U.S. patent application number 16/336164 was filed with the patent office on 2020-08-06 for film structure, display device and method for fabricating the film structure.
The applicant listed for this patent is HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD BOE TECHNOLOGY GROUP CO., LTD.. Invention is credited to Rui PENG, Huai Ting SHIH, Lifang SONG, Yulin WANG.
Application Number | 20200251681 16/336164 |
Document ID | / |
Family ID | 1000004970232 |
Filed Date | 2020-08-06 |
United States Patent
Application |
20200251681 |
Kind Code |
A9 |
WANG; Yulin ; et
al. |
August 6, 2020 |
FILM STRUCTURE, DISPLAY DEVICE AND METHOD FOR FABRICATING THE FILM
STRUCTURE
Abstract
The present disclosure provides a film structure, a display
device, and a method for fabricating a film structure, and relates
to the field of display technology. The present disclosure provides
a first organic layer having a sloped edge on a substrate, a
climbing angle between the sloped edge and the substrate is less
than a breakable angle, and wherein the breakable angle is an angle
at which the first additional layer on the sloped edge of the first
organic layer cracks or is about to crack.
Inventors: |
WANG; Yulin; (Beijing,
CN) ; SHIH; Huai Ting; (Beijing, CN) ; SONG;
Lifang; (Beijing, CN) ; PENG; Rui; (Beijing,
CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD
BOE TECHNOLOGY GROUP CO., LTD. |
Hefei
Beijing |
|
CN
CN |
|
|
Prior
Publication: |
|
Document Identifier |
Publication Date |
|
US 20190229291 A1 |
July 25, 2019 |
|
|
Family ID: |
1000004970232 |
Appl. No.: |
16/336164 |
Filed: |
July 6, 2018 |
PCT Filed: |
July 6, 2018 |
PCT NO: |
PCT/CN2018/094880 PCKC 00 |
371 Date: |
March 25, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 51/0097 20130101;
H01L 51/56 20130101; H01L 51/5253 20130101 |
International
Class: |
H01L 51/52 20060101
H01L051/52; H01L 51/56 20060101 H01L051/56 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 28, 2017 |
CN |
201710751104.X |
Claims
1. A film structure comprising: a first organic layer disposed on
the substrate; and a first additional layer disposed on the first
organic layer, wherein the first organic layer has a sloped edge,
wherein a climbing angle between the sloped edge and the substrate
is less than a breakable angle, and wherein the breakable angle is
an angle at which the first additional layer on the sloped edge of
the first organic layer cracks or is about to crack.
2. The film structure according to claim 1, wherein the breakable
angle is about 35.degree..
3. The film structure according to claim 1, wherein the first
organic layer is one of a functional layer in a functional
structure on the substrate and an encapsulation layer in an
encapsulation structure for encapsulating the functional
structure.
4. The film structure according to claim 3, wherein the first
additional layer comprises a first inorganic layer.
5. The film structure according to claim 4, wherein the first
organic layer is a functional layer in the functional structure,
the film structure further comprising at least one stack,
consisting of a second organic layer and a second inorganic layer,
on the first inorganic layer.
6. The film structure according to claim 4, wherein the first
organic layer is a encapsulation layer in the encapsulation
structure, the encapsulation structure comprising at least one
stack consisting of the first organic layer and the first inorganic
layer.
7. The film structure according to claim 5, wherein the first
organic layer comprises one of a planarization layer and a pixel
defining layer.
8. The film structure according to claim 1, further comprising a
protective layer disposed opposite to the substrate and an adhesive
layer for bonding the protective layer to the substrate, wherein
the first organic layer is located between the substrate and the
protective layer.
9. The film structure according to claim 1, wherein the substrate
is one of a rigid substrate and a flexible substrate.
10. A display device comprising the film structure according to
claim 1.
11. A method for fabricating a film structure, the method
comprising: forming a first organic layer on the substrate; and
forming a first additional layer on the first organic layer,
wherein the first organic layer has a sloped edge, wherein a
climbing angle between the sloped edge and the substrate is less
than a breakable angle, and wherein the breakable angle is an angle
at which the first additional layer formed on the sloped edge of
the first organic layer cracks or is about to crack.
12. The method according to claim 11, wherein forming the first
additional layer on the first organic layer comprises forming a
first inorganic layer on the first organic layer.
13. The method according to claim 12, wherein the first organic
layer is a functional layer in a functional structure on the
substrate, and wherein the method further comprises, after forming
a first inorganic layer on the first organic layer, forming at
least one stack, consisting of a second organic layer and a second
inorganic layer, on the first inorganic layer.
14. The method according to claim 12, wherein the first organic
layer is an encapsulation layer in an encapsulation structure, and
wherein forming a first organic layer on the substrate comprises:
forming a second organic layer on the substrate; forming a second
inorganic layer on the second organic layer; and forming a first
organic layer on the second inorganic layer.
15. A display device comprising the film structure according to
claim 2.
16. A display device comprising the film structure according to
claim 3.
17. A display device comprising the film structure according to
claim 4.
18. A display device comprising the film structure according to
claim 5.
19. A display device comprising the film structure according to
claim 6.
20. A display device comprising the film structure according to
claim 7.
Description
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This patent application is a National Stage Entry of
PCT/CN2018/094880 filed on Jul. 6, 2018, which claims the benefit
and priority of Chinese Patent Application No. 201710751104.X filed
on Aug. 28, 2017, the disclosures of which are hereby incorporated
by reference herein in their entirety as part of the present
application.
BACKGROUND
[0002] The present disclosure relates to the field of display
technology, and in particular, to a film structure, a display
device, and a method of fabricating a film structure.
[0003] OLED (Organic Light Emitting Diode) has many advantages such
as active illumination, high brightness, high contrast, ultra-thin,
low power consumption, flexibility, and wide operating temperature
range and thus has become a next generation display technology with
very competitive and promising future.
BRIEF DESCRIPTION
[0004] The present disclosure provides a film structure. The film
structure includes a first organic layer on the substrate and a
first additional layer on the first organic layer. Wherein the
first organic layer has a sloped edge, and a climbing angle between
the sloped edge and the substrate is less than a breakable angle.
The breakable angle is an angle at which the first additional layer
on the sloped edge of the first organic layer cracks or is about to
crack.
[0005] In an embodiment, the breakable angle is about
35.degree..
[0006] In an embodiment, the first organic layer is a functional
layer in a functional structure on the substrate or an
encapsulation layer in an encapsulation structure for encapsulating
the functional structure.
[0007] In an embodiment, the first additional layer includes a
first inorganic layer.
[0008] In an embodiment, the first organic layer is a functional
layer in the functional structure, the film structure further
including at least one stack, consisting of a second organic layer
and a second inorganic layer, on the first inorganic layer.
[0009] In an embodiment, the first organic layer is an
encapsulation layer in the encapsulation structure, the
encapsulation structure including at least one stack consisting of
the first organic layer and the first inorganic layer.
[0010] In an embodiment, the first organic layer includes a
planarization layer or a pixel defining layer.
[0011] In an embodiment, the structure further includes a
protective layer disposed opposite to the substrate and an adhesive
layer for bonding the protective layer to the substrate, and
wherein the first organic layer is located between the substrate
and the protective layer.
[0012] In an embodiment, the substrate is a rigid substrate or a
flexible substrate.
[0013] The present disclosure also provides a display device
including the above-described film structure.
[0014] The present disclosure also provides a method of fabricating
a film structure. The method includes forming a first organic layer
on the substrate, and forming a first additional layer on the first
organic layer. Wherein the first organic layer has a sloped edge,
and a climbing angle between the sloped edge and the substrate is
less than a breakable angle. The breakable angle is an angle at
which the first additional layer formed on the sloped edge of the
first organic layer cracks or is about to crack.
[0015] In an embodiment, forming the first additional layer on the
first organic layer includes forming a first inorganic layer on the
first organic layer.
[0016] In an embodiment, the first organic layer is a functional
layer in a functional structure on the substrate, the method
further includes, after forming a first inorganic layer on the
first organic layer, forming at least one stack, consisting of a
second organic layer and a second inorganic layer, on the first
inorganic layer.
[0017] In an embodiment, the first organic layer is an
encapsulation layer in an encapsulation structure, forming a first
organic layer on the substrate includes forming a second organic
layer on the substrate, forming a second inorganic layer on the
second organic layer, and forming a first organic layer on the
second inorganic layer.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] FIG. 1 shows one of schematic views of a film structure
according to embodiments of the present disclosure;
[0019] FIG. 2 shows a second schematic view of a film structure
according to embodiments of the present disclosure;
[0020] FIG. 3 shows a third schematic view of a film structure
according to embodiments of the present disclosure;
[0021] FIG. 4 is a flow chart showing a method of fabricating a
film structure according to embodiments of the present disclosure;
and
[0022] FIG. 5 is a schematic view of a display device according to
embodiments of the present disclosure.
DETAILED DESCRIPTION
[0023] In order to make the technical solutions and advantages of
the embodiments of the present disclosure more comprehensible, the
embodiments of the present disclosure are described below with
reference to the accompanying drawings.
[0024] As used herein and in the appended claims, the singular form
of a word includes the plural, and vice versa, unless the context
clearly dictates otherwise. Thus, the references "a", "an", and
"the" are generally inclusive of the plurals of the respective
terms. Similarly, the words "comprise", "comprises", and
"comprising" are to be interpreted inclusively rather than
exclusively.
[0025] For purposes of the description hereinafter, the terms
"upper", "lower", "right", "left", "vertical", "horizontal", "top",
"bottom", and derivatives thereof shall relate to the disclosure,
as it is oriented in the drawing Figures. The terms "overlying",
"atop", "positioned on" or "positioned atop" means that a first
element, such as a first structure, is present on a second element,
such as a second structure, wherein intervening elements, such as
an interface structure, e.g. interface layer, may be present
between the first element and the second element. The term "direct
contact" means that a first element, such as a first structure, and
a second element, such as a second structure, are connected without
any intermediary conducting, insulating or semiconductor layers at
the interface of the two elements.
[0026] In the OLED device, the thickness of the organic layer
formed on the substrate is on the order of micrometers, and is
limited by the formation process and material of the organic layer.
The climbing (profile) angle of the upper surface of the organic
layer and the substrate is relatively large.
[0027] When other films are deposited on the organic layer, since
the climbing angle between the upper surface of the organic layer
and the substrate is large, the film deposited on the organic layer
is prone to crack at the corner position, affecting the OLED
device's service life.
[0028] FIG. 1 which shows a schematic view of the film structure
according to embodiments of the present disclosure will be referred
to.
[0029] Embodiments of the present disclosure provide a film
structure (for example, a structure may be applied to an
electroluminescent display panel). The film structure includes a
substrate 11, a first organic layer 12 disposed on the substrate
11, and a first additional layer 13 disposed on the first organic
layer 12. Wherein, the first organic layer 12 has a sloped edge SE,
and a climbing angle (an arc tangent of the height difference
between the sloped edge SE and the substrate 11 and a projection of
the sloped edge on the substrate 11, which is in radians and can be
converted to an angle value) between the sloped edge and the
substrate 11 is smaller than a breakable angle. In some
embodiments, the first organic layer 12 may be an organic layer
having the outer edge closest to the edge of the substrate 11 in
the film structure.
[0030] In the embodiments of the present disclosure, the substrate
11 may be a rigid substrate or a flexible substrate.
[0031] As shown in FIG. 1, the schematic diagram on the left side
is a partial enlarged view of the area A (the position of the
dotted circle) in the film structure, the climbing angle between
the upper surface UP of the first organic layer 12 and the
substrate 11 is .theta.. F1 is one of the stresses on the first
additional film layer 13 disposed on the first organic film layer
12. The direction of the stress F1 is parallel to the substrate 11.
F2 is another stress on the first additional layer 13. The
direction of the stress F2 is parallel to the tangential direction
of the upper surface of the first organic layer 12 at the corner
position. F is the resultant force of the stress F1 and the stress
F2. According to the parallelogram rule,
F.sup.2=F1.sup.2+F2.sup.2-2F1F2 cos .theta.. When the stress F1 and
the stress F2 are constant, the resultant force F increases as the
climbing angle .theta. increases. The first additional layer 13 is
more likely to crack when the resultant force F is larger.
Therefore, the climbing angle of the first organic film layer 12
and the substrate 11 should be controlled to be smaller than the
breakable angle to reduce the resultant force F of the first
additional layer 13 formed on the first organic layer 12 at the
corner position, so that the crack of the first addition layer 13
can be prevented.
[0032] When the stress F1 and the stress F2 are equal, it can be
inferred that F=2F1 sin(.theta./2), and the resultant force F also
increases as the climbing angle .theta. increases.
[0033] It should be noted that the breakable angle refers to an
angle at which the first additional layer formed on the sloped edge
of the first organic layer cracks or is about to crack. Here, "is
about to crack" means an increase in the probability of occurrence
of crack as compared with less than the breakable angle. When the
climbing angle .theta. is greater than or equal to the breakable
angle, the first additional layer 13 may crack, or the probability
of crack may increase. The climbing angle .theta. is an angle
between the upper surface of the first organic layer 12, at the
corner position, and the substrate 11.
[0034] Furthermore, the film structure of the embodiments of the
present disclosure may include a plurality of organic layers. The
first organic layer 12 may be an organic layer having an outer edge
closest to the edge of the substrate 11 in the film structure. In
some embodiments, the functional layer may be the functional layer
in the functional structure on the substrate or an encapsulation
layer in an encapsulation structure for encapsulating the
functional structure. The functional structure is a structure that
implements, for example, a display function. For example, the
functional structure may include a pixel defining layer, a cathode,
an organic light emitting layer, an anode, a planarization layer,
and the like. In some embodiments, the first organic layer includes
a planarization layer or a pixel defining layer.
[0035] In some embodiments, the first additional layer may include
a first inorganic layer. In such case, the first additional layer
13 in FIG. 1 may be the first inorganic layer. Since the first
inorganic layer has extremely low water oxygen permeability, with
relatively large stress, high hardness, the crack is easily to
occur, especially at the corner position of the first inorganic
layer profile. Therefore, it is necessary to control the climbing
angle between the first organic layer and the substrate to be
smaller than the breakable angle, so that the first inorganic layer
is less likely to crack. Therefore, water oxygen can be effectively
prevented from entering into the inside of the functional
structure, such as the OLED device, from the crack position.
[0036] Of course, the first additional layer 13 in FIG. 1 may be an
organic layer. By controlling the climbing angle of the first
organic layer 12 and the substrate 11, the cracking of the first
additional layer 13 can also be prevented.
[0037] In the embodiments of the present disclosure, the specific
value of the breakage angle is related to the material, preparation
process, and film thickness of the first additional layer 13 which
is subsequently formed. In an embodiment, the break angle is about
35.degree.. When the climbing angle is greater than or equal to
about 35.degree., the first additional layer 13 is more likely to
crack. Therefore, the climbing angle can be set to be less than
about 35.degree. to prevent crack of the first additional layer 13.
As used herein, "about" indicates a reasonable difference between
an actual value and a desired value. For example, "about" may refer
to a range of the desired value .+-.5.degree..
[0038] As shown in FIG. 1, the film structure further includes a
protective layer 15 disposed opposite to the substrate 11 and an
adhesive 14 for bonding the protective layer 15 and the substrate
11. The first organic layer 12 is located between the substrate 11
and the protective layer 15. The adhesive may be sheet glue or
Dam-Filler (epoxy resin+getter filler) glue.
[0039] It should be noted that the first additional layer 13 formed
on the first organic layer 12 is also located between the substrate
11 and the protective layer 15.
[0040] Next, the first additional layer 13 formed on the first
organic layer 12 will be described as the first inorganic
layer.
[0041] FIG. 2, which shows a second schematic view of a film
structure in some embodiments of the present disclosure, will be
referred.
[0042] In an embodiment of the present disclosure, the first
organic layer 121 is a functional layer in a functional structure.
As shown in FIG. 2, the first organic layer 121 is disposed on the
substrate 11, and the first inorganic layer 131 is covered on the
first organic layer 121. At least one stack, consisting of the
second organic layer 122 and the second inorganic layer 132, is
disposed on the first inorganic layer 131. The second organic layer
122 is an organic layer in an encapsulation structure.
[0043] As shown in FIG. 2, compared with the second organic layer
122, the first organic layer 121 has an outer edge closer to the
edge of the substrate 11. That is, the distance between the outer
edge of the first organic film layer 121 and the edge of the
substrate 11 is smaller than the distance between the outer edge of
the second organic film layer 122 and the edge of the substrate 11.
The climbing angle between the first organic layer 121 and the
substrate 11 is set to be smaller than the breakable angle, and
thus the crack of the first inorganic layer 131 can be
prevented.
[0044] When the number of layers of the stack structure of the
second organic layer 122 and the second inorganic layer 132 is
increased, the ability to block water and oxygen can be further
improved. In some embodiments, just the climbing angle between the
first organic layer 121 and the substrate 11 may be set to be
smaller than the breakable angle. In some embodiments, the climbing
angle between the second organic layer 122 and the substrate 11 can
also be set to be smaller than the breakable angle. Thus, the
cracking of the second inorganic layer 132 can be prevented, and
the ability to block water or oxygen can be further improved.
[0045] In an embodiment, the fabrication process of the OLED device
includes forming a driving TFT (Thin Film Transistor) on the
substrate, and then sequentially forming a planarization layer, an
anode, a pixel defining layer, a light emitting layer, a cathode,
and then performing encapsulating to complete the fabrication of
OLED devices. The structure formed before the formation of the
light-emitting layer is generally referred to as a back-plate
structure, and the structure finally formed after the encapsulating
is referred to as an encapsulation structure.
[0046] The organic layer in the back-plate structure includes a
planarization layer or a pixel defining layer. That is, the first
organic layer 121 may be a planarization layer or a pixel defining
layer. Of course, in some other processes, the pixel defining layer
maybe fabricated after the light emitting layer is fabricated. For
example, when the pixel defining layer is an organic layer having
an outer edge closest to the edge of the substrate in the film
structure, the climbing angle between the pixel defining layer and
the substrate may be set to be smaller than the breakable
angle.
[0047] It should be noted that, in order to simplify the schematic
view of FIG. 2, the driving TFT, the anode, the light-emitting
layer, and the cathode are not shown in the drawing. However, it
should be understood that, in the embodiments, when the first
organic layer 121 is a planarization layer, a driving TFT should be
disposed between the first organic layer 121 and the substrate 11.
An anode, a pixel defining layer, a light emitting layer, and a
cathode are further disposed between the first organic layer 121
and the first inorganic layer 131. In some embodiments, when the
first organic layer 121 is a pixel defining layer, a driving TFT, a
planarization layer, and an anode should be disposed between the
first organic layer 121 and the substrate 11, and a light emitting
layer and a cathode are further disposed between the first organic
layer 121 and the first inorganic layers 131.
[0048] In some embodiments, on the laminated structure of the
second organic layer 122 and the second inorganic layer 132, a
protective layer 15 is disposed opposite to the substrate 11. The
protective layer 15 is attached to the substrate 11 by an adhesive
layer 14.
[0049] FIG. 3, which shows a third schematic view of a film
structure in an embodiment of the present disclosure, will be
referred to.
[0050] In another embodiment of the present disclosure, when the
first organic layer 124 is an encapsulation layer in an
encapsulation structure, the encapsulation structure includes at
least one stack consisting of the first organic layer 124 and the
first inorganic layer 134. The first inorganic layer 134 is
overlaid on the first organic layer 124. A second organic layer 123
and a second inorganic layer 133 are further disposed between the
first organic layer 124 and the substrate 11, wherein the second
organic layer 123 may be an organic layer in the back-plate
structure.
[0051] As shown in FIG. 3, compared with the second organic layer
123, the outer edge of the first organic layer 124 is closer to the
edge of the substrate 11. The climbing angle between the first
organic layer 124 and the substrate 11 is set to be smaller than
the breakable angle, and the crack of the first inorganic layer 134
can be prevented.
[0052] Wherein, the organic layer in the back-plate structure
includes a planarization layer or a pixel defining layer. That is,
the second organic layer 123 may be a planarization layer or a
pixel defining layer.
[0053] Further, on the stack structure of the first organic layer
124 and the first inorganic layer 134, a protective layer 15 is
disposed opposite to the substrate 11. The protective layer 15 may
be attached to the substrate 11 by an adhesive layer 14.
[0054] In embodiments of the present disclosure, a first organic
layer having a sloped edge is disposed on a substrate, and a
climbing angle between the sloped edge and the substrate is smaller
than the breakable angle. By controlling the climbing angle between
the first organic film layer and the substrate to less than the
breakable angle, a climbing slope angle of the first additional
layer subsequently disposed on the first organic film layer (an
angle between the upper surface thereof and the substrate) is
decreased. The resultant force of stresses in two directions, on
the subsequently formed layer at the corner position, will be
reduced. Therefore, the subsequently formed layer will be prevented
from cracking and the service life of the functional structure (for
example, an OLED device) will be improved.
[0055] Embodiments of the present disclosure also provide a display
device including the above-described film structure. FIG. 5 is a
schematic view of a display device according to embodiments of the
present disclosure. As shown in FIG. 5, the display device 2000
includes a film structure 1000. The film structure 1000 may be the
film structure shown in FIGS. 1-3. This film structure can be
applied to an electroluminescence display panel. The
electroluminescent display panel includes a substrate, a first
organic layer disposed on the substrate, and a first additional
layer disposed on the first organic layer. The first organic layer
has a sloped edge, and a climbing angle between the sloped edge and
the substrate is smaller than a breakable angle. The breakable
angle refers to an angle at which the first additional layer
disposed on the sloped edge of the first organic layer cracks or is
about to crack. In some embodiments, the first organic layer is an
organic layer having an outer edge closest to the edge of the
substrate in the film structure.
[0056] In some embodiments, the breakable angle is about
35.degree.. The first organic layer may be an organic layer in a
functional structure or an organic layer in an encapsulation
structure. A first inorganic layer may be disposed on the first
additional layer may.
[0057] In embodiments of the present disclosure, the first organic
layer is a functional layer in the functional structure, and the
film structure further includes at least one stack, consisting of a
second organic layer and a second inorganic layer, on the first
inorganic layer.
[0058] In embodiments of the present disclosure, the first organic
layer is an encapsulation layer in an encapsulation structure. The
encapsulation structure includes at least one stack consisting of
the first organic layer and the first inorganic layer.
[0059] In some embodiments, the first organic layer includes a
planarization layer or a pixel defining layer. The substrate may be
a rigid substrate or a flexible substrate.
[0060] In some embodiments, the film structure further includes a
protective layer disposed opposite to the substrate and an adhesive
layer bonding the protective layer and the substrate, wherein the
first organic layer is located between the substrate and the
protective layers.
[0061] In embodiments of the present disclosure, the display device
includes a film structure including a first organic layer having a
sloped edge on the substrate (for example, the first organic layer
is an organic film layer in the film layer structure of which the
outer edge is closest to the edge of the substrate). The climbing
angle between the first organic layer and the substrate (i.e., the
angle between the tangent plane of the upper surface of the sloped
edge and the substrate) is less than the breakable angle. By
controlling the climbing angle between the first organic film layer
and the substrate to less than the breakable angle, a climbing
slope angle of the first additional layer subsequently disposed on
the first organic film layer (an angle between the upper surface of
the first additional layer and the substrate) is decreased. The
resultant force of stresses in two directions, on the subsequently
formed layer at the corner position, will be reduced. Therefore,
the subsequently formed layer will be prevented from cracking and
the service life of the functional structure (for example, an OLED
device) will be improved.
[0062] FIG. 4 which shows a flow chart of a method for fabricating
a film structure in embodiments of the present disclosure will be
referred to. The method includes:
[0063] Step 401, forming a first organic layer on the
substrate.
[0064] In the embodiments of the present disclosure, the first
organic layer is on the substrate, and the method of fabricating
the first organic layer differs depending on the type of the first
organic layer.
[0065] Step 402, forming a first additional layer on the first
organic layer. Wherein the first organic layer has a sloped edge,
and an angle between a tangent plane of the upper surface of the
sloped edge and the substrate is less than a breakable angle. The
breakable angle refers to an angle at which the first additional
layer on the sloped edge of the first organic layer cracks or is
about to crack.
[0066] For example, in consideration of an encapsulation effect,
the first organic layer may be an organic layer, among the film
structure, having an outer edge closest to the edge of the
substrate. The climbing angle between the first organic layer and
the substrate is smaller than the breakable angle.
[0067] Referring to FIG. 2, when the first organic layer 121 is an
organic layer in a functional structure, the first organic layer
121 may be formed using an exposure and development process. By
adjusting parameters such as exposure intensity, exposure time,
developer concentration, development time, and the like, the
climbing angle between the first organic layer 121 and the
substrate 11 is set to smaller than the breakable angle.
[0068] Referring to FIG. 3, when the first organic layer 124 is an
organic layer in an encapsulation structure, the first organic
layer 124 may be formed by a printing process or a chemical vapor
deposition process. The climbing angle between the first organic
layer 124 and the substrate 11 is made smaller than the breakable
by adjusting the material viscosity of the first organic layer, the
contact angle of the substrate, the deposition rate of the first
organic layer, and the like. In the case of the first organic layer
124 is an organic layer in an encapsulation structure, specific
steps of forming a first organic layer on the substrate may include
forming a second organic layer on the substrate, forming a second
inorganic layer on the second organic layer, and forming the first
organic layer on the second inorganic layer.
[0069] In some embodiments, first, the second organic layer 123 is
formed on the substrate 11 by an exposure and development process.
Then, a second inorganic layer 133 is formed on the second organic
layer 123 by a chemical vapor deposition process or an atomic layer
deposition process. Finally, the first organic layer 124 is formed
on the second inorganic layer 133 by a printing process or a
chemical vapor deposition process.
[0070] In some embodiments of the present disclosure, after the
first organic layer is formed on the substrate, the first inorganic
layer may be formed on the first organic layer. The first inorganic
layer may be formed using a chemical vapor deposition process or an
atomic layer deposition process.
[0071] Referring to FIG. 2, in some embodiments of the present
disclosure, when the first organic layer 121 is an organic layer in
a functional structure, a chemical vapor deposition process or an
atomic layer deposition process may be employed to form a first
inorganic layer 131 on the first organic layer 121.
[0072] In some embodiments of the present disclosure, the first
organic layer 121 is an organic layer in a functional structure.
After the first inorganic layer is formed on the first organic
layer, at least one stack, consisting of a second organic layer and
a second inorganic layer, is formed on the first inorganic
layer.
[0073] A second organic layer 122 is formed (for example, using a
printing process or a chemical vapor deposition process) on the
first inorganic layer 131. The second inorganic layer 132 is formed
(for example, using a chemical vapor deposition process or an
atomic layer deposition process) on the second organic layer 122.
The stack structure of the second organic layer 122 and the second
inorganic layer 132 may be formed in accordance with the
above-described process. The number of layers of the stack
structure is greater than or equal to one.
[0074] In some embodiments, after forming the stack structure of
the second organic layer 122 and the second inorganic layer 132,
shellac glue may be applied to or a Dam-Filler adhesive may be
coated on the second inorganic layer 132 in the stack structure to
form an adhesive layer 14. A protective layer 15 may be attached to
the adhesive 14.
[0075] Referring to FIG. 3, when the first organic layer 124 is an
organic layer in an encapsulation structure, a first inorganic film
is formed on the first organic layer 124 (for example, by a
chemical vapor deposition process or an atomic layer deposition
process).
[0076] In some embodiments, a sheet of glue or a Dam-Filler
adhesive is applied to the first inorganic layer 134 to form an
adhesive layer 14. A protective layer 15 is attached to the
adhesive layer 14.
[0077] The material of the first inorganic layer and the second
inorganic layer may include at least one of SiN.sub.x (silicon
nitride), SiCN (silicon carbonitride), SiON (silicon oxynitride),
and Al.sub.2O.sub.3 (alumina).
[0078] In embodiments of the present disclosure, a first organic
layer (for example, the first organic layer is an organic layer,
among the layers in the film structure, with an outer edge closest
to the edge of the substrate) having a sloped edge is disposed on a
substrate, and an angle between a tangent plane of the upper
surface of the sloped edge and the substrate (also referred to as
"climbing angle") is smaller than the breakable angle. The
breakable angle is an angle at which the first additional layer on
the sloped edge of the first organic layer cracks or is about to
crack. By controlling the climbing angle between the first organic
film layer and the substrate to less than the breakable angle, a
climbing slope angle of the layer subsequently formed on the first
additional layer will be decreased. Thus, the resultant force of
stresses in two directions, on the subsequently formed layer at the
corner position, will be reduced. Thus, the subsequently formed
layer will be prevented from cracking and the service life of the
functional structure (for example, an OLED device) will be
improved.
[0079] For the foregoing method embodiments, for the sake of brief
description, they are all expressed as a series of action
combinations. However, those skilled in the art should understand
that the present disclosure is not limited by the described action
sequence, because, according to the present disclosure, some steps
can be performed in other orders or at the same time. Besides,
those skilled in the art should also understand that the
embodiments described in the specification are preferred
embodiments, and the actions and modules involved are not
necessarily required by the present disclosure.
[0080] The various embodiments in the present disclosure are
described in a progressive manner. Each embodiment focuses on
differences from other embodiments, and the same similar parts
between the various embodiments can be referred to each other.
[0081] Finally, it should also be noted that in this context,
relational terms such as first and second are used merely to
distinguish one entity or operation from another entity or
operation, and do not necessarily require or imply there is any
such actual relationship or order between these entities or
operations. Furthermore, the terms "comprises" or "comprising" or
"including" or any other variations are intended to encompass a
non-exclusive inclusion, such that processes, methods, articles, or
device that include a set of elements include not only those
elements, but also other elements that are not explicitly listed,
or include elements inherent to such a process, method, article, or
equipment. In the absence of more restrictions, elements defined by
the phrase "including one . . . " do not exclude the existence of
additional identical elements in the process, method, article, or
device that includes the element.
[0082] The method for fabricating a film structure, a display
device and a film structure according to the present disclosure has
been described in detail above. The principle and implementation of
the present disclosure are described in the following by using
specific examples. The above description of the embodiments is only
for assisting in understanding the method of the present disclosure
and its core ideas. At the same time, for those of ordinary skill
in the art, depending on the idea of the present disclosure, there
will be changes in specific embodiments and applications. The
description herein is not to be construed as limiting the
disclosure.
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