U.S. patent application number 17/484336 was filed with the patent office on 2022-01-13 for methods for determining misalignment of x-ray detectors.
The applicant listed for this patent is SHENZHEN XPECTVISION TECHNOLOGY CO., LTD.. Invention is credited to Peiyan CAO, Yurun LIU.
Application Number | 20220008029 17/484336 |
Document ID | / |
Family ID | 1000005857268 |
Filed Date | 2022-01-13 |
United States Patent
Application |
20220008029 |
Kind Code |
A1 |
CAO; Peiyan ; et
al. |
January 13, 2022 |
Methods for Determining Misalignment of X-ray Detectors
Abstract
Disclosed herein is a method comprising: obtaining a third image
from a first X-ray detector when the first X-ray detector and a
second X-ray detector are misaligned; determining, based on a shift
between a first image and the third image, a misalignment between
the first X-ray detector and the second X-ray detector when the
first and second detectors are misaligned; wherein the first image
is an image the first X-ray detector should capture if the first
and the second detectors are aligned.
Inventors: |
CAO; Peiyan; (Shenzhen,
CN) ; LIU; Yurun; (Shenzhen, CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SHENZHEN XPECTVISION TECHNOLOGY CO., LTD. |
Shenzhen |
|
CN |
|
|
Family ID: |
1000005857268 |
Appl. No.: |
17/484336 |
Filed: |
September 24, 2021 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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17036114 |
Sep 29, 2020 |
11154271 |
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17484336 |
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16117867 |
Aug 30, 2018 |
10820882 |
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17036114 |
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PCT/CN2016/085407 |
Jun 12, 2016 |
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16117867 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
A61B 6/4241 20130101;
A61B 6/584 20130101; A61B 6/585 20130101; A61B 6/4233 20130101;
A61B 6/4266 20130101 |
International
Class: |
A61B 6/00 20060101
A61B006/00 |
Claims
1. A method comprising: obtaining an image of one cross pattern
among a plurality of cross patterns of a scene, by one chip of a
plurality of chips of an X-ray detector; determining a relative
position of the one chip relative to the one cross pattern from the
image; wherein relative positions of the plurality of cross
patterns are known with respect to one another.
2. The method of claim 1, wherein the one chip is shifted or
rotated relative to the one cross pattern.
3. The method of claim 1, wherein the one cross pattern comprises
two lines with finite widths.
4. The method of claim 3, wherein determining the relative position
comprises determining two positions of the one chip, wherein the
two positions are on one of the two lines.
5. The method of claim 3, wherein determining the relative position
comprises fitting intensities detected by at least some pixels of
the one chip as a function of location of the one chip.
Description
TECHNICAL FIELD
[0001] The disclosure herein relates to X-ray detectors,
particularly relates to methods for determining misalignment of
X-ray detectors.
BACKGROUND
[0002] X-ray detectors may be devices used to measure the flux,
spatial distribution, spectrum or other properties of X-rays.
[0003] X-ray detectors may be used for many applications. One
important application is imaging. X-ray imaging is a radiography
technique and can be used to reveal the internal structure of a
non-uniformly composed and opaque object such as the human
body.
[0004] Early X-ray detectors for imaging include photographic
plates and photographic films. A photographic plate may be a glass
plate with a coating of light-sensitive emulsion. Although
photographic plates were replaced by photographic films, they may
still be used in special situations due to the superior quality
they offer and their extreme stability. A photographic film may be
a plastic film (e.g., a strip or sheet) with a coating of
light-sensitive emulsion.
[0005] In the 1980s, photostimulable phosphor plates (PSP plates)
became available. A PSP plate may contain a phosphor material with
color centers in its lattice. When the PSP plate is exposed to
X-ray, electrons excited by X-ray are trapped in the color centers
until they are stimulated by a laser beam scanning over the plate
surface. As the plate is scanned by laser, trapped excited
electrons give off light, which is collected by a photomultiplier
tube. The collected light is converted into a digital image. In
contrast to photographic plates and photographic films, PSP plates
can be reused.
[0006] Another kind of X-ray detectors are X-ray image
intensifiers. Components of an X-ray image intensifier are usually
sealed in a vacuum. In contrast to photographic plates,
photographic films, and PSP plates, X-ray image intensifiers may
produce real-time images, i.e., not requiring post-exposure
processing to produce images. X-ray first hits an input phosphor
(e.g., cesium iodide) and is converted to visible light. The
visible light then hits a photocathode (e.g., a thin metal layer
containing cesium and antimony compounds) and causes emission of
electrons. The number of emitted electrons is proportional to the
intensity of the incident X-ray. The emitted electrons are
projected, through electron optics, onto an output phosphor and
cause the output phosphor to produce a visible-light image.
[0007] Scintillators operate somewhat similarly to X-ray image
intensifiers in that scintillators (e.g., sodium iodide) absorb
X-ray and emit visible light, which can then be detected by a
suitable image sensor for visible light. In scintillators, the
visible light spreads and scatters in all directions and thus
reduces spatial resolution. Reducing the scintillator thickness
helps to improve the spatial resolution but also reduces absorption
of X-ray. A scintillator thus has to strike a compromise between
absorption efficiency and resolution.
[0008] Semiconductor X-ray detectors largely overcome this problem
by a direct conversion of X-ray into electric signals. A
semiconductor X-ray detector may include a semiconductor layer that
absorbs X-ray in wavelengths of interest. When an X-ray photon is
absorbed in the semiconductor layer, multiple charge carriers
(e.g., electrons and holes) are generated and swept under an
electric field towards electrical contacts on the semiconductor
layer. Cumbersome heat management required in currently available
semiconductor X-ray detectors (e.g., Medipix) can make a detector
with a large area and a large number of pixels difficult or
impossible to produce.
SUMMARY
[0009] Disclosed herein is a method comprising: obtaining a third
image from a first X-ray detector when the first X-ray detector and
a second X-ray detector are misaligned; determining, based on a
shift between a first image and the third image, a misalignment
between the first X-ray detector and the second X-ray detector;
wherein the first image is an image the first X-ray detector should
capture if the first and the second detectors are aligned.
[0010] According to an embodiment, the method further comprises
obtaining a fourth image from the second X-ray detector when the
first X-ray detector and the second X-ray detector are misaligned;
wherein determining the misalignment is further based on a shift
between a second image and the fourth image; wherein the second
image is an image the second X-ray detector should capture if the
first and the second detectors are aligned.
[0011] According to an embodiment, the first X-ray detector and the
second X-ray detector are stacked.
[0012] According to an embodiment, the first and third images are
formed from a beam of X-ray directed to the first X-ray
detector.
[0013] According to an embodiment, a part of the beam is absorbed
by the first X-ray detector and another part of the beam passes
through the first X-ray detector.
[0014] According to an embodiment, the first and third images are
formed from a scene of X-ray.
[0015] According to an embodiment, the first and third images are
images of one or more structures of the second X-ray detector.
[0016] According to an embodiment, the one or more structures are
gaps between pixels.
[0017] According to an embodiment, the one or more structures are
solder bumps.
[0018] According to an embodiment, the first X-ray detector and the
second X-ray detector are arranged side by side.
[0019] According to an embodiment, the first and third images are
formed from a first beam of X-ray directed to the first X-ray
detector.
[0020] According to an embodiment, the first image is an image of a
part of a scene of X-ray.
[0021] According to an embodiment, the first X-ray detector has
multiple pixels.
[0022] According to an embodiment, the first X-ray detector
comprises: an X-ray absorption layer comprising an electrode; an
electronics layer comprising an electronics system.
[0023] According to an embodiment, the electronics system
comprises: a first voltage comparator configured to compare a
voltage of the electrode to a first threshold; a second voltage
comparator configured to compare the voltage to a second threshold;
a counter configured to register a number of X-ray photons reaching
the X-ray absorption layer; a controller; wherein the controller is
configured to start a time delay from a time at which the first
voltage comparator determines that an absolute value of the voltage
equals or exceeds an absolute value of the first threshold; wherein
the controller is configured to activate the second voltage
comparator during the time delay; wherein the controller is
configured to cause the number registered by the counter to
increase by one, if the second voltage comparator determines that
an absolute value of the voltage equals or exceeds an absolute
value of the second threshold.
[0024] According to an embodiment, the electronics system further
comprises a capacitor module electrically connected to the
electrode of the first X-ray absorption layer, wherein the
capacitor module is configured to collect charge carriers from the
electrode of the first X-ray absorption layer.
[0025] According to an embodiment, the controller is configured to
activate the second voltage comparator at a beginning or expiration
of the time delay.
[0026] According to an embodiment, the electronics system further
comprises a voltmeter, wherein the controller is configured to
cause the voltmeter to measure the voltage upon expiration of the
time delay.
[0027] According to an embodiment, the controller is configured to
determine an X-ray photon energy based on a value of the voltage
measured upon expiration of the time delay.
[0028] According to an embodiment, the controller is configured to
connect the electrode of the first X-ray absorption layer to an
electrical ground.
[0029] According to an embodiment, a rate of change of the voltage
is substantially zero at expiration of the time delay.
[0030] According to an embodiment, a rate of change of the voltage
is substantially non-zero at expiration of the time delay.
[0031] According to an embodiment, the X-ray absorption layer
comprises a diode.
[0032] Disclosed herein is a method comprising: obtaining a
misalignment between a first chip and a second chip; obtaining a
misalignment between a third chip and a fourth chip; wherein the
first chip, the second chip, the third chip and the fourth chip
each are part of a first X-ray detector or a second X-ray detector;
wherein the first and second X-ray detectors are stacked; wherein
the first chip and the fourth chip do not overlap; determining a
misalignment between the first chip and fourth chip using the
misalignment between the first chip and the second chip and using
the misalignment between the third chip and the fourth chip.
[0033] According to an embodiment, the first and fourth chips are
part of the same X-ray detector.
[0034] According to an embodiment, the second chip and the third
chip are the same chip.
[0035] According to an embodiment, the second chip and the third
chip do not overlap.
[0036] Disclosed herein is a method comprising: obtaining an image
of one cross pattern among a plurality of cross patterns of a
scene, by one chip of a plurality of chips of an X-ray detector;
determining a relative position of the one chip relative to the one
cross pattern from the image; wherein relative positions of the
plurality of cross patterns are known with respect to one
another.
[0037] According to an embodiment, the one chip is shifted or
rotated relative to the one cross pattern.
[0038] According to an embodiment, the one cross pattern comprises
two lines with finite widths.
[0039] According to an embodiment, determining the relative
position comprises determining two positions of the one chip,
wherein the two positions are on one of the two lines.
[0040] According to an embodiment, determining the relative
position comprises fitting intensities detected by at least some
pixels of the one chip as a function of location of the one
chip.
BRIEF DESCRIPTION OF FIGURES
[0041] FIG. 1A schematically shows a cross-sectional view of an
X-ray detector, according to an embodiment of the present
teaching.
[0042] FIG. 1B schematically shows a detailed cross-sectional view
of the X-ray detector, according to an embodiment of the present
teaching.
[0043] FIG. 1C schematically shows an alternative detailed
cross-sectional view of the X-ray detector, according to an
embodiment of the present teaching.
[0044] FIG. 1D shows an exemplary top view of a portion of the
X-ray detector, according to an embodiment of the present
teaching.
[0045] FIG. 2 schematically shows a cross-sectional view of an
electronics layer in the X-ray detector, according to an embodiment
of the present teaching.
[0046] FIG. 3A shows that the electronics layer as shown in FIG. 2
allows stacking multiple X-ray detectors, according to an
embodiment of the present teaching.
[0047] FIG. 3B schematically shows a top view of multiple stacked
X-ray detectors, according to an embodiment of the present
teaching.
[0048] FIG. 3C schematically shows an example where the electronics
layer is made on a single substrate and the X-ray absorption layer
includes multiple chips bonded to the electronics layer.
[0049] FIG. 4A schematically shows that two stacked X-ray detectors
and are aligned.
[0050] FIG. 4B schematically shows images the X-ray detectors of
FIG. 4A should capture if the X-ray detectors are aligned.
[0051] FIG. 4C schematically shows that the two X-ray detectors of
FIG. 4A are misaligned.
[0052] FIG. 4D schematically shows images the X-ray detectors of
FIG. 4A capture when the detectors are misaligned.
[0053] FIG. 5A schematically shows two X-ray detectors and arranged
side by side are aligned.
[0054] FIG. 5B schematically shows images the X-ray detectors of
FIG. 5A should capture if the detectors are aligned.
[0055] FIG. 5C schematically shows that the two X-ray detectors of
FIG. 5A are misaligned.
[0056] FIG. 5D schematically shows images the X-ray detectors of
FIG. 5A capture when the X-ray detectors are misaligned.
[0057] FIG. 6A schematically shows that two stacked X-ray detectors
and are aligned.
[0058] FIG. 6B schematically shows images the X-ray detectors of
FIG. 6A should capture if the X-ray detectors are aligned.
[0059] FIG. 6C schematically shows that the two X-ray detectors of
FIG. 6A are misaligned.
[0060] FIG. 6D schematically shows images the X-ray detectors of
FIG. 4A capture when the X-ray detectors are misaligned.
[0061] FIG. 7A schematically shows two X-ray detectors and arranged
side by side are aligned.
[0062] FIG. 7B schematically shows images the X-ray detectors of
FIG. 7A should capture if the X-ray detectors are aligned.
[0063] FIG. 7C schematically shows that the two X-ray detectors of
FIG. 7A are misaligned.
[0064] FIG. 7D schematically shows images the X-ray detectors of
FIG. 7A capture when the X-ray detectors are misaligned.
[0065] FIG. 8A schematically shows that two stacked X-ray detectors
and are aligned.
[0066] FIG. 8B schematically shows an image of structures of one of
the X-ray detectors the other X-ray detector should capture, if the
X-ray detectors of FIG. 8A are aligned.
[0067] FIG. 8C schematically shows that the two X-ray detectors of
FIG. 8A are misaligned.
[0068] FIG. 8D schematically shows an image of structures of one of
the X-ray detectors captured by the other X-ray detector, when the
X-ray detectors of FIG. 8A are misaligned.
[0069] FIG. 9 schematically shows a flow chart for determining
misalignment of a first X-ray detector and a second X-ray detector
with respect to one another.
[0070] FIG. 10 schematically shows that non-overlapping chips of
stacked X-ray detectors may be determined using a chain of
overlapping chips.
[0071] FIG. 11A schematically shows that misalignment of chips of
an X-ray detector with respect to one another may be determined
using a scene with multiple cross patterns.
[0072] FIG. 11B schematically shows the relative position of a
cross pattern and a chip.
[0073] FIG. 11C schematically shows an image of the cross pattern
captured by the chip.
[0074] FIG. 11D shows a portion (marked by the dotted box in FIG.
11C) of a part of the image.
[0075] FIG. 11E schematically shows that, by linearly fitting, the
intensities detected by the pixels in each of the rows as a
function of location may be determined.
[0076] FIG. 12A and FIG. 12B each show a component diagram of an
electronics system of the X-ray detector in FIG. 1A, FIG. 1B or
FIG. 1C.
[0077] FIG. 13 schematically shows a temporal change of the
electric current flowing through an electrode (upper curve) of a
diode or an electrical contact of a resistor of an X-ray absorption
layer exposed to X-ray, the electric current caused by charge
carriers generated by an X-ray photon incident on the X-ray
absorption layer, and a corresponding temporal change of the
voltage of the electrode (lower curve).
[0078] FIG. 14 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by noise (e.g., dark current), and a corresponding temporal change
of the voltage of the electrode (lower curve), in the electronics
system operating in the way shown in FIG. 8.
[0079] FIG. 15 schematically shows a temporal change of the
electric current flowing through an electrode (upper curve) of the
X-ray absorption layer exposed to X-ray, the electric current
caused by charge carriers generated by an X-ray photon incident on
the X-ray absorption layer, and a corresponding temporal change of
the voltage of the electrode (lower curve), when the electronics
system operates to detect incident X-ray photons at a higher
rate.
[0080] FIG. 16 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by noise (e.g., dark current), and a corresponding temporal change
of the voltage of the electrode (lower curve), in the electronics
system operating in the way shown in FIG. 12.
[0081] FIG. 17 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by charge carriers generated by a series of X-ray photons incident
on the X-ray absorption layer, and a corresponding temporal change
of the voltage of the electrode, in the electronics system
operating in the way shown in FIG. 12 with RST expires before
t.sub.e.
DETAILED DESCRIPTION
[0082] Each of PCT Applications Nos. PCT/CN2015/075950,
PCT/CN2015/075941, PCT/CN2015/075944, PCT/CN2015/081126,
PCT/CN2016/073034, PCT/CN2015/075950, PCT/CN2015/089103,
PCT/CN2015/088220, PCT/CN2015/089552, PCT/CN2015/091509,
PCT/CN2015/091928, PCT/CN2015/091927, PCT/CN2015/091943,
PCT/CN2015/096192 and PCT/CN2016/074663 is hereby incorporated by
reference in its entirety.
[0083] FIG. 1A schematically shows a semiconductor X-ray detector
100, according to an embodiment. The semiconductor X-ray detector
100 may include an X-ray absorption layer 110 and an electronics
layer 120 (e.g., an ASIC) for processing or analyzing electrical
signals incident X-ray generates in the X-ray absorption layer 110.
In an embodiment, the semiconductor X-ray detector 100 does not
comprise a scintillator. The X-ray absorption layer 110 may include
a semiconductor material such as, silicon, germanium, GaAs, CdTe,
CdZnTe, or a combination thereof. The semiconductor may have a high
mass attenuation coefficient for the X-ray energy of interest.
[0084] As shown in a detailed cross-sectional view of the detector
100 in FIG. 1B, according to an embodiment, the X-ray absorption
layer 110 may include one or more diodes (e.g., p-i-n or p-n)
formed by a first doped region 111, one or more discrete regions
114 of a second doped region 113. The second doped region 113 may
be separated from the first doped region 111 by an optional the
intrinsic region 112. The discrete regions 114 are separated from
one another by the first doped region 111 or the intrinsic region
112. The first doped region 111 and the second doped region 113
have opposite types of doping (e.g., region 111 is p-type and
region 113 is n-type, or region 111 is n-type and region 113 is
p-type). In the example in FIG. 1B, each of the discrete regions
114 of the second doped region 113 forms a diode with the first
doped region 111 and the optional intrinsic region 112. Namely, in
the example in FIG. 1B, the X-ray absorption layer 110 has a
plurality of diodes having the first doped region 111 as a shared
electrode. The first doped region 111 may also have discrete
portions.
[0085] When an X-ray photon hits the X-ray absorption layer 110
including diodes, the X-ray photon may be absorbed and generate one
or more charge carriers by a number of mechanisms. The charge
carriers may drift to the electrodes of one of the diodes under an
electric field. The field may be an external electric field. The
electrical contact 119B may include discrete portions each of which
is in electrical contact with the discrete regions 114.
[0086] As shown in an alternative detailed cross-sectional view of
the detector 100 in FIG. 1C, according to an embodiment, the X-ray
absorption layer 110 may include a resistor of a semiconductor
material such as, silicon, germanium, GaAs, CdTe, CdZnTe, or a
combination thereof, but does not include a diode.
[0087] When an X-ray photon hits the X-ray absorption layer 110
including a resistor but not diodes, it may be absorbed and
generate one or more charge carriers by a number of mechanisms. The
charge carriers may drift to the electrical contacts 119A and 119B
under an electric field. The electrical contact 119B includes
discrete portions.
[0088] The electronics layer 120 may include an electronics system
121 suitable for processing or interpreting signals generated by
X-ray photons incident on the X-ray absorption layer 110. The
electronics system 121 may include an analog circuitry such as a
filter network, amplifiers, integrators, and comparators, or a
digital circuitry such as a microprocessors, and memory. The
electronics system 121 may include components shared by the pixels
or components dedicated to a single pixel. For example, the
electronics system 121 may include an amplifier dedicated to each
pixel and a microprocessor shared among all the pixels. The
electronics system 121 may be electrically connected to the pixels
by vias 131. Space among the vias may be filled with a filler
material 130, which may increase the mechanical stability of the
connection of the electronics layer 120 to the X-ray absorption
layer 110. Other bonding techniques are possible to connect the
electronics system 121 to the pixels without using vias.
[0089] FIG. 1D shows an exemplary top view of a portion of the
semiconductor X-ray detector 100 with a 4-by-4 array of discrete
regions 114/119B. Charge carriers generated by an X-ray photon
incident around the footprint of one of these discrete regions
114/119B are not substantially shared with another of these
discrete regions 114/119B. The area 150 around a discrete region
114/119B in which substantially all (more than 95%, more than 98%
or more than 99% of) charge carriers generated by an X-ray photon
incident therein flow to the discrete region 114/119B is called a
pixel associated with that discrete region 114/119B. Namely, less
than 5%, less than 2% or less than 1% of these charge carriers flow
beyond the pixel, when the X-ray photon hits inside the pixel. By
measuring the rate of change of the voltage of each of the discrete
regions 114/119B, the number of X-ray photons absorbed (which
relates to the incident X-ray intensity) and/or the energies
thereof in the pixels associated with the discrete regions 114/119B
may be determined. Thus, the spatial distribution (e.g., an image)
of incident X-ray intensity may be determined by individually
measuring the rate of change of the voltage of each one of an array
of discrete regions 114/119B. The pixels may be organized in any
suitable array, such as, a square array, a triangular array and a
honeycomb array. The pixels may have any suitable shape, such as,
circular, triangular, square, rectangular, and hexangular. The
pixels may be individually addressable.
[0090] FIG. 2 schematically shows a cross-sectional view of an
electronics layer 120 in the detector, according to an embodiment
of the present teaching. In this example, the electronics layer 120
comprises a substrate 122 having a first surface 124 and a second
surface 128. A "surface" as used herein is not necessarily exposed,
but can be buried wholly or partially. The electronics layer 120
comprises one or more electric contacts 125 on the first surface
124. The one or more electric contacts 125 may be configured to be
electrically connected to one or more electrodes of the X-ray
absorption layer 110. The electronics system 121 may be in or on
the substrate 122, and electrically connected to the electric
contacts 125.
[0091] The electronics layer 120 comprises one or more transmission
lines 127 electrically connected to the electronics system 121. The
transmission line 127 may be a metal wire on the first surface 124,
such that data processed by the electronics system 121 may be read
out via the transmission line 127. The transmission line 127 may
also be used for control, providing power or input to the
electronics system 121.
[0092] As shown in FIG. 2, there is no electrical component on the
second surface 128, i.e. the bottom side of the substrate 122 does
not have electrical components. Therefore, the substrate 122 can be
thinned (e.g., by grinding the second surface 128). For example,
the substrate may have a thickness of 750 microns or less, 200
microns or less, 100 microns or less, 50 microns or less, 20
microns or less, or 5 microns or less. The substrate 122 may be a
silicon substrate or a substrate or other suitable semiconductor or
insulator. The substrate 122 may be produced by grinding a thicker
substrate to a desired thickness.
[0093] The one or more electric contacts 125 may be a layer of
metal or doped semiconductor. For example, the electric contacts
125 may be gold, copper, platinum, palladium, doped silicon,
etc.
[0094] The transmission lines 127 electrically connect electrical
components (e.g., the electronics system 121) in the substrate 122
to bonding pads at other locations on the substrate 122. In one
embodiment, each transmission lines 127 may be electrically
connected to the electronics system 121 through a via. The
transmission lines 127 may be electrically isolated from the
substrate 122 except at certain vias and certain bonding pads. The
transmission lines 127 may be a material (e.g., Al) with small mass
attenuation coefficient for the X-ray energy of interest. The
transmission lines 127 may redistribute electrical connections to
more convenient locations.
[0095] An X-ray detector may be stacked over another X-ray detector
for various reasons. One of such reasons is to enhance the overall
absorption of the incident X-ray, when one X-ray detector cannot
absorb all the incident X-ray. An X-ray detector, due to its
ability to sense an image formed by the incident X-ray, may have
spatial resolution of a characteristic of the X-ray incident on the
X-ray detector. Namely, the X-ray detector may have the ability to
measure the spatial dependence of the characteristic. The
characteristic is usually intensity but is not necessarily
intensity. Examples of the characteristic may include phase,
polarization, wavelength and frequency. FIGS. 1A-1D and FIG. 2 show
such an X-ray detector with spatial resolution.
[0096] FIG. 3A shows that the electronics layer 120 as shown in
FIG. 2 allows stacking multiple semiconductor X-ray detectors 100
to form a new X-ray detector 399. In each electronics layer 120,
the transmission lines 127 in FIG. 3A can facilitate routing of
signals of all pixels to a side of the wafer for readout. The
signals can be gathered for X-ray detection. The electronics system
121 as described below may have low enough power consumption to
eliminate bulky cooling mechanisms, which also helps to enable the
stacked structure in FIG. 3A. The multiple semiconductor X-ray
detectors 100 in the stack do not have to be identical. For
example, the multiple semiconductor X-ray detectors 100 may differ
in thickness, structure, or material.
[0097] FIG. 3B schematically shows a top view of multiple
semiconductor X-ray detectors 100 stacked, according to an
embodiment of the present teaching. Each layer may have multiple
detectors 100 tiled to cover a larger area. The tiled detectors 100
in one layer can be staggered relative to the tiled detectors 100
in another layer, which may eliminate gaps in which incident X-ray
photons cannot be detected.
[0098] The electronics layer 120, the X-ray absorption layer 110,
or both may include multiple chips. For example, the electronics
layer 120 may be made on a single substrate and the X-ray
absorption layer 110 includes multiple chips bonded to the
electronics layer 120, as FIG. 3C schematically shows.
[0099] Within an X-ray detector made entirely on the same
substrate, the error of the location of a measured value of the
characteristic is usually well controlled. For example, if the
X-ray detector has multiple pixels arranged in an array, their
relative locations to one another may be well defined by the
fabrication process, e.g., by suitable alignment techniques in
lithography. When one X-ray detector is stacked over another X-ray
detector, after at least one of them is already fabricated, the
relative positioning of the one X-ray detector with respect to the
other is more difficult to control. When an X-ray detector includes
multiple chips mounted to another layer, the relative positioning
of the chips is also more difficult to control.
[0100] The misalignment of one X-ray detector relative to anther
X-ray detector may be determined by imaging with one or both of the
X-ray detectors.
[0101] FIG. 4A schematically shows that two stacked X-ray detectors
410 and 420 are aligned. Each of the detectors 410 and 420 may have
multiple pixels. Within each of the detectors 410 and 420, the
positions of the pixels relative to one another may be known. When
a beam of X-ray is directed to the detector 410, a part of the beam
of X-ray is absorbed and detected by the detector 410 and another
part of the beam of X-ray passes through the detector 410 and is
detected by the detector 420.
[0102] FIG. 4B schematically shows images 410A and 420A the
detectors 410 and 420 respectively should capture from the beam of
X-ray if the detectors 410 and 420 are aligned.
[0103] FIG. 4C schematically shows that the detectors 410 and 420
are misaligned and FIG. 4D schematically shows images 410B and 420B
the detectors 410 and 420 respectively capture from the beam of
X-ray when the detectors 410 and 420 are misaligned. The
misalignment of the detectors 410 and 420 with respect to each
other can be obtained from the shift (e.g., as marked by arrow 412)
between the images 410A and 410B, the shift between the images 420A
and 420B, or both.
[0104] FIG. 5A schematically shows two X-ray detectors 510 and 520
arranged side by side are aligned. Each of the detectors 510 and
520 may have multiple pixels. Within each of the detectors 510 and
520, the positions of the pixels relative to one another may be
known. When two beams of X-ray are directed the detectors 510 and
520 respectively, or one beam of X-ray is directed to the detectors
510 and 520 at different time, the detectors 510 and 520 each
capture an image of the beam directed thereto.
[0105] FIG. 5B schematically shows images 510A and 520A the
detectors 510 and 520 respectively should capture from the beam of
X-ray if the detectors 510 and 520 are aligned.
[0106] FIG. 5C schematically shows that the detectors 510 and 520
are misaligned and FIG. 5D schematically shows images 510B and 520B
the detectors 510 and 520 respectively capture from the beams of
X-ray when the detectors 510 and 520 are misaligned. The
misalignment of the detectors 510 and 520 with respect to each
other can be obtained from the shift (e.g., as marked by arrow 512)
between the images 520A and 520B, the shift between the images 510A
and 510B, or both.
[0107] FIG. 6A schematically shows that two stacked X-ray detectors
610 and 620 are aligned. Each of the detectors 610 and 620 may have
multiple pixels. Within each of the detectors 610 and 620, the
positions of the pixels relative to one another may be known. An
image of a scene 650 of X-ray is captured by each of the detectors
610 and 620.
[0108] FIG. 6B schematically shows images 610A and 620A the
detectors 610 and 620 respectively should capture from the scene
650 if the detectors 610 and 620 are aligned.
[0109] FIG. 6C schematically shows that the detectors 610 and 620
are misaligned and FIG. 6D schematically shows images 610B and 620B
the detectors 610 and 620 respectively capture from the scene 650
when the detectors 610 and 620 are misaligned. The misalignment of
the detectors 610 and 620 with respect to each other can be
obtained from the shift (e.g., as marked by arrow 612) between the
images 620A and 620B, the shift between the images 610A and 610B,
or both.
[0110] FIG. 7A schematically shows that two X-ray detectors 710 and
720 arranged side by side are aligned. Each of the detectors 710
and 720 may have multiple pixels. Within each of the detectors 710
and 720, the positions of the pixels relative to one another may be
known. An image of a part of a scene 750 of X-ray is captured by
the detector 710 and an image of another part of the scene 750 is
captured by the detector 720.
[0111] FIG. 7B schematically shows images 710A and 720A the
detectors 710 and 720 respectively should capture from the scene
750 if the detectors 710 and 720 are aligned.
[0112] FIG. 7C schematically shows that the detectors 710 and 720
are misaligned and FIG. 7D schematically shows images 710B and 720B
the detectors 710 and 720 respectively capture from the scene 750
when the detectors 710 and 720 are misaligned. The misalignment of
the detectors 710 and 720 with respect to each other can be
obtained from the shift (e.g., as marked by arrow 712) between the
images 720A and 720B, the shift between the images 710A and 710B,
or both.
[0113] FIG. 8A schematically shows that two stacked X-ray detectors
810 and 820 are aligned. Each of the detectors 810 and 820 may have
multiple pixels. Within each of the detectors 810 and 820, the
positions of the pixels relative to one another may be known. When
X-ray with essentially uniform intensity across the surface of the
detector 810 is directed to the detectors 810 and 820, part of the
X-ray may be absorbed by the detector 810 and another part may be
absorbed by the detector 820. Because the absorption of the X-ray
by the detector 810 may not be spatially uniform, for example, due
to structures of the detector 810 such as gaps 860 between pixels
and solder bumps 850, the detector 820 captures an image of these
structures of the detector 810.
[0114] FIG. 8B schematically shows an image 820A of the structures
of the detector 810 the detector 820 should capture, if the
detectors 810 and 820 are aligned.
[0115] FIG. 8C schematically shows that the detectors 810 and 820
are misaligned and FIG. 8D schematically shows the image 820B of
the structures of the detector 810 captured by the detector 820
when the detectors 810 and 820 are misaligned. The misalignment of
the detectors 810 and 820 with respect to each other can be
obtained from the shift (e.g., as marked by arrow 812) between the
images 820A and 820B.
[0116] FIG. 9 schematically shows a flow chart for determining
misalignment of a first X-ray detector and a second X-ray detector
with respect to one another. In procedure 920, an image 921 from
the first detector is obtained when the first detector and the
second detector are misaligned. Optionally in procedure 940, an
image 941 from the second detector is obtained when the first
detector and the second detector are misaligned. In procedure 950,
a misalignment 951 between the first detector and the second
detector when the first and second detectors are misaligned is
determined based on a shift between the image 921 and an image 911
the first detector should capture if the first detector and the
second detector are aligned, and optionally a shift between the
image 941 and an image 931 the second detector should capture if
the first detector and the second detector are aligned.
[0117] The X-ray detectors depicted in FIGS. 4A-8D and referred to
in FIG. 9 may be the X-ray detector 100 illustrated in FIG. 1A,
FIG. 1B or FIG. 1C.
[0118] An X-ray detector may have multiple chips and the
positioning of the chips may have errors and may not be perfectly
aligned to one another. Not all chips overlap one another.
Misalignment of two chips may be determined from a chain of chips
where each link comprises a pair of overlapping chips. As shown in
FIG. 10, two X-ray detectors 1010 and 1020 are stacked on each
other. The X-ray detector 1010 has multiple chips such as 1010A,
1010B, 1010C and 1010D; the X-ray detector 1020 has multiple chips
such as 1020A, 1020B, 1020C and 1020D. The chips 1010D and 1020C do
not overlap. However, the misalignment of the chips 1010D and 1020C
may be determined from the misalignment of chips 1010D and 1020A,
the misalignment of the chips 1020A and 1010B, the misalignment of
the chips 1010B and 1020B, the misalignment of the chips 1020B and
1010C, and the misalignment of the chips 1010C and 1020C.
[0119] FIG. 11A schematically shows that misalignment of chips 1110
of an X-ray detector with respect to one another may be determined
using a scene 1120 with multiple cross patterns 1125. The relative
positions of the cross patterns with respect to one other are
known. The chips 1110 are positioned such that each chip captures
an image of at least one of the cross patterns, despite that the
chips 1110 are not perfectly aligned with respect to one another.
FIG. 11B schematically shows the relative position of a cross
pattern 1125 and a chip 1110. The chip 1110 may be shifted or
rotated relative to the cross pattern 1125. The cross pattern 1125
may include two lines 1125X and 1125Y that have a finite width and
are perpendicular to each other.
[0120] FIG. 11C schematically shows an image of the cross pattern
1125 captured by the chip 1110. The image includes four parts
1125XA, 1125XB, 1125YA and 1125YB. The parts 1125XA and 1125X6
belong to the image of the line 1125X. The parts 1125XA and 1125X6
are on opposite sides of the cross point. The parts 1125YA and
1125YB belong to the image of the line 1125Y. The parts 1125YA and
1125YB are on opposite sides of the cross point. The positions of
the lines 1125X and 1125Y, and thus the cross pattern 1125 relative
to the chip 1110 may be determined from the four parts 1125XA,
1125XB, 1125YA and 1125YB.
[0121] FIG. 11D shows a portion (marked by the dotted box in FIG.
11C) of the part 1125XA as an example. The portion includes
multiple neighboring rows (e.g., 1111, 1112 and 1113) of pixels. If
the cross pattern is not positioned parallel to the pixels, the
pixels in these rows may detect a gradient of intensities as a
function of location. As shown by FIG. 11E, by linearly fitting,
the intensities detected by the pixels in each of the rows as a
function of location may be determined. The point in between two
rows and at which the two functions of the two rows have the same
intensity is on the line 1125X. In a similar way, at least two
points on the line 1125X and at least two points one the line 1125Y
may be identified, thereby identifying the location of the cross
pattern relative to the chip 1110.
[0122] FIG. 12A and FIG. 12B each show a component diagram of the
electronics system 121, according to an embodiment. The electronics
system 121 may include a first voltage comparator 301, a second
voltage comparator 302, a counter 320, a switch 305, a voltmeter
306 and a controller 310.
[0123] The first voltage comparator 301 is configured to compare
the voltage of an electrode of a diode 300 to a first threshold.
The diode may be a diode formed by the first doped region 111, one
of the discrete regions 114 of the second doped region 113, and the
optional intrinsic region 112. Alternatively, the first voltage
comparator 301 is configured to compare the voltage of an
electrical contact (e.g., a discrete portion of electrical contact
119B) to a first threshold. The first voltage comparator 301 may be
configured to monitor the voltage directly, or calculate the
voltage by integrating an electric current flowing through the
diode or electrical contact over a period of time. The first
voltage comparator 301 may be controllably activated or deactivated
by the controller 310. The first voltage comparator 301 may be a
continuous comparator. Namely, the first voltage comparator 301 may
be configured to be activated continuously, and monitor the voltage
continuously. The first voltage comparator 301 configured as a
continuous comparator reduces the chance that the system 121 misses
signals generated by an incident X-ray photon. The first voltage
comparator 301 configured as a continuous comparator is especially
suitable when the incident X-ray intensity is relatively high. The
first voltage comparator 301 may be a clocked comparator, which has
the benefit of lower power consumption. The first voltage
comparator 301 configured as a clocked comparator may cause the
system 121 to miss signals generated by some incident X-ray
photons. When the incident X-ray intensity is low, the chance of
missing an incident X-ray photon is low because the time interval
between two successive photons is relatively long. Therefore, the
first voltage comparator 301 configured as a clocked comparator is
especially suitable when the incident X-ray intensity is relatively
low. The first threshold may be 5-10%, 10%-20%, 20-30%, 30-40% or
40-50% of the maximum voltage one incident X-ray photon may
generate in the diode or the resistor. The maximum voltage may
depend on the energy of the incident X-ray photon (i.e., the
wavelength of the incident X-ray), the material of the X-ray
absorption layer 110, and other factors. For example, the first
threshold may be 50 mV, 100 mV, 150 mV, or 200 mV.
[0124] The second voltage comparator 302 is configured to compare
the voltage to a second threshold. The second voltage comparator
302 may be configured to monitor the voltage directly, or calculate
the voltage by integrating an electric current flowing through the
diode or the electrical contact over a period of time. The second
voltage comparator 302 may be a continuous comparator. The second
voltage comparator 302 may be controllably activate or deactivated
by the controller 310. When the second voltage comparator 302 is
deactivated, the power consumption of the second voltage comparator
302 may be less than 1%, less than 5%, less than 10% or less than
20% of the power consumption when the second voltage comparator 302
is activated. The absolute value of the second threshold is greater
than the absolute value of the first threshold. As used herein, the
term "absolute value" or "modulus" |x| of a real number x is the
non-negative value of x without regard to its sign. Namely,
x = { x , if .times. .times. x .gtoreq. 0 - x , if .times. .times.
x .ltoreq. 0 . ##EQU00001##
The second threshold may be 200%-300% of the first threshold. The
second threshold may be at least 50% of the maximum voltage one
incident X-ray photon may generate in the diode or resistor. For
example, the second threshold may be 100 mV, 150 mV, 200 mV, 250 mV
or 300 mV. The second voltage comparator 302 and the first voltage
comparator 310 may be the same component. Namely, the system 121
may have one voltage comparator that can compare a voltage with two
different thresholds at different times.
[0125] The first voltage comparator 301 or the second voltage
comparator 302 may include one or more op-amps or any other
suitable circuitry. The first voltage comparator 301 or the second
voltage comparator 302 may have a high speed to allow the system
121 to operate under a high flux of incident X-ray. However, having
a high speed is often at the cost of power consumption.
[0126] The counter 320 is configured to register a number of X-ray
photons reaching the diode or resistor. The counter 320 may be a
software component (e.g., a number stored in a computer memory) or
a hardware component (e.g., a 4017 IC and a 7490 IC).
[0127] The controller 310 may be a hardware component such as a
microcontroller and a microprocessor. The controller 310 is
configured to start a time delay from a time at which the first
voltage comparator 301 determines that the absolute value of the
voltage equals or exceeds the absolute value of the first threshold
(e.g., the absolute value of the voltage increases from below the
absolute value of the first threshold to a value equal to or above
the absolute value of the first threshold). The absolute value is
used here because the voltage may be negative or positive,
depending on whether the voltage of the cathode or the anode of the
diode or which electrical contact is used. The controller 310 may
be configured to keep deactivated the second voltage comparator
302, the counter 320 and any other circuits the operation of the
first voltage comparator 301 does not require, before the time at
which the first voltage comparator 301 determines that the absolute
value of the voltage equals or exceeds the absolute value of the
first threshold. The time delay may expire before or after the
voltage becomes stable, i.e., the rate of change of the voltage is
substantially zero. The phase "the rate of change of the voltage is
substantially zero" means that temporal change of the voltage is
less than 0.1%/ns. The phase "the rate of change of the voltage is
substantially non-zero" means that temporal change of the voltage
is at least 0.1%/ns.
[0128] The controller 310 may be configured to activate the second
voltage comparator during (including the beginning and the
expiration) the time delay. In an embodiment, the controller 310 is
configured to activate the second voltage comparator at the
beginning of the time delay. The term "activate" means causing the
component to enter an operational state (e.g., by sending a signal
such as a voltage pulse or a logic level, by providing power,
etc.). The term "deactivate" means causing the component to enter a
non-operational state (e.g., by sending a signal such as a voltage
pulse or a logic level, by cut off power, etc.). The operational
state may have higher power consumption (e.g., 10 times higher, 100
times higher, 1000 times higher) than the non-operational state.
The controller 310 itself may be deactivated until the output of
the first voltage comparator 301 activates the controller 310 when
the absolute value of the voltage equals or exceeds the absolute
value of the first threshold.
[0129] The controller 310 may be configured to cause the number
registered by the counter 320 to increase by one, if, during the
time delay, the second voltage comparator 302 determines that the
absolute value of the voltage equals or exceeds the absolute value
of the second threshold.
[0130] The controller 310 may be configured to cause the voltmeter
306 to measure the voltage upon expiration of the time delay. The
controller 310 may be configured to connect the electrode to an
electrical ground, so as to reset the voltage and discharge any
charge carriers accumulated on the electrode. In an embodiment, the
electrode is connected to an electrical ground after the expiration
of the time delay. In an embodiment, the electrode is connected to
an electrical ground for a finite reset time period. The controller
310 may connect the electrode to the electrical ground by
controlling the switch 305. The switch may be a transistor such as
a field-effect transistor (FET).
[0131] In an embodiment, the system 121 has no analog filter
network (e.g., a RC network). In an embodiment, the system 121 has
no analog circuitry.
[0132] The voltmeter 306 may feed the voltage it measures to the
controller 310 as an analog or digital signal.
[0133] The system 121 may include a capacitor module 309
electrically connected to the electrode of the diode 300 or which
electrical contact, wherein the capacitor module is configured to
collect charge carriers from the electrode. The capacitor module
can include a capacitor in the feedback path of an amplifier. The
amplifier configured as such is called a capacitive transimpedance
amplifier (CTIA). CTIA has high dynamic range by keeping the
amplifier from saturating and improves the signal-to-noise ratio by
limiting the bandwidth in the signal path. Charge carriers from the
electrode accumulate on the capacitor over a period of time
("integration period") (e.g., as shown in FIG. 13, between to
t.sub.0 t.sub.1, or t.sub.1-t.sub.2). After the integration period
has expired, the capacitor voltage is sampled and then reset by a
reset switch. The capacitor module can include a capacitor directly
connected to the electrode.
[0134] FIG. 13 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by charge carriers generated by an X-ray photon incident on the
diode or the resistor, and a corresponding temporal change of the
voltage of the electrode (lower curve). The voltage may be an
integral of the electric current with respect to time. At time to,
the X-ray photon hits the diode or the resistor, charge carriers
start being generated in the diode or the resistor, electric
current starts to flow through the electrode of the diode or the
resistor, and the absolute value of the voltage of the electrode or
electrical contact starts to increase. At time t.sub.1, the first
voltage comparator 301 determines that the absolute value of the
voltage equals or exceeds the absolute value of the first threshold
V1, and the controller 310 starts the time delay TD1 and the
controller 310 may deactivate the first voltage comparator 301 at
the beginning of TD1. If the controller 310 is deactivated before
t.sub.1, the controller 310 is activated at t.sub.1. During TD1,
the controller 310 activates the second voltage comparator 302. The
term "during" a time delay as used here means the beginning and the
expiration (i.e., the end) and any time in between. For example,
the controller 310 may activate the second voltage comparator 302
at the expiration of TD1. If during TD1, the second voltage
comparator 302 determines that the absolute value of the voltage
equals or exceeds the absolute value of the second threshold at
time t.sub.2, the controller 310 causes the number registered by
the counter 320 to increase by one. At time t.sub.e, all charge
carriers generated by the X-ray photon drift out of the X-ray
absorption layer 110. At time t.sub.s, the time delay TD1 expires.
In the example of FIG. 13, time t.sub.s is after time t.sub.e;
namely TD1 expires after all charge carriers generated by the X-ray
photon drift out of the X-ray absorption layer 110. The rate of
change of the voltage is thus substantially zero at t.sub.s. The
controller 310 may be configured to deactivate the second voltage
comparator 302 at expiration of TD1 or at t.sub.2, or any time in
between.
[0135] The controller 310 may be configured to cause the voltmeter
306 to measure the voltage upon expiration of the time delay TD1.
In an embodiment, the controller 310 causes the voltmeter 306 to
measure the voltage after the rate of change of the voltage becomes
substantially zero after the expiration of the time delay TD1. The
voltage at this moment is proportional to the amount of charge
carriers generated by an X-ray photon, which relates to the energy
of the X-ray photon. The controller 310 may be configured to
determine the energy of the X-ray photon based on voltage the
voltmeter 306 measures. One way to determine the energy is by
binning the voltage. The counter 320 may have a sub-counter for
each bin. When the controller 310 determines that the energy of the
X-ray photon falls in a bin, the controller 310 may cause the
number registered in the sub-counter for that bin to increase by
one. Therefore, the system 121 may be able to detect an X-ray image
and may be able to resolve X-ray photon energies of each X-ray
photon.
[0136] After TD1 expires, the controller 310 connects the electrode
to an electric ground for a reset period RST to allow charge
carriers accumulated on the electrode to flow to the ground and
reset the voltage. After RST, the system 121 is ready to detect
another incident X-ray photon. Implicitly, the rate of incident
X-ray photons the system 121 can handle in the example of FIG. 13
is limited by 1/(TD1+RST). If the first voltage comparator 301 has
been deactivated, the controller 310 can activate it at any time
before RST expires. If the controller 310 has been deactivated, it
may be activated before RST expires.
[0137] FIG. 14 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by noise (e.g., dark current, background radiation, scattered
X-rays, fluorescent X-rays, shared charges from adjacent pixels),
and a corresponding temporal change of the voltage of the electrode
(lower curve), in the system 121 operating in the way shown in FIG.
13. At time to, the noise begins. If the noise is not large enough
to cause the absolute value of the voltage to exceed the absolute
value of V1, the controller 310 does not activate the second
voltage comparator 302. If the noise is large enough to cause the
absolute value of the voltage to exceed the absolute value of V1 at
time t.sub.1 as determined by the first voltage comparator 301, the
controller 310 starts the time delay TD1 and the controller 310 may
deactivate the first voltage comparator 301 at the beginning of
TD1. During TD1 (e.g., at expiration of TD1), the controller 310
activates the second voltage comparator 302. The noise is very
unlikely large enough to cause the absolute value of the voltage to
exceed the absolute value of V2 during TD1. Therefore, the
controller 310 does not cause the number registered by the counter
320 to increase. At time t.sub.e, the noise ends. At time t.sub.s,
the time delay TD1 expires. The controller 310 may be configured to
deactivate the second voltage comparator 302 at expiration of TD1.
The controller 310 may be configured not to cause the voltmeter 306
to measure the voltage if the absolute value of the voltage does
not exceed the absolute value of V2 during TD1. After TD1 expires,
the controller 310 connects the electrode to an electric ground for
a reset period RST to allow charge carriers accumulated on the
electrode as a result of the noise to flow to the ground and reset
the voltage. Therefore, the system 121 may be very effective in
noise rejection.
[0138] FIG. 15 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by charge carriers generated by an X-ray photon incident on the
diode or the resistor, and a corresponding temporal change of the
voltage of the electrode (lower curve), when the system 121
operates to detect incident X-ray photons at a rate higher than
1/(TD1+RST). The voltage may be an integral of the electric current
with respect to time. At time to, the X-ray photon hits the diode
or the resistor, charge carriers start being generated in the diode
or the resistor, electric current starts to flow through the
electrode of the diode or the electrical contact of resistor, and
the absolute value of the voltage of the electrode or the
electrical contact starts to increase. At time t.sub.1, the first
voltage comparator 301 determines that the absolute value of the
voltage equals or exceeds the absolute value of the first threshold
V1, and the controller 310 starts a time delay TD2 shorter than
TD1, and the controller 310 may deactivate the first voltage
comparator 301 at the beginning of TD2. If the controller 310 is
deactivated before t.sub.1, the controller 310 is activated at
t.sub.1. During TD2 (e.g., at expiration of TD2), the controller
310 activates the second voltage comparator 302. If during TD2, the
second voltage comparator 302 determines that the absolute value of
the voltage equals or exceeds the absolute value of the second
threshold at time t.sub.2, the controller 310 causes the number
registered by the counter 320 to increase by one. At time t.sub.e,
all charge carriers generated by the X-ray photon drift out of the
X-ray absorption layer 110. At time t.sub.h, the time delay TD2
expires. In the example of FIG. 15, time t.sub.h is before time
t.sub.e; namely TD2 expires before all charge carriers generated by
the X-ray photon drift out of the X-ray absorption layer 110. The
rate of change of the voltage is thus substantially non-zero at tn.
The controller 310 may be configured to deactivate the second
voltage comparator 302 at expiration of TD2 or at t.sub.2, or any
time in between.
[0139] The controller 310 may be configured to extrapolate the
voltage at t.sub.e from the voltage as a function of time during
TD2 and use the extrapolated voltage to determine the energy of the
X-ray photon.
[0140] After TD2 expires, the controller 310 connects the electrode
to an electric ground for a reset period RST to allow charge
carriers accumulated on the electrode to flow to the ground and
reset the voltage. In an embodiment, RST expires before t.sub.e.
The rate of change of the voltage after RST may be substantially
non-zero because all charge carriers generated by the X-ray photon
have not drifted out of the X-ray absorption layer 110 upon
expiration of RST before t.sub.e. The rate of change of the voltage
becomes substantially zero after t.sub.e and the voltage stabilized
to a residue voltage VR after t.sub.e. In an embodiment, RST
expires at or after t.sub.e, and the rate of change of the voltage
after RST may be substantially zero because all charge carriers
generated by the X-ray photon drift out of the X-ray absorption
layer 110 at t.sub.e. After RST, the system 121 is ready to detect
another incident X-ray photon. If the first voltage comparator 301
has been deactivated, the controller 310 can activate it at any
time before RST expires. If the controller 310 has been
deactivated, it may be activated before RST expires.
[0141] FIG. 16 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by noise (e.g., dark current, background radiation, scattered
X-rays, fluorescent X-rays, shared charges from adjacent pixels),
and a corresponding temporal change of the voltage of the electrode
(lower curve), in the system 121 operating in the way shown in FIG.
15. At time to, the noise begins. If the noise is not large enough
to cause the absolute value of the voltage to exceed the absolute
value of V1, the controller 310 does not activate the second
voltage comparator 302. If the noise is large enough to cause the
absolute value of the voltage to exceed the absolute value of V1 at
time t.sub.1 as determined by the first voltage comparator 301, the
controller 310 starts the time delay TD2 and the controller 310 may
deactivate the first voltage comparator 301 at the beginning of
TD2. During TD2 (e.g., at expiration of TD2), the controller 310
activates the second voltage comparator 302. The noise is very
unlikely large enough to cause the absolute value of the voltage to
exceed the absolute value of V2 during TD2. Therefore, the
controller 310 does not cause the number registered by the counter
320 to increase. At time t.sub.e, the noise ends. At time t.sub.h,
the time delay TD2 expires. The controller 310 may be configured to
deactivate the second voltage comparator 302 at expiration of TD2.
After TD2 expires, the controller 310 connects the electrode to an
electric ground for a reset period RST to allow charge carriers
accumulated on the electrode as a result of the noise to flow to
the ground and reset the voltage. Therefore, the system 121 may be
very effective in noise rejection.
[0142] FIG. 17 schematically shows a temporal change of the
electric current flowing through the electrode (upper curve) caused
by charge carriers generated by a series of X-ray photons incident
on the diode or the resistor, and a corresponding temporal change
of the voltage of the electrode (lower curve), in the system 121
operating in the way shown in FIG. 15 with RST expires before
t.sub.e. The voltage curve caused by charge carriers generated by
each incident X-ray photon is offset by the residue voltage before
that photon. The absolute value of the residue voltage successively
increases with each incident photon. When the absolute value of the
residue voltage exceeds V1 (see the dotted rectangle in FIG. 17),
the controller starts the time delay TD2 and the controller 310 may
deactivate the first voltage comparator 301 at the beginning of
TD2. If no other X-ray photon incidence on the diode or the
resistor during TD2, the controller connects the electrode to the
electrical ground during the reset time period RST at the end of
TD2, thereby resetting the residue voltage. The residue voltage
thus does not cause an increase of the number registered by the
counter 320.
[0143] While various aspects and embodiments have been disclosed
herein, other aspects and embodiments will be apparent to those
skilled in the art. The various aspects and embodiments disclosed
herein are for purposes of illustration and are not intended to be
limiting, with the true scope and spirit being indicated by the
following claims.
* * * * *