U.S. patent application number 17/202334 was filed with the patent office on 2021-07-01 for socket.
This patent application is currently assigned to YOKOWO CO., LTD.. The applicant listed for this patent is YOKOWO CO., LTD.. Invention is credited to Takayoshi OKUNO, Kenichi SATO, Tsugio YAMAMOTO.
Application Number | 20210199689 17/202334 |
Document ID | / |
Family ID | 1000005462665 |
Filed Date | 2021-07-01 |
United States Patent
Application |
20210199689 |
Kind Code |
A1 |
YAMAMOTO; Tsugio ; et
al. |
July 1, 2021 |
SOCKET
Abstract
A socket includes: a contact probe; and an insulating support
body supporting the contact probe. The contact probe includes: a
first plunger to be connected with an object to be inspected; a
second plunger to be connected with an inspecting board; and a
spring configured to urge the first plunger and the second plunger
in a direction apart from each other. In a state where a tip end of
the first plunger is released, a projecting amount of the second
plunger from the insulating support body is zero with a natural
length of the spring.
Inventors: |
YAMAMOTO; Tsugio;
(Tomioka-shi, JP) ; SATO; Kenichi; (Tomioka-shi,
JP) ; OKUNO; Takayoshi; (Tomioka-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
YOKOWO CO., LTD. |
Tokyo |
|
JP |
|
|
Assignee: |
YOKOWO CO., LTD.
Tokyo
JP
|
Family ID: |
1000005462665 |
Appl. No.: |
17/202334 |
Filed: |
March 15, 2021 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
15441366 |
Feb 24, 2017 |
10976346 |
|
|
17202334 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G01R 31/2886 20130101;
G01R 1/0433 20130101; G01R 1/06722 20130101; G01R 1/0441
20130101 |
International
Class: |
G01R 1/04 20060101
G01R001/04; G01R 1/067 20060101 G01R001/067; G01R 31/28 20060101
G01R031/28 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 29, 2016 |
JP |
2016-038208 |
Claims
1. A socket comprising: a contact probe; and an insulating support
body supporting the contact probe, wherein the contact probe
includes: a first plunger; a second plunger; and a spring
configured to urge the first plunger and the second plunger in a
direction apart from each other, in a state where a tip end of the
first plunger is released, the second plunger is configured not to
be projected from the insulating support body, the spring is loaded
in the contact probe, in a state where movements of the first
plunger and the second plunger in the direction apart from each
other are limited, without depending on the insulating support
body, and one of the first plunger and the second plunger includes
a rod-shaped part which passes through the spring, and the other of
the first plunger and the second plunger is provided with a lock
part which is engaged with the rod-shaped part.
2. The socket according to claim 1, wherein, an urging force of the
spring is equal to or less than 10 gf, in a state where the tip end
of the first plunger is released, and the second plunger is not
projected from the insulating support body.
3. The socket according to claim 1, wherein, an urging force of the
spring is equal to or less than one third of an urging force of the
spring at a time of inspection, in a state where the tip end of the
first plunger is released the second plunger is not projected from
the insulating support body.
4. The socket according to claim 1, wherein the first plunger is
connected with an object to be inspected, and the second plunger is
connected with an inspecting board.
Description
CROSS-REFERENCE TO RELATED APPLICATION(S)
[0001] This is a divisional of Ser. No. 15/441,366 filed on Feb.
24, 2017, and claims the benefit of priority from Japanese patent
application No. 2016-038208, filed on Feb. 29, 2016, the entire
contents of which are incorporated herein by reference.
BACKGROUND
[0002] The present invention relates to a socket in which contact
probes are supported by an insulating support body.
[0003] On occasion of inspecting an object to be inspected such is
as a semiconductor integrated circuit, a socket in which contact
probes are supported by an insulating support body is used, for the
purpose of connecting the object to be inspected with an inspecting
board of a measuring instrument. Each of the contact probes has a
first plunger adapted to be connected with the object to be
inspected, a second plunger adapted to be connected with the
inspecting board, and a spring for urging the first and second
plungers so as to be separated from each other. In the related art,
for example, disclosed in JP-A-2015-215223, the socket has been
designed so that when the socket is set on the inspecting board,
the second plunger is pressed with an electrode on the inspecting
board thereby to retreat, while compressing the spring. For this
purpose, in a state where a tip end of the first plunger is
released (in a state where no external force is applied to the tip
end of the first plunger), a contact force of a certain value or
more is generated between the second plunger and the electrode on
the inspecting board, by an urging force of the spring. This
contact force (load) is called as a preload, and it has been
considered that the preload attributes to improvement of contact
stability, and reduction and stabilization of contact
resistance.
[0004] The preload will be a cause for a warp of the insulating
support body for supporting the contact probes. It is required to
suppress the warp of the insulating support body so as to be equal
to or less than a predetermined value, from a viewpoint of design.
On the other hand, in a recent semiconductor inspecting field, in
addition to a conventional request for cost reduction, it is
strongly requested to increase the number of pins for
multifunction, and to realize downsizing for dealing with high
frequency. An increase of the number of the pins incurs an increase
of the preload of the socket in its entirety, and enlarges the warp
of the insulating support body. Moreover, for realizing the
downsizing, the insulating support body must have a smaller wall
thickness, which also enlarges the warp of the insulating support
body. Further, from a view point of the cost reduction, it is
actually impossible to use the material having high rigidity in
which a warp is unlikely to occur, as the material for the
insulating support body. For these reasons, in the conventional
concept of design, it has been impossible to comply with the
requests for increasing the number of the pins, realizing the
downsizing, and achieving the cost reduction, due to the warp of
the insulating support body.
SUMMARY
[0005] The present invention has been made in view of the above
described circumstances. It is an object of the present invention
to provide a socket which is advantageous in increasing the number
of pins and in realizing downsizing, and also capable of achieving
cost reduction.
[0006] According to a first aspect of the present invention, there
is provided a socket including: a contact probe; and an insulating
support body supporting the contact probe, wherein the contact
probe has: a first plunger to be connected with an object to be
inspected; a second plunger to be connected with an inspecting
board; and a spring configured to urge the first plunger and the
second plunger in a direction apart from each other, and, in a
state where a tip end of the first plunger is released, a
projecting amount of the second plunger from the insulating support
body can be made zero with a natural length of the spring.
[0007] The spring may be loaded in the contact probe, in a state
where movements of the first plunger and the second plunger in the
direction apart from each other are limited, without depending on
the insulating support body.
[0008] The contact probe may have an electrically conductive tube
which is integrally provided with the first plunger, the second
plunger may be provided inside the electrically conductive tube, in
a state prevented from dropping from the electrically conductive
tube, and the spring may be provided inside the electrically
conductive tube.
[0009] One of the first plunger and the second plunger may have a
rod-shaped part which passes through the spring, and the other of
the first plunger and the second plunger may be provided with a
lock part which is engaged with the rod-shaped part.
[0010] In a state where the tip end of the first plunger is
released, and a projecting amount of the second plunger from the
insulating support body is zero, an urging force of the spring may
be equal to or less than 10gf.
[0011] In a state where the tip end of the first plunger is
released, and a projecting amount of the second plunger from the
insulating support body is zero, an urging force of the spring may
be equal to or less than one third of an urging force of the spring
at a time of inspection.
[0012] According to a second aspect of the present invention, there
is provided a socket including: a contact probe; and an insulating
support body supporting the contact probe, wherein the contact
probe has: a first plunger to be connected with an object to be
inspected; and a spring to be connected with an inspecting board
and configured to urge the first plunger in a direction of
projecting a tip end of the first plunger from the insulating
support body, and, in a state where the tip end of the first
plunger is released, a projecting amount of the spring from the
insulating support body can be made zero with a natural length of
the spring.
[0013] In a state where the tip end of the first plunger is
released, and the projecting amount of the spring from the
insulating support body is zero, an urging force of the spring may
be equal to or less than 10gf.
[0014] In the state where the tip end of the first plunger is
released, and the projecting amount of the spring from the
insulating support body is zero, an urging force of the spring may
be equal to or less than one third of an urging force of the spring
at a time of inspection.
[0015] Any arbitrary combination of the above described constituent
elements, and descriptions of the present invention which are
converted between methods and systems are also deemed effective as
aspects of the present invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0016] FIG. 1A is a sectional view of a socket 1 in Embodiment 1
according to the present invention, in a state where both tip ends
of a first plunger 10 and a second plunger 20 are released. FIG. 1B
is a sectional view of the socket 1 in a state where the socket 1
is mounted on an inspecting board 8, and the tip end of the first
plunger 10 is released. FIG. 1C is a sectional view of the socket 1
in a state where the socket 1 is mounted on the inspecting board 8,
and a solder bump 9a on a device 9 to be inspected is pressed
against the tip end of the first plunger 10.
[0017] FIG. 2 is a graph showing a relation between a stroke of a
contact probe 70 and an urging force (spring pressure) of a spring
30 in the socket 1, together with a relation in a comparative
example.
[0018] FIG. 3 is a graph showing a relation between an initial
spring pressure of the spring 30 in the socket 1 and a depth of a
pressure mark which is formed in an electrode 8a on the inspecting
board 8.
[0019] FIG. 4A is a sectional view of a socket 2 in Embodiment 2
according to the present invention, in a state where both tip ends
of a first plunger 10 and a second plunger 20 are released. FIG. 4B
is a sectional view of a socket 3 in Embodiment 3 according to the
invention, in a state where both tip ends of a first plunger 10 and
a second plunger 20 are released. FIG. 4C is a sectional view of a
socket 4 in Embodiment 4 according to the invention, in a state
where both tip ends of a first plunger 10 and a second plunger 20
are released.
[0020] FIG. 5A is a sectional view of a socket 5 in Embodiment 5
according to the invention, in a state where both tip ends of a
first plunger 10 and a spring 30 are released. FIG. 5B is a
sectional view of a socket 6 in Embodiment 6 according to the
invention, in a state where both tip ends of a first plunger 10 and
a spring 30 are released.
[0021] FIG. 6A is a sectional view of a socket 7 in a comparative
example, in a state where both tip ends of a first plunger 10 and a
second plunger 20 are released. FIG. 6B is a sectional view of the
socket 7 in a state where the socket 7 is mounted on the inspecting
board 8, and the tip end of the first plunger 10 is released. FIG.
6C is a sectional view of the socket 7 in a state where the socket
7 is mounted on the inspecting board 8, and the solder bump 9a on
the device 9 to be inspected is pressed against the tip end of the
first plunger 10.
DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0022] Hereinafter, preferred embodiments of the present invention
will be described in detail with reference to the drawings.
Identical or equivalent components, members, and the like shown in
the respective drawings are denoted with the same reference
numerals, and duplicated descriptions are appropriately omitted.
The embodiments do not limit the invention, but only exemplify the
invention and all the features described in the embodiments, and
their combinations are not necessarily essential in the
invention.
Embodiment 1
[0023] As shown in FIG. 1A, a socket 1 in this embodiment includes
a contact probe 70, and an insulating support body 50 for
supporting the contact probe 70. Although FIG. 1A shows the only
one contact probe 70, the socket 1 may be of a multi-pin type in
which a number of the contact probes 70 are supported by the common
insulating support body 50. The insulating support body 50 is
formed of, for example, resin, and provided with a through hole 53
for containing the contact probe 70. The insulating support body 50
includes a first insulating support body 51 and a second insulating
support body 52 which are combined with each other, and secured
with a screw or the like.
[0024] The contact probe 70 has a first plunger 10, a second
plunger 20, a spring 30, and an electrically conductive tube 40.
Both the first plunger 10 and the second plunger 20 are formed of
metallic material such as copper or copper alloy. The first plunger
10 is adapted to be connected with an object 9 to be inspected such
as a semiconductor integrated circuit, and the second plunger 20 is
adapted to be connected with an inspecting board 8 of a measuring
instrument. The spring 30 is a coil spring formed of general
material such as a piano wire, a stainless steel wire, and urges
the first plunger 10 and the second plunger 20 in a direction apart
from each other.
[0025] The first plunger 10 has a tip end side columnar part 11, a
flange part 12, and a base end side columnar part 13, in order from
the tip end side. A tip end of the tip end side columnar part 11
functions as a contact part 11a, and comes into contact with a
solder bump 9a on the object 9 to be inspected, at a time of
inspection (FIG. 1C). The flange part 12 has a larger diameter than
the tip end side columnar part 11. The flange part 12 is engaged
with a step part 53a which is formed in the through hole 53 in the
first insulating support body 51 of the insulating support body 50
thereby to avoid dropping the first plunger 10 from the insulating
support body 50, and at the same time, restricts a projecting
amount of the first plunger 10 from the insulating support body 50.
Moreover, the flange part 12 is in contact with one end of the
electrically conductive tube 40. The base end side columnar part 13
has a smaller diameter than the flange part 12, and is positioned
inside the electrically conductive tube 40. The base end side
columnar part 13 is provided with a neck part 13a in a shape of a
groove making a circle in a circumferential direction. The neck
part 13a is engaged with a lock part 41 of the electrically
conductive tube 40 thereby to fix the first plunger 10 to the
electrically conductive tube 40, and enables the electrically
conductive tube 40 to move (slide) integrally with the first
plunger 10, in a longitudinal direction of its own. The base end
side columnar part 13 is in contact with one end of the spring
30.
[0026] The second plunger 20 has a tip end side columnar part 21, a
taper part 22, an intermediate columnar part 23, and a base end
side columnar part 24, in order from the tip end side. A tip end of
the tip end side columnar part 21 comes into contact with an
electrode 8a on the inspecting board 8, at the time of inspection
(FIG. 1C). The taper part 22 is engaged with a step part 53b which
is formed in the through hole 53 in the second insulating support
body 52 of the insulating support body 50 thereby to restrict a
projecting amount of the second plunger 20 from the insulating
support body 50. The intermediate columnar part 23 has the same
diameter as a base end of the taper part 22, and a smaller diameter
than an inner diameter of a lock part 42 of the electrically
conductive tube 40. The base end side columnar part 24 has a larger
diameter than the intermediate columnar part 23, and a larger
diameter than the inner diameter of the lock part 42, and is
positioned inside the electrically conductive tube 40. The base end
side columnar part 24 is engaged with the lock part 42 of the
electrically conductive tube 40 thereby to avoid dropping the
second plunger 20 from the electrically conductive tube 40. The
base end side columnar part 24 is in contact with the other end of
the spring 30.
[0027] One end of the spring 30 is in contact with an end face of
the base end side columnar part 13 of the first plunger 10, and the
other end of the spring 30 is in contact with an end face of the
base end side columnar part 24 of the second plunger 20. When the
spring 30 is compressed at the time of inspection, as shown in FIG.
1C, a contact force against the solder bump 9a on the object 9 to
be inspected is applied to the first plunger 10, and a contact
force against the electrode 8a on the inspecting board 8 is applied
to the second plunger 20.
[0028] The electrically conductive tube 40 holds therein the base
end side columnar part 13 of the first plunger 10 and the base end
side columnar part 24 of the second plunger 20. The lock part 41 of
the electrically conductive tube 40 at a side of the first plunger
10 is a part of the electrically conductive tube 40 which is
collapsed inward from outside, by crimping work or so. The lock
part 41 is engaged with the neck part 13a of the base end side
columnar part 13 of the first plunger 10 thereby to fix the first
plunger 10, and enables the electrically conductive tube 40 to move
(slide) in the longitudinal direction of its own, integrally with
the first plunger 10. One end of the electrically conductive tube
40 is in contact with the flange part 12 of the first plunger 10.
The lock part 42 at the other end of the electrically conductive
tube 40 is an open end of the electrically conductive tube 40 at a
side of the second plunger which is reduced in diameter by drawing
work or so, and is engaged with the base end side columnar part 24
of the second plunger 20 thereby to avoid dropping the second
plunger 20. In this embodiment, the electrically conductive tube 40
can move inside the through hole 53 in the insulating support body
50 in the longitudinal direction of its own.
[0029] FIG. 1A shows a state where both the tip ends of the first
plunger 10 and the second plunger 20 are released, and the
electrically conductive tube 40 is at the uppermost position in the
drawing, inside the through hole 53. In this embodiment, the tip
end of the second plunger 20 coincides in position with a face of
the insulating support body 50 at a side of the inspecting board 8,
in a state as shown in FIG. 1A. Specifically, in a state where the
tip end of the first plunger 10 is released (in a state where no
external force is exerted on the tip end of the first plunger 10),
it is possible to eliminate the projecting amount of the second
plunger 20 from the insulating support body 50, without compressing
the spring 30. Therefore, when the socket 1 is mounted on the
inspecting board 8 as shown in FIG. 1B, the urging force of the
spring 30 will not function as a force (load) of the second plunger
20 for pressing the electrode 8a on the inspecting board 8 (a
preload is zero).
[0030] A product of the contact probe 70 has respective outer
sizes, for example, as described below.
[0031] A total length of the contact probe 70: 4.85 mm
[0032] An outer diameter of the tip end side columnar part 11: 0.23
mm
[0033] An outer diameter of the base end side columnar part 21: 0.1
mm
[0034] An outer diameter of the electrically conductive tube 40:
0.31 mm
[0035] A length of the electrically conductive tube 40: 3.05 mm
[0036] In a case where the inspection is carried out using the
socket 1, the socket 1 is mounted on the inspecting board 8, by
positioning the contact probe 70 in alignment with the electrode 8a
on the inspecting board 8 (FIG. 1A to FIG. 1B). Then, the object 9
to be inspected is made opposed to the socket 1 so that the contact
probe 70 and the solder bump 9a on the object 9 to be inspected
come into alignment with each other, and thereafter, the object 9
to be inspected is moved toward the socket 1 (FIG. 1B to FIG. 1C).
As a result, the first plunger 10 is pressed with the solder bump
9a, and moved to the base end side while compressing the spring 30,
thereby to bring the contact part 11a at the tip end of the first
plunger 10 into elastic contact with the solder bump 9a. In this
state, the inspection of the object 9 to be inspected is carried
out. The state as shown in FIG. 1B is referred to as "an on-board
state", and the state as shown in FIG. 1C is referred to as "an
inspecting state".
[0037] FIG. 2 is a graph showing a relation between a stroke of the
contact probe 70 (a probe stroke) and an urging force of the spring
30 (a spring pressure) in the socket 1, together with the relation
in a comparative example. A structure of the comparative example is
shown in FIGS. 6A to 6C. Respective states in FIGS. 6A to 6C
correspond to those in FIGS. 1A to 1C. Specifically, FIG. 6A shows
a state where both the tip ends of the first plunger 10 and the
second plunger 20 are released, FIG. 6B shows a state where the
socket 7 is positioned and mounted on the inspecting board 8 ("the
on-board state"), and FIG. 6C shows a state where the first plunger
10 is brought into elastic contact with the object 9 to be
inspected for carrying out the inspection ("the inspecting state").
The socket 7 in the comparative example is different from the
socket 1 in this embodiment, in that the intermediate columnar part
23 of the second plunger 20 is longer, as compared with the socket
1 in this embodiment, the tip end of the second plunger 20 projects
from the insulating support body 50, even in a state where the
electrically conductive tube 40 is at the uppermost position inside
the through hole 53, and further, the load characteristics of the
spring 30 is different. In the other respects, the socket 7 is
substantially the same as the socket 1. When the socket 7 in the
comparative example is mounted on the inspecting board 8 as shown
in FIG. 6B, the second plunger 20 is pressed with the electrode 8a
on the inspecting board 8 thereby to move to the base end side
while compressing the spring 30. Therefore, in a state where the
tip end of the first plunger 10 is released, the urging force of
the spring 30 functions as such a force (load) that the tip end of
the second plunger 20 pushes the electrode 8a on the inspecting
board 8 (there is a preload). Specifically, in the socket 7 in the
comparative example, in the state where the tip ends of both the
first plunger 10 and the second plunger 20 are released, as shown
in FIG. 6A, the urging force of the spring 30 (the initial spring
pressure) is 10gf, as shown in FIG. 2. In the state where the
socket 7 is mounted on the inspecting board 8, as shown in FIG. 6B,
that is, in "the on-board state" (the spring 30 is compressed from
the state in FIG. 6A by 0.2 mm), the spring force of the spring 30
(the urging force) is 20gf, and at the time of inspection as shown
in FIG. 6C, that is, in "the inspecting state" (the spring 30 is
further compressed from the state as shown in FIG. 6B by 0.2 mm),
the spring pressure of the spring 30 is 30gf. The spring pressure
20gf of the spring 30 in "the on-board state" functions, as it is,
as the force (load) for pushing the electrode, the so-called
preload. Moreover, when the solder bump 9a on the object 9 to be
inspected is first contacted with the first plunger 10 for
inspection, the urging force which is exerted on the solder bump 9a
is also 20gf.
[0038] On the other hand, in the socket 1 in this embodiment, in
the state where both the tip ends of the first plunger 10 and the
second plunger 20 are released, as shown in FIG. 1A, the urging
force of the spring 30 (the initial spring pressure) is 0gf. In the
state where the socket 1 is mounted on the inspecting board 8, as
shown in FIG. 1B, that is, in "the on-board state", the urging
force of the spring 30 (the spring pressure) is the same as the
urging force of the spring 30 in the state as shown in FIG. 1A, and
at the time of inspection as shown in FIG. 1C, that is, in "the
inspecting state" (the spring 30 is further compressed from the
state as shown in FIG. 1B by 0.2 mm), the spring pressure of the
spring 30 is 30gf. In "the on-board state", the spring 30 is not
compressed (the preload stroke in the comparative example is not
present), and therefore, the force for pushing the electrode (the
load), the so-called preload is zero. A case where the initial
spring pressure of the spring 30 is 0gf is the states as shown in
FIGS. 1A and 1B in which the spring 30 has a natural length. As
described below, in a case where the initial spring pressure of the
spring 30 is increased from 0gf to 10gf, the spring 30 is
compressed from the natural length in the state as shown in FIGS.
1A and 1B. Moreover, when the solder bump 9a on the object 9 to be
inspected is first contacted with the first plunger 10 for
inspection, the urging force exerted on the solder bump 9a is 0gf,
which is the initial spring pressure of the spring 30. In this
manner, the spring 30 in the comparative example has such load
characteristics that the initial spring pressure before the preload
stroke compression is 10gf, the spring pressure becomes 20gf, when
the spring is compressed by 0.2 mm, that is, the preload stroke, in
"the on-board state", and further, the spring pressure becomes
30gf, when the spring is compressed by 0.2 mm, that is, the
operating stroke, in "the inspecting state". In contrast, the
spring 30 in the present embodiment has such load characteristics
that because the preload is zero, the spring pressure is 0gf in
"the on-board state", that is, the initial spring pressure, and the
spring pressure becomes 30gf, when the spring is compressed by 0.2
mm, that is, the operating stroke, in "the inspecting state".
Specifically, the spring 30 in the present embodiment has such the
load characteristics that an increasing amount of the load with
respect to the stroke is larger, as compared with the spring 30 in
the comparative example, as apparent from FIG. 2.
[0039] FIG. 3 is a graph showing a relation between the initial
spring pressure of the spring 30 and a depth of a pressure mark
which is formed in the electrode 8a on the inspecting board 8 in
the socket 1. In this embodiment, the urging force of the spring 30
does not function as the contact force (the preload) between the
tip end of the second plunger 20 and the electrode 8a on the
inspecting board 8, in the state as shown in FIG. 1B, as described
above. For this reason, it is concerned that when the first plunger
10 is pressed with the solder bump 9a on the object 9 to be
inspected thereby to compress the spring 30 during process of the
inspection, an impact load attributed to the urging force of the
spring 30 is generated between the tip end of the second plunger 20
and the electrode 8a on the inspecting board 8, and a damage (the
pressure mark) occurs in the electrode 8a, which makes the contact
performance unstable. In view of the above described concern, the
inventors have analyzed a relation between the spring pressure of
the spring 30 and the depth of the pressure mark which is formed in
the electrode 8a, while varying the initial spring pressure of the
spring 30, and obtained the results as shown in FIG. 3. The results
in FIG. 3 show the depth of the pressure marks at the respective
initial spring pressures of 0gf to 20gf, in a case where such an
operation that the socket 1 is shifted from the state in FIG. 1B to
the state in FIG. 1C, and thereafter, returned to the state in FIG.
1B is repeated million times. From the results in FIG. 3, it was
found that in a case where the initial spring pressure is equal to
or less than 10gf (equal to or less than 1/3 of the spring pressure
at the time of inspection), the depth of the pressure mark can be
suppressed below 3 .mu.m, and it is possible to restrain the depth
of the pressure mark within an allowable range, even after the
contacts of million times. In FIG. 2, the load characteristics of
the spring 30, when the initial spring pressure is set to be 10gf,
is shown by a one-dot chain line, and an increasing amount of the
load with respect to the stroke is larger, as compared with the
characteristics in the comparative example, in the same manner as
the case where the initial spring pressure is set to be 0gf. As
apparent from FIG. 2, in a case where the initial spring pressure
is equal to or less than 10gf, the load characteristics is within a
hatched range, and the increasing amount of the load with respect
to the stroke is larger as compared with the comparative example,
in either of the load characteristics of the spring. In the socket
1 in this embodiment, such possibility that resistance value
becomes unstable, because the preload is zero, is concerned.
However, change of the resistance value in the process of the
contacts of million times was analyzed, and it was found that there
is neither rise of the resistance value nor deterioration of
stability which become a problem in an ordinary IC inspection, as
compared with the socket 7 in which the preload is applied, as
shown in FIGS. 6A to 6C.
[0040] According to this embodiment, it is possible to attain the
following effects.
(1) In the state where the tip end of the first plunger 10 is
released, the projecting amount of the second plunger 20 from the
insulating support body 50 is eliminated without compressing the
spring 30. Therefore, when the socket 1 is mounted on the
inspecting board 8, as shown in FIG. 1B, the urging force of the
spring 30 does not function as the contact force (the preload)
between the tip end of the second plunger 20 and the electrode 8a
on the inspecting board 8, and it is possible to avoid warping the
insulating support body 50 (a warp of the second insulating support
body 52 with respect to the first insulating support body 51) due
to receiving the preload. As a result, the socket is advantageous
in increasing the number of the pins and in realizing downsizing,
and the cost can be reduced. Specifically, because the preload is
zero, the preload in the entire socket is not increased, even
though the number of the pins is increased. Moreover, it is not a
problem, even though the insulating support body 50 is likely to
warp, since the insulating support body 50 is made thinner for
downsizing. Further, there is no need to use expensive material
having high rigidity as the material for the insulating support
body 50 in order to avoid the warp. (2) Rise of the resistance
value and deterioration of the stability which are concerned due to
the elimination of the preload are within a sufficiently allowable
range in the ordinary IC inspection, and a side effect due to
elimination of the preload is limited. (3) Since the initial spring
pressure is equal to or less than 10gf, it is possible to restrain
such a problem that the pressure mark formed in the electrode 8a on
the inspecting board 8 is attributed to elimination of the preload
from becoming, and at the same time, it is possible to minimize
damage of the solder bump 9a on the object 9 to be inspected.
Moreover, in a case where the preload is applied as in the
comparative example which is shown in FIG. 6, the depth of the
pressure mark is 2 .mu.m. However, in this embodiment, by making
the initial spring pressure is equal to or less than 3gf, it is
possible to make the depth of the pressure mark formed in the
electrode 8a smaller than 2 .mu.m.
Embodiment 2
[0041] FIG. 4A is a sectional view of a socket 2 in Embodiment 2
according to the present invention, in a state where both the tip
ends of the first plunger 10 and the second plunger 20 are
released. Embodiment 2 will be specifically described below, mainly
referring to different points from Embodiment 1.
[0042] In the socket 2, the first plunger 10 is movable (slidable)
in a longitudinal direction of its own with respect to the
electrically conductive tube 40. By engaging the base end side
columnar part 13 with a lock part 43 of the electrically conductive
tube 40, drop of the first plunger 10 from the electrically
conductive tube 40 is avoided, and at the same time, a projecting
amount of the first plunger 10 from the insulating support body 50
is restricted. By engaging the base end side columnar part 24 with
the lock part 42 of the electrically conductive tube 40, drop of
the second plunger 20 from the electrically conductive tube 40 is
avoided, and at the same time, a projecting amount of the second
plunger 20 from the insulating support body 50 is restricted. The
lock part 43 of the electrically conductive tube 40 is a part which
is formed by reducing a diameter by drawing work or the like, in
the same manner as the lock part 42. The lock part 43 is locked to
the step part 53a of the through hole 53, and the lock part 42 is
locked to the step part 53b, so that the electrically conductive
tube 40 may not move in a longitudinal direction of its own, inside
the through hole 53 in the insulating support body 50.
[0043] FIG. 4A shows the second plunger 20 in a state moved to the
uppermost position in the drawing, inside the electrically
conductive tube 40, within a range where the spring 30 is not
compressed (the spring 30 has the natural length). In this state, a
lower face of the insulating support body 50 (the face opposed to
the inspecting board) and the tip end of the second plunger 20
coincide in position with each other. Accordingly, the preload is
zero in this embodiment, in the same manner as in Embodiment 1. In
this embodiment, it is the necessary condition for making the
preload zero that the initial spring pressure of the spring 30 is
zero. This embodiment is substantially the same as Embodiment 1 in
the other points. This embodiment can also attain the same effects
as Embodiment 1.
Embodiment 3
[0044] FIG. 4B is a sectional view of a socket 3 in Embodiment 3
according to the present invention, in a state where both the tip
ends of the first plunger 10 and the second plunger 20 are
released. Embodiment 2 will be specifically described below, mainly
referring to different points from Embodiment 2. In the socket 3,
the contact probe 70 is of a tubeless type, and has no such a
member as corresponding to the electrically conductive tube 40 in
Embodiment 2. By engaging the base end side columnar part 13 with
the step part 53a of the through hole 53 in the insulating support
body 50, drop of the first plunger 10 from the insulating support
body 50 is avoided, and at the same time, a projecting amount of
the first plunger 10 from the insulating support body 50 is
restricted. By engaging the base end side columnar part 24 with the
step part 53b in the through hole 53, drop of the second plunger 20
from the insulating support body 50 is avoided, and at the same
time, a projecting amount of the second plunger 20 from the
insulating support body 50 is restricted.
[0045] FIG. 4B shows the second plunger 20 in a state moved to the
uppermost position in the drawing, inside the through hole 53 in
the insulating support body 50, within a range where the spring 30
is not compressed (the spring 30 has the natural length). In this
state, the lower face of the insulating support body 50 (the face
opposed to the inspecting board) and the tip end of the second
plunger 20 coincide in position with each other. Accordingly, the
preload is zero in this embodiment, in the same manner as in
Embodiment 2. This embodiment is substantially the same as
Embodiment 2 in the other points. This embodiment can also attain
the same effects as Embodiment 2.
Embodiment 4
[0046] FIG. 4C is a sectional view of a socket 4 in Embodiment 4
according to the present invention, in a state where both the tip
ends of the first plunger 10 and the second plunger 20 are
released. Embodiment 4 will be specifically described below, mainly
referring to different points from Embodiment 3.
[0047] In the socket 4, the first plunger 10 has a rod-shaped part
14 extending further from the base end side columnar part 13 to the
base end side. A base end part of the rod-shaped part 14 is formed
as a drop preventing large diameter part 15. The base end side
columnar part 24 of the second plunger 20 is in a shape of a
bottomed cylinder having a hole 25 which is open to the base end
side. The hole 25 has a lock part 26 which is partially reduced in
diameter by press work or the like. The rod-shaped part 14 of the
first plunger 10 passes through the spring 30 and extends inside
the hole 25 of the base end side columnar part 24 of the second
plunger 20. Because of engagement between the drop preventing large
diameter part 15 of the rod-shaped part 14 and the lock part 26 of
the hole 25 and function of the spring 30, the first plunger 10,
the second plunger 20, and the spring 30 are allowed to move
together (integrally) in a vertical direction in FIG. 4C.
[0048] FIG. 4C shows the second plunger 20 in a state moved to the
uppermost position in the drawing, inside the through hole. In this
state, the lower face of the insulating support body 50 (the face
opposed to the inspecting board) and the tip end of the second
plunger 20 coincides in position with each other. Accordingly, the
preload is zero in this embodiment, in the same manner as in
Embodiment 3. In this embodiment, it is not the necessary condition
for making the preload zero that the initial spring pressure of the
spring 30 is zero. The initial spring pressure of the spring 30 is
set to be equal to or less than 10gf in the same manner as in
Embodiment 1. This embodiment is substantially the same as
Embodiment 3 in the other points. This embodiment can also achieve
the same effects as Embodiment 3.
Embodiment 5
[0049] FIG. 5A is a sectional view of a socket 5 in Embodiment 5
according to the present invention, in a state where both the tip
ends of the first plunger 10 and the spring 30 are released.
Embodiment 5 will be specifically described below, mainly referring
to different points from Embodiment 3.
[0050] In the socket 5, the contact probe 70 has no such a member
as corresponding to the second plunger 20 in Embodiment 3, and has
such a structure that an end of the spring 30 is adapted to come
into contact with the electrode on the inspecting board. The spring
30 has a tightly coiled small diameter part 31, a tightly coiled
large diameter part 32, and a roughly coiled part 33, in order from
the side of the inspecting board (a lower end side). The tightly
coiled small diameter part 31 and the tightly coiled large diameter
part 32 are provided in order to reduce a resistance value of an
entire spring 30. The roughly coiled part 33 is provided in order
to secure a compressible length of the spring 30 (a stroke of the
first plunger 10). By engaging the tightly coiled part 32 with the
step part 53b in the through hole 53, drop of the spring 30 from
the insulating support body 50 is avoided.
[0051] FIG. 5A shows the spring 30 in a state moved to the
uppermost position in the drawing, inside the through hole 53 of
the insulating support body 50, without being compressed (the
spring 30 has the natural length). In this state, the lower face of
the insulating support body 50 (the face opposed to the inspecting
board) and the end of the spring 30 at the inspecting board side
coincide in position with each other. Accordingly, the preload is
zero in this embodiment, in the same manner as in Embodiment 3.
This embodiment is substantially the same as Embodiment 3 in the
other points. This embodiment can also attain the same effects as
Embodiment 3.
Embodiment 6
[0052] FIG. 5B is a sectional view of a socket 6 in Embodiment 6
according to the present invention, in a state where both the tip
ends of the first plunger 10 and the second plunger 20 are
released. Embodiment 6 will be specifically described below, mainly
referring to different points from Embodiment 5.
[0053] In the socket 6, the spring 30 has no such a part as
corresponding to the tightly coiled small diameter part 31 in
Embodiment 5. Moreover, the step part 53b in Embodiment 5 is not
provided in the through hole 53 in the insulating support body 50.
Therefore, the spring 30 is not retained with respect to the
insulating support body 50. However, it is not a problem that the
spring 30 may drop, because the inspecting board is abutted against
the lower face (the face opposed to the inspecting board) of the
insulating support body 50, when the socket 6 is used. This
embodiment is substantially the same as Embodiment 5 in the other
points. This embodiment can also attain the same effects as
Embodiment 5.
[0054] Although the present invention has been described with
reference to the embodiments, as examples, it is obvious to those
skilled in the art that the components and processing processes in
the embodiments can be variously modified within a scope of the
claims. For example, it is possible to employ the spring 30 in
Embodiment 5 in place of the spring 30 and the second plunger 20 in
Embodiment 1. In this case, the roughly coiled part 33 in
Embodiment 5 functions as the spring 30 in Embodiment 1, and the
tightly coiled small diameter part 31 and the tightly coiled large
diameter part 32 in Embodiment 5 function as the base end side
columnar part 24 of the second plunger 20 in Embodiment 1 and the
intermediate columnar part 23 which is positioned at the tip end
side from the base end side columnar part 24 and the like.
[0055] According to the invention described in the above
embodiments, it is possible to provide a socket which is
advantageous in increasing the number of pins and in realizing
downsizing, and capable of achieving cost reduction.
* * * * *