U.S. patent application number 16/450919 was filed with the patent office on 2020-12-24 for ferroelectric memory devices.
The applicant listed for this patent is Wuxi Petabyte Technologies Co., Ltd.. Invention is credited to Zhenyu Lu.
Application Number | 20200402986 16/450919 |
Document ID | / |
Family ID | 1000005261175 |
Filed Date | 2020-12-24 |
United States Patent
Application |
20200402986 |
Kind Code |
A1 |
Lu; Zhenyu |
December 24, 2020 |
FERROELECTRIC MEMORY DEVICES
Abstract
Embodiments of ferroelectric memory devices and methods for
forming the ferroelectric memory devices are disclosed. In an
example, a ferroelectric memory cell includes a first electrode, a
second electrode, a doped ferroelectric layer disposed between the
first electrode and the second electrode. The doped ferroelectric
layer includes oxygen and one or more ferroelectric metals. The
doped ferroelectric layer further includes a plurality of dopants
including at least one dopant from one of Group II elements, Group
III elements, or Lanthanide elements. The plurality of dopants are
different from the one or more ferroelectric metals.
Inventors: |
Lu; Zhenyu; (Boise,
ID) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Wuxi Petabyte Technologies Co., Ltd. |
Wuxi |
|
CN |
|
|
Family ID: |
1000005261175 |
Appl. No.: |
16/450919 |
Filed: |
June 24, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 27/11504 20130101;
H01L 27/11514 20130101; H01L 27/11597 20130101 |
International
Class: |
H01L 27/11514 20060101
H01L027/11514; H01L 27/11504 20060101 H01L027/11504 |
Claims
1. A ferroelectric memory cell, comprising a first electrode; a
second electrode; and a doped ferroelectric layer disposed between
the first electrode and the second electrode and comprising: oxygen
and one or more ferroelectric metals; and a plurality of dopants
comprising at least one dopant from one of Group II elements, Group
III elements, or Lanthanide elements, the plurality of dopants
being different from the one or more ferroelectric metals.
2. The ferroelectric memory cell of claim 1, wherein the plurality
of dopants are distributed along a concentration gradient from a
first level of the doped ferroelectric layer to a second level of
the ferroelectric layer.
3. The ferroelectric memory cell of claim 2, wherein the first
level and the second level are each a respective one of surfaces in
contact with the first electrode and the second electrode.
4. The ferroelectric memory cell of claim 3, wherein the plurality
of dopants comprise a first group of dopants and a second group of
dopants; the first group of dopants comprise at least one dopant
from Group IV elements; and the second group of dopants comprise at
least one dopant from one or more of Group V elements, Group II
elements, Group III elements, or Lanthanide elements.
5. The ferroelectric memory cell of claim 4, wherein the first
group of dopants comprise at least one of zirconium (Zr), hafnium
(Hf), titanium (Ti), or silicon (Si); and the second group of
dopants comprise at least one of tantalum (Ta), niobium (Nb),
dubnium (Db), vanadium (V), scandium (Sc), yttrium (Y), aluminum
(Al), gallium (Ga), indium (In), lanthanides, calcium (Ca),
strontium (Sr), or barium (Ba).
6. The ferroelectric memory cell of claim 5, wherein a molar ratio
between the first group of dopants and the second group of dopants
is between about 100:1 and about 1:100.
7. The ferroelectric memory cell of claim 3, wherein the plurality
of dopants comprise a first group of dopants and a second group of
dopants; the first group of dopants comprise at least one dopant
from Group V elements; and the second group of dopants comprise at
least one dopant from one or more of Group II elements, Group III
elements, or Lanthanide elements.
8. The ferroelectric memory cell of claim 7, wherein the first
group of dopants comprise at least one of Ta, Nb, Db, or V; and the
second group of dopants comprise at least one of Sc, Y, Al, Ga, In,
lanthanides, Ca, Sr, or Ba.
9. The ferroelectric memory cell of claim 8, wherein a molar ratio
between the first group of dopants and the second group of dopants
is between about 100:1 and about 1:100.
10. The ferroelectric memory cell of claim 3, wherein the plurality
of dopants comprise a first group of dopants and a second group of
dopants; the first group of dopants comprise at least one dopant
from Group III elements or Lanthanide elements; and the second
group of dopants comprise at least one dopant from one or more of
Group II elements.
11. The ferroelectric memory cell of claim 10, wherein the first
group of dopants comprise at least one of Sc, Y, Al, Ga, In, or
lanthanides; and the second group of dopants comprise at least one
of Ca, Sr, or Ba.
12. The ferroelectric memory cell of claim 11, wherein a molar
ratio between the first group of dopants and the second group of
dopants is between about 100:1 and about 1:100.
13. The ferroelectric memory cell of claim 2, wherein the first
level and the second level are each a respective one of a middle
level of the doped ferroelectric layer and a surface in contact
with one of the first electrode and the second electrode.
14. The ferroelectric memory cell of claim 2, wherein the first
level comprises a surface in contact with one of the first
electrode and the second electrode and a middle level of the doped
ferroelectric layer, a dopant concentration at the surface being
the same as or different from a dopant concentration at the middle
level; and the second level comprises another middle level of the
doped ferroelectric layer between the surface and the middle level,
a dopant concentration at the other middle level being the same as
or different from the dopant concentration at surface and being the
same as or different from the dopant concentration at the middle
level.
15. The ferroelectric memory cell of claim 2, wherein the first
level comprises another middle level of the doped ferroelectric
layer between a surface in contact with one of the first electrode
and the second electrode and a middle level of the doped
ferroelectric layer, a dopant concentration at the other middle
level being the same as or different from a dopant concentration at
surface and being the same as or different from a dopant
concentration at the middle level; and the second level comprises
the surface and the middle level of the doped ferroelectric layer,
the dopant concentration at the surface being the same as or
different from the dopant concentration at the middle level.
16. The ferroelectric memory cell of claim 1, wherein the plurality
of dopants are distributed along a plurality of concentration
gradients along a direction perpendicular to a surface of the doped
ferroelectric layer, the plurality of concentration gradients each
extending from a first level of the doped ferroelectric layer to a
second level of the doped ferroelectric layer, the first level of
each of the plurality of concentration gradients being the same as
or different from one another, the second level of each of the
plurality of concentration gradients being the same as or different
from one another.
18. The ferroelectric memory cell of claim 1, wherein one or more
of the first electrode and the second electrode comprises at least
one of titanium nitride (TiN), titanium silicon nitride
(TiSiN.sub.x), titanium aluminum nitride (TiAlN.sub.x), titanium
carbon nitride (TiCN.sub.x), tantalum nitride (TaN.sub.x), tantalum
silicon nitride (TaSiN.sub.x), tantalum aluminum nitride
(TaAlN.sub.x), tungsten nitride (WN.sub.x), tungsten silicide
(WSi.sub.x), tungsten carbon nitride (WCN.sub.x), ruthenium (Ru),
ruthenium oxide (RuO.sub.x), iridium (Ir), doped polysilicon,
transparent conductive oxides (TCO), or iridium oxide
(IrO.sub.x).
19. The ferroelectric memory cell of claim 18, wherein the one or
more of the first and the second electrode includes TCO, which
includes at least one of doped ZnO based TCOs, doped TiO.sub.2
based TCOs, doped SnO.sub.2 based TCOs, or perovskite TCOs.
20. The ferroelectric memory cell of claim 19, wherein the one or
more of the first and the second electrode includes
La.sub.1-xSr.sub.xCrO.sub.3 (LSCO).
21. A ferroelectric memory device, comprising: a substrate; and a
plurality of ferroelectric memory strings extending vertically
above the substrate, each of the ferroelectric memory strings
comprising a conductor layer, a first electrode, a doped
ferroelectric layer, and a second electrode layer disposed radially
from a center of the ferroelectric memory string in this order,
wherein the doped ferroelectric layer comprises: oxygen and one or
more ferroelectric metals; and a plurality of dopants comprising at
least one dopant from one of Group II elements, Group III elements,
or Lanthanide elements, the plurality of dopants being different
from the one or more ferroelectric metals.
22. The ferroelectric memory cell of claim 21, wherein the
plurality of dopants comprise a first group of dopants and a second
group of dopants, distributed along a concentration gradient from
one of the first electrode and the second electrode to the other
one of the first electrode and the second electrode; the first
group of dopants comprise at least one of zirconium (Zr), hafnium
(Hf), titanium (Ti), or silicon (Si); and the second group of
dopants comprise at least one of tantalum (Ta), niobium (Nb),
dubnium (Db), vanadium (V), scandium (Sc), yttrium (Y), aluminum
(Al), gallium (Ga), indium (In), lanthanides, calcium (Ca),
strontium (Sr), or barium (Ba).
23. The ferroelectric memory cell of claim 22, wherein a molar
ratio between the first group of dopants and the second group of
dopants is between about 100:1 and about 1:100.
24. The ferroelectric memory cell of claim 21, wherein the
plurality of dopants comprises a first group of dopants and a
second group of dopants, distributed along a concentration gradient
from one of the first electrode and the second electrode to the
other one of the first electrode and the second electrode; the
first group of dopants comprise at least one of Ta, Nb, Db, or V;
and the second group of dopants comprise at least one of Sc, Y, Al,
Ga, In, lanthanides, Ca, Sr, or Ba.
25. The ferroelectric memory cell of claim 24, wherein a molar
ratio between the first group of dopants and the second group of
dopants is between about 100:1 and about 1:100.
26. The ferroelectric memory cell of claim 21, wherein the
plurality of dopants comprises a first group of dopants and a
second group of dopants, distributed along a concentration gradient
from one of the first electrode and the second electrode to the
other one of the first electrode and the second electrode; the
first group of dopants comprise at least one of Sc, Y, Al, Ga, In,
or lanthanides; and the second group of dopants comprise at least
one of Ca, Sr, or Ba.
27. The ferroelectric memory cell of claim 26, wherein a molar
ratio between the first group of dopants and the second group of
dopants is between about 100:1 and about 1:100.
28. A method of forming a ferroelectric memory cell, comprising
forming a first electrode; forming a doped ferroelectric layer in
contact with the first electrode, the doped ferroelectric layer
comprising (i) oxygen and one or more ferroelectric metals, and
(ii) a plurality of dopants comprising at least one dopant from one
of Group II elements, Group III elements, or Lanthanide elements,
the plurality of dopants being different from the one or more
ferroelectric metals; and forming a second electrode in contact
with the doped ferroelectric layer.
29. The method of claim 28, wherein forming the doped ferroelectric
layer comprises at least one of an in-situ doping process, an ion
implantation process, a thermal diffusion process, or a plasma
doping process.
30. The method of claim 29, wherein forming the doped ferroelectric
layer comprises performing an in-situ doping process in at least
one of a chemical vapor deposition (CVD) process, a pulsed laser
deposition (PLD) process, an atomic layered deposition (ALD)
process, a sol-gel process, a metal-organic chemical vapor
deposition (MOCVD) process, or a chemical solution deposition (CSD)
process, the in-situ doping process being performed in-situ in a
same process chamber where the ferroelectric layer is formed.
31. The method of claim 29, wherein forming the doped ferroelectric
layer comprises: performing at least one of an ion implantation
process, a thermal diffusion process, or a plasma doping process to
dope the plurality of dopants into the ferroelectric layer after
the ferroelectric layer is deposited.
32. The method of claim 31, wherein forming the ferroelectric layer
comprises performing at least one of a chemical vapor deposition
(CVD), a pulsed laser deposition (PLD), an atomic layered
deposition (ALD), a sol-gel process, a metal-organic chemical vapor
deposition (MOCVD), or a chemical solution deposition (CSD).
Description
BACKGROUND
[0001] Embodiments of the present disclosure relate to
ferroelectric memory devices and fabrication methods thereof.
[0002] Ferroelectric memory, such as ferroelectric RAM (FeRAM or
FRAM), uses a ferroelectric material layer to achieve
non-volatility. A ferroelectric material has a nonlinear
relationship between the applied electric field and the apparent
stored charge and thus, can switch polarity in an electric field.
Ferroelectric memory's advantages include low power consumption,
fast write performance, and great maximum read/write endurance.
BRIEF SUMMARY
[0003] Embodiments of ferroelectric memory devices and fabrication
methods thereof are disclosed herein.
[0004] In one example, a ferroelectric memory cell includes a first
electrode, a second electrode, a doped ferroelectric layer disposed
between the first electrode and the second electrode. The doped
ferroelectric layer includes oxygen and one or more ferroelectric
metals. The doped ferroelectric layer further includes a plurality
of dopants including at least one dopant from one of Group II
elements, Group III elements, or Lanthanide elements. The plurality
of dopants are different from the one or more ferroelectric
metals.
[0005] In some embodiments, the plurality of dopants are
distributed along a concentration gradient from a first level of
the doped ferroelectric layer to a second level of the
ferroelectric layer. In some embodiments, the dopant concentrations
of the first level and the second level are different. In some
embodiments, the dopant concentrations of the first level and the
second level are the same.
[0006] In some embodiments, the first level and the second level
are each a respective one of surfaces in contact with the first
electrode and the second electrode.
[0007] In some embodiments, the plurality of dopants include a
first group of dopants and a second group of dopants. In some
embodiments, the first group of dopants include at least one dopant
from Group IV elements, and the second group of dopants include at
least one dopant from one or more of Group V elements, Group TT
elements, Group III elements, or Lanthanide elements. In some
embodiments, the first group of dopants include at least one of
zirconium (Zr), hafnium (Hf), titanium (Ti), or silicon (Si), and
the second group of dopants include at least one of tantalum (Ta),
niobium (Nb), dubnium (Db), vanadium (V), scandium (Sc), yttrium
(Y), aluminum (Al), gallium (Ga), indium (In), lanthanides, calcium
(Ca), strontium (Sr), or barium (Ba). In some embodiments, a molar
ratio between the first group of dopants and the second group of
dopants is between about 100:1 and about 1:100.
[0008] In some embodiments, the plurality of dopants include a
first group of dopants and a second group of dopants. In some
embodiments, the first group of dopants include at least one dopant
from Group V elements, and the second group of dopants comprise at
least one dopant from one or more of Group II elements, Group III
elements, or Lanthanide elements. In some embodiments, the first
group of dopants comprise at least one of Ta, Nb, Db, or V, and the
second group of dopants comprise at least one of Sc, Y, Al, Ga, In,
lanthanides, Ca, Sr, or Ba. In some embodiments, a molar ratio
between the first group of dopants and the second group of dopants
is between about 100:1 and about 1:100.
[0009] In some embodiments, the plurality of dopants include a
first group of dopants and a second group of dopants. In some
embodiments, the first group of dopants include at least one dopant
from Group III elements or Lanthanide elements, and the second
group of dopants include at least one dopant from one or more of
Group II elements. In some embodiments, the first group of dopants
include at least one of Sc, Y, Al, Ga, In, or lanthanides, and the
second group of dopants include at least one of Ca, Sr, or Ba. In
some embodiments, a molar ratio between the first group of dopants
and the second group of dopants is between about 100:1 and about
1:100.
[0010] In some embodiments, the first level and the second level
are each a respective one of a middle level of the doped
ferroelectric layer and a surface in contact with one of the first
electrode and the second electrode.
[0011] In some embodiments, the first level includes a surface in
contact with one of the first electrode and the second electrode
and a first middle level of the doped ferroelectric layer. A dopant
concentration at the surface may be the same as or different from a
dopant concentration at the middle level. In some embodiments, the
second level includes another middle level of the doped
ferroelectric layer between the surface and the middle level. A
dopant concentration at the other middle level may be the same as
or different from the dopant concentration at surface and may be
the same as or different from the dopant concentration at the
middle level.
[0012] In some embodiments, the first level includes another middle
level of the doped ferroelectric layer between a surface in contact
with one of the first electrode and the second electrode and a
middle level of the doped ferroelectric layer. A dopant
concentration at the other middle level may be the same as or
different from a dopant concentration at surface and being the same
as or different from a dopant concentration at the middle level. In
some embodiments, the second level includes the surface and the
middle level of the doped ferroelectric layer. The dopant
concentration at the surface may be the same as or different from
the dopant concentration at the middle level.
[0013] In some embodiments, the plurality of dopants are
distributed along a plurality of concentration gradients along a
direction perpendicular to a surface of the doped ferroelectric
layer. The plurality of concentration gradients may each extend
from a first level of the doped ferroelectric layer to a second
level of the doped ferroelectric layer. The first level of each of
the plurality of concentration gradients may be the same as or
different from one another, and the second level of each of the
plurality of concentration gradients may be the same as or
different from one another. In some embodiments, each of the first
electrode and the second electrode comprises at least one of
titanium nitride (TiN), titanium silicon nitride (TiSiN.sub.x),
titanium aluminum nitride (TiAlN.sub.x), titanium carbon nitride
(TiCN.sub.x), tantalum nitride (TaN.sub.x), tantalum silicon
nitride (TaSiN.sub.x), tantalum aluminum nitride (TaAlN.sub.x),
tungsten nitride (WN.sub.x), tungsten silicide (WSi.sub.x),
tungsten carbon nitride (WCN.sub.x), ruthenium (Ru), ruthenium
oxide (RuO.sub.x), iridium (Ir), doped polysilicon, transparent
conductive oxides (TCO), or iridium oxide (IrO.sub.x).
[0014] In some embodiments, the first and/or or the second
electrode includes a transparent conductive oxide (TCO). TCOs
include, but are not limited to, doped ZnO based TCOs, doped
TiO.sub.2 based TCOs, doped SnO.sub.2 based TCOs, and perovskite
TCOs. In some embodiments, the first or the second electrode
includes LaxSrxCrO.sub.3 (LSCO).
[0015] In another example, a ferroelectric memory device includes a
substrate and a plurality of ferroelectric memory strings extending
vertically above the substrate. Each of the ferroelectric memory
strings includes a conductor layer, a first electrode, a doped
ferroelectric layer, and a second electrode layer disposed radially
from a center of the ferroelectric memory string in this order. The
doped ferroelectric layer includes oxygen and one or more
ferroelectric metals. The doped ferroelectric layer further
includes a plurality of dopants including at least one dopant from
one of Group II elements, Group III elements, or Lanthanide
elements. The plurality of dopants are different from the one or
more ferroelectric metals.
[0016] In some embodiments, the plurality of dopants include a
first group of dopants and a second group of dopants, distributed
along a concentration gradient from one of the first electrode and
the second electrode to the other one of the first electrode and
the second electrode. In some embodiments, the first group of
dopants include at least one of zirconium (Zr), hafnium (Hf),
titanium (Ti), or silicon (Si), and the second group of dopants
comprise at least one of tantalum (Ta), niobium (Nb), dubnium (Db),
vanadium (V), scandium (Sc), yttrium (Y), aluminum (Al), gallium
(Ga), indium (In), lanthanides, calcium (Ca), strontium (Sr), or
barium (Ba). In some embodiments, a molar ratio between the first
group of dopants and the second group of dopants is between about
100:1 and about 1:100.
[0017] In some embodiments, the plurality of dopants include a
first group of dopants and a second group of dopants, distributed
along a concentration gradient from one of the first electrode and
the second electrode to the other one of the first electrode and
the second electrode. In some embodiments, the first group of
dopants include at least one of Ta, Nb, Db, or V, and the second
group of dopants include at least one of Sc, Y, Al, Ga, In,
lanthanides, Ca, Sr, or Ba. In some embodiments, a molar ratio
between the first group of dopants and the second group of dopants
is between about 100:1 and about 1:100.
[0018] In some embodiments, the plurality of dopants include a
first group of dopants and a second group of dopants, distributed
along a concentration gradient from one of the first electrode and
the second electrode to the other one of the first electrode and
the second electrode. In some embodiments, the first group of
dopants include at least one of Sr, Y, Al, Ga, In, or lanthanides,
and the second group of dopants include at least one of Ca, Sr, or
Ba. In some embodiments, a molar ratio between the first group of
dopants and the second group of dopants is between about 100:1 and
about 1:100.
[0019] In yet another example, a method of forming a ferroelectric
memory cell is disclosed. A first electrode is formed. A doped
ferroelectric layer is formed in contact with the first electrode.
The doped ferroelectric layer includes oxygen and one or more
ferroelectric metals. The doped ferroelectric layer further
includes a plurality of dopants comprising at least one dopant from
one of Group II elements, Group III elements, or Lanthanide
elements. The plurality of dopants are different from the one or
more ferroelectric metals. A second electrode is formed in contact
with the doped ferroelectric layer.
[0020] In some embodiments, forming the doped ferroelectric layer
includes at least one of an in-situ doping process, an ion
implantation process, a thermal diffusion process, or a plasma
doping process. In some embodiments, an in-situ doping process
includes, but no limited to, a chemical vapor deposition (CVD)
process, a pulsed laser deposition (PLD) process, an atomic layer
deposition (ALD) process, a sol-gel process, a metal-organic CVD
(MOCVD) process, or a chemical solution deposition (CSD) process.
In some embodiments, the in-situ doping process is performed
in-situ in a same process chamber where the ferroelectric layer is
formed. In some embodiments, an ion implantation process, a thermal
diffusion process, a plasma doping process, or a combination
thereof is performed to dope the plurality of dopants into the
ferroelectric layer after the ferroelectric layer is deposited.
[0021] In some embodiments, forming the ferroelectric layer
includes performing at least one of a chemical vapor deposition
(CVD), a pulsed laser deposition (PLD), an atomic layered
deposition (ALD), a sol-gel process, a metal-organic chemical vapor
deposition (MOCVD), or a chemical solution deposition (CSD).
BRIEF DESCRIPTION OF THE DRAWINGS
[0022] The accompanying drawings, which are incorporated herein and
form a part of the specification, illustrate embodiments of the
present disclosure and, together with the description, further
serve to explain the principles of the present disclosure and to
enable a person skilled in the pertinent art to make and use the
present disclosure.
[0023] FIG. 1 illustrates a cross-section of an exemplary
ferroelectric memory cell with a doped ferroelectric layer,
according to some embodiments of the present disclosure.
[0024] FIGS. 2A-2E each illustrates a cross-section of an exemplary
doped ferroelectric layer, according to some embodiments of the
present disclosure.
[0025] FIGS. 3A-3C illustrate an exemplary fabrication process for
forming a ferroelectric memory cell, according to some embodiments
of the present disclosure.
[0026] FIGS. 3D-3G illustrate another exemplary fabrication process
for forming a ferroelectric memory cell, according to some
embodiments of the present disclosure.
[0027] FIG. 4 is a flowchart of an exemplary method for forming a
ferroelectric memory cell, according to some embodiments of the
present disclosure.
[0028] FIG. 5 illustrates a plan view of an exemplary ferroelectric
memory device, according to some embodiments of the present
disclosure.
[0029] FIG. 6 illustrates a cross-section of an exemplary
ferroelectric memory device, according to some embodiments of the
present disclosure.
[0030] Embodiments of the present disclosure will be described with
reference to the accompanying drawings.
DETAILED DESCRIPTION
[0031] Although specific configurations and arrangements are
discussed, it should be understood that this is done for
illustrative purposes only. A person skilled in the pertinent art
will recognize that other configurations and arrangements can be
used without departing from the spirit and scope of the present
disclosure. It will be apparent to a person skilled in the
pertinent art that the present disclosure can also be employed in a
variety of other applications.
[0032] It is noted that references in the specification to "one
embodiment," "an embodiment," "an example embodiment," "some
embodiments," etc., indicate that the embodiment described may
include a particular feature, structure, or characteristic, but
every embodiment may not necessarily include the particular
feature, structure, or characteristic. Moreover, such phrases do
not necessarily refer to the same embodiment. Further, when a
particular feature, structure or characteristic is described in
connection with an embodiment, it would be within the knowledge of
a person skilled in the pertinent art to effect such feature,
structure or characteristic in connection with other embodiments
whether or not explicitly described.
[0033] In general, terminology may be understood at least in part
from usage in context. For example, the term "one or more" as used
herein, depending at least in part upon context, may be used to
describe any feature, structure, or characteristic in a singular
sense or may be used to describe combinations of features,
structures or characteristics in a plural sense. Similarly, terms,
such as "a," "an," or "the," again, may be understood to convey a
singular usage or to convey a plural usage, depending at least in
part upon context.
[0034] It should be readily understood that the meaning of "on,"
"above," and "over" in the present disclosure should be interpreted
in the broadest manner such that "on" not only means "directly on"
something but also includes the meaning of "on" something with an
intermediate feature or a layer therebetween, and that "above" or
"over" not only means the meaning of "above" or "over" something
but can also include the meaning it is "above" or "over" something
with no intermediate feature or layer therebetween (i.e., directly
on something).
[0035] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper," and the like, may be used
herein for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly.
[0036] As used herein, the term "substrate" refers to a material
onto which subsequent material layers are added. The substrate
itself can be patterned. Materials added on top of the substrate
can be patterned or can remain unpatterned. Furthermore, the
substrate can include a wide array of semiconductor materials, such
as silicon, germanium, gallium arsenide, indium phosphide, etc.
Alternatively, the substrate can be made from an electrically
non-conductive material, such as a glass, a plastic, or a sapphire
wafer.
[0037] As used herein, the term "layer" refers to a material
portion including a region with a thickness. A layer can extend
over the entirety of an underlying or overlying structure, or may
have an extent less than the extent of an underlying or overlying
structure. Further, a layer can be a region of a homogeneous or
inhomogeneous continuous structure that has a thickness less than
the thickness of the continuous structure. For example, a layer can
be located between any pair of horizontal planes between, or at, a
top surface and a bottom surface of the continuous structure. A
layer can extend horizontally, vertically, and/or along a tapered
surface. A substrate can be a layer, can include one or more layers
therein, and/or can have one or more layer thereupon, thereabove,
and/or therebelow. A layer can include multiple layers. For
example, an interconnect layer can include one or more conductor
and contact layers (in which contacts, interconnect lines, and/or
vias are formed) and one or more dielectric layers.
[0038] As used herein, the term "nominal/nominally" refers to a
desired, or target, value of a characteristic or parameter for a
component or a process operation, set during the design phase of a
product or a process, together with a range of values above and/or
below the desired value. The range of values can be due to slight
variations in manufacturing processes or tolerances. As used
herein, the term "about" indicates the value of a given quantity
that can vary based on a particular technology node associated with
the subject semiconductor device. Based on the particular
technology node, the term "about" can indicate a value of a given
quantity that varies within, for example, 10-30% of the value
(e.g., .+-.10%, .+-.20%, or .+-.30% of the value).
[0039] As used herein, the term "three-dimensional (3D) memory
device" refers to a semiconductor device with vertically oriented
strings of memory cell transistors (referred to herein as "memory
strings") on a laterally-oriented substrate so that the memory
strings extend in the vertical direction with respect to the
substrate. As used herein, the term "vertical/vertically" means
nominally perpendicular to the lateral surface of a substrate.
[0040] One major limitation of existing ferroelectric memory
devices is the relatively small memory cell density compared with
other types of memory devices, which is in part, due to the fact
that the ferroelectric materials tend to stop being ferroelectric
when their dimensions shrink, for example, below the threshold
crystallization (ferroelectric phase formation) thickness. This
effect is related to the ferroelectric's depolarization field,
which can cause the ferroelectric materials to lose their
orthorhombic crystalline structures and thus, fail to crystalline
regardless of the post annealing conditions.
[0041] Various embodiments in accordance with the present
disclosure provide a ferroelectric memory device having an array of
ferroelectric memory cells therein with smaller die size, higher
film quality, higher device density, and improved performance
compared with other ferroelectric memory devices. By using a doped
ferroelectric layer having a plurality of groups of dopants
distributed along a concentration gradient, the high dielectric
constant (high-K) ferroelectric film crystallization can be boosted
with various significant advantages. First, structural defects in
the doped ferroelectric layer during the crystallization process
can be compensated and reduced by the dopants. Second, remnant
polarization, which is a measure of the polarization remaining in
the material when the electric field is totally removed, can be
increased, for example, by more than 30%. Further, threshold
crystallization can be decreased, for example, below 5 nm, which
can significantly shrink the memory cell dimension, thereby
increasing the memory cell array density. By significantly
enhancing the orthorhombic phase using the doped structure,
ferroelectric properties can be achieved with the doped
ferroelectric layer at a much thinner thickness, e.g., below 5 nm.
For example, binary dopants added into the ferroelectric layer will
be elastic during crystallization distortion, which improves high-k
ferroelectric phase formation. In some embodiments, the doped
ferroelectric layer can be formed in high aspect-ratio trench
capacitors, such as in 3D memory devices.
[0042] FIG. 1 illustrates a cross-section of an exemplary
ferroelectric memory cell 100, according to some embodiments of the
present disclosure. Ferroelectric memory cell 100 is the storage
element of a ferroelectric memory device and can include various
designs and configurations. As shown in FIG. 1, ferroelectric
memory cell 100 is a "1T-1C" cell that includes a capacitor 102, a
transistor 104, and an interconnect 106 between capacitor 102 and
transistor 104 formed on a substrate 108. Substrate 108 can include
silicon (e.g., single crystalline silicon), silicon germanium
(SiGe), gallium arsenide (GaAs), germanium (Ge), silicon on
insulator (SOI) or any other suitable materials.
[0043] In some embodiments, capacitor 102 includes a lower
electrode 110, an upper electrode 112, and a doped ferroelectric
layer 114 disposed vertically between lower electrode 110 and upper
electrode 112. Doped ferroelectric layer 114 may be in contact with
and electrically connected to lower electrode 110 on a lower
surface, and in contact with and electrically connected to upper
electrode 112 on an upper surface. Lower electrode 110 can be
electrically connected to transistor 104 through interconnect 106,
and upper electrode 112 can be electrically connected to a voltage
source (not shown), such that an electrical field can be applied to
doped ferroelectric layer 114. For ease of description, the example
of a 1T-1C cell is illustrated in the present disclosure. In
various embodiments, doped ferroelectric layer 114 can be used in
any other suitable types of memory cells with more than one
capacitor per cell. For example, doped ferroelectric layer 114 can
also be used in a "2T-2C" cell or a "nT-mC" (where n and m are
integers) cell. The type of memory cells (e.g., the number of
capacitors in a single memory cell) should not be limited by the
embodiments of the present disclosure.
[0044] The materials of lower electrode 110 and upper electrode 112
can include, but not limited to, at least one of titanium nitride
(TiN), titanium silicon nitride (TiSiN.sub.x), titanium aluminum
nitride (TiAlN.sub.x), titanium carbon nitride (TiCN.sub.x),
tantalum nitride (TaN.sub.x), tantalum silicon nitride
(TaSiN.sub.x), tantalum aluminum nitride (TaAlN.sub.x), tungsten
nitride (WN.sub.x), tungsten silicide (WSi.sub.x), tungsten carbon
nitride (WCN.sub.x), ruthenium (Ru), ruthenium oxide (RuO.sub.x),
iridium (Ir), doped polysilicon, transparent conductive oxides
(TCO), or iridium oxide (IrO.sub.x).
[0045] In some embodiments, the first and/or or the second
electrode includes a TCO, which includes, but are not limited to,
doped ZnO based TCOs, doped TiO.sub.2 based TCOs, doped SnO.sub.2
based TCOs, and perovskite TCOs. In some embodiments, the first
and/or the second electrode includes La.sub.1-xSr.sub.xCrO.sub.3
(LSCO).
[0046] In some embodiments, lower electrode 110 and upper electrode
112 include the same material(s). In some embodiments, lower
electrode 110 and upper electrode 112 include different materials.
The thickness of lower electrode 110 or upper electrode 112 can be
between about 2 nm and about 50 nm, such as between 2 nm and 20 nm
(e.g., 2 nm, 3 nm, 4 nm, 5 nm, 8 nm, 10 nm, 15 nm, 18 nm, 20 nm, 25
nm, 30 nm, 35 nm, 40 nm, 45 nm, 50 nm, any range bounded on the
lower end by any of these values, or in any range defined by any
two of these values). In some embodiments, lower electrode 110 and
upper electrode 112 have the same thickness. In some embodiments,
lower electrode 110 and upper electrode 112 have different
thicknesses.
[0047] In some embodiments, doped ferroelectric layer 114 includes
a ferroelectric oxide material doped with a plurality of dopants,
which can improve ferroelectric film crystallization. For example,
the dopants may provide elasticity during the crystallization of
the doped ferroelectric layer, reducing the number of defects
formed in the ferroelectric film crystallization, and improving
high-K ferroelectric phase formation. It is understood that in some
embodiments, doped ferroelectric layer 114 can include more than
one ferroelectric layer.
[0048] The ferroelectric oxide material can include a ferroelectric
composite oxide. In some embodiments, the ferroelectric oxide
material includes oxygen and one or more ferroelectric metals. The
ferroelectric metals can include, but not limited to, zirconium
(Zr), hafnium (Hf), and titanium (Ti). In some embodiments, the
ferroelectric metals also include aluminum (Al), nickel (Ni),
and/or iron (Fe). In some embodiments, the ferroelectric oxide
material includes HfO. In some embodiments, the ferroelectric oxide
material includes oxygen and two or more ferroelectric metals. The
molar ratio between two of the ferroelectric metals is between 0.1
and 10 (e.g., 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 2, 3,
4, 5, 6, 7, 8, 9, 10, any range bounded on the lower end by any of
these values, or in any range defined by any two of these values).
In one example, the ferroelectric oxide material includes
ZrHfO.sub.x, and the molar ratio between Zr and Hf is 1. In another
example, the ferroelectric oxide material includes TiHfO.sub.x, and
the molar ratio between Ti and Hf is 1. In some embodiments, the
ferroelectric oxide material includes oxygen and a non-metal
material such as silicon.
[0049] Doped ferroelectric layer 114 may also include a plurality
of dopants formed as a part of the crystal structures. In some
embodiments, the dopants compensate the defects formed during the
crystallization of the ferroelectric oxide material to improve the
film quality of doped ferroelectric layer 114. Elements of one or
more groups, e.g., in the periodic table, can be selected as
dopants based on their physical and/or chemical properties. In some
embodiments, elements are chosen for optimizing the compensation of
defects in doped ferroelectric layer 114.
[0050] In some embodiments, the dopants are different from the
ferroelectric metals in the ferroelectric oxide material and
include one or more dopants from one or more of Group II elements
(e.g., calcium (Ca), strontium (Sr), or barium (Ba)), Group III
elements (e.g., scandium (Sc), yttrium (Y), aluminum (Al), gallium
(Ga), and indium (In)), and Lanthanide elements (i.e., lanthanum
(La), cerium (Ce), praseodymium (Pr), neodymium (Nd), promethium
(Pm), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb),
dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium
(Yb), lutetium (Lu)). The dopants can be distributed along a
concentration gradient in a desired depth range along a vertical
direction (e.g., the z-axis). For ease of description, a depth
range is described to be between a first level and a second level
of doped ferroelectric layer 114 along the vertical direction. For
ease of description, in the present disclosure, a concentration
gradient refers to a gradual decrease of doping concentration from
the first level to the second level of doped ferroelectric layer
114. In some embodiments, the dopant concentrations of the first
level and the second level are different. In some embodiments, the
dopant concentrations of the first level and the second level are
the same. In some embodiments, dopants may be distributed in a
plurality of concentration gradient/profiles in doped ferroelectric
layer 114, e.g., along the vertical direction or the direction
perpendicular to the surface of doped ferroelectric layer 114. The
doping concentrations at the first level of a concentration
gradient may be the same as or different from the doping
concentration at the first level of another concentration gradient,
and the doping concentrations at the second level of a
concentration gradient may be the same as or different from the
doping concentration at the second level of another concentration
gradient. The dopants can be distributed in any suitable doping
profiles (e.g., an exponential doping profile, a parabolic doping
profile, or a linear doping profile) in doped ferroelectric layer
114 and the doping concentration can thus accordingly vary as a
function of depth in doped ferroelectric layer 114. In doped
ferroelectric layer 114, doping profiles can be the same in
different depth ranges or can vary (e.g., from one level to another
level or from one surface to another surface). The specific types
of doping profile in doped ferroelectric layer 114 should not be
limited by the embodiments of the present disclosure. One exemplary
doping profile is shown in FIG. 1. The dopants may be distributed
along a concentration gradient from the upper surface (e.g., the
first level) to the lower surface (e.g., the second level), as
depicted by the arrow. That is, the doping concentration gradually
decreases from the upper surface to the lower surface of doped
ferroelectric layer 114. In some embodiments, the doping
concentration can range from about 10.sup.17-10.sup.21/cm.sup.3
(e.g., at the upper surface of doped ferroelectric layer 114) to
about 10.sup.21-10.sup.17/cm.sup.3 (e.g., at the lower surface of
doped ferroelectric layer 114), or vice versa.
[0051] Doped ferroelectric layer 114 may include binary dopants,
e.g., a first group of dopants and a second group of dopants
different from the first group of dopants. In some embodiments, the
first group of dopants include at least one dopant from Group IV
elements, and the second group of dopants includes at least one
dopant from one or more of Group V elements, Group II elements,
Group III elements, and Lanthanide elements. In some embodiments,
the first group of dopants include at least one of Zr, Hf, or Ti.
The first group of dopants are different from the ferroelectric
metals in the ferroelectric oxide material. In one example, if the
ferroelectric oxide material includes Zr.sub.xHf.sub.yO.sub.z
(e.g., ZrHfO.sub.z, where x=y=1), then the first group of dopants
include Ti, but not Zr or Hf. In another example, if the
ferroelectric oxide material includes Ti.sub.xHf.sub.yO.sub.z
(e.g., TiHfO.sub.z, where x=y=1), then the first group of dopants
include Zr, but not Ti or Hf. In some embodiments, the second group
of dopants include at least one of tantalum (Ta), niobium (Nb),
dubnium (Db), vanadium (V), Sc, Y, Al, Ga, In, lanthanides, Ca, Sr,
or Ba. In some embodiments, a molar ratio between the first group
of dopants and the second group of dopants is between about 100:1
to about 1:100, e.g., 100:1, 90:1, 80:1, 50:1, 25:1, 10:1, 5:1,
1:1, 1:5, 1:10, 1:25, 1:50, 1:80, 1:90, 1:100, any range bounded on
the lower end by any of these values, or in any range defined by
any two of these values. Binary dopants can significantly improve a
ferroelectric memory device's performance, reduce ferroelectric
layer thickness and anneal temperature, allowing more freedom in
terms of memory circuit design. A carefully designed doping
gradient can improve ferroelectric features such as the switching
charge, fatigue, imprint, and/or retention of the ferroelectric
memory device.
[0052] In some embodiments, the first group of dopants include at
least one dopant from Group V elements, and the second group of
dopants include at least one dopant from one or more of Group II
elements, Group III elements, and Lanthanide elements. In some
embodiments, the first group of dopants include at least one of Ta,
Nb, Db, or V. In some embodiments, the second group of dopants
include at least one of Sc, Y, Al, Ga, In, lanthanides, Ca, Sr, or
Ba. In some embodiments, a molar ratio between the first group of
dopants and the second group of dopants is between about 100:1 to
about 1:100.
[0053] In some embodiments, the first group of dopants include at
least one dopant from Group III elements and Lanthanide elements,
and the second group of dopants include at least one dopant from
one or more of Group II elements. In some embodiments, the first
group of dopants include at least one of Sr, Y, or lanthanides. In
some embodiments, the second group of dopants include at least one
of Ca, Sr, or Ba. In some embodiments, a molar ratio between the
first group of dopants and the second group of dopants is between
about 100:1 to about 1:100. For example, a molar ratio between the
Group III dopants and Group II dopants can be about 1:1.
[0054] In some ferroelectric memory devices, their ferroelectric
films can lose orthorhombic crystalline structure when the
thickness of the films are below 5 nm due to the inability of the
films to crystallize regardless of the added post annealing
conditions. As described above, the dopants disclosed herein can
improve the crystallization of ferroelectric oxide material, for
example, by compensating the defects formed during the
crystallization process. Thus, in some embodiments, the thickness
of ferroelectric layer is between about 1 nm and about 5 nm, such
as between 1 nm and 5 nm (e.g., 1 nm, 1.5 nm, 2 nm, 2.5 nm, 3 nm,
3.5 nm, 4 nm, 4.5 nm, 5 nm, any range bounded on the lower end by
any of these values, or in any range defined by any two of these
values).
[0055] In some embodiments, transistor 104 includes source/drain
regions 120 and a gate stack having a gate dielectric 122 and a
gate conductor 124. Source/drain regions 120 can be doped regions
in substrate 108 with n-type or p-type dopants at a desired doping
level. Gate dielectric 122 can include dielectric materials, such
as silicon oxide (SiO.sub.x), silicon nitride (SiN.sub.x) or high-k
dielectric materials including, but not limited to, aluminum oxide
(Al.sub.2O.sub.3), hafnium oxide (HfO.sub.2), tantalum oxide
(Ta.sub.2O), zirconium oxide (ZrO.sub.2), titanium oxide
(TiO.sub.2), or any combination thereof. Gate conductor 124 can
include conductive materials including, but not limited to,
tungsten (W), cobalt (Co), copper (Cu), aluminum (Al), polysilicon,
silicides, or any combination thereof. Gate conductor 124 can
function as the word line of ferroelectric memory cell 100. An
interconnect (not shown) can be in contact with one of source/drain
regions 120 that is not in contact with interconnect 106 and
function as the bit line of ferroelectric memory cell 100.
[0056] The dopants may also be distributed in other suitable doping
profiles in doped ferroelectric layer 114. In some embodiments, the
doping profiles of the dopants are determined based on factors such
as the crystallization process and/or material properties of the
ferroelectric oxide material. FIGS. 2A-2E each illustrates a
cross-sectional view of an exemplary doping profile in doped
ferroelectric layer 114, according to some embodiments. The arrow
next to each cross-sectional view depicts the direction of the
concentration gradient (e.g., the direction along which the doping
concentration decreases). Doped ferroelectric layer 114 shown in
FIGS. 2A-2E may have a suitable combination of the first and the
second groups of dopants as doped ferroelectric layer 114
illustrated in FIG. 1. Details of the possible elements used as the
first group of dopants and the second group of dopants in doped
ferroelectric layers 114 of FIGS. 2A-2E can be referred to as the
description of dopants in doped ferroelectric layer 114 in FIG. 1
and thus, are not repeated herein.
[0057] As an example shown in FIG. 2A, the first level may refer to
a lower surface 204 of doped ferroelectric layer 114, the second
level may refer to an upper surface 202 of doped ferroelectric
layer 114, and the doping concentration may decrease from lower
surface 204 to upper surface 202 of doped ferroelectric layer 114.
As indicated by the arrow, the doping concentration can decrease
from about 10.sup.21/cm.sup.3 (e.g., at lower surface 204) to about
10.sup.17/cm.sup.3 (e.g., at upper surface 202). In some
embodiments, a molar ratio between the first group of dopants and
the second group of dopants is between about 100:1 to about
1:100.
[0058] In another example shown in FIG. 2B, the first level may
refer to each one of upper surface 202 and lower surface 204 of
doped ferroelectric layer 114, and the second level may refer a
first middle level 206 of doped ferroelectric layer 114. In the
present disclosure, a middle level (e.g., first middle level 206,
second middle level 208, and third middle level 210) represents any
suitable level/depth/position/surface between an upper boundary
(e.g., an upper surface/level) and a lower boundary (e.g., a lower
surface/level). That is, a middle level is not necessarily
positioned at the exact middle position between two boundaries. The
middle level can deviate from the middle position between two
boundaries by any desired distance, determined by the actual
design/application. For example, first middle level 206 may be any
suitable level/depth in doped ferroelectric layer 114 between upper
surface 202 and lower surface 204. In some embodiments, first
middle level 206 may approximately be the middle position between
upper surface 202 and lower surface 204 and may have approximately
the same distance to each of upper surface 202 and lower surface
204. In some embodiments, the doping concentration may decrease
from each of upper surface 202 and lower surface 204 towards first
middle level 206, as indicated by the arrows in FIG. 2B. In some
embodiments, the doping concentration decreases respectively from
about 10.sup.21/cm.sup.3 (e.g., at upper surface 202) and about
10.sup.21/cm.sup.3 (e.g., at lower surface 204) to about
10.sup.17/cm.sup.3 (e.g., at first middle level 206). In some
embodiments, a molar ratio between the first group of dopants and
the second group of dopants is between about 100:1 and about
1:100.
[0059] In still another example shown in FIG. 2C, the first level
may refer to first middle level 206 of doped ferroelectric layer
114, and the second level may refer to each one of upper surface
202 and lower surface 204 of doped ferroelectric layer 114. In some
embodiments, the doping concentration may decrease from first
middle level 206 towards each of the upper surface 202 and lower
surface 204, as indicated by the arrows in FIG. 2C. In some
embodiments, the doping concentration decreases respectively from
about 10.sup.21/cm.sup.3 (e.g., first middle level 206) to about
10.sup.17/cm.sup.3 (e.g., at upper surface 202) and to about
10.sup.17/cm.sup.3 (e.g., at lower surface 204). In some
embodiments, a molar ratio between the first group of dopants and
the second group of dopants is between about 100:1 and about
1:100.
[0060] In yet another example shown in FIG. 2D, upper surface 202,
first middle level 206, and lower surface 204 may each be a first
level, and a middle level between two adjacent first levels may be
a second level. For example, second middle level 208 (e.g., between
upper surface 202 and first middle level 206) and third middle
level 210 (e.g., between lower surface 204 and first middle level
206) may each be a second level. Second middle level 208 may be any
suitable depth/level between upper surface 202 and first middle
level 206, and third middle level 210 may be any suitable
depth/level between first middle level 206 and lower surface 204.
In some embodiments, second middle level 208 may be a middle
position between upper surface 202 and first middle level 206, and
third middle level 210 may be a middle position between first
middle level 206 and lower surface 204. For example, second middle
level 208 has approximately the same distance to upper surface 202
and first middle level 206, and third middle level 210 has
approximately the same distance to first middle level 206 and lower
surface 204. In some embodiments, as indicated by the arrows of
FIG. 2D, doping concentrations decrease respectively from first
middle level 206 towards second middle level 208 and third middle
level 210, and from each of upper surface 202 and lower surface 204
towards second middle level 208 and third middle level 210. In some
embodiments, the doping concentration decrease respectively from
about 10.sup.21/cm.sup.3 (e.g., first middle level 206) to about
10.sup.17/cm.sup.3 (e.g., at second middle level 208) and to about
10.sup.17/cm.sup.3 (e.g., at third middle level 210). In some
embodiments, the doping concentration decrease respectively from
about 10.sup.21/cm.sup.3 (e.g., at upper surface 202) to about
10.sup.17/cm.sup.3 (e.g., second middle level 208) and from about
10.sup.21/cm.sup.3 (e.g., at lower surface 204) to about
10.sup.17/cm.sup.3 (e.g., at third middle level 210). In some
embodiments, a molar ratio between the first group of dopants and
the second group of dopants is between about 100:1 and about
1:100.
[0061] In yet another example shown in FIG. 2E, second and third
middle levels 208 and 210 may each be a first level, and upper
surface 202, first middle level 206, and lower surface 204 may each
be a second level. As shown in FIG. 2E, second and third middle
levels 208 and 210 represent different surfaces/depths in doped
ferroelectric layer 114, and the doping concentration at second and
third middle levels 208 and 210 can be the same or different. In
some embodiments, second middle level 208 may be a middle position
between upper surface 202 and first middle level 206, and third
middle level 210 may be a middle position between first middle
level 206 and lower surface 204. In some embodiments, as indicated
by the arrows of FIG. 2E, doping concentrations decrease
respectively from second middle level 208 and third middle level
210 towards first middle level 206, and respectively from second
middle level 208 and third middle level 210 towards each of upper
surface 202 and lower surface 204. In some embodiments, the doping
concentration decrease respectively from about 10.sup.21/cm.sup.3
(e.g., at second middle level 208) and about 10.sup.21/cm.sup.3
(e.g., at third middle level 210) to about 10.sup.17/cm.sup.3
(e.g., first middle level 206). In some embodiments, the doping
concentration decrease respectively from about 10.sup.21/cm.sup.3
(e.g., second middle level 208) to about 10.sup.17/cm.sup.3 (e.g.,
at upper surface 202) and from about 10.sup.21/cm.sup.3 (e.g., at
third middle level 210) to about 10.sup.17/cm.sup.3 (e.g., at lower
surface 204). In some embodiments, a molar ratio between the first
group of dopants and the second group of dopants is between about
100:1 and about 1:100. For ease of description, the present
disclosure only illustrates a limited number of middle levels as
examples to show the changes in doping concentration as a function
of depth in doped ferroelectric layer 114. In some embodiments, any
suitable number of middle levels can be formed in doped
ferroelectric layer 114. For example, the number of middle levels
can be greater than 10, depending on the design/application. The
specific number and locations of middle levels should not be
limited by the embodiments of the present disclosure.
[0062] FIGS. 3A-3C and FIGS. 3D-3G each illustrates an exemplary
fabrication process (e.g., 300 and 320) to form a doped
ferroelectric layer in contact with electrodes in a ferroelectric
memory cell, according to some embodiments. FIG. 4 illustrates a
flowchart of a method 400 for forming the doped ferroelectric layer
in contact with electrodes. Examples of the doped ferroelectric
layer formed by processes 300 and 320 include doped ferroelectric
layers 114 depicted in FIG. 1. For ease of illustration, processes
300 and 320 are described together with FIG. 4. It should be
understood that the operations shown in method 400 are not
exhaustive and that other operations can be performed as well
before, after, or between any of the illustrated operations.
Further, some of the operations may be performed simultaneously, or
in a different order than shown in FIG. 4.
[0063] Referring to FIG. 4, method 400 starts at operation 402, in
which a first electrode is formed. As illustrated in FIG. 3A, a
lower electrode 302 is formed, for example, in an interlayer
dielectric (ILD) layer (not shown). Similarly, as illustrated in
FIG. 3D, a lower electrode 322 is formed, for example, in an ILD
layer (not shown). Lower electrode 302/322 can include a conductive
layer deposited using at least one of physical vapor deposition
(PVD), chemical vapor deposition (CVD), electrochemical deposition,
atomic layer deposition (ALD), and pulsed laser deposition (PLD).
The thickness of lower electrode 302/322 can be between 2 nm and 50
nm. Fabrication processes to form the conductive layer can also
include photolithography, chemical mechanical polishing (CMP),
wet/dry etch, or any combination thereof. The ILD layer can include
dielectric materials deposited by one or more thin film deposition
processes including, but not limited to, CVD, PLD, ALD, sol-gel
process, MOCVD, CSD, or any combination thereof.
[0064] Method 400 proceeds to operation 404, as illustrated in FIG.
4, in which a doped ferroelectric layer is formed in contact with
the first electrode. In some embodiments, the doped ferroelectric
layer is formed above the first electrode.
[0065] FIG. 3B illustrates an operation to form a doped
ferroelectric layer 304 using an in-situ doping method. As
illustrated in FIG. 3B, doped ferroelectric layer 304 is formed
above and in contact with lower electrode 302. Doped ferroelectric
layer 304 can include a dielectric material (e.g., ferroelectric
oxide material). The dielectric material can include, but not
limited to, oxygen and one or more ferroelectric metals, such as
Zr, Hf, and Si. The dielectric material can be doped with dopants
having at least one dopant from one of Group II elements, Group III
elements, and Lanthanide elements. The thickness of doped
ferroelectric layer 304 can be between 1 nm and 50 nm, such as
between 1 nm and 5 nm. In some embodiments, depending on the
design/application, portions of doped ferroelectric layer 304
(e.g., at different depth ranges) can be formed by different
deposition methods. For example, half of doped ferroelectric layer
304 can be formed by a CVD process, and the rest of doped
ferroelectric layer 304 can be subsequently formed by PVD. The
specific processes to form ferroelectric layer 304 should not be
limited by the embodiments of the present disclosure.
[0066] In some embodiments, the dielectric material is deposited
using a CVD process under a temperature between about 20.degree. C.
and about 600.degree. C., such as between 20.degree. C. and
600.degree. C. (e.g., 20.degree. C., 40.degree. C., 60.degree. C.,
80.degree. C., 100.degree. C., 200.degree. C., 300.degree. C.,
400.degree. C., 500.degree. C., 600.degree. C., any range bounded
on the lower end by any of these values, or in any range defined by
any two of these values). For example, the CVD process uses
reactant gases with a deposition temperature between room
temperature and 600.degree. C. In some embodiments, the reactant
gases include vaporized precursor gases. The reactant gases can
include at least one of Hf-containing compound, Zr-containing
compound, or Si-containing compound. In one example, the reactant
gases include at least one of a Hf-containing reactant gas and a
Zr-containing reactant gas. Dopant reactant gases having the dopant
elements (e.g., Ti and Ta) may also be introduced into the reactor
during the reaction to form the dielectric material. Dopant
reactant gases may be mixed with the reactant gases to form the
dielectric material during the deposition such that the dopants can
be distributed in the subsequently-formed doped ferroelectric layer
304 with a desired doping profile. In some embodiments, the flow
rates of the dopant reactant gases can be adjusted such that
desired doping concentration can be reached at a desired depth in
the subsequently-formed doped ferroelectric layer 304. For example,
a higher flow rate can result in a higher doping concentration, and
vice versa. For illustration purposes, in FIG. 3B, element 304-1
represents one or more reactant gas molecules for forming the
dielectric material, element 304-2 represents one or more dopant
reactant gas molecules for forming the first group of dopants, and
element 304-3 represents one or more dopant reactant gas molecules
for forming the second group of dopants. The flow rates of elements
304-2 and 304-3 may be dynamically adjusted such that the dopants
can be distributed in subsequently-formed doped ferroelectric layer
304 in a desired doping profile. In some embodiments, the molar
ratio of elements 304-2 and 304-3 can be adjusted by tuning the
flow rates of elements 304-2 and 304-3. Fabrication processes to
form the dielectric layer can also include photolithography, CMP,
wet/dry etch, or any combination thereof.
[0067] In some embodiments, the dielectric material is deposited
using an ALD process under a temperature between about 20.degree.
C. and about 600.degree. C., such as between 20.degree. C. and
600.degree. C. For example, the ALD process uses a precursor with a
deposition temperature between room temperature and 600.degree. C.
The precursors can include at least one of Hf-containing compound,
Zr-containing compound, or Si-containing compound. In one example,
the precursors include at least one of a Hf-containing compound, a
Zr-containing compound, and at least one dopant-containing
precursor (e.g., Ta and Ti). The Hf-containing compound and the
Zr-containing compound can share the same ligand. For example, the
precursors are in liquid phase or in solid phase at the room
temperature. The precursors can be introduced into the reactor in a
desired sequence so that the dopants are distributed into desired
depths of doped ferroelectric layer 304, forming a desired doping
profile. Fabrication processes to form the dielectric layer can
also include photolithography, CMP, wet/dry etch, or any
combination thereof.
[0068] In some embodiments, the dielectric material is deposited
using a PVD process under a temperature between about 0.degree. C.
and about 600.degree. C., such as between 20.degree. C. and
300.degree. C. In some embodiments, a target containing the
dielectric material (e.g. ferroelectric oxide material HfO.sub.x)
with desired binary dopants (e.g. HfZrTiO.sub.x) is sputtered and
deposited onto a substrate to form a doped ferroelectric layer 304.
A reactant gas (such as oxygen) is used along with an inert gas
(e.g. Ar) to achieve desired composition in doped ferroelectric
layer 304. In some embodiments, a plurality of targets (e.g., Hf,
Zr and Ti) are placed in a PVD chamber, and with a reactant gas
(e.g. oxygen) and/or an inert gas (e.g. Ar) is injected into the
PVD chamber to form doped ferroelectric layer 304. A desired doping
profile and stoichiometry are obtained by controlling the PVD
chamber pressure, the flow rate of the reactant gas, the flow rate
of the inert gas, the sputter rates of each target, the PVD chamber
temperature, and the sputter sequence of each target. In some
embodiments, a target containing the dielectric material (e.g., a
ferroelectric oxide material such as HfO.sub.x) and a target
containing dopant atoms (e.g., Ti and Zr) sputtered and deposited
simultaneously or sequentially onto a substrate to form a doped
ferroelectric layer 304. The chamber pressure, sputter rates of
each target, chamber temperature, sputter times of each target, and
the sputter sequence of each target can be controlled so that the
dopants are distributed into desired depths of doped ferroelectric
layer 304, forming a desired doping profile. Fabrication processes
to form the dielectric layer can also include photolithography,
CMP, wet/dry etch, or any combination thereof.
[0069] FIGS. 3E and 3F illustrate an operation to form a doped
ferroelectric layer 325 using an ion implantation process. As
illustrated in FIG. 3F, doped ferroelectric layer 325 is formed
above and in contact with lower electrode 322. Dielectric material
324 may be first formed using one or more of CVD, PLD, ALD, sol-gel
process, MOCVD, CSD process, or any combination thereof. Different
from the CVD, ALD, or PLD processes described above for forming
doped ferroelectric layer 304, no dopant-containing reactant gases
(e.g., for forming the first and second groups of dopants) are
introduced during the deposition process of dielectric material
324. An ion implantation process 328 may then be performed on
dielectric material 324 to form the first and second groups of
dopants. Doped ferroelectric layer 325 may then be formed. In some
embodiments, ions for forming the first and the second groups of
dopants (e.g., depicted as the arrows) are mixed and implanted into
dielectric material 324 at the same time. In some embodiments, ions
for forming the first and the second groups of dopants may be
separately implanted into dielectric material 324. The dosages and
implantation energy of ions can be controlled such that the dopants
can have a desired doping profile in subsequently-formed doped
ferroelectric layer 325. In some embodiments, a thermal annealing
process is performed after the ion implantation to further
change/adjust the doping profile in subsequently-formed doped
ferroelectric layer 325 to activate and redistribute dopants into
the lattice of dielectric material 324, compensating the defects
caused by ion implantation process 328. In some embodiments, other
suitable doping methods, such as plasma doping (e.g., in which one
or more targets are biased and bombarded so dopant ions implanted
into dielectric material 324) and thermal diffusion (e.g., in which
dopants are deposited and driven into dielectric material 324 to
form desired doping profile) can also be used to form desired
doping profiles in doped ferroelectric layer 325.
[0070] In some embodiments, various doping methods can be combined
to form a ferroelectric layer with desired doping profiles. In some
embodiments, different doping methods can be combined, e.g., used
simultaneously, sequentially, or alternately, to form desired
doping profiles in the doped ferroelectric layer. Different doping
methods can also be performed for the doping of one group of
dopants or a single dopant element. In some embodiments, the first
and the second groups of dopants are formed using different doping
methods. For example, the first group of dopants can be formed by
one or more of CVD, PLD, ALD, sol-gel process, MOCVD or CSD
process, and the second group of dopants can be formed by ion
implantation, and vice versa. In some embodiments, doping profiles
in different depths ranges can be formed using the same doping
method or different methods. Using doped ferroelectric layer 114
shown in FIG. 2B as an example, doping profile between lower
surface 204 and first middle level 206 can be formed by CVD, and
doping profile between first middle level 206 and upper surface 202
can be formed by CVD and/or IMP.
[0071] Method 400 proceeds to operation 406, as illustrated in FIG.
4, in which a second electrode is formed in contact with the doped
ferroelectric layer. As illustrated in FIG. 3C, an upper electrode
306 is formed above and in contact with doped ferroelectric layer
304. Similarly, as illustrated in FIG. 3G, an upper electrode 326
is formed above and in contact with doped ferroelectric layer 325.
Upper electrode 306/326 can include a conductive layer deposited
using at least one of PVD, CVD, electrochemical deposition, PLD,
chemical vapor deposition, and ALD. The thickness of upper
electrode 306/326 can be between 2 nm and 50 nm. Fabrication
processes to form the dielectric layer can also include
photolithography, CMP, wet/dry etch, or any combination
thereof.
[0072] FIG. 5 illustrates a plan view of an exemplary ferroelectric
memory device 500, according to some embodiments of the present
disclosure. Ferroelectric memory cell 100 is part of a planar
ferroelectric memory device in which the ferroelectric layer is
doped with at least two groups of dopants. The similar doped
ferroelectric layer can be implemented into 3D ferroelectric memory
devices, such as ferroelectric memory device 500, to improve the
ferroelectric properties and memory cell array density.
[0073] Ferroelectric memory device 500 can include an array of
ferroelectric memory strings 502 disposed in one or more ILD layers
504 and extending vertically above a substrate (not shown). Each
ferroelectric memory string 502 has a circular shape in the plan
view and includes a conductor layer 506, a first electrode 508, a
doped ferroelectric layer 510, and a second electrode 512 disposed
radially from the center of ferroelectric memory string 502 in this
order. That is, doped ferroelectric layer 510 can be disposed
radially between first electrode 508 and second electrode 512.
Conductor layer 506 fills the remaining area inside first electrode
508 and includes a conductor material, such as a metal. It is
understood that the shape of ferroelectric memory string 502 in the
plan view is not limited to circular and can be any other shapes,
such as rectangular, square, oval, etc.
[0074] FIG. 6 illustrates a cross-section of an exemplary
ferroelectric memory device 600, according to some embodiments of
the present disclosure. In some embodiments, FIG. 6 illustrates the
cross-section of ferroelectric memory device 500 along A-A
direction. As shown in FIG. 6, ferroelectric memory device 600
includes a substrate 602 and one or more ILD layers 604 disposed
above substrate 602. Ferroelectric memory device 600 can also
include a plurality of ferroelectric memory strings 606 extending
vertically through ILD layers 604 and above substrate 602. In some
embodiments, ferroelectric memory device 600 is electrically
connected to a transistor via an interconnect (the transistor and
the interconnect are not shown in FIG. 6).
[0075] Each ferroelectric memory string 606 can have a cylinder
shape (e.g., a pillar shape). A conductor layer 608, a first
electrode 610, a doped ferroelectric layer 612, and a second
electrode 614 can be disposed laterally (e.g., radially) from the
center of ferroelectric memory string 606 in this order. Doped
ferroelectric layer 612 may be similar to doped ferroelectric layer
114 described above in detail in FIG. 1 except being rotated right
or left 90 degrees. Doped ferroelectric layer 612 can be disposed
radially between first electrode 610 and second electrode 614. The
doping profile of doped ferroelectric layer 612 may be similar to
those examples described above in detail in FIGS. 2A-2E except
being rotated right or left 90 degrees.
[0076] In some embodiments, each of first electrode 610 and second
electrode 614 includes at least one of titanium nitride (TiN),
titanium silicon nitride (TiSiN.sub.x), titanium aluminum nitride
(TiAlN.sub.x), titanium carbon nitride (TiCN.sub.x), tantalum
nitride (TaN.sub.x), tantalum silicon nitride (TaSiN.sub.x),
tantalum aluminum nitride (TaAlN.sub.x), tungsten nitride
(WN.sub.x), tungsten silicide (WSi.sub.x), tungsten carbon nitride
(WCN.sub.x), ruthenium (Ru), ruthenium oxide (RuO.sub.x), iridium
(Ir), doped polysilicon, transparent conductive oxides (TCOs), or
iridium oxide (IrO.sub.x). In some embodiments, each of first
electrode 610 and second electrode 614 has the thickness (in the
radial direction) of between 2 nm and 50 nm.
[0077] To fabricate each ferroelectric memory string 606, a
vertical opening (e.g., a hole or a trench) can be etched through
one or more ILD layers 604 using wet etch and/or dry etch. Second
electrode 614, doped ferroelectric layer 612, and first electrode
610 can be sequentially deposited opening this order into the
vertical opening to cover the sidewalls and bottom of the vertical
opening using one or more thin film deposition processes, such as
PVD, CVD, electrochemical deposition, ALD, and any combination
thereof. Doped ferroelectric layer 612 may be formed using the
similar processes described above for forming doped ferroelectric
layer 304 or 325. Conductor layer 608 can be deposited afterwards
to fill the remaining space in the vertical opening. In some
embodiments, conductor layer 608 partially fills the space in the
vertical opening, and a dielectric structure (not shown) can be
deposited to fill up the rest of the space in the vertical
opening.
[0078] The foregoing description of the specific embodiments will
so fully reveal the general nature of the present disclosure that
others can, by applying knowledge within the skill of the art,
readily modify and/or adapt for various applications such specific
embodiments, without undue experimentation, without departing from
the general concept of the present disclosure. Therefore, such
adaptations and modifications are intended to be within the meaning
and range of equivalents of the disclosed embodiments, based on the
teaching and guidance presented herein. It is to be understood that
the phraseology or terminology herein is for the purpose of
description and not of limitation, such that the terminology or
phraseology of the present specification is to be interpreted by
the skilled artisan in light of the teachings and guidance.
[0079] Embodiments of the present disclosure have been described
above with the aid of functional building blocks illustrating the
implementation of specified functions and relationships thereof.
The boundaries of these functional building blocks have been
arbitrarily defined herein for the convenience of the description.
Alternate boundaries can be defined so long as the specified
functions and relationships thereof are appropriately
performed.
[0080] The Summary and Abstract sections may set forth one or more
but not all exemplary embodiments of the present disclosure as
contemplated by the inventor(s), and thus, are not intended to
limit the present disclosure and the appended claims in any
way.
[0081] The breadth and scope of the present disclosure should not
be limited by any of the above-described exemplary embodiments, but
should be defined only in accordance with the following claims and
their equivalents.
* * * * *