U.S. patent application number 16/342201 was filed with the patent office on 2019-10-24 for mosfet and power conversion circuit.
The applicant listed for this patent is SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.. Invention is credited to Daisuke ARAI, Mizue KITADA.
Application Number | 20190326388 16/342201 |
Document ID | / |
Family ID | 60107423 |
Filed Date | 2019-10-24 |
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United States Patent
Application |
20190326388 |
Kind Code |
A1 |
ARAI; Daisuke ; et
al. |
October 24, 2019 |
MOSFET AND POWER CONVERSION CIRCUIT
Abstract
Provided is a MOSFET which includes: a semiconductor base
substrate having an n-type column region and a p-type column
region, a base region and a source region, wherein a super junction
structure is formed of the n-type column region and the p-type
column region; a trench having side walls and a bottom; a gate
electrode formed in the trench by way of a gate insulation film; a
carrier compensation electrode positioned between the gate
electrode and the bottom of the trench; an insulation region
separating the carrier compensation electrode from the side walls
and the bottom; and a source electrode electrically connected to
the source region and also electrically connected to the carrier
compensation electrode. According to the MOSFET of the present
invention, even when an irregularity in a charge balance occurs
around the gate, an irregularity in switching characteristics when
the MOSFET is turned off can be decreased.
Inventors: |
ARAI; Daisuke; (Saitama,
JP) ; KITADA; Mizue; (Saitama, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SHINDENGEN ELECTRIC MANUFACTURING CO., LTD. |
Chiyoda-ku, Tokyo |
|
JP |
|
|
Family ID: |
60107423 |
Appl. No.: |
16/342201 |
Filed: |
November 11, 2016 |
PCT Filed: |
November 11, 2016 |
PCT NO: |
PCT/JP2016/083610 |
371 Date: |
April 16, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 29/1608 20130101;
H01L 29/7813 20130101; H01L 29/772 20130101; H01L 29/868 20130101;
H02M 7/5387 20130101; H01L 29/0878 20130101; H01L 29/407 20130101;
H01L 29/1095 20130101; H01L 29/0634 20130101; H01L 29/7805
20130101; H02M 3/156 20130101; H01L 29/872 20130101 |
International
Class: |
H01L 29/06 20060101
H01L029/06; H01L 29/10 20060101 H01L029/10; H01L 29/40 20060101
H01L029/40; H01L 29/78 20060101 H01L029/78; H01L 29/868 20060101
H01L029/868; H01L 29/16 20060101 H01L029/16; H01L 29/872 20060101
H01L029/872 |
Claims
1. A MOSFET comprising: a semiconductor base substrate having: an
n-type column region and a p-type column region formed in an
alternately arranged state; a p-type base region positioned on a
surface of the n-type column region and a surface of the p-type
column region; and an n-type source region positioned on a surface
of the base region, wherein a super junction structure is formed of
the n-type column region and the p-type column region; a trench
formed in a region where the n-type column region is positioned as
viewed in a plan view, and having side walls disposed adjacently to
the n-type column region, the base region and the source region and
a bottom disposed adjacently to the n-type column region; a gate
electrode formed in the trench by way of a gate insulation film; a
carrier compensation electrode positioned between the gate
electrode and the bottom of the trench; an insulation region
disposed in the trench, the insulation region extending between the
gate electrode and the carrier compensation electrode, and
extending along the side walls and the bottom of the trench thus
separating the carrier compensation electrode from the side walls
and the bottom; and a source electrode positioned on a surface of
the semiconductor base substrate on a first main surface side, the
source electrode electrically connected to the source region and
also electrically connected to the carrier compensation electrode,
wherein the semiconductor base substrate further has a
low-resistance semiconductor layer formed on a surface thereof on a
second main surface side which is a side opposite to the first main
surface, and assuming a thickness of the carrier compensation
electrode from an uppermost portion to a lowermost portion as b and
assuming a depth from a lowermost portion of the gate electrode to
an uppermost portion of the low-resistance semiconductor layer as
c, a relationship of 10b.ltoreq.c is satisfied.
2. The MOSFET according to claim 1, wherein assuming a thickness of
the gate electrode from an uppermost portion to a lowermost portion
as a and assuming a thickness of the carrier compensation electrode
from an uppermost portion to a lowermost portion as b, a
relationship of 0.2.ltoreq.a.ltoreq.b.ltoreq.a is satisfied.
3. (canceled)
4. The MOSFET according to claim 1, wherein dopant concentration in
the n-type column region which is a region disposed adjacently to
the trench is set to dopant concentration equal to dopant
concentration in the n-type column region at a lowermost portion of
the n-type column region.
5. The MOSFET according to claim 1, wherein dopant concentration in
the n-type column region which is a region disposed adjacently to
the trench is set lower than dopant concentration in the n-type
column region at a lowermost portion of the n-type column
region.
6. The MOSFET according to claim 1, wherein a thickness of the
insulation region between the carrier compensation electrode and
the n-type column region is larger than a thickness of the gate
insulation film.
7-10. (canceled)
Description
RELATED APPLICATIONS
[0001] The present application is a National Phase of International
Application Number PCT/JP2016/083610, filed Nov. 11, 2016.
TECHNICAL FIELD
[0002] The present invention relates to a Metal-Oxide Semiconductor
Field-Effect Transistor (MOSFET) and a power conversion
circuit.
BACKGROUND ART
[0003] Conventionally, there has been known a MOSFET which includes
a semiconductor base substrate where a super junction structure is
formed of an n-type column region and a p-type column region (see
patent document 1, for example).
[0004] As shown in FIG. 10, a conventional MOSFET 800 includes: a
semiconductor base substrate 810 having n-type column regions 814,
p-type column regions 816, a p-type base region 818 formed on
surfaces of the n-type column regions 814 and surfaces of the
p-type column regions 816, and an n-type source region 820 formed
on a surface of the base region 818 and where a super junction
structure is formed of the n-type column regions 814 and the p-type
column regions 816; trenches 822 which are formed so as to reach a
depth position deeper than a deepest portion of the base region 818
in regions where the n-type column region 814 is positioned as
viewed in a plan view and a part of the source region 820 is
exposed on an inner peripheral surface of the trench 822; and gate
electrodes 826 which are embedded in the inside of the trenches 822
by way of the gate insulation films 824 formed on inner peripheral
surfaces of the trenches 822.
[0005] In the conventional MOSFET 800, the n-type column region 814
and the p-type column region 816 are formed such that a total
amount of a dopant in the n-type column region 814 is equal to a
total amount of a dopant in the p-type column region 816. That is,
the n-type column region 814 and the p-type column region 816 are
well-balanced with each other in terms of a charge.
[0006] In this specification, "super junction structure" means a
structure where an n-type column region and a p-type column region
are alternately and repeatedly arranged as viewed in a
predetermined cross section. Further, "total amount of a dopant"
means a total amount of a dopant contained in a constitutional
element (the n-type column region or the p-type column region) in
the MOSFET.
[0007] According to the conventional MOSFET 800, the MOSFET
includes the semiconductor base substrate 810 where the super
junction structure is formed of the n-type column region 814 and
the p-type column region 816 and hence, it is possible to provide a
switching element having a low ON resistance and a high withstand
voltage.
PRIOR ART DOCUMENT
Patent Document
[0008] Patent document 1: JP-A-2012-64660 [0009] Patent document 2:
JP-A-2015-133380
SUMMARY OF INVENTION
Problem to be Solved by the Invention
[0010] The conventional MOSFET 800 forms a switching element having
low ON resistance and a high withstand voltage as described above,
the use of such a MOSFET 800 in a power conversion circuit is
considered. However, in the case where the conventional MOSFET 800
is used in a power conversion circuit, it is found that when there
is an irregularity in a charge balance around a gate, when the
MOSFET is turned off, a large irregularity exists in switching
characteristics (see Id (p-type dopant rich) and Id (n-type dopant
rich) and Vds (n-type dopant rich) and Vds (p-type dopant rich) in
FIG. 3).
[0011] The present invention has been made so as to overcome the
above-mentioned drawbacks, and it is an object of the present
invention to provide a MOSFET and a power conversion circuit which
uses the MOSFET where an irregularity in switching characteristics
when the MOSFET is turned off can be decreased compared to a prior
art even when an irregularity in a charge balance occurs around the
gate.
Solution to Problem
[0012] [1] According to the present invention, there is provided a
MOSFET which includes: a semiconductor base substrate having: an
n-type column region and a p-type column region formed in an
alternately arranged state; a p-type base region positioned on a
surface of the n-type column region and a surface of the p-type
column region; and an n-type source region positioned on a surface
of the base region, wherein a super junction structure is formed of
the n-type column region and the p-type column region; a trench
formed in a region where the n-type column region is positioned as
viewed in a plan view, and having side walls disposed adjacently to
the n-type column region, the base region and the source region and
a bottom disposed adjacently to the n-type column region; a gate
electrode formed in the trench by way of a gate insulation film; a
carrier compensation electrode positioned between the gate
electrode and the bottom of the trench; an insulation region
disposed in the trench, the insulation region extending between the
gate electrode and the carrier compensation electrode, and
extending along the side walls and the bottom of the trench thus
separating the carrier compensation electrode from the side walls
and the bottom; and a source electrode positioned on a surface of
the semiconductor base substrate on a first main surface side, the
source electrode electrically connected to the source region and
also electrically connected to the carrier compensation
electrode.
[0013] In this specification, "carrier compensation electrode" is
an electrode which makes the semiconductor device operate in such a
manner that even when an irregularity exists in a charge balance (a
balance of a carrier, that is, a balance of dopant concentration, a
balance between a width of the p-type column region and a width of
the n-type column region or the like) in the n-type column region
and the p-type column region, the carrier compensation electrode
compensates such an irregularity and reduces an irregularity in a
switching characteristics when the MOSFET is turned off.
[0014] [2] According to the MOSFET of the present invention, it is
preferable that assuming a thickness of the gate electrode from an
uppermost portion to a lowermost portion as a and assuming a
thickness of the carrier compensation electrode from an uppermost
portion to a lowermost portion as b, a relationship of
0.2a.ltoreq.b.ltoreq.a be satisfied.
[0015] In this specification, "uppermost portion" is a portion
which is closest to (shallowest with respect to) the first main
surface of the semiconductor base substrate, and "lowermost
portion" is a portion which is remotest from (deepest with respect
to) the first main surface of the semiconductor base substrate.
[0016] [3] According to the MOSFET of the present invention, it is
preferable that the semiconductor base substrate further have a
low-resistance semiconductor layer formed on a surface thereof on a
second main surface side which is a side opposite to the first main
surface, and assuming a thickness of the carrier compensation
electrode from an uppermost portion to a lowermost portion as b and
assuming a depth from a lowermost portion of the gate electrode to
an uppermost portion of the low-resistance semiconductor layer as
c, a relationship of 10b.ltoreq.c be satisfied.
[0017] [4] According to the MOSFET of the present invention, it is
preferable that dopant concentration in the n-type column region
which is a region disposed adjacently to the trench be set to
dopant concentration equal to dopant concentration in the n-type
column region at a lowermost portion of the n-type column
region.
[0018] [5] According to the MOSFET of the present invention, it is
preferable that dopant concentration in the n-type column region
which is a region disposed adjacently to the trench be set lower
than dopant concentration in the n-type column region at a
lowermost portion of the n-type column region.
[0019] [6] According to the MOSFET of the present invention, it is
preferable that a thickness of the insulation region between the
carrier compensation electrode and the n-type column region be
larger than a thickness of the gate insulation film.
[0020] [7] According to the present invention, there is provided a
power conversion circuit which includes at least: a reactor; a
power source which supplies an electric current to the reactor; the
MOSFET according to any one of [1] to [6] for controlling an
electric current supplied from the power source to the reactor; and
a rectifier element which performs a rectifying operation of the
electric current supplied from the power source to the reactor or
an electric current from the reactor.
[0021] [8] According to the power conversion circuit of the present
invention, it is preferable that the rectifier element be a fast
recovery diode.
[0022] [9] According to the power conversion circuit of the present
invention, it is preferable that the rectifier element be a
built-in diode of the MOSFET.
[0023] [10] According to the power conversion circuit of the
present invention, it is preferable that the rectifier element be a
silicon-carbide Schottky barrier diode.
Advantageous Effects of the Present Invention
[0024] The MOSFET and the power conversion circuit of the present
invention include: the carrier compensation electrode positioned
between the gate electrode and the bottom of the trench and
electrically connected with the source electrode; the insulation
region extending between the gate electrode and the carrier
compensation electrode and extending along the side walls and the
bottom of the trench thus separating the carrier compensation
electrode from the side walls and the bottom. Accordingly, when the
MOSFET is turned off, a displacement current from the drain flows
into the source electrode via the carrier compensation electrode
and hence, the displacement current minimally flows into the gate
electrode. Accordingly, the gate electrode is minimally affected by
a change in potential of the n-type column region around the gate.
As a result, even when an irregularity exists in a charge balance
around the gate, an irregularity in switching characteristics when
the MOSFET is turned off can be decreased compared to the prior
art.
[0025] The MOSFET and the power conversion circuit of the present
invention include the carrier compensation electrode and the
insulation region having the above-mentioned structures.
Accordingly, a distance between the n-type column region
(non-depleted n-type column region) and the gate electrode is
increased compared to the conventional MOSFET and hence, a feedback
capacitance Crss (equal to a gate-drain capacitance Cgd) is made
small compared to a conventional MOSFET. Accordingly, the gate
electrode is minimally affected by a change in potential of the
n-type column region around the gate. As a result, also from this
viewpoint, even when an irregularity exists in a charge balance
around the gate, an irregularity in switching characteristics when
the MOSFET is turned off can be decreased compared to the prior
art.
[0026] Further, the MOSFET according to the present invention
includes the semiconductor base substrate where the super junction
structure is formed of the n-type column region and the p-type
column region. Accordingly, in the same manner as the prior art,
the MOSFET becomes a switching element having a low ON resistance
and a high withstand voltage.
[0027] Patent document 2 discloses a semiconductor device (another
conventional MOSFET 900) which includes: a field plate electrode
942 positioned between a gate electrode 926 and a bottom of a
trench 922; and an insulation region 930 disposed in the trench 922
and extending between the gate electrode 926 and the field plate
electrode 942, and extending along side walls and the bottom of the
trench 922 thus separating the field plate electrode 942 from the
side walls and the bottom (see FIG. 11).
[0028] However, in the another conventional MOSFET 900, an n-type
semiconductor region 944 having higher dopant concentration than
other regions of an n.sup.--type column region 914 in an area of
the n.sup.--type column region 914 around a gate is formed for
reducing an ON resistance. Accordingly, (1) a depletion layer
minimally extends in the n-type semiconductor region 944 so that a
distance between the non-depleted n-type semiconductor region 944
(or the n.sup.--type column region 914) and the gate electrode 926
hardly becomes long. Accordingly, a feedback capacitance Crss
hardly becomes small. Accordingly, the gate electrode 926 is easily
affected by a change in potential of the n-type semiconductor
region 944 around the gate of the gate electrode 926. Further, (2)
in dopant concentration in the n-type semiconductor region 944
around the gate becomes higher than dopant concentration in the
p.sup.--type column region 916 (n-type dopant locally becoming
rich) and hence, an irregularity in switching characteristics
during a turn-off period is liable to be increased (see Id (n-type
dopant rich) and Vds (n-type dopant rich) in FIG. 3).
[0029] Accordingly, another conventional MOSFET 900 cannot acquire
an advantageous effect that even when an irregularity exists in a
charge balance around the gate, an irregularity in switching
characteristics when the MOSFET 900 is turned off can be made small
compared to a prior art.
[0030] Accordingly, the field plate electrode 942 of another
conventional MOSFET 900 cannot compensate an irregularity in a
charge balance around the gate when such an irregularity exists and
hence, the MOSFET 900 cannot operate a semiconductor device such
that an irregularity in switching characteristics when the
semiconductor device is turned off is made small. Accordingly, the
field plate electrode 942 of another conventional MOSFET 900
differs from the carrier compensation electrode of the present
invention.
BRIEF DESCRIPTION OF DRAWINGS
[0031] FIG. 1 is a circuit diagram showing a power conversion
circuit 1 according to Embodiment 1.
[0032] FIG. 2 is a cross-sectional view of a MOSFET 100 according
to Embodiment 1.
[0033] FIG. 3 is a graph showing a result of time transition
simulation of a drain-source voltage Vds, a drain current Id and a
gate-source voltage Vgs when a MOSFET according to a Comparative
example 1 is turned off in a power conversion circuit using the
MOSFET. In FIG. 3, "p-type dopant rich" means a case where a total
amount of a dopant in a p-type column region is 10% larger than a
total amount of a dopant in an n-type column region, "n-type dopant
rich" means a case where a total amount of a dopant in a n-type
column region is 10% larger than a total amount of a dopant in a
p-type column region, and "Just" means a case where a total amount
of a dopant in a p-type column region and a total amount of a
dopant in an n-type column region are equal (the same definition
being applicable to FIG. 4). Further, a power source voltage is
300V (the same definition being applicable to FIG. 4).
[0034] FIG. 4 is a graph showing a result of time transition
simulation of a drain-source voltage Vds, a drain current Id and a
gate-source voltage Vgs when a MOSFET according to the Embodiment 1
is turned off in a power conversion circuit 1 according to the
Embodiment 1.
[0035] FIGS. 5A and 5B are cross-sectional views of the MOSFET 100A
according to the present invention example and the MOSFET 700
according to a Comparative example 2. FIG. 5A is the
cross-sectional view showing the MOSFET 100A according to the
present invention example, and FIG. 5B is the cross-sectional view
showing the MOSFET 700 according to the Comparative example 2. FIG.
5A and FIG. 5B are schematic views and do not strictly reflect
sizes and shapes of the structures used in a simulation result
shown in FIG. 6A and FIG. 6B.
[0036] FIG. 6A and FIG. 6B are views showing a simulation result of
equal potential lines when the MOSFET is turned off in the MOSFET
100A according to the present invention example and the MOSFET 700
according to the Comparative example 2. FIG. 6A is a view showing
the simulation result of equal potential lines when the MOSFET is
turned off in the MOSFET 100A according to the present invention
example. FIG. 6B is a view showing the simulation result of equal
potential lines when the MOSFET is turned off in the MOSFET 700
according to the Comparative example 2. FIG. 6A is a view
corresponding to a region surrounded by a chain line shown in FIG.
5A, and FIG. 6B is a view corresponding to a region surrounded by a
chain line shown in FIG. 5B. In FIG. 6A and FIG. 6B, a bold black
solid line indicates a boundary between an n-type column region and
a p-type column region, a black fine solid line indicates equal
potential lines drawn at an interval of 3V, and a white solid line
indicates a boundary between a region where carriers become 5% at a
normal time and remaining other regions.
[0037] FIG. 7 is a cross-sectional view showing a MOSFET 102
according to Embodiment 2.
[0038] FIG. 8 is a circuit diagram showing a power conversion
circuit 2 according to Embodiment 3.
[0039] FIG. 9 is a cross-sectional view showing a MOSFET 104
according to Modification.
[0040] FIG. 10 is a cross-sectional view of a conventional MOSFET
800. In the drawing, symbol 812 indicates a low-resistance
semiconductor layer, symbol 813 indicates a buffer layer, and
symbol 846 indicates a pt-type semiconductor layer.
[0041] FIG. 11 is a cross-sectional view of another conventional
MOSFET 900. In the drawing, symbol 910 indicates a semiconductor
base substrate, symbol 912 indicates a low-resistance semiconductor
layer, symbol 913 indicates a buffer layer, symbol 918 indicates a
base region, symbol 920 indicates a source region, symbol 924
indicates a gate insulation film, symbol 932 indicates an
interlayer insulation film, symbol 934 indicates a source
electrode, symbol 936 indicates a drain electrode, and symbol 946
indicates a pt-type semiconductor layer.
DESCRIPTION OF EMBODIMENTS
[0042] Hereinafter, a MOSFET and a power conversion circuit
according to the present invention are described in accordance with
Embodiments shown in the drawings. The respective drawings are
schematic drawings, and do not always strictly reflect actual sizes
of the MOSFET and the power conversion circuit.
Embodiment 1
1. Structure and Operation of Power Conversion Circuit 1 According
to Embodiment 1
[0043] A power conversion circuit 1 according to Embodiment 1 is a
chopper circuit which is a constitutional element such as a DC-DC
converter or an inverter. The power conversion circuit 1 according
to Embodiment 1 includes, as shown in FIG. 1, a reactor 10, a power
source 20, a MOSFET 100 according to Embodiment 1, and a rectifier
element 30.
[0044] The reactor 10 is a passive element which can store energy
in a magnetic field generated by an electric current which flows
through the reactor 10.
[0045] The power source 20 is a DC power source which supplies an
electric current to the reactor 10. The MOSFET 100 controls an
electric current supplied from the power source 20 to the reactor
10. To be more specific, the MOSFET 100 is switched to assume an ON
state in response to a clock signal applied from a drive circuit
(not shown in the drawing) to a gate electrode of the MOSFET 100,
and makes the reactor 10 and a negative pole of the power source 20
electrically conductive with each other. The specific structure of
the MOSFET 100 is described later.
[0046] The rectifier element 30 is a fast recovery diode which
performs a rectifying operation of an electric current supplied
from the power source 20 to the reactor 10. To be more specific,
the rectifier element 30 is a lifetime-controlled PIN diode.
[0047] A positive pole (+) of the power source 20 is electrically
connected to one end 12 of the reactor 10 and a cathode electrode
of the rectifier element 30, and a negative pole (-) of the power
source 20 is electrically connected to a source electrode of the
MOSFET 100. A drain electrode of the MOSFET 100 is electrically
connected to the other end 14 of the reactor 10 and an anode
electrode of the rectifier element 30.
[0048] In such a power conversion circuit 1, when the MOSFET 100 is
in an ON state, an electric current path from the positive pole (+)
of the power source 20 to the negative pole (-) of the power source
20 through the reactor 10 and the MOSFET 100 is formed, and an
electric current flows through the electric current path. In this
case, electric energy of the power source 20 is stored in the
reactor 10.
[0049] When the MOSFET 100 is turned off, an electric current which
flows through the electric current path from the positive pole (+)
of the power source 20 to the negative pole (-) of the power source
20 through the reactor 10 and the MOSFET 100 is decreased and
becomes 0 soon. On the other hand, the reactor 10 generates an
electromotive force in a direction in which a change in an electric
current is obstructed (electric energy stored in the reactor 10 is
discharged) due to a self induction effect. An electric current
generated due to an electromotive force of the reactor 10 flows to
the rectifier element 30, and a forward electric current flows in
the rectifier element 30.
[0050] A sum of an amount of an electric current which flows
through the MOSFET 100 and an amount of an electric current which
flows through the rectifier element 30 is equal to an amount of an
electric current which flows through the reactor 10. A switching
period of the MOSFET 100 is short (possibly 100 nsec at maximum)
and hence, an amount of an electric current which flows through the
reactor 10 minimally changes during such a period. Accordingly, a
sum of an amount of an electric current which flows through the
MOSFET 100 and an amount of an electric current which flows through
the rectifier element 30 minimally changes in either one of cases,
that is, an ON state, a turn-off period or an OFF state.
[0051] In such a power conversion circuit 1, a case is considered
where a conventional MOSFET 800 is used as the MOSFET. In this
case, when an irregularity exists in a charge balance around the
gate, there arises a drawback that an irregularity in switching
characteristics when the power conversion circuit 1 is turned off
is increased (see FIG. 3).
[0052] Accordingly, in the present invention, as the MOSFET, the
MOSFET 100 according to Embodiment 1 having the following structure
is used.
2. Structure of MOSFET 100 According to Embodiment 1
[0053] As shown in FIG. 2, the MOSFET 100 according to Embodiment 1
is a trench-gate-type MOSFET which includes a semiconductor base
substrate 110, a trench 122, a gate electrode 126, a carrier
compensation electrode 128, an insulation region 130, an interlayer
insulation film 132, a source electrode 134, and a drain electrode
136. A drain-source withstand voltage of the MOSFET 100 is 300V or
more, for example, 600V.
[0054] The semiconductor base substrate 110 has an n-type
low-resistance semiconductor layer 112 formed on a surface of the
semiconductor base substrate 110 on the second main surface side
which is a side opposite to the first main surface of the
semiconductor base substrate 110, an n-type buffer layer 113 formed
on the low-resistance semiconductor layer 112 and having a lower
dopant concentration than dopant concentration in the
low-resistance semiconductor layer 112, n-type column regions 114
and p-type column regions 116 formed on the buffer layer 113 where
the n-type column region 114 and the p-type column region 116 are
alternately arranged along a horizontal direction, a p-type base
region 118 formed on surfaces of the n-type column regions 114 and
surfaces of the p-type column regions 116, and n-type source
regions 120 formed on a surface of the base region 118, wherein a
super junction structure is formed of the n-type column region 114
and the p-type column regions 116. The buffer layer 113 and the
n-type column regions 114 are integrally formed with each other,
and the buffer layer 113 and the n-type column region 114 form an
n-type semiconductor layer 115.
[0055] Although a total amount of a dopant in the n-type column
region 114 is set equal to a total amount of a dopant in the p-type
column region 116, a total amount of a dopant in the n-type column
region 114 may be set smaller than a total amount of a dopant in
the p-type column region 116 or a total amount of a dopant in the
n-type column region 114 may be set larger than a total amount of a
dopant in the p-type column region 116.
[0056] In both the n-type column region 114 and the p-type column
region 116, the dopant concentration is set to a fixed value
regardless of depth. That is, the dopant concentration in the
n-type column region 114 in a region disposed adjacently to the
trench 122 is equal to the dopant concentration of the n-type
column region 114 in a lowermost portion of the n-type column
region 114, and the dopant concentration in the p-type column
region 116 in a region disposed adjacently to the base region 118
is equal to the dopant concentration of the p-type column region
116 in a lowermost portion of the p-type column region 116. In the
p-type column region 116, a width of the p-type column region 116
is gradually increased from the second main surface side to the
first main surface. On the other hand, in the n-type column region
114, a width of the n-type column region 114 is gradually narrowed
from the second main surface side to the first main surface.
[0057] All of the n-type column regions 114, the p-type column
regions 116, the source regions 120, the trenches 122 and the gate
electrodes 126 are formed in a stripe shape as viewed in a plan
view.
[0058] A thickness of the low-resistance semiconductor layer 112
falls within a range of 100 .mu.m to 400 .mu.m, for example, and
dopant concentration in the low-resistance semiconductor layer 112
falls within a range of 1.times.10.sup.19 cm.sup.-3 to
1.times.10.sup.20 cm.sup.-3, for example. A thickness of the n-type
semiconductor layer 115 falls within a range of 5 .mu.m to 120
.mu.m, for example. Dopant concentration in the n-type
semiconductor layer 115 falls within a range of 5.times.10.sup.13
cm.sup.-3 to 1.times.10.sup.16 cm.sup.-3, for example. Dopant
concentration of the p-type column region 116 falls within a range
of 5.times.10.sup.13 cm.sup.-3 to 1.times.10.sup.16 cm.sup.-3, for
example. A depth position of a lowermost portion of the base region
118 falls within a range of 0.5 .mu.m to 4.0 .mu.m, for example,
and dopant concentration in the base region 118 falls within a
range of 5.times.10.sup.16 cm.sup.-3 to 1.times.10.sup.18
cm.sup.-3, for example. A depth position of a deepest portion of
the source region 120 falls within a range of 0.1 .mu.m to 0.4
.mu.m, for example, and dopant concentration in the source region
120 falls within a range of 5.times.10.sup.19 cm.sup.-3 to
2.times.10.sup.20 cm.sup.-3, for example.
[0059] The trench 122 is formed in a region where the n-type column
region 114 is positioned as viewed in a plan view, and has side
walls disposed adjacently to the n-type column region 114, the base
region 118 and the source region 120 and a bottom disposed
adjacently to the n-type column region 114. A depth of the trench
122 is set to a value which falls within a range of 2.0 .mu.m to
8.0 .mu.m, for example, 5 .mu.m.
[0060] The gate electrode 126 is formed in the trench 122 by way of
a gate insulation film 124. To be more specific, the gate electrode
126 is formed in the trench 122 such that the gate electrode 126
opposedly faces the base region 118 by way of the gate insulation
films 124 formed on side walls of the trench 122. The gate
insulation film 124 is formed of a silicon dioxide film formed by a
thermal oxidation method and the gate insulation film 124 has a
thickness of 100 nm, for example. The gate electrode 126 is formed
by a CVD method and an ion implantation method and is made of
low-resistance polysilicon.
[0061] The carrier compensation electrode 128 is positioned between
the gate electrode 126 and the bottom of the trench 122. A width of
the carrier compensation electrode 128 is set smaller than a width
of the gate electrode 126.
[0062] The insulation region 130 extends, in the inside of the
trench 122, between the gate electrode 126 and the carrier
compensation electrode 128 and extends along the side walls and the
bottom of the trench 122 thus separating the carrier compensation
electrode 128 from the side walls and the bottom of the trench 122.
A thickness of the insulation region 130 between the carrier
compensation electrode 128 and the n-type column region 114 is set
larger than a thickness of the gate insulation film 124.
[0063] The interlayer insulation film 132 is formed so as to cover
a portion of the source region 120, the gate insulation film 124
and the gate electrode 126. The interlayer insulation film 132 is
formed by a CVD method and is formed of a PSG film having a
thickness of 1000 nm, for example.
[0064] The source electrode 134 is formed on a surface of the
semiconductor base substrate 110 on a first main surface side at
positions where the source electrode 134 covers the base region
118, portions of the source region 120 and the interlayer
insulation films 132. The source electrode 134 is electrically
connected with the source regions 120, and is also electrically
connected with the carrier compensation electrodes 128. The source
electrode 134 is made of aluminum-based metal (Al--Cu-based alloy,
for example) having a thickness of 4 .mu.m formed by a sputtering
method, for example.
[0065] The drain electrode 136 is formed on a surface of the
low-resistance semiconductor layer 112. The drain electrode 136 is
formed of a multi-layered metal film such as a Ti--Ni--Au film. A
total thickness of the multi-layered metal film is 0.5 .mu.m, for
example.
[0066] In the MOSFET 100 according to Embodiment 1, assuming a
thickness of the gate electrode 126 from an uppermost portion to a
lowermost portion as "a" and assuming a thickness of the carrier
compensation electrode 128 from an uppermost portion to a lowermost
portion as "b", a relationship of 0.2a.ltoreq.b.ltoreq.a is
satisfied.
[0067] In the MOSFET 100 according to Embodiment 1, assuming a
thickness of the carrier compensation electrode 128 from an
uppermost portion to a lowermost portion as "b" and assuming a
depth from a lowermost portion of the gate electrode 126 to an
uppermost portion of the low-resistance semiconductor layer 112 as
"c", a relationship of 10b.ltoreq.c is satisfied.
3. Waveform and Manner of Operation of MOSFET 100 when MOSFET 100
is Turned Off
[0068] To describe the MOSFET according to Embodiment 1, a MOSFET
according to Comparative example 1 is described first. The MOSFET
according to Comparative example 1 basically has the structure
which is substantially same to the structure of the conventional
MOSFET 800.
[0069] In the power conversion circuit 1 according to Embodiment 1,
in the case where the MOSFET according to Comparative example 1 is
used in place of the MOSFET 100, the MOSFET according to
Comparative example 1 is operated as follows.
(1) Drain Current Id
[0070] In the case where a total amount of a dopant in the n-type
column region and a total amount of a dopant in the p-type column
region are equal (hereinafter referred to as "in the case of
Just"), the MOSFET is operated such that, during a period from a
point of time that a drain current Id starts to be decreased to a
point of time that the drain current Id becomes 0 for the first
time, a period where the drain current Id is temporarily increased
slightly appears (the MOSFET being operated such that a hump
waveform slightly appears in a waveform of the drain current Id)
(see Id (Just) in FIG. 3). The period from a point of time that a
drain current Id starts to be decreased to a point of time that the
drain current Id becomes 0 for the first time is approximately 0.02
.mu.sec (20 nsec).
[0071] In the case where an irregularity exists in a charge balance
such that a total amount of a dopant in the n-type column region is
larger than a total amount of a dopant in the p-type column region
(hereinafter referred to as "in the case of n-type dopant rich),
the MOSFET is operated such that, during a period from a point of
time that a drain current Id starts to be decreased to a point of
time that the drain current Id becomes 0 for the first time, a
period where the drain current Id is temporarily increased appears
(the MOSFET being operated such that a large hump waveform appears
in a waveform of the drain current Id) (see Id (n-type dopant rich)
in FIG. 3). With respect to the hump waveform, the drain current Id
is increased to a current value higher than a current value in the
case of Just and, at the same time, a period until the drain
current Id becomes 0 is largely prolonged compared to the case of
Just (approximately 0.02 .mu.sec (20 nsec) in case of Just and
approximately 0.04 .mu.sec (40 nsec) in case of n-type dopant
rich).
[0072] In the case where a total amount of a dopant in the p-type
column region is larger than a total amount of a dopant in the
n-type column region (hereinafter referred to as "in the case of
p-type dopant rich"), the MOSFET is operated such that the drain
current Id is monotonously decreased (the MOSFET being operated
such that no hump waveform appears in a waveform of the drain
current Id) see Id (p-type dopant rich) in FIG. 3).
(2) Drain-Source Voltage Vds
[0073] In the case of n-type dopant rich, the MOSFET is operated
such that a drain-source voltage Vds is increased to approximately
350V more gently compared to the case of Just and, thereafter, the
drain-source voltage Vds is gradually decreased and becomes stable
at a power source voltage (300V). A time until a drain-source
voltage Vds becomes stable from a point of time that the
drain-source voltage Vds starts to be increased is longer than that
of the case of Just and is approximately 0.05 .mu.sec (50 nsec)
(see Vds (n-type dopant rich) in FIG. 3).
[0074] In the case of p-type dopant rich, the MOSFET is operated
such that a drain-source voltage Vds is increased to approximately
370V more steeply compared to the case of Just and, thereafter,
becomes stable at a power source voltage (300V) (see Vds (p-type
dopant rich) in FIG. 3). A time until a drain-source voltage Vds
becomes stable from a point of time that the drain-source voltage
Vds starts to be increased is approximately 0.02 .mu.sec (20
nsec).
(3) Gate-Source Voltage Vgs
[0075] In the case of n-type dopant rich, the MOSFET is operated
such that a period during which a gate-source voltage Vgs is
temporarily increased slightly appears after completion of a mirror
period (see Vgs (n-type dopant rich) in FIG. 3). On the other hand,
in case of Just and in the case of p-type dopant rich, the MOSFET
is operated such that a gate-source voltage Vgs minimally changes
and is monotonously decreased (Vgs (p-type dopant rich) and Vgs
(Just) in FIG. 3).
[0076] As can be understood from the above-mentioned (1) to (3), in
the MOSFET according to the Comparative example 1, when an
irregularity exists in a charge balance around the gate (Just being
changed to n-type dopant rich or p-type dopant rich), an
irregularity in switching characteristics when the MOSFET is turned
off, particularly an irregularity in a drain current Id and a
drain-source voltage Vds is increased. When an irregularity in a
charge balance exists in n-type dopant rich, an irregularity in
switching characteristics is particularly increased.
[0077] On the other hand, in the power conversion circuit 1
according to the Embodiment 1, the MOSFET according to the
Embodiment 1 is operated as follows.
(1) Drain Current Id
[0078] In all cases, that is, in case of Just, in case of n-type
dopant rich and in case of p-type dopant rich, a turn-off period
becomes short. Further, in all cases, the MOSFET is operated such
that the drain current Id adopts a similar waveform (see respective
Id in FIG. 4). Particularly, in case of n-type dopant rich, a hump
waveform which appears in a waveform of the drain current Id
becomes small and hence, the MOSFET is operated such that the
waveform of the drain current Id becomes similar to a waveform of
the drain current Id in case of Just and the drain current Id in
case of p-type dopant rich.
(2) Drain-Source Voltage Vds
[0079] In all cases, that is, in case of Just, in case of n-type
dopant rich and in case of p-type dopant rich, a turn-off period
becomes short (approximately 0.03 .mu.sec (30 nsec) or less).
Further, in all cases, the MOSFET is operated such that the
drain-source voltage Vds adopts a similar waveform (see respective
Vds in FIG. 4). Although ringing occurs in case of p-type dopant
rich, ringing can be made small by including a mechanism to remove
ringing such as a snubber circuit.
(3) Gate-Source Voltage Vgs
[0080] In all cases, that is, in case of Just, in case of n-type
dopant rich and in case of p-type dopant rich, the MOSFET is
operated such that there is substantially no difference in the
gate-source voltage Vgs between these cases (see respective Vgs in
FIG. 4). In the MOSFET 100 according to Embodiment 1, a mirror
period is made short compared to the MOSFET according to
Comparative example 1.
[0081] As can be understood from the above-mentioned (1) to (3), in
the MOSFET 100 according to Embodiment 1, even when an irregularity
in a charge balance exists around the gate (case of Just being
changed to case of n-type dopant rich, case of Just being changed
to case of p-type dopant rich or the like), an irregularity in
switching characteristics when the MOSFET is turned off can be made
small compared to the prior art.
[0082] Next, the manner of operation of the MOSFET when the MOSFET
is turned off is described from a viewpoint of potential. A MOSFET
100A according to the present invention example is a MOSFET having
substantially the same structure as the MOSFET 100 according to
Embodiment 1 except for a point that a portion which is brought
into contact with the source electrode is dug to an area near a
lowermost portion of the source region (see FIG. 5A). A MOSFET 700
according to Comparison example 2 is a MOSFET having substantially
the same structure as the conventional MOSFET 800 except for a
point that a portion which is brought into contact with the source
electrode is dug to an area near a lowermost portion of the source
region (see FIG. 5B).
[0083] In the MOSFET 700 according to Comparative example 2, when
the MOSFET is turned off, equipotential lines enter also an
insulation film interposed between a gate electrode 726 and an
n-type column region 714 so that a state where a potential is high
reaches an area near the gate electrode 726 whereby a state is
brought about where a potential of the gate electrode 726 is liable
to become high (see FIG. 6B). Accordingly, when an irregularity in
a charge balance exists around the gate, an irregularity in
switching characteristics when the MOSFET is turned off is liable
to occur.
[0084] On the other hand, in the MOSFET 100A according to the
present invention example, although equipotential lines also enter
the insulation region 130 interposed between the carrier
compensation electrode 128 and the n-type column region 114, the
equipotential lines are remote from the gate electrode 126 and the
carrier compensation electrode 128 is positioned between the
equipotential lines which enter the insulation region 130 and the
gate electrode 126. Accordingly, a state is brought about where a
potential of the gate electrode 126 minimally becomes high (see
FIG. 6A). Accordingly, even in the case where an irregularity in a
charge balance exists around the gate, an irregularity minimally
occurs in switching characteristics when the MOSFET is turned
off.
4. Advantageous Effect Acquired by MOSFET 100 and Power Conversion
Circuit 1 According to Embodiment 1
[0085] The MOSFET 100 and the power conversion circuit 1 according
to Embodiment 1 include: the carrier compensation electrode 128
positioned between the gate electrode 126 and the bottom of the
trench 122 and electrically connected with the source electrode
134; and the insulation region 130 disposed in the trench 122, the
insulation region 130 extending between the gate electrode 126 and
the carrier compensation electrode 128 and extending along the side
walls and the bottom of the trench 122 thus separating the carrier
compensation electrode 128 from the side walls and the bottom in
the trench 22. Accordingly, when the MOSFET 100 is turned off, a
displacement current from the drain electrode flows into the source
electrode 134 via the carrier compensation electrode 128 and hence,
the displacement current minimally flows into the gate electrode
126. Accordingly, the gate electrode 126 is minimally affected by a
change in potential of the n-type column region 114 around the
gate. As a result, even when an irregularity exists in a charge
balance around the gate, an irregularity in a switching
characteristic when the MOSFET 100 is turned off can be decreased
compared to the prior art.
[0086] The MOSFET 100 and the power conversion circuit 1 according
to Embodiment 1 include: the carrier compensation electrode 128 and
the insulation region 130 having the above-mentioned structures.
Accordingly, a distance between the n-type column region 114
(non-depleted n-type column region) and the gate electrode 126 is
increased compared to that of the conventional MOSFET 800 and
hence, a feedback capacitance Crss is made small compared to that
of the conventional MOSFET 800. Accordingly, the gate electrode 126
is minimally affected by a change in potential of the n-type column
region 114 around the gate. As a result, also from this viewpoint,
even when an irregularity exists in a charge balance around the
gate, an irregularity in a switching characteristic when the MOSFET
is turned off can be decreased compared to the prior art.
[0087] The MOSFET 100 according to Embodiment 1 includes the
semiconductor base substrate 110 where the super junction structure
is formed of the n-type column region 114 and the p-type column
region 116. Accordingly, in the same manner as the prior art, the
MOSFET 100 becomes a switching element having a low ON resistance
and a high withstand voltage.
[0088] In the MOSFET 100 according to Embodiment 1, assuming a
thickness of the gate electrode 126 from an uppermost portion to a
lowermost portion as a and assuming a thickness of the carrier
compensation electrode 128 from an uppermost portion to a lowermost
portion as b, a relationship of 0.2a.ltoreq.b.ltoreq.a is
satisfied. Accordingly, it is unnecessary to form a deep trench for
forming the carrier compensation electrode 128 and hence, it is
possible to provide the MOSFET 100 which can satisfy a demand for
reduction of cost and downsizing of electronic equipment.
[0089] In the MOSFET 100 according to this Embodiment 1, assuming a
thickness of the carrier compensation electrode 128 from an
uppermost portion to a lowermost portion as b and assuming a depth
from a lowermost portion of the gate electrode 126 to an uppermost
portion of the low-resistance semiconductor layer 112 as c, a
relationship of 10b.ltoreq.c is satisfied. Accordingly, it is
possible to provide a MOSFET having a high withstand voltage. Also
in such a MOSFET having a high withstand voltage, even when an
irregularity exists in a charge balance around the gate, an
irregularity in a switching characteristic when the MOSFET 100 is
turned off can be decreased compared to the prior art.
[0090] In the MOSFET 100 according to this Embodiment 1, assuming a
thickness of the carrier compensation electrode 128 from an
uppermost portion to a lowermost portion as b and assuming a depth
from a lowermost portion of the gate electrode 126 to an uppermost
portion of the low-resistance semiconductor layer 112 as c, a
relationship of 10b.ltoreq.c is satisfied. Accordingly, the gate
electrode 126 is positioned relatively remote from the drain
electrode 136 and hence, a potential of the n-type column region
114 around the gate is minimally increased. As a result, even in
the case where an irregularity exists in a charge balance around
the gate, an irregularity in a switching characteristic when the
MOSFET 100 is turned off can be made further small.
[0091] According to the MOSFET 100 of Embodiment 1, dopant
concentration in the n-type column region 114 which is a region
disposed adjacently to the trench 122 is set equal to dopant
concentration in the n-type column region 114 at a lowermost
portion of the n-type column region 114. Accordingly, in a
manufacturing process of the semiconductor device, it is possible
to easily form the n-type column region 114 without changing
concentration at the time of implanting a dopant.
[0092] According to the MOSFET 100 of Embodiment 1, a thickness of
the insulation region 130 between the carrier compensation
electrode 128 and the n-type column region 114 is larger than a
thickness of the gate insulation film 124. Accordingly, it is
possible to make the gate electrode 126 function as a MOSFET and,
at the same time, it is possible to ensure a sufficient withstand
voltage between the carrier compensation electrode 128 which is at
a source potential and the n-type column region 114 which is at a
potential near a drain potential.
[0093] According to the power conversion circuit 1 of Embodiment 1,
the rectifier element 30 is a fast recovery diode and hence, it is
possible to make a loss caused by a reverse recovery current at the
time of turning on the MOSFET 100 small.
Embodiment 2
[0094] MOSFET 102 according to Embodiment 2 basically has
substantially the same structure as MOSFET 101 according to
Embodiment 1. However, MOSFET 102 according to Embodiment 2 differs
from MOSFET 101 according to Embodiment 1 with respect to a point
that dopant concentration in an n-type column region disposed in a
region adjacently to a trench is lower than dopant concentration in
the n-type column region at a lowermost portion of the n-type
column region. That is, in a semiconductor base substrate 110 of
MOSFET 102 according to Embodiment 2, an n-type column region 114
has a region (n.sup.--type semiconductor region 138) having dopant
concentration lower than dopant concentration in a lowermost
portion of the n-type column region 114 in the region disposed
adjacently to a trench 122 as shown in FIG. 7.
[0095] In Embodiment 2, the n-type column region 114 may have a
region where dopant concentration is lower than dopant
concentration in the lowermost portion of the n-type column region
114 only in the region disposed adjacently to the trench 122, or
may have the region where dopant concentration is lower than dopant
concentration in the lowermost portion of the n-type column region
114 in regions other than the region disposed adjacently to the
trench 122 (for example, the n-type column region 114 being formed
such that dopant concentration is gradually decreased in a
direction toward a first main surface side (source electrode 134
side).
[0096] In this manner, MOSFET 102 according to Embodiment 2 differs
from MOSFET 100 according to Embodiment 1 with respect to the point
that dopant concentration in the n-type column region disposed in
the region adjacently to the trench is lower than dopant
concentration in the n-type column region at the lowermost portion
of the n-type column region. However, in the same manner as MOSFET
100 according to Embodiment 1, MOSFET 102 according to Embodiment 2
includes: a carrier compensation electrode 128 positioned between a
gate electrode 126 and a bottom of the trench 122 and electrically
connected with a source electrode 134; and an insulation region 130
disposed in the trench 122, the insulation region 130 extending
between the gate electrode 126 and the carrier compensation
electrode 128 and extending along side walls and the bottom of the
trench 122 thus separating the carrier compensation electrode 128
from the side walls and the bottom. Accordingly, when the MOSFET
102 is turned off, a displacement current from the drain flows into
a source electrode 134 via the carrier compensation electrode 128
and hence, the displacement current minimally flows into the gate
electrode 126. Accordingly, the gate electrode 126 is minimally
affected by a change in potential of the n-type column region 114
around the gate. As a result, even when an irregularity exists in a
charge balance around the gate, an irregularity in switching
characteristics when the MOSFET 102 is turned off can be decreased
compared to the prior art.
[0097] Further, in the MOSFET 102 according to Embodiment 2, dopant
concentration in the n-type column region 114 disposed in the
region adjacently to the trench 122 is lower than dopant
concentration in the n-type column region 114 at the lowermost
portion of the n-type column region 114. Accordingly, the n-type
column region 114 around the gate is more easily depleted and
hence, a distance between the n-type column region 114
(non-depleted n-type column region) and the gate electrode 126
becomes further longer whereby a feedback capacitance Crss is
further decreased whereby the gate electrode 126 is more minimally
affected by a change in potential in the n-type column region 114
around the gate. As a result, even when an irregularity exists in a
charge balance around the gate, an irregularity in switching
characteristics when the MOSFET 100 is turned off can be made
further small compared to the prior art.
[0098] The MOSFET 102 according to Embodiment 2 has substantially
the same structure as the MOSFET 100 according to Embodiment 1
except for the point that dopant concentration in the n-type column
region disposed in the region disposed adjacently to the trench is
lower than dopant concentration in the n-type column region at the
lowermost portion of the n-type column region. Accordingly, the
MOSFET 102 according to Embodiment 2 can acquire the advantageous
effects by the constitutional parts corresponding to the
corresponding constitutional parts of the MOSFET 102 according to
Embodiment 2 among the advantageous effects acquired by the MOSFET
100 according to Embodiment 1.
Embodiment 3
[0099] A power conversion circuit 2 according to Embodiment 3
basically has substantially the same structure as the power
conversion circuit 1 according to Embodiment 1. However, the power
conversion circuit 2 according to Embodiment 3 differs from the
power conversion circuit 1 according to Embodiment 1 with respect
to a point that the power conversion circuit is a full bridge
circuit. That is, the power conversion circuit 2 according to
Embodiment 3 includes, as shown in FIG. 8, four MOSFETs 100 (100a
to 100d) as the MOSFETs, and also includes built-in diodes of the
respective MOSFETs as rectifying elements.
[0100] In this manner, the power conversion circuit 2 according to
Embodiment 3 differs from the power conversion circuit 1 according
to Embodiment 1 with respect to a point that the power conversion
circuit 2 is a full bridge circuit. However, in the same manner as
the power conversion circuit 1 according to Embodiment 1, the
MOSFETs 100 (100a to 100d) respectively include: a carrier
compensation electrode 128 positioned between a gate electrode 126
and a bottom of a trench 122 and electrically connected with a
source electrode 134; and an insulation region 130 disposed in the
trench 122, the insulation region 130 extending between the gate
electrode 126 and the carrier compensation electrode 128 and
extending along the side walls and the bottom of the trench 122
thus separating the carrier compensation electrode 128 from the
side walls and the bottom. Accordingly, when the MOSFET 100 is
turned off, a displacement current from a drain flows into the
source electrode 134 via the carrier compensation electrode 128 and
hence, the displacement current minimally flows into the gate
electrode 126. Accordingly, the gate electrode 126 is minimally
affected by a change in potential of the n-type column region 114
around the gate. As a result, even when an irregularity exists in a
charge balance around the gate, an irregularity in switching
characteristics when the MOSFET 100 is turned off can be decreased
compared to the prior art.
[0101] Further, according to the power conversion circuit 2 of
Embodiment 3, a rectifier element is the built-in diode in the
MOSFET and hence, it is unnecessary to additionally prepare a
rectifier element.
[0102] The power conversion circuit 2 of Embodiment 3 includes: the
carrier compensation electrode 128 positioned between the gate
electrode 126 and the bottom of the trench 122; and the insulation
region 130 disposed in the trench 122, the insulation region 130
extending between the gate electrode 126 and the carrier
compensation electrode 128 and extending along the side walls and
the bottom of the trench 122 thus separating the carrier
compensation electrode 128 from the side walls and the bottom in
the trench 22. Accordingly, when the MOSFET is turned off, (1) a
displacement current from the drain flows into the source electrode
134 via the carrier compensation electrode 128 and hence, the
displacement current minimally flows into the gate electrode 126,
and (2) a distance between a region which is not depleted in the
n-type column region 114 and the gate electrode 126 becomes long
and hence, a feedback capacitance Crss becomes small. Accordingly,
even when a drain voltage is increased when the MOSFET is turned
off and a potential of an n-type column region 114 (a non-depleted
region of the n-type column region 114) is increased along with the
increase of the drain voltage, the gate electrode 126 is minimally
affected by a change in potential in the n-type column region 114.
Accordingly, a phenomenon referred to as false turn-on (erroneous
turn-on) minimally occurs.
[0103] The phenomenon referred to as false turn-on (erroneous
turn-on) is a phenomenon where, in a circuit where two or more
MOSFETs are connected to each other, when either one of the MOSFETs
is turned on, another MOSFET is also turned on by an error due to a
change in potential.
[0104] Although the present invention has been described with
reference to the above-described Embodiments, the present invention
is not limited to the above-described Embodiments. The present
invention can be carried out in various modes without departing
from the gist of the present invention. For example, the following
modifications are also conceivable.
(1) The numbers, materials, shapes, positions, sizes and the like
of the constitutional elements described in the above-mentioned
respective Embodiments are provided only for an exemplifying
purpose, and can be changed within a scope where advantageous
effects of the present invention are not impaired. (2) In the
above-described respective Embodiments, the carrier compensation
electrode is provided in the trench. However, the present invention
is not limited to such a structure. In place of providing the
carrier compensation electrode in the trench, a p-type
semiconductor region may be formed around the lowermost portion of
the trench (see symbol 140 in FIG. 9). With such a structure, a
region where a potential is high in the n-type column region can be
formed at a position remote from the gate electrode 126 (that is,
capable of acquiring the equipotential line distribution similar to
the equipotential line distribution shown in FIG. 6A). Accordingly,
a distance between the n-type column region (non-depleted n-type
column region) and the gate electrode becomes long compared to that
of the conventional MOSFET 800 and hence, the MOSFET according to
the present invention has a small feedback capacitance Crss
compared to that of the conventional MOSFET 800. As a result, also
from this viewpoint, even when an irregularity in a charge balance
exists around the gate, an irregularity in switching
characteristics when the MOSFET is turned off can be made
small.
[0105] In the case where the p-type semiconductor region 140 is
formed around the lowermost portion of the trench, it is necessary
that the p-type semiconductor region 140 is electrically connected
to the base region 118 in the vicinity of a terminal portion (a
stripe-shaped terminal portion) of the trench 122 in a region
around an active region (for example, p-type semiconductor region
140 is electrically connected to the base region 118 via a p-type
semiconductor region formed along a side wall of a terminal portion
of the trench 122). The reason is as follows.
[0106] Assume a case where the p-type semiconductor region 140 is
not electrically connected to the base region 118 in the vicinity
of the terminal portion of the trench 122 in the region around an
active region (a case where the p-type semiconductor region 140 is
a diffusion layer in a floating state). In this case, when the
MOSFET is turned off one time, a depletion layer extends to the
inside of the p-type semiconductor region 140 and the n-type column
region 114 around the p-type semiconductor region 140, and the
depletion layer is maintained in an extended state. When the
depletion layer is left for a time sufficiently longer than a
lifetime of the depletion layer, the depletion layer is gradually
shrunken because of electron-hole pairs which are generated in the
inside of the depletion layer by thermal excitation. However,
usually, with a frequency at which the MOSFET is driven, a time
from a first-time turn off to a next-time turn off is shorter than
a time during which the above-mentioned depletion layer constricts
and hence, a conduction path for an electron current in the n-type
column region 114 becomes narrow thus giving rise to a phenomenon
that ON resistance is increased.
[0107] On the other hand, in the case where the p-type
semiconductor region 140 is electrically connected to the base
region 118 in the vicinity of a terminal portion of the trench 122
in the region around the active region, when the MOSFET is turned
on, holes formed in an interface of ohmic contact between the
source electrode 134 and the base region 118 flow into the p-type
semiconductor region 140 via the base region 118 and an area in the
vicinity of the terminal portion of the trench 122, and
instantaneously constricts the depletion layer. Accordingly, a
possibility is eliminated that the above-mentioned depletion layer
constricts the n-type column region 114. In this manner, it is
possible to prevent a conduction path for an electron current in
the n-type column region 114 from becoming narrow. As a result, it
is possible to prevent the occurrence of a phenomenon that ON
resistance is increased.
(3) In the above-mentioned respective Embodiments, a width of the
p-type column region 116 is gradually increased from a second main
surface side toward a first main surface, and a width of the n-type
column region 114 is gradually decreased from the second main
surface side toward the first main surface. However, the present
invention is not limited to such a structure. The width of the
n-type column region 114 and the width of the p-type column region
116 may be set to a fixed value regardless of a depth respectively
regardless of a depth. (4) In the above-mentioned respective
Embodiments, the dopant concentration in the p-type column region
116 is set to a fixed value regardless of a depth. However, the
present invention is not limited to such a structure. The dopant
concentration in the p-type column region 116 may be gradually
increased from a second main surface side toward a first main
surface. With such a structure, it is possible to acquire an
advantageous effect that an L-load avalanche breakdown resistance
can be increased. (5) In the above-mentioned respective
Embodiments, the n-type column region 114, the p-type column region
116, the trench 122 and the gate electrode 126 are formed in a
stripe shape as viewed in a plan view. However, the present
invention is not limited to such a structure. The n-type column
region 114, the p-type column region 116, the trench 122 and the
gate electrode 126 may be formed in a circular shape (a columnar
shape as viewed stereoscopically), a quadrangular frame shape, a
circular frame shape or a grid shape as viewed in a plan view. (6)
In the above-mentioned respective Embodiments, a DC power source is
used as the power source. However, the present invention is not
limited to such a structure. An AC power source may be used as the
power source. (7) A chopper circuit is used as the power conversion
circuit in the above-mentioned Embodiments 1 and 2, while a full
bridge circuit is used as the power conversion circuit in the
above-mentioned Embodiment 3. However, the present invention is not
limited to such a structure. As the power conversion circuit, a
half bridge circuit, a three-phase AC converter, a
non-insulating-type full bridge circuit, a non-insulating-type half
bridge circuit, a push-pull circuit, an RCC circuit, a forward
converter, a flyback converter or other circuits may be used. (8) A
PIN diode is used as the rectifier element in the above-mentioned
Embodiments 1 and 2, while a built-in diode of the MOSFET is used
as the rectifier element in Embodiment 3. However, the present
invention is not limited to such a structure. As the rectifier
element, a fast recovery diode such as a JBS or an MPS,
silicon-carbide Schottky barrier diodes or other diodes may be
used. (9) In the above-mentioned Embodiment 3, as the rectifier
element, only a built-in diode of the MOSFET is used. However, the
present invention is not limited to such a structure. When a
recovery loss of a built-in diode is excessively large, an
additional rectifier element may be connected in parallel with the
MOSFET.
* * * * *