U.S. patent application number 17/160968 was filed with the patent office on 2021-05-20 for method of manufacturing organic light-emitting display apparatus including multilayer auxiliary electrode.
The applicant listed for this patent is Samsung Display Co., Ltd.. Invention is credited to Byoungseong Jeong, Taehyung Kim, Seho Lee.
Application Number | 20210151546 17/160968 |
Document ID | / |
Family ID | 1000005362547 |
Filed Date | 2021-05-20 |
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United States Patent
Application |
20210151546 |
Kind Code |
A1 |
Lee; Seho ; et al. |
May 20, 2021 |
METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS
INCLUDING MULTILAYER AUXILIARY ELECTRODE
Abstract
A method of manufacturing an organic light-emitting display
apparatus includes: forming an auxiliary electrode including: a
first conductive layer; and a second conductive layer disposed on
the first conductive layer, the second conductive layer having a
resistance higher than a resistance of the first conductive layer;
forming a first intermediate layer on the auxiliary electrode;
exposing the first conductive layer includes forming a first
opening in the first intermediate layer and an opening portion in
the second conductive layer by removing a portion of the first
intermediate layer and a portion of the second conductive layer of
the auxiliary electrode; and forming an opposite electrode on the
first intermediate layer and the first conductive layer, wherein
the opposite electrode is disposed contacting the first conductive
layer exposed through the first opening of the first intermediate
layer and the opening portion of the second conductive layer.
Inventors: |
Lee; Seho; (Yongin-city,
KR) ; Kim; Taehyung; (Yongin-city, KR) ;
Jeong; Byoungseong; (Yongin-city, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Samsung Display Co., Ltd. |
Yongin-city |
|
KR |
|
|
Family ID: |
1000005362547 |
Appl. No.: |
17/160968 |
Filed: |
January 28, 2021 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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15686063 |
Aug 24, 2017 |
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17160968 |
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14793302 |
Jul 7, 2015 |
9780158 |
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15686063 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 2227/323 20130101;
H01L 51/0009 20130101; H01L 27/3276 20130101; H01L 51/0077
20130101; H01L 51/5228 20130101; H01L 51/5212 20130101; H01L
27/3246 20130101; H01L 51/56 20130101 |
International
Class: |
H01L 27/32 20060101
H01L027/32; H01L 51/52 20060101 H01L051/52; H01L 51/56 20060101
H01L051/56 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 2, 2014 |
KR |
10-2014-0170834 |
Claims
1. A method of manufacturing an organic light-emitting display
apparatus, the method comprising: forming an auxiliary electrode
comprising: a first conductive layer; and a second conductive layer
disposed on the first conductive layer, the second conductive layer
having a resistance higher than a resistance of the first
conductive layer; forming a pixel electrode, the pixel electrode
being electrically insulated from the auxiliary electrode; forming
a first intermediate layer on the pixel electrode and the auxiliary
electrode, the first intermediate layer comprising an organic
material; forming an emission layer corresponding to the pixel
electrode on the first intermediate layer, wherein the first
intermediate layer is interposed between the pixel electrode and
the emission layer; exposing the first conductive layer by forming
a first opening in the first intermediate layer and an opening
portion in the second conductive layer by removing a portion of the
first intermediate layer and a portion of the second conductive
layer of the auxiliary electrode; and forming an opposite electrode
on the first intermediate layer and the first conductive layer,
wherein the opposite electrode is disposed contacting the first
conductive layer exposed through the first opening of the first
intermediate layer and the opening portion of the second conductive
layer, wherein a width of the first opening in the first
intermediate layer is larger than a width of the opening portion in
the second conductive layer.
Description
RELATED APPLICATIONS
[0001] This application is a continuation of U.S. patent
application Ser. No. 15/686,063, filed on Aug. 24, 2017, which is a
divisional of U.S. patent application Ser. No. 14/793,302, filed on
Jul. 7, 2015, which claims priority from and the benefit of Korean
Patent Application No. 10-2014-0170834, filed on Dec. 2, 2014, each
of which is hereby incorporated by reference for all purposes as if
fully set forth herein.
BACKGROUND
Field
[0002] One or more exemplary embodiments relate to an organic
light-emitting display apparatus and a method of manufacturing the
organic light-emitting display apparatus, and more particularly, to
an organic light-emitting display apparatus which is easy to
manufacture and has excellent light-emitting stability, and a
method of manufacturing the organic light-emitting display
apparatus.
Discussion of the Background
[0003] In an organic light-emitting display apparatus, each pixel
includes an organic light-emitting device. The organic
light-emitting device includes a pixel electrode, an opposite
electrode facing the pixel electrode, and an intermediate layer
interposed between the pixel electrode and the opposite electrode
and including an emission layer. According to the above structure,
the pixel electrode is in the form of an island patterned for each
pixel, and the opposite electrode may be in a form that is
integrated with respect to a plurality of pixels.
[0004] However, such an integrated form of the opposite electrode
may cause an IR drop in the opposite electrode with respect to the
pixels. Accordingly, unintended deviations in brightness may be
generated in the pixels.
[0005] The above information disclosed in this Background section
is only for enhancement of understanding of the background of the
inventive concept, and, therefore, it may contain information that
does not form the prior art that is already known in this country
to a person of ordinary skill in the art.
SUMMARY
[0006] Exemplary embodiments provide the present inventive concept
include an organic light-emitting display apparatus which is easy
to manufacture and has excellent light-emitting stability, and a
method of manufacturing the organic light-emitting display
apparatus.
[0007] Additional aspects will be set forth in the detailed
description which follows, and, in part, will be apparent from the
disclosure, or may be learned by practice of the inventive
concept.
[0008] According to one or more exemplary embodiments, an organic
light-emitting display apparatus includes an auxiliary electrode
including: a first conductive layer; and a second conductive layer
disposed on the first conductive layer, the second conductive layer
having a resistance higher than a resistance of the first
conductive layer, wherein the second conductive layer includes an
opening portion exposing at least a part of the first conductive
layer; a pixel electrode; a pixel definition layer disposed on the
pixel electrode and the auxiliary electrode, the pixel definition
layer exposing at least a part of the pixel electrode and the
auxiliary electrode; a first intermediate layer disposed on the
pixel electrode and the auxiliary electrode, the first intermediate
layer including a first opening corresponding to the opening
portion; an emission layer disposed on the first intermediate layer
overlapping at least a part of the pixel electrode exposed by the
pixel definition layer; and an opposite electrode disposed on the
first intermediate layer and the emission layer, the opposite
electrode directly contacting the first conductive layer through
the first opening and the opening portion.
[0009] According to one or more exemplary embodiments, a method of
manufacturing an organic light-emitting display apparatus includes:
forming an auxiliary electrode including: a first conductive layer;
and a second conductive layer disposed on the first conductive
layer, the second conductive layer having a resistance higher than
a resistance of the first conductive layer; forming a first
intermediate layer on the auxiliary electrode; exposing the first
conductive layer includes forming a first opening in the first
intermediate layer and an opening portion in the second conductive
layer by removing a portion of the first intermediate layer and a
portion of the second conductive layer of the auxiliary electrode;
and forming an opposite electrode on the first intermediate layer
and the first conductive layer, wherein the opposite electrode is
disposed contacting the first conductive layer exposed through the
first opening of the first intermediate layer and the opening
portion of the second conductive layer.
[0010] The foregoing general description and the following detailed
description are exemplary and explanatory and are intended to
provide further explanation of the claimed subject matter.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] The accompanying drawings, which are included to provide a
further understanding of the inventive concept, and are
incorporated in and constitute a part of this specification,
illustrate exemplary embodiments of the inventive concept, and,
together with the description, serve to explain principles of the
inventive concept.
[0012] FIGS. 1, 2, 3, 4, 5, 6, 7A, and 7B are cross-sectional views
schematically illustrating processes of an exemplary method of
manufacturing an organic light-emitting display apparatus,
according to one or more exemplary embodiments.
[0013] FIGS. 8, 9, 10, and 11 are cross-sectional views
schematically illustrating processes of an exemplary method of
manufacturing an organic light-emitting display apparatus,
according to one or more exemplary embodiments.
[0014] FIG. 12 is a cross-sectional view schematically illustrating
an organic light-emitting display apparatus manufactured according
to an exemplary method of manufacturing an organic light-emitting
display apparatus, according to one or more exemplary
embodiments.
[0015] FIG. 13 is a cross-sectional view schematically illustrating
an organic light-emitting display apparatus manufactured according
to an exemplary method of manufacturing an organic light-emitting
display apparatus according to one or more exemplary
embodiments.
DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS
[0016] In the following description, for the purposes of
explanation, numerous specific details are set forth in order to
provide a thorough understanding of various exemplary embodiments.
It is apparent, however, that various exemplary embodiments may be
practiced without these specific details or with one or more
equivalent arrangements. In other instances, well-known structures
and devices are shown in block diagram form in order to avoid
unnecessarily obscuring various exemplary embodiments.
[0017] In the accompanying figures, the size and relative sizes of
layers, films, panels, regions, etc., may be exaggerated for
clarity and descriptive purposes. Also, like reference numerals
denote like elements.
[0018] When an element or layer is referred to as being "on,"
"connected to," or "coupled to" another element or layer, it may be
directly on, connected to, or coupled to the other element or layer
or intervening elements or layers may be present. When, however, an
element or layer is referred to as being "directly on," "directly
connected to," or "directly coupled to" another element or layer,
there are no intervening elements or layers present. For the
purposes of this disclosure, "at least one of X, Y, and Z" and "at
least one selected from the group consisting of X, Y, and Z" may be
construed as X only, Y only, Z only, or any combination of two or
more of X, Y, and Z, such as, for instance, XYZ, XYY, YZ, and ZZ.
Like numbers refer to like elements throughout. As used herein, the
term "and/or" includes any and all combinations of one or more of
the associated listed items.
[0019] Although the terms first, second, etc. may be used herein to
describe various elements, components, regions, layers, and/or
sections, these elements, components, regions, layers, and/or
sections should not be limited by these terms. These terms are used
to distinguish one element, component, region, layer, and/or
section from another element, component, region, layer, and/or
section. Thus, a first element, component, region, layer, and/or
section discussed below could be termed a second element,
component, region, layer, and/or section without departing from the
teachings of the present disclosure.
[0020] Spatially relative terms, such as "beneath," "below,"
"lower," "above," "upper," and the like, may be used herein for
descriptive purposes, and, thereby, to describe one element or
feature's relationship to another element(s) or feature(s) as
illustrated in the drawings. Spatially relative terms are intended
to encompass different orientations of an apparatus in use,
operation, and/or manufacture in addition to the orientation
depicted in the drawings. For example, if the apparatus in the
drawings is turned over, elements described as "below" or "beneath"
other elements or features would then be oriented "above" the other
elements or features. Thus, the exemplary term "below" can
encompass both an orientation of above and below. Furthermore, the
apparatus may be otherwise oriented (e.g., rotated 90 degrees or at
other orientations), and, as such, the spatially relative
descriptors used herein interpreted accordingly.
[0021] The terminology used herein is for the purpose of describing
particular embodiments and is not intended to be limiting. As used
herein, the singular forms, "a," "an," and "the" are intended to
include the plural forms as well, unless the context clearly
indicates otherwise. Moreover, the terms "comprises," c omprising,"
"includes," and/or "including," when used in this specification,
specify the presence of stated features, integers, steps,
operations, elements, components, and/or groups thereof, but do not
preclude the presence or addition of one or more other features,
integers, steps, operations, elements, components, and/or groups
thereof.
[0022] Various exemplary embodiments are described herein with
reference to sectional illustrations that are schematic
illustrations of idealized exemplary embodiments and/or
intermediate structures. As such, variations from the shapes of the
illustrations as a result, for example, of manufacturing techniques
and/or tolerances, are to be expected. Thus, exemplary embodiments
disclosed herein should not be construed as limited to the
particular illustrated shapes of regions, but are to include
deviations in shapes that result from, for instance, manufacturing.
For example, an implanted region illustrated as a rectangle will,
typically, have rounded or curved features and/or a gradient of
implant concentration at its edges rather than a binary change from
implanted to non-implanted region. Likewise, a buried region formed
by implantation may result in some implantation in the region
between the buried region and the surface through which the
implantation takes place. Thus, the regions illustrated in the
drawings are schematic in nature and their shapes are not intended
to illustrate the actual shape of a region of a device and are not
intended to be limiting.
[0023] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which this
disclosure is a part. Terms, such as those defined in commonly used
dictionaries, should be interpreted as having a meaning that is
consistent with their meaning in the context of the relevant art
and will not be interpreted in an idealized or overly formal sense,
unless expressly so defined herein.
[0024] FIGS. 1, 2, 3, 4, 5, 6, 7A and 7B are cross-sectional views
schematically illustrating processes of an exemplary method of
manufacturing an organic light-emitting display apparatus,
according to one or more exemplary embodiments.
[0025] First, referring to FIG. 1, an auxiliary electrode 210a is
formed. The auxiliary electrode 210a includes a first conductive
layer 211a and a second conductive layer 212a disposed on the first
conductive layer 211a. Resistance of the second conductive layer
212a may be higher than that of the first conductive layer 211a.
For example, the first conductive layer 211a may include at least
one of silver (Ag), Magnesium (Mg), Aluminum (Al), Platinum (Pt),
Lead (Pd), Gold (Au), Nickel (Ni), Neodymium (Nd), Iridium (Ir),
Chromium (Cr), and alloys thereof, and the second conductive layer
212a may include a light-transmissive conductive material including
at least one of indium tin oxide (ITO), indium zinc oxide (IZO),
zinc oxide (ZnO), indium oxide (In.sub.2O.sub.3), indium gallium
oxide (IGO), and aluminum zinc oxide (AZO).
[0026] As illustrated in FIG. 1, a pixel electrode 210 may be
formed in addition to the auxiliary electrode 210a. The pixel
electrode 210 and the auxiliary electrode 210a may be formed on the
same layer and separated from each other, thereby being
electrically insulated from each other. Although FIG. 1 illustrates
that the pixel electrode 210 and the auxiliary electrode 210a are
formed on a planarization layer 170 (or a protective layer), the
exemplary embodiments are not limited thereto. The pixel electrode
210 and the auxiliary electrode 210a may be simultaneously formed,
and the pixel electrode 210 may have the same structure as the
auxiliary electrode 210a. Thus, pixel electrode 210 may include a
first electrode layer 211 including substantially the same material
as that of the first conductive layer 211a of the auxiliary
electrode 210a, and a second electrode layer 212 including
substantially the same material as that of the second conductive
layer 212a of the auxiliary electrode 210a.
[0027] As described later, the pixel electrode 210 directly
contacts a first intermediate layer 221. Accordingly, a contact
between the pixel electrode 210 and the first intermediate layer
221 may be an ohmic contact. To this end, a portion of the pixel
electrode 210 that contacts the first intermediate layer 221 may
include a light-transmissive conductive material including at least
one of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide
(ZnO), indium oxide (In.sub.2O.sub.3), indium gallium oxide (IGO),
and aluminum zinc oxide (AZO). The pixel electrode 210 may have
relatively lower resistance by including, in addition to the second
electrode layer 212 that includes the light-transmissive conductive
material, the first electrode layer 211 disposed under the second
electrode layer 212 having a resistance lower than that of the
second electrode layer 212. For simplification of a manufacturing
process, the auxiliary electrode 210a may be simultaneously formed
on the same layer as the pixel electrode 210 having substantially
the same layered structure. Accordingly, the auxiliary electrode
210a may include the first conductive layer 211a and the second
conductive layer 212a.
[0028] Various layers may be formed before the pixel electrode 210
and the auxiliary electrode 210a are disposed on the substrate. In
FIG. 1, a thin film transistor (TFT) and a capacitor Cap are formed
on a substrate 100, the planarization layer 170 is formed thereon,
and the pixel electrode 210 and the auxiliary electrode 210a are
formed on the planarization layer 170.
[0029] The substrate 100 may be formed of various materials
including at least one of a glass material, a metal material, and a
plastic material, for example, polyethylene terephthalate (PET),
polyethylene naphthalate (PEN), polyimide, etc. The organic
light-emitting display apparatus may further include a buffer layer
110 configured to reduce or prevent intrusion of foreign materials
into a semiconductor layer of the TFT, a gate insulating layer 130
configured to insulate the semiconductor layer and a gate electrode
of the TFT, an interlayer insulating layer 150 configured to
insulate source and drain electrodes and the gate electrode of the
TFT, and the planarization layer 170 covering the TFT and having an
upper surface that is substantially flat.
[0030] A pixel definition layer 180 may be formed to expose at
least a part of the pixel electrode 210. For example, the pixel
definition layer 180 may cover edges of the pixel electrode 210.
The pixel definition layer 180 having openings corresponding to
each pixels, exposing at least a part of the pixel electrode 210,
may be configured to define each of the pixels. The pixel
definition layer 180 may also increase a distance between an end
portion of the pixel electrode 210 and an opposite electrode (not
shown) formed later above the pixel electrode 210, and therefore,
the pixel definition layer 180 may be configured to reduce or
prevent generation of an arc from the end portion of the pixel
electrode 210. Referring to FIG. 1, the pixel electrode 210 and the
auxiliary electrode 210a are formed on the same layer, so the pixel
definition layer 180 may also be formed to expose at least a part
of the auxiliary electrode 210a.
[0031] Referring to FIG. 2, the first intermediate layer 221 may be
formed on the pixel definition layer 180, the pixel electrode 210,
and the auxiliary electrode 210a. The first intermediate layer 221
may be integrally formed over a plurality of pixels.
[0032] The first intermediate layer 221 may have a single-layer
structure or a multilayer structure. For example, when the first
intermediate layer 221 is formed of a polymer material, the first
intermediate layer 221 may be a hole transport layer (HTL) that is
a single-layer structure including at least one of
poly(ethylenedioxythiophene): poly-3,4-ethylene-dihydroxy thiophene
and/or polyaniline (PANI). When the first intermediate layer 221 is
formed of a low-molecular weight material, the first intermediate
layer 221 may include a hole injection layer (HIL) and the HTL.
[0033] Referring to FIG. 3, an emission layer 223 is formed on the
first intermediate layer 221 corresponding to the pixel electrode
210.
[0034] Referring to FIG. 4, a second intermediate layer 222 is
formed covering the first intermediate layer 221 and the emission
layer 223. According to one or more exemplary embodiments, the
second intermediate layer 222 may be omitted. For example, when the
first intermediate layer 221 and the emission layer 223 are formed
of a polymer material, the second intermediate layer 222 may be
omitted. When the first intermediate layer 221 and the emission
layer 223 are formed of a low-molecular weight material, the second
intermediate layer 222 may be formed, and the characteristics of
the organic light-emitting device may be improved. In this case,
the second intermediate layer 222 may have a single layer or
multilayer structure. The second intermediate layer 222 may include
an electron transport layer (ETL) and/or an electron injection
layer (EIL).
[0035] Referring to FIG. 6, a first opening 221' and a second
opening 222' may be respectively formed in the first intermediate
layer 221 and the second intermediate layer 222 by removing
respective portions of the first intermediate layer 221 and the
second intermediate layer 222 corresponding the auxiliary electrode
210a, and an opening portion 212a' may be formed in the second
conductive layer 212a of the auxiliary electrode 210a by removing a
portion of the auxiliary electrode 210a, thereby exposing at least
a part of the first conductive layer 211a of the auxiliary
electrode 210a. Referring to FIG. 5, the opening portion 212a'
formed in the second conductive layer 212a, the first opening 221'
formed in the first intermediate layer 221, and the second opening
222' formed in the second intermediate layer 222 may be
simultaneously formed by radiating a laser beam onto a
corresponding area of the second intermediate layer 222.
[0036] For example, a laser beam having a power of about 45 mW or
higher may be radiated by using a 355 nm UV laser beam to form the
opening portion 212a' in the second conductive layer 212a formed of
ITO having a thickness of about 70 .ANG..
[0037] Referring to FIG. 7A, an opposite electrode 230 is formed
corresponding to the pixel electrode 210 and the auxiliary
electrode 210a and contacting the first conductive layer 211a of
the auxiliary electrode 210a through the opening portion 212a', the
first opening 221', and the second opening 222' respectively formed
in the second conductive layer 212a, the first intermediate layer
221, and the second intermediate layer 222. The opposite electrode
230 is formed integrally with respect to the pixels, covering a
display region (active region). The display region may refer to
area of the whole organic light-emitting display apparatus from
where light may be emitted, for example, an entire area of the
organic light-emitting display apparatus except for edges of the
organic light-emitting display apparatus in where a controller,
etc. may be disposed. When the entire area of the organic
light-emitting display apparatus does not include a dead are or a
non-emitting area, the entire area of the organic light-emitting
display apparatus may be referred to as the display region.
[0038] The opposite electrode 230 may contact an electrode power
supply line (not shown) disposed outside the display region and
receive an electric signal from the electrode power supply line.
The opposite electrode 230 may be formed of a layer including at
least one or Lithium (Li), Calcium (Ca), Lithium Fluoride/Calcium
(LiF/Ca), Lithium Fluoride/Aluminum (LiF/Al), Aluminum (Al), Silver
(Ag), Magnesium (Mg), and alloys thereof, and/or a conductive oxide
including at least one of ITO, IZO, ZnO, and In.sub.2O.sub.3.
However, the structure and material of the opposite electrode 230
are not limited thereto, and the opposite electrode 230 may be
formed of other materials. Also, the layered structure may be a
single-layer structure or a multilayer structure and may have a
variety of modifications thereto without departing from the scope
of the present invention.
[0039] According to the exemplary method of manufacturing an
organic light-emitting display apparatus according to the exemplary
embodiments, since an electric signal is transmitted through the
auxiliary electrode 210a having a high electric conductivity, and
the opposite electrode 230 contacts the auxiliary electrode 210a,
an IR drop, that may occur in the opposite electrode 230 when the
auxiliary electrode 210a is omitted, may be prevented or reduced.
Accordingly, an unintended deviation in brightness in the pixels
may be reduced or prevented.
[0040] In particular, the auxiliary electrode 210a includes the
first conductive layer 211a and the second conductive layer 212a,
and the resistance of the first conductive layer 211a disposed in a
lower side of the auxiliary electrode 210a is configured to be
lower than the resistance of the second conductive layer 212a
disposed in a upper side of the auxiliary electrode 210a. Thus, by
disposing the opposite electrode 230 to directly contact the first
conductive layer 211a having a relatively lower resistance, the IR
drop in the opposite electrode 230 may be reduced or prevented.
[0041] For example, the first conductive layer 211a may be formed
of Ag, the second conductive layer 212a may be formed of ITO, and
the opposite electrode 230 may be formed of Mg and Ag. In such a
case, if the opposite electrode 230 is disposed to directly contact
the second conductive layer 212a, a contact resistance may be about
170.OMEGA.. However, if the opposite electrode 230 is disposed to
directly contact the first conductive layer 211a, the contact
resistance may be reduced to about 60.OMEGA..
[0042] Referring to FIG. 7A, to directly contact the opposite
electrode 230 and the first conductive layer 211a of the auxiliary
electrode 210a, at least a part of the first conductive layer 211a
may be not covered by the second conductive layer 212a, the first
intermediate layer 221, and the second intermediate layer 222.
Accordingly, the second conductive layer 212a, the first
intermediate layer 221, and the second intermediate layer 222 may
be formed so that the second conductive layer 212a, the first
intermediate layer 221, and the second intermediate layer 222 are
not disposed on at least a part of the first conductive layer 211a.
In this case, however, a mask may be used for forming the second
conductive layer 212a, the first intermediate layer 221, and the
second intermediate layer 222. Accordingly, a manufacturing process
may be complicated, for example, to accurately align the mask and
the substrate 100 with each other.
[0043] According to the exemplary method of manufacturing an
organic light-emitting display apparatus according to the exemplary
embodiments, the second conductive layer 212a may be formed in the
same shape as the first conductive layer 211a, the first
intermediate layer 221 and the second intermediate layer 222 may be
formed, for example, on an entire surface of the substrate 100, and
the second conductive layer 212a, the first intermediate layer 221,
and the second intermediate layer 222 corresponding to at least a
part of the first conductive layer 211a may be selectively removed
using a laser beam, and thus, manufacturing efficiency may be
improved.
[0044] FIGS. 7A and 7B are cross-sectional views of an organic
light-emitting display apparatus, according to one or more
exemplary embodiments. Although FIGS. 6 and 7A illustrate that the
sizes of the first opening 221' of the first intermediate layer
221, the second opening 222' of the second intermediate layer 222,
and the opening portion 212a' of the second conductive layer 212a
of the auxiliary electrode 210a are the same, the sizes thereof may
be formed different from one another. Referring to FIG. 7B which
shows a modified embodiment corresponding to portion B of FIG. 7A,
since the laser beam is radiated directly onto the second
intermediate layer 222, the second opening 222' of the second
intermediate layer 222 may be formed to have a size larger than
that of the first opening 221' of the first intermediate layer 221.
The first opening 221' of the first intermediate layer 221 may be
formed to have a size larger than that of the opening portion 212a'
of the second conductive layer 212a. The first opening 221' of the
first intermediate layer 221, the second opening 222' of the second
intermediate layer 222, and the opening portion 212a' of the second
conductive layer 212a of the auxiliary electrode 210a may have
circular shapes. In this case, the above-described sizes may refer
to respective radii of the first opening 221' of the first
intermediate layer 221, the second opening 222' of the second
intermediate layer 222, and the opening portion 212a' of the second
conductive layer 212a of the auxiliary electrode 210a.
[0045] If the second intermediate layer 222 is omitted as described
above, the first opening 221' and the opening portion 212a' may be
formed by radiating the laser beam directly onto the first
intermediate layer 221 to remove at least a part of the first
intermediate layer 221 and the second conductive layer 212a
disposed on the first conductive layer 211a, and thus, at least a
part of the first conductive layer 211a may be exposed. The
opposite electrode 230 formed corresponding to the pixel electrode
210 and the auxiliary electrode 210a may directly contact the first
conductive layer 211a through the first opening 221' of the first
intermediate layer 221 and the opening portion 212a' of the second
conductive layer 212a.
[0046] When the opening portion 212a', the first opening 221'
and/or the second opening 222' are formed, as illustrated in FIGS.
7A and 7B, only a part of the first conductive layer 211a may be
exposed. For example, in the display region of the organic
light-emitting display apparatus, the first openings 221', the
second openings 222' and/or the opening portions 212a', which are
approximately circular, may be formed, and a plurality of parts of
the opposite electrode 230 may directly contact the first
conductive layer 211a.
[0047] The first intermediate layer 221 and the emission layer 223
may be relatively weak to external impurities, such as moisture.
Accordingly, when the first intermediate layer 221 and the emission
layer 223 are formed without the second intermediate layer 222,
removing a part of the first intermediate layer 221 by radiating
the laser beam may damage the first intermediate layer 221 and the
emission layer 223 along the above process. Accordingly, the second
intermediate layer 222 may be disposed, and the first opening 221'
and the second opening 222' may be simultaneously formed by
radiating the laser beam. In particular, the second intermediate
layer 222 including at least one of LiF and
8-Hydroxyquinolinolatolithium (Liq) may improve the ohmic contact
of the opposite electrode 230. In addition, the second intermediate
layer 222 including at least one of LiF and Liq may improve the
weakness to the external impurities, and thus, damage of the first
intermediate layer 221, the emission layer 223, and the second
intermediate layer 222 during the process of forming the first
opening 221', the second opening 222', and the opening portion
212a' by radiating the laser beam thereon may be reduced or
prevented.
[0048] According to the above description, during formation of the
opening portion 212a', the first opening 221', and/or the second
opening 222', the second conductive layer 212a, the first
intermediate layer 221, and/or the second intermediate layer 222
may be partially removed by radiating the laser beam. During this
process, at least a part of an upper surface of the first
conductive layer 211a may be removed as well, as shown in FIG. 7B.
In other words, a groove may be formed in the upper surface of the
first conductive layer 211a corresponding to the opening portion
212a'. Accordingly, the exemplary embodiments and modified examples
may have a groove formed in the upper surface of the first
conductive layer 211a.
[0049] FIGS. 8, 9, 10, and 11 are cross-sectional views
schematically illustrating processes of an exemplary method of
manufacturing an organic light-emitting display apparatus,
according to one or more exemplary embodiments. Elements of the
organic light-emitting display apparatus according to the one or
more exemplary embodiments that are substantially the same with the
organic light-emitting display apparatus illustrated in FIGS. 1, 2,
3, 4, 5, 6, 7A. and 7B may have be indicated with same number and
the detailed description of the substantially same elements may be
omitted.
[0050] According to the exemplary method of manufacturing an
organic light-emitting display apparatus according to the exemplary
embodiments, as described above with reference to FIGS. 1, 2, 3,
and 4, the second intermediate layer 222 is formed and, as
illustrated in FIG. 8, an auxiliary opposite electrode 231 may be
formed corresponding to the pixel electrode 210 and the auxiliary
electrode 210a. In other words, the auxiliary opposite electrode
231 is formed to cover the second intermediate layer 222. If the
second intermediate layer 222 is omitted, the auxiliary opposite
electrode 231 may be formed to cover the first intermediate layer
221 and the emission layer 223. The above-described material for
the opposite electrode 230, for example, may be used as a material
for the auxiliary opposite electrode 231.
[0051] Referring to FIG. 9, a laser beam is radiated onto at least
a part of the auxiliary opposite electrode 231, and thus, the first
opening 221' in the first intermediate layer 221, the second
opening 222' in the second intermediate layer 222, a third opening
231' in the auxiliary opposite electrode 231, and the opening
portion 212a' in the second conductive layer 212a, may be
simultaneously formed, as illustrated in FIG. 10. If the second
intermediate layer 222 is omitted, the first opening 221' of the
first intermediate layer 221, the third opening 231' of the
auxiliary opposite electrode 231, and the opening portion 212a' of
the second conductive layer 212a may be simultaneously formed by
radiating the laser beam onto at least a part of the auxiliary
opposite electrode 231.
[0052] Referring to FIG. 11, the opposite electrode 230 is formed
corresponding to the pixel electrode 210 and the auxiliary
electrode 210a and contacting the first electrode layer 211a
through the first opening 221', the second opening 222', the third
opening 231', and the opening portion 212a' respectively formed in
the first intermediate layer 221, the second intermediate layer
222, the auxiliary opposite electrode 231, and the second
conductive layer 212a. The opposite electrode 230 may be formed
integrally with respect to the pixels, covering the display region
(active region).
[0053] According to the exemplary method of manufacturing an
organic light-emitting display apparatus according to the exemplary
embodiments, since the auxiliary electrode 210a is formed and the
opposite electrode 230 is disposed to contact the auxiliary
electrode 210a, an electric signal is transferred through the
auxiliary electrode 210a having a high electric conductivity and
thus, the IR drop, that may occur in the opposite electrode 230
when the auxiliary electrode 210a is omitted, may be prevented or
reduced. As a result, the unintended brightness deviation in the
pixels may be reduced or prevented.
[0054] In particular, the auxiliary electrode 210a includes the
first conductive layer 211a and the second conductive layer 212a,
the resistance of the first conductive layer 211a disposed in the
lower side of the auxiliary electrode 210a is configured to be
lower than the resistance of the second conductive layer 212a
disposed in the upper side of the auxiliary electrode 210a, the
opposite electrode 230 directly contacts the first conductive layer
211a having a relatively lower resistance, and thus, the IR drop in
the opposite electrode 230 may be reduced or prevented.
[0055] Also, the second conductive layer 212a may be formed to have
the same shape of the first conductive layer 211a, the first
intermediate layer 221, and/or the second intermediate layer 222
may be formed, for example, on the entire surface of the substrate
100. The second conductive layer 212a, the first intermediate layer
221, and/or the second intermediate layer 222 disposed
corresponding to at least a part of the first conductive layer 211a
may be selectively removed using the laser beam, to directly
contact the opposite electrode 230 and the first conductive layer
211a. Accordingly, manufacturing efficiency may be improved.
[0056] According to the exemplary method of manufacturing an
organic light-emitting display apparatus according to the exemplary
embodiments, the laser beam may be radiated after disposing the
auxiliary opposite electrode 231 on the second intermediate layer
222, or the first intermediate layer 221 and the emission layer 223
if the second intermediate layer 222 is omitted formed.
Accordingly, the laser beam is radiated after the auxiliary
opposite electrode 231 is disposed on the first intermediate layer
221, the second intermediate layer 222, and/or the emission layer
223, which may be weak to the external impurities, damage to the
first intermediate layer 221, the second intermediate layer 222,
and/or the emission layer 223 may be reduced compared to radiating
the laser beam onto the first intermediate layer 221 and/or the
second intermediate layer 222 without disposing the auxiliary
opposite electrode 231, and thus, a manufacturing defect may be
reduced.
[0057] According to the exemplary method of manufacturing an
organic light-emitting display apparatus according to the exemplary
embodiments, a part of the auxiliary opposite electrode 231 may be
removed by radiating the laser beam onto the auxiliary opposite
electrode 231. Accordingly, forming the auxiliary opposite
electrode 231 relatively thin may facilitate the above removing. On
the other hand, if the light generated by the emission layer 223 is
emitted to the outside through the substrate 100, the opposite
electrode 230 may be formed relatively thick considering an
electric conductivity, etc. As a result, the opposite electrode 230
may be formed thicker than the auxiliary opposite electrode
231.
[0058] If the auxiliary opposite electrode 231 and the opposite
electrode 230 are formed of the same material, the auxiliary
opposite electrode 231 and the opposite electrode 230 may show any
boundary therebetween in a final product according to a process
condition. In this case, the auxiliary opposite electrode 231 and
the opposite electrode 230 may be collectively referred to as the
opposite electrode 230. Referring to FIG. 12, a thickness t2 of a
part of the opposite electrode 230 corresponding to a center
portion of the first opening 221' may appear to be smaller than a
thickness t1 of a part of the opposite electrode 230 corresponding
to a center portion of the pixel electrode 210. This is because the
opposite electrode 230 formed in the part on the pixel electrode
210 includes two layers of the auxiliary opposite electrode 231 and
the opposite electrode 230, and the opposite electrode 230 formed
in the center portion of the first opening 221' includes one layer
of the opposite electrode 230.
[0059] Although the exemplary embodiments illustrate that the
auxiliary electrode 210a is disposed in the same layer as the pixel
electrode 210, the exemplary embodiments are not limited thereto.
For example, the auxiliary electrode 210a may be located at the
same layer as the source electrode and/or drain electrode, which
are electrodes of the TFT. In this case, the auxiliary electrode
210a is covered with the planarization layer 170. In this case, an
opening may be formed in the planarization layer 170 to expose at
least a part of the auxiliary electrode 210a. The opening may be
formed simultaneously with a via hole, through which the pixel
electrode 210 contacts the source electrode and/or drain electrode
of the TFT. A portion of the auxiliary electrode 210a that is not
covered by the planarization layer 170 may be exposed by the pixel
definition layer 180 as well. The subsequent processes may be
substantially the same as or similar to those described with
reference to FIGS. 1 to 12, except for the fact that the auxiliary
electrode 210a is disposed in different layers.
[0060] Although the exemplary embodiments above illustrates that
the auxiliary electrode 210a has a dual layer structure including
the first conductive layer 211a and the second conductive layer
212a, the exemplary embodiments are not limited thereto, and the
auxiliary electrode 210a may have a multilayer structure including
three or more layers. For example, referring to FIG. 13, the
auxiliary electrode 210a may include the first conductive layer
211a, the second conductive layer 212a disposed on the first
conductive layer 211a and having resistance higher than that of the
first conductive layer 211a, and a third conductive layer 213a
disposed under the first conductive layer 211a and having
resistance higher than that of the first conductive layer 211a. The
second conductive layer 212a and the third conductive layer 213a
may include the same material. For example, the first conductive
layer 211a may include at least one of Ag, Mg, Al, Pt, Pd, Au, Ni,
Nd, Ir, Cr, and alloys thereof, and the second conductive layer
212a and the third conductive layer 213a may include a
light-transmissive conductive material including at least one of
indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO),
indium oxide (In.sub.2O.sub.3), indium gallium oxide (IGO), and
aluminum zinc oxide (AZO).
[0061] When the auxiliary electrode 210a is located at the same
layer as the pixel electrode 210, the pixel electrode 210 may have
the same structure as that of the auxiliary electrode 210a. The
pixel electrode 210 may include the first electrode layer 211
including the same material as that of the first conductive layer
211a of the auxiliary electrode 210a, the second electrode layer
212 disposed on the first electrode layer 211 and including the
same material as that of the second conductive layer 212a of the
auxiliary electrode 210a, a third electrode layer 213 disposed
under the first electrode layer 211 and including the same material
as that of the third conductive layer 213a of the auxiliary
electrode 210a. For reference, each of the auxiliary electrode 210a
and the pixel electrode 210 may have a triple layer structure as
above, so that the pixel electrode 210 may contact the source
electrode and/or drain electrode of the TFT thereunder, forming an
ohmic contact. In other words, the pixel electrode 210 may include
the third electrode layer 213, and the third electrode layer 213
may directly contact the source electrode and/or drain electrode of
the TFT, forming an ohmic contact. For reference, the source
electrode and/or drain electrode may be formed of a variety of
conductive materials and may have a triple layer structure of, for
example, Al/Ti/Al.
[0062] In the above case, the opening portion 212a' is formed in
the second conductive layer 212a of the auxiliary electrode 210a,
and the opposite electrode 230 may directly contact the first
conductive layer 211a of the auxiliary electrode 210a through the
first opening 221' of the first intermediate layer 221 and the
opening portion 212a' of the second conductive layer 212a. If the
second intermediate layer 222 is disposed, the opposite electrode
230 may directly contact the first conductive layer 211a of the
auxiliary electrode 210a through the first opening 221' of the
first intermediate layer 221, the second opening 222' of the second
intermediate layer 222, and the opening portion 212a' of the second
conductive layer 212a. If the auxiliary opposite electrode 231 is
disposed, the opposite electrode 230 may directly contact the first
conductive layer 211a of the auxiliary electrode 210a through the
first opening 221' of the first intermediate layer 221, the second
opening 222' of the second intermediate layer 222, the third
opening 231' of the auxiliary opposite electrode 231, and the
opening portion 212a' of the second conductive layer 212a.
[0063] The exemplary embodiments are not limited to the above
described exemplary methods for manufacturing an organic
light-emitting display apparatus according to the exemplary
embodiments. For example, the exemplary embodiments also include
the organic light-emitting display apparatus manufactured by the
above exemplary methods.
[0064] For example, an organic light-emitting display apparatus
according to one or more exemplary embodiments may have a
configuration as illustrated in FIG. 7A.
[0065] The organic light-emitting display apparatus according to
the exemplary embodiments includes the auxiliary electrode 210a
including the first conductive layer 211a and the second conductive
layer 212a disposed on the first conductive layer 211a. The second
conductive layer 212a has the opening portion 212a' that exposes
the first conductive layer 211a. Also, the resistance of the second
conductive layer 212a may be higher than that of the first
conductive layer 211a. For example, the first conductive layer 211a
may include at least one of Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr,
and alloys thereof, and the second conductive layer 212a may
include a light-transmissive conductive material including at least
one of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide
(ZnO), indium oxide (In.sub.2O.sub.3), indium gallium oxide (IGO),
and aluminum zinc oxide (AZO).
[0066] Referring to FIGS. 1 and 7A, the organic light-emitting
display apparatus according to the exemplary embodiments includes
the pixel electrode 210 in addition to the auxiliary electrode
210a. In detail, the organic light-emitting display apparatus
according to the exemplary embodiments may include the pixel
electrode 210 that is disposed on the same layer as the auxiliary
electrode 210a, separated and electrically insulated from the
auxiliary electrode 210a. Although FIG. 1 illustrates that the
pixel electrode 210 and the auxiliary electrode 210a are disposed
on the planarization layer 170, the exemplary embodiments are not
limited thereto. Thus, the pixel electrode 210 and the auxiliary
electrode 210a disposed on the same layer may have the same
structure. In other words, the pixel electrode 210 may include the
first electrode layer 211 including substantially the same material
as that of the first conductive layer 211a of the auxiliary
electrode 210a, and the second electrode layer 212 disposed on the
first electrode layer 211, including substantially the same
material as that of the second conductive layer 212a of the
auxiliary electrode 210a.
[0067] The organic light-emitting display apparatus may include the
pixel definition layer 180, and at least a part of the pixel
electrode 210 and at least a part of the first conductive layer
211a of the auxiliary electrode 210a may be exposed, and the
opposite electrode 230 disposed corresponding to the pixel
electrode 210 and the auxiliary electrode 210a and directly
contacting the first conductive layer 211a of the auxiliary
electrode 210a.
[0068] The organic light-emitting display apparatus according to
the exemplary embodiments may include the first intermediate layer
221 and the second intermediate layer 222. The first intermediate
layer 221 and the second intermediate layer 222 are disposed on the
pixel definition layer 180, the pixel electrode 210, and the
auxiliary electrode 210a. The emission layer 223 may be interposed
between the first intermediate layer 221 and the second
intermediate layer 222 corresponding to the pixel electrode 210. To
directly contact the first conductive layer 211a of the auxiliary
electrode 210a and the opposite electrode 230, the first
intermediate layer 221 and the second intermediate layer 222 may
have the first opening 221' and the second opening 222'
corresponding to the opening portion 212a' of the second conductive
layer 212a of the auxiliary electrode 210a. The second intermediate
layer 222 may be omitted.
[0069] The organic light-emitting display apparatus according to
the exemplary embodiments includes the auxiliary electrode 210a and
the opposite electrode 230 directly contacts the auxiliary
electrode 210a, so the electric signal may be transmitted through
the auxiliary electrode 210a having a high electric conductivity,
and thus, the IR drop, that may occur in the opposite electrode 230
when the auxiliary electrode 210a does not exist, may be prevented
or reduced. Accordingly, the unintended brightness deviation in a
plurality of pixels may be reduced or prevented.
[0070] In particular, the auxiliary electrode 210a includes the
first conductive layer 211a and the second conductive layer 212a,
and the resistance of the first conductive layer 211a disposed in
the lower side of the auxiliary electrode 210a is lower than that
of the second conductive layer 212a disposed in the higher side of
the auxiliary electrode 210a. The opposite electrode 230 directly
contacts the first conductive layer 211a having a lower resistance,
and thus the IR drop in the opposite electrode 230 may be prevented
or reduced.
[0071] As described above, to directly contact the opposite
electrode 230 and the first conductive layer 211a, the second
conductive layer 212a, the first intermediate layer 221, and/or the
second intermediate layer 222, may respectively include the opening
portion 212a', the first opening 221', and/or the second opening
222' formed in respective portions corresponding with the first
conductive layer 211a to expose at least a part of the first
conductive layer 211a. A manufacturing yield may be increased by
forming the above openings by forming the second conductive layer
212a having substantially the same pattern as that of the first
conductive layer 211a, forming the first intermediate layer 221
and/or the second intermediate layer 222 on the entire surface of
the substrate 100, and radiating a laser beam onto a predetermined
portion to remove at least parts of the second conductive layer
212a, the first intermediate layer 221, and/or the second
intermediate layer 222 corresponding with the first conductive
layer 211a. Accordingly, in the organic light-emitting display
apparatus according to the exemplary embodiments, a part of the
first intermediate layer 221 and the second intermediate layer 222
respectively adjacent to the first opening 221' and the second
opening 222' may be deteriorated or degraded from exposure to
heat.
[0072] Although FIG. 7A illustrates that the sizes of the first
opening 221' of the first intermediate layer 221, the second
opening 222' of the second intermediate layer 222, and the opening
portion 212a' of the second conductive layer 212a of the auxiliary
electrode 210a are identical to one another, this is merely for
convenience of explanation and the sizes of the openings may be
formed different from one another. For example, as illustrated in
FIG. 7B, since the laser beam is directly radiated onto the second
intermediate layer 222, the second opening 222' of the second
intermediate layer 222 may be formed to have a size larger than
that of the first opening 221' of the first intermediate layer 221.
The first opening 221' of the first intermediate layer 221 may be
formed to have a size larger than that of the opening portion 212a'
of the second conductive layer 212a. Each of the first opening 221'
of the first intermediate layer 221, the second opening 222' of the
second intermediate layer 222, and the opening portion 212a' of the
second conductive layer 212a of the auxiliary electrode 210a may
have a circular shape. In this case, the above-described sizes may
refer to respective radii of the first opening 221' of the first
intermediate layer 221, the second opening 222' of the second
intermediate layer 222, and the opening portion 212a' of the second
conductive layer 212a of the auxiliary electrode 210a. Since the
first opening 221', the second opening 222', and the opening
portion 212a' are formed at the same time, the centers of the
openings may be aligned with each other.
[0073] When the first opening 221', the second opening 222', and/or
the opening portion 212a' are formed, only a part of the first
conductive layer 211a may be exposed as illustrated in FIG. 7A. For
example, by forming a plurality of the first openings 221', the
second openings 222', and/or the opening portions 212a', which are
approximately circular, in the display region of the organic
light-emitting display apparatus, a plurality of portions of the
opposite electrode 230 may directly contact the first conductive
layer 211a.
[0074] As described above, during the formation of the opening
portion 212a', the first opening 221', and/or the second opening
222', respectively, the second conductive layer 212a, the first
intermediate layer 221, and/or the second intermediate layer 222
may be partially removed by radiating the laser beam, at least a
part of the upper surface of the first conductive layer 211a may be
removed as well in the process. In other words, a groove may be
formed in the upper surface of the first conductive layer 211a
corresponding to the opening portion 212a'. Accordingly, the
exemplary embodiments and modified examples may have a groove
formed in the upper surface of the first conductive layer 211a, as
shown in FIG. 7B.
[0075] The first intermediate layer 221 and the emission layer 223
may be relatively weak to the external impurities, such as
moisture. Accordingly, when the first intermediate layer 221 and
the emission layer 223 are formed without the second intermediate
layer 222, removing a part of the first intermediate layer 221 by
radiating the laser beam may damage the first intermediate layer
221 and the emission layer 223 along the above process.
Accordingly, the second intermediate layer 222 may be disposed, and
the first opening 221' and the second opening 222' are
simultaneously formed by radiating the laser beam. In particular,
the second intermediate layer 222 including at least one of LiF and
Liq may improve the ohmic contact of the opposite electrode 230. In
addition, the second intermediate layer 222 including at least any
one of LiF and Liq may improve the weakness to the foreign
impurities. Thus, the damage to the first intermediate layer 221,
the emission layer 223, and the second intermediate layer 222
during the process of forming the first opening 221', the second
opening 222', and the opening portion 212a' by radiating the laser
beam thereon may be reduced or prevented.
[0076] An organic light-emitting display apparatus according to one
or more exemplary embodiments may have a configuration as
illustrated in FIG. 11. In other words, the auxiliary opposite
electrode 231 may be further interposed between the opposite
electrode 230 and the first intermediate layer 221 to contact the
opposite electrode 230, having the third opening 231' corresponding
to the first opening 221' of the first intermediate layer 221. In
other words, the auxiliary opposite electrode 231 may be disposed
correspond to the opposite electrode 230 except in a portion of the
auxiliary opposite electrode 231 that overlaps with the first
opening 221' of the first intermediate layer 221.
[0077] The organic light-emitting display apparatus according to
the exemplary embodiments may prevent or reduce the IR drop of the
opposite electrode 230 by providing the auxiliary electrode 210a.
In addition, the auxiliary opposite electrode 231 may protect the
first intermediate layer 221, the emission layer 223, and/or the
second intermediate layer 222 during forming the opening portion
212a' of the second conductive layer 212a, the first opening 221'
of the first intermediate layer 221, and/or the second opening 222'
of the second intermediate layer 222 are formed, and thus, damages
to the first intermediate layer 221, the emission layer 223, and/or
the second intermediate layer 222 may be reduced or prevented. The
thickness of the auxiliary opposite electrode 231 may be smaller
than that of the opposite electrode 230.
[0078] Referring to FIG. 12, the auxiliary opposite electrode 231
and the opposite electrode 230 may be integrally formed. In this
case, the thickness t2 of the part of the opposite electrode 230
corresponding to the center portion of the first opening 221' may
be smaller than the thickness t1 of the part of the opposite
electrode 230 corresponding to a center portion of the pixel
electrode 210. This is because the opposite electrode 230 formed in
the part on the pixel electrode 210 includes two layers of the
auxiliary opposite electrode 231 and the opposite electrode 230,
and the opposite electrode 230 is formed in the center portion of
the first opening 221' includes one layer of the opposite electrode
230.
[0079] Although the exemplary embodiments illustrate that the
auxiliary electrode 210a is disposed in the same layer as the pixel
electrode 210, the exemplary embodiments are not limited thereto.
For example, the auxiliary electrode 210a may be located at the
same layer as the source electrode and/or drain electrode, which
are electrodes of the TFT. In this case, the auxiliary electrode
210a is covered with the planarization layer 170. In this case, an
opening may be formed in the planarization layer 170 to expose at
least a part of the auxiliary electrode 210a. The opening may be
formed simultaneously with a via hole, through which the pixel
electrode 210 contacts the source electrode and/or drain electrode
of the TFT. A portion of the auxiliary electrode 210a that is not
covered by the planarization layer 170 may be exposed by the pixel
definition layer 180 as well. The subsequent processes may be
substantially the same as or similar to those described with
reference to FIGS. 1 to 12, except for the fact that the auxiliary
electrode 210a is disposed in different layers.
[0080] Although the exemplary embodiments above illustrated that
the auxiliary electrode 210a has a dual layer structure including
the first conductive layer 211a and the second conductive layer
212a, the exemplary embodiments are not limited thereto, and the
auxiliary electrode 210a may have a multilayer structure including
three or more layers. For example, referring to FIG. 13, the
auxiliary electrode 210a may include the first conductive layer
211a, the second conductive layer 212a disposed on the first
conductive layer 211a and having resistance higher than that of the
first conductive layer 211a, and the third conductive layer 213a
disposed under the first conductive layer 211a and having
resistance higher than that of the first conductive layer 211a. The
second conductive layer 212a and the third conductive layer 213a
may include the same material. For example, the first conductive
layer 211a may include at least one of Ag, Mg, Al, Pt, Pd, Au, Ni,
Nd, Ir, Cr, and alloys thereof, and the second conductive layer
212a and the third conductive layer 213a may include a
light-transmissive conductive material including at least one of
indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO),
indium oxide (In.sub.2O.sub.3), indium gallium oxide (IGO), and
aluminum zinc oxide (AZO).
[0081] When the auxiliary electrode 210a is located at the same
layer as the pixel electrode 210, the pixel electrode 210 may have
the same structure as that of the auxiliary electrode 210a. The
pixel electrode 210 may include the first electrode layer 211
including the same material as that of the first conductive layer
211a of the auxiliary electrode 210a, the second electrode layer
212 disposed on the first electrode layer 211 and including the
same material as that of the second conductive layer 212a of the
auxiliary electrode 210a, the third electrode layer 213 disposed
under the first electrode layer 211 and including the same material
as that of the third conductive layer 213a of the auxiliary
electrode 210a.
[0082] In the above case, the opening portion 212a' is formed in
the second conductive layer 212a of the auxiliary electrode 210a,
and the opposite electrode 230 may directly contact the first
conductive layer 211a of the auxiliary electrode 210a through the
first opening 221' of the first intermediate layer 221 and the
opening portion 212a' of the second conductive layer 212a. If the
second intermediate layer 222 is disposed, the opposite electrode
230 may directly contact the first conductive layer 211a of the
auxiliary electrode 210a through the first opening 221' of the
first intermediate layer 221, the second opening 222' of the second
intermediate layer 222, and the opening portion 212a' of the second
conductive layer 212a. If the auxiliary opposite electrode 231 is
disposed, the opposite electrode 230 may directly contact the first
conductive layer 211a of the auxiliary electrode 210a through the
first opening 221' of the first intermediate layer 221, the second
opening 222' of the second intermediate layer 222, the third
opening 231' of the auxiliary opposite electrode 231, and the
opening portion 212a' of the second conductive layer 212a.
[0083] According to the one or more exemplary embodiments, a method
of manufacturing of the organic light-emitting display apparatus
may be simplified and have relatively high light-emitting
stability. However, the exemplary embodiments are not necessarily
limited to the above effects.
[0084] Although certain exemplary embodiments and implementations
have been described herein, other embodiments and modifications
will be apparent from this description. Accordingly, the inventive
concept is not limited to such embodiments, but rather to the
broader scope of the presented claims and various obvious
modifications and equivalent arrangements.
* * * * *