U.S. patent application number 16/986208 was filed with the patent office on 2020-12-31 for vibration sensor, audio device, and method for assembling vibration sensor.
The applicant listed for this patent is AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.. Invention is credited to Jinyu Zhang.
Application Number | 20200408593 16/986208 |
Document ID | / |
Family ID | 1000005035816 |
Filed Date | 2020-12-31 |
United States Patent
Application |
20200408593 |
Kind Code |
A1 |
Zhang; Jinyu |
December 31, 2020 |
Vibration Sensor, Audio Device, and Method For Assembling Vibration
Sensor
Abstract
The present disclosure provides a vibration sensor, an audio
device, and a method for assembling the vibration sensor. The
vibration sensor includes a housing having an inner wall and an
inner chamber, a gasket, an elastic film, and a MEMS chip having a
back cavity; the gasket, the elastic film, and the MEMS chip
received in the chamber; the gasket attached onto the inner wall,
the elastic film attached onto one side of the gasket opposite to
the inner wall, and the MEMS chip attached onto one side of the
elastic film opposite to the gasket; a concave hole being defined
in one side of the gasket facing the elastic film, the elastic film
covering the concave hole, a through hole being defined in the
elastic film and passing through the elastic film, and the through
hole communicating the concave hole with the back cavity.
Inventors: |
Zhang; Jinyu; (Shenzhen,
CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD. |
Shenzhen |
|
CN |
|
|
Family ID: |
1000005035816 |
Appl. No.: |
16/986208 |
Filed: |
August 5, 2020 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
PCT/CN2019/093335 |
Jun 27, 2019 |
|
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16986208 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
B81B 2201/0257 20130101;
B81B 7/02 20130101; G01H 11/06 20130101; H04R 19/04 20130101; B81B
7/007 20130101 |
International
Class: |
G01H 11/06 20060101
G01H011/06; H04R 19/04 20060101 H04R019/04; B81B 7/00 20060101
B81B007/00; B81B 7/02 20060101 B81B007/02 |
Claims
1. A vibration sensor, comprising a housing having an inner wall
and an inner chamber surrounded by the inner wall, a gasket, an
elastic film, and a MEMS chip having a back cavity; the gasket, the
elastic film, and the MEMS chip received in the chamber; the gasket
attached onto the inner wall, the elastic film attached onto one
side of the gasket opposite to the inner wall, and the MEMS chip
attached onto one side of the elastic film opposite to the gasket;
a concave hole being defined in one side of the gasket facing the
elastic film, the elastic film covering the concave hole, a through
hole being defined in the elastic film and passing through the
elastic film, and the through hole communicating the concave hole
with the back cavity.
2. The vibration sensor according to claim 1, wherein the concave
hole passes from the side of the gasket facing the elastic film
through one side of the gasket facing the inner wall.
3. The vibration sensor according to claim 1, wherein the chamber
comprises a circuit board and an upper shell fixed on the circuit
board, and the circuit board forms the inner wall.
4. The vibration sensor according to claim 1, wherein the vibration
sensor further comprises an integrated circuit chip received in the
inner chamber, the integrated circuit chip being electrically
connected with the circuit board and the MEMS chip to process a
vibration signal picked up by the MEMS chip.
5. The vibration sensor according to claim 1, wherein the MEMS chip
is a MEMS microphone chip or a MEMS pressure sensor chip.
6. The vibration sensor according to claim 2, wherein the vibration
sensor further comprises an integrated circuit chip received in the
inner chamber, the integrated circuit chip being electrically
connected with the circuit board and the MEMS chip to process a
vibration signal picked up by the MEMS chip.
7. The vibration sensor according to claim 3, wherein the vibration
sensor further comprises an integrated circuit chip received in the
inner chamber, the integrated circuit chip being electrically
connected with the circuit board and the MEMS chip to process a
vibration signal picked up by the MEMS chip.
8. The vibration sensor according to claim 2, wherein the MEMS chip
is a MEMS microphone chip or a MEMS pressure sensor chip.
9. The vibration sensor according to claim 3, wherein the MEMS chip
is a MEMS microphone chip or a MEMS pressure sensor chip.
10. An audio device, comprising a vibration sensor; the vibration
sensor comprising a housing having an inner wall and an inner
chamber surrounded by the inner wall, a gasket, an elastic film,
and a MEMS chip having a back cavity; the gasket, the elastic film,
and the MEMS chip received in the chamber; the gasket attached onto
the inner wall, the elastic film attached onto one side of the
gasket opposite to the inner wall, and the MEMS chip attached onto
one side of the elastic film opposite to the gasket; a concave hole
being defined in one side of the gasket facing the elastic film,
the elastic film covering the concave hole, a through hole being
defined in the elastic film and passing through the elastic film,
and the through hole communicating the concave hole with the back
cavity.
11. The audio device according to claim 10, wherein the concave
hole passes from the side of the gasket facing the elastic film
through one side of the gasket facing the inner wall.
12. The audio device according to claim 10, wherein the chamber
comprises a circuit board and an upper shell fixed on the circuit
board, and the circuit board forms the inner wall.
13. The audio device according to claim 10, wherein the vibration
sensor further comprises an integrated circuit chip received in the
inner chamber, the integrated circuit chip being electrically
connected with the circuit board and the MEMS chip to process a
vibration signal picked up by the MEMS chip.
14. The audio device according to claim 10, wherein the MEMS chip
is a MEMS microphone chip or a MEMS pressure sensor chip.
15. A method for assembling a vibration sensor, comprising:
mounting a gasket on a tooling having a protruding block, and
inserting the protruding block in a concave hole defined in the
gasket; attaching an elastic film onto a top surface of the gasket,
and making the elastic film cover the concave hole; mounting a MEMS
chip on a top surface of the elastic film; and transferring the
gasket, the elastic film, and the MEMS chip out from the tooling
and mounting them in an inner chamber of a housing.
16. The method according to claim 15, wherein, the operation of
transferring the gasket, the elastic film, and the MEMS chip out
from the tooling and mounting them in the inner chamber of the
housing is carried out as follows: transferring the gasket, the
elastic film, and the MEMS chip out from the tooling and mounting
them on a circuit board, and the circuit board being attached to a
bottom surface of the gasket; and mounting an upper shell on one
side of the circuit board to allow the gasket, the elastic film,
and the MEMS chip being accommodated in the inner chamber formed by
the upper shell and the circuit board.
17. The method according to claim 16, wherein before the operation
of mounting the gasket on the tooling, the method further
comprises: mounting an integrated circuit chip on the top surface
of the gasket; electrically connecting the integrated circuit chip
with the MEMS chip by a first connecting wire after the operation
of mounting the MEMS chip on the top surface of the elastic film
and before the operation of transferring the gasket, the elastic
film, and the MEMS chip out from the tooling and mounting them in
the inner chamber; and electrically connecting the integrated
circuit chip with the circuit board by a second connecting wire
after the operation of transferring the gasket, the elastic film,
and the MEMS chip out from the tooling and mounting them on the
circuit board.
18. The method according to claim 16, wherein after the operation
of transferring the gasket, the elastic film, and the MEMS chip out
from the tooling and mounting them on the circuit board, the method
further comprises: mounting an integrated circuit chip on a top
surface of the circuit board; electrically connecting the
integrated circuit chip with the MEMS chip by a first connecting
wire; and electrically connecting the integrated circuit chip with
the circuit board by a second connecting wire.
Description
FIELD OF THE PRESENT DISCLOSURE
[0001] The present disclosure relates to the field of microphone,
and more particularly to a vibration sensor, an audio device, and a
method for assembling a vibration sensor.
DESCRIPTION OF RELATED ART
[0002] In related arts, vibration sensor generally includes a
housing, a mounting plate attached to the housing, an elastic film
attached to an upper side of the mounting plate, and a MEMS chip
mounted on a lower side of the mounting plate and cooperatively
forming a front cavity with the mounting plate. The mounting plate
is provided with a through hole communicating the front cavity and
the elastic film. Mass block vibrates up and down when external
vibration signals are transmitted to the vibration sensor through a
structure, causing change of the front cavity volume, and the gas
pressure in the front cavity changes accordingly. The signal of
pressure changing is picked up by the MEMS chip and converted into
an electrical signal. However, the vibration sensor in the related
art has the problem of high height and low sensitivity.
[0003] Therefore, it is necessary to provide a vibration sensor
having lower height and higher sensitivity.
SUMMARY OF THE PRESENT DISCLOSURE
[0004] The purpose of the present disclosure is to provide a
vibration sensor having lower height and higher sensitivity.
[0005] In one aspect of the present invention, a vibration sensor
includes a housing having an inner wall and an inner chamber
surrounded by the inner wall, a gasket, an elastic film, and a MEMS
chip having a back cavity; the gasket, the elastic film, and the
MEMS chip are received in the inner chamber; the gasket is mounted
on the inner wall, the elastic film is mounted on one side of the
gasket opposite to the inner wall, and the MEMS chip is mounted on
one side of the elastic film opposite to the gasket; a concave hole
is defined in one side of the gasket facing the elastic film, and
the elastic film covers the concave hole; and a through hole is
defined in the elastic film and passing through the elastic film,
and the through hole communicates with the concave hole and the
back cavity.
[0006] Further, the concave hole passes from one side of the gasket
facing the elastic film through one side of the gasket facing the
inner wall.
[0007] Further, the housing includes a circuit board and an upper
shell fixed on the circuit board, and the circuit board forms the
inner wall.
[0008] Further, the vibration sensor also includes an integrated
circuit chip received in the inner chamber, and the integrated
circuit chip is electrically connected with the circuit board and
the MEMS chip for processing vibration signals picked up by the
MEMS chip.
[0009] Further, the MEMS chip is a MEMS microphone chip or a MEMS
pressure sensor chip.
[0010] An audio device is also provided, which includes the
vibration sensor as described above.
[0011] A method for assembling the vibration sensor is also
provided, which includes the following operations:
[0012] mounting a gasket on a tooling having a protruding block,
and inserting the protruding block into a concave hole defined in
the gasket;
[0013] attaching an elastic film on a top surface of the gasket,
and making the elastic film cover the concave hole;
[0014] mounting a MEMS chip on a top surface of the elastic film;
and
[0015] transferring the gasket, the elastic film, and the MEMS chip
out from the tooling and putting them into an inner chamber.
[0016] Further, the operation of transferring the gasket, the
elastic film and the MEMS chip out from the tooling and putting
them into the inner chamber is carried out as follows:
[0017] transferring the gasket, the elastic film, and the MEMS chip
out from the tooling and putting them on a circuit board, and
attaching the circuit board to a bottom surface of the gasket;
and
[0018] mounting an upper shell on one side of the circuit board to
allow the gasket, the elastic film, and the MEMS chip being
accommodated in the inner chamber formed by the upper shell and the
circuit board.
[0019] Further, before the operation of mounting the gasket on the
tooling, the method also includes: mounting an integrated circuit
chip on the top surface of the gasket.
[0020] The method also includes: electrically connecting the
integrated circuit chip with the MEMS chip by a first connecting
wire after the operation of mounting the MEMS chip on the top
surface of the elastic film and before the operation of
transferring the gasket, the elastic film and the MEMS chip out
from the tooling and putting them into the inner chamber; and
[0021] electrically connecting the integrated circuit chip with the
circuit board by a second connecting wire after the operation of
transferring the gasket, the elastic film and the MEMS chip out
from the tooling and mounting them on the circuit board.
[0022] Optionally, after the operation of transferring the gasket,
the elastic film and the MEMS chip out from the tooling and
mounting them on the circuit board, the method further
includes:
[0023] mounting an integrated circuit chip on a top surface of the
circuit board;
[0024] electrically connecting the integrated circuit chip with the
MEMS chip by a first connecting wire; and
[0025] electrically connecting the integrated circuit chip with the
circuit board by a second connecting wire.
[0026] The present disclosure has the advantages as follows. A
gasket is attached to the inner wall of the housing, a concave hole
is defined in the gasket, an elastic film is attached to the inner
wall of the gasket opposite to the chamber, the elastic film covers
the concave hole and is provided with a through hole communicating
with the concave hole, and the back cavity of the MEMS chip
communicates with the concave hole through the through hole, all of
which improves the sensitivity of the vibration sensor. Besides,
the height of the product is reduced as the volume of the front
cavity is reduced, as a result of the MEMS chip replacing the mass
block.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] FIG. 1 is a schematic structural diagram of a vibration
sensor according to the embodiments of the present disclosure;
[0028] FIG. 2 is an exploded view of the vibration sensor in FIG.
1;
[0029] FIG. 3 is a sectional view of FIG. 1 taken along line
A-A;
[0030] FIG. 4 is a partial flow chart of a method for assembling
the vibration sensor according to the embodiments of the present
disclosure;
[0031] FIG. 5 is another partial flow chart of a method for
assembling the vibration sensor according to the embodiments of the
present disclosure.
[0032] In the drawings: 100, Vibration sensor; 1, housing; 2,
Gasket; 3, Elastic film; 4, MEMS chip; 20, Concave hole; 30,
Through holes; 11, Circuit board; 12, upper shell; 120, Inner
chamber; 40, Concave cavity; 5, Integrated circuit chip; 6,
Tooling; 61, Protruding block; 71, First connecting wire; 72,
Second connecting wire.
DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENT
[0033] The present disclosure will be further explained with
reference to the drawings and embodiments.
[0034] Referring to FIGS. 1 to 3, a vibration sensor 100 includes a
housing 1 with an inner wall and an inner housing 120 surrounded by
the inner wall, a gasket 2, an elastic film 3, and a MEMS chip 4
having a back cavity, the gasket 2, the elastic film 3, and the
MEMS chip 4 are received in the inner housing 120. The gasket 2 is
attached on the inner wall, the elastic film 3 is attached on one
side of the gasket 2 opposite to the inner wall, the MEMS chip 4 is
attached on one side of the elastic film 3 opposite to the gasket
2. A concave hole 20 is defined in one side of the gasket 2 facing
the elastic film 3. The elastic film 3 covers the concave hole 20,
and a through hole 30 passing through the elastic film 3 is defined
in the elastic film 3. The through hole communicates the concave
hole 20 with the back cavity 40.
[0035] The MEMS chip 4 is mounted on the upper side of the elastic
film 3. The MEMS chip 4 vibrates up and down with the elastic film
3 when the external vibration signal is transmitted to the
vibration sensor 100 through the structure, which causes change of
the volume in the concave hole 20 and accordingly causes change of
the gas pressure in the concave hole 20. The signal of the pressure
changing is picked up by the MEMS chip 4 and converted into an
electrical signal, so that the changed pressure signal may be
picked up more easily by the MEMS chip 4, and the sensitivity of
the vibration sensor 100 is improved. In addition, the height of
the product is reduced as a result of MEMS chip 4 replacing the
mass block.
[0036] Optionally, the concave hole 20 passes from one side of the
gasket 2 facing the elastic film 3 through one side of the gasket 2
facing the inner wall. As such, the gasket 2 is fully utilized to
increase the volume of the concave hole 20.
[0037] Optionally, the housing 1 includes a circuit board 11 and an
upper shell 12 fixed on the circuit board 11, and the circuit board
11 forms the inner wall. upper shell. The upper shell 12 is mounted
on the circuit board 11 to form the inner housing 120, and the
upper shell covers the gasket 2, the elastic film 3, and the MEMS
chip 4. The circuit board 11 is fully utilized to reduce the size
of the vibration sensor 100.
[0038] Specifically, the inner housing 120 of the upper shell 12 is
formed as a rear cavity of the vibration sensor 100, and the
concave hole 20 is enclosed with the circuit board 11 to form a
front cavity of the vibration sensor 100.
[0039] The concave hole 20 and the through hole 30 are both
cylindrical, and it is optimized that the central axes of the
concave hole 20 and the through hole 30 are collinear.
[0040] Optionally, the vibration sensor 100 also includes an
integrated circuit chip 5 arranged in the housing 1, the integrated
circuit chip 5 is electrically connected with both the circuit
board 11 and the MEMS chip 4 for processing vibration signals
picked up by the MEMS chip 4. The integrated circuit chip 5 may be
attached onto the top surface of the gasket 2 or onto the top
surface of the circuit board 11.
[0041] Optionally, the MEMS chip 4 is a MEMS microphone chip or a
MEMS pressure sensor chip.
[0042] The present disclosure also provides an audio device (not
shown in the figures), which includes the vibration sensor 100 as
described above.
[0043] The present disclosure also provides a method for
assembling. Please refer to FIG. 4 and FIG. 5, FIG. 5 shows the
operations of the method after that in FIG. 4. The method includes
the following operations:
[0044] The gasket 2 is mounted on a tooling 6 having a protruding
block 61 and the protruding block 6 is inserted in the concave hole
20;
[0045] The elastic film 3 is attached to a top surface of the
gasket 2 and covered the concave hole 20;
[0046] The MEMS chip 4 is mounted on a top surface of the elastic
film 3; and
[0047] The gasket 2, the elastic film 3, and the MEMS chip 4 are
transferred from the tooling 6 to the inner chamber 120 of the
housing 1.
[0048] The elastic film 3 is supported by the protruding block 61
when being attached. The deformation of the elastic film 3 is
avoided due to the support of the protruding block 61 when the MEMS
chip 4 is mounted on the elastic film 3, thereby ensuring the
structural stability during assembly.
[0049] Optionally, the elastic film 3 is adhered to the gasket 2 by
gluing.
[0050] Optionally, the MEMS chip 4 is attached onto the elastic
film 3 by gluing.
[0051] Optionally, the operation of transferring the gasket 2, the
elastic film 3, and the MEMS chip 4 from the tooling 6 to the
housing 1 is as follows:
[0052] The gasket 2, the elastic film 3, and the MEMS chip 4 are
transferred out from the tooling 6 and mounted on the circuit board
11, and the circuit board 11 is attached to the bottom surface of
the gasket 2;
[0053] and
[0054] The upper shell 12 is mounted on one side of the circuit
board 11 to allow the gasket 2, the elastic film 3, and the MEMS
chip 4 being accommodated in the inner chamber 120 formed by the
upper shell 12 and the circuit board 11.
[0055] Optionally, before mounting the gasket 2 on the tooling 6,
the method also includes: arranging the integrated circuit chip 5
on the top surface of the gasket 2;
[0056] After mounting the MEMS chip 4 on the top surface of the
elastic film 3 and before transferring the gasket 2, the elastic
film 3, and the MEMS chip 4 from the tooling 6 and mounting them in
the housing 1, the method also includes: electrically connecting
the integrated circuit chip 5 with the MEMS chip 4 by a first
connecting wire 71; and
[0057] After transferring the gasket 2, the elastic film 3, and the
MEMS chip 4 from the tooling 6 and mounting them on the circuit
board 11, a second connecting wire 72 is electrically connected
between the integrated circuit chip 5 and the circuit board 11.
[0058] Optionally, the integrated circuit chip 5 is arranged on the
gasket 6 by gluing.
[0059] Optionally, the integrated circuit chip is ASIC chip.
[0060] An exemplary embodiment for assembling the vibration sensor
100 is provided, which includes the following operations:
[0061] The gasket 2 is mounted on the tooling 6 having the
protruding block 61, and the protruding block 6 is inserted in the
concave hole 20;
[0062] The integrated circuit chip 5 is arranged on the top surface
of the gasket 2;
[0063] The elastic film 3 is attached to the top surface of the
gasket 2 and covered the concave hole 20;
[0064] The MEMS chip 4 is mounted on the top surface of the elastic
film 3;
[0065] The first connecting wire 71 is connected between the
integrated circuit chip 5 and the MEMS chip 4;
[0066] The gasket 2, the elastic film 3, and the MEMS chip 4 are
transferred from the tooling 6 and mounted on the circuit board 11,
and the circuit board 11 is attached to the bottom surface of the
gasket 2;
[0067] The second connecting wire 72 is connected between the
integrated circuit chip 5 and the circuit board 11; and
[0068] The upper shell is mounted on one side of the circuit board
11 to cover the gasket 2, the elastic film 3, and the MEMS chip
4.
[0069] Another exemplary embodiment for assembling the vibration
sensor 100 is provided, which includes the following
operations:
[0070] The gasket 2 is mounted on a tooling 6 having a protruding
block 61, and the protruding block 6 is inserted in the concave
hole 20;
[0071] The integrated circuit chip 5 is arranged on a top surface
of the gasket 2;
[0072] The elastic film 3 is attached to the top surface of the
gasket 2 and covered the concave hole 20;
[0073] The gasket 2, the elastic film 3, and the MEMS chip 4 are
transferred from the tooling 6 and mounted on the circuit board 11,
the circuit board 11 is attached with the bottom surface of the
gasket 2;
[0074] The integrated circuit chip 5 is mounted on the top surface
of the circuit board 11;
[0075] The first connecting wire 71 is connected between the
integrated circuit chip 5 and the MEMS chip 4;
[0076] The second connecting wire 72 is connected between the
integrated circuit chip 5 and the circuit board 11; and
[0077] The upper shell is mounted on one side of the circuit board
11 to cover the gasket 2, the elastic film 3, and the MEMS chip
4.
[0078] According to the method for assembling the vibration sensor
100 provided by the present disclosure, the stability of mounting
the elastic film 3 and the MEMS chip 4 is ensured through the
support provided by the tooling 6 having the protruding block 61,
when the elastic film 3 and the MEMS chip 4 are mounted on the
gasket 2.
[0079] The description above is only an embodiment of the present
disclosure. It should be pointed out here that for those of
ordinary skill in the art, improvements can be made without
departing from the inventive concept of the present disclosure, but
these are all within the scope of the present disclosure.
* * * * *