U.S. patent application number 16/134523 was filed with the patent office on 2019-12-26 for magnetic random access memory.
This patent application is currently assigned to KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY. The applicant listed for this patent is KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY. Invention is credited to Gyung-Min Choi, Byoung-Chul Min.
Application Number | 20190393264 16/134523 |
Document ID | / |
Family ID | 68836909 |
Filed Date | 2019-12-26 |
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United States Patent
Application |
20190393264 |
Kind Code |
A1 |
Choi; Gyung-Min ; et
al. |
December 26, 2019 |
MAGNETIC RANDOM ACCESS MEMORY
Abstract
The present invention relates to a magnetic RAM including a
memory cell, the memory cell including a metal layer, a magnetic
tunnel junction layer storing predefined information by causing a
magnetization direction to be up or down, a spin-current transfer
layer transferring spin current to the magnetic tunnel junction
layer, a spin-current generation layer generating the spin current,
and a thermal electron injection layer injecting thermal electrons
into the spin-current generation layer, and the magnetization
direction may be changed due to spin transfer torque generated in
the magnetic tunnel junction layer, whereby it is possible to
reduce current density consumed for switching the magnetization
direction of the free magnetic sub-layer in the magnetic tunnel
junction layer.
Inventors: |
Choi; Gyung-Min;
(Gyeonggi-do, KR) ; Min; Byoung-Chul; (Seoul,
KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
Seoul |
|
KR |
|
|
Assignee: |
KOREA INSTITUTE OF SCIENCE AND
TECHNOLOGY
Seoul
KR
|
Family ID: |
68836909 |
Appl. No.: |
16/134523 |
Filed: |
September 18, 2018 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 43/10 20130101;
H01L 27/226 20130101; H01L 43/08 20130101; H01L 27/222 20130101;
H01L 43/02 20130101; G11C 11/161 20130101 |
International
Class: |
H01L 27/22 20060101
H01L027/22; H01L 43/08 20060101 H01L043/08; H01L 43/10 20060101
H01L043/10; H01L 43/02 20060101 H01L043/02; G11C 11/16 20060101
G11C011/16 |
Foreign Application Data
Date |
Code |
Application Number |
Jun 22, 2018 |
KR |
10-2018-0072127 |
Claims
1. A magnetic RAM including a memory cell, the memory cell
comprising: a metal layer provided with a first electrode terminal
for receiving a first voltage pulse; a magnetic tunnel junction
layer disposed in contact with a lower surface of the metal layer
to store predefined information by causing a magnetization
direction of at least a part thereof to be up or down; a
spin-current transfer layer disposed in contact with a lower
surface of the magnetic tunnel junction layer and provided with a
second electrode terminal for receiving a second voltage pulse to
transfer spin current to the magnetic tunnel junction layer; a
spin-current generation layer disposed in contact with a lower
surface of the spin-current transfer layer to generate the spin
current to be transferred to the magnetic tunnel junction layer
through the spin-current transfer layer; and a thermal electron
injection layer disposed in contact with a lower surface of the
spin-current generation layer and provided with a third electrode
terminal for receiving a third voltage pulse to inject thermal
electrons into the spin-current generation layer so that the spin
current is generated in the spin-current generation layer, wherein
the magnetization direction of at least a part of the magnetic
tunnel junction layer is changed due to a spin transfer torque
generated in at least the part of the magnetic tunnel junction
layer by the spin current.
2. The magnetic RAM according to claim 1, wherein the metal layer
or the spin-current transfer layer is configured to include a
non-magnetic metal.
3. The magnetic RAM according to claim 2, wherein the magnetic
tunnel junction layer includes: a fixed magnetic sub-layer
including a magnetic metal; a free magnetic sub-layer provided
below the fixed magnetic sub-layer and including a magnetic metal;
and an insulating sub-layer located between the fixed magnetic
sub-layer and the free magnetic sub-layer to insulate the fixed
magnetic sub-layer and the free magnetic sub-layer from each
other.
4. The magnetic RAM according to claim 3, wherein the fixed
magnetic sub-layer is any one of FePt having a face-centered
tetragonal (FCT) crystal structure, FePd having an FCT crystal
structure, CoPt having an FCT crystal structure, [Co/Pt].sub.Nof a
multi-layer thin film structure, [Co/Pd].sub.N of a multi-layer
thin film structure, [Co/Ni].sub.N of a multi-layer thin film
structure, CoFeB/Ta of a bi-layer structure, CoFeB/W of a bi-layer
structure, and CoFeB/Hf of a bi-layer structure.
5. The magnetic RAM according to claim 3, wherein the free magnetic
sub-layer is any one of FePt having an FCT crystal structure, FePd
having an FCT crystal structure, CoPt having an FCT crystal
structure, Co/Pt of a multilayer thin film structure, Co/Pd of a
multilayer thin film structure, Co/Ni of a multilayer thin film
structure, CoFeB/Ta of a bi-layer structure, CoFeB/W of a bi-layer
structure, and CoFeB/Hf of a bi-layer structure.
6. The magnetic RAM according to claim 3, wherein the thermal
electron injection layer includes: a base insulating layer disposed
in contact with a lower surface of the spin-current generation
layer; and a non-magnetic metal base layer provided below the base
insulating layer and including a non-magnetic metal.
7. The magnetic RAM according to claim 6, wherein the spin-current
generation layer is a magnetic metal layer including a magnetic
metal.
8. The magnetic RAM according to claim 7, wherein a magnetization
direction of the fixed magnetic sub-layer is perpendicular to a
magnetization direction of the spin-current generation layer.
9. The magnetic RAM according to claim 8, wherein the spin-current
generation layer is any one of Co, Fe, Ni, a CoFe alloy, a NiFe
alloy, a CoFeAl alloy, a CoAl alloy, and a CoFeB alloy.
10. The magnetic RAM according to claim 8, wherein the spin current
generated in the spin-current generation layer by a voltage pulse
applied between the third electrode terminal and the second
electrode terminal is transferred to the free magnetic sub-layer
through the spin-current transfer layer so that the spin current
torque is generated in the free magnetic sub-layer.
11. The magnetic RAM according to claim 8, wherein the spin current
generated in the spin-current generation layer by a voltage pulse
applied between the third electrode terminal and the first
electrode terminal is transferred to the free magnetic sub-layer
through the spin-current transfer layer so that the spin current
torque is generated in the free magnetic sub-layer.
12. The magnetic RAM according to claim 10, wherein a voltage pulse
is applied between the first electrode terminal and the second
electrode terminal to allow the current-driven spin transfer torque
due to current flowing from the first electrode terminal to the
second electrode terminal to be applied to the free magnetic
sub-layer, so that the magnetization direction of the free magnetic
sub-layer is a downward direction.
13. The magnetic RAM according to claim 11, wherein a voltage pulse
is applied between the first electrode terminal and the second
electrode terminal to allow the current-driven spin transfer torque
due to current flowing from the first electrode terminal to the
second electrode terminal to be applied to the free magnetic
sub-layer, so that the magnetization direction of the free magnetic
sub-layer is a downward direction.
14. The magnetic RAM according to claim 10, wherein a voltage pulse
is applied between the first electrode terminal and the second
electrode terminal to allow the current-driven spin transfer torque
due to current flowing from the second electrode terminal to the
first electrode terminal to be applied to the free magnetic
sub-layer, so that the magnetization direction of the free magnetic
sub-layer is an upward direction.
15. The magnetic RAM according to claim 11, wherein a voltage pulse
is applied between the first electrode terminal and the second
electrode terminal to allow the current-driven spin transfer torque
due to current flowing from the second electrode terminal to the
first electrode terminal to be applied to the free magnetic
sub-layer, so that the magnetization direction of the free magnetic
sub-layer is an upward direction.
16. The magnetic RAM according to claim 1, wherein the memory cell
further includes an electrode-insulating layer disposed between the
first electrode terminal, the second electrode terminal, and the
third electrode terminal so that the first electrode terminal, the
second electrode terminal, and the third electrode terminal are
insulated from each other so as to prevent current from directly
flowing therebetween.
Description
CROSS REFERENCE TO RELATED APPLICATION
[0001] The present application claims priority to Korean Patent
Application No. 10-2018-0072127, filed Jun. 22, 2018, the entire
contents of which is incorporated herein for all purposes by this
reference.
BACKGROUND OF THE INVENTION
Field of the Invention
[0002] The present invention relates to a magnetic random access
memory (MRAM), and more particularly to a magnetic RAM that is
capable of decreasing the current density required for switching
while reducing the time consumed for switching.
Description of the Related Art
[0003] Today, computers are widely used in many fields. In such a
computer, a RAM (Random Access Memory) is widely used as one of
storage devices for storing or reading a variety of information.
New technologies have been proposed to compensate for the drawbacks
of RAM, one thereof being a magnetic random access memory
(MRAM).
[0004] The magnetic RAM is one of the next-generation memory
technologies, and can store a variety of information according to
the magnetization direction of a magnet. In order to store
information in the magnetic RAM, the magnetization direction of a
free magnetic layer is switched in such a manner as to be the
upward or downward direction. Current-driven spin transfer torque
is used to switch the magnetization direction of the free magnetic
layer.
[0005] As current passes through a fixed magnetic layer, the
spinning directions of electrons are aligned in the magnetization
direction of the fixed magnetic layer. The spin-aligned electrons
tunnel through an insulating layer and enter the free magnetic
layer.
[0006] Herein, when the directions in which the electrons spin are
different from the magnetization direction of the free magnetic
layer, the magnetization direction of the free magnetic layer is
rotated. This phenomenon is referred to as a spin transfer
torque.
[0007] In the related art, current is applied to generate the spin
transfer torque, which can be referred to as a current-driven spin
transfer torque.
[0008] The magnetic RAM according to this related art has the
following problems.
[0009] When switching the magnetic RAM using the current-driven
spin transfer torque, more current density is required to reduce
the time consumed for switching. The increased current density
causes various problems, such as a problem in which a transistor
having a small size cannot be used, a problem in that the amount of
electric power that is consumed increases, and a problem in that
the reliability of an insulating layer is lowered.
[0010] Therefore, there is a demand for a magnetic RAM technique
that enables the current density required for switching to be
reduced while also reducing the time taken for switching.
SUMMARY OF THE INVENTION
[0011] Accordingly, the present invention has been made keeping in
mind the above problems occurring in the related art, and an object
of the present invention is to provide a magnetic RAM capable of
switching the magnetization direction at a small current density to
record or store various information by decreasing the current
density required to switch the magnetization direction.
[0012] In order to achieve the above-mentioned object, according to
an embodiment of the present invention, there is provided a
magnetic RAM including a memory cell, the memory cell including: a
metal layer provided with a first electrode terminal for receiving
a voltage pulse applied from an outside; a magnetic tunnel junction
layer disposed in contact with a lower surface of the metal layer
to store predefined information by causing a magnetization
direction of at least a part thereof to be up or down; a
spin-current transfer layer disposed in contact with a lower
surface of the magnetic tunnel junction layer and provided with a
second electrode terminal for receiving a voltage pulse applied
from the outside to transfer spin current to the magnetic tunnel
junction layer; a spin-current generation layer disposed in contact
with a lower surface of the spin-current transfer layer to generate
the spin current to be transferred to the magnetic tunnel junction
layer through the spin-current transfer layer; and a thermal
electron injection layer disposed in contact with a lower surface
of the spin-current generation layer and provided with a third
electrode terminal for receiving a voltage pulse applied from the
outside to inject thermal electrons into the spin-current
generation layer so that the spin current is generated in the
spin-current generation layer, wherein the magnetization direction
of at least a part of the magnetic tunnel junction layer is changed
due to a spin transfer torque generated in at least the part of the
magnetic tunnel junction layer by the spin current.
[0013] Herein, the metal layer or the spin-current transfer layer
may be configured to include a non-magnetic metal.
[0014] Furthermore, the magnetic tunnel junction layer may include
a fixed magnetic sub-layer including a magnetic metal; a free
magnetic sub-layer provided below the fixed magnetic sub-layer and
including a magnetic metal; and an insulating sub-layer located
between the fixed magnetic sub-layer and the free magnetic
sub-layer to insulate the fixed magnetic sub-layer and the free
magnetic sub-layer from each other.
[0015] Furthermore, the fixed magnetic sub-layer may be any one of
FePt having a face-centered tetragonal (FCT) crystal structure,
FePd having an FCT crystal structure, CoPt having an FCT crystal
structure, [Co/Pt].sub.N of a multi-layer thin film structure,
[Co/Pd].sub.N of a multi-layer thin film structure, [Co/Ni].sub.N a
multi-layer thin film structure, CoFeB/Ta of a bi-layer structure,
CoFeB/W of a bi-layer structure, and CoFeB/Hf of a bi-layer
structure.
[0016] In addition, the free magnetic sub-layer may be any one of
FePt having an FCT crystal structure, FePd having an FCT crystal
structure, CoPt having an FCT crystal structure, [Co/Pt].sub.N of a
multilayer thin film structure, [Co/Pd].sub.N of a multilayer thin
film structure, [Co/Ni].sub.N of a multilayer thin film structure,
CoFeB/Ta of a bi-layer structure, CoFeB/W of a bi-layer structure,
and CoFeB/Hf of a bi-layer structure.
[0017] In addition, the thermal electron injection layer may
include a base insulating layer disposed in contact with a lower
surface of the spin-current generation layer; and a non-magnetic
metal base layer provided below the base insulating layer and
including a non-magnetic metal.
[0018] Furthermore, the spin-current generation layer is a magnetic
metal layer including a magnetic metal.
[0019] Furthermore, a magnetization direction of the fixed magnetic
sub-layer may be perpendicular to a magnetization direction of the
spin-current generation layer.
[0020] Furthermore, the spin-current generation layer may be any
one of Co, Fe, Ni, a CoFe alloy, a NiFe alloy, a CoFeAl alloy, a
CoAl alloy, and a CoFeB alloy.
[0021] In addition, the spin current generated in the spin-current
generation layer by a voltage pulse applied via the third electrode
terminal and the second electrode terminal may be transferred to
the free magnetic sub-layer through the spin-current transfer layer
so that the spin current torque is generated in the free magnetic
sub-layer.
[0022] In addition, the spin current generated in the spin-current
generation layer by the voltage pulse applied via the third
electrode terminal and the first electrode terminal may be
transferred to the free magnetic sub-layer through the spin-current
transfer layer so that the spin current torque is generated in the
free magnetic sub-layer.
[0023] Herein, the voltage pulse may be applied through the first
electrode terminal and the second electrode terminal to allow the
current-driven spin transfer torque due to current flowing from the
first electrode terminal to the second electrode terminal to be
applied to the free magnetic sub-layer, so that the magnetization
direction of the free magnetic sub-layer is a downward
direction.
[0024] Herein, the voltage pulse may be applied through the first
electrode terminal and the second electrode terminal to allow the
current-driven spin transfer torque due to current flowing from the
second electrode terminal to the first electrode terminal to be
applied to the free magnetic sub-layer, so that the magnetization
direction of the free magnetic sub-layer is an upward
direction.
[0025] Herein, the memory cell may further include an
electrode-insulating layer disposed between the first electrode
terminal, the second electrode terminal, and the third electrode
terminal so that the first electrode terminal, the second electrode
terminal, and the third electrode terminal are insulated from each
other so as to prevent current from directly flowing
therebetween.
[0026] The magnetic RAM according to the present invention has an
advantage in that the current density required for switching the
magnetization direction of the free magnetic sub-layer is
reduced.
[0027] In addition, it is possible to reduce a failure, realize
high speed switching, and avoid interference in the write/read
operations, whereby there is an advantage in that the accuracy and
reliability of the magnetic RAM are increased.
BRIEF DESCRIPTION OF THE DRAWINGS
[0028] The above and other objects, features and other advantages
of the present invention will be more clearly understood from the
following:
[0029] FIG. 1 is a schematic diagram illustrating a memory cell
included in a magnetic RAM according to an embodiment of the
present invention;
[0030] FIG. 2 is a schematic diagram illustrating a magnetization
direction of a part of a memory cell included in a magnetic RAM
according to an embodiment of the present invention;
[0031] FIGS. 3A to 3D are schematic diagrams illustrating a
sequential state of memory cells included in a magnetic RAM in
order to explain a write operation of the magnetic RAM according to
an embodiment of the present invention;
[0032] FIG. 4 is a schematic diagram illustrating application of a
voltage pulse to a memory cell in a write operation of a magnetic
RAM according to an embodiment of the present invention;
[0033] FIGS. 5A and 5B are schematic diagrams illustrating the
application of a voltage pulse to a memory cell and magnetization
directions in a write operation of a magnetic RAM according to an
embodiment of the present invention;
[0034] FIG. 6 is a schematic diagram illustrating an exemplary
configuration of one memory cell in a magnetic RAM according to an
embodiment of the present invention; and
[0035] FIG. 7 is a schematic diagram illustrating an exemplary
configuration of a plurality of memory cells in a magnetic RAM
according to an embodiment of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
[0036] Hereinafter, preferred embodiments of the present invention
will be described in detail with reference to the accompanying
drawings.
[0037] FIG. 1 is a schematic diagram illustrating a memory cell
included in a magnetic RAM according to an embodiment of the
present invention; FIG. 2 is a schematic diagram illustrating a
magnetization direction of a part of a memory cell included in a
magnetic RAM according to an embodiment of the present invention;
FIGS. 3A to 3D are schematic diagrams illustrating a sequential
state of memory cells included in a magnetic RAM in order to
explain a write operation of the magnetic RAM according to an
embodiment of the present invention; FIG. 4 is a schematic diagram
illustrating application of a voltage pulse to a memory cell in a
write operation of a magnetic RAM according to an embodiment of the
present invention; FIGS. 5A and 5B are schematic diagrams
illustrating the application of a voltage pulse to a memory cell
and magnetization directions in a write operation of a magnetic RAM
according to an embodiment of the present invention; FIG. 6 is a
schematic diagram illustrating an exemplary configuration of one
memory cell in a magnetic RAM according to an embodiment of the
present invention; and FIG. 7 is a schematic diagram illustrating
an exemplary configuration of a plurality of memory cells in a
magnetic RAM according to an embodiment of the present
invention.
[0038] First, referring to FIG. 1, a magnetic RAM according to an
embodiment of the present invention is configured to include a
memory cell, in which the memory cell includes a metal layer, a
magnetic tunnel junction layer, a spin-current transfer layer, a
spin-current generation layer, and a thermal electron injection
layer, and may further include an electrode-insulating layer.
[0039] In the embodiment of the present invention, the metal layer
100 is located at an upper portion of the memory cell of the
magnetic RAM and is provided with a first electrode terminal 150
for receiving a voltage pulse applied from a power source outside
of the memory cell. The metal layer 100 is preferably configured to
include a non-magnetic metal. Therefore, more specifically, the
metal layer 100 may be referred to as a non-magnetic metal layer.
The first electrode terminal 150 is provided to receive voltage
pulses for switching the magnetization direction 233 of a free
magnetic sub-layer 230, which will be described later.
[0040] The magnetic tunnel junction layer 200 is disposed in
contact with the lower surface of the metal layer 100, as shown in
FIG. 1. The magnetization direction of at least a part of the
magnetic tunnel junction layer 200 points up or down so that
predefined information may be stored.
[0041] The magnetic tunnel junction layer 200 may be configured to
include three sub-layers. That is, a fixed magnetic sub-layer 210,
a free magnetic sub-layer 230, and an insulating sub-layer 220 are
included in the magnetic tunnel junction layer 200. The fixed
magnetic sub-layer 210, the insulating sub-layer 220, and the free
magnetic sub-layer 230 serve as magnetic tunnel junctions.
[0042] The fixed magnetic sub-layer 210 includes a metal magnetic
material and is disposed at an upper portion of the magnetic tunnel
junction layer 200, as shown in FIG. 1. The insulating sub-layer
220 and the free magnetic sub-layer 230 are disposed below the
fixed magnetic sub-layer 210.
[0043] It is preferable that the magnetization direction of the
fixed magnetic sub-layer 210 be maintained in a fixed state.
[0044] It is preferable that the magnetization direction of the
fixed magnetic sub-layer 210 be perpendicular to the magnetization
direction of a spin-current generation layer 400, which will be
described later.
[0045] The fixed magnetic sub-layer 210 is preferably one of FePt
having a face-centered tetragonal (FCT) crystal structure, FePd
having an FCT crystal structure, CoPt having an FCT crystal
structure, [Co/Pt].sub.N of a multi-layer thin film structure,
[Co/Pd].sub.N of a multi-layer thin film structure, [Co/Ni].sub.N
of a multi-layer thin film structure, CoFeB/Ta of a bi-layer
structure, CoFeB/W of a bi-layer structure, and CoFeB/Hf of a
bi-layer structure.
[0046] The free magnetic sub-layer 230 is disposed below the fixed
magnetic sub-layer 210, and more specifically, below the insulating
sub-layer 220, which is disposed below the fixed magnetic sub-layer
210.
[0047] The free magnetic sub-layer 230 is preferably configured to
include a magnetic metal.
[0048] The free magnetic sub-layer 230 stores predefined
information by changing the magnetization direction thereof.
[0049] In addition, the free magnetic sub-layer 230 is preferably
formed such that the magnetization direction 233 thereof is
perpendicular to the magnetization direction 405 of the
spin-current generation layer 400, in which the magnetization
direction 233 may be switched due to a voltage pulse applied from
the outside.
[0050] A more detailed description on switching, in which the
magnetization direction 233 of the free magnetic sub-layer 230 is
switched, will be provided later.
[0051] The free magnetic sub-layer 230 is preferably one of FePt
having an FCT crystal structure, FePd having an FCT crystal
structure, CoPt having an FCT crystal structure, Co/Pt of a
multilayer thin film structure, Co/Pd of a multilayer thin film
structure, Co/Ni of a multilayer thin film structure, CoFeB/Ta of a
bi-layer structure, CoFeB/W of a bi-layer structure, and CoFeB/Hf
of a bi-layer structure.
[0052] The insulating sub-layer 220 is located between the fixed
magnetic sub-layer 210 and the free magnetic sub-layer 230, so that
the fixed magnetic sub-layer 210 and the free magnetic sub-layer
230 are not in direct contact with each other. The insulating
sub-layer 220 serves as a tunnel barrier, and may be made of
magnesium oxide, aluminum oxide, or the like.
[0053] The magnetic tunnel junction layer 200 including the fixed
magnetic sub-layer 210, the insulating sub-layer 220, and the free
magnetic sub-layer 230 is preferably provided such that the
magnetization direction in at least one part thereof may be changed
by spin transfer torque caused due to spin current transferred from
the spin-current generation layer 400, which will be described
later.
[0054] The spin-current transfer layer 300 is disposed in contact
with the lower surface of the magnetic tunnel junction layer 200. A
second electrode terminal 350 for receiving a voltage pulse from a
power source external to the magnetic RAM is provided in the
spin-current transfer layer 300 and transfers the spin current to
the magnetic tunnel junction layer 200.
[0055] That is, the spin current generated in the spin-current
generation layer 400 is transferred to the free magnetic sub-layer
230. The spin-current transfer layer 300 is preferably configured
to include a non-magnetic metal.
[0056] The spin-current generation layer 400 is disposed in contact
with the lower surface of the spin-current transfer layer 300, and
generates a spin current to be transferred to the magnetic tunnel
junction layer 200 through the spin-current transfer layer 300.
[0057] The spin-current generation layer 400 is preferably a
magnetic metal layer including a magnetic metal.
[0058] The magnetization direction 405 of the spin-current
generation layer 400 is preferably perpendicular to the respective
magnetization directions 213 and 233 of the fixed magnetic
sub-layer 210 and the free magnetic sub-layer 230.
[0059] For this purpose, as shown in FIG. 2, the magnetization
direction 405 of the spin-current generation layer 400 is oriented
parallel to a plate-shaped thin film, and the respective
magnetization directions 233 and 213 of the free magnetic sub-layer
230 and the fixed magnetic sub-layer 210 are preferably
perpendicular to the magnetization direction of the spin-current
generation layer 400.
[0060] Herein, in order to increase the integration density of the
memory cell in the magnetic RAM, it is preferable to use
perpendicular magnetization material for the free magnetic
sub-layer 230 and the fixed magnetic sub-layer 210. Specifically,
it is preferable to use perpendicular magnetization material, which
is larger in magnetic anisotropy energy per unit volume than
in-plane magnetization material, because the larger the magnetic
anisotropy energy per unit volume, the greater the integration
density.
[0061] Using the in-plane magnetization material in the
spin-current generation layer 400 enables the magnetization
direction 405 of the spin-current generation layer 400 and the
magnetization direction 213 of the free magnetic sub-layer 230 to
be perpendicular to each other. Setting the magnetization
directions to be perpendicular to each other is preferable because
the thermal spin transfer torque may be most efficiently
transferred from the spin-current generation layer 400 to the free
magnetic sub-layer 230.
[0062] The spin-current generation layer 400 may be preferably any
one of Co, Fe, Ni, a CoFe alloy, a NiFe alloy, a CoFeAl alloy, a
CoAl alloy, and a CoFeB alloy.
[0063] The thermal electron injection layer 500 is disposed in
contact with the lower surface of the spin-current generation layer
400.
[0064] In addition, a third electrode terminal 550 for receiving
voltage pulses applied from a power source external to the magnetic
RAM is provided to inject thermal electrons to the spin-current
generation layer 400 so that the spin current may be generated in
the spin-current generation layer 400.
[0065] The thermal electron injection layer 500 is preferably
configured to include a base insulating layer 510 and a
non-magnetic metal base layer 520.
[0066] The base insulating layer 510 is located at the upper
portion of the thermal electron injection layer 500 and is in
contact with the lower surface of the spin-current generation layer
400. The base insulating layer 510 serves as a tunnel barrier, and
is preferably made of magnesium oxide or aluminum oxide.
[0067] In addition, the non-magnetic metal base layer 520 is
disposed in contact with the lower surface of the base insulating
layer 510 and is provided with the third electrode terminal 550 for
receiving voltage pulses applied from an external power source. The
non-magnetic metal base layer 520 is preferably configured to
include a non-magnetic metal.
[0068] The non-magnetic metal base layer 520 and the base
insulating layer 510 serve to inject thermal electrons into the
spin-current generation layer 400. When the thermal electrons are
injected into the spin-current generation layer 400, the thermal
electrons are converted into the spin current in the spin-current
generation layer 400.
[0069] The operation of the magnetic RAM according to the
embodiment of the present invention as described above will now be
described with reference to FIGS. 3 to 5.
[0070] In the magnetic RAM according to the embodiment of the
present invention, the write operation of the memory cell, that is,
the process of switching the magnetization direction 233 of the
free magnetic sub-layer 230, is caused due to a combination of two
voltage pulses.
[0071] First, starting from the initial state shown in FIG. 2, a
first voltage pulse 610 is applied so that thermal electrons are
injected into the spin-current generation layer 400 as shown in
FIG. 3A.
[0072] That is, the spin current generated in the spin-current
generation layer 400 by the voltage pulse 610 applied through the
third electrode terminal 550 and the second electrode terminal 350
is transferred to the free magnetic sub-layer 230 through the
spin-current transfer layer 300, so that spin transfer torque is
generated in the free magnetic sub-layer 230.
[0073] More specifically, the voltage pulse 610 is applied through
the second electrode terminal 350 and the third electrode terminal
550. Here, the applied voltage pulse 610 is preferably 1 V or
more.
[0074] When a voltage pulse 610 of 1 V or more is applied, thermal
electrons having energy of 1 eV or more are injected from the
non-magnetic metal base layer 520 into the spin-current generation
layer 400 by tunneling through the base insulating layer 510.
[0075] The spin-current generation layer 400 converts the thermal
electrons into the spin current by electron-magnon coupling.
[0076] The spin current generated due to the conversion of the
thermal electrons is transferred to the spin-current transfer layer
300. The spin-current transfer layer 300 transfers the spin current
to the free magnetic sub-layer 230. The spin transfer torque is
generated by the spin current transferred to the free magnetic
sub-layer 230.
[0077] Here, the spin transfer torque may be referred to as thermal
spin transfer torque in that the spin transfer torque is generated
by the spin current generated by the thermal electrons.
[0078] When sufficient thermal spin transfer torque is generated,
the magnetization direction 233 of the free magnetic sub-layer 230,
which is the perpendicular direction, is rotated into the in-plane
magnetization direction 235 as shown in FIG. 3B.
[0079] When the magnetization direction 235 of the free magnetic
sub-layer 230 is rotated into the in-plane direction, a secondary
voltage pulse is applied so that to the in-plane magnetization
direction 235 of the free magnetic sub-layer 230 is selectively
switched to be the perpendicular magnetization direction 233 or
237.
[0080] Meanwhile, although the first voltage pulse may be applied
through the second electrode terminal 350 and the third electrode
terminal 550 as described above, it is also possible to apply the
first voltage pulse 615 through the first electrode terminal 150
and the third electrode terminal 550, as shown in FIG. 4.
[0081] As shown in FIG. 4, even when the voltage pulse 615 is
applied through the first electrode terminal 150 and the third
electrode terminal 550, the process in which the magnetization
direction 233 is changed in the free magnetic sub-layer 230 is the
same as that described above.
[0082] Accordingly, the spin current generated in the spin-current
generation layer 400 by the voltage pulse 615 applied through the
third electrode terminal 550 and the first electrode terminal 150
is transferred to the free magnetic sub-layer 230 through the
spin-current transfer layer 300 so that a spin transfer torque is
preferably generated in the free magnetic sub-layer 230.
[0083] A description will be hereinafter provided of the process in
which the second voltage pulse 620 is then applied to complete the
switching of the in-plane magnetization direction 235 in the free
magnetic sub-layer 230.
[0084] As shown in FIG. 3C, as an example of the second step of the
write operation into the memory cell in the magnetic
[0085] RAM according to the embodiment of the present invention,
the second voltage pulse 620 is applied through the second
electrode terminal 350 and the first electrode terminal 150. Here,
the magnetization direction 213 of the fixed magnetic sub-layer 210
is a direction perpendicular to the magnetization direction 405 of
the spin-current generation layer 400 or a direction perpendicular
to the plane of the thin film, as described above.
[0086] In addition, as shown in FIG. 3C, current flows from the
first electrode terminal 150 to the second electrode terminal 350.
Due to this current, the spin transfer torque is applied to the
free magnetic sub-layer 230. Here, the spin transfer torque is
caused by the current, and thus it may be referred to as
current-driven spin transfer torque.
[0087] The current-driven spin transfer torque causes the
magnetization direction of the free magnetic sub-layer 230 to be
switched into a downward direction 237 as shown in FIG. 3D. That
is, the magnetization direction of the free magnetic sub-layer 230
is switched into the downward direction 237, which is perpendicular
to the magnetization direction 405 of the spin-current generation
layer 400.
[0088] Thus, the final switching magnetization direction of the
free magnetic sub-layer 230 is the downward direction 237.
[0089] Accordingly, the voltage pulse is applied through the first
electrode terminal 150 and the second electrode terminal 350 to
allow the current-driven spin transfer torque due to current
flowing from the first electrode terminal 150 to the second
electrode terminal 350 to be applied to the free magnetic sub-layer
230, so that the magnetization direction of the free magnetic
sub-layer 230 is the downward direction 237.
[0090] On the other hand, the process in which the magnetization
direction of the free magnetic sub-layer 230 is finally switched
into the upward magnetization direction 233 is as follows.
[0091] As shown in FIG. 5A, a voltage pulse 625 is applied across
the first electrode terminal 150 and the second electrode terminal
350, the current being applied to flow from the second electrode
terminal 350 to the first electrode terminal 150.
[0092] Herein, the magnetization direction 213 of the fixed
magnetic sub-layer 210 is perpendicular to the magnetization
direction 405 of the spin-current generation layer 400, as
described above. Of course, since the magnetization direction 405
of the spin-current generation layer 400 is parallel to the plane
of the thin film, it may be noted that the magnetization direction
213 of the fixed magnetic sub-layer 210 is perpendicular to the
plane of the thin film.
[0093] A current-driven spin transfer torque is applied to the free
magnetic sub-layer 230 due to the current flowing from the second
electrode terminal 350 to the first electrode terminal 150. As
shown in FIG. 5B, the current-driven spin transfer torque causes
the magnetization direction of the free magnetic sub-layer 230 to
be rotated into the upward direction 233, perpendicular to the
plane of the thin film.
[0094] Therefore, the final magnetization direction of the free
magnetic sub-layer 230 is the upward direction, which is
perpendicular to the magnetization direction 405 of the
spin-current generation layer 400.
[0095] As described above, the voltage pulse is applied through the
first electrode terminal 150 and the second electrode terminal 350,
so that the current-driven spin transfer torque due to current
flowing from the second electrode terminal 350 to the first
electrode terminal 150 is applied to the free magnetic sub-layer
230 to cause the magnetization direction of the free magnetic
sub-layer 230 to be the upward magnetization direction.
[0096] In summary, it may be noted that the switching of the
magnetization direction in the free magnetic sub-layer 230 is
determined by the flow direction of the current applied by the
second voltage pulse 620 or 625.
[0097] A read operation of the memory cell in the magnetic RAM
according to the embodiment of the present invention is performed
by a single voltage pulse between the second electrode terminal 350
and the first electrode terminal 150. In this case, the voltage
pulse is not applied between the third electrode terminal 550 and
the second electrode terminal 350. Therefore, it is possible to
avoid the probability of a failure in which a write operation is
performed during a read operation.
[0098] A more detailed description will be made with reference to
FIGS. 6 and 7.
[0099] As shown in FIG. 6, the first electrode terminal 150 to the
third electrode terminal 550 of the memory cell in the magnetic RAM
according to the present invention may be arranged. Herein, the
electrode-insulating layer 600 is disposed between the first
electrode terminal 150, the second electrode terminal 350, and the
third electrode terminal 550. The electrode-insulating layer 600 is
provided to allow the first electrode terminal 150, the second
electrode terminal 350, and the third electrode terminal 550 to be
insulated from each other so that current does not directly flow
therebetween.
[0100] The electrode-insulating layer 600 is a passivation
insulator, and is preferably formed of a material such as
Si.sub.3N.sub.4, SiO.sub.2, Al.sub.2O.sub.3, or
Ta.sub.2O.sub.5.
[0101] As shown in FIG. 6, the first electrode terminal 150 is
connected to the upper metal layer 100, the second electrode
terminal 350 is connected to the spin-current transfer layer 300,
and the third electrode terminal 550 is connected to the
non-magnetic metal base layer 520. As shown in FIG. 6, the areas of
each layer are different from each other, so that the electrode
terminals may be easily formed on each layer or connected to each
layer.
[0102] The area of the spin-current transfer layer 300 may be
formed to be larger than the areas of the metal layer 100, the
magnetic tunnel junction layer 200, the fixed magnetic sub-layer
210, the insulating sub-layer 220, and the free magnetic sub-layer
230, so that the second electrode terminal 350 is connected to one
surface of the spin-current transfer layer 300.
[0103] Similarly, the area of the non-magnetic metal base layer 520
is formed to be larger than the areas of the spin-current
generation layer 400, the thermal electron injection layer 500, and
the base insulating layer 510 formed thereon, so that the
non-magnetic metal base layer 520 may be connected to the third
electrode terminal 550 at one surface thereof. An
electrode-insulating layer 600 is formed between the first
electrode terminal 150, the second electrode terminal 350, and the
third electrode terminal 550 to insulate each electrode terminal
from the others and at the same time to support each electrode
terminal.
[0104] According to the related art, using only current-driven spin
transfer torque, about 300 fJ of energy is used to operate one
memory cell. However, according to the present invention, energy of
100 fJ is used to generate the thermal spin transfer torque, so
that the energy for generating the sufficient current-driven spin
transfer torque may be reduced to 1/5 of the existing 300 fJ.
Therefore, the memory cell may be operated with only the energy of
160 fJ, obtained by adding the current-driven spin transfer torque
energy of 60 fJ (=300 fJ/5) to the thermal spin transfer torque
energy of 100 fJ.
[0105] Here, a magnetic RAM including a plurality of memory cells
may be formed by arranging, in multiples, the memory cells of the
magnetic RAM having the structure shown in FIG. 6. That is, the
memory cell shown in FIG. 6 may be arranged in multiples to form a
magnetic RAM including a plurality of memory cells.
[0106] Meanwhile, magnetic RAM including a plurality of memory
cells is possible and preferable, as shown in FIG. 7. In FIG. 7,
eight memory cells are illustrated as an example of a plurality of
memory cells.
[0107] As shown in FIG. 7, the magnetic RAM according to the
embodiment of the present invention has eight memory cells, in
which the memory cells preferably share a second electrode terminal
350 or a third electrode terminal 550.
[0108] It is also preferable that the first electrode terminals 150
be provided in each of the memory cells. As shown in FIG. 7, the
first electrode terminals 150 may be provided in up to a number
corresponding to the number of memory cells.
[0109] As shown in FIG. 7, the magnetic RAM including the plurality
of memory cells may be implemented by forming the plurality of
cells in the upper part using the thermal electron injection layer
500, the spin-current generation layer 400, and the spin-current
transfer layer 300 as a common base. An embodiment of the magnetic
RAM in which a plurality of memory cells may be simultaneously
driven is shown as an example, in which the magnetic RAM is
configured such that a large number of memory cells is formed and
the second electrode terminal 350 and the third electrode terminal
550 are commonly used.
[0110] In order to reduce the area of the magnetic RAM, one second
electrode terminal 350 is formed over the spin-current transfer
layer 300 and one third electrode terminal 550 is formed over the
non-magnetic metal base layer 520.
[0111] Only the first electrode terminal 150 is connected to each
memory cell to cause the plurality of memory cells to be operated.
When information is written to an i-th memory cell in the magnetic
RAM configured with N memory cells, a voltage pulse is first
applied across the second electrode terminal 350 and the third
electrode terminal 550 to generate thermal electrons, whereby the
current consumed in switching each memory cell may be reduced.
[0112] Then, the magnetization direction of the free magnetic
sub-layer 230 in each memory cell is set to be up or down by the
polarity of the voltage pulse applied across the first electrode
terminal 150-i (i is an integer) of the i-th memory cell and the
second electrode terminal 350. It will be appreciated that
reference numerals 150-1 to 150-8 denote the respective first
electrode terminals of the first to eighth memory cells in FIG.
7.
[0113] When energy of 300 fJ is used to operate one memory cell
according to the related art, energy of 300 fJ*N is consumed to
operate N memory cells. When energy of 100 fJ is used to generate
the thermal spin transfer torque in the common thermal electron
injection layer 500 and the energy used to generate the
current-driven spin transfer torque by the effect of the thermal
spin transfer torque is reduced to 1/p, the energy used for one
memory cell is determined to be (300 fJ*N/p+100 fJ)/N=300 fJ/p+100
fJ/N).
[0114] For example, when 10 memory cells are simultaneously driven
and the switching energy of each cell is reduced to 1/5 by the
thermal spin transfer torque, the switching energy used for one
memory cell is determined to be 300 fJ/5+100 fJ/10=70 fJ. As a
result, the memory cell of the magnetic RAM may be effectively
operated using less energy than the related art.
[0115] As described above, in the related art, only the
current-driven spin transfer torque is used to perform a write
operation of the magnetic RAM, that is, magnetization direction
switching. In contrast, in the magnetic RAM according to the
present invention, a combination of thermal spin transfer torque
and current-driven spin transfer torque is used to perform the
write operation of the magnetic RAM. That is, the combination of
the thermal spin transfer torque and the current-driven spin
transfer torque results in switching the magnetization direction of
the free magnetic sub-layer.
[0116] Since a combination of the thermal spin transfer torque and
the current-driven spin transfer torque is used, there is an
advantage in that the current density or consumed energy required
for switching the magnetization direction in the magnetic RAM is
reduced.
[0117] In addition, since the switching is performed by a
combination of voltage pulses in two stages, there is an advantage
in that an error rate is lowered even upon high-speed switching.
That is, when switching the magnetic RAM using the current-driven
spin transfer torque, the faster the switching time, the higher the
error rate.
[0118] There is thus a problem in that high-speed switching is
limited in order to suppress an increase in error rate in the
related art, whereas there is an advantage in that the error rate
is reduced so that high-speed switching below 1 nanosecond is
possible, as described above, in the magnetic RAM according to the
present invention.
[0119] Further, since a single voltage pulse is applied across the
second electrode terminal and the first electrode terminal but the
voltage pulse is not applied across the third electrode terminal
and the second electrode terminal during a read operation of the
magnetic RAM, it is possible to avoid the risk of causing a write
operation during a read operation. Therefore, there is an advantage
in that the accuracy and reliability of the magnetic RAM are
increased.
* * * * *