U.S. patent application number 16/608968 was filed with the patent office on 2020-06-18 for silicon wafer processing device and method.
The applicant listed for this patent is SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.. Invention is credited to Dongliang HUANG, Jie JIANG, Yichao SHI, Haijun SONG, Gang WANG.
Application Number | 20200192228 16/608968 |
Document ID | / |
Family ID | 63919488 |
Filed Date | 2020-06-18 |
United States Patent
Application |
20200192228 |
Kind Code |
A1 |
WANG; Gang ; et al. |
June 18, 2020 |
SILICON WAFER PROCESSING DEVICE AND METHOD
Abstract
Disclosed is a silicon wafer processing device; a pre-aligned
optical assembly and an edge exposure assembly are provided on a
synchronous bi-directional motion module, reducing the occupied
space of the device and saving the installation cost; and
furthermore, a synchronous bi-directional motion module, a rotation
unit and a position compensation unit on a bottom plate are
controlled by means of a control assembly, so as to reduce the
operational complexity; and moreover, the synchronous
bi-directional motion module is controlled to drive the pre-aligned
optical assembly and the edge exposure assembly to simultaneously
move, so that the operations of pre-aligning and edge exposure can
be performed on silicon wafers of different sizes, thereby saving
the switching time and increasing the work efficiency. Further
disclosed is a method for processing a silicon wafer using a
silicon wafer processing device.
Inventors: |
WANG; Gang; (Shanghai,
CN) ; SHI; Yichao; (Shanghai, CN) ; JIANG;
Jie; (Shanghai, CN) ; HUANG; Dongliang;
(Shanghai, CN) ; SONG; Haijun; (Shanghai,
CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD. |
Shanghai |
|
CN |
|
|
Family ID: |
63919488 |
Appl. No.: |
16/608968 |
Filed: |
April 27, 2018 |
PCT Filed: |
April 27, 2018 |
PCT NO: |
PCT/CN2018/084774 |
371 Date: |
October 28, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G03F 7/20 20130101; G03F
7/2028 20130101; G03F 9/00 20130101; H01L 21/67 20130101; G03F
9/7011 20130101 |
International
Class: |
G03F 7/20 20060101
G03F007/20; H01L 21/68 20060101 H01L021/68; H01L 21/687 20060101
H01L021/687 |
Foreign Application Data
Date |
Code |
Application Number |
Apr 28, 2017 |
CN |
201710294642.0 |
Claims
1. A silicon wafer processing device for performing a pre-alignment
and an edge exposure on a silicon wafer, comprising: a baseplate, a
control assembly, a pre-alignment optical assembly, an edge
exposure assembly, a wafer supporting unit, and a synchronous
bi-directional motion assembly, wherein the synchronous
bi-directional motion assembly is fixed on the baseplate; each of
the pre-alignment optical assembly and the edge exposure assembly
is fixed on the synchronous bi-directional motion assembly; and the
pre-alignment optical assembly and the edge exposure assembly are
symmetrically distributed relative to a center of the wafer
supporting unit; wherein the control assembly is electrically
connected to each of the pre-alignment optical assembly, the edge
exposure assembly, and the synchronous bi-directional motion
assembly; and the control assembly controls, according to a size of
the silicon wafer and requirement of a silicon wafer edge exposure
position, the synchronous bi-directional motion assembly to drive
the pre-alignment optical assembly and the edge exposure assembly
to synchronously move towards or opposite to each other relative to
the silicon wafer, and further controls the wafer supporting unit
to move the silicon wafer.
2. The silicon wafer processing device according to claim 1,
wherein the wafer supporting unit comprises a rotating stage, a
positioning stage, and a motion assembly; and the motion assembly
comprises a rotating unit, a lifting unit, and a position
compensation unit; wherein the rotating stage is fixed on the
rotating unit, and the rotating stage is able to carry the silicon
wafer to rotate under a driving of the rotating unit; wherein the
rotating unit is fixed on the lifting unit, and the lifting unit is
able to drive the rotating unit to move vertically relative to the
baseplate; wherein the positioning stage is arranged at a periphery
of the rotating stage and is fixed on the position compensation
unit, and the positioning stage is able to carry the silicon wafer
to move relative to the rotating stage along a horizontal direction
under a driving of the position compensation unit.
3. The silicon wafer processing device according to claim 1,
wherein the synchronous bi-directional motion assembly comprises a
linear guide assembly, a driver, a left-right-handed lead screw, a
left sliding block, and a right sliding block; wherein the
left-right-handed lead screw passes through the left sliding block
and the right sliding block and is connected to the driver, the
left sliding block and the right sliding block being slidably
disposed on the linear guide assembly, the pre-alignment optical
assembly being fixed on the left sliding block, the edge exposure
assembly being fixed on the right sliding block; wherein the
left-right-handed lead screw has a left-handed external thread and
a right-handed external thread symmetrically disposed thereon, the
left sliding block having a left-handed internal thread matching
the left-handed external thread disposed therein, the right sliding
block having a right-handed internal thread matching the
right-handed external thread disposed therein; and wherein the
driver drives the left-right-handed lead screw to rotate, so as to
drive the left sliding block and the right sliding block to
synchronously move towards or opposite to each other along the
linear guide assembly.
4. The silicon wafer processing device according to claim 3,
wherein the linear guide assembly comprises a first track and a
second track disposed in parallel; and each of the left sliding
block and the right sliding block is bridged across the first track
and the second track.
5. The silicon wafer processing device according to claim 1,
wherein the synchronous bi-directional motion assembly comprises a
linear guide assembly, a driver, a rotating gear, a first rack, and
a second rack; wherein the first rack and the second rack are
distributed in parallel on both sides of the rotating gear and mesh
with the rotating gear, and the rotating gear is connected to the
driver; wherein a tooth direction of the first rack is opposite to
a tooth direction of the second rack, the pre-alignment optical
assembly being fixed on the first rack, the edge exposure assembly
being fixed on the second rack; and wherein the driver drives the
rotating gear to rotate, so as to drive the first rack and the
second rack to synchronously move towards or opposite to each other
along the linear guide assembly.
6. The silicon wafer processing device according to claim 5,
wherein the linear guide assembly comprises a first guide rail and
a second guide rail disposed in parallel, the first rack being
slidably disposed on the first guide rail, the second rack being
slidably disposed on the second guide rail.
7. The silicon wafer processing device according to claim 1,
wherein the pre-alignment optical assembly comprises a spot light
source, a pre-alignment lens, and an image capturing unit; wherein
the spot light source emits irradiation light to irradiate an edge
of the silicon wafer; wherein the irradiation light passes through
the edge of the silicon wafer and reaches the pre-alignment lens,
and the image capturing unit collects information of the silicon
wafer.
8. The silicon wafer processing device according to claim 1,
wherein the edge exposure assembly comprises an exposure lens and a
diaphragm switching unit; wherein the exposure lens is configured
to perform the edge exposure on the silicon wafer; and the
diaphragm switching unit is configured to adjust a size of an
exposure light spot.
9. A method for silicon wafer processing using the silicon wafer
processing device according to claim 1, comprising: step 1: placing
a silicon wafer on a wafer supporting unit; and controlling, by a
control assembly according to a size of the silicon wafer, a
synchronous bi-directional motion assembly to drive a pre-alignment
optical assembly and an edge exposure assembly to synchronously
move towards or opposite to each other relative to the silicon
wafer, so as to move the pre-alignment optical assembly to a
silicon wafer pre-alignment position; step 2: controlling, by the
control assembly, the wafer supporting unit and the pre-alignment
optical assembly to perform a pre-alignment on the silicon wafer;
step 3: controlling, by the control assembly according to the size
of the silicon wafer and a requirement of a silicon wafer edge
exposure position, the synchronous bi-directional motion assembly
to drive the pre-alignment optical assembly and the edge exposure
assembly to synchronously move towards or opposite to each other
relative to the silicon wafer, so as to move the edge exposure
assembly to the silicon wafer edge exposure position; and step 4:
controlling, by the control assembly, the wafer supporting unit and
the edge exposure assembly to perform an edge exposure processing
on the silicon wafer.
10. The method for silicon wafer processing according to claim 9,
wherein the wafer supporting unit comprises a rotating stage, a
positioning stage and a motion assembly; the motion assembly
comprising a rotating unit, a lifting unit, and a position
compensation unit, wherein step 2 specifically comprises the
following steps: step 21: sucking, by the rotating stage, the
silicon wafer; driving, by the rotating unit, the rotating stage
and the silicon wafer to rotate; collecting, by the pre-alignment
optical assembly, an edge information of the silicon wafer;
calculating, by the control assembly, an offset of a center of the
silicon wafer relative to a center of the rotating stage according
to the edge information of the silicon wafer; and determining, by
the control assembly, whether the offset satisfies a centering
accuracy between the silicon wafer and the rotating stage; if yes,
executing step 26; if not, executing step 22; step 22: driving, by
the rotating stage, the silicon wafer to rotate until a direction
in which a maximum value of the offset is located is aligned with a
motion direction of the position compensation unit; step 23:
driving, by the lifting unit, the rotating stage and the silicon
wafer to move downwards to reach a transfer position of the
positioning stage; releasing, by the rotating stage, the silicon
wafer; sucking, by the positioning stage, the silicon wafer; and
continuing to lower the lifting unit to drive the rotating stage to
move to a lower transfer position; step 24: controlling, by the
control assembly according to the offset of the center of the
silicon wafer relative to the center of the rotating stage, the
position compensation unit to drive the positioning stage to move
in a horizontal direction until the center of the silicon wafer
coincides with the center of the rotating stage; step 25: driving,
by the lifting unit, the rotating stage to move up to the transfer
position; releasing, by the positioning stage, the silicon wafer;
sucking, by the rotating stage, the silicon wafer; and returning to
step 21; step 26: driving, by the rotating unit, the rotating stage
and the silicon wafer to rotate; collecting, by the pre-alignment
optical assembly, the edge information of the silicon wafer;
calculating, by the control assembly, a notch position of the
silicon wafer according to the edge information of the silicon
wafer, and controlling, by the control assembly, a rotation of the
rotating unit according to the notch position of the silicon wafer
to realize an orientation of the silicon wafer; and step 27:
determining whether an orientation accuracy of the silicon wafer is
satisfied; if not, executing step 26.
Description
TECHNICAL FIELD
[0001] The present application relates to a silicon wafer
processing device and method in the microelectronic field, and in
particular, to a silicon wafer pre-alignment and edge exposure
device and method.
BACKGROUND
[0002] The development of microelectronic technology promotes the
upgrading of the computer technology, communication technology and
other electronic information technology. It plays an important
leading and fundamental role in the information industry
revolution. The lithography machine is an indispensable tool of the
microelectronic manufacturing industry. Moreover, the silicon wafer
pre-alignment system and the silicon wafer edge exposure system are
important subsystems of the advanced package lithography
machine.
[0003] There is a demand for the pre-alignment and edge exposure
with an increasing degree of automation and a decreasing cost on
the market at present. To reduce costs, the pre-alignment and the
edge exposure functions are integrated into a single device in the
industry. At present, the common layout of the pre-alignment and
edge-exposure integrated device used in the industry is as follows:
each of the pre-alignment optical machine and the edge exposure
lens is fixed on the base; the horizontal movement module drives
the rotary lifting module to move horizontally; and the rotary
lifting module sucks the silicon wafer. In the foregoing devices,
due to the horizontal movement of the silicon wafer, the apparatus
needs to avoid horizontal movement paths of the silicon wafer,
which results in a large space of the apparatus. In the industry,
there are independent pre-alignment devices and edge exposure
devices in which the silicon wafer is fixed, and the pre-alignment
optical machine and the edge exposure lens move alternatively.
Relatively, the space of the device substantially equals to the
size of a piece of silicon wafer, which takes up less space.
However, the space of the device is not minimized due to the two
independent devices, and, the cost of the apparatus is high due to
the large number of motion assembly.
SUMMARY
[0004] It is an object of the present application to provide a
silicon wafer processing device and method, and particularly to
provide a silicon wafer pre-alignment and edge exposure device and
method for improving the shortcomings of large space occupation and
high cost of the pre-alignment and edge exposure integrated devices
used in the prior art, so as to save space and time and improve
work efficiency.
[0005] In order to achieve the foregoing object, one aspect of the
present application provides a silicon wafer processing device for
performing a pre-alignment and an edge exposure on a silicon wafer,
comprising: a baseplate, a control assembly, a pre-alignment
optical assembly, an edge exposure assembly, a wafer supporting
unit, and a synchronous bi-directional motion assembly, wherein the
synchronous bi-directional motion assembly is fixed on the
baseplate; each of the pre-alignment optical assembly and the edge
exposure assembly is fixed on the synchronous bi-directional motion
assembly; and the pre-alignment optical assembly and the edge
exposure assembly are symmetrically distributed relative to a
center of the wafer supporting unit; wherein the control assembly
is electrically connected to each of the pre-alignment optical
assembly, the edge exposure assembly, and the synchronous
bi-directional motion assembly; the control assembly controls,
according to a size of the silicon wafer and a requirement of a
silicon wafer edge exposure position, the synchronous
bi-directional motion assembly to drive the pre-alignment optical
assembly and the edge exposure assembly to synchronously move
towards or opposite to each other relative to the silicon wafer,
and further controls the wafer supporting unit to move the silicon
wafer.
[0006] Preferably, in the foregoing silicon wafer processing
device, the wafer supporting unit comprises a rotating stage, a
positioning stage, and a motion assembly; and the motion assembly
comprises a rotating unit, a lifting unit, and a position
compensation unit; wherein the rotating stage is fixed on the
rotating unit; and the rotating stage is able to carry the silicon
wafer to rotate under a driving of the rotating unit; wherein the
rotating unit is fixed on the lifting unit, and the lifting unit is
able to drive the rotating unit to move vertically relative to the
baseplate; wherein the positioning stage is arranged at a periphery
of the rotating stage and is fixed on the position compensation
unit, and the positioning stage is able to carry the silicon wafer
to move relative to the rotating stage along a horizontal direction
under a driving of the position compensation unit.
[0007] Preferably, in the foregoing silicon wafer processing
device, the synchronous bi-directional motion assembly comprises a
linear guide assembly, a driver, a left-right-handed lead screw, a
left sliding block, and a right sliding block; wherein the
left-right-handed lead screw passes through the left sliding block
and the right sliding block and is connected to the driver, the
left sliding block and the right sliding block being slidably
disposed on the linear guide assembly, the pre-alignment optical
assembly being fixed on the left sliding block, the edge exposure
assembly being fixed on the right sliding block; wherein the
left-right-handed lead screw has a left-handed external thread and
a right-handed external thread symmetrically disposed thereon, the
left sliding block having a left-handed internal thread matching
the left-handed external thread disposed therein, the right sliding
block having a right-handed internal thread matching the
right-handed external thread disposed therein; and wherein the
driver drives the left-right-handed lead screw to rotate, so as to
drive the left sliding block and the right sliding block to
synchronously move towards or opposite to each other along the
linear guide assembly.
[0008] Preferably, in the foregoing silicon wafer processing
device, the linear guide assembly comprises a first track and a
second track disposed in parallel; and each of the left sliding
block and the right sliding block is bridged across the first track
and the second track.
[0009] Preferably, in the foregoing silicon wafer processing
device, the synchronous bi-directional motion assembly comprises a
linear guide assembly, a driver, a rotating gear, a first rack, and
a second rack; wherein the first rack and the second rack are
distributed in parallel on both sides of the rotating gear and mesh
with the rotating gear; and the rotating gear is connected to the
driver; wherein a tooth direction of the first rack is opposite to
a tooth direction of the second rack; the pre-alignment optical
assembly being fixed on the first rack, the edge exposure assembly
being fixed on the second rack; and wherein the driver drives the
rotating gear to rotate, so as to drive the first rack and the
second rack to synchronously move towards or opposite to each other
along the linear guide assembly.
[0010] Preferably, in the foregoing silicon wafer processing
device, the linear guide assembly comprises a first guide rail and
a second guide rail disposed in parallel, the first rack being
slidably disposed on the first guide rail, the second rack being
slidably disposed on the second guide rail.
[0011] Preferably, in the foregoing silicon wafer processing
device, the pre-alignment optical assembly comprises a spot light
source, a pre-alignment lens, and an image capturing unit; wherein
the spot light source emits irradiation light to irradiate an edge
of the silicon wafer; wherein the irradiation light passes through
the edge of the silicon wafer and reaches the pre-alignment lens,
and the image capturing unit collects information of the silicon
wafer.
[0012] Preferably, in the foregoing silicon wafer processing
device, the edge exposure assembly comprises an exposure lens and a
diaphragm switching unit; wherein the exposure lens is configured
to perform the edge exposure on the silicon wafer; and the
diaphragm switching unit is configured to adjust a size of the
exposure spot.
[0013] In order to achieve the foregoing object, another aspect of
the present application provides a method for performing a
pre-alignment and an edge exposure on a silicon wafer using any of
the foregoing silicon wafer processing devices, comprising:
[0014] step 1: placing a silicon wafer on a wafer supporting unit;
and controlling, by a control assembly according to a size of the
silicon wafer, a synchronous bi-directional motion assembly to
drive a pre-alignment optical assembly and an edge exposure
assembly to synchronously move towards or opposite to each other
relative to the silicon wafer, so as to move the pre-alignment
optical assembly to a silicon wafer pre-alignment position;
[0015] step 2: controlling, by the control assembly, the wafer
supporting unit and the pre-alignment optical assembly to perform a
pre-alignment on the silicon wafer;
[0016] step 3: controlling, by the control assembly according to
the size of the silicon wafer and a requirement of a silicon wafer
edge exposure position of the silicon wafer, the synchronous
bi-directional motion assembly to drive the pre-alignment optical
assembly and the edge exposure assembly to synchronously move
forwards or opposite to each other relative to the silicon wafer,
so as to move the edge exposure assembly to the silicon wafer edge
exposure position of the silicon wafer; and
[0017] step 4: controlling, by the control assembly, the wafer
supporting unit and the edge exposure assembly to perform an edge
exposure processing on the silicon wafer.
[0018] Preferably, in the foregoing method for performing a
pre-alignment and an edge exposure on a silicon wafer, the wafer
supporting unit comprises a rotating stage, a positioning stage and
a motion assembly, the motion assembly comprising a rotating unit,
a lifting unit, and a position compensation unit, wherein step 2
specifically comprises following steps:
[0019] step 21: sucking, by the rotating stage, the silicon wafer;
driving, by the rotating unit, the rotating stage and the silicon
wafer to rotate; collecting, by the pre-alignment optical assembly,
an edge information of the silicon wafer; calculating, by the
control assembly, an offset of a center of the silicon wafer
relative to a center of the rotating stage according to the edge
information of the silicon wafer; and determining whether the
offset satisfies a centering accuracy between the silicon wafer and
the rotating stage; if yes, executing step 26; if not, executing
step 22;
[0020] step 22: driving, by the rotating stage, the silicon wafer
to rotate until a direction in which a maximum value of the offset
is located is aligned with a motion direction of the position
compensation unit;
[0021] step 23: driving, by the lifting unit, the rotating stage
and the silicon wafer to move downwards to reach a transfer
position of the positioning stage; releasing, by the rotating
stage, the silicon wafer; sucking, by the positioning stage, the
silicon wafer; and continuing to lower the lifting unit to drive
the rotating stage to move to a lower transfer position;
[0022] step 24: controlling, by the control assembly according to
the offset of the center of the silicon wafer relative to the
center of the rotating stage, the position compensation unit to
drive the positioning stage to move in a horizontal direction until
the center of the silicon wafer coincides with the center of the
rotating stage;
[0023] step 25: driving, by the lifting unit, the rotating stage to
move up to the transfer position; releasing, by the positioning
stage, the silicon wafer; sucking, by the rotating stage, the
silicon wafer; and returning to step 21;
[0024] step 26: driving, by the rotating unit, the rotating stage
and the silicon wafer to rotate; collecting, by the pre-alignment
optical assembly, the edge information of the silicon wafer;
calculating, by the control assembly, a notch position of the
silicon wafer according to the edge information of the silicon
wafer, and controlling, by the control assembly, a rotation of the
rotating unit according to the notch position of the silicon wafer
to realize an orientation of the silicon wafer; and
[0025] step 27: determining whether an orientation accuracy of the
silicon wafer is satisfied; if not executing step 26.
[0026] In summary, the silicon wafer processing device and method
provided in the present application dispose the pre-alignment
optical assembly and the edge exposure assembly on the synchronous
bi-directional motion assembly, thereby reducing the occupied space
of the device and saving the installation cost. The synchronous
bi-directional motion assembly, the rotating unit and the position
compensation unit that are disposed on the baseplate are controlled
by the control assembly, so as to reduce the operation complexity.
The synchronous bi-directional motion assembly is controlled to
drive the pre-alignment optical assembly and the edge exposure
assembly to simultaneously move, so that operations of the
pre-alignment and the edge exposure are able to be performed on
silicon wafers of different sizes, thereby saving the switching
time and improving the work efficiency.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] FIG. 1 is a structural front view of a silicon wafer
processing device according to an embodiment of the present
application;
[0028] FIG. 2 is a left view of FIG. 1;
[0029] FIG. 3 is a workflow of the pre-alignment and edge exposure
on a silicon wafer using a silicon wafer processing device
according to an embodiment of the present application; and
[0030] FIG. 4 is a schematic structural diagram of a synchronous
bi-directional motion assembly according to another embodiment of
the present application.
[0031] In the drawings, 1--baseplate; 2--control assembly;
3--pre-alignment optical assembly; 31--pre-alignment lens; 32--spot
light source; 4--synchronous bi-directional motion assembly;
41--left sliding block; 42--right sliding block;
43--left-right-handed lead screw; 431--first track; 432--second
track; 5--edge exposure assembly; 51--exposure lens; 52--diaphragm
switching unit; 6--lifting unit; 7--rotating unit; 71--rotating
stage; 8--position compensation unit; 81--positioning stage;
9--silicon wafer.
DETAILED DESCRIPTION
[0032] The embodiments of the present application will be described
in greater detail below with reference to accompanying figures.
Advantages and features of the present application will be more
apparent from the description and appended claims. It should be
noted that the accompanying drawings are presented in a very
simplified form and not necessarily presented to scale, with the
only intention to facilitate convenience and clarity in explaining
the object of the present invention.
[0033] Referring to FIG. 1 and FIG. 2, FIG. 1 is a structural front
view of a silicon wafer processing device according to an
embodiment of the present application, and FIG. 2 is a left view of
FIG. 1. The present application provides a silicon wafer processing
device for performing the pre-alignment and the edge exposure on a
silicon wafer 9, including: a baseplate 1, a control assembly 2, a
pre-alignment optical assembly 3, an edge exposure assembly 5, a
wafer supporting unit, and a synchronous bi-directional motion
assembly 4, wherein the wafer supporting unit includes a rotating
stage 71, a positioning stage 81, and a motion assembly; and the
motion assembly includes a rotating unit 7, a lifting unit 6, and a
position compensation unit 8. The working principle of the
pre-alignment optical assembly 3 and the edge exposure assembly 5
has been extensively developed in the prior art. Therefore, details
are not described in the embodiments of the present
application.
[0034] Specifically, the control assembly 2 first controls,
according to the size of the silicon wafer 9, the synchronous
bi-directional motion assembly 4 to drive the pre-alignment optical
assembly 3 and the edge exposure assembly 5 to synchronously move
towards or opposite to each other relative to the silicon wafer 9
(here, the control assembly 2 controls the synchronous
bi-directional motion assembly 4 to drive the pre-alignment optical
assembly 3 and the edge exposure assembly 5 to simultaneously move
opposite to each other relative to the silicon wafer 9), so as to
move the pre-alignment optical assembly 3 to the pre-alignment
position of the silicon wafer 9. Then, the control assembly 2
collects information generated by the pre-alignment optical
assembly 3, such as the position information of the silicon wafer
edge collected by the pre-alignment optical assembly 3, so as to
obtain the relative position of the silicon wafer 9 on the wafer
supporting unit, and in turn control the lifting unit 6, the
rotating unit 7 and the position compensation unit 8 to perform a
pre-alignment on the silicon wafer 9, that is, the relative
position of the silicon wafer 9 on the wafer supporting unit is
adjusted such that the relative position of the silicon wafer 9 on
the wafer supporting unit meets the requirement. Then, the control
assembly 2 controls, according to the size of the silicon wafer 9
and the requirement of an edge exposure position of the silicon
wafer 9, the synchronous bi-directional motion assembly 4 drive the
pre-alignment optical assembly 3 and the edge exposure assembly 5
to synchronously move towards or opposite to each other relative to
the silicon wafer 9, so as to move the edge exposure assembly 5 to
the edge exposure position of the silicon wafer 9. Finally, the
lifting unit 6, the rotating unit 7, the position compensation unit
8, and the edge exposure assembly 5 are controlled to perform an
edge exposure processing on the silicon wafer 9, so that the
exposure to the predetermined position of the edge of the silicon
wafer 9 is able to be achieved.
[0035] Referring to FIG. 1 and FIG. 2, the synchronous
bi-directional motion assembly 4 is fixed on the baseplate 1, the
pre-alignment optical assembly 3 and the edge exposure assembly 5
are fixed on the synchronous bi-directional motion assembly 4, and
the axis of pre-alignment optical assembly 3 and the axis of the
edge exposure assembly 5 are symmetrically distributed relative to
the center of the rotating stage 71. The control assembly 2 is
electrically connected to each of the pre-alignment optical
assembly 3, the edge exposure assembly 5 and the synchronous
bi-directional motion assembly 4. The control assembly 2 controls,
according to the size of the silicon wafer 9 and the requirement of
the silicon wafer edge exposure position, the synchronous
bi-directional motion assembly 4 to drive the pre-alignment optical
assembly 3 and the edge exposure assembly 5 to synchronously move
towards or opposite to each other relative to the silicon wafer 9.
Specifically, the pre-alignment optical assembly 3 includes a spot
light source 32, a pre-alignment lens 31, and an image capturing
unit, where the spot light source emits irradiation light to
irradiate the edge of the silicon wafer. The irradiation light
passes through the edge of the silicon wafer and reaches the
pre-alignment lens. The image capturing unit collects information
of the silicon wafer. The edge exposure assembly 5 includes an
exposure lens 51 and a diaphragm switching unit 52, where the
exposure lens is configured to perform an edge exposure on the
silicon wafer, and the diaphragm switching unit is configured to
adjust the size of the exposure spot.
[0036] Specifically, in a preferred embodiment of the present
application, the synchronous bi-directional motion assembly 4
includes a linear guide assembly, a driver, a left-right-handed
lead screw 43, a left sliding block 41, and a right sliding block
42. The left-right-handed lead screw 43 passes through the left
sliding block 41 and the right sliding block 42, and is connected
to the driver. The linear guide assembly includes a first track 431
and a second track 432 disposed in parallel. Each of the left
sliding block 41 and the right sliding block 42 is bridged across
the first track 431 and the second track 432. The pre-alignment
optical assembly 3 is fixed on the left sliding block 41. The edge
exposure assembly 5 is fixed on the right sliding block 42.
[0037] Specifically, a left-handed external thread and a
right-handed external thread are symmetrically disposed on the
left-right-handed lead screw 43. A left-handed internal thread
matching the left-handed external thread is disposed inside the
left sliding block 41. A right-handed internal thread matching the
right-handed external thread is disposed inside the right sliding
block 42. When the driver drives the left-right-handed lead screw
43 to rotate, the left sliding block 41 and the right sliding block
42 synchronously move towards or opposite to each other along the
first track 431 and the second track 432, so as to drive the
pre-alignment optical assembly 3 and the edge exposure assembly 5
to simultaneously move towards or opposite to each other relative
to the silicon wafer 9 for the adjustment of the pre-alignment
position of the pre-alignment optical assembly 3 and the exposure
position of the edge exposure assembly 5.
[0038] In the present application, the synchronous bi-directional
motion assembly 4 drives the pre-alignment optical assembly 3 and
the edge exposure assembly 5 to move simultaneously, simplifying
the operation, saving the switching time, simplifying the
structure, and reducing the occupied space and cost of the entire
device.
[0039] The wafer supporting unit includes a rotating stage 71, a
positioning stage 81, and a motion assembly. The motion assembly
includes a rotating unit 7, a lifting unit 6, and a position
compensation unit 8. The lifting unit 6 and the position
compensation unit 8 are connected to the baseplate 1, where the
position compensation unit 8 can be directly connected to the
baseplate 1, or indirectly connected to the baseplate 1 through
other components. The rotating unit 7 is disposed on the lifting
unit 6. The rotating stage 71 is fixed on the rotating unit 7 for
supporting the silicon wafer 9. The lifting unit 6 drives the
rotating unit 7 to move along a direction vertically relative to
the baseplate 1. The positioning stage 81 is disposed at the
periphery of the rotating stage 71 and fixed on the position
compensation unit 8 for supporting the silicon wafer 9 to move
along the horizontal direction under the driving of the position
compensation unit 8, so as to adjust the horizontal position of the
silicon wafer 9 relative to the rotating stage 71 to complete
pre-alignment.
[0040] Specifically, the image capturing unit in the pre-alignment
optical assembly 3 collects information of the silicon wafer 9.
According to the collected information of the silicon wafer 9, the
control assembly 2 controls the lifting unit 6, the rotating unit
7, and the position compensation unit 8 to adjust the offset of the
silicon wafer 9 relative to the rotating stage 71, to complete the
pre-alignment operation of the silicon wafer 9.
[0041] More specifically, the rotating stage 71 sucks the silicon
wafer 9. The rotating unit 7 drives the rotating stage 71 and the
silicon wafer 9 to rotate. The pre-alignment optical assembly 3
collects the edge information of the silicon wafer. The control
assembly 2 calculates the offset of the center of the silicon wafer
9 relative to the center of the rotating stage 71 according to the
edge information of the silicon wafer 9, and determines whether the
offset satisfies the centering accuracy between the silicon wafer 9
and the rotating stage 71.
[0042] If the offset does not satisfy the centering accuracy of the
silicon wafer 9 and the rotating stage 71, the rotating stage 71
drives the silicon wafer 9 to rotate until a direction in which a
maximum value of the offset is located is aligned with the motion
direction of the position compensation unit 8, i.e. a certain
horizontal direction. The lifting unit 6 drives the rotating stage
71 and the silicon wafer 9 to move in a direction perpendicular to
the baseplate 1 to reach a transfer position of the positioning
stage 81. The rotating stage 71 releases the silicon wafer 9, the
positioning stage 81 sucks the silicon wafer 9, and the lifting
unit 6 continues to descend to drive the rotating stage 71 to move
to a lower transfer position (i.e., a position lower than the
transfer position). The control assembly 2 controls, according to
the offset of the center of the silicon wafer 9 relative to the
center of the rotating stage 71, the position compensation unit 8
to drive the positioning stage 82 to move in the horizontal
direction until the center of the silicon wafer 9 coincides with
the center of the rotating stage 71. The lifting unit 6 drives the
rotating stage 71 to move up to the transfer position, the
positioning stage 81 releases the silicon wafer 9, and the rotating
stage 71 sucks the silicon wafer 9 to complete the pre-alignment
operation.
[0043] Upon completion of the pre-alignment operation, the rotating
unit 7 drives the rotating stage 71 and the silicon wafer 9 to
rotate; the pre-alignment optical assembly 3 collects the edge
information of the silicon wafer 9; and the control assembly 2
calculates the notch position thereof according to the edge
information of the silicon wafer 9, and controls rotation of the
rotating unit 7 according to the notch position to achieve the
orientation of the silicon wafer 9.
[0044] The control assembly 2 controls, according to the size of
the silicon wafer 9 and the requirement of the edge exposure
position of the silicon wafer 9, the synchronous bi-directional
motion assembly 4 to drive the pre-alignment optical assembly 3 and
the edge exposure assembly 5 to synchronously move towards or
opposite to each other relative to the silicon wafer 9 along the
first track 431 and the second track 432, so that the edge exposure
assembly 5 is aligned with the edge exposure position of the
silicon wafer 9. The control assembly 2 controls the edge exposure
assembly 5 on the synchronous bi-directional motion assembly 4 to
perform edge exposure processing according to the requirement of
the edge exposure.
[0045] In a preferred embodiment of the present application, edge
exposure, ring exposure, and segmented exposure of the silicon
wafer 9 are able to be realized, and the size of the exposure spot
is able to be adjusted. Specifically, edge exposure, ring exposure,
and segmented exposure of the silicon wafer 9 are able to be
realized by the exposure lens 51. The size of the exposure spot is
automatically switched by the diaphragm switching assembly 52.
[0046] Further, the foregoing silicon wafer processing device is
able to perform a pre-alignment and an edge exposure processing on
the silicon wafers 9 of different sizes. The sizes of the silicon
wafer 9 include, but are not limited to, 6 inches, 8 inches, and 12
inches. Specifically, as shown in FIG. 3, a workflow of the
pre-alignment and edge exposure on a silicon wafer using the
silicon wafer processing device according to an embodiment of the
present application. Specifically, the steps of performing a
pre-alignment and an edge exposure processing on the silicon wafers
9 of different sizes using the foregoing silicon wafer processing
device are as follows.
[0047] Step S1: controlling, by a control assembly 2 according to
the size of a silicon wafer 9, a synchronous bi-directional motion
assembly 4 to drive a pre-alignment optical assembly 3 and an edge
exposure assembly 5 to synchronously move towards or opposite to
each other relative to the silicon wafer 9, so as to move the
pre-alignment optical assembly 3 to a silicon wafer pre-alignment
position.
[0048] Step S2: collecting, by the control assembly 2, the
information generated by the pre-alignment optical assembly 3, and
controlling a lifting unit 6, a rotating unit 7, and a position
compensation unit 8 to perform a pre-alignment on the silicon wafer
9.
[0049] Step S3: controlling, by the control assembly 2 according to
the size of the silicon wafer 9 and the requirement of an edge
exposure position of the silicon wafer 9, the synchronous
bi-directional motion assembly 4 to drive the pre-alignment optical
assembly 3 and the edge exposure assembly 5 to synchronously move
towards or opposite to each other relative to the silicon wafer 9,
so as to move the edge exposure assembly 5 to the edge exposure
position of the silicon wafer.
[0050] Step S4: controlling, by the control assembly 2, the lifting
unit 6, the rotating unit 7, the position compensation unit 8, and
the edge exposure assembly 5 to perform an edge exposure processing
on the silicon wafer 9.
[0051] Preferably, in the above steps, if the size of the silicon
wafer 9 is 6 inches, the pre-alignment optical assembly 3 is
substantially 6 inches apart from the edge exposure assembly 5 when
the edge exposure processing is performed. If the size of the
silicon wafer 9 is 8 inches, the pre-alignment optical assembly 3
is substantially 8 inches apart from the edge exposure assembly 5
when the edge exposure processing is performed.
[0052] Step S5: upon completion of the exposure processing, if the
size of the replaced silicon wafer 9 changes, steps S1-S4 are
repeated. Specifically, for example, when the size of the silicon
wafer 9 changes from 6 inches to 8 inches, the left sliding block
41 and the right sliding block 42 synchronously move opposite to
each other along the first track 431 and the second track 432 by at
least 25 mm each, respectively, so that the pre-alignment optical
assembly 3 is 8 inches or more apart from the edge exposure
assembly 5. Then, the pre-alignment and the exposure are able to be
obtained by moving the left sliding block 41 and the right sliding
blocks 42 to drive the pre-alignment optical assembly 3 and the
edge exposure assembly 5 to synchronously move towards or opposite
to each other relative to the silicon wafer 9, and controlling the
movement of the wafer supporting unit.
[0053] Specifically, as described above, the step S2 includes:
[0054] The rotating stage 71 sucks the silicon wafer 9. The
rotating unit 7 drives the rotating stage 71 and the silicon wafer
9 to rotate. The pre-alignment optical assembly 3 collects the edge
information of the silicon wafer. The control assembly 2 calculates
the offset of the center of the silicon wafer 9 relative to the
center of the rotating stage 71 according to the edge information
of the silicon wafer 9, and determines whether the offset satisfies
the centering accuracy between the silicon wafer 9 and the rotating
stage 71.
[0055] If the offset does not satisfy the centering accuracy
between the silicon wafer 9 and the rotating stage 71, the rotating
stage 71 drives the silicon wafer 9 to rotate until a direction in
which a maximum value of the offset is located is aligned with the
motion direction of the position compensation unit 8, i.e. a
certain horizontal direction. The lifting unit 6 drives the
rotating stage 71 and the silicon wafer 9 to move along the
vertical direction to reach a transfer position of the positioning
stage 81. The rotating stage 71 releases the silicon wafer 9, the
positioning stage 81 sucks the silicon wafer 9, and the lifting
unit 6 continues to descend to drive the rotating stage 71 to move
to a lower transfer position. The control assembly 2 controls,
according to the offset of the center of the silicon wafer 9
relative to the center of the rotating stage 71, the position
compensation unit 8 to drive the positioning stage 82 to move in
the horizontal direction until the center of the silicon wafer 9
coincides with the center of the rotating stage 71. The lifting
unit 6 drives the rotating stage 72 to move up to the transfer
location, the positioning stage 82 releases the silicon wafer 9,
and the rotating stage 72 sucks the silicon wafer 9 to complete the
pre-alignment operation.
[0056] In another embodiment of the present application, as shown
in FIG. 4, a schematic structural diagram of a synchronous
bi-directional motion assembly according to another embodiment of
the present application. In this embodiment, the synchronous
bi-directional motion assembly 4 includes a linear guide assembly,
a driver, a rotating gear, a first rack, and a second rack. The
first rack and the second rack are distributed in parallel on both
sides of the rotating gear and mesh with the rotating gear. The
rotating gear is connected to the driver. The tooth direction of
the first rack is opposite to that of the second rack. The
pre-alignment optical assembly 3 is fixed on the first rack. The
edge exposure assembly 5 is fixed on the second rack. The driver
drives the rotating gear to rotate, so as to drive the first and
second racks to synchronously move towards or opposite to each
other along the first track 431 and the second track 432,
respectively, thereby adjusting the pre-alignment position of the
pre-alignment optical assembly 3 and the exposure position of the
edge exposure assembly 4.
[0057] Upon completion of the exposure of the silicon wafer 9, if
the size of the replaced silicon wafer 9 is different from that of
the previous one, it is necessary to readjust the position of the
pre-alignment optical assembly 3 and the position of the edge
exposure assembly 5. Specifically, when the size of the silicon
wafer 9 changes from 6 inches to 8 inches, the rotating gear
rotates anticlockwise, and the rotation circumference is at least
25 mm. Thus, the first rack and the second rack move in opposite
directions by at least 25 mm each, so that the pre-alignment
optical assembly 3 is 8 inches or more apart from the edge exposure
assembly 5, and the position adjustment is subsequently completed.
When the size of the silicon wafer 9 needs to be changed from 8
inches to 6 inches, the rotating gear rotates clockwise, and the
rotation circumference may be 25 mm. Thus, the first rack and the
second rack move towards each other by 25 mm each, so that the
pre-alignment optical assembly 3 is 6 inches apart from the edge
exposure assembly 5.
[0058] The present application does not impose any limitation on
the materials and sizes of the gears and racks in this
embodiment.
[0059] In summary, the silicon wafer processing device and method
provided in the present application arrange the pre-alignment
optical assembly and the edge exposure assembly on the synchronous
bi-directional motion assembly, thereby reducing the occupied space
of the device and saving the installation cost. The synchronous
bi-directional motion assembly, the rotating unit and the position
compensation unit that are arranged on the baseplate are controlled
by the control assembly, so as to reduce the operation complexity.
The synchronous bi-directional motion assembly is controlled to
drive the pre-alignment optical assembly and the edge exposure
assembly to simultaneously move, so that operations of the
pre-alignment and the edge exposure are able to be performed on
silicon wafers of different sizes, thereby saving the switching
time and improving the work efficiency.
[0060] The above are only preferred embodiments of the present
application and do not intended to limit the present application.
Any form of equivalent substitution or modification to the
technical solutions and technical contents disclosed in the present
application made by persons skilled in the art without departing
from the scope of the technical solutions of the present
application are contents within the technical solutions of the
invention, and fall within the protection scope of the present
application.
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