus [0186] 21 chamber [0187] 21a main chamber
[0188] 21b pull chamber [0189] 21c gas inlet port [0190] 21d gas
exhaust port [0191] 21e sight window [0192] 22 carbon susceptor
[0193] 23 rotary shaft [0194] 24 shaft driving mechanism [0195] 25
heater [0196] 26 heat insulation material [0197] 27 heat-shield
body [0198] 27a opening of heat-shield body [0199] 28 crystal
pull-up wire [0200] 29 wire winding mechanism [0201] 30 CCD camera
[0202] 31 image processing unit [0203] 32 controller [0204] 40
rotary stage [0205] 41 polyethylene sheet (PE sheet) [0206] 41e end
portion of polyethylene sheet [0207] 42 polypropylene band (PP
band) [0208] 43 rubber band [0209] 45 spray
* * * * *