U.S. patent application number 16/502667 was filed with the patent office on 2021-01-07 for transverse-electric (te) pass polarizer.
The applicant listed for this patent is GLOBALFOUNDRIES Inc.. Invention is credited to Yusheng Bian, Ajey Poovannummoottil Jacob.
Application Number | 20210003776 16/502667 |
Document ID | / |
Family ID | |
Filed Date | 2021-01-07 |
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United States Patent
Application |
20210003776 |
Kind Code |
A1 |
Bian; Yusheng ; et
al. |
January 7, 2021 |
TRANSVERSE-ELECTRIC (TE) PASS POLARIZER
Abstract
One illustrative TE pass polarizer disclosed herein includes an
input/output layer, a first buffer layer positioned above at least
a portion of the input/output layer, a layer of epsilon-near-zero
(ENZ) material positioned above at least a portion of the first
buffer layer, and a metal-containing capping layer positioned above
at least a portion of the layer of ENZ material.
Inventors: |
Bian; Yusheng; (Ballston
Lake, NY) ; Jacob; Ajey Poovannummoottil;
(Watervliet, NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
GLOBALFOUNDRIES Inc. |
Grand Cayman |
|
KY |
|
|
Appl. No.: |
16/502667 |
Filed: |
July 3, 2019 |
Current U.S.
Class: |
1/1 |
International
Class: |
G02B 6/126 20060101
G02B006/126 |
Claims
1. A transverse-electric (TE) pass polarizer, comprising: a base
semiconductor substrate; an input/output layer positioned above the
base semiconductor substrate; an insulation material positioned
between the input/output layer and the base semiconductor layer; a
first buffer layer positioned above at least a portion of the
input/output layer; a second buffer layer positioned between the
input/output layer and the first buffer layer; a layer of
epsilon-near-zero (ENZ) material positioned above at least a
portion of the first buffer layer; a third buffer layer positioned
between the first buffer layer and the layer of ENZ material; a
metal-containing capping layer positioned above at least a portion
of the layer of ENZ material; and a fourth buffer layer positioned
between the layer of ENZ material and the metal-containing capping
layer.
2. (canceled)
3. The TE pass polarizer of claim 1, wherein the input/output layer
comprises one of silicon, silicon nitride, SiON, AlN or a polymer,
the layer of ENZ material comprises one of graphene, TiN, InAsSb,
BSTS (Bi.sub.1.5Sb.sub.0.5Te.sub.1.8Se.sub.1.2), AZO or ITO and the
first buffer layer comprises one of SiON, Si.sub.3N.sub.4,
SiO.sub.2, HfO.sub.2, ZrO.sub.2, AlN, TiO.sub.2, ZnO,
Al.sub.2O.sub.3, MgO, CaF.sub.2, SiCOH, MgF.sub.2 or a polymer.
4. The TE pass polarizer of claim 1, wherein the TE pass polarizer
comprises an optical axis and wherein the input/output layer, the
first buffer layer, the layer of ENZ material and the
metal-containing capping layer each comprise a lateral width in a
direction that is transverse to a direction corresponding to the
optical axis, wherein the lateral width of the input/output layer,
the first buffer layer, the layer of ENZ material and the
metal-containing capping layer are all substantially the same.
5. The TE pass polarizer of claim 1, wherein the layer of ENZ
material is a conformal layer of material that engages a top
surface and opposing lateral sidewalls of the first buffer
layer.
6. (canceled)
7. The TE pass polarizer of claim 1, wherein the first buffer layer
and the fourth buffer layer have substantially the same thickness
and are comprised of the same material.
8. The TE pass polarizer of claim 1, wherein the layer of ENZ
material is positioned on and in contact with an upper surface of
the third buffer layer, the fourth buffer layer is positioned on
and in contact with an upper surface of the layer of ENZ material
and the metal-containing capping layer is positioned on and in
contact with an upper surface of the fourth buffer layer.
9. The TE pass polarizer of claim 7, wherein the layer of ENZ
material is a conformal layer of material that engages a top
surface and opposing lateral sidewalls of the first buffer
layer.
10. (canceled)
11. The TE pass polarizer of claim 1, wherein the second buffer
layer is positioned on and in contact with an upper surface of the
input/output layer, the first buffer layer is positioned on and in
contact with an upper surface of the second buffer layer, the third
buffer layer is positioned on and in contact with an upper surface
of the first buffer layer, the layer of ENZ material is positioned
on and in contact with an upper surface of the third buffer layer,
the fourth buffer layer is positioned on and in contact with an
upper surface of the layer of ENZ material and the metal-containing
capping layer is positioned on and in contact with an upper surface
of the fourth buffer layer.
12. The TE pass polarizer of claim 1, wherein the TE pass polarizer
comprises an optical axis and wherein the input/output layer, the
first buffer layer, the layer of ENZ material, the second, third
and fourth buffer layers and the metal-containing capping layer
each comprise a lateral width in a direction that is transverse to
a direction corresponding to the optical axis, wherein a lateral
width of at least one of the first buffer layer, the layer of ENZ
material, the second, third and fourth buffer layers and the
metal-containing capping layer is greater than the lateral width of
the input/output layer.
13. The TE pass polarizer of claim 6, further comprising fifth and
sixth buffer layers, wherein the fifth buffer layer is positioned
between the layer of ENZ material and the fourth buffer layer, and
the sixth buffer layer is positioned between the fourth buffer
layer and the metal-containing capping layer.
14. The TE pass polarizer of claim 13, wherein the third buffer
layer is positioned on and in contact with an upper surface of the
input/output layer, the first buffer layer is positioned on and in
contact with an upper surface of the third buffer layer, the second
buffer layer is positioned on and in contact with an upper surface
of the first buffer layer, the layer of ENZ material is positioned
on and in contact with an upper surface of the second buffer layer,
the fifth buffer layer is positioned on and in contact with an
upper surface of the layer of ENZ material, the fourth buffer layer
is positioned on and in contact with an upper surface of the fifth
buffer layer, the sixth buffer layer is positioned on and in
contact with an upper surface of the fourth buffer layer and the
metal-containing capping layer is positioned on and in contact with
an upper surface of the sixth buffer layer.
15. The TE pass polarizer of claim 13, wherein the first and fourth
buffer layers comprise silicon nitride and the second, third, fifth
and sixth buffer layers comprise silicon dioxide.
16. A transverse-electric (TE) pass polarizer, comprising: a base
semiconductor substrate; an input/output layer positioned above the
base semiconductor substrate; an insulation material positioned
between the input/output layer and the base semiconductor layer; a
first buffer layer positioned above at least a portion of the
input/output layer; a second buffer layer positioned above the
first buffer layer; a third buffer layer positioned above the
second buffer layer; a layer of epsilon-near-zero (ENZ) material
positioned above at least a portion of the third buffer layer; a
fourth buffer layer positioned above the layer of ENZ material; and
a metal-containing capping layer positioned above at least a
portion of the fourth buffer layer.
17. The TE pass polarizer of claim 16, wherein the first, third and
fourth buffer layers comprise silicon dioxide and the second buffer
layer comprises silicon nitride.
18. A transverse-electric (TE) pass polarizer, comprising: a base
semiconductor substrate; an input/output layer positioned above the
base semiconductor substrate; an insulation material positioned
between the input/output layer and the base semiconductor layer; a
first buffer layer positioned above at least a portion of the
input/output layer; a second buffer layer positioned above the
first buffer layer; a third buffer layer positioned above the
second buffer layer; a layer of epsilon-near-zero (ENZ) material
positioned above at least a portion of the third buffer layer; a
fourth buffer layer positioned above the layer of ENZ material; a
fifth buffer layer positioned above the fourth buffer layer; a
sixth buffer layer positioned above the fifth buffer layer; and a
metal-containing capping layer positioned above at least a portion
of the sixth buffer layer.
19. The TE pass polarizer of claim 18, wherein the first, third,
fourth and sixth buffer layers comprise silicon dioxide and the
second and fifth buffer layers comprise silicon nitride.
20. The TE pass polarizer of claim 18, wherein the TE pass
polarizer comprises an optical axis and wherein the input/output
layer, the first buffer layer, the layer of ENZ material, the
second, third, fourth, fifth, and sixth buffer layers and the
metal-containing capping layer each comprise a lateral width in a
direction that is transverse to a direction corresponding to the
optical axis, wherein a lateral width of at least one of the first
buffer layer, the layer of ENZ material, the second, third, fourth,
fifth and sixth buffer layers and the metal-containing capping
layer is greater than the lateral width of the input/output
layer.
21. The TE pass polarizer of claim 18, wherein the input/output
layer comprises one of silicon, silicon nitride, SiON, AlN or a
polymer, the layer of ENZ material comprises one of graphene, TiN,
InAsSb, BSTS (Bi.sub.1.5Sb.sub.0.5Te.sub.1.8Se.sub.1.2), AZO or ITO
and the first buffer layer comprises one of SiON, Si.sub.3N.sub.4,
SiO.sub.2, HfO.sub.2, ZrO.sub.2, AlN, TiO.sub.2, ZnO,
Al.sub.2O.sub.3, MgO, CaF.sub.2, SiCOH, MgF.sub.2 or a polymer.
22. The TE pass polarizer of claim 18, wherein the TE pass
polarizer comprises an optical axis and wherein the input/output
layer, the first buffer layer, the second buffer layer, the third
buffer layer, the fourth buffer layer, the layer of ENZ material
and the metal-containing capping layer each comprise a lateral
width in a direction that is transverse to a direction
corresponding to the optical axis, wherein the lateral width of the
input/output layer, the first buffer layer, the second buffer
layer, the third buffer layer, the fourth buffer layer, the layer
of ENZ material and the metal-containing capping layer are all
substantially the same.
23. The TE pass polarizer of claim 18, wherein the second buffer
layer and the fifth buffer layer have substantially the same
thickness and are comprised of the same material.
Description
BACKGROUND
Field of the Disclosure
[0001] Generally, the present disclosure relates to various novel
embodiments of a transverse-electric (TE) pass polarizer.
Description of the Related Art
[0002] Light is a form of electromagnetic radiation that is
comprised of electric and magnetic fields. The electric field and
the magnetic field (which are always perpendicular to one another
in free space) are oriented transverse to the direction of travel
of the light. However, the orientation of the axis of oscillation
of the electric field and the axis of oscillation of the magnetic
field relative to the direction of travel of the light are
different, depending upon the transmission mode of the light. The
transmission modes for such light waves include (1) the
transverse-electric and magnetic (TEM) mode, (2) the
transverse-electric (TE) mode, and (3) the transverse-magnetic (TM)
mode. In the TEM mode, both the electric field and the magnetic
field are transverse to the direction of travel. In the TE mode,
the electric field is transverse to the direction of propagation of
the light while the magnetic field is normal to the direction of
propagation of the light. In the TM mode, the magnetic field is
transverse to the direction of propagation of the light while the
electric field is normal to the direction of propagation of the
light.
[0003] An optical waveguide is a physical structure that guides
electromagnetic waves in the optical spectrum. As noted above,
unpolarized light consists of wave vibrations in many directions
perpendicular to the direction of travel of the light. Light can
propagate along a waveguide in various ways, i.e., the TE mode and
the TM mode. Waveguides are polarizers that can be used to filter
out or block all unwanted vibrations in the unpolarized light.
Polarization filters are important elements in semiconductor-based
integrated optical circuits, such as signal processing circuits. A
waveguide (i.e., a pass polarizer) is used to filter out one
polarization component propagating in an optical waveform, e.g.,
such a waveguide may be used to block substantially all of the TM
mode in an incoming TEM mode light thereby allowing only the TE
mode of the incoming light to pass through the waveguide.
Integrated polarizers must be compatible with the specific
waveguide structure. In one illustrative example, a basic TE-pass
polarizer consists of a sandwich layer system positioned on top of
the waveguide structure. This layer might be formed from a
dielectric layer (e.g., yttrium oxide) followed by an absorbing
metallic layer (e.g., aluminum). As a result, TM-polarized light is
coupled to the surface plasmons of the metallic layer and absorbed.
By contrast, the TE polarized light is not strongly influenced by
the layer system and passes through the waveguide. The structure
and materials used for a semiconductor-based integrated pass
polarizer must be consistent with the materials and fabrication
methods used to form the remaining parts or components of the
integrated circuit product, e.g., the CMOS-based transistors that
are part of the IC product. Moreover, as with most integrated
circuit products, there is a constant drive to reduce the size or
footprint of all elements of any circuit including pass polarizer
structures.
[0004] The present disclosure is directed to various novel
embodiments of a TE pass polarizer for use in integrated optical
circuits.
SUMMARY
[0005] The following presents a simplified summary of at least one
disclosed embodiment in order to provide a basic understanding of
some aspects of the subject matter disclosed herein. This summary
is not an exhaustive overview of all of the subject matter
disclosed herein. It is not intended to identify key or critical
elements of the subject matter disclosed herein or to delineate the
scope of any claims directed to any of the subject matter disclosed
herein. Its sole purpose is to present some concepts in a
simplified form as a prelude to the more detailed description that
is discussed later in the application.
[0006] The present disclosure is generally directed to various
novel embodiments of a TE pass polarizer for use in integrated
optical circuits. One illustrative TE pass polarizer disclosed
herein includes an input/output layer, a first buffer layer
positioned above at least a portion of the input/output layer, a
layer of ENZ material positioned above at least a portion of the
first buffer layer, and a metal-containing capping layer positioned
above at least a portion of the layer of ENZ material.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] The disclosure may be understood by reference to the
following description taken in conjunction with the accompanying
drawings, in which like reference numerals identify like elements,
and in which:
[0008] FIGS. 1-16 depict various novel embodiments of a TE pass
polarizer for use in integrated optical circuits.
[0009] While the subject matter disclosed herein is susceptible to
various modifications and alternative forms, specific embodiments
thereof have been shown by way of example in the drawings and are
herein described in detail. It should be understood, however, that
the description herein of specific embodiments is not intended to
limit the invention to the particular forms disclosed, but on the
contrary, the intention is to cover all modifications, equivalents,
and alternatives falling within the spirit and scope of the
invention as defined by the appended claims.
DETAILED DESCRIPTION
[0010] Various illustrative embodiments are described below. In the
interest of clarity, not all features of an actual implementation
are described in this specification. It will of course be
appreciated that in the development of any such actual embodiment,
numerous implementation-specific decisions must be made to achieve
the developers' specific goals, such as compliance with
system-related and business-related constraints, which will vary
from one implementation to another. Moreover, it will be
appreciated that such a development effort might be complex and
time-consuming, but would nevertheless be a routine undertaking for
those of ordinary skill in the art having the benefit of this
disclosure.
[0011] The present disclosure will now be described with reference
to the attached figures. Various structures, systems and devices
are schematically depicted in the drawings for purposes of
explanation only and so as to not obscure the present disclosure
with details which are well known to those skilled in the art.
Nevertheless, the attached drawings are included to describe and
explain illustrative examples of the present disclosure. The words
and phrases used herein should be understood and interpreted to
have a meaning consistent with the understanding of those words and
phrases by those skilled in the relevant art. No special definition
of a term or phrase, i.e., a definition that is different from the
ordinary or customary meaning as understood by those skilled in the
art, is intended to be implied by consistent usage of the term or
phrase herein. To the extent that a term or phrase is intended to
have a special meaning, i.e., a meaning other than that understood
by skilled artisans, such a special definition shall be
expressively set forth in the specification in a definitional
manner that directly and unequivocally provides the special
definition for the term or phrase.
[0012] Of course, the inventions disclosed herein should not be
considered to be limited to the illustrative examples depicted and
described herein. The various components and structures of the TE
pass polarizer disclosed herein may be formed using a variety of
different materials and by performing a variety of known processing
techniques, e.g., chemical vapor deposition (CVD), low-pressure
chemical vapor deposition (LPCVD), plasma enhanced chemical vapor
deposition (PECVD), atomic layer deposition (ALD), a thermal
growth, as well as known patterning and etching techniques, etc.
The thicknesses of the various layers of material depicted herein
may also vary depending upon the particular application. With
reference to the attached figures, various illustrative embodiments
of the devices disclosed herein will now be described in more
detail.
[0013] FIGS. 1-4 depict one illustrative embodiment of a TE pass
polarizer 10 disclosed herein. FIG. 1 is a cross-sectional view
taken through the TE pass polarizer 10 in a direction that is
parallel to an optical axis 24 of the TE pass polarizer 10. In the
depicted example, the various embodiments of the TE pass polarizers
disclosed herein will be fabricated on a semiconductor-on-insulator
(SOI) substrate. In general, the SOI structure comprises a base
semiconductor substrate 12, a buried insulation layer 14 (sometimes
referred to as a "BOX" layer when the insulation layer comprises
silicon dioxide) and an active semiconductor layer 13 that is
positioned on the buried insulation layer 14. Traditionally, and in
one illustrative embodiment, the base semiconductor substrate 12
may comprise silicon, the buried insulation layer 14 may comprise
silicon dioxide and the active semiconductor layer 13 may comprise
silicon. Of course, the base semiconductor substrate 12 and the
active semiconductor layer 13 may be made of any of a variety of
different semiconductor materials, and the materials for the base
semiconductor substrate 12 and the active semiconductor layer 13
need not be made of the same material in all applications, but such
a situation may occur in some applications. Similarly, the buried
insulation layer 14 may be comprised of a variety of different
insulating materials. The thickness of the layers of the SOI
substrate may vary depending upon the particular application. The
manner in which such SOI substrates are manufactured are well known
to those skilled in the art.
[0014] With reference to FIG. 1, in general, this embodiment of the
TE pass polarizer 10 comprises a waveguide 11 that includes an
input/output layer 16 that is fabricated from the active
semiconductor layer 13, an insulator or buffer layer 18, a layer of
epsilon-near-zero (ENZ) material 20 and a metal capping layer 22.
The input/output layer 16 has an entrance 16A and an exit 16B.
Additional insulating material 26 is formed above and around the
waveguide 11. The insulating material 26 may be any type of
insulating material, e.g., silicon dioxide, or any other material
commonly used in back-end-of-line (BEOL) manufacturing processes.
Although the insulating material 26 is simplistically depicted as
being a single layer of material, in practice, the insulating
material 26 may comprise several layers of material. As will be
appreciated by those skilled in the art, the insulating material 26
and the buried insulation layer 14 function as cladding layers for
the waveguide 11. The TE pass polarizer 10 may be operatively
coupled to schematically depicted components 17, 19 of an optical
circuit. In one illustrative example, the component 17 may be a
silicon or nitride based waveguide or silicon or nitride based edge
coupler connecting with an external optical field with both TE and
TM polarizations, etc., while the component 19 may be another
silicon or nitride based waveguide or other passive devices working
for TE polarization, or active components such as modulators and
photodetectors. Also depicted in FIG. 1 are locations where various
cross-sectional views depicted in the attached drawings are taken.
More specifically, the view X-X is a cross-sectional view taken at
a location between the entrance 16A of the input/output layer 16
and the location where the other material layers of the waveguide
11 are positioned above the input/output layer 16, while the view
Y-Y is a cross-sectional view taken through all of the material
layers of the waveguide 11.
[0015] The TE pass polarizer 10 receives a magnetic wave (i.e.,
light) from the component 17 via the entrance 16A of the
input/output layer 16 and transmits substantially only TE mode
light to the component 19 via the exit 16B of the input/output
layer 16. In one illustrative example, the light received from the
component 17 may comprise both TE and TM polarization modes. In
other embodiments, depending upon the particular application, the
incoming light from the component 17 may be substantially free of
the TM polarization mode. In general, irrespective of the
composition and characteristics of the incoming magnetic wave
received from the component 17, the TE pass polarizer 10 is adapted
to allow substantially only the TE mode of the incoming light to
pass through to the component 19, as substantially all of the other
components of the entering light are substantially absorbed or
attenuated within the TE pass polarizer 10.
[0016] The thicknesses of the materials of the waveguide 11 as well
as their other lateral dimensions may vary depending upon the
particular application. In one illustrative embodiment, the
input/output layer 16 may be comprised of silicon and it may have a
thickness of about 20-500 nm. In other cases, the input/output
layer 16 may be made of other materials such as, for example,
silicon nitride (SiN), SiON, AlN, a III-V material or a polymer,
etc. The buffer layer 18 may have a thickness of about 20-800 nm,
the layer of ENZ material 20 may have a thickness of about 1-200
nm, and the metal capping layer 22 may have a thickness of about
10-300 nm. The buffer layer 18 may be comprised of a variety of
different materials, e.g., silicon nitride
(Si.sub.3N.sub.4n=.about.2 @ 1.31 .mu.m, 1.55 .mu.m), silicon
dioxide (SiO.sub.2 n=1.45 @ 1.31 .mu.m, 1.55 .mu.m), SiON,
HfO.sub.2 (n=2.0754 @ 1.31 .mu.m; n=2.0709 @ 1.55 .mu.m), ZrO.sub.2
(n=2.1155 @ 1.31 .mu.m; n=2.1103 @ 1.55 .mu.m), AlN, TiO.sub.2
(n=2.4622 @ 1.31 .mu.m; n=2.4538 @1.55 .mu.m), ZnO (n=1.9318 @ 1.31
.mu.m; n=1.9267 @ 1.55 .mu.m), Al.sub.2O.sub.3 (n=1.7503 @ 1.31
.mu.m; 1.7462 @ 1.55 .mu.m), MgO (n=1.7178 @ 1.31 .mu.m; 1.7146 @
1.55 .mu.m), CaF.sub.2 (n=1.4272 @ 1.31 .mu.m; 1.4260 @ 1.55
.mu.m), OMCTS (SiCOH) (n=1.406 @ 1.31 .mu.m, 1.55 .mu.m), MgF.sub.2
(n=1.3718 @ 1.31 .mu.m; 1.3705 @ 1.55 .mu.m), a polymer, etc.
(where "n" is the refractive index).
[0017] As will be appreciated by those skilled in the art after a
complete reading of the present application, the function of the
buffer layer 18 is to, among other things, separate the materials
of the waveguide that have a relatively higher index of refraction
from one another and/or to separate the layer of ENZ material 20
from the metal capping layer 22 and/or the input/output layer 16.
In the example depicted in FIG. 1, the buffer layer 18 is used to
separate the layer of ENZ material 20 from the input/output layer
16. Additional embodiments of the waveguides disclosed herein
(discussed below) include additional buffer layers that may be made
of different materials. Including one or more of such buffer layers
in the waveguides disclosed herein enables the waveguide to achieve
relatively strong confinement of the light near these buffer
layer(s) (with high intensity) while maintaining a reasonable loss,
i.e., the light is confined at least partially in the buffer
layer(s) (with a relatively lower index of refraction) instead of
all of the light being confined in the metal capping layer 22.
[0018] As used herein and in the attached claims, the layer of ENZ
material 20 shall be understood to be a material having a relative
permittivity that falls within the range of -30-+30 (for both real
and imaginary parts of the relative permittivity as relative
permittivity is a complex value) at the frequency of interest. Such
ENZ materials exhibit a near-zero index of refraction at the
frequency of interest. For example, the layer of ENZ material 20
may include 2D materials such as graphene, TiN, heavily-doped,
narrow band-gap semiconductor materials such as InAsSb, a topical
insulator such as BSTS (Bi.sub.1.5Sb.sub.1.5Te.sub.1.8Se.sub.1.2)
or a transparent conducting oxide such as AZO, ITO, etc. The metal
capping layer 22 may be comprised of any conductive
metal-containing material, e.g., copper, aluminum, tungsten, a
noble metal, any CMOS compatible conductive material, etc.
[0019] In terms of fabrication, the TE pass polarizer 10 may be
fabricated using known manufacturing techniques. For example, in
one illustrative process flow, the active semiconductor layer 13 of
the SOI substrate may be patterned to define the input/output layer
16 of the desired length (left to right) and lateral width (into
and out of the plane of the drawing page of FIG. 1) by performing
known masking and etching techniques. The lateral width of various
layers discussed herein is to be understood to be a dimension of
the layer of material in a direction that is transverse to the
optical axis 24 of the pass polarizers disclosed herein. As shown
in FIGS. 2 and 3, the input/output layer 16 has a lateral width
defined by its lateral sidewalls 16C. Thereafter, at least portions
of the optical components 17, 19 may be fabricated. At that point,
the buffer layer 18 may be blanket-deposited across the substrate
on the input/output layer 16. Next, the layer of ENZ material 20
may be blanket deposited on the buffer layer 18. At that point, a
patterned etch mask (not shown) may be formed above the layer of
ENZ material 20 and one or more etching processes may be performed
to pattern the layer of ENZ material 20 and the buffer layer 18. In
the example depicted in FIG. 3, the buffer layer 18 and the layer
of ENZ material 20 have substantially the same lateral width as
that of the input/output layer 16. In one illustrative example
where the metal capping layer 22 is made of copper, a portion of
the insulating material 26 may be formed on the substrate such that
it covers the layer of ENZ material 20. At that point, a damascene
process may be performed to form the metal capping layer 22 on the
upper surface of the layer of ENZ material 20. Thereafter,
additional insulating material 26 may be formed above the metal
capping layer 22. In other cases where the metal capping layer 22
is made of a material that may be readily etched, then it can be
blanket-deposited above the blanket layer of ENZ material 20. At
that point, a patterned etch mask (not shown) may be formed above
the deposited layer of metal capping material. Then, one or more
etching processes may be performed to remove portions of the metal
capping layer 22, the layer of ENZ material 20 and the buffer layer
18.
[0020] Of course, as will be appreciated by those skilled in the
art after a complete reading of the present application, the
lateral width and thickness of any of the layers of material within
the waveguide 11 (including the input/output layer 16) are
independent with respect to the lateral width and/or thickness of
any other layer in the waveguide 11 (including the input/output
layer 16). For example, the lateral width of the buffer layer 18
can be equal to, greater than or less than the lateral width of the
input/output layer 16. In the example depicted in FIG. 3, all of
the material layers of the waveguide 11 (including the input/output
layer 16) have substantially the same lateral width.
[0021] FIG. 4 depicts an embodiment of the TE pass polarizer 10
wherein the layer of ENZ material 20 has a lateral width that is
greater than the lateral width of all of the other layers in the
waveguide 11. In one illustrative process flow, the TE pass
polarizer 10 may be fabricated as follows. As before, the active
semiconductor layer 13 of the SOI substrate may be patterned to
define the input/output layer 16. Thereafter, at least portions of
the optical components 17, 19 may be fabricated. At that point, the
buffer layer 18 may be blanket-deposited across the substrate on
the input/output layer 16 and patterned to the lateral width shown
in FIG. 4. Thereafter, a conformal deposition process may be
performed to form a conformal layer of ENZ material 20 on the
buffer layer 18. Note that, in one illustrative embodiment, the
conformal layer of ENZ material 20 is positioned on and in contact
with the upper surface of the buffer layer 18 as well as on and in
contact with the opposing lateral side surfaces 18C of the layer of
silicon nitride. At that point, in the illustrative example where
the metal capping layer 22 is made of copper, the above-described
damascene process may be performed to form the metal capping layer
22 on the upper surface of the conformal layer of ENZ material 20.
Thereafter, additional insulating material 26 may be formed above
the metal capping layer 22.
[0022] FIGS. 5-7 depict another illustrative embodiment of a TE
pass polarizer 10A disclosed herein. FIG. 5 is a cross-sectional
view taken through the TE pass polarizer 10A in a direction that is
parallel to an optical axis 24 of the TE pass polarizer 10A. This
embodiment of the TE pass polarizer 10A includes many of the
previously described structures and materials, as reflected by the
use of common reference numbers. With reference to FIG. 5, in
general, this embodiment of the TE pass polarizer 10A comprises a
waveguide 11A that includes the above-described input/output layer
16, first and second layers of the above-described buffer layer 18
(referenced individually by the numerals 18A, 18B and collectively
referenced using the numeral 18), the above-described layer of ENZ
material 20 and the above-described metal capping layer 22. The
layer of ENZ material 20 is positioned between the first and second
buffer layers 18A, 18B. The first buffer layer 18A is formed on the
input/output layer 16, while the metal capping layer 22 is formed
on the second buffer layer 18B.
[0023] As before, the input/output layer 16 has an entrance 16A and
an exit 16B. The above-described insulating material 26 is formed
above and around the waveguide 11A. As before, the TE pass
polarizer 10A may be operatively coupled to schematically depicted
and above-described components 17, 19 of an optical circuit. Also
depicted in FIG. 5 are locations where various cross-sectional
views depicted in the attached drawings are taken. More
specifically, the view X-X is a cross-sectional view taken at a
location between the entrance 16A of the input/output layer 16 and
the location where the other material layers of the waveguide 11A
are positioned above the input/output layer 16, while the view Y-Y
is a cross-sectional view taken through all of the material layers
of the waveguide 11A. As before, the TE pass polarizer 10A is
adapted to receive a magnetic wave (i.e., light) from the component
17 via the entrance 16A of the input/output layer 16 and transmits
substantially only TE mode light to the component 19 via the exit
16B of the input/output layer 16.
[0024] As discussed above, the thicknesses of the materials of the
waveguide 11A as well as their other lateral dimensions may vary
depending upon the particular application. In one illustrative
embodiment, the first and second buffer layers 18A, 18B may have
substantially the same thickness, but that may not be the case in
all applications. As before, the lateral width and thickness of any
of the layers of material within the waveguide 11A (including the
input/output layer 16) are independent with respect to the lateral
width and/or thickness of any other layer of material in the
waveguide 11A (including the input/output layer 16). For example,
the lateral width of the first or second buffer layer 18A, 18B can
be equal to, greater than or less than the lateral width of the
input/output layer 16. In the example depicted in FIG. 7 all of the
layers of material of the waveguide 11A have substantially the same
lateral width. Additionally, in other variations, the layer of ENZ
material 20 may also be formed as a conformal layer of material, as
reflected by the dashed line 31. Moreover, in this embodiment, the
first and second buffer layers 18A, 18B may be made of the same
material, but that may not be the case in all applications. In
terms of fabrication, the TE pass polarizer 10A may be fabricated
using the techniques described above with respect to the previous
embodiment.
[0025] FIGS. 8-11 depict yet another illustrative embodiment of a
TE pass polarizer 10B disclosed herein. FIG. 8 is a cross-sectional
view taken through the TE pass polarizer 10B in a direction that is
parallel to an optical axis 24 of the TE pass polarizer 10B. This
embodiment of the TE pass polarizer 10B includes many of the
previously described structures and materials, as reflected by the
use of common reference numbers. With reference to FIG. 8, in
general, this embodiment of the TE pass polarizer 10B comprises a
waveguide 11B that includes the above-described input/output layer
16, the above-described first buffer layer 18, the above-described
layer of ENZ material 20 and the above-described metal capping
layer 22. This embodiment also comprises three additional buffer
layers 34A, 34B, 34C, respectively (collectively referenced using
the numeral 34). The buffer layers 34 may be comprised of a variety
of different materials, e.g., silicon dioxide, Al.sub.2O.sub.3,
CaF.sub.2, MgF.sub.2, a material having a refractive index within
the range of about 1.4-1.8, etc. In some applications, all of the
buffer layers 34 may be made of the same material, but that may not
be the case in all applications. Additionally, the thickness of the
buffer layers 34 may range from about 1-100 nm. In some
applications, the thickness of all of the buffer layers 34 may be
substantially the same, but that may not be the case in all
applications. In one particular embodiment, one or more of the
buffer layers 34 may be made from a material that is different from
the material selected for the buffer layer 18.
[0026] As depicted, in this embodiment, the buffer layer 18 is
positioned between the first and second buffer layers 34A, 34B,
respectively. The layer of ENZ material 20 is positioned between
the second and third buffer layers 34B, 34C, respectively. The
first buffer layer 34A is formed on the input/output layer 16,
while the metal capping layer 22 is formed on the third buffer
layer 34C. Also depicted in FIG. 8 are locations where various
cross-sectional views depicted in the attached drawings are taken.
More specifically, the view X-X is a cross-sectional view taken at
a location between the entrance 16A of the input/output layer 16
and the location where the other material layers of the waveguide
11B are positioned above the input/output layer 16, while the view
Y-Y is a cross-sectional view taken through all of the material
layers of the waveguide 11B. As before, the TE pass polarizer 10B
is adapted to receive a magnetic wave (i.e., light) from the
component 17 via the entrance 16A of the input/output layer 16 and
transmits substantially only TE mode light to the component 19 via
the exit 16B of the input/output layer 16.
[0027] As with the previous embodiments, the lateral width and
thickness of any of the layers of material within the waveguide 11B
(including the input/output layer 16) are independent with respect
to the lateral width and/or thickness of any other layer in the
waveguide 11B (including the input/output layer 16). For example,
the lateral width of the buffer layer 18 can be equal to, greater
than or less than the lateral width of the input/output layer 16.
In the example depicted in FIG. 10, the input/output layer 16, the
second buffer layer 34B, the layer of ENZ material 20, the third
buffer layer 34C, and the metal capping layer 22 of the waveguide
11B all have substantially the same lateral width. However, the
lateral widths of the first buffer layer 34A and the buffer layer
18 are greater than the lateral width of the other layers of
material in the waveguide 11B. FIG. 11 depicts an alternative
embodiment of the waveguide 11B wherein the input/output layer 16
and the metal capping layer 22 have substantially the same lateral
width while all of the other layers of material in the waveguide
11B have a lateral width that is significantly greater than the
lateral width of the input/output layer 16. In terms of
fabrication, the TE pass polarizer 10B may be fabricated using the
techniques described above with respect to the previous
embodiments.
[0028] FIGS. 12-16 depict yet another illustrative embodiment of a
TE pass polarizer 10C disclosed herein. FIG. 12 is a
cross-sectional view taken through the TE pass polarizer 10C in a
direction that is parallel to an optical axis 24 of the TE pass
polarizer 10C. This embodiment of the TE pass polarizer 10C
includes many of the previously described structures and materials.
With reference to FIG. 12, in general, this embodiment of the TE
pass polarizer 10C comprises a waveguide 11C that includes the
above-described input/output layer 16, the previously-described
first and second buffer layers 18A, 18B, respectively, the
above-described layer of ENZ material 20, four of the
above-described buffer layers 34A, 34B, 34C, 34D, respectively
(collectively referenced using the numeral 34) and the
above-described metal capping layer 22. As depicted in this
embodiment, the first buffer layer 18A is positioned between the
buffer layers 34A, 34B, respectively. The layer of ENZ material 20
is positioned between the buffer layers 34B, 34C. The second buffer
layer 18B is positioned between the buffer layers 34C, 34D,
respectively. The buffer layer 34A is formed on and in contact with
the input/output layer 16 while the metal capping layer 22 is
formed on and in contact with the buffer layer 34D. Also depicted
in FIG. 12 are locations where various cross-sectional views
depicted in the attached drawings are taken. More specifically, the
view X-X is a cross-sectional view taken at a location between the
entrance 16A of the input/output layer 16 and the location where
the other material layers of the waveguide 11C are positioned above
the input/output layer 16, while the view Y-Y is a cross-sectional
view taken through all of the material layers of the waveguide 11C.
As before, the TE pass polarizer 10C is adapted to receive a
magnetic wave (i.e., light) from the component 17 via the entrance
16A of the input/output layer 16 and transmits substantially only
TE mode light to the component 19 via the exit 16B of the
input/output layer 16.
[0029] As with the previous embodiments, the lateral width and
thickness of any of the layers of material within the waveguide 11C
(including the input/output layer 16) are independent with respect
to the lateral width and/or thickness of any other layer in the
waveguide 11C (including the input/output layer 16). For example,
the lateral width of the buffer layer 18A can be equal to, greater
than or less than the lateral width of the input/output layer 16.
In the example depicted in FIG. 14, all of the layers of material
of the waveguide 11C have substantially the same lateral width. In
the example depicted in FIG. 15, the lateral width of the buffer
layer 34A and the first buffer layer 18A are greater than the
lateral width of the other layers of material in the waveguide 11C.
FIG. 16 depicts an alternative embodiment of the waveguide 11C
wherein the input/output layer 16, the buffer layer 34C, the second
buffer layer 18B, the buffer layer 34D and the metal capping layer
22 have substantially the same lateral width while all of the other
layers of material in the waveguide 11C have a lateral width that
is significantly greater than the lateral width of the input/output
layer 16. In terms of fabrication, the TE pass polarizer 10C may be
fabricated using the techniques described above with respect to the
previous embodiments.
[0030] As will be appreciated by those skilled in the art, there
are several novel waveguides disclosed herein. For example, one
illustrative TE pass polarizer disclosed herein includes a base
semiconductor substrate 12, an input/output layer 16 positioned
above the base semiconductor substrate 12, an insulation material
14 positioned between the input/output layer 16 and the base
semiconductor layer 12, a first buffer layer 18 positioned above at
least a portion of the input/output layer 16, a layer of ENZ
material 20 positioned above at least a portion of the first buffer
layer 18 and a metal-containing capping layer 22 positioned above
at least a portion of the layer of ENZ material 20. In one
particularly illustrative embodiment, the first buffer layer 18 is
positioned on and in contact with an upper surface of the
input/output layer 16, the layer of ENZ material 20 is positioned
on and in contact with an upper surface of the first buffer layer
18 and the metal capping layer 22 is positioned on and in contact
with an upper surface of the layer of ENZ material 20.
[0031] Another illustrative waveguide disclosed herein includes a
base semiconductor substrate 12, an input/output layer 16
positioned above the base semiconductor substrate 12, an insulation
material 14 positioned between the input/output layer 16 and the
base semiconductor layer 12, a first buffer layer 18A positioned
above at least a portion of the input/output layer 16, a layer of
ENZ material 20 positioned above at least a portion of the first
buffer layer 18A, a second buffer layer 18B positioned above at
least a portion of the layer of ENZ material 20 and a
metal-containing capping layer 22 positioned above at least a
portion of the second buffer layer 18B. In one particularly
illustrative embodiment, the first buffer layer 18A is positioned
on and in contact with an upper surface of the input/output layer
16, the layer of ENZ material 20 is positioned on and in contact
with an upper surface of the first buffer layer 18A, the second
buffer layer 18B is positioned on and in contact with an upper
surface of the layer of ENZ material 20 and the metal capping layer
22 is positioned on and in contact with an upper surface of the
second buffer layer 18B. In one very particular embodiment, the
first and second buffer layers 18A, 18B are comprised of the same
material.
[0032] Yet another illustrative waveguide disclosed herein includes
a base semiconductor substrate 12, an input/output layer 16
positioned above the base semiconductor substrate 12, an insulation
material 14 positioned between the input/output layer 16 and the
base semiconductor layer 12, a first buffer layer 34A positioned
above at least a portion of the input/output layer 16, a second
buffer layer 18 positioned above the first buffer layer 34A, a
third buffer layer 34B positioned above the second buffer layer 18,
a layer of ENZ material 20 positioned above at least a portion of
the third buffer layer 34B, a fourth buffer layer 34C positioned
above at least a portion of the layer of ENZ material 20 and a
metal-containing capping layer 22 positioned above at least a
portion of the fourth buffer layer 34C. In one particularly
illustrative embodiment, the first buffer layer 34A is positioned
on and in contact with an upper surface of the input/output layer
16, the second buffer layer 18 is positioned on and in contact with
an upper surface of the first buffer layer 34A, the third buffer
layer 34B is positioned on and in contact with an upper surface of
the second buffer layer 18, the layer of ENZ material 20 is
positioned on and in contact with an upper surface of the third
buffer layer 34B, the fourth buffer layer 34C is positioned on and
in contact with an upper surface of the layer of ENZ material 20
and the metal capping layer 22 is positioned on and in contact with
an upper surface of the fourth buffer layer 34C. In one very
particular embodiment, the first, third and fourth buffer layers
34A, 34B and 34C are comprised of silicon dioxide, while the second
buffer layer 18 is comprised of silicon nitride.
[0033] A further embodiment of yet another illustrative waveguide
disclosed herein includes a base semiconductor substrate 12, an
input/output layer 16 positioned above the base semiconductor
substrate 12, an insulation material 14 positioned between the
input/output layer 16 and the base semiconductor layer 12, a first
buffer layer 34A positioned above at least a portion of the
input/output layer 16, a second buffer layer 18A positioned above
the first buffer layer 34A, a third buffer layer 34B positioned
above the second buffer layer 18A, a layer of ENZ material 20
positioned above at least a portion of the third buffer layer 34B,
a fourth buffer layer 34C positioned above at least a portion of
the layer of ENZ material 20, a fifth buffer layer 18B positioned
above the fourth buffer layer 34C, a sixth buffer layer 34D
positioned above the fifth buffer layer 18B and a metal-containing
capping layer 22 positioned above at least a portion of the sixth
buffer layer 34D. In one particularly illustrative embodiment, the
first buffer layer 34A is positioned on and in contact with an
upper surface of the input/output layer 16, the second buffer layer
18A is positioned on and in contact with an upper surface of the
first buffer layer 34A, the third buffer layer 34B is positioned on
and in contact with an upper surface of the second buffer layer
18A, the layer of ENZ material 20 is positioned on and in contact
with an upper surface of the third buffer layer 34B, the fourth
buffer layer 34C is positioned on and in contact with an upper
surface of the layer of ENZ material 20, the fifth buffer layer 18B
is positioned on and in contact with an upper surface of the fourth
buffer layer 34C, the sixth buffer layer 34D is positioned on and
in contact with an upper surface of the fifth buffer layer 18B and
the metal capping layer 22 is positioned on and in contact with an
upper surface of the sixth buffer layer 34D. In one very particular
embodiment, the first, third, fourth and sixth buffer layers 34A,
34B, 34C and 34D are comprised of silicon dioxide, while the second
and fifth buffer layers 18A, 18B are comprised of silicon
nitride.
[0034] The particular embodiments disclosed above are illustrative
only, as the invention may be modified and practiced in different
but equivalent manners apparent to those skilled in the art having
the benefit of the teachings herein. For example, the process steps
set forth above may be performed in a different order. Furthermore,
no limitations are intended to the details of construction or
design herein shown, other than as described in the claims below.
It is therefore evident that the particular embodiments disclosed
above may be altered or modified and all such variations are
considered within the scope and spirit of the invention. Note that
the use of terms, such as "first," "second," "third" or "fourth" to
describe various processes or structures in this specification and
in the attached claims is only used as a shorthand reference to
such steps/structures and does not necessarily imply that such
steps/structures are performed/formed in that ordered sequence. Of
course, depending upon the exact claim language, an ordered
sequence of such processes may or may not be required. Accordingly,
the protection sought herein is as set forth in the claims
below.
* * * * *