U.S. patent application number 16/566730 was filed with the patent office on 2020-01-02 for unequal link scara arm.
The applicant listed for this patent is BROOKS AUTOMATION, INC.. Invention is credited to Robert T. Caveney, Ulysses Gilchrist, David Martin.
Application Number | 20200001451 16/566730 |
Document ID | / |
Family ID | 37637788 |
Filed Date | 2020-01-02 |
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United States Patent
Application |
20200001451 |
Kind Code |
A1 |
Caveney; Robert T. ; et
al. |
January 2, 2020 |
UNEQUAL LINK SCARA ARM
Abstract
A substrate transport apparatus comprising a drive section, a
controller, an upper arm, forearm and substrate holder. A proximate
end of the upper arm being rotatably mounted to the drive section
at a shoulder joint. A proximate end of the forearm being rotatably
mounted to a distal end of the upper arm at an elbow joint. The
substrate holder being rotatably mounted to a distal end of the
forearm at a wrist joint. The upper arm and the forearm being
unequal in length from joint center to joint center. The substrate
transport arm is adapted to transport substrate to and from at
least two substrate holding areas with the drive section of the
transport apparatus remaining in a fixed position relative to the
holding areas. Each of the upper arm, forearm and substrate holder
being independently rotatable with respect to each other.
Inventors: |
Caveney; Robert T.;
(Windham, NH) ; Martin; David; (Santa Clara,
CA) ; Gilchrist; Ulysses; (San Jose, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
BROOKS AUTOMATION, INC. |
Chelmsford |
MA |
US |
|
|
Family ID: |
37637788 |
Appl. No.: |
16/566730 |
Filed: |
September 10, 2019 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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15012425 |
Feb 1, 2016 |
10406679 |
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16566730 |
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11179762 |
Jul 11, 2005 |
9248568 |
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15012425 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
B25J 9/042 20130101;
H01L 21/67766 20130101 |
International
Class: |
B25J 9/04 20060101
B25J009/04; H01L 21/677 20060101 H01L021/677 |
Claims
1. A substrate transport apparatus comprising: an automated three
link arm for selectably transporting substrates into two spaced
inline substrate holding stations facing the same direction and
into another at least two spaced inline substrate holding stations
facing the same direction; wherein a wrist of the three link arm
travels along parallel paths transporting substrates into each
substrate holding station and a drive section of the three link arm
is fixed relative to the holding stations.
2. The substrate transport apparatus of claim 1, wherein the
spacing between the two substrate holding stations and between any
two of the at least two substrate holding stations is the same.
3. The substrate transport apparatus of claim 1, wherein the at
least two substrate holding stations comprise three spaced inline
substrate holding stations including a first, second and third
substrate holding station where the second substrate holding
station is located between the first and third substrate holding
stations and the drive section is fixed with a shoulder joint of
the three link arm between the two spaced inline substrate holding
stations and between the first and third substrate holding stations
of the three spaced inline substrate holding stations.
4. The substrate transport apparatus of claim 3, wherein the
shoulder joint of the three link arm is located between parallel
paths to the two spaced inline substrate holding stations and
between parallel paths to the first and third substrate holding
stations of the three spaced inline substrate holding stations so
that the parallel paths to the two spaced inline substrate holding
stations and the first and third substrate holding stations
straddle the shoulder joint of the three link arm.
5. The substrate transport apparatus of claim 1, wherein when a
substrate moves along transport path the substrate misses a
Semiconductor Equipment and Materials International exclusion
area.
6. The substrate transport apparatus of claim 1, wherein the three
link arm has a minimum footprint to reach ratio for a predetermined
reach.
7. The substrate transport apparatus of claim 1, wherein the
spacing between holding areas conform to Semiconductor Equipment
and Materials International Standards.
Description
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of U.S. patent application
Ser. No. 15/012,425 filed on Feb. 1, 2016, which is a continuation
of U.S. patent application Ser. No. 11/179,762 filed on Jul. 11,
2005, (now U.S. Pat. No. 9,248,568 issued on Feb. 2, 2016), the
disclosures of which are incorporated by references herein in their
entireties.
BACKGROUND
1. Field
[0002] The exemplary embodiments relate to a substrate transport
apparatus and, more particularly, to a substrate transport
apparatus with an articulated arm.
2. Brief Description of Related Developments
[0003] Contemporary SCARA arm robots used for transporting
substrate have equal length links (i.e. upper arm and forearm).
When the upper arm and forearm are of the same length the SCARA arm
has a limited containment to extension ratio, the containment
reflecting the footprint (generally commensurate to the swing
diameter of the retracted arm) of the robot and the extension being
the maximum reach of the robot arm. In conventional arms, to enable
greater extension of a robot with equal length links the links of
the robot are increased in length by the same amount. In
conventional arms, the end effector rotation will track with the
rotation of the upper arm. The end effector remains parallel to and
along the axis of radial extension of the arm. Due to the increased
linkage length, the swing diameter (i.e. the footprint) of the
robot while in the retracted position also increases.
[0004] Various types of substrate transport apparatus are known in
the art. Examples of conventional substrate transport apparatus are
discussed in U.S. Pat. Nos. 5,741,113 ('113) and 5,611,655 ('655).
U.S. Patent '113 discusses a multiple link robot arm mechanism that
uses two motors to rotate the upper arm and forearm. The motors are
capable of synchronized operation to permit movement of the robot
arm hand along a curvilinear path as the extension of the hand
changes. The hand rotates about a wrist axis in response to
rotation of the forearm about an elbow axis. U.S. Patent '655
discusses a transport having a multi-joint arm with three links
where each of the links are independently rotatable. The arms are
driven by a drive unit having three motors. In both '113 and '655
the upper arm and forearm of the robots are equal in length. As
such, longer reach of the arms in '113 and '655 means a larger
footprint. In addition, at least in '113 the end effector is not
orthogonal to the substrate holding area.
SUMMARY OF THE EXEMPLARY EMBODIMENTS
[0005] In accordance with a first exemplary embodiment, a substrate
transport apparatus is provided. The substrate transport apparatus
comprises a drive section, a controller operably connected to the
drive section and a substrate transport arm. The substrate
transport arm comprises an upper arm, a forearm and a substrate
holder. A proximate end of the upper arm being rotatably mounted to
the drive section at a shoulder joint. A proximate end of the
forearm being rotatably mounted to a distal end of the upper arm at
an elbow joint. The substrate holder being rotatably mounted to a
distal end of the forearm at a wrist joint. The upper arm and
forearm being unequal in length from joint center to joint center.
The substrate transport arm is adapted to transport substrate to
and from at least two substrate holding areas with the drive
section remaining in a fixed position relative to the holding
areas.
[0006] In accordance with another exemplary embodiment, a substrate
transport apparatus with a SCARA arm is provided. The substrate
transport apparatus comprises an upper arm, a forearm and a
substrate holder. The transport apparatus having an extension
length and swing diameter in accordance with the length of the
upper arm, forearm and substrate holder. The upper arm and forearm
being unequal in length. The independently rotatable upper arm and
forearm and the independently rotatable substrate holder effecting
a maximum length extension of the transport apparatus for a
predetermined swing diameter.
[0007] In accordance with yet another exemplary embodiment, a
substrate transport apparatus is provided. The substrate transport
apparatus comprises a three link arm for selectably transporting
substrates into two spaced inline substrate holding stations facing
the same direction or into another three spaced inline substrate
holding stations facing the same direction. A wrist of the three
link arm travels along parallel paths to each substrate holding
station and a drive section of the three link arm is fixed relative
to the holding stations.
[0008] In accordance with a method of an exemplary embodiment, a
method of transporting a substrate is provided. The method
comprising providing a substrate transport apparatus with a drive
section having a frame and a first, second and third drives.
Providing an arm assembly, the arm assembly having an independently
rotatable upper arm and an independently rotatable forearm and an
independently rotatable substrate holder for holding the substrate.
The upper arm and forearm being of unequal length from joint center
to joint center and rotatably joined to each other at an end, the
upper arm being rotatably joined to the frame at an opposite end.
The substrate holder being rotatably joined to a distal end of the
forearm at a wrist joint. Energizing the first second and third
drives for effecting individual rotation of each of the upper arm,
forearm and substrate holder and effecting movement of the
substrate on the substrate holder along a radial line wherein the
substrate holder rotates about the center of the substrate.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] The foregoing aspects and other features of the present
invention are explained in the following description, taken in
connection with the accompanying drawings, wherein:
[0010] FIG. 1 is an schematic top plan view of a substrate
processing apparatus in accordance with an exemplary
embodiment;
[0011] FIG. 2 is a schematic top plan view of a substrate
transporter in accordance with an exemplary embodiment showing the
transport arm in several positions;
[0012] FIGS. 3A-3H and 3J are schematic top plan views showing the
transporter in FIG. 2 in a number of positions through which the
transporter transitions during extension/retraction;
[0013] FIG. 4 is another schematic top plan view of a substrate
processing apparatus in accordance with another exemplary
embodiment;
[0014] FIG. 5 is yet another schematic top plan view of a
transporter in accordance with still another exemplary
embodiment;
[0015] FIG. 6 is a cross sectional view of the transporter showing
a drive system of the transporter in accordance with yet another
exemplary embodiment;
[0016] FIG. 7 is another schematic top plan view of a substrate
processing apparatus in accordance with still another exemplary
embodiment;
[0017] FIG. 8 is a flow diagram in accordance with a method of an
exemplary embodiment;
[0018] FIG. 9 is a flow diagram in accordance with another method
of an exemplary embodiment;
[0019] FIG. 10 is a schematic top plan view of a substrate
processing apparatus in accordance with yet another exemplary
embodiment;
[0020] FIG. 11 is another cross sectional view of the transporter
showing the drive system of the transporter in accordance with
another exemplary embodiment.
[0021] FIG. 12 is a top plan view of the upper arm section of a
transporter in accordance with an exemplary embodiment.
DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENT(S)
[0022] Referring to FIG. 1, there is shown a schematic top plan
view of a substrate processing apparatus 100 incorporating features
in accordance with an exemplary embodiment. Although the
embodiments disclosed will be described with reference to the
embodiments shown in the drawings, it should be understood that the
embodiments disclosed can be embodied in many alternate forms of
embodiments. In addition, any suitable size, shape or type of
elements or materials could be used.
[0023] The substrate processing apparatus may be for example, an
equipment front end module (EFEM) or any other suitable processing
apparatus. The processing apparatus 100 generally comprises a frame
103, a substrate transporter 200, substrate holding areas 105, load
ports 104, and a staging position 101. The apparatus 100 may also
include a substrate pre-aligner 102. The configuration of the
processing apparatus 100 shown in FIG. 1, and its holding or
processing areas is merely exemplary and in alternate embodiments
the processing apparatus may have any suitable arrangement with an
suitable processing or holding areas.
[0024] The transporter 200 is mounted within the frame 103 and
transports substrates 106 back and forth from the holding areas 105
to the staging area 101. The staging area 101 may be a substrate
elevator, load lock or other desired device. For example, a load
lock may b located in the staging area providing a gateway to a
substrate processing chamber. The processing chamber may be an
atmospheric or vacuum chamber. In alternate embodiments the staging
area 101 may be configured as a stocker or sorter or metrology
device. The transporter 200 may also place the substrate on the
pre-aligner 102 so that a fiducial (not shown) located on the
substrate 106 is oriented in a predetermined position before the
transporter 200 places the substrate 106 in the staging area 101.
The substrate 106 may be a 200 mm, 300 mm or any desired diameter
wafer, a flat panel for flat panel displays, or a reticle mask or
any other desired workpiece.
[0025] Referring now to FIGS. 2, 5 and 6, the substrate transporter
generally comprises an arm assembly with an upper arm 201, a
forearm 202, a substrate holder 203, a drive section 204. A
controller 208 may be connected to the arm assembly to move the arm
sections of the assembly as desired. In alternate embodiments, the
arm assembly may have any other desired general SCARA
configuration. For example, the assembly may have multiple forearms
and/or multiple substrate holders.
[0026] The substrate holder 203 is rotatably connected to the
forearm 202 by shaft assembly 754 at a wrist 755 of the transporter
200. Substrate holder 203 may be rotatably connected by support
shaft 698 to the forearm 202. In this exemplary embodiment, the
substrate holder 203 is shown as a forked end effector. The
substrate holder may have active mechanical or passive edge
gripping. In alternate embodiments, the substrate holder may be a
paddle end effector with a vacuum chuck. The forearm 202 is
rotatably connected by a coaxial shaft assembly 675 to the upper
arm 201 at elbow 646 of the transporter 200. The upper arm 201 is
rotatably connected at the shoulder 652 to drive section 204. In
this exemplary embodiment the upper arm 201 and the forearm 202 are
unequal in length. The upper arm 201, for example, may be shorter
in length than forearm 202.
[0027] The unequal lengths of the upper arm 201 and forearm 202,
for example, may allow the swing diameter of the arm assembly,
while in a retracted position, to remain the same as the swing
diameter of a conventional arm assembly with an upper arm and
forearm being of equal lengths. However, the unequal lengths of the
upper arm 201 and forearm 202 of the arm assembly 200' in this
exemplary embodiment may allow, for example, a greater reach (i.e.
a greater extension) than an arm having equal length links with the
same swing diameter thus, increasing the reach to containment ratio
of arm 200'. FIG. 3A shows the swing diameter (i.e. footprint
illustrated by circle F) of the transporter arm assembly 200'. As
may be realized, the swing diameter's value of a SCARA arm in
general is determined, for example, by either the combination of
the substrate holder offset, wafer diameter, wrist radius or the
upper arm's elbow swing radius. Hence, for the same length
substrate holder offset, a conventional SCARA arm and arm assembly
200' would have substantially the same footprint. For example, the
forearm 202 of this exemplary embodiment is able to grow longer
than the upper arm 201 to a maximum ratio established by the
constraints of the system (e.g. the desired footprint). In
addition, in this exemplary embodiment the upper arm 201, forearm
202 and substrate holder 203 may be independently rotatable and
driven by separate motors as will be described below. In alternate
embodiments, one or more of the arm assembly arm sections may not
be independently rotatable.
[0028] In the exemplary embodiment shown, drive section 204 may
have an outer housing 634H which houses a coaxial shaft assembly
660, and three motors 662, 664, 666. In alternate embodiments, the
drive section could have more or fewer than three motors. The drive
shaft assembly 660 has three drive shafts 668a, 668b, 668c. In
alternate embodiments more or fewer than three drive shafts could
be provided. The first motor 662 comprises a stator 678a and a
rotor 680a connected to the inner shaft 668a. The second motor 662
comprises a stator 678b and a rotor 680b connected to the middle
shaft 668b. The third motor 666 comprises a stator 678c and a rotor
680c connected to the outer shaft 668c. The three stators 678a,
678b, 678c are stationarily attached to the housing 634H at
different vertical heights or locations along the housing. In this
embodiment the first stator 678a is the bottom stator, the second
stator 678b is the middle stator and the third stator 678c is the
top stator. Each stator generally comprises an electromagnetic
coil. The three shafts 668a, 668b, and 668c are arranged as coaxial
shafts. The three rotors 680a, 680b, 680c are preferably comprised
of permanent magnets, but may alternatively comprise a magnetic
induction rotor which does not have permanent magnets. Sleeves 663
are located between the rotor 680 and the stators 678 to allow the
transporter 200 to be useable in a vacuum environment with the
drive shaft assembly 660 being located in a vacuum environment and
the stators 678 being located outside of the vacuum environment.
However, the sleeves 663 need not be provided if the transporter
200 is only intended for use in an atmospheric environment.
[0029] The first shaft 668a is the inner shaft and extends from the
bottom stator 678a. The inner shaft has the first rotor 680a
aligned with the bottom stator 678a. The middle shaft 668b extends
upward from the middle stator 678b. The middle shaft has the second
rotor 680b aligned with the second stator 678b. The outer shaft
668c extends upward from the top stator 678c. The outer shaft has
the third rotor 680c aligned with the upper stator 678c. Various
bearings are provided about the shafts 668 and the housing 634H to
allow each shaft to be independently rotatable relative to each
other and the housing 634H. Each shaft 668 may be provided with a
suitable position sensor to signal the controller 208 (see FIG. 5)
of the rotational position of the shafts 668 relative to each other
and/or relative to the housing 634H. Any suitable sensor could be
used, such as an optical or induction sensor.
[0030] The outer shaft 668c is fixedly connected to the upper arm
201 so that shaft 668c and upper arm 201 rotate together as a unit
about axis Z1. The middle shaft 668b is connected to a first
transmission 620 in the upper arm 201 and the inner shaft 668a is
connected to a second transmission 610 in the upper arm 201 as
shown in FIG. 6. The first transmission 620 preferably comprises a
drive pulley 622, an idler pulley 624 and drive cables or belts
626. The drive pulley 622 is fixedly mounted to the top of the
middle shaft 668b and is connected by drive belt 626 to the idler
pulley 624. The idler pulley 624 is fixedly mounted to the bottom
of the inner shaft 672 of coaxial shaft assembly 675 connecting the
forearm 202 to the upper arm 201. The second transmission 610 in
the upper arm 201 preferably comprises a drive pulley 612, an idler
pulley 614 and drive belts or cables 616. Drive pulley 612 is
fixedly mounted to the top of the inner shaft 668a of coaxial shaft
assembly 660 in drive section 204. The idler pulley 614 is fixedly
mounted to the bottom of the outer shaft 674 of the coaxial shaft
assembly connecting the forearm 202 to the upper arm 201. Drive
belt 616 connects the drive pulley 612 to the idler pulley 614. The
diameter ratio between the idler and drive pulleys 624, 622 of the
first transmission 626 and between the idler and drive pulleys 614,
612 of the second transmission 610 in this embodiment is about 1 to
1, though in alternate embodiments the ratio between the idler and
drive pulleys may be as desired. The drive belts 616, 626 are
configured to rotate the respective idler pulleys 614, 624 in the
same direction as the corresponding drive pulley 612, 622 (e.g.
clockwise rotation of drive pulleys 612, 622 causes clockwise
rotation of idler pulleys 614, 624).
[0031] The coaxial shaft assembly 675 connecting the forearm 202 to
the upper arm 201 is rotatably supported from the upper arm 201 by
suitable bearings which allow the outer and inner shafts 674, 672
of the shaft assembly to rotate about axis Z2 relative to each
other and to the upper arm 201. The outer shaft 674 of coaxial
shaft assembly 675 is fixedly mounted to the forearm 202 so that
the shaft 674 and forearm 202 rotate together as a unit about Z2.
The forearm 202 is rotated about axis Z2 when the idler pulley 614
of the second transmission 610 in the upper arm 201 is rotated by
inner shaft 668a of drive section 204. Thus, the inner shaft 668a
of drive section 204 is used to independently rotate forearm 202
relative to the upper arm 201.
[0032] The inner shaft 672 of the coaxial shaft assembly is fixedly
attached to drive pulley 753 of a third transmission 752 in the
forearm 202. The third transmission 752 in the forearm 202
preferably comprises drive pulley 753, an idler pulley 750 and
drive belts or cables 751. Idler pulley 750 is fixedly mounted to
shaft 698. Drive belt 751 connects the drive pulley 753 to idler
pulley 750. Shaft 698 is rotatably supported from the forearm 202
by suitable bearings which allow the shaft 698 to rotate about axis
Z3 relative to the forearm 202. The diameter ratio between the
idler and drive pulleys 750, 753 of the third transmission 752 in
this embodiment is about 1 to 1, though in alternate embodiments
the ratio between the idler and drive pulleys may be as desired.
The drive belts 751 are configured to rotate the idler pulley 750
in the same direction as the drive pulley 753 (e.g. clockwise
rotation of drive pulley 753 causes clockwise rotation of idler
pulley 750).
[0033] Shaft 698 is fixedly mounted to the substrate holder 203.
Thus, the shaft 698 and substrate holder 203 rotate together as a
unit about axis Z3. The substrate holder 203 is rotated about axis
Z3 when idler pulley 750 of the third transmission 752 is rotated
by drive pulley 753. Drive pulley 753 in turn is rotated by inner
shaft 672 of the coaxial shaft assembly 675. Inner shaft 672 is
rotated when idler pulley 624 of the first transmission 626 in the
upper arm 201 is rotated by middle shaft 268b of drive section 204.
Hence, the substrate holder 203 may be independently rotated with
respect to forearm 202 and upper arm 201 about axis Z3. In this
exemplary embodiment the transporter arm assembly housing 634H is
fixed to the processing apparatus frame 100 so that the shoulder
652 rotates about a fixed point and does not move laterally within
the frame. In alternate embodiments the transporter arm assembly
housing may be mounted on a traverser so that the shoulder may move
laterally within the frame.
[0034] Referring now to FIGS. 2, 3A-H, 3J, 5 and 6, the transporter
arm assembly 200' may be extended and retracted using drive section
204 to the positions shown in FIGS. 2, 3A-3H and 3J or any other
desired position. To extend the arm assembly 200' the controller
208 may send a signal to motors 662, 664, 666 so that their
respective shafts 668a, 668b, 668c are independently rotated either
clockwise or counterclockwise to effect the extension of the arm
200'.
[0035] Substrate holding areas 105a-c (and 105d-e as shown in FIG.
10) may be substrate transport container holding areas capable of
holding substrate transport containers (e.g. FOUPs). In this
exemplary embodiment there are three substrate holding areas shown
but in alternate embodiments there may be more or less than three.
For example, in the exemplary embodiment shown in FIG. 10 there are
two substrate holding areas. The substrate holding areas 105a-c may
be aligned with processing apparatus load ports and spaced apart
from each other in accordance with SEMI Standards. The FOUPs that
may be located in the substrate holding areas 105a-c may hold
substrate cassettes with multiple holding stations for batch
processing. The FOUPs and holding stations are also arranged per
SEMI Standards.
[0036] FOUP exclusion areas 500 are also defined in the SEMI
Standards and are shown in FIG. 5. The FOUP exclusion areas 500
chanelize the transport path 501 of the substrate so that the path
is substantially orthogonal to the face of the FOUP. In this
exemplary embodiment the substrate holder 203 may be oriented to
avoid violating the exclusion areas 500.
[0037] The controller 208 may have a cluster architecture as
described in U.S. Provisional Patent Application Ser. No.
60/688,636 and U.S. Patent Application entitled "Scalable Motion
Control System", attorney docket number 390P011660-US (PAR) filed
on Jul. 11, 2005 which are both incorporated herein by reference in
their entirety. The controller 208 may control the rotational
direction and rate of rotation of arms 201, 202 and substrate
holder 203 as will be described below.
[0038] Referring now to FIG. 11 a cross sectional view of a robot
arm 200'' and a drive section 204' in accordance with a second
exemplary is shown. Drive section 204' comprises housing 1134H and
a rotational motor located in the housing. In alternate
embodiments, the drive section may have more than one rotational
motor. The motor 1148 rotates shaft 1150 about an axis which is
generally coincident to the center line Z1 of the shoulder joint
1152 of arm assembly 200''. The shaft 1150 is fixedly held by
suitable fasteners such as for example machine or cap screws to the
upper arm link 201. Thus, the shaft 1150 and the upper arm link 201
rotate substantially as a unit. The shaft 1150 also has a portion
1160 which is rotatably captured in suitable bearings or bushings
1162 mounted to the drive section housing 1134H. A stop washer (not
shown) may be mounted on the shaft 1150 to engage stops on the
housing 1134H and to prevent inadvertent vertical motion between
shaft 1150 and drive section 204'. The motor 1148 preferably
includes a stator 1154, and a rotor 1156. The stator 1154 may
include electro-magnetic coils or windings fixedly mounted to the
housing 1134H which is mounted to frame 100 (see FIG. 1). The rotor
1156 is mounted to portion 1160 of shaft 1150. The rotor 1156 may
include permanent magnets or a magnetic induction rotor which does
not have permanent magnets. In alternate embodiments, the
rotational motor for rotating the shaft in the drive section may be
of any other suitable type such as a stepper motor. Sleeve 1166 may
be installed between the stator 1154 and rotor 1156 to allow the
robot 200'' to be usable in a vacuum environment with the drive
shaft 1150 being located in the vacuum environment and the stator
1154 being located outside the vacuum environment. The windings of
the stator 1154 are configured to rotate the shaft 1150 in the
clockwise or counter-clockwise directions as desired about the
centerline Z1 of the shoulder joint 1152.
[0039] As seen in FIG. 11, the upper arm link 1140 has a coaxial
shaft assembly 1175 connecting the forearm link 202 to the upper
arm link 201 at the elbow joint 1146. The forearm link 202 is
located above the upper arm link 201. The coaxial shaft assembly
1175 includes an outer shaft assembly 1174 and an inner shaft 1172.
The outer shaft 1174 is fixedly mounted to the forearm 202 to
rotate with the forearm as a unit about axis of rotation Z2 at the
elbow 1146 of the arm assembly 200''. The outer shaft 1174 is
rotatably held to the upper arm 201 with suitable bearing or
bushings 1178, 1176, so that the shaft may rotate relative to the
upper arm link. Bearing 1178 may also be a suitable thrust bearing
to vertically support the forearm link 202 from the upper arm link
201. In this embodiment, the robot 200'' has two arm borne drive
sections 1168, 1170. The lower drive section 1168 is mounted to the
upper arm link 201 to drive the outer shaft 1174 connecting the
forearm link 202 to the upper arm link 201. The upper drive section
1170 is mounted on the inner shaft 1172 to drive the drive pulley
1102, thus driving the substrate holder 203 as will be described in
greater detail below. In alternate embodiments, the arm assembly
may have one arm borne two-axis drive section capable of
independently driving the outer shaft and drive pulley of the
coaxial shaft assembly connecting the forearm link to the upper arm
link. The lower drive section 1168 is substantially similar to the
drive section 204'. The lower drive section may have a rotational
motor 1179 with a stator 1178 and a rotor 1180. The stator 1178,
which may comprise suitable electro-magnetic windings, is fixedly
mounted by appropriate structure to the upper arm link 201. The
rotor 1180, which may comprise permanent magnets or an
electro-inductive rotor, is mounted onto the outer shaft 1174. The
windings on the stator 1178 are configured to rotate the outer
shaft 1174 about axis Z2 in both a clockwise or counter-clockwise
rotation relative to the upper arm link 201.
[0040] The inner shaft 1172 is rotatably held by suitable bearings
1182, 1184 to the forearm link 202. Bearing 1182 is preferably a
thrust bearing which vertically supports the upper drive section
1170 from the forearm link 202. The forearm link 202 and the
substrate holder 203 are then vertically supported from the upper
arm link by thrust bearing 1178 as previously described. The lower
end 1188 of the inner shaft 1172 is fixedly mounted to the upper
arm link 201. In the shown exemplary embodiment, the inner shaft
1172 extends out of the bottom 1190 of the outer shaft 1174 and is
connected at the bottom 1188 to structure 1186 depending from the
upper arm link 201. Thus, in this embodiment, the inner shaft 1172
is stationary relative to the upper arm link 201.
[0041] As noted previously, the upper arm borne drive section 1170
is mounted on inner shaft 1172 as shown in FIG. 11. The upper drive
section 1170 has a rotational motor 1190 which rotates drive shaft
1199 and thus, drive pulley 1102 of transmission 2000 in the
forearm 202 as will be described in more detail below.
[0042] The rotational motor 1190 of the upper drive section 1170 is
preferably substantially similar to the motors 1148, 1179 in drive
sections 204', 1168 of the robot 200''. The motor 1190 has a stator
1192 comprising suitable electro-magnetic windings, and a rotor
1194 which may have permanent magnets or magnetic induction coil.
However, in this case, the stator 1192 is mated to drive shaft 1199
which is fixedly attached to the drive pulley 1102, and the rotor
1194 is mounted to structure 1196, such as the housing of the upper
drive section 1170, depending from the inner shaft 1172 which is
fixedly attached to the upper arm link 201. In alternate
embodiments, the upper drive section may include any other suitable
rotational motor for rotating the substrate holder about axis Z3
relative to the upper arm link and forearm of the robot.
[0043] As seen in FIG. 11, forearm link 202 is a hollow tube having
any suitable cross-section. The forearm link 202 houses
transmission 2000 which connects shaft 1198 to drive pulley 1102.
The transmission 2000 in the forearm 202 preferably comprises drive
pulley 1102, an idler pulley 1104 and drive belts or cables 1106.
The drive pulley 1102 is rotatably connected to inner shaft 1172
through, or example, force fitting a bearing (not shown) over shaft
1172, or by any other suitable means. The idler pulley 1104 is
fixedly mounted to the support shaft 1198 such as, for example, by
force fitting the pulley 1104 over shaft 1198. Drive belt 1106
connects the drive pulley 1102 to idler pulley 1104. Shaft 1198 is
rotatably supported from the forearm 202 by suitable bearings 1100
that allow the shaft 1198 to rotate about axis Z3 relative to the
forearm 202. The diameter ratio between the idler and drive pulley
1104, 1102 of the transmission 2000 in this embodiment is about 1
to 1, though in alternate embodiments the ratio between the idler
and drive pulleys may be as desired.
[0044] The drive belts 1106 are configured to rotate the idler
pulley 1104 in the same direction as the drive pulley 1102 (e.g.
clockwise rotation of drive pulley 1102 causes clockwise rotation
of idler pulley 1104). Belts 1106, connecting the drive pulley 1102
and idler pulley 1104 may be made of plastic, reinforced rubber or
any other suitable material. Belt 1106 is disposed in a general
loop configuration around the drive pulley 1102 and idler pulley
1104. The belt 1106 may be pre-tensioned as desired so that the
belt is in no-slip contact with the pulleys 1102, 1104. In
alternate embodiments, the pulleys and belt may be provided with
meshing teeth to maintain a no-slip condition between the belt and
pulleys.
[0045] Shaft 1198 is fixedly mounted to the substrate holder 203
and idler pulley 1104. Thus, the shaft 1198 and substrate holder
203 rotate together as a unit about axis Z3. The substrate holder
203 is rotated about axis Z3 when idler pulley 1104 of the
transmission 2000 is rotated by drive pulley 1102. Drive pulley
1102 in turn is rotated by drive shaft 1199 of the coaxial shaft
assembly 1175.
[0046] Substrate holder 203 is fixedly mounted on support shaft
1198. As described above, support shaft 1198 is rotatably mounted
by suitable bearings 1100 to the forearm link 202 thereby allowing
the forearm link 202 and substrate holder 203 to rotate relative to
each other about axis of rotation Z3. For example, when upper drive
section 1170 is energized the stator 1190 rotates drive shaft 1199
thereby rotating drive pulley 1102. Drive pulley in turn drives
belt 1106 thus rotating idler pulley 1104. Idler pulley rotates
shaft 1198 and substrate holder 203. The upper drive 1170 may be
energized to rotate either in a clockwise or counterclockwise
direction thereby rotating substrate holder in a clockwise or
counterclockwise direction as desired.
[0047] Referring now to FIG. 12, a top plan view of upper arm link
201 is shown in accordance with a third exemplary embodiment. In
this exemplary embodiment the drive motors 2090A, 2090B which drive
the forearm 202 and substrate holder 203 may be located in within
the upper arm link 201. As shown in FIG. 12, a third drive motor
2090C may be provided within the upper arm link 201 to drive a
second substrate holder as can be seen in United States Patent
Application entitled "Substrate Transport Apparatus", attorney
docket number 390-011658-US (PAR) filed on Jul. 11, 2005, which is
incorporated herein in its entirety.
[0048] In this exemplary embodiment the upper arm 201 may be driven
in substantially the same way as upper arm 201 is driven by drive
section 204 wherein motor 666 drives shaft 668c and shaft 668c is
fixedly attached to upper arm 201. In this exemplary embodiment,
the upper arm 201 may be a one-piece member (or may also be
referred to as being of unitary construction). The upper arm 201
may be formed by casting, forging or any other suitable formation
process. The upper arm may be made of metal, such as aluminum
alloy, stainless steel or from non-metallic materials such as
plastic, ceramic or composites. In alternate embodiments, the upper
arm may have any other suitable shape.
[0049] As seen in FIG. 8, coaxial shaft assembly 2040 is mounted to
the outward end of upper arm 201. Coaxial shaft assembly 2040 may
be substantially similar to coaxial shaft assembly 675 described
above however, coaxial shaft assembly 2040 may also have a third
shaft and third pulley to drive an additional forearm or substrate
holder. In alternate embodiments, coaxial shaft assemblies 2040,
675 may have any number of shafts and pulleys to drive a
corresponding number of forearms and substrate holders. The forearm
202 is pivotally mounted to the upper arm 201 by coaxial shaft
assembly 2040. Coaxial shaft assembly defines the elbow axis of
rotation Z2.
[0050] As seen in FIG. 8, the respective drive pulleys 2110A, 2110B
of the motor assemblies 2090A, 2090B, in the motor cluster, are
connected to the corresponding pulleys of shaft assembly 2040 by
transmission belts 2112, 2114, 2116. Drive pulley 2110A is
connected by belt 2112 to pulley 614 (as seen in FIG. 6). Drive
pulley 2110B is connected by belt 2114 to pulley 624 (as seen in
FIG. 6). Belt tensioners 2150A, 2150B are mounted to the upper arm
201 to provide and maintain desired tension on the transmission
belts. Thus when motor 2090A is energized, drive pulley 2110A
rotates forearm 202 about axis Z2. When motor 2090B is energized,
pulley 2110B rotates transfer pulley 624 about axis Z2, thereby
driving substrate holder 203 via the transmission 752 located
within forearm 202. In the embodiment shown, the drive pulley
2110A, 2110B to idler pulley 614, 624 diameter ratio may be about
1:4 though any suitable ratio may be used.
[0051] In alternate embodiments, motor 2090C, drive pulley 2110C,
tensioner 2150C and belt 2116 may drive an additional
forearm/substrate holder in a substantially similar manner as
described above.
[0052] The procedure for moving substrates between a retracted
position of the arm assembly 200', 200'' and the substrate holding
area 105b, or short extension station, is substantially as follows.
Substrate holding area 105b is so called a short extension station
because the arm 200', 200'' remains "folded over itself" during
extension and placement of the substrate 106. Referring to FIGS. 2,
3A-3H, 3J, 6 and 8 as noted before, a substrate transport is
provided having three independently driven driveshafts 668a, 668b,
668c (FIG. 6) or 1150, 1174, 1199 (FIG. 11), an upper arm 201, a
forearm 202 and a substrate holder 203 (as shown in 801, 802 of
FIG. 8). The first, second and third drives 662, 664, 666 (FIG. 6)
or 1148, 1179, 1190 (FIG. 11) are energized and instructed by the
controller 208 to individually rotate their respective drive shafts
668a, 668b, 668c (FIG. 6) or 1150, 1174, 1199 (FIG. 11) as shown in
803 of FIG. 8. The drive shafts 668a, 668b, 668c (FIG. 6) or 1150,
1174, 1199 (FIG. 11) may be individually rotated in either a
clockwise or counterclockwise direction. The controller 208 may
control the drive section 204, 204'' to substantially rotate and
extend or retract the arm assembly 200', 200'' in a compound "R"
movement (as seen in FIGS. 3A-3H and 3J). To achieve the compound
"R" movement of the arm assembly 200', 200'' the drive shafts 668a,
668b, 668c (FIG. 6) or 1150, 1174, 1199 (FIG. 11) may be
independently rotated at dissimilar rates. The dissimilar rates of
rotation of the drive shafts results in dissimilar rates of
rotation of the upper arm 201, the forearm 202 and the substrate
holder 203.
[0053] FIGS. 3A-H and 3J illustrate the rotation of the upper arm
201, forearm 202 and substrate holder 203 when translating into
substrate holding area 105b (FIG. 2). For example, when arm 200',
200'' begins extending from the retracted position shown in FIG.
3A, the upper arm 201 and forearm 202 rotate clockwise .theta.1,
.theta.2 while the substrate holder 203 rotates counterclockwise
.theta.3 as seen in FIG. 3B. At a point during the translation the
rotational direction .theta.1 of the upper arm 201 may change from
clockwise to counterclockwise to continue the translation of a
substrate 106 along the radial line R as seen in FIGS. 3F and 3G.
Likewise, the rotational direction .theta.2, .theta.3 of the
substrate holder 203 and the forearm 202 may also change so that
the substrate holder is rotated clockwise and the forearm is
rotated counterclockwise to effect the translation of a substrate
106 along the substantially radial line R as seen in FIG. 3H.
[0054] During extension of the arm 200', 200'' along substantially
radial line R, and as can be seen in FIGS. 3B-3H and in 804 of FIG.
8, the center C of substrate 106 is located along line R. The
substrate holder 203 rotates about the center C of the substrate
106 so that the substrate is translated rectilinearly along radial
line R. Accordingly, once the wrist 755 is placed along line R, as
seen in FIG. 3H, the rotation of the substrate holder 203 relative
forearm 202 and upper arm 201 becomes such that while forearm 202
and upper arm 201 are rotated to effect extension of the arm, the
wrist 755 and the center C of the substrate 106 remain along radial
line R. Thus, the substrate holder 203 is longitudinally aligned
(i.e. the center of the substrate and wrist joint axis are located
on transport path) with the line R during translation. The paths of
translation 501, 502 of the wrist 755 and the center C of the
substrate 106 are illustrated in FIG. 5. The substrate and the
wrist joint axis being longitudinally aligned during transport
allows the substrate holder 203 to miss and not violate the SEMI
exclusion areas 500.
[0055] Any interference that may exist between the substrate holder
203 and the FOUP exclusion area 500 of holding area 105b, as
defined in the SEMI Standards, during the extension of arm 200',
200'' along line R may be eliminated. In this exemplary embodiment,
the transport arm is shown located with shoulder axis Z1 offset by
an amount "X" as can be seen in FIG. 4. In alternate embodiments,
the arm may be located so there is no offset between the shoulder
axis and the transport path into holding areas similar to 105b. In
other alternate embodiments the difference between the length of
the upper arm 201 and the forearm 202 may be varied as desired.
[0056] When the arm 200', 200'' translates the substrate 106 to its
desired location within the substrate holding area 105b the
substrate may be released by the substrate holder 203 and placed
within the substrate holding area 105b. To release the substrate
106 from the grip of the substrate holder, an active gripping
mechanism of the substrate holder (not shown) may open to release
the substrate. In alternate embodiments, a vacuum holding the
substrate 106 on the substrate holder may be turned off to release
the substrate. In yet another alternate embodiment any suitable
gripping of the substrate may be deactivated to release the
substrate. Picking a substrate from a holding area and hence the
gripping of a substrate is performed in substantially the reverse
manner as releasing the substrate.
[0057] Retraction of the arm 200', 200'' is accomplished in a
substantially reverse manner from that used to extend the arm 200',
200'' into substrate holding area 105b along radial line R. In
alternate embodiments, vertical translation of the arm 200', 200''
may be provided by a linear drive (not shown) drivingly connected
to the drive section 204. Extension and retraction of arm 200',
200'' into any other short extension station is accomplished in
substantially the same manner as described above.
[0058] The procedure for moving substrates between a retracted
position of the arm assembly 200', 200'' and the substrate holding
area 105a, or long extension station, is substantially as follows.
Substrate holding area 105a is so called a long extension station
because the upper arm 201, forearm 202 and substrate holder 203
extend such that the arm 200' is not "folded over itself" during
translation of a substrate 106 into a holding area.
[0059] Referring now to FIGS. 1, 2, 4, 6, and 9 a substrate
processing apparatus 100 and substrate transporter 200 are provided
(as shown in 901 and 902 of FIG. 9). A substrate 106 is also
provided on the substrate holder 203 of transporter 200 as shown in
903 of FIG. 9. Extending from the retracted position of the arm
200', 200'' (as can be seen best in FIGS. 1 and 5) the three drives
662, 664, 666 (FIG. 6) or 1149, 1179, 1190 (FIG. 11) of the
transporter 200 are energized and instructed by the controller 208
to independently rotate their respective drive shafts 668a, 668b,
668c (FIG. 6) or 1150, 1174, 1199 (FIG. 11), thus rotating the
upper arm 201, the forearm 202 and the substrate holder 203. Drive
shafts 668a, 668b, 668c (FIG. 6) or 1150, 1174, 1199 (FIG. 11) may
be rotated either clockwise or counterclockwise as described above.
As the upper arm 201, forearm 202 and substrate holder 203 are
rotated, the substrate 106 is translated from point P1 (as seen in
FIG. 3A) to point P2 (as seen in FIG. 2) which may be located
proximate to the substrate holding area 105a as shown in 904 if
FIG. 9. In alternate embodiments, point P2 may be located in any
desired position within the processing apparatus.
[0060] The controller 208 may control the drive section to
substantially rotate and extend or retract the arm assembly 200',
200'' in a compound "T" movement (as seen in FIGS. 2 and 4) along
path T1 to rectilinearly translate the substrate holder 203 into
holding area 105a. Thus, the arm 200', 200'' rectilinearly
translates substrate 106 into holding area 105a as shown in 905 of
FIG. 9. To achieve the compound "T" movement of the arm assembly
200' the drive shafts 668a, 668b, 668c (FIG. 6) or 1150, 1174, 1199
(FIG. 11) may be independently rotated at dissimilar rates. The
dissimilar rates of rotation of the drive shafts result in
dissimilar rates of rotation of the upper arm 201, the forearm 202
and the substrate holder 203. For example, as can be seen in FIG.
2, when arm 200', 200'' is translating into substrate holding area
105a from point P2 the upper arm 201 is rotated counterclockwise
.theta.1 about axis Z1, the forearm 202 is rotated counterclockwise
.theta.2 about axis Z2 and the substrate holder 203 is rotated
clockwise .theta.3 about axis Z3. During the "T" movement the
substrate holder 203 may remain longitudinally aligned, for
example, with path T1 so that during translation into area 105a,
the substrate holder is orthogonal to the substrate holding area
105a.
[0061] Retraction of the arm 200', 200'' is accomplished in a
substantially reverse manner from that used to extend the arm 200',
200'' into substrate holding area 105a. In alternate embodiments,
vertical translation of the arm 200', 200'' may be provided by a
linear drive drivingly connected to the drive section 204, 204'.
Extension and retraction of arm 200', 200'' into any other long
extension station, for example 105c, is accomplished in
substantially the same manner as described above.
[0062] In the exemplary embodiment shown in FIG. 10, transport arm
200''' is substantially similar to transport arms 200' and 200''.
Transport arm 200''' has substantially the same footprint to
extension ratio and substantially the same forearm and upper arm
lengths as arms 200' and 200''. In this exemplary embodiment there
are two substrate holding stations 105d, 105e rather than three
(105a-c) as described above. The transporter 200''' may be placed
in a position substantially between two axes of translation such
as, for example, T3 and T4 of substrate holding areas 105d, 105e as
shown in FIG. 10. In alternate embodiments the transporter may be
placed in any desired position within the processing apparatus.
[0063] Translation of a substrate into substrate holding areas
105d, 105e along paths T3 and T4 is substantially the same as
translation of a substrate into substrate holding areas 105a, 105c
along paths T1 and T2. The controller 208 may control the drive
section to substantially rotate and extend or retract the arm
assembly 200''' in a compound "T" movement (as seen in FIGS. 2 and
4) along path T3 to rectilinearly translate the substrate holder
203 into holding area 105d. Thus, the arm 200''' rectilinearly
translates substrate 106 into holding area 105d. To achieve the
compound "T" movement of the arm assembly 200''' the drive shafts,
such as shafts 668a, 668b, 668c (FIG. 6) or 1150, 1174, 1199 (FIG.
11) may be independently rotated at dissimilar rates. The
dissimilar rates of rotation of the drive shafts result in
dissimilar rates of rotation of the upper arm 201, the forearm 202
and the substrate holder 203 as described above with respect to
translation along paths T1 and T2. During the "T" movement the
substrate holder 203 may remain longitudinally aligned, for
example, with path T3 so that during translation into area 105d,
the substrate holder is orthogonal to the substrate holding area
105d.
[0064] The releasing, placing and picking of substrate into a long
extension station is substantially performed as described above for
the short extension stations. Substrate may also be picked and
placed in a substrate staging area 101 (as seen in FIG. 1) in
substantially the same manner as described above according to
whether the staging area 101 is either a short or long extension
area. The arm 200', 200'' may also extend and retract, as described
above, to place a substrate on a pre-aligner 102 (FIG. 1) so that a
substrate fiducial may be oriented to a predetermined position
before placement of the substrate into the staging area 101.
[0065] It should be understood that the foregoing description is
only illustrative of the invention. Various alternatives and
modifications can be devised by those skilled in the art without
departing from the invention. Accordingly, the present invention is
intended to embrace all such alternatives, modifications and
variances which fall within the scope of the appended claims.
* * * * *