U.S. patent application number 16/432356 was filed with the patent office on 2020-12-10 for phase change memory device with crystallization template and method of making the same.
The applicant listed for this patent is SANDISK TECHNOLOGIES LLC. Invention is credited to Mac APODACA, Zhaoqiang BAI, Gerardo BERTERO, Michael GROBIS, Neil Leslie ROBERTSON, Michael Nicolas Albert TRAN.
Application Number | 20200388752 16/432356 |
Document ID | / |
Family ID | 1000004143778 |
Filed Date | 2020-12-10 |
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United States Patent
Application |
20200388752 |
Kind Code |
A1 |
BAI; Zhaoqiang ; et
al. |
December 10, 2020 |
PHASE CHANGE MEMORY DEVICE WITH CRYSTALLIZATION TEMPLATE AND METHOD
OF MAKING THE SAME
Abstract
A phase change memory device includes a phase change material
portion located between a first electrode and a second electrode,
and a crystallization template material portion located between the
first electrode and the second electrode in contact with the phase
change material portion. The crystallization template material
portion and the phase change material portion belong to a same
crystal system and have matching lattice spacing, or the
crystallization template material portion and the phase change
material portion do not belong to the same crystal system, but have
a matching translational symmetry along at least one paired lattice
plane with a matching lattice spacing.
Inventors: |
BAI; Zhaoqiang; (San Jose,
CA) ; APODACA; Mac; (San Jose, CA) ; GROBIS;
Michael; (San Jose, CA) ; TRAN; Michael Nicolas
Albert; (San Jose, CA) ; ROBERTSON; Neil Leslie;
(Palo Alto, CA) ; BERTERO; Gerardo; (Redwood City,
CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SANDISK TECHNOLOGIES LLC |
ADDISON |
TX |
US |
|
|
Family ID: |
1000004143778 |
Appl. No.: |
16/432356 |
Filed: |
June 5, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 45/144 20130101;
G11C 13/0004 20130101; H01L 45/06 20130101; H01L 45/1253 20130101;
H01L 45/146 20130101; H01L 27/2427 20130101; H01L 45/1608 20130101;
G11C 13/0069 20130101; H01L 45/1233 20130101 |
International
Class: |
H01L 45/00 20060101
H01L045/00; H01L 27/24 20060101 H01L027/24; G11C 13/00 20060101
G11C013/00 |
Claims
1. A phase change memory device, comprising: a phase change
material portion located between a first electrode and a second
electrode; and a crystallization template material portion located
between the first electrode and the second electrode in contact
with the phase change material portion, wherein: the
crystallization template material portion and the phase change
material portion belong to a same crystal system and have matching
lattice spacing; or (ii) the crystallization template material
portion and the phase change material portion do not belong to the
same crystal system, but have a matching translational symmetry
along at least one paired lattice plane with a matching lattice
spacing.
2. The phase change memory device of claim 1, wherein the
crystallization template material portion has a higher melting
point or a higher decomposition temperature than the phase change
material portion.
3. The phase change memory device of claim 1, wherein the
crystallization template material portion and the phase change
material portion belong to the same crystal system and have the
matching lattice spacing.
4. The phase change memory device of claim 3, wherein the
crystallization template material portion lattice spacing is within
7% of a lattice constant of the phase change material portion.
5. The phase change memory device of claim 3, wherein the phase
change material comprises an alloy of Ge, Sb, and Te having a
meta-stable cubic phase in its crystalline state, and the
crystallization template material portion belongs to a cubic
crystal system in its crystalline state.
6. The phase change memory device of claim 3, wherein the phase
change material comprises an alloy of Ge, Sb, and Te having a
stable trigonal phase in its crystalline state, and the
crystallization template material portion belongs to trigonal
crystal system in its crystalline state.
7. The phase change memory device of claim 3, wherein the phase
change material and the crystallization template material have
matching translational symmetry along at least one paired lattice
plane with matching lattice spacing.
8. The phase change memory device of claim 1, wherein the phase
change material comprises Ge2Sb2Te5, and the crystallization
template material comprises a crystalline conductive or
semiconductor material different from silicon or Ge2Sb2Te5.
9. The phase change memory device of claim 8, wherein the
crystallization template material is selected from W, Al, Rh, Pd,
Ag, Au, Pt, Sb or germanium telluride.
10. The phase change memory device of claim 1, wherein the
crystallization template material comprises a dielectric
material.
11. The phase change memory device of claim 10, wherein the phase
change material comprises germanium antimony telluride, and the
crystallization template material comprises a native oxide of the
germanium antimony telluride.
12. The phase change memory device of claim 10, wherein the
crystallization template material comprises silicon nitride.
13. The phase change memory device of claim 1, wherein: the phase
change material portion comprises a first
germanium-antimony-tellurium compound; and the crystallization
template material portion comprises a second
germanium-antimony-tellurium compound that differs in composition
from the first germanium-antimony-tellurium compound.
14. The phase change memory device of claim 13, wherein the first
germanium-antimony-tellurium compound and the second
germanium-antimony-tellurium compound differ in composition by
presence or absence of a dopant species.
15. The phase change memory device of claim 14, wherein: the first
germanium-antimony-tellurium compound consists essentially of
germanium, antimony, and tellurium; and the second
germanium-antimony-tellurium compound comprises germanium,
antimony, tellurium, and at least one dopant selected from boron,
carbon, nitrogen, oxygen, tin, silicon, indium, phosphorous,
sulfur, arsenic, selenium, vanadium, or titanium.
16. The phase change memory device of claim 1, wherein the
crystallization template material portion comprises a dielectric or
semiconductor crystallization template material portion having a
tubular configuration that laterally surrounds the phase change
material portion.
17. The phase change memory device of claim 1, further comprising
an Ovonic threshold selector element located between the first and
the second electrodes.
18. A method of forming a phase change memory device, comprising:
forming a first electrode comprising a first conductive material;
forming a pillar structure including combination of a phase change
material portion comprising a phase change material and a
crystallization template material portion in contact with the phase
change material portion on the first electrode, wherein the
crystallization template material portion comprises a
crystallization template material having a higher melting point or
a higher decomposition temperature than the phase change material;
forming a dielectric matrix layer over the first electrode and
around the pillar structure; and forming a second electrode over
the pillar structure; wherein the phase change material portion
comprises germanium antimony telluride, and the crystallization
template material comprises a native oxide of the germanium
antimony telluride formed by oxidizing the phase change material
portion to form the crystallization template material portion
having a tubular shape which surrounds the phase change material
portion.
19. (canceled)
20. (canceled)
Description
FIELD
[0001] The present disclosure relates generally to the field of
semiconductor devices and specifically to a memory device including
phase change memory cells with crystallization templates and
methods of forming the same.
BACKGROUND
[0002] A phase change material (PCM) memory device (also known as a
phase change random access memory "PCRAM" or "PRAM") is a type of
non-volatile memory device that stores information as a resistivity
state of a material that can be in different resistivity states
corresponding to different phases of the material. The different
phases can include an amorphous state having high resistivity and a
crystalline state having low resistivity (i.e., a lower resistivity
than in the amorphous state). The transition between the amorphous
state and the crystalline state can be induced by controlling the
rate of cooling after application of an electrical pulse that
renders the phase change material amorphous in a first part of a
programming process. The second part of the programming process
includes control of the cooling rate of the phase change material.
If rapid quenching occurs, the phase change material can cool into
an amorphous high resistivity state. If slow cooling occurs, the
phase change material can cool into a crystalline low resistivity
state.
SUMMARY
[0003] According to an aspect of the present disclosure, a phase
change memory device includes a phase change material portion
located between a first electrode and a second electrode, and a
crystallization template material portion located between the first
electrode and the second electrode in contact with the phase change
material portion. The crystallization template material portion and
the phase change material portion belong to a same crystal system
and have matching lattice spacing, or the crystallization template
material portion and the phase change material portion do not
belong to the same crystal system, but have a matching
translational symmetry along at least one paired lattice plane with
a matching lattice spacing.
[0004] According to another aspect of the present disclosure, a
method of operating the phase change memory device of comprising a
phase change material portion located between a first electrode and
a second electrode, includes programming the phase change material
portion in a RESET operation to convert a crystalline first region
of the phase change material portion into a higher resistivity
amorphous state, while at least one second region of the phase
change material portion remains in a crystalline state, and
programming the phase change material portion in a SET operation to
crystallize the amorphous first region of the phase change material
back into the crystalline state using the at least one crystalline
second region of the phase change material as a crystallization
template.
[0005] According to another aspect of the present disclosure, a
method of forming a phase change memory device is provided, which
comprises: forming a first electrode comprising a first conductive
material; forming a pillar structure including combination of a
phase change material portion comprising a phase change material
and a crystallization template material portion in contact with the
phase change material portion on the first electrode, wherein the
crystallization template material portion comprises a
crystallization template material having a higher melting point or
a higher decomposition temperature than the phase change material;
forming a dielectric matrix layer over the first electrode and
around the pillar structure; and forming a second electrode over
the pillar structure.
BRIEF DESCRIPTION OF THE DRAWINGS
[0006] FIG. 1A is an exemplary circuit schematic of a phase change
memory device including a two-dimensional or a three-dimensional
array of phase change memory elements of the present
disclosure.
[0007] FIG. 1B is a schematic illustrating a configuration of a
cross-point array of word lines and bit lines in the phase change
memory device of FIG. 1A.
[0008] FIG. 2 is a vertical cross-sectional view of a first
exemplary phase change memory cell according to an embodiment of
the present disclosure.
[0009] FIG. 3 is a vertical cross-sectional view of a second
exemplary phase change memory cell according to an embodiment of
the present disclosure.
[0010] FIGS. 4A, 4B, and 4C are sequential vertical cross-sectional
views during manufacture of a third exemplary phase change memory
cell according to an embodiment of the present disclosure.
[0011] FIG. 5 is a vertical cross-sectional view of a fourth
exemplary phase change memory cell according to an embodiment of
the present disclosure.
DETAILED DESCRIPTION
[0012] Embodiments of the present disclosure are directed to a
memory device including phase change memory cells with
crystallization templates and methods of forming the same, the
various aspects of which are described below. The memory devices of
embodiments of the present disclosure can be used in storage class
memory systems.
[0013] Generally, programming of a phase change material from a
high (i.e., higher) resistivity amorphous state into a low (i.e.,
lower) resistivity crystalline state (i.e., a "SET" operation) can
be difficult and energy-intensive. Crystallization of many phase
change materials (such as germanium-antimony-telluride compound
semiconductor materials) is nucleation-dominated. Nucleation of the
phase change material into a crystalline state having large grain
sizes becomes increasingly difficult as the volume size of phase
change materials is reduced. This problem is exacerbated as the
size of phase change memory cells decrease to dimensions less than
80 nm. Using a longer SET time or a growth-from-melt type SET
operation may lead to slow write speed and high energy consumption
in a phase change memory device, and thus, is not desirable.
Embodiments of the present disclosure provide crystallization
templates that improve the crystallization of the phase change
material into the crystalline, low resistivity SET state, such as
for example when the smallest dimension of the phase change memory
cell is less than 80 nm, such as 25 to 80 nm.
[0014] The drawings are not drawn to scale. Multiple instances of
an element may be duplicated where a single instance of the element
is illustrated, unless absence of duplication of elements is
expressly described or clearly indicated otherwise. Unless
otherwise indicated, a "contact" between elements refers to a
direct contact between elements that provides an edge or a surface
shared by the elements. Ordinals such as "first," "second," and
"third" are employed merely to identify similar elements, and
different ordinals may be employed across the specification and the
claims of the instant disclosure. A same reference numeral refers
to a same element or a similar element. Unless otherwise noted,
elements with a same reference numeral are presumed to have a same
material composition. As used herein, all thermoelectric properties
and thermal properties are measured at 300 degrees Celsius unless
otherwise specified. Consequently, the reference temperature (i.e.,
measurement temperature) for asymmetric thermoelectric heat
generation and other thermoelectrical properties and thermal
properties is 300 degrees Celsius in the specification and in the
claims unless expressly specified otherwise.
[0015] As used herein, a "layer" refers to a material portion
including a region having a thickness. A layer may extend over the
entirety of an underlying or overlying structure, or may have an
extent less than the extent of an underlying or overlying
structure. Further, a layer may be a region of a homogeneous or
inhomogeneous continuous structure that has a thickness less than
the thickness of the continuous structure. For example, a layer may
be located between any pair of horizontal planes between, or at, a
top surface and a bottom surface of the continuous structure. A
layer may extend horizontally, vertically, and/or along a tapered
surface. A substrate may be a layer, may include one or more layers
therein, and/or may have one or more layer thereupon, thereabove,
and/or therebelow.
[0016] As used herein, a "layer stack" refers to a stack of layers.
As used herein, a "line" or a "line structure" refers to a layer
that has a predominant direction of extension, i.e., having a
direction along which the layer extends the most.
[0017] As used herein, a "semiconducting material" refers to a
material having electrical conductivity in the range from
1.0.times.10.sup.-6 S/cm to 1.0.times.10.sup.5 S/cm. As used
herein, a "semiconductor material" refers to a material having
electrical conductivity in the range from 1.0.times.10.sup.-6 S/cm
to 1.0.times.10.sup.5 S/cm in the absence of electrical dopants
therein, and is capable of producing a doped material having
electrical conductivity in a range from 1.0.times.10.sup.-3 S/cm to
1.0.times.10.sup.5 S/cm upon suitable doping with an electrical
dopant. As used herein, an "electrical dopant" refers to a p-type
dopant that adds a hole to a valence band within a band structure,
or an n-type dopant that adds an electron to a conduction band
within a band structure. As used herein, a "conductive material"
refers to a material having electrical conductivity greater than
1.0.times.10.sup.2 S/cm. As used herein, an "insulator material" or
a "dielectric material" refers to a material having electrical
conductivity much less than 1.0.times.10.sup.-3 S/cm. As used
herein, a "heavily doped semiconductor material" refers to a
semiconductor material that is doped with electrical dopant at a
sufficiently high atomic concentration to become a conductive
material, i.e., to have electrical conductivity greater than
1.0.times.10.sup.2 S/cm. A "doped semiconductor material" may be a
heavily doped semiconductor material, or may be a semiconductor
material that includes electrical dopants (i.e., p-type dopants
and/or n-type dopants) at a concentration that provides electrical
conductivity in the range from 1.0.times.10.sup.-3 S/cm to
1.0.times.10.sup.5 S/cm. An "intrinsic semiconductor material"
refers to a semiconductor material that is not doped with
electrical dopants. Thus, a semiconductor material may be
semiconducting or conductive, and may be an intrinsic semiconductor
material or a doped semiconductor material. A doped semiconductor
material can be semiconducting or conductive depending on the
atomic concentration of electrical dopants therein. As used herein,
a "metallic material" refers to a conductive material including at
least one metallic element therein. All measurements for electrical
conductivities are made at the standard condition.
[0018] Referring to FIG. 1A, a schematic diagram is shown for a
phase change memory device 500 including phase change memory cells
180 in an array configuration. As used herein, a phase change
memory device refers to a memory device that employs a phase change
material providing at least two resistivity states, such as a
combination of a high (i.e., higher) resistivity amorphous state
and a low (i.e., lower) resistivity crystalline (e.g.,
polycrystalline) state. The phase change memory device can be
configured as a random access memory device. As used herein, a
"random access memory device" refers to a memory device including
memory cells that allow random access, i.e., access to any selected
memory cell upon a command for reading the contents of the selected
memory cell.
[0019] The phase change memory device 500 of an embodiment of the
present disclosure includes a memory array region 550 containing an
array of phase change memory cells 180 located at the intersection
of the respective word lines 30 and bit lines 90. The phase change
memory device 500 may also contain a row decoder 560 connected to
the word lines 30, a programming and sensing circuitry 570 (e.g., a
sense amplifier and other bit line control circuitry) connected to
the bit lines 90, a column decoder 580 connected to the bit lines
90 and a data buffer 590 connected to the sense circuitry. Multiple
instances of the phase change memory cells 180 are provided in an
array configuration in the phase change memory device 500.
[0020] FIG. 1B illustrates a cross-point array configuration for a
group of phase change memory cells 180. Each phase change memory
cell 180 includes a phase change material having at least two
different resistivity states. The phase change material portion is
provided between a first electrode 12 and a second electrode 18. A
plurality of first electrodes 12 comprise a first set of parallel
metal lines extending along a first horizontal direction (e.g.,
word line direction), and a plurality of second electrodes 18
comprise a second set of parallel metal lines extending along a
second horizontal direction (e.g., bit line direction). The second
horizontal direction may, or may not, be perpendicular to the first
horizontal direction. In one embodiment, the first electrodes 12
may comprise the word lines 30, and the second electrodes 18 may
comprise the bit lines 90. Alternatively, the first electrodes 12
may comprise the bit lines 90, and the second electrodes 18 may
comprise the word lines 30.
[0021] Referring to FIG. 2, a first exemplary structure including a
phase change memory cell 180 according to a first embodiment of the
present disclosure is illustrated. In the first embodiment, one or
more regions of the phase change material can be used as a
crystallization template for the amorphous region of the phase
change material during the SET operation. A first electrode 12 is
formed over an insulating surface, which may be a surface of an
insulating material layer (not shown) deposited over a substrate
(not shown). The first electrode 12 includes at least one
conductive material. For example, the first electrode 12 can
include a layer stack of a first conductive material rail 122 and a
first diffusion barrier liner 124. The first conductive material
rail 122 can include a metal, such as tungsten or copper. The
thickness of the first conductive material rail 122 can be in a
range from 20 nm to 200 nm, such as from 30 nm to 100 nm, although
lesser and greater thicknesses can also be employed. The width of
the first conductive material rail 122 can be in a range from 20 nm
to 200 nm, such as from 30 nm to 100 nm, although lesser and
greater widths can also be employed. The first diffusion barrier
liner 124 includes a diffusion barrier material such as a
conductive metallic nitride (such as TiN, TaN, and/or WN) and/or a
conductive carbon-based material. The thickness of the first
diffusion barrier liner 124 can be in a range from 1 nm to 10 nm,
such as from 1.5 nm to 5 nm, although lesser and greater
thicknesses can also be employed. The width of the first diffusion
barrier liner 124 can be the same as the width of the first
conductive material rail 122. In one embodiment, a plurality of
first electrodes 12 may be formed as parallel metallic line
structures. In this case, inter-electrode insulating material
strips (such as silicon oxide strips) may be provided between the
plurality of first electrodes 12 such that the plurality of first
electrodes 12 and the inter-electrode insulating material strips
form a laterally alternating sequence that alternates along a
direction (e.g., the second horizontal direction) which is
perpendicular to the lengthwise directions (e.g., the first
horizontal direction) of the first electrodes 12 and the
inter-electrode insulating material strips.
[0022] A phase change material layer and an optional selector
material layer can be deposited over the at least one first
electrode 12 in either order (e.g., the selector material layer may
be deposited above or below the phase change material layer).
Optional additional layers, such as an intermediate conductive
barrier layer may be formed between the phase change material layer
and the selector material layer and/or above and/or below these
layers. The phase change material layer includes a phase change
material. As used herein, a "phase change material" refers to a
material having at least two different phases providing different
resistivity. The at least two different phases can be provided, for
example, by controlling the time-dependent temperature profile
during a cooling step that follows a heated state to provide an
amorphous state having a higher resistivity and a polycrystalline
state having a lower resistivity. In this case, the higher
resistivity state of the phase change material can be achieved by
faster quenching of the phase change material after heating the
polycrystalline material to an amorphous solid state and/or to a
liquid state, and the lower resistivity state of the phase change
material can be achieved by heating the amorphous material followed
by controlled cooling of the phase change material from the
amorphous state to the polycrystalline state. The phase change
material acts as the memory material (i.e., data storage
material).
[0023] Exemplary phase change materials include, but are not
limited to, germanium antimony telluride (GST) compounds such as
Ge.sub.2Sb.sub.2Te.sub.5 or GeSb.sub.2Te.sub.4, germanium antimony
compounds, indium germanium telluride compounds, aluminum selenium
telluride compounds, indium selenium telluride compounds, and
aluminum indium selenium telluride compounds. These compounds
(e.g., compound semiconductor material) may be doped (e.g.,
nitrogen doped GST) or undoped. Thus, the phase change material
layer can include, and/or can consist essentially of, a material
selected from a germanium antimony telluride compound, a germanium
antimony compound, an indium germanium telluride compound, an
aluminum selenium telluride compound, an indium selenium telluride
compound, or an aluminum indium selenium telluride compound. The
thickness of the phase change material layer can be in a range from
10 nm to 600 nm, such as from 20 nm to 300 nm and/or from 40 nm to
150 nm, although lesser and greater thicknesses can also be
employed.
[0024] The optional selector material layer includes a non-Ohmic
material that provides electrical connection of electrical
isolation depending on the magnitude and/or the polarity of an
externally applied voltage bias thereacross. In one embodiment, the
selector material layer includes at least one threshold switch
material layer. The threshold switch material layer can include any
suitable threshold switch material which exhibits non-linear
electrical behavior, such as an ovonic threshold switch (OTS)
material or volatile conductive bridge. In addition,
non-thresholding selectors such as a diode switch material (e.g.,
materials for p-n semiconductor diode, p-i-n semiconductor diode,
Schottky diode or metal-insulator-metal diode) or tunneling
selector can be used. As used herein, an ovonic threshold switch is
a device that does not crystallize in a low resistivity state under
a voltage above the threshold voltage, and reverts back to a high
resistivity state when not subjected to a voltage above a critical
holding voltage across the OTS material layer. As used herein, an
"ovonic threshold switch material" refers to a material that
displays a non-linear resistivity curve under an applied external
bias voltage such that the resistivity of the material decreases
with the magnitude of the applied external bias voltage. In other
words, an ovonic threshold switch material is non-Ohmic, and
becomes more conductive under a higher external bias voltage than
under a lower external bias voltage.
[0025] An ovonic threshold switch material (OTS material) can be
non-crystalline (for example, amorphous) in a high resistivity
state, and can remain non-crystalline (for example, remain
amorphous) in a low resistivity state during application of a
voltage above its threshold voltage across the OTS material. The
OTS material can revert back to the high resistivity state when the
high voltage above its threshold voltage is lowered below a
critical holding voltage. Throughout the resistivity state changes,
the ovonic threshold switch material can remain non-crystalline
(e.g., amorphous). In one embodiment, the ovonic threshold switch
material can comprise a chalcogenide material which exhibits
hysteresis in both the write and read current polarities. The
chalcogenide material may be a GeTe compound or a Ge--Se compound
doped with a dopant selected from As, N, and C, such as a
Ge--Se--As compound semiconductor material. The ovonic threshold
switch material layer can contain any ovonic threshold switch
material. In one embodiment, the ovonic threshold switch material
layer can include, and/or can consist essentially of, a GeSeAs
alloy, a GeTeAs, a GeSeTeSe alloy, a GeSe alloy, a SeAs alloy, a
GeTe alloy, or a SiTe alloy.
[0026] In one embodiment, the material of the selector material
layer can be selected such that the resistivity of the selector
material therein decreases at least by two orders of magnitude
(i.e., by more than a factor of 100) upon application of an
external bias voltage that exceeds a critical bias voltage
magnitude (also referred to as threshold voltage). In one
embodiment, the composition and the thickness of the selector
material layer can be selected such that the critical bias voltage
magnitude can be in a range from 1 V to 6 V, although lesser and
greater voltages can also be employed for the critical bias voltage
magnitude. The thickness of the selector material layer can be, for
example, in a range from 1 nm to 50 nm, such as from 5 nm to 25 nm,
although lesser and greater thicknesses can also be employed.
[0027] The optional selector material layer and the phase change
material layer can be patterned, for example, by applying and
patterning a photoresist layer to mask at least one discrete
region, and by performing an anisotropic etch process that forms a
pillar structure (16, 14) underneath each patterned discrete
portion of the photoresist layer. In one embodiment, an array of
pillar structures (14, 16) can be formed. Each pillar structure
constitutes a phase change memory cell 180, which is a phase change
memory cell.
[0028] In case the optional selector material layer is formed, then
the pillar structure (14, 16) can include a selector element 14.
The selector element 14 is configured to turn on only upon
application of a bias voltage thereacross that is greater in
magnitude than a threshold voltage. Each pillar structure (14, 16)
includes a phase change material portion 16 consisting essentially
of the phase change material of the phase change material layer.
Each phase change material portion 16 can have a horizontal
cross-sectional shape that is invariant with translation along the
vertical direction. In this case, each phase change material
portion 16 can have at least one vertical sidewall. The horizontal
cross-sectional shape of each phase change material portion 16 can
be circular, oval, polygonal, or of a curvilinear shape having at
least one curve and/or at least one straight line segment. In one
embodiment, each phase change material portion 16 can have a
circular cylindrical shape. The selector element 14 may be located
above or below the phase change material portion 16, and may either
contact the phase change material portion 16 or be spaced from the
phase change material portion 16 by an intermediate layer, such as
by a conductive barrier layer.
[0029] According to an aspect of the present disclosure, each phase
change material portion 16 can have a ratio of the height to the
maximum lateral dimension (e.g., diameter or width) in a range
greater than 3.0, and/or greater than 4.0, and/or greater than 5.0,
and/or greater than 7.5, and/or greater than 10.0. In one
embodiment, the ratio of the height to the maximum lateral
dimension for each phase change material portion 16 can be in a
range from 3 to 20, such as from 5 to 10. The ratio of the height
to the maximum lateral dimension for a phase change material
portion 16 is herein referred to as an aspect ratio of the phase
change material portion 16.
[0030] The maximum on-current of a programming transistor that
supplies the programming electrical current to the phase change
material portion 16 can be selected such that at least a portion
(such as at least one of a top end region, a bottom end region
and/or a side region) of the phase change material portion 16
remains polycrystalline during the maximum programming current flow
through the phase change material portion 16 during a RESET
operation. In one embodiment, programming of the phase change
material portion 16 into the high resistivity state (a "RESET"
operation) causes only a part of the phase change material portion
16, such as the center region of the phase change material portion
16 to melt while end and/or side region(s) of the phase change
material portion 16 remain polycrystalline. For example, the end
regions may remain polycrystalline due to the lower temperature in
these regions during the RESET operation. Subsequently, the melted
region of the phase change material portion 16 is rapidly cooled to
form an amorphous phase change material portion, while end and/or
side region(s) of the phase change material portion 16 remain
polycrystalline. The thickness of the polycrystalline regions may
be 1 nm to 5 nm.
[0031] Programming of the phase change material portion 16 into the
low resistivity state (a "SET" operation) causes the amorphous
region (e.g., center region) of the phase change material portion
to be heated and then controllably cooled to form a polycrystalline
phase change material portion using the polycrystalline regions
(e.g., end and/or side regions) as a crystallization template. The
crystallization template accelerates crystallization of the
amorphous (e.g., center) region of the phase change material
portion 16 during the controlled cooldown process, and thus,
shortens the programming time for the SET operation. Thus, in this
first embodiment, one or more regions of the phase change material
portion 16 can be used as a crystallization template for the
amorphous region of the phase change material portion 16 during the
SET operation.
[0032] A dielectric matrix layer 150 can be formed over the first
electrode 12. The dielectric matrix layer 150 includes a dielectric
material such as undoped silicate glass (e.g., silicon oxide) or a
doped silicate glass. The dielectric matrix layer 150 may include a
self-planarizing material formed by spin-coating, or may be
deposited by a conformal deposition process and subsequently
planarized by a planarization process (such as a chemical
mechanical planarization process). The top surface of the
dielectric matrix layer 150 can be located above the horizontal
plane including top surface(s) of the at least one pillar structure
(14, 16). The vertical distance between the top surface of the
dielectric matrix layer 150 and the top surface(s) of the at least
one pillar structure (14, 16) can be in a range from 50 nm to 300
nm, although lesser and greater vertical distances can also be
employed.
[0033] At least one line trench can be formed through an upper
region of the dielectric matrix layer 150 such that a top surface
of each pillar structure (14, 16) is physically exposed at the
bottom of the at least one line trench. The at least one line
trench can laterally extend along a different horizontal direction
than the lengthwise direction of the at least one first electrode
12. In one embodiment, each line trench can be perpendicular to the
lengthwise direction of the at least one first electrode 12.
[0034] At least one conductive material can be deposited in each
line trench, and excess portions of the at least one conductive
material overlying the horizontal plane including the top surface
of the dielectric matrix layer 150 can be removed by a
planarization process. Each remaining portion of the at least one
conductive material in the at least one line trench constitutes a
second electrode 18. For example, the at least one conductive
material can include a diffusion barrier material and a metal fill
material. In this case, each second electrode 18 can include a
combination of a second diffusion barrier liner 184 and a second
conductive material rail 182. Each second diffusion barrier liner
184 includes a diffusion barrier material such as a conductive
metallic nitride (such as TiN, TaN, and/or WN) and/or a conductive
carbon-based material. The thickness of each second diffusion
barrier liner 184 can be in a range from 1 nm to 10 nm, such as
from 1.5 nm to 5 nm, although lesser and greater thicknesses can
also be employed. The second conductive material rail 182 can
include a metal such as tungsten or copper. The height of each
second electrode 18 can be in a range from 50 nm to 300 nm,
although lesser and greater heights can also be employed. In one
embodiment, a plurality of second electrodes 18 may be formed as
parallel metallic line structures.
[0035] Referring to FIG. 3, in a second embodiment, a different
material from the phase change material portion 16 may be used as a
crystallization template. In this embodiment, a second exemplary
structure including a phase change memory cell 180 can be derived
from the first exemplary structure of FIG. 2 by forming a stack of
material layers instead of the phase change material layer used for
the first exemplary structure of FIG. 2. Specifically, a layer
stack including at least one crystallization template material
layer and a phase change material layer contacting the
crystallization template material layer are deposited in either
order form the second exemplary structure instead of the single
phase change material layer. The at least one crystallization
template material layer can include a lower crystallization
template material layer on which the phase change material layer is
deposited, and/or an upper crystallization template material layer
which is deposited on the phase change material layer. In one
embodiment, the stack of material layers can include a lower
crystallization template material layer and a phase change material
layer. In another embodiment, the stack of material layers can
include a phase change material layer and an upper crystallization
template material layer. In yet another embodiment, the stack of
material layers can include a lower crystallization template
material layer, a phase change material layer, and an upper
crystallization template material layer.
[0036] The phase change material layer can have the same material
composition as the phase change material layer of the first
exemplary structure of FIG. 2. In one embodiment, the phase change
material of the phase change material layer includes, and/or
consists essentially of, a germanium-antimony-telluride compound,
such as Ge.sub.2Sb.sub.2Te.sub.5. The thickness of the phase change
material layer for forming the second exemplary structure can be
less than the thickness of the phase change material layer employed
to form the first exemplary structure because the second exemplary
structure does not rely on the aspect ratio of pillar structures to
provide a nucleation template for a phase change material. In one
embodiment, the thickness of the phase change material layer for
forming the second exemplary structure can be in a range from 6 nm
to 300 nm, such as from 20 nm to 150 nm and/or from 40 nm to 100
nm, although lesser and greater thicknesses can also be
employed.
[0037] Each crystallization template material in the lower
crystallization template material layer and/or in the upper
crystallization template material layer has a higher melting point
or a higher decomposition temperature than the phase change
material, such that the template material layer(s) remain
crystalline during application of maximum SET and RESET operation
current to the memory cell. For example, the crystallization
template material should remain crystalline at a temperature of at
least 1000 K. In one embodiment, each of the lower crystallization
template material layer and the upper crystallization template
material layer includes a crystalline conductive material, i.e., a
crystalline material having electrical conductivity greater than
1.0.times.10.sup.2 S/cm. The crystalline conductive material(s) of
the lower crystallization template material layer and the upper
crystallization template material layer can be polycrystalline. The
thickness of the lower crystallization template material layer, if
present, can be in a range from 1 nm to 150 nm, such as from 4 nm
to 75 nm and/or from 20 nm to 50 nm, although lesser and greater
thicknesses can also be used. The thickness of the upper
crystallization template material layer, if present, can be in a
range from 1 nm to 150 nm, such as from 4 nm to 75 nm and/or from
20 nm to 50 nm, although lesser and greater thicknesses can also be
employed.
[0038] A matching lattice spacing (i.e., an inter-layer distance
between neighboring lattice planes) between the template material
and the phase change material portion 16 can facilitate the
crystallization process. The template material may be in the same
crystal system, but may, or may not, be in the same space group as
the phase change material portion 16. A matching translational
symmetry along at least one paired lattice plane with a matching
lattice spacing between the template material and the phase change
memory material portion 16 can also be sufficient for the template
material to facilitate the crystallization process of the phase
change material portion. As used herein, a "translational symmetry"
refers to a symmetry that a crystal exhibits if translation along
one of the crystallographic directions results in a same crystal
structure.
[0039] Generally, one of the following two conditions is sufficient
to provide template-assisted crystallization of a phase change
material portion 16. In the first condition, the template material
and the phase change material portion 16 can belong to a same
crystal system and have matching lattice spacing. In one embodiment
of the first condition, the template material and the phase change
material portion 16 can have the same crystal system and/or have a
matching lattice constant (i.e., a matching lattice spacing of the
unit cell). In the second condition, the template material and the
phase change material portion 16 do not belong to the same crystal
system, but have a matching translational symmetry along at least
one paired lattice plane with a matching lattice spacing.
[0040] In one embodiment, the crystallization template material
belongs to the same crystal system as the phase change material
portion 16. A lattice spacing of the crystallization template
material also matches the lattice spacing the phase change material
portion 16. For Ge.sub.2Sb.sub.2Te.sub.5 phase change material,
there are two known phases which belong to two crystal systems--the
cubic crystal system and the trigonal crystal system. The template
material can belong to either of the two crystal systems (i.e.,
crystal lattice systems) provided that the phase change material
portion 16 is in the same crystal system (i.e., crystal lattice
system). In one embodiment, the phase change material comprises an
alloy of Ge, Sb, and Te having a meta-stable cubic phase in its
crystalline state, and the crystallization template material
portion belongs to the cubic crystal system in its crystalline
state with matching lattice spacing. In another embodiment, the
phase change material comprises an alloy of Ge, Sb, and Te having a
stable trigonal phase in its crystalline state, and the
crystallization template material portion belongs to the trigonal
crystal system in its crystalline state with matching lattice
spacing.
[0041] In one embodiment, the phase change material comprises
Ge.sub.2Sb.sub.2Te.sub.5 belonging to cubic crystal system with
lattice constant of 5.98 Angstrom, or belonging to trigonal crystal
system with lattice constant of 4.265 Angstrom when in crystalline
state. In this embodiment, the crystallization template material
may also have a cubic crystal system or a trigonal crystal system,
with a lattice spacing within 7%, such as within 5%, for example
zero to 5%, of the lattice constant of 5.98 Angstroms or 4.265
Angstroms of Ge.sub.2Sb.sub.2Te.sub.5.
[0042] For example, tungsten may be used as the crystallization
template material. Tungsten belongs to cubic crystal lattice system
(BCC Bravais lattice and Im-3m space group), and has a lattice
spacing of 6.328 Angstroms (two times the lattice constant of the
unit cell), which is about 105.8% of the lattice constant of
Ge.sub.2Sb.sub.2Te.sub.5 in the cubic phase. Other suitable
crystallization template materials may also be used, such as other
crystalline conductive or semiconductor materials different from
Ge.sub.2Sb.sub.2Te.sub.5 may be used as the crystallization
template material. Such materials include elemental metals and
metalloids, such as Al, Rh, Pd, Ag, Au, Pt or Sb, and alloys, such
as germanium telluride in the trigonal phase, which have lattice
spacing or lattice constants between 4.159 and 4.375 Angstrom
(i.e., within 3% of the 4.265 Angstrom lattice constant of
Ge.sub.2Sb.sub.2Te.sub.5 in the trigonal phase). In one embodiment,
the crystallization template material may exclude pure elemental
silicon.
[0043] An optional selector material layer can be deposited under
or over the stack of material layers. Subsequently, the optional
selector material layer and the stack of the phase change material
layer and at least one crystallization template material layer can
be patterned in the same manner as used to pattern the pillar
structures of the first exemplary structure. At least one pillar
structure (162, 16, 166, 14) is formed by patterning the optional
selector material layer and the stack of the phase change material
layer and at least one crystallization template material layer.
Each pillar structure (162, 16, 166, 14) includes a phase change
material portion 16, at least one crystallization template material
portion (162, 166) in contact with the phase change material
portion 16, and optionally a selector element 14. In one
embodiment, the pillar structure includes a phase change material
portion 16, a lower crystallization template material portion 162
in contact with the phase change material portion 16 and with the
first electrode 12, and optionally a selector element 14. In
another embodiment, the pillar structure includes a phase change
material portion 16, an upper crystallization template material
portion 166 in contact with the phase change material portion 16,
and optionally a selector element 14. In yet another embodiment,
the pillar structure includes a phase change material portion 16, a
lower crystallization template material portion 162 in contact with
the phase change material portion 16 and with the first electrode
12, an upper crystallization template material portion 166 in
contact with the phase change material portion 16, and optionally a
selector element 14.
[0044] Subsequently, a dielectric matrix layer 150 and at least one
second electrode 18 can be formed in the same manner employed to
form the first exemplary structure.
[0045] In another aspect of the second embodiment, the
crystallization material portion is formed on the sides of the
phase change material portion 16 in addition to or instead of the
lower and/or upper crystallization material portions (162, 166).
Referring to FIG. 4A, a third exemplary structure can be derived
from an in-process structure of the first or second exemplary
structure. For example, the first exemplary structure after
formation of the at least one pillar structure (14, 16) can be used
to form the third exemplary structure illustrated in FIG. 4A. The
thickness of the phase change material layer for forming the third
exemplary structure can be less than the thickness of the phase
change material layer employed to form the first exemplary
structure because the third exemplary structure does not rely on
the aspect ratio of pillar structures to provide a nucleation
template for a phase change material. In one embodiment, the
thickness of the phase change material layer for forming the third
exemplary structure can be in a range from 6 nm to 300 nm, such as
from 20 nm to 150 nm and/or from 40 nm to 100 nm, although lesser
and greater thicknesses can also be employed.
[0046] Referring to FIG. 4B, a crystalline dielectric or
semiconductor material layer different from GST that can function
as a crystallization template material for crystallization of the
phase change material can be conformally deposited over the at
least one pillar structure (16, 14). In one embodiment, the
dielectric material may include crystalline silicon nitride. For
example, the alpha phase of silicon nitride belongs to trigonal
crystal system and P31c space group, while the gamma phase of
silicon nitride has belong to cubic crystal system. Either phase
may be used as the crystallization template material. The thickness
of the dielectric material layer may be in a range from 2 nm to 20
nm, although lesser and greater thicknesses can also be employed.
The dielectric material layer can be formed by a conformal
deposition process such as chemical vapor deposition or atomic
layer deposition.
[0047] In an alternative embodiment, the crystalline dielectric
material may include a native oxide formed on GST. The native oxide
may comprise germanium oxide, antimony oxide, tellurium oxide, or
mixed oxide of two or all three of germanium, antimony and/or
tellurium. The native oxide may be formed on the sidewalls and/or
the top surface of the phase change material portion 16 by thermal
or plasma oxidation of the phase change material portion 16. If the
native oxide is formed on the top surface of the phase change
material portion 16, then the native oxide is preferably less than
2 nm thick, such as 2 monolayers to 1 nm thick, to avoid
significantly increasing the resistivity of the memory cell.
[0048] An anisotropic etch that etches horizontal portions of the
dielectric or semiconductor material can be performed. Each
remaining vertical portion of the dielectric or semiconductor
material can have a tubular configuration that laterally surrounds
a respective pillar structure (16, 14), and constitutes tubular
crystallization template material portion 262. The dielectric or
semiconductor material of each tubular crystallization template
material portion 262 has a higher melting point or a higher
decomposition temperature than the phase change material. Each
tubular crystallization template material portion 262 has a tubular
configuration, and contacts, and laterally surrounds, a respective
phase change material portion 16. The tubular crystallization
template material portion 262 may be formed in addition to or
instead of the lower and/or upper crystallization template material
portions (162, 164).
[0049] Referring to FIG. 4C, a dielectric matrix layer 150 and at
least one second electrode 18 can be formed in the same manner
employed to form the first exemplary structure. Each tubular
crystallization template material portion 262 can contact a top
surface of a first electrode 12, and may contact a bottom surface
of the second electrode 18 to be subsequently formed. In one
embodiment, an annular end surface of a tubular crystallization
template material portion 262 can contact the first electrode 12,
and another annular end surface of the tubular crystallization
template material portion 262 can contact the second electrode 18.
Each phase change memory cell 180 can comprise a selector element
14 configured to turn on only upon application of a bias voltage
thereacross that is greater in magnitude than a threshold
voltage.
[0050] In an alternative embodiment, the dielectric matrix layer
150 may be formed over the first electrode 12, followed by forming
openings in the dielectric matrix layer to expose the first
electrode 12 or the optional selector element 14 located over the
first electrode 12. The tubular crystallization template material
portion 262 is them formed in each opening by conformal deposition
of the crystallization template material in each opening and
anisotropic sidewall spacer etch to leave the tubular
crystallization template material portion 262 in each opening. The
phase change material portion 16 is then formed on each tubular
crystallization template material portion 262 in each opening by
deposition of the phase change material followed by CMP or
etchback. The second electrode 18 is then formed on the exposed top
phase change material portion 16 and the dielectric matrix layer
150.
[0051] Referring to FIG. 5, in a third embodiment, a GST material
having a different composition from the GST phase change material
portion 16 may be used as a crystallization template. In this third
embodiment, a fourth exemplary structure including at least one
phase change memory cell 180 can be derived from the second
exemplary structure of FIG. 3 by replacing the lower and/or upper
crystallization template material portion (162, 166) with a
respective upper and/or lower GST crystallization template material
portion (362, 366) having a different composition from the GST
phase change material portion.
[0052] In this embodiment, GST phase change material portion 16 has
a composition of Ge.sub.2Sb.sub.2Te.sub.5 or GeSb.sub.2Te.sub.4,
while the GST crystallization template material is a germanium
antimony tellurium compound which has a different composition from
that of Ge.sub.2Sb.sub.2Te.sub.5 and GeSb.sub.2Te.sub.4. Each
crystallization template material in the lower crystallization
template material portion 362 and/or in the upper crystallization
template material portion 366 includes a respective
germanium-antimony-tellurium compound material having a higher
melting point or a higher decomposition temperature than that of
the Ge.sub.2Sb.sub.2Te.sub.5 or GeSb.sub.2Te.sub.4 material of the
phase change material portion 16, such that the GST material of the
crystallization template material portion(s) (362, 366) remains
crystalline during the maximum current applied during the SET and
RESET operations. The germanium-antimony-tellurium compound
crystallization template material can have any compositional
variation from that of the Ge.sub.2Sb.sub.2Te.sub.5 or
GeSb.sub.2Te.sub.4 material that increases its melting temperature
above that of the Ge.sub.2Sb.sub.2Te.sub.5 or GeSb.sub.2Te.sub.4
material.
[0053] In one aspect of the third embodiment, the GST phase change
material portion 16 and the GST crystallization template material
differ in composition by presence or absence of a dopant species.
In one embodiment, the GST phase change material portion 16 can
consist essentially of germanium, antimony, and tellurium, (e.g.,
Ge.sub.2Sb.sub.2Te.sub.5 or GeSb.sub.2Te.sub.4 material) that lacks
intentionally introduced dopants. The GST crystallization template
material comprises germanium, antimony, tellurium, and at least one
dopant selected from boron, carbon, nitrogen, oxygen, tin, silicon,
indium, phosphorous, sulfur, arsenic, selenium, vanadium, and/or
titanium. GST crystallization template material of the lower and/or
upper crystallization template material portions (362, 366) may
include the at least one dopant in a concentration of
1.times.10.sup.15 cm.sup.-3 to 5.times.10.sup.22 cm.sup.3. Thus,
the GST crystallization template material has a formula
D:Ge.sub.2Sb.sub.2Te.sub.5 or D:GeSb.sub.2Te.sub.4 where D
comprises one or more of the above dopants.
[0054] In another aspect of the third embodiment, the GST phase
change material portion 16 and the GST crystallization template
material differ in composition by the ratio of the germanium,
antimony and tellurium. In one embodiment, the GST phase change
material portion 16 can consist essentially of germanium, antimony,
and tellurium in either a 2:2:5 or a 1:2:4 ratio (i.e., a
Ge.sub.2Sb.sub.2Te.sub.5 or GeSb.sub.2Te.sub.4 material). The GST
crystallization template material comprises germanium, antimony,
and tellurium in a ratio different from a 2:2:5 or a 1:2:4 ratio,
such as a 2.+-.x: 2.+-.y: 5.+-.z, where 0.ltoreq.x.ltoreq.1,
0.ltoreq.y.ltoreq.1, 0.ltoreq.z<1, where at least one of x, y
and z is greater than zero, or 1.+-.x: 2.+-.y: 4.+-.z, where
0.ltoreq.x.ltoreq.1, 0.ltoreq.y.ltoreq.1, 0.ltoreq.z<1, where at
least one of x, y and z is greater than zero. The GST
crystallization template material may or may not be intentionally
doped with the above described dopant materials.
[0055] The thickness of the lower and upper crystallization
template material portions (362, 366) containing the GST template
crystallization material can be in a range from 3 nm to 150 nm,
such as from 10 nm to 75 nm and/or from 20 nm to 50 nm, although
lesser and greater thicknesses can also be employed.
[0056] In one embodiment, the lower and upper crystallization
template material portions (362, 366) and the phase change material
portion 16 can belong to the same crystal system and have matching
lattice spacing. In another embodiment, the lower and upper
crystallization template material portions (362, 366) and the phase
change material portion 16 do not belong to the same crystal
system, but have a matching translational symmetry along at least
one paired lattice plane with a matching lattice spacing. The
optional selector material 14 may also be present in the structure
of this third embodiment.
[0057] In another aspect of the third embodiment, the above
described GST template crystallization material may be formed as
the tubular crystallization template material portion 262 described
above with respect to FIG. 4C, in addition to or instead of the
above described crystallization template material portions (162,
166) or (362, 366).
[0058] Referring to all drawings and according to various
embodiments of the present disclosure, a phase change memory
device, such as the phase change memory cell 180 includes a phase
change material portion 16 located between a first electrode 12 and
a second electrode 14, and a crystallization template material
portion (162, 166, 262, 362 and/or 366) located between the first
electrode 12 and the second electrode 18 in contact with the phase
change material portion 16. A crystal lattice parameter of the
crystallization template material portion (162, 166, 262, 362
and/or 366) is matched to a respective crystal lattice parameter of
the phase change material portion 16. Optionally, an selector
element 14 may be located between the first electrode 12 and the
second electrode 18. The selector element 14 can be an Ovonic
threshold switch, tunneling selector, diode, or volatile conductive
bridge.
[0059] In one embodiment, the crystallization template material
portion has a higher melting point or a higher decomposition
temperature than the phase change material portion. In one
embodiment, at least one of the crystal lattice structure, space
group or unit cell lattice constant of the crystallization template
material portion is matched to a respective crystal lattice
structure, space group or unit cell lattice constant of the phase
change material portion. For example, at least two of the crystal
lattice structure, space group or unit cell lattice constant of the
crystallization template material portion are matched to the
respective crystal lattice structure, space group or unit cell
lattice constant of the phase change material portion.
[0060] In one embodiment, the phase change material comprises
Ge.sub.2Sb.sub.2Te.sub.5 having a cubic crystal structure in its
crystalline state, and the crystallization template material
portion has the cubic crystal structure in its crystalline state.
In another embodiment, the phase change material comprises
Ge.sub.2Sb.sub.2Te.sub.5 having a P-3m1 space group having trigonal
symmetry in its crystalline state, and the crystallization template
material portion has the P-3m1 space group having trigonal symmetry
in its crystalline state. In another embodiment, the phase change
material comprises Ge.sub.2Sb.sub.2Te.sub.5 having a lattice
constant of about 4.265 Angstroms and the crystallization template
material portion has a lattice constant of within 7%, such as
within 5%, of 4.265 Angstroms in its crystalline state.
[0061] In one embodiment, the crystallization template material
comprises a crystalline conductive or semiconductor material
different from silicon or Ge.sub.2Sb.sub.2Te.sub.5. For example,
the crystallization template material may be selected from W, Al,
Rh, Pd, Ag, Au, Pt, Sb or germanium telluride.
[0062] In another embodiment, the crystallization template material
comprises a dielectric material. In one embodiment, the phase
change material comprises germanium antimony telluride, and the
crystallization template material comprises a native oxide of the
germanium antimony telluride. In another embodiment, the
crystallization template material comprises silicon nitride.
[0063] In one embodiment, the phase change material portion
comprises a first germanium-antimony-tellurium compound; and the
crystallization template material portion comprises a second
germanium-antimony-tellurium compound that differs in composition
from the first germanium-antimony-tellurium compound. In one
embodiment, the first germanium-antimony-tellurium compound and the
second germanium-antimony-tellurium compound differ in composition
by presence or absence of a dopant species. For example, the first
germanium-antimony-tellurium compound consists essentially of
germanium, antimony, and tellurium, while the second
germanium-antimony-tellurium compound comprises germanium,
antimony, tellurium, and at least one dopant selected from boron,
carbon, nitrogen, oxygen, tin, silicon, indium, phosphorous,
sulfur, arsenic, selenium, vanadium, and titanium.
[0064] In one embodiment, the crystallization template material
portion comprises a dielectric or semiconductor crystallization
template material portion having a tubular configuration that
laterally surrounds the phase change material portion.
[0065] The crystallization template material portions (162, 166,
262, 362, 266) of the embodiments of the present disclosure promote
nucleation of the phase change materials. The crystallization
template material portions (162, 166, 262, 362, 266) promote a fast
and efficient SET operation for phase change memory devices, such
as devices having small minimum dimensions.
[0066] According to the classic nucleation theory, crystallization
of germanium-antimony-telluride phase change materials involves two
distinct steps: a nucleation step and a crystal growth step. The
nucleation step is a prerequisite for the crystal growth step,
especially when the size of a germanium-antimony-telluride phase
change material portion is small. Homogeneous nucleation of
germanium-antimony-telluride phase change materials occurs within a
narrow temperature range. The nucleation rate peaks at about 600 K,
and decreases by an order of magnitude below 520 K or above 680 K.
However, the growth rate of crystalline grains is at a maximum
around 720 K. Heterogeneous nucleation employed in embodiments of
the present disclosure, on the other hands, depends on the presence
and effectiveness of a crystallization template material which
functions as a nucleation template. A key challenge for
manufacturing a small-scale phase change memory device has been
that nucleation in small phase change material portions becomes
increasingly rarer with reduction in the physical dimensions due to
reduction in the material volume (homogeneous nucleation
probability is proportional to volume) and the absence of
heterogeneous nucleation template. Promotion of nucleation enhances
the efficiency for crystallization during a SET operation in small
phase change memory devices, such as those having a smallest
dimension smaller than 80 nm.
[0067] An advantage of the phase change memory devices of the
embodiments of the present disclosure is that write current
efficiency and data storage retention can be simultaneously
improved. In other words, a SET operation can be effectively
performed without compromising data retention. A large read current
may be employed without disturbing the memory state of the phase
change memory cells 180. The impact of snapback currents on read is
reduced, removing the need for compensation circuitry or
write-after-read to eliminate its effect. This advantage can useful
in phase change memory devices employing frequent data write/erase
applications where long-term data retention is not a necessity.
[0068] Although the foregoing refers to particular preferred
embodiments, it will be understood that the disclosure is not so
limited. It will occur to those of ordinary skill in the art that
various modifications may be made to the disclosed embodiments and
that such modifications are intended to be within the scope of the
disclosure. Where an embodiment employing a particular structure
and/or configuration is illustrated in the present disclosure, it
is understood that the present disclosure may be practiced with any
other compatible structures and/or configurations that are
functionally equivalent provided that such substitutions are not
explicitly forbidden or otherwise known to be impossible to one of
ordinary skill in the art. All of the publications, patent
applications and patents cited herein are incorporated herein by
reference in their entirety.
* * * * *