U.S. patent application number 16/519725 was filed with the patent office on 2020-03-05 for integrated circuits including multi-layer conducting lines.
This patent application is currently assigned to Samsung Electronics Co., Ltd.. The applicant listed for this patent is Samsung Electronics Co., Ltd.. Invention is credited to Tae-hyung Kim, Chan-Ho Lee.
Application Number | 20200075478 16/519725 |
Document ID | / |
Family ID | 69641655 |
Filed Date | 2020-03-05 |
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United States Patent
Application |
20200075478 |
Kind Code |
A1 |
Kim; Tae-hyung ; et
al. |
March 5, 2020 |
INTEGRATED CIRCUITS INCLUDING MULTI-LAYER CONDUCTING LINES
Abstract
An integrated circuit includes a plurality of layers stacked in
a first direction, a plurality of unit circuits at least partially
overlapping each other in a second direction that is perpendicular
to the first direction and configured to operate in parallel with
one another, control circuitry configured to generate a control
signal to control the plurality of unit circuits, and a multi-layer
conducting line configured to transfer the control signal from the
control circuitry to the plurality of unit circuits. The
multi-layer conducting line may be integrally formed in a wiring
layer and a via layer and extends in the second direction. The
wiring layer and the via layer may be adjacent to each other.
Inventors: |
Kim; Tae-hyung; (Yongin-si,
KR) ; Lee; Chan-Ho; (Hwaseong-si, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Samsung Electronics Co., Ltd. |
Suwon-si |
|
KR |
|
|
Assignee: |
Samsung Electronics Co.,
Ltd.
Suwon-si
KR
|
Family ID: |
69641655 |
Appl. No.: |
16/519725 |
Filed: |
July 23, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G02B 6/43 20130101; H01L
23/5283 20130101; G11C 5/02 20130101; H01L 25/0657 20130101; G11C
5/063 20130101; H01L 23/5222 20130101; H01L 21/76807 20130101 |
International
Class: |
H01L 23/522 20060101
H01L023/522; G11C 5/06 20060101 G11C005/06; G11C 5/02 20060101
G11C005/02; H01L 25/065 20060101 H01L025/065 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 31, 2018 |
KR |
10-2018-0104019 |
Mar 27, 2019 |
KR |
10-2019-0035178 |
Claims
1. An integrated circuit, comprising: a first wiring layer
including a plurality of first patterns; a first via layer
including a plurality of first vias, the first via layer adjacent
to the first wiring layer in a first direction; and a multi-layer
conducting line including a first portion and a second portion, the
first portion extending in a second direction perpendicular to the
first direction in the first wiring layer and the second portion
extending in the second direction in the first via layer, wherein
the first portion and the second portion are integrally formed with
each other.
2. The integrated circuit of claim 1, further comprising: a second
wiring layer including a plurality of second patterns, the second
wiring layer adjacent to the first via layer in the first
direction, wherein the multi-layer conducting line further includes
a third portion in the second wiring layer, the third portion
extending in the second direction by a length equal to a length of
the first portion in the second direction.
3. The integrated circuit of claim 2, wherein the first portion,
the second portion, and the third portion are integrally formed
with one another.
4. The integrated circuit of claim 2, wherein the multi-layer
conducting line further includes a barrier layer between the first
portion and the third portion.
5. The integrated circuit of claim 2, further comprising: a second
via layer including a plurality of second vias, the second via
layer adjacent to the second wiring layer in the first direction,
wherein the multi-layer conducting line further includes a fourth
portion in the second via layer, the fourth portion extending in
the second direction.
6. The integrated circuit of claim 5, wherein the first portion,
the second portion, the third portion, and the fourth portion are
integrally formed with one another.
7. The integrated circuit of claim 5, wherein the multi-layer
conducting line further includes a barrier layer between the second
portion and the third portion.
8. The integrated circuit of claim 1, further comprising: a second
wiring layer including a plurality of second patterns, the second
wiring layer adjacent to the first via layer in the first
direction; and an interlayer insulator between the multi-layer
conducting line and the second wiring layer.
9. The integrated circuit of claim 1, wherein the second portion
has a width that is equal to or less than a width of the first
portion.
10. The integrated circuit of claim 1, wherein the second portion
has a length that is equal to a length of the first portion.
11. The integrated circuit of claim 1, further comprising: a
plurality of unit circuits at least partially overlapping each
other in the second direction, the plurality of unit circuits
configured to operate in parallel with one another, wherein the
multi-layer conducting line is electrically connected to control
electrodes of transistors included in the plurality of unit
circuits.
12. The integrated circuit of claim 1, wherein the plurality of
first patterns are isolated from direct contact with each other by
at least a first distance, and the multi-layer conducting line is
isolated from direct contact with the plurality of first patterns
by a second distance, the second distance being greater than the
first distance.
13. The integrated circuit of claim 1, wherein the multi-layer
conducting line includes a same metal material in the first wiring
layer and in the first via layer.
14. The integrated circuit of claim 13, further comprising: a
barrier layer configured to reduce diffusion of the same metal
material at least partially in a surface of the multi-layer
conducting line when the multi-layer conducting line is formed.
15. An integrated circuit, comprising: a first wiring layer
including a plurality of first patterns; a first via layer
including a plurality of first vias, the first via layer adjacent
to the first wiring layer in a first direction; and a multi-layer
conducting line including a first portion, a second portion, and a
first barrier layer, the first portion extending in a second
direction perpendicular to the first direction in the first wiring
layer, the second portion extending in the second direction in the
first via layer, and the first barrier layer extending in the
second direction between the first portion and the second
portion.
16. The integrated circuit of claim 15, wherein the first barrier
layer is configured to reduce a material included in the first
portion and/or a material included in the second portion from
diffusing when the first portion and/or the second portion is
formed.
17. The integrated circuit of claim 15, further comprising: a
second wiring layer including a plurality of second patterns, the
second wiring layer adjacent to the first via layer in the first
direction, wherein the multi-layer conducting line further includes
a third portion extending in the second direction in the second
wiring layer by a length that is equal to a length of the first
portion in the second direction, and a second barrier layer
extending in the second direction between the second portion and
the third portion.
18. The integrated circuit of claim 17, wherein the second barrier
layer is configured to reduce a material included in the second
portion and/or a material included in the third portion from
diffusing, when the second portion and/or the third portion is
formed.
19. (canceled)
20. The integrated circuit of claim 15, wherein the second portion
has a length that is equal to a length of the first portion.
21. An integrated circuit comprising: a plurality of layers stacked
in a first direction; a plurality of unit circuits at least
partially overlapping each other in a second direction that is
perpendicular to the first direction, the plurality of unit
circuits being configured to operate in parallel with one another;
control circuitry configured to generate a control signal to
control the plurality of unit circuits; and a multi-layer
conducting line configured to transfer the control signal from the
control circuitry to the plurality of unit circuits, wherein the
multi-layer conducting line is integrally formed in a wiring layer
and a via layer and extends in the second direction, the wiring
layer and the via layer being adjacent to each other.
22.-25. (canceled)
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims the benefits of Korean Patent
Application No. 10-2018-0104019, filed on Aug. 31, 2018, and Korean
Patent Application No. 10-2019-0035178, filed on Mar. 27, 2019, in
the Korean Intellectual Property Office, the disclosures of each of
which are incorporated herein in their entirety by reference.
BACKGROUND
[0002] The inventive concepts relate to integrated circuits, and
more particularly, to integrated circuits including multi-layered
conducting lines.
[0003] As integrated circuits with high operating speeds have been
demanded, a signal delay occurring in wires of integrated circuits
has been considered a significant design factor. A wire
electrically connecting two or more devices with each other in an
integrated circuit may have an electrical resistance thereof (also
referred to herein as simply a "resistance" of the wire), and the
wire may generate a capacitance with a neighboring (e.g., adjacent)
wire. A signal delay may occur due to the resistance and
capacitance of the wires, and as the resistance and the capacitance
of the wires increase, the signal delay occurring in the wires may
also increase. Also, due to a miniaturization of semiconductor
processes, sizes of patterns included in wires and distances among
adjacent patterns may be reduced, and accordingly, a signal delay
occurring in one or more of the wires may become worse, and
moreover, an operating speed of an integrated circuit including the
wires may be reduced.
SUMMARY
[0004] The inventive concepts provide multi-layer conducting lines
configured to reduce a signal delay and integrated circuits of a
high integration degree and including the multi-layer conducting
lines.
[0005] According to some example embodiments of the inventive
concepts, an integrated circuit may include a first wiring layer
including a plurality of first patterns, a first via layer
including a plurality of first vias, the first via layer adjacent
to the first wiring layer in a first direction, and a multi-layer
conducting line including a first portion and a second portion, the
first portion extending in a second direction perpendicular to the
first direction in the first wiring layer and the second portion
extending in the second direction in the first via layer. The first
portion and the second portion may be integrally formed with each
other.
[0006] According to some example embodiments of the inventive
concepts, an integrated circuit may include a first wiring layer
including a plurality of first patterns, a first via layer
including a plurality of first vias, the first via layer adjacent
to the first wiring layer in a first direction, and a multi-layer
conducting line including a first portion, a second portion, and a
first barrier layer, the first portion extending in a second
direction perpendicular to the first direction in the first wiring
layer, the second portion extending in the second direction in the
first via layer, and the first barrier layer extending in the
second direction between the first portion and the second
portion.
[0007] According to some example embodiments of the inventive
concepts, an integrated circuit may include a plurality of layers
stacked in a first direction, a plurality of unit circuits at least
partially overlapping each other in a second direction that is
perpendicular to the first direction and configured to operate in
parallel with one another, control circuitry configured to generate
a control signal to control the plurality of unit circuits, and a
multi-layer conducting line configured to transfer the control
signal from the control circuitry to the plurality of unit
circuits. The multi-layer conducting line may be integrally formed
in a wiring layer and a via layer and extends in the second
direction. The wiring layer and the via layer may be adjacent to
each other.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Some example embodiments of the inventive concepts will be
more clearly understood from the following detailed description
taken in conjunction with the accompanying drawings in which:
[0009] FIG. 1 is a diagram of an integrated circuit according to
some example embodiments;
[0010] FIG. 2 is a diagram showing a layout of an integrated
circuit according to some example embodiments;
[0011] FIGS. 3A and 3B are diagrams showing examples of multi-layer
conducting lines according to some example embodiments;
[0012] FIG. 4 is a diagram illustrating processes of forming
multi-layer conducting line according to some example
embodiments;
[0013] FIGS. 5A and 5B are diagrams showing examples of multi-layer
conducting lines according to some example embodiments;
[0014] FIGS. 6A, 6B, 6C, 6D, and 6E are diagrams showing examples
of multi-layer conducting lines according to some example
embodiments;
[0015] FIGS. 7A and 7B are diagrams showing examples of multi-layer
conducting lines according to some example embodiments;
[0016] FIGS. 8A and 8B are diagrams showing examples of multi-layer
conducting lines according to some example embodiments;
[0017] FIG. 9 is a block diagram of a memory device according to
some example embodiments;
[0018] FIG. 10 is a diagram partially showing a layout of the
memory device of FIG. 9, according to some example embodiments;
[0019] FIG. 11 is a block diagram of an image sensor according to
some example embodiments;
[0020] FIG. 12 is a block diagram of a display apparatus according
to some example embodiments; and
[0021] FIG. 13 is a block diagram of a system-on-chip (SoC)
according to some example embodiments.
DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS
[0022] FIG. 1 is a diagram of an integrated circuit 10 according to
some example embodiments. In detail, FIG. 1 is a block diagram of
the integrated circuit 10, and additionally shows some conducting
lines 14 and 16 included in a layout of the integrated circuit 10.
A Z-axis direction as used herein is a direction in which a
plurality of layers are stacked in a semiconductor process for
manufacturing the integrated circuit 10, and may be referred to as
a first direction or a vertical direction, and an X-axis direction
and a Y-axis direction may be respectively referred to as a second
direction and a third direction. An element disposed in the +Z-axis
direction as compared with another element may be considered to be
located on another element, and an element disposed in the -Z-axis
direction as compared with another element may be considered to be
located under another element. Also, among surfaces of an element,
a surface exposed in the +Z-axis direction may be referred to as an
upper surface, a surface exposed in the -Z-axis direction may be
referred to as a lower surface, and a surface exposed in the X-axis
direction or the Y-axis direction may be referred to as a side
surface. Unless otherwise defined, a length of an element may
denote a length in an extending direction, and a width of an
element may denote a length in a direction perpendicular to the
extending direction. Also, a height of an element may denote a
length in the Z-axis direction. Accompanying drawings showing a
layout may denote only some of layers for convenience of
description.
[0023] The integrated circuit 10, also referred to herein as
"integrated circuitry", may denote an arbitrary device manufactured
through a semiconductor process. In some example embodiments, the
integrated circuit 10 may be a memory device including a plurality
of memory cells, a processor including at least one core, a sensor
for sensing external signals, or a device including a plurality of
functional blocks, e.g., a system-on-chip (SoC). As shown in FIG.
1, the integrated circuit 10 may include a control circuit 12 (also
referred to herein as "control circuitry") and a plurality of unit
circuits (also referred to herein as "unit circuitries") U1, . . .
, Un (n is an integer greater than 1), and may additionally include
a plurality of conducting lines 14 and 16. It will be understood
that, as used herein, a conducting line (e.g., each conducting line
of the plurality of conducting lines 14 and 16) may be referred to
as a "wire" that is electrically conductive (e.g., is configured to
conduct electricity therethrough between opposite ends
thereof).
[0024] The plurality of unit circuits U1, . . . , Un may have the
same structure as one another, and may be configured to operate in
parallel with one another. As a non-limiting example, as described
later with reference to FIG. 9, the plurality of unit circuits U1,
. . . , Un may be memory cells storing data in a memory device
(e.g., a plurality of memory cells each configured to store at
least one bit of data), as described later with reference to FIG.
11, the plurality of unit circuits U1, . . . , Un may be pixels
sensing light in an image sensor (e.g., a plurality of pixels each
configured to sense incident light), and as described later with
reference to FIG. 12, the plurality of unit circuits U1, . . . , Un
may be pixels emitting light in a display apparatus (e.g., a
plurality of pixels each configured to emit light). Parallel
operations of the plurality of unit circuits U1, . . . , Un may be
demanded to be performed simultaneously, and when there is a large
difference between time points at which the parallel operations are
performed, an operating speed of the integrated circuit 10 may be
reduced, and further, a malfunction may be caused. As shown in FIG.
1, and with reference to at least FIG. 2, the plurality of unit
circuits U1, . . . , Un may be disposed in the X-axis direction
(e.g., the second direction as described below) such that the
plurality of unit circuits U1, . . . , Un may be understood to at
least partially overlap with each other in the X-axis
direction.
[0025] The control circuit 12, which may be referred to herein as
"control circuitry," may include processing circuitry such as
hardware including logic circuits; a hardware/software combination
such as a processor executing software; or a combination thereof.
For example, the control circuit 12 more specifically may include,
but is not limited to, a central processing unit (CPU), an
arithmetic logic unit (ALU), a digital signal processor, a
microcomputer, a field programmable gate array (FPGA), a
System-on-Chip (SoC), a programmable logic unit, a microprocessor,
application-specific integrated circuit (ASIC), etc. The control
circuit 12 may generate a control signal CTR for controlling the
plurality of unit circuits U1, . . . , Un. In some example
embodiments, the control circuit 12 may generate the control signal
CTR having a variable voltage and/or current for controlling
operations of the plurality of unit circuits U1, . . . , Un. As
shown in FIG. 1, the plurality of unit circuits U1, . . . , Un may
be disposed ("located") adjacent to one another, and the control
circuit 12 may be disposed adjacent to a side of the plurality of
unit circuits U1, . . . , Un. Also, the plurality of unit circuits
U1, . . . , Un may be electrically connected to a first conducting
line 14 that extends in the X-axis direction (or the second
direction), and may receive the control signal CTR via the first
conducting line 14. Due to the delay of the control signal CTR in
the first conducting line 14, the control signal CTR generated by
the control circuit 12 may firstly reach the first unit circuit U1
and may finally reach the n-th unit circuit Un. Accordingly, the
parallel operations of the first to n-th unit circuits U1 and Un
may be respectively performed at different time points.
[0026] As shown in FIG. 1, the delay of control signal CTR
occurring in the first conducting line 14 may depend upon a
resistance RP of the first conducting line 14 and a capacitance CP
formed by the first conducting line 14 and the second conducting
line 16 adjacent to the first conducting line 14. The resistance RP
may be proportional to a length L of the first conducting line 14
and inversely proportional to a width W of the first conducting
line 14, and the capacitance CP may be inversely proportional to a
distance S between the first conducting line 14 and the second
conducting line 16. Accordingly, in order to reduce the delay of
the control signal CTR occurring in the first conducting line 14,
the first conducting line 14 may be required to have a relatively
less length L and a relatively greater width W, and the first
conducting line 14 and the second conducting line 16 may be
required to have a relatively greater distance S. However,
reduction of the length L of the first conducting line 14 may be
restricted due to the number and sizes of the plurality of unit
circuits U1, . . . , Un, and an increase in the width W and the
distance S may be restricted due to a spatial limitation of the
integrated circuit 10.
[0027] As described below with reference to accompanying drawings,
the first conducting line 14 transferring the control signal CTR to
the plurality of unit circuits U1, . . . , Un may include
multi-layer conducting lines, and accordingly, the first conducting
line 14 may maintain or increase the distance S to the adjacent
second conducting line 16 while having a lower resistance RP.
Accordingly, the first conducting line 14 may provide reduced
delay, and a difference between the time points at which the
parallel operations of the first unit pixel U1 and the n-th unit
pixel Un are performed may be greatly reduced. In addition, in some
example embodiments, due to the reduced width W of the first
conducting line 14, the second conducting line 16 may have an
increased width, and accordingly, an operating speed and/or
operating reliability of the integrated circuit 10 may be
improved.
[0028] FIG. 2 is a diagram showing a layout of an integrated
circuit 20 according to some example embodiments. In detail, FIG. 2
partially shows a M2 layer, a V2 layer, and a M3 layer from among a
plurality of layers included in a layout of the integrated circuit
20. As described above with reference to FIG. 1, the integrated
circuit 20 of FIG. 2 may include multi-layered conducting lines ML
for transferring a control signal to a plurality of unit circuits
operating in parallel with one another. For convenience of
description, FIG. 2 only shows one multi-layer conducting line ML
and some other patterns included in the layout of the integrated
circuit 20.
[0029] The integrated circuit 20 may include a plurality of wiring
layers and a plurality of via layers in a plurality of layers
stacked in the Z-axis direction (or the first direction).
Accordingly, as shown in FIG. 2, the integrated circuit 20 may
include a plurality of layers stacked in the Z-axis direction. The
integrated circuit 20 may further include the plurality of unit
circuits U1, . . . , Un shown in FIG. 1, where the plurality of
unit circuits are disposed in the X-axis direction such that the
plurality of unit circuits U1, . . . , Un may be understood to at
least partially overlap with each other in the X-axis direction.
The integrated circuit 20 may further include the control circuit
12 shown in FIG. 1 (also referred to herein as "control
circuitry"), where the control circuit 12 is configured to generate
a control signal to control the plurality of unit circuits U1, . .
. , Un. In some example embodiments, the multi-layer conducting
line ML is configured to transfer the control signal from the
control circuit 12 to the plurality of unit circuit U1, . . . , Un.
As further described below with reference to at least FIGS. 9-12,
it will be understood that the multi-layer conducting line ML may
be electrically connected to control electrodes of transistors
included in the plurality of unit circuits U1, . . . , Un. As
described further below, the multi-layer conducting line ML may be
integrally formed in a wiring layer (e.g., M2 layer) and a via
layer (e.g., V2 layer) and extends in the X-axis direction, where
the wiring layer and the via layer are adjacent to each other. The
wiring layer may include a plurality of patterns and the via layer
may include a plurality of vias. In some example embodiments, as
shown in FIG. 2, the M2 layer as a wiring layer (e.g., a first
wiring layer) may include a first pattern M21 and a second pattern
M22 extending in the Y-axis direction and the M3 layer as a wiring
layer (e.g., a second wiring layer) may include a third pattern M31
and a fourth pattern M32 extending in the X-axis direction. Also, a
first via V21 and a second via V22 may be provided in the V2 layer,
that is, the via layer. As shown, the V2 layer (via layer) may be
adjacent to the M2 layer (first wiring layer) in the Z-axis
direction (or a first direction). As shown, the M3 layer (second
wiring layer) may be adjacent to the V2 layer (via layer) in the
Z-axis direction (or a first direction). In addition, the first via
V21 may be connected to the first pattern M21 and a third pattern
M31, and the second via V22 may be connected to the second pattern
M22 and a fourth pattern M32. The patterns and the vias may be
spaced from one another (e.g., isolated from direct contact with
each other) by a minimum distance or greater, wherein the minimum
distance is determined based on the semiconductor process for
manufacturing the integrated circuit 20. In some example
embodiments, the first and second patterns M21 and M22 may be
separate from each other (e.g., isolated from direct contact with
each other) by at least a first distance S1. In some example
embodiments, as shown in FIG. 2, a first distance S1 between the
first pattern M21 and the second pattern M22 in the X-axis
direction in the M2 layer and a second distance S2 between the
third pattern M31 and the fourth pattern M32 in the Y-axis
direction in the M3 layer may be equal to or greater than the
minimum distance determined according to the semiconductor
process.
[0030] The multi-layer conducting line ML may extend in the X-axis
direction (or the second direction perpendicular to the Z-axis
direction) through two or more adjacent layers. In some example
embodiments, the multi-layer conducting line ML may be isolated
from direct contact with the first and second patterns M21 and M22
of the M2 layer by a distance S2a that is greater than the first
distance S1. In some example embodiments, as shown in FIG. 2, the
multi-layer conducting line ML may include a first portion P1
extending in the X-axis direction in the M2 layer, a second portion
P2 extending in the X-axis direction in the V2 layer, and a third
portion P3 extending in the X-axis direction in the M3 layer.
Although the multi-layer conducting line ML extend in the X-axis
direction in three successive layers in FIG. 2, as described later
with reference to FIGS. 3A and 3B, etc., the multi-layer conducting
line ML may extend in the X-axis direction in two adjacent layers
(e.g., layers M2/V2 or layers V2/M3), or as described later with
reference to FIGS. 8A and 8B, the multi-layer conducting line ML
may extend in the X-axis direction in four or more successive
layers. Accordingly, the multi-layer conducting line ML may have a
reduced resistance, as compared with a structure extending in a
single layer and a structure in which extensions are connected by
vias in two wiring layers. As shown in FIG. 2, the multi-layer
conducting line ML may have a length L in the X-axis direction, a
width W in the Y-axis direction, and a height H in the Z-axis
direction. As shown in FIG. 2, the third portion P3 may extend in
the X-axis direction (or second direction) by a length L that is
equal to a length L of the first portion P1. As shown in FIG. 2,
the second portion P2 may have a length L that is equal to a length
L of the first portion P1.
[0031] Heights of the layers M2, V2, and M3 shown in FIG. 2, that
is, the lengths in the Z-axis direction, are examples, and may be
different from those examples of FIG. 2. Also, one or more
embodiments will be described based on the layers M2, V2, and M3
hereinafter, but it will be understood that multi-layer conducting
lines according to some example embodiments may be also included in
other wiring layers and via layers.
[0032] FIGS. 3A and 3B are diagrams showing examples of multi-layer
conducting lines 30a and 30b according to some example embodiments.
In detail, FIGS. 3A and 3B show the multi-layer conducting lines
30a and 30b, respectively, which are integrally formed in two
adjacent layers and have a length L in the X-axis direction.
Hereinafter, redundant descriptions about FIGS. 3A and 3B will be
omitted.
[0033] Referring to FIG. 3A, the multi-layer conducting line 30a
may include the first portion P1 extending in the X-axis direction
in the M3 layer and the second portion P2 extending in the X-axis
direction in the V2 layer, and the first portion P1 and the second
portion P2 may be integrally formed with each other. Accordingly,
it will be understood that the multi-layer conducting line 30a may
be integrally formed in a wiring layer (e.g., M3 layer) and a via
layer (e.g., V2 layer) and extends in the X-axis direction, where
the wiring layer and the via layer are adjacent to each other. In
the specification herein, `elements formed integrally with each
other` may denote that the elements are continuously formed by
using a same material, and the elements that are integrally formed
with each other may be denoted by a single outline in the drawings.
In some example embodiments, as described later with reference to
FIGS. 4, 5A, and 5B, the first portion P1 in the M3 layer and the
second portion P2 in the V2 layer that are surrounded by a single
outline in FIG. 3A may include the same material, e.g., metal such
as aluminum (Al), copper (Cu), etc., and a boundary between the
first portion P1 and the second portion P2 (or boundary between the
M3 layer and the V2 layer) may also include the same material. In
some example embodiments, elements that are integrally formed with
each other may comprise a single, uniform part instead of separate
elements coupled together. In some example embodiments, unlike the
example of FIG. 3A, portions that are not formed integrally with
each other may include a different material (e.g., an insulator, a
barrier wall, etc.) disposed therebetween. In the specification, it
will be described that the multi-layer conducting line includes the
metal such as Al or Cu, but the multi-layer conducting line may
include a conductive material different from the metal.
[0034] Due to the first portion P1 and the second portion P2 that
are provided integrally with each other, the multi-layer conducting
line 30a may have a reduced resistance. As described above with
reference to FIG. 1, since it is restricted to increase the width
of the conducting line due to the spatial limitation, it may be
considered to use the conducting line including patterns that
extend in the same direction in two or more wiring layers and
connected to one another through vias unlike the multi-layer
conducting line 30a of FIG. 3A, in order to reduce the resistance
of the conducting line. However, in the above conducting line, the
reduction of the resistance of the conducting line may be
restricted due to a resistance provided by the via in the Z-axis
direction and a resistance of a barrier layer between patterns of
the wiring layer and vias, and moreover, the reduction of the
resistance may be further diminished as the semiconductor process
becomes miniaturized. In some example embodiments, as shown in FIG.
3A, the multi-layer conducting line 30a formed integrally
throughout two or more adjacent layers may be free from the
influence of the resistance of the via and the resistance of the
barrier layer, and may also have a reduced resistance even with the
miniaturized semiconductor process.
[0035] As shown in FIG. 3A, an interlayer insulator IL may be
disposed on a lower surface of the multi-layer conducting line 30a
and thus may be between the multi-layer conducting line 30a and the
M2 layer. The interlayer insulator IL may insulate the multi-layer
conducting line 30a (or the second portion P2) from the other
patterns formed in the M2 layer. As described above with reference
to FIG. 2, the via layer such as the V2 layer may include the vias
for connecting the patterns of adjacent wiring layers (that is, the
M2 layer and the M3 layer) to one another, and thus, the interlayer
insulator IL may be disposed to insulate the second portion P2
extending in the X-axis direction in the V2 layer from the patterns
in the M2 layer that is adjacent to the V2 layer, unlike the vias
formed in the via layer. In some example embodiments, the
interlayer insulator IL may be referred to as an interlayer
insulator film, an interlayer dielectric, etc.
[0036] Referring to FIG. 3B, the multi-layer conducting line 30b
may include the first portion P1 extending in the X-axis direction
in the M2 layer and the second portion P2 extending in the X-axis
direction in the V2 layer, and the first portion P1 and the second
portion P2 may be integrally formed with each other. In some
example embodiments, the first portion P1 in the M2 layer and the
second portion P2 in the V2 layer included within the single
outline of FIG. 3B may include the same material, e.g., metal such
as Cu, and a boundary between the first portion P1 and the second
portion P2 (or boundary between the M2 layer and the V2 layer) may
also include the same metal.
[0037] As shown in FIG. 3B, an interlayer insulator IL may be
disposed on an upper surface of the multi-layer conducting line 30b
and thus may be between the multi-layer conducting line 30b and the
M3 layer. As described above, unlike the vias for connecting the
patterns in the adjacent M2 layer and the M3 layer to one another,
the interlayer insulator IL may be disposed to insulate the second
portion P2 extending in the X-axis direction in the V2 layer from
the patterns in the M3 layer that is adjacent to the V2 layer.
Accordingly, the patterns disposed in the M3 layer on the
multi-layer conducting line 30b may be insulated from the
multi-layer conducting line 30b.
[0038] FIG. 4 is a diagram illustrating processes of forming the
multi-layer conducting line 30a according to some example
embodiments. In detail, FIG. 4 sequentially shows cross-sections
taken along a plane perpendicular to a direction in which the
multi-layer conducting line 30a extends, that is, the X-axis
direction, according to processes of forming the multi-layer
conducting line 30a of FIG. 3A. Hereinafter, FIG. 4 will be
described with reference to FIG. 3A.
[0039] In some example embodiments, the multi-layer conducting line
30a may be formed by a damascene process. The damascene process may
denote a technique that finishes forming patterns by making a space
through an etching, filling the space with a material for forming
the patterns, and then polishing the patterns. In particular, a
technique of etching simultaneously two adjacent layers, e.g., the
via layer and the wiring layer, filling the space with metal, and
polishing the space to form the vias and patterns at the same time
may be referred to as a dual damascene process.
[0040] Referring to FIG. 4, in operation S41, an operation of
partially etching the V2 layer and the M3 layer may be performed.
In some example embodiments, the V2 layer and the M3 layer may be
partially etched according to the length L and the width W of the
multi-layer conducting line 30a. Next, in operation S42, an
operation of forming a barrier layer may be performed. The barrier
layer may be configured to reduce or prevent the metal forming the
multi-layer conducting line 30a, oxygen, or moisture from diffusing
to outside, and accordingly, the interlayer insulator between the
V2 layer and the M3 layer, as well as the insulator included in the
V2 layer and the M3 layer, may be protected. In some example
embodiments, the barrier layer may include a conductive material,
in some example embodiments, Ti/TiN, Ta/TaN, etc., and may be
formed by a physical vapor deposition (PVD) method. Also, in some
example embodiments, a seed layer for filling the material may be
formed after forming the barrier layer, and herein, the seed layer
may be considered to be included in the barrier layer. In some
example embodiments, when the multi-layer conducting line 30a
includes Cu, a seed layer for filling Cu in an electroplating
method may be formed by the PVD method.
[0041] In operation S43, an operation of filling metal may be
performed. In some example embodiments, as described above, the
seed layer may be disposed on the barrier layer, and the operation
of filling metal material in the electroplating method may be
performed. In operation S44, a polishing operation may be
performed. In some example embodiments, as shown in operation S43
of FIG. 4, the metal material may be formed on the M3 layer in
operation S43, the barrier layer, as well as the metal on the M3
layer, may be removed by the polishing operation such as chemical
mechanical polishing (CMP), and then, an interlayer insulating film
may be formed. Accordingly, as shown in operation S44 of FIG. 4,
the multi-layer conducting line 30a may include the first portion
P1 extending in the X-axis direction in the M3 layer and the second
portion P2 extending in the X-axis direction in the V2 layer, and
the first portion P1 and the second portion P2 may be integrally
formed with each other. In some example embodiments, as shown in
FIG. 4, the first portion P1 and the second portion P2 may have
substantially the same width W, and as described later with
reference to FIGS. 5A and 5B, the first portion P1 and the second
portion P2 may have different widths from each other. As shown in
FIG. 4, the barrier layer may be at least partially in a surface of
the multi-layer conducting line when the multi-layer conducting
line is formed.
[0042] FIGS. 5A and 5B are diagrams showing examples of multi-layer
conducting lines according to some example embodiments. In detail,
FIG. 5A shows an example of a cross-section of the multi-layer
conducting line 30a taken along a plane perpendicular to the X-axis
direction, in which the multi-layer conducting line 30a of FIG. 3A
extends, and FIG. 5B shows an example of a cross-section of the
multi-layer conducting line 30b taken along a plane perpendicular
to the X-axis direction, in which the multi-layer conducting line
30b of FIG. 3B extends. Hereinafter, redundant descriptions about
FIGS. 5A and 5B will be omitted.
[0043] Referring to FIG. 5A, the multi-layer conducting line 30a
may include the first portion P1 extending in the X-axis direction
in the M3 layer and the second portion P2 extending in the X-axis
direction in the V2 layer, and the first portion P1 and the second
portion P2 may have different widths, that is, lengths in the
Y-axis direction, from each other. In some example embodiments, as
shown in FIG. 5A, the first portion P1, that is, an upper portion
of the multi-layer conducting line 30a, has a first width W1, and
the second portion P2, that is, a lower portion of the multi-layer
conducting line 30a, may have a second width W2. The second width
W2 may be less than the first width W1. Also, in some example
embodiments, side surfaces of the first portion P1 and the second
portion P2 may be inclined surfaces that are not in parallel with
the Z-axis direction, as shown in FIG. 5A.
[0044] Similarly, referring to FIG. 5B, the multi-layer conducting
line 30b may include the first portion P1 extending in the X-axis
direction in the M2 layer and the second portion P2 extending in
the X-axis direction in the V2 layer, and the first portion P1 and
the second portion P2 may have different widths, that is, lengths
in the Y-axis direction, from each other. In some example
embodiments, as shown in FIG. 5B, the second portion P2, that is,
an upper portion of the multi-layer conducting line 30b, may have
the second width W2, and the first portion P1, that is, a lower
portion of the multi-layer conducting line 30b, may have the first
width W1. The first width W1 may be less than the second width W2.
Also, in some example embodiments, side surfaces of the first
portion P1 and the second portion P2 may be inclined surfaces that
are not in parallel with the Z-axis direction, as shown in FIG.
5B.
[0045] FIGS. 6A, 6B, 6C, 6D, and 6E are diagrams showing examples
of multi-layer conducting lines 60a to 60e according to some
example embodiments. In detail, FIGS. 6A to 6E show the multi-layer
conducting lines 60a, 60b, 60c, 60d, and 60e each including
portions that have a length L in the X-axis direction and extend
together in the X-axis direction respectively in three successive
layers. It would be appreciated from FIGS. 6A to 6E that the
multi-layer conducting lines as shown in FIGS. 6A to 6E having
various structures may be formed according to the semiconductor
process, and multi-layer conducting lines including the portions
extending together in three successive layers in a different
structure from those of FIGS. 6A to 6E may be implemented.
Hereinafter, redundant descriptions about FIGS. 6A to 6E will be
omitted.
[0046] Referring to FIG. 6A, the multi-layer conducting line 60a
may include the first portion P1 extending in the X-axis direction
in the M3 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, and a third portion P3 extending in the
X-axis direction in the M2 layer. The first portion P1, the second
portion P2, and the third portion P3 may be integrally formed with
one another. As described above with reference to FIG. 3A, the
first portion P1, the second portion P2, and the third portion P3
formed integrally with one another may include the same material,
e.g., metal, and boundaries among the first portion P1, the second
portion P2, and the third portion P3 may include the same metal
material. In some example embodiments, the multi-layer conducting
line 60a may be formed by the damascene process, as described above
with reference to FIG. 4.
[0047] Referring to FIG. 6B, the multi-layer conducting line 60b
may include the first portion P1 extending in the X-axis direction
in the M3 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, and a third portion P3 extending in the
X-axis direction in the M2 layer. The first portion P1 and the
second portion P2 may be integrally formed with each another. That
is, as shown in FIG. 6B, the first portion P1 and the second
portion P2 on an upper portion of the multi-layer conducting line
60b within a single outline may be formed integrally with each
other, and the third portion P3 within another single outline on a
lower portion of the multi-layer conducting line 60b may not be
formed integrally with the first portion P1 and the second portion
P2. In some example embodiments, a different material, e.g., a
barrier layer, may be disposed between the second portion P2 and
the third portion P3 in the multi-layer conducting line 60b. In
some example embodiments, as compared with a case, in which the
first portion P1 in the M3 layer and the third portion P3 in the M2
layer are connected to each other via at least one via in the V2
layer instead of the second portion P2 in the V2 layer extending in
the X-axis direction unlike the example of FIG. 6B, the multi-layer
conducting line 60b of FIG. 6B may have a reduced resistance due to
a barrier layer omitted between the V2 layer and the M3 layer, and
due to the second portion P2 extending in the X-axis direction.
[0048] Referring to FIG. 6C, the multi-layer conducting line 60c
may include the first portion P1 extending in the X-axis direction
in the M2 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, and a third portion P3 extending in the
X-axis direction in the M3 layer. The first portion P1 and the
second portion P2 may be integrally formed with each another. That
is, as shown in FIG. 6C, the first portion P1 and the second
portion P2 on a lower portion of the multi-layer conducting line
60c within a single outline may be formed integrally with each
other, and the third portion P3 within another single outline on an
upper portion of the multi-layer conducting line 60c may not be
formed integrally with the first portion P1 and the second portion
P2. In some example embodiments, a different material, e.g., a
barrier layer, may be disposed between the second portion P2 and
the third portion P3 in the multi-layer conducting line 60c. In
some example embodiments, as compared with a case, in which the
first portion P1 in the M2 layer and the third portion P3 in the M3
layer are connected to each other through at least one via in the
V2 layer instead of the second portion P2 in the V2 layer extending
in the X-axis direction unlike the example of FIG. 6C, the
multi-layer conducting line 60c of FIG. 6C may have a reduced
resistance due to a barrier layer omitted between the V2 layer and
the M2 layer, and due to the second portion P2 extending in the
X-axis direction.
[0049] Referring to FIG. 6D, the multi-layer conducting line 60d
may include the first portion P1 extending in the X-axis direction
in the M3 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, and a third portion P3 extending in the
X-axis direction in the M2 layer. The first portion P1, the second
portion P2, and the third portion P3 may be separately formed from
one another. That is, as shown in FIG. 6D, the first portion P1,
the second portion P2, and the third portion P3 that are included
respectively by a single outline in the multi-layer conducting line
60d may not be formed integrally with one another. Accordingly, a
different material such as a barrier layer may be disposed between
the first portion P1 and the second portion P2 of the multi-layer
conducting line 60d and may extend in the X-axis direction
therebetween, and a different material such as a barrier layer may
be also disposed between the second portion P2 and the third
portion P3 and may extend in the X-axis direction therebetween. The
barrier layer between the second portion P2 and the third portion
P3 may be a separate barrier layer from the barrier layer between
the first portion P1 and the second portion P2, or the two barrier
layers may be part of a single, uniform layer. In some example
embodiments, as compared with a case, in which the first portion P1
in the M3 layer and the third portion P3 in the M2 layer are
connected to each other through at least one via in the V2 layer
instead of the second portion P2 in the V2 layer extending in the
X-axis direction unlike the example of FIG. 6D, the multi-layer
conducting line 60d of FIG. 6D may have a reduced resistance due to
the second portion P2 extending in the X-axis direction. The
barrier layer between the second portion P2 and the third portion
P3 may be configured to reduce or prevent a material included in
the third portion P3 and/or a material included in the second
portion P2 from diffusing when the third portion P3 and/or the
second portion P2 is formed. The barrier layer between the first
portion P1 and the second portion P2 may be configured to reduce or
prevent a material included in the first portion P1 and/or a
material included in the second portion P2 from diffusing when the
first portion P1 and/or the second portion P2 is formed.
[0050] Referring to FIG. 6E, the multi-layer conducting line 60e
may include the first portion P1 extending in the X-axis direction
in the M3 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, and the third portion P3 extending in
the X-axis direction in the M2 layer. Similarly to the multi-layer
conducting line 60d of FIG. 6D, the first portion P1, the second
portion P2, and the third portion P3 of FIG. 6E may be separately
formed from each other, and at least two of the first portion P1,
the second portion P2, and the third portion P3 may have different
lengths from each other. In some example embodiments, as shown in
FIG. 6E, the first portion P1 of the M3 layer and the third portion
P3 of the M2 layer may have the length L that is the same as that
of the multi-layer conducting line 60e, whereas the second portion
P2 of the V2 layer may have a length L' that is less than the
length L of the multi-layer conducting line 60e.
[0051] FIGS. 7A and 7B are diagrams showing examples of the
multi-layer conducting lines 60a and 60b according to some example
embodiments. In detail, FIG. 7A shows an example of a cross-section
taken along a plane perpendicular to the X-axis direction in which
the multi-layer conducting line 60a of FIG. 6A extends, and FIG. 7B
shows an example of a cross-section taken along a plane
perpendicular to the X-axis direction in which the multi-layer
conducting line 60b of FIG. 6B extends. Hereinafter, redundant
descriptions about FIGS. 7A and 7B will be omitted.
[0052] Referring to FIG. 7A, the multi-layer conducting line 60a
may include the first portion P1 extending in the X-axis direction
in the M3 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, and the third portion P3 extending in
the X-axis direction in the M2 layer. As described above with
reference to FIG. 6A, the first portion P1, the second portion P2,
and the third portion P3 of the multi-layer conducting line 60a may
be integrally formed with one another. Accordingly, the first
portion P1, the second portion P2, and the third portion P3 in the
multi-layer conducting line 60a may include the same material,
e.g., metal, and boundaries among the first portion P1, the second
portion P2, and the third portion P3 may include the same metal. In
some example embodiments, the first portion P1, the second portion
P2, and the third portion P3 of the multi-layer conducting line 60a
may have substantially the same widths W as shown in FIG. 7A.
[0053] Referring to FIG. 7B, the multi-layer conducting line 60b
may include the first portion P1 extending in the X-axis direction
in the M3 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, and the third portion P3 extending in
the X-axis direction in the M2 layer. As described above with
reference to FIG. 6B, the first portion P1 and the second portion
P2 may be integrally formed with each other, and the third portion
P3 may not be integrally formed with the first portion P1 and the
second portion P2. Accordingly, as shown in FIG. 7B, the boundary
between the first portion P1 and the second portion P2 in the upper
portion of the multi-layer conducting line 60b may include the same
metal as those of the first and second portions P1 and P2, and on
the contrary, a barrier layer may be disposed on the boundary
between the second portion P2 and the third portion P3 in the lower
portion of the multi-layer conducting line 60b. Accordingly, as
shown in FIG. 7B, a multi-layer conducting line 60b may include a
barrier layer 61b and/or 62b between the first portion P1 and the
third portion P3. In some example embodiments, the barrier layer
61b and/or 62b, which may each at least partially extend in the
X-axis direction (or second direction) between the second portion
P2 and the third portion P3, may be configured to reduce or prevent
a material included in the third portion P3 and/or a material
included in the second portion P2 from diffusing when the third
portion P3 and/or the second portion P2 is formed.
[0054] In some example embodiments, the first portion P1, the
second portion P2, and the third portion P3 of the multi-layer
conducting line 60b may have different widths from one another. In
some example embodiments, as shown in FIG. 7B, the first portion P1
of the M3 layer and the third portion P3 of the M2 layer may
approximately have the first width W1, and the second portion P2 of
the V2 layer may have the second width W2. The second width W2 may
be less than the first width W1. Lengths of the portions included
in the multi-layer conducting line may be determined according to
the semiconductor process.
[0055] FIGS. 8A and 8B are diagrams showing examples of multi-layer
conducting lines 80a and 80b according to some example embodiments.
In detail, FIGS. 8A and 8B show the multi-layer conducting lines
80a and 80b each including portions that have a length L in the
X-axis direction and extend together in the X-axis direction
respectively in four successive layers. It would be appreciated
from FIGS. 8A and 8B that the multi-layer conducting lines as shown
in FIGS. 8A and 8B having the structures may be formed according to
the semiconductor process, and multi-layer conducting lines
including the portions extending together in three successive four
or more layers in a different structure from those of FIGS. 8A and
8B may be implemented. Hereinafter, redundant descriptions about
FIGS. 8A and 8B will be omitted.
[0056] Referring generally to both FIGS. 8A and 8B, an integrated
circuit (e.g., the integrated circuit as shown in FIG. 2) may
further include a V3 layer (e.g., a second via layer) that includes
a plurality of second vias, where V3 layer is adjacent to the M3
layer (or second wiring layer) in the Z-axis direction (or first
direction), such that the M3 layer is between the V3 layer and the
V2 layer. Referring to FIG. 8A, the multi-layer conducting line 80a
may include the first portion P1 extending in the X-axis direction
in the M2 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, the third portion P3 extending in the
X-axis direction in the M3 layer, and the fourth portion P4
extending in the X-axis direction (or second direction) in the V3
layer. As shown in FIG. 8A, the first portion P1, the second
portion P2, the third portion P3, and the fourth portion P4 may be
integrally formed with one another, and in some example
embodiments, the multi-layer conducting line 80a may be formed by
the damascene process. As shown in FIG. 8A, an interlayer insulator
IL may be disposed on an upper surface of the multi-layer
conducting line 80a, and accordingly, the multi-layer conducting
line 80a may be insulated from patterns formed in a wiring layer
above the V3 layer.
[0057] Referring to FIG. 8B, the multi-layer conducting line 80b
may include the first portion P1 extending in the X-axis direction
in the M2 layer, the second portion P2 extending in the X-axis
direction in the V2 layer, the third portion P3 extending in the
X-axis direction in the M3 layer, and the fourth portion P4
extending in the X-axis direction in a V3 layer. As shown in FIG.
8B, the first portion P1 and the second portion P2 may be
integrally formed with each other in the lower portion of the
multi-layer conducting line 80b, and the third portion P3 and the
fourth portion P4 may be integrally formed with each other in the
upper portion of the multi-layer conducting line 80b. Accordingly,
a barrier layer may be disposed between the second portion P2 of
the V2 layer and the third portion P3 of the M3 layer. Similarly to
the multi-layer conducting line 80a of FIG. 8A, an interlayer
insulator IL may be disposed on an upper surface of the multi-layer
conducting line 80b of FIG. 8B.
[0058] FIG. 9 is a block diagram of a memory device 90 according to
some example embodiments, and FIG. 10 is a diagram partially
showing a layout of the memory device 90 of FIG. 9, according to
some example embodiments. In some example embodiments, the memory
device 90 may be an example of the integrated circuit 10 of FIG. 1.
A series of memory cells C1, . . . , Cn, extending in the X-axis
direction and thus at least partially overlapping each other in the
X-axis direction, may correspond to the plurality of unit circuits
U1, . . . , Un of FIG. 1, where the memory cells C1, . . . , Cn are
each configured to store at least one bit of data, and a plurality
of word lines WLs in the memory device 90 may be implemented as
multi-layer conducting lines, such that at least one multi-layer
conducting line ML that is electrically connected to control
electrodes of transistors included in the series of memory cells
C1, . . . , Cn is at least a part of a word line WL configured to
select one or more memory cells of the memory cells C1, . . . ,
Cn.
[0059] Referring to FIG. 9, the memory device 90 may include a
memory cell array 92, a row decoder 94, and a page buffer 96. The
memory device 90 may receive a command and address from outside,
and may receive or output data. In some example embodiments, the
memory device 90 may receive a command such as a write command and
a read command, and an address corresponding to the command. The
memory device 90 may receive data in response to a write command
and may output data in response to a read command. The memory
device 90 may be packaged as an independent memory device or may be
included in a semiconductor package such as a system-on-chip or a
processor.
[0060] The memory cell array 92 may include a plurality of memory
cells. In some example embodiments, as shown in FIG. 9, the memory
cell array 92 may include a series of memory cells C1, . . . , Cn
that are disposed in a certain direction as static random access
memory (SRAM) cells (n is 1 or greater integer). The first memory
cell C2 may include a first inverter INV1 and a second inverter
INV2 that are cross-connected, and a first transistor T1 and a
second transistor T2 that connect the first inverter INV1 and the
second inverter INV2 electrically to a first bit line pair BL11 and
BL21 during a write operation and a read operation. Although FIG. 9
shows the SRAM cell as an example, it would be appreciated that the
word lines including multi-layer conducting lines may be applied to
memories different from the SRAM, e.g., flash memory, dynamic RAM
(DRAM), resistive RAM (RRAM), phase-change RAM (PRAM), etc.
[0061] The memory cell array 92 may be connected to the row decoder
94 via the plurality of word lines WLs, and may be connected to the
page buffer 96 via a plurality of bit lines BLs. The series of
memory cells C1, . . . , Cn included in the memory cell array 92
may be connected to a k-th word line WLk among the plurality of
word lines WLs, and the series of memory cells C1, . . . , Cn
connected to one word line or data stored in the series of memory
cells C1, . . . , Cn may be referred to as a page. As shown in FIG.
9, the k-th word line WLk including the multi-layer conducting line
may be connected (e.g., electrically connected) to control
electrodes (e.g., gate electrodes) of the first transistor T1 and
the second transistor T2 included in the first memory cell C1.
Similarly, the k-th word line WLk may be connected (e.g.,
electrically connected) to control electrodes of transistors
included in the second through nth memory cells C2 . . . Cn.
Accordingly, it will be understood that the multi-layer conducting
line may be electrically connected to control electrodes of
transistors included in the plurality of memory cells C1 . . . Cn,
which may be unit circuits.
[0062] The row decoder 94 may activate the k-th word line WLk among
the plurality of word lines WLs, in order to select a series of
memory cells C1, . . . , Cn from among the plurality of memory
cells included in the memory cell array 92. In some example
embodiments, the row decoder 94 may activate the k-th word line WLk
by increasing a voltage level of the k-th word line WLk. That is,
the row decoder 94 may correspond to the control circuit 12 of FIG.
1. The page buffer 96 may provide the plurality of bit lines BLs
with signals corresponding to data to be written in the selected
series of memory cells C1, . . . , Cn, or may sense signals
corresponding to data stored in the series of memory cells C1, . .
. , Cn selected by the row decoder 94 from the plurality of bit
lines BLs.
[0063] The k-th word line WLk including the multi-layer conducting
line may have a reduced resistance as described above with
reference to the accompanying drawings, and accordingly, a
difference between time points at which the signals applied by the
row decoder 94 to the k-th word line WLk, e.g., high level voltage
(or low level voltage), reach the first memory cell C1 and the n-th
memory cell Cn may be reduced, and accordingly, the writing speed
and reading speed onto/from the memory device 90 may be improved.
Also, due to the reduced resistance of the k-th word line WLk, the
k-th word line WLk may have a width that is less than that of a
case in which the word line does not include the multi-layer
conducting line, and examples in which the k-th word line WLk has
the reduced width will be described below with reference to FIG.
10.
[0064] Referring to the left in FIG. 10, a first line L1 and a
second line L2, to which a negative supply voltage (VSS) (or ground
voltage) is applied, on boundaries facing each other in the Y-axis
direction from among boundaries of a first memory cell C1' may
extend in the X-axis direction, and the k-th word line WLk' not
including the multi-layer conducting line may extend between the
first and second lines L1 and L2. In order to supply stabilized
negative supply voltage (VSS) to a series of memory cells including
the first memory cell C1', the first line L1 and the second line L2
providing the negative supply voltage (VSS) may be disposed as
shown in FIG. 10. The first line L1 and the second line L2 may have
a first width W1, and the k-th word line WLk' not including the
multi-layer conducting line may have a second width W2. As
described above, when the k-th word lines WLk' includes the
multi-layer conducting line, the k-th word line WLk' may have a
width less than the second width W2, and in FIG. 10, `case A` and
`case B` are examples, in which the k-th word line WLk' include the
multi-layer conducting line.
[0065] Referring to `case A` of FIG. 10, a width W1a of a first
line L1a and a second line L2a that supply the negative supply
voltage (VSS) to a series of memory cells including a first memory
cell C1a may be maintained (W1a=W1). However, a distance between a
k-th word line WLka and the first line L1a may increase and a
distance between the k-th word lines WLk1 and the second line L2a
may increase due to a reduced width W2a of the k-th word line WLka
(W2a<W2). In some example embodiments, a distance S of the k-th
word line WLk' shown in the left side of FIG. 10 respectively from
the first line L1 and the second line L2 may be equal to a minimum
distance between patterns in the M2 layer, and a distance Sa of the
k-th word line WLka from the first line L1a and the second line L2a
in `case A` of FIG. 10 may be greater than the minimum distance
between patterns in the M2 layer. Accordingly, the capacitance
generated by the k-th word line WLka with the first line L1a and
the second line L2a may be reduced, and thus, a delay occurring on
the k-th word line WLka may be further reduced.
[0066] Referring to `case B` of FIG. 10, due to a reduced width W2b
of the k-th word line WLka (W2b<W2), a width W1b of a first line
L1n and a second line L2b providing a first memory cell C1b with
the negative supply voltage VSS may increase (W1b>W1).
Accordingly, resistances of the first line L1b and the second line
L2b may be reduced, and accordingly, the negative supply voltage
VSS may be provided reliably to a series of memory cells including
the first memory cell C1b.
[0067] FIG. 11 is a block diagram of an image sensor 110 according
to some example embodiments. In some example embodiments, the image
sensor 110 may be an example of the integrated circuit 10 of FIG.
1. A series of pixels X1, . . . , Xn, extending in the X-axis
direction and thus at least partially overlapping each other in the
X-axis direction, may correspond to the plurality of unit circuits
U1, . . . , Un of FIG. 1, and at least some of control lines RSs,
TGs, and SELs for controlling the plurality of pixels in the image
sensor 110 may include multi-layer conducting lines, such that at
least one multi-layer conducting line ML that is electrically
connected to control electrodes of transistors included in the
pixels X1, . . . , Xn is at least a part of a control line
configured to communicate control signals for controlling
operations of the pixels X1, . . . , Xn and thus the multi-layer
conducting line may be configured to receive a control signal for
controlling operations of the plurality of pixels X1, . . . ,
Xn.
[0068] Referring to FIG. 11, the image sensor 110 may include a
pixel array 112, a row driver 114, and a read circuit 116. The
pixel array 112 may be connected to the row driver 114 via the
plurality of control lines, that is, a plurality of reset lines
RSs, a plurality of transfer lines TGs, and a plurality of
selection lines SELs, and may be connected to the read circuit 116
via a plurality of output lines OLs. The row driver 114 may
simultaneously or sequentially activate some of the plurality of
reset lines RSs, the plurality of transfer lines TGs, and the
plurality of selection lines SELs to control the plurality of
pixels included in the pixel array 112, and the read circuit 116
may detect light intensity sensed by the pixel array 112 by sensing
a voltage and/or current of the output lines OLs.
[0069] The pixel array 112 may include the plurality of pixels. In
some example embodiments, the pixel array 112 may include a series
of pixels X1, . . . , Xn each having a 4-transistor (4T) structure
as shown in FIG. 11 (n is 1 or greater integer). That is, the first
pixel X1 may include four transistors T3 to T6 and a
photo-detecting device PD. Although FIG. 11 shows the pixel having
the 4T structure, it would be appreciated that the control lines
including the multi-layer conducting lines may be applied to an
image sensor including pixels of another structure, e.g., 6T
structure. As shown in FIG. 11, a k-th transfer line TGk may be
connected to a control electrode (or gate electrode) of a transfer
transistor T3, a k-th reset line RSk may be connected to a control
electrode of a reset transistor T5, and a k-th selection line SELk
may be connected to a control electrode of a selection transistor
T6. Accordingly, it will be understood that the multi-layer
conducting line may be electrically connected to control electrodes
of transistors included in the plurality of pixels X1 . . . Xn,
which may be unit circuits. The multi-layer conducting line ML that
is electrically connected to control electrodes of transistors
included in the plurality of pixels X1 . . . Xn may be configured
to receive a control signal for controlling operations of the
plurality of pixels X1 . . . Xn.
[0070] Since at least some of the plurality of control lines
include multi-layer conducting lines, operations of the image
sensor 110 may be improved. In some example embodiments, when the
plurality of transfer lines TGs include the multi-layer conducting
lines, a difference between a period, in which the first pixel X1
senses light, and a period, in which an n-th pixel Xn senses light,
may be reduced, and accordingly, accuracy of an image generated by
the image sensor 110 may be improved. Also, when the plurality of
selection lines SELs include the multi-layer conducting lines, a
difference between a time point at which the first pixel X1 outputs
a signal to a first output line OL1 and a time point at which the
n-th pixel Xn outputs a signal to an n-th output line OLn may be
reduced, and accordingly, a reading speed of the read circuit 116
may increase and an image capturing speed of the image sensor 110
may also increase.
[0071] FIG. 12 is a block diagram of a display apparatus 120
according to some example embodiments. In some example embodiments,
the display apparatus 120 (or display panel 122) may be an example
of the integrated circuit 10 of FIG. 1. A series of pixels X1', . .
. , Xn', extending in the X-axis direction and thus at least
partially overlapping each other in the X-axis direction, may
correspond to the unit circuits U1, . . . , Un of FIG. 1 and may
each be configured to emit light, and a plurality of scan lines SLs
for controlling the plurality of pixels in the display apparatus
120 may include multi-layer conducting lines. Accordingly, at least
one multi-layer conducting line ML that is electrically connected
to control electrodes of transistors included in the pixels X1', .
. . , Xn' is at least a part of a scan line SL configured to select
one or more pixels of the pixels X1', . . . , Xn'.
[0072] Referring to FIG. 12, the display apparatus 120 may include
the display panel 122, a scan driver 124, and a data driver 126.
The display panel 122 may be connected to the scan driver 124 via
the plurality of scan lines SLs, and may be connected to the data
driver 126 via a plurality of data lines DLs. The scan driver 124
may activate one of the plurality of scan lines SLs for selecting a
series of pixels from among the plurality of pixels included in the
display panel 122, and the data driver 126 may provide the
plurality of data lines DLs with a voltage and/or a current
according to an intensity of light that is to be emitted from the
series of pixels that are selected by the scan driver 124.
[0073] The display panel 122 may include the plurality of pixels.
In some example embodiments, the display panel 122 may include a
series of pixels X1', . . . , Xn' each including a light-emitting
diode (LED) (n is 1 or greater integer). That is, a first pixel X1'
may include two transistors T7 and T8, a capacitor CAP, and an LED
LD. Although FIG. 12 shows the pixels including the LED, it would
be appreciated that the plurality of scan lines SLs including the
multi-layer conducting lines may be also applied to a display panel
including other light-emitting elements than the LED. As shown in
FIG. 12, a k-th scan line SLk may be connected to a control
electrode (or a gate electrode) of the switching transistor T7.
Accordingly, it will be understood that the multi-layer conducting
line may be electrically connected to control electrodes of
transistors included in the plurality of pixels X1' . . . Xn',
which may be unit circuits.
[0074] Since the plurality of scan lines SLs include the
multi-layer conducting lines, operations of the display apparatus
120 may be improved. In some example embodiments, a difference
between a time point of selecting the first pixels X1' and a time
point of selecting the n-th pixel Xn' may be reduced, and
accordingly, quality of an image output from the display panel 122
may be improved and a speed of updating images in the display panel
122 may increase.
[0075] FIG. 13 is a block diagram of a system-on-chip (SoC) 130
according to some example embodiments. The SoC 130 may be an
example of the integrated circuit 10 of FIG. 1, and may include a
multi-layer conducting line according to some example embodiments.
The SoC 130 implements complicated functional blocks such as an IP
(intellectual property) performing various functions in one chip,
and multi-layer conducting lines each including portions extending
in two or more successive layers according to some example
embodiments may be included in each functional block of the SoC
130. Accordingly, a delay occurring in wirings may be reduced while
achieving high spatial efficiency, the SoC 130 may have a high
integration and a high operating speed.
[0076] Referring to FIG. 13, the SoC 130 may include a modem 132, a
display controller 133, a memory 134, an external memory controller
135, a central processing unit (CPU) 136, a transaction circuitry
137, a power management integrated circuit (PMIC) 138, and a
graphics processing unit (GPU) 139, and the functional blocks in
the SoC 130 may communicate with one another via a system bus 131.
One or more of the elements included in the SoC 130, including the
modem 132, display controller 133, memory 134, external memory
controller 135, central processing unit (CPU) 136, transaction
circuitry 137, power management integrated circuit (PMIC) 138, and
graphics processing unit (GPU) 139, and the functional blocks in
the SoC 130, may be implemented by and/or substituted with one or
more instances of processing circuitry such as hardware including
logic circuits; a hardware/software combination such as a processor
executing software; or a combination thereof. For example, the SoC
130 more specifically may include, but is not limited to, a central
processing unit (CPU), an arithmetic logic unit (ALU), a digital
signal processor, a microcomputer, a field programmable gate array
(FPGA), a System-on-Chip (SoC), a programmable logic unit, a
microprocessor, application-specific integrated circuit (ASIC),
etc. that is/are configured to implement the functionality of some
or all of the elements of the SoC as shown in FIG. 14 and/or some
or all of the functional blocks in the SoC.
[0077] The CPU 136 that controls overall operations of the SoC 130
may control operations of other functional blocks (e.g., 132, 133,
134, 135, 137, 138, and 139). The modem 132 may demodulate a signal
received from outside of the SoC 130 or modulate a signal generated
in the SoC 130, and then, may transmit the signal to outside. The
external memory controller 135 may control an operation of
transmitting/receiving data to/from an external memory device
connected to the SoC 130. In some example embodiments, a program
and/or data stored in the external memory device may be provided to
the CPU 136 or the GPU 139 under the control of the external memory
controller 135. The GPU 139 may execute program instructions
regarding processing of graphics. The GPU 139 may receive graphic
data via the external memory controller 135 or may transmit graphic
data processed by the GPU 139 to outside of the SoC 130 via the
external memory controller 135. Transaction circuitry 137 may
monitor data transaction of each functional block, and the PMIC 138
may control electric power supplied to each functional block
according to the control of the transaction circuitry 137. The
display controller 133 controls a display (or display apparatus) on
an outer portion of the SoC 130 to transfer the data generated in
the SoC 130 to the display.
[0078] The memory 134 may include non-volatile memory such as
electrically erasable programmable read-only memory (EEPROM), flash
memory, phase change RAM (PRAM), resistance RAM (RRAM), nano
floating gate memory (NFGM), polymer RAM (PoRAM), magnetic RAM
(MRAM), ferroelectric RAM (FRAM), etc. or volatile memory such as
dynamic RAM (DRAM), static RAM (SRAM), mobile DRAM, double data
rate synchronous DRAM (DDR SDRAM), low power DDR (LPDDR) SDRAM,
graphic DDR (GDDR) SDRAM, Rambus DRAM (RDRAM), etc. In some example
embodiments, as described above with reference to FIG. 9, etc., a
plurality of word lines for respectively selecting some of the
plurality of memory cells included in the memory 134 may include
multi-layer conducting lines.
[0079] While the inventive concepts have been particularly shown
and described with reference to embodiments thereof, it will be
understood that various changes in form and details may be made
therein without departing from the spirit and scope of the
following claims.
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