U.S. patent application number 16/374556 was filed with the patent office on 2019-10-10 for multilayer wiring structure and its manufacturing method.
This patent application is currently assigned to TDK Corporation. The applicant listed for this patent is TDK Corporation. Invention is credited to Hajime Kuwajima, Tomonaga Nishikawa, Takashi Ohtsuka, Yuichiro Okuyama, Takeshi Oohashi, Manabu Yamatani.
Application Number | 20190313528 16/374556 |
Document ID | / |
Family ID | 67988524 |
Filed Date | 2019-10-10 |
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United States Patent
Application |
20190313528 |
Kind Code |
A1 |
Kuwajima; Hajime ; et
al. |
October 10, 2019 |
MULTILAYER WIRING STRUCTURE AND ITS MANUFACTURING METHOD
Abstract
Disclosed herein is a multilayer wiring structure that includes
a first metal layer; an interlayer insulating film formed on the
first metal layer, the interlayer insulating film having an opening
that exposes a first area of the first metal layer; a second metal
layer formed on an inner wall of the opening; and a third metal
layer filling the opening via the second metal layer. The first and
third metal layers are direct contact with each other at a bottom
of the opening.
Inventors: |
Kuwajima; Hajime; (Tokyo,
JP) ; Nishikawa; Tomonaga; (Tokyo, JP) ;
Ohtsuka; Takashi; (Tokyo, JP) ; Oohashi; Takeshi;
(Tokyo, JP) ; Okuyama; Yuichiro; (Tokyo, JP)
; Yamatani; Manabu; (Tokyo, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
TDK Corporation |
Tokyo |
|
JP |
|
|
Assignee: |
TDK Corporation
Tokyo
JP
|
Family ID: |
67988524 |
Appl. No.: |
16/374556 |
Filed: |
April 3, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H05K 3/108 20130101;
H05K 1/115 20130101; H05K 3/4644 20130101; H05K 1/162 20130101;
H05K 2201/0175 20130101; H01L 2224/18 20130101; H05K 3/06 20130101;
H05K 1/09 20130101; H05K 1/111 20130101 |
International
Class: |
H05K 1/11 20060101
H05K001/11; H05K 1/09 20060101 H05K001/09; H05K 3/46 20060101
H05K003/46; H05K 3/06 20060101 H05K003/06 |
Foreign Application Data
Date |
Code |
Application Number |
Apr 6, 2018 |
JP |
2018-073953 |
Claims
1. A multilayer wiring structure comprising: a first conductive
pattern provided in a first wiring layer, the first conductive
pattern including a first main conductive layer; an interlayer
insulating film covering the first wiring layer, the interlayer
insulating film having an opening for exposing a part of the first
conductive pattern; and a second conductive pattern provided in a
second wiring layer and connected to the first conductive pattern
through the opening, wherein the second conductive pattern includes
a seed layer contacting the interlayer insulating film and a second
main conductive layer provided on the seed layer, the second main
conductive layer being formed of the same metal material as the
first main conductive layer, and wherein the seed layer is removed
at least at a part of a bottom portion of the opening, thereby the
first and second main conductive layers are brought into contact
with each other at least at the part of the bottom portion of the
opening without the seed layer being interposed therebetween.
2. The multilayer wiring structure as claimed in claim 1, wherein
an inner wall surface and bottom outer peripheral edge of the
opening are covered with the seed layer, and wherein the first and
second main conductive layers are brought into contact with each
other at a center portion surrounded by the outer peripheral edge
without the seed layer being interposed therebetween.
3. The multilayer wiring structure as claimed in claim 1, wherein
the first and second main conductive layers are formed of copper
(Cu).
4. The multilayer wiring structure as claimed in claim 3, wherein
the seed layer is formed of chromium (Cr), nickel (Ni), titanium
(Ti), tungsten (W), tantalum (Ta), or an alloy or laminate
including any of the elements.
5. The multilayer wiring structure as claimed in claim 3, wherein a
crystal of copper (Cu) constituting the first and second main
conductive layers exists while crossing a boundary defining the
bottom portion of the opening at a portion where the first and
second main conductive layers are in contact with each other.
6. A method of manufacturing a multilayer wiring structure, the
method comprising: forming a first conductive pattern including a
first main conductive layer; forming an interlayer insulating film
covering the first conductive pattern; forming an opening in the
interlayer insulating film for exposing a part of the first main
conductive layer; forming a seed layer on the interlayer insulating
film and inside the opening; exposing the first main conductive
layer by removing at least partially the seed layer formed on a
bottom portion of the opening; and forming a second main conductive
layer formed of the same metal material as the first main
conductive layer on the seed layer and the first main conductive
layer exposed from the opening.
7. The method of manufacturing a multilayer wiring structure as
claim in claim 6, wherein, in the exposing, the seed layer formed
at the bottom portion of the opening is partially removed so that a
contact portion between the first main conductive layer and the
seed layer remains.
8. The method of manufacturing a multilayer wiring structure as
claim in claim 7, wherein an electrolytic plating is performed by
power feeding through the seed layer in the forming the second main
conductive layer.
9. The method of manufacturing a multilayer wiring structure as
claim in claim 8, wherein the seed layer includes a lower seed
layer formed of chromium (Cr), nickel (Ni), titanium (Ti), tungsten
(W), tantalum (Ta), or an alloy or laminate including any of the
elements and an upper seed layer formed of copper (Cu).
10. An apparatus comprising: a first metal layer; an interlayer
insulating film formed on the first metal layer, the interlayer
insulating film having an opening that exposes a first area of the
first metal layer; a second metal layer formed on an inner wall of
the opening; and a third metal layer filling the opening via the
second metal layer, wherein the first and third metal layers are
direct contact with each other at a bottom of the opening.
11. The apparatus as claimed in claim 10, wherein the second metal
layer is made of a different material from the first and third
metal layers.
12. The apparatus as claimed in claim 11, wherein the first metal
layer is made of the same material as the third metal layer.
13. The apparatus as claimed in claim 12, wherein the second metal
layer has higher in resistivity than the first and third metal
layers.
14. The apparatus as claimed in claim 13, wherein the second metal
layer has higher in resistivity than the first and third metal
layers.
15. The apparatus as claimed in claim 10, wherein the second metal
layer is further formed on a part of the first area of the first
metal layer.
Description
BACKGROUND OF THE INVENTION
Field of the Invention
[0001] The present invention relates to a multilayer wiring
structure and its manufacturing method and, more particularly, to a
multilayer wiring structure included in an electric component or a
printed circuit board and its manufacturing method.
Description of Related Art
[0002] Electronic components or printed circuit boards may include
a multilayer wiring structure obtained by laminating a plurality of
wiring layers through interlayer insulating films. In the
multilayer wiring structure, an adhesion layer formed of chromium
(Cr) or the like is often used in order to enhance adhesion between
a conductive pattern and the interlayer insulating film. For
example, in a printed circuit board described in JP 2001-127155 A,
an adhesion layer formed of chromium (Cr) is provided on the upper
surface of copper wiring to thereby ensure adhesion between the
copper wiring and the interlayer insulating film covering the
copper wire.
[0003] Further, in JP 2001-127155 A, a via hole is formed in the
interlayer insulating film to expose the copper wiring, followed by
formation of a plating film by electroless plating. However, the
electroless plating is not only lower in film formation rate than
electrolytic plating, but also higher in process cost. Therefore,
it is preferable to perform the electrolytic plating in place of
the electroless plating; in this case, however, a thin seed layer
for power feeding is required.
[0004] When the seed layer is formed in the via hole, it may remain
between lower and upper wiring layers. The seed layer is formed of
a metal material such as chromium (Cr) and having a thermal
expansion coefficient different from that of copper (Cu) used as a
material for a main conductive layer, so that when a severe test
such as a thermal shock test, a moisture absorption reflow test, or
a humidity resistance performance test is executed, the seed layer
is destroyed due to stress generated at the boundary between the
seed layer and the main conductive layer, which may result in a
conduction failure of the via. Further, the conductive pattern and
the interlayer insulating film differ from each other in thermal
expansion coefficient or hygroscopicity; therefore, when the main
conductive layer or interlayer insulating film is formed thick,
execution of the severe test as mentioned above may destroy the
seed layer due to stress generated at the boundary between the seed
layer and the main conductive layer, which may result in a
conduction failure of the via.
SUMMARY
[0005] It is therefore an object of the present invention to
provide a multilayer wiring structure capable of preventing a
conduction failure of the via caused due to destruction of the seed
layer and its manufacturing method.
[0006] A multilayer wiring structure according to the present
invention is a multilayer wiring structure obtained by laminating a
plurality of wiring layers including first and second wiring
layers. The multilayer wiring structure includes a first conductive
pattern provided in the first wiring layer and including a first
main conductive layer, an interlayer insulating film covering the
first wiring layer and having an opening for exposing therethrough
a part of the first conductive pattern, and a second conductive
pattern provided in the second wiring layer and connected to the
first conductive pattern through the opening. The second conductive
pattern includes a seed layer contacting the interlayer insulating
film and a second main conductive layer provided on the seed layer
and formed of the same metal material as the first main conductive
layer. The seed layer is removed at least at a part of the bottom
portion of the opening, and thus the first and second main
conductive layers are brought into contact with each other at least
at that part of the bottom portion of the opening without the seed
layer being interposed therebetween.
[0007] According to the present invention, the seed layer is
removed at least at a part of the bottom portion of the opening,
and thus the first and second main conductive layers are brought
into direct contact with each other at least at that part of the
bottom portion of the opening. Thus, even if the seed layer is
destroyed, a conduction failure can be prevented since there exists
a portion where the first and second main conductive layers
directly contact each other.
[0008] In the present invention, the inner wall surface and bottom
outer peripheral edge of the opening may be covered with the seed
layer, and the first and second main conductive layers may be
brought into contact with each other at the center portion
surrounded by the outer peripheral edge without the seed layer
being interposed therebetween. This allows power to be fed to the
first main conductive layer through the seed layer, so that it is
possible to form the second main conductive layer inside the
opening by electrolytic plating without performing power feeding to
the first main conductive layer separately. In addition, the outer
peripheral edge of the opening is covered with the seed layer,
thereby making it possible to prevent the interlayer insulating
film constituting the outer peripheral edge of the opening from
peeling off at its edge.
[0009] In the present invention, the first and second main
conductive layers may be formed of copper (Cu). This can reduce the
resistance value of each of the first and second wiring layers.
[0010] In the present invention, the seed layer may be formed of
chromium (Cr), nickel (Ni), titanium (Ti), tungsten (W), tantalum
(Ta), or an alloy or laminate including any of the elements. This
allows the seed layer to function as an adhesion layer, thereby
making it possible to enhance adhesion between the main conductive
layer formed of copper (Cu) and the interlayer insulating film.
[0011] The crystal of copper (Cu) constituting the first and second
main conductive layers may exist while crossing the boundary
defining the bottom portion of the opening at a portion where the
first and second main conductive layers are in contact with each
other. This eliminates the boundary between the first and second
main conductive layers, achieving higher adhesion therebetween.
[0012] A multilayer wiring structure manufacturing method according
to the present invention is a manufacturing method for a multilayer
wiring structure obtained by laminating a plurality of wiring
layers including first and second wiring layers and includes: a
first step of forming, in the first wiring layer, a first
conductive pattern including a first main conductive layer; a
second step of forming an interlayer insulating film covering the
first wiring layer; a third step of forming, in the interlayer
insulating film, an opening for exposing therethrough a part of the
first main conductive layer; a fourth step of forming a seed layer
on the interlayer insulating film and inside the opening; a fifth
step of exposing the first main conductive layer by removing at
least partially the seed layer formed on the bottom portion of the
opening; and a sixth step of forming a second main conductive layer
formed of the same metal material as the first main conductive
layer on the seed layer and the first main conductive layer exposed
from the opening.
[0013] According to the present invention, the seed layer formed at
the bottom portion of the opening is removed at least partially,
allowing the first and second main conductive layers to be brought
into direct contact with each other at least at that part of the
bottom portion of the opening. Thus, even if the seed layer is
destroyed, a conduction failure can be prevented since there exists
a portion where the first and second main conductive layers
directly contact each other.
[0014] In the fifth step, the seed layer formed at the bottom
portion of the opening may be partially removed so that a contact
portion between the first main conductive layer and the seed layer
remains there. Thus, when electrolytic plating is performed by
power feeding through the seed layer in the sixth step, it is
possible to form the second main conductive layer inside the
opening by the electrolytic plating without separately feeding
power to the first main conductive layer.
[0015] In the present invention, the seed layer may include a lower
seed layer formed of chromium (Cr), nickel (Ni), titanium (Ti),
tungsten (W), tantalum (Ta), or an alloy or laminate including any
of the elements and an upper seed layer formed of copper (Cu). This
can significantly reduce the resistance value of the seed
layer.
[0016] As described above, according to the multilayer wiring
structure and its manufacturing method of the present invention, it
is possible to prevent a conduction failure of the via caused due
to destruction of the seed layer.
BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The above features and advantages of the present invention
will be more apparent from the following description of certain
preferred embodiments taken in conjunction with the accompanying
drawings, in which:
[0018] FIG. 1 is a schematic cross-sectional view for explaining
the structure of a multilayer wiring structure according to a first
embodiment of the present invention;
[0019] FIGS. 2 to 16 are process views for explaining the
manufacturing method for the multilayer wiring structure according
to the first embodiment of the present invention;
[0020] FIG. 17 is a schematic diagram indicating a planar pattern
shape of a photoresist;
[0021] FIG. 18 is a schematic diagram indicating a planar pattern
shape of a lower seed layer and an upper seed layer;
[0022] FIG. 19 is an enlarged sectional view of an opening;
[0023] FIG. 20 is a schematic cross-sectional view for explaining
the structure of a multilayer wiring structure according to a
second embodiment of the present invention; and
[0024] FIG. 21 is a schematic cross-sectional view for explaining
the structure of a multilayer wiring structure according to a third
embodiment of the present invention.
DETAILED DESCRIPTION OF THE EMBODIMENTS
[0025] Preferred embodiments of the present invention will be
explained below in detail with reference to the accompanying
drawings.
First Embodiment
[0026] FIG. 1 is a schematic cross-sectional view for explaining
the structure of a multilayer wiring structure 1 according to the
first embodiment of the present invention.
[0027] The multilayer wiring structure 1 according to the present
embodiment constitutes a part of a chip-type electronic component
(e.g., a filter, a balun, a diplexer, a resonator, a directional
coupler, or the like) having integrated elements such as a
capacitor C and an inductor L. However, the application target of
the multilayer wiring structure according to the present invention
is not limited to this, and is applicable to various electronic
components, various module components, various circuit boards, and
the like.
[0028] As illustrated in FIG. 1, the multilayer wiring structure 1
according to the present embodiment includes a substrate 6, an
insulating film 8 formed on the substrate 6, and first to fifth
wiring layers L1 to L5 laminated on the insulating film 8. There is
no particular restriction on the material of the substrate 6, and
inorganic materials such as ferrite, glass, and ceramics, and resin
materials can be used. The insulating film 8 is a planarization
film formed of an insulating material such as SiO.sub.2 or
Al.sub.2O.sub.3. For the insulating film 8, inorganic materials and
resin materials can be used. The insulating film 8 may be omitted
when insulation or sufficient surface flatness can be obtained by
the material of the substrate 6.
[0029] The wiring layer L1 has conductive patterns P1a and P1b each
composed of a lower seed layer 11, an upper seed layer 12, and a
main conductive layer 13. The lower seed layer 11 is formed of
chromium (Cr), nickel (Ni), titanium (Ti), tungsten (W), tantalum
(Ta), or an alloy or laminate including any of the elements and
functions as an adhesion layer. Although not particularly limited,
the thickness of the lower seed layer 11 is about 0.01 .mu.m. The
upper seed layer 12 is formed of copper (Cu) and plays a role of
reducing the resistance value of a power line in an electrolytic
plating process to be described later. Although not particularly
limited, the thickness of the upper seed layer 12 is about 0.2
.mu.m to about 0.4 .mu.m. The main conductive layer 13 is formed of
copper (Cu). Although not particularly limited, the thickness of
the main conductive layer 13 is about 5 .mu.m to 70 .mu.m.
[0030] As illustrated in FIG. 1, the conductive pattern P1b is
completely covered with a capacitive insulating film D formed of an
insulating material such as Si.sub.3N.sub.4, while the upper
portion of the conductive pattern P1a is exposed through an opening
formed in the capacitive insulating film D. The conductive pattern
P1b functions as a lower capacitive electrode for the capacitor C,
and a conductive pattern P1c functioning as an upper capacitive
electrode is formed on the surface of the capacitive insulating
film D covering the conductive pattern P1b. The conductive pattern
P1c includes a lower seed layer 14, an upper seed layer 15, and a
main conductive layer 16.
[0031] The wiring layer L1 is covered with an interlayer insulating
film 61, and a wiring layer L2 is formed on the interlayer
insulating film 61. There is no particular restriction on the
material of the interlayer insulating film 61, and resin materials
such as polyimide, benzocyclobutene, BT resin, epoxy, and acrylic,
or inorganic materials such as Al.sub.2O.sub.3, SiO.sub.2, and
Si.sub.3N.sub.4 can be used. The same material as the interlayer
insulating film 61 can be used for interlayer insulating films 62
to 64 positioned above the interlayer insulating film 61. The
wiring layer L2 has conductive patterns P2a and P2b each composed
of a lower seed layer 21, an upper seed layer 22, and a main
conductive layer 23. The materials and thicknesses of the lower
seed layer 21, upper seed layer 22, and main conductive layer 23
are the same as those of the lower seed layer 11, upper seed layer
12, and main conductive layer 13, respectively. The materials and
thicknesses of lower seed layers 31, 41, and 51 included
respectively in the wiring layers L3 to L5 can also be made the
same as those of the lower seed layer 11, the materials and
thicknesses of upper seed layers 32, 42, and 52 included
respectively in the wiring layers L3 to L5 can also be made the
same as those of the upper seed layer 12, and the materials and
thicknesses of main conductive layers 33, 43, and 53 included
respectively in the wiring layers L3 to L5 can also be made the
same as those of the main conductive layer 13. However, the
thicknesses of the above layers need not be the same and may differ
as appropriate. Openings 61a and 61b for exposing therethrough the
respective conductive patterns P1a and P1b are formed in the
interlayer insulating film 61, and the conductive patterns P2a and
P2b are connected respectively to the conductive patterns P1a and
P1c through the openings 61a and 61b.
[0032] The lower seed layer 21 and upper seed layer 22 are removed
at substantially the bottom center portions of the respective
openings 61a and 61b. As a result, the main conductive layers 13,
16 and main conductive layer 23 are brought into contact with each
other at substantially the bottom center portions of the respective
openings 61a and 61b without the seed layer being interposed
therebetween. The lower seed layer 21 and upper seed layer 22
remain in other portions. That is, the upper surface of the
interlayer insulating film 61, the inner wall surfaces of the
respective openings 61a and 61b, and the outer peripheral edges of
the bottom portions of the respective openings 61a and 61b are
covered with the lower seed layer 21 and the upper seed layer
22.
[0033] The wiring layer L2 is covered with the interlayer
insulating film 62, and the wiring layer L3 is formed on the
interlayer insulating film 62. The wiring layer L3 has conductive
patterns P3a and P3b each composed of a lower seed layer 31, an
upper seed layer 32, and a main conductive layer 33. An opening 62a
for exposing therethrough the conductive pattern P2a is formed in
the interlayer insulating film 62, and the conductive pattern P3a
is connected to the conductive pattern P2a through the opening
62a.
[0034] The lower seed layer 31 and upper seed layer 32 are removed
at substantially the bottom center portion of the opening 62a. As a
result, the main conductive layer 23 and the main conductive layer
33 are brought into contact with each other at substantially the
bottom center portion of the opening 62a without the seed layer
being interposed therebetween. The lower seed layer 31 and upper
seed layer 32 remain in other portions. That is, the upper surface
of the interlayer insulating film 62, the inner wall surface of the
opening 62a, and the outer peripheral edge of the bottom portion of
the opening 62a are covered with the lower seed layer 31 and the
upper seed layer 32.
[0035] The wiring layer L3 is covered with the interlayer
insulating film 63, and the wiring layer L4 is formed on the
interlayer insulating film 63. The wiring layer L4 has conductive
patterns P4a and P4b each composed of a lower seed layer 41, an
upper seed layer 42, and a main conductive layer 43. An opening 63a
for exposing therethrough the conductive pattern P3a is formed in
the interlayer insulating film 63, and the conductive pattern P4a
is connected to the conductive pattern P3a through the opening
63a.
[0036] The lower seed layer 41 and upper seed layer 42 are removed
at substantially the bottom center portion of the opening 63a. As a
result, the main conductive layer 33 and the main conductive layer
43 are brought into contact with each other at substantially the
bottom center portion of the opening 63a without the seed layer
being interposed therebetween. The lower seed layer 41 and upper
seed layer 42 remain in other portions. That is, the upper surface
of the interlayer insulating film 63, the inner wall surface of the
opening 63a, and the outer peripheral edge of the bottom portion of
the opening 63a are covered with the lower seed layer 41 and the
upper seed layer 42.
[0037] The conductive patterns P2a, P2b, P3b, and P4b are elements
constituting a part of the inductor L or a transmission line.
[0038] The wiring layer L4 is covered with the interlayer
insulating film 64, and the wiring layer L5 is formed on the
interlayer insulating film 64. The wiring layer L5 has a conductive
pattern P5a composed of a lower seed layer 51, an upper seed layer
52, and a main conductive layer 53. An opening 64a for exposing
therethrough the conductive pattern P4a is formed in the interlayer
insulating film 64, and the conductive pattern P5a is connected to
the conductive pattern P4a through the opening 64a.
[0039] The lower seed layer 51 and upper seed layer 52 are removed
at substantially the bottom center portion of the opening 64a. As a
result, the main conductive layer 43 and the main conductive layer
53 are brought into contact with each other at substantially the
bottom center portion of the opening 64a without the seed layer
being interposed therebetween. The lower seed layer 51 and upper
seed layer 52 remain in other portions. That is, the upper surface
of the interlayer insulating film 64, the inner wall surface of the
opening 64a, and the outer peripheral edge of the bottom portion of
the opening 64a are covered with the lower seed layer 51 and the
upper seed layer 52.
[0040] The conductive pattern P5a is used as an external terminal
(e.g., a bonding pad). When the conductive pattern P5a is used as
the external terminal, an Ni/Au electrode, an Ni/Sn electrode, or
an Ni/Ag electrode can be formed on the surface of the conductive
pattern P5a to form an LGA pad, or a soldering hole is formed to
constitute a BGA pad so as to allow soldering to be carried out.
Further, by forming an Ni/Au electrode or an Ni/Pd/Au electrode on
the surface of the conductive pattern P5a, the conductive pattern
P5a can be used as a wire bonding pad or a bump bonding pad.
[0041] As described above, in the multilayer wiring structure 1
according to the present embodiment, the seed layer is removed at
substantially the bottom center portions of the respective openings
61a to 64a and 61b. Thus, at these portions, the main conductive
layer (e.g., main conductive layer 13) in the lower layer and the
main conductive layer (e.g., main conductive layer 23) in the upper
layer are brought into direct contact with each other. That is, at
these portions, the seed layer does not exist, so that even when a
severe test such as a thermal shock test, a moisture absorption
reflow test, or a humidity resistance performance test is executed,
a conduction failure due to destruction of the seed layer is not
generated.
[0042] In addition, the inner wall surfaces and outer peripheral
edges of the bottom portions of the respective openings 61a to 64a
and 61b are covered with the seed layer, and the seed layer is
removed only at the center portion surrounded by the outer
peripheral edge, so that the edges of the respective interlayer
insulating films 61 to 64 constituting the outer peripheral edges
of the openings 61a to 64a and 61b are covered with the lower seed
layers 11, 21, 31, 41, and 51 having high adhesion. This prevents
the interlayer insulating films 61 to 64 from peeling off at their
edges.
[0043] The following describes a manufacturing method for the
multilayer wiring structure 1 according to the present
embodiment.
[0044] FIGS. 2 to 16 are process views for explaining the
manufacturing method for the multilayer wiring structure 1
according to the present embodiment.
[0045] First, as illustrated in FIG. 2, the substrate 6 formed of
ceramics or the like is prepared, and the insulating film 8 for
planarization formed of an insulating material such as
Al.sub.2O.sub.3 is formed on the surface of the substrate 6 by a
sputtering method. Then, the lower seed layer 11 formed of chromium
(Cr) and the upper seed layer 12 formed of copper (Cu) are formed
on the surface of the insulating film 8 by a sputtering method.
[0046] Subsequently, as illustrated in FIG. 3, a photoresist R1 is
formed on the entire surface of the upper seed layer 12, followed
by exposure and development using a photolithography method,
whereby the photoresist R1 is patterned. Then, electrolytic plating
is performed in this state to form the main conductive layer 13 at
portions where the photoresist R1 does not exist, as illustrated in
FIG. 4. When performing the electrolytic plating, power is fed
through the lower seed layer 11 and upper seed layer 12. At this
time, electric resistance during power feeding can be reduced since
the upper seed layer 12 is formed of copper (Cu) which is low in
resistance value and having a film thickness sufficiently larger
than that of the lower seed layer 11, although the lower seed layer
11 is formed of a material having a comparatively high resistance
value, such as chromium (Cr), and having a very small film
thickness.
[0047] Subsequently, as illustrated in FIG. 5, the photoresist R1
is peeled off, and then, as illustrated in FIG. 6, the lower seed
layer 11 and upper seed layer 12 at portions where they are not
covered with the main conductive layer 13 are removed. As a result,
the conductive patterns P1a and P1b are electrically isolated. The
removal of the lower seed layer 11 and upper seed layer 12 can be
carried out by wet-etching or dry-etching.
[0048] Subsequently, as illustrated in FIG. 7, the capacitive
insulating film D formed of Si.sub.3N.sub.4 is formed on the entire
exposed surface by a CVD method or a sputtering method. Further, as
illustrated in FIG. 8, the lower seed layer 14, upper seed layer
15, and main conductive layer are laminated in this order on the
surface of the capacitive insulating film D and then patterned to
thereby form the conductive pattern P1c on the conductive pattern
P1b through the capacitive insulating film D. Further, as
illustrated in FIG. 9, the capacitive insulating film D is
patterned to expose the upper surface of the conductive pattern
P1a. Then, as illustrated in FIG. 10, the interlayer insulating
film 61 is formed on the entire exposed surface and then patterned
to thereby form the openings 61a and 61b for exposing therethrough
the respective conductive patterns P1a and P1c. The formation of
the interlayer insulating film 61 is achieved by application of
ultraviolet curable resin onto the entire exposed surface, followed
by exposure and development using a photolithography method and
then by curing.
[0049] Subsequently, as illustrated in FIG. 11, the lower seed
layer 21 formed of chromium (Cr) and the upper seed layer 22 formed
of copper (Cu) are sequentially formed on the entire exposed
surface including the inner portions of the respective openings 61a
and 61b by a sputtering method. As a result, the inner wall
surfaces and bottom surfaces (upper surface of the main conductive
layer 13) of the respective openings 61a and 61b are brought into
contact with the lower seed layer 21.
[0050] Subsequently, as illustrated in FIG. 12, a photoresist R2 is
formed on the entire surface of the upper seed layer 22, followed
by exposure and development using a photolithography method,
whereby the photoresist R2 is patterned. The planar pattern shape
of the photoresist R2 is as illustrated in FIG. 17. That is, the
photoresist R2 covers the inner wall surfaces of the respective
openings 61a and 61b and exposes the bottom center portions of the
respective openings 61a and 61b. This indicates that the opening
portions R2a and R2b of the photoresist R2 are slightly smaller in
diameter than the respective openings 61a and 61b of the interlayer
insulating film 61.
[0051] In this state, the upper seed layer 22 and lower seed layer
21 are sequentially etched with the photoresist R2 used as a mask.
Thus, as illustrated in FIG. 13, the upper seed layer 22 and lower
seed layer 21 at portions where they are not covered with the
photoresist R2 are removed, with the result that the main
conductive layer 13 of the wiring layer L1 is exposed. There is no
particular restriction on the removal method for the upper seed
layer 22 and lower seed layer 21, and dry-etching, wet-etching, or
the like can be used. Alternatively, the following procedure may be
taken, in which the upper seed layer 22 is patterned with the
photoresist R2 used as a mask, followed by removal of the
photoresist R2, and then the lower seed layer 21 is patterned with
the patterned upper seed layer 22 used as a mask.
[0052] Thereafter, the photoresist R2 is removed. Thus, as
illustrated in FIG. 18, which is a plan view, the inner wall
surfaces and bottom outer peripheral edges of the respective
openings 61a and 61b are covered with the lower seed layer 21 and
upper seed layer 22. On the other hand, a center portion 61c
surrounded by the outer peripheral edge is not covered with the
lower seed layer 21 and upper seed layer 22, and the main
conductive layer 13 is exposed.
[0053] Subsequently, as illustrated in FIG. 14, a photoresist R3 is
formed on the entire exposed surface, followed by exposure and
development using a photolithography method, whereby the
photoresist R3 is patterned. Then, electrolytic plating is
performed in this state to form the main conductive layer 23 at
portions where the photoresist R3 does not exist, as illustrated in
FIG. 15. When performing the electrolytic plating, power is fed
through the lower seed layer 21 and upper seed layer 22. As
described above, the lower seed layer 21 and upper seed layer 22
remain in the bottom outer peripheral edges of the respective
openings 61a and 61b, and thus the lower and upper seed layers 21
and 22 and the main conductive layer 13 are brought into contact
with each other at these portions, so that when power is fed
through the lower seed layer 21 and upper seed layer 22, power is
also fed to the main conductive layer 13. This allows a plating
film to be properly grown even at the bottom center portions of the
respective openings 61a and 61b, which are not covered with the
lower seed layer 21 and upper seed layer 22.
[0054] The main conductive layer 23 formed directly on the surface
of the main conductive layer 13 by plating is integrated with the
main conductive layer 13 as the plating is grown, with the result
that the boundary between the main conductive layers 13 and 23 is
eliminated. More specifically, the crystal of copper (Cu)
constituting the main conductive layer 13 is continuously grown
and, as illustrated in FIG. 19, crystal 71 of copper (Cu)
constituting the main conductive layers 13 and 23 exists while
crossing a boundary 72 defining the bottom portion of the opening
61a at a portion where the main conductive layers 13 and 23 are in
contact with each other.
[0055] Subsequently, as illustrated in FIG. 16, the photoresist R3
is removed, and the lower seed layer 21 and upper seed layer 22 at
portions where they are not covered with the main conductive layer
23 are removed by wet-etching or dry-etching. As a result, the
conductive patterns P2a and P2b are electrically isolated.
[0056] Thereafter, the process illustrated in FIGS. 10 to 16 is
repeated, whereby the multilayer wiring structure 1 illustrated in
FIG. 1 can be obtained.
[0057] As described above, in the manufacturing method for the
multilayer wiring structure 1 according to the present embodiment,
the upper seed layer and lower seed layer formed on the bottom
portion of the opening are removed partially, so that the main
conductive layer (e.g., main conductive layer 13) in the lower
wiring layer and the main conductive layer (e.g., main conductive
layer 23) in the upper wiring layer can be brought into direct
contact with each other at the bottom center portion of the
opening.
[0058] In addition, the lower seed layer and upper seed layer
remain in the bottom outer peripheral edge of the opening, so that,
during the electrolytic plating, power can be fed to the main
conductive layer of the lower wiring layer at this portion.
Further, since the bottom outer peripheral edge of the opening is
covered with the lower seed layer, the edge of the interlayer
insulating film 61 contacting the main conductive layer 13 is
covered with the lower seed layer 21 as dented by the symbol E of
FIG. 19. This can prevent the interlayer insulating film 61 from
peeling off at its edge.
Second Embodiment
[0059] FIG. 20 is a schematic cross-sectional view for explaining
the structure of a multilayer wiring structure 2 according to the
second embodiment of the present invention.
[0060] The multilayer wiring structure 2 according to the present
embodiment differs from the multilayer wiring structure 1 according
to the first embodiment in that the removal range of each of the
lower and upper seed layers (21, 31, 41, 51, and 22, 32, 42, 52) is
enlarged over the entire bottom portion of the opening. Other
configurations are the same as those of the multilayer wiring
structure 1 according to the first embodiment, so the same
reference numerals are given to the same elements, and overlapping
description will be omitted.
[0061] In the present embodiment, an area where the main conductive
layer (e.g., main conductive layer 13) in the lower wiring layer
and the main conductive layer (e.g., main conductive layer 23) in
the upper wiring layer are brought into direct contact with each
other is increased, so that via resistance can be reduced
further.
Third Embodiment
[0062] FIG. 21 is a schematic cross-sectional view for explaining
the structure of a multilayer wiring structure according to the
third embodiment of the present invention.
[0063] The multilayer wiring structure 3 according to the present
embodiment differs from the multilayer wiring structure 2 according
to the second embodiment in that the removal range of each of the
lower and upper seed layers (21, 31, 41, 51, and 22, 32, 42, 52) is
enlarged to the inner wall surface of the opening and the upper
surface of the interlayer insulating film positioned at the
periphery of the opening. Other configurations are the same as
those of the multilayer wiring structure 2 according to the second
embodiment, so the same reference numerals are given to the same
elements, and overlapping description will be omitted.
[0064] In the present embodiment, the lower seed layers 21, 31, 41,
and 51 and the upper seed layers 22, 32, 42, and each formed inside
the opening are fairly removed, thereby facilitating the patterning
of the photoresist (e.g., photoresist R2) for patterning of the
above lower and upper seed layers.
[0065] It is apparent that the present invention is not limited to
the above embodiments, but may be modified and changed without
departing from the scope and spirit of the invention.
[0066] For example, although the seed layer is constituted of a
laminated film of the lower seed layer and upper seed layer in the
above embodiments, it may have a single layer structure constituted
of only the lower seed layer.
[0067] Further, the main conductive layers of the respective wiring
layers may have the same thickness or at least some of them may
have a different thickness. That is, the thickness of the main
conductive layer may be designed to a desired value.
* * * * *