U.S. patent application number 17/156985 was filed with the patent office on 2021-05-13 for vacuum deposition apparatus.
This patent application is currently assigned to ULVAC, INC.. The applicant listed for this patent is ULVAC, INC.. Invention is credited to Shuuji Saitou, Akihiro Yokoyama.
Application Number | 20210140034 17/156985 |
Document ID | / |
Family ID | 1000005414560 |
Filed Date | 2021-05-13 |
![](/patent/app/20210140034/US20210140034A1-20210513\US20210140034A1-2021051)
United States Patent
Application |
20210140034 |
Kind Code |
A1 |
Saitou; Shuuji ; et
al. |
May 13, 2021 |
Vacuum Deposition Apparatus
Abstract
Inside a main chamber there are provided: first partition walls
partitioning a deposition chamber having a deposition unit; and
second partition walls disposed in continuation to the first
partition walls so as to cover outer cylinder parts of a can-roller
while leaving a first gap that curves at a curvature coinciding
with an outer peripheral surface of the can-roller. The deposition
chamber and an adjacent chamber are in communication with each
other with the first gap such that a conductance between the
deposition chamber and the adjacent chamber is determined by the
second partition walls. At least one of the second partition walls
is arranged to be rotatable, with a rotary shaft of the can-roller,
between a shielding position which shields such a part of the
can-roller as is lying opposite to the deposition unit, and a
withdrawn position which is circumferentially away from the
deposition unit.
Inventors: |
Saitou; Shuuji; (Kanagawa,
JP) ; Yokoyama; Akihiro; (Kanagawa, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
ULVAC, INC. |
Kanagawa |
|
JP |
|
|
Assignee: |
ULVAC, INC.
Kanagawa
JP
|
Family ID: |
1000005414560 |
Appl. No.: |
17/156985 |
Filed: |
January 25, 2021 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
PCT/JP2019/042105 |
Oct 28, 2019 |
|
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|
17156985 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
C23C 14/505 20130101;
C23C 14/243 20130101 |
International
Class: |
C23C 14/50 20060101
C23C014/50; C23C 14/24 20060101 C23C014/24 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 12, 2019 |
JP |
2019-044883 |
Claims
1. A vacuum deposition apparatus comprising: a main chamber having
a base material transportation means for transporting a sheet-like
base material and a can-roller around which is wound the sheet-like
base material to be transported by the base material transportation
means, the main chamber being capable of forming therein a vacuum
atmosphere; and a deposition unit for depositing on such a part of
the sheet-like base material as is wound around the can-roller; the
main chamber further comprising therein first partition walls
partitioning a deposition chamber which stores therein the
deposition unit, and second partition walls disposed in
continuation to the first partition walls so as to cover such outer
cylinder parts of the can-roller as are positioned on both
circumferential sides of the deposition unit while leaving a first
gap that curves at a curvature coinciding with an outer peripheral
surface of the can-roller, wherein the deposition chamber and such
an adjacent chamber as is adjacent to the deposition chamber and as
is inside the main chamber are in communication with each other
with the first gap serving as a boundary such that a conductance
between the deposition chamber and the adjacent chamber is
determined by the second partition walls, and wherein at least one
of the second partition walls is arranged to be rotatable, with a
rotary shaft of the can-roller serving as a center of rotation,
between a shielding position which shields such a part of the
can-roller as is lying opposite to the deposition unit, and a
withdrawn position which is circumferentially away from the
deposition unit.
2. The vacuum deposition apparatus according to claim 1, wherein
the deposition unit comprises: a container box for containing
therein a deposition material, and a heating means which enables
the deposition material to be heated, wherein a lid body, facing
the can-roller, of the container box has two lateral sides equal to
or longer than a generatrix length of the can-roller, and is also
bent at the curvature, the lid body having formed therein a
discharge opening for discharging deposition particles that have
been sublimated or evaporated by the heating with the heating
means; a moving means for moving back and forth the deposition
unit, in a radial direction of the can-roller, between a deposition
position in which the lid body lies close to the outer peripheral
surface of the can-roller at a second gap that is curved at the
said curvature, and a separated position in which the lid body is
away from the outer peripheral surface of the can-roller; and
wherein, when the deposition unit is advanced into the deposition
position at the withdrawn position of the second partition walls,
each of the lateral sides of the lid body respectively comes into
contact with, or comes close to, the first partition wall, such
that the deposition space to be partitioned by the second gap comes
into communication with the adjacent chamber with the first gap
serving as a boundary.
3. The vacuum deposition apparatus according to claim 2, further
comprising: a partition plate disposed on both circumferential ends
of the second partition walls, the partition plate having a length
equivalent to, or larger than, the generatrix length of the
can-roller; and when the second partition walls are moved to the
shielding position or the withdrawn position, any one of the
partition plates and a stationary partition wall that is fixed to
the main chamber having the length equivalent to the said partition
plate is arranged to come into contact with or come closer to each
other, thereby constituting the first partition wall.
Description
TECHNICAL FIELD
[0001] The present invention relates to a vacuum deposition
apparatus comprising: a main chamber having a base material
transportation means for transporting a sheet-like base material
and a can-roller around which is wound the sheet-like base material
to be transported by the base material transportation means, the
main chamber being capable of forming therein a vacuum atmosphere;
and a deposition unit for depositing on such a part of the
sheet-like base material as is wound around the can-roller.
BACKGROUND ART
[0002] This kind of vacuum deposition apparatus is known, e.g., in
patent document 1. In this known apparatus, inside a vacuum chamber
(main chamber) that is capable of forming a vacuum atmosphere
therein: a sheet-like base material is continuously fed out of a
feed roller of a base material transportation means; while winding
this fed out base material around a cooling-purpose can-roller,
deposition material is deposited toward this can-roller from a
deposition unit disposed at a predetermined distance in the radia
direction relative to the can-roller; and then the deposited
sheet-like base material is arranged to be taken up by a take-up
roller of the base material transportation means. In this case, the
vacuum chamber is partitioned into two chambers by a partition
plate disposed about the can-roller, and one of the chambers
(deposition chamber) has disposed therein a base material
transportation means and the other of the chambers (adjacent
chamber) has disposed therein a deposition unit, respectively. As
the deposition unit there is utilized one which is provided with: a
crucible that is fixedly disposed inside the vacuum chamber so as
to contain therein the deposition material; and a heating means of
resistance heating type, induction heating type, electron-beam type
and the like for heating the deposition material contained in the
crucible. The deposition material contained in the crucible is thus
caused to be sublimated or evaporated by heating, and the
sublimated or evaporated deposition particles are made to get
adhered and accumulated for deposition (film formation) on such a
part of the sheet-like base material as is wound around the
can-roller.
[0003] Further, a so-called line source is generally known (see,
e.g., patent document 2) as a deposition unit for depositing on an
object to be deposited such as a sheet-like base material with a
relatively large width or a substrate, the object to be deposited
being arranged to move (be transported) at a given speed. The line
source in question is provided with: a container box for containing
therein a deposition material; and a heating means for heating the
deposition material inside the container box. A lid body (upper
surface) of the container box is provided with tubular discharge
openings arranged side by side at a distance from one another in a
widthwise direction of the base material. In this kind of
deposition unit, when the deposition particles that have been
sublimated or evaporated as a result of heating by the container
box are discharged out of each of the discharge openings, they will
be splashed from the discharge openings toward the object to be
deposited while expanding in a dome shape according to a given
cosine law. However, since the diameter of each of the discharge
openings is small, there is a limit to an attempt to increase the
film-forming rate. As a solution, it is considered to provide the
lid body of the container box with large-area discharge openings
(considerably far larger than the sum of the opening diameters of
each of the discharge openings) so as to discharge from the
discharge openings the sublimated or evaporated deposition
particles, thereby increasing the film-forming rate.
[0004] However, if the deposition unit having this kind of
discharge openings of larger area are simply applied to the
above-mentioned known vacuum deposition apparatus, the particles
discharged out of the discharge openings of the evaporation unit
will be spread and diffused inside the deposition chamber. As a
consequence, not only will the deposition chamber be contaminated,
but also will the efficiency of deposition on the base material
wound around the can-roller be lowered. In addition, the discharged
particles will leak through the clearance between the partition
plate and the cooling-purpose can-roller so as to wrap around to an
adjacent chamber, thereby contaminating also the adjacent chamber.
In this case, the degree of closing between the deposition chamber
and the adjacent chamber (i.e., a conductance value that is the
resistance component of connection between the deposition chamber
and the adjacent chamber) will be secured by the clearance between
the partition plate and the can-roller and/or the clearance between
the can-roller and the inner wall surface of the vacuum chamber.
However, since the clearance between the partition plate and the
can-roller is also a space for the sheet-like base material to pass
therethrough as a result of rotation of the can-roller, it is
necessary to secure above a certain amount of clearance. However,
in the above-mentioned arrangement, it is difficult to increase the
degree of closure between the deposition chamber and the adjacent
chamber (in other words, it is difficult to separate the atmosphere
between the deposition chamber and the adjacent chamber so as to
prevent the particles leaked from the deposition chamber from
wrapping around to the adjacent chamber).
PRIOR ART DOCUMENTS
Patent Documents
[0005] Patent Document 1: JP-A-2010-163693
[0006] Patent Document 2: JP-A-2014-77193
SUMMARY OF THE INVENTION
Problems that the Invention is to Solve
[0007] In view of the above-mentioned points, this invention has a
problem of providing a vacuum deposition apparatus in which, at the
time of deposition on such a part of the sheet-like base material
as is wound around a can-roller, a deposition chamber and an
adjacent chamber can surely be separated in terms of
atmosphere.
Means for Solving the Problems
[0008] In order to solve the above-mentioned problems, a vacuum
deposition apparatus comprises: a main chamber having a base
material transportation means for transporting a sheet-like base
material and a can-roller around which is wound the sheet-like base
material to be transported by the base material transportation
means, the main chamber being capable of forming therein a vacuum
atmosphere; and a deposition unit for depositing on such a part of
the sheet-like base material as is wound around the can-roller. The
main chamber further comprises therein first partition walls
partitioning a deposition chamber which stores therein the
deposition unit, and second partition walls disposed in
continuation to the first partition walls so as to cover such outer
cylinder parts of the can-roller as are positioned on both
circumferential sides of the deposition unit while leaving a first
gap that curves at a curvature coinciding with an outer peripheral
surface of the can-roller. The deposition chamber and such an
adjacent chamber as is adjacent to the deposition chamber and as is
inside the main chamber are in communication with each other with
the first gap serving as a boundary such that a conductance between
the deposition chamber and the adjacent chamber is determined by
the second partition walls, wherein at least one of the second
partition walls is arranged to be rotatable, with a rotary shaft of
the can-roller serving as a center of rotation, between a shielding
position which shields such a part of the can-roller as is lying
opposite to the deposition unit, and a withdrawn position which is
circumferentially away from the deposition unit.
[0009] According to this invention, an arrangement has been made
that the second partition walls are provided so as to cover the
outer cylinder parts of the can-roller, and that the conductance
between the deposition chamber and the adjacent chamber is
determined by the second partition walls. Therefore, for example,
by appropriately setting the circumferential length of the second
partition walls such that the conductance value at the first
clealance becomes a predetermined value, based on a pressure
difference, empirically obtained in advance, between the pressure
in the adjacent chamber and the pressure in the deposition chamber,
and/or based on the size of the first gap that is inevitable for
the sheet-like base material to pass therethrough as a consequence
of the rotation of the can-roller, it becomes possible to surely
separate the atmosphere between the deposition chamber and the
adjacent chamber.
[0010] Further, according to this invention, preferably the
deposition unit comprises: a container box for containing therein a
deposition material, and a heating means which enables the
deposition material to be heated, wherein a lid body, facing the
can-roller, of the container box has two lateral sides equal to or
longer than a generatrix length of the can-roller, and is also bent
at the curvature, the lid body having formed therein a discharge
opening for discharging deposition particles that have been
sublimated or evaporated by the heating with the heating means; and
a moving means for radially moving back and forth the deposition
unit between a deposition position in which the lid body lies close
to the outer peripheral surface of the can-roller at a second gap
that is curved at the curvature, and a separated position in which
the lid body is away from the outer peripheral surface of the
can-roller. When the deposition unit is advanced into the
deposition position at the withdrawn position of the second
partition wall, each of the lateral sides of the lid body
respectively comes into contact with, or comes close to, the first
partition wall, such that the deposition space to be partitioned by
the second gap comes into communication with the adjacent chamber
with the first gap serving as a boundary.
[0011] According to this arrangement, in case deposition is
performed on such a part of the sheet-like base material as is
wound around the can-roller, while the sheet-like base material is
being transported by the base material transportation means, the
deposition unit is moved to the deposition position in which the
lid body of the container box lies close while leaving the second
clearance. Then, the deposition material is heated by the heating
means. Therefore, the sublimated or evaporated deposition particles
will be discharged out of the discharge opening that is formed in
the lid body. At this time, the deposition space partitioned by the
second gap is in communication with the adjacent chamber with the
first gap serving as the boundary and, as described above, the
conductance with the adjacent space has been determined by the
second partition walls. Therefore, the deposition space is surely
separated from the adjacent chamber in terms of atmosphere. In
other words, the degree of closure of the passage from the
discharge opening to the adjacent chamber through the the first gap
via the deposition space will be increased. As a result, even if
the opening area of the discharge opening is set relatively large
in order to obtain an extremely high film-forming rate, the
deposition particles to be discharged out of the discharge opening
come, before spreading to a wider area, to be adhered to, and
deposited on, the portion of the sheet-like base material through
the deposition space as the second clearance, on the one hand. On
the other hand, among the deposition particles that are discharged
out of the discharge opening into the second gap, those particles
that failed to contribute to the deposition on the base material,
come to be returned, e.g., to the container box. As a result, there
will be prevented, to the best extent possible, the occurrence in
that those particles that failed to contribute to the deposition on
the base material wrap around to the adjacent chamber inside the
main chamber, whereby a film is formed on portions (parts) other
than the sheet-like base material. The above-mentioned prevention,
in turn, makes it possible to save the waste of the deposition
material. By the way, if the deposition chamber inclusive of the
deposition space and the adjacent chamber are surely separated in
terms of atmosphere, in case, e.g., pre-processing or
post-processing is to be performed by making use of a predetermined
gas in the adjacent chamber, on the surface of the sheet-like base
material before or after film deposition, the gas in question can
be prevented from flowing into the deposition chamber.
[0012] By the way, when the deposition material is heated by the
heating means, there is a case in which the amount of deposition of
the deposition material in the container box is not stable at the
beginning. If deposition is made on the sheet-like base material in
this kind of state, there will occur a trouble, e.g., in that the
film thickness becomes non-uniform. According to this invention, at
least one of the second partition walls is arranged to be rotatable
between: a shielding position in which such a part of the
can-roller as faces the discharge opening of the lid body is
shielded; and a withdrawn position in which the second partition
walls are circumferentially away from the deposition unit.
Therefore, it is possible to move, prior to starting the deposition
on the sheet-like base material, the deposition unit to the
separated position so that the deposition material in the container
box can be heated by the heating means. At this time, the
deposition material will be sublimated or evaporated in the
container box and, depending on the amount of heating by the
heating means, the amount of deposition will gradually be
stabilized. During the period up to the stabilization, however,
part of the deposition particles that have been sublimated or
evaporated in the container box will be discharged out of the
discharge opening of the lid body toward the sheet-like base
material. Therefore, during the period until the amount of
deposition of the deposition material in the container box becomes
stable, the second partition walls may be moved to the shielding
position. Then, the second partition walls serve also the purpose
of a shutter to prevent the vapor deposition to the part of the
sheet-like base material. In this manner, by using the second
partition walls which separate in terms of atmosphere the main
chamber (adjacent chamber) and the deposition space for dual
purpose as a shutter, not only can the number of parts be reduced,
but also can the volume of the main chamber be advantageously made
smaller as compared with the arrangement in which a shutter is
separately provided in the main chamber. By the way, in case the
second partition walls are used as the shutter, if the deposition
particles get adhered thereto, the second partition walls will be
heated by the latent heat of solidification. By the radiant heat
from this heated shutter the can-roller and the base material that
has been wound therearound are heated, therby resulting in a
possibility of damages thereto. As a solution, preferably it is so
arranged that the second partition walls have formed therein, e.g.,
a coolant circulation passage for circulating a coolant
therethrough and that, after having moved the second partition
walls to the shielding position, the second partition walls can be
cooled.
[0013] Further, according to this invention, a partition plate
shall preferably be disposed on both circumferential ends of the
second partition walls, respectively, the partition plate having a
length equivalent to, or larger than, the generatrix length of the
can-roller. When the second partition walls are moved to the
shielding position or the withdrawn position, any one of the
partition plates and a stationary partition wall that is fixed to
the main chamber and having the length equivalent to the said
partition plate is arranged to come into contact with or come
closer to each other, thereby constituting the first partition
wall. Then, the number of parts can still further be reduced.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] FIG. 1 is a sectional view schematically showing a vacuum
deposition apparatus, in a withdrawn position of the deposition
unit, according to an embodiment of this invention.
[0015] FIG. 2 is a sectional view schematically showing the vacuum
deposition apparatus, in a deposition position of the deposition
unit, according to an embodiment of this invention.
[0016] FIG. 3 is a partial sectional view taken along the line
III-III in FIG. 2.
[0017] FIG. 4 is a perspective view showing a container box of the
deposition unit having integrally assembled therewith a heating
means.
[0018] FIG. 5 is a sectional view taken along the line V-V in FIG.
4.
[0019] FIG. 6 is a partially exploded perspective view showing the
mechanism of moving the second partition walls in a shielding
position.
[0020] FIG. 7 is a partially exploded perspective view showing the
mechanism of moving the second partition walls in the withdrawn
position.
MODES FOR CARRYING OUT THE INVENTION
[0021] With reference to the accompanying drawings a description
will now be made of an embodiment of a vacuum deposition apparatus
of this invention by citing an example in which two deposition
units are disposed around a can-roller so as to deposit (form a
film) on a sheet-like base material Sw. In the following, the
description is made on the presumption: that the can-roller is
contained inside a main chamber in a posture in which an axial
direction of the can-roller coincides with a horizontal direction;
that the axial direction is defined as an X-axis direction; that
the direction crossing at right angles to the X-axis on the same
horizontal plane is defined as a Y-axis direction; and that a
vertical direction crossing at right angles to the X-axis and the
Y-axis is defined as a Z-axis direction. Further, the direction of
"up" and "down" is based on FIG. 1.
[0022] With reference to FIG. 1 to FIG. 3, the vacuum deposition
apparatus CM according to this embodiment is provided with a main
chamber 1. The main chamber 1 has connected thereto a vacuum pump
which is made up of a turbo-molecular pump, rotary pump, and the
like (not illustrated) so as to enable to form a vacuum atmosphere
(e. g., 10.sup.-5 Pa). In the lower center of the main chamber 1,
there is formed a projected part 11 which projects downward and has
a profile of semi-true hexagon as seen in cross-section as shown in
FIG. 1. In each of flat planes 12 of the projected part 11 that is
elongated in the X-axis direction, there is formed a mounting
opening 13 facing the can-roller 2 which will be described
hereinafter. It is thus so arranged that the deposition unit Vu, to
be described hereinafter, can be detachably mounted through the
mounting opening 13.
[0023] In an upper space of the main chamber 1 there are disposed a
plurality of guide rollers Gr as constituting elements of a base
matrial transportation means of this embodiment, the guide rollers
serving: to guide the sheet-like base material Sw to be transferred
from feed rollers (not illustrated) to the can-roller 2; and to
transfer the sheet-like base material Sw, that has gone around the
can-roller 2, to a take-up roller (not illustrated). Although not
explained by illustration, the main chamber 1 has disposed therein
an upstream-side chamber and a downstream-side chamber in a
side-by-side relationship with each other. The upstream-side
chamber is provided with such a feed roller of the base material
transportation means as feeds the sheet-like base material Sw at a
constant speed. The downstream-side chamber is provided with such a
take-up roller of the base material transportation means as takes
up the sheet-like base material Sw that has been formed with a
film, as a result of the sheet-like base material's going around
the can-roller 2 in the main chamber 1. Since known art may be used
as the mechanisms from feeding the sheet-like base material Sw down
to taking it up, further detailed explanations will be omitted.
[0024] The can-roller 2 is so arranged: that it is provided with a
rotary shaft 21; that the rotary shaft 21 is rotatably supported
inside the main chamber 1 by two bearing devices Bm that are
disposed in the X-axis direction (axial direction) at a distance
from each other; and that the can-roller 2 can be driven for
rotation at a given rotational speed by a motor M1 disposed outside
the main chamber 1. Although not particulary illustrated in detail,
each of the bearing devices Bm is of a type in which an inside
bearing on the radially inside and an outside bearing on the
radially outside are integrally assembled together to the frame
body. The bearing devices Bm are thus so arranged that the inside
bearing rotatably supports the rotary shaft 21 and also that the
outside bearing rotatably supports a rotary arm of the second
partition walls which are described hereinafter. By the way, it may
be so arranged that the can-roller 2 contains therein a mechanism
for heating or cooling the sheet-like base material Sw in a known
manner.
[0025] Each of the deposition units Vu has the same construction
with each other and is provided with a storing chamber 30 that is
respectively installed on the flat plane 12 of the main chamber 1,
from the outside thereof, in a manner to enclose the mounting
opening 13. In this embodiment, a description will be made of an
example in which two sets of the deposition units Vu are
respectively mounted on one of the flat plane 12 (center in FIG. 1)
positioned in a vertical direction and on the other of the flat
plane 12 (left side in FIG. 1) that is inclined relative to the
horizontal plane. However, this invention shall not be limited to
the above-mentioned arrangement, but it is also possible, for
example, to mount a deposition unit Vu on all of the flat planes
12, or to mount the deposition unit Vu only on the flat plane 12
that is positioned in the vertical direction. In this case, in the
mounting opening 13 that is free from mounting therein of the
deposition unit Vu, there will be mounted a lid body (in FIG. 1 and
FIG. 2 lid bodies have been omitted) in order to plug the opening
in question. A description will now be made of an example in which
the deposition unit Vu is mounted on the flat plane 12 that is
positioned in the vertical direction. The storing chamber 30 is
provided with a container box 3 for containing therein the
deposition material Vm, and a heating means 4 integrally assembled
into the container box 3 so as to heat the deposition material Vm.
As to the deposition material Vm, a metallic material or an organic
material is used depending on a thin film to be formed on the
sheet-like base material Sw.
[0026] With reference also to FIG. 4 and FIG. 5, the container box
3 is made, e.g., of stainless steel and is constituted by: an outer
vessel 31 with the upper surface (the surface to face the
can-roller 2) being left open; a supporting frame 32 which is fixed
to the outer vessel 31 made by assembling plate-like members 32a,
32b into a lattice shape in a manner to cover an inner wall surface
of the outer vessel 31 except for the upper surface; an inner
vessel 33 which is disposed on the inside of the supporting frame
32 so as to contain therein deposition material Vm; and a lid boby
34 which covers the openings in the upper surfaces of the outer
vessel 31 and of the inner vessel 33. The outer vessel 31 and the
inner vessel 33 have an outline of bottomed rectangular
parallelepipeds that are similar to each other as seen in sectional
view in FIG. 1, and the lengths in the X-axis direction of the
outer vessel 31 and the inner vessel 33 are set equal to, or above,
the generatrix length (length in the X-axis direction) (see FIG. 3)
of the can-roller 2. The lengths (width) in the Y-axis direction of
the outer vessel 31 and the inner vessel 33 are set appropriately
taking into consideration the lateral width (specifically, the
range of deposition in the X-axis direction relative to the base
material Sw) of the sheet-like base material Sw, deposition rate,
and the like.
[0027] In addition, in predetermined positions of the supporting
frame 32 there are disposed a plurality of bolts 35, as supporting
pins, which protrude toward the inside the supporting frame 32. It
is thus so arranged that, when the inner vessel 33 is inserted into
the inside of the outer vessel 31, the inner vessel 33 can be
supported only by the head portion of each of the bolts 35. The lid
body 34 that lies opposite to the outer peripheral surface of the
can-roller 2 is constituted by bending a plate body made up of two
sets of lateral sides 34a and longitudinal sides 34b, respectively
elongated in parallel with each other, with a curvature that
matches the curvature of the outer peripheral surface of the
can-roller 2. In the center of the lid body 34 there is opened a
single discharge opening 34c that coincides with the opening in the
upper surface of the inner vessel 33. The inner edge of the
discharge opening 34c is fixed to an upper end of the inner vessel
33 so that the inner vessel 33 and the lid body 34 are integrated.
Then, when the inner vessel 33 with which the lid body 34 is
integrated as shown in imaginary lines in FIG. 4 is inserted into
the outer vessel 31 from the upper surface opening side, the
opening on the upper surface of the outer vessel 31 will be closed
by the lid body 34.
[0028] The heating means 4 is constituted by a plurality of seathed
heaters 41. Each of the seathed heaters 41 is fixed to the
supporting frame 32 and is arranged to be energized by a power unit
(not illustrated). In case deposition is made while cooling the
sheet-like base material Sw by a cooling mechanism that is housed
in the can-roller 2, there is a possibility that the inner vessel
33 may give rise to a temperature gradient in the vertical
direction due to the fact that the lid body 34 is cooled by
radiation cooling. Therefore, the route of energizing each of the
seath heaters 41 may be arranged to be divided into a plurality of
vertical blocks of the inner vessel 33 so that the electric current
to be energized may be varied from block to block. Then, in case
the inner vessel 33 having contained therein the deposition
material Vm is heated in the vacuum atmosphere by each of the
sheath heaters 41 of the heating means 4 in a state in which the
inner vessel 33 is kept inserted into the outer vessel 31, the
deposition material Vm will be sublimated or evaporated inside the
inner vessel 33, and the sublimated or evaporated deposition
particles will be discharged out of the discharge opening 34c.
[0029] As described above, by employing the arrangement in which
the innver vessel 33 is supported by the head portions of each of
the bolts 35, thermal loss due to heat transmission becomes small,
so that the inner vessel 33 can be efficiently heated. In this
case, by applying mirror finish by, e.g., electrolytic polishing to
the inner surface of the outer vessel 31, when the inner vessel 33
is heated by each of the sheath heaters 41, the inner surface of
the outer vessel 31 serves the function of a reflector that
reflects the heat. In this manner, by the addition of radiant heat,
the inner vessel 33 can still more efficiently be heated. The
filling factor of the deposition material Vm into the inner vessel
33 of the container box 3 is appropriately set within a range of
20% to 40% taking into consideration, e.g., the kind of the
deposition material Vm, or the variation in the deposition rate
accompanied by the fluctuation in the internal pressure in the
inner vessel 33 during the time until the entire sublimation or
evaporation of the deposition material Vm filled into the container
box 3.
[0030] On an outer wall surface of the storing chamber 30, an air
cylinder 5 as the moving means is provided and such a driving shaft
51 of the air cylinder 5 as extends through the outer wall surface
into the inside of the storing chamber is connected to the
container box 3. By means of the air cylinder 5, the container box
3 of the deposition unit Vu is free to move between: a separated
position, as shown in FIG. 1, in which the lid body 34 is away from
the outer peripheral surface of the can-roller 2; and a deposition
position, as shown in FIG. 2, in which the lid body 34 is close to
the outer peripheral surface of the can-roller 2 while leaving a
gap (this gap is defined as "a second gap Gp2") that is curved at
the above-mentioned curvature. This second gap Gp2 becomes a
deposition space that is partitioned by the lid body 34 and such a
portion of the can-roller 2 as lies opposite to the lid body.
Inside the main chamber 1, in a manner positioned around the
can-roller 2, there are respectively provided such stationary
partition walls 6a, 6b, 6c, 6d as are fixed to the inner wall of
the main chamber 1 and as are elongated in the X-axis direction. By
means of the stationary partition walls 6a, 6b, 6c, 6d there are
respectively defined, inside the main chamber 1, deposition
chambers Vs in communication with the storing chamber 30 and having
contained therein the deposition unit Vu are respectively
partitioned. In this case, although not explained by particularly
illustrating, it is preferable to arrange that the deposition
chamber Vs is arranged to be capable of being evacuated independent
of the main chamber 1. Inside the main chamber 1 there are
respectively further provided second partition walls 7a, 7b (see
FIG. 2) which cover the outer cylinder part at the above-mentioned
curvature through a clearance (hereinafter, this clearance is
defined as "a first gap Gp1") that is bent at the above-mentioned
curvature along the outer cylinder part of the can-roller 2. The
deposition chamber Vs and the adjacent chamber As (e.g., transfer
space for the sheet-like base material Sw) inside the main chamber
1 are brought into communication with each other with the first gap
Gp1 serving as a boundary. It is thus so arranged that the
conductance value between the deposition chamber Vs and the
adjacent chamber As can be determined by the second partition walls
7a, 7b.
[0031] With reference also to FIG. 6 and FIG. 7, the second
partition walls 7a, 7b are constituted by bending, e.g., stainless
steel plate members at the above-mentioned curvature and are
respectively installed between a front end of each of rotary arms
71, 72 rotatably supported by outer bearing (not illustrated) of
each of the bearing devices Bm that are disposed at a distance from
each other in the X-axis direction. In the outer peripheral surface
of each of the bearing devices Bm, there is respectively formed set
of teeth 73a, 73b at a given pitch. Each set of teeth 73a, 73b is
in mesh with a rack 74a, 74b that is respectively driven by a motor
(not illustrated). When the racks 74a, 74b are moved by the motor
(not illustrated) in the Y-axis direction, the second partition
walls 7a, 7b rotate along the outer peripheral surface of the
can-roller 2 in the directions that are opposite to each other. In
this case, such surfaces of respective rotatory arms 71, 72 as face
each other are subjected to counter boring. By overlapping the
counterbored surfaces 71a, 71b while leaving the first space part
S1 therebetween, both the second partition walls 7a, 7b are
arranged to be respectively moveable while maintaining the first
gap part Gp1 in the periphery of the can-roller 2. According to
this arrangement, the second partition walls 7a, 7b become
rotatable, with the rotary shaft 21 of the can-roller 2 serving as
the center of rotation, between: a shielding position in which such
a portion of the can-roller 2 as faces the discharge opening 34c of
the lid body 34; and a withdrawn position in which the second
partition walls 7a, 7b are circumferentially away from the
deposition units Vu. In this case, in the route of rotation of the
second partition walls 7a, 7b inclusive of the shielding position
and the withdrawn position of the second patition walls 7a, 7b, the
inner wall surface of the main chamber 1 is formed such that: there
will be formed a second space part S2 between the end suface in the
X-axis direction (axial direction) of each of the second partition
walls 7a, 7b and such inner wall surface of the main chamber 1 as
lies opposite to the end surface; and that a third space part S3 is
formed between the outer peripheral surface of each of the second
partition walls 7a, 7b and the inner wall surface of the main
chamber 1.
[0032] When the deposition unit Vu is in the separate position and
the second partition walls 7a, 7b are in the shielding position,
respectively, as shown in FIG. 1, the deposition chamber Vs and the
adjacent chamber As are in communication with each other only
through the first space part S1 through the third space part S3
(see FIG. 7). However, the deposition chamber Vs and the adjacent
chamber As can surely be separated in terms of atmosphere by
appropriately setting, e.g., the area of the counter-bored surfaces
71a, 71b so that the conductance value in the first space part S1
attains a predetermined value due to: the size of such second space
part S2 and the third space part S3 as are unavoidable from the
viewpoint of the constitution of the apparatus; and the pressure
difference between such a pressure in the adjacent chamber As and
the pressure in the deposition chamber Vs as can be empirically
obtained in advance. On the ther hand, in a state in which the
second partition walls 7a, 7b are moved to the withdrawn position
from the state as shown in FIG. 1, the deposition chamber Vs and
the adjacent chamber As are in communication with each other
through the second gap Gp2 in addition to the first space part S1
to the third space part S3. However, in the same manner as above,
due to: the pressure difference between the pressure in the
adjacent chamber As and the pressure in the deposition chamber Vs;
and the size of such first gap Gp1 as is unavoidable for the
sheet-like base material Sw to pass therethrough as a result of the
rotation of the can-roller 2, the deposition chamber Vs and the
adjacent chamber As can surely be separated in terms of atmosphere
if the circumferential length of the second partition walls 7a, 7b
is appropriately set so that the conductance value in the first gap
Gp1 attains a predetermined value. Then, even if the deposition
units Vu have been moved to the deposition position, and the second
partition walls 7a, 7b have been moved to the withdrawn positions,
respectively, as shown in FIG. 2, the second gap Gp2 as the
deposition space can maintain the state in which the atmosphere is
separated from that in the adjacent chamber As. Although not
explained by particularly illustrating, it may be so arranged: that
a coolant circulation passage for circulating therein a coolant is
formed in the second partition walls 7a, 7b; and that, after having
moved the second partition walls 7a, 7b to the shielding position,
the coolant is circulated in the circulation passage through the
bearing device Bm so as to cool the second partition walls 7a, 7b
to a predetermined temperature.
[0033] Further, at an end suface in the circumferential direction
of each of the second partition walls 7a, 7b, there is respectively
mounted a partition wall plate 75a, 75b, 75c, 75d having a length
equivalent to or above the generatrix length of the can-roller 2.
In the shielding position of the second partition walls 7a, 7b as
shown in FIG. 1, each of the partition wall plates 75a, 75b, 75c,
75d comes into contact with the radially inner end surface of the
stationary partition walls 6a, 6b, 6c, respectively. On the other
hand, in the withdrawn position of the second partition walls 7a,
7b as shown in FIG. 2 in which the second second partition walls
7a, 7b are rotated in the direction away from each other, the
partition wall plate 75b of one 7a of the second partition walls
comes into contact with the stationary partition wall 6a, and the
partition wall plate 75c of the other 7b of the second partition
walls comes into contact with the stationary partition wall 6c,
respectively. And in the withdrawn position of the second partition
walls 7a, 7b the container box 3 of the deposition unit Vu is
proceded into the deposition position. Then, each of the lateral
sides 34a, 34a of the lid body 34 thus comes into contact with each
of the respective partition wall plates 75a, 75d of each of the
second partition walls 7a, 7b so that the first gap Gp1 and the
second gap Gp2 come to be communicated with each other around the
periphery of the can-roller 2 (see FIG. 2). In this case, each of
the partition wall plates 75a, 75b, 75c, 75d and the stationary
partition walls 6a, 6b, 6c constitute the first partition wall
according to this embodiment.
[0034] In case deposition is performed on such a part of the
sheet-like base material Sw as is wound around the can-roller 2
while the sheet-like base material Sw is being transported by the
base material transportation means in the above-mentioned vacuum
deposition apparatus CM, first, the container box 3 of the
deposition unit Vu is moved to the separated position, and each of
the second partition walls 7a, 7b is moved to the shielding
position, respectively. In this state the deposition material Vm is
heated by the heating means 4. Then, the deposition material Vm
inside the container box 3 will be sublimated or evaporated. The
amount of deposition will become gradually stabilized depending on
the amount of heating by the heating means 4. By that time, part of
the deposition particles that have been sublimated or evaporated
inside the container box 3 will be discharged toward the sheet-like
base material Sw out of the discharge opening 34c of the lid body
34, thereby getting adhered to the second partition walls 7a, 7b,
respectively. Then, once the amount of deposition of the deposition
material Vm inside the container box 3 has been stabilized, each of
the second partition walls 7a, 7b is respectively moved to the
withdrawn position and, thereafter, the container box 3 of the
deposition unit Vu is moved to the deposition position. According
to this arrangement, the deposition space is formed inside the main
chamber 1. When the sheet-like base material Sw is transported by
the base material transportation means, deposion particles to be
discharged out of the discharge opening 34c will be adhered to, and
deposited on, such a portion of the sheet-like base material Sw as
is wound around the can-roller 2, thereby getting deposited in a
continuous manner.
[0035] According to this embodiment, the deposition chamber Vs and
the adjacent chamber As can constantly be separated surely in terms
of atmosphere. Then, as shown in FIG. 2, when the deposition unit
Vu is in the deposition position, and the second partition walls
7a, 7b are in the withdrawn position, the sealing degree is
increased in the passage from the discharge opening 34c to the
adjacent chamber As through the first gap Gp1 via the second gap
Gp2 as the deposition space. As a result, even if the area of the
opening of the discharge opening 34c is set relatively large in
order to obtain an extremely high film forming rate, the deposition
particles to be discharged out of the discharge opening 34c come to
be adhered to, and deposited on, a portion of the sheet-like base
material Sw via the second gap Gp2 before spreading to a wide
range. On the other hand, out of the deposition particles that were
discharged out of the discharge opening 34c to the second gap Gp2,
those failing to contribute to the deposition on the base material
Sw come to be returned to the inner vessel 33. According to this
arrangement, the deposition particles that wrap around to the main
chamber 1 inclusive of the adjacent chamber As so as to get adhered
to the portion (part) other than the sheet-like base material Sw
can be restrained to the maximim extent possible and, as a result,
waste of the deposition material Vm can be prevented. By the way,
the deposition chamber Vs inclusive of the deposition space is
separated in terms of atmosphere from the adjacent chamber As.
Therefore, in case pre-processing or post-processing is performed
to the surface of the sheet-like base material Sw before or after
film formation in the adjacent chamber As, e.g., by using a
predetermined gas, the above-mentioned gas can also be prevented
from entering the deposition chamber Vs. In addition, the second
partition walls 7a, 7b also serve the function of a shutter to
prevent the deposition on such a part of the sheet-like base
material Sw. In this manner, by causing the second partition walls
7a, 7b which separate the atmosphere of the adjacent chamber As
inside the main chamber 1 and the deposition chamber Vs, to serve
the dual function also of a shutter, not only can the number of
constituting parts be reduced, but also can the volume of the main
chamber 1 be advantageously made smaller as compared with the one
having a separate shutter in the main chamber 1. Still furthermore,
since the first partition wall is arranged to be constituted by
each of the partition wall plates 75a, 75b, 75c, 75d and the
stationary partition walls 6a, 6b, 6c, the number of constituting
parts can further be reduced.
[0036] Descriptions have so far been made of an embodiment of this
invention, but this invention shall not be limited to the one
according to the above embodiment. Various modifications are
possible within a range not departing from the substance of this
invention. In the above-mentioned embodiment, a description has
been made of an example of an arrangement in which the deposition
unit Vu is provided with a storing chamber 30 containing therein a
container box 3, the deposition unit Vu being detachably mounted on
the main chamber 1. This invention, however, shall not be limited
to the above, but the storing chamber may be omitted so that the
container box 3 may be arranged to be disposed directly inside the
main chamber 1. Further, in the above-mentioned embodiment, a
description was made of an example in which two pieces of partition
walls 7a, 7b are rotatable along the outer peripheral surface of
the can-roller 2. However, this invention shall not be limited to
the above but, in case the main chamber 1 is provided with a
container box 3 in a single piece of deposition unit Vu, it is
possible to arrange that the second partition wall positioned in
one of the circumferential directions of the container box 3 in a
fixed manner.
[0037] Further, in the above-mentioned embodiment, as the moving
means for moving the container box 3 of the deposition unit Vu
rlelative to the outer peripheral surface of the can-roller 2, a
description was made of an example of the air cylinder 5 provided
on the outer wall surface of the storing chamber 30. But this
invention shall not be limited to the above, but other driving
means may be used instead, such as a motor and the like. In
addition, it may be so arranged that, when the container box 3 of
the deposition unit Vu is moved back and forth, a known guide
mechanism for guiding the movement may be provided inside the
storing chamber 30.
[0038] Furthermore, in the above-mentioned embodiment, a
description was made of an example in which, when the second
partition walls 7a, 7b and the container box 3 are moved, each of
the partition wall plates 75a, 75b, 75c, 75d comes into contact
with the radially inner end surface of the stationary partition
wall 6a, 6b, 6c, respectively and each of the lateral sides 34a,
34a of the lid body 34 comes into contact with each of the
partition wall plates 75a, 75d, respectively, but this invention
shall not, however, be limited to the above, but the elements in
question may also be so arranged as to be close to each other
through a clearance in the range not allowing the deposition
particles discharged from the discharge opening 34c to the second
gap Gp2 to leak into the main chamber 1. In this case, preferably a
stopper shall be provided in order to appropriately limit the range
of rotation of the second partition walls.
EXPLANATION OF MARKS
[0039] CM vacuum deposition apparatus [0040] Gr guide roller (base
material trapsortation means) [0041] Sw sheet-like base material
[0042] Vu deposition unit [0043] 1 main chamber [0044] 2 can-roller
[0045] 3 container box [0046] 34 lid body of container box [0047]
34a lateral side [0048] 34c discharge opening [0049] 4 heating
means [0050] 5 air cylinder (moving means) [0051] 7a, 7b second
partition wall [0052] 75a, 75b, 75c, 75d partition wall plate
(first partition wall) [0053] 6a, 6b, 6c stationary partition wall
(first partition wall) [0054] As adjacent chamber [0055] Gp1 first
gap (vapor deposition space) [0056] Gp2 second gap [0057] S1 first
space part [0058] S2 second space part [0059] S3 third space
part
* * * * *