U.S. patent application number 15/716753 was filed with the patent office on 2019-08-15 for techniques for print ink droplet measurement and control to deposit fluids within precise tolerances.
The applicant listed for this patent is Kateeva, Inc.. Invention is credited to Lucas D. Barkley, Valerie Gassend, Nahid Harjee, Christopher R. Hauf, Alexander Sou-Kang Ko, Gregory Lewis, Conor F. Madigan, Eliyahu Vronsky.
Application Number | 20190252646 15/716753 |
Document ID | / |
Family ID | 51022049 |
Filed Date | 2019-08-15 |
View All Diagrams
United States Patent
Application |
20190252646 |
Kind Code |
A9 |
Harjee; Nahid ; et
al. |
August 15, 2019 |
Techniques for Print Ink Droplet Measurement and Control to Deposit
Fluids within Precise Tolerances
Abstract
An ink printing process employs per-nozzle droplet volume
measurement and processing software that plans droplet combinations
to reach specific aggregate ink fills per target region,
guaranteeing compliance with minimum and maximum ink fills set by
specification. In various embodiments, different droplet
combinations are produced through different printhead/substrate
scan offsets, offsets between printheads, the use of different
nozzle drive waveforms, and/or other techniques. These combinations
can be based on repeated, rapid droplet measurements that develop
understandings for each nozzle of means and spreads for expected
droplet volume, velocity and trajectory, with combinations of
droplets being planned based on these statistical parameters.
Optionally, random fill variation can be introduced so as to
mitigate Mura effects in a finished display device. The disclosed
techniques have many possible applications.
Inventors: |
Harjee; Nahid; (Sunnyvale,
CA) ; Barkley; Lucas D.; (Lexington, KY) ;
Hauf; Christopher R.; (Belmont, CA) ; Vronsky;
Eliyahu; (Los Altos, CA) ; Madigan; Conor F.;
(San Francisco, CA) ; Lewis; Gregory; (Menlo Park,
CA) ; Ko; Alexander Sou-Kang; (Santa Clara, CA)
; Gassend; Valerie; (East Palo Atlo, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Kateeva, Inc. |
Newark |
CA |
US |
|
|
Prior
Publication: |
|
Document Identifier |
Publication Date |
|
US 20180083230 A1 |
March 22, 2018 |
|
|
Family ID: |
51022049 |
Appl. No.: |
15/716753 |
Filed: |
September 27, 2017 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
15135380 |
Apr 21, 2016 |
9802403 |
|
|
15716753 |
|
|
|
|
14340403 |
Jul 24, 2014 |
9352561 |
|
|
15135380 |
|
|
|
|
PCT/US14/35193 |
Apr 23, 2014 |
|
|
|
14340403 |
|
|
|
|
14162525 |
Jan 23, 2014 |
9010899 |
|
|
14340403 |
|
|
|
|
PCT/US13/77720 |
Dec 24, 2013 |
|
|
|
14162525 |
|
|
|
|
14162525 |
Jan 23, 2014 |
9010899 |
|
|
PCT/US14/35193 |
|
|
|
|
61950820 |
Mar 10, 2014 |
|
|
|
61816696 |
Apr 26, 2013 |
|
|
|
61866031 |
Aug 14, 2013 |
|
|
|
61746545 |
Dec 27, 2012 |
|
|
|
61822855 |
May 13, 2013 |
|
|
|
61842351 |
Jul 2, 2013 |
|
|
|
61857298 |
Jul 23, 2013 |
|
|
|
61898769 |
Nov 1, 2013 |
|
|
|
61920715 |
Dec 24, 2013 |
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 51/0005 20130101;
B41J 2/04581 20130101; B41J 2/04588 20130101; B41J 2/04593
20130101; H01L 51/0029 20130101; H01L 51/56 20130101; B41J 2/2054
20130101; B41J 2/0456 20130101; B41J 2/04586 20130101; H01L 51/0012
20130101; B41J 2/01 20130101 |
International
Class: |
H01L 51/56 20060101
H01L051/56; B41J 2/045 20060101 B41J002/045; B41J 2/205 20060101
B41J002/205; H01L 51/00 20060101 H01L051/00; B41J 2/01 20060101
B41J002/01 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 26, 2013 |
TW |
102148330 |
Claims
1. (canceled)
2. An apparatus to fabricate layers on respective substrates, each
layer and respective substrate to form part of a respective
electronic device, the apparatus comprising: a print head having
nozzles; a droplet measurement system comprising a beam source and
a detector, the detector providing an electronic output
representing measurement of a characteristic of a droplet of the
liquid ejected from a selected one of the nozzles during droplet
flight, the electronic output dependent on detection of an
interference pattern produced from impingement of a beam from the
beam source on the droplet of the liquid; and a substrate transport
mechanism to transport each of the respective substrates in
succession to-and-from a printing region in which each of the
respective substrates can be printed on by the print head; wherein
the print head is to print a liquid onto each of the respective
substrates in dependence on the electronic output, the liquid
providing a material used to form the layers.
3. The apparatus of claim 2, wherein the apparatus further
comprises a transport mechanism for the droplet measurement system
to selectively move the droplet measurement system relative to the
print head in at least two independent dimensions while the print
head is in a stationary position.
4. The apparatus of claim 3, wherein the transport mechanism for
the droplet measurement system is to selectively move the droplet
measurement system relative to the print head in at least three
independent dimensions while the print head is in the stationary
position, including in a dimension extending between (1) a point of
the intersection between the beam and the droplet and (2) the
selected one of the nozzles, so as position the point of
intersection at a selective height from the selected one of the
nozzles.
5. The apparatus of claim 3, wherein the nozzles lie within a first
plane, and wherein: the droplet measurement system further
comprises mirrors; the beam source, the detector, and the mirrors
are each mounted by the droplet measurement system in fixed
positional relationship relative to one another; the transport
mechanism for the droplet measurement system is to move the droplet
measurement system in the at least two dimensions, so as to move a
segment of a path of the beam in a manner relative to the print
head, within a plane; and each of the beam source and the detector
are mounted by the droplet measurement system outside of the
plane.
6. The apparatus of claim 3, wherein: the droplet measurement
system further comprises a collector for droplets ejected from the
selected one of the nozzles while the beam is positioned to
intersect the flight path of the droplet of the liquid ejected from
the selected one of the nozzles, to collect ejected droplets
following measurement; and the beam source, the detector, and the
collector are each mounted by the transport mechanism for the
droplet measurement system in fixed positional relationship
relative to one another.
7. The apparatus of claim 2, wherein the characteristic is droplet
volume and wherein the electronic output is to vary depending on
volume of the droplet of the liquid ejected from the selected one
of the nozzles.
8. The apparatus of claim 2, wherein the characteristic is one of
trajectory or velocity and wherein the electronic output is to vary
depending on one of the trajectory or velocity of the droplet of
the liquid ejected from the selected one of the nozzles.
9. The apparatus of claim 2, wherein: the apparatus comprises at
least one thousand nozzles; and the apparatus is to use the droplet
measurement system iteratively to measure the parameter for each
one of the at least one thousand nozzles, with the selected one of
the nozzles being in respective iterations each one of the at least
one thousand nozzles.
10. The apparatus of claim 9, wherein the apparatus further
comprises a transport mechanism for the droplet measurement system
to selectively move the droplet measurement system relative to the
print head in at least two independent dimensions while the print
head is in a stationary position.
11. The apparatus of claim 2, wherein the apparatus further
comprises a processing system to process liquid deposited onto each
of the respective substrates, to convert the liquid into a form
that will persist as the layer in the respective electronic
device.
12. The apparatus of claim 11, wherein the processing system is a
curing system, the curing system to expose the liquid deposited
onto each of the respective substrates to radiation in order to
convert the liquid to the form.
13. The apparatus of claim 11, further comprising a gas enclosure
that is to contain the print head, the printing region and the
processing system, such that the apparatus is adapted to perform
printing of the liquid onto each of the respective substrates and
processing of the liquid deposited onto each of the respective
substrates in a manner such that each of the respective substrates
is not exposed to an uncontrolled atmosphere in between the
printing and the processing.
14. The apparatus of claim 2, wherein the liquid comprises a liquid
monomer.
15. The apparatus of claim 2, wherein the apparatus further
comprises at least one thousand nozzles, and wherein the apparatus
further comprises an electronic control system to: automatically
control the droplet measurement system on an iterative basis when
none of the respective substrates are at the printing region, to
automatically measure the characteristic for a droplet from a
precessed subset of the at least one thousand nozzles during times
in between printing of the liquid onto successive ones of the
respective substrates, as a function of position of at least one of
the successive ones; and intermittently update measurement of the
parameter for each one of the at least one thousand nozzles in
dependence on the automated measurements.
16. The apparatus of claim 2, wherein the apparatus comprises a
maintenance station, and wherein the apparatus is to cause the
droplet measurement system to measure the characteristic at times
when the print head is positioned at the maintenance station.
17. The apparatus of claim 2, further comprising at least one
processor and memory, wherein the apparatus is to store at least
one value for each one of the nozzles representing measurement of
the parameter for that one of the nozzles, and wherein the at least
one processor is to plan printing of the liquid according to a
predetermined print file, but is to control which of the nozzles
are used to eject the droplets according to variation in the
parameter from nozzle-to-nozzle, as represented by the at least one
value for each of the nozzles stored in the memory.
18. The apparatus of claim 17, wherein the at least one processor
is to, for at least one target region on each of the respective
substrates, cause the print head to deposit an aggregate volume of
the liquid within a predetermined tolerance range, and wherein the
at least one processor is to plan the printing in a manner where
nozzle selection is restricted such that a sum of expected volumes
for respective ones of the droplets used to obtain the aggregate
volume within the target region necessarily lies within the
predetermined tolerance range, in dependence on respective ones of
the values stored in the memory.
19. The apparatus of claim 2, wherein each respective electronic
device is an electronic display device having pixels.
20. A method of fabricating layers on respective substrates, each
layer and respective substrate to form part of a respective
electronic device, the method comprising: measuring a
characteristic of a droplet of the liquid ejected from a selected
one of nozzles of a print head during droplet flight, using a
droplet measurement system comprising a beam source and a detector,
wherein the detector provides an electronic output representing
measurement of the measurement dependent on detection of an
interference pattern produced from impingement of a beam from the
beam source on the droplet of the liquid; printing liquid from the
print head onto each of the respective substrates in dependent on
the electronic output; transporting each of the respective
substrates in succession to-and-from a printing region in which
each of the respective substrates can be printed on by the print
head, using a substrate transport mechanism; and processing the
liquid deposited on each of the respective substrates, to convert a
material provided by the liquid to a form that will persist at the
layer in each respective electronic device.
21. The method of claim 20, wherein the method further comprises
selectively moving the droplet measurement system relative to the
print head in at least two independent dimensions while the print
head is in a stationary position.
22. The method of claim 21, wherein the method further comprises
selectively moving the droplet measurement system in at least three
independent dimensions while the print head is in the stationary
position, including in a dimension extending between (1) a point of
the intersection between the beam and the droplet and (2) the
selected one of the nozzles, so as position the point of
intersection at a selective height from the selected one of the
nozzles.
23. The method of claim 21, wherein the nozzles lie within a first
plane, and wherein: the droplet measurement system further
comprises mirrors, and the beam source, the detector, and the
mirrors are all mounted by the droplet measurement system in fixed
positional relationship relative to one another; the method further
comprises moving the droplet measurement system in the at least two
dimensions so as to move a segment of a path of the beam in a
manner relative to the print head, within a plane; and each of the
beam source and the detector are mounted by the droplet measurement
system outside of the plane.
24. The method of claim 21, wherein the method further comprises
using a collector of the droplet measurement system to collect
droplets ejected from the selected one of the nozzles while the
beam is positioned to intersect the flight path of the droplet of
the liquid ejected from the selected one of the nozzles, following
measurement, and wherein the beam source, the detector, and the
collector are each mounted by the transport mechanism for the
system in fixed positional relationship relative to one
another.
25. The method of claim 20, wherein the characteristic is droplet
volume and wherein the electronic output varies depending on volume
of the droplet of the liquid ejected from the selected one of the
nozzles.
26. The method of claim 20, wherein the characteristic is one of
trajectory or velocity and wherein the electronic output varies
depending on one of the trajectory or velocity of the droplet of
the liquid ejected from the selected one of the nozzles.
27. The method of claim 20, wherein: the print head is a first
print head; printing the liquid is performed using at least one
thousand nozzles carried by at least one print head, the at least
one print head including the first print head; and the method
further comprises iteratively measuring the parameter for each one
of the at least one thousand nozzles, with the selected one of the
nozzles being in respective iterations each one of the at least one
thousand nozzles.
28. The method of claim 27, wherein the method further comprises
selectively moving the system relative to the print head in at
least two independent dimensions while the print head is in a
stationary position.
29. The method of claim 20, wherein the processing system is a
curing system comprising a source of radiation, and wherein the
method further comprises exposing the liquid deposited onto each of
the respective substrates to the source of radiation in order to
cure the liquid and thereby convert the liquid to the form.
30. The method of claim 20, further comprising printing the liquid
onto each of the respective substrates and processing of the liquid
deposited onto each of the respective substrates in a manner such
that each of the respective substrates is not exposed to an
uncontrolled atmosphere in between the printing and the
processing.
31. The method of claim 20, wherein the liquid comprises a liquid
monomer.
32. The method of claim 20, wherein: the print head is a first
print head; printing of the liquid is performed using at least one
thousand nozzles carried by at least one print head, the at least
one print head including the first print head; and the method
further comprises automatically controlling the droplet measurement
system on an iterative basis when none of the respective substrates
are at the printing region, to automatically measure the
characteristic for a droplet from a precessed subset of the at
least one thousand nozzles during times in between printing of the
liquid onto successive ones of the respective substrates, as a
function of position of at least one of the successive ones, and
intermittently updating stored measurement of the parameter for
each one of the at least one thousand nozzles, in dependence on the
automated measurements.
33. The method of claim 20, wherein measuring is performed at times
when the print head has been moved to a maintenance station.
34. The method of claim 20, wherein the method further comprises
storing in memory at least one value for each one of the nozzles
representing measurement of the parameter for that one of the
nozzles, and planning printing of the liquid according to a
predetermined print file using at least one processor, wherein
printing is performed in a manner such that the at least one
processor controls which of the nozzles are used to eject the
droplets according to variation in the parameter from
nozzle-to-nozzle, as represented by the at least one value for each
of the nozzles stored in the memory.
35. The method of claim 34, wherein the method further comprises,
for at least one target region on each of the respective
substrates, causing the print head to deposit an aggregate volume
of the liquid within a predetermined tolerance range, and wherein
planning the printing is performed in a manner where droplet
selection to obtain the aggregate volume is restricted, such that a
sum of expected volumes for respective ones of the droplets used to
print within the target region necessarily lies within the
predetermined tolerance range, in dependence on respective ones of
the values stored in the memory.
36. The method of claim 20, wherein each respective electronic
device is an electronic display device having pixels.
37. An apparatus to fabricate layers on respective substrates, each
layer and respective substrate to form part of a respective
electronic device, the apparatus comprising: means for measuring a
characteristic of a droplet of the liquid ejected from a selected
one of nozzles of a print head during droplet flight, using a
droplet measurement system comprising a beam source and a detector,
wherein the detector provides an electronic output representing
measurement of the measurement dependent on detection of an
interference pattern produced from impingement of a beam from the
beam source on the droplet of the liquid; means for printing liquid
from the print head onto each of the respective substrates in
dependent on the electronic output; means for transporting each of
the respective substrates in succession to-and-from a printing
region in which each of the respective substrates can be printed on
by the print head, using a substrate transport mechanism; and means
for processing the liquid deposited on each of the respective
substrates, to convert a material provided by the liquid to a form
that will persist at the layer in each respective electronic
device.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. Utility patent
application Ser. No. 15/361,845, for on Apr. 21, 2016, which in
turn is a continuation of U.S. Utility patent application Ser. No.
14/340,403, filed on Mar. 10, 2014 (issued as U.S. Pat. No.
9,352,561 on May 31, 2016); each of these applications is entitled
"Techniques For Print Ink Droplet Volume Measurement And Control
Over Deposited Fluids Within Precise Tolerances," and each was
filed on behalf of first named inventor Nahid Harjee. U.S. Utility
patent application Ser. No. 14/340,403 in turn claims priority to
each of U.S. Provisional Patent Application No. 61/950,820 for
"Techniques For Print Ink Droplet Volume Measurement And Control
Over Deposited Fluids Within Precise Tolerances," filed on behalf
of first named inventor Nahid Harjee on Mar. 10, 2014 and Taiwan
Patent Application No. 103114950 for "Techniques For Print Ink
Droplet Volume Measurement And Control Over Deposited Fluids Within
Precise Tolerances," filed on behalf of first named inventor Nahid
Harjee on Apr. 25, 2014. U.S. Utility patent application Ser. No.
14/340,403 is also a continuation in-part of each of PCT Patent
Application No. PCT/US14/35193 for "Techniques for Print Ink
Droplet Measurement and Control to Deposit Fluids within Precise
Tolerances," filed on behalf of first named inventor Nahid Harjee
on Apr. 23, 2014 and U.S. Utility patent application Ser. No.
14/162,525 for "Techniques for Print Ink Volume Control To Deposit
Fluids Within Precise Tolerances," filed on behalf of first named
inventor Nahid Harjee on Jan. 23, 2014 (and issued on Apr. 21, 2015
as U.S. Pat. No. 9,010,899). U.S. Utility patent application Ser.
No. 14/162,525 in turn claims priority to Taiwan Patent Application
No. 102148330, filed for "Techniques for Print Ink Volume Control
To Deposit Fluids Within Precise Tolerances" on behalf of first
named inventor Nahid Harjee on Dec. 26, 2013, and further is a
continuation of P.C.T. Patent Application No. PCT/US2013/077720,
filed for "Techniques for Print Ink Volume Control To Deposit
Fluids Within Precise Tolerances" on behalf of first named inventor
Nahid Harjee on Dec. 24, 2013. P.C.T. Patent Application No.
PCT/US2013/077720 claims priority to each of: U.S. Provisional
Patent Application No. 61/746,545, for "Smart Mixing," filed on
behalf of first named inventor Conor Francis Madigan on Dec. 27,
2012; U.S. Provisional Patent Application No. 61/822,855 for
"Systems and Methods Providing Uniform Printing of OLED Panels,"
filed on behalf of first named inventor Nahid Harjee on May 13,
2013; U.S. Provisional Patent Application No. 61/842,351 for
"Systems and Methods Providing Uniform Printing of OLED Panels,"
filed on behalf of first named inventor Nahid Harjee on Jul. 2,
2013; U.S. Provisional Patent Application No. 61/857,298 for
"Systems and Methods Providing Uniform Printing of OLED Panels,"
filed on behalf of first named inventor Nahid Harjee on Jul. 23,
2013; U.S. Provisional Patent Application No. 61/898,769 for
"Systems and Methods Providing Uniform Printing of OLED Panels,"
filed on behalf of first named inventor Nahid Harjee on Nov. 1,
2013; and U.S. Provisional Patent Application No. 61/920,715 for
"Techniques for Print Ink Volume Control To Deposit Fluids Within
Precise Tolerances," filed on behalf of first named inventor Nahid
Harjee on Dec. 24, 2013. PCT Patent Application No. PCT/US14/35193
claims the benefit of U.S. Provisional Patent Application No.
61/816,696 for "OLED Printing Systems and Methods Using Laser Light
Scattering for Measuring Ink Drop Size, Velocity and Trajectory"
filed on behalf of first named inventor Alexander Sou-Kang Ko on
Apr. 26, 2013, and of U.S. Provisional Patent Application No.
61/866,031 for "OLED Printing Systems and Methods Using Laser Light
Scattering for Measuring Ink Drop Size, Velocity and Trajectory"
filed on behalf of first named inventor Alexander Sou-Kang Ko on
Aug. 14, 2013. Priority is claimed to each of the aforementioned
patent applications, and each of the aforementioned patent
applications is hereby incorporated by reference.
[0002] This disclosure relates to techniques for measuring ink jet
droplet volumes used for organic light-emitting diode ("OLED")
device fabrication with a high degree of statistical accuracy, to
use of a printing process to transfer droplets of a fluid ink to
target regions of a substrate in precise aggregate quantities, and
to related methods, devices, improvements and systems. In one
non-limiting application, techniques provided by this disclosure
can be applied to a manufacturing process for OLED display
panels.
BACKGROUND
[0003] In a printing process where a printhead has multiple
nozzles, not every nozzle reacts to a standard drive waveform the
same way, i.e., each nozzle can produce a droplet of slightly
different volume. In situations where the nozzles are relied upon
to deposit fluid droplets into respective fluid deposition areas
("target regions"), lack of consistency can lead to problems. This
is particularly the case for manufacturing applications, where the
ink transports a material that will become a permanent thin-film
structure within an electronic device. One example application
where this issue arises is in a manufacturing process applied to
the fabrication of displays, such as organic light-emitting diode
("OLED") displays, as used for small and large electronic devices
(e.g., for portable devices, large scale high-definition television
panels and other devices). Where a printing process is used to
deposit an ink carrying light-generating materials of such
displays, the volume discrepancy across rows or columns of pixels
contributes to visible lighting or color defects in a displayed
image. Note that "ink" as used herein refers to any fluid applied
to a substrate by nozzles of a printhead irrespective of color
characteristics; for example, in the mentioned OLED display
fabrication application, ink is typically deposited in place and
then processed, dried or cured in order to directly form a
permanent material layer, and this process might be repeated with
the same ink or a different ink to form several such layers.
[0004] FIG. 1A is used to introduce this nozzle-droplet
inconsistency issue, with an illustrative diagram generally
referenced using numeral 101. In FIG. 1A, a printhead 103 is seen
to have five ink nozzles, which are each depicted using small
triangles at the bottom of the printhead, each respectively
numbered (1)-(5). Note that in a typical manufacturing application,
there can be many more than five nozzles, e.g., 24-10,000,
depending on application; in the case of FIG. 1A, five nozzles are
referenced simply for ease of understanding. It should be assumed
that in an example application, it is desired to deposit fifty
picoliters (50.00 pL) of a fluid into each of five specific target
regions of an array of such regions, and further, that each of five
nozzles of a printhead is supposed to eject ten picoliters (10.00
pL) of fluid with each relative movement ("pass" or "scan") between
the printhead and a substrate into each of the various target
regions. The target regions can be any surface areas of the
substrate, including adjoining unseparated areas (e.g., such that
deposited fluid ink partially spreads to blend together between
regions), or respective, fluidically-isolated regions. These
regions are generally represented in FIG. 1A using ovals 104-108,
respectively. Thus, it might be assumed that exactly five passes of
the printhead are necessary as depicted to fill each of the five
specific target regions. However, printhead nozzles will in
practice have some minor variations in structure or actuation, such
that a given drive waveform applied to respective nozzle
transducers yields slightly different droplet volumes for each
nozzle. As depicted in FIG. 1A, for example, the firing of nozzle
(1) yields a droplet volume of 9.80 picoliters (pL) with each pass,
with five 9.80 pL droplets being depicted within oval 104. Note
that each of the droplets is represented in the figure by a
distinct location within the target region 104, but in practice,
the location of each of the droplets may be the same or may
overlap. Nozzles (2)-(5), by contrast, yield slightly different,
respective droplet volumes of 10.01 pL, 9.89 pL, 9.96 pL and 10.03
pL. With five passes between printhead and substrate where each
nozzle deposits fluid on a mutually-exclusive basis into the target
regions 104-108, this deposition would result in a total deposited
ink volume variation of 1.15 pL across the five target regions;
this can be unacceptable for many applications. For example, in
some applications, discrepancy of as little as one percent (or even
much less) in deposited fluid can cause issues; in the case of OLED
display fabrication, such variation can potentially result in image
artifacts observable in a finished display.
[0005] Manufacturers of televisions and other forms of displays
will therefore effectively specify precise volume ranges that must
be observed with a high-degree of precision, e.g., 50.00 pL,
.+-.0.25 pL in order for a resultant product to be considered
acceptable; note that in this exemplary case, the specified
tolerance must be within one-half percent of the target of 50.00
pL. In an application where each nozzle represented by FIG. 1A was
to deposit into pixels in respective horizontal lines of a
high-definition television ("HDTV") screen, the depicted variation
of 49.02 pL-50.17 pL might therefore yield unacceptable quantity,
because this would represent about a .+-.1.2% variation (e.g.,
instead of the desired maximum tolerance of .+-.0.5% variation).
While display technologies have been cited as an example, it should
be understood that the nozzle-droplet inconsistency problem can
arise in other contexts.
[0006] In FIG. 1A, nozzles are specifically aligned with target
regions (e.g., wells) such that specific nozzles print into
specific target regions. In FIG. 1B, an alternate case 151 is shown
in which the nozzles are not specially aligned, but in which nozzle
density is high relative to target region density; in such a case,
whichever nozzles happen to traverse specific target regions during
a scan or pass are used to print into those target regions, with
potentially several nozzles traversing each target region in each
pass. In the example shown, the printhead 153 is seen to have five
ink nozzles and the substrate is seen to have two target regions
154-155, each located such that nozzles (1) and (2) will traverse
target region 154, nozzles (4) and (5) will traverse target region
155, and nozzle (3) will not traverse either target region. As
shown, in each pass, one or two droplets are deposited into each
well, as depicted. Note that once again, the droplets can be
deposited in a manner that is overlapping or at discrete points
within each target region, and that the particular illustration in
FIG. 1B is illustrative only; as with the example presented in FIG.
1A, it is once again assumed that it is desired to deposit fifty
picoliters (50.00 pL) of a fluid into each of target regions
154-155, and that each nozzle has a nominal droplet volume of
approximately 10.00 pL. Utilizing the same per nozzle droplet
volume variation as observed in connection with the example of FIG.
1A, and assuming that each nozzle that overlaps with a target
region on a given pass will deliver a droplet into that target
region up until a total of five droplets have been delivered, it is
observed that the target regions are filled in three passes and
there is a total deposited ink volume variation from the target of
50.00 pL of 0.58 pL across the two target regions, and further a
discrepancy outside of specified tolerance; again, this can be
unacceptable for many applications.
[0007] It is noted that in connection with the examples above, the
droplet consistency issue is further exacerbated by the issue that
droplet volumes can statistically vary, even for a given nozzle and
given drive waveform. Thus, in the examples discussed above, it was
assumed that nozzle (1) of the printhead from FIGS. 1A and 1B would
produce a droplet volume of 9.80 pL in response to a given drive
waveform but, in practice, in a real world case, droplet volume can
be assumed to vary somewhat depending on various factors, for
example, process, voltage, temperature, printhead age and many
other factors, such that actual droplet volume may not be precisely
known.
[0008] While techniques have been proposed to address the droplet
consistency problem, generally speaking, these techniques either
still do not reliably provide fill volumes that stay within the
desired tolerance range or they dramatically increase manufacturing
time and cost, i.e., they are inconsistent with a goal of having
high quality with a low consumer price-point; such quality and low
price-point can be key for applications where commodity products,
such as HDTVs, are concerned.
[0009] What is therefore needed are techniques useful in depositing
fluid into target regions of a substrate using a printhead with
nozzles. More specifically, what is needed are techniques for
precisely controlling deposited fluid volumes in respective target
regions of a substrate notwithstanding variations in nozzle-droplet
ejection volumes, ideally on a cost-effective basis that permits
fast fluid deposition operations and thus improves the speed of
device fabrication. The techniques described below satisfy these
needs and provide further, related advantages.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] FIG. 1A is a diagram that presents a hypothetical problem of
depositing ink in target regions of a substrate where a printhead
with five nozzles is used to deposit a target fill of 50.00 pL in
each of five specific target regions.
[0011] FIG. 1B is another diagram that presents a hypothetical
problem of depositing ink in target regions of a substrate where a
printhead with five nozzles is used to deposit a target fill of
50.00 pL in each of two specific target regions.
[0012] FIG. 2A is an illustrative diagram that shows a droplet
measurement system capable of measuring droplet volumes for each
nozzle of a large printhead assembly.
[0013] FIG. 2B is a method diagram that shows various processes and
options associated with measurement of droplet volumes for each
nozzle.
[0014] FIG. 2C is a method diagram that shows various processes and
options associated with measurement of droplet volumes for each
nozzle, to achieve a high-confidence understanding of expected
droplet volume.
[0015] FIG. 2D is a schematic diagram that shows layout of various
components used in one embodiment to perform droplet
measurement.
[0016] FIG. 2E is a schematic diagram that shows layout of various
components used in another embodiment to perform droplet
measurement.
[0017] FIG. 3A provides an illustrative view showing a series of
optional tiers, products or services that can each independently
embody the techniques introduced earlier.
[0018] FIG. 3B is an illustrative diagram showing a hypothetical
arrangement of a printer and substrate, in an application where the
substrate is ultimately to form a display panel having pixels.
[0019] FIG. 3C is a cross-sectional close-up view of the printhead
and substrate of FIG. 3B, taken from the perspective of lines C-C
from FIG. 3B.
[0020] FIG. 4A is a diagram similar to FIG. 1A, but illustrates the
use of combinations of droplet volumes to reliably produce ink fill
volumes for each target region within a predetermined tolerance
range; in one optional embodiment, different droplet volume
combinations are produced from a set of predetermined nozzle firing
waveforms, and in another optional embodiment, different droplet
volume combinations are produced from respective nozzles of the
printhead using relative motion (405) between printhead and
substrate.
[0021] FIG. 4B is a diagram used to illustrate relative
printhead/substrate motion and the ejection of different droplet
volume combinations into respective target regions of a
substrate.
[0022] FIG. 4C is a diagram used to illustrate use of different
nozzle drive waveforms at each nozzle to produce different droplet
volume combinations into respective target regions of a
substrate.
[0023] FIG. 4D is a diagram similar to FIG. 1B, but illustrates the
use of combinations of droplet volumes to reliably produce ink fill
volumes for each target region within a predetermined tolerance
range; in one optional embodiment, different droplet volume
combinations are produced from a set of predetermined nozzle firing
waveforms, and in another optional embodiment, different droplet
volume combinations are produced from respective nozzles of the
printhead using relative motion (472) between printhead and
substrate.
[0024] FIG. 5 provides a block diagram showing a method of planning
combinations of droplets for each target region of a substrate;
this method can be applied to any of the optional embodiment
introduced by FIGS. 4A-D.
[0025] FIG. 6A provides a block diagram for choosing particular
sets of acceptable droplet combinations for each target region of
the substrate, usable for example with any of the embodiments
introduced earlier.
[0026] FIG. 6B provides a block diagram for iteratively planning
printhead/substrate motion and using of nozzles based on
combinations of droplets for each print region.
[0027] FIG. 6C provides a block diagram that illustrates further
optimization of printhead/substrate motion and the use of nozzles,
specifically, to order scans in a manner that printing can be
performed as efficiently as possible.
[0028] FIG. 6D is a hypothetical plan view of a substrate that will
ultimately produce multiple flat panel display devices (e.g., 683);
as denoted by region 687, printhead/substrate motion can be
optimized for a particular region of a single flat panel display
device, with optimizations being used on a repeatable or periodic
basis across each display device (such as the four depicted flat
panel display devices).
[0029] FIG. 7 provides a block diagram for deliberately varying
fill volumes within acceptable tolerances in order to reduce visual
artifacts in a display device.
[0030] FIG. 8A provides a block diagram showing how a droplet
measurement can be used to accommodate statistical variation of
droplet volume per nozzle and per drive waveform, and yet permit
precise aggregate ink fills within a given target region.
[0031] FIG. 8B provides a block diagram showing how droplet
measurement can be planned so as to accommodate statistical
variation of droplet volume per nozzle and per drive waveform, and
yet permit precise aggregate ink fills within a given target
region.
[0032] FIG. 9A provides a graph that shows variation in target
region fill volume without adjustments for nozzle-to-nozzle droplet
volume variation of a printhead.
[0033] FIG. 9B provides a graph that shows variation in target
region fill volume where different nozzles are randomly used to
statistically compensate for nozzle-to-nozzle droplet volume
variation of a printhead.
[0034] FIG. 9C provides a graph that shows variation in target
region fill volume where one or more droplets of different volumes
are used to achieve target region fill volume within precise
tolerances on a planned basis.
[0035] FIG. 10A provides a graph that shows variation in target
region fill volume without adjustments for nozzle-to-nozzle droplet
volume variation of a printhead.
[0036] FIG. 10B provides a graph that shows variation in target
region fill volume where different nozzles are randomly used to
statistically compensate for nozzle-to-nozzle droplet volume
variation of a printhead.
[0037] FIG. 10C provides a graph that shows variation in target
region fill volume where one or more droplets of different volumes
are used to achieve target region fill volume within precise
tolerances on a planned basis.
[0038] FIG. 11 shows a plan view of a printer used as part of a
fabrication apparatus; the printer can be within a gas enclosure
that permits printing to occur in a controlled atmosphere.
[0039] FIG. 12 provides a block diagram of a printer; such a
printer can be optionally employed for example in the fabrication
apparatus depicted in FIG. 11.
[0040] FIG. 13A shows an embodiment where multiple printheads (each
with nozzles) are used to deposit ink on a substrate.
[0041] FIG. 13B shows rotation of the multiple printheads to better
align nozzles of the respective printheads with the substrate.
[0042] FIG. 13C shows offset of individual ones of the multiple
printheads in association with intelligent scanning, to
deliberately produce specific droplet volume combinations.
[0043] FIG. 13D shows a cross-section of a substrate, including
layers that can be used in an organic light-emitting diode (OLED)
display.
[0044] FIG. 14A shows a number of different ways of customizing or
varying a nozzle firing waveform.
[0045] FIG. 14B shows a way of defining a waveform according to
discrete waveform segments.
[0046] FIG. 15A shows an embodiment where different droplet volume
combinations can be achieved using different combinations of
predetermined nozzle firing waveforms.
[0047] FIG. 15B shows circuitry associated with generating and
applying a programmed waveform at a programmed time (or position)
to a nozzle of a printhead; this circuitry provides one possible
implementation of each of circuits 1523/1531, 1524/1532 and
1525/1533 from FIG. 15A, for example.
[0048] FIG. 15C shows a flow diagram of one embodiment that uses
different nozzle firing waveforms.
[0049] FIG. 15D shows a flow diagram associated with nozzle or
nozzle-waveform qualification.
[0050] FIG. 16 shows a perspective view of an industrial
printer.
[0051] FIG. 17 shows another perspective view of an industrial
printer.
[0052] FIG. 18A presents a schematic diagram which shows the layout
of components in an embodiment of a shadowgraphy-based droplet
measurement system.
[0053] FIG. 18B presents a schematic diagram which shows the layout
of components in an embodiment of an interferometry-based droplet
measurement system.
[0054] FIG. 19 shows a flow diagram associated with one
illustrative process that integrates a droplet measurement system
with an industrial printer, optionally used for OLED device
fabrication.
[0055] FIG. 20 shows another, more detailed flow diagram,
associated with another embodiment of droplet measurement.
[0056] The subject matter defined by the enumerated claims may be
better understood by referring to the following detailed
description, which should be read in conjunction with the
accompanying drawings. This description of one or more particular
embodiments, set out below to enable one to build and use various
implementations of the technology set forth by the claims, is not
intended to limit the enumerated claims, but to exemplify their
application. Without limiting the foregoing, this disclosure
provides several different examples of techniques used to fabricate
a materials layer by planning printhead movement so as to maintain
deposited ink volume within predetermined allowances while not
excessively increasing the number of printhead passes (and thus the
time needed to complete a deposited layer). In connection with
these techniques, accurate droplet measurement can be performed so
as to accurately plan composite ink fills in any target region,
with measurement highly integrated with production printing. The
various techniques can be embodied as software for performing these
techniques, in the form of a computer, printer or other device
running such software, in the form of control data (e.g., a print
image) for forming a materials layer, as a deposition mechanism, or
in the form of an electronic or other device (e.g., a flat panel
device or other consumer end product) fabricated as a result of
these techniques. While specific examples are presented, the
principles described herein may also be applied to other methods,
devices and systems as well.
DETAILED DESCRIPTION
[0057] This disclosure relates to use of a printing process to
transfer layer material to a substrate, techniques for droplet
measurement with a high degree of accuracy, and related methods,
improvements, devices and systems.
[0058] The nozzle consistency issue introduced above can be
addressed by measuring droplet volume per nozzle (or variation in
droplet volume across nozzles) of a printhead for a given nozzle
firing waveform. This permits planning of printhead firing patterns
and/or motion to deposit precise aggregate fill volumes of ink in
each target region. With an understanding of how droplet volume
varies across nozzles, printhead/substrate positional offsets
and/or droplet firing patterns can be planned in a manner that
accommodates differences in droplet volumes but that still
optimizes concurrent printing in adjacent target regions with each
pass or scan. Viewed from a different perspective, rather than
normalizing or averaging out nozzle-to-nozzle variation in droplet
volumes, the specific droplet volume characteristics of each nozzle
are measured and used in a planned manner to concurrently achieve
specific in-range aggregate volumes for each of multiple target
regions of the substrate; in many embodiments, this planning is
performed using a process that reduces the number of scans or
printhead passes in dependence on one or more optimization
criteria.
[0059] A number of different embodiments will be presented below
that contribute to achieving these results. Each embodiment can be
used in isolation and it is also expressly contemplated that
features of any embodiment can be optionally mixed and matched with
features of a different embodiment.
[0060] One embodiment presents systems and techniques that provide
for individualized droplet measurement over a very large printhead
assembly (e.g., having hundreds to thousands of nozzles, or more).
Logistical difficulties associated with positioning of optics are
resolved using below-deposition-plane-measurement techniques (i.e.,
by redirecting light to away from the vicinity of the printhead,
beyond the relative distance at which a substrate would normally be
positioned for deposition), for example, using an optics assembly
that can be actuated in up to three dimensions, such that a large
printhead assembly (e.g., within a confined space) can optionally
be parked (e.g., at a printer service station) and a droplet
measurement device precisely articulated relative to the large
printhead assembly. Precise placement of a below-deposition-plane
optics assembly enables drop volume measurement of a packed nozzle
array at the required distance from the nozzle plate (the printhead
assembly typically operates on the order of one millimeter from a
substrate surface), notwithstanding the confined space. In one
optional embodiment, the optics system employs shadowgraphy and
repeated measurement of droplets emanating from specific nozzles
(and optionally, varied nozzle drive waveforms) to increase
statistical confidence of expected droplet volume. In another
optional embodiment, the optics system employs interferometry and
repeated measurement of droplets emanating from specific nozzles
(and optionally, varied nozzle drive waveforms) to increase
statistical confidence of expected droplet volume.
[0061] Note that in a production line, it is typically desired to
have as little downtime in production as possible, in order to
maximize productivity and to minimize manufacturing cost. In
another optional embodiment, droplet measurement times are
therefore "hidden" or "stacked" behind other line processes. For
example, in an optional flat panel display fabrication production
line, as each new substrate is being loaded or otherwise handled,
processed or transferred, a printhead assembly of the printer is
analyzed using droplet measurement processes to facilitate an
accurate statistical understanding of per-nozzle (and/or
per-nozzle, per-drive waveform) droplet volumes. For a printhead
assembly having tens of thousands of nozzles, repeated droplet
measurement (e.g., dozens of droplet measurements per nozzle, per
drive waveform if multiple drive waveforms are used) can take
substantial time; optional system control processes and related
software can therefore optionally perform droplet measurement on a
dynamic, incremental basis. For example, if a hypothetical
load/unload process requires, e.g., 30 seconds, with each print
process taking 90 seconds, the printhead assembly could be measured
during the load/unload process in two minute cycles, updating
droplet measurements to obtain per-nozzle droplet volume means and
confidence intervals using a sliding window of nozzles/droplets
analyzed during the load/unload process associated with each two
minute cycle. Note that many other processes are possible and that
a continuous, dynamic process is not required for all embodiments.
However, it is believed in practice that not only will droplet
volume for a given nozzle and drive waveform vary relative to other
nozzles and drive waveforms but, further, that typical values will
change over time, owing to factors such as subtle variation in ink
properties, nozzle age and degradation, and other factors; a
process which therefore periodically updates measurements, e.g.,
every few hours to days, can therefore advantageously further
improve reliability.
[0062] In yet another optional embodiment, a droplet measurement
system uses interferometry and non-imaging techniques to obtain
very fast droplet measurements, for example, performing per droplet
measurement in microseconds and repeated droplet measurement across
a printhead assembly with thousands of nozzles in less than thirty
minutes. As contrasted with imaging techniques (which use a camera
and captured image pixel processing techniques to derive volume
measurement), interferometry techniques can provide accurate
droplet volume measurement by detecting interference pattern
spacing using multiple light sensors, representative of droplet
shape, and by correlating this spacing with droplet volume. In one
implementation, a laser source and/or related optics and/or sensors
are mechanically mounted for below deposition plane measurement and
effective articulation relative to a large printhead assembly.
Owing to the very rapid measurements obtainable with such a system,
interferometry techniques are especially useful in an embodiment
that performs dynamic, incremental measurement, as just described,
and with such techniques, with each printing cycle, dozens to
hundreds of nozzles can be subjected to repeated droplet
measurements (e.g., measurement of thirty droplets per nozzle) to
achieve high statistical confidence around each expected droplet
volume.
[0063] In yet another optional embodiment, many droplet
measurements are taken per nozzle and per nozzle drive waveform
(for embodiments that use varied nozzle drive waveforms). As the
number of measurements increases, the mean and standard deviation
(assuming normal random distribution) for each nozzle-waveform
combination becomes more resolute. Using mathematical processes
implemented by software, statistical models for each droplet can be
created and accurately combined to develop a statistical model for
composite ink fill per target region. To provide an example, many
measurements are taken for each nozzle for each drive waveform. If
a given single measurement of droplet volume is expected to be
accurate with a standard deviation of two percent, then by taking
many measurements, a statistically accurate mean is obtained with a
reduced variance or standard deviation; that is, again assuming a
normal random distribution, the standard deviation is decreased by
the number of measurements n according to .sigma./(n).sup.1/2 such
that four measurements of a droplet volume would reduce standard
deviation by half, and so forth. Thus, in one embodiment, software
is used to achieve a much higher confidence interval around
expected droplet volume through specifically planned, repeated
measurements that help substantially reduce measurement error. Many
different statistical measures can be used, but for example, for an
embodiment where composite fills are expected to fall within a
range of .+-.x % (e.g., .+-.0.5% of a target fill), then droplet
measurements can be taken to ensure that for each nozzle, and for
each different drive waveform, a 3.sigma. (99.73%) confidence
interval is obtained around expected droplet volume within the same
range (e.g., .+-.0.5%) of a mean droplet volume. Perhaps otherwise
stated, with an accurate statistical model built for each different
droplet, known techniques can be used to plan droplet combinations
based on mathematical combinations of associated statistical models
to develop a higher degree of accuracy around aggregate per-target
region ink fills (notwithstanding nozzle-to-nozzle or
waveform-to-waveform droplet volume variation). Note that while a
normal random distribution is used for select embodiments, any
statistical model can be used (e.g., Poisson, Student's-T, etc),
where individual distributions can be combined (e.g., by software)
to obtain an aggregate distribution representing combination of
different droplets. Also note that while in some embodiments, a
3.sigma. (99.73%) measure is used, in other contemplated
embodiments, other types of statistical measures are used, such as
4.sigma., 5.sigma. or 6.sigma., or a measure not specifically
associated with random distributions.
[0064] Note that similar techniques can be applied to develop
models of droplet velocity and flight trajectory for each
nozzle-waveform combination. These variables can be further applied
in other optional embodiments.
[0065] Any permutation or subset of the techniques and embodiments
described above can be applied to accurately plan for aggregate ink
fills in a target region, that is, in a manner that plans for
specific composite volumes based on per-nozzle droplet volume
variations. That is, rather than trying to average out volume
differences across nozzles, these differences are understood and
specifically used in print control processes to combine different
droplets (e.g., from different nozzles or using different drive
waveforms) and obtain very precise ink fills.
[0066] In one optional embodiment, the printhead and/or the
substrate are "stepped" in variable amounts so as to change, as
appropriate, the nozzle or nozzles used for each target region in
various passes to eject specifically desired droplet volumes. For
example, a droplet from one nozzle (e.g., with a mean droplet
volume of 9.95 pL) can be combined with a droplet from a second
nozzle (e.g., with a mean droplet volume of 10.05 pL, to obtain an
aggregate composite of 20.00 pL) by selectively offsetting a
printhead or printhead assembly relative to a substrate. Multiple
passes are planned so that each target region receives a specific
aggregate fill matching a desired target fill. That is, each target
region (for example, each well in a row of wells that will form
pixelated components of a display) receives a planned combination
of one or more droplet volumes to achieve an aggregate volume
within a specified tolerance range using different geometric steps
of printhead relative to substrate. In more detailed features of
this embodiment, given the nozzles' positional relationships to one
another, a pareto optimal solution can be computed and applied,
such that a tolerable amount of volume variation in each target
region is permitted, within specification, but at the same time,
the printhead/substrate movement is planned to maximize average
concurrent use of nozzles for respective target deposition regions.
The statistical techniques discussed above can be used to ensure
that a statistical model of composite (i.e., multi-droplet) ink
fills falls within any desired tolerance range. In one optional
refinement, a function is applied to reduce and even minimize the
number of printhead/substrate passes needed for printing to achieve
these ends. Reflecting briefly upon these various features,
fabrication cost is substantially reduced as the printing of layers
of material on a substrate can be performed quickly and
efficiently.
[0067] Note that in a typical application, the target regions that
receive ink are arrayed, that is, laid out in rows and columns,
where a swath described by relative printhead/substrate motion will
deposit ink in a subset of all of the rows (of target regions of
the array), but in a manner that covers all columns of the array in
a single pass; also, the number of rows, columns and printhead
nozzles can be quite large, e.g., involving hundreds or thousands
of rows, columns and/or printhead nozzles.
[0068] Another optional embodiment addresses the nozzle consistency
issue in a slightly different manner. A set of multiple,
prearranged, alternate nozzle firing waveforms with known (and
different) droplet volume characteristics is made available to each
nozzle; for example, a set of four, eight or another number of
alternate waveforms can be hard-wired or otherwise predefined to
provide a corresponding set of selectable, slightly-different
droplet volumes. Per-nozzle volume data (or difference data) and
any associated statistical models are then used to plan for
concurrent deposition of multiple target regions by determining
sets of nozzle-waveform combinations for each target region of the
substrate. Once again, the specific volume characteristics of each
nozzle (and in this case, each nozzle-waveform combination) and
associated distributions, confidence intervals and so forth are
relied upon to achieve specific fill volumes with high confidence;
that is, rather than attempting to correct per-nozzle volume
variation, the variation is specifically used in combinations to
obtain specific fill volumes within a well understood statistical
range. Note that there will typically be a large number of
alternate combinations that could be used to deposit droplets in
reach a desired range in each target region of the substrate in
order to meet these ends. In a more detailed embodiment, a "common
set" of nozzle waveforms can be shared across some (or even all)
nozzles of a printhead, with per-nozzle droplet volumes stored and
available for mixing and matching different droplet volumes to
achieve specific fills. As a further option, a calibration phase
can be used to select different waveforms in an off-line process
(e.g., the dynamic, incremental measurement process introduced
above), with a set of specific nozzle firing waveforms being
selected based on calibration to achieve a set of respective,
specifically-desired volume characteristics. Once again, in further
detailed embodiments, optimization can be performed to plan
printing in a way that improves printing time, for example, by
minimizing the number of scans or printhead passes, by maximizing
concurrent nozzle use, or by optimizing some other criteria.
[0069] Yet another embodiment relies on the use of multiple
printheads in a printhead assembly, where each printhead and its
nozzles can be offset relative to one another (or equivalently, a
print structure having multiple rows of nozzles that can each be
offset relative to one another). Using such deliberate offset,
per-nozzle volume variations can be intelligently combined across
printheads (or rows of nozzles) with each pass or scan. Again,
there will typically be a large number of alternate combinations
that could be used to deposit droplets to reach a desired range in
each target region of the substrate and, in detailed embodiments,
optimization is performed to plan the use of offsets in a way that
improves printing time, for example, by minimizing the number of
scans or printhead passes, or by maximizing concurrent nozzle use,
and so forth.
[0070] Note that one benefit of the techniques described above is
that by living with droplet volume variations but combining them to
achieve specific, predetermined target region fill volumes, one can
achieve a high degree of control over not only the ability to
satisfy a desired fill tolerance range, but also over precise
volume amounts and deliberately controlled (or injected) variation
in such amounts. Mura, or the presence of geometric patterns from
the deposition process that could give rise to observable patterns,
can be mitigated through a number of the techniques presented
herein. That is, even a slight discrepancy in target fill volumes
at low spatial frequency can introduce unintended geometric
artifacts which are visible to the human eye and which are
therefore undesirable. It is therefore desired in some embodiments
to deliberately but randomly vary the composite fill volume of each
target region, or the specific combination of droplets used to
achieve a composite fill, in a manner still within specification.
Using an exemplary tolerance of 49.75 pL-50.25 pL, rather than
simply arbitrarily ensuring that all target region fills are at a
value within this tolerance range, it can for example be desired
for such applications to introduce intentional variation within
this range, such that any pattern of variation or difference is not
observable to the human eye as a pattern in a finished, operating
display. Applied to a color display, one exemplary embodiment
deliberately adds such fill volume variation in a manner
statistically independent for at least one of (a) an x dimension
(e.g., along the direction of a row of target regions), (b) a y
dimension (e.g., along the direction of a column of target
regions), and/or (c) across one or more color dimensions (e.g.,
independently for red versus blue, blue versus green, red versus
green target regions). In one embodiment, variation is
statistically independent across each of these dimensions. Such
variation is believed to render any fill volume variations
imperceptible to the human eye and thus to contribute to high image
quality of such displays. Note that for embodiments which use
planned combinations of droplets from different nozzles, produced
through a repeatable set of "geometric steps" or offsets in scan
path, the use of subtle but deliberate droplet volume variation for
each nozzle (i.e., produced through the use of multiple, alternate
firing waveforms for each nozzle) provides a powerful technique for
suppressing the potential for Mura without having to vary scan
path. In one contemplated embodiment, for example, each nozzle is
assigned a set of alternate waveforms that produce respective mean
volumes within .+-.10.0% of an ideal volume; droplet combinations
from different nozzles can then be planned according to precise
means (i.e., to achieve precise intended fills) with Mura
suppressed through the use of injected variation of droplet
patterns (either through planned combinations of droplet volumes
from different nozzle-waveform pairings, or through waveform
variation injected after selection/planning of nozzle-droplet
combinations to achieve specific fills). In other embodiments,
deliberately-different composite droplet volumes can be prearranged
for each target region to produce an aggregate fill, or different
nozzle-droplet combinations can be applied along scan path, or
non-linear scan paths can be used, all to the same effect. Other
variations are also possible.
[0071] Also, whereas conventional droplet measurement techniques
might take many hours or days, and thus lead to errors in a
printing process due to possible variation in drop characteristics
during the long measurement cycle, the use of fast techniques such
as the interferometry techniques and associated structures
(introduced above) facilitates a more up-to-date, and therefore
more accurate, dynamic understanding of nozzle-to-nozzle and
droplet-to-droplet volume variations, permitting the use of planned
combinations as described previously with high confidence. For
example, while conventional droplet measurement techniques might
take many hours to perform, through the use of non-imaging
techniques (such as interferometry), droplet measurement can be
kept continuously up-to-date and thus made to accurately track
process, voltage and temperature (PVT variations), printhead nozzle
degradation, ink changes, and other dynamic processes that can
affect the accuracy of measurement. Through the use of a rolling
measurement process, for example that hides incremental droplet
measurement in substrate loading and unloading times as mentioned
previously, it is expected that droplet measurements can be retaken
and updated almost continuously (e.g., for each nozzle less than
every 3-4 hours) and thus made to present accurate models enabling
composite fill planning as described previously. In one embodiment,
droplets produced by every nozzle or nozzle-waveform pairing are
re-measured (e.g., ab initio) on a periodic basis, e.g., once every
2 hours to 24 hour period, and preferably at a shorter time
interval such as two hours. Note that a rolling process is not
required for all embodiments, i.e., in one embodiment, measurements
can be taken (or retaken) for all nozzles during a dedicated
calibration process, during which printing is interrupted. To
provide one example, in one possible embodiment, a printhead
assembly having 6,000 nozzles and 24,000 nozzle-waveform
combinations could be measured for 15 seconds during a substrate
loading and unloading phase for each 90 second print cycle, as a
continual matter that with each iteration examines a different,
rolling subset of the 24,000 nozzle-waveform combinations. The
iterations proceed until all nozzle-waveform combinations have been
processed, and then the process is then repeated on a circular
basis. In an embodiment that uses a dedicated "offline" calibration
process (e.g., every three hours), such a printhead assembly could
be parked for a period (e.g., 30 minutes) to develop statistical
models for all nozzle-waveform combinations before returning to
active printing. Note also that these techniques can also be used
for other print head processes including without limitation any
type of nozzle maintenance process, e.g., with a large print head
assembly having thousands of nozzles, a rolling process can be used
to perform "online" maintenance in between print operations (such
as during loading and/or unloading of successive substrates in a
manufacturing line).
[0072] Note again that each of the optional techniques and
embodiments introduced above are to be considered optional to one
another, and conversely, it is contemplated that such techniques
can optionally be combined in any possible permutation or
combination in various embodiments. As an example, measurements of
per-nozzle/drive waveform droplet velocity and/or flight angle can
be used to disqualify "erroneous" droplets for a given
nozzle-waveform combination based on a determination that the
particular nozzle-waveform combination produces an aberrant droplet
"mean," or based on a determination that the particular
nozzle-waveform combination produces a droplet statistical spread
exceeding a threshold. To provide another non-limiting example,
interferometry or other non-imaging techniques can be used to
dynamically update velocity and/or flight angle behavior by
incrementally and dynamically performing such measurements on
various windows of nozzle-waveform combinations at intermittent
intervals, i.e., as a printhead assembly is "parked" during loading
and/or unloading of a substrate. Clearly, many combinations and
permutations are possible based on the permutations introduced
above.
[0073] An example will help introduce some concepts relating to
intelligent planning of fill volumes per target region. Per-nozzle
volume data (or difference data) for a given nozzle firing waveform
can be used to plan for concurrent deposition of multiple target
regions by determining possible nozzle-droplet volume sets for each
target region of the substrate. There will typically be a large
number of possible combinations of nozzles and/or drive waveforms
that can be used deposit ink droplets in multiple passes to fill
each target region to a desired fill volume within a narrow
tolerance range that meets specification. Returning briefly to the
hypothetical introduced using FIG. 1A, if acceptable fill volumes
according to specification were between 49.75 pL and 50.25 pL
(i.e., within a range of 0.5% of target), acceptable fill volumes
could also be achieved using many different sets of nozzles/passes,
including without limitation: (a) five passes of nozzle 2 (10.01
pL) for a total of 50.05 pL; (b) a single pass of nozzle 1 (9.80
pL) and four passes of nozzle 5 (10.03 pL), for a total of 49.92
pL; (c) a single pass of nozzle 3 (9.89 pL) and four passes of
nozzle 5 (10.03 pL), for a total of 50.01 pL; (d) a single pass of
nozzle 3 (9.89 pL), three passes of nozzle 4 (9.96 pL), and a
single pass of nozzle 5 (10.03 pL) for a total of 49.80 pL; and (e)
a single pass of nozzle 2 (10.01 pL), two passes of nozzle 4 (9.96
pL) and two passes of nozzle 5 (10.03 pL) for a total of 49.99 pL.
Other combinations are clearly also possible. Droplet measurement
techniques introduced above can be used to obtain these expected
(e.g., mean) droplet volumes notwithstanding relatively larger
statistical error associated with a single droplet measurement
(e.g., .+-.2% of volume). Thus, even if only one choice of nozzle
drive waveform was available for each nozzle (or all nozzles), the
first embodiment introduced above could be used to offset the
printhead relative to the substrate in a series of planned offsets
or "geometric steps" that apply as many nozzles as possible during
each scan to deposit droplets (e.g., in different target regions),
but that combine deposited droplets for each target region in a
specifically-intended manner. That is, many combinations of
nozzle-droplet volumes in this hypothetical could be used to
achieve desired fill volumes within a well understood range of
statistical variance that conforms to specification tolerance; a
specific embodiment effectively selects a particular one of the
acceptable droplet combinations for each target region (i.e., a
particular set for each region) through its selection of scanning
motion and/or nozzle drive waveforms, so as to facilitate
concurrent fills of different rows and/or columns of target regions
using respective nozzles. By choosing the pattern of relative
printhead/substrate motion in a way that minimizes the time over
which printing occurs, this first embodiment provides for
substantially-enhanced manufacturing throughput. Note that this
enhancement can optionally be embodied in the form of minimizing
the number of printhead/substrate scans or "passes," in a manner
that minimizes the raw distance of relative printhead/substrate
movement or in a manner that otherwise minimizes overall printing
time. That is to say, the printhead/substrate movement (e.g.,
scans) can be preplanned and used to fill target regions in a
manner that meets predefined criteria, such as minimal
printhead/substrate passes or scans, minimal printhead and/or
substrate movement in a defined dimension or dimension(s), printing
in a minimal amount of time, or other criteria.
[0074] The same approaches all apply equally to the hypothetical of
FIG. 1B in which the nozzles are not specially aligned to
respective target regions. Again, if acceptable fill volumes
according to specification were between 49.75 pL and 50.25 pL
(i.e., within a range of 0.5% of either side of target), acceptable
fill volumes could also be achieved many different sets of
nozzles/passes, including without limitation, all of the examples
listed above for FIG. 1A as well as additional examples particular
to the hypothetical of FIG. 1B in which two adjacent nozzles are
used in a single pass to fill a particular target region, for
example, two passes of nozzle (4) (9.96 pL) and of nozzle (5)
(10.03 pL), and one pass of nozzle (2) (10.01 pL) for a total of
49.99 pL. Once again, each such volume can be equated with a
statistical mean based on many droplet measurements. For example,
if nozzles (4), (5) and (2) in this example were associated with
statistical models featuring the recited mean and a 3.sigma. value
equal to or less than 0.5% of the recited mean, the aggregate fill
would also have a 3.sigma. value equal to or less than .+-.0.5% of
49.99 pL, generally meeting specified tolerance with a high degree
of statistical accuracy. Note that for a high definition OLED
display (i.e., with millions of pixels), a 3.sigma. (99.73%) value
which closely matches fill tolerance may be insufficient, e.g.,
this statistically indicates that potentially thousands of pixels
can still be outside desired tolerance; for this reason, in many
embodiments, a larger spread measure (e.g., 6.sigma.) is matched to
composite fill tolerance, effectively guaranteeing that virtually
every pixel of a high definition display conforms to manufacturer
specification.
[0075] These same principles also apply to a
multiple-per-nozzle-drive-waveform embodiment. For example, in the
hypothetical presented by FIG. 1A, each of the nozzles could be
driven by five different firing waveforms, identified as firing
waveforms A through E, such that the resulting volume
characteristics of the different nozzles for the different firing
waveforms are described by Table 1A, below. Considering only target
region 104 and only nozzle (1), it would be possible to deposit the
50.00 pL target in five passes, for example, with a first printhead
pass using predefined firing waveform D (to generate from nozzle
(1) a 9.96 pL droplet), and with four subsequent passes using
predefined firing waveform E (to generate from nozzle (1) a 10.01
pL droplet), all without any offset in scan path. Similarly,
different combinations of firing waveforms can be used concurrently
in each pass for each nozzle to generate volumes in each of the
target regions that is close to the target values without any
offset in scan path.
TABLE-US-00001 TABLE 1A Nozzle Waveform (1) (2) (3) (4) (5) A 9.80
10.01 9.89 9.96 10.03 B 9.70 9.90 9.81 9.82 9.94 C 9.89 10.10 9.99
10.06 10.13 D 9.96 10.18 10.07 10.15 10.25 E 10.01 10.23 10.12
10.21 10.31
[0076] These same approaches all apply equally to the hypothetical
of FIG. 1B. For example, considering only target region 154 and
nozzles (1) and (2) (i.e. the two nozzles that overlap target
region 154 during a scan), it is possible to achieve 50.00 pL in
three passes, for example, with a first printhead pass using nozzle
(1) and predefined waveform B (for a droplet volume of 9.70 pL) and
nozzle (2) and predefined waveform C (for a droplet volume of 10.10
pL), a second printhead pass using nozzle (1) and predefined
waveform E (for a droplet volume of 10.01 pL) and nozzle (2) and
predefined waveform D (for a droplet volume of 10.18 pL), and a
third printhead pass using nozzle (1) and predefined waveform E
(for a droplet volume of 10.01 pL.)
[0077] Note that in both the hypothetical of FIG. 1A and the
hypothetical of FIB. 1B, it is possible to deposit each target
volume in a single row of target regions in a single pass; for
example, it would be possible to rotate the printhead by ninety
degrees and deposit exactly 50.00 pL with a single droplet from
each nozzle for each target region in a row, for example, using
waveform (E) for nozzle (1), waveform (A) for nozzles (2), (4) and
(5) and waveform (C) for nozzle (3) (10.01 pL+10.01 pL+9.99 pL+9.96
pL+10.03 pL=50.00 pL). It might also be possible to deposit all of
the drops necessary to achieve the target volume in one pass even
without rotating the print head. For example, nozzle (1) may be
able to dispense a drop with waveform D and 4 drops from waveform E
into region 104 in a single pass.
[0078] These same principles also apply to the printhead offset
embodiment introduced above. For example, for the hypothetical
presented by FIG. 1A, the volume characteristics can reflect the
nozzles for a first printhead (e.g., "printhead A"), with this
first printhead being integrated together with four additional
printheads (e.g., printheads "B" through "E"), each being driven by
a single firing waveform and having respective per-nozzle droplet
volume characteristics. The printheads are collectively organized
such that in executing a scan pass each of the nozzles identified
as nozzle (1) for a printhead is aligned to print into a target
region (e.g., target region 104 from FIG. 1A), each of the nozzles
identified as nozzle (2) from the various printheads are aligned to
print into a second target region (e.g., target region 105 from
FIG. 1A), and so on, with the volume characteristics of the
different nozzles for the different printheads described by Table
1B, below. Optionally, the respective printheads can be offset from
one another using a motor that adjusts spacing, e.g., in between
scans. Considering only target region 104 and the nozzle (1) on
each printhead, it would be possible to deposit the 50.00 pL in a
four passes, for example, with a first printhead pass in which
printhead D and printhead E both fire a droplet into the target
region, and three subsequent passes in which only printhead E fires
a droplet into the target region. Other combinations are possible
using even fewer passes that can still generate volumes in the
target region close to the 50.00 pL target, for example, within a
range of 49.75 pL and 50.25 pL. Considering again only target
region 104 and the nozzle (1) on each printhead, it would be
possible to deposit 49.83 pL in two passes, for example, with a
first printhead pass in which printheads C, D, and E all fire a
droplet into the target region, and a second printhead pass in
which printheads D and E both fire a droplet into the target
region. Similarly, different combinations of nozzles from different
printheads can be used concurrently in each pass to generate
volumes in each of the target regions that is close to the target
values without any offset in scan path. Therefore, using multiple
passes in this manner would be advantageous for embodiments where
it is desired to concurrently deposit droplets in different target
regions (i.e., in different rows of pixels for example). Once
again, statistical accuracy can be ensured by planning droplet
measurement in a manner calculated to obtain desired statistical
characteristics associated with per-nozzle and/or per-drive
waveform droplet volumes and associated means.
TABLE-US-00002 TABLE 1B Nozzle Printhead (1) (2) (3) (4) (5) A 9.80
10.01 9.89 9.96 10.03 B 9.70 9.90 9.81 9.82 9.94 C 9.89 10.10 9.99
10.06 10.13 D 9.96 10.18 10.07 10.15 10.25 E 10.01 10.23 10.12
10.21 10.31
[0079] All of the same approaches apply equally to the hypothetical
of FIG. 1B. Again considering only target region 154 and the
nozzles (1) and (2) on each printhead (i.e. the nozzles that
overlap with target region 154 during a scan), it is possible to
deposit 50.00 pL in two passes, for example, with a first printhead
pass in which printheads C and E fire nozzle (1) and printheads B
and C fire nozzle (2), and a second printhead pass in which
printhead C fires nozzle (2). It is also possible to deposit 49.99
pL (clearly within an example target range of 49.75 pL and 50.25 pL
with high statistical accuracy) in a single pass, for example, with
a printhead pass in which printheads C, D, and E fire nozzle (1)
and printheads B and E fire nozzle (2).
[0080] It should also be apparent that, optionally combined with
scan path offsets, the use of alternate nozzle firing waveforms
dramatically increases the number of droplet volume combinations
that can be achieved for a given printhead, and these options are
yet further increased by the use of multiple printheads (or
equivalently, multiple rows of nozzles) as described above. For
example, in the hypothetical example conveyed by the discussion of
FIG. 1 above, a combination of five nozzles with respective
inherent ejection characteristics (e.g., droplet volumes) and eight
alternate waveforms could provide literally many thousands of
different sets of possible droplet volume combinations. Optimizing
sets of nozzle-waveform combinations, and selecting a particular
set of nozzle-waveform combinations for each target region (or for
each row of print wells in an array) enables further optimization
of printing according to the desired criteria. In embodiments that
use multiple printheads (or rows of printhead nozzles), the ability
to selectively offset those printheads/rows also further enhances
the number of combinations that can be applied per
printhead/substrate scan. Once again, for these embodiments, given
that multiple sets (of one or more) nozzle-waveform combinations
can alternatively be used to achieve specified fill volumes, this
embodiment selects a particular one of the "acceptable" sets for
each target region, with this selection of the particular one
across target regions generally corresponding to the concurrent
printing of multiple target regions using multiple nozzles. That
is, by varying parameters to minimize the time over which printing
occurs, these embodiments each enhance manufacturing throughput,
and facilitate minimizing the number of required
printhead/substrate scans or "passes," the raw distance of relative
printhead/substrate movement along a particular dimension(s), or
that help satisfy some other criteria.
[0081] Many other processes can be used or combined with the
various techniques introduced above. For example, it is possible to
"tune" the nozzle drive waveform on a per-nozzle basis to reduce
variation in per-nozzle droplet volumes (e.g., shaping of the drive
pulse, by changing drive voltage, rise or fall slopes, pulse width,
decay time, number and respective levels of pulses used per
droplet, and so forth).
[0082] While certain applications discussed in this document refer
to fill volumes in discrete fluid receptacles or "wells," it is
also possible to use the mentioned techniques to deposit a "blanket
coating" having large geographies relative to other structures of
the substrate (e.g., such as relative to transistors, pathways,
diodes and other electronic components). In such a context, fluidic
ink carrying layer materials (e.g., that will be cured, dried or
hardened in situ to form a permanent device layer) will spread to a
certain extent, but will (given ink viscosity and other factors)
still retain specific characteristics relative to other target
deposition regions of the substrate. It is possible to use the
techniques herein in this context, for example, to deposit blanket
layers such as encapsulation or other layers with specific,
localized control over ink fill volumes for each target region. The
techniques discussed herein are not limited by the
specifically-presented applications or embodiments.
[0083] Other variations, advantages and applications from the
techniques introduced above will be readily apparent to those
skilled in the art. This is to say, these techniques can be applied
to many different areas and are not limited to the fabrication of
display devices or pixelated devices. A print "well" as used herein
refers to any receptacle of a substrate that is to receive
deposited ink, and thus has chemical or structural characteristics
adapted to constrain the flow of that ink. As will be exemplified
for OLED printing below, this can include situations were
respective fluid receptacles are to each receive a respective
volume of ink and/or a respective type of ink; for example, in a
display application where the mentioned techniques are used to
deposit light emitting materials of different colors, successive
printing processes can be performed for each color, using
respective printheads and respective inks--in this case, each
process could deposit "every third well" in an array (e.g., for
every "blue" color component), or equivalently, every well in a
third array (which intersperses wells with overlapping arrays for
other color components). Each print well is an example of one
possible type of target region. Other variations are also possible.
Note also that "rows" and "columns" are used in this disclosure
without implying any absolute direction. For example, a "row" of
print wells could extend the length of or width of a substrate, or
in another manner (linear or non-linear); generally speaking,
"rows" and "columns" will be used herein to refer to directions
that each represent at least one independent dimension, but this
need not be the case for all embodiments. Also, note that because
modern printers can use relative substrate/printhead motion that
involves multiple dimensions, relative movement does not have to be
linear in path or speed, which is to say, printhead/substrate
relative motion does not have to follow a straight or even a
continuous path or constant velocity. Thus, a "pass" or "scan" of a
printhead relative to a substrate simply refers to an iteration of
depositing droplets using multiple nozzles over multiple target
regions that involves relative printhead/substrate motion. In many
embodiments described below for a OLED printing process, however,
each pass or scan can be a substantially continuous, linear motion,
with each ensuing pass or scan being parallel to the next, offset
by a geometric step relative to one another. This offset, or
geometric step, can be a difference in pass or scan starting
position, average position, finishing position, or some other type
of positional offset, and does not imply necessarily parallel scan
paths. It is also noted that various embodiments discussed herein
speak of "concurrent" use of different nozzles to deposit in
different target regions (e.g., different rows of target regions);
this term "concurrent" does not require simultaneous droplet
ejection, but rather, merely refers to the notion that during any
scan or pass, different nozzles or groups of nozzles can be used to
fire ink into respective target regions on a mutually-exclusive
basis. For example, a first group of one or more nozzles can be
fired during a given scan to deposit first droplets in a first row
of fluid wells, while a second group of one or more nozzles can be
fired during this same given scan to deposit second droplets into a
second row of fluid wells. The term "printhead" refers to a unitary
or modular device having one or more nozzles that are used to print
(eject) ink toward a substrate. A "printhead assembly" by contrast
refers to an assembly or modular element that supports one or more
printheads as a group for common positioning relative to a
substrate; thus, a printhead assembly in some embodiments can
include only a single printhead, whereas in other embodiments, such
an assembly includes six or more printheads. In some
implementations, individual printheads can be offset relative to
one another within such an assembly. Note that in a typical
embodiment used for large scale manufacturing processes (e.g.,
television flat panel displays), the printhead assembly can be
quite large, encompassing many thousands of print nozzles;
depending on implementation, such an assembly can be large, with
droplet measurement mechanisms discussed herein designed to
articulate around such an assembly to obtain per droplet
measurements. For example, with a printhead assembly having six
printheads and approximately 10,000 or more print nozzles, the
printhead assembly can be "parked" within the printer, within an
off-(printing) axis service station, for various support operations
including droplet measurement.
[0084] With principal parts of several different embodiments thus
laid out, this disclosure will be roughly organized as follows.
FIGS. 2A-2E will be used to introduce certain droplet measurement
configurations for imaging large-scale printhead assemblies. These
configurations can optionally be integrated within a printer, for
example, a flat panel display fabrication device that prints ink
material that will form a permanent thin film layer on a flat panel
device substrate. In optional implementations, these configurations
can use three dimensional articulation of part or all of the optics
associated with droplet measurement, e.g., to articulate about a
printhead assembly with multiple printheads and thousands of ink
jet nozzles which has been parked in a service station of a
printer. FIGS. 3A-4D will be used to introduce some general
principles relating to the nozzle consistency issue, OLED
printing/fabrication, and how embodiments address the nozzle
consistency issue. These techniques can optionally be used with the
mentioned droplet measurement configurations. FIGS. 5-7 will be
used to exemplify software processes that can be used to plan
droplet combinations for each target region of the substrate. FIGS.
8A-B are used to illustrate principles associated with building a
statistical model of droplet volume for each nozzle/waveform
combination, and for using these models to produce a statistical
model of aggregate ink fill for each target region. These
principles can optionally be used in conjunction with droplet
measurement to reliably produce composite ink fills (i.e., through
the use of planned droplet combinations) that meet specified
tolerance ranges with quantifiable certainty (e.g., with a 99% or
better confidence per target region), notwithstanding nozzle
consistency issues. FIGS. 9A-10C are used to present some empirical
data, that is, which demonstrates effectiveness of the mentioned
planned droplet combination techniques in improving target region
fill consistency. FIGS. 11-12 will be used to discuss an exemplary
application to OLED panel fabrication, and associated printing and
control mechanisms. FIGS. 13A-13C are used to discuss printhead
offsets that can be used to vary droplet combinations that can be
deposited with each scan. FIGS. 14A-15D are used to further discuss
different, alternate nozzle firing waveforms, applied to provide
for different droplets volumes or combinations. FIGS. 16-17 will
provide additional detail on the structure and configuration of an
industrial printer which includes a droplet measurement device.
FIGS. 18A and 18B will respectively be used to discuss certain
detailed embodiments of a droplet measurement system, for example,
integrated with such an industrial printer. FIG. 19 will be used to
discuss techniques for hiding droplet measurement times behind
other system processes, so as to maximize production time. Finally,
FIG. 20 will be used to discuss another embodiment of droplet
measurement, including some specific principles relating to z-axis
offset from a printhead and related calibration, and measurement
and correction of nozzle bow.
[0085] FIGS. 2A-2E are used to generally introduce techniques for
per-nozzle droplet measurement.
[0086] More particularly, FIG. 2A provides an illustrative view
depicting an optics system 201 and a relatively large print head
assembly 203; the print head assembly has multiple printheads
(205A/205B) each with a multitude of individual nozzles (e.g.,
207), with hundreds-to-thousands of nozzles present. An ink supply
(not shown) is fluidically connected with each nozzle (e.g., nozzle
207), and a piezoelectric transducer (also not shown) is used to
jet droplets of ink under the control of a per-nozzle electric
control signal. The nozzle design maintains slightly negative
pressure of ink at each nozzle (e.g., nozzle 207) to avoid flooding
of the nozzle plate, with the electric signal for a given nozzle
being used to activate the corresponding piezoelectric transducer,
pressurize ink for the given nozzle, and thereby expel droplets
from the given nozzle. In one embodiment, the control signal for
each nozzle is normally at zero volts, with a positive pulse or
signal level at a given voltage used for a specific nozzle to eject
droplets (one per pulse) for that nozzle; in another embodiment,
different, tailored pulses (or other, more complex waveforms) can
be used nozzle-to-nozzle. In connection with the example provided
by FIG. 2A, however, it should be assumed that it is desired to
measure a droplet volume produced by a specific nozzle (e.g.,
nozzle 207) where a droplet is ejected downward from the printhead
(i.e., in the direction "h," representing z-axis height relative to
a three-dimensional coordinate system 208) to be collected by a
spittoon 209. Note that in a typical application, the dimension of
"h" is typically on the order of one millimeter or less and that
there are thousands of nozzles (e.g., 10,000 nozzles) that are to
have respective droplets individually measured in this manner
within an operating printer. Thus, in order to optically measure
each droplet with precision (i.e., droplets originating from a
specific one of thousands of nozzles in a large printhead assembly
environment, within the approximately millimeter measurement
window, as just described), certain techniques are used in
disclosed embodiments to precisely position elements of the optics
assembly 201, the printhead assembly 203, or both relative to one
another for optical measurement.
[0087] In one embodiment, these techniques utilize a combination of
(a) x-y motion control (211A) of at least part of the optical
system (e.g., within dimensional plane 213) to precisely position a
measurement area 215 immediately adjacent to any nozzle that is to
produce a droplet for optical calibration/measurement and (b) below
plane optical recovery (211B) (e.g., thereby permitting easy
placement of the measurement area next to any nozzle
notwithstanding a large printhead surface area). Thus, in an
exemplary environment having about 10,000 or more print nozzles,
this motion system is capable of positioning at least part of the
optical system in (e.g.) 10,000 or so discrete positions proximate
to the discharge path of each respective nozzle of the printhead
assembly. As will be discussed below, two contemplated optical
measurement techniques include shadowgraphy and interferometry.
With each, optics are typically adjusted in position so that
precise focus is maintained on the measurement area so as to
capture droplets in-flight (e.g., to effectively image the
droplet's shadow in the case of shadowgraphy). Note that a typical
droplet may be on the order of microns in diameter, so the optical
placement is typically fairly precise, and presents challenges in
terms of relative positioning of the printhead assembly and
measurement optics/measurement area. In some embodiments, to assist
with this positioning, optics (mirrors, prisms, and so forth) are
used to orient a light capture path for sensing below the
dimensional plane 213 originating from the measurement area 215,
such that measurement optics can be placed close to the measurement
area without interfering with relative positioning of the optics
system and printhead. This permits effective positional control in
a manner that is not restricted by the millimeter-order deposition
height h within which a droplet is imaged or the large scale x and
y width occupied by a print head under scrutiny. With
interferometry-based droplet measurement techniques, separate light
beams incident from different angles on a small droplet creates
interference patterns detectable from a perspective generally
orthogonal to the light paths; thus, optics in such a system
capture light from an angle of approximately ninety-degrees off of
paths of the source beams, but also in a manner that utilizes below
plane optical recovery so as to measure droplet parameters. Other
optical measurement techniques can also be used. In yet another
variant of these systems, the motion system 211A is optionally and
advantageously made to be an xyz-motion system, which permits
selective engagement and disengagement of the droplet measurement
system without moving the printhead assembly during droplet
measurement. Briefly introduced, it is contemplated in an
industrial fabrication device having one or more large print head
assemblies that, to maximize manufacturing uptime, each printhead
assembly will be "parked" in a service station from time to time to
perform one or more maintenance functions; given the sheer size of
the printhead and number of nozzles, it can be desired to perform
multiple maintenance functions at once on different parts of the
printhead. To this effect, in such an embodiment, it can be
advantageous to move measurement/calibration devices around the
printhead, rather than vice-versa. [This then permits engagement of
other non-optical maintenance processes as well, e.g., relating to
another nozzle if desired.] To facilitate these actions, the
printhead assembly can be optionally "parked," with the system
identifying a specific nozzle or range of nozzles that are to be
the subject of optical calibration. Once the printhead assembly or
a given printhead is stationary, the motion system 211A is engaged
to move at least part of the optics system relative to the "parked"
printhead assembly, to precisely position the measurement area 215
at a position suitable for detecting a droplet jetted from a
specific nozzle; the use of a z-axis of movement permits selective
engagement of light recovery optics from well below the plane of
the printhead, facilitating other maintenance operations in lieu of
or in addition to optical calibration. Perhaps otherwise stated,
the use of an xyz-motion system permits selective engagement of a
droplet measurement system independent of other tests or test
devices used in a service station environment. Note that this
structure is not required for all embodiments; for example, in
connection with FIGS. 16-17 below, a mechanism will be described
that permits motion of both the measurement assembly and the
printhead assembly, e.g. z-axis motion of the printhead assembly
relative to a measurement assembly having x-y motion for purposes
of droplet measurement. Other alternatives are also possible, in
which only the printhead assembly moves and the measurement
assembly is stationary or in which no parking of the printhead
assembly is necessary.
[0088] Generally speaking, the optics used for droplet measurement
will include a light source 217, an optional set of light delivery
optics 219 (which direct light from the light source 217 to the
measurement area 215 as necessary), one or more light sensors 221,
and a set of recovery optics 223 that direct light used to measure
the droplet(s) from the measurement area 215 to the one or more
light sensors 221. The motion system 211A optionally moves any one
or more of these elements together with spittoon 209 in a manner
that permits the direction of post-droplet measurement light from
the measurement area 215 around spittoon 209 to a below-plane
location, while also providing a receptacle (e.g., spittoon 209) to
collect jetted ink. In one embodiment, the light delivery optics
219 and/or the light recovery optics 223 use mirrors that direct
light to/from measurement area 215 along a vertical dimension
parallel to droplet travel, with the motion system moving each of
elements 217, 219, 221, 223 and spittoon 209 as an integral unit
during droplet measurement; this setup presents an advantage that
focus need not be recalibrated relative to measurement area 215. As
noted by numeral 211C, the light delivery optics are also used to
optionally supply source light from a location below the
dimensional plane 213 of the measurement area, e.g., with both
light source 217 and light sensor(s) 221 directing light on either
side of spittoon 209 for purposes of measurement, as generally
illustrated. As noted by numerals 225 and 227, the optics system
can optionally include lenses for purposes of focus, as well as
photodetectors (e.g., for non-imaging techniques that do not rely
on processing of a many-pixeled "picture"). Note once again that
the optional use of z-motion control over the optics assembly and
spittoon permits optional engagement and disengagement of the
optics system, and precise positioning of measurement area 215
proximate to any nozzle, at any point in time while the printhead
assembly is "parked." Such parking of the printhead assembly 203
and xyz-motion of the optics system 201 is not required for all
embodiments. For example, in one embodiment, laser interferometry
is used to measure droplet characteristics, with either the
printhead assembly (and/or the optics system) is moved within or
parallel to the deposition plane (e.g., within or parallel to plane
213) to image droplets from various nozzles; other combinations and
permutations are also possible.
[0089] FIG. 2B provides flow of a process associated with droplet
measurement for some embodiments. This process flow is generally
designated using numeral 231 in FIG. 2B. More specifically, as
indicated by reference numeral 233, in this particular process, the
printhead assembly is first parked, for example, in a service
station (not shown) of a printer or deposition apparatus. A droplet
measurement device is then engaged (235) with the printhead
assembly, for example, by selective engagement of part or all of an
optics system through movement from below a deposition plane into a
position where the optics system is capable of measuring individual
droplets. Per numeral 237, this motion relative of one or more
optics-system components relative to a parked printhead can
optionally be performed in x, y and z dimensions.
[0090] As alluded to previously, even a single nozzle and
associated nozzle firing drive waveform (i.e., pulse(s) or signal
level(s) used to jet a droplet) can produce droplet volume,
trajectory, and velocity that varies slightly from droplet to
droplet. In accordance with teachings herein, in one embodiment,
the droplet measurement system, as indicated by numeral 239,
obtains n measurements per droplet of a desired parameter, to
derive statistical confidence regarding the expected properties of
that parameter. In one implementation, the measured parameter can
be volume, whereas for other implementations, the measured
parameter can be flight velocity, flight trajectory or another
parameter, or a combination of multiple such parameters. In one
implementation, "n" can vary for each nozzle, whereas in another
implementation, "n" can be a fixed number of measurements (e.g.,
"24") to be performed for each nozzle; in still another
implementation, "n" refers to a minimum number of measurements,
such that additional measurements can be performed to dynamically
adjust measured statistical properties of the parameter or to
refine confidence. Clearly, many variations are possible. For the
example provided by FIG. 2B, it should be assumed that droplet
volume is being measured, so as to obtain an accurate mean
representing expected droplet volume from a given nozzle and a
tight confidence interval. This enables optional planning of
droplet combinations (using multiple nozzles and/or drive
waveforms) while reliably maintaining distributions of composite
ink fills in a target region about an expected target (i.e.,
relative to a composite of droplet means). As noted by optional
process boxes 241 and 243, interferometry or shadowgraphy are
contemplated optical measurement processes that ideally enable
instantaneous or near instantaneous measurement and calculation of
volume (or other desired parameter); with such fast-measurement, it
becomes possible to frequently and dynamically update volume
measurements, for example, to account for changes over time in ink
properties (including viscosity and constituent materials),
temperature, power supply fluctuation and other factors. Building
on this point, shadowgraphy typically features capture of an image
of a droplet, for example, using a high resolution CCD camera as a
light sensor mechanism; while droplets can be accurately imaged in
a single image capture frame at multiple positions (e.g., using a
strobed light source), image processing software typically involves
a finite amount of time to calculate droplet volume, such that
imaging of a sufficient droplet population from a large printhead
assembly (e.g., with thousands of nozzles) can take hours.
Interferometry, which relies on multiple binary light detectors and
detection of interference pattern spacing based on output of such
detectors, is a non-imaging technique (i.e., that does not require
image analysis) and so produces droplet volume measurements many
orders of time faster (e.g., 50.times.) than shadowgraphy or other
techniques; for example, with a 10,000 nozzle printhead assembly,
it is expected that large measurement populations for each of the
thousands of nozzles can be obtained in minutes, rendering it
feasible to frequently and dynamically perform droplet measurement.
As noted earlier, in one optional embodiment, droplet measurement
(or measurement of other parameters, such as trajectory and/or
velocity) can be performed as a periodic, intermittent process,
with the droplet measurement system being engaged according to a
schedule, or in between substrates (e.g., as substrates are being
loaded or unloaded), or stacked against other assembly and/or other
printhead maintenance processes. Note that for embodiments that
permit alternate nozzle drive waveforms to be used in a manner
specific to each nozzle, a rapid measurement system (e.g.,
interferometric system) readily permits statistical population
development for each nozzle and for each alternative drive waveform
for that nozzle, thereby facilitating planned droplet combinations
of droplets produced by various nozzle-waveform pairings, as
alluded to earlier. Per numerals 245 and 247, by measuring expected
droplet volume nozzle-by-nozzle (and/or by nozzle-waveform
pairing-by-pairing) to a precision of better than 0.01 pL, it
becomes possible to plan for very precise droplet combinations per
target deposition region, where composite fills can also be planned
to 0.01 pL resolution, and where target volumes can be kept within
a specified error (e.g., tolerance) range of 0.5% of target volume
or better; as indicated by numeral 247, the measurement populations
for each nozzle or each nozzle-waveform pairing are in one
embodiment planned so as to produce reliability distribution models
for each such nozzle or nozzle-waveform pairing, i.e., with
3.sigma. confidence (or other statistical measure, such as
4.sigma., 5.sigma., 6.sigma., etc.) that is less than the
specification maximum fill error. Once sufficient measurements are
taken for various droplets, fills involving combinations of those
droplets can be evaluated and used to plan printing (248) in the
most efficient manner possible. As indicated by separation line
249, droplet measurement can be performed with intermittent
switching back and forth between active printing processes and
measurement and calibration processes.
[0091] FIG. 2C illustrates flow 251 of one possible process
associated with the planning of droplet measurements per-nozzle (or
per-nozzle-waveform pairing) and/or initialization of statistical
data with which to model behavior of each nozzle. As indicated by
numeral 253, data is in this process first received that specifies
a desired tolerance range, which for example can be established
according to manufacturer specification. In one embodiment, for
example, this tolerance or acceptability range can be specified as
.+-.5.0% of a given target; in another embodiment, another range
such as .+-.2.5%, .+-.2.0%, .+-.1.0%, .+-.0.6% or .+-.0.5% of a
desired target droplet size can be used. It is also possible to
specify a range or a set of acceptable values in an alternate
manner. Irrespective of method of specification, dependent on the
desired tolerance and droplet system measurement error, a threshold
number of measurements is then identified (255). Note that as
indicated above, this number can be selected to achieve a number of
objectives: (a) obtaining a large enough population of droplet
measurements so as to provide a reliable measure of the expected
droplet parameter (e.g., mean volume, velocity or trajectory); (b)
obtaining a large enough population of droplet measurements so as
to model variation in the droplet parameter (e.g., standard
deviation or a for the given parameter); and/or (c) obtaining
enough data so as to identify nozzles or nozzle-waveform pairings
with larger than expected error for purposes of disqualifying the
use of particular nozzles/nozzle-waveform pairings during a print
process. With any planned number of droplet measurements or desired
measurement criteria or related minimums thus defined, measurements
are then performed (257) using a droplet measurement system 259
(for example, using optical techniques as discussed herein). The
measurements for each nozzle (or nozzle-waveform) are then
performed until the specified criteria are met, per process
decision block 261. If the number of measurements meets planned
criteria, the method then ends per process block 269. If additional
measurements need to be performed, the measurement process loops
until sufficient measurements have been obtained, as referenced in
FIG. 2C.
[0092] FIG. 2C shows a number of exemplary process variations.
First, as indicated by numeral 263, this measurement process is
optionally applied to all nozzles of a printhead assembly (and/or
all possible nozzle/waveform combinations). This need not be the
case for all embodiments. For example, in one embodiment (see the
discussion of FIGS. 14A-15C, below), a potentially limitless number
of drive waveform variations can be used to influence parameters of
a jetted droplet for a given nozzle; instead of exhaustively
testing each possible waveform, a droplet measurement process can
experiment with a set of predetermined waveforms representing a
wide distribution of the possible waveforms, with an iterative,
interpolative search process used to select a small number of
waveforms (e.g., likely to produce a mean droplet volume spanning a
range of .+-.10% of a desired droplet size). In another embodiment,
if based on initial measurements, a given nozzle is deemed
defective (e.g., droplet volume having greater than 20%
distribution from a desired mean), that nozzle (or nozzle-waveform
pairing) can be optionally excluded from further consideration. In
yet another example, if print scans in practice are planned that do
not use certain nozzles, it can be advantageous to perform dynamic
additional droplet measurements for only nozzles that are actively
used in planned scanning, at least until some type of error or
variance criteria is reached. Once again, many possibilities exist;
function block 263 simply indicates that applied processes do not
have to involve all nozzles (or nozzle-waveform pairings). Second,
numeral 265 indicates that in one embodiment, the minimum criteria
can involve a minimum threshold that can differ for each nozzle or
nozzle-waveform pairing. To cite a few examples pertinent to this
function, in one embodiment, droplet measurements are performed for
a given nozzle or nozzle-waveform pairing, and a distribution
spread measure (e.g., variance, standard deviation or another
measure) is computed, with measurements beyond a raw threshold
performed until the spread measure satisfies a predetermined
criteria; as should be appreciated, if the minimum is, e.g., 10
droplet measurements per nozzle, and if 10 droplet measurements for
a particular nozzle yields a larger than expected variance,
additional measurements could uniquely be performed for the given
nozzle until the desired spread is achieved (e.g.,
3.sigma..ltoreq.1.0% of mean volume) or until some maximum number
of measurements had been performed. Such an embodiment for example,
can result in different numbers of measurements per nozzle, i.e.,
with measurement iterations planned to achieve some minimum
criteria (e.g., minimum number of measurements and the spread
measure less than a threshold in this example). Third, as indicated
by numeral 267, it is also possible to use dead-reckoning in
droplet measurement planning, e.g., to obtain "exactly 24" droplet
measurements per nozzle (or nozzle-waveform), or to obtain x number
of measurements per hour, and so forth. Finally, irrespective of
measurements management techniques, it is possible to apply
measurements to qualify (pass) or disqualify certain nozzles or
nozzle-waveform combinations. Again citing a possible
implementation option, following performance of a threshold number
of measurements, certain nozzles or nozzle-waveforms could be
qualified or disqualified based on measurement data, per numeral
270. For example, if an ideal droplet volume is 10.00 pL in one
application, nozzles/nozzle-waveform pairings not producing a mean
droplet volume of 9.90 pL-10.10 pL could be immediately
disqualified; the same approach can be taken for statistical
spread, e.g., following a minimum number of measurements, any
nozzle/nozzle-waveform pairing producing droplet spread (e.g.,
variance, standard deviation, etc.) of greater than 0.5% could be
immediately disqualified, and so forth. Once again, many
implementation examples exist.
[0093] FIG. 2D is a schematic view of one implementation of a
droplet measurement system predicated on optical techniques,
generally referenced by numeral 271. More particularly, a printhead
273 is illustrated in cross-section as having five enumerated print
nozzles, arranged as a row of nozzles that will jet fluidic ink
downward in the z-direction (as indicated by reference legend 274).
A light source 275A is arranged to the side of the printhead so as
to illuminate a measurement area 278 through which a droplet will
pass for measurement; in the case of FIG. 2D, this measurement area
(and part or all of the optics system) are arranged so as to
measure droplets originating from nozzle (3) of the printhead. The
light source 275A is depicted external to one lateral side of the
printhead 273 so as to generate a light path 277 that will direct
light into the light measurement area (i.e., within
millimeter-order height, represented by the variable h, to
illuminate any of multiple nozzles without interfering with the
printhead 273. As represented by numeral 275B, in one embodiment,
the light source can also instead be advantageously mounted below
deposition plane 289 (and the upper periphery of spittoon 286) so
as to provide for relatively easy fixed-distance positioning of
optics relative to the droplet path from any nozzle; again, while
five nozzles are depicted in FIG. 2D, in one embodiment, there are
hundreds to thousands of nozzles, or more. Below deposition plane
light generation, with optics used to direct illumination to the
droplet measurement area 278, facilitates easy positioning of the
optics system relative to any nozzle of the depicted printhead 273,
and for selective engagement and disengagement of the droplet
measurement system (e.g., relative to an optional service station,
as previously described). In the depicted example, a mirror 285A is
used to redirect light from the light source 275B so as to be
incident with droplets within the measurement area 278 traveling
from the printhead 273 toward the spittoon 286. Other means of
positioning the optics path relative to the light source 275B can
also be used, such as by way of non-limiting example, prisms, fiber
optic cables and so forth. For an implementation where an imaging
measurement technique is used (e.g., shadowgraphy), the light
source 275A/275B can be a strobed thermal light source or a
monochromatic source. Note that FIG. 2D also shows a light from a
third originating position directed along path 275C where the
source is outside of the drawing page and directs light into or out
of the drawing page with or without the assistance of light path
routing optics (e.g., along the y dimension depicted by the
reference legend 274); such a positioning framework can be used for
example where interferometry is relied upon, with detection of an
interference pattern occurring from a direction orthogonal to (or
at another angle to) an illumination path. Irrespective of the
relative arrangement of the illumination source, it should be noted
that light is directed along a light path 277 and illumination
plane 290 which is intermediate to the position of the printhead
273 and the deposition plane 290, and that measurement light (i.e.,
from the measured droplet) is routed by light path routing optics
285B from the imaging plane to a light detector mounted below
deposition plane 289. Once again, this permits narrow direction and
focus of light notwithstanding a large printhead size and
relatively small height h. Also, as with light path routing optics
285A, mirrors, prisms, fiber optics, or other light redirection
devices and techniques can be used to effectuate this
below-deposition-plane routing of light recovery. As seen in FIG.
2D, the measurement light is directed to focusing optics 279 (e.g.,
a lens) and on to a light detector 280. The distance of the light
path between the focusing optics and the measurement area is
identified by the distance f, representing the focal length of the
optics system. As alluded to earlier, it is desired that droplet
measurement (depending on optics technology) provide precise focus
needed to properly image droplets and, to this effect, for the
system represented by FIG. 2D, the light path routing optics 285B,
the focusing optics 279, the droplet measurement area 278, and the
spittoon 286 lens are all moved as an integral unit to measure
droplets from different nozzles, as represented by depicted
connection to a common chassis 283. The light source 275A/275B and
light source direction optics, depending on embodiment, can
optionally also be coupled to this chassis.
[0094] Note that in an interferometry-based system, also
represented conceptually by FIG. 2D, the light source 275A/275B (or
producing light path 275C) can be a laser, with beams split at some
point along the optical path into two or more different components,
used to produce an interference pattern. Additional specifics as to
these optics, and the use of multiple beams to create an
interference pattern, will be discussed further below in connection
with FIG. 18B; for the time being, a laser source (including a
light source for interferometry) should be assumed as encompassed
by references 275A/275B/275C.
[0095] FIG. 2E illustrates another schematic view of an
implementation of a droplet measurement system predicated on
optical techniques, generally referenced by numeral 291. More
specifically, the implementation seen in FIG. 2E relies on
interferometry to measure droplet parameters (such as volume). As
before, this configuration relies upon a printhead 273, a
measurement area 278, a chassis 283 and a spittoon 286. In this
embodiment, however, a laser is specifically used as the light
source 292 to generate light beams directed to the measurement area
via illumination path 293. Note that typically two or more beams
are directed in this manner, as will be explained further below. An
interference pattern is generated in a droplet in the measurement
area 278, and this interference pattern is observed from a
direction substantially orthogonal to the illumination path 293, as
represented by numeral 297. This same relationship (measurement
from a direction not parallel with the illumination path) was also
represented by FIG. 2D (e.g., using path 275C), but in FIG. 2E, the
divergent measurement angle is such that measurement light is
natively directed downward, below the plane of the measurement area
278. Note that a light detector 295 is non-imaging in the sense
that (while multiple light detectors are typically used) the use of
a camera is not required, and the use of image processing to
identify droplet contours within a pixelated image is not required,
substantially improving speed of detection and measurement; that
is, the interferometric approach simply measures changes in an
interference pattern as a droplet passes through a region of
coincident light beams, with droplet volume derivable from obtained
results. The use of more than two light beams (or an increased
number of detectors) facilitates measurement of droplet trajectory
and velocity and other parameters. As before, the light source 292,
spittoon 286 and light detector 295 can be moved as one (i.e., with
common chassis 283), facilitating preservation of precise optical
path parameters. In one implementation, motion of the optics system
is once again performed in three dimensions relative to a "parked"
printhead assembly, to selectively engage and disengage a droplet
measurement device while the printhead assembly is in a service
station, and to easily and precisely position a droplet measurement
device to measure any of thousands of nozzle of a large scale
printhead.
[0096] As noted earlier, with suitable configuration of a droplet
measurement device or system, an industrial printer (e.g., used for
OLED device fabrication) can have nozzles and their consequent
droplets repeatedly calibrated, permitting the planning of very
precise droplet combinations in any target region. That is, the
measurement device can be used to quickly develop accurate,
tightly-grouped statistical distributions of volume for each nozzle
and each waveform used for a nozzle, which enables accurate
planning of droplet combinations used to achieve composite fills.
In other embodiments, these same techniques are used to build
models for droplet velocity and flight angle, such that models for
these parameters can be applied in the printing process.
[0097] Note that any of these various techniques (and any of the
printing or composite fill techniques introduced in this
disclosure) can be manifested in different products and/or
different manufacturing tiers. For example, FIG. 3A represents a
number of different implementation tiers, collectively designated
by reference numeral 301; each one of these tiers represents a
possible discrete implementation of the techniques introduced
above. First, the techniques introduced above can be embodied as
instructions stored on non-transitory machine-readable media, as
represented by graphic 303 (e.g., software for controlling a
computer or a printer). Second, per computer icon 305, these
techniques can be implemented as part of a computer or network, for
example, within a company that designs or manufactures components
for sale or use in other products. For example, the techniques
introduced above can be implemented as design software by a company
that consults to, or performs design for, a high definition
television (HDTV) manufacturer; alternatively, these techniques
could be used directly by such a manufacturer to make televisions
(or display screens). Third, as introduced earlier and exemplified
using a storage media graphic 307, the techniques introduced
earlier can take the form of printer instructions, e.g., as stored
instructions or data that, when acted upon, will cause a printer to
fabricate one or more layers of a component dependent on the use of
planned droplet aggregation techniques, per the discussion above.
Fourth, as represented by a fabrication device icon 309, the
techniques introduced above can be implemented as part of a
fabrication apparatus or machine, or in the form of a printer
within such an apparatus or machine. For example, a fabrication
machine could be sold or customized in a manner where droplet
measurement, and conversion of externally-supplied "layer data" is
automatically converted by the machine (e.g., through the use of
software) into printer instructions that will print using the
techniques described here to transparently optimize/speed-up the
printing process. Such data can also be computed off-line, and then
reapplied on a reproducible basis in a scalable, pipelined
manufacturing process that manufactures many units. It is noted
that the particular depiction of the fabrication device icon 309
represents one exemplary printer device that will be discussed
below (e.g., in reference to FIGS. 11-12). The techniques
introduced above can also be embodied as an assembly such as an
array 311 of multiple components that will be separately sold; in
FIG. 3 for example, several such components are depicted in the
form of an array of semi-finished flat panel devices, which will
later be separated and sold for incorporation into end consumer
products. The depicted devices may have, for example, one or more
layers (e.g., color component layers, semiconductor layers,
encapsulation layers or other materials) deposited in dependence on
the methods introduced above. The techniques introduced above can
also be embodied in the form of end-consumer products as
referenced, e.g., in the form of display screens for portable
digital devices 313 (e.g., such as electronic pads or smart
phones), as television display screens 315 (e.g., HDTVs), or other
types of devices. For example, FIG. 3A uses a solar panel graphic
317 to denote that the processes introduced above can be applied to
other forms of electronic devices, e.g., to deposit per-target
region structures (such as one or more layers of individual cells
that make up an aggregate device) or blanket layers (e.g., an
encapsulation layer for a TV or solar panel). Clearly, many
examples are possible.
[0098] The techniques introduced above, without limitation, can be
applied to any of the tiers or components illustrated in FIG. 3A.
For example, one embodiment of the techniques disclosed herein is
an end consumer device; a second embodiment of the techniques
disclosed herein is an apparatus comprising data to control the
fabrication of a layer using combinations of specific nozzle
volumes to obtain specific per-target region fills; nozzle volumes
can be determined in advance, or measured and applied in situ. Yet
another embodiment is a deposition machine, for example, that uses
a printer to print one or more inks using techniques introduced
above. These techniques can be implemented on one machine or more
than one machine, e.g., a network or series of machines where
different steps are applied at different machines. All such
embodiments, and others, can independently or collectively make use
of techniques introduced by this disclosure.
[0099] As represented by FIG. 3B, in one application, a printing
process can be used to deposit one or more layers of material onto
a substrate. The techniques discussed above can be used to generate
printer control instructions (e.g., an electronic control file that
can be transferred to a printer) for subsequent use in fabricating
a device. In one specific application, these instructions can be
geared for an inkjet printing process useful in printing a layer of
a low-cost, scalable organic light-emitting diode ("OLED") display.
More specifically, the mentioned techniques can be applied to
deposit one or more light-emitting or other layers of such an OLED
device, for example, "red" "green" and "blue" (or other) pixelated
color components or other light-emitting layers or components of
such a device. This exemplary application is non-limiting, and the
mentioned techniques can be applied to fabrication of many other
types of layers and/or devices, whether or not those layers are
light-emitting and whether or not the devices are display devices.
In this exemplary application, various conventional design
constraints of inkjet printheads provide challenges to the process
efficiency and film coating uniformity of various layers of an OLED
stack that can be printed using various inkjet printing systems.
Those challenges can be addressed through the teachings herein.
[0100] More specifically, FIG. 3B is a plan view of one embodiment
of a printer 321. The printer includes a printhead assembly 323
that is used to deposit fluidic ink onto a substrate 325. Unlike
printers that print text and graphics, the printer 321 in this
example is used in a manufacturing process to deposit fluidic ink
that will have a desired thickness. That is, in a typical
manufacturing application, the ink carries a material that will be
used to form a permanent layer of a finished device, where that
layer has a specifically-desired thickness. The thickness of the
layer produced by deposition of fluidic ink is dependent on the
volume of applied ink. The ink typically features one or more
materials that will form part of the finished layer, formed as
monomer, polymer, or a material carried by a solvent or other
transport medium. In one embodiment, these materials are organic.
Following deposition of the ink, the ink is dried, cured or
hardened to form the permanent layer; for example, some
applications use an ultraviolet (UV) cure process to convert a
liquid monomer into a solid polymer, while other processes dry the
ink to remove the solvent and leave the transported materials in a
permanent location. Other processes are also possible. Note that
there are many other variations that differentiate the depicted
printing process from conventional graphics and text applications;
for example, in some embodiments, deposition of the desired
materials layers is performed in an environment controlled to
either regulate the ambient atmosphere to be something other than
air, or otherwise to exclude unwanted particulates. For example, as
will be described further below, one contemplated application uses
a fabrication mechanism that encloses the printer 321 within a gas
chamber, such that printing can be performed in the presence of a
controlled atmosphere such as an inert environment including, for
example, but not limited by, nitrogen, any of the noble gases, and
any combination thereof.
[0101] As further seen in FIG. 3B, the printhead assembly 323
includes a number of nozzles, such as nozzle 327. Note that in FIG.
3B, for ease of illustration, the printhead assembly 323 and
nozzles are depicted as opening out of the top of the page, but in
fact, these nozzles face downward toward the substrate and are
hidden from view from the perspective of FIG. 3B (i.e., FIG. 3B
shows what in effect is a cut-away view of the printhead assembly
323). The nozzles are seen to be arranged in rows and columns (such
as exemplary row 328 and column 329), although this is not required
for all embodiments, i.e., some implementations use only a single
row of nozzles (such as row 328). In addition, it is possible for
rows of nozzles to be disposed on respective printheads, with each
printhead being (optionally) individually offsettable relative to
one another, as introduced above. In an application where the
printer is used to fabricate part of a display device, for example,
materials for each of respective red, green and blue color
components of a display device, the printer will typically use
dedicated printhead assemblies for each different ink or material,
and the techniques discussed herein can be separately applied to
each corresponding printhead or printhead assembly.
[0102] FIG. 3B illustrates one printhead assembly 323 (i.e., with
one or more individual printheads not separately depicted). The
printer 321 includes in this example two different motion
mechanisms that can be used to position the printhead assembly 323
relative to the substrate 325. First, a traveler or carriage 331
can be used to mount the printhead assembly 323 and to permit
relative motion as denoted by arrows 333. This motion mechanism
also can optionally convey the printhead assembly 323 to a service
station, if present; such a service station is represented by
numeral 334 in FIG. 3B. Second, however, a substrate transport
mechanism can be used to move the substrate relative to the
traveler, along one or more dimensions. For example, as denoted by
arrows 335, the substrate transport mechanism can permit movement
in each of two orthogonal directions, such as in accordance with x
and y Cartesian dimensions (337), and can optionally support
substrate rotation. In one embodiment, the substrate transport
mechanism comprises a gas floatation table used to selectively
secure and permit movement of the substrate on a gas bearing. Note
further that the printer optionally permits rotation of the
printhead assembly 323 relative to the traveler 331, as denoted by
rotation graphic 338. Such rotation permits the apparent spacing
and relative configuration of the nozzles 327 to be changed
relative to the substrate; for example, where each target region of
the substrate is defined to be a specific area, or to have a
spacing relative to another target region, rotation of the
printhead assembly and/or the substrate can change the relative
separation of the nozzles in a direction along or perpendicular to
a scan direction. In an embodiment, the height of the printhead
assembly 323 relative to the substrate 325 can also be changed, for
example, along a z Cartesian dimension that is into and out of the
direction of view of FIG. 3B.
[0103] Two scan paths are respectively illustrated by directional
arrows 339 and 340 in FIG. 3B. Briefly, the substrate motion
mechanism moves the substrate back and forth in the direction of
arrows 339 and 340 as the printhead moves in geometric steps or
offsets in the direction of arrows 333. Using these combinations of
movements, the nozzles of the printhead assembly can reach any
desired region of the substrate to deposit ink. As referenced
earlier, the ink is deposited on a controlled basis into discrete
target regions of the substrate. These target regions can be
arrayed, that is, arranged in rows and columns such as optionally
along the depicted y and x dimensions, respectively. Note that the
rows of nozzles (such as row 328) are seen in this FIG.
perpendicular to the rows and columns of target regions, i.e., such
that a row of nozzles sweeps with each scan along the direction of
rows of target regions, traversing each of the columns of target
regions of the substrate (for example, along direction 339). This
need not be the case for all embodiments. For efficiency of motion,
the subsequent scan or pass then reverses this direction of motion,
addressing the columns of target regions in reverse order, that is,
along direction 340.
[0104] Arrangement of the target regions in this example is
depicted by a highlighted region 341, which is seen in expanded
view to the right side of the FIG. That is, two rows of pixels,
each pixel having red, green and blue color components, are each
represented by numeral 343, whereas columns of pixels orthogonal to
the scan direction (339/340) are each represented by numeral 345.
In the upper left-most pixel, the red, green and blue color
components are seen to occupy distinct target regions 347, 349 and
351 as part of respective, overlapping arrays of regions. Each
color component in each pixel can also have associated electronics,
for example as represented by numeral 353. Where the device to be
fabricated is a backlit display (for example, as part of a
conventional-type LCD television), these electronics can control
selective masking of light that is filtered by the red, green and
blue regions. Where the device to be fabricated is a newer type
display, that is where red, green and blue regions directly
generate their own light having corresponding color
characteristics, these electronics 353 can include patterned
electrodes and other material layers that contribute to the desired
light generation and light characteristics.
[0105] FIG. 3C provides a close-up, cross-sectional view of a
printhead 373 and substrate 375, taken relative to the printhead
assembly of FIG. 3B from the perspective of lines C-C. More
specifically, numeral 371 generally denotes the printer, while
numeral 378 represents a row of print nozzles 377. Each nozzle is
designated using a parenthetical number, e.g., (1), (2), (3), etc.
A typical printhead typically has plural such nozzles, for example,
64, 128 or another number; in one embodiment, there can be
1,000-10,000 nozzles, or more, arranged in one or more rows. As
noted earlier, the printhead in this embodiment is moved relative
to the substrate to effectuate geometric steps or offsets between
scans, in the direction referenced by arrows 385. Depending on the
substrate motion mechanism, the substrate can be moved orthogonal
to this direction (e.g., into and out of the page, relative to the
view of FIG. 3C) and in some embodiments, also in the direction
represented by arrows 385. Note that FIG. 3C also shows a column
383 of respective target regions 379 of the substrate, in this
case, arranged as "wells" that will receive deposited ink and
retain the deposited ink within structural confines of the
respective well. It will be assumed for purposes of FIG. 3C that
only one ink is represented (e.g., each depicted well 379
represents only one color of a display, such as the red color
component, with other color components and associated wells not
being shown). Note that the drawing is not true to scale, e.g., the
nozzles are seen to be numbered from (1) to (16) while the wells
are seen to be lettered from (A) to (ZZ), representing 702 wells.
In some embodiments, the nozzles will align to respective wells,
such that the depicted printhead with 16 nozzles would deposit ink
in the direction of arrows 381 in as many as 16 wells at the same
time using scans of relative printhead/substrate motion that are
into and out of the page from the perspective of FIG. 3C. In other
embodiments, as mentioned earlier (e.g., with reference to FIG.
1B), nozzle density will be much greater than target region
density, and with any scan or pass, a subset of nozzles (e.g., a
group of one to many, dependent on which nozzles traverse each
target region) will be used for deposition into each respective
target region. For example, again using an illustrative example of
sixteen nozzles, it could be that nozzles (1)-(3) can be used to
deposit ink in a first target region and nozzles (7-10) can be
concurrently used to deposit ink in a second target region, on a
mutually-exclusive basis for the given pass.
[0106] Conventionally, a printer might be operated to use the
depicted sixteen nozzles to concurrently deposit ink in as many as
sixteen rows of wells, moving back and forth with ensuing scans as
necessary, until e.g. five droplets were deposited in each well,
with the printhead being advanced as necessary using a fixed step
that is an integer multiple of a width of the swath traversed by
the scan. The techniques provided by this disclosure, however, make
use of the inherent variation in droplet volumes produced by
different nozzles, in combinations calculated to produce a specific
fill volume for each well. Different embodiments rely on different
techniques to achieve these combinations. In one embodiment, the
geometric step is varied to achieve the different combinations, and
is free to be something other than an integer multiple of the width
described by the printhead swath. For example, if appropriate to
depositing selected sets of droplet combinations in the respective
wells 379 of FIG. 3C, the geometric step could be 1/160.sup.th of
the swath of the printhead, in effect, representing a relative
displacement between printhead and substrate of a spacing of one
tenth of a one row of wells in this example. The next offset or
geometric step could be different, as appropriate to the particular
combination of droplets desired in each well, for example, a
hypothetical offset of 5/16.sup.ths of the printhead swath,
corresponding to an integer spacing of wells; this variation could
continue with both positive and negative steps as necessary to
deposit ink to obtain the desired fill volumes. Note that many
different types or sizes of offsets are possible and that step size
need not be fixed from scan-to-scan or be a specific fraction of
well spacing. In many manufacturing applications, however, it is
desired to minimize printing time, in order to maximize rate of
production and minimize per-unit manufacturing costs as much as
possible; to this end, in specific embodiments, printhead motion is
planned and sequenced in a manner to minimize the total number of
scans, the total number of geometric steps, the size of offsets or
geometric steps, and the cumulative distance traversed by the
geometric steps. These or other measures can be used individually,
together, or in any desired combination to minimize total printing
time. In embodiments where independently offsettable rows of
nozzles are used (e.g., multiple printheads), the geometric step
can be expressed in part by the offset between printheads or nozzle
rows; such offset, combined with overall offset of the printhead
component (e.g., a fixed step for a printhead assembly) can be used
to effectuate variable-size geometric steps and thus deposit
droplet combinations into each well. In embodiments where variation
in nozzle drive waveform is used alone, conventional, fixed steps
can be used, with droplet volume variation effectuated using
multiple printheads and/or multiple printhead passes. As will be
noted below, in one embodiment, nozzle drive waveforms can be
programmed for each nozzle in between droplets, thus permitting
each nozzle to produce and contribute respective droplet volumes
per well within a row of wells.
[0107] FIGS. 4A-4D are used to provide additional detail regarding
reliance on specific droplet volumes in achieving desired fill
volumes.
[0108] FIG. 4A presents an illustrative view 401 of a printhead 404
and two related diagrams seen below the printhead 401. The
printhead is optionally used in an embodiment that provides
non-fixed geometric steps of printhead relative to substrate, and
so numeral 405 is used to denote offsets that align specific
printhead nozzles (e.g., 16 total nozzles with nozzles (1)-(5)
depicted in the FIG.) with different target regions (five in this
example, 413, 414, 415, 416 and 417). Harkening back to the example
of FIG. 1A, if nozzles (1)-(16) respectively produce droplet
volumes of 9.80, 10.01, 9.89, 9.96, 10.03, 9.99, 10.08, 10.00,
10.09, 10.07, 9.99, 9.92, 9.97, 9.81, 10.04 and 9.95 pL of fluidic
ink (e.g., mean droplet volumes), and if it is desired to deposit
50.00 pL per target region, .+-.0.5 percent of this value, the
printhead could be used to deposit droplets in five passes or
scans, respectively using geometric steps of 0, -1, -1, -2 and -4,
resulting in (expected mean) total fill values per region of 49.82,
49.92, 49.95, 49.90 and 50.16 pL, as depicted in the FIG; this is
clearly within the desired tolerance range of 49.75-50.25 pL for
each of the depicted target regions. Every step in this example is
expressed on an incremental basis relative to previous position,
although it is possible to use other measures as well. Depending on
variation in expected per-droplet volumes, it is still possible to
virtually guarantee that fills will conform to the desired
tolerance range; for example, by taking many droplet measurements
as referenced above (e.g., 20-30 droplet measurements per nozzle,
or more), the expected variance of each droplet volume can be made
quite small, permitting high confidence in the distribution of
expected composite volume. Thus, as seen, the combining of droplets
in a deliberate manner that depends on respective droplet volumes
and the desired fill for each target region can be used to achieve
precise, regulated fills, with a high degree of reliability.
[0109] Note that this same FIG. can be used to represent nozzle
drive waveform variation and/or the use of multiple printheads. For
example, if the nozzle references (1)-(16) refer to droplet volumes
for a single nozzle produced by sixteen different drive waveforms
(i.e., using waveforms 1-16), the per-region fill volumes can in
theory be obtained simply by using different drive waveforms, for
example, waveform nos. 1, 2, 3, 5 and 9 for target region 413. In
practice, since process variations can result in different
per-nozzle characteristics, the system would measure droplet
volumes for each nozzle for each waveform, and would intelligently
plan droplet combinations on this basis. In an embodiment where the
nozzle references (1)-(15) refer to multiple printheads (e.g.,
references (1)-(5) referring to a first printhead, references
(6)-(10) referring to a second printhead and references (11)-(15)
referring to a third printhead), offsets between printheads can be
used to reduce the number of passes or scans; for example, the
right-most target region 417 could have three droplets deposited in
one pass, including droplet volumes of 10.03, 10.09 and 9.97 pL
(printhead (1), 0 offset; printhead (2), +1 offset; and printhead
(3), +2 offset). It should be apparent that the combination of
these various techniques facilitates many possible combinations of
specific volume droplets to achieve specific fill volumes within a
tolerance range. Note in FIG. 4A that the variance in the aggregate
ink fill volumes amongst target regions is small and within
tolerance, i.e., within a range of 49.82 pL to 50.16 pL.
[0110] FIG. 4B shows an illustrative view 421 of a series of
printhead scans, with each scan perpendicular to the direction of
arrows 422, with nozzles represented by a different rectangle or
bar, such as referenced by numerals 423-430. In connection with
this FIG., it should be assumed printhead/substrate relative motion
is advanced in a sequence of variable-size geometric steps. Note
again that, typically, each step will designate a scan that sweeps
multiple columns of target regions (e.g., pixels) beyond a single
column of five regions represented on the plane of the drawing page
(and represented by numerals 413-417). Scans are shown in order
from top-to-bottom, including a first scan 423 where the printhead
is seen displaced to the right relative to the substrate, such that
only nozzles (1) and (2) are aligned with target regions 416 and
417, respectively. Within each print scan depiction (such as box
423), circles represent each nozzle either with a solid black fill,
to denote that the nozzle is to be fired when that nozzle is over
the specifically-depicted target region during the scan, or
"hollow," that is, with a white fill, to denote that the nozzle is
not to be fired at the pertinent time (but may be for other target
regions encountered on the scan). Note that, in this embodiment,
each nozzle is fired on a binary basis, i.e., each nozzle is either
fired or not according to any adjustable parameters, e.g., to
deposit for each target region encountered during the scan a
predetermined droplet volume. This "binary" firing scheme can
optionally be employed for any of the embodiments described herein
(that is, e.g., in embodiments where multiple firing waveforms are
used, with waveform parameters being adjusted in between droplets).
In the first pass 423, it is seen that nozzle (1) is fired to
deposit a 9.80 pL droplet into the second-to-right-most target
region while nozzle (2) is fired to deposit a 10.01 pL droplet into
right-most target region 417. The scan continues to sweep other
columns of target regions (e.g., other rows of pixel wells),
depositing ink droplets as appropriate. After the first pass 423 is
completed, the printhead is advanced by a geometric step of -3,
which moves the printhead left relative to the substrate, such that
nozzle (1) will now traverse target region 413 during a second scan
424 in a direction opposite to the first scan. During this second
scan 424, nozzles (2), (3), (4) and (5) will also respectively
traverse regions 414, 415, 416 and 417. It is seen by the
black-filled circles that, at the appropriate time, nozzles (1),
(2), (3) and (5) will be fired to respectively deposit droplet
volumes of 9.80 pL, 10.01 pL, 9.89 pL and 10.03 pL, corresponding
to inherent characteristics of nozzles (1), (2), (3) and (5). Note
also that in any one pass, the nozzles in a row of nozzles used to
deposit ink will do so on a mutually-exclusive basis into
respective target regions, e.g., for pass 424, nozzle (1) is used
to deposit ink into target region 413 (but none of target regions
414-417), nozzle (2) is used to deposit ink in target region 414
(but none of regions 413 or 415-417), nozzle (3) is used to deposit
ink in target region 415 (but none of regions 413-414 or 416-417)
and nozzle (5) is used to deposit ink in target region 417 (but
none of regions 413-416). A third scan, denoted using numeral 425,
advances the printhead effectively by one row of target regions (-1
geometric step), such that nozzles (2), (3), (4), (5) and (6) will
traverse regions 413, 414, 415, 416 and 417, respectively during
the scan; solid-fill nozzle graphics denote that during this pass,
each of nozzles (2)-(6) will be actuated to fire droplets,
respectively producing expected droplet volumes of 10.01, 9.89,
9.96, 10.03 and 9.99 pL.
[0111] If the print process was stopped at this point in time,
region 417 would for example have a fill of 30.03 pL (10.01
pL+10.03 pL+9.99 pL) corresponding to three droplets, whereas
region 413 would have a fill of 19.81 pL (9.80 pL+10.01 pL),
corresponding to two droplets. Note that the scan pattern in one
embodiment follows the back and forth pattern represented by arrows
339 and 340 of FIG. 3B. Ensuing passes 426-430 across these target
regions (or scans of multiple columns of multiple such regions)
respectively deposit: (a) 10.01 pL, 0.00 pL, 0.00 pL, 10.08 pL and
10.09 pL droplets in region 413, corresponding to passes by nozzles
(2), (3), (4), (7) and (9) in successive scans; (b) 0.00 pL, 0.00
pL, 10.03 pL, 10.00 pL and 10.07 pL droplets in region 414,
corresponding to respective passes by nozzles (3), (4), (5), (8)
and (10) in successive scans; (c) 9.89 pL, 9.96 pL, 10.03 pL, 9.99
pL, 10.09 pL and 0.00 pL droplets in region 415, corresponding to
passes by nozzles (4), (5), (6), (9) and (11) in successive scans;
(d) 0.00 pL, 9.99 pL, 10.08 pL, 10.07 pL and 0.00 pL droplets in
region 416, corresponding to passes by nozzles (5), (6), (7), (10)
and (12) in successive scans; and (e) 9.99 pL, 0.00 pL, 10.00 pL,
0.00 pL and 0.00 pL droplets in region 417, corresponding to passes
by nozzles (6), (7), (8), (11) and (13) in successive scans. Again,
note that nozzles in this example are used with only a single
firing waveform (i.e., such that their droplet volume
characteristics do not change from scan to scan) and on a binary
basis, e.g., in the fifth scan 427, nozzle (7) is not fired,
producing no droplet (0.00 pL) for region 417, while on the ensuing
scan, it is fired, producing a 10.08 pL droplet for region 416.
[0112] As seen in a graph at the bottom most portion of the page,
this hypothetical scanning process produces expected aggregate
fills of 49.99 pL, 50.00 pL, 49.96 pL, 49.99 pL and 50.02 pL,
easily within the desired range of a target value (50.00 pL) plus
or minus 1/2 percent (49.75 pL-50.25 pL). Note that in this
example, nozzles were used to deposit ink into multiple target
regions on a generally concurrent basis for each scan, with
particular combinations of droplet volumes for each depicted region
(i.e., as identified by the graphics at numerals 413-417) planned
so that multiple droplets could be deposited in each target region
with many of the passes. The eight depicted passes together
correlate with particular sets (or a particular combination) of
droplet volumes that produce a fill volume within the specified
tolerance range (for example, combinations of droplets from nozzles
(1), (2), (2), (7) and (9) in the case of region 413), but other
sets of possible droplets could have been also possibly used. For
example, for region 413, it would have alternatively been possible
to use five droplets from nozzle (2) (5.times.10.01 pL=50.05 pL);
this alternative would have been inefficient, however, as
additional scans would have been required because (for example)
nozzle (3) (9.89 pL) could not have been extensively used on a
concurrent basis during this time (i.e., the result from five
droplets from this nozzle would have been 5.times.9.89=49.45 pL,
outside the desired tolerance range). In the example relayed by
FIG. 4B, the particular scans and their sequence were chosen so as
to use less print time, a smaller number of passes, smaller
geometric steps and potentially small aggregate geometric step
distance, or according to some other criteria. Note that the
depicted example is used for narrative discussion only, and that it
might be possible to further reduce the number of scans using the
presented droplet volumes to fewer than eight scans to obtain
target fill. In some embodiments, the scan process is planned in a
manner that avoids a worst-case scenario with the number of scans
required (e.g., one scan per row of target regions with the
printhead rotated by ninety degrees). In other embodiments, this
optimization is applied to a degree based on one or more maximums
or minimums, for example, planning scans in a manner that results
in the fewest number of scans possible given all possible droplet
combinations for each target region for a given ink.
[0113] FIG. 4C presents a diagram similar to FIG. 4B, but which
corresponds to the use of different nozzle-drive waveforms for each
nozzle. As should be appreciated, in an ink jet printhead, ink is
typically ejected using a piezoelectric actuator, which expands and
contracts a fluid reservoir in order to expel ink from a respective
print nozzle. Ink is usually maintained in the reservoir under
slight negative pressure to avoid flooding the nozzle plate, with a
voltage pulse applied to the actuator to eject a droplet with
properties that depend on the size and shape of the voltage pulse.
Different pulse characteristics can thus result in different
volume, velocity and other characteristics of the ejected droplet.
In FIG. 4C, it should be assumed that different preplanned voltage
pulse waveforms have been determined to produce a series of
different droplet volumes (and associated droplet volume
probability distributions). Scanning is generally referenced by
numeral 441, with each of scans 443-447 occurring in a direction
perpendicular to bars 443-447; within each scan bar (e.g., box 443)
a numeral designation represents a particular printhead nozzle and
a letter designation represents a different waveform for the
particular nozzle. For example, reference "1-A" denotes a first
drive waveform "A" used for an actuator for nozzle (1) whereas
reference "1-0" denotes a third drive waveform "C" used for the
actuator for nozzle (1). Note that during a calibration procedure,
any desired number of waveforms can be tested to select a waveform
that produces an expected droplet volume (or set of multiple
droplets) matching an ideal target droplet volume. In FIG. 4C, for
example, testing of multiple waveforms for nozzle (1) might yield a
result that two specific waveforms (e.g., "A" and "C" produce
expected droplet volumes close to a desired 10.00 pL mean, e.g.,
9.94 pL and 10.01 pL means, respectively). That is, if an expected
mean cannot be produced through testing which exactly matches an
ideal droplet volume (e.g., 10.00 pL), then two or more waveforms
can be selected which bracket the desired idealized volume, for
example, 9.94 pL/10.01 pL, 9.99 pL/10.01 pL, 10.03 pL/9.95 pL, and
9.95/10.04 pL as depicted for nozzles (1), (3), (4) and (5). Much
as with the examples above, different droplets can then be combined
using the different nozzle drive waveforms to specifically plan
aggregate fills for each target region which are within desired
tolerance. Note that for the example of FIG. 4C, it is not
necessary to offset the printhead assembly between scans to achieve
these combinations; in many embodiments, however, the use of
multiple nozzle waveforms can be combined with
fractional-swath-width offsets to develop many possible droplet
combinations that can be used to produce target fills using a
minimal number of scans (and thus, minimal per-substrate print
time). In FIG. 4C, the depicted process is seen to produce
hypothetical fills that are very tightly grouped, e.g., 49.99
pL-50.02 pL expected fill volumes.
[0114] FIG. 4D presents an illustrative view 471 of a printhead 474
and two related diagrams seen below the printhead 474, in analogy
to FIG. 4A, but here having nozzles that are not specially aligned
to specific wells. The printhead is optionally used in an
embodiment that provides non-fixed geometric steps of printhead
relative to substrate, and so numeral 472 is used to denote offsets
that align specific printhead nozzles (e.g., 16 total nozzles with
nozzles (1)-(5) depicted in the FIG.) with different target regions
(two in this example, 474 and 475). Following again the
hypothetical of FIG. 4A, if nozzles (1)-(16) respectively produce
expected droplet volumes of 9.80, 10.01, 9.89, 9.96, 10.03, 9.99,
10.08, 10.00, 10.09, 10.07, 9.99, 9.92, 9.97, 9.81, 10.04 and 9.95
pL of fluidic ink, and if it is desired to deposit 50.00 pL per
target region, .+-.0.5 percent of this value, the printhead could
be used to deposit droplets in three passes or scans, respectively
using geometric steps of 0, -1, and -3, and firing one or two drops
into each target region per scan. This would result in total fill
values per region of 49.93 and 50.10, as depicted in the FIG, which
is again clearly within the desired tolerance range of 49.75-50.25
pL for each of the depicted target regions. Thus, as seen, the same
approach applies equally to the case of nozzles that are not
aligned to the wells, and combining of droplets in a deliberate
manner that depends on respective droplet volumes and the desired
fill for each target region can be used to achieve precise,
regulated fills. Furthermore, just as described above for the
hypothetical of FIG. 4A, this same FIG. can be used to represent
nozzle drive waveform variation and/or the use of multiple
printheads. For example, if the nozzle references (1)-(16) refer to
droplet volumes for a single nozzle produced by sixteen different
drive waveforms (i.e., using waveforms 1-16), the per-region fill
volumes can in theory be obtained simply by using different drive
waveforms. One of ordinary skill in the art can see that the same
approaches as described above with reference to FIGS. 4B-4C also
apply equally to the case of nozzles that are not specially aligned
to the wells, i.e., with groups of one or more nozzles being used
for concurrent droplet deposition into respective wells. Note
finally that FIGS. 4A-D also represent relatively simple examples;
in a typical application, there may be hundreds to thousands of
nozzles, and millions of target regions. For example, in an
application where the disclosed techniques are applied in the
fabrication of each pixel color component of a current
high-definition television screen (e.g., pixels each having red,
green and blue wells, with pixels arranged in 1080 horizontal lines
of vertical resolution and 1920 vertical lines of horizontal
resolution), there are approximately six million wells that might
receive ink (i.e., three overlapping arrays each of two million
wells). Next generation televisions are expected to increase this
resolution by a factor of four or more. In such a process, to
improve the speed of printing, printheads may use thousands of
nozzles for printing, e.g., there will typically be a staggering
number of possible print process permutations. The simplified
examples presented above are used to introduce concepts but it
should be noted that, given the staggering numbers presented in a
typical combination, permutations represented by a real-life
television application are quite complex, with print optimization
typically being applied by software and using complex mathematical
operations. FIGS. 5-7 are used to provide non-limiting examples of
how these operations can be applied.
[0115] An exemplary process for planning printing is introduced by
FIG. 5. This process and associated methods and devices are
generally referenced using the numeral 501.
[0116] More specifically, the droplet volume for each nozzle (and
for each nozzle for each waveform if multiple drive waveforms are
applied) is specifically determined (503). Such measurement can be
performed for example using a variety of techniques, including
without limitation an optical-imaging or laser-imaging or
non-imaging device built into a printer (or a factory-resident
machine) that measures droplets during flight (e.g., during a
calibration printing operation or a live printing operation) and
that calculates volume with precision based on droplet shape,
velocity, trajectory and/or other factors. In specific embodiments,
as mentioned, each measurement is only approximately accurate, as
even droplet volume from a single nozzle produced using a single
drive waveform can vary from droplet-to-droplet. To this effect,
droplet measurement techniques can be used to develop a statistical
model for droplet from each nozzle and for each nozzle-waveform
combination, each specific droplet volumes expressed as a mean
expected droplet volume from a given nozzle and a given nozzle
drive waveform. Other measurement techniques can also be used
including printing ink and then using post-printing imaging or
other techniques to calculate individual droplet volumes based on
pattern recognition. Alternatively, identification can be based on
data supplied by a printer or printhead manufacturer, for example,
based on measurements taken at a factory well prior to the
fabrication process and supplied with a machine (or on-line). In
some applications, droplet volume characteristics can change over
time, for example, dependent on ink viscosity or type, temperature,
nozzle clogging or other degradation, or because of other factors;
therefore, in one embodiment, droplet volume measurement can be
dynamically performed in situ, for example, upon power up (or at
occurrence of other types of power cycle events), with each new
printing of a substrate, upon expiration of a predetermined time or
on another calendared or uncalendared basis. In one embodiment,
such measurement is continuously performed on an intermittent
basis, as referenced earlier, by performing measurements for a
moving window of print nozzles and nozzle-waveform combinations
each time a new flat panel substrate is loaded or unloaded, to
obtain dynamic updates. As denoted by numeral 504, this data
(measured or provided) is stored for use in an optimization
process.
[0117] In addition to per-nozzle (and optionally,
per-drive-waveform) droplet volume data, information (505) is also
received concerning desired fill volume for each target region.
This data can be a single target fill value to be applied to all
target regions, respective target fill values to be applied to
individual target regions, rows of target regions or columns of
target regions, or values broken down in some other manner. For
example, as applied to fabricating a single "blanket" layer of
material that is large relative to individual electronic device
structures (such as transistors or pathways), such data could
consist of a single thickness to be applied to an entire layer
(e.g., which software then converts to a desired ink fill volume
per target region based upon predetermined conversion data specific
to the pertinent ink); in such a case, the data could be translated
to a common value for each "print cell" (which in this case might
be equivalent to each target region or consist of multiple target
regions). In another example, the data could represent a specific
value (e.g., 50.00 pL) for one or more wells, with range data
either being provided or understood based on context. As should be
understood from these examples, the desired fill can be specified
in many different forms including, without limitation, as thickness
data or volume data. Additional filtering or processing criteria
can also optionally be provided to or performed by a receiving
device; for example, as referenced earlier, random variation in
fill volumes could be injected by a receiving device into one or
more provided thickness or volume parameters to render line effect
invisible to the human eye in a finished display. Such variation
could be performed in advance (and provided as respective,
per-target region fills that vary from region to region) or could
be independently and transparently derived from a recipient device
(e.g., by a downstream computer or printer).
[0118] Based on the target fill volumes for each region and
individual droplet volume measurements (i.e., per-printhead nozzle
and per nozzle drive waveform), the process then optionally
proceeds to calculate combinations of various droplets that sum to
a fill volume within the desired tolerance range (i.e., per process
block 506). As mentioned, this range can be provided with target
fill data or can be "understood" based on context. In one
embodiment, the range is understood to be .+-.one percent of a
provided fill value. In another embodiment, the range is understood
to be .+-.one-half percent of a provided fill value. Clearly, many
other possibilities exist for tolerance ranges, whether larger or
smaller than these exemplary ranges.
[0119] At this point, an example would help convey one possible
method for calculating sets of possible droplet combinations.
Returning to simplified examples described earlier, it should be
assumed that there are five nozzles, each having respective
hypothetical mean droplet volumes of 9.80 pL, 10.01 pL, 9.89 pL,
9.96 pL, and 10.03 pL, and that it is desired to deposit a target
volume of 50.00 pL, .+-.1/2 percent (49.75 pL-50.25 pL) in five
wells. This method begins by determining the number of droplets
that can be combined to reach but not exceed the tolerance range
and, for each nozzle, the minimum and maximum number of droplets
from that nozzle that can be used in any acceptable permutation.
For example, in this hypothetical, no more than a single droplet
from nozzle (1), two droplets from nozzle (3) and four droplets
from nozzle (4) would be expected to be usable in any combination,
given the minimum and maximum droplet volumes of the nozzles under
consideration. This step limits the number of combinations that
need be considered. Armed with such constraints on set
consideration, the method then considers combinations of the
required number of droplets (five in this example), taking each
nozzle in turn. For example, the method first starts with nozzle
(1) with an understanding that the only acceptable combinations
involving this nozzle, given calculated means, feature one drop or
fewer from this nozzle. Considering combinations involving a single
droplet from this nozzle, the method then considers minimum and
maximum drop volumes of the other respective nozzle-waveform
combinations under consideration; for example, given that nozzle
(1) is determined to produce a mean droplet volume of 9.80 pL for a
given drive waveform, no more than one droplet from nozzle (3) or
two droplets from nozzle (4) can be used in combination with a
droplet from nozzle (1) to reach the desired tolerance range. The
method proceeds to consider combinations of the droplet from nozzle
(1) and a combination of four droplets from other nozzles, for
example, four from nozzles (2) or (5), three droplets from nozzle
(2) and one droplet from nozzle (4), and so on. Considering
combinations involving nozzle (1) only, to simplify discussion, any
of the following different combinations involving the first nozzle
could potentially be used within the tolerance range:
{1(1),4(2)}, {1(1),3(2),1(4)}, {1(1),3(2),1(5)},
{1(1),2(2),1(4),1(5)}, {1(1),1(2),1(3),2(5)},
{1(1),1(2),1(4),2(5)}, {1(1),1(2),3(5)}, {1(1),1(3),3(5)},
{1(1),2(4),2(5)}, {1(1),1(4),3(5)} and {1(1),4(5)}.
[0120] In the mathematical expression set forth above, the use of
brackets denotes a set of five droplets representing droplet volume
combinations from one or more nozzles, with each parenthetical
within these brackets identifying the specific nozzle; for example,
the expression {1(1),4(2)} represents one droplet from nozzle (1)
and four droplets from nozzle (2), 9.80 pL+(4.times.10.01 pL)=49.84
pL, which is expected to produce a composite fill within the
specified tolerance range. In effect, the method in this example
considers the highest number of droplets from the nozzle (1) that
can be used to produce the desired tolerance, evaluates
combinations involving this highest number, reduces the number by
one, and repeats the process of consideration, based on the various
means. In one embodiment, this process is repeated to determine all
possible sets of non-redundant droplet combinations that can be
used. When combinations involving nozzle (1) have been fully
explored, the method proceeds to combinations involving nozzle (2)
but not nozzle (1) and repeats the process, and so forth, testing
the combined mean of each possible nozzle combination to determine
whether it can achieve the desired tolerance range. In this
embodiment for example, the method has determined that combinations
of two or more droplets from nozzle (1) cannot be used, so it
begins with consideration of combinations involving one droplet
from nozzle (1) and four droplets from other nozzles in various
combination. The method in effect evaluates whether four droplets
of nozzle (2) can be used, determines that it can {1(1),4(2)}, then
drops this number by one (three droplets from nozzle 2), and
determines that this number can be used in combination with a
single droplet from nozzles (4) or (5), yielding acceptable sets of
{1(1),3(2),1(4)}, {1(1),3(2),1(5)}. The method then further reduces
the number of acceptable droplets from nozzle (2) by one, and
evaluates combinations of {1(1),2(2) . . . }, and then {1(1),1(2) .
. . }, and so forth. Once combinations involving nozzle (2) have
been considered in combination with a droplet from nozzle (1), the
method then takes the next nozzle, nozzle (3), and considers
combinations of nozzle (1) involving this nozzle but not nozzle (2)
and determines that the only acceptable combination is given by
{1(1),1(3),3(5)}. Once all combinations involving a droplet from
nozzle (1) have been considered, the method then considers
5-droplet combinations involving droplets from nozzle (2) but not
nozzle (1), e.g., {5(2)}, {4(2),1(3)}, {4(2),1(4)}, {4(2),1(5)},
{3(2),2(3)}, {3(2),1(3),1(4)} and so on.
[0121] It is also noted that the same approach applies equally in
the case that the nozzles can be driven by multiple firing
waveforms (each generating different droplet volumes). These
additional nozzle-waveform combinations simply provide additional
droplet volume means for use in selecting the set of droplet
combinations that are within the target volume tolerance range. The
use of multiple firing waveforms can also improve the efficiency of
the printing process by making available a larger number of
acceptable droplet combinations and thereby increasing the
likelihood of concurrently firing droplets from a large fraction of
the nozzles on each pass. In the case that nozzles have multiple
driving waveforms and geometric steps are also used, the selection
of a set of droplet combinations will incorporate both the
geometric offset to be used in a given scan and the nozzle waveform
that will be used for each nozzle.
[0122] Note that, for purposes of narration, a brute force approach
has been described and that a staggering number of possible
combinations will typically be presented in practice, e.g., where
the number of nozzles and target regions are large (e.g., more than
128 each). However, such computation is well within the
capabilities of a high-speed processor having appropriate software.
Also, note that there exist various mathematical shortcuts that can
be applied to reduce computation. For example, in a given
embodiment, the method can exclude from consideration any
combination that would correspond to use of less than half of the
available nozzles in any one pass (or alternatively, can limit
consideration to combinations that minimize volume variance across
target regions (TR) in any single pass). In one embodiment, the
method determines only certain sets of droplet combinations that
will produce acceptable composite fill values; in a second
embodiment, the method exhaustively calculates every possible set
of droplet combinations that will produce acceptable composite fill
values. It is also possible to use an iterative approach where, in
multiple repetitions, a print scan is performed, and volumes of ink
still remaining to be deposited to reach the desired tolerance
range(s) are considered for purposes of optimizing a next,
succeeding scan. Other processes are also possible.
[0123] Note also that as an initial operation, if the same fill
value (and tolerance) applies to each target region, it suffices to
compute the combinations once (e.g. for one target region) and to
store these possible droplet combinations for initial use with each
target region. This is not necessarily the case for all set
computation methods and for all applications (e.g., in some
embodiments, the acceptable fill range can vary for every target
region).
[0124] In yet another embodiment, the method uses mathematical
shortcuts, such as approximations, matrix math, random selection or
other techniques, to determine sets of acceptable droplet
combinations for each target region.
[0125] As denoted by process block 507, once sets of acceptable
combinations have been determined for each target region, the
method then effectively plans scanning in a way that correlates
with a particular set (or droplet combination) for each target
region. This particular set selection is performed in a manner
where the particular set (one for each target region) represents
process savings through the use of at least one scan to deposit
droplet volumes concurrently in multiple target regions. That is to
say, in an ideal case, the method selects one particular set for
each target region, where the particular set represents particular
droplet volume combinations in a manner where a printhead can
simultaneously print into multiple rows of target regions at once.
The particular droplet choices in the selected combinations
represent a print process matching a predetermined criterion, such
as minimal printing time, minimal number of scans, minimal sizes of
geometric steps, minimal aggregate geometric step distance, or
other criteria. These criteria are represented by numeral 508 in
FIG. 5. In one embodiment, optimization is pareto optimal, with the
particular sets selected in a manner that minimizes each of number
of scans, aggregate geometric step distance and sizes of geometric
steps, in that order. Again, this selection of particular sets can
be performed in any desired manner, with several non-limiting
examples further discussed below.
[0126] In one example, the method selects a droplet from each set
for each target region corresponding to a particular geometric step
or waveform applied to all regions being considered, and it then
subtracts this droplet from available sets and determines a
remainder. For example, if choices of available sets is initially
{1(1),4(2)}, {1(1),3(2),1(4), {1(1),3(2),1(5)},
{1(1),2(2),1(4),1(5)}, {1(1),1(2),1(3),2(5)},
{1(1),1(2),1(4),2(5)}, {1(1),1(2),3(5)}, {1(1),1(3),3(5)},
{1(1),2(4),2(5)}, {1(1),1(4),3(5)} and {1(1),4(5)} for each of five
target regions, this embodiment would subtract one droplet (1) from
this initial set to obtain a remainder specific to a first of the
five target regions, one droplet (2) from the initial set to obtain
a remainder specific to a second of the five target regions, one
droplet (3) from the initial set to obtain a remainder specific to
the third of the target regions, and so on. This evaluation would
represent a geometric step of "0." The method would then evaluate
the remainders and repeat the process for other possible geometric
steps. For example, if a geometric step of "-1" was then applied,
the method would subtract one droplet (2) from the initial set for
the first of the five target regions, one droplet (3) from the
initial set from the second of the target regions and so forth, and
evaluate the remainders.
[0127] In selecting a particular geometric step (and nozzle firing)
as part of print planning, the method analyzes the various
remainders according to a scoring or priority function, and selects
the geometric step with the best score. In one embodiment, scoring
is applied to more heavily weight a step that (a) maximizes the
number of nozzles used simultaneously and (b) maximizes the minimum
number of combinations remaining for affected target regions. For
example, a scan that used droplets from four nozzles during a scan
would be more heavily favored than one that used droplets from just
two nozzles. Similarly, if using the subtraction process discussed
above in considering different steps resulted in 1, 2, 2, 4 and 5
remaining combinations for respective target regions for one
possible step, and 2, 2, 2, 3 and 4 remaining combinations for
respective target regions for a second possible step, the method
would more heavily weight the latter (i.e., the largest minimum
number is "2"). In practice, suitable weighting coefficients can be
empirically developed. Clearly, other algorithms can be applied,
and other forms of analysis or algorithmic shortcuts can be
applied. For example, matrix math can be used (e.g., using an
eigenvector analysis) to determine particular droplet combinations
and associated scanning parameters that satisfy predetermined
criteria. In another variation, other formulae can used, for
example, that factor in use of planned random fill variation to
mitigate line effect.
[0128] Once the particular sets and/or scan paths have been
selected per numeral 507, printer actions are sequenced, per
numeral 509. For example, it is noted that a set of droplets can
typically be deposited in arbitrary order if aggregate fill volumes
were the only consideration. If the printing is planned to minimize
the number of scans or passes, the order of geometric steps can
also be selected to minimize printhead/substrate motion; for
example, if acceptable scans in a hypothetical example involve
relative geometric steps of {0, +3, -2, +6 and -4}, these scans can
be reordered to minimize printhead/substrate motion and thus
further improve printing speed, for example, ordering the scans as
a sequence of steps of {0, +1, +2, 0 and +4}. Compared to the first
sequence of geometric steps {0, +3, -2, +6 and -4}, involving an
aggregate step increment distance of 15, the second sequence of
geometric steps {0, +1, +2, +0 and +4} involves an aggregate step
increment distance of 7, facilitating faster printer response.
[0129] As denoted by numeral 510, for applications involving large
numbers of rows of target regions which are to receive the same
target fill, a particular solution might also be expressed as a
repeatable pattern which is then reproduced over subset areas of
the substrate. For example, if in one application there were 128
nozzles arranged in a single row and 1024 rows of target regions,
it is expected than an optimal scan pattern could be determined for
a subset area of 255 rows of target regions or fewer; thus, the
same print pattern could be applied to four or more subset areas of
the substrate in this example. Some embodiments therefore take
advantage of repeatable patterns as expressed by optional process
block 510.
[0130] Note the use of non-transitory machine-readable media icon
511; this icon denotes that the method described above is
optionally implemented as instructions for controlling one or more
machines (e.g., software or firmware for controlling one or more
processors). The non-transitory media can include any
machine-readable physical medium, for example, a flash drive,
floppy disk, tape, server storage or mass storage, dynamic random
access memory (DRAM), compact disk (CD) or other local or remote
storage. This storage can be embodied as part of a larger machine
(e.g., resident memory in a desktop computer or printer) or on an
isolated basis (e.g., flash drive or standalone storage that will
later transfer a file to another computer or printer). Each
function mentioned in reference to FIG. 5 can be implemented as
part of a combined program or as a standalone module, either stored
together on a single media expression (e.g., single floppy disk) or
on multiple, separate storage devices.
[0131] As represented by numeral 513 in FIG. 5, once the planning
process is completed, data will have been generated that
effectively represent a set of printer instructions, comprising
nozzle firing data for the printhead and instructions for relative
movement between printhead and substrate to support the firing
pattern. This data, effectively representing the scan path, scan
order and other data, is an electronic file (513) that can either
be stored for later use (e.g., as depicted by non-transitory
machine-readable media icon 515), or immediately applied to control
a printer (517) to deposit ink representing the selected
combinations (particular sets of nozzles per target region). For
example, the method can be applied on a standalone computer, with
the instruction data being stored in RAM for later use, or for
download to another machine. Alternatively, the method could be
implemented and dynamically applied by a printer to "inbound" data,
to automatically plan scanning dependent on printer parameters
(such as nozzle-droplet-volume data). Many other alternatives are
possible.
[0132] FIGS. 6A-6D provide diagrams that generally relate to the
nozzle selection and scan planning process. Note again that scans
do not have to be continuous or linear in direction or speed of
movement and do not have to proceed all the way from one side of a
substrate to another.
[0133] A first block diagram is denoted by numeral 601 in FIG. 6A;
this FIG. represents many of the exemplary processes discussed in
the previous narration. The method first begins by retrieving from
memory sets of acceptable droplet volume combinations for each
target region, per numeral 603. These sets can be dynamically
computed or could have been computed in advance, for example, using
software on a different machine. Note the use of a database icon,
605, representing either a local-stored database (for example,
stored in local RAM) or a remote database. The method then
effectively selects a particular one of the acceptable sets for
each target region (607). This selection in many embodiments is
indirect, that is, the method processes the acceptable combinations
to select particular scans (for example, using the techniques
referenced above), and it is these scans that in effect define the
particular sets. Nevertheless, by planning scanning, the method
selects particular sets of combinations for each respective target
region. This data is then used to order scans and finalize motion
and firing patterns (609) as referenced above.
[0134] The middle and right of FIG. 6A illustrate a few process
options for planning scan paths and nozzle firing patterns and, in
effect, selecting a particular droplet combination for each target
region in a manner that represents printing optimization. As
denoted by numeral 608, the illustrated techniques represent but
one possible methodology for performing this task. Per numeral 611,
analysis can involve determining minimum and maximum use of each
nozzle (or nozzle-waveform combination, in those instances in which
a nozzle is driven by more than one firing waveform) in acceptable
combinations. If a particular nozzle is bad (e.g., does not fire,
or fires at an unacceptable trajectory), that nozzle can optionally
be ruled out for use (and for consideration). Second, if a nozzle
has either a very small or very large expected droplet volume, this
may limit the number of droplets that can be used from that nozzle
in acceptable combinations; numeral 611 represents advance
processing that reduces the number of combinations that will be
considered. As represented by numeral 612, processes/shortcuts can
be used to limit the number of sets of droplet combinations that
will be evaluated; for example, instead of considering "all"
possible droplet combinations for each nozzle, the method can be
configured to optionally rule out combinations involving fewer than
half of the nozzles (or another quantity of the nozzles, such as
1/4), combinations where more than one-half of the droplets come
from any particular nozzle-waveform, or combinations representing a
high variance in droplet volume or representing a large variance in
simultaneous droplet volumes applied across target regions. Other
metrics can also be used.
[0135] Subject to any limitations to the number of sets to be
computed/considered, the method then proceeds to calculate and
consider acceptable droplet combinations, per numeral 613. As
referenced by numerals 614 and 615, various processes can be used
to plan scanning and/or otherwise effectively select a particular
set of droplet volumes per target region (TR). For example, as
introduced above, one method assumes a scan path (e.g., particular
geometric step selection) and then considers the maximum of the
fewest remaining set choices across all TRs being considered; the
method can favorably weight those scan paths (alternative geometric
steps) that maximize ability of ensuing scans to cover multiple
target regions at-once. Alternatively or in addition, the method
can favorably weight geometric steps that maximize the number of
nozzles used at once; returning to the simplified five-nozzle
discussion above, a scan that would apply five nozzles to a target
region can be weighted more favorably that a scan or pass that
would fire only three nozzles in a pass. Thus, in one embodiment,
the following algorithm can be applied by software:
S.sub.i=[w.sub.1f{max{#RemCombs.sub.TR,i}+w.sub.2f{max{#Simult.Nozzles.s-
ub.i}].
In this exemplary equation, "i" represents the particular choice of
geometric step or scan path, w.sub.1 represents one
empirically-determined weighting, w.sub.2 represents a second
empirically-determined weighting, #RemCombs.sub.TR,i represents the
number of remaining combinations per target region assuming scan
path i, and #Simult.Nozzles.sub.i represents a measure of the
number of nozzles used for scan path i; note that this latter value
need not be an integer, e.g., if fill values per TR are varied (for
example, to hide potentially visible artifacts in a display
device), a given scan path could feature varying numbers of nozzles
used per column of target region, e.g., an average or some other
measure can be used. Note also that these factors and the
weightings are illustrative only, i.e., it is possible to use
different weighting and/or considerations than these, use only one
variable but not the other, or to use a completely different
algorithm.
[0136] FIG. 6A also shows a number of further options. For example,
consideration of droplet sets in one implementation is performed
according to an equation/algorithm, per numeral 617. A comparative
metric can be expressed as a score that can be calculated for each
possible alternative geometric step in order to select a particular
step or offset. For example, another possible algorithmic approach
involves an equation with three terms, as shown below:
S.sub.i=W.sub.v(S.sub.v,min/S.sub.v)+W.sub.e(S.sub.e/S.sub.e,max)+W.sub.-
d(S.sub.d,min/S.sub.d),
where the terms based on S.sub.v, S.sub.e and S.sub.d are scores
respectively computed for variance in deposited droplet volumes,
efficiency (maximum nozzles used per-pass) and variation in
geometric step. In one formulation, the term
"(S.sub.v,min/S.sub.v)" seeks to minimize variation in fill volume
from a per-pass target value in a manner dependent on the total
number of droplets.
[0137] Numeral 619 in FIG. 6A represents that, in one embodiment,
droplet combination selection can be performed using matrix math,
for example, through the use of mathematical techniques that
simultaneously consider all droplet volume combinations and that
use a form of eigenvector analysis to select scan paths.
[0138] As represented by numeral 621, an iterative process can be
applied to reduce the number of considered droplet combinations.
That is, for example, as represented by the earlier narration of
one possible processing technique, geometric steps can be computed
one at a time. Each time a particular scan path is planned, the
method determines the incremental volume still needed in each
target region under consideration, and then proceeds to determine a
scan or geometric offset best suited to producing aggregate volumes
or fill volumes per target region that are within desired
tolerances. This process can then be repeated as respective
iterations until all scan paths and nozzle firing patterns have
been planned.
[0139] Per numeral 622, use of a hybrid process is also possible.
For example, in one embodiment, a first set of one or more scans or
geometric steps can be selected and used, for example, based on
minimized deviation in per-nozzle droplet volume and maximum
efficiency (e.g., nozzles used per scan). Once a certain number of
scans have been applied, e.g., 1, 2, 3 or more, a different
algorithm can be invoked, for example, that maximizes nozzles used
per scan (e.g., irrespective of deviation in applied droplet
volumes). Any of the specific equations or techniques discussed
above (or other techniques) can optionally be applied one of the
algorithms in such a hybrid process, and other variations will no
doubt occur to those skilled in the art.
[0140] Note that as referenced earlier, in an exemplary
display-manufacturing process, per-target region fill volumes can
have planned randomization deliberately injected (623) to mitigate
line effect. In one embodiment, a generator function (625) is
optionally applied to deliberately vary target fill volumes (or to
skew aggregate volumes produced for the droplet combination for
each target region) in a manner that achieves this planned
randomization or other effect. As noted earlier, in a different
embodiment, it is also possible for such variation to be factored
into target fill volumes and tolerances, i.e., before droplet
combinations are even analyzed, and to apply, for example,
algorithmic approaches as indicated earlier to meet
per-target-region fill requirements. As will be discussed below in
connection with FIG. 8B, it is also possible to consider
randomization as a probability distribution and to plan droplet
measurements (and development of per-nozzle, per-waveform
distributions) dependent on such randomization in a manner
calculated to meet composite fill tolerances. For example, if
randomization of planned fills is to vary normally between .+-.0.2%
of target composite fill, and specified tolerance is .+-.0.5% of
target composite fill, then droplet measurement for each nozzle and
each nozzle-waveform combination can be planned to produce a
3.sigma. value for each nozzle/nozzle-waveform that is within 0.3%
of target (0.2%+0.3%=0.5%).
[0141] FIG. 6B and numeral 631 refer to a more detailed block
diagram related to the iterative droplet combination selection
process referenced above. As represented by numerals 633 and 635,
possible droplet combinations are once again first identified,
stored, and retrieved as appropriate, for evaluation by software.
For each possible scan path (or geometric step), per numeral 637,
the method stores a footprint identifying the scan path (639) and
nozzles applied, and it subtracts per nozzle firings from the
per-target region sets (641) to determine remainder combinations
for each target region (643). These are also stored. Then, per
numeral 645, the method evaluates the stored data according to
predefined criteria. For example, as indicated by optional
(dashed-line) block 647, a method that seeks to maximize the
minimum number of droplet combinations across all pertinent target
regions can assign a score indicating whether the just-stored
combination is better than, or worse than, previously considered
alternatives. If the specified criteria are met (645), the
particular scan or geometric step can be selected, with the
remainder combinations being stored or otherwise flagged for use in
consideration of another printhead/substrate scan or pass, as
represented by numerals 649 and 651. If the criteria are not met
(or consideration is incomplete), another step can be considered
and/or the method can adjust consideration of the geometric step
under consideration (or a previously selected step), per numeral
653. Again, many variations are possible.
[0142] It was noted earlier that the order in which scans are
performed or droplets are deposited is unimportant to ultimate
composite fill value for each target region. While this is true, to
maximize printing speed and throughput, scans are preferably
ordered so as to result in the fastest or most efficient printing
possible. Thus, if not previously factored into geometric step
analysis, the sorting and/or ordering of scans or steps can then be
performed. This process is represented by FIG. 6C.
[0143] In particular, numeral 661 is used to generally designate
the method of FIG. 6C. Software, for example, running on a suitable
machine, causes a processor to retrieve (663) the selected
geometric steps, particular sets, or other data that identifies the
selected scan paths (and as appropriate, nozzle firing patterns,
which can further include data specifying which of a plurality of
firing waveforms is to be used for each droplet, in those
embodiments in which certain nozzles can be driven by more than one
firing waveforms). These steps or scans are then sorted or ordered
in a manner that minimizes incremental step distance. For example,
again referring to the hypothetical example introduced earlier, if
the selected steps/scan paths were {0, +3, -2, +6 and -4}, these
might be reordered to minimize each incremental step and to
minimize overall (aggregate) distance traversed by a motion system
in between scans. Without reordering for example, the incremental
distance between these offsets would be equivalent to 3, 2, 6 and 4
(such that the aggregate distances traversed would be "15" in this
example). If the scans (e.g., scans "a," "b," "c," "d" and "e")
were reordered in the manner described (e.g., in order of "a," "c,"
"b," "e" and "d"), the incremental distances would be +1, +2, 0 and
+4 (such that the aggregate distances traversed would be "7"). As
denoted by numeral 667, at this point, the method can assign motion
to a printhead motion system and/or a substrate motion system, and
can reverse the order of nozzle firing (e.g., if alternating,
reciprocal scan path directions are used, per numerals 339 and 340
of FIG. 3B). As noted earlier and represented by optional process
block 669, in some embodiments, planning and/or optimization can be
performed for a subset of the target regions, with a solution then
applied on a spatially-repeating basis over a large substrate.
[0144] This repetition is represented in part by FIG. 6D. As
implied by FIG. 6D, it should be assumed for this narration that it
is desired to fabricate an array of flat panel devices. A common
substrate is represented by numeral 681, and a set of dashed-line
boxes, such as box 683, represents geometry for each flat panel
device. A fiducial 685, preferably with two-dimensional
characteristics, is formed on the substrate and used to locate and
align the various fabrication processes. Following eventual
completion of these processes, each panel 683 will be separated
from the common substrate using a cutting or similar process. Where
the arrays of panels represent respective OLED displays, the common
substrate 681 will typically be glass, with structures deposited
atop the glass, followed by one or more encapsulation layers; each
panel will then be inverted such that the glass substrate forms the
light emitting surface of the display. For some applications, other
substrate materials can be used, for example, a flexible material,
transparent or opaque. As noted, many other types of devices can be
manufactured according to the described techniques. A solution can
be computed for a specific subset 687 of a flat panel 683. This
solution can then be repeated for other, similarly-sized subsets
689 of the flat panel 683, and the entire solution set can then
also be repeated for each panel to be formed from a given
substrate.
[0145] Reflecting on the various techniques and considerations
introduced above, a manufacturing process can be performed to mass
produce products quickly and at low per-unit cost. Applied to
display device manufacture, e.g., flat panel displays, these
techniques enable fast, per-panel printing processes, with multiple
panels produced from a common substrate. By providing for fast,
repeatable printing techniques (e.g., using common inks and
printheads from panel-to-panel), it is believed that printing can
be substantially improved, for example, reducing per-layer printing
time to a small fraction of the time that would be required without
the techniques above, all while guaranteeing per-target region fill
volumes are within specification. Again returning to the example of
large HD television displays, it is believed that each color
component layer can be accurately and reliably printed for large
substrates (e.g., generation 8.5 substrates, which are
approximately 220 cm.times.250 cm) in one hundred and eighty
seconds or less, or even ninety seconds or less, representing
substantial process improvement. Improving the efficiency and
quality of printing paves the way for significant reductions in
cost of producing large HD television displays, and thus lower
end-consumer cost. As noted earlier, while display manufacture (and
OLED manufacture in particular) is one application of the
techniques introduced herein, these techniques can be applied to a
wide variety of processes, computer, printers, software,
manufacturing equipment and end-devices, and are not limited to
display panels.
[0146] One benefit of the ability to deposit precise target region
volumes (e.g., well volumes) within tolerance is the ability to
inject deliberate variation within tolerance, as mentioned. These
techniques facilitate substantial quality improvements in displays,
because they provide the ability to hide pixelated artifacts of the
display, rendering such "line effect" imperceptible to the human
eye. FIG. 7 provides a block diagram 701, associated with one
method for injecting this variation. As with the various methods
and block diagrams discussed above, the block diagram 701 and
related method can optionally be implemented as software, either on
standalone media, or as part of a larger machine.
[0147] As denoted by numeral 703, variation can be made to depend
on specific criteria. For example, it is generally understood that
sensitivity of the human eye to contrast variation is a function of
brightness, expected viewing distance, display resolution, color
and other factors. As part of the specified criteria, a measure is
used to ensure that, given typical human-eye sensitivity to spatial
variation in contrast between colors at different brightness
levels, such variation will be smoothed in a manner not perceptible
to the human eye, e.g., varied in a manner that does not contribute
human-observable patterns in (a) any direction or directions, or
(b) between color components given expected viewing conditions.
This can be achieved optionally using a planned randomization
function, as referenced earlier. With minimum criteria specified,
the target fill volumes for each color component and each pixel can
be deliberately varied in a manner calculated to hide any visible
artifacts from the human eye, as represented by numeral 705. Note
that the right side of FIG. 7 represents various process options,
for example, that variation can be made independent across color
components (707), with tests for perceptible patterns applied on an
algorithmic basis to ensure that fill variations do not give rise
to perceptible patterns. As noted by numeral 707, for any given
color component (e.g., any given ink), variation can also be made
independent in each of multiple spatial dimensions, for example, x
and y dimensions (709). Again, in one embodiment, not only is the
variation smoothed for each dimension/color component so as to not
be perceptible, but any pattern of differences between each of
these dimensions is also suppressed so as to not be visible. Per
numeral 711, a generator function or functions can be applied to
ensure that these criteria are met, for example, by optionally
assigning minor target fill variations to each target region's fill
prior to droplet volume analysis, using any desired criteria. As
denoted by numeral 713, in one embodiment, the variation can
optionally be made to be random.
[0148] Per numeral 715, selection of the particular droplet
combinations for each target region are thus weighted in favor of
the selected variation criteria. This can be performed, as
mentioned, via target fill variation, or at the time of droplet
(e.g., scan path, nozzle-waveform combination, or both) selection.
Other methods for imparting this variation also exist. For example,
in one contemplated implementation, per numeral 717, the scan path
is varied in a nonlinear manner, effectively varying droplet
volumes across mean scan path direction. Per numeral 719, nozzle
firing patterns can also be varied, for example by adjusting firing
pulse rise time, fall time, voltage, pulse width or using multiple
signal levels per pulse (or other forms of pulse shaping
techniques) to provide minor droplet volume variations; in one
embodiment, these variations can be calculated in advance, and in a
different embodiment, only waveform variations that create very
minor volume variations are used, with other measures employed to
ensure that aggregate fills stay within specified tolerance ranges.
In one embodiment, for each target region, a plurality of droplet
combinations that fall within specified tolerance ranges are
computed and for each target region, the selection of which droplet
combination is used in that target region is varied (e.g. randomly
or based on a mathematical function) or a specific waveform (i.e.,
used to produce a droplet of given volume) is varied for one nozzle
that contributes to a selected combination, for example, providing
a slight volume variation, thereby effectively varying the droplet
volumes across the target regions but without varying planned scan
path. Such variation can be implemented along the scan path
direction over a row of target regions, over a column of target
regions, or over both.
[0149] FIGS. 8A-8B are used to explain methods for developing
statistical models used to evaluate droplets produced by each
nozzle or nozzle-waveform combination, and optionally to plan
combination of multiple droplets according to statistical means
determined from measurement. Note that in the examples of FIGS.
8A-8B, statistical models are built up for droplet volumes that can
be expected from a given nozzle-drive waveform pairing; in
alternate embodiments, similar statistical models can be built for
droplet velocity, droplet flight trajectory (e.g., relative to
normal) or for some other parameter.
[0150] A method depicted by FIG. 8 is generally designated by
numeral 801. Per function block 803, the method in this embodiment
begins with establishment of a specification range, for example, a
maximum and minimum fill for a given target region that will
receive ink. In examples presented earlier, this specification
range can be expressed as a mean plus or minus a specific value
(e.g., 50.00 pL .+-.0.5%), but nearly any range or expression of
acceptable values can be used. In one contemplated implementation,
the specified tolerance about a target is .+-.0.5%, but other
values such as without limitation 1.0% or 2.0% can also be used. In
keeping in line with earlier examples, for this embodiment, it will
be assumed that the target is 50.00 pL and that the tolerance is
.+-.0.5% (such that the acceptable range is 49.75 pL-50.25 pL), but
nearly any range or acceptance criteria can be used.
[0151] Per numeral 805, one or more candidate waveforms are
selected for each nozzle of a printhead or printhead assembly. In
an embodiment which uses a single drive waveform only (e.g., a
square voltage pulse of fixed voltage), there is no selection that
need be performed. In an embodiment which permits customized
waveform definition (see e.g., the discussion below associated with
FIG. 14B and FIGS. 15A-B), it is typically desired to evaluate
several selective waveforms representing a range of values (e.g.,
that can be interpolated between to ultimately identify plural
acceptable waveforms for each nozzle under consideration). This
selection can be performed according to a manual design process
(807) (i.e., with waveforms selected by a designer and
preprogrammed into a system), or a selection process can also be
automated, per numeral 809.
[0152] With one or more waveforms defined for each nozzle, droplet
measurements are planned for different droplet ejections for a
given nozzle-waveform pairing. For example, in one embodiment, a
number of droplets (e.g., "24") could be required for each nozzle,
providing a basis for evaluation of a measured statistical
distribution for the various droplets. A droplet measurement device
(e.g., imaging or non-imaging) can be used for this purpose, as
discussed herein. The 24 (or other number of) measurements could be
planned for at-once measurement, or for execution in respective or
multiple measurement cycles or iterations. Furthermore, in one
embodiment, a threshold number of measurements can be planned for
initialization, with the system then increasing a measurement
dataset over time to develop strong confidence regarding measured
statistical distribution; in an alternative embodiment, each
measurement can be planned for a moving window of time (e.g.,
remeasurement can be planned "every 3 hours" or measurement data
can be retained only for some limited interval of time used for
analysis); thus in one embodiment, each measurement is stored with
a time stamp to indicate its validity and expiration during
evaluation. Whichever measurement and/or measurement retention
criteria are used, the number of measurements can be planned for
each nozzle-waveform pairing for purposes of statistical analysis
(811). Advantageously, the respective measurements for droplets
resulting from each nozzle-waveform pairing are grouped as a set
and planned in a manner conducive to developing a known, common
distribution format with well-understood rules for mathematical
processing (including aggregation). For example, Normal,
Student's-T and Poisson distributions all have associated
parameters that can be combined according to known mathematical
processes in order to predict an aggregate or composite
distribution of fill volume that would result from a combination of
individual droplets (for respective nozzle-waveform pairings).
Measurement planning can thus be performed according to the
techniques described herein in order to develop droplet datasets
that permit statistical combination of droplets associated with
potentially-different nozzle-waveform pairings in order to achieve
precise fills within specified tolerance with a very high degree of
confidence (e.g., typically greater than 99% confidence, per
numeral 813). Accordingly, in one implementation of the described
techniques, droplet measurements for each nozzle-waveform
combination are planned to satisfy a set of parameters that
describe a known probability distribution type (e.g., number of
measurements or members n, statistical mean .mu. and standard
deviation a in the case of a Normal distribution), with measurement
data (once obtained) being stored for every possible nozzle and
nozzle-waveform pairing under consideration. In one embodiment,
planning and measurement can be iterative, i.e., repeated until
some desired criteria is reached, such as a minimum number of raw
measurements (n), a minimum number of measurements satisfying some
criteria, a minimum statistical spread (e.g., 3.sigma. value
meeting some criteria or desired confidence interval) or something
else. Whichever planning criteria is applied (e.g., by software),
the system including a droplet measurement device and printhead
assembly under consideration is then subjected to droplet
measurements, individually applied to each nozzle (and each drive
waveform for a given nozzle) to develop a statistically-significant
number of droplets measurements (815). As noted by numerals 817 and
819, such measurement is optionally performed in situ (e.g., in a
printer or OLED device fabrication apparatus, optionally in
presence of a controlled atmosphere), and in a manner sufficient to
develop statistical confidence. Collected data can then be stored
as an aggregate probability distribution (821) and/or optionally in
a manner that retains individual-measurement data (e.g., including
any time stamp used to window per-nozzle measurements).
[0153] As noted earlier, in one embodiment, droplets from
potentially-different nozzles and/or nozzle-drive-waveforms are
intelligently combined to obtain precise fills within a high degree
of statistical confidence. With probability distributions of a
common format being built for each nozzle, this combination (and
related planning) is effectuated by combining statistical
parameters for respective droplets in order to obtain precise fills
(and a well-understood probability distribution for each fill).
This is represented by numerals 823, 825 and 827 in FIG. 8A. More
specifically, droplet means are combined in one embodiment (e.g.,
corresponding to associated Normal distributions) to obtain a
predicted aggregate fill for a target region. As an example, if for
given first and second nozzle-waveform pairings mean droplet
volumes are measured as 9.98 pL and 10.03 pL, respectively, then
the mean aggregate fill based on one droplet associated with each
pairing is expected to be 20.01 pL
(.mu..sub.c=.mu..sub.1+.mu..sub.2, where Normal distributions are
involved); if in this same hypothetical example, standard
deviations are 0.032 pL (.sigma..sub.1) and 0.035 pL
(.sigma..sub.2) for the respective droplets, then the expected
standard deviation of the aggregate would be 0.0474 pL (i.e., based
on .sigma..sup.2.sub.c=.sigma..sup.2.sub.1+.sigma..sup.2.sub.2) and
the 3.sigma. value of the aggregate would be approximately 0.142 pL
(note that 1.sigma. equates to a confidence interval of
approximately 68.27%, while 3a equates to a confidence interval of
approximately 99.73%). Similar techniques can be applied to any
common distribution format via the treatment of droplet
measurements for each nozzle-waveform pairing as independent random
variables. Thus, techniques employed herein use droplet measurement
techniques to build a statistical model for each nozzle-waveform
pairing, to plan for various droplet combinations based on the
analysis of aggregated random variables as represented by box 825
(in the case of a Normal Distribution). Nearly any distribution
type can be used, provided the probability distribution type is
amenable to random variable aggregation. As indicated by function
block 827, in view of the desired specification range (e.g., 0.5%
about a target), the proposed combination is analyzed (e.g., by
software) to ensure that it satisfies the desired range with a high
degree of statistical confidence. For example, in one embodiment,
as mentioned, a desired confidence criteria (e.g., 3.sigma.,
representing a 99.73% confidence interval) is tested to ensure it
fits within the desired tolerance range. As an example, if desired
tolerance was 49.75-50.25 pL per the example introduced above, and
a possible droplet combination was represented as a mean of 49.89
pL with a 3.sigma. value equated to 0.07 pL, this would translate
to a 99% confidence that aggregate fill would lie between 49.82 pL
and 49.96 pL, well within the desired tolerance range, and the
particular combination would be deemed an acceptable combination
(per the droplet combination analysis functions described above).
Once again, any desired statistical criteria or goodness of fit
data can be used; in another embodiment, a 4.sigma. value
(99.993666%) or other value is analyzed relative to a desired
tolerance range. With acceptable droplet combinations determined
for each print well, specific, particular combinations of droplets
for each well (representing concurrent deposition by multiple
nozzles of a printhead assembly) can then be planned (see FIGS.
5-7), with ensuing printing (829) according to preplanned droplet
combinations for each well.
[0154] FIG. 8B provides another method 851 for accommodating
deliberate target region fill variation according to desired
criteria, and optionally, for also performing a variable number of
droplet measurements per nozzle (or per nozzle-waveform). More
specifically, the method can be implemented once again as
instructions stored on non-transitory machine-readable media that
control at least one processor to perform a set of functions
dictated by the instructions. A desired tolerance range is received
as a first operand, "x," per numeral 853; for example, it could be
specified that target region (e.g., pixel well) fill should be
within a given percentage of a target volume, e.g., 50.00 pL
.+-.0.5%. This tolerance range can be dictated by customer or
industry specification, as indicated by function 855. If it is
desired to plan for a deliberate variation of composite volume
(e.g., random variation within a small range to avoid line effect
or other noticeable artifacts in a finished display), that range is
received as a second operand "y," per function 857. Based on these
two operands, the method computes an effective allowable maximum
variation, standard deviation or other measure, per block 859. In
one embodiment, y is subtracted from x as depicted in the FIG. and
equated to the effective permitted fill variation; for example, if
the specification requires a fill within .+-.0.5% per the example
above, and a deliberate random variation of .+-.0.1% is to be
injected into a planned composite mean for a well fill (e.g., 49.95
pL-50-05 pL), then the permitted variation (prior to random
variation) could be restricted to 49.80 pL-50.20 pL, again using
the example of a target of 50.00 pL .+-.0.5%. Note that other
techniques are also possible, e.g., instead of simply subtracting
these measures, another set of bounding criteria could be used, for
example, based on mathematics associated with statistical
combination of standard deviation or variance for independent
random variables; many other criteria can be applied depending on
embodiment. Per block 859, the remaining range (e.g., .+-.0.4% of
target) can then be equated with a desired confidence interval
(e.g., a 3.sigma. interval or other statistical measure) and used
to assess whether possible droplet combinations are acceptable or
are to be excluded from consideration per the examples given
above.
[0155] Alternatively, as indicated by function blocks 861 and 863,
the remaining range and associated confidence interval can be
applied as criteria governing droplet measurement, in order to
build desired statistical models for each droplet. For example, as
represented by block 861, with a desired confidence interval
defined (e.g., 3.sigma.<=0.4% of target), a desired variance or
maximum permitted variance can be identified, effectively defining
a baseline number n of droplet measurements that need be taken for
each nozzle-waveform combination in a manner calculated to produce
statistical models meeting desired statistical criteria. For
example, whether or not fill is to be deliberately varied, the
desired effective tolerance range can be used to identify a number
of measurements (e.g., 24, 50 or another number) that are
calculated to produce statistical distributions that will be tight,
and thus lead to a large number of possible droplet combinations
that can be used for print planning. This calculation can be
applied in a number of ways, for example (a) identifying a
threshold number of measurements to be applied for each
nozzle-waveform combination (e.g., 24 droplet measurements for
each), or (b) identifying a threshold statistical criteria that
must be met for each nozzle-waveform combination (e.g., with a
potentially-variable number of measurements performed per nozzle or
nozzle-waveform until the threshold criteria, e.g., variance,
standard deviation, etc.). A drop test function is then applied
(863) using a droplet measurement device to perform measurement,
with various, exemplary functions represented by this test set
forth in function box 865. For example, n.sub.i droplets can be
measured for each nozzle (or nozzle-waveform pairing) "i" as
indicated in box 865. For each measurement, software controlling
the droplet measurement device can perform an incremental droplet
volume measurement (867) and store data in memory (869). Following
each measurement (or after a threshold number of measurements), the
collective measurements for a given nozzle-waveform combination can
be aggregated to compute (871) statistical parameters (e.g., mean
and standard deviation, .mu. and .sigma. in the case of a Normal
distribution-type) for the specific nozzle-waveform combination.
These values can then be stored in memory (873). Optionally, these
same or different measurement techniques can be applied to store
one or multiple droplet measurements for velocity, v, and x and y
dimension trajectory (.alpha. and .beta.), per function box 874. As
reflected by numeral 875, a decision criteria can then be applied
to determine whether sufficient measurements have been taken for
the given parameter (e.g., volume) for the particular
nozzle-waveform combination (i), or whether additional measurements
are desired. If additional measurements are needed, the method
loops per flow arrow 877 to procure such additional measurements,
i.e., so that a statistical model meeting desired robustness
criteria can be built for the particular nozzle-waveform
combination. If no additional measurements are needed, the method
can then proceed to the next nozzle 879, looping as appropriate per
flow arrow 881 until all nozzles and/or nozzle-waveform
combinations have been processed. Note that this order is not
required for all embodiments; for example, loops 877 and 881 can be
changed in order, e.g., with droplet measurements performed for
each nozzle in succession, with this process repeated until
sufficiently robust data has been obtained; such a process provides
certain advantages for example, for embodiments where droplet
measurement is to be incrementally performed, in a manner stacked
against other system processes (see, e.g., the discussion of FIG.
19, below). Once all nozzles or nozzle-waveform combinations have
been sufficiently tested, the method ends or temporarily halts if
run on an intermittent basis, per numeral 883. For the described
droplet testing, the obtained data including measured data and/or
calculated statistical parameters are stored in machine-readable
memory 885, for use for example in droplet combination planning as
discussed above. The procured data can also optionally be used in
other manner in lieu of or in addition to intelligent mixing of
different droplet volumes. In one embodiment, as mentioned, the
stored data can represent any desired droplet parameter including
one or more of droplet volume, droplet volume and/or droplet
trajectory, again, in the form of individual measurements and/or
statistical parameters.
[0156] FIGS. 9A-10C are used to provide simulation data for
techniques discussed here. FIGS. 9A-9C represent expected composite
fill volumes based on five droplets, whereas FIGS. 10A-10C
represent expected composite fill volumes based on ten droplets.
For each of these figures, the letter designation "A" (e.g., FIGS.
9A and 10A) represents a situation where nozzles are used to
deposit droplets without consideration as to volume differences. By
contrast, the letter designation "B" (e.g., FIGS. 9B and 10B)
represents situations where a random combination of (5 or 10)
droplets are selected to "average out" expected volume differences
between nozzles. Finally, the letter designation "C" (e.g., FIGS.
9C and 10C) represents situations where scans and nozzle firings
are dependent on specific aggregate ink volumes per target region
that seek to minimize aggregate fill variance across target
regions. In these various FIGS., the variation per nozzle is
assumed to be consistent with variation observed in actual devices,
each vertical axis represents aggregate fill volumes in pL, and
each horizontal axis represents the number of target regions, for
example, pixel wells or pixel color components. Note that the
emphasis of these FIGS. is to show variation in aggregate fill
volumes, assuming randomly distributed droplet variations about an
assumed average. For FIGS. 9A-9C, the average volume per nozzle is
assumed to be slightly below 10.00 pL per nozzle, and for FIGS.
10A-10C, the average droplet volume per nozzle is assumed to be
slightly above 10.00 pL per nozzle.
[0157] A first graph 901 represented in FIG. 9A shows per-well
volume variations assuming differences in nozzle droplet volumes
with no attempt to mitigate these differences. Note that these
variations can be extreme (e.g., per peak 903), with a range of
aggregate fill volumes of about .+-.2.61%. As mentioned, the
average of five droplets is slightly below 50.00 pL; FIG. 9A shows
two sets of sample tolerance ranges centered about this average,
including a first range 905 representing a range of .+-.1.00%
centered about this value, and a second range 907 representing a
range of .+-.0.50% centered about this value. As is seen by the
numerous peaks and troughs that exceed either range (e.g., peak
903), such a printing process results in numerous wells that would
fail to meet specification (e.g., either one or the other of these
ranges).
[0158] A second graph 911 represented in FIG. 9B shows per-well
volume variations using a randomized set of five nozzles per well,
in an effort to statistically average out the effects of droplet
volume variation. Note that such a technique does not permit
precise production of a specific volume of ink in any particular
well, nor does such a process guarantee aggregate volumes within
range. For example, although the percentage of fill volumes falling
outside of specification represents a much better case than
represented by FIG. 9A, there are still situations where individual
wells (such as identified by trough 913) fall outside of
specification, for example the .+-.1.00% and .+-.0.50% variation
represented by numerals 905 and 907, respectively. In such a case,
the min/max error is .+-.1.01%, reflecting the improvement with
random mixing relative to the data presented in FIG. 9A.
[0159] FIG. 9C represents a third case, using specific combinations
of per-nozzle droplets according to techniques above. In
particular, a graph 921 shows that variation is entirely within a
.+-.1.00% range and quite close to meeting a .+-.0.50% range for
all represented target regions; once again, these ranges are
represented by numerals 905 and 907, respectively. In this example,
five specifically elected droplet volumes are used to fill the
wells in each scan line, with the printhead/substrate shifts as
appropriate for each pass or scan. The min/max error is .+-.0.595%,
reflecting further improvement with this form of "smart mixing."
Note that the improvements and data observations will be consistent
for any form of intelligent, droplet volume combinations to achieve
specific fills or tolerance ranges, e.g., where offsets between
nozzle rows (or multiple printheads) are used, or where multiple
preselected drive waveforms are used to permit combination of
specifically selected droplet volumes.
[0160] As mentioned, FIGS. 10A-10C present similar data, but
assuming combinations of 10 droplets per well, with an average
droplet volume of about 10.30 pL per nozzle. In particular, graph
1001 in FIG. 10A represents a case where no attention is given to
mitigating droplet volume differences, graph 1011 in FIG. 10B
represents a case where droplets are applied randomly in an effort
to statistically "average out" volume differences, and graph 1021
in FIG. 10C represents a case of planned mixing of specific
droplets (to achieve the average fill volumes of FIGS. 10A/10B,
i.e., approximately 103.10 pL). These various FIGS. show tolerance
ranges of .+-.1.00% and .+-.0.50% variation about this average,
respectively denoted using range arrows 1005 and 1007. Each of the
FIGS. further shows respective peaks 1003, 1013 and 1023
represented by variation. Note however, that FIG. 10A represents a
variation of .+-.2.27% about target, FIG. 10B represents a
variation of .+-.0.707% about target and FIG. 10C represents a
variation of .+-.0.447% about target. With the averaging of a
larger number of droplets, the "random droplet" solution of FIG.
10B is seen to achieve a .+-.1.00% tolerance range about the
average but not a .+-.0.50% range. By contrast, the solution
depicted by FIG. 10C is seen to meet both tolerance ranges,
demonstrating that variation can be constrained to lie within
specification while still permitting variation in droplet
combinations from well-to-well.
[0161] One optional embodiment of the techniques described in this
disclosure is as follows. For a printing process in which nozzles
with a droplet volume standard deviation of x % are used to deposit
aggregate fill volumes having a maximum variation of .+-.y %,
conventionally, there exist few means of guaranteeing that
aggregate fill volumes will vary by .+-.y %. This presents a
potential problem. A droplet averaging technique (e.g., as
represented by the data seen in FIGS. 9B and 10B) statistically
reduces the standard deviation of aggregate volumes across target
regions to x %/(n).sup.1/2, where n is the average number of
droplets needed per target region to achieve desired fill volumes.
However, even with such a statistical approach, there is no
mechanism for reliably ensuring that actual target region fill
volumes will in fact sit within a maximum error bound of .+-.y %,
particularly if y and n are small. The techniques discussed herein
provide a mechanism for providing such reliability by guaranteeing
a known percentage of target regions and achieve composite fills
within .+-.y %. One optional embodiment therefore provides a method
of generating control data, or controlling a printer, and related
apparatuses, systems, software and improvements where the standard
deviation of volume across target regions is better than x
%/(n).sup.1/2 (e.g., substantially better than x %/(n).sup.1/2). In
a specific implementation, this condition is met under
circumstances where printhead nozzles are concurrently used to
deposit droplets in respective rows of target regions (e.g.,
respective pixel wells) with each scan.
[0162] With a set of basic techniques for combining droplets such
that the sum of their volumes is specifically chosen to meet
specific targets thus described, this document will now turn to a
more detailed discussion of specific devices and applications that
can benefit from these principles. This discussion is intended to
be non-limiting, i.e., to describe a handful of specifically
contemplated implementations for practicing the methods introduced
above.
[0163] As seen in FIG. 11, a multi-chambered fabrication apparatus
1101 includes several general modules or subsystems including a
transfer module 1103, a printing module 1105 and a processing
module 1107. Each module maintains a controlled environment, such
that printing for example can be performed by the printing module
1105 in a first controlled atmosphere and other processing, for
example, another deposition process such an inorganic encapsulation
layer deposition or a curing process (e.g., for printed materials),
can be performed in a second controlled atmosphere. The apparatus
1101 uses one or more mechanical handlers to move a substrate
between modules without exposing the substrate to an uncontrolled
atmosphere. Within any given module, it is possible to use other
substrate handling systems and/or specific devices and control
systems adapted to the processing to be performed for that
module.
[0164] Various embodiments of the transfer module 1103 can include
an input loadlock 1109 (i.e., a chamber that provides buffering
between different environments while maintaining a controlled
atmosphere), a transfer chamber 1111 (also having a handler for
transporting a substrate), and an atmospheric buffer chamber 1113.
Within the printing module 1105, it is possible to use other
substrate handling mechanisms such as a flotation table for stable
support of a substrate during a printing process. Additionally, an
xyz-motion system, such as a split axis or gantry motion system,
can be used for precise positioning of at least one printhead
relative to the substrate, as well as providing a y-axis conveyance
system for the transport of the substrate through the printing
module 1105. It is also possible within the printing chamber to use
multiple inks for printing, e.g., using respective printhead
assemblies such that, for example, two different types of
deposition processes can be performed within the printing module in
a controlled atmosphere. The printing module 1105 can comprise a
gas enclosure 1115 housing an inkjet printing system, with means
for introducing an inert atmosphere (e.g., nitrogen, a noble gas,
another similar gas, or a combination thereof) and otherwise
controlling the atmosphere for environmental regulation (e.g.,
temperature and pressure), gas constituency and particulate
presence.
[0165] A processing module 1107 can include, for example, a
transfer chamber 1116; this transfer chamber also has a handler for
transporting a substrate. In addition, the processing module can
also include an output loadlock 1117, a nitrogen stack buffer 1119,
and a curing chamber 1121. In some applications, the curing chamber
can be used to cure a monomer film into a uniform polymer film, for
example, using a heat or UV radiation cure process.
[0166] In one application, the apparatus 1101 is adapted for bulk
production of liquid crystal display screens or OLED display
screens in bulk, for example, the fabrication of an array of eight
screens at once on a single large substrate. These screens can be
used for televisions and as display screens for other forms of
electronic devices. In a second application, the apparatus can be
used for bulk production of solar panels in much the same
manner.
[0167] Applied to the droplet-volume combination techniques
described above, the printing module 1105 can advantageously be
used in display panel manufacture to deposit one or more layers,
such as light filtering layers, light emissive layers, barrier
layers, conductive layers, organic or inorganic layers,
encapsulation layers and other types of materials. For example, the
depicted apparatus 1101 can be loaded with a substrate and can be
controlled to move the substrate back and forth between the various
chambers to deposit and/or cure or harden one or more printed
layers, all in a manner uninterrupted by intervening exposure to an
uncontrolled atmosphere. Optionally, ink droplet measurement (if
used in connection with the depicted system) can be performed as a
substrate is being moved or processed in any chamber. For example,
a first substrate can be loaded via the input loadlock 1109, and
during this process, a printhead assembly within printing module
1105 can be engaged with a droplet measurement device to perform
droplet measurements for a subset of print nozzles; in an
embodiment having many print nozzles, droplet measurement can be
made periodic and intermittent, such that in between various
printing cycles, different nozzles representing a
circular-progressive subset of all nozzles of the print assembly
are calibrated, and associated droplets measured to develop
statistical models for each of droplet volume, angle of ejection
(relative to normal) and velocity. A handler positioned in the
transfer module 1103 can move the first substrate from the input
loadlock 1109 to the printing module 1105, at which time droplet
measurement is disengaged, and the printhead assembly moved to a
position for active printing. Following completion of a printing
process, the first substrate can then be moved to the processing
module 1107 for cure. Once again, a new cycle of droplet
measurement can be performed, and a second substrate can optionally
be loaded into the input loadlock 1109 (if supported by the
system). Many other alternatives and process combinations are
possible. By repeated deposition of subsequent layers, e.g., by
moving the first substrate back and forth for repeated iterations
of printing and cure, each of controlled volume per target region,
aggregate layer properties can be built up to suit any desired
application. In an alternate embodiment, the output loadlock 1117
can be used to transfer the first substrate to a second printer
(e.g., for sequential, pipelined printing a new layer, e.g., a new
OLED material layer or an encapsulation or other layer. Note once
again that the techniques described above are not limited to
display panel manufacturing processes, and that many different
types of tools can be used. For example, the configuration of the
apparatus 1101 can be varied to place the various modules 1103,
1105 and 1107 in different juxtaposition; also, additional modules
or fewer modules can also be used. As denoted by numerals 1121 and
1123, a computing device (e.g., a processor) running suitable
software can be used to control various processes and to perform
optional droplet measurement as described above in tandem with
other processes, i.e., to minimize downtime of the apparatus, to
maintain droplet measurements as current as possible while
maintaining a robust statistical model, and to stack droplet
measurement processes as much as possible to overlap other system
processes.
[0168] While FIG. 11 provides one example of a set of linked
chambers or fabrication components, clearly many other
possibilities exist. The ink droplet measurement and deposition
techniques introduced above can be used with the device depicted in
FIG. 11, or indeed, to control a fabrication process performed by
any other type of deposition equipment.
[0169] FIG. 12 provides a block diagram showing various subsystems
of one apparatus that can be used to fabricate devices having one
or more layers as specified herein. Coordination over the various
subsystems is provided by a processor 1203, acting under
instructions provided by software (not shown in FIG. 12). During a
fabrication process, the processor feeds data to a printhead 1205
to cause the printhead to eject various volumes of ink depending on
nozzle firing instructions. The printhead 1205 typically has
multiple ink jet nozzles, arranged in a row (or rows of an array),
and associated reservoirs that permit jetting of ink responsive to
activation of a piezoelectric or other transducer per nozzle; such
a transducer causes a nozzle to eject a controlled amount of ink in
an amount governed by an electronic nozzle drive waveform signal
applied to the corresponding piezoelectric transducer. If multiple
printheads are present, there can be a processor for each
printhead, or one processor can control an entire printhead
assembly. Other firing mechanisms can also be used. Each printhead
applies the ink to a substrate 1207 at various x-y positions
corresponding to the grid coordinates within various print cells,
as represented by the halftone print image. Variation in position
is effected both by a printhead motion system 1209 and substrate
handling system 1211 (e.g., that cause the printing to describe one
or more swaths across the substrate). In one embodiment, the
printhead motion system 1209 moves the printhead(s) back-and-forth
along a traveler, while the substrate handling system provides
stable substrate support and "y" dimension transport of the
substrate to enable "split-axis" printing of any portion of the
substrate; the substrate handling system provides relatively fast
y-dimension transport, while the printhead motion system 1209
provides relatively slow x-dimension transport. In another
embodiment, the substrate handling system 1211 can provide both x-
and y-dimension transport. In yet another embodiment, primary
transport can be provided entirely by the substrate handling system
1211. An image capture device 1213 can be used to locate any
fiducials and assist with alignment and/or error detection.
[0170] The apparatus also comprises an ink delivery system 1215 and
a printhead maintenance system 1217 to assist with the printing
operation. The printhead can be periodically calibrated or
subjected to a maintenance process; to this end, during a
maintenance sequence, the printhead maintenance system 1217 is used
to perform appropriate priming, purge of ink or gas, testing and
calibration, and other operations, as appropriate to the particular
process.
[0171] As was introduced previously, the printing process can be
performed in a controlled environment, that is, in a manner that
presents a reduced risk of contaminants that might degrade
effectiveness of a deposited layer. To this effect, the apparatus
includes a chamber control subsystem 1219 that controls atmosphere
within the chamber, as denoted by function block 1221. Optional
process variations, as mentioned, can include performing jetting of
deposition material in presence of an ambient nitrogen gas
atmosphere.
[0172] As previously mentioned, in embodiments disclosed herein,
individual droplet volumes are combined to achieve specific fill
volumes per target region, selected in dependence on a target fill
volume. A specific fill volume can be planned for each target
region, with fill value varying about a target value within an
acceptable tolerance range. For such embodiments, droplet volumes
are specifically measured, in a manner dependent on ink, nozzle,
drive waveform, and other factors. To this end, reference numeral
1223 denotes an optional droplet volume measurement system, where
droplet volumes 1225 are measured for each nozzle and for each
drive waveform and are then stored in memory 1227. Such a droplet
measurement system, as mentioned earlier, can be an optical strobe
camera or laser scanning device (or other volume measurement tool)
incorporated into a commercial printing device. In one embodiment,
such a device uses non-imaging techniques (e.g., using simple
optical detectors instead of image processing software that
operates on pixels) to achieve real-time or near real time
measurement of individual droplet volumes, deposition flight angle
or trajectory and droplet velocity. This data is provided to
processor(s) 1203 either during printing, or during a one-time,
intermittent or periodic calibration operation. As indicated by
numeral 1229, a prearranged set of firing waveforms can also
optionally be associated with each nozzle, for later use in
producing specific per-target region droplet combinations; if such
a set of waveforms is used for the embodiment, droplet volume
measurements are advantageously computed during calibration using
the droplet measurement system 1223 for each nozzle, for each
waveform. Providing a real-time or near-real-time droplet volume
measurement system greatly enhances reliability in providing target
region volume fills within the desired tolerance range, as
measurements can be taken as needed and processed (e.g., averaged)
to minimize statistical volume measurement error.
[0173] Numeral 1231 refers to the use of print optimization
software running on processor 1203. More specifically, this
software, based on statistical models of droplet volumes 1225
(measured in situ or otherwise provided), uses this information to
plan printing in a way that combines droplet volumes as appropriate
to obtain per target region specific fill volumes. In one
embodiment, per the examples above, the aggregate volume can be
planned down to the resolution of 0.01 pL or better, within a
certain error tolerance, notwithstanding that the droplet
measurement device may have a lower precision associated with
individual droplet measurement; that is, by using techniques
described herein to build a statistical model of droplet volume
per-nozzle and per-nozzle/waveform combination, a degree of
statistical accuracy can be deduced than represented by the
precision of the droplet measurement system. Once printing has been
planned, the processor(s) calculate(s) printing parameters such as
number and sequence of scans, droplet sizes, relative droplet
firing times, and similar information, and builds a print image
used to determine nozzle firing for each scan. In one embodiment,
the print image is a halftone image. In another embodiment, a
printhead has multiple nozzles, as many as 10,000. As will be
described below, each droplet can be described according to a time
value and a firing value (e.g., data describing a firing waveform
or data indicating whether a droplet will be "digitally" fired). In
an embodiment where geometric steps and binary nozzle firing
decisions are relied upon to vary droplet volumes per well, each
droplet can be defined by a bit of data, a step value (or scan
number) and a positional value indicating where the droplet is to
be placed. In an implementation where scans represent continuous
motion, a time value can be used as the equivalent of a positional
value. Whether rooted in time/distance or absolute position, the
value describes a position relative to a reference (e.g., a
synchronization mark, position or pulse) that specifies with
precision where and when a nozzle should be fired. In some
embodiments, multiple values can be used. For example, in one
specifically contemplated embodiment, a sync pulse is generated for
each nozzle in a manner that corresponds to each micron of relative
printhead/substrate motion during a scan; relative to each sync
pulse, each nozzle is programmed with (a) an offset value
describing an integer clock cycle delay before the nozzle is fired,
(b) a 4-bit waveform selection signal, to describe one of fifteen
waveform selections preprogrammed into memory dedicated to the
particular nozzle driver (i.e., with one of the sixteen possible
values specifying an "off" or non-firing state of the nozzle), and
(c) a repeatability value specifying whether the nozzle should be
fired once only, once for every sync pulse or once for every n sync
pulses. In such a case, the waveform selection and an address for
each nozzle are associated by the processor(s) 1203 with specific
droplet volume data stored in memory 1227, with firing of a
specific waveform from a specific nozzle representing a planned
decision that a specific, corresponding droplet volume is to be
used to supply aggregate ink to a specific target region of the
substrate.
[0174] FIGS. 13A-15D will be used to introduce other techniques
that can be used to combine different droplet volumes to obtain
precision within-tolerance fill volumes for each target region. In
a first technique, rows of nozzles can be selectively offset
relative to one another within a printhead assembly during printing
(e.g., in between scans). This technique is introduced with
reference to FIGS. 13A-13B. In a second technique, nozzle drive
waveforms can be used to adjust piezoelectric transducer firing and
thus properties of each ejected droplet (including volume). FIGS.
14A-14B are used to discuss several options. Finally, in one
embodiment, a set of multiple, alternative droplet firing waveforms
are computed in advance and made available for use with each print
nozzle. This technique and related circuitry is discussed with
reference to FIGS. 15A-B.
[0175] FIG. 13A provides a plan diagram 1301 of a printhead 1303
traversing a substrate 1305 in a scanning direction indicated by
arrow 1307. The substrate is seen here to consist of a number of
pixels 1309 with each pixel having wells 1309-R, 1309-G and 1309-B
associated with respective color components. Note again that this
depiction is an example only, i.e., techniques as used herein can
be applied to any layer of a display (e.g., not limited to
individual color components, and not limited to color imparting
layers); these techniques can also be used to make things other
than display devices. In this case, it is intended that the
printhead deposit one ink at a time, and assuming that the inks are
color component-specific, separate printing processes will be
performed, each for one of the color components, for respective
wells of the display. Thus, if a first process is being used to
deposit an ink specific to red light generation, only a first well
of each pixel, such as well 1309-R of pixel 1309 and a similar well
of pixel 1311, will receive ink in the first printing process. In a
second printing process, only the second well (1309-G) of pixel
1309 and a similar well of pixel 1311 will receive a second ink,
and so forth. The various wells are thus seen as three different
overlapping arrays of target regions (in this case, fluid
receptacles or wells).
[0176] The printhead 1303 includes a number of nozzles, such as
denoted using numbers 1313, 1315 and 1317. In this case, each of
numbers refers to a separate row of nozzles, with the rows
extending along a column axis 1318 of the substrate. Nozzles 1313,
1315 and 1317 are seen to form a first column of nozzles, relative
to the substrate 1305, and nozzles 1329 represent a second column
of nozzles. As depicted by FIG. 13A, the nozzles do not align with
the pixels and, as the printhead traverses the substrate in a scan,
some nozzles will pass over target regions while other nozzles will
not. Furthermore, in the FIG., while print nozzles 1313, 1315 and
1317 will precisely align to the center of a row of pixels
beginning with pixel 1309 and while the print nozzles 1329 will
also pass over the row of pixels beginning with pixel 1311, the
alignment of print nozzles 1329 is not precise to the center of the
pixel 1311 and its associated row. This alignment/misalignment of
the columns of nozzles with the rows of wells is respectively
depicted by lines 1325 and 1327, which denote centers of print
wells that are to receive ink. In many applications, the precise
location at which the droplet is deposited within a target region
is not important, and such misalignments are acceptable (e.g., it
may be desired to roughly align some group of multiple nozzles with
each row, as discussed in connection with FIGS. 1B and 4D).
[0177] FIG. 13B provides a second view 1331, in which it is seen
that all three rows of nozzles (or individual printheads) have been
rotated by approximately thirty degrees relative to axis 1318. This
optional capability was referenced earlier by numeral 338 in FIG.
3B. More specifically, because of the rotation, the spacing of the
nozzles along the column axis 1318 has now changed, with each
column of nozzles aligning with well centers 1325 and 1327, or
otherwise adjusted so as to increase nozzle apparent density per
target print region during a scan. Note however, that because of
such rotation and scanning motion 1307, nozzles from each column of
nozzles will cross a column of pixels (e.g., 1309 and 1311) at
different relative times, and thus potentially have different
positional firing data (e.g., different timing for firing
droplets). Methods for adjusting firing data for each nozzle will
be discussed below in connection with FIGS. 15A-B.
[0178] As represented in FIG. 13C, in one embodiment, a printhead
assembly optionally endowed with multiple printheads or rows of
nozzles can have such rows selectively offset from one another.
That is, FIG. 13C provides another plan view, where each of
printheads (or nozzle rows) 1319, 1321 and 1323 are offset relative
to one another, as represented by offset arrows 1353 and 1355.
These arrows represent use of an optional motion mechanism, one for
each row of nozzles, to permit selective offset of the
corresponding row, relative to the printhead assembly. This
provides for different combinations of nozzles (and associated
specific droplet volumes) with each scan, and thus for different
specific droplet combinations (e.g., per numeral 1307). For
example, in such an embodiment, and as depicted by FIG. 13C, such
an offset permits both of nozzles 1313 and 1357 to align with
center line 1325 and thus have their respective droplet volumes
combined in a single pass. Note that this embodiment is considered
a specific instance of embodiments which vary geometric steps,
e.g., even if the geometric step size between successive scans of a
printhead assembly 1303 relative to the substrate 1305 is fixed,
each such scan motion of a given row of nozzles is effectively
positioned at a variable offset or step using the motion mechanism
relative to a given row's position in other scans. Also or
alternatively, such offset can be performed to adjust an effective
print grid, to provided varied spacings between deposited droplets.
Consistent with the principles introduced earlier, the use of
optional offsets permits individual-per-nozzle droplet volumes to
be aggregated in particular combinations (or droplet sets) for each
well, but with a reduced number of scans or passes. For example,
with the embodiment depicted in 13C, three droplets could be
deposited in each target region (e.g., wells for red color
component) with each scan, and further, the offsets permit planned
variation of droplet volume and/or spatial combinations.
[0179] FIG. 13D illustrates a cross-section of a finished display
for one well (e.g., well 1309-R from FIG. 13A), taken in the
direction of scanning. In particular, this view shows the substrate
1352 of a flat panel display, in particular, an OLED device. The
depicted cross-section shows an active region 1353 and conductive
terminals 1355 to receive electrical signals to control the display
(including color of each pixel). A small elliptical region 1361 of
the view is seen magnified at the right side of the FIG. to
illustrate layers in the active region above the substrate 1352.
These layers respectively include an anode layer 1369, a hole
injection layer ("HIL") 1371, a hole transport layer ("HTL") 1373,
an emissive or light emitting layer ("EML") 1375, an electron
transport layer ("ETL") 1377 and a cathode layer 1378. Additional
layers, such as polarizers, barrier layers, primers and other
materials can also be included. In some cases, the OLED device can
include only a subset of these layers. When the depicted stack is
eventually operated following manufacture, current flow causes the
recombination of electrons and "holes" in the EML, resulting in the
emission of light. The anode layer 1369 can comprise one or more
transparent electrodes common to several color components and/or
pixels; for example, the anode can be formed from indium tin oxide
(ITO). The anode layer 1369 can also be reflective or opaque, and
other materials can be used. The cathode layer 1378 typically
consists of patterned electrodes to provide selective control to
each color component for each pixel. The cathode layer can comprise
a reflective metal layer, such as aluminum. The cathode layer can
also comprise an opaque layer or a transparent layer, such as a
thin layer of metal combined with a layer of ITO. Together, the
cathode and anode serve to supply and collect the electrons and
holes that pass into and/or through the OLED stack. The HIL 1371
typically functions to transport holes from the anode into the HTL.
The HTL 1373 typically functions to transport holes from the HIL
into the EML while also impeding the transport of electrons from
the EML into the HTL. The ETL 1377 typically functions to transport
electrons from the cathode into the EML while also impeding the
transport of electrons from the EML into the ETL. Together these
layers thereby serve to supply electrons and holes into the EML
1375 and confine those electrons and holes in that layer, so that
they can recombine to generate light. Typically, the EML consists
of separately-controlled, active materials for each of three
primary colors, red, green and blue, for each pixel of the display,
and as mentioned, is represented in this case by a red light
producing material.
[0180] Layers in the active region can be degraded through exposure
to oxygen and/or moisture. It is therefore desired to enhance OLED
lifetime by encapsulating these layers, both on faces and sides
(1362/1363) of those layers opposite the substrate, as well as
lateral edges. The purpose of encapsulation is to provide an oxygen
and/or moisture resistant barrier. Such encapsulation can be
formed, in whole or in part, via the deposition of one or more thin
film layers.
[0181] The techniques discussed herein can be used to deposit any
of these layers, as well as combinations of such layers. Thus, in
one contemplated application, the techniques discussed herein
provide the ink volume for the EML layer for each of the three
primary colors. In another application, the techniques discussed
herein are used to provide ink volume for the HIL layer, and so on.
In yet another application, the techniques discussed herein are
used to provide ink volume for one or more OLED encapsulation
layers. The printing techniques discussed herein can be used to
deposit organic or inorganic layers, as appropriate to the process
technology, and layers for other types of displays and non-display
devices.
[0182] FIG. 14A is used to introduce nozzle drive waveform
adjustment and the use of alternate nozzle drive waveforms to
provide different ejected droplet volumes from each nozzle of a
printhead. A first waveform 1403 is seen as a single pulse,
consisting of a quiet interval 1405 (0 Volts), a rising slope 1413
associated with a decision to fire a nozzle at time t.sub.2, a
voltage pulse or signal level 1407, and a falling slope 1411 at
time t.sub.3. Effective pulse width, represented by numeral 1409,
is of duration approximately equal to t.sub.3-t.sub.2, depending on
differences between the rising and falling slopes of the pulse. In
one embodiment, any of these parameters (e.g., rising slope,
voltage, falling slope, pulse duration) can be varied to
potentially change droplet volume ejection characteristics for a
given nozzle. A second waveform 1423 is similar to the first
waveform 1403, except it represents a larger driving voltage 1425
relative to the signal level 1407 of the first waveform 1403.
Because of a larger pulse voltage and finite rising slope 1427, it
takes longer to reach this higher voltage, and similarly, a falling
slope 1429 typically lags relative to a similar slope 1411 from the
first waveform. A third waveform 1433 is also similar to the first
waveform 1403 except, in this case, a different rising slope 1435
and or a different falling slope 1437 can be used instead of slopes
1413 and 1411 (e.g., through adjustment of nozzle firing path
impedances). The different slopes can be made either steeper or
shallower (in the depicted case, steeper). With a fourth waveform
1443, by contrast, the pulse is made longer, for example using
delay circuits (e.g., a voltage-controlled delay line) to increase
both time of pulse at a given signal level (as denoted by numeral
1445) and to delay the falling edge of the pulse, as represented by
numeral 1447. Finally, a fifth waveform 1453 represents the use of
multiple, discrete signal levels as also providing a means of pulse
shaping. For example, this waveform is seen to include time at the
first-mentioned signal level 1407, but then a slope that rises to a
second signal level 1455, applied halfway between times t.sub.3 and
t.sub.2. Because of the larger voltage, a trailing edge of this
waveform 1457 is seen to lag behind falling edge 1311.
[0183] Any of these techniques can be used in combination with any
of the embodiments discussed herein. For example, drive waveform
adjustment techniques can optionally be used to vary droplet
volumes within a small range after scan motion and nozzle firing
has already been planned, to mitigate line effect. The design of
the waveform variation in a manner such that the second tolerance
conforms to specification facilitates the deposition of
high-quality layers with planned non-random or planned random
variation. For example, returning to the hypothetical introduced
earlier where a television maker specifies fill volumes of 50.00 pL
.+-.0.50%, per-region fill volumes can be calculated within a first
range of 50.00 pL .+-.0.25% (49.785 pL-50.125 pL), with non-random
or random techniques applied to waveform variation where the
variation statistically contributes no more than .+-.0.025 pL
volume variation per droplet (given 5 droplets required to reach
the aggregate fill volume). Alternatively or in addition, drive
waveform variation can be used to influence velocity or trajectory
(flight angle) of ejected droplet. For example, in one process,
droplets are required to meet a predetermined set of criteria as to
volume and/or velocity and/or trajectory; if a droplet falls
outside of accepted norms, then a nozzle drive waveform can be
adjusted until compliance is achieved. Alternatively, a set of
predetermined waveforms can be measured, with a subset of these
waveforms selected based on conformance to desired norms. Clearly,
many variations exist.
[0184] As noted above, in one embodiment, represented by the fifth
waveform 1453 from FIG. 14A, multiple signal levels can be used to
shape a pulse. This technique is further discussed in reference to
FIG. 14B.
[0185] That is, in one embodiment, waveforms can be predefined as a
sequence of discrete signal levels, e.g., defined by digital data,
with a drive waveform being generated by a digital-to-analog
converter (DAC). Numeral 1451 in FIG. 14B refers to a waveform 1453
having discrete signal levels, 1455, 1457, 1459, 1461, 1463, 1465
and 1467. In this embodiment, each nozzle driver includes circuitry
that receives and stores up to sixteen different signal waveforms,
with each waveform being defined a series of up to sixteen signal
levels, each expressed as a multi-bit voltage and a duration. That
is to say, in such an embodiment, pulse width can effectively be
varied by defining different durations for one or more signal
levels, and drive voltage can be waveform-shaped in a manner chosen
to provide subtle droplet size variation, e.g., with droplet
volumes gauged to provide specific volume gradations increments
such as in units of 0.10 pL. Thus, with such an embodiment,
waveform shaping provides ability to tailor droplet volumes to be
close to a target droplet volume value; when combined with other
specific droplet volumes, such as using the techniques exemplified
above, these techniques facilitate precise fill volumes per target
region. In addition, however, these waveform shaping techniques
also facilitate a strategy for reducing or eliminating line effect;
for example, in one optional embodiment, droplets of specific
volumes are combined, as discussed above, but the last droplet (or
droplets) is selected in a manner that provides variation relative
to the boundaries of the desired tolerance range. In another
embodiment, predetermined waveforms can be applied with optional,
further waveform shaping or timing applied as appropriate to adjust
droplet volume, velocity and/or trajectory. In yet another example,
the use of nozzle drive waveform alternatives provides a mechanism
to plan volumes such that no further waveform shaping is
necessary.
[0186] Typically, the effects of different drive waveforms and
resultant droplet volumes are measured in advance. For each nozzle,
up to sixteen different drive waveforms are then stored in a
per-nozzle, 1 k synchronous random access memory (SRAM) for later,
elective use in providing discrete volume variations, as selected
by software. With the different drive waveforms on hand, each
nozzle is then instructed droplet-by-droplet as to which waveform
to apply via the programming of data that effectuates the specific
drive waveform.
[0187] FIG. 15A illustrates such an embodiment, generally
designated by numeral 1501. In particular, a processor 1503 is used
to receive data defining intended fill volumes per target region
for a particular layer of material that is to be printed. As
represented by numeral 1505, this data can be a layout file or
bitmap file that defines droplet volumes per grid point or
positional address. A series of piezoelectric transducers 1507,
1508 and 1509 generate associated ejected droplet volumes 1511,
1512 and 1513, that are respectively dependent on many factors,
including nozzle drive waveform and print-head-to-print-head
manufacturing variations. During a calibration operation, each one
of a set of variables is tested for its effects on droplet volume,
including nozzle-to-nozzle variation and the use of different drive
waveforms, given the particular ink that will be used; if desired,
this calibration operation can be made dynamic, for example, to
respond to changes in temperature, nozzle clogging, or other
parameters. This calibration is represented by a droplet
measurement device 1515, which provides measured data to the
processor 1503 for use in managing print planning and ensuing
printing. In one embodiment, this measurement data is calculated
during an operation that takes literally minutes, e.g., no more
than thirty minutes for thousands of nozzles and preferably much
less (e.g., for thousands of printhead nozzles and potentially
dozens of possible nozzle firing waveforms). In another embodiment,
as mentioned, such measurement can be performed iteratively, that
is to update different subsets of nozzles at different points in
time. A non-imaging (e.g., interferometric) technique can
optionally be used as described earlier, potentially resulting in
dozens of droplet measurements per nozzle, covering dozens to
hundreds of nozzles per second. This data and any associated
statistical models (and means) can be stored in memory 1517 for use
in processing the layout or bitmap data 1505 when it is received.
In one implementation, processor 1503 is part of a computer that is
remote from the actual printer, whereas in a second implementation,
processor 1503 is either integrated with a fabrication mechanism
for products (e.g., a system for fabricating displays) or with a
printer.
[0188] To perform the firing of droplets, a set of one or more
timing or synchronization signals 1519 are received for use as
references, and these are passed through a clock tree 1521 for
distribution to each nozzle driver 1523, 1524 and 1525 to generate
the drive waveform for the particular nozzle (1527, 1528 and 1529,
respectively). Each nozzle driver has one or more registers 1531,
1532 and 1533, respectively, which receive multi-bit programming
data and timing information from the processor 1503. Each nozzle
driver and its associated registers receive one or more dedicated
write enable signals (we.sub.n) for purposes of programming the
registers 1531, 1532 and 1533, respectively. In one embodiment,
each of the registers comprises a fair amount of memory, including
a 1 k SRAM to store multiple, predetermined waveforms, and
programmable registers to select between those waveforms and
otherwise control waveform generation. The data and timing
information from the processor is depicted as multi-bit
information, and although this information can be provided either
via a serial or parallel bit connection to each nozzle (as will be
seen in FIG. 15B, discussed below, in one embodiment, this
connection is serial as opposed to the parallel signal
representation seen in FIG. 15A).
[0189] For a given deposition, printhead or ink, the processor
chooses for each nozzle a set of sixteen drive waveforms that can
be electively applied to generate a droplet; note that this number
is arbitrary, e.g., in one design, four waveforms could be used,
while in another, four thousand could be used. These waveforms are
advantageously selected to provide desired variation in output
droplet volume for each nozzle, e.g., to cause each nozzle to have
at least one waveform choice that produces a near-ideal droplet
volume (e.g., a mean droplet volume of 10.00 pL) and to provide a
range of deliberate volume variation for each nozzle. In various
embodiments, the same set of sixteen drive waveforms are used for
all of the nozzles, though in the depicted embodiment, sixteen,
possibly-unique waveforms are each separate defined in advance for
each nozzle, each waveform conferring respective droplet volume
characteristics.
[0190] During printing, to control deposition of each droplet, data
selecting one of the predefined waveforms is then programmed into
each nozzle's respective registers 1531, 1532 or 1533 on a
nozzle-by-nozzle basis. For example, given a target droplet volume
of 10.00 pL, nozzle driver 1523 can be configured through writing
of data into registers 1531 to set one of sixteen waveforms
corresponding to one of sixteen different droplet volumes. The
volume produced by each nozzle would have been measured by the
droplet measurement device 1515, with nozzle-by-nozzle (and
waveform-by-waveform) droplet volumes and associated distributions
registered by the processor 1503 and stored in memory in aid of
producing desired target fills. The processor can, by programming
the register 1531, define whether or not it wants the specific
nozzle driver 1523 to output a processor-selected one of the
sixteen waveforms. In addition, the processor can program the
register to have a per-nozzle delay or offset to the firing of the
nozzle for a given scan line (e.g., to align each nozzle with a
grid traversed by the printhead, to correct for error including
velocity or trajectory error, and for other purposes); this offset
is effectuated by counters which skew the particular nozzle (or
firing waveform) by a programmable number of timing pulses for each
scan. To provide an example, if the result of droplet measurement
indicates that one particular droplet tends to have a lower than
expected velocity, then corresponding nozzle waveform can be
triggered earlier (e.g., advanced in time, by reducing a dead time
before active signal levels used for piezoelectric actuation);
conversely, if the result of droplet measurement indicates that the
one particular droplet has a relatively high velocity, then the
waveform can be triggered later, and so forth. Other examples are
clearly possible--for example, a slow droplet velocity can be
counteracted in some embodiments by increasing drive strength
(i.e., signal levels and associated voltage used to drive a given
nozzle's piezoelectric actuator). In one embodiment, a sync signal
distributed to all nozzles occurs at a defined interval of time
(e.g., one microsecond) for purposes of synchronization and in
another embodiment, the sync signal is adjusted relative to printer
motion and substrate geography, e.g., to fire every micron of
incremental relative motion between printhead and substrate. The
high speed clock (.phi..sub.hs) is run thousands of times faster
than the sync signal, e.g., at 100 megahertz, 33 megahertz, etc.;
in one embodiment, multiple different clocks or other timing
signals (e.g., strobe signals) can be used in combination. The
processor also programs values defining a grid spacing; in one
implementation, the grid spacing is common to the entire pool of
available nozzles, though this need not be the case for each
implementation. For example, in some cases, a regular grid can be
defined where every nozzle is to fire "every five microns." This
grid can be unique to the printing system, the substrate, or both.
Thus, in one optional embodiment, a grid can be defined for a
particular printer with sync frequency or nozzle firing patterns
used to effectively transform the grid to match a substrate
geography that is a priori unknown. In another contemplated
embodiment, a memory is shared across all nozzles that permits the
processor to pre-store a number of different grid spacings (e.g.,
16), shared across all nozzles, such that the processor can (on
demand) select a new grid spacing which is then read out to all
nozzles (e.g., to define an irregular grid). For example, in an
implementation where nozzles are to fire for every color component
well of an OLED (e.g. to deposit a non-color-specific layer), the
three or more different grid spacings can be continuously applied
in round robin fashion by the processor. Clearly, many design
alternatives are possible. Note that the processor 1503 can also
dynamically reprogram the register of each nozzle during operation,
i.e., the sync pulse is applied as a trigger to launch any
programmed waveform pulse set in its registers, and if new data is
asynchronously received before the next sync pulse, then the new
data will be applied with the next sync pulse. The processor 1503
also controls initiation and speed of scanning (1535) in addition
to setting parameters for the sync pulse generation (1536). In
addition, the processor controls rotation of the printhead (1537),
for the various purposes described above. In this way, each nozzle
can concurrently (or simultaneously) fire using any one of sixteen
different waveforms for each nozzle at any time (i.e., with any
"next" sync pulse), and the selected firing waveform can be
switched with any other of the sixteen different waveforms
dynamically, in between fires, during a single scan.
[0191] FIG. 15B shows additional detail of the circuitry (1541)
used in such an embodiment to generate output nozzle drive
waveforms for each nozzle; the output waveform is represented as
"nzzl-drv. wvfm" in FIG. 15B. More specifically, the circuitry 1541
receives inputs of the sync signal, a single bit line carrying
serial data ("data"), a dedicated write enable signal (we) and the
high speed clock (.phi..sub.hs). A register file 1543 provides data
for at least three registers, respectively conveying an initial
offset, a grid definition value and a drive waveform ID. The
initial offset is a programmable value that adjusts each nozzle to
align with the start of a grid, as mentioned. For example, given
implementation variables such as multiple printheads, multiple rows
of nozzles, different printhead rotations, nozzle firing velocity
and patterns and other factors, the initial offset can be used to
align each nozzle's droplet pattern with the start of the grid, to
account for delays and other factors. Offsets can be differently
applied across multiple nozzles, for example, to rotate a grid or
halftone pattern relative to substrate geography, or to correct for
substrate misalignment. Similarly, as mentioned, offsets can also
be used to correct for aberrant velocity or other effects. The grid
definition value is a number that represents the number of sync
pulses "counted" before the programmed waveform is triggered; in
the case of an implementation that prints flat panel displays
(e.g., OLED panels), the target regions to be printed in presumably
have one or more regular spacings relative to the different
printhead nozzles, corresponding to a regular (constant spacing) or
irregular (multiple spacing) grid. As mentioned earlier, in one
implementation, the processor keeps its own sixteen-entry SRAM to
define up to sixteen different grid spacings that can be read out
on demand to the register circuitry for all nozzles. Thus, if the
grid spacing value was set to two (e.g., every two microns), then
each nozzle would be fired at this interval. The drive waveform ID
represents a selection of one of the pre-stored drive waveforms for
each nozzle, and can be programmed and stored in many manners,
depending on embodiment. In one embodiment, the drive waveform ID
is a four bit selection value, and each nozzle has its own,
dedicated 1 k-byte SRAM to store up to sixteen predetermined nozzle
drive waveforms, stored as 16.times.16.times.4B entries. Briefly,
each of sixteen entries for each waveform contains four bytes
representing a programmable signal level, with these four bytes
representing a two-byte resolution voltage level and a two-byte
programmable duration, used to count a number of pulses of the
high-speed clock. Each programmable waveform can thus consist of
(zero to one) discrete pulses to up to sixteen discrete pulses each
of programmable voltage and duration (e.g., of duration equal to
1-255 pulses of a 33 megahertz clock).
[0192] Numerals 1545, 1546 and 1547 designate one embodiment of
circuitry that shows how a specified waveform can be generated for
a given nozzle. A first counter 1545 receives the sync pulse, to
initiate a countdown of the initial offset, triggered by start of a
new line scan; the first counter 1545 counts down in micron
increments and, when zero is reached, a trigger signal is output
from the first counter 1545 to a second counter 1546; this trigger
signal essentially starts the firing process for each nozzle for
each scan line. The second counter 1546 then implements a
programmable grid spacing in increments of microns. The first
counter 1545 is reset in conjunction with a new scan line, whereas
the second counter 1546 is reset using the next edge of the
high-speed clock following its output trigger. The second counter
1546, when triggered, and activates a waveform circuit generator
1547 which generates the selected drive waveform shape for the
particular nozzle. As denoted by dashed line boxes 1548-1550, seen
beneath the generator circuit, this latter circuit is based on a
high speed digital-to-analog converter 1548, a counter 1549, and a
high-voltage amplifier 1550, timed according to the high-speed
clock (.phi..sub.hs). As the trigger from the second counter 1546
is received, the waveform generator circuit retrieves the number
pairs (signal level and duration) represented by the drive waveform
ID value and generates a given analog output voltage according to
the signal level value, with the counter 1549 effective to hold DAC
output for a duration according to the counter. The pertinent
output voltage level is then applied to the high-voltage amplifier
1550 and is output as the nozzle-drive waveform. The next number
pair is then latched out from registers 1543 to define the next
signal level value/duration, and so forth.
[0193] The depicted circuitry provides an effective means of
defining any desired waveform according to data provided by the
processor 1503. If necessary to comply with grid geometry or to
mitigate a nozzle with aberrant velocity or flight angle, the
durations and/or voltage levels associated with any specific signal
level (e.g., a first, "zero" signal level defining an offset
relative to synch) can be adjusted. As noted, in one embodiment,
the processor decides upon a set of waveforms in advance (e.g., 16
possible waveforms, per-nozzle) and it then writes definition for
each of these selected waveforms into SRAM for each nozzle's driver
circuitry, with a "firing-time" decision of programmable waveform
then being effected by writing a four-bit drive waveform ID into
each nozzles registers.
[0194] FIG. 15C provides a flow chart 1551 that discusses methods
of using different waveforms per nozzle and different configuration
options. As denoted by 1553, a system (e.g., one or more processors
acting under instruction from suitable software) selects a set of
predetermined nozzle drive waveforms. For each waveform and for
each nozzle (1555), droplet volume is specifically measured and a
statistical model is built, e.g., using a laser measurement device
or CCD camera for example. These volumes are stored in memory
accessible to the processor, such as memory 1557. Again, measured
parameters can vary depending on choice of ink and many other
factors; therefore, calibration is performed depending on those
factors and planned deposition activities. For example, in one
embodiment 1561, calibration can be performed at the factory that
manufactures the printhead or printer, and this data can be
preprogrammed into a sold device (e.g., a printer) or made
available for download. Alternatively, for printers that possess an
optional droplet measurement device or system, these volume
measurements can be performed at first use (1562), e.g., upon
initial device configuration. In still another embodiment, the
measurements are performed with each power or substrate cycle
(1563), for example, each time the printer is turned "on" or is
awakened from a low-power state or otherwise moved into a state in
which it is ready for printing. As mentioned previously, for
embodiments where ejected droplet volumes are affected by
temperature or other dynamic factors, calibration can be performed
on an intermittent or periodic basis (1564), for example, after
expiration of a defined time interval, when an error is detected,
at the state of each new substrate operation (e.g. during substrate
loading and/or loading), every day, or on some other basis. Other
calibration techniques and schedules can also be used (1565).
[0195] The calibration techniques can optionally be performed in an
offline process, or during a calibration mode, as represented by
process separation line 1566. As mentioned, in one embodiment, such
a process is completed in less than thirty minutes, potentially for
thousands of print nozzles and one or more associated nozzle firing
waveforms. During an online operation (or during a printing mode),
represented below this process separation line 1566, the measured
droplet volumes are used in selecting sets of droplets per target
region, based on specific, measured droplet volumes, such that
droplet volumes for each set sum to a specific aggregate volume
within a defined tolerance range, per 1567. The volumes per region
can be selected based on a layout file, bitmap data, or some other
representation, as represented by numeral 1568. Based on these
droplet volumes and the permissible combinations of droplet volumes
for each target region, a firing pattern and/or scan path is
selected, in effect representing a particular combination of
droplets (i.e., one of the acceptable sets of combinations) for
each target region that will be used for the deposition process, as
represented by numeral 1569. As part of this selection or planning
process 1569, an optimization function 1570 can optionally be
employed, for example, to reduce the number of scans or passes to
fewer than the product of the average number of droplets per target
region times the number of rows (or columns) of target regions
(e.g., to less than what would be required for one row of nozzles,
turned 90 degrees such that all nozzles in the row could be used in
each scan for each affected target region, and depositing droplets
in multiple passes for each row of target region, proceeding one
row at a time). For each scan, the printhead can be moved, and
per-nozzle waveform data can be programmed into the nozzle to
effectuate droplet deposition instructions according to the bitmap
or layout file; these functions are variously represented by
numerals 1571, 1573 and 1575 in FIG. 15C. After each scan, the
process is repeated for an ensuing scan, per numeral 1577.
Optionally, these techniques and their implementation can be
embodied in a printer control file 1579, developed for later or
repeatable used in controlling the ejection of ink at specific
times.
[0196] Note once again that several different implementations have
been described above which are optional relative to one another.
First, in one embodiment, drive waveform is not varied, but remains
constant for each nozzle. Droplet volume combinations are produced,
as necessary, by using a variable geometric step representing
printhead/substrate offset to overlay different nozzles with
different rows of target regions. Using measured per-nozzle droplet
volumes, this process permits combination of specific droplet
volumes means to achieve very specific fill volumes (e.g., to 0.01
pL resolution) per target region, with high confidence that any
droplet volume variations can be accommodated within desired
tolerances. This process can be planned such that multiple nozzles
are used to deposit ink in different rows of target regions with
each pass. In one embodiment, the print solution is optimized to
produce the fewest scans possible and the fastest printing time
possible. Second, in another embodiment, different drive waveforms
can be used for each nozzle, again, using specifically measured
droplet volumes. The print process controls these waveforms such
that specific droplet volumes are aggregated in specific
combinations. Once again, using measured per-nozzle droplet
volumes, this process permits combination of specific droplet
volume means to achieve very specific fill volumes (e.g., to 0.01
pL resolution) per target region. This process can be planned such
that multiple nozzles are used to deposit ink in different rows of
target regions with each pass. In both of these embodiments, a
single row of nozzles can be used or multiple rows of nozzles can
used, arranged as one or more printheads of a printhead assembly;
for example, in one contemplated implementation, thirty printheads
can be used, each printhead having a single row of nozzles, with
each row having 256 nozzles. The printheads can be further
organized into various different groupings; for example, these
printheads can be organized into printhead assemblies each having
five printheads that are mechanically mounted together, and these
resulting six assemblies can be separately mounted into a printing
system. In yet another embodiment, an aggregate printhead assembly
is used which has having multiple rows of nozzles that can further
be positionally offset from each other. This embodiment is similar
to the first embodiment mentioned above, in that different droplet
volumes can be combined using variable effective positional offsets
or geometric steps. Once again, using measured per-nozzle droplet
volumes, this process permits combination of specific droplet
volume means to achieve very specific fill volumes (e.g., to 0.05
pL, or even to 0.01 pL resolution) per target region. This does not
necessarily imply that measurements are free from statistical
uncertainties, such as measurement error; in one embodiment, such
error is small and is factored into target region fill planning.
For example, if droplet volume measurement error is .+-.a %, then
fill volume variation across target regions can be planned to
within a tolerance range of a target fill .+-.(b-an.sup.-1/2)%,
where .+-.(b)% represents the specification tolerance range and
n.sup.1/2 represents the square root of the average number of
droplets per target region or well. Perhaps otherwise stated, a
range that is smaller than specification tolerance can be planned
for, such that when expected measurement error is factored in, the
resultant aggregate fill volumes for target region can be expected
to fall within the specification tolerance range, e.g., as
described above in connection with FIGS. 8A-8B. Naturally, the
techniques described herein can be optionally combined with other
statistical processes.
[0197] Droplet deposition can optionally be planned such that
multiple nozzles are used to deposit ink in different rows of
target regions with each pass, with the print solution optionally
being optimized to produce the fewest scans possible and the
fastest printing time possible. As mentioned earlier, any
combination of these techniques with each other and/or with other
techniques can also be employed. For example, in one
specifically-contemplated scenario, variable geometric stepping is
used with per-nozzle drive waveform variation and per-nozzle,
per-drive-waveform volume measurements to achieve very specific
volume combinations, planned per target region. For example, in
another specifically-contemplated scenario, fixed geometric
stepping is used with per-nozzle drive waveform variation and
per-nozzle, per-drive-waveform volume measurements to achieve very
specific volume combinations, planned per target region.
[0198] By maximizing the number of nozzles that can be concurrently
used during each scan and by planning droplet volume combinations
such that they necessarily meet specification, these embodiments
promise high-quality displays; by also reducing printing time,
these embodiments help promote ultra-low per-unit printing costs,
and thus lower the price point to end consumers.
[0199] FIG. 15D provides a flow diagram relating to nozzle
qualification. In one embodiment, droplet measurement is performed
to yield statistical models (e.g., distribution and mean) for each
nozzle and for each waveform applied to any given nozzle, for any
of and/or each of droplet volume, velocity and trajectory. Thus,
for example, if there are two choices of waveforms for each of a
dozen nozzles, there are up to 24 waveform-nozzle combinations or
pairings; in one embodiment, measurements for each parameter (e.g.
volume) are taken for each nozzle or waveform-nozzle pairing
sufficient to develop a robust statistical model. Note that despite
planning, it is conceptually possible that a given nozzle or
nozzle-waveform pairing may yield an exceptionally wide
distribution, or a mean which is sufficiently aberrant that it
should be specially treated. Such special treatment applied in one
embodiment is represented conceptually by FIG. 15D.
[0200] More particularly, a general method is denoted using
reference numeral 1581. Data generated by the droplet measurement
device is stored in memory 1585 for later use. During the
application of method 1581, this data is recalled from memory and
data for each nozzle or nozzle-waveform pairing is extracted and
individually processed (1583). In one embodiment, as mentioned, a
normal random distribution is built for each variable to be
qualified, as described by a mean, standard deviation and number of
droplets measured (n), or using equivalent measures. Note again
that other distribution formats (e.g., Student's-T, Poisson, etc.),
can be used. Measured parameters are compared to one or more ranges
(1587) to determine whether the pertinent droplet can be used in
practice. In one embodiment, at least one range is applied to
disqualify droplets from use (e.g., if the droplet has a
sufficiently large or small volume relative to desired target, then
that nozzle or nozzle-waveform pairing can be excluded from
short-term use). To provide an example, if 10.00 pL droplets are
desired, then a nozzle or nozzle-waveform linked to a droplet mean
more than, e.g., 1.5% away from this target (e.g., <9.85 pL or
>10.15 pL) can be excluded from use. Range, standard deviation,
variance, or another spread measure can also or instead be used.
For example, if it is desired to have droplet statistical models
with a narrow distribution (e.g., 3.sigma.<1.005% of mean), then
droplets with measurements not meeting this criteria can be
excluded. It is also possible to use a sophisticated/complex set of
criteria which considers multiple factors. For example, an aberrant
mean combined with a very narrow spread might be okay, e.g., if
spread (e.g., 3.sigma.) away from measured (e.g., aberrant) mean
.mu. is within 1.005%, then an associated droplet can be used. For
example, if it is desired to use droplets with 3.sigma. volume
within 10.00 pL .+-.0.1 pL, then a nozzle-waveform pairing
producing a 9.96 pL mean with .+-.0.8 pL 3.sigma. value might be
excluded, but a nozzle-waveform pairing producing a 9.93 pL mean
with .+-.0.3 pL 3.sigma. value might be acceptable. Clearly many
possibilities are possible according to any desired
rejection/aberration criteria (1589). Note that this same type of
processing can be applied for per-droplet flight angle and
velocity, i.e., it is expected that flight angle and velocity per
nozzle-waveform pairing will exhibit statistical distribution and,
depending on measurements and statistical models derived from the
droplet measurement device, some droplets can be excluded. For
example, a droplet having a mean velocity or flight trajectory that
is outside of 5% of normal, or a variance in velocity outside of a
specific target could hypothetically be excluded from use.
Different ranges and/or evaluation criteria can be applied to each
droplet parameter measured and provided by storage 1585.
[0201] Note that depending on the rejection/aberration criteria
1589, droplets (and nozzle-waveform combinations) can be processed
and/or treated in different manners. For example, a particular
droplet not meeting a desired norm can be rejected (1591), as
mentioned. Alternatively, it is possible to selectively perform
additional measurements for the next measurement iteration of the
particular nozzle-waveform pairing; as an example, if a statistical
distribution is too wide, it is possible to specially perform
additional measurements for the particular nozzle-waveform pairing
so as to improve tightness of a statistical distribution through
additional measurement (e.g., variance and standard deviation are
dependent on the number of measured data points). Per numeral 1593,
it is also possible to adjust a nozzle drive waveform, for example,
to use a higher or lower voltage level (e.g., to provide greater or
lesser velocity or more consistent flight angle), or to reshape a
waveform so as to produce an adjusted nozzle-waveform pairing that
meets specified norms. Per numeral 1594, timing of the waveform can
also be adjusted (e.g., to compensate for aberrant mean velocity
associated with a particular nozzle-waveform pairing). As an
example (alluded to earlier), a slow droplet can be fired at an
earlier time relative to other nozzles, and a fast droplet can be
fired later in time to compensate for faster flight time. Many such
alternatives are possible. Finally, per numeral 1595, any adjusted
parameters (e.g., firing time, waveform voltage level or shape) can
be stored and optionally, if desired, the adjusted parameters can
be applied to remeasure one or more associated droplets. After each
nozzle-waveform pairing (modified or otherwise) is qualified
(passed or rejected), the method then proceeds to the next
nozzle-waveform pairing, per numeral 1597.
[0202] As should be appreciated, the nozzle drive structure just
described provides flexibility in printing droplets of different
sizes. The use of precision fill volumes per target region, droplet
volumes, droplet velocities and droplet trajectories enable the use
of advanced techniques that vary fill volumes and plan for
nozzle/waveform and/or droplet use according to defined criteria
(within specification). This provides for further quality
improvements relative to conventional methods.
[0203] FIGS. 16-18B will now be used to provide further detail on
two contemplated droplet measurement devices (or systems), namely,
predicated on shadowgraphy and interferometry, respectively. FIGS.
16-17 will be used to illustrate one embodiment of a printer having
a droplet measurement system, whereas FIGS. 18A and 18B will be
used to discuss shadowgraphy and interferometry, respectively.
[0204] As noted earlier, the present teachings disclose various
embodiments of an industrial inkjet thin film printing system that
includes a drop measurement apparatus integrated into the printing
system. Various embodiments of an inkjet thin film printing system
of the present teachings can utilize imaging techniques, such as
shadowgraphy, or non-imaging techniques such as phase Doppler
analysis (PDA) (a technique based on interferometry), which can
provide a significant advantage for the rapid measurement of a
plurality of nozzles of an inkjet printhead, where various
embodiments of a printhead assembly used in a thin film inkjet
printing system according to the present teachings can have a
plurality of printheads. Such rapid measurement can be performed in
situ at any time during a printing process and can provide data
that can include the volume, velocity and trajectory for each drop
from each nozzle of each printhead. The collective data obtained
from a drop measurement apparatus integrated into an inkjet
thin-film printing system can be utilized to provide uniformity of
ink volume delivered to each of millions of pixels on an OLED panel
display. Other techniques can also be used to provide relatively
rapid measurement of individual droplet parameters, including
without limitation pulse displacement measurement techniques,
planar Doppler velocimetry, flow field visualization with a charge
coupled device, laser Doppler velocimetry, interferometric laser
imaging droplet sizing and/or interferometric particle imaging,
laser Doppler anemometry, phase Doppler anemometry, or other
processes. In some embodiments, these techniques are "imaging"
techniques, such that a photograph (or other form of image) is
taken of a measurement area; in other embodiments, non-imaging
optical techniques are used, e.g., where optical sensors are used
to detect an interference pattern based on incident light without
generating an image (such as of a droplet's shape). Other
techniques can also be used. In the embodiments discussed herein,
discussion will focus on use of interferometry-based and
shadowgraphy-based techniques (as non-imaging and imaging
techniques, respectively), but any suitable droplet measurement
technique can be used to measure droplet velocity, volume, flight
trajectory, or another desired parameter.
[0205] When depositing a film in the manufacture of an OLED panel,
it is often desirable to deposit film material having uniform
thickness across the panel because the thickness of the deposited
film material often impacts panel performance, and good display
uniformity is an important attribute of a good OLED panel. When
using an inkjet printing method to deposit the film, drops of ink
are ejected from the printing apparatus onto the panel substrate,
and the thickness of the deposited film in each area of the panel
is typically related to the volume of ink dispensed over that area
of the panel, which is further related to the volume and placement
of drops onto a panel surface. It is therefore often desirable to
dispense volumes of ink uniformly, both in terms of the volume and
position of the dispensed drops, across an OLED panel display.
[0206] As noted earlier, an inkjet printing system can typically
have at least one printhead that has multiple inkjet nozzles, each
nozzle capable of dispensing drops of ink onto the panel surface.
Typically, there is variation across the multiple nozzles of a
printhead with respect to the volume, trajectory, and velocity of
the drops dispensed. Such variations can arise from a variety of
sources, including, but not limited to, variations in nozzle
working conditions, variations in intrinsic nozzle actuator
behavior including age of a piezoelectric nozzle driver, variations
in ink, and variations in intrinsic nozzle size and shape. The
impact of such variations can result in non-uniformity in the
volume loading across the panel. For example, variations in drop
volume can lead directly to variations in the deposited volume,
whereas variations in the drop velocity and trajectory can
indirectly lead to variations the deposited volume of an ink by
causing variation in the placement of the drops on an OLED panel
surface. In theory, these variations can be avoided by using only a
single nozzle when printing, but printing with a single nozzle is
too slow to be practical in real world manufacturing applications.
In light of such variations in the ink drops dispensed from
different nozzles, and the practical necessity of using multiple
nozzles to get reasonable processing speed when using inkjet
printing for manufacturing applications, it is desirable to have
methods and associated apparatuses to provide for dispensing of
uniform volumes of ink across an OLED panel area in spite of such
nozzle-to-nozzle drop variations.
[0207] A measurement apparatus integrated into a thin film inkjet
printing system according to the present teachings can be used to
provide the actual measurements of volume, velocity and trajectory
for each nozzle of an inkjet printhead at any time during or
intermittent to runs of a printing process. Such measurement can
provide for mitigation of nozzle-to-nozzle drop variations so as to
achieve a more uniform deposition of film material using the inkjet
method. In some embodiments, such measurement can be used to tune
printhead performance by adjusting the drive waveforms to each of
the individual nozzles so as to directly reduce the
nozzle-to-nozzle drop variation. In some embodiments, such
measurement can be used as an input to a print pattern optimization
system that can reduce nozzle-to-nozzle variation by adjusting
nozzle selection for drop deposition so as to average out
nozzle-to-nozzle drop variation in the deposited film. Various
embodiments of a measurement apparatus integrated into a thin film
inkjet printing system of the present teaching can utilize various
imaging techniques, such as shadowgraphy, or non-imaging
techniques, such as PDA. PDA in particular can provide a
significant advantage of rapidly analyzing a plurality of nozzles
of an inkjet printhead, especially useful for systems having many
nozzles and/or printheads.
[0208] In this regard, an inkjet thin film printing system
according to various embodiments of the present teachings can be
comprised of several devices and apparatuses, which allow the
reliable placement of ink drops onto specific locations on a
substrate. These devices and apparatuses can include by way of
non-limiting example a printhead assembly, ink delivery system,
motion system, substrate support apparatus, such as a floatation
table or chuck, substrate loading and unloading system, a printhead
maintenance system and a printhead measurement apparatus.
Additionally, an inkjet thin film printing system can be mounted on
a stable support assembly that can include, for example, a granite
or metal base. A printhead assembly can consist of at least one
inkjet printhead, with at least one orifice capable of ejecting
drops of ink at a controlled rate; such ejected drops being further
characterized by their volume, velocity, and trajectory.
[0209] As printing requires relative motion between the printhead
assembly and the substrate, a printing system can include a motion
system, such as a gantry or split axis XYZ system. Either the
printhead assembly can move over a stationary substrate (gantry
style), or both of the printhead and substrate can move, for
example, in a split axis configuration. In another embodiment, the
print station can be fixed, and the substrate can move in the X and
Y axes relative to the printheads, with Z axis motion provided
either at the substrate or the printhead. As the printheads move
relative to the substrate, drops of ink are ejected at the correct
time to be deposited in the desired location on the substrate. The
substrate is inserted and removed from the printer using a
substrate loading and unloading system. Depending on the printer
configuration, this can be accomplished with a mechanical conveyor,
a substrate floatation table, or a robot with end effector. A
printhead measurement and maintenance system can be comprised of
several subsystems that allow for measurements such as drop volume
verification, drop volume, velocity, and trajectory measurements,
as well as printhead maintenance procedures, such as wiping of the
inkjet nozzle surface, priming for ejecting ink into a waste basin.
Given the variety of components that can comprise an inkjet thin
film printing system, various embodiments of an inkjet thin film
printing system according to various embodiments of the present
teachings can have a variety of footprints and form factors.
[0210] As a non-limiting example, FIG. 16 depicts an inkjet thin
film printing system according to various embodiments, which can be
used for printing a substrate such as, for example, but not limited
by, an OLED panel. In FIG. 16, inkjet thin film printing system
1600 utilizes a split-axis motion system. The inkjet thin film
printing system 1600 can be mounted on printing system support
assembly 1610, which can include a pan 1612 carried by a support
frame 1614. A base 1616 is mounted above the pan, where the base
can be optionally constructed from granite or metal. The inkjet
thin film printing system can include a motion system 1620, for
example, a split axis motion system as indicated.
[0211] The motion system 1620 is seen to include a bridge 1622
which supports an X-axis carriage 1624, which in turn mounts a
Z-axis mounting plate 1626. The Z-axis mount plate in turn supports
a printhead mounting and clamping assembly 1628, used to mount an
interchangeable printhead assembly 1640. For the split-axis motion
system 1620, a Y-axis track 1623 can be mounted upon the base 1616,
so as to provide support for a Y-axis carriage 1625, which in turn
carries a substrate support assembly 1630; these various components
provide for Y-axis travel of a substrate mounted on substrate
support assembly 1630. As shown in FIG. 16, for various embodiments
of a thin film printing system, the substrate support assembly 1630
can be a chuck. A substrate support assembly can be provided by a
floatation table, for example, as described in detail in U.S. Pat.
No. 8,383,202, which is incorporated herein by reference. The
inkjet thin film printing system 1600 can utilize a system assembly
that supports one or more modular inkjet printhead assemblies, such
as the various printhead assemblies shown mounted in a tool
carousel 1645. Providing for selective interchange of various
printhead assemblies can provide an end user with flexibility for
the efficient sequential printing of a variety of inks of various
formulations on a substrate during a print process, such as during
the printing of an OLED panel substrate. Note that this is not
required for all embodiments, i.e., other embodiments can feature a
single printhead assembly that is not changed in between different
printing processes. For example, one contemplated embodiment
features an assembly line of multiple printers, each performing a
respective print process (for example, using respective inks);
techniques described herein can be applied to each such
printer.
[0212] A printhead assembly can include a fluidic system having an
ink reservoir in fluid communication with at least one inkjet
printhead for delivering, for example, OLED film-forming material
onto substrates. In that regard, as shown in FIG. 16, a printhead
assembly 1640 can include at least one printhead 1642. In various
embodiments, a printhead assembly can optionally include fluidic
and electronic connections to each printhead. Each printhead, in
turn, can have a plurality of nozzles or orifices capable of
ejecting ink droplets at a controlled rate, with a measurable
droplet volume, velocity and trajectory. Various embodiments of
printhead assembly 1640 can have between about 1 to about 30
printheads per printhead assembly. A printhead 1642 can have
between about 16 to about 2048 nozzles, each of which can expel a
drop volume of between about 0.10 pL to about 200.00 pL.
[0213] Measuring the performance of each nozzle of a given
printhead can include checking for nozzle firing, as well as
measuring drop volume, velocity and trajectory. As previously
mentioned, having such measurement data can provide for either
tuning a head before printing to provide for more uniform
performance for each nozzle, or for using the measurement data to
provide for printing algorithms that can compensate for the
difference during printing, or combinations of such approaches.
Clearly, having reliable and up to date sets of measurement data
can provide for a variety of approaches that can use the
measurement data to compensate for nozzle-to-nozzle drop volume
variations and permit planned printing processes that combine
droplets of different volumes (from the same nozzle using different
drive waveforms or from respective nozzles). As noted earlier,
measurement data is advantageously collected to develop a
population of measurements representing a distribution for each
nozzle, such that an expectation of mean droplet volume, trajectory
and velocity can be developed and used in print planning, with a
well-formed understanding of expected variation for each such
droplet parameter.
[0214] In this regard, the depicted inkjet thin film printing
system can include a droplet measurement device or system 1650,
which can be mounted on a support 1655. It is contemplated that
various embodiments of the droplet measurement system 1650 can be
based on imaging or non-imaging techniques as mentioned, for
example, a shadowgraphy- or interferometry-based method.
Embodiments which utilize non-imaging PDA techniques can provide a
significant advantage of rapidly analyzing between about 16 to
about 2048 nozzles of each printhead, such as printhead 1642 (e.g.,
which is approximately 50 times more rapid than typical imaging
techniques). Recalling that a printhead assembly can include, e.g.,
thirty printheads (i.e., with the printing system using more than
10,000 nozzles), this permits rapid, in situ, dynamic measurement
within a printer of all nozzles (and all alternate drive waveforms
if pertinent to the embodiment), with droplet re-calibration every
2-24 hours, or more frequently. Moreover, various embodiments of
systems and methods according to the present teachings can utilize
a PDA measurement device integrated into a gas enclosure assembly
and system that can house a printing apparatus. Such systems and
methods utilizing a PDA measurement device integrated into a gas
enclosure assembly and system housing a printing apparatus can
provide for rapid in situ measurement of a plurality of nozzles in
a printhead. This is especially useful for ensuring uniform
deposition volumes over a large substrate, for example, having one
or more OLED devices, and reducing any Mura effects. As will be
discussed further below, note that the droplet measurement system
includes at least one measurement device for optically measuring
droplet parameters; a second imaging device can be used to obtain
more accurate measurements or differential measurement (for
example, to compute nozzle position or droplet velocity or flight
trajectory), or for purposes of precisely aligning the droplet
measurement system, such that each time it is moved to the
maintenance bay, system software can precisely locate any
individual nozzle to a nearest-micron resolution. This will be
discussed further below.
[0215] Numeral 1617 is used to designate an area of the ink jet
printing apparatus associated with the droplet measurement system
1650. This region is illustrated in enlarged detail in FIG. 17.
[0216] As shown in FIG. 17, a printhead assembly 1740 can be held
during printing by a printhead mounting and clamping assembly 1728,
itself carried once again by a Z-axis mount 1726 of a motion
system. In this regard, the motion system is used to position the
printhead assembly 1740 for measurement proximate to droplet
measurement system 1750, e.g., in a service area or service
station. As noted earlier, the droplet measurement system 1750 can
be designed for selective engagement and disengagement while the
printhead assembly 1740 is in this position. With a large printhead
assembly (e.g., having thousands or nozzles), such a structure
permits a droplet measurement system to perform tests while the
printhead assembly 1740 is "parked," with other tests being
concurrently performed by other test or calibration equipment or
processes (not shown). For example, a printhead nozzle can be
purged, cleaned, or otherwise managed, with the use of concurrent
processes applied to help minimize any downtime of the overall ink
jet printing system; this helps maximize manufacturing
productivity. As noted earlier (and as explained below relative to
FIG. 19), droplet measurement (and other servicing) can be
performed while substrates are being transported, dried, cured,
loaded or unloaded, further minimizing any system downtime by
stacking droplet measurement against other, unavoidable tasks
associated with the printing/manufacturing operation. Each nozzle
of a printhead 1742 of the printhead assembly 1740 can be adjusted
to a measurement area 1756 for measurement of drops ejected from
each nozzle using droplet measurement system 1750. Note that in
this embodiment, individual printheads 1742 can be moved relative
to other printheads for analysis, but once again, this is not
required for all embodiments. For example, it is also possible to
have each printhead statically mounted during measurement, with the
droplet measurement system advanced to each printhead location and
each nozzle location within a given printhead; as noted earlier,
this permits concurrent processing or "stacking" of multiple
servicing operations while the printhead assembly is parked. It is
also possible to use multiple droplet measurement systems to
independently measure different nozzles, for example, of different,
spatially-separated printheads.
[0217] For purposes of illustration, it should be assumed that the
droplet measurement system is a PDA apparatus (i.e., an
interferometry-based device), having a light source such as a laser
source and light transmission optics a beam splitter and a
transmission lens. Additionally, such a PDA apparatus can also have
receiving optics including a receiving lens and a plurality of
photodetectors. For example, a first optical side 1752 of droplet
measurement system 1750 can source one or more light beams for
measurement, and focus light on a measurement area 1756, as
indicated by the hatched lines, while a second optical side 1754
can pass measurement light which has been scattered from a droplet
in the measurement area 1756 to receiving optics and one or more
light detectors.
[0218] The droplet measurement system 1750 can be interfaced to a
computer or computing device (not shown), either directly or
remotely. Such a computing device can be configured to receive
signals representing measured droplet volume, velocity and
trajectory for each droplet produced by a nozzle (or
nozzle-waveform combination) from each printhead 1742 of the
printhead assembly 1740. Once again, multiple measurements of many
droplets from each nozzle/nozzle-waveform pairing are
advantageously performed, in order to develop statistical
populations representing the various producible droplets.
[0219] As noted earlier in connection with FIGS. 11 and 12, various
embodiments of a printing system can be housed in a gas enclosure
providing an inert, low-particle environment, with droplet
measurement preferably occurring in such an environment. In one
embodiment, droplet measurement is performed in a common atmosphere
used for printing, e.g., in the same general (enclosed) chamber. In
a second embodiment, a separate, fluidically isolated chamber is
used for measurement, for example, as part of a service station
area.
[0220] FIG. 18A shows a layout of a droplet measurement system 1801
specifically configured to use shadowgraphy techniques. In
particular, a printhead 1803 is seen at a position where it will
jet a droplet 1805 into a spittoon (not shown in FIG. 18A). During
flight of the droplet 1805, the droplet traverses a measurement
area where the droplet is illuminated by a light source; in FIG.
18A, the light source is seen to consist of a strobe light 1807 and
optional light source optics 1809, employed for example to direct
light from the strobe light 1807 to the measurement area (e.g.,
from below the measurement plane as exemplified earlier in
connection with FIGS. 2A-E or FIGS. 16-17). The optics direct the
light to illuminate a relatively large area, represented by
focusing or redirection paths 1811, to expose the droplet
repeatedly in rapid success at different positions for capture in a
single image frame; FIG. 18A therefore shows three different
positions of the same droplet, representing different flashes of
the strobe, which are collectively imaged together. Thus, for
example, an image frame under analysis will show what appears to be
multiple droplets at different positions (i.e., per multiple
instances of numeral 1805), but these are in reality the same
droplet at different positions along a flight trajectory. A second
set of optics 1813 provide for light collection and focus, such
that a captured image clearly depicts both droplet contour and a
variable amount of shadow representing droplet diameter, used by
image processing software to compute droplet volume. As should be
appreciated, by imaging the same droplet during its flight at
multiple positions, the droplet measurement system can use one
image from to compute droplet volume, velocity and trajectory;
shadow parameters are used to calculate droplet mass, and thus
volume, and relative positions of the droplet are used to calculate
both velocity and trajectory. For example, a droplet that increases
in apparent diameter at a "lower position" within the captured
image frame is traveling toward light receiving optics 1813, and
conversely one that decreases in diameter is traveling away. The
light receiving optics 1813, in turn, convey captured light to a
camera 1815, for example, a high-resolution CCD camera that images
droplet contours and shadows as depicted by graphic 1817. The
droplet measurement system optionally provides control over
zoom/focus (1819) and/or XY position (1821) of the receiving
optics, all under the control of a governing computer system 1823
(and instructions stored on non-transitory machine readable media
used by one or more processors of the computer system for such
control). In one embodiment, as mentioned, the receiving optics and
light source are mounted to a common chassis and transported
together, providing for a fixed focal path, but this need not be
the case for each embodiment. The depicted system captures the
travel of each droplet in a few microseconds, while image
processing application software 1825 run by the computer system
1823 then calculates droplet parameters. As an example, the
computer can provide for display and visualization (1827) of the
droplet and/or measured parameters and can calculated values for
the various parameters, such as volume, velocity and trajectory
(1829, 1831 and 1833), or other parameters. Note that the computer
system 1823 can be part of the ink jet printing system, or it can
also be remote (for example, connected by a local area network
"LAN" or wide area network "WAN," e.g., the Internet, to collect
data on a remote basis); similarly, display and visualization 1827
can also be provided at a location remote from the computer system
1823, also via a LAN or WAN. As indicated by numeral 1835, the
computer system 1823 compiles the measured parameters to form a
statistical population of measurements for a given nozzle that
produced the droplet (and for a given nozzle-waveform pairing if
alternate drive waveforms are used by the particular embodiment of
the printing system). The computer system 1823 optionally stores
the individual measurements themselves and/or a statistical summary
(e.g., mean and standard deviation or variance in case of a Normal
Distribution, and comparable metrics if other distribution types
are supported) in a database 1837. With sufficiently robust
populations measured, the database can then be applied in planning
and/or optimization of the printing process as described above,
e.g., using specific combinations of droplet means to obtain
composite fills per target region, where the composite fills can be
based on different droplet volumes (e.g., from different nozzles
and/or drive waveforms).
[0221] FIG. 18B shows a layout of a droplet measurement system 1851
specifically configured to use PDA (interferometry) techniques. A
printhead is illustrated in position for measurement, as referenced
by numeral 1853. The printhead will jet droplets from a specific
nozzle (e.g., using a specific drive waveform) downward into a
droplet measurement area, as indicated by numeral 1855. As with
prior embodiments, the droplet measurement system can be optionally
designed for three dimensional transport relative to a parked
printhead, such that the droplet measurement area is effectively
"brought to" the particular nozzle's droplet flight path. A light
source, in this case a laser 1857, generates a beam of light 1859,
which is directed to become incident on a beam splitter 1861. The
beam splitter produces two or more light beams 1863 and 1864 (only
two are illustrated in FIG. 18B), which light optics 1865 then
redirects in a convergent manner, i.e., such that the beams
intersect as represented by numerals 1866 and 1867 at a position
incident with an in-flight droplet. Note that the light optics 1865
optionally provides for the laser 1857 to be mounted below the
measurement plane (see the discussion of FIGS. 2D and 2E, above),
and optionally redirects the light path 1859 or 1863/1864 so as to
arrive at the measurement area (e.g., by redirecting one or more of
the light paths around the periphery of a spittoon). Note that
numeral 1869 is used to represent the general, continued dimension
of the illumination optics (such as light paths 1866 and 1867). As
noted earlier, with an interferometry-based technique, a
diffraction pattern is captured from a direction angle offset to
this continued dimension 1869, as represented by angle measure
1873. This angular deviation is typically ninety degrees, but other
directions of capture can also be used. Accordingly, measurement
light 1871 is received at this angular deviation from incident
light by a second set of optics 1875 (labeled "Optics 2"), and
redirected for below deposition-plane-measurement by non-imaging
detectors 1877. These detectors produce data representing a
diffraction pattern, as illustrated by graphic 1879; as should be
appreciated (e.g., by contrasting this graphic 1879 with graphic
1817 from FIG. 18A), the spacing of lines in the diffraction
pattern provides a measure of droplet volume, with this spacing
much more rapidly processed to measure droplet volume than with the
imaging technique represented by FIG. 18A. Note that, while FIG.
18B illustrates the use of one light source 1857 and two incident
beams 1866 and 1867, other embodiments use more than one light
source and more than two incident beams, e.g., to capture droplet
velocity, trajectory and other parameters. As with the embodiment
of FIG. 18A, in FIG. 18B, a computer (1881) optionally provides for
zoom/focus (1883) and XY transport of the measurement optics, runs
suitable application software (1887) to compute various droplet
parameters, and provides for display and visualization (1889). Just
as before, these various elements can be integrated with a printer
or manufacturing device, or can be dispersed across a WAN or LAN,
controlled by multiple, separated processors of respective
computers or servers. As before, measured parameters can include
droplet volume (1891), velocity (1893) and trajectory (1895), with
data representing statistical populations (1897) stored in a
database (1899) for purposes of scan planning. This scan planning
can once again combine droplet parameters from different nozzles
and/or waveforms to perform precise fills of target regions which
are deliberately based on multiple, different droplet volumes.
[0222] It was earlier mentioned that droplet parameters can change
over time, for example, according to system parameters, ambient
conditions or ink characteristics. An industrial printing system
therefore advantageously updates droplet measurement, not just of a
single droplet, but of a statistical population for each droplet
(and of an expected mean volume/velocity and trajectory of each
droplet) on a relatively frequent basis; this helps ensure precise
droplet data that is always accurate and up to date, permitting
planned droplet combinations that reliably conform to maximum
tolerances for composite ink fills. It has been found that droplet
parameters in practice change somewhat slowly, for example, with
detectable variation every 2 to 12 hours. The use of an in situ
droplet measurement makes it possible to repeatedly perform dynamic
measurement and construction of new statistical populations of
measured parameters within this time range; note that with
conventional techniques, it may take many hours to measure a large
scale printhead or printhead assembly; through the use of fast
techniques, such as PDA as discussed above, it becomes possible to
update all statistical measurements on a very rapid basis, e.g.,
with 30 minutes lead time or less, even where thousands of print
nozzles are involved. Systems which utilize some or all of the
techniques discussed above therefore facilitate and enable
industrial printers having recalibrated droplet measurement
parameters based on statistical distributions within the mentioned
2-to-12 hour time frame, and therefore facilitate more accurate
printing within maximum tolerances for target region fill
variation.
[0223] As noted earlier, in one contemplated embodiment, the
printer is intermittently or continuously controlled to perform
droplet parameter measurement any time the printer is not actively
printing. This helps maximize uptime of a manufacturing line. As
mentioned, in one embodiment, any time a printhead assembly of the
printer is not in use, that printhead assembly can be diverted for
droplet parameter measurement. For example, any time a substrate is
being loaded or unloaded, advanced between chambers, or dried,
cured or otherwise processed, a print carriage can transport the
printhead assembly to a service station for droplet measurement
and/or other servicing operations. Such operation helps further
provide for frequent, dynamic update of droplet statistical
populations for each nozzle, as just described; optionally employed
with a PDA-based droplet measurement device (e.g.,
interferometry-based techniques), such a control scheme can render
the droplet measurement task transparent to any desired printing
operation. Note that in a contemplated system, this control is
implemented by control software, running on at least one processor,
that manages the printing process; note further that this software
can be resident on a printer, one or more computers or servers, or
both.
[0224] FIG. 19 shows one example 1901 of flow for such a control
process. As mentioned, this process can be optionally implemented
by instructions stored on non-transitory machine-readable media
that, when executed, cause at least one processor to
perform/provide the depicted processes.
[0225] FIG. 19 is split into three general regions 1903, 1905 and
1907, respectively representing startup and offline initialization
processes, online printing, and offline special operations. As a
system is powered-on, the system is typically subjected to an
initialization process 1909 where new measurements are taken for
each nozzle to develop statistical populations, as has been
described above. At the same time, a calibration process (not
shown) can also be called upon to select multiple nozzle firing
waveforms for each nozzle (e.g., using an iterative process as
previously described to select 16 waveforms that produce droplet
volumes within .+-.10.0% of a target droplet volume). Statistical
populations are thus developed for each such waveform and/or nozzle
which include a mean droplet volume as well as desired spread. As
noted previously, in one embodiment, a fixed number of measurements
are performed for each droplet, whereas in another embodiment, the
number can vary from nozzle-to-nozzle (or per nozzle-waveform
pairing) to achieve a sufficiently tight statistical spread; also,
in one embodiment, a validation or qualification process can be
optionally applied where nozzles (or nozzle-waveform pairings) not
producing droplets having desired parameters can be disqualified
from use in print planning. The measurements and/or statistical
measures are then stored (1911) for each nozzle and for each
nozzle-waveform pairing, as applicable. Note that this startup
calibration can be performed the very first time the system is
turned on (e.g. on a one time basis), and in other embodiments, it
is performed every time the system is powered-up anew. For example,
it can be advantageous (if a production line is only run during a
portion of each day) to store previously computed droplet
parameters (and then to update these parameters, according to the
process discussed below). Alternative, new parameters can be
computed anew with each power cycle.
[0226] The system also optionally receives parameters defining the
print process and substrate parameters (1913) and automatically
plans droplet combination and scan processes as previously
described (1915). In other contemplated implementations, e.g.,
where the printer is part of an assembly line for a specific OLED
display product, these parameters and planning may be invariant.
However, if droplet parameters can change, then so to can print
planning, and process 1915 is therefore optionally re-performed any
time statistical parameters change, e.g., as an automated
background process each time a droplet measurement system is
engaged (as indicated by numeral 1917).
[0227] With system print parameters and means for droplet
parameters available (i.e., for each nozzle or nozzle-waveform
pairing), the system may then enter an online mode in which it
performs printing as desired, per numeral 1919. That is, a
substrate can be loaded or transported into the printer, and
printing of one or more OLED device thin film layers can then be
performed as desired. However, to minimize device downtime, each
time printing is stopped (e.g., to load or unload a substrate), the
various printhead nozzles are subjected to renewed droplet
measurement to update statistical droplet populations on an
intermittent or periodic basis. For example, it is expected that a
typical print process for a large HDTV substrate (representing
several large size TV screens) can be completed in about 90
seconds, with the completed substrate then being unloaded or
advanced to another chamber (1920) during a process that takes,
e.g., 15-30 seconds. During this 15-30 second intermission, the
printer is not being used to print and, accordingly, droplet
measurements can be performed during this time. For example,
control software for the printer controls a substrate transport
mechanism to move an old substrate out from outside the reach of a
print head carriage, and simultaneously, the control software moves
the print head assembly to a service station for droplet
measurement and/or other servicing functions. As soon as the
printhead assembly is parked (1921), the control software
selectively engages the droplet measurement system per numeral 1923
to perform droplet measurement. As noted earlier, measurement can
develop statistical populations for droplets produced by different
nozzles or different nozzle-waveform pairings. To supplement any
previously stored measurements, the droplet measurement system is
operated in a loop where it takes as many droplet measurements as
possible until the next substrate is loaded or it is otherwise time
for printing to recommence. For example, per function blocks 1925,
1927, 1929 and 1931, the droplet measurement system (1) measures
multiple droplets for a given nozzle or nozzle/waveform pairing,
(2) stores or updates results in memory (i.e., either storing the
new, additional measurement data as raw data or storing updated
means or statistical summaries, or both), (3) identifies a nozzle
address (or nozzle-waveform identifier for an ensuing measurement
cycle) and (4) then proceeds as appropriate to another nozzle or
nozzle-waveform pairing for another set of measurements. The
process of loading/unloading a substrate can potentially take a
variable amount of time and, therefore, when the system is ready
for a new printing cycle, control software issues an interrupt or
function call (1933) to disengage service operations (1935) as
appropriate (e.g., including the droplet measurement system) and
return the printhead assembly to active printing (1919). As
mentioned, control software also transparently updates or
recomputes droplet combinations which might no longer be valid due
to updates in per-nozzle droplet means. Note that because the
droplet measurement loop stores an address or location for an
ensuing measurement cycle (1930), the system effectively performs
droplet measurement for a small window of nozzles/droplets,
precessing on a circular basis through the thousands of different
nozzles/nozzle-waveform pairings available for use in producing
droplets. Printing is then performed until the next substrate
iteration is completed, at which time that substrate is unloaded
and the measurement/servicing cycle continues. By stacking droplet
measurement as described behind other printer operations, these
techniques help substantially reduce any system downtime, once
again, maximizing manufacturing throughput. Note that while the
depicted method engages the droplet measurement system with every
load cycle, this need not be the case for all embodiments, i.e., it
may be desired to update droplet measurements at a specific rate
(e.g., every 8 hours) and thus, if droplet statistical populations
are built more quickly using the mentioned stacking operations, it
may be desired to instead run different servicing operations during
substrate loads and/or transport and/or curing operations. FIG. 19
also shows a special maintenance box 1937, associated with special
ad-hoc actions, for example the need to change a printhead, or
another offline process. Finally, as noted earlier, nearly any type
of print head maintenance or other nozzle-based analysis can be
performed as part of an "online" process, e.g., in between
successive substrates in a manufacturing line. Per-nozzle and/or
per-drive waveform droplet parameter measurement is provided as one
example only.
[0228] FIG. 20 illustrates another embodiment of a method of
droplet measurement, generally represented by numeral 2001. When a
printhead is mounted or it is otherwise desired to calibrate the
droplet measurement system to correct for positional offset, a
calibration routine can be run in order to precisely match droplet
measurements with a given printhead nozzle. In a typical
embodiment, this alignment process is performed with the aid of an
"upward facing camera" or other imaging device that takes an image
of a printhead from beneath, that is, looking upward from the
perspective of a substrate at the nozzle plate to identify one or
more fiducials or alignment marks (2003). As noted before, in one
embodiment, the camera (imaging system) can be the same device as
used for droplet measurement, but it can also be a separate imaging
device. For an exemplary printhead having, e.g., 1024 nozzles
arranged in four rows of 256 nozzles, the fiducials are used to
determine offset, rotation and skew between the nozzle plate and a
grid system corresponding to the imaging device. Note that in one
embodiment, the fiducials can optionally be specific nozzles
(2005), for example, the nozzles closest to the corners of the
printhead (e.g., first and fourth rows, nozzles 1 and 256); other
mechanisms can also be used. In a typical implementation, printhead
configuration data (2007) is loaded into the system by software and
used to identify these corner nozzles and used to map address of
all nozzles to the imaging system's grid 2009, with interpolation
relied upon to initially estimate position of each nozzle (2011).
To provide an example, in one embodiment, system software is
designed to accommodate different printheads with different nozzle
configurations, and to this effect, the system software loads the
printhead configuration data to identify number of rows, presence
of fiducials (if any), number of nozzles per-row, average vertical
and horizontal offset between rows and columns of nozzles, and so
forth. This data enables the system software to estimate the
position of each nozzle on the printhead, as mentioned. In one
contemplated system, this calibration process is performed once a
printhead is changed, but not in between print processes; in a
different embodiment, this calibration process is performed each
time the droplet measurement system is initialized, e.g., with each
new measurement run in between two print operations.
[0229] It was earlier-mentioned that nozzle (and nozzle-waveform)
measurement can be performed on a rolling basis, precessing through
a range of nozzles with each break in between substrate print
operations. Whether engaged to measure all nozzles anew, or on such
a rolling basis, the same basic process of FIG. 20 can be employed
for measurement. To this effect, per numerals 2013 and 2015, when
the droplet measurement device is engaged for a new measurement
(either on the heels of prior measurement or a substrate print
operation), the system software loads a pointer which identifies
the next nozzle for which measurements are to be taken (e.g., for a
second printhead, "nozzle 2,312"). In the case of initial
measurement (e.g., responsive to installation of a new printhead,
or a recent boot-up, or a periodic process such as a daily
measurement process), the pointer would point to a first nozzle for
a printhead, e.g., "nozzle 2, 001." This nozzle either is
associated with a specific imaging grid access or one is looked-up
from memory. The system uses the provided address to advance the
droplet measurement system (e.g., the spittoon and measurement area
referenced earlier) to a position corresponding to the expected
nozzle position. Note that in a typical system, the mechanical
throws associated with this movement are quite precise, i.e., to
approximately micron resolution. The system optionally at this time
searches for nozzle position about the expected micron-resolution
position, and finds the nozzle and centers on its position (2017)
based on image analysis of the printhead within a small
micron-distance from the estimated grid position. For example, a
zig-zag, spiral or other search pattern can be used to search about
the expected position for a nozzle. A typical pitch distance
between nozzles might be on the order of 250 microns, whereas
nozzle diameter might be on the order of 10-20 microns. Once the
nozzle of interest is identified, the software fires a droplet from
the nozzle in question and relies on the droplet measurement system
to confirm that the nozzle in-question did indeed fire (which then
confirms the nozzle's identity). FIG. 20 shows this process as
being performed every time a new nozzle is identified for
measurement (e.g., every time the droplet measurement system
moves), but it is also possible in some embodiments to perform this
measurement once (e.g, in situations where the droplet measurement
system grid is very tight) during an off-line configuration, to
store the grid position for each nozzle, and then to update this
position only when the printhead is changed or in response to error
processing. In systems where the mechanics of the droplet
measurement system and/or printhead position are not very precise,
it can be advantageous to use an estimate and search function for
each nozzle anytime there is a change in the nozzle under scrutiny.
Note that as implied by numeral 2019, in one embodiment, the
estimate and search function aligns the droplet measurement device
(and its associated optics) in each of three dimensions (xyz) with
the printhead nozzle under scrutiny.
[0230] The precise z position of each nozzle (distance relative to
droplet measurement area) is then adjusted (2021) in order to
ensure consistent droplet measurement and/or image capture. For
example, it was mentioned earlier that a droplet measurement system
typically determines droplet velocity and flight trajectory by
measuring each droplet multiple times, and calculating these
parameters based on distance (e.g., relative to a centroid of each
droplet image). Various parameters can affect proper droplet
measurement, including error in strobe timing (e.g., for a
shadowgraphy-based droplet measurement system), uncorrected offset
between the droplet imaging system and the nozzle plate, nozzle
process corners and other factors. In one embodiment, a variety of
statistical processes are used to compensate for such errors, for
example, in a manner that normalizes strobe firing relative to
droplet measurement locations across all droplets; for example, if
a hypothetical printhead has 1,000 nozzles, then the system can
normalize z-axis offset from the printhead plate by picking an
average offset which produces a minimum of positional error while
centering a desired number of droplets (on average across the 1,000
nozzles or subsets thereof) in the measurement area, in terms of
average droplet image position. Analogous techniques can be applied
to an interferometry-based system or to other droplet measurement
systems.
[0231] FIG. 20 shows a droplet measurement area 2023 and a
hypothetical passage of two droplets 2024 and 2026 through that
measurement area, along respective hypothetical trajectories 2025
and 2027. Several things should be noted about the example provided
by this FIG. First, velocity and trajectory measurement is seen to
be dependent on measuring the same droplet multiple times (three
each in the case of droplets 2024 and 2026). This requirement can
be used to properly position the measurement area relative to the
strobe (or imaging source) firing, by one or more of changing the
timing of the strobe (or light source), changing the drive waveform
used to launch the associated droplets, changing z-axis position of
the droplet measurement system, and/or changing z-axis position of
the printhead. For example, if three droplet images are expected
for a single droplet as the strobe is repeatedly fired (during a
single exposure, in the case of a shadowgraphy-based system), but
only two are observed, the measurement area is misaligned in
height, and is adjusted to effectively redefine where droplet
positions are captured relative to the measurement area until three
representations of a droplet are obtained. Naturally, this
hypothetical provides an example only and other implementations
might measure more than 3 strobed droplet representations or less
than three. Note also deviation in trajectory 2025 relative to
trajectory 2027 might be due to statistical variation in the way
the droplets are produced, and so can be optionally used to build a
statistical model representing mean droplet trajectory (in terms of
alpha and beta angle) and standard deviation in each of these
dimensions. As should be appreciated, while droplet measurement
areas 2023 shows a two-dimensional droplet depiction (e.g., a yz
plane as per the drawing page), trajectory angle relative to the x
axis can be derived from changes in apparent droplet size or focus
in a given image frame amongst the multiple strobed droplet
representations, indicating that droplet is getting nearer or
farther away from the plane of the drawing sheet represented by
FIG. 20; analogous interference pattern changes are applied in the
case of interferometry-based techniques.
[0232] The scheme represented within measurement 2023 can also be
used to measure nozzle bow. That is, as an example, if it is
assumed that droplets 2024 and 2026 originate from a common exact
nozzle position, but the reverse trajectory does not align with the
expected y-axis center of the droplet measurement area (i.e., from
the left-to-right relative to the drawing page) that the nozzle in
question could be offset in its y-axis position relative to other
nozzles in the same row or column. As implied by the discussion
earlier, such aberration can lead to idealized droplet firing
deviations that can be taken into account in planning precise
combinations of droplets, i.e., preferably, any such "bow" or
individual nozzle offset is stored and used as part of print scan
planning, as discussed earlier, with the printing system using the
differences of each individual nozzle in a planned manner rather
than averaging out those differences. In an optional variation, the
same technique can be used to determine non-regular nozzle spacing
along the x-axis, although for the depicted embodiment, any such
error is subsumed in correction for droplet velocity deviations
(e.g., any such spacing error can be corrected for by adjustments
to nozzle velocity or per nozzle firing delays). To determine
y-axis bow of a nozzle producing droplets 2024 and 2026, the
respective trajectories 2025 and 2027 are effectively reverse
plotted (or otherwise mathematically applied) with other
measurement trajectories for the same nozzle and used to identify a
mean y-axis position of the specific nozzle under scrutiny. This
position may be offset from an expected location for such a nozzle,
which could be evidence of nozzle bow.
[0233] As stated before and as implied by this discussion, one
embodiment builds a statistical distribution for each nozzle for
each parameter being measured, for example, for volume, velocity,
trajectory, nozzle bow, and potentially other parameters (2029). As
part of these statistical processes, individual measurements can be
thrown out or used to identify errors. To cite a few examples, if a
droplet measurement is obtained having a value that is so far
removed from other measurements of the same nozzle that the
measurement could represent a firing error; in one implementation,
the system discards this measurement if deviant to a point that
exceeds a statistical error parameter. If no droplet is seen at
all, this could be evidence that the droplet measurement system is
at the wrong nozzle (wrong position), or has a firing waveform
error or that a nozzle under scrutiny is inoperative. Measurement
handling process 2031 is employed to make appropriate adjustments
including taking any new or additional measurements as necessary.
Per numeral 2033, each measurement is advantageously stored and
used to build the pertinent statistical distributions, with the
system then looping to perform measurement for additional droplets
from the same nozzle until sufficient robustness to measurement
error is obtained. This loop (2035) is seen in FIG. 20 to indicate
that this (inner) loop is performed until n droplets are obtained
for each nozzle or each nozzle-waveform pairing. When a
sufficiently robust distribution has been obtained, the system
calculates (stores) the desired statistical parameter(s) (e.g.,
mean, standard distribution for each measure parameter) for the
given nozzle (2037) and executes any appropriate error handling
process 2039 (such as validating the nozzle just measured or
deeming it or an associated waveform inoperative) and then moves on
to the next firing waveform or next nozzle (2041), as appropriate.
That is, with a measurement distribution for a given nozzle or
nozzle-waveform pairing having been completed, the system software
updates an address pointer to the next nozzle to be measured (2041)
and then returns per numeral 2045 to move the droplet measurement
system and to perform the next measurement, as appropriate.
Alternatively, per numeral 2043, if time is up, and the system is
being called upon to print another substrate as part of a
manufacturing line, the system updates any scanning operations
based on newly procured data (if any), stores the "next" nozzle's
address, and returns to substrate printing (2043). In one
embodiment, after such a printing operation is complete, during a
prospective break (or maintenance downtime), the system retrieves
the stored nozzle address and particulars of droplet measurement
and continues where it left off.
[0234] Note that, although not separately called out by FIG. 20,
the depicted measurement process would typically be performed for
each alternate waveform available for use with each nozzle. For
example, if each nozzle had four different piezoelectric drive
waveforms that could be selected, the inner process loop 2035 of
FIG. 20 would generally be repeated 4*n times; if a particular
implementation called for the building of a statistical
distribution based on 24 droplets for each waveform, then there
might be 96 such measurements for one nozzle (24 for each of four
waveforms, with each measurement being used to develop statistical
mean and spread measures for each of droplet velocity, trajectory
and volume, and for estimated nozzle position (e.g., for purposes
of assessing nozzle bow).
[0235] Through the use of precision mechanical systems and droplet
measurement system alignment techniques, the disclosed methodology
permits very high accuracy measurement of individual nozzle
characteristics, including mean droplet metrics for each of the
mentioned parameters (e.g., volume, velocity, trajectory, nozzle
position, and other parameters).
[0236] As should be appreciated, the mentioned techniques
facilitate a high degree of uniformity in manufacturing processes,
especially OLED device manufacture processes, and therefore
enhanced reliability. These techniques in some embodiments are at
least partially facilitated using droplet measurement techniques
that enable precision droplet combinations and Mura suppression
through the use of dissimilar nozzle combinations and droplet
volume combinations. In addition, by providing for control
efficiencies, particularly as to speed of droplet measurement and
the stacking of such measurement against other system processes in
a manner calculated to reduce overall system downtime, the
teachings presented above help provide for a faster, less expensive
manufacturing process designed to provide both flexibility and
precision in the fabrication process.
[0237] While many embodiments described above feature planning of
print processes based on combinations of droplets from respective
nozzles of a print head or print head assembly, this need not be
used for all embodiments; as one non-limiting example, for an
embodiment that makes different (alternate) drive waveforms
available for use by print head nozzles, droplet combinations used
to achieve precise fills can be based on the use of multiple
droplets from a single nozzle, where those droplets represent the
use of different waveforms, each calibrated in advance, and each
associated (for example) with a specific mean droplet volume. Thus,
one alternate embodiment provides a method of producing a thin film
in target regions of a substrate using an ink jet printer having a
print head with nozzles, where the nozzles are to eject respective
droplets of ink, the ink carrying a material that will form a
permanent part of the desired thin film. A droplet measurement
device is used measure multiple droplets from each one of the
nozzles of the print head, for each one of a set of preplanned
drive waveforms available for use by the specific nozzle. A
processor is used to generate printer control data, dependent on a
statistical parameter for each drive waveform for each nozzle;
based on the available data, some drive waveforms are used, some
nozzles are used, and some aren't. The printer control data is of a
nature that it can be used by a downstream process (or optionally,
a printer) to control printing in a manner that utilizes
combinations of droplets created using different waveforms, where
the combinations selected dependent on the statistical parameters.
Naturally, as with the other embodiment described herein,
contemplated implementations also include software operable to
perform the described method, an apparatus having related
components, or a printer, OLED fabrication system or other machine
having related components. These examples are intended to be
non-limiting rather than exhaustive.
[0238] The foregoing description and in the accompanying drawings,
specific terminology and drawing symbols have been set forth to
provide a thorough understanding of the disclosed embodiments. In
some instances, the terminology and symbols may imply specific
details that are not required to practice those embodiments. The
terms "exemplary" and "embodiment" are used to express an example,
not a preference or requirement.
[0239] As indicated, various modifications and changes may be made
to the embodiments presented herein without departing from the
broader spirit and scope of the disclosure. For example, features
or aspects of any of the embodiments may be applied, at least where
practical, in combination with any other of the embodiments or in
place of counterpart features or aspects thereof. Thus, for
example, not all features are shown in each and every drawing and,
for example, a feature or technique shown in accordance with the
embodiment of one drawing should be assumed to be optionally
employable as an element of, or in combination of, features of any
other drawing or embodiment, even if not specifically called out in
the specification. Accordingly, the specification and drawings are
to be regarded in an illustrative rather than a restrictive
sense.
* * * * *